WO2015170601A1 - Douille - Google Patents

Douille Download PDF

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Publication number
WO2015170601A1
WO2015170601A1 PCT/JP2015/062414 JP2015062414W WO2015170601A1 WO 2015170601 A1 WO2015170601 A1 WO 2015170601A1 JP 2015062414 W JP2015062414 W JP 2015062414W WO 2015170601 A1 WO2015170601 A1 WO 2015170601A1
Authority
WO
WIPO (PCT)
Prior art keywords
plunger
insulating support
contact probe
cylindrical portion
socket
Prior art date
Application number
PCT/JP2015/062414
Other languages
English (en)
Japanese (ja)
Inventor
山本　次男
Original Assignee
株式会社ヨコオ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ヨコオ filed Critical 株式会社ヨコオ
Publication of WO2015170601A1 publication Critical patent/WO2015170601A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

Definitions

  • the present invention relates to a socket in which a contact probe is supported by an insulating support.
  • FIG. 5A is a cross-sectional view of a socket 801 in which a conventional contact probe 810 is supported by an insulating support 802.
  • the contact probe 810 includes a first plunger 811 and a second plunger 812 that are biased in a direction away from each other by a spring 813.
  • the first plunger 811 has a cylindrical portion 811a, and a spring 813 is provided in the cylindrical portion 811a.
  • the second plunger 812 has a base end cylindrical portion 812a located in the cylindrical portion 811a of the first plunger 811 and a pin-like portion 812b extending downward from the base end cylindrical portion 812a.
  • FIG. 5B is a cross-sectional view of the socket 801 in a state where the contact probe 810 has fallen to its lower limit position due to its own weight inside the insulating support 802.
  • the second plunger 812 of the left contact probe 810 is shown tilted to the maximum with respect to the stroke direction (vertical direction in the figure).
  • the second plunger 812 is dropped until the first plunger 811 is hooked on the small diameter portion 802c at the lower end of the insulating support 802.
  • the tilt fulcrum is at least above the retaining portion 811 c at the base end of the first plunger 811.
  • the second plunger 812 is the maximum, until the upper end corner portion of the base end cylindrical portion 812a contacts the inner surface of the cylindrical portion 811a of the first plunger 811 or the side surface of the pin-like portion 812b is the small diameter portion 802c of the insulating support 802. Tilt until it comes into contact with the lower corner.
  • the distance from the upper end corner of the base end cylindrical portion 812a of the second plunger 812 to the fulcrum and the distance from the lower end corner of the small diameter portion 802c of the insulating support 802 to the fulcrum are small.
  • the second plunger 812 may be greatly inclined as shown in FIG.
  • the present invention has been made in recognition of such a situation, and an object of the present invention is to provide a socket capable of reducing the inclination of the plunger as compared with the conventional art.
  • This socket is A contact probe and an insulating support for supporting the contact probe;
  • the contact probe includes a first plunger having a cylindrical portion, a spring provided in the cylindrical portion, and a second plunger having a proximal end portion located in the cylindrical portion, The spring biases the first and second plungers in a direction away from each other;
  • the second plunger has an inclined portion on the outer peripheral surface that becomes smaller in diameter toward the tip,
  • the insulating support includes a restricting portion that engages with the inclined portion of the second plunger and restricts a protruding amount of the second plunger from the insulating support.
  • the regulating part may be an inclined surface substantially parallel to the inclined part.
  • the cylindrical portion has a retaining portion with an outer diameter reduced for retaining the second plunger,
  • the inclination of the inclined portion of the second plunger with respect to the stroke direction may be smaller than the inclination of the inner surface of the retaining portion with respect to the same direction.
  • This socket is A contact probe and an insulating support for supporting the contact probe;
  • the contact probe includes a first plunger having a cylindrical portion, a spring provided in the cylindrical portion, and a second plunger having a proximal end portion located in the cylindrical portion, The spring biases the first and second plungers in a direction away from each other;
  • the second plunger has a stepped portion on the outer peripheral surface with a small diameter on the tip side,
  • the insulating support includes an inclined portion that comes into contact with the stepped portion of the second plunger and regulates a protruding amount of the second plunger from the insulating support.
  • the inclined portion may be a tapered surface.
  • FIG. 1A is a cross-sectional view of a socket 1 according to Embodiment 1 of the present invention.
  • FIG. 1B is a cross-sectional view of the socket 1 in a state in which the contact probe 10 falls to its lower limit position due to its own weight in the through hole 2a of the insulating support 2.
  • Explanatory drawing which shows the usage method of the socket 1.
  • FIG. 3A is a partially enlarged cross-sectional view of the contact probe 10.
  • FIG. 3B is a partially enlarged cross-sectional view of a contact probe 10 ′ according to a comparative example.
