WO2015141629A1 - ダイボンド層形成フィルム、ダイボンド層形成フィルムが付着した加工物、および半導体装置 - Google Patents
ダイボンド層形成フィルム、ダイボンド層形成フィルムが付着した加工物、および半導体装置 Download PDFInfo
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- WO2015141629A1 WO2015141629A1 PCT/JP2015/057704 JP2015057704W WO2015141629A1 WO 2015141629 A1 WO2015141629 A1 WO 2015141629A1 JP 2015057704 W JP2015057704 W JP 2015057704W WO 2015141629 A1 WO2015141629 A1 WO 2015141629A1
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- die bond
- layer forming
- bond layer
- die
- forming film
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- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
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- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
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Definitions
- the present invention relates to a die bond layer forming film used when a workpiece (chip or the like) obtained by processing a workpiece such as a semiconductor wafer is fixed to an adherend such as a circuit board, and to form a die bond layer including the film.
- the present invention relates to a sheet for manufacturing, a workpiece to which a die bond layer forming film is attached, and a semiconductor device manufactured using the workpiece.
- Semiconductor wafers such as silicon and gallium arsenide are manufactured in a large diameter state, and the wafer is cut and separated (diced) into element pieces (semiconductor chips) and then transferred to the next mounting process. At this time, the semiconductor wafer is subjected to dicing, cleaning, drying, expanding, and pick-up processes in a state where the semiconductor wafer is previously adhered to the adhesive sheet, and then transferred to the next bonding process.
- Patent Document 1 In order to simplify the processes of the pickup process and the bonding process among these processes, various dicing / die bonding adhesive sheets having both a wafer fixing function and a die bonding function have been proposed (Patent Document 1, etc.) ).
- the adhesive sheet disclosed in Patent Document 1 enables so-called direct die bonding, and the application process of the die bonding adhesive can be omitted.
- Such an adhesive sheet is formed by laminating a die bond layer forming film including an adhesive layer made of a specific composition on an adhesive layer of an adhesive sheet made of an adhesive layer and a base film.
- Patent Document 2 discloses a thermosetting die bond film (die bond layer forming film) having at least an adhesive layer used for fixing a semiconductor chip to an adherend. It contains an epoxy resin and a phenol resin as a curable resin, an acrylic resin having a weight average molecular weight of 100,000 or more as a thermoplastic resin, and X represents the total weight of the epoxy resin and the phenol resin.
- the weight of the resin is Y
- X / Y is 0.07 to 0.7
- the reduction rate of the epoxy group based on the pre-heat treatment is 60% or less.
- the adhesive layer provided in the die bond layer forming film disclosed in Patent Document 2 suppresses the progress of the thermosetting reaction during heating, and suppresses the progress of crosslinking, so that the boundary between the adhesive layer and the adherend is suppressed. It is said that even when a void is generated, the void can be easily eliminated by heat and pressure during molding.
- the die bond layer forming film receives a heat history such as being heated at 175 ° C. for 1 hour, for example, and bubbles are generated at the boundary between the adhesive layer of the die bond layer forming film and the adherend.
- the adhesive layer that facilitates the disappearance of the bubbles (voids) until the die-bonding layer is formed is also referred to as an “adhesive layer excellent in heat resistance history”.
- the wire bonding suitability is one of the characteristics of the adhesive layer, and wire bonding is performed between a workpiece (for example, a chip) and an adherend (for example, a circuit board) fixed by a die bonding layer. This means a characteristic that enables them to be properly connected when performing.
- the bonding ability of the adhesive layer is low, the bonding reliability of the bond wire is inferior, so that there is an increased risk of poor conduction between the workpiece electrode and the adherend electrode.
- This invention is made
- An object of this invention is to provide the workpiece manufactured using said die bond layer forming film and the sheet
- a die-bonding layer-forming film having the following characteristics is a new one that the adhesive layer provided in the film is excellent in heat history and resistance to wire bonding. I got a good knowledge.
- (Characteristic 1) When the temperature dependence of the storage elastic modulus of the adhesive layer provided in the die bond layer forming film is measured, the storage elastic modulus has a minimum value in the range of 80 ° C to 150 ° C.
- (Characteristic 2) The die bond layer forming film on the peel strength test substrate on which the work piece is placed through the die bond layer forming film is heated at 175 ° C. for 1 hour, and then maintained at 250 ° C. for 30 seconds.
- the shear strength with respect to the peel strength test substrate of the die bond layer forming film, which will be measured later, is 20 N / 2 mm ⁇ or more and 50 N / 2 mm ⁇ or less.
- the die bond layer on the peel strength inspection substrate having a minimum value of storage elastic modulus in a range of 80 ° C. to 150 ° C. and having the workpiece placed thereon via the die bond layer forming film.
- the shear strength of the adhesive layer against the peel strength test substrate was 20 N / 2 mm ⁇ or more and 50 N / die bonding layer formed film which is characterized in that at 2 mm ⁇ or less.
- the adhesive layer contains a binder component including a polymer component (A), a curable component (B) and a curing accelerator (B3), and the polymer component (A) in the binder component, the The die bond layer formation film as described in said (1) whose mass ratio with respect to the mass of the whole adhesive bond layer of the total amount of a sclerosing
- die bond layer forming film according to the above (1) or (2), wherein the die bond layer forming film is an adhesive film for die bonding for bonding a semiconductor chip to a die mounting portion.
- a processed product to which a die bond layer forming film is attached which is manufactured using the die bond layer forming film according to any one of (1) to (3) above.
- the workpiece and the adherend are laminated through a die bond layer, which is manufactured using the workpiece to which the die bond layer forming film described in (4) is attached.
- a semiconductor device having a structure and comprising a wire for connecting the workpiece and the adherend.
- the adhesive layer provided in the die bond layer forming film according to the present invention is excellent in heat resistance history and wire bonding aptitude. Therefore, by using the die bond layer forming film according to the present invention, it is possible to obtain a semiconductor device having high adhesion reliability of the die bond layer and bonding reliability of the bond wire. Moreover, according to this invention, the semiconductor device manufactured using the processed material manufactured using said die-bonding layer forming film and its processed material are provided.
- the die bond layer forming film according to the present embodiment is used for fixing a workpiece (chip or the like) obtained by processing a workpiece (semiconductor wafer or the like) to an adherend (circuit board or the like).
- This die bond layer forming film includes an adhesive layer and may have a single-layer structure composed of an adhesive layer or a multilayer structure.
- the specific structure is not limited.
- it may have a laminated structure in which adhesive layers are formed on both surfaces of the core material.
- the core material include a film (for example, a polyimide film, a polyethylene terephthalate film, a polyethylene naphthalate film, a polycarbonate film), a resin substrate reinforced with glass fibers or plastic non-woven fibers, a silicon substrate, or a glass substrate.
- a film for example, a polyimide film, a polyethylene terephthalate film, a polyethylene naphthalate film, a polycarbonate film
- a resin substrate reinforced with glass fibers or plastic non-woven fibers a silicon substrate, or a glass substrate.
- the method for forming the die bond layer from the die bond layer forming film is not limited.
- the adhesive layer included in the die bond layer forming film contains a thermosetting material, and the die bond layer is formed by heating the adhesive layer.
- the adhesive layer provided in the die bond layer forming film contains an energy ray-curable material, and the die bond layer is formed by irradiating the adhesive layer with energy rays.
- the die bond layer is formed on the side of the semiconductor wafer on which no electrodes such as bumps are formed.
- the electrode of the chip formed from is connected by wire bonding to the electrode of the adherend to which the chip is fixed by the die bond layer. Since the adhesive layer of the die bond layer forming film according to the present embodiment is excellent in heat resistance history, the die bond layer formed from such a die bond layer forming film has high adhesion reliability.
- the die bond layer forming film is required to have at least the following three functions.
- the adhesive layer included in the die bond layer forming film has all of these three functions.
- the adhesive layer is required to have all of the above three functions.
- the adhesive layer provided in the die bond layer forming film according to this embodiment has a temperature range of 80 ° C. to 150 ° C. when the temperature dependence of the storage elastic modulus is measured. Have a minimum value of storage modulus. In the present specification, the temperature that gives the minimum value of the storage elastic modulus of the adhesive layer is also referred to as “elastic minimum temperature”.
- the elastic minimum temperature is 80 ° C. or higher, it becomes easy to set the following high-temperature shear strength to an appropriate value, and the storage stability of the adhesive layer is hardly lowered.
- the wire bonding suitability of the adhesive layer of the die bond layer forming film can be improved.
- wire bonding is performed at about 170 to 180 ° C. Therefore, when the elastic minimum temperature is 150 ° C. or less, the storage elastic modulus of the adhesive layer of the die bond layer forming film is appropriately set during wire bonding. It becomes easy to perform appropriate wire bonding with respect to a laminated structure (having a laminated structure of a workpiece such as a chip, a die bond layer forming film, and an adherend) including a die bond layer forming film.
- the adhesive bonding layer has low wire bonding suitability, the shear strength of a wire (bond wire) formed by wire bonding is reduced, and a specific example is less than 10 g. .
- the minimum elastic temperature is preferably 90 ° C. or higher and 140 ° C. or lower.
- the adhesive layer included in the die bond layer forming film according to the present embodiment preferably includes a thermosetting material.
- the adhesive layer included in the die bond layer-forming film according to the present embodiment has a high-temperature shear strength defined below of 20 N / 2 mm ⁇ or more and 50 N / 2 mm ⁇ or less.
- the high temperature shear strength means that the die bond layer forming film on the peel strength inspection substrate on which the workpiece is placed via the die bond layer forming film is heated at 175 ° C. for 1 hour, and further 250 ° C. Means the shear strength of the adhesive layer with respect to the substrate, measured after being held for 30 seconds in the environment.
- the peel strength test substrate is specifically described in the examples described later.
- the wire bonding suitability of the adhesive layer can be improved.
- the wire bonding suitability is low, defects such as a decrease in the shear strength of the bond wire, and a specific example of less than 10 g are likely to occur.
- the heat resistance history of the adhesive layer can be enhanced.
- the heat resistance history of the adhesive layer is low, bubbles (voids) generated at the boundary between the adhesive layer and the adherend are not easily lost due to the heating of the die bond layer forming film.
- the die bond layer When a heat treatment such as a reflow process is performed on a semiconductor device (having a stacked structure of a workpiece such as a chip, a die bond layer, and an adherend), a die bond layer is formed from the adherend. It becomes easy to peel off, that is, the adhesion reliability of the die bond layer is lowered.
