WO2015085606A1 - 自动化物料搬运系统及其天车系统 - Google Patents

自动化物料搬运系统及其天车系统 Download PDF

Info

Publication number
WO2015085606A1
WO2015085606A1 PCT/CN2013/089682 CN2013089682W WO2015085606A1 WO 2015085606 A1 WO2015085606 A1 WO 2015085606A1 CN 2013089682 W CN2013089682 W CN 2013089682W WO 2015085606 A1 WO2015085606 A1 WO 2015085606A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
telescopic
trolley
material handling
pick
Prior art date
Application number
PCT/CN2013/089682
Other languages
English (en)
French (fr)
Inventor
陈增宏
Original Assignee
深圳市华星光电技术有限公司
陈增宏
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市华星光电技术有限公司, 陈增宏 filed Critical 深圳市华星光电技术有限公司
Publication of WO2015085606A1 publication Critical patent/WO2015085606A1/zh

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor

Definitions

  • the invention relates to the field of liquid crystal panel manufacturing, and in particular to an automatic material handling system and a crane system thereof.
  • each bin (not shown) has a material port 50 connected to the crown block system 60 for accessing the cassette; a pick-and-place device 51 is provided in the material port 50. Any one of the storage cabinets can transport the cassettes to be transported inside the material to the material port 50 through its internal transport mechanism; then the pick-and-place device 51 in the material port 50 sends the cassettes in the material port 50 to the crane system 60.
  • the trolley 62 is moved; the trolley 62 is moved along the crown rail 61, and the cassette is transported to the material port 50 of the designated storage cabinet, and the pick-up device 51 at the material port 50 of the designated storage cabinet removes the cassette.
  • the trolley 62 is taken back into the material port 50; finally, after the rotating mechanism in the material port 50 is rotated, the internal transport mechanism moves the cassette to the designated storage position for placement; that is, the handling of the cassette is completed.
  • the pick-and-place device 51 is disposed in the material port 50 of the existing storage cabinet.
  • the cost of the storage cabinet of the entire automated material handling system is high, and on the other hand, the failure rate of the pick-and-place device 51 is also high.
  • Automated material handling systems work properly, limiting production capacity to a large extent.
  • a primary object of the present invention is to provide an automated material handling system and a crane system thereof that reduce the cost of a storage cabinet in an automated material handling system and reduce the probability of failure of an automated material handling system to increase throughput.
  • the invention provides a crane system for an automated material handling device, comprising a crown rail and a trolley moving on the crown rail.
  • the trolley is connected with a pick-and-place assembly for picking up the cassette.
  • the trolley is further provided with a rotating device, and the pick-and-place assembly is connected to the rotating device and can rotate along with the rotating device.
  • the pick-and-place assembly comprises a telescopic member, a support member and a lifting member; a first end of the telescopic member is coupled to the trolley, and a second end of the telescopic member is coupled to the support member; On the telescopic member.
  • the lifting member is disposed at the first end of the telescopic member for driving the lifting/lowering of the telescopic member; or the lifting member is disposed at the second end of the telescopic member for driving The rise/fall of the support.
  • the telescopic direction of the second end of the telescopic member includes the left side and the right side of the traveling direction of the trolley.
  • the second end of the telescoping member is coupled to an intermediate position of the support member.
  • the telescopic member includes a symmetric left telescopic arm and a right telescopic arm, and a first end of the left telescopic arm and a first end of the right telescopic arm are rotatably coupled to the trolley, and the left telescopic A second end of the arm and a second end of the right telescopic arm are rotatably coupled to the support.
  • the left telescopic arm includes a first arm and a second arm, a first end of the first arm is a first end of the left telescopic arm, and a second end of the first arm Hinging with the first end of the second arm, and the first end of the second arm is above the second end of the first arm, and the second end of the second arm is a second end of the left telescopic arm;
  • the right telescopic arm includes a third arm and a fourth arm, a first end of the third arm is a first end of the right telescopic arm, and a second end of the third arm is The first end of the fourth arm is hinged, and the first end of the fourth arm is located above the second end of the third arm, and the second end of the fourth arm is the right telescopic arm The second end.
  • the lifting member is two, respectively disposed at a second end of the first arm and a second end of the third arm, two lifting members driving the second arm and the The fourth arm simultaneously rises/falls.
  • the invention also proposes an automated material handling system comprising a crane system as described above and a multi-storage bin.
  • the automatic material handling system and the crane system of the invention replace the pick-and-place devices in all the storage cabinets by using the pick-and-place assembly on the trolley, and no need to set the pick-and-place device in each storage cabinet, thereby reducing the automation materials.
