WO2015194479A1 - Module de réglage de fréquence de résonance et capteur mems - Google Patents

Module de réglage de fréquence de résonance et capteur mems Download PDF

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Publication number
WO2015194479A1
WO2015194479A1 PCT/JP2015/067042 JP2015067042W WO2015194479A1 WO 2015194479 A1 WO2015194479 A1 WO 2015194479A1 JP 2015067042 W JP2015067042 W JP 2015067042W WO 2015194479 A1 WO2015194479 A1 WO 2015194479A1
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WIPO (PCT)
Prior art keywords
movable electrode
resonance frequency
electrode
adjustment module
movable
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PCT/JP2015/067042
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English (en)
Japanese (ja)
Inventor
夕輝 植屋
威 岡見
潤弥 松岡
崇 溝田
辻　信昭
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株式会社村田製作所
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Publication of WO2015194479A1 publication Critical patent/WO2015194479A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5769—Manufacturing; Mounting; Housings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Definitions

  • the present invention relates to a resonance frequency adjustment module and a MEMS sensor.
  • MEMS Micro Electro Mechanical Systems
  • the above-described gyro sensor includes a vibration driving module supported on a substrate extending in the XY direction so as to vibrate in the X direction, a moving body connected to the vibration driving module, and the moving body in the Y direction.
  • a capacitance change detection module that is supported so as to be elastically movable and detects the amount of movement in the Y direction is provided.
  • the movable body and the movable electrode of the capacitance change detection module supported by the movable body are always reciprocated in the X direction, and the gyro sensor is perpendicular to the XY plane.
  • a Coriolis force acting on the movable electrode when it is rotated around an axis in the Z direction is detected as a movement of the movable electrode in the Y direction.
  • the movable electrode of the capacitance change detection module moves not only by the Coriolis force acting by the angular velocity (or rotational speed) of the gyro sensor but also by the acceleration in the Y direction of the gyro sensor.
  • the gyro sensor includes an elastic body that supports the movable body so as to be movable in the X direction. And the vibration of the X direction of a mobile body and an electrostatic capacitance change detection module is controlled by the resonant frequency decided by the spring constant and mass of this elastic body.
  • a resonance frequency adjustment module having an electrical spring structure has been proposed so that the resonance frequency can be controlled by adjusting the spring constant of the elastic body.
  • a resonance frequency adjustment module as shown in FIG. 5, a resonance frequency adjustment module 51 having a pair of opposed electrodes 52 and 53 capable of adjusting a voltage difference has been proposed (conventional example 1).
  • a resonance frequency adjustment module 61 in which a pair of comb-like electrodes 62 and 63 are arranged so as to fit each other has also been proposed (conventional example 2).
  • the resonance frequency adjustment module 51 of the conventional example 1 when used in a state where air is present, the air in the space between the electrodes 52 and 53 is compressed when the pair of electrodes 52 and 53 moves in the approaching direction. .
  • the resonance frequency adjustment module 51 of the conventional example 1 has a disadvantage that the air resistance (damping) due to the compression of air is large, the Q value (Quality Factor) is reduced and the amplitude is lowered, and the movement is increased.
  • the distance between the electrodes 52 and 53 becomes too close so-called pull-in.
  • the resonance frequency adjusting module 51 of the conventional example 1 it is necessary to increase the capacitance in order to increase the adjustment range of the spring constant.
  • the electrodes 52 and 53 should be increased or the number thereof should be increased. In this case, however, the reduction in the Q value due to the air resistance as described above becomes significant.
  • one comb-like electrode 63 is provided in a step shape so as to obtain a predetermined spring constant without affecting the movement of the movable electrode 62, and the Pull-in
  • This invention is made
  • the resonance frequency adjusting module constitutes a MEMS sensor for detecting an angular velocity, and is arranged so as to be movable, and extends along the moving direction of the movable electrode along the moving direction of the movable electrode.
  • a plurality of fixed electrodes arranged in a row, and an elastic body that supports the movable electrode so as to be movable in the moving direction.
