TWI614571B - Laminated structure, flexible printed wiring board and method of manufacturing same - Google Patents
Laminated structure, flexible printed wiring board and method of manufacturing same Download PDFInfo
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- TWI614571B TWI614571B TW103114237A TW103114237A TWI614571B TW I614571 B TWI614571 B TW I614571B TW 103114237 A TW103114237 A TW 103114237A TW 103114237 A TW103114237 A TW 103114237A TW I614571 B TWI614571 B TW I614571B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0183—Dielectric layers
- H05K2201/0195—Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3452—Solder masks
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- Microelectronics & Electronic Packaging (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
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Abstract
本發明提供一種可於可撓性印刷配線板上形成微細圖型,且絕緣性、彎曲性優異之感光性樹脂構造物、及具有其硬化物作為保護膜例如覆蓋膜(coverlay)或防焊劑之可撓性印刷配線板。 The present invention provides a photosensitive resin structure capable of forming a fine pattern on a flexible printed wiring board, and having excellent insulation and bendability, and a hardened material as a protective film such as a coverlay or a solder resist. Flexible printed wiring board.
本發明之感光性樹脂構造物之特徵係具有顯像性接著層(a)、與經由該顯像性接著層(a)而層合於可撓性印刷配線板之顯像性保護層(b)之感光性樹脂構造物,至少前述顯像性保護層(b)係藉由光照射而能圖型化,且,前述顯像性接著層(a)與前述顯像性保護層(b)係能藉由顯像而一次性形成圖型。 The photosensitive resin structure of the present invention is characterized by having a developable adhesive layer (a) and a developable protective layer (b) laminated on the flexible printed wiring board via the developable adhesive layer (a). ), At least the above-mentioned developing protective layer (b) can be patterned by light irradiation, and the above-mentioned developing adhesive layer (a) and the above-mentioned developing protective layer (b) are patterned. The pattern can be formed at one time by developing.
Description
本發明係關於層合構造物、尤其是感光性樹脂構造物以及使用其之乾膜及可撓性印刷配線板,詳言之,係關於可於可撓性印刷配線板上形成微細圖型之感光性樹脂構造物、及具有其硬化物作為保護膜例如覆蓋膜或防焊劑之可撓性印刷配線板及其製造方法。 The present invention relates to a laminated structure, particularly a photosensitive resin structure, a dry film using the same, and a flexible printed wiring board. Specifically, the present invention relates to a structure capable of forming a fine pattern on a flexible printed wiring board. A photosensitive resin structure, and a flexible printed wiring board having the cured product as a protective film such as a cover film or a solder resist, and a method for producing the same.
過去,作為可撓性印刷配線板之保護膜,係使用將熱硬化型接著劑塗佈於聚醯亞胺等薄膜上而成之非感光性樹脂構造物。使該非感光性樹脂構造物進行圖型加工並形成於可撓性印刷配線板上之方法,過去有藉沖壓進行空孔加工後,熱壓著於可撓性印刷配線板上之方法。或者,將溶劑可溶性之熱硬化型樹脂組成物直接圖型印刷於可撓性印刷配線板上,經熱硬化而形成圖型之方法。尤其,聚醯亞胺薄膜由於一方面具有柔軟性,一方面耐熱性、機械特性、電特性優異,故可使用作為對於可撓性印刷配線板之較佳材料(參照例如專利文獻1)。 Conventionally, as a protective film for a flexible printed wiring board, a non-photosensitive resin structure obtained by applying a thermosetting adhesive to a film such as polyimide has been used. The method of patterning the non-photosensitive resin structure and forming it on a flexible printed wiring board has conventionally been a method of hot pressing the flexible printed wiring board after performing hole processing by punching. Alternatively, a solvent-soluble thermosetting resin composition is directly pattern-printed on a flexible printed wiring board, and a pattern is formed by heat curing. In particular, a polyimide film has flexibility on the one hand, and excellent heat resistance, mechanical properties, and electrical properties on the other hand, so it can be used as a preferred material for a flexible printed wiring board (see, for example, Patent Document 1).
然而,上述過去之方法由於圖型端部在塗佈 時或熱壓著時之樹脂滲出而使形狀崩塌,故難以形成配線之微細化或搭載於可撓性印刷配線板上之晶片零件之小型化等所要求之微細圖型。 However, the past method described above is due to the pattern end being coated Resin oozing out at the time of heat or pressure bonding causes the shape to collapse, so it is difficult to form fine patterns required for miniaturization of wiring or miniaturization of chip components mounted on flexible printed wiring boards.
另一方面,近年來,因智慧型手機或平板終端之普及導致之電子設備之小型薄型,因此電路基板之小尺寸化變得必要。因此,可彎曲收納之可撓性印刷配線板之用途擴大,且對於該可撓性印刷配線板之信賴性亦要求高至迄今以上者。 On the other hand, in recent years, electronic devices have become small and thin due to the spread of smart phones or tablet terminals. Therefore, the downsizing of circuit boards has become necessary. Therefore, the use of the flexible printed wiring board which can be flexibly accommodated is expanded, and the reliability of the flexible printed wiring board is also required to be higher than that so far.
相對於此,目前作為用於確保可撓性印刷配係板之絕緣信賴性之絕緣膜,係廣泛採用於彎折部(彎曲部)使用以耐熱性及彎曲性等機械特性優異之聚醯亞胺作為基底之覆蓋膜(參照例如專利文獻2、3),於安裝部(非彎曲部)使用電絕緣性或焊接耐熱性等優異之可微細加工之感光性樹脂組成物之混載製程。 In contrast, currently used as an insulating film for ensuring the reliability of insulation of flexible printed matching boards, it is widely used in bending parts (curved parts). Polyurethane, which has excellent mechanical properties such as heat resistance and bendability, is used. An amine is used as a base cover film (refer to, for example, Patent Documents 2 and 3), and a mounting process (a non-bent portion) is used in a mounting process (non-curved portion) using a micro-processable photosensitive resin composition that is excellent in electrical insulation and soldering heat resistance.
然而,以耐熱性及彎曲性等機械特性優異之聚醯亞胺作為基底之覆蓋膜有必要利用模具沖壓加工,故不適於微細配線。因此,需要微細配線之晶片安裝部必須部份地併用可利用微影進行加工之鹼顯像型之感光性樹脂組成物(防焊劑)。 However, a cover film based on polyimide, which is excellent in mechanical properties such as heat resistance and bendability, needs to be stamped with a die, and is not suitable for fine wiring. Therefore, the wafer mounting portion requiring fine wiring must be partially combined with an alkali developing type photosensitive resin composition (solder resist) that can be processed by lithography.
專利文獻1:WO2012/133665號公報 Patent Document 1: WO2012 / 133665
專利文獻2:日本特開昭62-263692號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 62-263692
專利文獻3:日本特開昭63-110224號公報 Patent Document 3: Japanese Patent Application Laid-Open No. 63-110224
據此,可撓性印刷配線板之製造步驟無法採用貼合覆蓋膜之步驟與形成防焊劑之步驟之混載製程,而有成本與作業性差之問題。 According to this, the manufacturing steps of the flexible printed wiring board cannot adopt the mixed loading process of the step of laminating the cover film and the step of forming the solder resist, and there are problems of cost and poor workability.
對於該混載製程,過去已提案使用作為防焊劑之絕緣膜作為可撓性印刷配線板之覆蓋膜。然而,可撓性印刷配線板中之感光性防焊劑中,為了賦予柔軟性而必須低交聯密度化或添加彈性成分,因此使電信賴性或耐衝擊性、彎曲性等降低,該等信賴性比熱硬化型保護膜更差。因此,彎折部(彎曲部)與安裝部(非彎曲部)之一次性形成製程至今尚未實用化。且,防焊劑用之樹脂組成物由於亦伴隨著丙烯酸系光聚合而硬化收縮,故亦有可撓性配線板之翹曲等尺寸安定性方面之課題。 For this mixed process, it has been proposed in the past to use an insulating film as a solder resist as a cover film for a flexible printed wiring board. However, in a photosensitive solder resist for a flexible printed wiring board, in order to impart flexibility, it is necessary to reduce the cross-linking density or to add an elastic component. Therefore, electrical reliability, impact resistance, and bendability are reduced. The performance is worse than the thermosetting protective film. Therefore, the one-time forming process of the bent portion (curved portion) and the mounting portion (non-curved portion) has not yet been put into practical use. In addition, since the resin composition for a solder resist is hardened and contracted along with acrylic photopolymerization, there is also a problem of dimensional stability such as warpage of a flexible wiring board.
相對於此,作為可兼具鹼溶解性與機械特性之感光性聚醯亞胺,過去亦提案利用聚醯亞胺前驅物,經圖型化後進行熱閉環之方法。然而,於需要高溫處理等配線板製造之作業性方面仍留有問題,迄今依然無法實用化。 On the other hand, as a photosensitive polyimide that can have both alkali solubility and mechanical properties, a method of using a polyimide precursor to thermally close the ring after patterning has been proposed in the past. However, there are still problems in the workability of manufacturing wiring boards that require high-temperature processing, etc., and they have not been put to practical use.
此外,亦考慮使用作為覆蓋膜之絕緣膜作為可撓性印刷配線板之防焊劑,但該覆蓋膜用之薄膜在圖型形成上需要複雜步驟,且因使圖型化所致之孔洞等之加工 精度降低或熱壓著時之樹脂滲出,而有不易對應微細圖型形成之問題。 In addition, it is also considered to use an insulating film as a cover film as a solder resist for a flexible printed wiring board. However, the film for the cover film requires complicated steps in pattern formation, and the holes caused by patterning etc. machining There is a problem that the resin oozes out when the accuracy is reduced or is hot-pressed, and it is difficult to cope with the formation of fine patterns.
因此本發明之目的係提供可於可撓性印刷配線板上形成微細圖型,且絕緣性、彎曲性優異之感光性樹脂構造物,以及具有其硬化物作為保護膜例如覆蓋膜或防焊劑之可撓性印刷配線板。 It is therefore an object of the present invention to provide a photosensitive resin structure capable of forming a fine pattern on a flexible printed wiring board, and having excellent insulation and bendability, and a hardened material as a protective film such as a cover film or a solder resist. Flexible printed wiring board.
此外,本發明之另一目的係提供耐衝擊性或彎曲性、低翹曲性等信賴性與加工精度優異,且作業性優異之可撓性印刷配線板用之絕緣膜、尤其是適於彎折部(彎曲部)與安裝部(非彎曲部)之一次性形成製程之層合構造物,與具有其硬化物作為保護膜例如覆蓋膜或防焊劑之耐衝擊性或彎曲性等信賴性優異之可撓性印刷配線板。 In addition, another object of the present invention is to provide an insulating film for a flexible printed wiring board, which is excellent in reliability, processing accuracy, and excellent workability, such as impact resistance, bendability, and low warpage, and is particularly suitable for bending. Laminated structure (folded part) and mounting part (non-bent part) are laminated structures with a one-time manufacturing process, and have excellent reliability such as impact resistance or bendability that has a hardened material as a protective film such as a cover film or solder resist Flexible printed wiring board.
此外,本發明之又另一目的係提供可作業性良好、一次性形成耐衝擊性、彎曲性及低翹曲性等信賴性與加工精度優異之可撓性印刷配線板用之絕緣膜、尤其是彎折部(彎曲部)與安裝部(非彎曲部)中之絕緣膜例如覆蓋膜或防焊劑之可撓性印刷配線板之製造方法,及可撓性印刷配線板。 In addition, another object of the present invention is to provide an insulating film for a flexible printed wiring board having excellent workability, excellent reliability such as impact resistance, bendability, and low warpage at one time, and excellent processing accuracy. It is a method of manufacturing a flexible printed wiring board with an insulating film such as a cover film or a solder resist in the bent portion (curved portion) and the mounting portion (non-curved portion), and the flexible printed wiring board.
本發明人等針對實現上述目的而積極檢討之結果,發現藉由使可撓性印刷配線板之保護膜成為由層合複數層之顯像性樹脂層而成之感光性樹脂構造物獲得之構 造可達成前述目的,因而完成本發明。 As a result of an active review by the present inventors in order to achieve the above-mentioned object, it was found that the protective film of a flexible printed wiring board is a structure obtained by laminating a plurality of layers of a photosensitive resin structure with a photosensitive resin structure The foregoing objects are achieved so that the present invention is completed.