  • the cost of all the storage cabinets of the handling system Moreover, there is no pick-and-place device in all the storage cabinets, which avoids the normal operation of the automated material handling system due to the failure of the pick-and-place device; reduces the probability of failure of the automated material handling system, thereby improving the automated material handling system. Capacity.
  • Figure 1 is a perspective plan view of a prior art automated material handling system
  • Figure 2 is a perspective top plan view of an automated material handling system in accordance with a preferred embodiment of the present invention
  • Figure 3 is a perspective plan view of the trolley of the preferred embodiment of the trolley system of the present invention.
  • Figure 4 is a schematic view of the telescopic part of the trolley of Figure 3;
  • FIG. 5 is a diagram showing an example of a process of transporting a cassette of a crown system according to a preferred embodiment of the present invention.
  • FIG. 2 is a perspective top view of the automated material handling system of the preferred embodiment of the present invention.
  • the storage cabinet of FIG. 2 is not shown, and only the material port of the storage cabinet is drawn.
  • FIG. 3 is a perspective plan view of a perspective view of a trolley in a preferred embodiment of the present invention.
  • FIG. 4 is a schematic view of a telescopic part of the trolley of FIG.
  • FIG. 5 is a diagram showing an example of a process of transporting a cassette of a crane system according to a preferred embodiment of the present invention.
  • the overhead system 100 of the automated material handling system of the embodiment includes a crown rail 10 and a trolley 20 moving on the crown rail 10, and the trolley 20 is connected to the cassette for picking and unloading.
  • the crown block system 100 of the present embodiment is applied to an automated material handling system for handling the cassette 41 in the material port 40 of each of the storage bins.
  • the automated material handling system of the overhead crane system 100 of the present embodiment since the loading and unloading assembly 30 of the pick-and-place cassette 41 is provided on the trolley 20, the pick-and-place assembly 30 can be used from the material port 40 of any of the storage bins.
  • the cassette 41 is taken onto the trolley 20, and then the trolley 20 is moved along the crown rail 10 to the material port 40 of the designated storage cabinet, and the cassette 41 on the trolley 20 is returned through the pick-and-place assembly 30. The handling of the material port 40 of the designated storage bin is completed.
  • the crown block system 100 of the present embodiment is only one type of the cart 20, and this embodiment will be described in detail. It can be understood that the trolley 20 of the overhead crane system 100 of the present embodiment may also be multiple.
  • the pick-and-place assembly 30 includes a telescopic member 31, a support member 32 and a lifting member (not shown).
  • the first end of the telescopic member 31 is coupled to the trolley 20, and the telescopic member 31 is attached.
  • the second end is connected to the support member 32, and the lifting member is disposed on the telescopic member 31.
  • the telescopic member 31 is used to drive the support member 32 to extend to allow the support member 32 to take the cassette 41 or the discharge cassette 41.
  • the specific step of the pick-and-place assembly 30 to obtain the cassette 41 is that the telescopic member 31 is elongated in the direction of the cassette 41 until the support member 32 reaches below the cassette 41; then, the lifting member drives the support member 32 to rise, The cassette 41 is lifted; finally, the telescopic member 31 is retracted toward the bogie 20, so that the support member 32 carries the cassette 41 back to the bogie 20.
  • the specific process of the loading and unloading assembly 30 is: the telescopic member 31 is extended toward the material port 40 of the designated storage cabinet, so that the support member 32 reaches above the material port 40; then the lifting member drives the support member 32 to descend, so that the lifting member 41 is placed on the material port 40; finally, the telescopic member 31 is retracted toward the trolley 20 to complete the release of the cassette 41.
  • the lifting member may be disposed at the first end of the telescopic member 31 (ie, the end of the telescopic member 31 connected to the bogie 20) for driving the ascending/descending movement of the telescopic member 31 so as to be connected to the telescopic member 31.
  • the support member 32 is raised/lowered; the lifting member may also be disposed at the second end of the telescopic member 31 (i.e., the end of the telescopic member 31 connected to the support member 32) for directly driving the ascending/descending of the support member 32.
  • the lifting element can be realized by cylinder or hydraulic pressure.
  • the direction of expansion and contraction of the second end of the telescopic member 31 includes the left and right sides of the traveling direction of the carriage 20 (the direction indicated by the arrow in Fig. 2).
  • the extension member 31 can be directly retracted from the extended state of the left side of the traveling direction of the carriage 20 (i.e., the side of the crown rail 10) and can be to the right side of the traveling direction of the trolley 20 (i.e., the other side of the crown rail 10) )elongation.
  • the cassette 41 can be conveniently accessed from both sides of the trolley rail 10 of the pick-and-place assembly 30.
