WO2015064163A1 - Photosensitive thermosetting resin composition and flexible printed circuit board - Google Patents
Photosensitive thermosetting resin composition and flexible printed circuit board Download PDFInfo
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- WO2015064163A1 WO2015064163A1 PCT/JP2014/070281 JP2014070281W WO2015064163A1 WO 2015064163 A1 WO2015064163 A1 WO 2015064163A1 JP 2014070281 W JP2014070281 W JP 2014070281W WO 2015064163 A1 WO2015064163 A1 WO 2015064163A1
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- resin composition
- dianhydride
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0387—Polyamides or polyimides
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
Definitions
- the present invention relates to a photosensitive thermosetting resin composition and a flexible printed wiring board, and in particular, development with an alkali is possible, heat resistance and flexibility are excellent, and temperature and time during heat curing after light irradiation.
- the present invention relates to a photosensitive thermosetting resin composition that can be easily managed and a flexible printed wiring board including a cured product of the photosensitive thermosetting resin composition.
- a cover lay based on polyimide is used for the bent part (bent part) as an insulating film for ensuring the insulation reliability of the flexible printed wiring board, and the mounting part (non-bent part) is photosensitive.
- a mixed loading process using a conductive resin composition is widely employed (see Patent Documents 1 and 2).
- Polyimide is excellent in mechanical properties such as heat resistance and flexibility, while the photosensitive resin composition used in the mounting part has characteristics such as excellent electrical insulation and solder heat resistance and can be finely processed. .
- a conventional polyimide-based coverlay is not suitable for fine wiring because it requires a die punching process.
- an alkali-developable photosensitive resin composition (solder resist) that can be processed by photolithography is partially used together in a chip mounting portion that requires fine wiring.
- JP-A-62-263692 Japanese Patent Laid-Open No. 63-110224
- an insulating film of a flexible printed wiring board that does not depend on a mixed mounting process has been studied.
- application of a photosensitive resin composition for a solder resist as a coverlay for a flexible printed wiring board has been studied.
- a resin composition for a solder resist impact resistance, flexibility, etc. as a coverlay
- the reliability is insufficient. Since the resin composition for solder resist is accompanied by curing shrinkage due to acrylic photopolymerization, there is a problem in dimensional stability such as warping of a flexible wiring board.
- the object of the present invention is excellent in reliability such as impact resistance and flexibility, processing accuracy, and workability.
- a resin composition containing an alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component can solve the above problems. That is, the photobase generator is activated by light irradiation, and an alkali-soluble resin having an imide ring and a thermosetting component are subjected to an addition reaction by heating using the generated base as a catalyst, so that only an unexposed portion is removed with an alkali solution. It has been found that this is possible. As a result, fine processing by alkali development becomes possible, and it can be expected to obtain a cured product having excellent reliability.
- the resin composition is more excellent in workability.
- the present inventors have found the following and completed the present invention. That is, by forming a photosensitive thermosetting resin composition containing an alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component, and other alkali-soluble resins other than the alkali-soluble resin having an imide ring. In addition to the above properties, a photosensitive thermosetting resin composition with better workability can be obtained.
- the present invention includes the following [1] to [7].
- [1] A photosensitive thermosetting resin composition comprising an alkali-soluble resin having an imide ring, an alkali-soluble resin other than the alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component. .
- [2] The photosensitivity according to [1], wherein the other alkali-soluble resin has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton in the structure.
- Thermosetting resin composition wherein the other alkali-soluble resin has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton in the structure.
- thermosetting resin composition [3] The photosensitive property of [1] or [2], wherein the content of the other alkali-soluble resin is 10 to 70 parts by mass with respect to 100 parts by mass of the alkali-soluble resin having an imide ring.
- Thermosetting resin composition [4] The photosensitive thermosetting resin composition according to any one of [1] to [3], wherein the thermosetting component is a compound having any one or more of a cyclic ether group and a cyclic thioether group. object. [5] A dry film obtained by applying and drying the photosensitive thermosetting resin composition according to any one of [1] to [4].
- a photosensitive thermosetting resin composition capable of developing with an alkali, excellent in heat resistance and flexibility, and easy in temperature and time management at the time of heat curing after light irradiation, and the photosensitivity It is possible to provide a dry film having a resin layer made of a thermosetting resin composition and a flexible printed wiring board provided with a cured product of the photosensitive thermosetting resin composition.
- the photosensitive thermosetting resin composition of the present invention is suitable for a process for forming an insulating film of a flexible printed wiring board, particularly a bent part (bent part) and a mounting part (non-bent part).
- the photosensitive thermosetting resin composition of the present invention includes an alkali-soluble resin having an imide ring, another alkali-soluble resin, a photobase generator, and a thermosetting component.
- the photosensitive thermosetting resin composition of the present invention causes an alkali-soluble resin having an imide ring and a thermosetting component to undergo an addition reaction by heating after exposure using a base generated from a photobase generator as a catalyst, and thereby unexposed portions. It is a resin composition that can be developed by removing the solution with an alkaline solution.
- alkali-soluble resins other than the alkali-soluble resin having an imide ring, in particular, an alkali-soluble resin having any one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton.
- an alkali-soluble resin having any one or more of a urethane bond a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton.
- the addition reaction at the same heating temperature during the heat curing reaction after exposure (at the time of the following PEB process).
- the selection range of the heating temperature at the time of thermosetting reaction (at the time of the following PEB process) can be expanded. From these things, the workability
- the photosensitive thermosetting resin composition of the present invention is suitable for resin insulating layers of flexible printed wiring boards, such as coverlays and solder resists.
- a suitable manufacturing method is as follows. That is, a step of forming a resin layer comprising the photosensitive thermosetting resin composition of the present invention on a flexible printed wiring board, a step of irradiating the resin layer with light in a pattern, and a step of heating the resin layer (Post Exposure Bake) And also referred to as PEB), and a process of alkali-developing the resin layer to form a resin insulating layer having a pattern.
- PEB Post Exposure Bake
- the photosensitive thermosetting resin composition of the present invention is preferably a negative by alkaline development by an addition reaction between a carboxyl group and a thermosetting component by selective heat treatment after light irradiation. Mold pattern formation is possible.
- the resulting cured product is excellent in heat resistance and flexibility and can be finely processed by alkali development, it is not necessary to partially use an alkali development type photosensitive resin composition for polyimide, It can be used for both the bent part (bent part) and the mounting part (non-bent part) of the flexible printed wiring board, and is suitable for the batch formation process of the bent part (bent part) and the mounting part (non-bent part). .
- each component will be described in detail.
- the alkali-soluble resin having an imide ring is a resin having an alkali-soluble group such as a carboxyl group or an acid anhydride group and an imide ring and being soluble in an alkaline solution in an uncured state.
- the alkali-soluble resin having an imide ring preferably has a partial structure represented by the following formula (1) as an imide ring.
- R contains an aromatic ring.
- the partial structure represented by the above formula (1) is more preferably one represented by the following formula (2) or (3).
- the position of the carboxyl group is not particularly limited.
- a carboxyl group may be present as a substituent of the imide ring or a group bonded thereto, and the carboxyl group may be introduced into a polyimide resin by synthesis using an amine component or an isocyanate component having a carboxyl group. Good.
- an alkali-soluble resin having an imide ring For synthesis of an alkali-soluble resin having an imide ring, a known and commonly used technique can be used. For example, the resin obtained by making a carboxylic anhydride component react with an amine component and / or an isocyanate component is mentioned. Imidization may be performed by thermal imidization, chemical imidization, or a combination thereof.
- carboxylic acid anhydride component examples include tetracarboxylic acid anhydrides and tricarboxylic acid anhydrides, but are not limited to these acid anhydrides, and acid anhydride groups that react with amino groups and isocyanate groups, and Any compound having a carboxyl group can be used, including derivatives thereof.
- carboxylic anhydride components may be used individually by 1 type, and may be used in combination of 2 or more type.
- tetracarboxylic acid anhydride examples include pyromellitic dianhydride, 3-fluoropyromellitic dianhydride, 3,6-difluoropyromellitic dianhydride, 3,6-bis (trifluoromethyl) pyro Merit acid dianhydride, 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 4,4′-oxydiphthalic acid Anhydride, 2,2'-difluoro-3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 5,5'-difluoro-3,3', 4,4'-biphenyltetracarboxylic dianhydride Anhydride, 6,6′-difluoro-3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,
- tricarboxylic acid anhydride examples include trimellitic acid anhydride and nuclear hydrogenated trimellitic acid anhydride.
- amine component diamines such as aliphatic diamines and aromatic diamines, and polyvalent amines such as aliphatic polyether amines can be used, but are not limited to these amines. These amine components may be used alone or in combination.
- diamine examples include one diamine nucleus diamine such as p-phenylenediamine (PPD), 1,3-diaminobenzene, 2,4-toluenediamine, 2,5-toluenediamine, and 2,6-toluenediamine.
- PPD p-phenylenediamine
- 1,3-diaminobenzene 1,3-diaminobenzene
- 2,4-toluenediamine 2,4-toluenediamine
- 2,5-toluenediamine 2,6-toluenediamine
- the amine which has a carboxyl group can also be used as follows.
- examples of amines having a carboxyl group include 3,5-diaminobenzoic acid, 2,5-diaminobenzoic acid, diaminobenzoic acids such as 3,4-diaminobenzoic acid, and 3,5-bis (3-aminophenoxy) benzoic acid.
- Aminophenoxybenzoic acids such as 3,5-bis (4-aminophenoxy) benzoic acid, 3,3′-diamino-4,4′-dicarboxybiphenyl, 4,4′-diamino-3,3′-di Carboxybiphenyl compounds such as carboxybiphenyl, 4,4′-diamino-2,2′-dicarboxybiphenyl, 4,4′-diamino-2,2 ′, 5,5′-tetracarboxybiphenyl, 3,3 ′ -Diamino-4,4'-dicarboxydiphenylmethane, 3,3'-dicarboxy-4,4'-diaminodiphenylmethane, 2,2-bis [3-amino-4-carboxyphenyl] pro 2,2-bis [4-amino-3-carboxyphenyl] propane, 2,2-bis [3-amino-4-carboxyphenyl] hexa
- Diisocyanates such as aromatic diisocyanates and isomers and multimers, aliphatic diisocyanates, alicyclic diisocyanates and isomers thereof, and other general-purpose diisocyanates can be used as the isocyanate component. It is not limited. These isocyanate components may be used alone or in combination.
- diisocyanates include aromatic diisocyanates such as 4,4′-diphenylmethane diisocyanate, tolylene diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, biphenyl diisocyanate, diphenyl sulfone diisocyanate, diphenyl ether diisocyanate, and isomers, multimers, hexamethylene diisocyanate, and isophorone.
- aromatic diisocyanates such as 4,4′-diphenylmethane diisocyanate, tolylene diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, biphenyl diisocyanate, diphenyl sulfone diisocyanate, diphenyl ether diisocyanate, and isomers, multimers, hexamethylene diisocyanate, and isophorone.
- Aliphatic diisocyanates such as diisocyanate and dicyclohexylmethane diisocyanate, alicyclic diisocyanates and isomers obtained by hydrogenation of the aromatic diisocyanate, or other general-purpose diisocyanates can be mentioned.
- the alkali-soluble resin having an imide ring may have an amide bond.
- This may be an amide bond obtained by reacting an isocyanate and a carboxylic acid, or may be caused by other reaction.
- you may have the coupling
- an alkali-soluble resin having an imide ring a known and commonly used alkali-soluble polymer, oligomer or monomer having a carboxyl group and / or an acid anhydride group may be used.
- these known and commonly used alkali-soluble resins may be used.
- Resins obtained by reacting with amines / isocyanates described above alone or in combination with the above carboxylic anhydride component may be used.
- the alkali-soluble resin having an imide ring preferably has an acid value of 20 to 200 mgKOH / g, more preferably 60 to 150 mgKOH / g in order to cope with the alkali development step.
- the acid value is 20 mgKOH / g or more, the solubility in alkali increases, the developability becomes good, and further, the degree of crosslinking with the thermosetting component after light irradiation becomes high, so that sufficient development contrast is obtained. be able to.
- this acid value is 200 mgKOH / g or less, what is called a hot fog in the PEB process after light irradiation mentioned later can be suppressed, and a process margin becomes large.
- the molecular weight of the alkali-soluble resin having an imide ring is preferably from 1,000 to 100,000, more preferably from 2,000 to 50,000, considering developability and cured coating film characteristics.
- the molecular weight is 1,000 or more, sufficient development resistance and cured properties can be obtained after exposure and PEB.
- the molecular weight is 100,000 or less, alkali solubility increases and developability improves.
- the other alkali-soluble resin is an alkali-soluble resin other than the alkali-soluble resin having the imide ring.
- the alkali-soluble resin is a resin that has an alkali-soluble group such as a carboxyl group or an acid anhydride group and is soluble in an alkali solution in an uncured state.
- the structure has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton.
- the alkali-soluble resin having these bonds or skeletons has an imide ring because the reactivity of the carboxyl group is lower than that of the alkali-soluble resin having an imide ring and the addition reaction with the thermosetting component proceeds relatively slowly.
- an alkali-soluble resin other than those is present, the heating time can be increased during the PEB process, and the range of selection of the heating temperature can be expanded during the PEB process, compared with the case where no alkali-soluble resin is present.
- it is preferable that other alkali-soluble resin has an ethylenically unsaturated double bond in a molecule
- the other alkali-soluble resin according to the present invention is a composition obtained by mixing an alkali-soluble resin, a bisphenol A type epoxy resin having an epoxy equivalent of 190 g / eq, and an oxime ester photobase generator.
- the reaction starting temperature is preferably 75 ° C. or higher.
- an alkali-soluble resin and a bisphenol A type epoxy resin having an epoxy equivalent of about 190 g / eq (184 to 194 g / eq) are contained so that the carboxyl group and the epoxy group have an equivalent ratio of 1: 1.
- a composition containing 10 parts by mass of the oxime ester photobase generator with respect to 100 parts by mass of the soluble resin preferably has a reaction start temperature of 75 ° C. or higher when not exposed. The reaction start temperature is measured in a DSC (Differential Scanning Calorimeter) measurement container so that the composition containing the alkali-soluble resin, epoxy resin and photobase generator as described above is not exposed to light. This is carried out by measuring the heat of reaction at 200 ° C.
- reaction start temperature The temperature at the point where the differential scanning heat becomes the minimum value in the DSC chart obtained by such measurement is defined as the reaction start temperature.
- the reaction start temperature of the carboxyl group and the functional group that reacts with the carboxyl group in the thermosetting component is 75 ° C. or higher, so that the alkali solubility in the unexposed area in the PEB process described below is sufficient.
- the selection range of the heating temperature in the PEB process can be increased.
- alkali-soluble resins include compounds (any of oligomers and polymers) listed below as (1) to (11).
- Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, polycarbonate polyols, and polyethers
- a carboxyl group-containing urethane resin by a polyaddition reaction of a diol compound such as a polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group.
- Diisocyanate and bifunctional epoxy resin such as bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin (Photosensitive carboxyl group-containing urethane resin by polyaddition reaction of (meth) acrylate or its modified partial anhydride, carboxyl group-containing dialcohol compound and diol compound.
- a carboxyl group-containing resin obtained by copolymerization of an unsaturated carboxylic acid such as (meth) acrylic acid and an unsaturated group-containing compound such as styrene, ⁇ -methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
- a photosensitive carboxyl group-containing resin obtained by reacting a bifunctional or higher polyfunctional (solid) epoxy resin with (meth) acrylic acid and adding a dibasic acid anhydride to a hydroxyl group present in the side chain.
- Unsaturated reaction products obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate or propylene carbonate.
- a carboxyl group-containing photosensitive resin obtained by partial esterification with a group-containing monocarboxylic acid and reacting the resulting reaction product with a polybasic acid anhydride.
- a polybasic reaction product obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate or propylene carbonate.
- a carboxyl group-containing resin obtained by reacting an acid anhydride.
- a photosensitive carboxyl group-containing resin obtained by adding a compound having one epoxy group and one or more (meth) acryl groups in one molecule to the resins (5) to (10).
- the other alkali-soluble resin preferably has an acid value of 20 to 200 mgKOH / g, and more preferably 40 to 150 mgKOH / g. When the acid value is within the above range, the alkali solubility is good and patterning by alkali development becomes easy. Further, the mass average molecular weight of the other alkali-soluble resin is preferably 1,000 to 100,000, and more preferably 3,000 to 50,000. When the molecular weight is within the above range, the alkali solubility is good and patterning by alkali development becomes easy.
- the content of the other alkali-soluble resin is preferably 10 to 70 parts by mass with respect to 100 parts by mass of the alkali-soluble resin having an imide ring. When the content is in the above range, the heating time can be sufficiently long during the PEB process, and the selection range of the heating temperature can be sufficiently widened during the PEB process.
- the photobase generator used in the present invention is used as a catalyst for the addition reaction of a carboxyl group and a thermosetting component described later when the molecular structure is changed by irradiation with light such as ultraviolet rays or visible light, or when the molecule is cleaved. It is a compound that produces one or more basic substances that can function. Examples of basic substances include secondary amines and tertiary amines.
- the resin composition of the present invention has an ethylenically unsaturated group in the system, it is possible to initiate a polymerization reaction of the ethylenically unsaturated group by light irradiation.
- photobase generators include ⁇ -aminoacetophenone compounds, oxime ester compounds, acyloxyimino groups, N-formylated aromatic amino groups, N-acylated aromatic amino groups, nitrobenzyl carbamate groups, alkoxybenzyl carbamates. And compounds having a substituent such as a group. Of these, oxime ester compounds and ⁇ -aminoacetophenone compounds are preferred. As the ⁇ -aminoacetophenone compound, those having two or more nitrogen atoms are particularly preferable.
- WPBG-018 (trade name: 9-anthrylmethylN, N'-diethylcarbamate)
- WPBG-027 trade name: (E) -1- [3- (2-hydroxyphenyl) -2-propenoyl ] piperidine
- WPBG-082 (trade name: guanidinium2- (3-benzoylphenyl) propionate
- WPBG-140 (trade name: 1- (anthraquinon-2-yl) ethyl imidazolecarboxylate), and the like can also be used.
- the ⁇ -aminoacetophenone compound has a benzoin ether bond in the molecule, and when irradiated with light, cleavage occurs in the molecule to produce a basic substance (amine) that exhibits a curing catalytic action.
- ⁇ -aminoacetophenone compounds include (4-morpholinobenzoyl) -1-benzyl-1-dimethylaminopropane (Irgacure 369, trade name, manufactured by BASF Japan Ltd.) and 4- (methylthiobenzoyl) -1-methyl.
- -1-morpholinoethane (Irgacure 907, trade name, manufactured by BASF Japan Ltd.), 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl]-
- a commercially available compound such as 1-butanone (Irgacure 379, trade name, manufactured by BASF Japan Ltd.) or a solution thereof can be used.
- any compound that generates a basic substance by light irradiation can be used.
- examples of such oxime ester compounds include CGI-325, Irgacure OXE01, Irgacure OXE02 manufactured by BASF Japan, N-1919, and NCI-831 manufactured by Adeka.
- numerator described in the patent 4344400 gazette can also be used suitably.
- Such photobase generators may be used alone or in combination of two or more.
- the blending amount of the photobase generator in the resin composition of the present invention is preferably 0.1 to 40 parts by mass, more preferably 0.1 to 30 parts by mass with respect to 100 parts by mass of the thermosetting component. is there.
- the development resistance contrast of the light irradiated part / unirradiated part can be favorably obtained.
- cured material characteristic improves.
- thermosetting component has a functional group capable of addition reaction with a carboxyl group by heat.
- a compound having a cyclic (thio) ether group is preferable, and examples thereof include an epoxy resin and a polyfunctional oxetane compound.
- the epoxy resin is a resin having an epoxy group, and any known one can be used. Examples thereof include a bifunctional epoxy resin having two epoxy groups in the molecule, and a polyfunctional epoxy resin having many epoxy groups in the molecule. In addition, a hydrogenated bifunctional epoxy compound may be used.
- epoxy compound examples include bisphenol A type epoxy resin, brominated epoxy resin, novolac type epoxy resin, bisphenol F type epoxy resin, hydrogenated bisphenol A type epoxy resin, glycidylamine type epoxy resin, hydantoin type epoxy resin, and alicyclic type.
- Epoxy resin trihydroxyphenylmethane type epoxy resin, bixylenol type or biphenol type epoxy resin or a mixture thereof; bisphenol S type epoxy resin, bisphenol A novolac type epoxy resin, tetraphenylolethane type epoxy resin, heterocyclic epoxy resin , Diglycidyl phthalate resin, tetraglycidyl xylenoyl ethane resin, naphthalene group-containing epoxy resin, epoxy resin having dicyclopentadiene skeleton, glycidyl meta Acrylate copolymer epoxy resins, copolymerized epoxy resins of cyclohexylmaleimide and glycidyl methacrylate, and a CTBN modified epoxy resin.
- liquid bifunctional epoxy resins include vinylcyclohexene diepoxide, (3 ′, 4′-epoxycyclohexylmethyl) -3,4-epoxycyclohexanecarboxylate, (3 ′, 4′-epoxy-6′-methyl) And alicyclic epoxy resins such as (cyclohexylmethyl) -3,4-epoxy-6-methylcyclohexanecarboxylate. These epoxy resins may be used individually by 1 type, and may use 2 or more types together.
- thermosetting component a maleimide compound, a block isocyanate compound, an amino resin, a benzoxazine resin, a carbodiimide resin, a cyclocarbonate compound, an episulfide resin, as a thermosetting component.
- a maleimide compound such as a maleimide compound, a block isocyanate compound, an amino resin, a benzoxazine resin, a carbodiimide resin, a cyclocarbonate compound, an episulfide resin, as a thermosetting component.
- an equivalent ratio (carboxyl group: heat-reactive group such as epoxy group) of the alkali-soluble resin having an imide ring and the other alkali-soluble resin is 1: 0.1 to 1: 10 is preferable.
- the equivalent ratio is more preferably 1: 0.2 to 1: 5.
- the photosensitive thermosetting resin composition of the present invention may contain a photoradical polymerization initiator in addition to the photobase generator.
- a photoradical polymerization initiator a known photoradical polymerization initiator that generates radicals by light irradiation can be used.
- alkylphenone photopolymerization initiators other than ⁇ -aminoacetophenone photopolymerization initiators that can function as the photobase generator described above acylphosphine oxide photopolymerization initiators, titanocene photopolymerization initiators, and the like. Can do.
- the photosensitive thermosetting resin composition of the present invention can be blended with conventionally known polymer resins for the purpose of improving the flexibility and dryness of the touch of the resulting cured product.
- the polymer resin include cellulose, polyester, phenoxy resin, polyvinyl acetal, polyvinyl butyral, polyamide, polyamideimide binder polymer, block copolymer, elastomer and the like.
- the above polymer resins may be used alone or in combination of two or more.
- An inorganic filler can be blended in the photosensitive thermosetting resin composition of the present invention.
- the inorganic filler is used for suppressing the curing shrinkage of the cured product of the resin composition and improving properties such as adhesion and hardness.
- Examples of the inorganic filler include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, silicon nitride, aluminum nitride, boron nitride, and Neuburg Examples include rich earth.
- the said inorganic filler may be used individually by 1 type, and may use 2 or more types together.
- a coloring agent can be mix
- conventionally known colorants such as red, blue, green, yellow, white, and black can be used, and any of pigments, dyes, and pigments may be used.
- an organic solvent in the photosensitive thermosetting resin composition of the present invention, can be used for preparing the resin composition and adjusting the viscosity for application to a substrate or a carrier film.
- organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like.
- Such an organic solvent may be used individually by 1 type, and may be used as a 2 or more types of mixture.
- the photosensitive thermosetting resin composition of the present invention may further contain components such as a photosensitive monomer, a mercapto compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber.
- a photosensitive monomer such as acrylic acid, acrylic acid, and styrene.
- the dry film of the present invention is characterized by having a resin layer comprising the photosensitive thermosetting resin composition of the present invention. It may be a multi-layer dry film having a layer made of a resin composition other than the photosensitive thermosetting resin composition of the present invention.
- the photosensitive thermosetting resin composition of the present invention is diluted with an organic solvent to adjust to an appropriate viscosity, and a uniform thickness is formed on the carrier film by a known method such as a comma coater. Apply. Thereafter, it is usually dried at a temperature of 50 to 130 ° C. for 1 to 30 minutes to form a resin layer on the carrier film.
- a plastic film is used as the carrier film.
- the thickness of the carrier film is not particularly limited, but is generally appropriately selected within the range of 10 to 150 ⁇ m.
- a peelable cover film may be further laminated on the surface of the resin layer.
- the flexible printed wiring board of the present invention is characterized by having a cured product composed of a photosensitive thermosetting resin composition or a resin layer of a dry film.
- the method for producing a flexible printed wiring board of the present invention includes a step of forming a resin layer made of a photosensitive thermosetting resin composition on a flexible printed wiring board, a step of irradiating the resin layer with light in a pattern, and a resin layer. A step of heating, and a step of alkali-developing the resin layer to form at least one of a coverlay and a solder resist.
- Resin layer forming step In this step, at least one resin layer made of a photosensitive thermosetting resin composition is formed on the flexible printed wiring board.
- the method for forming the resin layer include a coating method and a laminating method.
- the photosensitive thermosetting resin composition is applied onto the flexible printed wiring board by a method such as screen printing and dried to form a resin layer.
- the laminating method first, the photosensitive thermosetting resin composition is diluted with an organic solvent to adjust to an appropriate viscosity, and coated on a carrier film and dried to prepare a dry film having a resin layer. Next, after bonding together so that a resin layer may contact a flexible printed wiring board with a laminator etc., a carrier film is peeled.
- the other layer is preferably made of an alkali development type photosensitive resin composition.
- an alkali development type photosensitive resin composition a well-known composition can be used, For example, the well-known composition for coverlays or a soldering resist can be used.
- cured material which was further excellent in impact resistance and flexibility can be obtained.
- the photobase generator contained in the resin layer is activated by light irradiation in a negative pattern to cure the light irradiation part.
- the photobase generator is destabilized by the base generated in the light irradiation part, and the base is chemically proliferated, whereby the resin layer can be sufficiently cured to the deep part.
- the light irradiator As the light irradiator, a direct writer, a light irradiator equipped with a metal halide lamp, or the like can be used.
- the patterned light irradiation mask is a negative mask.
- the active energy ray used for light irradiation it is preferable to use laser light or scattered light having a maximum wavelength in the range of 350 to 450 nm. By setting the maximum wavelength within this range, the photobase generator can be activated efficiently. If a laser beam in this range is used, either a gas laser or a solid laser may be used.
