WO2015130108A1 - 지르코늄 함유막 형성용 전구체 조성물 및 이를 이용한 지르코늄 함유막 형성 방법 - Google Patents
지르코늄 함유막 형성용 전구체 조성물 및 이를 이용한 지르코늄 함유막 형성 방법 Download PDFInfo
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- WO2015130108A1 WO2015130108A1 PCT/KR2015/001886 KR2015001886W WO2015130108A1 WO 2015130108 A1 WO2015130108 A1 WO 2015130108A1 KR 2015001886 W KR2015001886 W KR 2015001886W WO 2015130108 A1 WO2015130108 A1 WO 2015130108A1
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- zirconium
- containing film
- forming
- composition
- precursor composition
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- 239000000203 mixture Substances 0.000 title claims abstract description 132
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 title claims abstract description 101
- 229910052726 zirconium Inorganic materials 0.000 title claims abstract description 101
- 239000002243 precursor Substances 0.000 title claims abstract description 67
- 238000000034 method Methods 0.000 title claims abstract description 52
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 58
- 150000001875 compounds Chemical class 0.000 claims abstract description 44
- 239000000126 substance Substances 0.000 claims abstract description 20
- XNHWQHNKNUZXGJ-UHFFFAOYSA-N C1(C=CC=C1)[Zr+3] Chemical compound C1(C=CC=C1)[Zr+3] XNHWQHNKNUZXGJ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 11
- 150000001491 aromatic compounds Chemical class 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 34
- 125000004432 carbon atom Chemical group C* 0.000 claims description 31
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 21
- 238000005137 deposition process Methods 0.000 claims description 19
- 238000000231 atomic layer deposition Methods 0.000 claims description 16
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 11
- 125000000217 alkyl group Chemical group 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 10
- CHVJITGCYZJHLR-UHFFFAOYSA-N cyclohepta-1,3,5-triene Chemical compound C1C=CC=CC=C1 CHVJITGCYZJHLR-UHFFFAOYSA-N 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- DCPPOHMFYUOVGH-UHFFFAOYSA-N CN(C)[Zr](C1C=CC=C1)(N(C)C)N(C)C Chemical compound CN(C)[Zr](C1C=CC=C1)(N(C)C)N(C)C DCPPOHMFYUOVGH-UHFFFAOYSA-N 0.000 claims description 9
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims description 9
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 9
- 125000003118 aryl group Chemical group 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000012546 transfer Methods 0.000 claims description 7
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 6
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 6
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- 239000001307 helium Substances 0.000 claims description 5
- 229910052734 helium Inorganic materials 0.000 claims description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 125000002723 alicyclic group Chemical group 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 3
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims description 3
- 125000004122 cyclic group Chemical group 0.000 claims description 3
- STHAQIJXOMGURG-UHFFFAOYSA-N cyclopenta-1,3-diene;dimethylazanide;zirconium(4+) Chemical compound [Zr+4].C[N-]C.C[N-]C.C[N-]C.C=1C=C[CH-]C=1 STHAQIJXOMGURG-UHFFFAOYSA-N 0.000 claims description 3
- 239000003085 diluting agent Substances 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 3
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000005019 vapor deposition process Methods 0.000 claims 1
- 239000000470 constituent Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 115
- 238000012360 testing method Methods 0.000 description 17
- 238000000151 deposition Methods 0.000 description 14
- 230000008021 deposition Effects 0.000 description 11
- 238000000113 differential scanning calorimetry Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 238000002411 thermogravimetry Methods 0.000 description 9
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 8
- 238000000354 decomposition reaction Methods 0.000 description 8
- 238000005481 NMR spectroscopy Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000003446 ligand Substances 0.000 description 5
- 238000000655 nuclear magnetic resonance spectrum Methods 0.000 description 5
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- 230000007774 longterm Effects 0.000 description 4
- IVSZLXZYQVIEFR-UHFFFAOYSA-N m-xylene Chemical compound CC1=CC=CC(C)=C1 IVSZLXZYQVIEFR-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000013112 stability test Methods 0.000 description 4