  • the surface of the movable electrode facing the plurality of fixed electrodes has crests and troughs that are alternately arranged in the moving direction, and each of the plurality of fixed electrodes is a crest or a crest of the movable electrode. It arrange
  • the resonance frequency adjusting module according to the present invention has a crest and a trough where opposed surfaces of the movable electrode facing the fixed electrode are alternately arranged in the moving direction, and each fixed electrode is one crest or trough of the movable electrode. It arrange
  • the resonance frequency adjusting module since the opposed surfaces of the movable electrode and the fixed electrode are inclined with respect to the moving direction, the volume change between the opposed surfaces due to the movement of the movable electrode is small, and the relative air Resistance is small.
  • each fixed electrode faces one peak or valley of the movable electrode, so there is only one inflection point on the opposite surface of the fixed electrode, and the movable electrode is movable. Since the electrical characteristic between the electrodes is close to that of a parallel plate, the linearity of the electrostatic attractive force between the movable electrode and the fixed electrode with respect to the amount of movement of the movable electrode becomes relatively high.
  • the peak and the valley are formed at a substantially constant pitch, and the average pitch of the peak or the valley and the plurality of fixed electrodes are The difference from the average length in the moving direction is preferably 0.5 times or more and 1.2 times or less the average distance between the movable electrode and the plurality of fixed electrodes in the moving direction.
  • the difference between the average pitch of the peaks or valleys and the average length of the plurality of fixed electrodes in the moving direction is within the above range, the electrostatic capacitance between the movable electrode and the fixed electrode with respect to the moving amount of the movable electrode.
  • the linearity of the attractive force can be further improved.
  • the pitch between the peaks and valleys is substantially constant means that the variation in the distance between the apexes of the peaks and the distance between the bottom points of the valleys is within 10%.
  • each of the plurality of fixed electrodes may be opposed to the valley of the movable electrode. Since the fixed electrode faces the valley of the movable electrode in this way, the width at the central portion in the moving direction of the fixed electrode can be maximized, so that the fixed electrode can be fixed and wired easily.
  • an average inclination angle with respect to the moving direction of the facing surface of the movable electrode is 2 degrees or more and 12 degrees or less.
  • a relatively large stroke (amplitude) can be obtained by setting the average inclination angle with respect to the moving direction of the opposing surface of the movable electrode within the above range.
  • the MEMS sensor according to the present invention includes the resonance frequency adjusting module according to the present invention.
  • the MEMS sensor according to the present invention includes a resonant frequency adjustment module according to the present invention having high area efficiency, small air resistance, and high linearity, and thus is small and highly reliable.
  • the resonance frequency adjusting module and the MEMS sensor according to the present invention have high area efficiency and low air resistance.
  • FIG. 1 It is a schematic diagram which shows the resonant frequency adjustment module in 1st Embodiment of this invention. It is a schematic diagram which shows the resonance frequency adjustment module in 2nd Embodiment of this invention. It is a schematic diagram which shows the resonance frequency adjustment module in 3rd Embodiment of this invention. It is a schematic diagram which shows the resonance frequency adjustment module in 4th Embodiment of this invention. It is a schematic diagram which shows the resonant frequency adjustment module which concerns on the prior art example 1. FIG. It is a schematic diagram which shows the resonant frequency adjustment module which concerns on the prior art example 2. FIG.
  • a resonance frequency adjustment module 1 shown in FIG. 1 is a resonance frequency adjustment module that constitutes a MEMS sensor that detects angular velocity.
  • the resonance frequency adjusting module 1 is movably arranged, and a plurality of movable electrodes 2 extending in the movement direction (X direction), and a plurality of fixed electrodes 3 arranged along the movement direction X of the movable electrode 2.
  • an elastic body 4 that supports the movable electrode 2 so as to be movable in the movement direction X.
  • the opposed surface 20 of the movable electrode 2 to the fixed electrode 3 has crests 21 and troughs 22 arranged alternately in the movement direction X at a substantially constant pitch and inclination angle.
  • the opposing surface 20 is inclined in one direction with respect to the moving direction X (the normal line is inclined to the right side of the paper surface) and the second inclined surface is inclined to the other side (the normal line is inclined to the left side of the paper surface).
