WO2015132880A1 - Dispositif de mesure et procédé de mesure - Google Patents

Dispositif de mesure et procédé de mesure Download PDF

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Publication number
WO2015132880A1
WO2015132880A1 PCT/JP2014/055453 JP2014055453W WO2015132880A1 WO 2015132880 A1 WO2015132880 A1 WO 2015132880A1 JP 2014055453 W JP2014055453 W JP 2014055453W WO 2015132880 A1 WO2015132880 A1 WO 2015132880A1
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WO
WIPO (PCT)
Prior art keywords
light
light beam
measuring apparatus
measurement
measurement target
Prior art date
Application number
PCT/JP2014/055453
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English (en)
Japanese (ja)
Inventor
育也 菊池
敦也 伊藤
Original Assignee
パイオニア株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by パイオニア株式会社 filed Critical パイオニア株式会社
Priority to JP2016505982A priority Critical patent/JP6253761B2/ja
Priority to PCT/JP2014/055453 priority patent/WO2015132880A1/fr
Publication of WO2015132880A1 publication Critical patent/WO2015132880A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/661—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/662—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems

Definitions

  • the present invention relates to a technical field of a measuring apparatus and a measuring method for measuring a measurement target by irradiating a laser beam.
  • Patent Document 1 proposes an apparatus that separates a light beam of a laser light source with a beam splitter and uses a part thereof as reference light.
  • the light irradiated to the measurement target is diffused by scattering.
  • the reference light since the reference light is not diffused, the diameter of the light beam remains small.
  • the S / N ratio (signal-to-noise ratio) of the detection result deteriorates, resulting in a technical problem that accurate measurement cannot be performed.
  • Examples of problems to be solved by the present invention include the above. It is an object of the present invention to provide a measurement apparatus and a measurement method that can suitably perform measurement related to an object to be measured by diffusing reference light.
  • a measuring apparatus for solving the above-described problems includes a separation irradiation unit that separates laser light into a first light beam and a second light beam, and irradiates the measurement target with the first light beam, and a diffusion unit that diffuses the second light beam. And a light receiving means for receiving the first light beam scattered by the measurement target and the second light beam diffused by the diffusion means.
  • a measurement method for solving the above-described problems includes a separation irradiation step of separating laser light into a first light beam and a second light beam, and irradiating the measurement target with the first light beam, and a diffusion step of diffusing the second light beam. And a light receiving step for receiving the first light beam scattered by the measurement target and the second light beam diffused in the diffusion step.
  • the measuring apparatus separates laser light into a first light beam and a second light beam, separate irradiation means for irradiating the measurement target with the first light beam, diffusion means for diffusing the second light beam, And a light receiving unit that receives the first light beam scattered by the measurement target and the second light beam diffused by the diffusion unit.
  • the object to be measured for example, a fluid such as blood flowing inside the transparent tube or an individual such as a plate member flowing on the conveyor
  • Laser light is irradiated.
  • the laser beam according to the present embodiment is separated into a first light beam and a second light beam by the separation irradiation means before being irradiated onto the measurement target.
  • the separation irradiation unit includes, for example, a grating (diffraction grating), a half mirror, and the like.
  • the separating and irradiating means may irradiate the laser beam by separating it into three or more light beams (that is, a third light beam, a fourth light beam, etc. may exist).
  • the first light flux is irradiated onto the object to be measured.
  • the first light beam irradiated to the measurement target is scattered (specifically, transmitted or reflected) by the measurement target and becomes scattered light.
  • the second light flux is diffused by the diffusing means without being irradiated on the measurement target.
  • the diffusing unit includes, for example, a diffusing plate and a lens.
  • the scattered first light beam and the diffused second light beam are received by a common light receiving means.
  • the light receiving means is configured as a photodiode or the like, for example.
  • the intensity of the received light is converted into a signal and used for calculation of the measurement result. More specifically, for example, speed calculation of the measurement target using Doppler shift is executed.
  • the measurement is performed using the first light beam that is irradiated onto the measurement target and the second light beam that is not irradiated onto the measurement target.
  • the energy loss due to scattering at the measurement target can be reduced. Therefore, the S / N ratio of the detection result can be improved.
  • the alignment of the optical system can be easily performed as compared with the case where the first light flux and the second light flux are irradiated to one point to be measured. In addition, it is possible to reduce damage to the measurement target by irradiating the laser beam.
  • the second light beam is detected after being diffused. Accordingly, it is possible to prevent a situation in which the first light beam scattered by the measurement target is detected in a relatively large area, whereas the second light beam is detected only in a very small area. In this way, each of the first light beam and the second light beam can be efficiently detected on the detection surface of the detection means, and the detection sensitivity can be improved. In addition, it is possible to avoid the need for highly accurate alignment of the second light flux. In addition, the energy balance with the first light beam scattered by the measurement target can be achieved by the dispersion of energy by diffusion.
