WO2016002975A8 - 保護膜形成用複合シート - Google Patents

保護膜形成用複合シート Download PDF

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Publication number
WO2016002975A8
WO2016002975A8 PCT/JP2015/075100 JP2015075100W WO2016002975A8 WO 2016002975 A8 WO2016002975 A8 WO 2016002975A8 JP 2015075100 W JP2015075100 W JP 2015075100W WO 2016002975 A8 WO2016002975 A8 WO 2016002975A8
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
protective film
composite sheet
forming protective
adhesive layer
Prior art date
Application number
PCT/JP2015/075100
Other languages
English (en)
French (fr)
Other versions
WO2016002975A1 (ja
Inventor
尚哉 佐伯
裕之 米山
山本　大輔
力也 小橋
洋一 稲男
Original Assignee
リンテック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2014138087A external-priority patent/JP6391329B2/ja
Priority claimed from JP2015127417A external-priority patent/JP2017008255A/ja
Application filed by リンテック株式会社 filed Critical リンテック株式会社
Priority to SG11201610546VA priority Critical patent/SG11201610546VA/en
Priority to KR1020167034823A priority patent/KR102398753B1/ko
Priority to CN201580032859.3A priority patent/CN106489189B/zh
Publication of WO2016002975A1 publication Critical patent/WO2016002975A1/ja
Publication of WO2016002975A8 publication Critical patent/WO2016002975A8/ja
Priority to PH12016502492A priority patent/PH12016502492A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00—Adhesives based on unspecified macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Adhesive Tapes (AREA)
  • Laminated Bodies (AREA)
  • Dicing (AREA)

Abstract

　本発明は、基材の一方の面側に粘着剤層が積層されてなる粘着シートと、粘着シートの粘着剤層側に積層された保護膜形成フィルムとを備えた保護膜形成用複合シートであって、前記基材に０．１ｇ／ｍｍの荷重をかけて１３０℃で２時間加熱し２３℃まで冷却した場合における、前記基材の加熱前に対する加熱後のＭＤ方向およびＣＤ方向の伸縮率が、ともに９５～１０３％であり、前記基材の２３℃におけるＭＤ方向およびＣＤ方向の引張弾性率が、ともに１００～７００ＭＰａである保護膜形成用複合シートに関する。
PCT/JP2015/075100 2014-07-03 2015-09-03 保護膜形成用複合シート WO2016002975A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SG11201610546VA SG11201610546VA (en) 2014-07-03 2015-09-03 Composite sheet for forming protective film
KR1020167034823A KR102398753B1 (ko) 2015-06-25 2015-09-03 보호막 형성용 복합 시트
CN201580032859.3A CN106489189B (zh) 2015-06-25 2015-09-03 保护膜形成用复合片
PH12016502492A PH12016502492A1 (en) 2014-07-03 2016-12-14 Composite sheet for forming protective film

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014138087A JP6391329B2 (ja) 2014-07-03 2014-07-03 保護膜形成用複合シート
JP2014-138087 2014-07-03
JP2015127417A JP2017008255A (ja) 2015-06-25 2015-06-25 保護膜形成用複合シート、保護膜付きチップ、及び保護膜付きチップの製造方法
JP2015-127417 2015-06-25

Publications (2)

Publication Number Publication Date
WO2016002975A1 WO2016002975A1 (ja) 2016-01-07
WO2016002975A8 true WO2016002975A8 (ja) 2016-03-31

Family

ID=55019495

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/075100 WO2016002975A1 (ja) 2014-07-03 2015-09-03 保護膜形成用複合シート

Country Status (3)

Country Link
PH (1) PH12016502492A1 (ja)
SG (1) SG11201610546VA (ja)
WO (1) WO2016002975A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020110548A1 (ja) * 2018-11-26 2020-06-04 リンテック株式会社 プラズマダイシング用ダイシングシート
WO2020116281A1 (ja) * 2018-12-05 2020-06-11 リンテック株式会社 保護膜形成用複合シート、及び半導体チップの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003138228A (ja) * 2001-11-02 2003-05-14 Nitto Denko Corp 半導体ウエハ保護用粘着シート
JP2005203749A (ja) * 2003-12-15 2005-07-28 Furukawa Electric Co Ltd:The ウェハ加工用テープおよびその製造方法
JP5457703B2 (ja) * 2008-03-31 2014-04-02 三井化学株式会社 ダイシングフィルム
JP5865045B2 (ja) * 2011-12-07 2016-02-17 リンテック株式会社 保護膜形成層付ダイシングシートおよびチップの製造方法

Also Published As

Publication number Publication date
WO2016002975A1 (ja) 2016-01-07
SG11201610546VA (en) 2018-01-30
PH12016502492A1 (en) 2017-03-22

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