- the viewpoint of enhancing the heat history resistance to increase the wire bonding suitability of the adhesive layer it is preferably, 20 N / 2 mm ⁇ or 30 N / 2 mm ⁇ or less elevated temperature shear strength is less than 20 N / 2 mm ⁇ or 40N / 2 mm ⁇ It is more preferable.
- the high-temperature shear strength is in such a low range, the total amount of the polymer component (A), the curable component (B) and the curing accelerator (B3) occupies the mass of the entire adhesive layer as described later. Even when the mass ratio is 95% by mass or more, it becomes easy to improve the heat resistance history.
- the adhesive layer provided in the die bond layer forming film according to the present embodiment preferably includes a thermosetting material.
- the adhesive layer included in the die bond layer forming film according to an embodiment of the present invention preferably contains a binder component. Thereby, it becomes easy to impart (function 1) sheet shape maintaining property and (function 3) curability to the die bond layer forming film.
- binder component examples include those containing a polymer component (A) and a thermosetting component (B). Moreover, it is preferable that a binder component contains a hardening accelerator (B3) further.
- a pressure-sensitive adhesiveness may be sufficient as initial adhesiveness, It may be a property of being softened and adhered.
- the initial adhesiveness is usually controlled by adjusting various characteristics of the binder component and adjusting the blending amount of the filler (C) described later.
- the polymer component (A) is added mainly for the purpose of imparting sheet shape maintainability to the adhesive layer.
- the weight average molecular weight (Mw) of the polymer component (A) is usually 20,000 or more, preferably 20,000 to 3,000,000.
- acrylic polymers acrylic polymers, polyesters, phenoxy resins, polycarbonates, polyethers, polyurethanes, polysiloxanes, rubber polymers, and the like can be used.
- an acrylic urethane resin obtained by reacting a urethane prepolymer having an isocyanate group at a molecular terminal with an acrylic polyol having an hydroxyl group and an acrylic polyol having a combination of two or more of these, Also good.
- two or more of these may be used in combination, including a polymer in which two or more are bonded.
- an acrylic polymer (A1) is preferably used as the polymer component (A).
- the glass transition temperature (Tg) of the acrylic polymer (A1) is preferably in the range of ⁇ 60 to 50 ° C., more preferably ⁇ 50 to 40 ° C., and further preferably ⁇ 40 to 30 ° C.
- Tg glass transition temperature
- the glass transition temperature of the acrylic polymer (A1) is high, the adhesiveness of the adhesive layer is lowered, and the die bond layer forming film cannot be transferred to the workpiece, or the die bond layer forming film is peeled off from the workpiece after the transfer. May occur.
- the weight average molecular weight (Mw) of the acrylic polymer (A1) is preferably 100,000 to 1,500,000.
- Mw weight average molecular weight
- the acrylic polymer (A1) contains a (meth) acrylic acid ester monomer or a derivative thereof in at least a constituent monomer.
- a (meth) acrylic acid ester monomer alkyl (meth) acrylate, cycloalkyl (meth) acrylate, benzyl (meth) acrylate or the like whose alkyl group has 1 to 20 carbon atoms is used.
- alkyl (meth) acrylates having an alkyl group having 1 to 18 carbon atoms such as methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, and n-butyl (meth) acrylate.
- the structural unit of the acrylic polymer (A1) may be derived from a functional group-containing monomer.
- a monomer includes a polymerizable double bond, a hydroxyl group, an amino group, a substituted amino group, and an epoxy.
- a monomer having a functional group such as a group in the molecule is preferable.
- non-acrylic monomers such as vinyl acetate and styrene may be copolymerized.
- the functional group-containing monomer examples include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, and the like.
- Hydroxyl group-containing monomers examples include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, and the like.
- Hydroxyl group-containing monomers epoxy group-containing monomers such as glycidyl (meth) acrylate, and the like. These may be used alone or in combination of two or more.
- a monomer constituting the acrylic polymer (A1) a monomer having a carboxyl group may be used.
- an epoxy thermosetting component is used as the thermosetting component (B) described later. Since the carboxyl group reacts with the epoxy group in the epoxy thermosetting component, the amount of the monomer having a carboxyl group is preferably small.
- the acrylic polymer (A1) has a reactive functional group by including a structural unit derived from the functional group-containing monomer described above. Is preferred.
- the acrylic polymer (A1) having a hydroxyl group as a reactive functional group is preferable because it can be easily produced and a crosslinked structure can be easily introduced using the crosslinking agent (E). Moreover, the acrylic polymer (A1) having a hydroxyl group is excellent in compatibility with the thermosetting component (B) described later.
- a monomer having a reactive functional group When introducing a reactive functional group into the acrylic polymer (A1) by using a monomer having a reactive functional group as a monomer constituting the acrylic polymer (A1), a monomer having a reactive functional group
- the proportion of the monomer constituting the acrylic polymer (A1) in the total mass is preferably about 1 to 20% by mass, and more preferably 3 to 15% by mass.
- the polymer component (A) is selected from polyester, phenoxy resin, polycarbonate, polyether, polyurethane, polysiloxane, rubber polymer, or a combination of two or more thereof.
- One kind of acrylic resin (A2) or a combination of two or more kinds may be used.
- Such a resin preferably has a weight average molecular weight of 20,000 to 100,000, more preferably 20,000 to 80,000.
- the glass transition temperature of the non-acrylic resin (A2) is preferably in the range of ⁇ 30 to 150 ° C., more preferably in the range of ⁇ 20 to 120 ° C.
- the non-acrylic resin (A2) is used in combination with the above-mentioned acrylic polymer (A1), the delamination between the pressure-sensitive adhesive sheet and the die-bonding layer-forming film is facilitated when the die-bonding layer-forming film is transferred to the workpiece. Further, the adhesive layer of the die bond layer forming film follows the transfer surface, and generation of voids can be suppressed.
- the content of the non-acrylic resin (A2) is such that the non-acrylic resin (A2) and the acrylic polymer (A1)
- the mass ratio (A2: A1) is usually in the range of 1:99 to 60:40, preferably 1:99 to 30:70.
- the content of the non-acrylic resin (A2) is in this range, the above effect can be obtained.
- the epoxy group of the polymer component (A) may be involved in thermosetting.
- such a polymer or resin is also handled as the polymer component (A), not the thermosetting component (B).
- thermosetting component (B) Thermosetting component
- the thermosetting component (B) is added mainly for the purpose of imparting thermosetting to the adhesive layer.
- thermosetting component (B) preferably contains a compound having an epoxy group (hereinafter sometimes simply referred to as “epoxy compound”) (B1), and the epoxy compound (B1) and a thermosetting agent ( It is preferable to use a combination of B2).
- epoxy compound hereinafter sometimes simply referred to as “epoxy compound”
- the weight average molecular weight (Mw) is usually 10,000 or less, preferably 100 to 10,000.
- epoxy compound (B1) contained in the thermosetting component (B) a conventionally known epoxy compound can be used.
- epoxy compounds include polyfunctional epoxy resins, biphenyl compounds, bisphenol A diglycidyl ether and hydrogenated products thereof, cresol novolac type epoxy resins, dicyclopentadiene type epoxy resins, and biphenyl type epoxies.
- examples thereof include epoxy compounds having two or more functional groups in the molecule, such as resins, bisphenol A type epoxy resins, bisphenol F type epoxy resins, phenylene skeleton type epoxy resins, and phenol novolac type epoxy resins. These can be used individually by 1 type or in combination of 2 or more types.
- an epoxy compound having a reactive double bond group may be used as the epoxy compound (B1).
- an epoxy compound which has a reactive double bond group since the intensity
- the reactive double bond group possessed by such an epoxy compound a vinyl group, an allyl group, a (meth) acryloyl group, and the like are preferable, and a methacryloyl group is more preferable.
- Examples of such an epoxy compound having a reactive double bond group include a compound obtained by converting a part of the epoxy group of a polyfunctional epoxy compound into a group containing a reactive double bond group.
- a compound can be synthesized, for example, by addition reaction of acrylic acid to an epoxy group.
- bonded with the aromatic ring etc. which comprise an epoxy resin are mentioned.
- Specific product names include CNA-147 manufactured by Nippon Kayaku Co., Ltd.
- the number average molecular weight of the epoxy compound (B1) is not particularly limited, but is preferably 300 to 30,000, more preferably from the viewpoints of curability of the adhesive layer provided in the die bond layer forming film, strength of the die bond layer, and heat resistance. Is 400 to 10,000, particularly preferably 500 to 3,000.
- thermosetting agent (B2) contained in the thermosetting component (B) functions as a curing agent for the epoxy compound (B1).
- a thermosetting agent (B2) the compound which has 2 or more of functional groups which can react with an epoxy group in 1 molecule is mentioned.
- the functional group include a phenolic hydroxyl group, an alcoholic hydroxyl group, an amino group, a carboxyl group, and an acid anhydride. Of these, phenolic hydroxyl groups, amino groups, acid anhydrides and the like are preferable, and phenolic hydroxyl groups and amino groups are more preferable.
- thermosetting agent having an amino group examples include DICY (dicyandiamide).
- thermosetting agents having a phenolic hydroxyl group include polyfunctional phenolic resins, biphenols, novolac-type phenolic resins, dicyclopentadiene-based phenolic resins, and aralkylphenolic resins.
- the number average molecular weight of the thermosetting agent (B2) contained in the thermosetting component (B) is preferably 40 to 30,000, more preferably 60 to 10,000, and particularly preferably 80 to 3,000.
- the content of the thermosetting agent (B2) in the adhesive layer contained in the die bond layer forming film is preferably 0.1 to 500 parts by mass with respect to 100 parts by mass of the epoxy compound (B1). More preferably, it is part by mass. If the content of the thermosetting agent (B2) is small, the adhesiveness may not be obtained due to insufficient curing.
- the content of the thermosetting agent (B2) is preferably 0.2 to 50 parts by mass and more preferably 0.5 to 40 parts by mass with respect to 100 parts by mass of the polymer component (A). preferable. If the content of the thermosetting agent (B2) is low, sufficient adhesiveness may not be obtained due to insufficient curing.
- thermosetting component (B) contains an epoxy compound (B1) and a thermosetting agent (B2), and the softening point of these epoxy compounds (B1) and a thermosetting agent (B2) is 50 degreeC or more. It is preferable from the viewpoint of increasing the fluidity of the die-bonding layer-forming film by heating the die-bonding layer-forming film at the time of sticking the die-bonding layer-forming film and improving the sticking suitability.
- “softening point” means a value measured by the ring and ball method in accordance with JIS K 7234: 1986.
- the softening point of the epoxy compound (B1) and the thermosetting agent (B2) is more preferably 60 ° C. or higher, and particularly preferably 70 ° C. or higher.