亦即,本發明之感光性樹脂構造物之特徵係具有顯像性接著層(a)、與經由該顯像性接著層(a)而層合於可撓性印刷配線板之顯像性保護層(b)之感光性樹脂構造物;其中至少前述顯像性保護層(b)係藉由光照射而能圖型化者,且,前述顯像性接著層(a)與前述顯像性保護層(b)係能藉由顯像而一次性形成圖型者。 That is, the photosensitive resin structure of the present invention is characterized by having a developable adhesive layer (a) and a developable protection layer laminated on the flexible printed wiring board via the developable adhesive layer (a). The photosensitive resin structure of the layer (b); at least the above-mentioned developable protective layer (b) is capable of being patterned by light irradiation, and the aforementioned developability is followed by the layer (a) and the aforementioned developability The protective layer (b) is capable of forming a pattern at one time by developing.
尤其,較好前述顯像性接著層(a)與前述顯像性保護層(b)可一起藉由光照射而圖型化者。 In particular, it is preferred that the imageable adhesive layer (a) and the imageable protective layer (b) can be patterned together by light irradiation.
此外,本發明之感光性樹脂構造物中,較好前述顯像性接著層(a)比前述顯像性保護層(b)更厚。 In the photosensitive resin structure of the present invention, it is preferable that the developable adhesive layer (a) is thicker than the developable protective layer (b).
再者,本發明之感光性樹脂構造物可使用於可撓性印刷配線板之彎曲部及非彎曲部中之至少任意一者,且可使用以形成撓性印刷配線板之覆蓋膜及防焊劑中之至少任意一者。 In addition, the photosensitive resin structure of the present invention can be used for at least one of a bent portion and a non-bent portion of a flexible printed wiring board, and can be used to form a cover film and a solder resist of the flexible printed wiring board. At least one of them.
本發明之乾膜之特徵係前述感光性樹脂構造物之至少一面受到膜支撐或保護者。 The dry film of the present invention is characterized in that at least one side of the photosensitive resin structure is supported or protected by the film.
且,本發明之可撓性印刷配線板之特徵係具有保護膜,該保護膜係藉由光照射使形成於可撓性印刷配線板上之前述感光性樹脂構造物進行圖型化,且藉由顯像一次性形成圖型而成。 In addition, the flexible printed wiring board of the present invention is characterized by having a protective film, and the protective film is patterned by light irradiation on the photosensitive resin structure formed on the flexible printed wiring board, and It is formed by developing a pattern at one time.
較好,前述顯像性接著層(a)係於可撓性印刷配線板上塗佈感光性或非感光性之樹脂組成物(a1)而形成。 Preferably, the developable adhesive layer (a) is formed by coating a photosensitive or non-photosensitive resin composition (a1) on a flexible printed wiring board.
又,本發明人等為實現其他目的而積極研究之結果,以如下內容為主旨而完成本發明。 In addition, as a result of intensive studies by the present inventors to achieve other purposes, the present invention has been completed with the following main points as the main points.
亦即,本發明之層合構造物之特徵係具有由鹼顯像型樹脂組成物所構成之樹脂層(A)、與經由該樹脂層(A)而層合於可撓性印刷配線板之樹脂層(B)之層合構造物;前述樹脂層(B)係由包含具有醯亞胺環之鹼溶解性樹脂、光鹼產生劑與熱反應性化合物之感光性熱硬化性樹脂組成物所構成者。 That is, the laminated structure of the present invention is characterized by having a resin layer (A) composed of an alkali-developing resin composition, and a layer laminated on a flexible printed wiring board via the resin layer (A). Laminated structure of a resin layer (B); the resin layer (B) is a photosensitive thermosetting resin composition containing an alkali-soluble resin having a fluorene imine ring, a photo-alkali generator, and a heat-reactive compound. Constructor.
本發明之層合構造物較好為前述樹脂層(A)與前述樹脂層(B)係能一同藉由光照射而圖型化者。 The laminated structure of the present invention is preferably one in which the resin layer (A) and the resin layer (B) can be patterned together by light irradiation.
此外,本發明之層合構造物係可使用於可撓性印刷配線板之彎曲部及非彎曲部之中之至少任意一者,且,係可使用作為可撓性印刷配線板之覆蓋膜、防焊劑及層間絕緣材料之中之至少任意一種用途。 The laminated structure of the present invention can be used in at least one of a bent portion and a non-bent portion of a flexible printed wiring board, and can be used as a cover film of a flexible printed wiring board, Use of at least one of a solder resist and an interlayer insulating material.
本發明之乾膜之特徵係前述層合構造物之至少一面受到膜支撐或保護者。 The dry film of the present invention is characterized in that at least one side of the aforementioned laminated structure is supported or protected by the film.
本發明之可撓性印刷配線板之特徵係具有絕緣膜者,該絕緣膜係於可撓性印刷配線板上形成前述層合構造物之層,且藉由光照射而圖型化,於顯像液中一次性形成圖型而成。 The flexible printed wiring board of the present invention is characterized by having an insulating film. The insulating film forms a layer of the aforementioned laminated structure on the flexible printed wiring board, and is patterned by light irradiation. A pattern is formed in the image liquid at one time.
本發明之可撓性印刷配線板亦可不使用本發明之該層合構造物,而依序形成樹脂層(A)與樹脂層(B),隨後,藉光照射圖型化,以顯像液一次性形成圖型。 The flexible printed wiring board of the present invention can also sequentially form the resin layer (A) and the resin layer (B) without using the laminated structure of the present invention, and then patterning by light irradiation to develop a developing solution. Create a pattern at once.
又,本發明中所謂「圖型」係指圖型狀之硬化物,亦 即絕緣膜。 The "pattern" in the present invention refers to a hardened product in a pattern, and That is, an insulating film.
且,本發明人等針對實現上述其他目的而積極研究之結果,而完成以如下內容為主旨之本發明。 In addition, the present inventors have actively researched to achieve the other objects described above, and have completed the present invention with the following main points.
亦即,本發明之可撓性印刷配線板之製造方法之特徵係包含以下步驟:於可撓性印刷配線板上形成至少一層由鹼顯像型感光性樹脂組成物(A1)所構成之樹脂層(A)的步驟、於前述樹脂層(A)上形成至少一層由包含具有醯亞胺環之鹼溶解性樹脂、光鹼產生劑、及熱反應性化合物之感光性熱硬化性樹脂組成物(B1)所構成之樹脂層(B)的步驟、於前述步驟中已形成之樹脂層(A)與(B)上將光照射成圖型狀之步驟、加熱於前述步驟中經光照射之樹脂層(A)與(B)的步驟、及、鹼顯像前述經光照射之樹脂層(A)與(B)而形成覆蓋膜、及防焊劑中之至少任一者的步驟。 That is, the method for manufacturing a flexible printed wiring board of the present invention is characterized by including the steps of forming at least one layer of a resin composed of an alkali-developing photosensitive resin composition (A1) on the flexible printed wiring board. In the step of layer (A), at least one layer of a photosensitive thermosetting resin composition comprising an alkali-soluble resin having a fluorene imine ring, a photo-alkali generator, and a heat-reactive compound is formed on the resin layer (A). (B1) A step of forming the resin layer (B), a step of irradiating light into a pattern on the resin layers (A) and (B) formed in the foregoing step, and heating the light-irradiated portion in the foregoing step. The steps of the resin layers (A) and (B), and the step of alkali developing the resin layers (A) and (B) irradiated with light to form at least one of a cover film and a solder resist.
本發明之可撓性印刷配線板之特徵為藉由上述製造方法所製造者。 The flexible printed wiring board of this invention is characterized by being manufactured by the said manufacturing method.
依據本發明,可提供一種可於可撓性印刷配線板上形成微細圖型,絕緣性、彎曲性優異之感光性樹脂構造物,與具有其硬化物作為保護膜,例如覆蓋膜或防焊劑之可撓性印刷配線板 According to the present invention, it is possible to provide a photosensitive resin structure capable of forming a fine pattern on a flexible printed wiring board, and having excellent insulation and bendability, and a hardened material as a protective film, such as a cover film or a solder resist. Flexible printed wiring board
且,依據本發明可提供一種耐衝擊性或彎曲性、低翹曲性等信賴性與加工精度優異,且作業性優異之 可撓性印刷配線板用之絕緣膜、尤其是適於彎折部(彎曲部)與安裝部(非彎曲部)之一次性形成製程之層合構造物,與具有其硬化物作為絕緣膜例如覆蓋膜或防焊劑、層間絕緣膜之耐衝擊性或彎曲性等信賴性優異之可撓性印刷配線板。 In addition, according to the present invention, it is possible to provide an excellent reliability and processing accuracy such as impact resistance, bendability, and low warpage, and excellent workability. An insulating film for a flexible printed wiring board, particularly a laminated structure suitable for a one-time forming process of a bent portion (bent portion) and a mounting portion (non-bent portion), and having a cured material as an insulating film, for example Flexible printed wiring boards with excellent reliability such as cover films, solder resists, and interlayer insulation films, such as impact resistance and bendability.
再者,依據本發明,可提供一種可作業性良好、一次性形成耐衝擊性、彎曲性、及低翹曲性等信賴性與加工精度優異之可撓性印刷配線板用之絕緣膜、尤其是彎折部(彎曲部)與安裝部(非彎曲部)中之絕緣膜,例如覆蓋膜或防焊劑之可撓性印刷配線板之製造方法,及可撓性印刷配線板。 Furthermore, according to the present invention, it is possible to provide an insulating film for a flexible printed wiring board having good workability, excellent reliability such as impact resistance, bendability, and low warpage at one time, and excellent processing accuracy. It is a method for manufacturing a flexible printed wiring board, such as a cover film or a solder resist, for an insulating film in a bent part (bent part) and a mounting part (non-bent part), and a flexible printed wiring board.
1‧‧‧感光性樹脂構造物 1‧‧‧ photosensitive resin structure
2‧‧‧可撓性基材 2‧‧‧ flexible substrate
3‧‧‧銅電路 3‧‧‧copper circuit
a‧‧‧顯像性接著層 a‧‧‧Imaging layer
b‧‧‧顯像性保護層 b‧‧‧ Imaging protective layer
11‧‧‧可撓性印刷配線基材 11‧‧‧ Flexible printed wiring substrate
12‧‧‧銅電路 12‧‧‧copper circuit
13‧‧‧樹脂層 13‧‧‧resin layer
14‧‧‧樹脂層 14‧‧‧ resin layer
15‧‧‧遮罩 15‧‧‧Mask
圖1係本發明一實施形態之層合有層合構造物之可撓性印刷配線板之概略剖面圖。 FIG. 1 is a schematic cross-sectional view of a flexible printed wiring board in which a laminated structure is laminated according to an embodiment of the present invention.
圖2係對圖1所示之層合構造物施以圖型化及顯像處理後之可撓性印刷配線板之概略剖面圖。 FIG. 2 is a schematic cross-sectional view of a flexible printed wiring board obtained by subjecting the laminated structure shown in FIG. 1 to patterning and development processing.
圖3係示意性顯示本發明之可撓性印刷配線板之製造方法之一例之步驟圖。 FIG. 3 is a step diagram schematically showing an example of a method for manufacturing a flexible printed wiring board according to the present invention.
以下,針對本發明之實施樣態加以詳細說明。 Hereinafter, embodiments of the present invention will be described in detail.
本發明之感光性樹脂構造物意指可層合於可撓性印刷配線板上,且可藉光照射於可撓性印刷配線板上而圖型化,且可藉顯像一次性形成圖型者。此處,圖型係指圖型狀之硬化物,亦即保護膜。 The photosensitive resin structure of the present invention means that it can be laminated on a flexible printed wiring board, and can be patterned by irradiating light onto the flexible printed wiring board, and can be formed into a pattern at one time by imaging. By. Here, the pattern refers to a patterned hardened material, that is, a protective film.
過去,係將接著劑塗佈於經圖型化加工之覆蓋膜上後,將覆蓋膜壓著於印刷配線板上,但本發明可將顯像性接著層(a)與顯像性保護層(b)層合於可撓性印刷配線板上後,藉光照射及顯像而一次性形成圖型 In the past, an adhesive was applied to a patterned cover film, and then the cover film was pressed against a printed wiring board. However, the present invention can form a developing adhesive layer (a) and a developing protective layer. (b) After being laminated on a flexible printed wiring board, a pattern is formed at one time by light irradiation and development.