  • the second end of the telescopic member 31 is connected at an intermediate position of the support member 32 such that the length of the support member 32 elongated to both sides of the crown rail 10 is the same, so that the pick-and-place assembly 30 is from both sides of the crown rail 10
  • the performance of the pick and place cassette 41 is the same.
  • the telescopic member 31 includes a symmetric left telescopic arm 311 and a right telescopic arm 312, and the first end of the left telescopic arm 311 and the first end of the right telescopic arm 312 are rotationally coupled.
  • the second end of the left telescopic arm 311 and the second end of the right telescopic arm 312 are rotatably coupled to the support member 32.
  • the left telescopic arm 311 includes a first arm 3111 and a second arm 3112.
  • the first end of the first arm 3111 is a first end of the left telescopic arm 311, and the second end of the first arm 3111 is different from the first end.
  • the other end of the first end of one arm 3111 is hinged to the first end of the second arm 3112, and the first end of the second arm 3112 is located above the second end of the first arm 3111, and the second arm 3112
  • the second end (ie, the other end different from the second end of the second arm 3112) is the second end of the left telescopic arm 311;
  • the right telescopic arm 312 includes a third arm 3121 and a fourth arm 3122, the third arm
  • the first end of the 3121 is the first end of the right telescopic arm 312, the second end of the third arm 3121 (ie, the other end different from the first end of the third arm 3121) and the first end of the fourth arm 3122 Hinged, and the first end of the fourth arm 3122 is located above the second end of the third arm 3121, and the second end of the fourth arm 3122 (ie, the other end different from the first end of the fourth arm 3122) is The second end of the right telescopic arm 312.
  • the first end of the second arm 3112 is located above the second end of the first arm 3111, and the first end of the fourth arm 3122 is located above the second end of the third arm 3121, such that the pick and place assembly 30 is
  • the cassette 41 taken at one side of the crown rail 10 allows the telescopic member 31 to be directly extended from the other side of the crown rail 10 to discharge the cassette 41.
  • two lifting members are respectively disposed at the second end of the first arm 3111 and the second end of the third arm 3121.
  • the two lifting members drive the second arm 3112 and the fourth branch.
  • the arm 3122 is simultaneously raised/lowered to raise/lower the support member 32.
  • the trolley 20 of the crane system 100 of the present embodiment is further provided with a rotating device 21, and the pick-and-place assembly 30 is coupled to the rotating device 21 and can be rotated following the rotating device 21 to adjust the barcode 411 on the cassette 41.
  • the orientation is such that the orientation of the bar code 411 on the cassette 41 is aligned with the bar code reading direction of the carrying mechanism of the loading material port 40 in the storage bin 40, so that the rotation mechanism of the rotating mechanism in the material port 40 of the storage cabinet can be omitted.
  • the step of ⁇ 41 orientation improves the handling rate of the handling mechanism in the storage cabinet, and can eliminate the rotating mechanism in the storage cabinet, further reducing the cost required for the storage cabinet in the automated material handling system; and the rotation of the cassette 41
  • the operation can be performed simultaneously while the trolley 20 is moving on the crown rail 10, reducing the time required for one transport, improving the handling efficiency of the entire automated material handling system, and further increasing the throughput.
  • FIG. 5 is a diagram showing an example of a handling procedure of the trolley transporting the No. 1 material port 40 to the No. 2 material port 40.
  • the specific handling process is:
  • the trolley 20 moves along the crown rail 10 to reach the second horizontal section 12 to reach the state (IV), at which time the barcode 411 of the cassette 41 is located on the left side;
  • the trolley moves along the second horizontal section 12 of the crown rail 10 to reach the position of the material port 40 of the No. 2, and the cassette 41 which is taken up by the extension of the pick-and-place assembly 30 is placed to 2 In the material port 40, at this time, the state (V) is present, and the barcode 411 of the cassette 41 is located on the left side.
  • the cassette system 100 When the cassette system 100 carries the cassette 41, it can be engaged with the both sides of the trolley 20 that can be extended to the crown rail 10 by the rotating device 21 (in the case where the traveling direction of the carriage 20 does not change and the rotating device 21 does not rotate)
  • the pick-and-place assembly 30 adjusts the direction of the bar code 411 of the cassette 41 carried by the crown block system 100.
  • the material port 40 When the cassette 41 is placed back into the material port 40, the material port 40 does not need to adjust the bar code of the cassette 41 in the rotating mechanism.
  • the direction of 411 reduces the rotation adjustment process of the storage cabinet to the cassette 41, and improves the working efficiency of the storage cabinet.
  • the present invention also provides an automated material handling system, including a crane system and a multi-storage storage cabinet.
  • the crane system may include the solution in any of the above embodiments.
  • the crane system may include the solution in any of the above embodiments.