- the upper limit of the softening point of the epoxy compound (B1) and the thermosetting agent (B2) is appropriately set so that the elastic minimum temperature and the high temperature shear strength of the adhesive layer are in the above-described ranges.
- the binder component may further contain a curing accelerator (B3) in order to adjust the curing speed of the adhesive layer provided in the die bond layer forming film.
- the curing accelerator (B3) is particularly preferably used when an epoxy thermosetting component is used as the thermosetting component (B).
- Preferred curing accelerators (B3) include tertiary amines such as triethylenediamine, benzyldimethylamine, triethanolamine, dimethylaminoethanol, tris (dimethylaminomethyl) phenol; 2-methylimidazole, 2-phenylimidazole, 2 -Imidazoles such as phenyl-4-methylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole; organics such as tributylphosphine, diphenylphosphine, triphenylphosphine Phosphines; and tetraphenylboron salts such as tetraphenylphosphonium tetraphenylborate and triphenylphosphine tetraphenylborate. These can be used individually by 1 type or in mixture of 2 or more types.
- the curing accelerator (B3) is preferably 0.01 to 10 parts by mass with respect to 100 parts by mass of the total amount of the epoxy compound (B1) and the thermosetting agent (B2). More preferably, it is contained in an amount of 0.1 to 1 part by mass.
- the curing accelerator (B3) in an amount within the above range, it has excellent adhesion even when exposed to high temperatures and high humidity, and high package reliability even when exposed to severe reflow conditions. Sex can be achieved. If the content of the curing accelerator (B3) is low, sufficient adhesion may not be obtained due to insufficient curing.
- the total amount of the epoxy compound (B1), the thermosetting agent (B2), and the curing accelerator (B3), that is, the total amount of the thermosetting component (B) and the curing accelerator (B3) is an adhesive. It is contained in a proportion of preferably less than 25% by mass, more preferably 1 to 20% by mass, and further preferably 3 to 10% by mass in the total mass of the layer.
- the thermosetting component (B) is preferably 1 to 35 parts by weight, more preferably 3 to 25 parts by weight, and still more preferably 100 parts by weight of the polymer component (A). It is contained in the range of 3 to 8 parts by mass. In particular, when the content of the thermosetting component (B) is reduced, for example, if the content is within the range of 3 to 25 parts by mass with respect to 100 parts by mass of the polymer component (A), There is a tendency to obtain a good effect.
- the die bond layer forming film is Even if the die bond layer forming film is heated before the adhesive layer is cured, the possibility that voids are generated in the adhesive layer may be reduced. When there are few voids generated, it becomes easy to eliminate the voids. Therefore, by adjusting the content of the thermosetting component (B) in the adhesive layer, the heat resistance history of the adhesive layer is consequently obtained. May be improved.
- thermosetting component (B) when the thermosetting component (B) is less than the polymer component (A), as will be described below, the polymer component (A), the thermosetting component (B), and the curing accelerator (B3 ) Even when the mass ratio of the total amount of ()) to the mass of the entire adhesive layer is 95% by mass or more, it is easy to improve the heat resistance history.
- the mass ratio of the total amount of the polymer component (A), the curable component (B) and the curing accelerator (B3) contained in the binder component to the mass of the entire adhesive layer is 95% by mass or more. preferable.
- the adhesive layer contains almost no particulate material such as the filler (C) described later, and the particulate material may fall off the die bond layer. Can be reduced. As a result, it can be suppressed that the particulate material dropped off inside the device on which the work piece after die bonding is mounted causes a problem.
- the adhesive layer included in the die bond layer forming film may contain the following components in addition to the binder component.
- the adhesive layer provided in the die bond layer forming film may contain the filler (C), but preferably does not contain it. Since the adhesive layer does not contain a particulate material such as the filler (C), as described above, the problem caused by the particulate material falling off from the die bond layer can be solved.
- the aspect in case the adhesive bond layer with which a die-bonding layer formation film is provided contains a filler (C) is demonstrated.
- Examples of the filler (C) include silica, alumina, talc, calcium carbonate, titanium oxide, iron oxide, silicon carbide, boron nitride and other powders, beads formed by spheroidizing these, single crystal fibers, glass fibers, and the like. Among these, silica filler and alumina filler are preferable.
- a filler (C) can be used individually or in mixture of 2 or more types.
- the range of the content of the filler (C) is preferably more than 0% by mass and 30% by mass or less, more preferably 1 to 5% by mass in the total mass of the adhesive layer.
- the surface of the filler (C) in the present invention is preferably modified with a compound having a reactive double bond group.
- a filler whose surface is modified with a compound having a reactive double bond group is referred to as a “filler having a reactive double bond group on the surface”.
- the reactive double bond group of the filler (C) is preferably a vinyl group, an allyl group, or a (meth) acryloyl group.
- the average particle diameter of the filler (C) is preferably in the range of 0.01 to 5 ⁇ m, more preferably 0.01 to 1 ⁇ m.
- the “average particle size” is obtained by a particle size distribution meter (“Nanotrac 150” manufactured by Nikkiso Co., Ltd.) using a dynamic light scattering method.
- Examples of such coupling agents include titanate coupling agents, aluminate coupling agents, silane coupling agents, and the like. Of these, silane coupling agents are preferred.
- silane coupling agent a silane coupling agent whose functional group that reacts with the organic functional group is a group that reacts with the functional group of the polymer component (A), the thermosetting component (B), or the like is preferably used. Is done.
- silane coupling agents examples include ⁇ -glycidoxypropyltrimethoxysilane, ⁇ -glycidoxypropyltriethoxysilane, ⁇ -glycidoxypropylmethyldiethoxysilane, ⁇ - (3,4-epoxycyclohexyl).
- an oligomer which is a product obtained by condensing the low molecular silane coupling agent having two or three alkoxy groups or the low molecular silane coupling agent having four alkoxy groups by hydrolysis and dehydration condensation of alkoxy groups there are types.
- a low molecular silane coupling agent having two or three alkoxy groups and a low molecular silane coupling agent having four alkoxy groups are condensed by dehydration condensation.
- the oligomer is preferably an oligomer having a high reactivity of alkoxy groups and a sufficient number of organic functional groups. For example, 3- (2,3-epoxypropoxy) propylmethoxysiloxane and dimethoxysiloxane The oligomer which is a polymer is mentioned.
- the silane coupling agent is usually contained at a ratio of 0.1 to 20 parts by mass, preferably 0.2 to 10 parts by mass, more preferably 0.3 to 5 parts by mass with respect to 100 parts by mass of the binder component. If the content of the silane coupling agent is less than 0.1 parts by mass, the above effect may not be obtained, and if it exceeds 20 parts by mass, it may cause outgassing.
- crosslinking agent (E) can also be added in order to adjust the initial adhesive force and cohesion force of the adhesive bond layer with which the die bond layer forming film is provided.
- a reactive functional group is contained in the said acrylic polymer (A1).
- a polyfunctional compound having reactivity with the reactive functional group of the acrylic polymer (A1) can be used.
- examples of such polyfunctional compounds include isocyanate compounds, epoxy compounds, amine compounds, melamine compounds, aziridine compounds, hydrazine compounds, aldehyde compounds, oxazoline compounds, metal alkoxide compounds, metal chelate compounds, metal salts, ammonium salts, A reactive phenol resin etc. can be mentioned.
- isocyanate compound will be explained in some detail.
- isocyanate compounds include aromatic polyisocyanates such as tolylene diisocyanate, diphenylmethane diisocyanate, and xylylene diisocyanate; dicyclohexylmethane-4,4′-diisocyanate, bicycloheptane triisocyanate, cyclopentylene diisocyanate, cyclohexylene diisocyanate, methylcyclohexane.
- Examples thereof include alicyclic isocyanate compounds such as silylene diisocyanate and hydrogenated xylylene diisocyanate; and isocyanate compounds having a chain skeleton such as hexamethylene diisocyanate, trimethylhexamethylene diisocyanate and lysine diisocyanate.
- a modified product of can also be used.
- the isocyanate compound may be composed of one kind of substance or may be composed of a plurality of kinds of substances.
- an isocyanate-based crosslinking agent it is preferable to use an acrylic polymer (A1) having a hydroxyl group as a reactive functional group.
- an acrylic polymer (A1) having a hydroxyl group it is preferable to use an acrylic polymer (A1) having a hydroxyl group as a reactive functional group.
- the crosslinking agent (E) has an isocyanate group and the acrylic polymer (A1) has a hydroxyl group, a reaction between the crosslinking agent (E) and the acrylic polymer (A1) occurs, and the crosslinking structure is simplified in the adhesive layer. Can be introduced.
- the cross-linking agent (E) is usually 0.01 to 20 parts by mass, preferably 0.1 to 10 parts by mass, and more preferably 0 to 100 parts by mass of the acrylic polymer (A1). Used in a ratio of 5 to 5 parts by mass.
- a photoinitiator (F) may be mix
- a photopolymerization initiator By containing a photopolymerization initiator, a dicing die bonding sheet comprising a die bonding layer forming sheet provided with a die bonding layer forming film is attached to the wafer, and then irradiated with ultraviolet rays before the dicing step.
- the reactive double bond group which the epoxy compound etc. which have a heavy bond group have can be made to react, and it can precure.
- the adhesive layer included in the die-bonding layer forming film is relatively soft before curing, so that the adhesive property to the wafer is good. Moreover, it has moderate hardness at the time of dicing, and can prevent adhesion and other problems of the die bond layer forming film (particularly, the adhesive layer) to the dicing blade. Furthermore, the peelability of the interface between the pressure-sensitive adhesive sheet and the die bond layer forming film can be controlled. In addition, since the hardness is higher in the precured state than in the uncured state, the work stability during wire bonding is further improved.
- the photopolymerization initiator (F) include benzophenone, acetophenone, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzoin benzoic acid, methyl benzoin benzoate, benzoin dimethyl ketal, 2, 4-diethylthioxanthone, 1-hydroxycyclohexyl phenyl ketone, benzyldiphenyl sulfide, tetramethylthiuram monosulfide, azobisisobutyronitrile, benzyl, dibenzyl, diacetyl, ⁇ -chloranthraquinone, (2,4,6- Trimethylbenzyldiphenyl) phosphine oxide, 2-benzothiazole-N, N-diethyldithiocarbamate, oligo ⁇ 2-hydroxy-2-methyl 1- [4- (1- (1-
- the blending ratio thereof is usually 0.1 to 10 parts by weight, preferably 1 to 5 parts per 100 parts by weight of the epoxy compound having a reactive double bond group. Part by mass.