  • the measurement apparatus it is possible to suitably perform the measurement on the measurement target object by detecting the scattered first light beam and the diffused second light beam.
  • the separation irradiation unit includes a grating.
  • the laser light is incident on the grating (diffraction grating) and is separated into the first light flux and the second light flux. For this reason, compared with the case where a laser beam is isolate
  • the separation irradiation unit includes a partial reflection unit that reflects a part of the laser beam.
  • the laser beam is partially reflected by the partially reflecting means configured as a half mirror, for example, and the other part is transmitted. Therefore, the laser beam can be reliably separated into the first light flux and the second light flux.
  • the separation irradiation unit may further include a reflection unit whose position relative to the partial reflection unit is fixed.
  • one of the first light beam and the second light beam partially separated by the reflecting means is reflected by the reflecting means and guided in an appropriate direction.
  • the reflecting means since the reflecting means is fixed in position relative to the partially reflecting means (in other words, configured as a dihedral mirror), the angle of the partially reflecting means and the reflecting means can be adjusted. You don't have to do it separately. Therefore, it is possible to easily adjust the irradiation angle of the laser beam.
  • the diffusing unit is a scattering plate disposed in the optical path of the second light beam.
  • the second light beam can be reliably diffused by the scattering plate.
  • the diffusion plate may be configured as a reflection type or a transmission type.
  • the diffusing unit is a lens disposed in the optical path of the second light beam.
  • the second light flux can be reliably diffused by the lens.
  • a plurality of lenses may be provided.
  • the lens condenses the first light flux on the detection means.
  • the first light beam can be condensed using a lens that diffuses the second light beam. For this reason, the first light flux can be efficiently detected by the detection means, and as a result, the S / N ratio can be improved.
  • the lens condenses the first light flux so that the diameters of the first light flux and the second light flux are uniform on the detection surface of the detection means, The second light flux is diffused.
  • the first light flux and the second light flux can be detected very efficiently by the detection means. Therefore, the S / N ratio of the detection result can be improved.
  • “so as to be aligned” according to the present embodiment is not limited to the case where the diameter of the first light beam and the diameter of the second light beam completely coincide with each other, and is a value close to the extent that the above-described effect can be obtained. It means that it is said.
  • the separation unit separates the laser light so that the light amount of the second light beam is smaller than the light amount of the first light beam.
  • the light amounts (energy) of the first light flux and the second light flux at the time of detection can be made uniform. Specifically, the energy at the time of detection of the first light beam that causes a large energy loss when irradiated on the measurement target and the second light beam that generates almost no energy loss because it is not irradiated on the measurement target are close to each other. It becomes. Therefore, the first light flux and the second light flux can be detected efficiently, and the S / N ratio can be improved.
  • the measuring apparatus further includes speed detecting means for detecting the speed of the measurement target from the Doppler shift of the first light beam received by the light receiving means.
  • the speed of the measurement target can be detected using the Doppler shift generated in the scattered light of the separated first light flux.
  • the speed of the measurement target can be detected using a beat signal obtained from interference light between the first light flux in which the Doppler shift is generated and the second light flux in which the Doppler shift is not generated.
  • the measurement method separates laser light into a first light flux and a second light flux, irradiates the measurement target with the first light flux, a diffusion process for diffusing the second light flux, A light receiving step of receiving the first light beam scattered by the measurement target and the second light beam diffused in the diffusion step.
  • the measurement method according to the present embodiment similarly to the measurement apparatus according to the present embodiment described above, it is possible to detect the scattered first light beam and the diffused second light beam and perform measurement appropriately. It is.
  • FIG. 1 is a side view showing the overall configuration of the measuring apparatus according to the first embodiment.
  • FIG. 2 is a cross-sectional view showing the overall configuration of the measuring apparatus according to the first embodiment.
  • the measuring apparatus 1 includes a light source 100, a grating 200, a detector 500, and a diffuser plate 600 as main components.
  • the light source 100 is a laser light source configured to output the irradiation light Li.
  • the light source 100 can adjust the output intensity of the laser light.
  • the grating 200 is an example of the “separation irradiation means” in the present invention, and is configured as a blazed grating.
  • the grating 200 may be configured as a binary grating. Moreover, you may comprise as what has a condensing effect (namely, lens effect).
  • the grating 200 separates the irradiation light Li irradiated from the light source 100 into separated light Ld1 and Ld2, and irradiates the fluid 400 flowing in the right direction in FIG. 1 (frontward direction in FIG. 2) in the transparent tube 300. .
