WO2015186953A1

WO2015186953A1 - Connector assembly provided in connector system of test device, connector subassembly, and connector pin

Info

Publication number: WO2015186953A1
Application number: PCT/KR2015/005532
Authority: WO
Inventors: 안상일; 박준언
Original assignee: 주식회사 케미텍
Priority date: 2014-06-02
Filing date: 2015-06-02
Publication date: 2015-12-10
Also published as: KR102123882B1; KR20150139092A

Abstract

The present invention relates to a connector assembly, a connector subassembly provided in the connector assembly, and a connector pin forming the connector subassembly. The connector assembly, provided with a connector subassembly coupled to a circuit panel from the opposite direction of a cable, comprises: an assembly body which is provided in a top plate of a test device to be in contact with contact terminals of a probe card and has a through-hole in the vertical direction, the test device consisting of a support on which a semiconductor wafer is located, a probe card which is spaced apart from the support and provided with a plurality of contact terminals on the upper surface of the lower portion thereof, and a base unit in which a top plate is installed; a coupling means for coupling a circuit panel to the assembly body; a plate-shaped circuit panel which is installed in the assembly body by means of the coupling means and connected to a cable inserted in the through-hole; a connector body; and a plurality of connector pins provided in two rows in the connector body.

Description

Connector assemblies, connector subassemblies, and connector pins in the connector system of the test device

The present invention relates to a connector assembly, a connector subassembly, and a connector pin provided in a connector system of a test apparatus in which a semiconductor or the like is tested.

Before the wafer enters the cutting step for the package process, the electrical characteristics of the formed semiconductor chips are measured using a test apparatus, and the quantity and defects are inspected. Such a test apparatus includes a base unit on which a semiconductor wafer is placed, a base unit spaced apart from the support base, and a top plate mounted on a lower side thereof, and a probe card and a top plate mounted on a lower side of the top plate and having a probe and a printed circuit board. And a tester connected to the base unit and a connector for detachably coupling the probe card. The test signal generated from the tester is transmitted to the probe card through the top plate mounted on the base unit, the female connector connected to the top plate, and the male connector connected to the probe card's printed circuit board and the contactless contact terminal of the uninserted input connector. do. And one side is connected to the printed circuit board formed on the probe card, the other side is to transmit the test signal to the semiconductor chip by the probe contacting the pad of the semiconductor chip, the test signal passing through the semiconductor chip is the tester in the opposite path to the above In this case, the quantity and defect of the semiconductor chip are inspected.

1 is a schematic diagram of a semiconductor test apparatus equipped with a probe card and a top plate. The semiconductor test apparatus is provided with a support 11 on which a semiconductor substrate 10 having a plurality of chips (not shown) is placed, and is spaced a predetermined distance from an upper portion of the support 11, and has a probe card 12 and an upper portion at a lower side thereof. A base unit 14 on which the plate 13 is mounted, one side of which is connected to the printed circuit board 12a of the probe card 12, and the other side of which is in electrical contact with a chip pad (not shown) on the semiconductor substrate 10. Connected to the probe unit 12b, the

connectors

30 and 40 to detachably couple the top plate 13 and the probe card 12 to the base unit 15, the electrical characteristics of the semiconductor chip (not shown) And a tester 16 to inspect. Since the support 11 and the base unit 15 can be moved in close proximity to each other, the probe 12b is brought into close contact with the semiconductor substrate 10 in contact with a pad for a terminal of the semiconductor chip in order to measure electrical characteristics of the semiconductor chip. can do.

FIG. 2 is a plan view of the probe card 12, and omits the probe part (12b of FIG. 1) formed in the center area of the printed circuit board 12a. Referring to FIG. 2, the printed circuit board 12a of the probe card 12 has a circular plate shape, and a plurality of connection parts 20 are disposed on the plate surface. These connecting portions 20 are divided into four quadrants of the printed circuit board 12a, and are respectively disposed at portions adjacent to the edges of the arc spaced apart from the central origin O of the printed circuit board 12a in each quadrant. have. The connection part 20 is formed in a long rectangular shape and a plurality of contact pins (not shown) of the connection part 20 are connected to the probes formed in the probe part (12b of FIG. 1). The printed circuit board 12a is formed on the plate surface along both sides of the long sides facing each other. A plurality of fixing holes 21 are formed in the central region of the connecting portion 20 formed in a rectangular shape with a predetermined depth from the plate surface along the longitudinal direction.

