WO2013047610A1 - Actionneur - Google Patents

Actionneur Download PDF

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Publication number
WO2013047610A1
WO2013047610A1 PCT/JP2012/074766 JP2012074766W WO2013047610A1 WO 2013047610 A1 WO2013047610 A1 WO 2013047610A1 JP 2012074766 W JP2012074766 W JP 2012074766W WO 2013047610 A1 WO2013047610 A1 WO 2013047610A1
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WIPO (PCT)
Prior art keywords
phase
coil
core
cores
magnet
Prior art date
Application number
PCT/JP2012/074766
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English (en)
Japanese (ja)
Inventor
柴田　均
谷口　繁
鈴木　浩史
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Thk株式会社
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Publication of WO2013047610A1 publication Critical patent/WO2013047610A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/14—Stator cores with salient poles
    • H02K1/141—Stator cores with salient poles consisting of C-shaped cores
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/17—Stator cores with permanent magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/24—Rotor cores with salient poles ; Variable reluctance rotors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/06—Magnetic cores, or permanent magnets characterised by their skew
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/12—Transversal flux machines
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings

Definitions

  • the present invention relates to an actuator.
  • This application claims priority based on Japanese Patent Application No. 2011-212953 filed in Japan on September 28, 2011, the contents of which are incorporated herein by reference.
  • Patent Document 1 discloses an ultra-precision positioning linear motor.
  • FIG. 11 is a perspective view showing a schematic configuration of a conventional linear motor 100.
  • FIG. 12 is a side view of a conventional linear motor 100.
  • the linear motor 100 has substantially the same configuration as the linear motor disclosed in Patent Document 1.
  • the linear motor 100 includes a plurality of armatures (primary side) having a core 103 and a magnet unit 106 (secondary side) having a permanent magnet.
  • the core 103 is formed with a local portion (gap) where the upper magnetic pole teeth and the lower magnetic pole teeth face each other.
  • the core 103 is formed such that a portion on the upper magnetic pole tooth side and a portion on the lower magnetic pole tooth side extend in opposite directions in the left-right direction when viewed from the traveling direction of the linear motor 100.
  • An IL 104 is wound around each of the cores 103.
  • the armature (core 103) of the conventional linear motor 100 is not a circular outer shape but a complicated ring shape having many bent portions. For this reason, the magnetic field generated in the armature (core 103) has a problem that magnetic saturation occurs because the magnetic path becomes long.
  • the magnet unit 106 is inserted into the gap of the armature (gap of the core 103).
  • the magnet part 106 is a both-ends support structure that supports both ends in the longitudinal direction. For this reason, when the magnet part 106 becomes long in the longitudinal direction, the central part of the magnet part 106 is bent by its own weight, so that it is necessary to increase the gap between the armatures (core 103). Therefore, the conventional linear motor 100 has a problem that the nonlinearity of the thrust with respect to the current appears in the magnetic saturation region and the controllability is deteriorated.
  • An object of the present invention is to provide an actuator capable of efficient and precise positioning.
  • the N pole and the S pole are alternately arranged in the first direction on the first surface and the second surface facing each other, and the first surface
  • the ring-shaped part of the C-shaped core is arranged on one side with respect to the magnet part in a second direction orthogonal to the first direction and parallel to the first surface and the second surface, and , Orthogonal to the first direction and the first surface and the They are staggered on opposite sides with respect to the said magnet portion in a third direction orthogonal to the second surface.
  • the coil corresponds to an annular portion of another adjacent C-shaped core among the annular portions of the C-shaped core.
  • a third embodiment of the actuator according to the present invention is the first or second embodiment according to the present invention, wherein the coil is relative to another adjacent C-shaped core among the ring-shaped portions of the C-shaped core.
  • the ring-shaped portion of the C-shaped core has a ring shape.
  • a fifth embodiment of the actuator according to the present invention is the actuator according to any one of the first to fourth embodiments according to the present invention, wherein the cross-sectional shape of the ring-shaped portion of the C-shaped core is the first end portion. It is the same shape over the two ends.