- 238000005979 thermal decomposition reaction Methods 0.000 description 4
- 150000003755 zirconium compounds Chemical class 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000000197 pyrolysis Methods 0.000 description 3
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 238000002076 thermal analysis method Methods 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- -1 tungsten nitride Chemical class 0.000 description 2
- RRKODOZNUZCUBN-CCAGOZQPSA-N (1z,3z)-cycloocta-1,3-diene Chemical compound C1CC\C=C/C=C\C1 RRKODOZNUZCUBN-CCAGOZQPSA-N 0.000 description 1
- GORPVKZVZYAFSO-KZPCVFJPSA-N (1z,3z,5z,7z)-cyclonona-1,3,5,7-tetraene Chemical compound C/1\C=C/C=C\C=C/C=C\1 GORPVKZVZYAFSO-KZPCVFJPSA-N 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- LJARRLWBXMWSRC-UHFFFAOYSA-N C(C)(C)N(C(C)C)[Zr](C1C=CC=C1)(N(C(C)C)C(C)C)N(C(C)C)C(C)C Chemical compound C(C)(C)N(C(C)C)[Zr](C1C=CC=C1)(N(C(C)C)C(C)C)N(C(C)C)C(C)C LJARRLWBXMWSRC-UHFFFAOYSA-N 0.000 description 1
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- FWSPCHGKEWEHER-UHFFFAOYSA-N CN(CC)[Zr](C1C=CC=C1)(N(C)CC)N(C)CC Chemical compound CN(CC)[Zr](C1C=CC=C1)(N(C)CC)N(C)CC FWSPCHGKEWEHER-UHFFFAOYSA-N 0.000 description 1
- 238000004639 Schlenk technique Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- UHOVQNZJYSORNB-MZWXYZOWSA-N benzene-d6 Chemical compound [2H]C1=C([2H])C([2H])=C([2H])C([2H])=C1[2H] UHOVQNZJYSORNB-MZWXYZOWSA-N 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
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- ICPMUWPXCAVOOQ-UHFFFAOYSA-N cycloocta-1,3,5-triene Chemical compound C1CC=CC=CC=C1 ICPMUWPXCAVOOQ-UHFFFAOYSA-N 0.000 description 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
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- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 1
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- 239000006200 vaporizer Substances 0.000 description 1
- 150000003738 xylenes Chemical class 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/45525—Atomic layer deposition [ALD]
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/405—Oxides of refractory metals or yttrium
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02189—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing zirconium, e.g. ZrO2
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
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- H—ELECTRICITY
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
Definitions
- the present invention relates to a precursor composition for forming a zirconium-containing film and a method for forming a zirconium-containing film using the same. More specifically, the present invention relates to a precursor composition for forming a zirconium-containing film which can easily form a zirconium-containing film such as a zirconia film in the manufacture of a semiconductor device, and a method for forming a zirconium-containing film using the same.
- a zirconia film will be described using, for example, a zirconium precursor compound, but the following description may also be applied to the case of forming a zirconium film or a zirconium nitride film using a zirconium precursor compound.
- Zirconia (zirconia, ZrO 2 ) has a large dielectric constant of about 25, a wide band gap of about 5 eV, a high refractive index (greater than about 2), high reactivity, and chemical It is stable. Since zirconia is thermally stable upon contact with an Si interface, various studies are being conducted for use as a gate dielectric or a dielectric film of a capacitor in the manufacture of a semiconductor device such as a dynamic random access memory (DRAM).
- DRAM dynamic random access memory
- zirconia films are generally formed using metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD) processes.
- MOCVD deposition method can form a high quality zirconia film through chemical vapor deposition, and the ALD deposition method produces a highly uniform zirconia film and can control the atomic units of the zirconia film.
- ligands present in the zirconium compound should be rapidly removed without pyrolysis and converted to zirconia at a temperature of 250 to 500 ° C.
- ALD process it is necessary to rapidly and completely decompose and remove the ligand present in the zirconium compound by ozone (O 3 ) or water vapor (H 2 O) used as an oxidizing agent.
- Zirconium precursor compounds suitable for MOCVD or ALD processes must have a high vapor pressure at low temperatures (about 100 ° C.) and be thermally stable enough to be heated for vaporization and be low viscosity liquid compounds.