圖1係顯示本發明一實施形態之感光性樹脂構造物。 FIG. 1 shows a photosensitive resin structure according to an embodiment of the present invention.
圖示之構造物1係可在可撓性基板2上形成有銅電路3之可撓性印刷配線板上依序具有顯像性接著層(a)與顯像性保護層(b),且藉光照射至少使顯像性保護層(b)圖型化,且顯像性接著層(a)與顯像性保護層(b)可藉顯像而一次性形成者。此處,所謂圖型化係指經光照射部分自不可顯像之狀態轉化成可顯像之狀態(正型),或自可顯像之狀態轉化成不可顯像之狀態(負型)。且,所謂圖型之形成係指光照射部分經顯像而未照射部分以圖型狀殘留(正型),或未照射部分經顯像而光照射部份以圖型狀殘留(負型)。 The structure 1 shown in the figure is a flexible printed wiring board on which a copper circuit 3 is formed on a flexible substrate 2 and has a developable adhesive layer (a) and a developable protective layer (b) in this order, and The pattern of the developable protective layer (b) is irradiated with light at least, and the developable adhesive layer (a) and the developable protective layer (b) can be formed at once by developing. Here, the term "patternization" means that the light-irradiated part is converted from a non-imaging state to a developable state (positive type), or a self-imaging state is converted to a non-degradable state (negative type). And, the formation of a pattern means that the light-irradiated part is developed and the unirradiated part remains as a pattern (positive type), or the unirradiated part is developed and the light-irradiated part remains as a pattern (negative type) .
尤其,本發明之感光性樹脂構造物之顯像性接著層(a)與顯像性保護層(b)可一起藉光照射而圖型化時,由於可形成微細圖型故較佳。 In particular, when the developable adhesive layer (a) and the developable protective layer (b) of the photosensitive resin structure of the present invention can be patterned by light irradiation, it is preferable to form a fine pattern.
顯像性接著層(a)係由感光性或非感光性之樹脂組成物(a1)形成,顯像性保護層(b)係由與樹脂組成物(a1)不同之感光性樹脂組成物(b1)形成。 The developable adhesive layer (a) is made of a photosensitive or non-photosensitive resin composition (a1), and the developable protective layer (b) is made of a photosensitive resin composition (a) different from the resin composition (a1) ( b1) formation.
感光性或非感光性之樹脂組成物(a1)主要由可對保護膜賦予彎曲性之材料適當選擇。為了形成微細圖型,樹脂組成物(a1)較好為感光性。 The photosensitive or non-photosensitive resin composition (a1) is mainly appropriately selected from a material capable of imparting flexibility to a protective film. In order to form a fine pattern, the resin composition (a1) is preferably photosensitive.
另一方面,感光性樹脂組成物(b1)主要由可賦予絕緣之材料適當選擇。 On the other hand, the photosensitive resin composition (b1) is mainly appropriately selected from materials that can provide insulation.
本發明中,基於對保護膜之銅電路之追隨性與彎曲性之觀點而言,顯像性接著層(a)較好比顯像性保護層(b)更厚。且,本發明之感光性樹脂構造物可使用於可撓性印刷配線板之彎曲部及非彎曲部中之至少任意一者,具體而言,可使用於形成可撓性印刷配線板之覆蓋膜及防焊劑中之至少任意一者。非彎曲部列舉為晶片之安裝部。 In the present invention, from the viewpoint of followability and bendability of the copper circuit of the protective film, the developable adhesive layer (a) is preferably thicker than the developable protective layer (b). In addition, the photosensitive resin structure of the present invention can be used for at least one of a bent portion and a non-bent portion of a flexible printed wiring board, and specifically, can be used to form a cover film for a flexible printed wiring board. And at least one of the solder resist. The non-bent portion is exemplified as a mounting portion of a wafer.
顯像方法可使用鹼性水溶液顯像(以下,亦稱為鹼顯像),亦可使用有機溶劑顯像,但以鹼顯像較佳。 The development method can be developed using an alkaline aqueous solution (hereinafter, also referred to as alkali development) or organic solvents, but it is preferable to use an alkali development.
顯像性接著層(a)及顯像性保護層(b)中可使用之感光性樹脂組成物(a1)及(b1)可為正型亦可為負型。 The photosensitive resin compositions (a1) and (b1) that can be used in the developable adhesive layer (a) and the developable protective layer (b) may be positive or negative.
正型感光性組成物若為因光照射前後之極性變化,而可藉顯像液使光照射部(亦稱為曝光部)溶解者,則可使用習知慣用者。列舉為例如含有重氮萘醌化合物與鹼可溶性樹脂之組成物。 If the positive-type photosensitive composition changes the polarity before and after light irradiation, and the light-irradiating part (also referred to as the exposure part) can be dissolved by the developing solution, a conventional person can be used. Examples of the composition include a diazonaphthoquinone compound and an alkali-soluble resin.
負型感光性組成物若為使光照射部對顯像液成為難溶者則可利用習知慣用者。列舉為例如含光酸產生劑與鹼可溶性樹脂之組成物、含光鹼產生劑與鹼可溶性樹脂之組成物、含光聚合起始劑與鹼可溶性樹脂之組成物等。 As the negative photosensitive composition, if the light-irradiating portion is hardly soluble in the developing solution, a conventional user can be used. Examples include a composition containing a photoacid generator and an alkali-soluble resin, a composition containing a photobase generator and an alkali-soluble resin, and a composition containing a photopolymerization initiator and an alkali-soluble resin.
感光性樹脂組成物(a1)與(b1)之阻合亦可為正型感光性樹脂組成物(a1)與正型感光性樹脂組成物(b1)、負型感光性樹脂組成物(a1)與負型感光性樹脂組成物(b1)之組合之任意一者。 The resistance of the photosensitive resin composition (a1) and (b1) may also be a positive photosensitive resin composition (a1), a positive photosensitive resin composition (b1), or a negative photosensitive resin composition (a1). Any one of a combination with the negative photosensitive resin composition (b1).
例如,含有光鹼產生劑之組成物(a1)與含有光鹼產生劑之組成物(b1)之組合、含有光鹼產生劑之組成物(a1)與含有光聚合起始劑之組成物(b1)之組合、含有光聚合起始劑之組成物(a1)與含有光鹼產生劑之組成物(b1)之組合、含有光聚合起始劑之組成物(a1)與含有光聚合起始劑之組成物(b1)之組合等,且組合可依據實施形態選擇。 For example, a combination of a composition (a1) containing a photobase generator and a composition (b1) containing a photobase generator, a composition (a1) containing a photobase generator, and a composition containing a photopolymerization initiator ( a combination of b1), a composition (a1) containing a photopolymerization initiator and a composition (b1) containing a photobase generator, a composition (a1) containing a photopolymerization initiator, and a photopolymerization initiation The combination of the composition (b1) of the agent and the like can be selected according to the embodiment.
本發明之感光性樹脂構造物由於為可撓性印刷配線板之用途,故較好為硬化時之變形、翹曲可減小者。據此,以含有上述光鹼產生劑之組成物較佳,作為此種組成物亦包含例如含有光鹼產生劑與熱硬化性樹脂,且藉加成反應而硬化之組成物。 Since the photosensitive resin structure of the present invention is used for a flexible printed wiring board, it is preferably one that can reduce deformation and warpage during curing. Accordingly, a composition containing the above-mentioned photo-alkali generator is preferable. As such a composition, for example, a composition containing a photo-alkali generator and a thermosetting resin and hardened by an addition reaction is also included.
且,亦可為僅感光性樹脂組成物(a1)及感 光性樹脂組成物(b1)之任一者具有光酸產生劑、光鹼產生劑、或光聚合起始劑,另一者不含光酸產生劑、光鹼產生劑、及光聚合起始劑之任一者之構成。該情況下,只要其一感光性樹脂組成物中所含之光酸產生劑、光鹼產生劑、或光聚合起始劑能使另一感光性樹脂組成物硬化即可。 Moreover, it may be only the photosensitive resin composition (a1) and Either the photoresist composition (b1) has a photoacid generator, a photobase generator, or a photopolymerization initiator, and the other does not contain a photoacid generator, a photobase generator, and a photopolymerization initiator. The composition of any one of the agents. In this case, the photoacid generator, photobase generator, or photopolymerization initiator contained in one photosensitive resin composition may be used to harden the other photosensitive resin composition.
此外,本發明可為非感光性樹脂組成物(a1)與正型感光性樹脂組成物(b1)之組合,亦可為非感光性樹脂組成物(a1)與負型感光性樹脂組成物(b1)之組合。且,可為正型感光性樹脂組成物(a1)與非感光性樹脂組成物(b1)之組合,亦可為負型感光性樹脂組成物(a1)與非感光性樹脂組成物(b1)之組合。至於非感光性樹脂組成物(a1)列舉為含有熱硬化性樹脂之組成物。 In addition, the present invention may be a combination of a non-photosensitive resin composition (a1) and a positive-type photosensitive resin composition (b1), or a non-photosensitive resin composition (a1) and a negative-type photosensitive resin composition ( b1). In addition, it may be a combination of the positive photosensitive resin composition (a1) and the non-photosensitive resin composition (b1), or it may be the negative photosensitive resin composition (a1) and the non-photosensitive resin composition (b1). Of combination. The non-photosensitive resin composition (a1) is a composition containing a thermosetting resin.
本發明之層合構造物之總膜厚較好為100μm以下,更好為4~80μm之範圍。例如層合構造物為2層時,顯像性接著層(a)為例如3~60μm,但不限於此。藉由設為此厚度,可使顯像性接著層(a)無間隙地密著於電路上。另一方面,顯像性保護膜(b)只要為例如1~20μm之厚度即可。 The total film thickness of the laminated structure of the present invention is preferably 100 μm or less, and more preferably in the range of 4 to 80 μm. For example, when the layered structure has two layers, the developability adhesive layer (a) is, for example, 3 to 60 μm, but is not limited thereto. With this thickness, the developable adhesive layer (a) can be closely adhered to the circuit without gaps. On the other hand, the developable protective film (b) only needs to have a thickness of, for example, 1 to 20 μm.
圖2係顯示使圖1所示之可撓性印刷配線板上之感光性樹脂構造物1進行光照射後,以鹼顯像液施以顯像處理而形成圖型之狀態之剖面。 FIG. 2 is a cross-sectional view showing a state in which the photosensitive resin structure 1 shown in FIG. 1 is irradiated with light and subjected to a development treatment with an alkali developer to form a pattern.
本發明之乾膜係前述感光性樹脂構造物之至少一面受到膜支撐或保護者。 The dry film of the present invention is one in which at least one side of the photosensitive resin structure is supported or protected by the film.
乾膜之製造為例如以有機溶劑稀釋感光性樹脂組成物(b1)並調整成適當黏度,以缺角輪塗佈器等以均勻厚度塗佈於載體膜上。使該塗佈層乾燥,於載體膜上形成顯像性保護層(b)。同樣地,於該顯像性保護層(b)上以感光性或非感光性之樹脂組成物(a1)形成顯像性接著層(a),可獲得本發明之乾膜。 The dry film is produced, for example, by diluting the photosensitive resin composition (b1) with an organic solvent, adjusting the viscosity to an appropriate viscosity, and coating the carrier film with a uniform thickness using a notch wheel coater or the like. This coating layer is dried to form a developable protective layer (b) on the carrier film. Similarly, a developable adhesive layer (a) is formed on the developable protective layer (b) with a photosensitive or non-photosensitive resin composition (a1) to obtain a dry film of the present invention.
載體膜係使用塑膠膜。載體膜之厚度並無特別限制,但一般係於10~150μm之範圍內適當選擇。亦可於載體膜上形成感光性樹脂構造物後,進而於感光性樹脂構造物之表面上層合可剝離之保護膜。 The carrier film is a plastic film. The thickness of the carrier film is not particularly limited, but is generally appropriately selected within a range of 10 to 150 μm. After forming the photosensitive resin structure on the carrier film, a peelable protective film may be laminated on the surface of the photosensitive resin structure.
本發明之可撓性印刷配線板具有在可撓性印刷配線板上藉光照射使本發明之感光性樹脂構造物圖型化,以顯像液一次性形成圖型而成之保護膜。保護膜較好為覆蓋膜及防焊劑之至少任意一者。 The flexible printed wiring board of the present invention has a protective film formed by patterning the photosensitive resin structure of the present invention by irradiating light on the flexible printed wiring board, and forming a pattern with a developing solution at a time. The protective film is preferably at least one of a cover film and a solder resist.