  • the separated light Ld1 is incident on the fluid 400 to be measured.
  • the separated light Ld1 is scattered (transmitted) by the scatterer 401 in the fluid 400.
  • scattered light Ls is emitted from the scatterer 401.
  • the separated light Ld2 is not incident on the fluid 400 but is incident on the diffusion plate 600.
  • the diffusion plate 600 is an example of the “diffusion means” of the present invention, and is configured as a reflective diffusion plate.
  • the diffusion plate 600 diffuses the incident separated light Ld2 and irradiates the detector 500 as reference light Lr.
  • the detector 500 is an example of the “light receiving means” in the present invention, and is configured as, for example, a photodetector.
  • the detector 500 is disposed on the side opposite to the light source 100 when viewed from the fluid 400, and can detect the scattered light Ls transmitted through the fluid 400 and the reference light Lr diffused by the diffusion plate 600 on the detection surface. It is said that. That is, the detector 500 is configured to be able to detect the interference light of the scattered light Ls and the reference light Lr.
  • the intensity of the interference light detected by the detector 500 is converted into a signal and used for various calculations in an arithmetic circuit (not shown). More specifically, the speed of the fluid 400 is calculated by a speed calculation unit which is an example of the “speed detection unit” of the present invention.
  • FIG. 3 is a side view showing the overall configuration of the measurement apparatus according to the first modification
  • FIG. 4 is a cross-sectional view showing the overall configuration of the measurement apparatus according to the first modification
  • FIG. 5 is a side view showing the overall configuration of the measuring apparatus according to the second modification.
  • a dihedral mirror 250 is used instead of the grating 200.
  • the dihedral mirror 250 includes a half mirror 251 that separates the irradiation light Li from the light source 100 and a mirror 252 that reflects the separated light Ld2 reflected by the half mirror 251. According to such a two-sided mirror 250, since the relative positions of the half mirror 251 and the mirror 252 are fixed, adjustment work is easy as with the grating 200.
  • the detector 500 is arranged on the same side as the light source 100 when viewed from the fluid 400, and the scattered light Lsb reflected by the fluid 400 on the detection surface. And Lrb can be detected respectively.
  • the detector 500 uses the scattered light reflected by the fluid 400 instead of the scattered light Ls transmitted through the fluid 400 and the reference light Lr reflected and diffused so as to bypass the transparent tube 300 (see FIG. 2).
  • the light Lsb and the Lrb reflected and diffused on the side opposite to the fluid 400 may be configured to be detectable. Even in this case, the measurement can be performed in the same manner as when the transmitted scattered light Ls is detected.
  • FIG. 6 is a side view showing the overall configuration of the measuring apparatus according to the first comparative example.
  • FIG. 7 is a cross-sectional view showing the overall configuration of the measuring apparatus according to the second comparative example.
  • the irradiation light Li irradiated from the light source is separated by the half mirror 210. That is, the light transmitted through the half mirror 210 is the separated light Ld1, and the light reflected by the half mirror 210 is the separated light Ld2.
  • the separated light Ld2 is reflected by the mirror 220 and travels toward the fluid 400 to be measured.
  • the separated lights Ld1 and Ld2 are irradiated to the same position of the fluid 400. That is, the separated light Ld1 and Ld2 are irradiated to the same scatterer 401.
  • the separated lights Ld1 and Ld2 applied to the scatterer 401 become scattered lights Ls1 and Ls2, respectively, and are detected by the detector 500.
  • the light intensity at the irradiation position is likely to be relatively high, and damage is caused to the fluid 400 that is the measurement target by irradiation.
  • the possibility increases.
  • the measurement target is blood
  • a part of the blood may be destroyed by irradiating a high-intensity laser beam, which may adversely affect the living body.
  • the light intensity detected by the detector 500 is reduced, and the S / N ratio is deteriorated. As a result, there is a possibility that accurate measurement cannot be performed.
  • the separated light Ld1 separated by the grating 200 is irradiated to the fluid 400, whereas the separated light Ld2 is applied to the fluid 400. Irradiated and used as reference light Lr. For this reason, damage to the fluid can be reduced as compared with the measuring device 1d according to the first comparative example. Further, since both the scattered light Ld and the reference light Lr scattered by the fluid are detected by the detector 500, the S / N ratio does not deteriorate even when compared with the measuring apparatus 1d according to the first comparative example. That is, according to the measuring apparatus 1 according to the first embodiment, damage to the measurement target can be reduced without deteriorating the detection sensitivity.
  • the incident angles of the separated lights Ld1 and Ld2 can be adjusted by adjusting only the grating 200. Therefore, compared with the case where adjustment is performed using two mirrors as in the first comparative example, the adjustment work can be performed very easily. As a result, the reliability of the apparatus is improved, and furthermore, the cost can be reduced and the apparatus configuration can be simplified by reducing the number of parts.
  • the separated light Ld2 does not enter the fluid 400 but is used as the reference light, but is only reflected by the mirror 700 and is diffused as in this embodiment. No diffusion by 600 is performed. For this reason, the reference light Lrc according to the second comparative example is detected on a relatively narrow surface of the detector 500.