- the amount of light irradiation varies depending on the film thickness and the like, but can generally be 100 to 1500 mJ / cm 2 .
- the light irradiation part is cured by heating the resin layer.
- the carboxyl group in the exposed part is added and reacted with the thermoreactive functional group of the thermosetting component to develop alkali resistance, and most of the carboxyl group in the unexposed part is heated.
- the heating temperature is set under the condition that the alkali-solubility can be maintained by remaining without reacting with the heat-reactive functional group of the curing component. From such a viewpoint, the heating temperature is preferably 80 to 140 ° C.
- the heating time is preferably 10 to 100 minutes, more preferably 10 to 60 minutes, from the viewpoint of industrial mass productivity and process control. Since the curing of the photosensitive thermosetting resin composition in the present invention is, for example, a ring-opening reaction of an epoxy resin by a thermal reaction, it can suppress distortion and curing shrinkage compared to the case where curing proceeds by a photoradical reaction. it can.
- the unirradiated portion is removed by alkali development to form a negative patterned insulating film, particularly a coverlay and a solder resist.
- the developing method can be a known method such as dipping.
- sodium carbonate, potassium carbonate, potassium hydroxide, amines, imidazoles such as 2-methylimidazole, alkaline aqueous solutions such as tetramethylammonium hydroxide aqueous solution (TMAH) or a mixed solution thereof should be used.
- TMAH tetramethylammonium hydroxide aqueous solution
- the insulating film may be further irradiated with light after the development step. For example, you may heat at 150 degreeC or more.
- FIG. 1 shows a case where the resin layer has a laminated structure, but it may be composed of only one layer.
- a laminated structure composed of the resin layer 3 and the resin layer 4 is formed on the flexible printed wiring substrate 1 on which the copper circuit 2 is formed.
- the resin layer 3 is made of an alkali development type photosensitive resin composition containing a carboxyl group-containing resin or the like.
- the resin layer 4 is formed from the photosensitive thermosetting resin composition of the present invention formed on the resin layer 3 and including an alkali-soluble resin having an imide ring, another alkali-soluble resin, a photobase generator, and a thermosetting component. Become.
- a mask 5 is arranged on the resin layer 4 and light irradiation is performed in a negative pattern, thereby activating the photobase generator contained in each resin layer and curing the light irradiation portion. It is a process to do.
- the heating process of FIG. 1 is a process (PEB process) of curing the light irradiation part by heating the resin layer after the light irradiation process.
- the development process in FIG. 1 is a process in which an unirradiated portion is removed by developing with an alkaline aqueous solution, and a negative pattern layer is formed.
- the 2nd light irradiation process of FIG. 1 is a process for activating the remaining photobase generator as needed, and generating a base, and a thermosetting process is a pattern layer as needed. This is a process for sufficient heat curing.
- Alkali-soluble resin 1 carboxyl group-containing polyurethane (manufactured by Negami Kogyo Co., Ltd.), acid value 50 mgKOH / g * Alkali-soluble resin 2: Polyurethane acrylate (manufactured by Kyoeisha Chemical Co., Ltd.), acid value 47 mgKOH / g * Alkali-soluble resin 3: bisphenol F-type acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g * Alkali-soluble resin 4: bisphenol A acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g * Alkali-soluble resin 5: biphenyl type acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g * Alkali-soluble resin 6: phenol novolac acrylate resin (manufactured
- ⁇ Resin layer formation process> A flexible printed wiring board having a copper thickness of 18 ⁇ m and a circuit formed thereon was prepared, and pretreated using Mec CZ-8100. Thereafter, the pre-treated flexible printed wiring board was coated with the resin compositions of Examples 1 to 7 and Comparative Examples 1 to 3 to 20 ⁇ m after drying by a liquid coating method. Then, it dried at 80 degreeC and 30 minutes with the hot-air circulation type drying furnace, and formed the resin layer. Thereafter, the film was irradiated with a negative pattern with an exposure amount of 500 mJ / cm 2 using ORC HMW680GW (metal halide lamp, scattered light).
- ORC HMW680GW metal halide lamp, scattered light
- the substrate having the exposed resin layer obtained by the above resin layer forming step was subjected to 20 minutes, 30 minutes, 40 minutes, 50 minutes, 60 minutes, 70 minutes, 80 minutes, 90 minutes, 100 at 90 ° C., respectively.
- Heat treatment was performed for minutes, 110 minutes, and 120 minutes. Thereafter, the substrate after the heat treatment is immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C., developed for 5 minutes, evaluated for developability, and the exposed portion has development resistance, that is, film thickness reduction.
- the time width (BA) from the heat treatment time A that was not observed to the heat treatment time B at which the unexposed area could not be completely removed by development was calculated. The greater the number, the greater the time management range of the PEB process and the better the handling.
- the photosensitive thermosetting resin compositions of Examples 1 to 7 have a large time management range in the PEB process, and are any of 80 ° C., 90 ° C., and 100 ° C. The developability was good even in the post-exposure heat treatment.
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Abstract
Provided is a photosensitive thermosetting resin composition that has excellent reliability with respect to, for instance, impact resistance or flexibility, as well as excellent machining precision and manufacturability, and is ideal for package molding of an insulating film , particularly the bending parts (flexible parts) and mounted parts (inflexible parts) in a flexible printed circuit board. The photosensitive thermosetting resin composition is characterized by including an alkali-soluble resin having imide rings, an alkali-soluble resin other than an alkali-soluble resin having imide rings, a photobase generator, and a thermosetting component. The structure of the other alkali-soluble resin preferably has at least one selected from a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton.
Description
本発明は、感光性熱硬化性樹脂組成物およびフレキシブルプリント配線板に関し、詳しくは、アルカリによる現像が可能であり、耐熱性および屈曲性に優れ、かつ、光照射後加熱硬化時の温度・時間管理が容易な感光性熱硬化性樹脂組成物および該感光性熱硬化性樹脂組成物の硬化物を備えたフレキシブルプリント配線板に関する。
The present invention relates to a photosensitive thermosetting resin composition and a flexible printed wiring board, and in particular, development with an alkali is possible, heat resistance and flexibility are excellent, and temperature and time during heat curing after light irradiation. The present invention relates to a photosensitive thermosetting resin composition that can be easily managed and a flexible printed wiring board including a cured product of the photosensitive thermosetting resin composition.
近年、スマートフォンやタブレット端末の普及と性能の向上が急速に進行している。これらに代表される情報機器端末は、小型化、薄型化への消費者の要求が高く、その要求に応えるべく、製品内部の回路基板の高密度化、省スペース化が必要となっている。そのため、折り曲げての収納が可能で、回路配置の自由度を高めることのできるフレキシブルプリント配線板の用途が拡大しており、フレキシブルプリント配線板に対する信頼性もこれまで以上に高いものが求められている。
In recent years, the spread of smartphones and tablet terminals and the improvement of performance are progressing rapidly. Information equipment terminals represented by these are highly demanded by consumers for downsizing and thinning, and in order to meet these demands, it is necessary to increase the density of circuit boards inside the products and save space. Therefore, the use of flexible printed wiring boards that can be folded and stored and that can increase the degree of freedom of circuit arrangement is expanding, and the reliability for flexible printed wiring boards is required to be higher than ever. Yes.
現在、フレキシブルプリント配線板の絶縁信頼性を確保するための絶縁膜として、折り曲げ部(屈曲部)には、ポリイミドをベースとしたカバーレイが用いられ、実装部(非屈曲部)には、感光性樹脂組成物を用いた混載プロセスが広く採用されている(特許文献1、2参照)。ポリイミドは、耐熱性および屈曲性などの機械的特性に優れ、一方、実装部に用いられる感光性樹脂組成物は、電気絶縁性やはんだ耐熱性などに優れ微細加工が可能であるという特性を有する。
Currently, a cover lay based on polyimide is used for the bent part (bent part) as an insulating film for ensuring the insulation reliability of the flexible printed wiring board, and the mounting part (non-bent part) is photosensitive. A mixed loading process using a conductive resin composition is widely employed (see Patent Documents 1 and 2). Polyimide is excellent in mechanical properties such as heat resistance and flexibility, while the photosensitive resin composition used in the mounting part has characteristics such as excellent electrical insulation and solder heat resistance and can be finely processed. .
従来のポリイミドをベースとしたカバーレイでは、金型打ち抜きによる加工を必要とするため、微細配線には不向きである。そのため、微細配線が必要となるチップ実装部には、フォトリソグラフィーによる加工ができるアルカリ現像型の感光性樹脂組成物(ソルダーレジスト)を部分的に併用することが行われている。フレキシブルプリント配線板の製造においてこのような樹脂組成物の部分的な使い分けをする場合、カバーレイを貼り合わせる工程とソルダーレジストを形成する工程の2つの工程を経ることになり、コストと作業性に劣るという問題があった。
A conventional polyimide-based coverlay is not suitable for fine wiring because it requires a die punching process. For this reason, an alkali-developable photosensitive resin composition (solder resist) that can be processed by photolithography is partially used together in a chip mounting portion that requires fine wiring. When partially using such a resin composition in the production of a flexible printed wiring board, two processes, a process of bonding a cover lay and a process of forming a solder resist, are performed, resulting in cost and workability. There was a problem of being inferior.
そこで従来から、混載プロセスによらないフレキシブルプリント配線板の絶縁膜の検討がなされている。例えば、ソルダーレジスト用の感光性樹脂組成物をフレキシブルプリント配線板のカバーレイとして適用することが検討されているが、ソルダーレジスト用の樹脂組成物では、カバーレイとしての耐衝撃性や屈曲性などの信頼性が不十分である。ソルダーレジスト用の樹脂組成物では、アクリル系の光重合による硬化収縮も伴うため、フレキシブル配線板の反りなど寸法安定性にも課題があった。
Therefore, conventionally, an insulating film of a flexible printed wiring board that does not depend on a mixed mounting process has been studied. For example, application of a photosensitive resin composition for a solder resist as a coverlay for a flexible printed wiring board has been studied. However, in a resin composition for a solder resist, impact resistance, flexibility, etc. as a coverlay The reliability is insufficient. Since the resin composition for solder resist is accompanied by curing shrinkage due to acrylic photopolymerization, there is a problem in dimensional stability such as warping of a flexible wiring board.
また、アルカリ溶解性と機械特性が両立できる感光性ポリイミドとして、ポリイミド前駆体を利用し、パターニングした後に熱閉環する方法も提案されているが、高温処理を必要とするなど作業性に問題があった。
In addition, as a photosensitive polyimide that can achieve both alkali solubility and mechanical properties, a method of using a polyimide precursor and performing thermal ring closure after patterning has been proposed. However, there is a problem in workability such as requiring high-temperature treatment. It was.
そこで本発明の目的は、耐衝撃性や屈曲性などの信頼性と加工精度、作業性に優れ、フレキシブルプリント配線板の絶縁膜、特に折り曲げ部(屈曲部)と実装部(非屈曲部)の一括形成プロセスに好適な感光性熱硬化性樹脂組成物を提供することにある。
Therefore, the object of the present invention is excellent in reliability such as impact resistance and flexibility, processing accuracy, and workability. Insulating films of flexible printed wiring boards, particularly bent portions (bending portions) and mounting portions (non-bending portions). It is providing the photosensitive thermosetting resin composition suitable for a batch formation process.
本発明者らは、上記課題を解決すべく鋭意検討した結果、イミド環を有するアルカリ可溶性樹脂、光塩基発生剤および熱硬化成分を含む樹脂組成物が上記課題を解決しうることを見出した。
即ち、光照射によって光塩基発生剤が活性化し、発生した塩基を触媒としてイミド環を有するアルカリ可溶性樹脂と熱硬化成分とを、加熱によって付加反応させることにより、未露光部分のみをアルカリ溶液によって除去することが可能となることが見出された。これによって、アルカリ現像による微細加工が可能となる一方、信頼性に優れた硬化物を得ることが期待できる。 As a result of intensive studies to solve the above problems, the present inventors have found that a resin composition containing an alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component can solve the above problems.
That is, the photobase generator is activated by light irradiation, and an alkali-soluble resin having an imide ring and a thermosetting component are subjected to an addition reaction by heating using the generated base as a catalyst, so that only an unexposed portion is removed with an alkali solution. It has been found that this is possible. As a result, fine processing by alkali development becomes possible, and it can be expected to obtain a cured product having excellent reliability.
即ち、光照射によって光塩基発生剤が活性化し、発生した塩基を触媒としてイミド環を有するアルカリ可溶性樹脂と熱硬化成分とを、加熱によって付加反応させることにより、未露光部分のみをアルカリ溶液によって除去することが可能となることが見出された。これによって、アルカリ現像による微細加工が可能となる一方、信頼性に優れた硬化物を得ることが期待できる。 As a result of intensive studies to solve the above problems, the present inventors have found that a resin composition containing an alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component can solve the above problems.
That is, the photobase generator is activated by light irradiation, and an alkali-soluble resin having an imide ring and a thermosetting component are subjected to an addition reaction by heating using the generated base as a catalyst, so that only an unexposed portion is removed with an alkali solution. It has been found that this is possible. As a result, fine processing by alkali development becomes possible, and it can be expected to obtain a cured product having excellent reliability.
一方、光照射後の加熱硬化反応において、加熱温度や加熱時間の幅を広げることができれば、より作業性に優れた樹脂組成物となることから、本発明者らは、さらなる検討を重ねた結果、以下のことを見出し本発明を完成するに至った。即ち、イミド環を有するアルカリ可溶性樹脂、光塩基発生剤および熱硬化成分に加えて、イミド環を有するアルカリ可溶性樹脂以外の他のアルカリ可溶性樹脂を含む感光性熱硬化性樹脂組成物とすることにより、上記特性に加えて、より作業性に優れた感光性熱硬化性樹脂組成物を得ることができる。
On the other hand, in the heat curing reaction after light irradiation, if the range of the heating temperature and the heating time can be widened, the resin composition is more excellent in workability. The present inventors have found the following and completed the present invention. That is, by forming a photosensitive thermosetting resin composition containing an alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component, and other alkali-soluble resins other than the alkali-soluble resin having an imide ring. In addition to the above properties, a photosensitive thermosetting resin composition with better workability can be obtained.
本発明は、以下の[1]~[7]である。
[1]イミド環を有するアルカリ可溶性樹脂、該イミド環を有するアルカリ可溶性樹脂以外の他のアルカリ可溶性樹脂、光塩基発生剤及び熱硬化成分を含むことを特徴とする感光性熱硬化性樹脂組成物。
[2]前記他のアルカリ可溶性樹脂が、構造中にウレタン結合、ビスフェノールA骨格、ビスフェノールF骨格、ビスフェノールS骨格、ビフェニル骨格のいずれか1種以上を有することを特徴とする[1]の感光性熱硬化性樹脂組成物。
[3]前記他のアルカリ可溶性樹脂の含有量が、前記イミド環を有するアルカリ可溶性樹脂100質量部に対して10~70質量部であることを特徴とする[1]または[2]の感光性熱硬化性樹脂組成物。
[4]前記熱硬化成分が、環状エーテル基および環状チオエーテル基のいずれか1種以上を有する化合物であることを特徴とする[1]~[3]のいずれかの感光性熱硬化性樹脂組成物。
[5][1]~[4]のいずれかの感光性熱硬化性樹脂組成物を塗布・乾燥してなることを特徴とするドライフィルム。
[6][1]~[4]のいずれかの感光性熱硬化性樹脂組成物または該組成物を塗布・乾燥してなるドライフィルムを硬化して得られることを特徴とする硬化塗膜。
[7][1]~[4]のいずれかの感光性熱硬化性樹脂組成物または該組成物を塗布・乾燥してなるドライフィルムを硬化して得られる硬化塗膜を有することを特徴とするプリント配線板。 The present invention includes the following [1] to [7].
[1] A photosensitive thermosetting resin composition comprising an alkali-soluble resin having an imide ring, an alkali-soluble resin other than the alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component. .
[2] The photosensitivity according to [1], wherein the other alkali-soluble resin has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton in the structure. Thermosetting resin composition.
[3] The photosensitive property of [1] or [2], wherein the content of the other alkali-soluble resin is 10 to 70 parts by mass with respect to 100 parts by mass of the alkali-soluble resin having an imide ring. Thermosetting resin composition.
[4] The photosensitive thermosetting resin composition according to any one of [1] to [3], wherein the thermosetting component is a compound having any one or more of a cyclic ether group and a cyclic thioether group. object.
[5] A dry film obtained by applying and drying the photosensitive thermosetting resin composition according to any one of [1] to [4].
[6] A cured coating film obtained by curing a photosensitive thermosetting resin composition according to any one of [1] to [4] or a dry film obtained by applying and drying the composition.
[7] A photosensitive thermosetting resin composition according to any one of [1] to [4] or a cured coating film obtained by curing a dry film obtained by applying and drying the composition. Printed wiring board.
[1]イミド環を有するアルカリ可溶性樹脂、該イミド環を有するアルカリ可溶性樹脂以外の他のアルカリ可溶性樹脂、光塩基発生剤及び熱硬化成分を含むことを特徴とする感光性熱硬化性樹脂組成物。
[2]前記他のアルカリ可溶性樹脂が、構造中にウレタン結合、ビスフェノールA骨格、ビスフェノールF骨格、ビスフェノールS骨格、ビフェニル骨格のいずれか1種以上を有することを特徴とする[1]の感光性熱硬化性樹脂組成物。
[3]前記他のアルカリ可溶性樹脂の含有量が、前記イミド環を有するアルカリ可溶性樹脂100質量部に対して10~70質量部であることを特徴とする[1]または[2]の感光性熱硬化性樹脂組成物。
[4]前記熱硬化成分が、環状エーテル基および環状チオエーテル基のいずれか1種以上を有する化合物であることを特徴とする[1]~[3]のいずれかの感光性熱硬化性樹脂組成物。
[5][1]~[4]のいずれかの感光性熱硬化性樹脂組成物を塗布・乾燥してなることを特徴とするドライフィルム。
[6][1]~[4]のいずれかの感光性熱硬化性樹脂組成物または該組成物を塗布・乾燥してなるドライフィルムを硬化して得られることを特徴とする硬化塗膜。
[7][1]~[4]のいずれかの感光性熱硬化性樹脂組成物または該組成物を塗布・乾燥してなるドライフィルムを硬化して得られる硬化塗膜を有することを特徴とするプリント配線板。 The present invention includes the following [1] to [7].
[1] A photosensitive thermosetting resin composition comprising an alkali-soluble resin having an imide ring, an alkali-soluble resin other than the alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component. .
[2] The photosensitivity according to [1], wherein the other alkali-soluble resin has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton in the structure. Thermosetting resin composition.
[3] The photosensitive property of [1] or [2], wherein the content of the other alkali-soluble resin is 10 to 70 parts by mass with respect to 100 parts by mass of the alkali-soluble resin having an imide ring. Thermosetting resin composition.
[4] The photosensitive thermosetting resin composition according to any one of [1] to [3], wherein the thermosetting component is a compound having any one or more of a cyclic ether group and a cyclic thioether group. object.
[5] A dry film obtained by applying and drying the photosensitive thermosetting resin composition according to any one of [1] to [4].
[6] A cured coating film obtained by curing a photosensitive thermosetting resin composition according to any one of [1] to [4] or a dry film obtained by applying and drying the composition.
[7] A photosensitive thermosetting resin composition according to any one of [1] to [4] or a cured coating film obtained by curing a dry film obtained by applying and drying the composition. Printed wiring board.
本発明により、アルカリによる現像が可能であり、耐熱性および屈曲性に優れ、かつ、光照射後加熱硬化時の温度・時間管理が容易な感光性熱硬化性樹脂組成物、および、該感光性熱硬化性樹脂組成物からなる樹脂層を有するドライフィルム、該感光性熱硬化性樹脂組成物の硬化物を備えたフレキシブルプリント配線板を提供することが可能となる。本発明の感光性熱硬化性樹脂組成物は、フレキシブルプリント配線板の絶縁膜、特に折り曲げ部(屈曲部)と実装部(非屈曲部)の一括形成プロセスに好適である。
According to the present invention, a photosensitive thermosetting resin composition capable of developing with an alkali, excellent in heat resistance and flexibility, and easy in temperature and time management at the time of heat curing after light irradiation, and the photosensitivity It is possible to provide a dry film having a resin layer made of a thermosetting resin composition and a flexible printed wiring board provided with a cured product of the photosensitive thermosetting resin composition. The photosensitive thermosetting resin composition of the present invention is suitable for a process for forming an insulating film of a flexible printed wiring board, particularly a bent part (bent part) and a mounting part (non-bent part).
本発明の感光性熱硬化性樹脂組成物は、イミド環を有するアルカリ可溶性樹脂、他のアルカリ可溶性樹脂、光塩基発生剤及び熱硬化成分を含むことを特徴とするものである。
本発明の感光性熱硬化性樹脂組成物は、光塩基発生剤から生じる塩基を触媒として、イミド環を有するアルカリ可溶性樹脂と熱硬化成分とを露光後の加熱によって付加反応をさせ、未露光部分をアルカリ溶液によって除去することによって現像が可能となる樹脂組成物である。
後述するように、イミド環を有するアルカリ可溶性樹脂以外の他のアルカリ可溶性樹脂、特に、ウレタン結合、ビスフェノールA骨格、ビスフェノールF骨格、ビスフェノールS骨格、ビフェニル骨格のいずれか1種以上を有するアルカリ可溶性樹脂が存在すると、存在しない場合に比べて、露光後の加熱硬化反応時(下記PEB工程時)において同一の加熱温度下での、付加反応によりアルカリ耐性となるまでの時間を長くすることができる。また、加熱硬化反応時(下記PEB工程時)の加熱温度の選択幅を広げることができる。これらのことから、樹脂組成物の作業性、取扱性が向上する。未露光部がアルカリ耐性となる、いわゆるかぶりの発生を抑制することもできる。 The photosensitive thermosetting resin composition of the present invention includes an alkali-soluble resin having an imide ring, another alkali-soluble resin, a photobase generator, and a thermosetting component.
The photosensitive thermosetting resin composition of the present invention causes an alkali-soluble resin having an imide ring and a thermosetting component to undergo an addition reaction by heating after exposure using a base generated from a photobase generator as a catalyst, and thereby unexposed portions. It is a resin composition that can be developed by removing the solution with an alkaline solution.
As will be described later, other alkali-soluble resins other than the alkali-soluble resin having an imide ring, in particular, an alkali-soluble resin having any one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton. In the case where is present, compared to the case where it is not present, it is possible to lengthen the time until the alkali resistance is achieved by the addition reaction at the same heating temperature during the heat curing reaction after exposure (at the time of the following PEB process). Moreover, the selection range of the heating temperature at the time of thermosetting reaction (at the time of the following PEB process) can be expanded. From these things, the workability | operativity and handleability of a resin composition improve. It is also possible to suppress the occurrence of so-called fogging in which the unexposed portion becomes resistant to alkali.
本発明の感光性熱硬化性樹脂組成物は、光塩基発生剤から生じる塩基を触媒として、イミド環を有するアルカリ可溶性樹脂と熱硬化成分とを露光後の加熱によって付加反応をさせ、未露光部分をアルカリ溶液によって除去することによって現像が可能となる樹脂組成物である。
後述するように、イミド環を有するアルカリ可溶性樹脂以外の他のアルカリ可溶性樹脂、特に、ウレタン結合、ビスフェノールA骨格、ビスフェノールF骨格、ビスフェノールS骨格、ビフェニル骨格のいずれか1種以上を有するアルカリ可溶性樹脂が存在すると、存在しない場合に比べて、露光後の加熱硬化反応時(下記PEB工程時)において同一の加熱温度下での、付加反応によりアルカリ耐性となるまでの時間を長くすることができる。また、加熱硬化反応時(下記PEB工程時)の加熱温度の選択幅を広げることができる。これらのことから、樹脂組成物の作業性、取扱性が向上する。未露光部がアルカリ耐性となる、いわゆるかぶりの発生を抑制することもできる。 The photosensitive thermosetting resin composition of the present invention includes an alkali-soluble resin having an imide ring, another alkali-soluble resin, a photobase generator, and a thermosetting component.
The photosensitive thermosetting resin composition of the present invention causes an alkali-soluble resin having an imide ring and a thermosetting component to undergo an addition reaction by heating after exposure using a base generated from a photobase generator as a catalyst, and thereby unexposed portions. It is a resin composition that can be developed by removing the solution with an alkaline solution.
As will be described later, other alkali-soluble resins other than the alkali-soluble resin having an imide ring, in particular, an alkali-soluble resin having any one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton. In the case where is present, compared to the case where it is not present, it is possible to lengthen the time until the alkali resistance is achieved by the addition reaction at the same heating temperature during the heat curing reaction after exposure (at the time of the following PEB process). Moreover, the selection range of the heating temperature at the time of thermosetting reaction (at the time of the following PEB process) can be expanded. From these things, the workability | operativity and handleability of a resin composition improve. It is also possible to suppress the occurrence of so-called fogging in which the unexposed portion becomes resistant to alkali.
本発明の感光性熱硬化性樹脂組成物は、フレキシブルプリント配線板の樹脂絶縁層、例えば、カバーレイ、ソルダーレジスト、に好適である。
本発明の感光性熱硬化性樹脂組成物を用いてフレキシブルプリント配線板の樹脂絶縁層を形成する場合、好適な製造方法は、下記のようになる。即ち、フレキシブルプリント配線板上に本発明の感光性熱硬化性樹脂組成物からなる樹脂層を形成する工程、パターン状に光を樹脂層に照射する工程、樹脂層を加熱する工程(Post Exposure Bake;PEBとも称する)、及び、樹脂層をアルカリ現像して、パターンを有する樹脂絶縁層を形成する工程を含む製造方法である。必要に応じて、アルカリ現像後、さらなる光照射や加熱硬化(ポストキュア)を行い、樹脂組成物を完全硬化させて信頼性の高い樹脂絶縁層を得る。
このように、本発明の感光性熱硬化性樹脂組成物は、好適には、選択的な光照射後の加熱処理により、カルボキシル基と熱硬化成分とが付加反応することによって、アルカリ現像によるネガ型のパターン形成が可能となるものである。
得られる硬化物が耐熱性および屈曲性に優れ、かつ、アルカリ現像により微細加工が可能であることから、ポリイミドに対してアルカリ現像型の感光性樹脂組成物を部分的に併用する必要がなく、フレキシブルプリント配線板の折り曲げ部(屈曲部)と実装部(非屈曲部)のいずれにも用いることができ、折り曲げ部(屈曲部)と実装部(非屈曲部)の一括形成プロセスに好適である。
以下、各成分について詳述する。 The photosensitive thermosetting resin composition of the present invention is suitable for resin insulating layers of flexible printed wiring boards, such as coverlays and solder resists.