  • a sixth embodiment of the actuator according to the present invention is the encoder according to any one of the first to fifth embodiments according to the present invention, further comprising an encoder that detects a relative position between the magnet portion and the coil portion. Is disposed in proximity to the thrust generation location by the magnet portion and the coil portion.
  • a large driving force can be obtained by suppressing magnetic saturation, so that efficient and precise positioning can be performed.
  • FIG. 1 It is a figure which shows magnetic flux density distribution of the core of a linear motor.
  • A shows the case of the supply current 5A
  • (b) shows the case of the supply current 10A
  • (c) shows the case of the supply current 20A
  • (d) shows the case of the supply current 30A.
  • (A) shows the case of the supply current 5A
  • (b) shows the case of the supply current 10A
  • (c) shows the case of the supply current 20A
  • (d) shows the case of the supply current 30A.
  • FIG. 1 It is a figure which shows magnetic flux density distribution of the core of the conventional linear motor.
  • A shows the case of the supply current 5A
  • (b) shows the case of the supply current 10A
  • (c) shows the case of the supply current 20A
  • (d) shows the case of the supply current 30A.
  • FIG. 1 is a perspective view showing a schematic configuration of a linear motor 1 according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of a main part of the linear motor 1 with the table 20 removed.
  • FIG. 3A is a front view (partially sectional view) showing a schematic configuration of the linear motor 1.
  • FIG. 3B is a diagram showing the U-phase core 61.
  • the traveling direction of the table 20 is the X direction (first direction), orthogonal to the X direction, the direction parallel to the top surface of the table 20 is the Y direction (third direction), and the direction perpendicular to the top surface of the table 20 is the Z direction (first direction). Bidirectional).
  • the direction indicated by each arrow on the coordinate axis is referred to as a + direction, and the direction opposite to each arrow is referred to as a ⁇ direction.
  • the linear motor (actuator) 1 is a magnetic attractive force cancel type.
  • the linear motor 1 includes a base 10 that is elongated in one direction (X direction) and a table 20 that is slidable with respect to the base 10.
  • a pair of linear guides 50 is provided between the base 10 and the table 20. For this reason, the table 20 can slide smoothly along the longitudinal direction of the linear guide 50 with respect to the base 10.
  • the base 10 includes an elongated rectangular bottom wall portion 11 and a pair of side wall portions 12 provided perpendicular to both ends in the width direction (Y direction) of the bottom wall portion 11.
  • the base 10 is made of, for example, a magnetic material such as steel or a nonmagnetic material such as aluminum.
  • a magnet portion 30 in which a plurality of permanent magnets 33 are arranged in the X direction is disposed at the center of the upper surface of the bottom wall portion 11 of the base 10.
  • Track rails 51 of the linear guide 50 are arranged along the X direction on the upper surfaces of the side wall portions 12 of the base 10.
  • the two track rails 51 are arranged substantially in parallel.
  • a moving block 52 is attached to each track rail 51.
  • the table 20 is made of a nonmagnetic material such as aluminum and is formed in a rectangular plate shape.
  • the moving blocks 52 of the linear guide 50 are attached to the four corners on the lower surface side of the table 20, respectively. Each moving block 52 is attached to the two track rails 51 described above. Accordingly, the table 20 is supported by the four sets of linear guides 50 in a state in which the table 20 can linearly move with respect to the base 10.
  • a coil portion 40 that functions as a three-phase coil is provided on the lower surface of the table 20.
  • the coil unit 40 is disposed in a region surrounded by the four moving blocks 52 on the lower surface of the table 20.
  • the magnet unit 30 includes an elongated thin plate-like magnet plate 31, a bottom plate 32 that fixes the magnet plate 31, and a plurality of permanent magnets 33 attached to both surfaces of the magnet plate 31.
  • the permanent magnet 33 is made of, for example, neodymium.
  • the magnet plate 31 is fixed so as to be orthogonal to the Y direction while being orthogonal to the bottom plate 32 (the bottom wall portion 11 of the base 10).