- Zirconium precursor compounds satisfying these conditions are easy to produce a zirconia thin film having a uniform film density and high density during deposition.
- the zirconium compound coordinated with the amino group ligand is used in the deposition of zirconia films using the ALD process because the zirconium compound coordinated with the amino group ligand has a low viscosity at room temperature, high vapor pressure, and easy removal of the amino group ligand by ozone and water vapor.
- zirconium precursor compounds have poor long-term storage properties, in particular, poor thermal stability, resulting in thermal decomposition during deposition, which adversely affects zirconia film quality.
- tris (dimethylamino) cyclopentadienyl zirconium (IV) [CpZr (NMe 2 ) 3 ] is most frequently used, but this precursor compound also exhibits the above problems.
- one object of the present invention is to have a high vapor pressure at low temperature, excellent long-term stability and thermal stability to produce a high quality zirconium-containing film in order to solve the problems of the prior art in the manufacturing process of a semiconductor device. It is to provide a precursor composition for forming a new zirconium-containing film.
- Another object of the present invention is to provide a method of forming a zirconium-containing film which can easily form a zirconium-containing film having excellent film properties, thickness uniformity and step coverage by using the above-described precursor composition for forming a zirconium-containing film. .
- R 1 to R 8 may be the same as or different from each other, and are selected from a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 12 carbon atoms, and an aralkyl group having 7 to 13 carbon atoms,
- R ' 1 to R' 6 may be the same or different from each other, and are selected from a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 12 carbon atoms, and an aralkyl group having 7 to 13 carbon atoms; ,
- R ′′ 1 to R ′′ 6 may be the same as or different from each other, and are selected from a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 12 carbon atoms, and an aralkyl group having 7 to 13 carbon atoms;
- R ′′ 1 and R ′′ 2 , R ′′ 3 and R ′′ 4 , or R ′′ 5 and R ′′ 6 may be linked to each other to form a cyclic amine group having 3 to 10 carbon atoms with the nitrogen atom to which they are bonded.
- n are each independently selected from an integer of 0 to 10.
- the composition may be a mixture of cycloheptatriene and tris (dimethylamino) cyclopentadienyl zirconium (IV) [CpZr (NMe 2 ) 3 ].
- the composition may be a mixture of xylene and tris (dimethylamino) cyclopentadienyl zirconium (IV).
- It provides a zirconium-containing film forming method comprising the step of forming a zirconium-containing film on a substrate by a deposition process using the precursor composition for forming a zirconium-containing film according to an aspect of the present invention.
- the deposition process may be an atomic layer deposition (ALD) process or a chemical vapor deposition (CVD) process.
- ALD atomic layer deposition
- CVD chemical vapor deposition
- the deposition deposition process may be carried out at 50 ⁇ 700 °C.
- the zirconium-containing film may be a zirconium film, a zirconia film, or a zirconium nitride film.
- the zirconium-containing film precursor composition is at least one carrier gas or diluent gas selected from argon (Ar), nitrogen (N 2 ), helium (He), and hydrogen (H 2 ) Mixed with and transported onto the substrate.
- carrier gas or diluent gas selected from argon (Ar), nitrogen (N 2 ), helium (He), and hydrogen (H 2 ) Mixed with and transported onto the substrate.
- the precursor composition for forming a zirconium-containing film is at least one reaction gas selected from oxygen (O 2 ), water vapor (H 2 O), and ozone (O 3 ) to form a zirconia film
- the mixture may be transferred onto the substrate.
- the precursor composition for forming a zirconium-containing film is ammonia (NH 3 ), hydrazine (N 2 H 4 ), nitrogen dioxide (NO 2 ) and nitrogen (N 2 ) to form a zirconium nitride film It may be mixed with at least one reactive gas selected from plasma and transferred onto the substrate.
- the precursor composition for zirconium-containing film formation may be transferred onto the substrate by a direct liquid injection (DLI) method or by a liquid transfer method which is mixed with an organic solvent and transferred. .
- DLI direct liquid injection
- thermal energy, plasma, or electrical bias may be applied to the substrate during the deposition process.
- the deposition process may be a deposition process for forming a dielectric film when forming a capacitor structure or a gate structure during semiconductor device manufacturing.