Abstract

一种自动化物料搬运装置及其天车系统，其天车系统包括天车轨道以及于天车轨道上移动的台车，台车上连接设有用于取放卡匣的取放组件，用台车上的取放组件替代了所有仓储柜中的取放装置，降低了自动化物料搬运系统的成本，避免由于取放装置故障影响正常工作的情况发生，降低了故障几率，提高了自动化物料搬运系统的产能。

Description

自动化物料搬运系统及其天车系统
技术领域
本发明涉及液晶面板制造领域，特别涉及一种自动化物料搬运系统及其天车系统。
背景技术
液晶面板制造行业中，玻璃面板存储于各座仓储柜中，全部仓储柜构成了一个自动化物料搬运系统。在搬运过程中，多座仓储柜之间通常通过天车系统（包括天车轨道和在天车轨道上移动的台车）的台车进行卡匣（卡匣上放置着物料）的运输。参照图1，每座仓储柜（图中未示出）有一个连接到天车系统60中的物料口50，用于卡匣的进出；物料口50中有一个取放装置51。任何一座仓储柜可以将其内部要搬运的卡匣通过其内部的搬运机构搬运到物料口50；然后物料口50中的取放装置51将物料口50中的卡匣送到天车系统60的台车62上；再通过台车62沿天车轨道61移动，将该卡匣运送至指定仓储柜的物料口50处，经过指定仓储柜的物料口50处的取放装置51将卡匣从台车62上取回到物料口50中；最后通过物料口50中的旋转机构旋转好方向后，由其内部搬运机构将卡匣搬到指定库位进行放置；即完成一次卡匣的搬运。
目前液晶面板制造需要经多道工序制成以及通常需要大批量生产，所以仓储柜的数量很多。而现有的仓储柜的物料口50中都设置取放装置51，一方面导致整个自动化物料搬运系统的仓储柜所需成本高，另一方面取放装置51的故障率也会较高，影响自动化物料搬运系统正常工作，很大程度的限制了产能。　　　
发明内容
本发明的主要目的为提供一种自动化物料搬运系统及其天车系统，以降低自动化物料搬运系统中仓储柜的成本和降低自动化物料搬运系统的故障几率，从而提高产能。
本发明提出一种自动化物料搬运装置的天车系统，包括天车轨道以及于所述天车轨道上移动的台车，所述台车上连接设有用于取放卡匣的取放组件。
优选地，所述台车上还设有旋转装置，所述取放组件连接在所述旋转装置上并可跟随所述旋转装置旋转。
优选地，所述取放组件包括伸缩件、支撑件和升降件；所述伸缩件的第一端连接在所述台车上，其第二端连接所述支撑件；所述升降件设于所述伸缩件上。
优选地，所述升降件设于所述伸缩件的第一端，用于驱动所述伸缩件的上升/下降；或者，所述升降件设于所述伸缩件的第二端，用于驱动所述支撑件的上升/下降。
优选地，在同一工作状态下，所述伸缩件的第二端的伸缩方向包括所述台车行进方向的左侧和右侧。
优选地，所述伸缩件的第二端连接在所述支撑件的中间位置。
优选地，所述伸缩件包括对称的左伸缩臂和右伸缩臂，所述左伸缩臂的第一端和所述右伸缩臂的第一端转动连接在所述台车上，所述左伸缩臂的第二端和所述右伸缩臂的第二端转动连接在所述支撑件上。
优选地，所述左伸缩臂包括第一支臂和第二支臂，所述第一支臂的第一端为所述左伸缩臂的第一端，所述第一支臂的第二端与所述第二支臂的第一端铰接，且所述第二支臂的第一端位于所述第一支臂的第二端的上方，所述第二支臂的第二端为所述左伸缩臂的第二端；
所述右伸缩臂包括第三支臂和第四支臂，所述第三支臂的第一端为所述右伸缩臂的第一端，所述第三支臂的第二端与所述第四支臂的第一端铰接，且所述第四支臂的第一端位于所述第三支臂的第二端的上方，所述第四支臂的第二端为所述右伸缩臂的第二端。
优选地，所述升降件为两个，分别设于所述第一支臂的第二端和所述第三支臂的第二端，两个升降件驱动所述第二支臂和所述第四支臂同时上升/下降。
本发明还提出一种自动化物料搬运系统，包括如上所述的天车系统和多座仓储柜。　　　
本发明的自动化物料搬运系统及其天车系统，用台车上的取放组件替代了所有仓储柜中的取放装置，各座仓储柜中都无需再设置取放装置，进而降低了自动化物料搬运系统的所有仓储柜所需的成本。而且所有仓储柜中没有了取放装置，避免了由于取放装置的故障而影响自动化物料搬运系统的正常工作的情况发生；降低了自动化物料搬运系统发生故障的几率，从而提高了自动化物料搬运系统的产能。　　　
附图说明
图1是现有技术自动化物料搬运系统的透视的俯视图；
图2是本发明较佳实施例自动化物料搬运系统的透视的俯视图；