  • the inclined portions 24 are alternately provided.
  • the plurality of fixed electrodes 3 are arranged so as to face one trough portion 22 of the movable electrode 2.
  • the opposed surface 30 of the fixed electrode 3 to the movable electrode 2 includes a first inclined portion 31 that faces the first inclined portion 23 of the opposing surface 20 of the movable electrode 2 and a second inclined portion 32 that faces the second inclined portion 24.
  • the plurality of movable electrodes 2 are arranged in the Y direction orthogonal to the moving direction X, and the movable electrode 2 on the inner side in the Y direction includes opposing surfaces 20 having crests 21 and troughs 22 on both sides in the Y direction.
  • the peak portions 21 and valley portions 22 of the plurality of movable electrodes 2 arranged in the Y direction have the same center position in the movement direction X.
  • Each fixed electrode 3 is arranged in a row between the plurality of movable electrodes 2. That is, the fixed electrodes 3 are arranged in a plurality of rows in the Y direction. Each fixed electrode 3 has opposing surfaces 30 that face one trough portion 22 of the movable electrode 2 on both sides in the Y direction, and has a symmetrical shape in the moving direction X.
  • the movable electrode 2 is integrally held by the support member 5 and fixed to the moving body (not shown) of the MEMS sensor via the elastic body 4.
  • the fixed electrode 3 is fixedly fixed to a substrate (not shown) of the MEMS sensor.
  • FIG. 1 shows a weight 6 conceptually representing the mass of the moving part including the movable electrode 2 of the resonance frequency adjustment module 1.
  • electrostatic attractive force acts between the opposed surfaces 20 and 30 of the movable electrode 2 and the fixed electrode 3 by applying a potential difference between the movable electrode 2 and the fixed electrode 3.
  • the apparent spring constant of the resonance frequency adjusting module 1 can be adjusted.
  • the material of the movable electrode 2 and the fixed electrode 3 is not particularly limited, but for example, silicon can be used.
  • the average thickness of the movable electrode 2 and the fixed electrode 3 (the dimension in the depth direction in FIG. 1) is not particularly limited, but may be, for example, 20 ⁇ m or more and 50 ⁇ m or less. Further, the average thickness of the movable electrode 2 and the fixed electrode 3 may be further reduced as long as the manufacturing process allows.
  • the formation method of the movable electrode 2 and the fixed electrode 3 is not particularly limited, and for example, a method of selectively etching by forming a resist pattern on the surface of a plate-like material by a photolithography technique can be applied.
  • the lower limit of the average inclination angle of the opposed surface 20 of the movable electrode 2 and the opposed surface 30 of the fixed electrode 3 with respect to the moving direction X of the movable electrode 2 is preferably 2 degrees and more preferably 4 degrees.
  • the upper limit of the average inclination angle of the facing surface 20 of the movable electrode 2 and the facing surface 30 of the fixed electrode 3 with respect to the moving direction X of the movable electrode 2 is preferably 12 degrees, and more preferably 8 degrees.
  • the average inclination angle of the opposing surface 20 of the movable electrode 2 and the opposing surface 30 of the fixed electrode 3 with respect to the moving direction X of the movable electrode 2 is less than the lower limit, the distance between the opposing surfaces 20 and 30 with respect to the moving amount of the movable electrode. There is a possibility that the area efficiency of the resonance frequency adjustment module 1 is lowered. Further, when the average inclination angle of the opposed surface 20 of the movable electrode 2 and the opposed surface 30 of the fixed electrode 3 with respect to the moving direction X of the movable electrode 2 exceeds the upper limit, the movable range of the movable electrode 2 is narrowed, and the resonance frequency is reduced. There is a possibility that the amplitude of the adjustment module 1 becomes insufficient.
  • each average pitch (average interval of peak portions 21 and average interval of valley portions 22) of peak portion 21 and valley portion 22 the maximum movement amount in use from the reference position of movable electrode 2 is 1.5. Double is preferable, and double is more preferable.