  • FIG. 4A is an enlarged cross-sectional view of a main part of a socket 1A according to Embodiment 2 of the present invention.
  • FIG. 5A is a cross-sectional view of a socket 801 in which a conventional contact probe 810 is supported by an insulating support 802.
  • FIG. 5B is a cross-sectional view of the socket 801 in a state where the contact probe 810 falls to the lower limit position due to its own weight inside the insulating support 802.
  • FIG. 1A is a cross-sectional view of socket 1 according to Embodiment 1 of the present invention.
  • the socket 1 is obtained by supporting a plurality of contact probes 10 with an insulating support 2.
  • the insulating support 2 has a plurality of through holes 2 a that accommodate the contact probes 10.
  • the insulating support 2 has a vertically divided structure, and the boundary position of the division is a stepped portion 2b in the through hole 2a.
  • One end (the lower end in the figure) of the through hole 2a is a small-diameter portion 2c that serves as a restricting portion that restricts the protruding amount of a second plunger 12 described later by reducing the outer diameter.
  • Each contact probe 10 has a first plunger 11, a second plunger 12, and a spring 13.
  • the first plunger 11 includes a cylindrical portion 11a, a step portion 11b, and a retaining portion 11c.
  • the cylindrical portion 11 a is provided in a predetermined length range from the proximal end of the first plunger 11.
  • the step portion 11b is formed on the outer peripheral surface of the first plunger 11 so that the proximal end side of the cylindrical portion has a large diameter.
  • the retaining portion 11c is obtained by narrowing the opening of the cylindrical portion 11a by caulking or the like.
  • the spring 13 is provided in the cylindrical portion 11a and biases the first and second plungers 11 and 12 in a direction away from each other.
  • the tip of the first plunger 11 protrudes from the upper surface of the insulating support 2.
  • the protruding amount of the first plunger 11 is regulated by the stepped portion 11 b of the first plunger 11 engaging the stepped portion 2 b of the insulating support 2.
  • the second plunger 12 includes a base end cylindrical portion 12a and a pin-shaped portion 12b.
  • the proximal end cylindrical portion 12 a is located in the cylindrical portion 11 a of the first plunger 11.
  • the outer diameter of the base end cylindrical portion 12a is larger than the inner diameter of the retaining portion 11c, and the base end cylindrical portion 12a is prevented from coming off from the cylindrical portion 11a of the first plunger 11.
  • the pin-like portion 12b extends downward from the end surface of the base end cylindrical portion 12a through the retaining portion 11c of the first plunger 11, and further passes through the small diameter portion 2c of the insulating support 2 so that the distal end is the insulating support 2. Protrudes from the underside of the.
  • the pin-shaped portion 12b has an inclined portion 12c having a smaller diameter toward the tip on the outer peripheral surface near the tip.
  • the inclined portion 12c is, for example, a tapered surface inclined so as to be symmetric with respect to the central axis of the pin-shaped portion 12b.
  • the inclined portion 12c has a truncated cone side shape with a constant inclination angle. Note that.
  • the inclined portion 12c may not have a constant inclination angle, and may be curved, for example.
  • the tip end side of the inclined portion 12c is smaller in diameter than the small diameter portion 2c of the insulating support 2, and the proximal end side of the inclined portion 12c is larger in diameter than the small diameter portion 2c.
  • FIG. 1B is a cross-sectional view of the socket 1 in a state in which the contact probe 10 falls to the lower limit position due to its own weight in the through hole 2a of the insulating support 2.
  • FIG. 1B shows a state where the second plunger 12 of the left contact probe 10 is tilted to the maximum with respect to the stroke direction (vertical direction in the figure).
  • the inclined portion 12c of the second plunger 12 is hooked on the upper end portion of the small diameter portion 2c of the insulating support 2 (the inclined portion 12c and the small diameter portion 2c are engaged), thereby The axial position of the plunger 12 is fixed.
  • the engaging part of the inclination part 12c of the 2nd plunger 12 and the small diameter part 2c of the insulation support body 2 becomes a fulcrum.
  • the second plunger 12 is tilted at the maximum until the upper end corner of the base end cylindrical portion 12 a comes into contact with the inner surface of the cylindrical portion 11 a of the first plunger 11.
  • the fulcrum (the inclined portion 12c and the insulating support 2 are connected to each other from the upper end corner portion of the base end cylindrical portion 12a.
  • the distance to the small diameter portion 2c) is large, and the maximum amount of inclination of the second plunger 12 is small as shown in FIG.
  • the second plunger 812 falls until the first plunger 811 is hooked on the small diameter portion 802c of the insulating support 802, and the second plunger 812 is tilted. Is at least above the retaining portion 811c of the first plunger 811.
  • FIGS. 2A to 2C are explanatory views showing a method of using the socket 1 until the measuring board 20 on the measuring instrument side and the test object 30 such as a semiconductor integrated circuit are electrically connected. is there.