3 is a perspective view illustrating a male connector of a connector for coupling a probe card and a top plate, wherein the body 31 of the male connector 30 is formed in a rectangular shape as shown in the connecting portion 20 of FIG. 1. A plurality of fixing pins are inserted into and fixed to the fixing holes (22 of FIG. 2) of the connecting portion (21 of FIG. 2) on the bottom surface of the male connector 30 coupled to the surface of the connecting portion (20 of FIG. 1). 33 are formed, and a male coupling portion 32 protruding a predetermined height from an upper surface of the male connector 30 body 31 is formed in an upper region of the male connector 30 body 31. A plurality of first connection contact terminals 34 are formed on both sides of the long shaft of the male coupling part 32 along the length direction of the male connector 30, and the first connection contact terminal 34 has a long rectangular shape. It is made of conductive metal material. The first connection contact terminal 34 extends from the upper surface of the male coupling portion 32 to the lower surface of the male connector body 31 through the body 31 of the male connector. In contact with the contact pins (not shown) formed in the) serves to deliver an electrical signal to the top plate (13 of FIG. 1).

4 is a perspective view showing a female connector of the connector for coupling the probe card and the upper plate, one side of the female connector 40 is mounted on the upper plate (13 of FIG. 1), the other side of the probe card (12 of FIG. The female coupling part 42 which provided the predetermined space so that the male coupling part (32 of FIG. 3) of the male connector mounted in ()) may be inserted and combined is provided. The female coupling portion 42 is formed in a rectangular shape in accordance with the shape of the male coupling portion (32 of Figure 3), the inner surface of the first connection contact terminal formed on the outer surface of the male coupling portion (32 of Figure 3) A plurality of second connection contact terminals 43 which are connected to and correspond to 34 in FIG. 3 is formed along the longitudinal direction. The second connection contact terminal 43 is also formed of a long rectangular metal piece on one side, and transmits an electrical signal transmitted from the chip of the semiconductor substrate 10 of FIG. 1 from the first connection contact terminal 34 of FIG. It serves to pass the tester (16 in Figure 1). Accordingly, as the female connector (40 in FIG. 4) connected to the top plate (13 in FIG. 1) and the male connector (30 in FIG. 3) connected to the printed circuit board (12 in FIG. 2) of the probe card 12 are coupled, The test signal transmitted by the probe 12b is transmitted to the tester 16 of FIG. 1 through the probe card 12 and the top plate 13 of FIG. 1.

Republic of Korea Patent No. 10-0902376 Patent Registration Publication discloses a connector. As shown in FIGS. 5 to 7, the connector 300 is spaced apart from the plug 32 by a housing 41 which provides a space 42 into which the plug 32 of the male connector 30 is inserted-drawn. Selectively driving the pressing member 45b and the pressing member 45b for pressing the connector pin 43 so that the connector pin 43 is intermittently contacted with the connector pin 43 disposed and the contact pin (contact terminal) provided in the plug 32. It includes a pressing means 45 made of a drive member (45a).

The connector system of the test apparatus according to the prior art as described above is a structure in which the male connector 30 provided in the probe card 12 protrudes and is inserted into and connected to the female connector 40 provided in the upper plate 40. Since the volume must be in contact with each other, there is a problem in that the number of the first connection contact terminals 34 and the second connection contact terminals 43 cannot be sufficiently large in a limited space. And since the female connector 40 is a structure in which the male connector 30 is inserted and contacted there was a problem that can not be used in the connector structure that is in contact with each other.

The present invention has been proposed to solve the above problems, it is possible to form a contact with the same area in contact with each other without being inserted, it is possible to absorb the impact when contacting, even in repeated use It is an object of the present invention to provide a connector assembly, a connector subassembly, and a connector pin that can prevent the connector pin from falling off.

In order to achieve the above object, the present invention provides a test apparatus including a support on which a semiconductor wafer is placed, a base unit on which a probe card and a top plate are mounted, spaced apart from the support, and provided with a plurality of contact terminals on an upper surface thereof. It is provided in the top plate and in contact with the contact terminal of the probe card; An assembly body having a through hole formed in an up and down direction, a coupling means for coupling a circuit panel to the assembly body, a plate-shaped circuit panel installed on the assembly body by a coupling means and connected to a cable inserted into the through hole, and a connector body and a connector body. It provides a connector assembly consisting of a plurality of connector pins provided in two rows in the connector sub-assembly coupled to the circuit panel on the opposite side of the cable.