- the deposition process In one embodiment of the present invention, the deposition process,
- the method may include forming a zirconium-containing film on the substrate by decomposing the zirconium-containing film-forming precursor composition by applying thermal energy, plasma, or electrical bias to the substrate.
- System compounds are volatile compositions which do not react with each other and exist in a stable and uniformly mixed state in a liquid state, but exhibit high vapor pressure at a temperature including room temperature.
- the composition also has excellent long-term stability and thermal stability and low degradation residues.
- the zirconium-containing film forming method according to another aspect of the present invention is used in the chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes used in the manufacture of semiconductor devices, the following effects can be obtained.
- CVD chemical vapor deposition
- ALD atomic layer deposition
- the temperature of the vaporizer and the deposition temperature may be increased during deposition, and thus the zirconium-containing film obtained may be improved.
- the storage stability is excellent and the temperature of the evaporator and the deposition temperature can be increased, so that the obtained zirconium-containing film characteristics can be improved.
- the precursor composition for forming a zirconium-containing film alloy according to the present invention is a Zr precursor which is superior to the cyclopentadienyl zirconium (IV) -based compound of Formula 3 alone.
- FIG. 3 is a diagram summarizing the DSC heat curves and the TGA heat curves obtained in the tests for the compositions X and Y obtained in Examples 1 and 2 and the TDCP of Comparative Example 1, wherein the heat curve indicated by (a) at the top is It is a graph showing the results obtained in the DSC test, and the heat curve indicated by (b) at the bottom is a graph showing the results obtained in the TGA test.
- Precursor composition for forming a zirconium-containing film according to an aspect of the present invention is 1 to 3 moles of an alicyclic unsaturated compound represented by the formula (1) or an aromatic compound represented by the formula (2); And a cyclopentadienyl zirconium (IV) -based compound represented by the following Chemical Formula 3 in a ratio of 1 mol to 3 mol:
- R 1 to R 8 may be the same as or different from each other, and are selected from a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 12 carbon atoms, and an aralkyl group having 7 to 13 carbon atoms,
- R ' 1 to R' 6 may be the same or different from each other, and are selected from a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 12 carbon atoms, and an aralkyl group having 7 to 13 carbon atoms; ,
- R ′′ 1 to R ′′ 6 may be the same as or different from each other, and are selected from a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 12 carbon atoms, and an aralkyl group having 7 to 13 carbon atoms;
- R ′′ 1 and R ′′ 2 , R ′′ 3 and R ′′ 4 , or R ′′ 5 and R ′′ 6 may be linked to each other to form a cyclic amine group having 3 to 10 carbon atoms with the nitrogen atom to which they are bonded.
- n are each independently selected from an integer of 0 to 10.
- the molar number of the cycloaliphatic unsaturated compound of Formula 1 or the aromatic compound represented by the following Formula 2 is excellent in thermal stability and storage stability And 1: 2 to 3, for example, 1: 2 to 2.5, in that a chemical reaction between the two components should not occur.
- R in Formulas 1 to 3, 1 to R 8 , R ' 1 to R' 6 , and R ′′ 1 to R ′′ 6 may be the same as or different from each other, preferably selected from a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, and m and n are It is preferably selected from integers of 1 to 3 independently of each other.
- cycloaliphatic unsaturated compound of Formula 1 examples include cycloheptatriene, cyclooctatriene, cyclononatetraene, cyclooctadiene and the like.
- the compound of Formula 1 does not generate a chemical reaction with the cyclopentadienyl zirconium (IV) -based precursor compound of Formula 3, the structural change of the precursor compound does not occur, it is possible to obtain a mixture having excellent storage stability,
- the compound of Formula 1 is preferably cycloheptatriene.
- aromatic compound represented by Formula 2 examples include benzene, toluene, o-, m-, or p-xylene.
- the compound of Chemical Formula 2 does not generate a chemical reaction with the cyclopentadienyl zirconium (IV) -based precursor compound of Chemical Formula 3, the structural change of the precursor compound does not occur, it is possible to obtain a mixture having excellent storage stability,
- the compound of Formula 2 is preferably o-, m-, or p-xylene.