- the content of the photopolymerization initiator (F) is lower than the above range, a satisfactory reaction may not be obtained due to insufficient photopolymerization, and when it exceeds the above range, a residue that does not contribute to photopolymerization is generated, and the adhesive.
- the curability of the layer may be insufficient.
- additives may be blended in the adhesive layer included in the die bond layer forming film as necessary.
- additives include leveling agents, plasticizers, antistatic agents, antioxidants, ion scavengers, gettering agents, chain transfer agents, release agents, and the like.
- the adhesive layer included in the die bond layer forming film can be obtained using, for example, a composition (a composition for forming a die bond layer) obtained by mixing the above-described components at an appropriate ratio.
- the composition for forming a die bond layer may be diluted with a solvent in advance, or may be added to the solvent during mixing. Moreover, you may dilute with a solvent at the time of use of the composition for die-bonding layer formation.
- Examples of such a solvent include ethyl acetate, methyl acetate, diethyl ether, dimethyl ether, acetone, methyl ethyl ketone, acetonitrile, hexane, cyclohexane, toluene, heptane and the like.
- the adhesive layer included in the die bond layer forming film has initial adhesiveness (for example, pressure-sensitive adhesiveness and thermal adhesiveness) and curability.
- initial adhesiveness for example, pressure-sensitive adhesiveness and thermal adhesiveness
- it can be applied to the workpiece by pressing in an uncured state.
- an adhesive bond layer has heat adhesiveness
- work the die-bonding layer forming film provided with an adhesive bond layer can be heated and affixed.
- the thermal adhesiveness in the present invention means that there is no pressure-sensitive adhesiveness at room temperature, but it is softened by heat and can be bonded to a workpiece.
- the die bond layer forming film can finally give a die bond layer having high impact resistance through curing of the adhesive layer provided therein, and can have excellent adhesive strength even under severe high temperature and high humidity conditions. .
- the adhesive layer containing a filler having a reactive double bond group on the surface is excellent in the dispersibility of the filler, there is little deformation of the adhesive layer even at a high temperature at which wire bonding is performed. It can be done stably. Then, after the thermosetting of the adhesive layer, it can give a die-bonding layer with high impact resistance, has excellent shear strength, and can maintain sufficient adhesion even under severe high temperature and high humidity conditions. .
- the thickness of the adhesive layer provided in the die bond layer forming film is preferably 1 to 100 ⁇ m, more preferably 2 to 90 ⁇ m, and particularly preferably 3 to 80 ⁇ m.
- FIG. 1 is a cross-sectional view of a die bond layer forming sheet according to an embodiment of the present invention.
- seat for die-bonding layer formation which concerns on this embodiment is the peeling sheet laminated
- the release sheet 21 is peeled off when the die bond layer forming sheet 2 is used.
- the release sheet 21 protects the die bond layer forming film 1 until the die bond layer forming sheet 2 is used.
- the configuration of the release sheet 21 is arbitrary, and examples thereof include a plastic film having peelability with respect to the die bond layer forming film 1 and a release film of the plastic film with a release agent or the like.
- Specific examples of the plastic film include polyester films such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate, and polyolefin films such as polypropylene and polyethylene.
- the release agent silicone-based, fluorine-based, long-chain alkyl-based, and the like can be used, and among these, a silicone-based material that is inexpensive and provides stable performance is preferable.
- the thickness of the release sheet 21 is not particularly limited, but is usually about 20 to 250 ⁇ m.
- the release sheet 21 as described above may also be laminated on the other surface of the die bond layer forming film 1 (the upper surface in FIG. 1). In this case, it is preferable that the release force of one release sheet 21 is increased to obtain a heavy release release sheet, and the release force of the other release sheet 21 is reduced to provide a light release release sheet.
- the peeling force of the release sheet 21 different, first, the light release type release sheet provided in the die bond layer forming sheet 2 is peeled, and the surface of the die bond layer forming film 1 exposed is used as a semiconductor.
- the release surface of the release sheet 21 (surface having peelability; usually a surface subjected to release treatment, but is not limited thereto)
- the die bond layer forming film 1 is formed. Specifically, a coating agent for a die bond layer forming film containing a curable adhesive constituting the die bond layer forming film 1 and, if desired, a solvent is prepared, and a roll coater, a knife coater, a roll knife coater, an air knife.
- the die bond layer forming film 1 is formed by applying to the release surface of the release sheet 21 with a coating machine such as a coater, die coater, bar coater, gravure coater, curtain coater, and drying.
- FIG. 2 is a cross-sectional view of a die bond layer forming sheet according to another embodiment of the present invention.
- the die bond layer forming sheet 3 according to this embodiment includes a pressure-sensitive adhesive sheet 4 in which a pressure-sensitive adhesive layer 42 is laminated on one surface of a substrate 41, and a pressure-sensitive adhesive layer 42 of the pressure-sensitive adhesive sheet 4.
- the die-bonding layer forming film 1 laminated on the side, and the jig pressure-sensitive adhesive layer 5 laminated on the peripheral edge of the surface opposite to the pressure-sensitive adhesive sheet 4 in the die-bonding layer forming film 1 are configured.
- tool is a layer for adhere
- the die bond layer forming sheet 3 holds and holds the workpiece when the workpiece is processed, and attaches the die bond layer to the workpiece or a workpiece obtained by processing the workpiece. Used to form.
- This die bond layer is formed from the die bond layer forming film 1.
- the die bond layer forming sheet 3 is used, as an example, to hold a semiconductor wafer during dicing processing of a semiconductor wafer as a work and to form a die bond layer on a semiconductor chip obtained by dicing. It is not limited to this.
- the pressure-sensitive adhesive sheet 4 of the die bond layer forming sheet 3 is generally referred to as a dicing sheet.
- Adhesive Sheet 4 of the die bond layer forming sheet 3 includes a base material 41 and an adhesive layer 42 laminated on one surface of the base material 41.
- the base material 41 of the pressure-sensitive adhesive sheet 4 is not particularly limited as long as it is suitable for workpiece processing, for example, dicing and expanding of a semiconductor wafer, and is usually a resin-based material. It is comprised from the film (henceforth "resin film”) which uses as a main material.
- resin films include polyethylene films such as low density polyethylene (LDPE) films, linear low density polyethylene (LLDPE) films, and high density polyethylene (HDPE) films, polypropylene films, polybutene films, polybutadiene films, and polymethylpentene films.
- LDPE low density polyethylene
- LLDPE linear low density polyethylene
- HDPE high density polyethylene
- Polyolefin films such as ethylene-norbornene copolymer film and norbornene resin film; ethylene-vinyl acetate copolymer film, ethylene- (meth) acrylic acid copolymer film, ethylene- (meth) acrylic acid ester copolymer
- Ethylene copolymer films such as films; Polyvinyl chloride films such as polyvinyl chloride films and vinyl chloride copolymer films; Polyethylene terephthalate films, Polybutylene films Polyester film such as terephthalate film; polyurethane film; polyimide film; polystyrene films; polycarbonate films; and fluorine resin film. Further, modified films such as these crosslinked films and ionomer films are also used.
- the substrate 41 may be a film made of one of these, or may be a laminated film in which two or more of these are combined.
- (meth) acrylic acid in the present specification means both acrylic acid and methacrylic acid. The same applies to other similar terms.
- a polyethylene film, a polyolefin film, an ethylene copolymer film, a crosslinked film or a modified film thereof is preferable.
- the resin film may be subjected to a surface treatment such as an oxidation method or a concavo-convex method or a primer treatment on one or both sides as desired for the purpose of improving the adhesion with the pressure-sensitive adhesive layer 42 laminated on the surface.
- a surface treatment such as an oxidation method or a concavo-convex method or a primer treatment on one or both sides as desired for the purpose of improving the adhesion with the pressure-sensitive adhesive layer 42 laminated on the surface.
- a surface treatment such as an oxidation method or a concavo-convex method or a primer treatment on one or both sides as desired for the purpose of improving the adhesion with the pressure-sensitive adhesive layer 42 laminated on the surface.
- the oxidation method include corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), flame treatment, hot air treatment, ozone, ultraviolet irradiation treatment, and the like.
- a thermal spraying method include a thermal spraying method.
- the base material 41 may contain various additives such as a colorant, a flame retardant, a plasticizer, an antistatic agent, a lubricant, and a filler in the resin film.
- the thickness of the base material 41 is not particularly limited as long as it can function properly in each process in which the die bond layer forming sheet 3 is used.
- the range is preferably 20 to 450 ⁇ m, more preferably 25 to 400 ⁇ m, and particularly preferably 50 to 350 ⁇ m.
- the pressure-sensitive adhesive layer 42 included in the pressure-sensitive adhesive sheet 4 of the die-bonding layer forming sheet 3 according to the present embodiment may be composed of a non-energy ray curable pressure sensitive adhesive or energy ray curable. You may be comprised from an adhesive.
- the non-energy ray curable pressure-sensitive adhesive those having desired adhesive strength and removability are preferable.
- Polyvinyl ether-based pressure-sensitive adhesives can be used.
- an acrylic pressure-sensitive adhesive that has high adhesion to the die bond layer forming film 1 and that can effectively prevent the workpiece or workpiece from falling off in a dicing process or the like is preferable.
- the energy ray curable pressure-sensitive adhesive has an adhesive force that is reduced by irradiation with energy rays. Therefore, when it is desired to separate the workpiece or workpiece and the pressure-sensitive adhesive sheet 4, it can be easily separated by irradiation with energy rays. it can.
- the pressure-sensitive adhesive layer 42 is made of an energy ray-curable pressure-sensitive adhesive
- the pressure-sensitive adhesive layer 42 in the die bond layer forming sheet 3 may be pre-cured.
- the energy ray-curable pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer 42 may be mainly composed of a polymer having energy ray-curability, or a polymer having no energy ray-curability and a lot of energy ray-curable properties. It may be based on a mixture of a functional monomer and / or an oligomer.
- the thickness of the pressure-sensitive adhesive layer 42 is not particularly limited as long as it can function properly in each process in which the die-bonding layer forming sheet 3 is used. Specifically, the thickness is preferably 1 to 50 ⁇ m, particularly preferably 2 to 30 ⁇ m, and further preferably 3 to 20 ⁇ m.
- tool what has desired adhesive force and removability is preferable, for example, an acrylic adhesive, a rubber adhesive, a silicone adhesive, a urethane adhesive Polyester-based pressure-sensitive adhesives, polyvinyl ether-based pressure-sensitive adhesives, and the like can be used.
- an acrylic pressure-sensitive adhesive that has high adhesion to a jig such as a ring frame and can effectively prevent the die bond layer forming sheet 3 from being peeled off from the ring frame or the like in a dicing process or the like is preferable.