In the above, the connector insertion portion is formed through the vertical direction and further comprises a guide member coupled to the coupling means, characterized in that the connector subassembly coupled to the circuit panel is inserted and positioned in the connector insertion portion.

In the above, the assembly main body is formed with a plurality of downwardly coupled coupling holes spaced apart from each other concave, and a plurality of coupling pin holes are formed through the side to communicate with each coupling hole; The coupling means may include a second elastic body inserted into the coupling hole, a plurality of coupling members inserted into the coupling hole such that the locking jaw portion is formed concavely on the side and presses the second elastic body and the locking jaw portion is located in the coupling hole; A plurality of coupling pins inserted into the coupling pin holes and hooked to the locking jaw portion, wherein the coupling pin balls have a clearance in the vertical direction in the locking jaw portion; Both sides of the circuit panel is characterized in that it is provided fixed to the coupling member outside the coupling hole.

In the above, the assembly main body is formed with a plurality of downwardly coupled coupling holes spaced apart from each other concave, and a plurality of coupling pin holes are formed through the side to communicate with each coupling hole; The coupling means includes a second elastic body inserted into the coupling hole, a locking jaw portion is formed concavely on the side, and an extension jaw portion is formed through the portion where the circuit panel is coupled, and an extended hollow coupling extension portion is provided. Composed of a plurality of coupling members are inserted into the coupling hole so that the locking jaw is located in the coupling hole, and a plurality of coupling pins inserted into the coupling pin hole to be caught in the locking jaw portion, the coupling pin hole is in the locking jaw portion Has a play in the vertical direction at; Both sides of the circuit panel is provided fixed to the coupling member outside the coupling hole; The guide member is provided with a plurality of fastening holes penetrating up and down and positioned at the side of the connector inserting portion, and provided with a protruding hollow portion protruding upward of each fastening hole; The fastening screw is inserted through the fastening hole to be fastened to the extension member, and the guide member is coupled to the coupling member. Between the guide member and the coupling member, one side of the protrusion hollow portion is inserted and the other side of the coupling extension portion is pressed to press on both sides. Characterized in that the first elastic body is provided.

In the above, at least one of the fastening screws has a structure protruding from the head, characterized in that the end is a first guide pin protruding from the cross section of the guide member.

On the other hand, the present invention is a test consisting of a support on which a semiconductor wafer is placed, a base unit on which a probe card is provided spaced apart from the support and is provided with a plurality of contact terminals on the upper side and a top plate provided with a plurality of connector assemblies. Make a connector assembly of the device and contact the contact terminals of the probe card; A connector body made of a synthetic resin formed with a slit groove between the connector body parts is provided with a plurality of connector body parts spaced in the longitudinal direction on both sides, and a plurality of conductive pins inserted into the slit groove and coupled to the connector body. Provides connector subassemblies.

In the above, at least one recess is formed on a side of the connector body of the connector body, and a connector pin is inserted into the slit groove, and the connector body is thermally pressurized so that both protruding portions of the recess are deformed toward the lateral opening of the slit groove. It is characterized in that the separation of the inserted connector pin is prevented.

In the above, the connector body portion is connected by a connector connecting portion located between the connector body portion; The connector connection portion is provided with a pin insertion portion which is oriented to each other and is opened to both sides to insert the connector pin, and a support protrusion protruding downward from the connector body portion; Pins inserted and inserted into the pin insertion portion of the connector connection portion is characterized in that it protrudes downward than the support protrusion.

The present invention also provides a test apparatus including a support on which a semiconductor wafer is placed, a base unit on which a probe card having a plurality of contact terminals disposed on an upper surface thereof and spaced from the support is mounted, and a top plate provided with a plurality of connector assemblies. Is provided in the connector assembly of the; Between the pin body portion extending in the vertical direction, the first projection portion protruding laterally from one end of the pin body portion, the elastic deformation portion provided on the other end of the pin body portion, between the first projection and the elastic deformation portion A second protrusion protruding in the protruding direction of the first protrusion; The second protrusion provides a connector pin to be inserted into and coupled to the connector assembly.

In the above, the elastic deformation portion is the first bent portion bent in the protruding direction of the first protrusion, and the second bent portion bent so as to extend in the longitudinal direction and opposite to the second protrusion at the end of the first bent portion And a third bent portion extending at an acute angle with the second bent portion in a direction opposite to the protruding direction of the second protrusion from the second bent portion.