When forming the resin insulation layer of a flexible printed wiring board using the photosensitive thermosetting resin composition of this invention, a suitable manufacturing method is as follows. That is, a step of forming a resin layer comprising the photosensitive thermosetting resin composition of the present invention on a flexible printed wiring board, a step of irradiating the resin layer with light in a pattern, and a step of heating the resin layer (Post Exposure Bake) And also referred to as PEB), and a process of alkali-developing the resin layer to form a resin insulating layer having a pattern. If necessary, after alkali development, further light irradiation or heat curing (post-cure) is performed to completely cure the resin composition to obtain a highly reliable resin insulating layer.
As described above, the photosensitive thermosetting resin composition of the present invention is preferably a negative by alkaline development by an addition reaction between a carboxyl group and a thermosetting component by selective heat treatment after light irradiation. Mold pattern formation is possible.
Since the resulting cured product is excellent in heat resistance and flexibility and can be finely processed by alkali development, it is not necessary to partially use an alkali development type photosensitive resin composition for polyimide, It can be used for both the bent part (bent part) and the mounting part (non-bent part) of the flexible printed wiring board, and is suitable for the batch formation process of the bent part (bent part) and the mounting part (non-bent part). .
Hereinafter, each component will be described in detail.
本発明の感光性熱硬化性樹脂組成物を用いてフレキシブルプリント配線板の樹脂絶縁層を形成する場合、好適な製造方法は、下記のようになる。即ち、フレキシブルプリント配線板上に本発明の感光性熱硬化性樹脂組成物からなる樹脂層を形成する工程、パターン状に光を樹脂層に照射する工程、樹脂層を加熱する工程(Post Exposure Bake;PEBとも称する)、及び、樹脂層をアルカリ現像して、パターンを有する樹脂絶縁層を形成する工程を含む製造方法である。必要に応じて、アルカリ現像後、さらなる光照射や加熱硬化(ポストキュア)を行い、樹脂組成物を完全硬化させて信頼性の高い樹脂絶縁層を得る。
このように、本発明の感光性熱硬化性樹脂組成物は、好適には、選択的な光照射後の加熱処理により、カルボキシル基と熱硬化成分とが付加反応することによって、アルカリ現像によるネガ型のパターン形成が可能となるものである。
得られる硬化物が耐熱性および屈曲性に優れ、かつ、アルカリ現像により微細加工が可能であることから、ポリイミドに対してアルカリ現像型の感光性樹脂組成物を部分的に併用する必要がなく、フレキシブルプリント配線板の折り曲げ部(屈曲部)と実装部(非屈曲部)のいずれにも用いることができ、折り曲げ部(屈曲部)と実装部(非屈曲部)の一括形成プロセスに好適である。
以下、各成分について詳述する。 The photosensitive thermosetting resin composition of the present invention is suitable for resin insulating layers of flexible printed wiring boards, such as coverlays and solder resists.
When forming the resin insulation layer of a flexible printed wiring board using the photosensitive thermosetting resin composition of this invention, a suitable manufacturing method is as follows. That is, a step of forming a resin layer comprising the photosensitive thermosetting resin composition of the present invention on a flexible printed wiring board, a step of irradiating the resin layer with light in a pattern, and a step of heating the resin layer (Post Exposure Bake) And also referred to as PEB), and a process of alkali-developing the resin layer to form a resin insulating layer having a pattern. If necessary, after alkali development, further light irradiation or heat curing (post-cure) is performed to completely cure the resin composition to obtain a highly reliable resin insulating layer.
As described above, the photosensitive thermosetting resin composition of the present invention is preferably a negative by alkaline development by an addition reaction between a carboxyl group and a thermosetting component by selective heat treatment after light irradiation. Mold pattern formation is possible.
Since the resulting cured product is excellent in heat resistance and flexibility and can be finely processed by alkali development, it is not necessary to partially use an alkali development type photosensitive resin composition for polyimide, It can be used for both the bent part (bent part) and the mounting part (non-bent part) of the flexible printed wiring board, and is suitable for the batch formation process of the bent part (bent part) and the mounting part (non-bent part). .
Hereinafter, each component will be described in detail.
[イミド環を有するアルカリ可溶性樹脂]
本発明において、イミド環を有するアルカリ可溶性樹脂は、カルボキシル基や酸無水物基などのアルカリ溶解性基とイミド環を有し、未硬化の状態ではアルカリ溶液に可溶である樹脂である。
イミド環を有するアルカリ可溶性樹脂は、イミド環として下記式(1)で表される部分構造を有することが好ましい。式(1)中、Rが芳香環を含むものであることが好ましい。
上記式(1)で表される部分構造は、下記式(2)または(3)で表されるものであることがより好ましい。
カルボキシル基の位置は特に限定されない。上記イミド環もしくはそれと結合する基の置換基としてカルボキシル基が存在してもよく、アミン成分やイソシアネート成分として、カルボキシル基を有するものを用いて合成することによってカルボキシル基をポリイミド樹脂に導入してもよい。 [Alkali-soluble resin having imide ring]
In the present invention, the alkali-soluble resin having an imide ring is a resin having an alkali-soluble group such as a carboxyl group or an acid anhydride group and an imide ring and being soluble in an alkaline solution in an uncured state.
The alkali-soluble resin having an imide ring preferably has a partial structure represented by the following formula (1) as an imide ring. In formula (1), it is preferable that R contains an aromatic ring.
The partial structure represented by the above formula (1) is more preferably one represented by the following formula (2) or (3).
The position of the carboxyl group is not particularly limited. A carboxyl group may be present as a substituent of the imide ring or a group bonded thereto, and the carboxyl group may be introduced into a polyimide resin by synthesis using an amine component or an isocyanate component having a carboxyl group. Good.
本発明において、イミド環を有するアルカリ可溶性樹脂は、カルボキシル基や酸無水物基などのアルカリ溶解性基とイミド環を有し、未硬化の状態ではアルカリ溶液に可溶である樹脂である。
イミド環を有するアルカリ可溶性樹脂は、イミド環として下記式(1)で表される部分構造を有することが好ましい。式(1)中、Rが芳香環を含むものであることが好ましい。
上記式(1)で表される部分構造は、下記式(2)または(3)で表されるものであることがより好ましい。
カルボキシル基の位置は特に限定されない。上記イミド環もしくはそれと結合する基の置換基としてカルボキシル基が存在してもよく、アミン成分やイソシアネート成分として、カルボキシル基を有するものを用いて合成することによってカルボキシル基をポリイミド樹脂に導入してもよい。 [Alkali-soluble resin having imide ring]
In the present invention, the alkali-soluble resin having an imide ring is a resin having an alkali-soluble group such as a carboxyl group or an acid anhydride group and an imide ring and being soluble in an alkaline solution in an uncured state.
The alkali-soluble resin having an imide ring preferably has a partial structure represented by the following formula (1) as an imide ring. In formula (1), it is preferable that R contains an aromatic ring.
The partial structure represented by the above formula (1) is more preferably one represented by the following formula (2) or (3).
The position of the carboxyl group is not particularly limited. A carboxyl group may be present as a substituent of the imide ring or a group bonded thereto, and the carboxyl group may be introduced into a polyimide resin by synthesis using an amine component or an isocyanate component having a carboxyl group. Good.
イミド環を有するアルカリ可溶性樹脂の合成には公知慣用の手法を用いることができる。例えば、カルボン酸無水物成分とアミン成分及び/又はイソシアネート成分とを反応させて得られる樹脂が挙げられる。イミド化は熱イミド化で行っても、化学イミド化で行ってもよく、またこれらを併用して製造してもよい。
For synthesis of an alkali-soluble resin having an imide ring, a known and commonly used technique can be used. For example, the resin obtained by making a carboxylic anhydride component react with an amine component and / or an isocyanate component is mentioned. Imidization may be performed by thermal imidization, chemical imidization, or a combination thereof.
カルボン酸無水物成分としては、テトラカルボン酸無水物やトリカルボン酸無水物などが挙げられるが、これらの酸無水物に限定されるものではなく、アミノ基やイソシアネート基と反応する酸無水物基およびカルボキシル基を有する化合物であれば、その誘導体を含め用いることができる。また、これらのカルボン酸無水物成分は、1種を単独で用いてもよく、2種以上を組み合わせて使用してもよい。
Examples of the carboxylic acid anhydride component include tetracarboxylic acid anhydrides and tricarboxylic acid anhydrides, but are not limited to these acid anhydrides, and acid anhydride groups that react with amino groups and isocyanate groups, and Any compound having a carboxyl group can be used, including derivatives thereof. Moreover, these carboxylic anhydride components may be used individually by 1 type, and may be used in combination of 2 or more type.
テトラカルボン酸無水物としては、例えば、ピロメリット酸二無水物、3-フルオロピロメリット酸二無水物、3,6-ジフルオロピロメリット酸二無水物、3,6-ビス(トリフルオロメチル)ピロメリット酸二無水物、3,3’,4,4’-ベンゾフェノンテトラカルボン酸二無水物、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、4,4’-オキシジフタル酸二無水物、2,2’-ジフルオロ-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、5,5’-ジフルオロ-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、6,6’-ジフルオロ-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、2,2’,5,5’,6,6’-ヘキサフルオロ-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、2,2’-ビス(トリフルオロメチル)-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、5,5’-ビス(トリフルオロメチル)-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、6,6’-ビス(トリフルオロメチル)-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、2,2’,5,5’-テトラキス(トリフルオロメチル)-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、2,2’,6,6’-テトラキス(トリフルオロメチル)-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、5,5’,6,6’-テトラキス(トリフルオロメチル)-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、および2,2’,5,5’,6,6’-ヘキサキス(トリフルオロメチル)-3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、1,2,3,4-ベンゼンテトラカルボン酸二無水物、3,3”,4,4”-テルフェニルテトラカルボン酸二無水物、3,3’”,4,4’”-クァテルフェニルテトラカルボン酸二無水物、3,3””,4,4””-キンクフェニルテトラカルボン酸二無水物、メチレン-4,4’-ジフタル酸二無水物、1,1-エチニリデン-4,4’-ジフタル酸二無水物、2,2-プロピリデン-4,4’-ジフタル酸二無水物、1,2-エチレン-4,4’-ジフタル酸二無水物、1,3-トリメチレン-4,4’-ジフタル酸二無水物、1,4-テトラメチレン-4,4’-ジフタル酸二無水物、1,5-ペンタメチレン-4,4’-ジフタル酸二無水物、2,2-ビス(3,4-ジカルボキシフェニル)-1,1,1,3,3,3-へキサフルオロプロパン二無水物、ジフルオロメチレン-4,4’-ジフタル酸二無水物、1,1,2,2-テトラフルオロ-1,2-エチレン-4,4’-ジフタル酸二無水物、1,1,2,2,3,3-ヘキサフルオロ-1,3-トリメチレン-4,4’-ジフタル酸二無水物、1,1,2,2,3,3,4,4-オクタフルオロ-1,4-テトラメチレン-4,4’-ジフタル酸二無水物、1,1,2,2,3,3,4,4,5,5-デカフルオロ-1,5-ペンタメチレン-4,4’-ジフタル酸二無水物、チオ-4,4’-ジフタル酸二無水物、スルホニル-4,4’-ジフタル酸二無水物、1,3-ビス(3,4-ジカルボキシフェニル)-1,1,3,3-テトラメチルシロキサン二無水物、1,3-ビス(3,4-ジカルボキシフェニル)ベンゼン二無水物、1,4-ビス(3,4-ジカルボキシフェニル)ベンゼン二無水物、1,3-ビス(3,4-ジカルボキシフェノキシ)ベンゼン二無水物、1,4-ビス(3,4-ジカルボキシフェノキシ)ベンゼン二無水物、1,3-ビス〔2-(3,4-ジカルボキシフェニル)-2-プロピル〕ベンゼン二無水物、1,4-ビス〔2-(3,4-ジカルボキシフェニル)-2-プロピル〕ベンゼン二無水物、ビス〔3-(3,4-ジカルボキシフェノキシ)フェニル〕メタン二無水物、ビス〔4-(3,4-ジカルボキシフェノキシ)フェニル〕メタン二無水物、2,2-ビス〔3-(3,4-ジカルボキシフェノキシ)フェニル〕プロパン二無水物、2,2-ビス〔4-(3,4-ジカルボキシフェノキシ)フェニル〕プロパン二無水物、2,2-ビス〔3-(3,4-ジカルボキシフェノキシ)フェニル〕-1,1,1,3,3,3-ヘキサフルオロプロパン二無水物、2,2-ビス〔4-(3,4-ジカルボキシフェノキシ)フェニル〕プロパン二無水物、ビス(3,4-ジカルボキシフェノキシ)ジメチルシラン二無水物、1,3-ビス(3,4-ジカルボキシフェノキシ)-1,1,3,3-テトラメチルジシロキサン二無水物、2,3,6,7-ナフタレンテトラカルボン酸二無水物、1,2,5,6-ナフタレンテトラカルボン酸二無水物、3,4,9,10-ペリレンテトラカルボン酸二無水物、2,3,6,7-アントラセンテトラカルボン酸二無水物、1,2,7,8-フェナントレンテトラカルボン酸二無水物、1,2,3,4-ブタンテトラカルボン酸二無水物、1,2,3,4-シクロブタンテトラカルボン酸二無水物、シクロペンタンテトラカルボン酸二無水物、シクロヘキサン-1,2,3,4-テトラカルボン酸二無水物、シクロヘキサン-1,2,4,5-テトラカルボン酸二無水物、3,3’,4,4’-ビシクロヘキシルテトラカルボン酸二無水物、カルボニル-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、メチレン-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、1,2-エチレン-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、1,1-エチニリデン-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、2,2-プロピリデン-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、1,1,1,3,3,3-ヘキサフルオロ-2,2-プロピリデン-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、オキシ-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、チオ-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、スルホニル-4,4’-ビス(シクロヘキサン-1,2-ジカルボン酸)二無水物、3,3’-ジフルオロオキシ-4,4’-ジフタル酸二無水物、5,5’-ジフルオロオキシ-4,4’-ジフタル酸二無水物、6,6’-ジフルオロオキシ-4,4’-ジフタル酸二無水物、3,3’,5,5’,6,6’-ヘキサフルオロオキシ-4,4’-ジフタル酸二無水物、3,3’-ビス(トリフルオロメチル)オキシ-4,4’-ジフタル酸二無水物、5,5’-ビス(トリフルオロメチル)オキシ-4,4’-ジフタル酸二無水物、6,6’-ビス(トリフルオロメチル)オキシ-4,4’-ジフタル酸二無水物、3,3’,5,5’-テトラキス(トリフルオロメチル)オキシ-4,4’-ジフタル酸二無水物、3,3’,6,6’-テトラキス(トリフルオロメチル)オキシ-4,4’-ジフタル酸二無水物、5,5’,6,6’-テトラキス(トリフルオロメチル)オキシ-4,4’-ジフタル酸二無水物、3,3’,5,5’,6,6’-ヘキサキス(トリフルオロメチル)オキシ-4,4’-ジフタル酸二無水物、3,3’-ジフルオロスルホニル-4,4’-ジフタル酸二無水物、5,5’-ジフルオロスルホニル-4,4’-ジフタル酸二無水物、6,6’-ジフルオロスルホニル-4,4’-ジフタル酸二無水物、3,3’,5,5’,6,6’-ヘキサフルオロスルホニル-4,4’-ジフタル酸二無水物、3,3’-ビス(トリフルオロメチル)スルホニル-4,4’-ジフタル酸二無水物、5,5’-ビス(トリフルオロメチル)スルホニル-4,4’-ジフタル酸二無水物、6,6’-ビス(トリフルオロメチル)スルホニル-4,4’-ジフタル酸二無水物、3,3’,5,5’-テトラキス(トリフルオロメチル)スルホニル-4,4’-ジフタル酸二無水物、3,3’,6,6’-テトラキス(トリフルオロメチル)スルホニル-4,4’-ジフタル酸二無水物、5,5’,6,6’-テトラキス(トリフルオロメチル)スルホニル-4,4’-ジフタル酸二無水物、3,3’,5,5’,6,6’-ヘキサキス(トリフルオロメチル)スルホニル-4,4’-ジフタル酸二無水物、3,3’-ジフルオロ-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、5,5’-ジフルオロ-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、6,6’-ジフルオロ-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、3,3’,5,5’,6,6’-ヘキサフルオロ-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、3,3’-ビス(トリフルオロメチル)-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、5,5’-ビス(トリフルオロメチル)-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、6,6’-ジフルオロ-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、3,3’,5,5’-テトラキス(トリフルオロメチル)-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、3,3’,6,6’-テトラキス(トリフルオロメチル)-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、5,5’,6,6’-テトラキス(トリフルオロメチル)-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、3,3’,5,5’,6,6’-ヘキサキス(トリフルオロメチル)-2,2-パーフルオロプロピリデン-4,4’-ジフタル酸二無水物、9-フェニル-9-(トリフルオロメチル)キサンテン-2,3,6,7-テトラカルボン酸二無水物、9,9-ビス(トリフルオロメチル)キサンテン-2,3,6,7-テトラカルボン酸二無水物、ビシクロ〔2,2,2〕オクト-7-エン-2,3,5,6-テトラカルボン酸二無水物、9,9-ビス〔4-(3,4-ジカルボキシ)フェニル〕フルオレン二無水物、9,9-ビス〔4-(2,3-ジカルボキシ)フェニル〕フルオレン二無水物、エチレングリコールビストリメリテート二無水物、1,2-(エチレン)ビス(トリメリテート無水物)、1,3-(トリメチレン)ビス(トリメリテート無水物)、1,4-(テトラメチレン)ビス(トリメリテート無水物)、1,5-(ペンタメチレン)ビス(トリメリテート無水物)、1,6-(ヘキサメチレン)ビス(トリメリテート無水物)、1,7-(ヘプタメチレン)ビス(トリメリテート無水物)、1,8-(オクタメチレン)ビス(トリメリテート無水物)、1,9-(ノナメチレン)ビス(トリメリテート無水物)、1,10-(デカメチレン)ビス(トリメリテート無水物)、1,12-(ドデカメチレン)ビス(トリメリテート無水物)、1,16-(ヘキサデカメチレン)ビス(トリメリテート無水物)、1,18-(オクタデカメチレン)ビス(トリメリテート無水物)などが挙げられる。
Examples of the tetracarboxylic acid anhydride include pyromellitic dianhydride, 3-fluoropyromellitic dianhydride, 3,6-difluoropyromellitic dianhydride, 3,6-bis (trifluoromethyl) pyro Merit acid dianhydride, 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 4,4′-oxydiphthalic acid Anhydride, 2,2'-difluoro-3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 5,5'-difluoro-3,3', 4,4'-biphenyltetracarboxylic dianhydride Anhydride, 6,6′-difluoro-3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,2 ′, 5,5 ′, 6,6′-hexafluoro-3,3 ′ , 4,4'-biphenylte Lacarboxylic acid dianhydride, 2,2′-bis (trifluoromethyl) -3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 5,5′-bis (trifluoromethyl) -3, 3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 6,6′-bis (trifluoromethyl) -3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,2 ′ , 5,5′-tetrakis (trifluoromethyl) -3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,2 ′, 6,6′-tetrakis (trifluoromethyl) -3, 3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 5,5 ′, 6,6′-tetrakis (trifluoromethyl) -3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride , And 2, 2 ', 5, 5', 6, '-Hexakis (trifluoromethyl) -3,3', 4,4'-biphenyltetracarboxylic dianhydride, 1,2,3,4-benzenetetracarboxylic dianhydride, 3,3 ", 4 4 "-terphenyltetracarboxylic dianhydride, 3,3 '", 4,4' "-quaterphenyltetracarboxylic dianhydride, 3,3" ", 4,4" "-kinkphenyltetracarboxylic Acid dianhydride, methylene-4,4′-diphthalic dianhydride, 1,1-ethynylidene-4,4′-diphthalic dianhydride, 2,2-propylidene-4,4′-diphthalic dianhydride 1,2-ethylene-4,4′-diphthalic dianhydride, 1,3-trimethylene-4,4′-diphthalic dianhydride, 1,4-tetramethylene-4,4′-diphthalic acid Dianhydride, 1,5-pentamethylene-4,4'-di Phthalic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) -1,1,1,3,3,3-hexafluoropropane dianhydride, difluoromethylene-4,4′-diphthal Acid dianhydride, 1,1,2,2-tetrafluoro-1,2-ethylene-4,4′-diphthalic dianhydride, 1,1,2,2,3,3-hexafluoro-1, 3-trimethylene-4,4'-diphthalic dianhydride, 1,1,2,2,3,3,4,4-octafluoro-1,4-tetramethylene-4,4'-diphthalic dianhydride 1,1,2,2,3,3,4,4,5,5-decafluoro-1,5-pentamethylene-4,4′-diphthalic dianhydride, thio-4,4′- Diphthalic dianhydride, sulfonyl-4,4′-diphthalic dianhydride, 1,3-bis (3,4-dicarboxyl Nyl) -1,1,3,3-tetramethylsiloxane dianhydride, 1,3-bis (3,4-dicarboxyphenyl) benzene dianhydride, 1,4-bis (3,4-dicarboxyphenyl) ) Benzene dianhydride, 1,3-bis (3,4-dicarboxyphenoxy) benzene dianhydride, 1,4-bis (3,4-dicarboxyphenoxy) benzene dianhydride, 1,3-bis [ 2- (3,4-dicarboxyphenyl) -2-propyl] benzene dianhydride, 1,4-bis [2- (3,4-dicarboxyphenyl) -2-propyl] benzene dianhydride, bis [ 3- (3,4-dicarboxyphenoxy) phenyl] methane dianhydride, bis [4- (3,4-dicarboxyphenoxy) phenyl] methane dianhydride, 2,2-bis [3- (3,4 -Dicarboxyphenoxy ) Phenyl] propane dianhydride, 2,2-bis [4- (3,4-dicarboxyphenoxy) phenyl] propane dianhydride, 2,2-bis [3- (3,4-dicarboxyphenoxy) phenyl ] -1,1,1,3,3,3-hexafluoropropane dianhydride, 2,2-bis [4- (3,4-dicarboxyphenoxy) phenyl] propane dianhydride, bis (3,4 -Dicarboxyphenoxy) dimethylsilane dianhydride, 1,3-bis (3,4-dicarboxyphenoxy) -1,1,3,3-tetramethyldisiloxane dianhydride, 2,3,6,7- Naphthalenetetracarboxylic dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 3,4,9,10-perylenetetracarboxylic dianhydride, 2,3,6,7-anthracenetetra Carbo Acid dianhydride, 1,2,7,8-phenanthrenetetracarboxylic dianhydride, 1,2,3,4-butanetetracarboxylic dianhydride, 1,2,3,4-cyclobutanetetracarboxylic acid Dianhydride, cyclopentanetetracarboxylic dianhydride, cyclohexane-1,2,3,4-tetracarboxylic dianhydride, cyclohexane-1,2,4,5-tetracarboxylic dianhydride, 3,3 ', 4,4'-bicyclohexyltetracarboxylic dianhydride, carbonyl-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, methylene-4,4'-bis (cyclohexane-1) , 2-dicarboxylic acid) dianhydride, 1,2-ethylene-4,4′-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,1-ethynylidene-4,4′-bis (cyclo Xanthane-1,2-dicarboxylic acid) dianhydride, 2,2-propylidene-4,4′-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,1,1,3,3,3 -Hexafluoro-2,2-propylidene-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, oxy-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride Thio-4,4′-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, sulfonyl-4,4′-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, 3,3 ′ -Difluorooxy-4,4'-diphthalic dianhydride, 5,5'-difluorooxy-4,4'-diphthalic dianhydride, 6,6'-difluorooxy-4,4'-diphthalic acid Anhydride, 3,3 ', 5,5', , 6′-hexafluorooxy-4,4′-diphthalic dianhydride, 3,3′-bis (trifluoromethyl) oxy-4,4′-diphthalic dianhydride, 5,5′-bis ( Trifluoromethyl) oxy-4,4′-diphthalic dianhydride, 6,6′-bis (trifluoromethyl) oxy-4,4′-diphthalic dianhydride, 3,3 ′, 5,5 ′ -Tetrakis (trifluoromethyl) oxy-4,4'-diphthalic dianhydride, 3,3 ', 6,6'-tetrakis (trifluoromethyl) oxy-4,4'-diphthalic dianhydride, 5 , 5 ′, 6,6′-tetrakis (trifluoromethyl) oxy-4,4′-diphthalic dianhydride, 3,3 ′, 5,5 ′, 6,6′-hexakis (trifluoromethyl) oxy -4,4'-diphthalic dianhydride, 3,3'-diph Fluorosulfonyl-4,4′-diphthalic dianhydride, 5,5′-difluorosulfonyl-4,4′-diphthalic dianhydride, 6,6′-difluorosulfonyl-4,4′-diphthalic acid Anhydride, 3,3 ′, 5,5 ′, 6,6′-hexafluorosulfonyl-4,4′-diphthalic dianhydride, 3,3′-bis (trifluoromethyl) sulfonyl-4,4 ′ Diphthalic dianhydride, 5,5′-bis (trifluoromethyl) sulfonyl-4,4′-diphthalic dianhydride, 6,6′-bis (trifluoromethyl) sulfonyl-4,4′-diphthal Acid dianhydride, 3,3 ′, 5,5′-tetrakis (trifluoromethyl) sulfonyl-4,4′-diphthalic dianhydride, 3,3 ′, 6,6′-tetrakis (trifluoromethyl) Sulfonyl-4,4'-diphthal Acid dianhydride, 5,5 ′, 6,6′-tetrakis (trifluoromethyl) sulfonyl-4,4′-diphthalic dianhydride, 3,3 ′, 5,5 ′, 6,6′-hexakis (Trifluoromethyl) sulfonyl-4,4′-diphthalic dianhydride, 3,3′-difluoro-2,2-perfluoropropylidene-4,4′-diphthalic dianhydride, 5,5′- Difluoro-2,2-perfluoropropylidene-4,4′-diphthalic dianhydride, 6,6′-difluoro-2,2-perfluoropropylidene-4,4′-diphthalic dianhydride, 3 , 3 ′, 5,5 ′, 6,6′-hexafluoro-2,2-perfluoropropylidene-4,4′-diphthalic dianhydride, 3,3′-bis (trifluoromethyl) -2 , 2-Perfluoropropylidene-4,4'-diph Luric dianhydride, 5,5′-bis (trifluoromethyl) -2,2-perfluoropropylidene-4,4′-diphthalic dianhydride, 6,6′-difluoro-2,2-par Fluoropropylidene-4,4′-diphthalic dianhydride, 3,3 ′, 5,5′-tetrakis (trifluoromethyl) -2,2-perfluoropropylidene-4,4′-diphthalic dianhydride 3,3 ′, 6,6′-tetrakis (trifluoromethyl) -2,2-perfluoropropylidene-4,4′-diphthalic dianhydride, 5,5 ′, 6,6′-tetrakis (Trifluoromethyl) -2,2-perfluoropropylidene-4,4′-diphthalic dianhydride, 3,3 ′, 5,5 ′, 6,6′-hexakis (trifluoromethyl) -2, 2-perfluoropropylidene-4,4'-di Phthalic dianhydride, 9-phenyl-9- (trifluoromethyl) xanthene-2,3,6,7-tetracarboxylic dianhydride, 9,9-bis (trifluoromethyl) xanthene-2,3, 6,7-tetracarboxylic dianhydride, bicyclo [2,2,2] oct-7-ene-2,3,5,6-tetracarboxylic dianhydride, 9,9-bis [4- (3 , 4-dicarboxy) phenyl] fluorene dianhydride, 9,9-bis [4- (2,3-dicarboxy) phenyl] fluorene dianhydride, ethylene glycol bistrimellitic dianhydride, 1,2- ( Ethylene) bis (trimellitic anhydride), 1,3- (trimethylene) bis (trimellitic anhydride), 1,4- (tetramethylene) bis (trimellitic anhydride), 1,5- (pentamethylene) bis (toluene) Meritate anhydride), 1,6- (hexamethylene) bis (trimellitic anhydride), 1,7- (heptamethylene) bis (trimellitic anhydride), 1,8- (octamethylene) bis (trimellitic anhydride), 1,9- (nonamethylene) bis (trimellitic anhydride), 1,10- (decamethylene) bis (trimellitic anhydride), 1,12- (dodecamethylene) bis (trimellitic anhydride), 1,16- (hexadeca) And methylene) bis (trimellitate anhydride) and 1,18- (octadecamethylene) bis (trimellitate anhydride).