  • the upper limit of the average pitch of the peak portion 21 and the valley portion 22 is preferably four times the maximum movement amount in use from the reference position of the movable electrode 2, and more preferably three times. When the average pitch of each of the peak portion 21 and the valley portion 22 is less than the lower limit, the rate of change of the interval between the opposing surfaces 20 and 30 increases, and the distance between the movable electrode 2 and the fixed electrode 3 with respect to the movement amount of the movable electrode 2 is increased.
  • the lower limit of the average distance between the facing surface 20 of the movable electrode 2 and the facing surface 30 of the fixed electrode 3 is preferably 0.5 ⁇ m and more preferably 1 ⁇ m.
  • the upper limit of the average distance between the facing surface 20 of the movable electrode 2 and the facing surface 30 of the fixed electrode 3 is preferably 3 ⁇ m, and more preferably 2.5 ⁇ m.
  • the first inclined portion 23 of the facing surface 20 of the movable electrode 2 and the first surface of the facing surface 30 of the fixed electrode 3 increases, and the movable electrode 2 moves. There is a possibility that the linearity of the electrostatic attractive force with respect to the quantity becomes insufficient.
  • the “average distance” between the facing surface 20 and the facing surface 30 means the average distance in the bisector direction between the normal line of the facing surface 20 and the normal line of the facing surface 30.
  • the lower limit of the difference between the average pitch of the crests 21 or troughs 22 of the opposing surface 20 of the movable electrode 2 and the average length of the plurality of fixed electrodes 3 in the movement direction X is the movable electrode 2 and the plurality of fixed in the movement direction X. 0.5 times the average distance from the electrode 3 is preferable, and 0.6 times is more preferable.
  • the upper limit of the difference between the average pitch of the crests 21 or troughs 22 of the opposed surface 20 of the movable electrode 2 and the average length in the movement direction X of the plurality of fixed electrodes 3 1.2 times the average distance from the fixed electrode 3 is preferably 1.0 times.
  • the movable electrode 2 When the difference between the average pitch of the crests 21 or troughs 22 of the opposed surface 20 of the movable electrode 2 and the average length in the moving direction X of the plurality of fixed electrodes 3 is less than the lower limit, the movable electrode 2 is moved to the reference position (moving The linearity of the electrostatic attractive force with respect to the movement amount of the movable electrode 2 becomes insufficient due to the influence of the peak portion 21 or the valley portion 22 of the facing surface 20 of the movable electrode 2 that does not face the fixed electrode 3 in a state of zero amount). There is a fear.
  • the resonance frequency adjustment module 1 has crests 21 and troughs 22 in which the opposed surfaces 20 of the movable electrode 2 are alternately arranged in the movement direction X, and each fixed electrode 3 is one trough of the movable electrode 2. Since the movable electrode 2 is disposed so as to face the portion 22, one of the distance between the first inclined portions 23 and 31 and the distance between the second inclined portions 24 and 32 increases and the other decreases due to the movement of the movable electrode 2. . Thereby, the electrostatic attractive force acting between the movable electrode 2 and the fixed electrode 3 acts in a direction in which the movable electrode 2 is further moved in the movement direction X, and the force increases as the movement amount increases.
  • the resonance frequency adjusting module 1 can adjust the resonance frequency of the weight 6 including the movable electrode 2 by partially canceling the restoring force of the elastic body 4 and changing the apparent spring constant. Further, the resonance frequency adjusting module 1 has a higher area efficiency than a conventional comb-shaped one.
  • the resonance frequency adjusting module 1 since the opposing surfaces 20, 30 of the movable electrode 2 and the fixed electrode 3 are inclined with respect to the movement direction X, the volume change between the opposing surfaces 20, 30 due to the movement of the movable electrode. Is small and air resistance is small.
  • each fixed electrode 3 faces one valley 22 of the movable electrode 2, so there is only one inflection point on the facing surface 30 of the fixed electrode 3. Therefore, the linearity of the electrostatic attractive force between the movable electrode 2 and the fixed electrode 3 with respect to the amount of movement of the movable electrode 2 is relatively high.
  • the fixed electrode 3 faces the trough portion 22 of the movable electrode 2, the width at the central portion in the moving direction X of the fixed electrode 3 can be maximized, so that the fixed electrode 3 can be easily fixed and wired by, for example, a via hole. It becomes.