In the above, further comprises a fourth bent portion bent toward the pin body portion at the end of the third bent portion; The fourth bent portion is characterized in that it is inclinedly extended to be closer to the second bent portion toward the end.

In the above, the connecting portion of the third bent portion and the fourth bent portion has a form of increasing in area and is provided with a pindol portion contacting the contact terminal of the probe card, wherein the pindol portion is located on a line extending from the center line of the pin body portion. It features.

According to the connector assembly, the connector subassembly and the connector pin according to the present invention, it is possible to form more contacts with the same area as the structure in which the connector is in contact with each other without being inserted, and the impact can be absorbed when contacting, Even repeated use has an effect that can prevent the connector pin from falling off.

1 is a schematic diagram of a semiconductor test apparatus equipped with a probe card and a top plate,

2 is a plan view showing a probe card,

Figure 3 is a perspective view showing the male connector of the connector for coupling the probe card and the top plate,

4 is a perspective view showing the female connector of the connector for coupling the probe card and the top plate,

5 is a cross-sectional view illustrating the coupling of a male connector and a female connector;

6 and 7 are cross-sectional views for explaining the operation of the drive member and the pressing member of the connector,

8 is a perspective view for explaining a test apparatus in which the connector assembly according to the present invention is mounted,

9 is a perspective view of the top plate shown in FIG. 8, FIG.

10 is a perspective view of the probe card shown in FIG. 8,

FIG. 11 is an enlarged view of a portion A of FIG. 10.

12 is a perspective view showing a connector assembly according to the present invention provided on the top plate,

FIG. 13 is a partially enlarged perspective view of the connector assembly shown in FIG. 12;

14 is an exploded perspective view of a part of the connector assembly shown in FIG. 12;

15 is an exploded perspective view of a part of the connector assembly illustrated in FIG. 12;

16 is an exploded perspective view illustrating a connector subassembly according to the present invention;

17 is a perspective view of a connector pin according to the present invention;

18 is a plan view of the connector body;

19 is a cross-sectional view taken along the line A-A of FIG.

FIG. 20 is a cross-sectional view taken along the line A-A of FIG. 18 and shows a state in which connector pins are coupled.

Hereinafter, a connector assembly, a connector subassembly, and a connector pin according to the present invention will be described in detail with reference to the drawings.

FIG. 8 is a perspective view for explaining a test apparatus in which the connector assembly according to the present invention is mounted, FIG. 9 is a perspective view of the top plate shown in FIG. 8, and FIG. 10 is a perspective view of the probe card shown in FIG. 8. FIG. 11 is an enlarged view of a portion A of FIG. 10, and FIG. 12 is a perspective view of the connector assembly according to the present invention provided on the top plate, and FIG. 13 is a partially enlarged perspective view of the connector assembly shown in FIG. 12. 14 is an exploded perspective view of a part of the connector assembly shown in FIG. 12, FIG. 15 is an exploded perspective view of a part of the connector assembly shown in FIG. 12, and FIG. 16 is an exploded perspective view showing a connector subassembly according to the present invention. 17 is a perspective view illustrating a connector pin according to the present invention, FIG. 18 is a plan view illustrating the connector body, and FIG. 19 is a cross-sectional view taken along line AA of FIG. 18. 20 shows a state where the connector pins are bonded a cross-sectional view along the line A-A of Fig.

Hereinafter, for convenience of description, the vertical direction of FIG. 1 will be described.

The connector assembly 100 according to the present invention includes a support on which a semiconductor wafer is placed, a probe card 1200 and a top plate 1100 which are installed to be spaced apart from the support and provided with a plurality of contact terminals 1205 on an upper surface thereof. It is provided and operated in the test apparatus which consists of a base unit to which it is mounted. As shown in FIG. 8, the top plate 1100 and the probe card 1200 face each other. The upper plate 1100 is formed to be spaced apart along the circumferential direction through a plurality of connector installation holes penetrating in the vertical direction, the connector assembly 100 is inserted into each connector installation hole is provided. A plurality of contact terminals 1205 are provided on the upper surface of the probe card 1200. The contact terminal 1205 is positioned to face the pin protrusion 226 of the connector pin 220 of the connector assembly 100, which is inserted into the upper plate 1100, and is provided with the connector assembly provided on the upper plate 1100. When 100 is downward, the pin protrusion 226 is in contact with the contact terminal 1205.