  • both ends of the contact probe 10 protrude from the surface of the insulating support 2 respectively.
  • the tip of the second plunger 12 contacts (not illustrated) a pad (an example of an electrode) on the inspection substrate 20 as shown in FIG.
  • the second plunger 12 moves backward against the bias of the spring 13. That is, the spring 13 applies a contact force with the electrode on the inspection substrate 20 to the second plunger 12.
  • the inspection object 30 is disposed opposite to the socket 1, and as shown in FIG. 2C, the solder bumps 30a (examples of electrodes) of the inspection object 30 are brought into contact with the tip of the first plunger 11 (elasticity). Then, the first plunger 11 moves backward against the bias of the spring 13. That is, the spring 13 gives the first plunger 11 a contact force with the solder bump 30 a of the inspection object 30. In this state, the inspection object 30 is inspected. At this time, at least a part of the inclined portion 12c formed on the outer peripheral surface of the pin-shaped portion 12c of the second plunger 12 passes through the retaining portion 11c of the first plunger 11 and enters the cylindrical portion 11a. .
  • FIG. 3A is a partially enlarged cross-sectional view of the contact probe 10 in the inspection state.
  • FIG. 3B is a partially enlarged cross-sectional view of a contact probe 10 ′ according to a comparative example.
  • the inclination of the inclined portion 12c of the second plunger 12 with respect to the stroke direction is the same as that of the inner surface of the retaining portion 11c of the first plunger 11. Less than the slope. According to this, when the second plunger 12 protrudes from the state shown in FIG. 3A, that is, the inspection is completed from the inspection state shown in FIG. 2C, and the inspection object 30 is separated from the first plunger. In the state shown in FIG.
  • the inclined portion 12 c can operate smoothly without being caught by the retaining portion 11 c of the first plunger 11.
  • the inclination of the inclined portion 12c ′ of the second plunger 12 with respect to the stroke direction is the same as that of the inner surface of the retaining portion 11c of the first plunger 11. Greater than inclination with respect to direction.
  • the comparative example shown in FIG. 3 (B) also achieves the effect of reducing the inclination of the second plunger 12, and is included in the scope of the present invention.
  • the inclination of the second plunger 12 can be reduced as described above compared to the conventional example without the inclined portion 12c. For this reason, it is possible to prevent a scratch on the pad of the inspection substrate 20 and the deformation of the second plunger 12.
  • the inclination of the second plunger 12 can be reduced if the dimensions of the base end cylindrical portion 12a of the second plunger 12 and the small diameter portion 2c of the insulating support 2 are enlarged in the vertical direction. It will be contrary to. According to the present embodiment, it is possible to reduce the inclination of the second plunger 12 without enlarging those dimensions.
  • FIG. 4A is an enlarged cross-sectional view of a main part of a socket 1A according to Embodiment 2 of the present invention.
  • the inclined portion 12c of the second plunger 12 replaces the step portion 12d, and the small diameter portion 2c of the insulating support 2 is obtained. Is different in that it has an inclined small-diameter portion 2d, and the other points coincide with each other.
  • the inner surface of the inclined small-diameter portion 2d is a tapered surface inclined so as to be symmetric with respect to its own central axis, and has a truncated cone side surface shape with a constant inclination angle in the illustrated example.
  • the inner surface of the inclined small diameter portion 2d may not have a constant inclination angle, and may be curved, for example.
  • the stepped portion 12d of the second plunger 12 is engaged with the inclined small diameter portion 2d, so that the second plunger 12 is the same as in the first embodiment. And the backlash in the lateral direction of the second plunger 12 at the stage before being set on the inspection substrate 20 can be reduced.
  • FIG. 4B is an enlarged cross-sectional view of the main part of the socket 1B according to Embodiment 3 of the present invention.
  • the socket 1B has an inclined small-diameter portion 2d in which the inner surface of the small-diameter portion 2c of the insulating support 2 is inclined as compared with that of the first embodiment shown in FIGS. 1 (A) and 1 (B). Dissimilar and otherwise consistent.
  • the inner surface of the inclined small diameter portion 2c is preferably substantially parallel to the inclined portion 12c of the second plunger 12.
  • the present embodiment can achieve the same effects as those of the first embodiment.
  • the first plunger 11 may not have the retaining portion 11c at the proximal end of the cylindrical portion 11a.
  • the inclined portion 12c of the second plunger 12 is not limited to being formed over the entire outer peripheral surface, and may be formed only in a partial angle range of the side surface. The same applies to the case where the inner surface of the small diameter portion of the insulating support 2 is inclined to form the inclined small diameter portion 2d.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Connecting Device With Holders (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