  • the magnet plate 31 has a longitudinal direction formed along the X direction and a short side direction formed along the Z direction.
  • the magnet plate 31 is inserted into a part (a gap g described later) of the coil portion 40 disposed on the lower surface of the table 20.
  • the magnet plate 31 has a first surface 31a and a second surface 31b that are orthogonal to the Y direction and face each other.
  • N-pole and S-pole permanent magnets 33 are alternately arranged in the X direction.
  • the polarity of the permanent magnet 33 disposed on the first surface 31 a is opposite to the polarity of the permanent magnet 33 disposed on the second surface 31 b facing away from the permanent magnet 33. That is, on the first surface 31a, from the ⁇ X direction to the + X direction (see FIG. 4, from the lower side to the upper side in FIG. 4), the N pole, the S pole, the N pole, the S pole,.
  • the permanent magnets 33 are alternately arranged.
  • permanent magnets 33 of S pole, N pole, S pole, N pole,... are alternately arranged on the second surface 31b from the ⁇ X direction to the + X direction.
  • the permanent magnets 33 arranged on the first surface 31 a and the second surface 31 b of the magnet plate 31 generate a magnetic field inside the coil unit 40 when entering the gap g of the coil unit 40.
  • the magnet unit 30 is different from the both-end support structure employed by the magnet unit 106 of the conventional linear motor 100 (see FIG. 11).
  • the magnet unit 30 employs a full support structure in which the entire area of the end surface of the magnet plate 31 in the ⁇ Z direction (the lower side in FIG. 3A) is supported by the bottom plate 32. For this reason, as for the magnet part 30, the magnet plate 31 does not bend by own weight.
  • FIG. 4 is a cross-sectional view (a view showing a cross section perpendicular to the Z direction) showing a schematic configuration of the coil section 40.
  • FIG. 5 is a top view of the coil unit 40.
  • FIG. 6 is a side view of the coil unit 40.
  • the coil unit 40 is a U, V, W three-phase coil.
  • Each of the three-phase coils has a C-shaped core and a coil wound around the core.
  • the coil unit 40 includes U-phase cores (C-shaped cores) 61, 62, 63, 64, U-phase outer coils (first coils) 66, 68, U-phase inner coils (second coils) 67, 69, V-phase core (C-shaped core) 71, 72, 73, 74, V-phase outer coil (first coil) 76, 78, V-phase inner coil (second coil) 77, 79, W-phase core (C-shaped) Core) 81, 82, 83, 84, W-phase outer coils (first coils) 86, 88, and W-phase inner coils (second coils) 87, 89.
  • the core and coil of each phase of U, V, and W have the same configuration and the same shape. Therefore, the U phase will be mainly described below.
  • the core shape will be described mainly with respect to the U-phase core 61.
  • the material of the U-phase cores 61, 62, 63, 64 is a magnetic material such as silicon steel. As shown in FIGS. 3A to 6, the U-phase cores 61, 62, 63, and 64 have the same shape.
  • the U-phase cores 61, 62, 63, 64 are formed in a C-shaped ring shape and have a gap g that is a gap into which the magnet plate 31 can be inserted.
  • the U-phase cores 61, 62, 63, 64 have a shape that is sandwiched across the magnet part 30.
  • the C-shape means an incomplete annular shape having a cut (gap g) in a part of the circumferential direction of a portion (annular portion 61c) formed in an annular shape.
  • the C-shape includes an annular member having a gap g at one place, such as a U-shape or a horseshoe shape.
  • the ring-shaped part 61c is a part excluding the first end part 61a and the second end part 61b that form the gap g.
  • the U-phase cores 61, 62, 63, and 64 have a bent portion or a straight portion, they are formed in a C-shape that is generally an arc shape.
  • the U-phase cores 61, 62, 63, 64 have a substantially uniform cross-sectional shape (a cross-sectional shape perpendicular to the magnetic path (magnetic flux direction)) in any part of the U-phase cores 61, 62, 63, 64. (Rectangular).