- cyclopentadienyl zirconium (IV) -based compound of Formula 3 are tris (dimethylamino) cyclopentadienyl zirconium (IV) (CpZr (NMe 2 ) 3 ), tris (methylethylamino) cyclopentadienyl Zirconium (IV) (CpZr (NMeEt) 3 ), tris (diethylamino) cyclopentadienyl zirconium (IV) (CpZr (NEt 2 ) 3 ), tris (diisopropylamino) cyclopentadienyl zirconium (IV) (CpZr (N (i-Pr) 3 )) and the like.
- the composition according to one embodiment of the present invention may be a mixture of cycloheptatriene and tris (dimethylamino) cyclopentadienyl zirconium (IV) (CpZr (NMe 2 ) 3 ).
- the ratio of moles of cycloheptatriene to moles of tris (dimethylamino) cyclopentadienyl zirconium (IV) in this mixture may be 1: 2.5.
- the composition may be a mixture of xylene and tris (dimethylamino) cyclopentadienyl zirconium (IV).
- the ratio of the number of moles of xylenes to tris (dimethylamino) cyclopentadienyl zirconium (IV) in this mixture may be 1: 2.
- the precursor composition for forming a zirconium-containing film of the present invention is surprisingly a composition in which the above two compounds are stably mixed in a constant molar ratio, but each precursor compound does not react with each other and precipitates in the middle, and is sprayed from one nozzle to zirconium.
- a containing film can be formed.
- the cycloaliphatic unsaturated compound represented by the formula (1) or the aromatic compound represented by the formula (2) and the cyclopentadienyl zirconium (IV) -based compound represented by the formula (3) do not react with each other and stably and uniformly mixed with each other in a liquid state It is a volatile composition which is present in an intact state and exhibits high vapor pressure at a temperature including room temperature.
- the composition also has excellent long-term stability and thermal stability and low degradation residues. Therefore, by using the precursor composition for forming a zirconium-containing film according to the present invention, it is possible to easily and efficiently form a zirconium-containing film such as zirconia having excellent film properties, thickness uniformity and step coverage in the semiconductor manufacturing process.
- the zirconium-containing film forming method of the present invention includes forming a zirconium-containing film on a substrate by a deposition process using the precursor composition for forming a zirconium-containing film as a precursor.
- the deposition process may be a CVD process such as an ALD process or a MOCVD process.
- the deposition process may preferably be carried out at room temperature to 700 °C, for example 100 to 500 °C.
- the zirconium containing film may be, for example, a zirconium film, a zirconia film, or a zirconium nitride film.
- the zirconium film formed thereby can be used as a conductive film, and the zirconia film and zirconium nitride film can be used as a dielectric film or an insulating film.
- the zirconia film may be used as a dielectric film when forming a capacitor structure or a gate structure during semiconductor device manufacturing.
- a process of forming a capacitor using the zirconia film may include forming a lower electrode on a semiconductor substrate; Forming a zirconia film on the lower electrode by the method according to the present invention; Oxidizing the zirconia film using a plasma in an atmosphere containing oxygen; And forming an upper electrode on the zirconia film.
- the lower electrode may be a metal nitride film such as a titanium nitride film (TiN), a tantalum nitride film (TaN), and a tungsten nitride film (WN), a precious metal film such as ruthenium (Ru) and platinum (Pt), or a combination thereof. have.
- the upper electrode may be a metal nitride film such as a titanium nitride film (TiN), a tantalum nitride film (TaN), and a tungsten nitride film (WN), a precious metal film such as ruthenium (Ru) and platinum (Pt), or a combination thereof.
- a metal nitride film such as a titanium nitride film (TiN), a tantalum nitride film (TaN), and a tungsten nitride film (WN), a precious metal film such as ruthenium (Ru) and platinum (Pt), or a combination thereof.
- the zirconium-containing film is a zirconium film
- at least one carrier gas selected from argon (Ar), nitrogen (N 2 ), helium (He), and hydrogen (H 2 ) may be used as a precursor composition for forming a zirconium-containing film during the deposition process. Mix with diluent gas and transfer onto substrate.
- the precursor composition for forming a zirconium-containing film is mixed with at least one reaction gas selected from oxygen (O 2 ), water vapor (H 2 O), and ozone (O 3 ) to be transferred onto a substrate.