10 and 11, reference numeral 1201 illustrates a card body portion of the

probe card

1200, and 1203 illustrates a second guide pin protruding upward from the card body portion 1201. The second guide pins 1203 are provided in plurality in the circumferential direction. The second guide pin 1203 is inserted into the second guide pin hole (not shown) which is downwardly opened in the upper plate body 1110 and spaced apart in the circumferential direction, so that the upper plate 1100 and the probe card 1200 are accurate. Acts to keep it in position. Reference numeral 1205 illustrates a first guide pin hole spaced apart from an inner diameter side and an outer diameter side of the arrangement of the contact terminals 1207. The arrangement of the contact terminals 1207 is provided between the second guide pins 1203, but only a portion thereof is shown.

12 to 16, the connector assembly 100 according to the present invention is inserted into the connector installation hole of the upper plate 1100 is provided with the assembly body 110 and the circuit panel 150 through-hole formed in the vertical direction ) Coupling means 140 for coupling to the assembly body 110, plate-shaped circuit panel 150 is installed in the assembly body 110 by the coupling means 140 and connected to a plurality of cables inserted into the through hole and The connector main assembly 210 and the connector main body 210 includes a plurality of connector pins 220 provided in two rows, and the connector subassembly 200 coupled to the circuit panel 150 on the opposite side of the cable.

The assembly body 110 will be described.

The assembly body 110 is made of synthetic resin, the cross section is formed in a substantially rectangular. A plurality of through holes 115 through which the cable is inserted are formed in the central portion, and the plurality of through holes 115 penetrate in the up and down direction, and a plurality of coupling holes 113 are downwardly opened to both sides of the plurality of through holes 115. The coupling holes 113 may be formed in plural by forming two rows or three rows, and a plurality of through holes 115 may be formed in the vertical direction between the rows of the coupling holes 113. One row consists of a plurality of coupling holes 113, for example, four coupling holes 113. The coupling pin hole 117 communicated with the coupling hole 113 is formed to extend laterally. The coupling pin hole is formed to communicate with the plurality of coupling holes 113 forming one row.

Four guide pins 111 protruding from both sides of the assembly body 110 are provided. At least one plate-shaped circuit panel 150 is installed on the assembly body 110 by coupling means.

The coupling means 140 will be described.

The coupling means 140 is a second elastic body 147 is inserted into the coupling hole 113 of the assembly body 110, and the locking jaw portion 1411 is formed concavely on the side and press the second elastic body 147 And a plurality of coupling members 141 inserted into the coupling holes 113 so that the locking jaw portion 1411 is positioned in the coupling hole 113, and inserted into the coupling pin holes 117 so as to be caught by the locking jaw portion 1411. Composed of a plurality of coupling pins 145. The second elastic body 147 is pressurized between the end of the coupling member 141 and the bottom surface of the coupling hole 113. The coupling pin 145 inserted into the coupling pin hole 117 traverses the plurality of coupling holes 113 laterally, and is located at the engaging jaw portion 1411 of the coupling member 141 inserted into the coupling hole 113. The length of the locking jaw portion 1411 in the vertical direction is greater than the thickness of the coupling pin 145 so that the coupling pin hole 113 has a clearance in the vertical direction in the locking jaw portion 1411. Therefore, the coupling member 141 is movable in the vertical direction at a distance equal to the clearance. The coupling members 141 also form two or three rows, and each row is provided with a plurality of coupling members 141.

The plate-shaped circuit panel 150 is fastened by the fastening screw 143 to the engaging member 141 located outside the coupling hole 113 and coupled. The circuit panel 150 is fixed to one side of the coupling member 141 forming one row and the other side is fixed to the side of the coupling member 141 forming a neighboring row. The circuit panel 150 is coupled to both sides of one locking member 141. The plurality of circuit panels 150 are coupled to the locking member 141 to be parallel to each other.

The connector subassembly 200 and the connector pin 220 will be described.

The connector subassembly 200 coupled to the circuit panel 150 is spaced apart in both directions in the length direction as shown in FIGS. 16 and 18, and a plurality of connector body parts 212 are provided to provide a connector body part 212. The connector body 210 is formed of a synthetic resin formed between the slit grooves 211 and a plurality of conductive pins 220 are inserted into the slit grooves 211 and coupled to the connector body 210. The slit grooves 211 are formed at both sides of the connector body 210 and open in the vertical direction and the side. The connector body portion 212 is provided with a connector connecting portion 214 for connecting the connector body portion 212. The slit groove 211 is formed between the connector body portion 212 on both sides of the connector connecting portion 214.