於可撓性印刷配線板上形成顯像性接著層(a)與顯像性保護層(b)之方法可為使用本發明之乾膜之層合法,亦可直接使用樹脂組成物(a1)、(b1)之塗佈法。 層合法係以藉層合機等使顯像性接著層(a)與可撓性印刷配線板之彎曲部及非彎曲部中之至少任意一者接觸之方式,將乾膜貼合於可撓性印刷配線板上。 The method for forming the developable adhesive layer (a) and the developable protective layer (b) on the flexible printed wiring board may be a method using the dry film of the present invention, or a resin composition (a1) may be directly used. (B1) Coating method. The lamination method is a method in which a developable adhesive layer (a) is brought into contact with at least one of a bent portion and a non-bent portion of a flexible printed wiring board by a laminator or the like, and a dry film is bonded to the flexible portion. Printed wiring board.
塗佈法係藉網版印刷等,將感光性或非感光性之樹脂組成物(a1)與感光性樹脂組成物(b1)分別依序塗佈於可撓性印刷配線板上並乾燥,形成顯像性接著層(a)與顯像性保護層(b)。 The coating method is to apply a photosensitive or non-photosensitive resin composition (a1) and a photosensitive resin composition (b1) to a flexible printed wiring board in order by screen printing, etc., and dry to form The developability is followed by a layer (a) and a developability protective layer (b).
又,亦可為將樹脂組成物(a1)塗佈於可撓性印刷配線板上並乾燥而形成顯像性接著層(a),且將由感光性樹脂組成物(b1)所成之薄膜層合於該顯像性接著層(a)上而形成顯像性保護層(b)之方法。 Alternatively, the resin composition (a1) may be coated on a flexible printed wiring board and dried to form a developable adhesive layer (a), and a thin film layer formed of the photosensitive resin composition (b1) may be used. A method for forming a developable protective layer (b) by combining the developable adhesive layer (a).
亦可相反地,藉由將由樹脂組成物(a1)所成之薄膜層合於可撓性印刷配線板上而形成顯像性接著層(a),於該顯像性接著層(a)上塗佈感光性樹脂組成物(b1)並乾燥而形成顯像性保護層(b)。 Alternatively, a thin film formed of the resin composition (a1) may be laminated on a flexible printed wiring board to form a developable adhesive layer (a), and the developable adhesive layer (a) may be formed on the flexible print wiring board. The photosensitive resin composition (b1) is applied and dried to form a developable protective layer (b).
含有光聚合起始劑之負型層合樹脂構造物之情況下,只要是樹脂組成物(a1)及樹脂組成物(b1)中之至少任意一者含有光聚合起始劑即可。 In the case of a negative-type laminated resin structure containing a photopolymerization initiator, at least one of the resin composition (a1) and the resin composition (b1) may contain a photopolymerization initiator.
該情況下,藉上述層合法於可撓性印刷配線板上形成具有顯像性接著層(a)及顯像性保護層(b)之感光性樹脂構造物。隨後,以接觸式或非接觸式方式,對負型感光 性樹脂構造物以圖型狀進行光照射,使未照射部顯像,獲得負型圖型之保護膜。進而於含有熱硬化性成分之組成物時,可例如藉由加熱至約140~180℃之溫度使之熱硬化,而形成耐熱性、耐藥品性、耐吸濕性、密著性、電特性等諸特性優異之保護膜。 In this case, a photosensitive resin structure having a developable adhesive layer (a) and a developable protective layer (b) is formed on the flexible printed wiring board by the above-mentioned layer method. Then, in a contact or non-contact manner, The light-sensitive resin structure is irradiated with light in a pattern, and the unirradiated portion is developed to obtain a protective film with a negative pattern. Furthermore, when a composition containing a thermosetting component is used, it can be heat cured by heating to a temperature of about 140 to 180 ° C to form heat resistance, chemical resistance, moisture absorption resistance, adhesion, electrical characteristics, and the like. Protective film with excellent properties.
負型感光性樹脂構造物由於含有光聚合起始劑,故藉由自由基聚合使光照射部硬化。 Since the negative photosensitive resin structure contains a photopolymerization initiator, the light-irradiated part is hardened by radical polymerization.
含光鹼產生劑之負型層合樹脂構造物之情況下,亦係只要樹脂組成物(a1)及樹脂組成物(b1)中之至少任意一者含光鹼產生劑即可。該情況下,亦首先以上述層合方法等於可撓性印刷配線板上形成具有顯像性接著層(a)及顯像性保護層(b)之負型感光性樹脂構造物。隨後,藉由對負型感光性樹脂構造物以圖型狀照射光,自光鹼產生劑產生鹼使光照射部硬化。隨後,藉顯像去除未照射部獲得負型圖型之保護膜。又較好於光照射後,加熱顯像性接著層(a)及顯像性保護層(b)。 In the case of a negative laminated resin structure containing a photobase generator, it is only necessary that at least one of the resin composition (a1) and the resin composition (b1) contains a photobase generator. In this case, a negative photosensitive resin structure having a developable adhesive layer (a) and a developable protective layer (b) is formed on the flexible printed wiring board by the above-mentioned lamination method. Subsequently, the negative-type photosensitive resin structure is irradiated with light in a pattern, and an alkali is generated from the photo-alkali generator to harden the light-irradiated portion. Subsequently, a non-irradiated portion was removed by development to obtain a protective film having a negative pattern. It is also preferable to heat the developable adhesive layer (a) and the developable protective layer (b) after light irradiation.
認為藉由光照射,在光照射部中產生鹼,因該鹼使光鹼產生劑不安定,進而產生鹼。如此藉由使鹼化學性增生,而使光照射部充分硬化至深部。 It is considered that a base is generated in the light-irradiated part by the light irradiation, and the base causes the photo-alkali generator to be unstable, thereby generating an alkali. By chemically accelerating the alkali in this manner, the light-irradiated portion is sufficiently hardened to a deep portion.
又,顯像後,為了進一步提高保護膜之絕緣信賴性,亦可照射紫外線。且,顯像後,可進一步包含熱 硬化(後硬化)步驟,亦可於顯像後同時進行紫外線照射與熱硬化。熱硬化步驟中之加熱溫度為例如160℃以上。 After development, in order to further improve the insulation reliability of the protective film, ultraviolet rays may be irradiated. In addition, after development, heat may be further included. In the curing (post-curing) step, ultraviolet irradiation and thermal curing may be performed simultaneously after development. The heating temperature in the heat curing step is, for example, 160 ° C or higher.
於含有光酸產生劑之負型層合樹脂構造物之情況下,亦只要樹脂組成物(a1)及樹脂組成物(b1)中之至少任意一者含有光酸產生劑即可。該情況下,亦與含光鹼產生劑之情況相同,藉上述層合法等,於可撓性印刷配線板上形成具有顯像性接著層(a)及顯像性保護層(b)之負型感光性樹脂構造物。隨後,藉由對負型感光性樹脂構造物以圖型狀照射光,自光酸產生劑產生酸而使光照射部硬化。隨後,由上述相同之顯像方法獲得獲得負型圖型之保護膜。 In the case of a negative laminated resin structure containing a photoacid generator, at least any one of the resin composition (a1) and the resin composition (b1) may include a photoacid generator. In this case, it is also the same as the case containing a photo-alkali generator. By using the above-mentioned layer method, a negative layer having a developable adhesive layer (a) and a developable protective layer (b) is formed on a flexible printed wiring board. Type photosensitive resin structure. Subsequently, the negative-type photosensitive resin structure is irradiated with light in a pattern, and an acid is generated from the photoacid generator to harden the light-irradiated portion. Subsequently, a protective film having a negative pattern was obtained by the same developing method as described above.
正型層合樹脂構造物之情況下,亦只要是樹脂組成物(a1)及樹脂組成物(b1)中之至少任意一者含有正型組成物即可。該情況下,亦以上述層合法,於可撓性印刷配線板上形成具有顯像性接著層(a)及顯像性保護層(b)之正型感光性樹脂構造物。 In the case of the positive-type laminated resin structure, at least one of the resin composition (a1) and the resin composition (b1) only needs to contain the positive-type composition. In this case, a positive photosensitive resin structure having a developable adhesive layer (a) and a developable protective layer (b) is also formed on the flexible printed wiring board using the above-mentioned layer method.
接著,於正型感光性樹脂構造物上藉由以圖型狀照射光,使極性產生變化。隨後,使光照射部顯像,獲得正型 圖型之保護膜。 Next, the positive photosensitive resin structure is irradiated with light in a patterned shape to change the polarity. Subsequently, the light-irradiated portion was developed to obtain a positive type. Graphic protective film.
上述光照射所使用之曝光機只要是搭載高壓水銀燈、超高壓水銀燈、金屬鹵素燈、短弧水銀燈(short-arc mercury lamps)等,且照射在350~450nm之範圍之紫外線的裝置即可,再者,亦可使用直接繪圖裝置(例如藉由電腦之CAD數據以直接雷射描繪圖像之雷射直接呈像裝置)。 The exposure machine used for the above light irradiation may be a device equipped with a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, a short-arc mercury lamp, and the like, and irradiates ultraviolet rays in the range of 350 to 450 nm, and then Alternatively, a direct drawing device (such as a laser direct imaging device that draws an image with a direct laser through CAD data of a computer) may also be used.
直接繪圖裝置之雷射光源若使用最大波長為350~450nm範圍之雷射光則可亦使用氣體雷射、固體雷射。用於圖像形成之曝光量雖隨著膜厚等而異,但一般可為20~1500mJ/cm2之範圍內。 If the laser light source of the direct drawing device uses laser light with a maximum wavelength in the range of 350 ~ 450nm, gas lasers and solid lasers can also be used. Although the amount of exposure used for image formation varies with film thickness, etc., it can generally be in the range of 20 to 1500 mJ / cm 2 .
前述顯像方法可利用浸漬法、淋洗法、噴霧法、刷塗法等,顯像液可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等鹼性水溶液。 The aforementioned development method may be a dipping method, a rinsing method, a spray method, a brushing method, or the like, and the development solution may be potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, or amine. Class and other alkaline aqueous solutions.
接著,針對本發明之層合構造物之實施形態加以詳述。 Next, an embodiment of the laminated structure of the present invention will be described in detail.
本發明之層合構造物之特徵係具有由鹼顯像型樹脂組成物所構成之樹脂層(A),與經由該樹脂層(A)層合於可撓性印刷配線板上之樹脂層(B)之層合構造物,前述樹脂層(B)係由含具有醯亞胺環之鹼溶解性樹脂、光鹼產生劑與熱反應性化合物之感光性熱硬化性樹脂組成物所組成。 The laminated structure of the present invention is characterized by having a resin layer (A) composed of an alkali-developing resin composition, and a resin layer (a) laminated on a flexible printed wiring board via the resin layer (A) ( The laminated structure of B), wherein the resin layer (B) is a photosensitive thermosetting resin composition containing an alkali-soluble resin having a fluorene imine ring, a photo-alkali generator, and a heat-reactive compound.
如此之本發明之層合構造物可層合於可撓性印刷配線板上,且可在可撓性印刷配線板上藉光照射而圖型化,且可藉顯像而一次性形成圖型。 Such a laminated structure according to the present invention can be laminated on a flexible printed wiring board, and can be patterned by light irradiation on the flexible printed wiring board, and can be formed into a pattern at one time by development. .
依據如此之本發明之層合構造物,藉由使用(1)分子中存在醯亞胺環之樹脂,與(2)利用鹼溶解性樹脂與熱反應性化合物之加成反應之組成物作為樹脂層(B),以該層作為強化層之功能,即使使用過去之由防焊劑組成物或層間絕緣材料所成之樹脂層(A),仍可提供耐衝擊性或彎曲性、低翹曲性等之信賴性與加工精度優異、且作業性優異之可撓性印刷配線板用之絕緣膜。 According to the laminated structure of the present invention, by using (1) a resin having a fluorene imine ring in the molecule, and (2) a composition using an addition reaction of an alkali-soluble resin and a thermally reactive compound as a resin The layer (B) uses this layer as a reinforcing layer. Even if a conventional resin layer (A) made of a solder resist composition or an interlayer insulating material is used, it can still provide impact resistance, bendability, and low warpage. An insulating film for a flexible printed wiring board having excellent reliability and processing accuracy and excellent workability.