- the precursor composition for forming a zirconium-containing film is one or more reaction gases selected from ammonia (NH 3 ), hydrazine (N 2 H 4 ), nitrogen dioxide (NO 2 ), and nitrogen (N 2 ) plasma. Mixed with and transferred onto the substrate.
- the precursor composition for forming a zirconium-containing film may be a bubbling method, a vapor phase mass flow controller (MFC), direct liquid injection (DLI), or the composition into an organic solvent. It can be used for thin film deposition by being transferred onto a substrate by a liquid transfer method for dissolving and transferring.
- thermal energy, plasma, or electrical bias may be applied to the substrate during the deposition process in order to increase the deposition efficiency.
- the deposition process may include heating the substrate to a temperature of 50 to 700 ° C. under a vacuum or inert atmosphere; Introducing the zirconium-containing film-forming precursor composition heated to a temperature of 20 ° C. to 100 ° C. on the substrate; Adsorbing the precursor composition for zirconium-containing film formation on the substrate to form a layer for precursor composition for zirconium-containing film formation on a substrate;
- the method may include forming a zirconium-containing film on the substrate by decomposing the zirconium-containing film-forming precursor composition by applying thermal energy, plasma, or electrical bias to the substrate.
- the precursor composition for forming a zirconium-containing film may provide a time of less than 1 minute as a time for forming a layer on the substrate.
- Excess zirconium-containing film-forming precursor composition that is not adsorbed on the substrate is preferably removed using at least one inert gas such as argon (Ar), nitrogen (N 2 ) and helium (He). Less than one minute can be provided as the time to remove excess precursor composition.
- one or more inert gases such as argon (Ar), nitrogen (N 2 ) and helium (He) can be introduced into the chamber in less than one minute to remove excess reactant gas and by-products. have.
- the precursor composition for forming a zirconium-containing film according to the present invention has excellent chemical and thermal stability, is present as a liquid at room temperature, and has high volatility, it is effective to deposit a zirconium-containing film by using it as a precursor in a CVD process or an ALD process when manufacturing a semiconductor device. It can be usefully used.
- TDCP 39.14 g (0.1356 mol) was added to a 500 ml branched round flask in a room temperature glove box, the temperature was lowered to 0 ° C., and 5 g (0.05426 mol) of cycloheptatriene were slowly added. Thereafter, the temperature of the mixture was gradually raised to room temperature to obtain a precursor composition Y for forming a zirconium-containing film.
- Tris (dimethylamino) cyclopentadienyl zirconium (IV) (TDCP) purchased from SolBrain Co., Ltd. was used as it is.
- NMR spectroscopic analysis was carried out on the compositions X and Y immediately after mixing obtained in Examples 1 and 2.
- 1 is NMR spectra of compositions X and Y immediately after mixing obtained in Examples 1 and 2.
- FIG. 1 is NMR spectra of compositions X and Y immediately after mixing obtained in Examples 1 and 2.
- compositions X and Y were heated and maintained at about 200 ° C. for about 16 hours, and then the compositions X and Y were subjected to NMR spectroscopic analysis.
- DSC differential scanning calorimetry
- TGA thermogravimetric analysis
- DSC test was carried out using a thermal analyzer (manufacturer: TA Instruments, model name: SDT Q600) in the differential scanning calorimetry mode to measure the thermal decomposition temperature, TGA test was carried out to measure the amount of residual (residue) Was carried out in thermogravimetric analysis mode.
- a thermal analyzer manufactured by TA Instruments, model name: SDT Q600
- TGA test was carried out to measure the amount of residual (residue) was carried out in thermogravimetric analysis mode.
- Transport gas argon (ar) gas
- Heating profile Heat from 30 ° C. to 500 ° C. at a rate of 10 ° C./min.
- the pyrolysis temperature was determined at the point where the amount of heat flow decreased when the temperature rose in the DSC thermogram of FIG.
- FIG. 3 shows the DSC thermal and TGA thermal curves obtained in the tests for the compositions X and Y obtained in Examples 1-2 and the TDCP of Comparative Example 1, respectively, in one drawing.