The connector connecting portion 214 is formed with a concave pin insertion portion (211a) on both sides oriented to each other. The second protrusion 223 of the connector pin 220 is inserted into the pin insertion portion 211a. The connector connecting portion 214 is formed at a central portion in the width direction and downwardly opened to form a circuit panel inserting portion 214b into which the circuit panel 150 is inserted. The connector connecting portion 214 is provided with a support protrusion 214a extending downward in the lower portion of the pin insertion portion 211a. An end portion of the support protrusion 214a protrudes from an end portion of the connector body portion 212.

When the second protrusion 223 of the connector pin 220 is positioned in the slit groove 211 while being inserted into the pin insertion portion 211a, the pin protrusion 226 of the connector pin 220 is larger than the support protrusion 214a. It protrudes downward. The pin protrusion 226 of the connector pin 220 is deformed while contacting the contact terminal 1207 of the probe card 1200 and the probe card 1200 is in contact with the support protrusion 214a, thus preventing further pressurization.

The connector pins 220 are disposed in the slit groove 211 in the longitudinal direction of the connector body 210 in two rows on the connector body 210.

At least one concave portion 213 is formed at a side surface of the connector body portion 212 of the connector body 210, a connector pin 230 is inserted into the slit groove 211, and the connector body portion 212 is opened. As the two protrusions of the recess 213 are deformed toward the lateral opening of the slit groove 211, separation of the connector pin 220 inserted into the slit groove 211 may be prevented. The protruding portion is located between the concave portion 213 and the slit groove 211, and means a portion protruding relatively from the concave portion 213.

As shown in FIG. 17, the connector pin 220 includes a pin body portion 221 extending upward and downward, a first protrusion 225 protruding laterally from one end of the pin body portion 221, and An elastic deformation portion provided at the other end of the pin body portion 221 and a second protrusion 223 protruding in the protruding direction of the first protrusion 225 between the first protrusion 225 and the elastic deformation portion. Is done.

The second protrusion 223 has guide inclined portions 2231 which are reduced in width toward both ends thereof in the longitudinal direction of the pin body portion 221, and the pin body portion 221 is formed at the end of the guide inclined portion 2231. The jaw part is formed on the side facing). The connector pins 220 are inserted into the slit grooves 211 on both sides thereof so that the second protrusions 223 face each other, and the second protrusions 223 are forcibly inserted into the central partition wall. Insertion is facilitated by the second protrusion 223 having a guide inclined portion 2231, and the jaw portion is formed to prevent separation after insertion.

The elastic deformation portion is the first bent portion 227 is bent toward the protruding direction of the first protrusion 225 at the end of the pin body portion 221, and the body portion at the end of the first bent portion 227 A second bent portion 229 extending in the longitudinal direction of 221 and away from the second protrusion 227 and a direction opposite to the protruding direction of the second protrusion 223 from the second bent portion 229. A third bent portion 222 extending at an acute angle with the second bent portion 229 toward the. Therefore, when pressed, the pin protrusion 226 provided at the end of the third bent portion is moved in the direction opposite to the protruding direction of the second protrusion.

The elastic deformation portion has a smaller cross-sectional area than the pin body portion 221. The elastic deformation part further includes a fourth bent part 224 bent to face the pin body part 221 at the end of the third bent part 222. The fourth bent portion 224 extends inclined so as to be closer to the second bent portion 222 toward the end. The connecting portion between the third bent portion 222 and the fourth bent portion 224 is provided with a pin protrusion 226 having a form of increasing area and contacting the contact terminal of the probe card. The pin protrusion 226 is positioned on a line in which the center line of the pin body portion 221 extends.

The first protrusions of the connector pins inserted into the slit grooves formed on both sides of the connector body 220 face each other. The circuit panel is inserted between the first protrusions 225 and contacts the first protrusions 225 on both sides. The circuit panel is provided with a contact terminal in contact with the first protrusion 225.

The guide member 130 will be described.