- the base material as a core material may intervene in the middle of the thickness direction of the adhesive layer 5 for jigs.
- the thickness of the pressure-sensitive adhesive layer 5 for jigs is preferably 5 to 200 ⁇ m, and particularly preferably 10 to 100 ⁇ m, from the viewpoint of adhesion to a jig such as a ring frame.
- the die bond layer forming sheet 3 is preferably a first laminate including the die bond layer forming film 1 and a second including the pressure sensitive adhesive sheet 4. After producing a laminated body separately, it can manufacture by laminating
- the die bond layer forming film 1 is formed on the release surface of the first release sheet.
- a coating composition for forming an adhesive layer containing the above-described composition for forming a die bond layer and, optionally, a solvent is prepared, a roll coater, a knife coater, a roll knife coater, The die bond layer forming film 1 is formed by applying to the release surface of the first release sheet and drying using a coating machine such as an air knife coater, die coater, bar coater, gravure coater, curtain coater or the like.
- first laminate in which the release surface of the second release sheet is superimposed on the exposed surface of the die bond layer forming film 1 and pressure-bonded, and the die bond layer forming film 1 is sandwiched between the two release sheets.
- the configuration of the first laminate is equal to the configuration of the die bond layer forming sheet 2 described above.
- half cutting may be performed as desired, and the die bond layer forming film 1 (and the second release sheet) may be formed in a desired shape, for example, a circle. In this case, the excess part of the die bond layer forming film 1 and the second release sheet generated by the half cut may be appropriately removed.
- a coating agent for the pressure-sensitive adhesive layer further containing a pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer 42 and, if desired, a solvent, on the release surface of the third release sheet.
- the pressure-sensitive adhesive layer 42 is formed by applying and drying. Then, the base material 41 is crimped
- the pressure-sensitive adhesive layer 42 when the pressure-sensitive adhesive layer 42 is made of an energy ray-curable pressure-sensitive adhesive, the pressure-sensitive adhesive layer 42 may be irradiated with energy rays at this stage to cure the pressure-sensitive adhesive layer 42 or die bond.
- the adhesive layer 42 may be cured after being laminated with the layer forming film 1.
- the die bond layer forming sheet 3 is attached to a work for performing a dicing process and the like and the adhesive layer 42 is cured after being laminated with the die bond layer forming film 1, the dicing process or the like is performed.
- the pressure-sensitive adhesive layer 42 may be cured before, or the pressure-sensitive adhesive layer 42 may be cured after a dicing step or the like.
- energy rays ultraviolet rays, electron beams, etc. are usually used. Irradiation of energy rays varies depending on the kind of energy rays, for example, in the case of ultraviolet rays, preferably 50 ⁇ 1000mJ / cm 2 in quantity, especially 100 ⁇ 500mJ / cm 2 preferably. In the case of an electron beam, about 10 to 1000 krad is preferable.
- the second release sheet in the first laminate is released and the third release sheet in the second laminate is released. Then, the die bond layer forming film 1 exposed in the first laminate and the pressure-sensitive adhesive layer 42 of the pressure-sensitive adhesive sheet 4 exposed in the second laminate are overlapped and pressure-bonded.
- the pressure-sensitive adhesive sheet 4 in which the pressure-sensitive adhesive layer 42 is laminated on the base material 41, the die-bonding layer-forming film 1 laminated on the pressure-sensitive adhesive layer 42 side of the pressure-sensitive adhesive sheet 4, and the die-bonding layer-forming film 1 In this way, a die bond layer forming sheet 3 composed of the first release sheet laminated on the surface opposite to the adhesive sheet 4 is obtained. Subsequently, after peeling a 1st peeling sheet, the adhesive layer 5 for jig
- the jig pressure-sensitive adhesive layer 5 can also be applied and formed in the same manner as the pressure-sensitive adhesive layer 42.
- the die-bonding layer-forming sheet 3 can be configured as shown in FIG. 2 by performing half-cutting so that the pressure-sensitive adhesive sheet 4, the die-bonding layer-forming film 1 and the jig pressure-sensitive adhesive layer 5 are cut.
- FIG. 3 is a cross-sectional view of a die bond layer forming sheet according to still another embodiment of the present invention.
- the die bond layer forming sheet 3 ⁇ / b> A includes a pressure-sensitive adhesive sheet 4 in which a pressure-sensitive adhesive layer 42 is laminated on one surface of a base material 41, and a pressure-sensitive adhesive layer 42 of the pressure-sensitive adhesive sheet 4. And a die bond layer forming film 1 laminated on the side.
- the die bond layer forming film 1 in the embodiment is formed to be substantially the same as or slightly larger than the work in the surface direction and smaller than the pressure-sensitive adhesive sheet 4 in the surface direction.
- the portion of the pressure-sensitive adhesive layer 42 where the die bond layer forming film 1 is not laminated can be attached to a jig such as a ring frame.
- each member of the die bond layer forming sheet 3A is the same as the material and thickness of each member of the die bond layer forming sheet 3 described above.
- the pressure-sensitive adhesive layer 42 is made of an energy ray-curable pressure-sensitive adhesive
- the portion of the pressure-sensitive adhesive layer 42 that is in contact with the die bond layer forming film 1 cures the energy ray-curable pressure-sensitive adhesive, and the other portion is energy. It is preferable not to cure the linear curable adhesive.
- a material obtained by curing the energy ray-curable pressure-sensitive adhesive usually has a high elastic modulus and a high surface smoothness, so that the die bond layer forming sheet 3A easily functions effectively as a dicing sheet.
- the die bond layer forming sheet 3A is similar to the jig adhesive layer 5 for the jig of the die bond layer forming sheet 3 at the peripheral edge of the pressure sensitive adhesive layer 42 of the pressure sensitive adhesive sheet 4 opposite to the base 41.
- a pressure-sensitive adhesive layer for jigs may be provided separately.
- the die bond layer forming film 1 of the die bond layer forming sheet 3 according to the present embodiment is attached to a work, the work is divided into a processed product, and the die bond layer forming film 1 is formed on any surface of the processed product.
- a workpiece to which the die bond layer forming film 1 is adhered can be obtained.
- the workpiece may be a silicon wafer, and may include various articles such as a compound semiconductor wafer such as gallium and arsenic, a glass substrate, a ceramic substrate, an organic material substrate such as an FPC, or a metal material such as precision parts. it can.
- a semiconductor wafer is used as a workpiece will be described as a main example.
- the formation of a circuit on the wafer surface can be performed by various methods including conventionally used methods such as an etching method and a lift-off method.
- the opposite surface (back surface) of the circuit surface of the wafer is ground.
- the grinding method is not particularly limited, and grinding may be performed by a known means using a grinder or the like.
- an adhesive sheet called a surface protection sheet is attached to the circuit surface in order to protect the circuit on the surface.
- the circuit surface side (that is, the surface protection sheet side) of the wafer is fixed by a chuck table or the like, and the back surface side on which no circuit is formed is ground by a grinder.
- the thickness of the wafer after grinding is not particularly limited, but is usually about 50 to 500 ⁇ m.
- the crushed layer generated during back grinding is removed.
- the crushed layer is removed by chemical etching, plasma etching, or the like.
- the die bond layer forming film 1 of the die bond layer forming sheet 3 is attached to the back surface of the wafer.
- the sticking method is not particularly limited.
- the back side of the semiconductor wafer is placed on the die bond layer forming film 1 of the die bond layer forming sheet 3 according to the present invention, and lightly pressed to fix the semiconductor wafer.
- the die bond layer forming sheet 3 is fixed to a jig such as a ring frame at the outer periphery of the die bond layer forming sheet 3.
- the die bond layer forming film 1 may be appropriately heated (although it is not limited, it is preferably 40 to 80 ° C.).
- the die bond layer forming film 1 is irradiated with energy rays from the pressure-sensitive adhesive sheet side, for example, the reactive double bond group of the epoxy compound having a reactive double bond group is reacted and cured, and the die bond layer forming film 1 has an adhesive.
- energy rays to be irradiated include ultraviolet rays (UV) and electron beams (EB), and preferably ultraviolet rays are used.
- the semiconductor wafer is cut to obtain a semiconductor chip by a blade dicing method using a dicing saw or a laser dicing method using laser light.
- the cutting depth when a dicing saw is used is a depth that takes into account the total thickness of the semiconductor wafer and the thickness of the die bond layer forming film 1 and the wear of the dicing saw, and the die bond layer forming film 1 is also the same as the chip. Cut to size.
- a laser beam having a large aperture (NA) is irradiated so that a modified layer is preliminarily formed inside the workpiece while minimizing damage to the vicinity of the workpiece surface.
- a modified layer fracture type tension division may be performed in which a force is applied to the workpiece to obtain a piece-like body as a processed product.
- the energy beam irradiation may be performed at any stage after the semiconductor wafer is pasted and before the semiconductor chip is peeled off (pickup). For example, the irradiation may be performed after dicing or after the following expanding step. Good. Further, the energy beam irradiation may be performed in a plurality of times.
- the die bond layer forming sheet 3 is expanded, the interval between the semiconductor chips is expanded, and the semiconductor chips can be picked up more easily. At this time, a deviation occurs between the die bond layer forming film 1 and the pressure sensitive adhesive sheet, the adhesive force between the die bond layer forming film 1 and the pressure sensitive adhesive sheet is reduced, and the pick-up suitability of the semiconductor chip is improved.
- the cut die bond layer forming film 1 can be fixed and left on the back surface of the semiconductor chip and peeled off from the adhesive sheet. In this way, a processed product to which the die bond layer forming film 1 is attached is obtained.
- the expansion may be performed while maintaining the temperature of the die bond layer forming film 1 at a low temperature, for example, 10 ° C. or less.
- a low temperature for example, 10 ° C. or less.
- the workpiece to which the die bond layer forming film 1 is attached is placed on the adherend so that the die bond layer forming film 1 is positioned between the adherend and the workpiece.
- the adherend include a circuit board, a lead frame (attachment surface is a die pad portion), another semiconductor chip, and the like.
- the adherend may be heated before mounting the semiconductor chip, or may be heated immediately after mounting, or may be heated immediately after mounting the chip.
- the heating temperature is usually 80 to 200 ° C., preferably 100 to 180 ° C.
- the heating time is usually 0.1 seconds to 5 minutes, preferably 0.5 seconds to 3 minutes.
- the pressure is usually 1 kPa to 200 MPa.
- heating may be further performed as necessary. This heating is performed, for example, at the time of wire bonding described below. When the line is stopped during the wire bonding process, the heating time may be as long as 1 to 5 hours. Since the adhesive layer provided in the die bond layer forming film 1 according to the present embodiment is excellent in heat resistance history, when such heating is performed, bubbles are generated between the adhesive layer and the adherend. Even if it forms a die-bonding layer from the die-bonding layer formation film 1, it is easy to eliminate this bubble (void).