トリカルボン酸無水物としては、例えば、トリメリット酸無水物や核水添トリメリット酸無水物などが挙げられる。
Examples of the tricarboxylic acid anhydride include trimellitic acid anhydride and nuclear hydrogenated trimellitic acid anhydride.
アミン成分としては、脂肪族ジアミンや芳香族ジアミンなどのジアミン、脂肪族ポリエーテルアミンなどの多価アミンを用いることができるが、これらのアミンに限定されるものではない。また、これらのアミン成分は、単独でまたは組み合わせて使用してもよい。
As the amine component, diamines such as aliphatic diamines and aromatic diamines, and polyvalent amines such as aliphatic polyether amines can be used, but are not limited to these amines. These amine components may be used alone or in combination.
ジアミンとしては、例えば、p-フェニレンジアミン(PPD)、1,3-ジアミノベンゼン、2,4-トルエンジアミン、2,5-トルエンジアミン、2,6-トルエンジアミンなどのベンゼン核1つのジアミン、4,4’-ジアミノジフェニルエーテル、3,3’-ジアミノジフェニルエーテル、3,4’-ジアミノジフェニルエーテルなどのジアミノジフェニルエーテル類、4,4’-ジアミノジフェニルメタン、3,3’-ジメチル-4,4’-ジアミノビフェニル、2,2’-ジメチル-4,4’-ジアミノビフェニル、2,2’-ビス(トリフルオロメチル)-4,4’-ジアミノビフェニル、3,3’-ジメチル-4,4’-ジアミノジフェニルメタン、3,3’,5,5’-テトラメチル-4,4’-ジアミノジフェニルメタン、ビス(4-アミノフェニル)スルフィド、4,4’-ジアミノベンズアニリド、3,3’-ジクロロベンジジン、3,3’-ジメチルベンジジン(o-トリジン)、2,2’-ジメチルベンジジン(m-トリジン)、3,3’-ジメトキシベンジジン、2,2’-ジメトキシベンジジン、3,3’-ジアミノジフェニルエーテル、3,4’-ジアミノジフェニルエーテル、4,4’-ジアミノジフェニルエーテル、3,3’-ジアミノジフェニルスルフィド、3,4’-ジアミノジフェニルスルフィド、4,4’-ジアミノジフェニルスルフィド、3,3’-ジアミノジフェニルスルホン、3,4’-ジアミノジフェニルスルホン、4,4’-ジアミノジフェニルスルホン、3,3’-ジアミノベンゾフェノン、3,3’-ジアミノ-4,4’-ジクロロベンゾフェノン、3,3’-ジアミノ-4,4’-ジメトキシベンゾフェノン、3,3’-ジアミノジフェニルメタン、3,4’-ジアミノジフェニルメタン、4,4’-ジアミノジフェニルメタン、2,2-ビス(3-アミノフェニル)プロパン、2,2-ビス(4-アミノフェニル)プロパン、2,2-ビス(3-アミノフェニル)-1,1,1,3,3,3-ヘキサフルオロプロパン、2,2-ビス(4-アミノフェニル)-1,1,1,3,3,3-ヘキサフルオロプロパン、3,3’-ジアミノジフェニルスルホキシド、3,4’-ジアミノジフェニルスルホキシド、4,4’-ジアミノジフェニルスルホキシド、3,3’-ジカルボキシ-4,4’-ジアミノジフェニルメタンなどのベンゼン核2つのジアミン、1,3-ビス(3-アミノフェニル)ベンゼン、1,3-ビス(4-アミノフェニル)ベンゼン、1,4-ビス(3-アミノフェニル)ベンゼン、1,4-ビス(4-アミノフェニル)ベンゼン、1,3-ビス(4-アミノフェノキシ)ベンゼン、1,4-ビス(3-アミノフェノキシ)ベンゼン、1,4-ビス(4-アミノフェノキシ)ベンゼン、1,3-ビス(3-アミノフェノキシ)-4-トリフルオロメチルベンゼン、3,3’-ジアミノ-4-(4-フェニル)フェノキシベンゾフェノン、3,3’-ジアミノ-4,4’-ジ(4-フェニルフェノキシ)ベンゾフェノン、1,3-ビス(3-アミノフェニルスルフィド)ベンゼン、1,3-ビス(4-アミノフェニルスルフィド)ベンゼン、1,4-ビス(4-アミノフェニルスルフィド)ベンゼン、1,3-ビス(3-アミノフェニルスルホン)ベンゼン、1,3-ビス(4-アミノフェニルスルホン)ベンゼン、1,4-ビス(4-アミノフェニルスルホン)ベンゼン、1,3-ビス〔2-(4-アミノフェニル)イソプロピル〕ベンゼン、1,4-ビス〔2-(3-アミノフェニル)イソプロピル〕ベンゼン、1,4-ビス〔2-(4-アミノフェニル)イソプロピル〕ベンゼンなどのベンゼン核3つのジアミン、3,3’-ビス(3-アミノフェノキシ)ビフェニル、3,3’-ビス(4-アミノフェノキシ)ビフェニル、4,4’-ビス(3-アミノフェノキシ)ビフェニル、4,4’-ビス(4-アミノフェノキシ)ビフェニル、ビス〔3-(3-アミノフェノキシ)フェニル〕エーテル、ビス〔3-(4-アミノフェノキシ)フェニル〕エーテル、ビス〔4-(3-アミノフェノキシ)フェニル〕エーテル、ビス〔4-(4-アミノフェノキシ)フェニル〕エーテル、ビス〔3-(3-アミノフェノキシ)フェニル〕ケトン、ビス〔3-(4-アミノフェノキシ)フェニル〕ケトン、ビス〔4-(3-アミノフェノキシ)フェニル〕ケトン、ビス〔4-(4-アミノフェノキシ)フェニル〕ケトン、ビス〔3-(3-アミノフェノキシ)フェニル〕スルフィド、ビス〔3-(4-アミノフェノキシ)フェニル〕スルフィド、ビス〔4-(3-アミノフェノキシ)フェニル〕スルフィド、ビス〔4-(4-アミノフェノキシ)フェニル〕スルフィド、ビス〔3-(3-アミノフェノキシ)フェニル〕スルホン、ビス〔3-(4-アミノフェノキシ)フェニル〕スルホン、ビス〔4-(3-アミノフェノキシ)フェニル〕スルホン、ビス〔4-(4-アミノフェノキシ)フェニル〕スルホン、ビス〔3-(3-アミノフェノキシ)フェニル〕メタン、ビス〔3-(4-アミノフェノキシ)フェニル〕メタン、ビス〔4-(3-アミノフェノキシ)フェニル〕メタン、ビス〔4-(4-アミノフェノキシ)フェニル〕メタン、2,2-ビス〔3-(3-アミノフェノキシ)フェニル〕プロパン、2,2-ビス〔3-(4-アミノフェノキシ)フェニル〕プロパン、2,2-ビス〔4-(3-アミノフェノキシ)フェニル〕プロパン、2,2-ビス〔4-(4-アミノフェノキシ)フェニル〕プロパン、2,2-ビス〔3-(3-アミノフェノキシ)フェニル〕-1,1,1,3,3,3-ヘキサフルオロプロパン、2,2-ビス〔3-(4-アミノフェノキシ)フェニル〕-1,1,1,3,3,3-ヘキサフルオロプロパン、2,2-ビス〔4-(3-アミノフェノキシ)フェニル〕-1,1,1,3,3,3-ヘキサフルオロプロパン、2,2-ビス〔4-(4-アミノフェノキシ)フェニル〕-1,1,1,3,3,3-ヘキサフルオロプロパンなどのベンゼン核4つのジアミンなどの芳香族ジアミン、1,2-ジアミノエタン、1,3-ジアミノプロパン、1,4-ジアミノブタン、1,5-ジアミノペンタン、1,6-ジアミノヘキサン、1,7-ジアミノヘプタン、1,8-ジアミノオクタン、1,9-ジアミノノナン、1,10-ジアミノデカン、1,11-ジアミノウンデカン、1,12-ジアミノドデカン、1,2-ジアミノシクロヘキサン等の脂肪族ジアミンが挙げられ、脂肪族ポリエーテルアミンとしては、エチレングリコール及び/又はプロピレングリコール系の多価アミン等が挙げられる。
また、下記の様に、カルボキシル基を有するアミンを用いることもできる。カルボキシル基を有するアミンとしては、3,5-ジアミノ安息香酸、2,5-ジアミノ安息香酸、3,4-ジアミノ安息香酸等のジアミノ安息香酸類、3,5-ビス(3-アミノフェノキシ)安息香酸、3,5-ビス(4-アミノフェノキシ)安息香酸等のアミノフェノキシ安息香酸類、3,3’-ジアミノ-4,4’-ジカルボキシビフェニル、4,4’-ジアミノ-3,3’-ジカルボキシビフェニル、4,4’-ジアミノ-2,2’-ジカルボキシビフェニル、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシビフェニル等のカルボキシビフェニル化合物類、3,3’-ジアミノ-4,4’-ジカルボキシジフェニルメタン、3,3’-ジカルボキシ-4,4’-ジアミノジフェニルメタン、2,2-ビス[3-アミノ-4-カルボキシフェニル]プロパン、2,2-ビス[4-アミノ-3-カルボキシフェニル]プロパン、2,2-ビス[3-アミノ-4-カルボキシフェニル]ヘキサフルオロプロパン、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシジフェニルメタン等のカルボキシジフェニルメタン等のカルボキシジフェニルアルカン類、3,3’-ジアミノ-4,4’-ジカルボキシジフェニルエーテル、4,4’-ジアミノ-3,3’-ジカルボキシジフェニルエーテル、4,4’-ジアミノ-2,2’-ジカルボキシジフェニルエーテル、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシジフェニルエーテル等のカルボキシジフェニルエーテル化合物、3,3’-ジアミノ-4,4’-ジカルボキシジフェニルスルフォン、4,4’-ジアミノ-3,3’-ジカルボキシジフェニルスルフォン、4,4’-ジアミノ-2,2’-ジカルボキシジフェニルスルフォン、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシジフェニルスルフォン等のジフェニルスルフォン化合物、2,2-ビス[4-(4-アミノ-3-カルボキシフェノキシ)フェニル]プロパン等のビス[(カルボキシフェニル)フェニル]アルカン化合物類、2,2-ビス[4-(4-アミノ-3-カルボキシフェノキシ)フェニル]スルフォン等のビス[(カルボキシフェノキシ)フェニル]スルフォン化合物等を挙げることができる。 Examples of the diamine include one diamine nucleus diamine such as p-phenylenediamine (PPD), 1,3-diaminobenzene, 2,4-toluenediamine, 2,5-toluenediamine, and 2,6-toluenediamine. , 4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether, diaminodiphenyl ethers such as 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenylmethane, 3,3'-dimethyl-4,4'-diaminobiphenyl 2,2′-dimethyl-4,4′-diaminobiphenyl, 2,2′-bis (trifluoromethyl) -4,4′-diaminobiphenyl, 3,3′-dimethyl-4,4′-diaminodiphenylmethane 3,3 ′, 5,5′-tetramethyl-4,4′-diaminodiphenylmethane, bis (4-amino Phenyl) sulfide, 4,4′-diaminobenzanilide, 3,3′-dichlorobenzidine, 3,3′-dimethylbenzidine (o-tolidine), 2,2′-dimethylbenzidine (m-tolidine), 3,3 '-Dimethoxybenzidine, 2,2'-dimethoxybenzidine, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl sulfide, 3,4' -Diaminodiphenyl sulfide, 4,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfone, 3,4'-diaminodiphenyl sulfone, 4,4'-diaminodiphenyl sulfone, 3,3'-diaminobenzophenone, 3, , 3'-Diamino-4,4'-dichlorobenzophenone, 3,3'-di Mino-4,4′-dimethoxybenzophenone, 3,3′-diaminodiphenylmethane, 3,4′-diaminodiphenylmethane, 4,4′-diaminodiphenylmethane, 2,2-bis (3-aminophenyl) propane, 2,2 -Bis (4-aminophenyl) propane, 2,2-bis (3-aminophenyl) -1,1,1,3,3,3-hexafluoropropane, 2,2-bis (4-aminophenyl)- 1,1,1,3,3,3-hexafluoropropane, 3,3′-diaminodiphenyl sulfoxide, 3,4′-diaminodiphenyl sulfoxide, 4,4′-diaminodiphenyl sulfoxide, 3,3′-dicarboxy Two diamine diamines such as -4,4'-diaminodiphenylmethane, 1,3-bis (3-aminophenyl) benzene, 1,3-bi (4-aminophenyl) benzene, 1,4-bis (3-aminophenyl) benzene, 1,4-bis (4-aminophenyl) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,4 -Bis (3-aminophenoxy) benzene, 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (3-aminophenoxy) -4-trifluoromethylbenzene, 3,3'-diamino-4 -(4-phenyl) phenoxybenzophenone, 3,3'-diamino-4,4'-di (4-phenylphenoxy) benzophenone, 1,3-bis (3-aminophenyl sulfide) benzene, 1,3-bis ( 4-aminophenyl sulfide) benzene, 1,4-bis (4-aminophenyl sulfide) benzene, 1,3-bis (3-aminophenylsulfone) ) Benzene, 1,3-bis (4-aminophenylsulfone) benzene, 1,4-bis (4-aminophenylsulfone) benzene, 1,3-bis [2- (4-aminophenyl) isopropyl] benzene, 1 Three diamine diamines such as 1,4-bis [2- (3-aminophenyl) isopropyl] benzene, 1,4-bis [2- (4-aminophenyl) isopropyl] benzene, 3,3′-bis (3 -Aminophenoxy) biphenyl, 3,3'-bis (4-aminophenoxy) biphenyl, 4,4'-bis (3-aminophenoxy) biphenyl, 4,4'-bis (4-aminophenoxy) biphenyl, bis [ 3- (3-aminophenoxy) phenyl] ether, bis [3- (4-aminophenoxy) phenyl] ether, bis [4- (3-aminophen Noxy) phenyl] ether, bis [4- (4-aminophenoxy) phenyl] ether, bis [3- (3-aminophenoxy) phenyl] ketone, bis [3- (4-aminophenoxy) phenyl] ketone, bis [ 4- (3-aminophenoxy) phenyl] ketone, bis [4- (4-aminophenoxy) phenyl] ketone, bis [3- (3-aminophenoxy) phenyl] sulfide, bis [3- (4-aminophenoxy) Phenyl] sulfide, bis [4- (3-aminophenoxy) phenyl] sulfide, bis [4- (4-aminophenoxy) phenyl] sulfide, bis [3- (3-aminophenoxy) phenyl] sulfone, bis [3- (4-Aminophenoxy) phenyl] sulfone, bis [4- (3-aminophenoxy) phenyl] Lufone, bis [4- (4-aminophenoxy) phenyl] sulfone, bis [3- (3-aminophenoxy) phenyl] methane, bis [3- (4-aminophenoxy) phenyl] methane, bis [4- (3 -Aminophenoxy) phenyl] methane, bis [4- (4-aminophenoxy) phenyl] methane, 2,2-bis [3- (3-aminophenoxy) phenyl] propane, 2,2-bis [3- (4 -Aminophenoxy) phenyl] propane, 2,2-bis [4- (3-aminophenoxy) phenyl] propane, 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 2,2-bis [ 3- (3-Aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoropropane, 2,2-bis [3- (4-aminophenoxy) phenyl Nyl] -1,1,1,3,3,3-hexafluoropropane, 2,2-bis [4- (3-aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoro Aromatic diamines such as propane, four diamines such as propane, 2,2-bis [4- (4-aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoropropane, 1,2, -Diaminoethane, 1,3-diaminopropane, 1,4-diaminobutane, 1,5-diaminopentane, 1,6-diaminohexane, 1,7-diaminoheptane, 1,8-diaminooctane, 1,9- Aliphatic diamines such as diaminononane, 1,10-diaminodecane, 1,11-diaminoundecane, 1,12-diaminododecane, 1,2-diaminocyclohexane Examples of ether amines include ethylene glycol and / or propylene glycol-based polyvalent amines.
Moreover, the amine which has a carboxyl group can also be used as follows. Examples of amines having a carboxyl group include 3,5-diaminobenzoic acid, 2,5-diaminobenzoic acid, diaminobenzoic acids such as 3,4-diaminobenzoic acid, and 3,5-bis (3-aminophenoxy) benzoic acid. Aminophenoxybenzoic acids such as 3,5-bis (4-aminophenoxy) benzoic acid, 3,3′-diamino-4,4′-dicarboxybiphenyl, 4,4′-diamino-3,3′-di Carboxybiphenyl compounds such as carboxybiphenyl, 4,4′-diamino-2,2′-dicarboxybiphenyl, 4,4′-diamino-2,2 ′, 5,5′-tetracarboxybiphenyl, 3,3 ′ -Diamino-4,4'-dicarboxydiphenylmethane, 3,3'-dicarboxy-4,4'-diaminodiphenylmethane, 2,2-bis [3-amino-4-carboxyphenyl] pro 2,2-bis [4-amino-3-carboxyphenyl] propane, 2,2-bis [3-amino-4-carboxyphenyl] hexafluoropropane, 4,4′-diamino-2,2 ′, Carboxydiphenylalkanes such as carboxydiphenylmethane such as 5,5′-tetracarboxydiphenylmethane, 3,3′-diamino-4,4′-dicarboxydiphenyl ether, 4,4′-diamino-3,3′-dicarboxydiphenyl ether Carboxydiphenyl ether compounds such as 4,4′-diamino-2,2′-dicarboxydiphenyl ether, 4,4′-diamino-2,2 ′, 5,5′-tetracarboxydiphenyl ether, 3,3′-diamino- 4,4'-dicarboxydiphenylsulfone, 4,4'-diamino-3,3'-dicarboxydiphenyl Diphenylsulfone compounds such as ruphone, 4,4′-diamino-2,2′-dicarboxydiphenylsulfone, 4,4′-diamino-2,2 ′, 5,5′-tetracarboxydiphenylsulfone, 2,2- Bis [(carboxyphenyl) phenyl] alkane compounds such as bis [4- (4-amino-3-carboxyphenoxy) phenyl] propane, 2,2-bis [4- (4-amino-3-carboxyphenoxy) phenyl And bis [(carboxyphenoxy) phenyl] sulfone compounds such as sulfone.
また、下記の様に、カルボキシル基を有するアミンを用いることもできる。カルボキシル基を有するアミンとしては、3,5-ジアミノ安息香酸、2,5-ジアミノ安息香酸、3,4-ジアミノ安息香酸等のジアミノ安息香酸類、3,5-ビス(3-アミノフェノキシ)安息香酸、3,5-ビス(4-アミノフェノキシ)安息香酸等のアミノフェノキシ安息香酸類、3,3’-ジアミノ-4,4’-ジカルボキシビフェニル、4,4’-ジアミノ-3,3’-ジカルボキシビフェニル、4,4’-ジアミノ-2,2’-ジカルボキシビフェニル、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシビフェニル等のカルボキシビフェニル化合物類、3,3’-ジアミノ-4,4’-ジカルボキシジフェニルメタン、3,3’-ジカルボキシ-4,4’-ジアミノジフェニルメタン、2,2-ビス[3-アミノ-4-カルボキシフェニル]プロパン、2,2-ビス[4-アミノ-3-カルボキシフェニル]プロパン、2,2-ビス[3-アミノ-4-カルボキシフェニル]ヘキサフルオロプロパン、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシジフェニルメタン等のカルボキシジフェニルメタン等のカルボキシジフェニルアルカン類、3,3’-ジアミノ-4,4’-ジカルボキシジフェニルエーテル、4,4’-ジアミノ-3,3’-ジカルボキシジフェニルエーテル、4,4’-ジアミノ-2,2’-ジカルボキシジフェニルエーテル、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシジフェニルエーテル等のカルボキシジフェニルエーテル化合物、3,3’-ジアミノ-4,4’-ジカルボキシジフェニルスルフォン、4,4’-ジアミノ-3,3’-ジカルボキシジフェニルスルフォン、4,4’-ジアミノ-2,2’-ジカルボキシジフェニルスルフォン、4,4’-ジアミノ-2,2’,5,5’-テトラカルボキシジフェニルスルフォン等のジフェニルスルフォン化合物、2,2-ビス[4-(4-アミノ-3-カルボキシフェノキシ)フェニル]プロパン等のビス[(カルボキシフェニル)フェニル]アルカン化合物類、2,2-ビス[4-(4-アミノ-3-カルボキシフェノキシ)フェニル]スルフォン等のビス[(カルボキシフェノキシ)フェニル]スルフォン化合物等を挙げることができる。 Examples of the diamine include one diamine nucleus diamine such as p-phenylenediamine (PPD), 1,3-diaminobenzene, 2,4-toluenediamine, 2,5-toluenediamine, and 2,6-toluenediamine. , 4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether, diaminodiphenyl ethers such as 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenylmethane, 3,3'-dimethyl-4,4'-diaminobiphenyl 2,2′-dimethyl-4,4′-diaminobiphenyl, 2,2′-bis (trifluoromethyl) -4,4′-diaminobiphenyl, 3,3′-dimethyl-4,4′-diaminodiphenylmethane 3,3 ′, 5,5′-tetramethyl-4,4′-diaminodiphenylmethane, bis (4-amino Phenyl) sulfide, 4,4′-diaminobenzanilide, 3,3′-dichlorobenzidine, 3,3′-dimethylbenzidine (o-tolidine), 2,2′-dimethylbenzidine (m-tolidine), 3,3 '-Dimethoxybenzidine, 2,2'-dimethoxybenzidine, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl sulfide, 3,4' -Diaminodiphenyl sulfide, 4,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfone, 3,4'-diaminodiphenyl sulfone, 4,4'-diaminodiphenyl sulfone, 3,3'-diaminobenzophenone, 3, , 3'-Diamino-4,4'-dichlorobenzophenone, 3,3'-di Mino-4,4′-dimethoxybenzophenone, 3,3′-diaminodiphenylmethane, 3,4′-diaminodiphenylmethane, 4,4′-diaminodiphenylmethane, 2,2-bis (3-aminophenyl) propane, 2,2 -Bis (4-aminophenyl) propane, 2,2-bis (3-aminophenyl) -1,1,1,3,3,3-hexafluoropropane, 2,2-bis (4-aminophenyl)- 1,1,1,3,3,3-hexafluoropropane, 3,3′-diaminodiphenyl sulfoxide, 3,4′-diaminodiphenyl sulfoxide, 4,4′-diaminodiphenyl sulfoxide, 3,3′-dicarboxy Two diamine diamines such as -4,4'-diaminodiphenylmethane, 1,3-bis (3-aminophenyl) benzene, 1,3-bi (4-aminophenyl) benzene, 1,4-bis (3-aminophenyl) benzene, 1,4-bis (4-aminophenyl) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,4 -Bis (3-aminophenoxy) benzene, 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (3-aminophenoxy) -4-trifluoromethylbenzene, 3,3'-diamino-4 -(4-phenyl) phenoxybenzophenone, 3,3'-diamino-4,4'-di (4-phenylphenoxy) benzophenone, 1,3-bis (3-aminophenyl sulfide) benzene, 1,3-bis ( 4-aminophenyl sulfide) benzene, 1,4-bis (4-aminophenyl sulfide) benzene, 1,3-bis (3-aminophenylsulfone) ) Benzene, 1,3-bis (4-aminophenylsulfone) benzene, 1,4-bis (4-aminophenylsulfone) benzene, 1,3-bis [2- (4-aminophenyl) isopropyl] benzene, 1 Three diamine diamines such as 1,4-bis [2- (3-aminophenyl) isopropyl] benzene, 1,4-bis [2- (4-aminophenyl) isopropyl] benzene, 3,3′-bis (3 -Aminophenoxy) biphenyl, 3,3'-bis (4-aminophenoxy) biphenyl, 4,4'-bis (3-aminophenoxy) biphenyl, 4,4'-bis (4-aminophenoxy) biphenyl, bis [ 3- (3-aminophenoxy) phenyl] ether, bis [3- (4-aminophenoxy) phenyl] ether, bis [4- (3-aminophen Noxy) phenyl] ether, bis [4- (4-aminophenoxy) phenyl] ether, bis [3- (3-aminophenoxy) phenyl] ketone, bis [3- (4-aminophenoxy) phenyl] ketone, bis [ 4- (3-aminophenoxy) phenyl] ketone, bis [4- (4-aminophenoxy) phenyl] ketone, bis [3- (3-aminophenoxy) phenyl] sulfide, bis [3- (4-aminophenoxy) Phenyl] sulfide, bis [4- (3-aminophenoxy) phenyl] sulfide, bis [4- (4-aminophenoxy) phenyl] sulfide, bis [3- (3-aminophenoxy) phenyl] sulfone, bis [3- (4-Aminophenoxy) phenyl] sulfone, bis [4- (3-aminophenoxy) phenyl] Lufone, bis [4- (4-aminophenoxy) phenyl] sulfone, bis [3- (3-aminophenoxy) phenyl] methane, bis [3- (4-aminophenoxy) phenyl] methane, bis [4- (3 -Aminophenoxy) phenyl] methane, bis [4- (4-aminophenoxy) phenyl] methane, 2,2-bis [3- (3-aminophenoxy) phenyl] propane, 2,2-bis [3- (4 -Aminophenoxy) phenyl] propane, 2,2-bis [4- (3-aminophenoxy) phenyl] propane, 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 2,2-bis [ 3- (3-Aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoropropane, 2,2-bis [3- (4-aminophenoxy) phenyl Nyl] -1,1,1,3,3,3-hexafluoropropane, 2,2-bis [4- (3-aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoro Aromatic diamines such as propane, four diamines such as propane, 2,2-bis [4- (4-aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoropropane, 1,2, -Diaminoethane, 1,3-diaminopropane, 1,4-diaminobutane, 1,5-diaminopentane, 1,6-diaminohexane, 1,7-diaminoheptane, 1,8-diaminooctane, 1,9- Aliphatic diamines such as diaminononane, 1,10-diaminodecane, 1,11-diaminoundecane, 1,12-diaminododecane, 1,2-diaminocyclohexane Examples of ether amines include ethylene glycol and / or propylene glycol-based polyvalent amines.