  • All of the U-phase cores 61, 62, 63, 64 are arranged with the gap g directed in the ⁇ Z direction where the magnet part 30 is arranged.
  • the U-phase cores 61, 62, 63, 64 are arranged at equal intervals in the X direction in a state parallel to each other in the Y direction.
  • All of the ring-shaped portions (61c) of the U-phase cores 61, 62, 63, and 64 are arranged toward the + Z direction (the upper side in FIG. 3A) with respect to the magnet portion 30.
  • one end surface (first end portion 61 a) that forms the gap g does not contact the first surface 31 a of the magnet plate 31 and has a constant gap. Opposite each other.
  • the other end surface (second end portion 61 b) that forms the gap g does not contact the second surface 31 b of the magnet plate 31 and has a certain gap. Opposite each other.
  • the ring-shaped portion (61c) of the U-phase core 61, 62, 63, 64 When viewed from the X direction (see FIG. 3A), the ring-shaped portion (61c) of the U-phase core 61, 62, 63, 64 has a center (center of gravity) in the + Y direction or the magnet portion 30 (magnet plate 31). -It is in a position shifted (offset) in the Y direction.
  • the ring-shaped portions (61c) of the U-phase cores 61 and 63 are arranged so as to be offset in the + Y direction (the left side in FIG. 3A).
  • the ring-shaped portions (61c) of the U-phase cores 62 and 64 are arranged so as to be offset in the ⁇ Y direction (the right side in FIG. 3A).
  • the ring-shaped portions (61c) of the U-phase cores 61 and 63 and the U-phase cores 62 and 64 are symmetrical with respect to an axis (not shown) in the Z direction passing through the magnet plate 31 of the magnet portion 30. Placed in.
  • the ring-shaped portions (61c) of the U-phase cores 61, 62, 63, and 64 are alternately arranged in the Y direction with respect to the magnet portion 30, and are arranged in the X direction.
  • the U-phase cores 61, 62, 63, and 64 are not complicated ring shapes that the core 103 of the conventional linear motor 100 has (see FIG. 12).
  • the U-phase cores 61, 62, 63, 64 are formed in a C-shape that is generally arcuate. For this reason, the U-phase cores 61, 62, 63, 64 have a shorter magnetic path than the core 103 of the conventional linear motor 100.
  • the cross-sectional shape of the U-phase cores 61, 62, 63, 64 does not vary greatly depending on the location as in the core 103 of the conventional linear motor 100 (see FIG. 12).
  • the U-phase cores 61, 62, 63, 64 have a substantially uniform cross-sectional shape at any portion.
  • the gap g of the U-phase cores 61, 62, 63, 64 is formed narrower than the gap of the core 103 of the conventional linear motor 100. Therefore, the U-phase cores 61, 62, 63, 64 are less likely to be magnetically saturated compared to the core 103 of the conventional linear motor 100.
  • the U-phase cores 61, 62, 63, 64 have coils (U-phase outer coils 66, 64) in the portion farthest from the magnet unit 30 (magnet plate 31) in the Y direction. 68) is wound.
  • a U-phase outer coil (coil, first coil) 66 is wound around a portion (region) farthest from the magnet plate 31 in the + Y direction.
  • the U-phase outer side of the annular region (61c) of the U-phase cores 61 and 63 is not overlapped with the annular region (61c) of the adjacent U-phase cores 62 and 64.
  • a coil 66 is wound.
  • One U-phase outer coil 66 is wound around the pair of U-phase cores 61 and 63.
  • a U-phase outer coil (coil, first coil) 68 is wound around a portion farthest from the magnet plate 31 in the ⁇ Y direction.
  • the U-phase outer coil 68 is wound on the first region 61d that does not overlap the annular portion (61c) of the adjacent U-phase cores 61 and 63 among the annular portions (61c) of the U-phase cores 62 and 64.
  • One U-phase outer coil 68 is wound around the pair of U-phase cores 62 and 64.