  • the resonance frequency adjusting module 1 is used for a gyro sensor (MEMS sensor) as described above.
  • This gyro sensor is, for example, a movable body that is supported on a substrate extending in the XY direction so as to be movable in the X direction, and that the movable electrode for detection is movable in the Y direction.
  • the two electrostatic capacity change detection modules supported by the sensor and a vibration drive module that reciprocates the moving body in the X direction can be used.
  • the fixed electrode 3 is fixed to the substrate, and the movable electrode 2 is fixed to the moving body.
  • the apparent spring constant can be adjusted to a desired value by adjusting the potential difference between the movable electrode 2 and the fixed electrode 3. For this reason, the resonant frequency of a mobile body and an electrostatic capacitance change detection module can be controlled easily and reliably.
  • a resonance frequency adjustment module 1a shown in FIG. 2 is a resonance frequency adjustment module that constitutes a MEMS sensor that detects angular velocity.
  • the resonance frequency adjusting module 1a is movably arranged, and a plurality of movable electrodes 2a extending in the movement direction (X direction), and a plurality of fixed electrodes 3a arranged along the movement direction X of the movable electrode 2a.
  • an elastic body 4 that supports the movable electrode 2a so as to be movable in the movement direction X.
  • the opposed surface 20 of the movable electrode 2a to the fixed electrode 3a has crests 21 and troughs 22 arranged alternately in the movement direction X at a substantially constant pitch and inclination angle.
  • the plurality of fixed electrodes 3a are disposed so as to face the crests 21 of the movable electrode 2, respectively.
  • the opposed surface 30 of the fixed electrode 3a to the movable electrode 2a includes a first inclined portion 31 that faces the first inclined portion 23 of the opposed surface 20 of the movable electrode 2a, and a second inclined surface that is inclined opposite to the first inclined portion 23. And a second inclined portion 32 facing the inclined portion 24.
  • the width of the fixed electrode 3a in the Y direction perpendicular to the moving direction X is narrowed toward the center of the moving direction X.
  • the movable electrode 2a is integrally held by the support member 5 and fixed to a moving body (not shown) of the MEMS sensor via the elastic body 4.
  • the fixed electrode 3a is fixed on a substrate (not shown) of the MEMS sensor.
  • FIG. 2 shows a weight 6 conceptually representing the mass of the moving part including the movable electrode 2a of the resonance frequency adjusting module 1a.
  • the resonance frequency adjusting module 1a gives a potential difference between the movable electrode 2a and the fixed electrode 3a, an electrostatic attractive force (Coulomb force) acts between the opposing surfaces 20 and 30 of the movable electrode 2a and the fixed electrode 3a.
  • an electrostatic attractive force acts between the opposing surfaces 20 and 30 of the movable electrode 2a and the fixed electrode 3a.
  • the material and manufacturing method of the movable electrode 2a and the fixed electrode 3a in the resonance frequency adjustment module 1a shown in FIG. 2 are the same as the material and manufacturing method of the movable electrode 2 and the fixed electrode 3 in the resonance frequency adjustment module 1 shown in FIG. .
  • a resonance frequency adjustment module 1b shown in FIG. 3 is a resonance frequency adjustment module constituting a MEMS sensor that detects angular velocity.
  • the resonance frequency adjusting module 1b is movably arranged, and a plurality of movable electrodes 2b extending in the movement direction (X direction), and a plurality of fixed electrodes 3 arranged along the movement direction X of the movable electrode 2b. , 3a and an elastic body 4 that supports the movable electrode 2b so as to be movable in the movement direction X.
  • the facing surface 20 of the movable electrode 2b facing the fixed electrodes 3 and 3a has crests 21 and troughs 22 that are alternately arranged in the movement direction X with a substantially constant pitch and inclination angle.
  • the movable electrode 2b has a planar shape that is bent zigzag with a constant width by arranging the peak portion 21 and the valley portion 22 back to back in the Y direction orthogonal to the movement direction X.
  • these movable electrodes 2b are alternately arranged so that the adjacent movable electrodes 2b face the peak portion 21 and the valley portion 22.