图3是本发明较佳实施天车系统中台车的透视的俯视图；
图4是图3中台车的伸缩件部分的示意图；
图5是本发明较佳实施例天车系统搬运卡匣的一流程示例图。　　　
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。　　　
具体实施方式
应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
如图2所示，图2为本发明较佳实施例自动化物料搬运系统的透视的俯视图，图2中仓储柜未画出，只画出仓储柜的物料口。如图3所示，图3为本发明较佳实施天车系统中台车的透视的俯视图。如图4所示，图4为图3中台车的伸缩件部分的示意图。图5为本发明较佳实施例天车系统搬运卡匣的一流程示例图。
参照图2，该实施例提到的自动化物料搬运系统的天车系统100，包括天车轨道10以及于天车轨道10上移动的台车20，台车20上连接设有用于取放卡匣41的取放组件30。
本实施例的天车系统100应用于自动化物料搬运系统中对各座仓储柜的物料口40中的卡匣41进行搬运。使用本实施例天车系统100的自动化物料搬运系统，由于台车20上设有取放卡匣41的取放组件30，通过该取放组件30可以从任一座仓储柜的物料口40中将卡匣41取到台车20上，然后台车20沿天车轨道10移动到指定的仓储柜的物料口40处，再通过该取放组件30将台车20上的卡匣41放回到指定的仓储柜的物料口40中，完成一次搬运。因此，各座仓储柜中都无需再设置取放装置，相当于用台车20上的取放组件30替代了所有仓储柜中的取放装置，而且保证了自动化物料搬运系统的正常搬运功能；进而降低了自动化物料搬运系统的所有仓储柜所需的成本。而且所有仓储柜中没有了取放装置，避免了由于取放装置的故障而影响自动化物料搬运系统的正常工作的情况发生；虽然取放组件30也会有故障发生的情况，但相对于仓储柜中的取放装置的故障率而言，发生故障的几率大幅降低，即降低了故障情况对自动化物料搬运系统的搬运效率影响的几率，从而提高了自动化物料搬运系统的产能。
本实施例的天车系统100只是一个台车20为例，对本实施例进行详细说明。可以理解，本实施例天车系统100的台车20还可以为多个。
进一步地，参照图3和图4，取放组件30包括伸缩件31、支撑件32和升降件（图中未示出），伸缩件31的第一端连接在台车20上，伸缩件31的第二端连接支撑件32，升降件设于伸缩件31上。伸缩件31用于驱动支撑件32伸出以使支撑件32取得卡匣41或卸放卡匣41。具体的，取放组件30取得卡匣41的具体步骤为：伸缩件31朝卡匣41的方向伸长，直至支撑件32到达卡匣41的下方；然后，升降件驱动支撑件32上升，将卡匣41抬起；最后伸缩件31朝台车20方向缩回，使支撑件32抬着卡匣41回到台车20。取放组件30卸放的具体流程为：伸缩件31向指定的仓储柜的物料口40方向伸长，使支撑件32到达物料口40的上方；然后升降件驱动支撑件32下降，使得卡匣41放置到物料口40上；最后，伸缩件31向台车20方向缩回，完成卡匣41卸放。
本实施例中，升降件可以设于伸缩件31的第一端（即伸缩件31连接台车20的一端），用于驱动伸缩件31的上升/下降，以使连接在伸缩件31上的支撑件32上升/下降；升降件还可以设于伸缩件31的第二端（即伸缩件31连接支撑件32的一端），用于直接驱动支撑件32的上升/下降。升降件可采用气缸或液压方式实现。
进一步地，在同一工作状态下，伸缩件31的第二端的伸缩方向包括台车20行进方向（图2中箭头所示方向）的左侧和右侧。同一工作状态下，也就是在相同的条件下，除了伸缩件31，其他部件都作动变化。伸缩件31可由台车20行进方向的左侧（即天车轨道10的一侧）的伸长状态直接缩回并能够往台车20行进方向的右侧（即天车轨道10的另一侧）伸长。这样可方便取放组件30的向天车轨道10的两侧取放卡匣41。进一步地，伸缩件31的第二端连接在支撑件32的中间位置，使得支撑件32向天车轨道10两侧伸长的长度相同，从而使得取放组件30从天车轨道10两侧的取放卡匣41的性能相同。