  • Coils (U-phase inner coils 67 and 69) are wound around the U-phase cores 61, 62, 63, and 64 in regions (regions) close to the magnet plate 31 in the Y direction.
  • a U-phase inner coil (coil, second coil) 67 is wound at a portion farthest in the ⁇ Y direction from the U-phase outer coil 66.
  • the U-phase inner coil 67 is formed in the second region 61 e that does not overlap the annular portion (61 c) of the adjacent U-phase cores 62, 64 among the annular portions 61 c of the U-phase cores 61, 63. Is wound.
  • One U-phase inner coil 67 is wound around the pair of U-phase cores 61 and 63.
  • a U-phase inner coil (coil, second coil) 69 is wound at a position farthest from the U-phase outer coil 68 in the + Y direction.
  • the U-phase inner coil 69 is wound around the second region 61e that does not overlap the annular portion (61c) of the adjacent U-phase cores 61 and 63 among the annular portions (61c) of the U-phase cores 62 and 64.
  • One U-phase inner coil 69 is wound around the pair of U-phase cores 62 and 64.
  • the U-phase inner coils 67 and 69 are closer to the magnet unit 30 than the U-phase outer coils 66 and 68.
  • the first region 61d is a region away from the magnet unit 30 among the two regions that do not overlap the adjacent U-phase core in the ring-shaped portion 61c.
  • the second region 61e is a region adjacent to the magnet unit 30 among the two regions that do not overlap the adjacent U-phase core in the annular portion 61c.
  • the number of coil turns of the U-phase outer coils 66 and 68 and the U-phase inner coils 67 and 69 is about half that of the U-phase outer coils 66 and 68. It is set as follows.
  • FIG. 7 is a circuit diagram showing a connection mode of the outer and inner coils of each of U, V, and W phases.
  • a U-phase outer coil 66 and a U-phase inner coil 67 wound around the same core pair (U-phase cores 61 and 63) are connected in series.
  • the U-phase outer coil 68 and the U-phase inner coil 69 wound around another identical core pair (U-phase cores 62 and 64) are connected in series.
  • the series connection circuit of the U-phase outer coil 66 and the U-phase inner coil 67 and the series connection circuit of the U-phase outer coil 68 and the U-phase inner coil 69 are connected in series (U-phase series circuit).
  • a three-phase alternating current is supplied to the U-phase series circuit.
  • an outer coil (V phase outer coil 76, W phase outer coil 86) and an inner coil (V) wound around the same core pair (V phase cores 71 and 73, W phase cores 81 and 83).
  • a phase inner coil 77 and a W phase inner coil 87) are connected in series.
  • a phase inner coil 89) is connected in series. Further, two series connection circuits are connected in series (V phase series circuit, W phase series circuit). A three-phase alternating current is also supplied to the V-phase series circuit and the W-phase series circuit.
  • FIG. 8 is a circuit diagram showing another connection mode of the outer and inner coils of each phase of U, V, and W.
  • a U-phase outer coil 66 and a U-phase inner coil 67 wound around the same core pair (U-phase cores 61 and 63) are connected in series.
  • the U-phase outer coil 68 and the U-phase inner coil 69 wound around another identical core pair (U-phase cores 62 and 64) are connected in series.
  • the series connection circuit of the U-phase outer coil 66 and the U-phase inner coil 67 and the series connection circuit of the U-phase outer coil 68 and the U-phase inner coil 69 are connected in parallel (U-phase parallel circuit).
  • a three-phase alternating current is supplied to the U-phase parallel circuit.
  • an outer coil (V phase outer coil 76, W phase outer coil 86) and an inner coil (V) wound around the same core pair (V phase cores 71 and 73, W phase cores 81 and 83).
  • a phase inner coil 77 and a W phase inner coil 87) are connected in series.
  • a coil 89) is connected in series. Further, two series connection circuits are connected in parallel (V phase parallel circuit, W phase parallel circuit). A three-phase alternating current is also supplied to the V-phase parallel circuit and the W-phase parallel circuit.
  • FIG. 9 is a diagram showing the magnetic flux density distribution of the U-phase cores 61 and 62 of the linear motor 1.