  • the resonance frequency adjusting module 1b shown in FIG. 3 includes a plurality of first fixed electrodes 3 arranged in a row so as to face the valleys 22 of the facing surface 20 of the movable electrode 2b, and the fixed electrodes 3 of the movable electrode 2b.
  • the first fixed electrode 3 of the resonance frequency adjustment module 1b shown in FIG. 3 has the same shape as the fixed electrode 3 in the resonance frequency adjustment module 1 shown in FIG.
  • the second fixed electrode 3a of the resonance frequency adjustment module 1b shown in FIG. 3 has the same shape as the fixed electrode 3a in the resonance frequency adjustment module 1a shown in FIG.
  • the movable electrode 2b is integrally held by the support member 5, and is fixed to a moving body (not shown) of the MEMS sensor via the elastic body 4.
  • the fixed electrodes 3 and 3a are fixedly fixed to a substrate (not shown) of the MEMS sensor.
  • FIG. 3 shows a weight 6 conceptually representing the mass of the moving part including the movable electrode 2b of the resonance frequency adjustment module 1b.
  • the resonance frequency adjusting module 1b gives an electrostatic attraction (Coulomb force) between the opposed surfaces 20 and 30 of the movable electrode 2b and the fixed electrodes 3 and 3a by applying a potential difference between the movable electrode 2b and the fixed electrodes 3 and 3a. Therefore, the apparent spring constant of the resonance frequency adjusting module 1b can be adjusted by adjusting the potential difference.
  • the material and manufacturing method of the movable electrode 2b in the resonance frequency adjusting module 1b shown in FIG. 3 are the same as the material and manufacturing method of the movable electrode 2 in the resonance frequency adjusting module 1 shown in FIG.
  • a resonance frequency adjustment module 1c shown in FIG. 4 is a resonance frequency adjustment module constituting a MEMS sensor that detects angular velocity.
  • the resonance frequency adjustment module 1c is movably arranged, and a plurality of movable electrodes 2b extending in the movement direction (X direction), and a plurality of fixed electrodes 3 arranged along the movement direction X of the movable electrode 2b.
  • an elastic body 4 that supports the movable electrode 2b so as to be movable in the movement direction X.
  • the movable electrode 2b in the resonance frequency adjustment module 1c shown in FIG. 4 has the same shape and arrangement as the movable electrode 2b in the resonance frequency adjustment module 1b shown in FIG. Further, the fixed electrode 3 in the resonance frequency adjustment module 1c shown in FIG. 4 has the same shape as the fixed electrode 3 in the resonance frequency adjustment module 1 shown in FIG.
  • the fixed electrodes 3 are arranged in a row between the plurality of movable electrodes 2b so that all of the fixed electrodes 3 face the recesses 22 of the movable electrode 2b. For this reason, the arrangement of the fixed electrodes 3 in the movement direction X is shifted by a half pitch every other row in accordance with the shape of the movable electrode 2b.
  • the movable electrode 2b is integrally held by the support member 5, and is fixed to the moving body (not shown) of the MEMS sensor via the elastic body 4.
  • the fixed electrode 3 is fixedly fixed to a substrate (not shown) of the MEMS sensor.
  • FIG. 4 shows a weight 6 conceptually representing the mass of the moving part including the movable electrode 2b of the resonance frequency adjusting module 1c.
  • the resonance frequency adjusting module 1c gives a potential difference between the movable electrode 2b and the fixed electrode 3, an electrostatic attractive force (Coulomb force) acts between the opposing surfaces 20 and 30 of the movable electrode 2b and the fixed electrode 3.
  • an electrostatic attractive force acts between the opposing surfaces 20 and 30 of the movable electrode 2b and the fixed electrode 3.
  • the number of movable electrode and fixed electrode rows and the number of fixed electrode rows can be arbitrarily changed.
  • fixed electrodes may be arranged on both sides of the movable electrode.
  • the facing surfaces of the movable electrode and the fixed electrode are not limited to flat surfaces, and may be curved surfaces.