进一步地，参照图2至图4，本实施例中，伸缩件31包括对称的左伸缩臂311和右伸缩臂312，左伸缩臂311的第一端和右伸缩臂312的第一端转动连接在台车20上，左伸缩臂311的第二端和右伸缩臂312的第二端转动连接在支撑件32上。左伸缩臂311包括第一支臂3111和第二支臂3112，第一支臂3111的第一端为左伸缩臂311的第一端，第一支臂3111的第二端（即异于第一支臂3111第一端的另一端）与第二支臂3112的第一端铰接，且第二支臂3112的第一端位于第一支臂3111的第二端的上方，第二支臂3112的第二端（即异于第二支臂3112第二端的另一端）为左伸缩臂311的第二端；右伸缩臂312包括第三支臂3121和第四支臂3122，第三支臂3121的第一端为右伸缩臂312的第一端，第三支臂3121的第二端（即异于第三支臂3121第一端的另一端）与第四支臂3122的第一端铰接，且第四支臂3122的第一端位于第三支臂3121的第二端的上方，第四支臂3122的第二端（即异于第四支臂3122第一端的另一端）为右伸缩臂312的第二端。当第一支臂3111与第二支臂3112的夹角越来越大时，即伸缩件31在慢慢缩回；反之，第一支臂3111与第二支臂3112的夹角越来越小时，即伸缩件31在慢慢伸出。同样，第三支臂3121与第四支臂3122的夹角越来越大时，即伸缩件31在慢慢缩回；反之，第三支臂3121与第四支臂3122的夹角越来越小时，即伸缩件31在慢慢伸出。第二支臂3112的第一端位于第一支臂3111的第二端的上方，以及第四支臂3122的第一端位于第三支臂3121的第二端的上方，是使得取放组件30从天车轨道10的一侧取得的卡匣41，可以使伸缩件31直接从天车轨道10的另一侧伸长以将卡匣41卸放。
具体的，本实施例中采用两个升降件，分别设于第一支臂3111的第二端和第三支臂3121的第二端，两个升降件驱动第二支臂3112和第四支臂3122同时上升/下降，以使支撑件32上升/下降。
进一步地，本实施例天车系统100的台车20上还设有旋转装置21，取放组件30连接在旋转装置21上并可跟随旋转装置21旋转，以调节卡匣41上的条形码411的方位，使卡匣41上条形码411的方位对准仓储柜中搬运物料口40出卡匣41的搬运机构的条码读取方向，从而可以省去仓储柜的物料口40中的旋转机构旋转调节卡匣41方位的步骤，提高了仓储柜中搬运机构的稼动率，并可省掉仓储柜中的旋转机构，进一步降低了自动化物料搬运系统中仓储柜所需的成本；而且卡匣41的旋转操作可在台车20在天车轨道10上移动过程中同时进行，减少了一次搬运所需的时间，提高了整个自动化物料搬运系统的搬运效率，进一步提高了产能。　　　
具体的，参照图2和图5，图5为台车将①号物料口40搬运到②号物料口40的搬运流程示例图。具体搬运流程为：
状态（I）：台车20位于①号物料口40的位置，其取放组件30从①号物料口40搬取卡匣41，此时卡匣上41的条形码411位于左侧；
状态（II）：取放组件30缩回，将从①号物料口40处搬取的卡匣41取回台车20上，此时卡匣上41的条形码411位于左侧；
状态（II）后，台车20沿天车轨道10的第一水平段11移动前进，同时，台车20上的旋转装置21旋转180°使得取放组件30上的卡匣41也旋转180°，达到状态（III），此时卡匣上41的条形码411位于右侧；
状态（III）后，台车20沿天车轨道10移动前进到达第二水平段12，达到状态（IV），此时卡匣上41的条形码411位于左侧；
状态（IV）后，台车沿天车轨道10的第二水平段12移动前进，到达②号物料口40的位置，并通过取放组件30伸长将其搬取的卡匣41放置到②号物料口40中，此时为状态（V），卡匣上41的条形码411位于左侧。
上述的条形码411相对于卡匣41的位置关系是参照图2和图5中的左侧和右侧方向进行的描述。
天车系统100在搬运卡匣41时，能够通过旋转装置21配合台车20上的可向天车轨道10的两侧伸缩（在台车20行进方向不变以及旋转装置21不旋转的条件下）的取放组件30，调节天车系统100搬运的卡匣41的条形码411的方向，在将卡匣41放回物料口40中时，物料口40无需在设旋转机构调节卡匣41的条形码411的方向，减少了仓储柜对卡匣41旋转调节工序，提高仓储柜的工作效率。　　　
本发明还提出一种自动化物料搬运系统，包括天车系统和多座仓储柜，该天车系统可包括上述任一实施例中的方案，其详细结构可参照前述实施例，在此不做赘述。　　　
以上所述仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (18)