  • FIG. 10 is a diagram showing the magnetic flux density distribution of the U-phase cores 61 and 62 when the inner coils 67 and 69 are not provided as a reference example.
  • FIG. 13 is a diagram showing the magnetic flux density distribution of the core 103 of the conventional linear motor 100.
  • 9 and 10 are views of the U-phase cores 61 and 62 viewed from the X direction, and only the U-phase cores 61 and 62 are shown.
  • FIG. 13 is a view of the U-phase core 103 as viewed from the X direction, and shows only the U-phase core 103.
  • the supply current to the coil unit 40 is increased in the order of (a) to (d).
  • (A) shows the supply current 5A
  • (b) shows the supply current 10A
  • (c) shows the supply current 20A
  • (d) shows the supply current 30A.
  • the supply current to the coil section is increased in the order of (a) to (d).
  • (A) shows the case of the supply current 5A
  • (b) shows the case of the supply current 10A
  • (c) shows the case of the supply current 20A
  • (d) shows the case of the supply current 30A.
  • the U-phase cores 61 and 62 have a uniform magnetic flux density as a whole, although there are some portions where the magnetic flux density is slightly low in the vicinity of the gap g.
  • the U-phase cores 61 and 62 have a high magnetic flux density and are not easily magnetically saturated.
  • the magnetic flux density is uniform as a whole even when the current value of the supply current is changed.
  • the U-phase cores 61 and 62 have a uniform magnetic flux density as a whole, although there are some portions where the magnetic flux density is slightly low in the vicinity of the gap g.
  • the U-phase cores 61 and 62 have a high magnetic flux density and are not easily magnetically saturated.
  • the magnetic flux density is more uniform in the case of FIG. 9 than the case of FIG. 10 because the U-phase inner coils 67 and 69 are present, and the magnetic flux density is more uniform. high.
  • the linear motor 1 has the following features and effects as compared to the conventional linear motor 100.
  • the magnet plate 31 on which the permanent magnets 33 are arranged is fixed to the bottom plate 32, so that the magnet plate 31 does not bend due to its own weight. For this reason, the gap between the core of each phase and the magnet portion can be reduced. Therefore, the linear motor 1 can effectively use the magnetic flux.
  • the linear motor 1 there is no restriction
  • the core (annular portion) of each phase has a substantially circular C shape, so that the magnetic path inside the core is shortened.
  • the cross-sectional shape of the core (annular part) of each phase is almost uniform in any part.
  • FIG. 14A is a perspective view showing an installation mode of the linear encoder.
  • FIG. 14B is a front view showing an installation mode of the linear encoder.
  • the linear motor 1 includes a linear encoder 90 in order to measure the position, speed, and the like of the table 20 (coil unit 40) in the X direction with respect to the base 10 (magnet unit 30).
  • the linear encoder 90 includes a linear scale 91 disposed on the base 10 and a detector 92 disposed on the table 20.
  • the linear scale 91 is disposed at the upper end of the magnet plate 31.
  • An upper end plate 35 that is parallel to the XY plane and extends in the X direction is disposed at the upper end of the magnet plate 31.
  • the linear scale 91 is installed on the upper surface of the upper end plate 35.
  • the detector 92 is arranged with respect to the end surface of the table 20 in the X direction via the detector fixture 25.
  • the installation position of the linear encoder 90 substantially coincides with (is close to) the thrust generation location (gap g) of the linear motor 1. Therefore, the relative position of the table 20 (coil part 40) with respect to the base 10 (magnet part 30) can be detected accurately. If the linear encoder is arranged at a location away from the thrust generation location of the linear motor, a position detection error occurs due to mechanical distortion or the like, causing a control delay. For this reason, the linear motor may vibrate and precise positioning may be difficult. On the other hand, in the linear motor 1, since the installation position of the linear encoder 90 is substantially matched (close) to the thrust generation location, almost no position detection error occurs.
  • the control vibration in the linear motor 1 is suppressed, and the linear motor 1 can be accurately positioned.