The connector assembly 100 according to the present invention further includes a guide member 130. The guide member 130 has a rectangular cross section, and has at least one connector insertion portion 131 penetrated in an up and down direction, and is positioned at a side of the connector insertion portion 131 and has a plurality of fastening holes 135 penetrated up and down. ) Is formed. The fastening holes 135 are formed in two rows or three rows, and a connector insertion part 131 is formed between the fastening holes 135 rows. Hollow protruding hollow portions 133 protruding to the upper portions of the fastening holes are provided. The protruding hollow portion 133 is spaced apart from the lower portion of the coupling extension portion 1415. The fastening hole 135 is formed to extend to the coupling extension portion 1415. The fastening hole 135 forms a lower jaw portion at a position spaced upwardly from a lower surface of the guide member 130 and has a reduced cross-sectional area.

The fastening screw 144 is inserted through the fastening hole 135 to be fastened to the coupling extension part 1415, so that the guide member 130 is coupled to the coupling member 141, and the guide member 130 and the coupling member 141. Between the one side is provided with a first elastic body 142 is inserted into the protruding hollow portion 133 and the other side is coupled extension portion 1415 is pressed on both sides. The first elastic body 142 can be a coil spring. The upper end of the protruding hollow portion 133 and the lower end of the coupling extension part 1415 are spaced apart from each other. Alternatively, the inner diameter of the protruding hollow portion 133 may be larger than the outer diameter of the engaging extension part 1415 such that a part of the end of the engaging extension part 1415 may be inserted into the protruding hollow part 133. The guide member 130 is caught on the head of the fastening screw 144 and is not separated downward. At least one of the fastening screws 144 may be a first guide pin 149 which is screwed to the coupling extension part 1415 and protrudes to the lower surface of the guide member 130. The protruding portion of the first guide pin 149 is inserted into the first guide pin hole 1205 of the probe card 1200 to serve to align the probe card with the top plate.

When the connector assembly 100 is pressed downward, the guide member 130 is moved upward while being pressed in contact with the card body portion 1201 of the probe card 1200 to compress the first elastic body 142 and the connector pin 220 contacts. It comes in contact with the terminal. Therefore, the connector pin 220 is protected by the guide member 130.

The connector subassembly 200 is inserted into and positioned in the connector inserting portion 131. The coupling member forms an extension jaw portion through which the circuit panel is coupled and has a hollow coupling extension portion.

The operation member 120 will be described.

The connector assembly 100 according to the present invention is provided with an operating member 120. The actuating member 120 has an approximately 'c' shape, and the assembly body 110 is inserted into the actuating member 120. On both sides of the operating member 120, the first guide portion 121 into which the fourth guide pin 111 is inserted is formed concave. The first guide part 121 may be formed in a penetrated shape. The first guide portion 121 is formed to be inclined in the vertical direction and is formed to have a length in the direction in which the assembly body 110 is inserted into the operating member 120.

When the connector assembly 100 is provided on the upper plate 1100 and the operating member 120 is moved forward and backward in the radial direction, the connector assembly 100 moves in the vertical direction. In FIG. 12, reference numeral 123 illustrates a third guide pin protruding downward from the operating member 120. The third guide pin 123 is gripped so that the operation member 120 can be moved in the radial direction.