  • the scattered light Ls and the reference light Lrc do not interfere efficiently on the detection surface of the detector 500. For this reason, the S / N ratio of the detection result is deteriorated. Further, since the position where the reference light Lrc is irradiated is limited, relatively high accuracy is required for alignment of the reference light Lrc.
  • each of the scattered light Ls and the reference light Lrc is detected in a wide area of the detection surface of the detector 500. For this reason, it is possible to improve the detection sensitivity without increasing the intensity of the irradiation light Li from the light source.
  • the reference light Lr is irradiated over a wide area by diffusion, it is possible to avoid the need for highly accurate alignment of the reference light Lr.
  • energy balance with the scattered light Ls can be achieved by dispersion of energy by diffusion.
  • the scattered light Ls and the reference light Lr detected by the detector 500 are preferably detected as light having similar energy.
  • the energy loss is larger than the reference light Lr that does not enter the fluid 400. Therefore, if the light quantity of the separated light Ld2 is adjusted to be smaller than the light quantity of the separated light Ld1 at the stage of separation in the grating 200 (for example, the light quantity of the separated light Ld2 is about 1/10 of the light quantity of the separated light Ld1). If it is adjusted so as to be, the detector 500 can detect the scattered light Ls and the reference light Lr having appropriate intensities.
  • the measuring apparatus 1 According to the measuring apparatus 1 according to the first embodiment, it is possible to suitably measure the measurement target by diffusing the reference light Lr.
  • FIG. 8 is a sectional view showing the overall configuration of the measuring apparatus according to the second embodiment.
  • the second embodiment differs from the first embodiment described above only in part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from 1st Example already demonstrated is demonstrated in detail, and description shall be abbreviate
  • the measuring apparatus 2 according to the second embodiment includes a transmission type diffusion plate 600b instead of the reflection type diffusion plate 600 according to the first embodiment (see FIGS. 1 and 2).
  • the diffusing plate 600b is disposed in the optical path of the separated light Ld2 reflected by the mirror 700, and diffuses the incident separated light Ld2 when passing through to be used as the reference light Lr.
  • the diffused reference light Lr can be irradiated to the detector 500. Therefore, also in the measuring apparatus 2 according to the second embodiment, the same effect as that of the measuring apparatus 1 according to the first embodiment can be obtained.
  • FIG. 9 is a sectional view showing the overall configuration of the measuring apparatus according to the third embodiment.
  • the third embodiment differs from the first and second embodiments described above only in part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from the already demonstrated 1st and 2nd Example is demonstrated in detail, and description is abbreviate
  • the measuring apparatus 3 includes a lens 650 instead of the reflective diffusion plate 600 (see FIGS. 1 and 2) according to the first embodiment.
  • the lens 650 is disposed in the optical path of the separated light Ld2 reflected by the mirror 700, and diffuses the incident separated light Ld2 into the reference light Lr.
  • the diffused reference light Lr can be irradiated to the detector 500. Therefore, also in the measuring apparatus 3 according to the third embodiment, the same effects as those of the measuring apparatus 1 according to the first embodiment and the measuring apparatus 2 according to the second embodiment can be obtained.
  • the member that diffuses the reference light Lr is not limited to the diffusion plate 600 and the lens 650 described above, and any member that can diffuse incident light can be used as appropriate. That is, any means for diffusing may be used as long as the detector 500 is irradiated with the reference light Lr in a diffused state.
  • FIG. 10 is a cross-sectional view showing the overall configuration of the measuring apparatus according to the fourth embodiment.
  • the fourth embodiment differs from the first to third embodiments described above only in part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from the 1st-3rd Example already demonstrated is demonstrated in detail, and description is abbreviate
  • the separated light Ld2 reflected by the mirror 700 is diffused by the lens 650b and applied to the detector 500, as in the measuring apparatus 3 according to the third embodiment. Is done.
  • the scattered light Ls scattered by the fluid 400 is further collected by the lens 650b and applied to the detector 500. That is, the lens 650b according to the fourth example has a condensing function for the scattered light Ls in addition to the diffusing function for the separated light Ld2.
  • the detector 500 can be efficiently irradiated with the scattered light Ls. Therefore, the S / N ratio can be improved without increasing the intensity of the irradiation light Li from the light source 100.
  • the scattered light Ls is collected and the reference light Lr so that the diameters of the light beams on the detection surface of the detector 500 are aligned with each other (more preferably, the values are close to the area of the detection surface of the detector 500). Can be detected more efficiently.
  • the present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification.
  • the measuring method is also included in the technical scope of the present invention.
  • Measuring device 100 Light source 200 Grating 210 Half mirror 220 Mirror 250 Two-sided mirror 300 Transparent tube 400 Fluid 401 Scatterer 500 Detector 600 Diffuser 650 Lens 700 Mirror Li irradiation light Ld1, Ld2 Separated light Ls Scattering Light Lr Reference light

