CN108974913A - 一种半导体光刻板清洗的定位顶升输送滚轮装置 - Google Patents
一种半导体光刻板清洗的定位顶升输送滚轮装置 Download PDFInfo
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- CN108974913A CN108974913A CN201810611758.7A CN201810611758A CN108974913A CN 108974913 A CN108974913 A CN 108974913A CN 201810611758 A CN201810611758 A CN 201810611758A CN 108974913 A CN108974913 A CN 108974913A
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- 240000007643 Phytolacca americana Species 0.000 claims description 8
- 238000005096 rolling process Methods 0.000 claims description 7
- 238000000206 photolithography Methods 0.000 abstract description 24
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000009776 industrial production Methods 0.000 abstract description 2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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CN201810611758.7A CN108974913B (zh) | 2018-06-14 | 2018-06-14 | 一种半导体光刻板清洗生产系统 |
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CN201810611758.7A CN108974913B (zh) | 2018-06-14 | 2018-06-14 | 一种半导体光刻板清洗生产系统 |
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CN108974913A true CN108974913A (zh) | 2018-12-11 |
CN108974913B CN108974913B (zh) | 2020-12-01 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110758822A (zh) * | 2019-11-28 | 2020-02-07 | 张家港市易华润东新材料有限公司 | 一种地板打包用包装顶升模块 |
CN111408517A (zh) * | 2020-03-21 | 2020-07-14 | 安徽容纳新能源科技有限公司 | 一种笔记本电脑显示屏组装装置及方法 |
CN111422236A (zh) * | 2020-06-15 | 2020-07-17 | 山东商务职业学院 | 一种建筑施工用搬运装置 |
CN111439583A (zh) * | 2020-05-15 | 2020-07-24 | 寰采星科技(宁波)有限公司 | 一种fmm的搬运装置 |
CN112834880A (zh) * | 2021-01-05 | 2021-05-25 | 淮北工科检测检验有限公司 | 一种串联谐振装置 |
CN114620408A (zh) * | 2022-01-25 | 2022-06-14 | 武汉海王新能源工程技术有限公司 | 潮湿废物自动运输上料结构 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3345940A1 (de) * | 1983-12-20 | 1985-06-27 | Karl 7531 Neuhausen Lenhardt | Vorrichtung zum handhaben von isolierglasscheiben |
JP2003182811A (ja) * | 2001-12-20 | 2003-07-03 | Daifuku Co Ltd | 物品の搬送装置 |
CN104803194A (zh) * | 2015-04-14 | 2015-07-29 | 英德欧姆智能机械有限公司 | 一种上卸片定位一体机 |
CN206187992U (zh) * | 2016-11-10 | 2017-05-24 | 天津南玻节能玻璃有限公司 | 玻璃片运送转向机构 |
CN107324054A (zh) * | 2017-06-20 | 2017-11-07 | 苏州胜利精密制造科技股份有限公司 | 一种宽幅可调的玻璃流水线 |
CN206955016U (zh) * | 2017-05-18 | 2018-02-02 | 深圳市升达康科技有限公司 | 一种全滚轮传输轨道用宽窄度调节结构 |
-
2018
- 2018-06-14 CN CN201810611758.7A patent/CN108974913B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3345940A1 (de) * | 1983-12-20 | 1985-06-27 | Karl 7531 Neuhausen Lenhardt | Vorrichtung zum handhaben von isolierglasscheiben |
JP2003182811A (ja) * | 2001-12-20 | 2003-07-03 | Daifuku Co Ltd | 物品の搬送装置 |
CN104803194A (zh) * | 2015-04-14 | 2015-07-29 | 英德欧姆智能机械有限公司 | 一种上卸片定位一体机 |
CN206187992U (zh) * | 2016-11-10 | 2017-05-24 | 天津南玻节能玻璃有限公司 | 玻璃片运送转向机构 |
CN206955016U (zh) * | 2017-05-18 | 2018-02-02 | 深圳市升达康科技有限公司 | 一种全滚轮传输轨道用宽窄度调节结构 |
CN107324054A (zh) * | 2017-06-20 | 2017-11-07 | 苏州胜利精密制造科技股份有限公司 | 一种宽幅可调的玻璃流水线 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110758822A (zh) * | 2019-11-28 | 2020-02-07 | 张家港市易华润东新材料有限公司 | 一种地板打包用包装顶升模块 |
CN110758822B (zh) * | 2019-11-28 | 2023-08-18 | 张家港市易华润东新材料有限公司 | 一种地板打包用包装顶升模块 |
CN111408517A (zh) * | 2020-03-21 | 2020-07-14 | 安徽容纳新能源科技有限公司 | 一种笔记本电脑显示屏组装装置及方法 |
CN111439583A (zh) * | 2020-05-15 | 2020-07-24 | 寰采星科技(宁波)有限公司 | 一种fmm的搬运装置 |
CN111422236A (zh) * | 2020-06-15 | 2020-07-17 | 山东商务职业学院 | 一种建筑施工用搬运装置 |
CN111422236B (zh) * | 2020-06-15 | 2020-09-01 | 山东商务职业学院 | 一种建筑施工用搬运装置 |
CN112834880A (zh) * | 2021-01-05 | 2021-05-25 | 淮北工科检测检验有限公司 | 一种串联谐振装置 |
CN112834880B (zh) * | 2021-01-05 | 2023-11-07 | 淮北工科检测检验有限公司 | 一种串联谐振装置 |
CN114620408A (zh) * | 2022-01-25 | 2022-06-14 | 武汉海王新能源工程技术有限公司 | 潮湿废物自动运输上料结构 |
CN114620408B (zh) * | 2022-01-25 | 2024-03-22 | 武汉海王新能源工程技术有限公司 | 潮湿废物自动运输上料结构 |
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Inventor after: Han Dandan Inventor after: Han Ke Inventor after: Han Shishuang Inventor after: Wang Jiahai Inventor before: Wang Jiahai |
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Effective date of registration: 20201118 Address after: 518101 baoyunda logistics center Meilan business center 801, Fuhua community, Xixiang street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Shenzhen kelani Acoustic Technology Co.,Ltd. Address before: 310052 No. 88 Jiangling Road, Binjiang District, Hangzhou City, Zhejiang Province Applicant before: Wang Jiahai |
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Effective date of registration: 20231207 Address after: 223001 Huai'an Economic and Technological Development Zone, Huai'an City, Jiangsu Province, China. On the west side of Honghai North Road and the south side of Datong Road, Building 11 (one photo with multiple locations). Business premises: Room 101, Building 1, No. 30 Honghai North Road, Huai'an Economic and Technological Development Zone Patentee after: JIANGSU KELINTAI ELECTRONIC Co.,Ltd. Address before: 518101 baoyunda logistics center Meilan business center 801, Fuhua community, Xixiang street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Shenzhen kelani Acoustic Technology Co.,Ltd. |
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