L'invention porte sur une douille, qui est apte à rendre l'inclinaison d'un plongeur inférieure à celle de l'état de la technique. Un second plongeur (12) comprend une partie de colonne d'extrémité de base (12a) et une partie en forme d'aiguille (12b). Une surface périphérique externe de la partie en forme d'aiguille (12b) comprend une partie inclinée (12c) dont le diamètre devient plus petit vers une extrémité avant de la partie en forme d'aiguille (12b). La partie inclinée (12c) est une surface effilée, qui est inclinée de façon à être symétrique autour d'un axe central de la partie en forme d'aiguille (12b). La quantité dont le second plongeur (12) est apte à faire saillie à partir d'un support isolant (2) est régulée par la venue en contact (la mise en prise) de la partie inclinée (12c) avec une partie de petit diamètre (2c) du support isolant (2). Quand le second plongeur (12) est incliné par rapport à une direction de course, une partie de prise entre la partie inclinée (12c) du second plongeur (12) et la partie de petit diamètre (2c) du support isolant (2) joue le rôle de point de support.
PCT/JP2015/062414 2014-05-09 2015-04-23 Douille WO2015170601A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014097819A JP6433680B2 (ja) 2014-05-09 2014-05-09 ソケット
JP2014-097819 2014-05-09

Publications (1)

Publication Number Publication Date
WO2015170601A1 true WO2015170601A1 (fr) 2015-11-12

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ID=54392454

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/062414 WO2015170601A1 (fr) 2014-05-09 2015-04-23 Douille

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JP (1) JP6433680B2 (fr)
WO (1) WO2015170601A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6837283B2 (ja) 2016-02-29 2021-03-03 株式会社ヨコオ ソケット
WO2020158575A1 (fr) 2019-01-29 2020-08-06 株式会社ヨコオ Piston et sonde de contact
JP6923821B2 (ja) 2019-09-06 2021-08-25 山一電機株式会社 コンタクトプローブ及びこれを備えた検査用ソケット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300581A (ja) * 2005-04-18 2006-11-02 Yokowo Co Ltd プローブの組付け構造
WO2008084627A1 (fr) * 2006-12-19 2008-07-17 Nhk Spring Co., Ltd. Unité à contacts conducteurs

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7507110B1 (en) * 2008-03-25 2009-03-24 Cheng Uei Precision Industry Co., Ltd. Probe connector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300581A (ja) * 2005-04-18 2006-11-02 Yokowo Co Ltd プローブの組付け構造
WO2008084627A1 (fr) * 2006-12-19 2008-07-17 Nhk Spring Co., Ltd. Unité à contacts conducteurs

Also Published As

Publication number Publication date
JP2015215223A (ja) 2015-12-03
JP6433680B2 (ja) 2018-12-05

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