Moreover, the amine which has a carboxyl group can also be used as follows. Examples of amines having a carboxyl group include 3,5-diaminobenzoic acid, 2,5-diaminobenzoic acid, diaminobenzoic acids such as 3,4-diaminobenzoic acid, and 3,5-bis (3-aminophenoxy) benzoic acid. Aminophenoxybenzoic acids such as 3,5-bis (4-aminophenoxy) benzoic acid, 3,3′-diamino-4,4′-dicarboxybiphenyl, 4,4′-diamino-3,3′-di Carboxybiphenyl compounds such as carboxybiphenyl, 4,4′-diamino-2,2′-dicarboxybiphenyl, 4,4′-diamino-2,2 ′, 5,5′-tetracarboxybiphenyl, 3,3 ′ -Diamino-4,4'-dicarboxydiphenylmethane, 3,3'-dicarboxy-4,4'-diaminodiphenylmethane, 2,2-bis [3-amino-4-carboxyphenyl] pro 2,2-bis [4-amino-3-carboxyphenyl] propane, 2,2-bis [3-amino-4-carboxyphenyl] hexafluoropropane, 4,4′-diamino-2,2 ′, Carboxydiphenylalkanes such as carboxydiphenylmethane such as 5,5′-tetracarboxydiphenylmethane, 3,3′-diamino-4,4′-dicarboxydiphenyl ether, 4,4′-diamino-3,3′-dicarboxydiphenyl ether Carboxydiphenyl ether compounds such as 4,4′-diamino-2,2′-dicarboxydiphenyl ether, 4,4′-diamino-2,2 ′, 5,5′-tetracarboxydiphenyl ether, 3,3′-diamino- 4,4'-dicarboxydiphenylsulfone, 4,4'-diamino-3,3'-dicarboxydiphenyl Diphenylsulfone compounds such as ruphone, 4,4′-diamino-2,2′-dicarboxydiphenylsulfone, 4,4′-diamino-2,2 ′, 5,5′-tetracarboxydiphenylsulfone, 2,2- Bis [(carboxyphenyl) phenyl] alkane compounds such as bis [4- (4-amino-3-carboxyphenoxy) phenyl] propane, 2,2-bis [4- (4-amino-3-carboxyphenoxy) phenyl And bis [(carboxyphenoxy) phenyl] sulfone compounds such as sulfone.
イソシアネート成分としては、芳香族ジイソシアネート及びその異性体や多量体、脂肪族ジイソシアネート類、脂環式ジイソシアネート類及びその異性体などのジイソシアネートやその他汎用のジイソシアネート類を用いることができるが、これらのイソシアネートに限定されるものではない。また、これらのイソシアネート成分は、単独でまたは組み合わせて使用してもよい。
ジイソシアネートとして、例えば4,4’-ジフェニルメタンジイソシアネート、トリレンジイソシアネート、ナフタレンジイソシアネート、キシリレンジイソシアネート、ビフェニルジイソシアネート、ジフェニルスルホンジイソシアネート、ジフェニルエーテルジイソシアネートなどの芳香族ジイソシアネート及びその異性体、多量体、ヘキサメチレンジイソシアネート、イソホロンジイソシアネート、ジシクロヘキシルメタンジイソシアネートなどの脂肪族ジイソシアネート類、あるいは前記芳香族ジイソシアネートを水添した脂環式ジイソシアネート類及び異性体、もしくはその他汎用のジイソシアネート類が挙げられる。 Diisocyanates such as aromatic diisocyanates and isomers and multimers, aliphatic diisocyanates, alicyclic diisocyanates and isomers thereof, and other general-purpose diisocyanates can be used as the isocyanate component. It is not limited. These isocyanate components may be used alone or in combination.
Examples of diisocyanates include aromatic diisocyanates such as 4,4′-diphenylmethane diisocyanate, tolylene diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, biphenyl diisocyanate, diphenyl sulfone diisocyanate, diphenyl ether diisocyanate, and isomers, multimers, hexamethylene diisocyanate, and isophorone. Aliphatic diisocyanates such as diisocyanate and dicyclohexylmethane diisocyanate, alicyclic diisocyanates and isomers obtained by hydrogenation of the aromatic diisocyanate, or other general-purpose diisocyanates can be mentioned.
ジイソシアネートとして、例えば4,4’-ジフェニルメタンジイソシアネート、トリレンジイソシアネート、ナフタレンジイソシアネート、キシリレンジイソシアネート、ビフェニルジイソシアネート、ジフェニルスルホンジイソシアネート、ジフェニルエーテルジイソシアネートなどの芳香族ジイソシアネート及びその異性体、多量体、ヘキサメチレンジイソシアネート、イソホロンジイソシアネート、ジシクロヘキシルメタンジイソシアネートなどの脂肪族ジイソシアネート類、あるいは前記芳香族ジイソシアネートを水添した脂環式ジイソシアネート類及び異性体、もしくはその他汎用のジイソシアネート類が挙げられる。 Diisocyanates such as aromatic diisocyanates and isomers and multimers, aliphatic diisocyanates, alicyclic diisocyanates and isomers thereof, and other general-purpose diisocyanates can be used as the isocyanate component. It is not limited. These isocyanate components may be used alone or in combination.
Examples of diisocyanates include aromatic diisocyanates such as 4,4′-diphenylmethane diisocyanate, tolylene diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, biphenyl diisocyanate, diphenyl sulfone diisocyanate, diphenyl ether diisocyanate, and isomers, multimers, hexamethylene diisocyanate, and isophorone. Aliphatic diisocyanates such as diisocyanate and dicyclohexylmethane diisocyanate, alicyclic diisocyanates and isomers obtained by hydrogenation of the aromatic diisocyanate, or other general-purpose diisocyanates can be mentioned.
イミド環を有するアルカリ可溶性樹脂はアミド結合を有していてもよい。これはイソシアネートとカルボン酸を反応させて得られるアミド結合であってもよく、それ以外の反応によるものでもよい。さらにその他の付加および縮合からなる結合を有していてもよい。
The alkali-soluble resin having an imide ring may have an amide bond. This may be an amide bond obtained by reacting an isocyanate and a carboxylic acid, or may be caused by other reaction. Furthermore, you may have the coupling | bonding which consists of another addition and condensation.
イミド環を有するアルカリ可溶性樹脂の合成には、公知慣用のカルボキシル基及び/又は酸無水物基を有するアルカリ溶解性ポリマー、オリゴマー、モノマーを用いてもよく、例えばこれらの公知慣用のアルカリ溶解性樹脂類を単独でもしくは上記のカルボン酸無水物成分と組み合わせて、上記のアミン/イソシアネート類と反応させて得られる樹脂であってもよい。
For the synthesis of an alkali-soluble resin having an imide ring, a known and commonly used alkali-soluble polymer, oligomer or monomer having a carboxyl group and / or an acid anhydride group may be used. For example, these known and commonly used alkali-soluble resins may be used. Resins obtained by reacting with amines / isocyanates described above alone or in combination with the above carboxylic anhydride component may be used.
イミド環を有するアルカリ可溶性樹脂は、アルカリ現像工程に対応するために、その酸価が20~200mgKOH/gであることが好ましく、より好適には60~150mgKOH/gであることが好ましい。この酸価が20mgKOH/g以上の場合、アルカリに対する溶解性が増加し、現像性が良好となり、さらには、光照射後の熱硬化成分との架橋度が高くなるため、十分な現像コントラストを得ることができる。また、この酸価が200mgKOH/g以下の場合には、後述する光照射後のPEB工程でのいわゆる熱かぶりを抑制でき、プロセスマージンが大きくなる。
The alkali-soluble resin having an imide ring preferably has an acid value of 20 to 200 mgKOH / g, more preferably 60 to 150 mgKOH / g in order to cope with the alkali development step. When the acid value is 20 mgKOH / g or more, the solubility in alkali increases, the developability becomes good, and further, the degree of crosslinking with the thermosetting component after light irradiation becomes high, so that sufficient development contrast is obtained. be able to. Moreover, when this acid value is 200 mgKOH / g or less, what is called a hot fog in the PEB process after light irradiation mentioned later can be suppressed, and a process margin becomes large.
また、イミド環を有するアルカリ可溶性樹脂の分子量は、現像性と硬化塗膜特性を考慮すると、質量平均分子量1,000~100,000が好ましく、さらに2,000~50,000がより好ましい。
この分子量が1,000以上の場合、露光・PEB後に十分な耐現像性と硬化物性を得ることができる。また、分子量が100,000以下の場合、アルカリ溶解性が増加し、現像性が向上する。 The molecular weight of the alkali-soluble resin having an imide ring is preferably from 1,000 to 100,000, more preferably from 2,000 to 50,000, considering developability and cured coating film characteristics.
When the molecular weight is 1,000 or more, sufficient development resistance and cured properties can be obtained after exposure and PEB. On the other hand, when the molecular weight is 100,000 or less, alkali solubility increases and developability improves.
この分子量が1,000以上の場合、露光・PEB後に十分な耐現像性と硬化物性を得ることができる。また、分子量が100,000以下の場合、アルカリ溶解性が増加し、現像性が向上する。 The molecular weight of the alkali-soluble resin having an imide ring is preferably from 1,000 to 100,000, more preferably from 2,000 to 50,000, considering developability and cured coating film characteristics.
When the molecular weight is 1,000 or more, sufficient development resistance and cured properties can be obtained after exposure and PEB. On the other hand, when the molecular weight is 100,000 or less, alkali solubility increases and developability improves.
[他のアルカリ可溶性樹脂]
本発明において、他のアルカリ可溶性樹脂とは、上記イミド環を有するアルカリ可溶性樹脂以外のアルカリ可溶性樹脂である。アルカリ可溶性樹脂は、カルボキシル基や酸無水物基などのアルカリ溶解性基を有し、未硬化の状態ではアルカリ溶液に可溶である樹脂である。好ましくは、構造中にウレタン結合、ビスフェノールA骨格、ビスフェノールF骨格、ビスフェノールS骨格、ビフェニル骨格のいずれか1種以上を有する。これらの結合ないし骨格を有するアルカリ可溶性樹脂は、イミド環を有するアルカリ可溶性樹脂よりも、カルボキシル基の反応性が低く、熱硬化成分との付加反応が比較的遅く進行することから、イミド環を有するもの以外のアルカリ可溶性樹脂が存在すると、存在しない場合に比べて、PEB工程時に加熱時間を長くとることができ、また、PEB工程時に加熱温度の選択幅を広げることが可能となる。
また、加熱時のダレ発生防止効果向上の点から、他のアルカリ可溶性樹脂は分子中にエチレン性不飽和二重結合を有することが好ましい。エチレン性不飽和二重結合としては、(メタ)アクリル酸もしくは(メタ)アクリル酸誘導体由来のものが好ましい。エチレン性不飽和二重結合を有することにより、本発明の感光性熱硬化性樹脂組成物を光照射後の現像に続いて加熱硬化させる際に、加熱によって樹脂が溶け出し、現像により形成されたパターンが崩れるという、いわゆるダレの発生を抑制することができる。
本発明に係る他のアルカリ可溶性樹脂は、アルカリ可溶性樹脂、エポキシ当量190g/eqのビスフェノールA型エポキシ樹脂、および、オキシムエステル系光塩基発生剤を混合してなる組成物とした場合の未露光時の反応開始温度が75℃以上のものが好ましい。具体的には、アルカリ可溶性樹脂とエポキシ当量約190g/eq(184~194g/eq)のビスフェノールA型エポキシ樹脂とが、カルボキシル基とエポキシ基が当量比1:1となるように含まれ、アルカリ可溶性樹脂100質量部に対してオキシムエステル系光塩基発生剤が10質量部含まれる組成物の未露光時の反応開始温度が75℃以上のものが好ましい。
反応開始温度の測定は、上記のようなアルカリ可溶性樹脂、エポキシ樹脂および光塩基発生剤を含む組成物を感光しないように、DSC(示差走査熱量計)測定容器に採取し、DSCにより25℃から200℃(昇温条件5℃/分)における反応熱を測定することにより行う。このように測定して得られたDSCチャート図で示差走査熱が最小値となる点の温度を反応開始温度とする。
未露光の状態で、カルボキシル基と、熱硬化成分中のカルボキシル基と反応する官能基との反応開始温度が75℃以上であることで、後述するPEB工程における未露光部のアルカリ溶解性を十分に維持することができ、また、PEB工程における加熱温度の選択幅を大きくとることができる。 [Other alkali-soluble resins]
In the present invention, the other alkali-soluble resin is an alkali-soluble resin other than the alkali-soluble resin having the imide ring. The alkali-soluble resin is a resin that has an alkali-soluble group such as a carboxyl group or an acid anhydride group and is soluble in an alkali solution in an uncured state. Preferably, the structure has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton. The alkali-soluble resin having these bonds or skeletons has an imide ring because the reactivity of the carboxyl group is lower than that of the alkali-soluble resin having an imide ring and the addition reaction with the thermosetting component proceeds relatively slowly. When an alkali-soluble resin other than those is present, the heating time can be increased during the PEB process, and the range of selection of the heating temperature can be expanded during the PEB process, compared with the case where no alkali-soluble resin is present.
Moreover, it is preferable that other alkali-soluble resin has an ethylenically unsaturated double bond in a molecule | numerator from the point of the improvement effect of droop generation | occurrence | production at the time of a heating. As the ethylenically unsaturated double bond, those derived from (meth) acrylic acid or (meth) acrylic acid derivatives are preferable. By having an ethylenically unsaturated double bond, when the photosensitive thermosetting resin composition of the present invention was heat-cured following development after light irradiation, the resin was dissolved by heating and formed by development. It is possible to suppress the so-called sagging that the pattern is broken.
The other alkali-soluble resin according to the present invention is a composition obtained by mixing an alkali-soluble resin, a bisphenol A type epoxy resin having an epoxy equivalent of 190 g / eq, and an oxime ester photobase generator. The reaction starting temperature is preferably 75 ° C. or higher. Specifically, an alkali-soluble resin and a bisphenol A type epoxy resin having an epoxy equivalent of about 190 g / eq (184 to 194 g / eq) are contained so that the carboxyl group and the epoxy group have an equivalent ratio of 1: 1. A composition containing 10 parts by mass of the oxime ester photobase generator with respect to 100 parts by mass of the soluble resin preferably has a reaction start temperature of 75 ° C. or higher when not exposed.
The reaction start temperature is measured in a DSC (Differential Scanning Calorimeter) measurement container so that the composition containing the alkali-soluble resin, epoxy resin and photobase generator as described above is not exposed to light. This is carried out by measuring the heat of reaction at 200 ° C. (temperature raising condition 5 ° C./min). The temperature at the point where the differential scanning heat becomes the minimum value in the DSC chart obtained by such measurement is defined as the reaction start temperature.
In the unexposed state, the reaction start temperature of the carboxyl group and the functional group that reacts with the carboxyl group in the thermosetting component is 75 ° C. or higher, so that the alkali solubility in the unexposed area in the PEB process described below is sufficient. In addition, the selection range of the heating temperature in the PEB process can be increased.
本発明において、他のアルカリ可溶性樹脂とは、上記イミド環を有するアルカリ可溶性樹脂以外のアルカリ可溶性樹脂である。アルカリ可溶性樹脂は、カルボキシル基や酸無水物基などのアルカリ溶解性基を有し、未硬化の状態ではアルカリ溶液に可溶である樹脂である。好ましくは、構造中にウレタン結合、ビスフェノールA骨格、ビスフェノールF骨格、ビスフェノールS骨格、ビフェニル骨格のいずれか1種以上を有する。これらの結合ないし骨格を有するアルカリ可溶性樹脂は、イミド環を有するアルカリ可溶性樹脂よりも、カルボキシル基の反応性が低く、熱硬化成分との付加反応が比較的遅く進行することから、イミド環を有するもの以外のアルカリ可溶性樹脂が存在すると、存在しない場合に比べて、PEB工程時に加熱時間を長くとることができ、また、PEB工程時に加熱温度の選択幅を広げることが可能となる。
また、加熱時のダレ発生防止効果向上の点から、他のアルカリ可溶性樹脂は分子中にエチレン性不飽和二重結合を有することが好ましい。エチレン性不飽和二重結合としては、(メタ)アクリル酸もしくは(メタ)アクリル酸誘導体由来のものが好ましい。エチレン性不飽和二重結合を有することにより、本発明の感光性熱硬化性樹脂組成物を光照射後の現像に続いて加熱硬化させる際に、加熱によって樹脂が溶け出し、現像により形成されたパターンが崩れるという、いわゆるダレの発生を抑制することができる。
本発明に係る他のアルカリ可溶性樹脂は、アルカリ可溶性樹脂、エポキシ当量190g/eqのビスフェノールA型エポキシ樹脂、および、オキシムエステル系光塩基発生剤を混合してなる組成物とした場合の未露光時の反応開始温度が75℃以上のものが好ましい。具体的には、アルカリ可溶性樹脂とエポキシ当量約190g/eq(184~194g/eq)のビスフェノールA型エポキシ樹脂とが、カルボキシル基とエポキシ基が当量比1:1となるように含まれ、アルカリ可溶性樹脂100質量部に対してオキシムエステル系光塩基発生剤が10質量部含まれる組成物の未露光時の反応開始温度が75℃以上のものが好ましい。
反応開始温度の測定は、上記のようなアルカリ可溶性樹脂、エポキシ樹脂および光塩基発生剤を含む組成物を感光しないように、DSC(示差走査熱量計)測定容器に採取し、DSCにより25℃から200℃(昇温条件5℃/分)における反応熱を測定することにより行う。このように測定して得られたDSCチャート図で示差走査熱が最小値となる点の温度を反応開始温度とする。
未露光の状態で、カルボキシル基と、熱硬化成分中のカルボキシル基と反応する官能基との反応開始温度が75℃以上であることで、後述するPEB工程における未露光部のアルカリ溶解性を十分に維持することができ、また、PEB工程における加熱温度の選択幅を大きくとることができる。 [Other alkali-soluble resins]
In the present invention, the other alkali-soluble resin is an alkali-soluble resin other than the alkali-soluble resin having the imide ring. The alkali-soluble resin is a resin that has an alkali-soluble group such as a carboxyl group or an acid anhydride group and is soluble in an alkali solution in an uncured state. Preferably, the structure has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton. The alkali-soluble resin having these bonds or skeletons has an imide ring because the reactivity of the carboxyl group is lower than that of the alkali-soluble resin having an imide ring and the addition reaction with the thermosetting component proceeds relatively slowly. When an alkali-soluble resin other than those is present, the heating time can be increased during the PEB process, and the range of selection of the heating temperature can be expanded during the PEB process, compared with the case where no alkali-soluble resin is present.
Moreover, it is preferable that other alkali-soluble resin has an ethylenically unsaturated double bond in a molecule | numerator from the point of the improvement effect of droop generation | occurrence | production at the time of a heating. As the ethylenically unsaturated double bond, those derived from (meth) acrylic acid or (meth) acrylic acid derivatives are preferable. By having an ethylenically unsaturated double bond, when the photosensitive thermosetting resin composition of the present invention was heat-cured following development after light irradiation, the resin was dissolved by heating and formed by development. It is possible to suppress the so-called sagging that the pattern is broken.
The other alkali-soluble resin according to the present invention is a composition obtained by mixing an alkali-soluble resin, a bisphenol A type epoxy resin having an epoxy equivalent of 190 g / eq, and an oxime ester photobase generator. The reaction starting temperature is preferably 75 ° C. or higher. Specifically, an alkali-soluble resin and a bisphenol A type epoxy resin having an epoxy equivalent of about 190 g / eq (184 to 194 g / eq) are contained so that the carboxyl group and the epoxy group have an equivalent ratio of 1: 1. A composition containing 10 parts by mass of the oxime ester photobase generator with respect to 100 parts by mass of the soluble resin preferably has a reaction start temperature of 75 ° C. or higher when not exposed.
The reaction start temperature is measured in a DSC (Differential Scanning Calorimeter) measurement container so that the composition containing the alkali-soluble resin, epoxy resin and photobase generator as described above is not exposed to light. This is carried out by measuring the heat of reaction at 200 ° C. (
In the unexposed state, the reaction start temperature of the carboxyl group and the functional group that reacts with the carboxyl group in the thermosetting component is 75 ° C. or higher, so that the alkali solubility in the unexposed area in the PEB process described below is sufficient. In addition, the selection range of the heating temperature in the PEB process can be increased.
他のアルカリ可溶性樹脂の具体例としては、以下に(1)~(11)として列挙するような化合物(オリゴマー及びポリマーのいずれでもよい)が挙げられる。
Specific examples of other alkali-soluble resins include compounds (any of oligomers and polymers) listed below as (1) to (11).
(1)脂肪族ジイソシアネート、分岐脂肪族ジイソシアネート、脂環式ジイソシアネート、芳香族ジイソシアネート等のジイソシアネートと、ジメチロールプロピオン酸、ジメチロールブタン酸等のカルボキシル基含有ジアルコール化合物及びポリカーボネート系ポリオール、ポリエーテル系ポリオール、ポリエステル系ポリオール、ポリオレフィン系ポリオール、アクリル系ポリオール、ビスフェノールA系アルキレンオキシド付加体ジオール、フェノール性ヒドロキシル基及びアルコール性ヒドロキシル基を有する化合物等のジオール化合物の重付加反応によるカルボキシル基含有ウレタン樹脂。
(2)ジイソシアネートと、ビスフェノールA型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビキシレノール型エポキシ樹脂、ビフェノール型エポキシ樹脂等の2官能エポキシ樹脂の(メタ)アクリレートもしくはその部分酸無水物変性物、カルボキシル基含有ジアルコール化合物及びジオール化合物の重付加反応による感光性カルボキシル基含有ウレタン樹脂。
(3)上記(1)又は(2)の樹脂の合成中に、ヒドロキシアルキル(メタ)アクリレート等の分子内に1つの水酸基と1つ以上の(メタ)アクリル基を有する化合物を加え、末端(メタ)アクリル化した感光性カルボキシル基含有ウレタン樹脂。
(4)上記(1)又は(2)の樹脂の合成中に、イソホロンジイソシアネートとペンタエリスリトールトリアクリレートの等モル反応物など、分子内に1つのイソシアネート基と1つ以上の(メタ)アクリル基を有する化合物を加え、末端(メタ)アクリル化した感光性カルボキシル基含有ウレタン樹脂。
(5)(メタ)アクリル酸等の不飽和カルボン酸と、スチレン、α-メチルスチレン、低級アルキル(メタ)アクリレート、イソブチレン等の不飽和基含有化合物との共重合により得られるカルボキシル基含有樹脂。
(6)2官能又はそれ以上の多官能(固形)エポキシ樹脂に(メタ)アクリル酸を反応させ、側鎖に存在する水酸基に2塩基酸無水物を付加させた感光性カルボキシル基含有樹脂。
(7)2官能(固形)エポキシ樹脂の水酸基をさらにエピクロロヒドリンでエポキシ化した多官能エポキシ樹脂に(メタ)アクリル酸を反応させ、生じた水酸基に2塩基酸無水物を付加させた感光性カルボキシル基含有樹脂。
(8)2官能オキセタン樹脂にジカルボン酸を反応させ、生じた1級の水酸基に2塩基酸無水物を付加させたカルボキシル基含有ポリエステル樹脂。
(9)1分子中に複数のフェノール性水酸基を有する化合物と、エチレンオキシド、プロピレンオキシドなどのアルキレンオキシド及び/又はエチレンカーボネート、プロピレンカーボネートなどの環状カーボネート化合物を反応させて得られる反応生成物に不飽和基含有モノカルボン酸で部分エステル化し、得られた反応生成物に多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂。
(10)1分子中に複数のフェノール性水酸基を有する化合物と、エチレンオキシド、プロピレンオキシドなどのアルキレンオキシド及び/又はエチレンカーボネート、プロピレンカーボネートなどの環状カーボネート化合物を反応させて得られる反応生成物に多塩基酸無水物を反応させて得られるカルボキシル基含有樹脂。
(11)上記(5)~(10)の樹脂にさらに1分子内に1つのエポキシ基と1つ以上の(メタ)アクリル基を有する化合物を付加してなる感光性カルボキシル基含有樹脂。 (1) Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, polycarbonate polyols, and polyethers A carboxyl group-containing urethane resin by a polyaddition reaction of a diol compound such as a polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group.
(2) Diisocyanate and bifunctional epoxy resin such as bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin ( Photosensitive carboxyl group-containing urethane resin by polyaddition reaction of (meth) acrylate or its modified partial anhydride, carboxyl group-containing dialcohol compound and diol compound.
(3) During the synthesis of the resin of the above (1) or (2), a compound having one hydroxyl group and one or more (meth) acryl groups in a molecule such as hydroxyalkyl (meth) acrylate is added, and the terminal ( Photosensitive carboxyl group-containing urethane resin that has been meta-acrylated.
(4) During the synthesis of the resin of the above (1) or (2), one isocyanate group and one or more (meth) acryl groups are introduced into the molecule, such as an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate. The photosensitive carboxyl group-containing urethane resin which added the compound which has and was terminally (meth) acrylated.