Claims

The contact terminal of the probe card is provided on the upper plate of the test apparatus comprising a support on which the semiconductor wafer is placed, a probe card having a plurality of contact terminals disposed on an upper side thereof and spaced apart from the support, and a base unit on which an upper plate is mounted. In contact with; An assembly body having a through hole formed in an up and down direction, a coupling means for coupling a circuit panel to the assembly body, a plate-shaped circuit panel installed on the assembly body by a coupling means and connected to a cable inserted into the through hole, and a connector body and a connector body. The connector assembly comprising a plurality of connector pins provided in two rows in the connector sub-assembly coupled to the circuit panel on the opposite side of the cable.
The connector subassembly of claim 1, further comprising a guide member coupled to the coupling means, wherein the connector subassembly coupled to the circuit panel is inserted into the connector insertion portion. Connector assembly.
According to claim 1, The assembly body has a plurality of downwardly coupled coupling holes are formed concave spaced apart from each other, a plurality of coupling pin holes are formed through the side to communicate with each coupling hole; The coupling means may include a second elastic body inserted into the coupling hole, a plurality of coupling members inserted into the coupling hole such that the locking jaw portion is formed concavely on the side and presses the second elastic body and the locking jaw portion is located in the coupling hole; A plurality of coupling pins inserted into the coupling pin holes and hooked to the locking jaw portion, wherein the coupling pin balls have a clearance in the vertical direction in the locking jaw portion; Both sides of the circuit panel is a connector assembly, characterized in that is provided fixed to the coupling member outside the coupling hole.
According to claim 2, The assembly body has a plurality of coupling holes downwardly spaced apart from each other is formed concave, a plurality of coupling pin holes are formed through the side to communicate with each coupling hole; The coupling means includes a second elastic body inserted into the coupling hole, a locking jaw portion is formed concavely on the side, and an extension jaw portion is formed through the portion where the circuit panel is coupled, and an extended hollow coupling extension portion is provided. Composed of a plurality of coupling members are inserted into the coupling hole so that the locking jaw is located in the coupling hole, and a plurality of coupling pins inserted into the coupling pin hole to be caught in the locking jaw portion, the coupling pin hole is in the locking jaw portion Has a play in the vertical direction at; Both sides of the circuit panel is provided fixed to the coupling member outside the coupling hole; The guide member is provided with a plurality of fastening holes penetrating up and down and positioned at the side of the connector inserting portion, and provided with a protruding hollow portion protruding upward of each fastening hole; The fastening screw is inserted through the fastening hole to be fastened to the extension member, and the guide member is coupled to the coupling member. Between the guide member and the coupling member, one side of the protrusion hollow portion is inserted and the other side of the coupling extension portion is pressed to press on both sides. Connector assembly characterized in that the first elastic body is provided.
5. The connector assembly according to claim 4, wherein at least one of the fastening screws has a structure protruding from the head, and the end is a first guide pin protruding from the cross section of the guide member.
A connector assembly of a test apparatus comprising a support on which a semiconductor wafer is placed, a base unit on which a probe card having a plurality of contact terminals disposed on an upper surface thereof and spaced from the support and a top plate provided with a plurality of connector assemblies is mounted on a lower side thereof; Contact the contact terminals of the probe card; A connector body made of a synthetic resin formed with a slit groove between the connector body parts is provided with a plurality of connector body parts spaced in the longitudinal direction on both sides, and a plurality of conductive pins inserted into the slit groove and coupled to the connector body. And a connector subassembly.
According to claim 6, At least one recess is formed on the side of the connector body of the connector body, the connector pin is inserted into the slit groove, the connector body is heat-pressurized so that both protruding portions of the recess is deformed toward the lateral opening of the slit groove The connector sub-assembly, characterized in that the separation of the connector pin inserted into the slit groove is prevented.
8. The connector of claim 6 or 7, wherein the connector body portion is connected by a connector connecting portion located between the connector body portions; The connector connection portion is provided with a pin insertion portion which is oriented to each other and is opened to both sides to insert the connector pin, and is provided with a support protrusion (214a) protruding downward from the connector body portion; The pin is inserted into the pin insertion portion of the connector connection portion of the connector sub-assembly, characterized in that protruding downward than the support protrusion (214a).
A connector assembly of a test apparatus comprising a support on which a semiconductor wafer is placed, a base unit on which a probe card having a plurality of contact terminals disposed on an upper surface thereof and spaced from the support and a top plate provided with a plurality of connector assemblies is mounted on a lower side thereof. Provided; Between the pin body portion extending in the vertical direction, the first projection portion protruding laterally from one end of the pin body portion, the elastic deformation portion provided on the other end of the pin body portion, between the first projection and the elastic deformation portion A second protrusion protruding in the protruding direction of the first protrusion; And the second protrusion is inserted into and coupled to the connector assembly.
10. The method of claim 9, wherein the elastic deformation portion is bent so as to be directed toward the protruding direction of the first projection portion, and bent so as to extend in the longitudinal direction and opposite to the second projection portion at the end of the first bent portion And a second bent portion and a third bent portion extending at an acute angle with the second bent portion in a direction opposite to the direction in which the second bent portion protrudes from the second bent portion. Connector pins, characterized in that moved in the direction opposite to the protruding direction.
11. The method of claim 10, further comprising: a fourth bent portion bent toward the pin body portion at the end of the third bent portion; And the fourth bent portion extends inclinedly closer to the second bent portion toward the end portion.
12. The method of claim 11, wherein the connecting portion of the third bent portion and the fourth bent portion has a form of increasing the area is provided with a pindol portion in contact with the contact terminal of the probe card, the pindol portion is a line extending the center line of the pin body portion The connector pin, characterized in that located on.