本發明之層合構造物係於可撓性基板上形成有銅電路之可撓性印刷配線板上依序具有樹脂層(A)與樹脂層(B),且可藉光照射至少使樹脂層(B)圖型化,且樹脂層(A)與樹脂層(B)可藉由顯像一次性形成圖型者。 The laminated structure of the present invention has a resin layer (A) and a resin layer (B) in this order on a flexible printed wiring board on which a copper circuit is formed on a flexible substrate, and at least the resin layer can be irradiated by light. (B) Patterning, and the resin layer (A) and the resin layer (B) can be patterned at one time by imaging.
構成樹脂層(A)之鹼顯像性樹脂組成物只要包含含有酚性羥基、硫醇基及羧基中之1種以上之官能基,且可藉鹼溶液顯像之樹脂之組成物即可,可使用光硬化性樹脂組成物亦可使用熱硬化性樹脂組成物。舉例為較好含有具有2個以上之酚性羥基之化合物、含羧基之樹脂、具有酚性羥基及羧基之化合物、具有2個以上硫醇基之化合物之 樹脂組成物,且可使用習知慣用者。 The alkali-developing resin composition constituting the resin layer (A) may be a composition containing a resin containing one or more functional groups of a phenolic hydroxyl group, a thiol group, and a carboxyl group and capable of being developed by an alkali solution. A photocurable resin composition may be used, and a thermosetting resin composition may be used. Examples are compounds containing preferably a compound having two or more phenolic hydroxyl groups, a resin containing a carboxyl group, a compound having a phenolic hydroxyl group and a carboxyl group, and a compound having two or more thiol groups. The resin composition can be used by a conventional user.
列舉為例如自過去以來作為防焊劑組成物使用之含有含羧基之樹脂或含羧基之感光性樹脂、具有乙烯性不飽合鍵之化合物、光聚合起始劑、及熱反應性化合物之光硬化性熱硬化性樹脂組成物。 Examples include photoresist containing carboxyl group-containing resins or carboxyl group-containing photosensitive resins, compounds having ethylenically unsaturated bonds, photopolymerization initiators, and thermoreactive compounds that have been used as solder resist compositions since the past. Thermosetting resin composition.
此處,作為含羧基之樹脂或含羧基之感光性樹脂、具有乙烯性不飽合鍵之化合物、光聚合起始劑、熱反應性化合物,可使用習知慣用者。 Here, as a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin, a compound having an ethylenically unsaturated bond, a photopolymerization initiator, and a heat-reactive compound, conventionally used ones can be used.
構成樹脂層(B)之感光性熱硬化性樹脂組成物含具有醯亞胺環之鹼溶解性樹脂、光鹼產生劑與熱反應化性合物。 The photosensitive thermosetting resin composition constituting the resin layer (B) contains an alkali-soluble resin having a fluorene imine ring, a photo-alkali generator, and a heat-reactive compound.
本發明中,具有醯亞胺環之鹼溶解性樹脂為具有羧基或酸酐基等之鹼溶解性基與醯亞胺環者。將醯亞胺環導入於該鹼溶解性樹脂可使用習知慣用之方法。列舉為例如,使羧酸酐成分與胺成分及/或異氰酸酯成分反應獲得之樹脂。醯亞胺化可藉熱醯亞胺化進行,亦可藉化學醯亞胺化進行,且可併用該等而製造。 In the present invention, the alkali-soluble resin having a fluorene imine ring is one having an alkali-soluble group such as a carboxyl group or an acid anhydride group and a fluorene imine ring. The alkali-soluble resin can be introduced into the fluorene imine ring by a conventional method. Examples thereof include resins obtained by reacting a carboxylic acid anhydride component with an amine component and / or an isocyanate component. The fluorene imidization can be carried out by hot fluoridation or by chemical fluoridation, and can be produced by using these in combination.
此處,羧酸酐成分列舉為四羧酸酐或三羧酸酐等,但並不限於該等酸酐者,若為含有可與胺基或異氰 酸酯基反應之酸酐基及羧基之化合物,則包含其衍生物均可使用。且,該等羧酸酐成分可單獨或亦可組合使用。 Here, the carboxylic acid anhydride component is exemplified by tetracarboxylic acid anhydride or tricarboxylic acid anhydride, but is not limited to those acid anhydrides. Compounds including acid anhydride groups and carboxyl groups that react with an acid ester group can be used including derivatives. These carboxylic anhydride components may be used alone or in combination.
四羧酸酐列舉為例如均苯四酸二酐、3-氟均苯四酸二酐、3,6-二氟均苯四酸二酐、3,6-雙(三氟甲基)均苯四酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、3,3’,4,4’-聯苯四羧酸二酐、4,4’-氧基二鄰苯二甲酸二酐、2,2’-二氟-3,3’,4,4’-聯苯四羧酸二酐、5,5’-二氟-3,3’,4,4’-聯苯四羧酸二酐、6,6’-二氟-3,3’,4,4’-聯苯四羧酸二酐、2,2’,5,5’,6,6’-六氟-3,3’,4,4’-聯苯四羧酸二酐、2,2’-雙(三氟甲基)-3,3’,4,4’-聯苯四羧酸二酐、5,5’-雙(三氟甲基)-3,3’,4,4’-聯苯四羧酸二酐、6,6’-雙(三氟甲基)-3,3’,4,4’-聯苯四羧酸二酐、2,2’,5,5’-肆(三氟甲基)-3,3’,4,4’-聯苯四羧酸二酐、2,2’,6,6’-肆(三氟甲基)-3,3’,4,4’-聯苯四羧酸二酐、5,5’,6,6’-肆(三氟甲基)-3,3’,4,4’-聯苯四羧酸二酐、及2,2’,5,5’,6,6’-陸(三氟甲基)-3,3’,4,4’-聯苯四羧酸二酐、1,2,3,4-苯四羧酸二酐、3,3”,4,4”-三聯苯四羧酸二酐、3,3’”,4,4’”-四聯苯四羧酸二酐、3,3””,4,4””-五聯苯(quinquephenyl)四羧酸二酐、亞甲基-4,4’-二鄰苯二酸二酐、1,1-亞乙基-4,4’-二鄰苯二酸二酐、2,2-亞丙基-4,4’-二鄰苯二酸二酐、1,2-伸乙基-4,4’-二鄰苯二酸二酐、1,3-三亞甲基-4,4’-二鄰苯二酸二酐、1,4-四亞甲基-4,4’-二鄰苯二酸二酐、1,5-五亞甲基-4,4’-二鄰苯二酸二酐、2,2-雙(3,4-二羧基苯基)-1,1,1,3,3,3-六氟丙烷二酐、二氟亞甲基-4,4’-二鄰苯二酸二酐、1,1,2,2- 四氟-1,2-伸乙基-4,4’-二鄰苯二酸二酐、1,1,2,2,3,3-六氟-1,3-三亞甲基-4,4’-二鄰苯二酸二酐、1,1,2,2,3,3,4,4-八氟-1,4-四亞甲基-4,4’-二鄰苯二酸二酐、1,1,2,2,3,3,4,4,5,5-十氟-1,5-五亞甲基-4,4’-二鄰苯二酸二酐、硫基-4,4’-二鄰苯二酸二酐、磺醯基-4,4’-二鄰苯二酸二酐、1,3-雙(3,4-二羧基苯基)-1,1,3,3-四甲基矽氧烷二酐、1,3-雙(3,4-二羧基苯基)苯二酐、1,4-雙(3,4-二羧基苯基)苯二酐、1,3-雙(3,4-二羧基苯氧基)苯二酐、1,4-雙(3,4-二羧基苯氧基)苯二酐、1,3-雙[2-(3,4-二羧基苯基)-2-丙基]苯二酐、1,4-雙[2-(3,4-二羧基苯基)-2-丙基]苯二酐、雙[3-(3,4-二羧基苯氧基)苯基]甲烷二酐、雙[4-(3,4-二羧基苯氧基)苯基]甲烷二酐、2,2-雙[3-(3,4-二羧基苯氧基)苯基]丙烷二酐、2,2-雙[4-(3,4-羧基苯氧基)苯基]丙烷二酐、2,2-雙[3-(3,4-二羧基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷二酐、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酐、雙(3,4-二羧基苯氧基)二甲基矽烷二酐、1,3-雙(3,4-二羧基苯氧基)-1,1,3,3-四甲基二矽氧烷二酐、2,3,6,7-萘四羧酸二酐、1,2,5,6-萘四羧酸二酐、3,4,9,10-苝四羧酸二酐、2,3,6,7-蒽四羧酸二酐、1,2,7,8-菲四羧酸二酐、1,2,3,4-丁烷四羧酸二酐、1,2,3,4-環丁烷四羧酸二酐、環戊烷四羧酸二酐、環己烷-1,2,3,4-四羧酸二酐、環己烷-1,2,4,5-四羧酸二酐、3,3’,4,4’-聯環己烷四羧酸二酐、羰基-4,4’-雙(環己烷-1,2-二羧酸)二酐、亞甲基-4,4’-雙(環己烷-1,2-二羧酸)二酐、1,2-伸乙基- 4,4’-雙(環己烷-1,2-二羧酸)二酐、1,1-亞乙基-4,4’-雙(環己烷-1,2-二羧酸)二酐、2,2-亞丙基-4,4’-雙(環己烷-1,2-二羧酸)二酐、1,1,1,3,3,3-六氟-2,2-亞丙基-4,4’-雙(環己烷-1,2-二羧酸)二酐、氧基-4,4’-雙(環己烷-1,2-二羧酸)二酐、硫基-4,4’-雙(環己烷-1,2-二羧酸)二酐、磺醯基-4,4’-雙(環己烷-1,2-二羧酸)二酐、3,3’-二氟氧基(difluoroxy)-4,4’-二鄰苯二甲酸二酐、5,5’-二氟氧基-4,4’-二鄰苯二甲酸二酐、6,6’-二氟氧基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’,6,6’-六氟氧基-4,4’-二鄰苯二甲酸二酐、3,3’-雙(三氟甲基)氧基-4,4’-二鄰苯二甲酸二酐、5,5’-雙(三氟甲基)氧基-4,4’-二鄰苯二甲酸二酐、6,6’-雙(三氟甲基)氧基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’-肆(三氟甲基)氧基-4,4’-二鄰苯二甲酸二酐、3,3’,6,6’-肆(三氟甲基)氧基-4,4’-二鄰苯二甲酸二酐、5,5’,6,6’-肆(三氟甲基)氧基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’,6,6’-陸(三氟甲基)氧基-4,4’-二鄰苯二甲酸二酐、3,3’-二氟磺醯基-4,4’-二鄰苯二甲酸二酐、5,5’-二氟磺醯基-4,4’-二鄰苯二甲酸二酐、6,6’-二氟磺醯基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’,6,6’-六氟磺醯基-4,4’-二鄰苯二甲酸二酐、3,3’-雙(三氟甲基)磺醯基-4,4’-二鄰苯二甲酸二酐、5,5’-雙(三氟甲基)磺醯基-4,4’-二鄰苯二甲酸二酐、6,6’-雙(三氟甲基)磺醯基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’-肆(三氟甲基)磺醯基-4,4’-二鄰苯二甲酸二酐、3,3’,6,6’-肆(三氟甲基)磺醯基-4,4’-二鄰苯二 甲酸二酐、5,5’,6,6’-肆(三氟甲基)磺醯基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’,6,6’-陸(三氟甲基)磺醯基-4,4’-二鄰苯二甲酸二酐、3,3’-二氟-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、5,5’-二氟-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、6,6’-二氟-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’,6,6’-六氟-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、3,3’-雙(三氟甲基)-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、5,5’-雙(三氟甲基)-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、6,6’-二氟-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’-肆(三氟甲基)-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、3,3’,6,6’-肆(三氟甲基)-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、5,5’,6,6’-肆(三氟甲基)-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、3,3’,5,5’,6,6’-陸(三氟甲基)-2,2-全氟亞丙基-4,4’-二鄰苯二甲酸二酐、9-苯基-9-(三氟甲基)呫噸-2,3,6,7-四羧酸二酐、9,9-雙(三氟甲基)呫噸-2,3,6,7-四羧酸二酐、雙環[2,2,2]辛-7-烯-2,3,5,6-四羧酸二酐、9,9-雙[4-(3,4-二羧基)苯基]茀二酐、9,9-雙[4-(2,3-二羧基)苯基]茀二酐、乙二醇雙偏苯三酸二酐、1,2-(伸乙基)雙(偏苯三酸酐)、1,3-(三亞甲基)雙(偏苯三酸酐)、1,4-(四亞甲基)雙(偏苯三酸酐)、1,5-(五亞甲基)雙(偏苯三酸酐)、1,6-(六亞甲基)雙(偏苯三酸酐)、1,7-(七亞甲基)雙(偏苯三酸酐)、1,8-(八亞甲基)雙(偏苯三酸酐)、1,9-(九亞甲基)雙(偏苯三酸 酐)、1,10-(十亞甲基)雙(偏苯三酸酐)、1,12-(十二亞甲基)雙(偏苯三酸酐)、1,16-(十六亞甲基)雙(偏苯三酸酐)、1,18-(十八亞甲基)雙(偏苯三酸酐)等。 