(5) A carboxyl group-containing resin obtained by copolymerization of an unsaturated carboxylic acid such as (meth) acrylic acid and an unsaturated group-containing compound such as styrene, α-methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
(6) A photosensitive carboxyl group-containing resin obtained by reacting a bifunctional or higher polyfunctional (solid) epoxy resin with (meth) acrylic acid and adding a dibasic acid anhydride to a hydroxyl group present in the side chain.
(7) Photosensitivity in which (meth) acrylic acid is reacted with a polyfunctional epoxy resin obtained by epoxidizing the hydroxyl group of a bifunctional (solid) epoxy resin with epichlorohydrin, and a dibasic acid anhydride is added to the resulting hydroxyl group. Functional carboxyl group-containing resin.
(8) A carboxyl group-containing polyester resin obtained by reacting a difunctional oxetane resin with a dicarboxylic acid and adding a dibasic acid anhydride to the resulting primary hydroxyl group.
(9) Unsaturated reaction products obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate or propylene carbonate. A carboxyl group-containing photosensitive resin obtained by partial esterification with a group-containing monocarboxylic acid and reacting the resulting reaction product with a polybasic acid anhydride.
(10) A polybasic reaction product obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate or propylene carbonate. A carboxyl group-containing resin obtained by reacting an acid anhydride.
(11) A photosensitive carboxyl group-containing resin obtained by adding a compound having one epoxy group and one or more (meth) acryl groups in one molecule to the resins (5) to (10).
(2)ジイソシアネートと、ビスフェノールA型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビキシレノール型エポキシ樹脂、ビフェノール型エポキシ樹脂等の2官能エポキシ樹脂の(メタ)アクリレートもしくはその部分酸無水物変性物、カルボキシル基含有ジアルコール化合物及びジオール化合物の重付加反応による感光性カルボキシル基含有ウレタン樹脂。
(3)上記(1)又は(2)の樹脂の合成中に、ヒドロキシアルキル(メタ)アクリレート等の分子内に1つの水酸基と1つ以上の(メタ)アクリル基を有する化合物を加え、末端(メタ)アクリル化した感光性カルボキシル基含有ウレタン樹脂。
(4)上記(1)又は(2)の樹脂の合成中に、イソホロンジイソシアネートとペンタエリスリトールトリアクリレートの等モル反応物など、分子内に1つのイソシアネート基と1つ以上の(メタ)アクリル基を有する化合物を加え、末端(メタ)アクリル化した感光性カルボキシル基含有ウレタン樹脂。
(5)(メタ)アクリル酸等の不飽和カルボン酸と、スチレン、α-メチルスチレン、低級アルキル(メタ)アクリレート、イソブチレン等の不飽和基含有化合物との共重合により得られるカルボキシル基含有樹脂。
(6)2官能又はそれ以上の多官能(固形)エポキシ樹脂に(メタ)アクリル酸を反応させ、側鎖に存在する水酸基に2塩基酸無水物を付加させた感光性カルボキシル基含有樹脂。
(7)2官能(固形)エポキシ樹脂の水酸基をさらにエピクロロヒドリンでエポキシ化した多官能エポキシ樹脂に(メタ)アクリル酸を反応させ、生じた水酸基に2塩基酸無水物を付加させた感光性カルボキシル基含有樹脂。
(8)2官能オキセタン樹脂にジカルボン酸を反応させ、生じた1級の水酸基に2塩基酸無水物を付加させたカルボキシル基含有ポリエステル樹脂。
(9)1分子中に複数のフェノール性水酸基を有する化合物と、エチレンオキシド、プロピレンオキシドなどのアルキレンオキシド及び/又はエチレンカーボネート、プロピレンカーボネートなどの環状カーボネート化合物を反応させて得られる反応生成物に不飽和基含有モノカルボン酸で部分エステル化し、得られた反応生成物に多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂。
(10)1分子中に複数のフェノール性水酸基を有する化合物と、エチレンオキシド、プロピレンオキシドなどのアルキレンオキシド及び/又はエチレンカーボネート、プロピレンカーボネートなどの環状カーボネート化合物を反応させて得られる反応生成物に多塩基酸無水物を反応させて得られるカルボキシル基含有樹脂。
(11)上記(5)~(10)の樹脂にさらに1分子内に1つのエポキシ基と1つ以上の(メタ)アクリル基を有する化合物を付加してなる感光性カルボキシル基含有樹脂。 (1) Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, polycarbonate polyols, and polyethers A carboxyl group-containing urethane resin by a polyaddition reaction of a diol compound such as a polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group.
(2) Diisocyanate and bifunctional epoxy resin such as bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin ( Photosensitive carboxyl group-containing urethane resin by polyaddition reaction of (meth) acrylate or its modified partial anhydride, carboxyl group-containing dialcohol compound and diol compound.
(3) During the synthesis of the resin of the above (1) or (2), a compound having one hydroxyl group and one or more (meth) acryl groups in a molecule such as hydroxyalkyl (meth) acrylate is added, and the terminal ( Photosensitive carboxyl group-containing urethane resin that has been meta-acrylated.
(4) During the synthesis of the resin of the above (1) or (2), one isocyanate group and one or more (meth) acryl groups are introduced into the molecule, such as an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate. The photosensitive carboxyl group-containing urethane resin which added the compound which has and was terminally (meth) acrylated.
(5) A carboxyl group-containing resin obtained by copolymerization of an unsaturated carboxylic acid such as (meth) acrylic acid and an unsaturated group-containing compound such as styrene, α-methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
(6) A photosensitive carboxyl group-containing resin obtained by reacting a bifunctional or higher polyfunctional (solid) epoxy resin with (meth) acrylic acid and adding a dibasic acid anhydride to a hydroxyl group present in the side chain.
(7) Photosensitivity in which (meth) acrylic acid is reacted with a polyfunctional epoxy resin obtained by epoxidizing the hydroxyl group of a bifunctional (solid) epoxy resin with epichlorohydrin, and a dibasic acid anhydride is added to the resulting hydroxyl group. Functional carboxyl group-containing resin.
(8) A carboxyl group-containing polyester resin obtained by reacting a difunctional oxetane resin with a dicarboxylic acid and adding a dibasic acid anhydride to the resulting primary hydroxyl group.
(9) Unsaturated reaction products obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate or propylene carbonate. A carboxyl group-containing photosensitive resin obtained by partial esterification with a group-containing monocarboxylic acid and reacting the resulting reaction product with a polybasic acid anhydride.
(10) A polybasic reaction product obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide and / or a cyclic carbonate compound such as ethylene carbonate or propylene carbonate. A carboxyl group-containing resin obtained by reacting an acid anhydride.
(11) A photosensitive carboxyl group-containing resin obtained by adding a compound having one epoxy group and one or more (meth) acryl groups in one molecule to the resins (5) to (10).
他のアルカリ可溶性樹脂は、その酸価が20~200mgKOH/gであることが好ましく、より好適には40~150mgKOH/gである。酸価が上記の範囲内であると、アルカリ溶解性が良好で、アルカリ現像によるパターニングが容易となる。
また、他のアルカリ可溶性樹脂の質量平均分子量は、1,000~100,000が好ましく、さらに3,000~50,000が好ましい。分子量が上記の範囲内であると、アルカリ溶解性が良好で、アルカリ現像によるパターニングが容易となる。
他のアルカリ可溶性樹脂の含有量は、イミド環を有するアルカリ可溶性樹脂100質量部に対して10~70質量部であることが好ましい。上記範囲の含有量であることにより、PEB工程時に加熱時間を十分に長くとることができ、また、PEB工程時に加熱温度の選択幅を十分に広げることが可能となる。 The other alkali-soluble resin preferably has an acid value of 20 to 200 mgKOH / g, and more preferably 40 to 150 mgKOH / g. When the acid value is within the above range, the alkali solubility is good and patterning by alkali development becomes easy.
Further, the mass average molecular weight of the other alkali-soluble resin is preferably 1,000 to 100,000, and more preferably 3,000 to 50,000. When the molecular weight is within the above range, the alkali solubility is good and patterning by alkali development becomes easy.
The content of the other alkali-soluble resin is preferably 10 to 70 parts by mass with respect to 100 parts by mass of the alkali-soluble resin having an imide ring. When the content is in the above range, the heating time can be sufficiently long during the PEB process, and the selection range of the heating temperature can be sufficiently widened during the PEB process.
また、他のアルカリ可溶性樹脂の質量平均分子量は、1,000~100,000が好ましく、さらに3,000~50,000が好ましい。分子量が上記の範囲内であると、アルカリ溶解性が良好で、アルカリ現像によるパターニングが容易となる。
他のアルカリ可溶性樹脂の含有量は、イミド環を有するアルカリ可溶性樹脂100質量部に対して10~70質量部であることが好ましい。上記範囲の含有量であることにより、PEB工程時に加熱時間を十分に長くとることができ、また、PEB工程時に加熱温度の選択幅を十分に広げることが可能となる。 The other alkali-soluble resin preferably has an acid value of 20 to 200 mgKOH / g, and more preferably 40 to 150 mgKOH / g. When the acid value is within the above range, the alkali solubility is good and patterning by alkali development becomes easy.
Further, the mass average molecular weight of the other alkali-soluble resin is preferably 1,000 to 100,000, and more preferably 3,000 to 50,000. When the molecular weight is within the above range, the alkali solubility is good and patterning by alkali development becomes easy.
The content of the other alkali-soluble resin is preferably 10 to 70 parts by mass with respect to 100 parts by mass of the alkali-soluble resin having an imide ring. When the content is in the above range, the heating time can be sufficiently long during the PEB process, and the selection range of the heating temperature can be sufficiently widened during the PEB process.
[光塩基発生剤]
本発明において用いられる光塩基発生剤は、紫外線や可視光等の光照射により分子構造が変化するか、または、分子が開裂することにより、カルボキシル基と後述する熱硬化成分の付加反応の触媒として機能しうる1種以上の塩基性物質を生成する化合物である。塩基性物質として、例えば2級アミン、3級アミンが挙げられる。
本発明の樹脂組成物がエチレン性不飽和基を系内に有する場合、光照射によるエチレン性不飽和基の重合反応を開始させることができることから、光塩基発生剤の中でも、光照射による活性化の過程でラジカルを生成する光ラジカル重合開始剤としても機能するものが好ましい。
光塩基発生剤として、例えば、α-アミノアセトフェノン化合物、オキシムエステル化合物や、アシルオキシイミノ基,N-ホルミル化芳香族アミノ基、N-アシル化芳香族アミノ基、ニトロベンジルカーバメイト基、アルコオキシベンジルカーバメート基等の置換基を有する化合物等が挙げられる。なかでも、オキシムエステル化合物、α-アミノアセトフェノン化合物が好ましい。α-アミノアセトフェノン化合物としては、特に、2つ以上の窒素原子を有するものが好ましい。 [Photobase generator]
The photobase generator used in the present invention is used as a catalyst for the addition reaction of a carboxyl group and a thermosetting component described later when the molecular structure is changed by irradiation with light such as ultraviolet rays or visible light, or when the molecule is cleaved. It is a compound that produces one or more basic substances that can function. Examples of basic substances include secondary amines and tertiary amines.
When the resin composition of the present invention has an ethylenically unsaturated group in the system, it is possible to initiate a polymerization reaction of the ethylenically unsaturated group by light irradiation. Those that also function as a photo-radical polymerization initiator that generates radicals in the above process are preferred.
Examples of photobase generators include α-aminoacetophenone compounds, oxime ester compounds, acyloxyimino groups, N-formylated aromatic amino groups, N-acylated aromatic amino groups, nitrobenzyl carbamate groups, alkoxybenzyl carbamates. And compounds having a substituent such as a group. Of these, oxime ester compounds and α-aminoacetophenone compounds are preferred. As the α-aminoacetophenone compound, those having two or more nitrogen atoms are particularly preferable.
本発明において用いられる光塩基発生剤は、紫外線や可視光等の光照射により分子構造が変化するか、または、分子が開裂することにより、カルボキシル基と後述する熱硬化成分の付加反応の触媒として機能しうる1種以上の塩基性物質を生成する化合物である。塩基性物質として、例えば2級アミン、3級アミンが挙げられる。
本発明の樹脂組成物がエチレン性不飽和基を系内に有する場合、光照射によるエチレン性不飽和基の重合反応を開始させることができることから、光塩基発生剤の中でも、光照射による活性化の過程でラジカルを生成する光ラジカル重合開始剤としても機能するものが好ましい。
光塩基発生剤として、例えば、α-アミノアセトフェノン化合物、オキシムエステル化合物や、アシルオキシイミノ基,N-ホルミル化芳香族アミノ基、N-アシル化芳香族アミノ基、ニトロベンジルカーバメイト基、アルコオキシベンジルカーバメート基等の置換基を有する化合物等が挙げられる。なかでも、オキシムエステル化合物、α-アミノアセトフェノン化合物が好ましい。α-アミノアセトフェノン化合物としては、特に、2つ以上の窒素原子を有するものが好ましい。 [Photobase generator]
The photobase generator used in the present invention is used as a catalyst for the addition reaction of a carboxyl group and a thermosetting component described later when the molecular structure is changed by irradiation with light such as ultraviolet rays or visible light, or when the molecule is cleaved. It is a compound that produces one or more basic substances that can function. Examples of basic substances include secondary amines and tertiary amines.
When the resin composition of the present invention has an ethylenically unsaturated group in the system, it is possible to initiate a polymerization reaction of the ethylenically unsaturated group by light irradiation. Those that also function as a photo-radical polymerization initiator that generates radicals in the above process are preferred.
Examples of photobase generators include α-aminoacetophenone compounds, oxime ester compounds, acyloxyimino groups, N-formylated aromatic amino groups, N-acylated aromatic amino groups, nitrobenzyl carbamate groups, alkoxybenzyl carbamates. And compounds having a substituent such as a group. Of these, oxime ester compounds and α-aminoacetophenone compounds are preferred. As the α-aminoacetophenone compound, those having two or more nitrogen atoms are particularly preferable.
その他の光塩基発生剤として、WPBG-018(商品名:9-anthrylmethylN,N’-diethylcarbamate),WPBG-027(商品名:(E)-1-[3-(2-hydroxyphenyl)-2-propenoyl]piperidine),WPBG-082(商品名:guanidinium2-(3-benzoylphenyl)propionate), WPBG-140 (商品名:1-(anthraquinon-2-yl)ethyl imidazolecarboxylate)等を使用することもできる。
Other photobase generators include WPBG-018 (trade name: 9-anthrylmethylN, N'-diethylcarbamate), WPBG-027 (trade name: (E) -1- [3- (2-hydroxyphenyl) -2-propenoyl ] piperidine), WPBG-082 (trade name: guanidinium2- (3-benzoylphenyl) propionate), WPBG-140 (trade name: 1- (anthraquinon-2-yl) ethyl imidazolecarboxylate), and the like can also be used.
α―アミノアセトフェノン化合物は、分子中にベンゾインエーテル結合を有し、光照射を受けると分子内で開裂が起こり、硬化触媒作用を奏する塩基性物質(アミン)が生成する。α-アミノアセトフェノン化合物の具体例としては、(4-モルホリノベンゾイル)-1-ベンジル-1-ジメチルアミノプロパン(イルガキュア369、商品名、BASFジャパン社製)や4-(メチルチオベンゾイル)-1-メチル-1-モルホリノエタン(イルガキュア907、商品名、BASFジャパン社製)、2-(ジメチルアミノ)-2-[(4-メチルフェニル)メチル]-1-[4-(4-モルホリニル)フェニル]-1-ブタノン(イルガキュア379、商品名、BASFジャパン社製)などの市販の化合物またはその溶液を用いることができる。
The α-aminoacetophenone compound has a benzoin ether bond in the molecule, and when irradiated with light, cleavage occurs in the molecule to produce a basic substance (amine) that exhibits a curing catalytic action. Specific examples of α-aminoacetophenone compounds include (4-morpholinobenzoyl) -1-benzyl-1-dimethylaminopropane (Irgacure 369, trade name, manufactured by BASF Japan Ltd.) and 4- (methylthiobenzoyl) -1-methyl. -1-morpholinoethane (Irgacure 907, trade name, manufactured by BASF Japan Ltd.), 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl]- A commercially available compound such as 1-butanone (Irgacure 379, trade name, manufactured by BASF Japan Ltd.) or a solution thereof can be used.
オキシムエステル化合物としては、光照射により塩基性物質を生成する化合物であればいずれをも使用することができる。かかるオキシムエステル化合物としては、市販品として、BASFジャパン社製のCGI-325、イルガキュアーOXE01、イルガキュアーOXE02、アデカ社製N-1919、NCI-831などが挙げられる。また、特許第4344400号公報に記載された、分子内に2個のオキシムエステル基を有する化合物も好適に用いることができる。
As the oxime ester compound, any compound that generates a basic substance by light irradiation can be used. Examples of such oxime ester compounds include CGI-325, Irgacure OXE01, Irgacure OXE02 manufactured by BASF Japan, N-1919, and NCI-831 manufactured by Adeka. Moreover, the compound which has two oxime ester groups in the molecule | numerator described in the patent 4344400 gazette can also be used suitably.
その他、特開2004-359639号公報、特開2005-097141号公報、特開2005-220097号公報、特開2006-160634号公報、特開2008-094770号公報、特表2008-509967号公報、特表2009-040762号公報、特開2011-80036号公報記載のカルバゾールオキシムエステル化合物等を挙げることができる。
In addition, JP-A-2004-359639, JP-A-2005-097141, JP-A-2005-220097, JP-A-2006-160634, JP-A-2008-094770, JP-A-2008-509967, Specific examples include carbazole oxime ester compounds described in JP-T-2009-040762 and JP-A-2011-80036.
このような光塩基発生剤は、1種を単独で用いてもよく、2種以上を組み合わせて用いてもよい。本発明の樹脂組成物中の光塩基発生剤の配合量は、好ましくは熱硬化成分100質量部に対して0.1~40質量部であり、さらに好ましくは、0.1~30質量部である。0.1質量部以上の場合、光照射部/未照射部の耐現像性のコントラストを良好に得ることができる。また、40質量部以下の場合、硬化物特性が向上する。
Such photobase generators may be used alone or in combination of two or more. The blending amount of the photobase generator in the resin composition of the present invention is preferably 0.1 to 40 parts by mass, more preferably 0.1 to 30 parts by mass with respect to 100 parts by mass of the thermosetting component. is there. In the case of 0.1 part by mass or more, the development resistance contrast of the light irradiated part / unirradiated part can be favorably obtained. Moreover, in 40 mass parts or less, hardened | cured material characteristic improves.
[熱硬化成分]
熱硬化成分は、熱によって、カルボキシル基と付加反応が可能な官能基を有するものである。熱硬化成分としては、例えば、環状(チオ)エーテル基を有する化合物が好ましく、エポキシ樹脂、多官能オキセタン化合物等が挙げられる。 [Thermosetting component]
The thermosetting component has a functional group capable of addition reaction with a carboxyl group by heat. As the thermosetting component, for example, a compound having a cyclic (thio) ether group is preferable, and examples thereof include an epoxy resin and a polyfunctional oxetane compound.
熱硬化成分は、熱によって、カルボキシル基と付加反応が可能な官能基を有するものである。熱硬化成分としては、例えば、環状(チオ)エーテル基を有する化合物が好ましく、エポキシ樹脂、多官能オキセタン化合物等が挙げられる。 [Thermosetting component]
The thermosetting component has a functional group capable of addition reaction with a carboxyl group by heat. As the thermosetting component, for example, a compound having a cyclic (thio) ether group is preferable, and examples thereof include an epoxy resin and a polyfunctional oxetane compound.
上記エポキシ樹脂は、エポキシ基を有する樹脂であり、公知のものをいずれも使用できる。分子中にエポキシ基を2個有する2官能性エポキシ樹脂、分子中にエポキシ基を多数有する多官能エポキシ樹脂等が挙げられる。なお、水素添加された2官能エポキシ化合物であってもよい。
The epoxy resin is a resin having an epoxy group, and any known one can be used. Examples thereof include a bifunctional epoxy resin having two epoxy groups in the molecule, and a polyfunctional epoxy resin having many epoxy groups in the molecule. In addition, a hydrogenated bifunctional epoxy compound may be used.
上記エポキシ化合物としては、ビスフェノールA型エポキシ樹脂、ブロム化エポキシ樹脂、ノボラック型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、グリシジルアミン型エポキシ樹脂、ヒダントイン型エポキシ樹脂、脂環式エポキシ樹脂、トリヒドロキシフェニルメタン型エポキシ樹脂、ビキシレノール型もしくはビフェノール型エポキシ樹脂又はそれらの混合物;ビスフェノールS型エポキシ樹脂、ビスフェノールAノボラック型エポキシ樹脂、テトラフェニロールエタン型エポキシ樹脂、複素環式エポキシ樹脂、ジグリシジルフタレート樹脂、テトラグリシジルキシレノイルエタン樹脂、ナフタレン基含有エポキシ樹脂、ジシクロペンタジエン骨格を有するエポキシ樹脂、グリシジルメタアクリレート共重合系エポキシ樹脂、シクロヘキシルマレイミドとグリシジルメタアクリレートの共重合エポキシ樹脂、CTBN変性エポキシ樹脂等が挙げられる。
Examples of the epoxy compound include bisphenol A type epoxy resin, brominated epoxy resin, novolac type epoxy resin, bisphenol F type epoxy resin, hydrogenated bisphenol A type epoxy resin, glycidylamine type epoxy resin, hydantoin type epoxy resin, and alicyclic type. Epoxy resin, trihydroxyphenylmethane type epoxy resin, bixylenol type or biphenol type epoxy resin or a mixture thereof; bisphenol S type epoxy resin, bisphenol A novolac type epoxy resin, tetraphenylolethane type epoxy resin, heterocyclic epoxy resin , Diglycidyl phthalate resin, tetraglycidyl xylenoyl ethane resin, naphthalene group-containing epoxy resin, epoxy resin having dicyclopentadiene skeleton, glycidyl meta Acrylate copolymer epoxy resins, copolymerized epoxy resins of cyclohexylmaleimide and glycidyl methacrylate, and a CTBN modified epoxy resin.
その他の液状2官能性エポキシ樹脂としては、ビニルシクロヘキセンジエポキシド、(3’,4’-エポキシシクロヘキシルメチル)-3,4-エポキシシクロヘキサンカルボキシレート、(3’,4’-エポキシ-6’-メチルシクロヘキシルメチル)-3,4-エポキシ-6-メチルシクロヘキサンカルボキシレート等の脂環族エポキシ樹脂を挙げることができる。これらのエポキシ樹脂は、1種を単独で用いてもよく、2種以上を併用してもよい。
Other liquid bifunctional epoxy resins include vinylcyclohexene diepoxide, (3 ′, 4′-epoxycyclohexylmethyl) -3,4-epoxycyclohexanecarboxylate, (3 ′, 4′-epoxy-6′-methyl) And alicyclic epoxy resins such as (cyclohexylmethyl) -3,4-epoxy-6-methylcyclohexanecarboxylate. These epoxy resins may be used individually by 1 type, and may use 2 or more types together.
なお、熱硬化成分として、マレイミド化合物、ブロックイソシアネート化合物、アミノ樹脂、ベンゾオキサジン樹脂、カルボジイミド樹脂、シクロカーボネート化合物、エピスルフィド樹脂などの公知慣用の化合物を配合してもよい。
In addition, you may mix | blend well-known and usual compounds, such as a maleimide compound, a block isocyanate compound, an amino resin, a benzoxazine resin, a carbodiimide resin, a cyclocarbonate compound, an episulfide resin, as a thermosetting component.
熱硬化成分の配合量としては、上記イミド環を有するアルカリ可溶性樹脂および上記他のアルカリ可溶性樹脂との当量比(カルボキシル基:エポキシ基などの熱反応性基)が1:0.1~1:10であることが好ましい。このような配合比の範囲とすることにより、現像が良好となり、容易に微細パターンを形成できる。上記当量比は、1:0.2~1:5であることがさらに好ましい。
As a blending amount of the thermosetting component, an equivalent ratio (carboxyl group: heat-reactive group such as epoxy group) of the alkali-soluble resin having an imide ring and the other alkali-soluble resin is 1: 0.1 to 1: 10 is preferable. By setting the blending ratio in such a range, development becomes favorable and a fine pattern can be easily formed. The equivalent ratio is more preferably 1: 0.2 to 1: 5.
(光ラジカル重合開始剤)
本発明の感光性熱硬化性樹脂組成物は、上記光塩基発生剤以外に、光ラジカル重合開始剤を含んでいてもよい。光ラジカル重合開始剤としては、光照射によってラジカルを生成する公知の光ラジカル重合開始剤を用いることができる。例えば、上記した光塩基発生剤として機能しうるα-アミノアセトフェノン系光重合開始剤以外のアルキルフェノン系光重合開始剤、アシルホスフィンオキサイド系光重合開始剤、チタノセン系光重合開始剤等を挙げることができる。 (Photo radical polymerization initiator)
The photosensitive thermosetting resin composition of the present invention may contain a photoradical polymerization initiator in addition to the photobase generator. As the photoradical polymerization initiator, a known photoradical polymerization initiator that generates radicals by light irradiation can be used. For example, alkylphenone photopolymerization initiators other than α-aminoacetophenone photopolymerization initiators that can function as the photobase generator described above, acylphosphine oxide photopolymerization initiators, titanocene photopolymerization initiators, and the like. Can do.
本発明の感光性熱硬化性樹脂組成物は、上記光塩基発生剤以外に、光ラジカル重合開始剤を含んでいてもよい。光ラジカル重合開始剤としては、光照射によってラジカルを生成する公知の光ラジカル重合開始剤を用いることができる。例えば、上記した光塩基発生剤として機能しうるα-アミノアセトフェノン系光重合開始剤以外のアルキルフェノン系光重合開始剤、アシルホスフィンオキサイド系光重合開始剤、チタノセン系光重合開始剤等を挙げることができる。 (Photo radical polymerization initiator)
The photosensitive thermosetting resin composition of the present invention may contain a photoradical polymerization initiator in addition to the photobase generator. As the photoradical polymerization initiator, a known photoradical polymerization initiator that generates radicals by light irradiation can be used. For example, alkylphenone photopolymerization initiators other than α-aminoacetophenone photopolymerization initiators that can function as the photobase generator described above, acylphosphine oxide photopolymerization initiators, titanocene photopolymerization initiators, and the like. Can do.