- the member obtained by laminating the semiconductor chip on the adherend obtained by the above method is wire-bonded to connect the adherend and the semiconductor chip included in the member.
- the temperature of the die bond layer forming film 1 located between the adherend and the semiconductor chip reaches about 170 to 180 ° C., but the adhesive layer provided in the die bond layer forming film 1 has the above-mentioned elastic minimum. Since the temperature-related condition is satisfied, defects during wire bonding such as a decrease in bond strength of the bond wire are unlikely to occur.
- the adhesive layer included in the die bond layer forming film 1 is fully cured to have a structure in which the workpiece and the adherend are laminated via the die bond layer, and the workpiece and the adherend are connected.
- a semiconductor device provided with a wire is obtained.
- the heating conditions for the main curing are appropriately set according to the composition of the adhesive layer.
- the heating for the main curing may be performed by heating in resin sealing that is normally performed in the manufacture of a package related to a semiconductor device from the viewpoint of improving productivity. Using the workpiece laminated on the adherend as an adherend, another workpiece is laminated, and this operation is further repeated as necessary, and the resin sealing usually performed in the manufacture of the package related to the obtained laminated structure is performed.
- the wire bonding is stably performed at the time of wire bonding because the adhesive layer has a certain degree of hardness. Further, since the adhesive layer included in the die bond layer forming film 1 has excellent heat resistance history, voids hardly remain between the die bond layer and the adherend, and the package reliability can be improved.
- a release sheet may be laminated on the opposite side of the die bond layer forming film 1 of the die bond layer forming sheets 3 and 3A from the pressure sensitive adhesive sheet 4.
- Example 1 Prepare the coating composition for forming the adhesive layer by mixing the following components at the blending ratio shown in Table 1 (all numbers in the column are solid parts conversion parts) and diluting with methyl ethyl ketone. did.
- Acrylic resin (A1): (A1-1) Copolymer of methyl acrylate (MA) and hydroxyethyl acrylate (HEA) (mass ratio: MA / HEA 95/5), weight average molecular weight 500,000, manufactured by Toyochem, glass transition temperature 9 ° C.
- the coating composition is applied to the release surface of the first release sheet in which a silicone release agent layer is formed on one side of a polyethylene terephthalate (PET) film, and then in an oven at 120 ° C. for 3 minutes. Dried to form an adhesive layer.
- the thickness of the finally obtained die bond layer forming film was 20 ⁇ m.
- the adhesive layer obtained as described above is attached to the release surface of the second release sheet in which the silicone release agent layer is formed on one side of the polyethylene terephthalate (PET) film, A release sheet (release sheet 21 in FIG. 1), a die bond layer forming film (die bond layer forming film 1 in FIG. 1) (thickness: 20 ⁇ m) made of an adhesive layer, and a die bond layer made of a second release sheet A forming sheet was obtained.
- One release sheet is peeled off from the above-mentioned die bond layer forming sheet, and the surface of the exposed adhesive layer is pasted on the surface of a pressure-sensitive adhesive layer of a dicing sheet (“G-562” manufactured by Lintec Corporation).
- the die-bonding layer-forming film was transferred onto the pressure-sensitive adhesive layer of the dicing sheet by peeling off the other release sheet of the layer-forming sheet, and thus a laminated structure similar to the laminated structure of the die-bonding layer-forming sheet shown in FIG.
- a die bond layer forming sheet having the structure shown in FIG. 2 was prepared by further laminating a jig adhesive layer as described below on the original sheet of the die bond layer forming sheet. did.
- a double-sided tape provided with a 5 ⁇ m-thick acrylic adhesive on both sides of a 40 ⁇ m-thick polypropylene film was prepared in a state where it was sandwiched between two release sheets. Each release sheet was punched and cut into a 165 mm circle. The entire surface of the punched release sheet and the punched circular inner double-sided tape were removed to obtain a double-sided tape having a circular defect on the release sheet.
- deletion part was bonded together with the die bond layer forming film of the original fabric of said sheet
- the laminate of the double-sided tape and the original sheet of the die bond layer forming sheet was punched and cut into a 207 mm circle so as to be concentric with the punched shape of the double-sided tape.
- Example 2 to 6 and Comparative Examples 1 and 2 A die bond layer forming sheet having the structure of FIG. 2 is produced in the same manner as in Example 1 except that the types and amounts of each component blended to form the adhesive layer are changed as shown in Table 1. did.
- Substrate having a solder resist (“PSR-4000 AUS303” manufactured by Taiyo Ink Co., Ltd.) (Peel strength test substrate "V5" manufactured by Chino Giken Co., Ltd.), package unit size: 50 mm x 150 mm x thickness 1.0 mm, material : FR-4) on the surface provided with the solder resist, the chip obtained by dicing is placed at a temperature of 150 ° C. and a pressure of 100 gf so that the die bonding layer forming sheet is positioned between the substrate and the chip. Die bonding was performed under the condition of a pressing time of 1 second.
- the laminated structure obtained by this die bonding and consisting of a chip, a die bond layer forming sheet and a substrate is heated in an oven at 175 ° C. for 1 hour to thermally cure the adhesive layer provided in the die bond layer forming sheet. Then, after using a bond tester (“Bond Tester“ dage4000 series ”manufactured by Dage) for 30 seconds at a temperature of 250 ° C., the shear adhesive strength was determined in accordance with MIL-STD-883J (METHOD 20199.9). Was measured. Table 1 shows the measurement results of the high-temperature shear strength thus obtained.
- the silicon wafer on the die bond layer forming sheet was diced into a chip size of 8 mm ⁇ 8 mm using a dicing apparatus (“DFD651” manufactured by Disco Corporation). The cutting at the time of dicing was performed so as to cut the substrate by 20 ⁇ m.
- a dicing apparatus (“DFD651” manufactured by Disco Corporation). The cutting at the time of dicing was performed so as to cut the substrate by 20 ⁇ m.
- a circuit pattern is formed on a copper foil (18 ⁇ m thickness) of a copper foil-clad laminate (“CCL-HL830” manufactured by Mitsubishi Gas Chemical Company), and a solder resist (sun A substrate (“LN001E-001 PCB (Au) AUS303” manufactured by Chino Giken Co., Ltd.) having a “PSR-4000 AUS303” manufactured by Ink Corporation was prepared.
- the chip on the die bond layer forming sheet obtained in (1) above was picked up from the dicing sheet together with the adhesive layer provided in the die bond layer forming film.
- the chip to which the obtained die bond layer forming film was adhered was laminated on the above substrate via the die bond layer forming film, and pressure bonded under the conditions of a temperature of 120 ° C., a pressing force of 250 gf, and a pressing time of 0.5 seconds.
- the laminated structure made of the chip, the die bond layer forming sheet and the substrate obtained by this pressure bonding is put into an oven maintained at 175 ° C. for 1 hour, 2 hours, 3 hours, 4 hours, 5 hours and Six different thermal histories for 6 hours were given.
- Each laminated structure to which a thermal history is imparted is sealed with a mold resin (“KE-1100AS3” manufactured by Kyocera Chemical Co., Ltd.) so as to have a sealing thickness of 400 ⁇ m (sealing device: “MPC-06M manufactured by Apic Yamada Co., Ltd.). TriAl Press ”), and the sealing resin was cured by holding at 175 ° C. for 5 hours.
- a dicing tape (“Adwill D-510T” manufactured by Lintec Co., Ltd.) is affixed to the member obtained by sealing the laminated structure thus obtained.
- a “DFD651” manufactured by the company dicing into 15 mm ⁇ 15 mm size, a semiconductor package for reliability evaluation was obtained.
- the longest time of the thermal history condition (the shortest time is 0 hour and the longest time is 6 hours) in which the reliability evaluation failure does not occur is taken as the evaluation result of the heat history property.
- the heat history is improved as the longest time of the heat history condition in which the reliability evaluation failure does not occur.
- the chip to which the die bond layer forming film thus obtained was adhered was laminated on the same type of substrate as the evaluation substrate used in Test Example 3 via the die bond layer forming film, and the temperature was 120 ° C., the applied pressure was 250 gf, and the pressure was increased. Crimping was performed under the condition of time 0.5 seconds. Subsequently, using a wire bonder ("Maxum Plus” manufactured by K & S), Cu wire ("Max soft 20um” manufactured by Heraeus) was bonded to the substrate / chip. Bonding conditions were as follows.
- the adhesive layer of the die-bonding layer-forming film of the example satisfying the provisions of the present invention was excellent in heat hysteresis and also in wire bonding suitability.
- the die bond layer forming film according to the present invention is suitably used for manufacturing a semiconductor device from chips obtained by dividing a semiconductor wafer.