Examples of tetracarboxylic anhydrides include pyromellitic dianhydride, 3-fluoro pyromellitic dianhydride, 3,6-difluoromellitic dianhydride, and 3,6-bis (trifluoromethyl) pyromellitic acid. Acid dianhydride, 3,3 ', 4,4'-benzophenonetetracarboxylic dianhydride, 3,3', 4,4'-biphenyltetracarboxylic dianhydride, 4,4'-oxydihydride Phthalic dianhydride, 2,2'-difluoro-3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 5,5'-difluoro-3,3', 4,4 ' -Biphenyltetracarboxylic dianhydride, 6,6'-difluoro-3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 2,2', 5,5 ', 6,6'- Hexafluoro-3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 2,2'-bis (trifluoromethyl) -3,3', 4,4'-biphenyltetracarboxylic acid bis Anhydride, 5,5'-bis (trifluoromethyl) -3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 6,6'-bis (trifluoromethyl) -3,3' , 4,4'-biphenyltetracarboxylic dianhydride, 2,2 ', 5,5'-(trifluoromethyl) -3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 2,2 ', 6,6'-Di (trifluoromethyl) -3,3', 4,4'-biphenyltetracarboxylic dianhydride, 5,5 ', 6,6'-di (trifluoro (Methyl) -3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, and 2,2', 5,5 ', 6,6'-Lu (trifluoromethyl) -3,3' , 4,4'-biphenyltetracarboxylic dianhydride, 1,2,3,4-benzenetetracarboxylic dianhydride, 3 , 3 ”, 4,4” -terephthalic dianhydride, 3,3 '”, 4,4'”-terephthalate dianhydride, 3,3 ””, 4,4 ””- Quinquephenyl tetracarboxylic dianhydride, methylene-4,4'-diphthalic dianhydride, 1,1-ethylene-4,4'-diphthalic dianhydride, 2,2-propylene-4,4'-diphthalic dianhydride, 1,2-ethylidene-4,4'-diphthalic dianhydride, 1,3-trimethylene- 4,4'-Diphthalic dianhydride, 1,4-tetramethylene-4,4'-diphthalic dianhydride, 1,5-pentamethylene-4,4'-di Phthalic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) -1,1,1,3,3,3-hexafluoropropane dianhydride, difluoromethylene-4,4 '-Diphthalic dianhydride, 1,1,2,2- Tetrafluoro-1,2-ethenyl-4,4'-diphthalic dianhydride, 1,1,2,2,3,3-hexafluoro-1,3-trimethylene-4,4 '-Diphthalic dianhydride, 1,1,2,2,3,3,4,4-octafluoro-1,4-tetramethylene-4,4'-diphthalic dianhydride , 1,1,2,2,3,3,4,4,5,5-Decafluoro-1,5-pentamethylene-4,4'-diphthalic dianhydride, thio-4 , 4'-Diphthalic dianhydride, sulfo-4,4'-diphthalic dianhydride, 1,3-bis (3,4-dicarboxyphenyl) -1,1,3 , 3-tetramethylsilyl dianhydride, 1,3-bis (3,4-dicarboxyphenyl) phthalic anhydride, 1,4-bis (3,4-dicarboxyphenyl) phthalic anhydride, 1,3-bis (3,4-dicarboxyphenoxy) phthalic anhydride, 1,4-bis (3,4-dicarboxyphenoxy) phthalic anhydride, 1,3-bis [2- (3 , 4-dicarboxyphenyl) -2-propyl] phthalic anhydride, 1,4-bis [2- (3,4-dicarboxyphenyl) -2-propyl] phthalic anhydride, bis [3- (3,4-dicarboxyphenoxy) phenyl] methane dianhydride, bis [4- (3,4-dicarboxyphenoxy) phenyl] methane dianhydride, 2,2-bis [3- (3 , 4-dicarboxyphenoxy) phenyl] propane dianhydride, 2,2-bis [4- (3,4-carboxyphenoxy) phenyl] propane dianhydride, 2,2-bis [3- ( 3,4-dicarboxyphenoxy) phenyl] -1,1,1,3,3,3-hexafluoropropane dianhydride, 2,2-bis [4- (3,4-dicarboxyphenoxy ) Phenyl] propane dianhydride, bis (3,4-dicarboxyphenoxy) dimethylsilane dianhydride, 1,3-bis (3,4-dicarboxyphenoxy) -1,1,3, 3-tetramethyldisilazane dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, 3,4,9,10- Perylene tetracarboxylic dianhydride, 2,3,6,7-anthracene tetracarboxylic dianhydride, 1,2,7,8-phenanthrene tetracarboxylic dianhydride, 1,2,3,4-butanetetracarboxylic acid Dianhydride, 1,2,3,4-cyclobutanetetracarboxylic dianhydride, cyclopentanetetracarboxylic dianhydride, cyclohexane-1,2,3,4-tetracarboxylic dianhydride, cyclohexane -1,2,4,5-tetracarboxylic dianhydride, 3,3 ', 4,4'-bicyclohexanetetracarboxylic dianhydride, carbonyl-4,4'-bis (cyclohexane-1, 2-dicarboxylic acid) dianhydride, methylene-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,2-ethylidene- 4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,1-ethylene-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) diamine Anhydride, 2,2-propylene-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,1,1,3,3,3-hexafluoro-2,2 -Propylene-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, oxy-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) diamine Anhydride, thio-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) dianhydride, sulfofluorenyl-4,4'-bis (cyclohexane-1,2-dicarboxylic acid) Dianhydride, 3,3'-difluoroxy-4,4'-diphthalic acid dianhydride, 5,5'-difluorooxy-4,4'-diphthalic acid di Anhydride, 6,6'-difluorooxy-4,4'-diphthalic dianhydride, 3,3 ', 5,5', 6,6'-hexafluorooxy-4,4'- Diphthalic dianhydride, 3,3'-bis (trifluoromethyl) oxy-4,4'-diphthalic dianhydride, 5,5'-bis (trifluoromethyl) oxy -4,4'-diphthalic dianhydride, 6,6'-bis (trifluoromethyl) oxy-4,4'-diphthalic dianhydride, 3,3 ', 5,5 '-Di (trifluoromethyl) oxy-4,4'-diphthalic dianhydride, 3,3', 6,6'-Di (trifluoromethyl) oxy-4,4'- Diphthalic dianhydride, 5,5 ', 6,6'-three (trifluoro (Oxy) oxy-4,4'-diphthalic dianhydride, 3,3 ', 5,5', 6,6'-Hydroxy (trifluoromethyl) oxy-4,4'-di-ortho Phthalic acid dianhydride, 3,3'-difluorosulfonyl-4,4'-diphthalic acid dianhydride, 5,5'-difluorosulfonyl-4,4'-diphthalic acid Formic acid dianhydride, 6,6'-difluorosulfonyl-4,4'-diphthalic dianhydride, 3,3 ', 5,5', 6,6'-hexafluorosulfonyl-4 , 4'-Diphthalic dianhydride, 3,3'-bis (trifluoromethyl) sulfofluorenyl-4,4'-diphthalic dianhydride, 5,5'-bis (trifluoro (Methyl) sulfofluorenyl-4,4'-diphthalic dianhydride, 6,6'-bis (trifluoromethyl) sulfofluorenyl-4,4'-diphthalic dianhydride, 3 , 3 ', 5,5'-Di (trifluoromethyl) sulfofluorenyl-4,4'-diphthalic dianhydride, 3,3', 6,6'-di (trifluoromethyl) Sulfo-4,4'-diphthalate Formic acid dianhydride, 5,5 ', 6,6'-(trifluoromethyl) sulfofluorenyl-4,4'-diphthalic dianhydride, 3,3 ', 5,5', 6, 6'-Lu (trifluoromethyl) sulfofluorenyl-4,4'-diphthalic dianhydride, 3,3'-difluoro-2,2-perfluoropropylene-4,4'- Diphthalic acid dianhydride, 5,5'-difluoro-2,2-perfluoropropylene-4,4'-diphthalic acid dianhydride, 6,6'-difluoro-2,2 -Perfluoropropylene-4,4'-diphthalic dianhydride, 3,3 ', 5,5', 6,6'-hexafluoro-2,2-perfluoropropylene-4, 4'-diphthalic acid dianhydride, 3,3'-bis (trifluoromethyl) -2,2-perfluoropropylene group-4,4'-diphthalic acid dianhydride, 5,5 '-Bis (trifluoromethyl) -2,2-perfluoropropylene-4,4'-diphthalic dianhydride, 6,6'-difluoro-2,2-perfluoropropylene -4,4'-Diphthalic dianhydride, 3,3 ', 5,5'-Di (trifluoromethyl) -2,2-perfluoropropylene-4,4'-diphthalic acid Dicarboxylic dianhydride, 3,3 ', 6,6'-Di (trifluoromethyl) -2,2-perfluoropropylene-4,4'-diphthalic dianhydride, 5,5' , 6,6'-Di (trifluoromethyl) -2,2-perfluoropropylene-4,4'-diphthalic dianhydride, 3,3 ', 5,5', 6,6 '-Lu (trifluoromethyl) -2,2-perfluoropropylene -4,4'-diphthalic dianhydride, 9-phenyl-9- (trifluoromethyl) xanthene-2,3,6,7-tetracarboxylic dianhydride, 9,9-bis ( Trifluoromethyl) xanthene-2,3,6,7-tetracarboxylic dianhydride, bicyclic [2,2,2] oct-7-ene-2,3,5,6-tetracarboxylic dianhydride, 9,9-bis [4- (3,4-dicarboxy) phenyl] fluorenic dianhydride, 9,9-bis [4- (2,3-dicarboxy) phenyl] fluorenic dianhydride, ethylene glycol bis Trimellitic dianhydride, 1,2- (triethyl) bis (trimellitic anhydride), 1,3- (trimethylene) bis (trimellitic anhydride), 1,4- (tetramethylene) bis (trimellitic anhydride), 1,5- (pentamethylene) bis (trimellitic anhydride), 1,6- (hexamethylene) bis (trimellitic anhydride), 1,7- (heptamethylene) bis (trimellitic anhydride), 1,8- ( Octamethylene) bis (trimellitic anhydride), 1,9- (ninemethylene) bis (trimellitic acid) (Anhydride), 1,10- (decylmethylene) bis (trimellitic anhydride), 1,12- (dodecylmethylene) bis (trimellitic anhydride), 1,16- (hexamethylene) bis (trimellitic anhydride) 1,18- (octadecylene) bis (trimellitic anhydride) and the like.
三羧酸酐列舉為例如偏苯三酸酐或核氫化偏苯三酸酐等。 Examples of the tricarboxylic anhydride include trimellitic anhydride, nuclear hydrogenated trimellitic anhydride, and the like.
胺成分可使用脂肪族二胺或芳香族二胺等二胺、脂肪族聚醚胺等多元胺,但並不限於該等胺。此外,該等胺成分可單獨使用或組合使用。 The amine component may be a diamine such as an aliphatic diamine or an aromatic diamine, or a polyamine such as an aliphatic polyetheramine, but is not limited to these amines. Moreover, these amine components can be used individually or in combination.