  1. 一种自动化物料搬运装置的天车系统，包括天车轨道以及于所述天车轨道上移动的台车，其特征在于，所述台车上连接设有用于取放卡匣的取放组件。
  2. 根据权利要求1所述的天车系统，其特征在于，所述台车上还设有旋转装置，所述取放组件连接在所述旋转装置上并可跟随所述旋转装置旋转。
  3. 根据权利要求2所述的天车系统，其特征在于，所述取放组件包括伸缩件、支撑件和升降件；所述伸缩件的第一端连接在所述台车上，其第二端连接所述支撑件；所述升降件设于所述伸缩件上。
  4. 根据权利要求3所述的天车系统，其特征在于，所述升降件设于所述伸缩件的第一端，用于驱动所述伸缩件的上升/下降；或者，所述升降件设于所述伸缩件的第二端，用于驱动所述支撑件的上升/下降。
  5. 根据权利要求3所述的天车系统，其特征在于，在同一工作状态下，所述伸缩件的第二端的伸缩方向包括所述台车行进方向的左侧和右侧。
  6. 根据权利要求5所述的天车系统，其特征在于，所述伸缩件的第二端连接在所述支撑件的中间位置。
  7. 根据权利要求5所述的天车系统，其特征在于，所述伸缩件包括对称的左伸缩臂和右伸缩臂，所述左伸缩臂的第一端和所述右伸缩臂的第一端转动连接在所述台车上，所述左伸缩臂的第二端和所述右伸缩臂的第二端转动连接在所述支撑件上。
  8. 根据权利要求7所述的天车系统，其特征在于，所述左伸缩臂包括第一支臂和第二支臂，所述第一支臂的第一端为所述左伸缩臂的第一端，所述第一支臂的第二端与所述第二支臂的第一端铰接，且所述第二支臂的第一端位于所述第一支臂的第二端的上方，所述第二支臂的第二端为所述左伸缩臂的第二端；
    　　　所述右伸缩臂包括第三支臂和第四支臂，所述第三支臂的第一端为所述右伸缩臂的第一端，所述第三支臂的第二端与所述第四支臂的第一端铰接，且所述第四支臂的第一端位于所述第三支臂的第二端的上方，所述第四支臂的第二端为所述右伸缩臂的第二端。
  9. 根据权利要求8所述的天车系统，其特征在于，所述升降件为两个，分别设于所述第一支臂的第二端和所述第三支臂的第二端，两个升降件驱动所述第二支臂和所述第四支臂同时上升/下降。
  10. 一种自动化物料搬运系统，包括多座仓储柜，其特征在于，还包括天车系统，所述天车系统包括天车轨道以及于所述天车轨道上移动的台车，其特征在于，所述台车上连接设有用于取放卡匣的取放组件。
  11. 根据权利要求10所述的自动化物料搬运系统，其特征在于，所述台车上还设有旋转装置，所述取放组件连接在所述旋转装置上并可跟随所述旋转装置旋转。
  12. 根据权利要求11所述的自动化物料搬运系统，其特征在于，所述取放组件包括伸缩件、支撑件和升降件；所述伸缩件的第一端连接在所述台车上，其第二端连接所述支撑件；所述升降件设于所述伸缩件上。
  13. 根据权利要去12所述的自动化物料搬运系统，其特征在于，所述升降件设于所述伸缩件的第一端，用于驱动所述伸缩件的上升/下降；或者，所述升降件设于所述伸缩件的第二端，用于驱动所述支撑件的上升/下降。
  14. 根据权利要求12所述的自动化物料搬运系统，其特征在于，在同一工作状态下，所述伸缩件的第二端的伸缩方向包括所述台车行进方向的左侧和右侧。
  15. 根据权利要求14所述的自动化物料搬运系统，其特征在于，所述伸缩件的第二端连接在所述支撑件的中间位置。
  16. 根据权利要求14所述的自动化物料搬运系统，其特征在于，所述伸缩件包括对称的左伸缩臂和右伸缩臂，所述左伸缩臂的第一端和所述右伸缩臂的第一端转动连接在所述台车上，所述左伸缩臂的第二端和所述右伸缩臂的第二端转动连接在所述支撑件上。
  17. 根据权利要求16所述的自动化物料搬运系统，其特征在于，所述左伸缩臂包括第一支臂和第二支臂，所述第一支臂的第一端为所述左伸缩臂的第一端，所述第一支臂的第二端与所述第二支臂的第一端铰接，且所述第二支臂的第一端位于所述第一支臂的第二端的上方，所述第二支臂的第二端为所述左伸缩臂的第二端；
    　　　所述右伸缩臂包括第三支臂和第四支臂，所述第三支臂的第一端为所述右伸缩臂的第一端，所述第三支臂的第二端与所述第四支臂的第一端铰接，且所述第四支臂的第一端位于所述第三支臂的第二端的上方，所述第四支臂的第二端为所述右伸缩臂的第二端。
  18. 根据权利要求17所述的自动化物料搬运系统，其特征在于，所述升降件为两个，分别设于所述第一支臂的第二端和所述第三支臂的第二端，两个升降件驱动所述第二支臂和所述第四支臂同时上升/下降。
PCT/CN2013/089682 2013-12-11 2013-12-17 自动化物料搬运系统及其天车系统 WO2015085606A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310676068.7A CN103663166A (zh) 2013-12-11 2013-12-11 自动化物料搬运系统及其天车系统
CN201310676068.7 2013-12-11