  • the mechanical rigidity of the magnet part 30 becomes high. Accordingly, mechanical vibrations in the magnet unit 30 and the linear scale 91 are suppressed, and the linear motor 1 can be accurately positioned.
  • the present invention is not limited to this. It may be the case where only the outer coil is provided for one core, or the case where only the inner coil (auxiliary coil) is provided for one core.
  • the linear motor 1 is not limited to a three-phase type, and can be applied to a two-phase type, for example.
  • the number of cores of each phase of the coil unit 40 is not limited to four, and any number of cores can be used.
  • the cross-sectional shape of the core of each phase of the coil unit 40 is not limited to a rectangle.
  • it may be polygonal, circular or elliptical.
  • the cross-sectional shape of the core may be any shape as long as it is a substantially uniform cross-sectional shape.
  • W-phase outer coil (coil, first coil), 77, 79: W-phase inner coil (coil, second coil), 81, 82, 83, 84 ... V-phase core (C-shaped core), 86, 88 ... W-phase outer coil (coil, first coil) Le), 87, 89 ... W-phase inner coil (coil, a second coil), 90 ... linear encoder (encoder)

Abstract

L'invention porte sur un actionneur qui comprend : des unités d'aimants telles que les pôles N et les pôles S sont disposées alternativement orientées dans une première direction respectivement au niveau de premières surfaces et de secondes surfaces qui se suivent ; et une unité de bobine comprenant une pluralité de noyaux en C dont les premières extrémités font face aux premières surfaces et les secondes extrémités font face aux secondes surfaces, et une pluralité de bobines enroulées autour de la pluralité de noyau en C. La pluralité de noyaux en C sont alignés orientés dans la première direction, et disposés vers un côté dans une deuxième direction avec les unités d'aimants comme ligne de base, et sont disposés éloignés l'un de l'autre des deux côtés dans une troisième direction avec les unités d'aimants comme ligne de base.
PCT/JP2012/074766 2011-09-28 2012-09-26 Actionneur WO2013047610A1 (fr)

Applications Claiming Priority (2)

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JP2011212953 2011-09-28
JP2011-212953 2011-09-28

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WO2013047610A1 true WO2013047610A1 (fr) 2013-04-04

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WO2014181843A1 (fr) * 2013-05-09 2014-11-13 Thk株式会社 Dispositif de codeur linéaire et procédé de détection de position de référence
WO2016132465A1 (fr) * 2015-02-18 2016-08-25 株式会社日立製作所 Moteur linéaire
TWI577112B (zh) * 2016-07-15 2017-04-01 台達電子工業股份有限公司 直旋式致動器
EP3859956A4 (fr) * 2018-12-04 2021-11-17 Gree Electric Appliances, Inc. of Zhuhai Moteur linéaire

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WO2014181843A1 (fr) * 2013-05-09 2014-11-13 Thk株式会社 Dispositif de codeur linéaire et procédé de détection de position de référence
JP2014219296A (ja) * 2013-05-09 2014-11-20 Thk株式会社 リニアエンコーダ装置、及び基準位置検出方法
CN105190250A (zh) * 2013-05-09 2015-12-23 Thk株式会社 线性编码器装置以及基准位置检测方法
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WO2016132465A1 (fr) * 2015-02-18 2016-08-25 株式会社日立製作所 Moteur linéaire
JPWO2016132465A1 (ja) * 2015-02-18 2017-08-31 株式会社日立製作所 リニアモータ
EP3261236A4 (fr) * 2015-02-18 2018-10-17 Hitachi, Ltd. Moteur linéaire
TWI577112B (zh) * 2016-07-15 2017-04-01 台達電子工業股份有限公司 直旋式致動器
EP3859956A4 (fr) * 2018-12-04 2021-11-17 Gree Electric Appliances, Inc. of Zhuhai Moteur linéaire
US11962213B2 (en) 2018-12-04 2024-04-16 Gree Electric Appliances, Inc. Of Zhuhai Linear motor

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