(高分子樹脂)
本発明の感光性熱硬化性樹脂組成物には、得られる硬化物の可撓性、指触乾燥性の向上を目的に慣用公知の高分子樹脂を配合することができる。高分子樹脂としてはセルロース系、ポリエステル系、フェノキシ樹脂系ポリマー、ポリビニルアセタール系、ポリビニルブチラール系、ポリアミド系、ポリアミドイミド系バインダーポリマー、ブロック共重合体、エラストマー等が挙げられる。上記高分子樹脂は1種類を単独で用いてもよく、2種類以上を併用してもよい。 (Polymer resin)
The photosensitive thermosetting resin composition of the present invention can be blended with conventionally known polymer resins for the purpose of improving the flexibility and dryness of the touch of the resulting cured product. Examples of the polymer resin include cellulose, polyester, phenoxy resin, polyvinyl acetal, polyvinyl butyral, polyamide, polyamideimide binder polymer, block copolymer, elastomer and the like. The above polymer resins may be used alone or in combination of two or more.
本発明の感光性熱硬化性樹脂組成物には、得られる硬化物の可撓性、指触乾燥性の向上を目的に慣用公知の高分子樹脂を配合することができる。高分子樹脂としてはセルロース系、ポリエステル系、フェノキシ樹脂系ポリマー、ポリビニルアセタール系、ポリビニルブチラール系、ポリアミド系、ポリアミドイミド系バインダーポリマー、ブロック共重合体、エラストマー等が挙げられる。上記高分子樹脂は1種類を単独で用いてもよく、2種類以上を併用してもよい。 (Polymer resin)
The photosensitive thermosetting resin composition of the present invention can be blended with conventionally known polymer resins for the purpose of improving the flexibility and dryness of the touch of the resulting cured product. Examples of the polymer resin include cellulose, polyester, phenoxy resin, polyvinyl acetal, polyvinyl butyral, polyamide, polyamideimide binder polymer, block copolymer, elastomer and the like. The above polymer resins may be used alone or in combination of two or more.
(無機充填剤)
本発明の感光性熱硬化性樹脂組成物には、無機充填剤を配合することができる。無機充填剤は、樹脂組成物の硬化物の硬化収縮を抑制し、密着性、硬度などの特性を向上させるために使用される。無機充填剤としては、例えば、硫酸バリウム、無定形シリカ、溶融シリカ、球状シリカ、タルク、クレー、炭酸マグネシウム、炭酸カルシウム、酸化アルミニウム、水酸化アルミニウム、窒化ケイ素、窒化アルミニウム、窒化ホウ素、ノイブルグシリシャスアース等が挙げられる。上記無機充填剤は1種類を単独で用いてもよく、2種類以上を併用してもよい。 (Inorganic filler)
An inorganic filler can be blended in the photosensitive thermosetting resin composition of the present invention. The inorganic filler is used for suppressing the curing shrinkage of the cured product of the resin composition and improving properties such as adhesion and hardness. Examples of the inorganic filler include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, silicon nitride, aluminum nitride, boron nitride, and Neuburg Examples include rich earth. The said inorganic filler may be used individually by 1 type, and may use 2 or more types together.
本発明の感光性熱硬化性樹脂組成物には、無機充填剤を配合することができる。無機充填剤は、樹脂組成物の硬化物の硬化収縮を抑制し、密着性、硬度などの特性を向上させるために使用される。無機充填剤としては、例えば、硫酸バリウム、無定形シリカ、溶融シリカ、球状シリカ、タルク、クレー、炭酸マグネシウム、炭酸カルシウム、酸化アルミニウム、水酸化アルミニウム、窒化ケイ素、窒化アルミニウム、窒化ホウ素、ノイブルグシリシャスアース等が挙げられる。上記無機充填剤は1種類を単独で用いてもよく、2種類以上を併用してもよい。 (Inorganic filler)
An inorganic filler can be blended in the photosensitive thermosetting resin composition of the present invention. The inorganic filler is used for suppressing the curing shrinkage of the cured product of the resin composition and improving properties such as adhesion and hardness. Examples of the inorganic filler include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, silicon nitride, aluminum nitride, boron nitride, and Neuburg Examples include rich earth. The said inorganic filler may be used individually by 1 type, and may use 2 or more types together.
(着色剤)
さらに、本発明の感光性熱硬化性樹脂組成物には、着色剤を配合することができる。着色剤としては、赤、青、緑、黄、白、黒などの慣用公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。 (Coloring agent)
Furthermore, a coloring agent can be mix | blended with the photosensitive thermosetting resin composition of this invention. As the colorant, conventionally known colorants such as red, blue, green, yellow, white, and black can be used, and any of pigments, dyes, and pigments may be used.
さらに、本発明の感光性熱硬化性樹脂組成物には、着色剤を配合することができる。着色剤としては、赤、青、緑、黄、白、黒などの慣用公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。 (Coloring agent)
Furthermore, a coloring agent can be mix | blended with the photosensitive thermosetting resin composition of this invention. As the colorant, conventionally known colorants such as red, blue, green, yellow, white, and black can be used, and any of pigments, dyes, and pigments may be used.
(有機溶剤)
本発明の感光性熱硬化性樹脂組成物には、樹脂組成物の調製のためや、基材やキャリアフィルムに塗布するための粘度調整のために、有機溶剤を使用することができる。
このような有機溶剤としては、ケトン類、芳香族炭化水素類、グリコールエーテル類、グリコールエーテルアセテート類、エステル類、アルコール類、脂肪族炭化水素、石油系溶剤などを挙げることができる。このような有機溶剤は、1種を単独で用いてもよく、2種以上の混合物として用いてもよい。 (Organic solvent)
In the photosensitive thermosetting resin composition of the present invention, an organic solvent can be used for preparing the resin composition and adjusting the viscosity for application to a substrate or a carrier film.
Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like. Such an organic solvent may be used individually by 1 type, and may be used as a 2 or more types of mixture.
本発明の感光性熱硬化性樹脂組成物には、樹脂組成物の調製のためや、基材やキャリアフィルムに塗布するための粘度調整のために、有機溶剤を使用することができる。
このような有機溶剤としては、ケトン類、芳香族炭化水素類、グリコールエーテル類、グリコールエーテルアセテート類、エステル類、アルコール類、脂肪族炭化水素、石油系溶剤などを挙げることができる。このような有機溶剤は、1種を単独で用いてもよく、2種以上の混合物として用いてもよい。 (Organic solvent)
In the photosensitive thermosetting resin composition of the present invention, an organic solvent can be used for preparing the resin composition and adjusting the viscosity for application to a substrate or a carrier film.
Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like. Such an organic solvent may be used individually by 1 type, and may be used as a 2 or more types of mixture.
(その他の任意成分)
本発明の感光性熱硬化性樹脂組成物には、必要に応じてさらに、感光性モノマー、メルカプト化合物、密着促進剤、酸化防止剤、紫外線吸収剤などの成分を配合することができる。これらは、電子材料の分野において公知の物を使用することができる。また、上記の樹脂組成物には、微粉シリカ、ハイドロタルサイト、有機ベントナイト、モンモリロナイトなどの公知慣用の増粘剤、シリコーン系、フッ素系、高分子系などの消泡剤及び/又はレベリング剤、シランカップリング剤、防錆剤などのような公知慣用の添加剤類を配合することができる。 (Other optional ingredients)
If necessary, the photosensitive thermosetting resin composition of the present invention may further contain components such as a photosensitive monomer, a mercapto compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber. As these, those known in the field of electronic materials can be used. In addition, the above resin composition includes known and commonly used thickeners such as finely divided silica, hydrotalcite, organic bentonite, montmorillonite, silicone-based, fluorine-based, polymer-based antifoaming agents and / or leveling agents, Known and commonly used additives such as silane coupling agents and rust preventives can be blended.
本発明の感光性熱硬化性樹脂組成物には、必要に応じてさらに、感光性モノマー、メルカプト化合物、密着促進剤、酸化防止剤、紫外線吸収剤などの成分を配合することができる。これらは、電子材料の分野において公知の物を使用することができる。また、上記の樹脂組成物には、微粉シリカ、ハイドロタルサイト、有機ベントナイト、モンモリロナイトなどの公知慣用の増粘剤、シリコーン系、フッ素系、高分子系などの消泡剤及び/又はレベリング剤、シランカップリング剤、防錆剤などのような公知慣用の添加剤類を配合することができる。 (Other optional ingredients)
If necessary, the photosensitive thermosetting resin composition of the present invention may further contain components such as a photosensitive monomer, a mercapto compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber. As these, those known in the field of electronic materials can be used. In addition, the above resin composition includes known and commonly used thickeners such as finely divided silica, hydrotalcite, organic bentonite, montmorillonite, silicone-based, fluorine-based, polymer-based antifoaming agents and / or leveling agents, Known and commonly used additives such as silane coupling agents and rust preventives can be blended.
〔ドライフィルム〕
本発明のドライフィルムは、本発明の感光性熱硬化性樹脂組成物からなる樹脂層を有することを特徴とする。本発明の感光性熱硬化性樹脂組成物以外の樹脂組成物からなる層も有する多層構造のドライフィルムであってもよい。
ドライフィルム化に際しては、例えば、本発明の感光性熱硬化性樹脂組成物を有機溶剤で希釈して適切な粘度に調整し、コンマコーター等の公知の手法でキャリアフィルム上に均一な厚さに塗布する。その後、通常、50~130℃の温度で1~30分間乾燥し、キャリアフィルム上に樹脂層を形成する。 [Dry film]
The dry film of the present invention is characterized by having a resin layer comprising the photosensitive thermosetting resin composition of the present invention. It may be a multi-layer dry film having a layer made of a resin composition other than the photosensitive thermosetting resin composition of the present invention.
In forming a dry film, for example, the photosensitive thermosetting resin composition of the present invention is diluted with an organic solvent to adjust to an appropriate viscosity, and a uniform thickness is formed on the carrier film by a known method such as a comma coater. Apply. Thereafter, it is usually dried at a temperature of 50 to 130 ° C. for 1 to 30 minutes to form a resin layer on the carrier film.
本発明のドライフィルムは、本発明の感光性熱硬化性樹脂組成物からなる樹脂層を有することを特徴とする。本発明の感光性熱硬化性樹脂組成物以外の樹脂組成物からなる層も有する多層構造のドライフィルムであってもよい。
ドライフィルム化に際しては、例えば、本発明の感光性熱硬化性樹脂組成物を有機溶剤で希釈して適切な粘度に調整し、コンマコーター等の公知の手法でキャリアフィルム上に均一な厚さに塗布する。その後、通常、50~130℃の温度で1~30分間乾燥し、キャリアフィルム上に樹脂層を形成する。 [Dry film]
The dry film of the present invention is characterized by having a resin layer comprising the photosensitive thermosetting resin composition of the present invention. It may be a multi-layer dry film having a layer made of a resin composition other than the photosensitive thermosetting resin composition of the present invention.
In forming a dry film, for example, the photosensitive thermosetting resin composition of the present invention is diluted with an organic solvent to adjust to an appropriate viscosity, and a uniform thickness is formed on the carrier film by a known method such as a comma coater. Apply. Thereafter, it is usually dried at a temperature of 50 to 130 ° C. for 1 to 30 minutes to form a resin layer on the carrier film.
キャリアフィルムとしては、プラスチックフィルムが用いられる。キャリアフィルムの厚さについては特に制限はないが、一般に、10~150μmの範囲で適宜選択される。キャリアフィルム上に樹脂層を形成した後、さらに、樹脂層の表面に剥離可能なカバーフィルムを積層してもよい。
A plastic film is used as the carrier film. The thickness of the carrier film is not particularly limited, but is generally appropriately selected within the range of 10 to 150 μm. After forming the resin layer on the carrier film, a peelable cover film may be further laminated on the surface of the resin layer.
〔フレキシブルプリント配線板及びその製造方法〕
本発明のフレキシブルプリント配線板は、感光性熱硬化性樹脂組成物、又は、ドライフィルムの樹脂層からなる硬化物を有することを特徴とするものである。
本発明のフレキシブルプリント配線板の製造方法は、フレキシブルプリント配線板上に感光性熱硬化性樹脂組成物からなる樹脂層を形成する工程、パターン状に光を樹脂層に照射する工程、樹脂層を加熱する工程、及び、樹脂層をアルカリ現像して、カバーレイ及びソルダーレジストのうちの少なくともいずれか一方を形成する工程を含む。 [Flexible printed wiring board and manufacturing method thereof]
The flexible printed wiring board of the present invention is characterized by having a cured product composed of a photosensitive thermosetting resin composition or a resin layer of a dry film.
The method for producing a flexible printed wiring board of the present invention includes a step of forming a resin layer made of a photosensitive thermosetting resin composition on a flexible printed wiring board, a step of irradiating the resin layer with light in a pattern, and a resin layer. A step of heating, and a step of alkali-developing the resin layer to form at least one of a coverlay and a solder resist.
本発明のフレキシブルプリント配線板は、感光性熱硬化性樹脂組成物、又は、ドライフィルムの樹脂層からなる硬化物を有することを特徴とするものである。
本発明のフレキシブルプリント配線板の製造方法は、フレキシブルプリント配線板上に感光性熱硬化性樹脂組成物からなる樹脂層を形成する工程、パターン状に光を樹脂層に照射する工程、樹脂層を加熱する工程、及び、樹脂層をアルカリ現像して、カバーレイ及びソルダーレジストのうちの少なくともいずれか一方を形成する工程を含む。 [Flexible printed wiring board and manufacturing method thereof]
The flexible printed wiring board of the present invention is characterized by having a cured product composed of a photosensitive thermosetting resin composition or a resin layer of a dry film.
The method for producing a flexible printed wiring board of the present invention includes a step of forming a resin layer made of a photosensitive thermosetting resin composition on a flexible printed wiring board, a step of irradiating the resin layer with light in a pattern, and a resin layer. A step of heating, and a step of alkali-developing the resin layer to form at least one of a coverlay and a solder resist.
[樹脂層形成工程]
この工程では、フレキシブルプリント配線板上に感光性熱硬化性樹脂組成物からなる樹脂層を少なくとも一層形成する。
樹脂層の形成方法としては、塗布法と、ラミネート法が挙げられる。
塗布法の場合、スクリーン印刷等の方法により、感光性熱硬化性樹脂組成物をフレキシブルプリント配線板上に塗布し、乾燥することにより樹脂層を形成する。
ラミネート法の場合、まずは、感光性熱硬化性樹脂組成物を有機溶剤で希釈して適切な粘度に調整し、キャリアフィルム上に塗布、乾燥して樹脂層を有するドライフィルムを作成する。次に、ラミネーター等により樹脂層が、フレキシブルプリント配線板と接触するように貼り合わせた後、キャリアフィルムを剥離する。 [Resin layer forming step]
In this step, at least one resin layer made of a photosensitive thermosetting resin composition is formed on the flexible printed wiring board.
Examples of the method for forming the resin layer include a coating method and a laminating method.
In the case of the application method, the photosensitive thermosetting resin composition is applied onto the flexible printed wiring board by a method such as screen printing and dried to form a resin layer.
In the case of the laminating method, first, the photosensitive thermosetting resin composition is diluted with an organic solvent to adjust to an appropriate viscosity, and coated on a carrier film and dried to prepare a dry film having a resin layer. Next, after bonding together so that a resin layer may contact a flexible printed wiring board with a laminator etc., a carrier film is peeled.
この工程では、フレキシブルプリント配線板上に感光性熱硬化性樹脂組成物からなる樹脂層を少なくとも一層形成する。
樹脂層の形成方法としては、塗布法と、ラミネート法が挙げられる。
塗布法の場合、スクリーン印刷等の方法により、感光性熱硬化性樹脂組成物をフレキシブルプリント配線板上に塗布し、乾燥することにより樹脂層を形成する。
ラミネート法の場合、まずは、感光性熱硬化性樹脂組成物を有機溶剤で希釈して適切な粘度に調整し、キャリアフィルム上に塗布、乾燥して樹脂層を有するドライフィルムを作成する。次に、ラミネーター等により樹脂層が、フレキシブルプリント配線板と接触するように貼り合わせた後、キャリアフィルムを剥離する。 [Resin layer forming step]
In this step, at least one resin layer made of a photosensitive thermosetting resin composition is formed on the flexible printed wiring board.
Examples of the method for forming the resin layer include a coating method and a laminating method.
In the case of the application method, the photosensitive thermosetting resin composition is applied onto the flexible printed wiring board by a method such as screen printing and dried to form a resin layer.
In the case of the laminating method, first, the photosensitive thermosetting resin composition is diluted with an organic solvent to adjust to an appropriate viscosity, and coated on a carrier film and dried to prepare a dry film having a resin layer. Next, after bonding together so that a resin layer may contact a flexible printed wiring board with a laminator etc., a carrier film is peeled.
また、樹脂層には、他の層を積層させることができる。他の層は、アルカリ現像型感光性樹脂組成物からなることが好ましい。アルカリ現像型感光性樹脂組成物としては、公知の組成物を使用することができ、例えば、カバーレイ用又はソルダーレジスト用の公知の組成物を使用できる。このように他の層を含めた積層構造とすることにより、さらに耐衝撃性と屈曲性に優れた硬化物を得ることができる。
Also, other layers can be laminated on the resin layer. The other layer is preferably made of an alkali development type photosensitive resin composition. As an alkali development type photosensitive resin composition, a well-known composition can be used, For example, the well-known composition for coverlays or a soldering resist can be used. Thus, by setting it as the laminated structure including another layer, the hardened | cured material which was further excellent in impact resistance and flexibility can be obtained.
[光照射工程]
この工程では、ネガ型のパターン状に光照射にて樹脂層に含まれる光塩基発生剤を活性化して光照射部を硬化する。この工程では、光照射部で発生した塩基により、光塩基発生剤が不安定化し、塩基が化学的に増殖することにより、樹脂層の深部まで十分硬化できる。 [Light irradiation process]
In this step, the photobase generator contained in the resin layer is activated by light irradiation in a negative pattern to cure the light irradiation part. In this step, the photobase generator is destabilized by the base generated in the light irradiation part, and the base is chemically proliferated, whereby the resin layer can be sufficiently cured to the deep part.
この工程では、ネガ型のパターン状に光照射にて樹脂層に含まれる光塩基発生剤を活性化して光照射部を硬化する。この工程では、光照射部で発生した塩基により、光塩基発生剤が不安定化し、塩基が化学的に増殖することにより、樹脂層の深部まで十分硬化できる。 [Light irradiation process]
In this step, the photobase generator contained in the resin layer is activated by light irradiation in a negative pattern to cure the light irradiation part. In this step, the photobase generator is destabilized by the base generated in the light irradiation part, and the base is chemically proliferated, whereby the resin layer can be sufficiently cured to the deep part.
光照射機としては、直接描画装置、メタルハライドランプを搭載した光照射機などを用いることができる。パターン状の光照射用のマスクは、ネガ型のマスクである。
光照射に用いる活性エネルギー線としては、最大波長が350~450nmの範囲にあるレーザー光又は散乱光を用いることが好ましい。最大波長をこの範囲とすることにより、効率よく光塩基発生剤を活性化させることができる。この範囲のレーザー光を用いていればガスレーザー、固体レーザーのいずれでもよい。また、その光照射量は膜厚等によって異なるが、一般には100~1500mJ/cm2とすることができる。 As the light irradiator, a direct writer, a light irradiator equipped with a metal halide lamp, or the like can be used. The patterned light irradiation mask is a negative mask.
As the active energy ray used for light irradiation, it is preferable to use laser light or scattered light having a maximum wavelength in the range of 350 to 450 nm. By setting the maximum wavelength within this range, the photobase generator can be activated efficiently. If a laser beam in this range is used, either a gas laser or a solid laser may be used. The amount of light irradiation varies depending on the film thickness and the like, but can generally be 100 to 1500 mJ / cm 2 .
光照射に用いる活性エネルギー線としては、最大波長が350~450nmの範囲にあるレーザー光又は散乱光を用いることが好ましい。最大波長をこの範囲とすることにより、効率よく光塩基発生剤を活性化させることができる。この範囲のレーザー光を用いていればガスレーザー、固体レーザーのいずれでもよい。また、その光照射量は膜厚等によって異なるが、一般には100~1500mJ/cm2とすることができる。 As the light irradiator, a direct writer, a light irradiator equipped with a metal halide lamp, or the like can be used. The patterned light irradiation mask is a negative mask.
As the active energy ray used for light irradiation, it is preferable to use laser light or scattered light having a maximum wavelength in the range of 350 to 450 nm. By setting the maximum wavelength within this range, the photobase generator can be activated efficiently. If a laser beam in this range is used, either a gas laser or a solid laser may be used. The amount of light irradiation varies depending on the film thickness and the like, but can generally be 100 to 1500 mJ / cm 2 .
[加熱工程]
この工程では、光照射後、樹脂層を加熱することにより光照射部を硬化する。この工程により、光照射工程で発生した塩基により深部まで硬化できる。樹脂層をパターン露光処理した後、露光部のカルボキシル基が熱硬化成分の熱反応性官能基と多く付加反応することで耐アルカリ溶解性を発現し、未露光部のカルボキシル基の大部分が熱硬化成分の熱反応性官能基と反応せず、残存することでアルカリ溶解性を維持しうる条件で加熱温度が設定される。そのような観点から、加熱温度は、好ましくは80~140℃である。加熱時間は、工業的な量産性や工程管理の面から、10~100分が好ましく、10分~60分の範囲がより好ましい。
本発明における感光性熱硬化性樹脂組成物の硬化は、例えば、熱反応によるエポキシ樹脂の開環反応であるため、光ラジカル反応で硬化が進行する場合と比べてひずみや硬化収縮を抑えることができる。 [Heating process]
In this step, after the light irradiation, the light irradiation part is cured by heating the resin layer. By this process, it is possible to cure to a deep part by the base generated in the light irradiation process. After pattern exposure treatment of the resin layer, the carboxyl group in the exposed part is added and reacted with the thermoreactive functional group of the thermosetting component to develop alkali resistance, and most of the carboxyl group in the unexposed part is heated. The heating temperature is set under the condition that the alkali-solubility can be maintained by remaining without reacting with the heat-reactive functional group of the curing component. From such a viewpoint, the heating temperature is preferably 80 to 140 ° C. The heating time is preferably 10 to 100 minutes, more preferably 10 to 60 minutes, from the viewpoint of industrial mass productivity and process control.
Since the curing of the photosensitive thermosetting resin composition in the present invention is, for example, a ring-opening reaction of an epoxy resin by a thermal reaction, it can suppress distortion and curing shrinkage compared to the case where curing proceeds by a photoradical reaction. it can.
この工程では、光照射後、樹脂層を加熱することにより光照射部を硬化する。この工程により、光照射工程で発生した塩基により深部まで硬化できる。樹脂層をパターン露光処理した後、露光部のカルボキシル基が熱硬化成分の熱反応性官能基と多く付加反応することで耐アルカリ溶解性を発現し、未露光部のカルボキシル基の大部分が熱硬化成分の熱反応性官能基と反応せず、残存することでアルカリ溶解性を維持しうる条件で加熱温度が設定される。そのような観点から、加熱温度は、好ましくは80~140℃である。加熱時間は、工業的な量産性や工程管理の面から、10~100分が好ましく、10分~60分の範囲がより好ましい。
本発明における感光性熱硬化性樹脂組成物の硬化は、例えば、熱反応によるエポキシ樹脂の開環反応であるため、光ラジカル反応で硬化が進行する場合と比べてひずみや硬化収縮を抑えることができる。 [Heating process]
In this step, after the light irradiation, the light irradiation part is cured by heating the resin layer. By this process, it is possible to cure to a deep part by the base generated in the light irradiation process. After pattern exposure treatment of the resin layer, the carboxyl group in the exposed part is added and reacted with the thermoreactive functional group of the thermosetting component to develop alkali resistance, and most of the carboxyl group in the unexposed part is heated. The heating temperature is set under the condition that the alkali-solubility can be maintained by remaining without reacting with the heat-reactive functional group of the curing component. From such a viewpoint, the heating temperature is preferably 80 to 140 ° C. The heating time is preferably 10 to 100 minutes, more preferably 10 to 60 minutes, from the viewpoint of industrial mass productivity and process control.
Since the curing of the photosensitive thermosetting resin composition in the present invention is, for example, a ring-opening reaction of an epoxy resin by a thermal reaction, it can suppress distortion and curing shrinkage compared to the case where curing proceeds by a photoradical reaction. it can.
[現像工程]
現像工程では、アルカリ現像により、未照射部を除去して、ネガ型のパターン状の絶縁膜、特に、カバーレイ及びソルダーレジストを形成する。
現像方法としては、ディッピング等の公知の方法によることができる。また、現像液としては、炭酸ナトリウム、炭酸カリウム、水酸化カリウム、アミン類、2-メチルイミダゾール等のイミダゾール類、水酸化テトラメチルアンモニウム水溶液(TMAH)等のアルカリ水溶液またはこれらの混合液を用いることができる。
なお、現像工程の後に、さらに、絶縁膜を光照射してもよい。また、例えば、150℃以上で加熱してもよい。 [Development process]
In the development step, the unirradiated portion is removed by alkali development to form a negative patterned insulating film, particularly a coverlay and a solder resist.
The developing method can be a known method such as dipping. Further, as the developer, sodium carbonate, potassium carbonate, potassium hydroxide, amines, imidazoles such as 2-methylimidazole, alkaline aqueous solutions such as tetramethylammonium hydroxide aqueous solution (TMAH) or a mixed solution thereof should be used. Can do.
Note that the insulating film may be further irradiated with light after the development step. For example, you may heat at 150 degreeC or more.
現像工程では、アルカリ現像により、未照射部を除去して、ネガ型のパターン状の絶縁膜、特に、カバーレイ及びソルダーレジストを形成する。
現像方法としては、ディッピング等の公知の方法によることができる。また、現像液としては、炭酸ナトリウム、炭酸カリウム、水酸化カリウム、アミン類、2-メチルイミダゾール等のイミダゾール類、水酸化テトラメチルアンモニウム水溶液(TMAH)等のアルカリ水溶液またはこれらの混合液を用いることができる。
なお、現像工程の後に、さらに、絶縁膜を光照射してもよい。また、例えば、150℃以上で加熱してもよい。 [Development process]
In the development step, the unirradiated portion is removed by alkali development to form a negative patterned insulating film, particularly a coverlay and a solder resist.
The developing method can be a known method such as dipping. Further, as the developer, sodium carbonate, potassium carbonate, potassium hydroxide, amines, imidazoles such as 2-methylimidazole, alkaline aqueous solutions such as tetramethylammonium hydroxide aqueous solution (TMAH) or a mixed solution thereof should be used. Can do.
Note that the insulating film may be further irradiated with light after the development step. For example, you may heat at 150 degreeC or more.