二胺列舉為例如對-苯二胺(PPD)、1,3-二胺基苯、2,4-甲苯二胺、2,5-甲苯二胺、2,6-甲苯二胺、3,5-二胺基苯甲酸、2,5-二胺基苯甲酸、3,4-二胺基苯甲酸等之1個苯核之二胺、4,4’-二胺基二苯基醚、3,3’-二胺基二苯基醚、3,4’-二胺基二苯基醚等之二胺基二苯基醚類、4,4’-二胺基二苯基甲烷、3,3’-二甲基-4,4’-二胺基聯苯、2,2’-二甲基-4,4’-二胺基聯苯、2,2’-雙(三氟甲基)-4,4’-二胺基聯苯、3,3’-二甲基-4,4’-二胺基二苯基甲烷、3,3’-二羧基-4,4’-二胺基二苯基甲烷、3,3’,5,5’-四甲基-4,4’-二胺基二苯基甲烷、雙(4-胺基苯基)硫醚、4,4’-二胺基苯醯替苯胺、3,3’-二氯聯苯胺、3,3’-二甲基聯苯胺(鄰-甲苯胺)、2,2’-二甲基聯苯胺(間-甲苯胺)、3,3’-二甲氧基聯苯胺、2,2’-二甲氧基聯苯胺、3,3’-二胺基二苯基醚、3,4’-二胺基二苯基醚、4,4’-二胺基二苯基醚、3,3’-二胺基二苯基硫醚、3,4’-二胺基二苯基硫醚、4,4’-二胺基二苯基 硫醚、3,3’-二胺基二苯基碸、3,4’-二胺基二苯基碸、4,4’-二胺基二苯基碸、3,3’-二胺基二苯甲酮、3,3’-二胺基-4,4’-二氯二苯甲酮、3,3’-二胺基-4,4’-二甲氧基二苯甲酮、3,3’-二胺基二苯基甲烷、3,4’-二胺基二苯基甲烷、4,4’-二胺基二苯基甲烷、2,2-雙(3-胺基苯基)丙烷、2,2-雙(4-胺基苯基)丙烷、2,2-雙(3-胺基苯基)-1,1,1,3,3,3-六氟丙烷、2,2-雙(4-胺基苯基)-1,1,1,3,3,3-六氟丙烷、3,3’-二胺基二苯基亞碸、3,4’-二胺基二苯基亞碸、4,4’-二胺基二苯基亞碸、3,3’-二羧基-4,4’-二胺基二苯基甲烷、2,2-雙(3-胺基-4-羥基苯基)六氟丙烷、3,3’-二胺基-4,4’-二羥基二苯基碸等之2個苯核之二胺、1,3-雙(3-胺基苯基)苯、1,3-雙(4-胺基苯基)苯、1,4-雙(3-胺基苯基)苯、1,4-雙(4-胺基苯基)苯、1,3-雙(4-胺基苯氧基)苯、1,4-雙(3-胺基苯氧基)苯、1,4-雙(4-胺基苯氧基)苯、1,3-雙(3-胺基苯氧基)-4-三氟甲基苯、3,3’-二胺基-4-(4-苯基)苯氧基二苯甲酮、3,3’-二胺基-4,4’-二(4-苯基苯氧基)二苯甲酮、1,3-雙(3-胺基苯基硫醚)苯、1,3-雙(4-胺基苯基硫醚)苯、1,4-雙(4-胺基苯基硫醚)苯、1,3-雙(3-胺基苯基碸)苯、1,3-雙(4-胺基苯基碸)苯、1,4-雙(4-胺基苯基碸)苯、1,3-雙[2-(4-胺基苯基)異丙基]苯、1,4-雙[2-(3-胺基苯基)異丙基]苯、1,4-雙[2-(4-胺基苯基)異丙基]苯、1,3-雙(4-胺基-3-羥基苯氧基)苯等之3個苯核之二胺、3,3’-雙(3-胺基苯氧基)聯苯、3,3’-雙(4-胺基苯氧基)聯苯、4,4’-雙 (3-胺基苯氧基)聯苯、4,4’-雙(4-胺基苯氧基)聯苯、雙[3-(3-胺基苯氧基)苯基]醚、雙[3-(4-胺基苯氧基)苯基]醚、雙[4-(3-胺基苯氧基)苯基]醚、雙[4-(4-胺基苯氧基)苯基]醚、雙[3-(3-胺基苯氧基)苯基]酮、雙[3-(4-胺基苯氧基)苯基]酮、雙[4-(3-胺基苯氧基)苯基]酮、雙[4-(4-胺基苯氧基)苯基]酮、雙[3-(3-胺基苯氧基)苯基]硫醚、雙[3-(4-胺基苯氧基)苯基]硫醚、雙[4-(3-胺基苯氧基)苯基]硫醚、雙[4-(4-胺基苯氧基)苯基]硫醚、雙[3-(3-胺基苯氧基)苯基]碸、雙[3-(4-胺基苯氧基)苯基]碸、雙[4-(3-胺基苯氧基)苯基]碸、雙[4-(4-胺基苯氧基)苯基]碸、雙[3-(3-胺基苯氧基)苯基]甲烷、雙[3-(4-胺基苯氧基)苯基]甲烷、雙[4-(3-胺基苯氧基)苯基]甲烷、雙[4-(4-胺基苯氧基)苯基]甲烷、2,2-雙[3-(3-胺基苯氧基)苯基]丙烷、2,2-雙[3-(4-胺基苯氧基)苯基]丙烷、2,2-雙[4-(3-胺基苯氧基)苯基]丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]丙烷、2,2-雙[3-(3-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、2,2-雙[3-(4-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、2,2-雙[4-(3-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷、2,2-雙[4-(4-胺基苯氧基)苯基]-1,1,1,3,3,3-六氟丙烷等之4個苯核之二胺等芳香族二胺,1,2-二胺基乙烷、1,3-二胺基丙烷、1,4-二胺基丁烷、1,5-二胺基戊烷、1,6-二胺基己烷、1,7-二胺基庚烷、1,8-二胺基辛烷、1,9-二胺基壬烷、1,10-二胺基癸烷、1,11-二胺基十一烷、1,12-二胺基十二烷、1,2- 二胺基環己烷等脂肪族二胺,至於脂肪族聚醚胺列舉為乙二醇及/或丙二醇系之多元胺等。 Examples of diamines include p-phenylenediamine (PPD), 1,3-diaminobenzene, 2,4-toluenediamine, 2,5-toluenediamine, 2,6-toluenediamine, 3,5 -Diaminobenzoic acid, 2,5-diaminobenzoic acid, 3,4-diaminobenzoic acid, etc., one benzene core diamine, 4,4'-diaminodiphenyl ether, 3 , 3'-diaminodiphenyl ethers, 3,4'-diaminodiphenyl ethers and other diamine diphenyl ethers, 4,4'-diaminodiphenylmethane, 3, 3'-dimethyl-4,4'-diaminobiphenyl, 2,2'-dimethyl-4,4'-diaminobiphenyl, 2,2'-bis (trifluoromethyl) -4,4'-diaminobiphenyl, 3,3'-dimethyl-4,4'-diaminodiphenylmethane, 3,3'-dicarboxy-4,4'-diamine Diphenylmethane, 3,3 ', 5,5'-tetramethyl-4,4'-diaminodiphenylmethane, bis (4-aminophenyl) sulfide, 4,4'-di Aminobenzidine, 3,3'-dichlorobenzidine, 3,3'-dimethylbenzidine (o-toluidine), 2,2'-dimethylbenzidine (m-toluidine) , 3,3'-dimethoxybenzidine, 2,2'-dimethoxybenzidine, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether , 4,4'-diaminodiphenyl ether, 3,3 '-Diaminodiphenyl sulfide, 3,4'-diaminodiphenyl sulfide, 4,4'-diaminodiphenyl Sulfide, 3,3'-diaminodiphenylphosphonium, 3,4'-diaminodiphenylphosphonium, 4,4'-diaminodiphenylphosphonium, 3,3'-diamino Benzophenone, 3,3'-diamino-4,4'-dichlorobenzophenone, 3,3'-diamino-4,4'-dimethoxybenzophenone, 3 , 3'-diaminodiphenylmethane, 3,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylmethane, 2,2-bis (3-aminophenyl) ) Propane, 2,2-bis (4-aminophenyl) propane, 2,2-bis (3-aminophenyl) -1,1,1,3,3,3-hexafluoropropane, 2, 2-bis (4-aminophenyl) -1,1,1,3,3,3-hexafluoropropane, 3,3'-diaminodiphenylsulfene, 3,4'-diamine Diphenylphosphonium, 4,4'-diaminodiphenylphosphonium, 3,3'-dicarboxy-4,4'-diaminodiphenylmethane, 2,2-bis (3-amine 2-hydroxyphenyl) hexafluoropropane, 3,3'-diamino-4,4'-dihydroxydiphenylsulfonium, etc. 2 benzene diamines, 1,3-bis (3- Aminophenyl) benzene, 1,3-bis (4-aminophenyl) benzene, 1,4-bis (3-aminophenyl) benzene, 1,4-bis (4-aminophenyl) Benzene, 1,3-bis (4-aminophenoxy) benzene, 1,4-bis (3-aminophenoxy) benzene, 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (3-amino (Oxy) -4-trifluoromethylbenzene, 3,3'-diamino-4- (4-phenyl) phenoxybenzophenone, 3,3'-diamino-4,4 ' -Bis (4-phenylphenoxy) benzophenone, 1,3-bis (3-aminophenylsulfide) benzene, 1,3-bis (4-aminophenylsulfide) benzene, 1,4-bis (4-aminophenylsulfide) benzene, 1,3-bis (3-aminophenylphosphonium) benzene, 1,3-bis (4-aminophenylphosphonium) benzene, 1 1,4-bis (4-aminophenylphosphonium) benzene, 1,3-bis [2- (4-aminophenyl) isopropyl] benzene, 1,4-bis [2- (3-amino Phenyl) isopropyl] benzene, 1,4-bis [2- (4-aminophenyl) isopropyl] benzene, 1,3-bis (4-amino-3-hydroxyphenoxy) benzene 3 benzene diamines, 3,3'-bis (3-aminophenoxy) biphenyl, 3,3'-bis (4-aminophenoxy) biphenyl, 4,4 ' -double (3-aminophenoxy) biphenyl, 4,4'-bis (4-aminophenoxy) biphenyl, bis [3- (3-aminophenoxy) phenyl] ether, bis [ 3- (4-aminophenoxy) phenyl] ether, bis [4- (3-aminophenoxy) phenyl] ether, bis [4- (4-aminophenoxy) phenyl] Ether, bis [3- (3-aminophenoxy) phenyl] one, bis [3- (4-aminophenoxy) phenyl] one, bis [4- (3-aminophenoxy) ) Phenyl] ketone, bis [4- (4-aminophenoxy) phenyl] one, bis [3- (3-aminophenoxy) phenyl] sulfide, bis [3- (4- Aminophenoxy) phenyl] sulfide, bis [4- (3-aminophenoxy) phenyl] sulfide, bis [4- (4-aminophenoxy) phenyl] sulfide, Bis [3- (3-aminophenoxy) phenyl] fluorene, bis [3- (4-aminophenoxy) phenyl] fluorene, bis [4- (3-aminophenoxy) benzene Yl] fluorene, bis [4- (4-aminophenoxy) phenyl] fluorene, bis [3- (3-aminophenoxy) phenyl] methane, bis [3- (4-aminophenylbenzene Oxy) phenyl] methane, bis [4- (3-aminophenoxy) phenyl] methane, bis [4- (4-aminophenoxy) phenyl] methane, 2,2-bis [ 3- (3-aminophenoxy) phenyl] propane, 2,2-bis [3- (4-aminophenoxy) phenyl] propane, 2,2-bis [4- (3-amine Phenylphenoxy) phenyl] propane, 2,2-bis [4- (4- Phenylphenoxy) phenyl] propane, 2,2-bis [3- (3-aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoropropane, 2,2 -Bis [3- (4-aminophenoxy) phenyl] -1,1,1,3,3,3-hexafluoropropane, 2,2-bis [4- (3-aminophenoxy) ) Phenyl] -1,1,1,3,3,3-hexafluoropropane, 2,2-bis [4- (4-aminophenoxy) phenyl] -1,1,1,3, Aromatic diamines such as 4 benzene diamines such as 3,3-hexafluoropropane, 1,2-diaminoethane, 1,3-diaminopropane, 1,4-diaminobutane , 1,5-diaminopentane, 1,6-diaminohexane, 1,7-diaminoheptane, 1,8-diaminooctane, 1,9-diaminononane , 1,10-diaminodecane, 1,11-diaminoundecane, 1,12-diaminododecane, 1,2- Examples of the aliphatic diamines such as diaminocyclohexane, and the aliphatic polyetheramines include ethylene glycol and / or propylene glycol-based polyamines.