- the heat curve indicated by (a) at the top is a result obtained by the DSC test
- the heat curve indicated by (b) at the bottom is a result obtained by the TGA test.
- compositions X and Y showed only one decomposition temperature. It was surprisingly found that this composition behaves like a compound. This is an advantageous property when forming a zirconium containing film using this composition. From FIG. 3, it was confirmed that the thermal decomposition temperatures and residual amounts of the compositions X and Y obtained in Example 1-2 and the TDCP of Comparative Example 1 are shown in Table 1 below.
- the amount of residual components after heating TDCP alone, Composition X and Composition Y, respectively, to 500 ° C. was 11.88%, 4.68%, and 5.06%, respectively.
- the percentage of residual component amount is a percentage based on the weight of the sample before heating. From this, it can be seen that the zirconium-containing film can be easily formed without contaminating the semiconductor substrate when the zirconium-containing film is deposited using the composition X and the composition Y of the present invention, as compared with the case of depositing the zirconium-containing film using the TDCP single compound. have.
- the viscosity was measured for each of TDCP alone, Composition X and Composition Y as follows.
- a viscometer manufactured by AND Co., Model name: SV-10
- a viscometer was placed in a glove box, and the viscosity was measured for each of samples of the composition X and the composition Y immediately after preparation, and TDCP alone at a temperature of about 11 ° C. Measured twice. Thereafter, a thermal stability test was conducted in which each of TDCP alone, Composition X, and Composition Y were heated at about 200 ° C. for about 2 hours, and again, the total viscosity was measured for each of them at a glove box temperature of about 11 ° C. each.
- composition X and the composition Y is lower in viscosity than before and after heating, compared to TDCP alone. Therefore, it can be confirmed that both the composition X and the composition Y according to the present invention can improve the step coverage of the obtained zirconium-containing film because the intermolecular attraction is lower than the TDCP alone, so that the volatility is excellent.
- Zirconia film formation evaluation by the Plasma Enhanced Atomic layer deposition (PEALD) process was performed using the composition X and the composition Y obtained in Examples 1 and 2.
- Argon an inert gas, was used for purge and precursor transfer purposes. Injecting the precursor, argon, plasma and argon was one cycle, and deposition was performed on a P-type (100) Si wafer.
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Abstract
Description
TDCP | 조성물 X | 조성물 Y | |
분해온도(℃) | 211.34 | 211.42 | 213.29 |
잔류성분량(%) | 11.88 | 4.68 | 5.06 |
점도(centipoise) | ||
200℃ 가열전 | 200℃ 가열후 | |
TDCP | 18.5 | 16.5 |
조성물 X | 6.1 | 4.7 |
조성물 Y | 7.8 | 9.7 |
Claims (13)
- 하기 화학식 1로 표시되는 지환족 불포화 화합물 또는 하기 화학식 2로 표시되는 방향족 화합물 1몰 내지 3몰; 및하기 화학식 3으로 표시되는 사이클로펜타디에닐 지르코늄(IV)계 화합물 1몰 내지 3몰의 비율로 혼합된 것을 특징으로 하는 지르코늄 함유막 형성용 전구체 조성물:<화학식 1> <화학식 2><화학식 3>상기 화학식 1에서, R1 내지 R8는, 각각 서로 같거나 다를 수 있으며, 수소 원자, 탄소수 1 내지 10의 알킬기, 탄소수 6 내지 12의 아릴기, 탄소수 7 내지 13의 아랄킬기에서 선택되고,상기 화학식 2에서, R'1 내지 R'6는, 각각 서로 같거나 다를 수 있으며, 수소 원자, 탄소수 1 내지 10의 알킬기, 탄소수 6 내지 12의 아릴기, 탄소수 7 내지 13의 아랄킬기에서 선택되고,상기 화학식 3에서, R"1 내지 R"6는, 각각 서로 같거나 다를 수 있으며, 수소 원자, 탄소수 1 내지 10의 알킬기, 탄소수 6 내지 12의 아릴기, 탄소수 7 내지 13의 아랄킬기에서 선택되고, 이때 R"1와 R"2, R"3와 R"4, 또는 R"5와 R"6는 각각 서로 연결되어 이들이 결합되어 있는 질소원자와 함께 탄소수 3 내지 10의 사이클릭 아민기를 형성할 수 있으며; 및m 및 n은 서로 독립적으로 0 내지 10의 정수에서 선택된다.