Abstract
Description
(特性1)ダイボンド層形成フィルムが備える接着剤層の貯蔵弾性率の温度依存性を測定した際に、80℃から150℃の範囲内に貯蔵弾性率の極小値を有する。
(特性2)ダイボンド層形成フィルムを介して加工物が載置された剥離強度検査基板上のダイボンド層形成フィルムを、175℃で1時間加熱した後、さらに250℃の環境下での30秒間保持後に測定される、ダイボンド層形成フィルムの剥離強度検査基板に対するせん断強度が、20N/2mm□以上50N/2mm□以下となる。
(1)ワークを加工して得られた加工物の被着体への固着に用いられる、接着剤層を備えたダイボンド層形成フィルムであって、前記接着剤層の貯蔵弾性率の温度依存性を測定した際に、80℃から150℃の範囲内に貯蔵弾性率の極小値を有し、前記ダイボンド層形成フィルムを介して前記加工物が載置された剥離強度検査基板上の前記ダイボンド層形成フィルムを、175℃で1時間加熱した後、さらに250℃の環境下で30秒間保持した後に測定される、前記接着剤層の剥離強度検査基板に対するせん断強度が、20N/2mm□以上50N/2mm□以下であることを特徴とするダイボンド層形成フィルム。
1.ダイボンド層形成フィルム
本実施形態に係るダイボンド層形成フィルムは、ワーク(半導体ウエハなど)を加工して得られる加工物(チップなど)を被着体(回路基板など)に対して固着させる際に用いられるダイボンド層を形成するためのものである。このダイボンド層形成フィルムは接着剤層を備え、接着剤層からなる単層構造を有していてもよいし、多層構造を有していてもよい。
(機能1)シート形状維持性
(機能2)初期接着性
(機能3)硬化性
(1-1)弾性極小温度
本実施形態に係るダイボンド層形成フィルムが備える接着剤層は、その貯蔵弾性率の温度依存性を測定した際に、80℃から150℃の範囲内に貯蔵弾性率の極小値を有する。本明細書において、接着剤層の貯蔵弾性率の極小値を与える温度を「弾性極小温度」ともいう。
本実施形態に係るダイボンド層形成フィルムが備える接着剤層は、次に定義される高温せん断強度が20N/2mm□以上50N/2mm□以下である。
本明細書において、高温せん断強度とは、ダイボンド層形成フィルムを介して加工物が載置された剥離強度検査基板上の当該ダイボンド層形成フィルムを、175℃で1時間加熱した後、さらに250℃の環境下で30秒間保持した後に測定される、接着剤層の前記基板に対するせん断強度を意味する。剥離強度検査基板は、具体的には後述する実施例に記載するものである。
本発明の一実施形態に係るダイボンド層形成フィルムが備える接着剤層は、バインダー成分を含有することが好ましい。これにより、(機能1)シート形状維持性および(機能3)硬化性をダイボンド層形成フィルムに付与することが容易となる。
重合体成分(A)は、接着剤層にシート形状維持性を付与することを主目的として添加される。
重合体成分(A)としては、アクリル重合体(A1)が好ましく用いられる。アクリル重合体(A1)のガラス転移温度(Tg)は、好ましくは-60~50℃、より好ましくは-50~40℃、さらに好ましくは-40~30℃の範囲にある。アクリル重合体(A1)のガラス転移温度が高いと接着剤層の接着性が低下し、ダイボンド層形成フィルムをワークに転写できなくなることや、転写後にダイボンド層形成フィルムがワークから剥離する等の不具合を生じることがある。
また、重合体成分(A)として、ポリエステル、フェノキシ樹脂、ポリカーボネート、ポリエーテル、ポリウレタン、ポリシロキサン、ゴム系重合体またはこれらの2種以上が結合したものから選ばれる非アクリル系樹脂(A2)の1種単独または2種以上の組み合わせを用いてもよい。このような樹脂としては、重量平均分子量が20,000~100,000のものが好ましく、20,000~80,000のものがさらに好ましい。
熱硬化性成分(B)は、接着剤層に熱硬化性を付与することを主目的として添加される。
バインダー成分は、ダイボンド層形成フィルムが備える接着剤層の硬化速度を調整するために、硬化促進剤(B3)をさらに含んでいてもよい。硬化促進剤(B3)は、特に、熱硬化性成分(B)としてエポキシ系熱硬化性成分を用いるときに好ましく用いられる。
ダイボンド層形成フィルムが備える接着剤層は、充填材(C)を含有していてもよいが、含有しないことが好ましい。接着剤層が充填材(C)のような粒子状の材料を含有しないことにより、上述のとおり、粒子状の材料がダイボンド層から脱落することに起因した問題を解消することができる。以下、ダイボンド層形成フィルムが備える接着剤層が充填材(C)を含有する場合の態様について説明する。充填材(C)を接着剤層に配合することにより、接着剤層を硬化して得られる硬化物における熱膨張係数を調整することが可能となり、ダイボンド層のワークに対する熱膨張係数を最適化して、半導体装置の信頼性(ダイボンド層の接着信頼性)を向上させることが容易となる。また、ダイボンド層の吸湿性を低減させることも可能となる。
無機物と反応する官能基および有機官能基と反応する官能基を有するカップリング剤(D)を、ダイボンド層形成フィルムが備える接着剤層のワークに対する貼付性および接着性、接着剤層の凝集性を向上させるために用いてもよい。また、カップリング剤(D)を使用することで、ダイボンド層の耐熱性を損なうことなく、その耐水性を向上させることができる。このようなカップリング剤としては、チタネート系カップリング剤、アルミネート系カップリング剤、シランカップリング剤等が挙げられる。これらのうちでも、シランカップリング剤が好ましい。
ダイボンド層形成フィルムが備える接着剤層の初期接着力および凝集力を調節するために、架橋剤(E)を添加することもできる。なお、架橋剤を配合する場合には、前記アクリル重合体(A1)には、反応性官能基が含まれる。
ダイボンド層形成フィルムが備える接着剤層には、光重合開始剤(F)が配合されてもよい。光重合開始剤を含有することで、ダイボンド層形成フィルムを備えるダイボンド層形成用シートからなるダイシング・ダイボンディングシートをウエハに貼付した後、ダイシング工程前に紫外線を照射することで、たとえば反応性二重結合基を有するエポキシ化合物等が有する反応性二重結合基を反応せしめ、予備硬化させることができる。
ダイボンド層形成フィルムが備える接着剤層には、上記の他に、必要に応じて各種添加剤が配合されてもよい。各種添加剤としては、レベリング剤、可塑剤、帯電防止剤、酸化防止剤、イオン捕捉剤、ゲッタリング剤、連鎖移動剤や剥離剤などが挙げられる。
図1は本発明の一実施形態に係るダイボンド層形成用シートの断面図である。図1に示すように、本実施形態に係るダイボンド層形成用シートは、ダイボンド層形成フィルム1と、ダイボンド層形成フィルム1の一方の面(図1では下側の面)に積層された剥離シート21とを備えて構成される。ただし、剥離シート21は、ダイボンド層形成用シート2の使用時に剥離されるものである。
図2は本発明の他の一実施形態に係るダイボンド層形成用シートの断面図である。図2に示すように、本実施形態に係るダイボンド層形成用シート3は、基材41の一方の面に粘着剤層42が積層されてなる粘着シート4と、粘着シート4の粘着剤層42側に積層されたダイボンド層形成フィルム1と、ダイボンド層形成フィルム1における粘着シート4とは反対側の面の周縁部に積層された治具用粘着剤層5とを備えて構成される。治具用粘着剤層5は、ダイボンド層形成用シート3をリングフレーム等の治具に接着するための層である。
本実施形態に係るダイボンド層形成用シート3の粘着シート4は、基材41と、基材41の一方の面に積層された粘着剤層42とを備えて構成される。
粘着シート4の基材41は、ワークの加工、例えば半導体ウエハのダイシングおよびエキスパンディングに適するものであれば、その構成材料は特に限定されず、通常は樹脂系の材料を主材とするフィルム(以下「樹脂フィルム」という。)から構成される。
本実施形態に係るダイボンド層形成用シート3の粘着シート4が備える粘着剤層42は、非エネルギー線硬化性粘着剤から構成されてもよいし、エネルギー線硬化性粘着剤から構成されてもよい。非エネルギー線硬化性粘着剤としては、所望の粘着力および再剥離性を有するものが好ましく、例えば、アクリル系粘着剤、ゴム系粘着剤、シリコーン系粘着剤、ウレタン系粘着剤、ポリエステル系粘着剤、ポリビニルエーテル系粘着剤等を使用することができる。これらの中でも、ダイボンド層形成フィルム1との密着性が高く、ダイシング工程等にてワークまたは加工物の脱落を効果的に抑制することのできるアクリル系粘着剤が好ましい。
本実施形態に係るダイボンド層形成用シート3は、好ましくは、ダイボンド層形成フィルム1を含む第1の積層体と、粘着シート4を含む第2の積層体とを別々に作製した後、第1の積層体および第2の積層体を使用して、ダイボンド層形成フィルム1と粘着シート4とを積層することにより製造することができるが、これに限定されるものではない。
図3は本発明のさらに他の一実施形態に係るダイボンド層形成用シートの断面図である。図3に示すように、本実施形態に係るダイボンド層形成用シート3Aは、基材41の一方の面に粘着剤層42が積層されてなる粘着シート4と、粘着シート4の粘着剤層42側に積層されたダイボンド層形成フィルム1とを備えて構成される。実施形態におけるダイボンド層形成フィルム1は、面方向にてワークとほぼ同じか、ワークよりも少し大きく形成されており、かつ粘着シート4よりも面方向に小さく形成されている。ダイボンド層形成フィルム1が積層されていない部分の粘着剤層42は、リングフレーム等の治具に貼付することが可能となっている。
次に本実施形態に係るダイボンド層形成用シート3,3Aを用いて、ワークから加工物を製造する方法およびこの加工物を用いて半導体装置を製造する方法について説明する。
次の各成分を表1に示す配合比(欄内の数字はいずれも固形分換算質量部)で混合し、メチルエチルケトンで希釈して、接着剤層を形成するための塗工用組成物を調製した。
アクリル樹脂(A1):
(A1-1)メチルアクリレート(MA)およびヒドロキシエチルアクリレート(HEA)(質量比率:MA/HEA=95/5)の共重合体、重量平均分子量50万、トーヨーケム社製、ガラス転移温度9℃
(A1-2)メチルアクリレート(MA)およびヒドロキシエチルアクリレート(HEA)(質量比率:MA/HEA=85/15)の共重合体、重量平均分子量40万、日本合成化学工業社製、ガラス転移温度6℃
エポキシ化合物(B1):アクリロイル基付加クレゾールノボラック型エポキシ樹脂(日本化薬社製「CNA-147」)
熱硬化剤(B2):アラルキルフェノール樹脂(三井化学社製「ミレックスXLC-4L」)
充填材(C):メタクリロキシ基修飾のシリカフィラー(平均粒径0.5μm、アドマテックス社製「SO-C2」、3-メタクリロキシプロピルトリメトキシシラン処理品)
カップリング剤(D):シランカップリング剤(三菱化学社製「MKCシリケートMSEP2」)
架橋剤(E):芳香族性多価イソシアネート(日本ポリウレタン工業社製「コロネートL」)
なお、日本化薬社製「CNA-147」は、その一部に、硬化促進剤(B3)としてのリン系硬化促進剤を含む。
接着剤層を形成するために配合された各成分の種類および配合量を表1に示すように変更する以外、実施例1と同様にして、図2の構造を有するダイボンド層形成用シートを製造した。
実施例および比較例において作製した接着剤層を別途作製し、得られた接着剤層を厚さ400μmになるまで積層した。その後、動的粘弾性測定装置(TAインスツルメンツ社製「DMA Q800」)を用いて、測定周波数11Hz、昇温速度3℃/分で0℃から300℃までの温度領域の弾性率(貯蔵弾性率及び損失弾性率)を測定し、弾性率プロファイルを得た。この弾性率プロファイルから、弾性極小温度を求めた。結果を表1に示す。
テープマウンター(リンテック社製「Adwill RAD-2700F/12」)を用いて、実施例および比較例において作製した、図2に示される構造を有するダイボンド層形成用シートを60℃に加熱しながら、厚さ350μmであって#2000研磨された6インチサイズのシリコンウエハに貼合した。また、ダイボンド層形成用シートの治具用粘着剤層をリングフレームに貼付した。その後、ダイシング装置(ディスコ社製「DFD651」)を使用して、ダイボンド層形成用シートが貼付されたシリコンウエハを、2mm×2mmサイズにダイシングした。ソルダーレジスト(太陽インキ社製「PSR-4000 AUS303」)を有している基板(ちの技研社製剥離強度検査基板「V5」、パッケージ単位の大きさ:50mm×150mm×厚さ1.0mm、材料:FR-4)のソルダーレジストを設けた面に、上記のダイシングにより得られたチップを、基板とチップとの間にダイボンド層形成用シートが位置するように、温度150℃、加圧力100gf、加圧時間1秒間の条件でダイボンディングした。このダイボンディングにより得られた、チップとダイボンド層形成用シートと基板とからなる積層構造体を、オーブンにて175℃で1時間加熱してダイボンド層形成用シートが備える接着剤層を熱硬化させた後、ボンドテスター(Dage社製「ボンドテスターdage4000シリーズ」)を用いて、250℃の温度で30秒間加熱した後に、MIL-STD-883J(METHOD 2019.9)に準拠して、せん断接着強度を測定した。こうして得られた高温せん断強度の測定結果を表1に示す。