次に、本発明の樹脂組成物から本発明のフレキシブルプリント配線板を製造する方法の一例を図1の工程図に基づき説明する。なお、図1では、樹脂層が積層構造である場合を示すが、1層のみからなる場合でもよい。
Next, an example of a method for producing the flexible printed wiring board of the present invention from the resin composition of the present invention will be described based on the process diagram of FIG. FIG. 1 shows a case where the resin layer has a laminated structure, but it may be composed of only one layer.
図1の積層工程では、樹脂層3と樹脂層4からなる積層構造体を、銅回路2が形成されたフレキシブルプリント配線基材1に形成する。
樹脂層3は、カルボキシル基含有樹脂などを含むアルカリ現像型の感光性樹脂組成物からなる。
樹脂層4は、樹脂層3上に形成され、イミド環を有するアルカリ可溶性樹脂、他のアルカリ可溶性樹脂、光塩基発生剤、及び熱硬化成分を含む本発明の感光性熱硬化性樹脂組成物からなる。 In the laminating process of FIG. 1, a laminated structure composed of theresin layer 3 and the resin layer 4 is formed on the flexible printed wiring substrate 1 on which the copper circuit 2 is formed.
Theresin layer 3 is made of an alkali development type photosensitive resin composition containing a carboxyl group-containing resin or the like.
Theresin layer 4 is formed from the photosensitive thermosetting resin composition of the present invention formed on the resin layer 3 and including an alkali-soluble resin having an imide ring, another alkali-soluble resin, a photobase generator, and a thermosetting component. Become.
樹脂層3は、カルボキシル基含有樹脂などを含むアルカリ現像型の感光性樹脂組成物からなる。
樹脂層4は、樹脂層3上に形成され、イミド環を有するアルカリ可溶性樹脂、他のアルカリ可溶性樹脂、光塩基発生剤、及び熱硬化成分を含む本発明の感光性熱硬化性樹脂組成物からなる。 In the laminating process of FIG. 1, a laminated structure composed of the
The
The
図1の光照射工程は、樹脂層4上にマスク5を配置し、ネガ型のパターン状に光照射することにより、各樹脂層に含まれる光塩基発生剤を活性化して光照射部を硬化する工程である。図1の加熱工程は、光照射工程の後、樹脂層を加熱することにより、光照射部を硬化する工程(PEB工程)である。図1の現像工程は、アルカリ性水溶液によって現像することにより、未照射部が除去され、ネガ型のパターン層を形成する工程である。
In the light irradiation step of FIG. 1, a mask 5 is arranged on the resin layer 4 and light irradiation is performed in a negative pattern, thereby activating the photobase generator contained in each resin layer and curing the light irradiation portion. It is a process to do. The heating process of FIG. 1 is a process (PEB process) of curing the light irradiation part by heating the resin layer after the light irradiation process. The development process in FIG. 1 is a process in which an unirradiated portion is removed by developing with an alkaline aqueous solution, and a negative pattern layer is formed.
なお、図1の第2光照射工程は、必要に応じて、残った光塩基発生剤を活性化して塩基を発生させるための工程であり、熱硬化工程は、必要に応じて、パターン層を十分に熱硬化させるための工程である。
In addition, the 2nd light irradiation process of FIG. 1 is a process for activating the remaining photobase generator as needed, and generating a base, and a thermosetting process is a pattern layer as needed. This is a process for sufficient heat curing.
以下、実施例、比較例により本発明をさらに詳細に説明するが、本発明は、これら実施例、比較例によって制限されるものではない。
Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to these Examples and Comparative Examples.
<イミド環を有するアルカリ可溶性樹脂の合成例>
撹拌機、窒素導入管、分留環、冷却環を取り付けたセパラブル3つ口フラスコに、3,5-ジアミノ安息香酸を12.5g、2,2’-ビス[4―(4―アミノフェノキシ)フェニル]プロパンを8.2g、NMPを30g、γ-ブチロラクトンを30g、4,4’オキシジフタル酸無水物を27.9g、トリメリット酸無水物を3.8g加え、窒素雰囲気下、室温、100rpmで4時間撹拌した。次いでトルエンを20g加え、シリコン浴温度180℃、150rpmでトルエン及び水を留去しながら4時間撹拌して、イミド環含有アルカリ可溶性樹脂溶液を得た。 <Synthesis example of alkali-soluble resin having imide ring>
In a separable three-necked flask equipped with a stirrer, nitrogen inlet tube, fractional ring, and cooling ring, 12.5 g of 3,5-diaminobenzoic acid, 2,2′-bis [4- (4-aminophenoxy) Phenyl] propane (8.2 g), NMP (30 g), γ-butyrolactone (30 g), 4,4′-oxydiphthalic anhydride (27.9 g) and trimellitic anhydride (3.8 g) were added, and at room temperature and 100 rpm in a nitrogen atmosphere. Stir for 4 hours. Next, 20 g of toluene was added, and the mixture was stirred for 4 hours while distilling off toluene and water at a silicon bath temperature of 180 ° C. and 150 rpm to obtain an imide ring-containing alkali-soluble resin solution.
撹拌機、窒素導入管、分留環、冷却環を取り付けたセパラブル3つ口フラスコに、3,5-ジアミノ安息香酸を12.5g、2,2’-ビス[4―(4―アミノフェノキシ)フェニル]プロパンを8.2g、NMPを30g、γ-ブチロラクトンを30g、4,4’オキシジフタル酸無水物を27.9g、トリメリット酸無水物を3.8g加え、窒素雰囲気下、室温、100rpmで4時間撹拌した。次いでトルエンを20g加え、シリコン浴温度180℃、150rpmでトルエン及び水を留去しながら4時間撹拌して、イミド環含有アルカリ可溶性樹脂溶液を得た。 <Synthesis example of alkali-soluble resin having imide ring>
In a separable three-necked flask equipped with a stirrer, nitrogen inlet tube, fractional ring, and cooling ring, 12.5 g of 3,5-diaminobenzoic acid, 2,2′-bis [4- (4-aminophenoxy) Phenyl] propane (8.2 g), NMP (30 g), γ-butyrolactone (30 g), 4,4′-oxydiphthalic anhydride (27.9 g) and trimellitic anhydride (3.8 g) were added, and at room temperature and 100 rpm in a nitrogen atmosphere. Stir for 4 hours. Next, 20 g of toluene was added, and the mixture was stirred for 4 hours while distilling off toluene and water at a silicon bath temperature of 180 ° C. and 150 rpm to obtain an imide ring-containing alkali-soluble resin solution.
<他のアルカリ可溶性樹脂の反応開始温度の測定>
各アルカリ可溶性樹脂と、熱硬化成分(エポキシ当量が約190g/eqのビスフェノールA型エポキシ樹脂、製品名:E828、三菱化学社製)とを、カルボキシル基とエポキシ基とが当量比1:1となるように混合し、さらにオキシムエステル系光塩基発生剤(イルガキュアOXE-02、BASF社製)をアルカリ可溶性樹脂100質量部に対して10質量部混合し、試料とした。各試料5mgを感光しないようにDSC測定容器(セイコーインスツル社製 DSC6200)に採取し、25℃から200℃(昇温5℃/min)における反応熱を測定し、カルボキシル基とエポキシ基の反応による発熱反応の開始温度を解析し、示差走査熱の最少値を反応開始温度とした。結果を下記表1に示す。また、アルカリ可溶性樹脂3、アルカリ可溶性樹脂6の測定結果については、図2にDSCチャートを示す。図2中、符号6で示すチャートがアルカリ可溶性樹脂3の測定結果を、符号7で示すチャートがアルカリ可溶性樹脂6の測定結果を、それぞれ示す。 <Measurement of reaction start temperature of other alkali-soluble resins>
Each alkali-soluble resin, thermosetting component (bisphenol A type epoxy resin having an epoxy equivalent of about 190 g / eq, product name: E828, manufactured by Mitsubishi Chemical Corporation), carboxyl group and epoxy group having an equivalent ratio of 1: 1 Furthermore, 10 parts by mass of an oxime ester photobase generator (Irgacure OXE-02, manufactured by BASF) was mixed with 100 parts by mass of the alkali-soluble resin to prepare a sample. Collect 5 mg of each sample in a DSC measurement container (DSC6200 manufactured by Seiko Instruments Inc.) so as not to be exposed to light, measure the reaction heat from 25 ° C. to 200 ° C. (temperature increase 5 ° C./min), and react the carboxyl group with the epoxy group The starting temperature of the exothermic reaction was analyzed, and the minimum value of the differential scanning heat was taken as the starting temperature. The results are shown in Table 1 below. Moreover, about the measurement result of the alkali-soluble resin 3 and the alkali-soluble resin 6, a DSC chart is shown in FIG. In FIG. 2, the chart indicated by reference numeral 6 indicates the measurement result of the alkali-soluble resin 3, and the chart indicated by reference numeral 7 indicates the measurement result of the alkali-soluble resin 6.
各アルカリ可溶性樹脂と、熱硬化成分(エポキシ当量が約190g/eqのビスフェノールA型エポキシ樹脂、製品名:E828、三菱化学社製)とを、カルボキシル基とエポキシ基とが当量比1:1となるように混合し、さらにオキシムエステル系光塩基発生剤(イルガキュアOXE-02、BASF社製)をアルカリ可溶性樹脂100質量部に対して10質量部混合し、試料とした。各試料5mgを感光しないようにDSC測定容器(セイコーインスツル社製 DSC6200)に採取し、25℃から200℃(昇温5℃/min)における反応熱を測定し、カルボキシル基とエポキシ基の反応による発熱反応の開始温度を解析し、示差走査熱の最少値を反応開始温度とした。結果を下記表1に示す。また、アルカリ可溶性樹脂3、アルカリ可溶性樹脂6の測定結果については、図2にDSCチャートを示す。図2中、符号6で示すチャートがアルカリ可溶性樹脂3の測定結果を、符号7で示すチャートがアルカリ可溶性樹脂6の測定結果を、それぞれ示す。 <Measurement of reaction start temperature of other alkali-soluble resins>
Each alkali-soluble resin, thermosetting component (bisphenol A type epoxy resin having an epoxy equivalent of about 190 g / eq, product name: E828, manufactured by Mitsubishi Chemical Corporation), carboxyl group and epoxy group having an equivalent ratio of 1: 1 Furthermore, 10 parts by mass of an oxime ester photobase generator (Irgacure OXE-02, manufactured by BASF) was mixed with 100 parts by mass of the alkali-soluble resin to prepare a sample. Collect 5 mg of each sample in a DSC measurement container (DSC6200 manufactured by Seiko Instruments Inc.) so as not to be exposed to light, measure the reaction heat from 25 ° C. to 200 ° C. (temperature increase 5 ° C./min), and react the carboxyl group with the epoxy group The starting temperature of the exothermic reaction was analyzed, and the minimum value of the differential scanning heat was taken as the starting temperature. The results are shown in Table 1 below. Moreover, about the measurement result of the alkali-
※アルカリ可溶性樹脂2:ポリウレタンアクリレート(共栄社化学社製)、酸価47mgKOH/g
※アルカリ可溶性樹脂3:ビスフェノールF型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
※アルカリ可溶性樹脂4:ビスフェノールA型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
※アルカリ可溶性樹脂5:ビフェニル型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
※アルカリ可溶性樹脂6:フェノールノボラック型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
* Alkali-soluble resin 2: Polyurethane acrylate (manufactured by Kyoeisha Chemical Co., Ltd.), acid value 47 mgKOH / g
* Alkali-soluble resin 3: bisphenol F-type acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
* Alkali-soluble resin 4: bisphenol A acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
* Alkali-soluble resin 5: biphenyl type acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
* Alkali-soluble resin 6: phenol novolac acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
[実施例1~7、比較例1~3]
<樹脂組成物の調製>
下記表2記載の配合に従って、実施例、比較例に記載の材料をそれぞれ配合、攪拌機にて予備混合した後、3本ロールミルにて混練し、感光性光硬化性熱硬化性樹脂組成物を調製した。表中の値は、特に断りが無い限り固形分(質量部)である。 [Examples 1 to 7, Comparative Examples 1 to 3]
<Preparation of resin composition>
In accordance with the formulation shown in Table 2 below, the materials described in Examples and Comparative Examples were respectively blended, premixed with a stirrer, and then kneaded with a three-roll mill to prepare a photosensitive photocurable thermosetting resin composition. did. The values in the table are solids (parts by mass) unless otherwise specified.
<樹脂組成物の調製>
下記表2記載の配合に従って、実施例、比較例に記載の材料をそれぞれ配合、攪拌機にて予備混合した後、3本ロールミルにて混練し、感光性光硬化性熱硬化性樹脂組成物を調製した。表中の値は、特に断りが無い限り固形分(質量部)である。 [Examples 1 to 7, Comparative Examples 1 to 3]
<Preparation of resin composition>
In accordance with the formulation shown in Table 2 below, the materials described in Examples and Comparative Examples were respectively blended, premixed with a stirrer, and then kneaded with a three-roll mill to prepare a photosensitive photocurable thermosetting resin composition. did. The values in the table are solids (parts by mass) unless otherwise specified.
<樹脂層の形成工程>
銅厚18μmで回路が形成されているフレキシブルプリント配線基材を用意し、メック社CZ-8100を使用して、前処理を行った。その後、前記前処理を行ったフレキシブルプリント配線板に、実施例1~7、比較例1~3の樹脂組成物を液状塗布方法にて乾燥後で20μmになるようにコーティングを行った。その後、熱風循環式乾燥炉にて80℃、30分にて乾燥し、樹脂層を形成した。その後、ORC社HMW680GW(メタルハライドランプ、散乱光)にて500mJ/cm2の露光量でネガ型のパターン状に光照射した。 <Resin layer formation process>
A flexible printed wiring board having a copper thickness of 18 μm and a circuit formed thereon was prepared, and pretreated using Mec CZ-8100. Thereafter, the pre-treated flexible printed wiring board was coated with the resin compositions of Examples 1 to 7 and Comparative Examples 1 to 3 to 20 μm after drying by a liquid coating method. Then, it dried at 80 degreeC and 30 minutes with the hot-air circulation type drying furnace, and formed the resin layer. Thereafter, the film was irradiated with a negative pattern with an exposure amount of 500 mJ / cm 2 using ORC HMW680GW (metal halide lamp, scattered light).
銅厚18μmで回路が形成されているフレキシブルプリント配線基材を用意し、メック社CZ-8100を使用して、前処理を行った。その後、前記前処理を行ったフレキシブルプリント配線板に、実施例1~7、比較例1~3の樹脂組成物を液状塗布方法にて乾燥後で20μmになるようにコーティングを行った。その後、熱風循環式乾燥炉にて80℃、30分にて乾燥し、樹脂層を形成した。その後、ORC社HMW680GW(メタルハライドランプ、散乱光)にて500mJ/cm2の露光量でネガ型のパターン状に光照射した。 <Resin layer formation process>
A flexible printed wiring board having a copper thickness of 18 μm and a circuit formed thereon was prepared, and pretreated using Mec CZ-8100. Thereafter, the pre-treated flexible printed wiring board was coated with the resin compositions of Examples 1 to 7 and Comparative Examples 1 to 3 to 20 μm after drying by a liquid coating method. Then, it dried at 80 degreeC and 30 minutes with the hot-air circulation type drying furnace, and formed the resin layer. Thereafter, the film was irradiated with a negative pattern with an exposure amount of 500 mJ / cm 2 using ORC HMW680GW (metal halide lamp, scattered light).
<PEB工程の時間管理幅評価>
上記の樹脂層の形成工程により得られた露光後の樹脂層を有する基板を、90℃でそれぞれ20分、30分、40分、50分、60分、70分、80分、90分、100分、110分、120分間の加熱処理を行った。その後、30℃の1質量%炭酸ナトリウム水溶液中に加熱処理後の基板を浸漬して5分間現像を行い、現像性の可否を評価し、露光部が耐現像性を有する、即ち、膜減りが見られない加熱処理時間Aから、未露光部が現像で完全に除去できなくなる加熱処理時間Bまでの時間幅(B-A)を計算した。数値が多いほど、PEB工程の時間管理幅が大きく、取扱い性に優れる。 <Evaluation of time management width of PEB process>
The substrate having the exposed resin layer obtained by the above resin layer forming step was subjected to 20 minutes, 30 minutes, 40 minutes, 50 minutes, 60 minutes, 70 minutes, 80 minutes, 90 minutes, 100 at 90 ° C., respectively. Heat treatment was performed for minutes, 110 minutes, and 120 minutes. Thereafter, the substrate after the heat treatment is immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C., developed for 5 minutes, evaluated for developability, and the exposed portion has development resistance, that is, film thickness reduction. The time width (BA) from the heat treatment time A that was not observed to the heat treatment time B at which the unexposed area could not be completely removed by development was calculated. The greater the number, the greater the time management range of the PEB process and the better the handling.
上記の樹脂層の形成工程により得られた露光後の樹脂層を有する基板を、90℃でそれぞれ20分、30分、40分、50分、60分、70分、80分、90分、100分、110分、120分間の加熱処理を行った。その後、30℃の1質量%炭酸ナトリウム水溶液中に加熱処理後の基板を浸漬して5分間現像を行い、現像性の可否を評価し、露光部が耐現像性を有する、即ち、膜減りが見られない加熱処理時間Aから、未露光部が現像で完全に除去できなくなる加熱処理時間Bまでの時間幅(B-A)を計算した。数値が多いほど、PEB工程の時間管理幅が大きく、取扱い性に優れる。 <Evaluation of time management width of PEB process>
The substrate having the exposed resin layer obtained by the above resin layer forming step was subjected to 20 minutes, 30 minutes, 40 minutes, 50 minutes, 60 minutes, 70 minutes, 80 minutes, 90 minutes, 100 at 90 ° C., respectively. Heat treatment was performed for minutes, 110 minutes, and 120 minutes. Thereafter, the substrate after the heat treatment is immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C., developed for 5 minutes, evaluated for developability, and the exposed portion has development resistance, that is, film thickness reduction. The time width (BA) from the heat treatment time A that was not observed to the heat treatment time B at which the unexposed area could not be completely removed by development was calculated. The greater the number, the greater the time management range of the PEB process and the better the handling.
<PEB工程の温度による現像性評価>
上記の樹脂層の形成工程により得られた露光後の樹脂層を有する基板を、80℃60分、90℃30分、100℃15分間加熱処理を行った。その後30℃の1質量%の炭酸ナトリウム水溶液中に基板を浸漬して5分間現像を行い、パターン形成の可否を評価した。評価基準は下記の通り。
OK:露光部が耐現像性、未露光部が現像性を示し、パターン形成良好。
NG※1:露光部が現像液に溶解するためパターン形成不可。
NG※2:未露光部が現像液に溶解しないためパターン形成不可。 <Developability evaluation by temperature of PEB process>
The board | substrate which has the resin layer after the exposure obtained by the formation process of said resin layer was heat-processed for 80 degreeC 60 minutes, 90 degreeC 30 minutes, and 100 degreeC 15 minutes. Thereafter, the substrate was immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C. and developed for 5 minutes to evaluate the possibility of pattern formation. The evaluation criteria are as follows.
OK: The exposed area shows development resistance, the unexposed area shows developability, and the pattern formation is good.
NG * 1: Pattern cannot be formed because the exposed area is dissolved in the developer.
NG * 2: The pattern cannot be formed because the unexposed area does not dissolve in the developer.
上記の樹脂層の形成工程により得られた露光後の樹脂層を有する基板を、80℃60分、90℃30分、100℃15分間加熱処理を行った。その後30℃の1質量%の炭酸ナトリウム水溶液中に基板を浸漬して5分間現像を行い、パターン形成の可否を評価した。評価基準は下記の通り。
OK:露光部が耐現像性、未露光部が現像性を示し、パターン形成良好。
NG※1:露光部が現像液に溶解するためパターン形成不可。
NG※2:未露光部が現像液に溶解しないためパターン形成不可。 <Developability evaluation by temperature of PEB process>
The board | substrate which has the resin layer after the exposure obtained by the formation process of said resin layer was heat-processed for 80 degreeC 60 minutes, 90 degreeC 30 minutes, and 100 degreeC 15 minutes. Thereafter, the substrate was immersed in a 1% by mass sodium carbonate aqueous solution at 30 ° C. and developed for 5 minutes to evaluate the possibility of pattern formation. The evaluation criteria are as follows.
OK: The exposed area shows development resistance, the unexposed area shows developability, and the pattern formation is good.
NG * 1: Pattern cannot be formed because the exposed area is dissolved in the developer.
NG * 2: The pattern cannot be formed because the unexposed area does not dissolve in the developer.
※アルカリ可溶性樹脂1:カルボキシル基含有ポリウレタン(根上工業社製)、酸価50mgKOH/g
※アルカリ可溶性樹脂2:ポリウレタンアクリレート(共栄社化学社製)、酸価47mgKOH/g
※アルカリ可溶性樹脂3:ビスフェノールF型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
※アルカリ可溶性樹脂4:ビスフェノールA型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
※アルカリ可溶性樹脂5:ビフェニル型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
※アルカリ可溶性樹脂6:フェノールノボラック型アクリレート樹脂(日本化薬社製)、酸価98mgKOH/g
※E828:ビスフェノールA型エポキシ樹脂(三菱化学社製)、エポキシ当量190g/eq
※イルガキュアOXE-2:オキシムエステル系光塩基発生剤(BASFジャパン社製)
* Alkali-soluble resin 1: carboxyl group-containing polyurethane (manufactured by Negami Kogyo Co., Ltd.), acid value 50 mgKOH / g
* Alkali-soluble resin 2: Polyurethane acrylate (manufactured by Kyoeisha Chemical Co., Ltd.), acid value 47 mgKOH / g
* Alkali-soluble resin 3: bisphenol F-type acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
* Alkali-soluble resin 4: bisphenol A acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
* Alkali-soluble resin 5: biphenyl type acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
* Alkali-soluble resin 6: phenol novolac acrylate resin (manufactured by Nippon Kayaku Co., Ltd.), acid value 98 mgKOH / g
* E828: bisphenol A type epoxy resin (Mitsubishi Chemical Corporation), epoxy equivalent 190 g / eq
* Irgacure OXE-2: Oxime ester photobase generator (BASF Japan)
表1に示す評価結果から明らかなように、実施例1~7の感光性熱硬化性樹脂組成物は、PEB工程の時間管理幅が大きく、80℃、90℃、100℃のいずれの温度での露光後加熱処理であっても現像性が良好であった。
As is clear from the evaluation results shown in Table 1, the photosensitive thermosetting resin compositions of Examples 1 to 7 have a large time management range in the PEB process, and are any of 80 ° C., 90 ° C., and 100 ° C. The developability was good even in the post-exposure heat treatment.
1 フレキシブルプリント配線基材
2 銅回路
3 樹脂層
4 樹脂層
5 マスク
6 アルカリ可溶性樹脂3+Bis-A エポキシ樹脂
7 アルカリ可溶性樹脂6+Bis-A エポキシ樹脂 DESCRIPTION OFSYMBOLS 1 Flexible printed wiring board 2 Copper circuit 3 Resin layer 4 Resin layer 5 Mask 6 Alkali-soluble resin 3 + Bis-A epoxy resin 7 Alkali-soluble resin 6 + Bis-A epoxy resin
2 銅回路
3 樹脂層
4 樹脂層
5 マスク
6 アルカリ可溶性樹脂3+Bis-A エポキシ樹脂
7 アルカリ可溶性樹脂6+Bis-A エポキシ樹脂 DESCRIPTION OF
Claims (7)
- イミド環を有するアルカリ可溶性樹脂、該イミド環を有するアルカリ可溶性樹脂以外の他のアルカリ可溶性樹脂、光塩基発生剤及び熱硬化成分を含むことを特徴とする感光性熱硬化性樹脂組成物。 A photosensitive thermosetting resin composition comprising an alkali-soluble resin having an imide ring, an alkali-soluble resin other than the alkali-soluble resin having an imide ring, a photobase generator, and a thermosetting component.
- 前記他のアルカリ可溶性樹脂が、構造中にウレタン結合、ビスフェノールA骨格、ビスフェノールF骨格、ビスフェノールS骨格、ビフェニル骨格のいずれか1種以上を有することを特徴とする請求項1記載の感光性熱硬化性樹脂組成物。 2. The photosensitive thermosetting according to claim 1, wherein the other alkali-soluble resin has one or more of a urethane bond, a bisphenol A skeleton, a bisphenol F skeleton, a bisphenol S skeleton, and a biphenyl skeleton in the structure. Resin composition.
- 前記他のアルカリ可溶性樹脂の含有量が、前記イミド環を有するアルカリ可溶性樹脂100質量部に対して10~70質量部であることを特徴とする請求項1記載の感光性熱硬化性樹脂組成物。 The photosensitive thermosetting resin composition according to claim 1, wherein the content of the other alkali-soluble resin is 10 to 70 parts by mass with respect to 100 parts by mass of the alkali-soluble resin having an imide ring. .
- 前記熱硬化成分が、環状エーテル基および環状チオエーテル基のいずれか1種以上を有する化合物であることを特徴とする請求項1記載の感光性熱硬化性樹脂組成物。 The photosensitive thermosetting resin composition according to claim 1, wherein the thermosetting component is a compound having at least one of a cyclic ether group and a cyclic thioether group.
- 請求項1記載の感光性熱硬化性樹脂組成物を塗布・乾燥してなることを特徴とするドライフィルム。 A dry film obtained by applying and drying the photosensitive thermosetting resin composition according to claim 1.
- 請求項1記載の感光性熱硬化性樹脂組成物または該組成物を塗布・乾燥してなるドライフィルムを硬化して得られることを特徴とする硬化塗膜。 A cured coating film obtained by curing the photosensitive thermosetting resin composition according to claim 1 or a dry film formed by applying and drying the composition.
- 請求項1記載の感光性熱硬化性樹脂組成物または該組成物を塗布・乾燥してなるドライフィルムを硬化して得られる硬化塗膜を有することを特徴とするプリント配線板。 A printed wiring board having a cured coating film obtained by curing the photosensitive thermosetting resin composition according to claim 1 or a dry film formed by applying and drying the composition.
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TWI731961B (en) | 2016-04-19 | 2021-07-01 | 德商馬克專利公司 | Positive working photosensitive material and method of forming a positive relief image |
CN108709861A (en) * | 2018-06-01 | 2018-10-26 | 廊坊立邦涂料有限公司 | A kind of detection method of resin miscible |
CN108919550A (en) * | 2018-07-18 | 2018-11-30 | 深圳市华星光电技术有限公司 | Color membrane substrates and preparation method thereof, liquid crystal display panel |
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CN111423582B (en) * | 2020-01-09 | 2023-04-18 | 上海极紫科技有限公司 | Polyimide resin for positive photoresist and preparation method thereof |
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CN105683837B (en) | 2020-04-07 |
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