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Abstract

L'invention concerne un dispositif de mesure (1) qui comprend un moyen de séparation et d'exposition à un rayonnement (200) pour séparer une lumière laser en un premier faisceau lumineux (Ld1) et un second faisceau lumineux (Ld2) et exposer un objet en cours de mesure à un premier faisceau lumineux (400), un moyen de diffusion (600) pour diffuser le second faisceau lumineux, et un moyen de réception (500) pour recevoir le premier faisceau lumineux (Ls) diffusé par l'objet en cours de mesure et le second faisceau lumineux (Lr) diffusé par le moyen de diffusion. Ce dispositif de mesure permet une mesure appropriée d'un objet en cours de mesure au moyen de la détection d'un premier faisceau lumineux diffusé et d'un second faisceau lumineux diffusé.
PCT/JP2014/055453 2014-03-04 2014-03-04 Dispositif de mesure et procédé de mesure WO2015132880A1 (fr)

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JP2016505982A JP6253761B2 (ja) 2014-03-04 2014-03-04 測定装置及び測定方法
PCT/JP2014/055453 WO2015132880A1 (fr) 2014-03-04 2014-03-04 Dispositif de mesure et procédé de mesure

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106124801A (zh) * 2016-08-03 2016-11-16 常熟市浙大紫金光电技术研究中心 基于光纤光栅的风速传感装置及风速风向监测系统
WO2019146762A1 (fr) * 2018-01-26 2019-08-01 京セラ株式会社 Dispositif ainsi que procédé de mesure de fluide, et programme

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CN113533774B (zh) * 2020-04-21 2023-08-15 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） 一种宽速域激光测速及校准试验装置与方法

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CN106124801A (zh) * 2016-08-03 2016-11-16 常熟市浙大紫金光电技术研究中心 基于光纤光栅的风速传感装置及风速风向监测系统
WO2019146762A1 (fr) * 2018-01-26 2019-08-01 京セラ株式会社 Dispositif ainsi que procédé de mesure de fluide, et programme
JPWO2019146762A1 (ja) * 2018-01-26 2020-02-06 京セラ株式会社 流体測定装置、流体測定方法、及びプログラム
JP2020187136A (ja) * 2018-01-26 2020-11-19 京セラ株式会社 流体測定装置、流体測定方法、及びプログラム
JP2021192053A (ja) * 2018-01-26 2021-12-16 京セラ株式会社 流体測定方法
JP7291754B2 (ja) 2018-01-26 2023-06-15 京セラ株式会社 流体測定方法

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