  • Model No. of movable electrode and fixed electrode of resonance frequency adjustment module having the shape of the first embodiment. 1 and no. 2 was modeled on a simulator, and the generated electrostatic attraction was confirmed by simulation.
  • Model No. 1 and no. 2 had the shape shown in Table 1 below. Each model was modeled as having three movable electrodes and a total of six fixed electrodes arranged in two rows of three each between the three movable electrodes.
  • model no. 1 is that the angle with respect to the moving direction X of the opposing surfaces of the movable electrode and the fixed electrode is constant at 6.04 degrees, and the interval between the opposing surfaces of the movable electrode and the fixed electrode (the above-mentioned “average interval”) is constant at 2.1 ⁇ m.
  • the pitch of the peaks (and valleys) was constant at 40 ⁇ m, and the length of the fixed electrode in the moving direction X was constant at 24 ⁇ m.
  • the average distance in the moving direction X between the opposing surfaces of the movable electrode and the fixed electrode, which is derived from the inclination angle of the opposing surfaces and the interval between the opposing surfaces, is 20 ⁇ m.
  • the difference between the pitch of one peak and the length of the fixed electrode in the moving direction X is 0.8 times the average distance between the movable electrode and the plurality of fixed electrodes in the moving direction X.
  • Model No. 2 Model No. 2
  • the angle of the opposing surfaces of the movable electrode and the fixed electrode with respect to the moving direction X is constant at 4.60 degrees
  • the interval between the opposing surfaces of the movable electrode and the fixed electrode is constant at 1.6 ⁇ m
  • the peaks (and valleys) Part was made constant at 40 ⁇ m
  • the length of the fixed electrode in the moving direction X was made constant at 24 ⁇ m.
  • the average distance in the moving direction X between the opposed surfaces of the movable electrode and the fixed electrode derived from the inclination angle of the opposed surface and the interval between the opposed surfaces is 20 ⁇ m.
  • Model No. The difference between the pitch of the two peaks and the length of the fixed electrode in the moving direction X is 0.8 times the average distance between the movable electrode and the plurality of fixed electrodes in the moving direction X.
  • Model No. 2 has a crest and a trough where the surface of the movable electrode facing the fixed electrode is alternately arranged in the moving direction, and a plurality of fixed electrodes are arranged to face the crest of the movable electrode. 1 and no. 2 confirms that the change in the ratio of the electrostatic attractive force to this moving amount (apparent spring constant) within the range up to 12 ⁇ m is high linearity within ⁇ 10%. It was done.
  • the resonance frequency adjustment module according to the present invention can be suitably used for a MEMS sensor that detects angular velocity.
  • 1, 1a, 1b, 1c Resonance frequency adjustment module, 2, 2a, 2b movable electrode, 20 facing surface, 21 mountain part, 22 valley part, 23 first inclined part, 24 second inclined part, 3, 3a fixed electrode, 30 opposing surface, 31 1st inclined part, 32 2nd inclined part, 4 elastic body, 5 support member, 6 weight, X movement direction.

Abstract

La présente invention concerne un module (1) de réglage de fréquence de résonance, qui constitue un capteur MEMS détectant une vitesse angulaire et comprend des électrodes mobiles (2), une pluralité d'électrodes fixes (3) et un corps élastique (4). Les électrodes mobiles (2), prévues de manière à pouvoir se déplacer, s'étendent dans une direction de déplacement (X) donnée. Les électrodes fixes (3) sont disposées en réseau dans la direction de déplacement (X) des électrodes mobiles (2). Le corps élastique (4) supporte les électrodes mobiles (2), de sorte que celles-ci puissent se déplacer dans la direction de déplacement (X) précitée. Les surfaces (20) des électrodes mobiles (2) qui font face aux électrodes fixes (3) ont des sections convexes (21) et des sections concaves (22) qui sont disposées de manière alternée dans la direction de déplacement (X) et chaque électrode fixe (3) est prévue de manière à faire face à une seule section convexe (21) ou section concave (22) de chaque électrode mobile (2) adjacente.
PCT/JP2015/067042 2014-06-18 2015-06-12 Module de réglage de fréquence de résonance et capteur mems WO2015194479A1 (fr)

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