Publications (1)

Publication Number Publication Date
WO2015085606A1 true WO2015085606A1 (zh) 2015-06-18

Family

ID=50302100

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2013/089682 WO2015085606A1 (zh) 2013-12-11 2013-12-17 自动化物料搬运系统及其天车系统

Country Status (2)

Country Link
CN (1) CN103663166A (zh)
WO (1) WO2015085606A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI836849B (zh) 2022-06-04 2024-03-21 台灣積體電路製造股份有限公司 運輸系統及其操作方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106429144B (zh) * 2016-10-10 2020-03-24 张家港康得新光电材料有限公司 玻璃卡匣的处理方法、装置和系统
CN110137120A (zh) * 2018-02-02 2019-08-16 盟立自动化股份有限公司 自动化运送布局系统
CN113401677B (zh) * 2021-06-29 2023-04-07 上海华力微电子有限公司 自动物料传输系统及自动化物料传输方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001135701A (ja) * 1999-11-02 2001-05-18 Olympus Optical Co Ltd 基板搬送装置および基板搬送方法
CN1579899A (zh) * 2003-08-04 2005-02-16 友达光电股份有限公司 自动化物料搬运系统及其仓储柜
CN1623872A (zh) * 2003-12-04 2005-06-08 株式会社大福 玻璃基板用输送设备
US20060018737A1 (en) * 2004-07-23 2006-01-26 Au Optronics Corp. Automated material handling system
CN1816907A (zh) * 2003-07-04 2006-08-09 乐华股份有限公司 薄板状基板的运送装置及其运送控制方法
CN102795442A (zh) * 2012-09-06 2012-11-28 深圳市华星光电技术有限公司 一种自动化物料搬运系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0183454B1 (ko) * 1993-10-07 1999-04-15 마스다 쇼오이치로오 실어서 이송하는 장치
CN101659346B (zh) * 2009-09-03 2011-07-06 友达光电股份有限公司 基板传输系统及其基板取出方法
CN102085957B (zh) * 2011-02-09 2012-08-01 广运机电(苏州)有限公司 自动化立体仓储系统
CN102826316B (zh) * 2012-08-31 2015-06-17 深圳市华星光电技术有限公司 一种玻璃基板的仓储系统以及玻璃基板仓储方法
CN102897693B (zh) * 2012-10-24 2015-02-11 深圳市华星光电技术有限公司 一种堆垛机及自动仓储系统

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001135701A (ja) * 1999-11-02 2001-05-18 Olympus Optical Co Ltd 基板搬送装置および基板搬送方法
CN1816907A (zh) * 2003-07-04 2006-08-09 乐华股份有限公司 薄板状基板的运送装置及其运送控制方法
CN1579899A (zh) * 2003-08-04 2005-02-16 友达光电股份有限公司 自动化物料搬运系统及其仓储柜
CN1623872A (zh) * 2003-12-04 2005-06-08 株式会社大福 玻璃基板用输送设备
US20060018737A1 (en) * 2004-07-23 2006-01-26 Au Optronics Corp. Automated material handling system
CN102795442A (zh) * 2012-09-06 2012-11-28 深圳市华星光电技术有限公司 一种自动化物料搬运系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI836849B (zh) 2022-06-04 2024-03-21 台灣積體電路製造股份有限公司 運輸系統及其操作方法

Also Published As

Publication number Publication date
CN103663166A (zh) 2014-03-26

Similar Documents

Publication Publication Date Title
US8851820B2 (en) Substrate container storage system
US11784073B2 (en) Apparatus and method for handling wafer carrier doors
US9842756B2 (en) Integrated systems for interfacing with substrate container storage systems
WO2015085606A1 (zh) 自动化物料搬运系统及其天车系统
JP5506979B2 (ja) ロットサイズ減少のためのバッファ付きローダ
US20110262252A1 (en) Substrate Processing System and Substrate Transferring Method
JP2015146447A (ja) 基板用容器貯蔵システムと相互作用する一体システム
BR112014023182B1 (pt) aparelho para içar uma correia transportadora a partir de um transportador de correia e método para içar uma correia transportadora
TW201118025A (en) Assembly method of transfer mechanism and transfer chamber
TW202029392A (zh) 基板處理裝置及基板處理方法
CN108974913A (zh) 一种半导体光刻板清洗的定位顶升输送滚轮装置
JP4633294B2 (ja) 搬送ロボット移転対応型搬送装置及び搬送ロボット移転方法
CN108816961A (zh) 一种定位输送的半导体光刻板清洗装置
CN113169107B (zh) 装载锁定腔室
WO2015102420A1 (ko) 기판 이송장치용 승강장치 및 이를 포함하는 기판 이송장치
CN108816959B (zh) 一种半导体光刻板清洗生产系统
TWI732377B (zh) 基板搬送裝置
KR20110101623A (ko) 카세트 이송용 스태커로봇
CN112224886A (zh) 一种玻璃基板自动装卸设备
KR102327388B1 (ko) 진공로봇
TW200521055A (en) Wafer transportation system
KR20180077766A (ko) 진공로봇
WO2023228892A1 (ja) メンテナンス装置
CN108816960A (zh) 一种半导体光刻板清洗装置
KR100576509B1 (ko) 카세트 반송장치

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13899281

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13899281

Country of ref document: EP

Kind code of ref document: A1