(1)半導体チップの製造
テープマウンター(リンテック社製「Adwill RAD2700F/12」)を用いて、6インチサイズのドライポリッシュ仕上げシリコンウエハ(厚さ75μm)の研磨面に、実施例および比較例において作製した、図2に示される構造のダイボンド層形成用シートを貼付するとともに、ダイボンド層形成用シートを介して当該シリコンウエハをウエハダイシング用リングフレームに固定した。
評価用基板として、銅箔張り積層板(三菱ガス化学社製「CCL-HL830」)の銅箔(18μm厚)に回路パターンが形成され、パターン上にソルダーレジスト(太陽インキ社製「PSR-4000 AUS303」)を有している基板(ちの技研社製「LN001E-001 PCB(Au)AUS303」)を用意した。
上記(2)により得られた半導体パッケージを、85℃、相対湿度60%の環境下に168時間放置し、吸湿させた後、最高温度260℃、加熱時間1分間のIRリフロー(リフロー炉:相模理工社製「WL-15-20DNX型」)を3回行なった。
テープマウンター(リンテック社製「Adwill RAD-2700 F/12」)を用いて、6インチサイズの厚さ350μmのアルミ蒸着ウエハのアルミ蒸着されていない面に、実施例および比較例により作製した、図2に示される構造を有するダイボンド層形成用シートを60℃で加熱しながら貼合した。また、ダイボンド層形成用シートの治具用粘着剤層をリングフレームに貼付した。続いて、ダイシング装置(ディスコ社製「DFD651」)を用いて、2mm×2mmサイズにダイシングした。こうして得られたダイボンド層形成フィルムが付着したチップを、試験例3において用いた評価用基板と同種の基板に、そのダイボンド層形成フィルムを介して積層し、温度120℃、加圧力250gf、加圧時間0.5秒間の条件で圧着した。続いて、ワイヤボンダー(K&S社製「Maxum Plus」)を用いて、基板/チップ上を結ぶように、Cuワイヤー(Heraeus社製「Max soft 20um」)のワイヤーボンディングを行った。ボンディング条件は次のとおりであった。
超音波出力:90mA
ボンディング温度:175℃
ボンディング荷重:17g
ボンディング時間:10ms
ワイヤーボンディング後、ボンドテスター(Dage社製「ボンドテスターdage4000シリーズ」)を用いて、JEITA ED-4703に準拠して、シェア強度を測定した。測定結果を表1に示す。シェア強度が10g以上であれば、良好と判断することができる。
2…ダイボンド層形成用シート
21…剥離シート
3,3A…ダイボンド層形成用シート
4…粘着シート
41…基材
42…粘着剤層
5…治具用粘着剤層
6…半導体ウエハ
7…リングフレーム
Claims (5)
- ワークを加工して得られた加工物の被着体への固着に用いられる、接着剤層を備えたダイボンド層形成フィルムであって、
前記接着剤層の貯蔵弾性率の温度依存性を測定した際に、80℃から150℃の範囲内に貯蔵弾性率の極小値を有し、
前記ダイボンド層形成フィルムを介して前記加工物が載置された剥離強度検査基板上の前記ダイボンド層形成フィルムを、175℃で1時間加熱した後、さらに250℃の環境下で30秒間保持した後に測定される、前記接着剤層の剥離強度検査基板に対するせん断強度が、20N/2mm□以上50N/2mm□以下であること
を特徴とするダイボンド層形成フィルム。 - 前記接着剤層は重合体成分(A)、硬化性成分(B)および硬化促進剤(B3)を含むバインダー成分を含有し、
前記バインダー成分における、前記重合体成分(A)、前記硬化性成分(B)および前記硬化促進剤(B3)の合計量の、接着剤層全体の質量に対する質量割合は、95質量%以上である、請求項1に記載のダイボンド層形成フィルム。 - 前記ダイボンド層形成フィルムが、半導体チップをダイ搭載部に接着するためのダイボンディング用接着フィルムである請求項1または2に記載のダイボンド層形成フィルム。
- 請求項1から3のいずれか一項に記載のダイボンド層形成フィルムを使用して製造されたことを特徴とする、ダイボンド層形成フィルムが付着した加工物。
- 請求項4に記載されるダイボンド層形成フィルムが付着した加工物を使用して製造されたことを特徴とする、前記加工物と被着体とがダイボンド層を介して積層された構造を有し、前記加工物と前記被着体とを結線するワイヤーを備える半導体装置。
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JP2015540954A JP5887029B1 (ja) | 2014-03-17 | 2015-03-16 | ダイボンド層形成フィルム、ダイボンド層形成フィルムが付着した加工物、および半導体装置 |
KR1020167027492A KR102296363B1 (ko) | 2014-03-17 | 2015-03-16 | 다이본드층 형성 필름, 다이본드층 형성 필름이 부착된 가공물, 및 반도체 장치 |
CN201580014322.4A CN106104774B (zh) | 2014-03-17 | 2015-03-16 | 管芯键合层形成膜、附着有管芯键合层形成膜的加工件及半导体装置 |
US15/125,705 US9953946B2 (en) | 2014-03-17 | 2015-03-16 | Die-bonding layer formation film, processed product having die-bonding layer formation film attached thereto, and semiconductor device |
SG11201607777UA SG11201607777UA (en) | 2014-03-17 | 2015-03-16 | Die-bonding layer formation film, workpiece having die-bonding layer formation film attached thereto, and semiconductor device |
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JP (1) | JP5887029B1 (ja) |
KR (1) | KR102296363B1 (ja) |
CN (1) | CN106104774B (ja) |
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DE102015001902A1 (de) * | 2015-02-18 | 2016-08-18 | Continental Reifen Deutschland Gmbh | Verfahren zur Verbesserung der Haftung zwischen einem Verstärkungselement und einem elastomeren Matrixmaterial |
US20180019139A1 (en) * | 2016-07-12 | 2018-01-18 | Ayar Labs, Inc. | Wafer-Level Etching Methods for Planar Photonics Circuits and Devices |
JP6889398B2 (ja) * | 2017-07-20 | 2021-06-18 | 昭和電工マテリアルズ株式会社 | 放熱性ダイボンディングフィルム及びダイシングダイボンディングフィルム |
US10297564B2 (en) * | 2017-10-05 | 2019-05-21 | Infineon Technologies Ag | Semiconductor die attach system and method |
KR20210138263A (ko) * | 2020-05-12 | 2021-11-19 | 삼성전자주식회사 | 반도체 칩 실장용 테이프 및 상기 테이프를 이용한 반도체 패키지 제조 방법 |
US20230170245A1 (en) * | 2021-12-01 | 2023-06-01 | STATS ChipPAC Pte. Ltd. | Semiconductor Device and Method for Reducing Metal Burrs Using Laser Grooving |
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JP2004095844A (ja) * | 2002-08-30 | 2004-03-25 | Lintec Corp | ウエハダイシング・接着用シートおよび半導体装置の製造方法 |
JP2011116897A (ja) * | 2009-12-04 | 2011-06-16 | Nitto Denko Corp | 熱硬化型ダイボンドフィルム、ダイシング・ダイボンドフィルム、及び、半導体装置 |
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JP2005005355A (ja) * | 2003-06-10 | 2005-01-06 | Nitto Denko Corp | ダイシング・ダイボンドフィルム |
JP4405246B2 (ja) * | 2003-11-27 | 2010-01-27 | スリーエム イノベイティブ プロパティズ カンパニー | 半導体チップの製造方法 |
JP2005327789A (ja) * | 2004-05-12 | 2005-11-24 | Sharp Corp | ダイシング・ダイボンド兼用粘接着シートおよびこれを用いた半導体装置の製造方法 |
US7578891B2 (en) * | 2004-05-18 | 2009-08-25 | Hitachi Chemical Company, Ltd. | Adhesive bonding sheet, semiconductor device using the same, and method for manufacturing such semiconductor device |
KR100938745B1 (ko) * | 2007-11-28 | 2010-01-26 | 제일모직주식회사 | 고비점 용매 및 저비점 용매를 포함하는 반도체 다이접착제 조성물 및 이에 의한 접착필름 |
US8759957B2 (en) * | 2008-02-07 | 2014-06-24 | Sumitomo Bakelite Company Limited | Film for use in manufacturing semiconductor device, method for producing semiconductor device and semiconductor device |
CN101971312A (zh) * | 2008-03-14 | 2011-02-09 | 住友电木株式会社 | 用于形成半导体元件粘接膜的树脂清漆、半导体元件粘接膜和半导体装置 |
JP2013127014A (ja) * | 2011-12-16 | 2013-06-27 | Hitachi Chemical Co Ltd | 接着シート |
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JP2011116897A (ja) * | 2009-12-04 | 2011-06-16 | Nitto Denko Corp | 熱硬化型ダイボンドフィルム、ダイシング・ダイボンドフィルム、及び、半導体装置 |
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US9953946B2 (en) | 2018-04-24 |
JP5887029B1 (ja) | 2016-03-16 |
US20170005062A1 (en) | 2017-01-05 |
SG11201607777UA (en) | 2016-11-29 |
CN106104774B (zh) | 2018-06-12 |
TW201542742A (zh) | 2015-11-16 |
KR20160132901A (ko) | 2016-11-21 |
KR102296363B1 (ko) | 2021-08-31 |
CN106104774A (zh) | 2016-11-09 |
TWI662101B (zh) | 2019-06-11 |
JPWO2015141629A1 (ja) | 2017-04-06 |
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