- 청구항 1에 있어서, 상기 조성물은 사이클로헵타트리엔과 트리스(디메틸아미노) 사이클로펜타디에닐 지르코늄(IV)(CpZr(NMe2)3)의 혼합물인 것을 특징으로 하는 지르코늄 함유막 형성용 전구체 조성물.
- 청구항 1에 있어서, 상기 조성물은 자일렌과 트리스(디메틸아미노) 사이클로펜타디에닐 지르코늄(IV)의 혼합물인 것을 특징으로 하는 지르코니아 형성용 전구체 조성물.
- 지르코늄 함유막 형성 방법으로서,청구항 1 내지 3 중 어느 한 항에 따른 지르코늄 함유막 형성용 전구체 조성물을 전구체로서 이용하는 증착 공정에 의하여 기판상에 지르코늄 함유막을 형성하는 단계를 포함하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 증착 공정은 원자층 증착(atomic layer deposition: ALD) 공정 또는 화학 기상 증착(chemical vapor deposition: CVD) 공정인 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 증착 공정이 50 ~ 700 ℃에서 실시되는 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 지르코늄 함유막이 지르코늄막, 지르코니아막, 또는 지르코늄 질화물막(zirconium nitride film)인 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 지르코늄 함유막 형성용 전구체 조성물을 아르곤(Ar), 질소(N2), 헬륨(He), 및 수소(H2) 중에서 선택된 1종 이상의 캐리어 기체 또는 희석 가스와 혼합하여 상기 기판상으로 이송하는 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 지르코늄 함유막 형성용 전구체 조성물을 산소(O2), 수증기(H2O), 및 오존(O3) 중에서 선택된 1종 이상의 반응 가스와 혼합하여 상기 기판상으로 이송하는 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 지르코늄 함유막 형성용 전구체 조성물을 암모니아(NH3), 히드라진(N2H4), 이산화질소(NO2) 및 질소(N2) 플라즈마 중에서 선택된 1종이상의 반응 가스와 혼합하여 상기 기판상으로 이송하는 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 지르코늄 함유막 형성용 전구체 조성물을 직접 액체 주입(DLI: direct liquid injection) 방식으로 또는 유기 용매와 혼합하여 이송하는 액체 이송 방법으로 상기 기판상으로 이송하는 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 증착 공정 동안 상기 기판에 열에너지, 플라즈마, 또는 전기적 바이어스를 인가하는 것을 특징으로 하는 지르코늄 함유막 형성 방법.
- 청구항 4에 있어서, 상기 증착 공정은 반도체 장치 제조중 커패시터 구조 또는 게이트 구조 형성시 유전막을 형성하기 위한 증착 공정인 것을 특징으로 하는 지르코늄 함유막 형성 방법.
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US15/121,680 US20160362786A1 (en) | 2014-02-26 | 2015-02-26 | Precursor Composition for Forming Zirconium-Containing Film and Method for Forming Zirconium-Containing Film Using Same |
CN201580010845.1A CN106062242B (zh) | 2014-02-26 | 2015-02-26 | 用于形成含锆膜的前驱体组合物以及用其形成含锆膜的方法 |
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KR102632516B1 (ko) * | 2015-12-04 | 2024-02-05 | 솔브레인 주식회사 | 박막 형성용 조성물 |
KR20200072407A (ko) * | 2018-12-12 | 2020-06-22 | 에스케이트리켐 주식회사 | 금속막 형성용 전구체 조성물, 이를 이용한 금속막 형성 방법 및 상기 금속막을 포함하는 반도체 소자. |
KR102544077B1 (ko) | 2020-03-11 | 2023-06-16 | 에스케이하이닉스 주식회사 | 금속막 형성용 전구체 조성물 및 이를 이용한 박막 형성 방법 |
KR20220158601A (ko) | 2021-05-24 | 2022-12-01 | 에스케이트리켐 주식회사 | 반도체 박막 형성용 금속 전구체 화합물 및 이용하여 제조된 금속 함유 박막 |
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