異氰酸酯成分可使用芳香族二異氰酸酯及其異構物或多聚物、脂肪族二異氰酸酯類、脂環式二異氰酸酯類及其異構物等二異氰酸酯或其他廣泛使用之二異氰酸酯類,但並不限於該等二異氰酸酯。此外,該等異氰酸酯成分可單獨使用或組合使用。 As the isocyanate component, diisocyanates such as aromatic diisocyanate and its isomers or polymers, aliphatic diisocyanates, alicyclic diisocyanates and its isomers, or other widely used diisocyanates may be used. Limited to these diisocyanates. These isocyanate components can be used alone or in combination.
二異氰酸酯列舉為例如4,4’-二苯基甲烷二異氰酸酯、甲苯二異氰酸酯、萘二異氰酸酯、二甲苯二異氰酸酯、聯苯二異氰酸酯、二苯基碸二異氰酸酯、二苯基醚二異氰酸酯等之芳香族二異氰酸酯及其異構物、多聚物、六亞甲基二異氰酸酯、異弗爾酮二異氰酸酯、二環己基甲烷二異氰酸酯、二甲苯二異氰酸酯等之脂肪族二異氰酸酯類,或前述芳香族二異氰酸酯經氫化之脂環式二異氰酸酯類及異構物、或其他廣泛使用之二異氰酸酯類。 Examples of the diisocyanate include 4,4'-diphenylmethane diisocyanate, toluene diisocyanate, naphthalene diisocyanate, xylene diisocyanate, biphenyl diisocyanate, diphenylphosphonium diisocyanate, diphenyl ether diisocyanate, and the like Aromatic diisocyanates and their isomers, polymers, hexamethylene diisocyanates, isophorone diisocyanates, dicyclohexylmethane diisocyanates, xylene diisocyanates, and the like, or the aforementioned aromatic diisocyanates Group diisocyanates are hydrogenated alicyclic diisocyanates and isomers, or other widely used diisocyanates.
如以上說明之具有醯亞胺環之鹼溶解性樹脂亦可具有醯胺鍵。該等可為異氰酸酯與羧酸反應所得之醯胺鍵,亦可為藉由其以外之反應獲得者。進而亦可具有由其他加成及縮合而成之鍵。 The alkali-soluble resin having a fluorene imine ring as described above may have a fluorene bond. These may be amide bonds obtained by the reaction of isocyanate and carboxylic acid, or may be obtained by other reactions. Furthermore, it may have bonds formed by other additions and condensations.
又,將醯亞胺環導入該鹼溶解性樹脂可使用習知慣用之具有羧基及/或酸酐之鹼溶解性聚合物、寡聚物、單體,亦可為例如該等習知慣用之鹼溶解性樹脂類單獨或與上述羧酸酐成分組合、與上述胺/異氰酸酯類反應所得之樹脂。 In addition, the alkali-soluble resin having a fluorene imine ring introduced into the alkali-soluble resin may be a conventionally-used alkali-soluble polymer, oligomer, or monomer having a carboxyl group and / or an acid anhydride, or may be, for example, a conventionally-used alkali A resin obtained by dissolving a soluble resin alone or in combination with the carboxylic anhydride component and reacting with the amine / isocyanate.
該具有鹼溶解性基與醯亞胺環之鹼溶解性樹脂之合成可使用習知慣用之有機溶劑。該有機溶劑只要不與原料的羧酸酐類、胺類、異氰酸酯類反應,且能使該等原料溶解之溶劑即無問題,尤其其構造並限制。具體例示時,列舉為N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮等醯胺溶劑、γ-丁內酯、γ-戊內酯、δ-戊內酯、γ-己內酯、ε-己內酯、α-甲基-γ-丁內酯等環狀酯溶劑、碳酸伸乙酯、碳酸伸丙酯等碳酸酯溶劑、己內醯胺等內醯胺溶劑、二噁烷等醚系溶劑、三乙二醇等二醇系溶劑、間-甲酚、對-甲酚、3-氯酚、4-氯酚、4-甲氧基酚、2,6-二甲基酚等酚系溶劑、苯乙酮、1,3-二甲基-2-咪唑啶酮、環丁碸、二甲基亞碸、四甲基脲等。此外,亦可添加其他一般之有機溶劑,亦即酚、鄰-甲酚、乙酸丁酯、乙酸乙酯、乙酸異丁酯、丙二醇甲基乙酸酯、乙基熔纖素、丁基溶纖素、2-甲基溶纖素乙酸酯、乙基溶纖素乙酸酯、丁基溶纖素乙酸酯、四氫呋喃、二甲氧基乙烷、二乙氧基乙烷、二丁基醚、二乙二醇二甲基醚、甲基異丁基酮、二異丁基酮、環己酮、甲基乙基酮、丙酮、丁醇、乙醇、二甲苯、甲苯、氯苯、萜烯、礦油精、石油腦系溶劑等而使用。其中N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基-2-吡咯啶酮、二甲基亞碸、γ-丁內酯等非質子性溶劑由於原料之溶解性高故較佳。 For the synthesis of the alkali-soluble resin having an alkali-soluble group and an imine ring, a conventional organic solvent can be used. As long as the organic solvent does not react with carboxylic acid anhydrides, amines, and isocyanates of the raw materials, and the solvent can dissolve these raw materials, there is no problem, especially its structure is not limited. Specific examples include N, N-dimethylformamide, N, N-dimethylacetamide, N-methylpyrrolidone, and other amine solvents such as γ-butyrolactone and γ-valerolide. Cyclic ester solvents such as esters, δ-valerolactone, γ-caprolactone, ε-caprolactone, α-methyl-γ-butyrolactone, carbonate solvents such as ethyl carbonate and propylene carbonate, Lactamine solvents such as caprolactam, ether solvents such as dioxane, glycol solvents such as triethylene glycol, m-cresol, p-cresol, 3-chlorophenol, 4-chlorophenol, 4- Phenolic solvents such as methoxyphenol and 2,6-dimethylphenol, acetophenone, 1,3-dimethyl-2-imidazolidone, cyclobutane, dimethylsulfenyl, and tetramethylurea Wait. In addition, other general organic solvents can also be added, that is, phenol, o-cresol, butyl acetate, ethyl acetate, isobutyl acetate, propylene glycol methyl acetate, ethyl fusin, butyl cellosolve, 2-methyl lysin acetate, ethyl lysin acetate, butyl lysin acetate, tetrahydrofuran, dimethoxyethane, diethoxyethane, dibutyl ether, diethyl Glycol dimethyl ether, methyl isobutyl ketone, diisobutyl ketone, cyclohexanone, methyl ethyl ketone, acetone, butanol, ethanol, xylene, toluene, chlorobenzene, terpenes, mineral oil It is used as a solvent for petroleum spirit and petroleum brain. Among them, aprotic solvents such as N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-2-pyrrolidone, dimethylsulfine, and γ-butyrolactone It is preferable because the solubility of the raw material is high.
如以上說明之具有羧基或酸酐基等之鹼溶解性基或醯亞胺環之鹼溶解性樹脂為了對應於光微影步驟, 其酸價較好為20~200mgKOH/g,更好為60~150mgKOH/g。該酸價為20mgKOH/g以上時,對鹼之溶解性增加,顯像性變良好,再者,由於光照射後與熱硬化成份之交聯度高,故可獲得充分之顯像對比性。且,該酸價為200mgKOH/g以下時,可抑制後述之光照射後之PEB(曝光後烘烤(POST EXPOSURE BAKE)步驟之所謂熱負載,使製程餘裕度變大。 The alkali-soluble resin having a base-soluble group such as a carboxyl group or an acid anhydride group, or an alkali-imide ring as described above corresponds to the photolithography step, The acid value is preferably 20 to 200 mgKOH / g, and more preferably 60 to 150 mgKOH / g. When the acid value is 20 mgKOH / g or more, the solubility to alkali is increased, and the developability is improved. Furthermore, since the degree of cross-linking with the thermosetting component after light irradiation is high, sufficient contrast for development can be obtained. In addition, when the acid value is 200 mgKOH / g or less, the so-called heat load in the PEB (POST EXPOSURE BAKE) step after light irradiation described later can be suppressed, and the process margin can be increased.
且,該鹼溶解性樹脂之分子量考慮顯像性與硬化塗膜特性時,質量平均分子量較好為1,000~100,000,更好為2,000~50,000。 In addition, when the molecular weight of the alkali-soluble resin is in consideration of the developability and the characteristics of the cured coating film, the mass average molecular weight is preferably 1,000 to 100,000, and more preferably 2,000 to 50,000.
該分子量為1,000以上時,曝光‧PEB後可獲得充分之耐顯像性。且,分子量為100,000以下時,鹼溶解性增加,且顯像性提高。 When the molecular weight is 1,000 or more, sufficient development resistance can be obtained after ‧PEB exposure. In addition, when the molecular weight is 100,000 or less, alkali solubility increases and developability improves.
樹脂層(B)中使用之光鹼產生劑係藉由紫外線或可見光等之光照射而使分子構造產生變化,或藉由分子斷鏈,而生成一種以上之作為後述之熱反應性化合物之聚合反應觸媒發揮功能之鹼性物質的化合物。鹼性物質列舉為例如2級胺、3級胺。 The photo-alkali generator used in the resin layer (B) changes the molecular structure by irradiation with light such as ultraviolet rays or visible light, or polymerizes one or more types of thermally reactive compounds to be described later by molecular chain breaking. A compound of a basic substance that functions as a reaction catalyst. Examples of the basic substance include a secondary amine and a tertiary amine.
光鹼產生劑列舉為例如α-胺基苯乙酮化合物、肟酯化合物、或具有醯氧基亞胺基、N-甲醯基化芳香族胺基、N-醯基化芳香族胺基、硝基苄基胺基甲酸酯基、烷氧基苄基胺基甲酸酯基等取代基之化合物等。其中,以肟酯化合 物、α-胺基苯乙酮化合物較佳。至於α-胺基苯乙酮化合物最好為具有2個以上氮原子者。 Examples of the photobase generator include an α-aminoacetophenone compound, an oxime ester compound, or an alkoxyimine group, an N-formamated aromatic amine group, an N-fluorinated aromatic amine group, Compounds having substituents such as a nitrobenzylcarbamate group and an alkoxybenzylcarbamate group. Oxime ester And α-aminoacetophenone compounds are preferred. As for the α-aminoacetophenone compound, those having two or more nitrogen atoms are preferred.
其他光鹼產生劑亦可使用WPBG-018(商品名:N,N’-二乙基胺基甲酸9-蒽基甲酯)、WPBG-027(商品名:(E)-1-[3-(2-羥基苯基)-2-丙烯醯基]哌啶)、WPBG-082(商品名:2-(3-苯甲醯基苯基)丙酸鹽胍鎓鹽)、WPBG-140(商品名:咪唑甲酸1-(1-(蒽醌-2-基)乙酯)等。 Other photobase generators can also use WPBG-018 (trade name: N, N'-diethylaminoformic acid 9-anthryl methyl ester), WPBG-027 (trade name: (E) -1- [3- (2-hydroxyphenyl) -2-propenyl) piperidine), WPBG-082 (trade name: 2- (3-benzylidenephenyl) propionate guanidinium salt), WPBG-140 (commercial product Name: 1- (1- (anthraquinone-2-yl) ethyl) imidazolecarboxylic acid) and the like.
α-胺基苯乙酮化合物為分子中具有苯偶因醚鍵,且受到光照射時分子內引起斷鏈,而生成發揮硬化觸媒作用之鹼性物質(胺)。α-胺基苯乙酮化合物之具體例可使用(4-嗎啉基苯甲醯基)-1-苄基-1-二甲胺基丙烷(IRGACURE 369,商品名,日本BASF公司製)或4-(甲硫基苯甲醯基)-1-甲基-1-嗎啉乙烷(IRGACURE 907,商品名,日本BASF(股)公司製)、2-(二甲胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮(IRGACURE 379,商品名,日本BASF(股)公司製)等之市售化合物或其溶液。 The α-aminoacetophenone compound has a benzoin ether bond in the molecule and causes chain breakage in the molecule when exposed to light, thereby generating an alkaline substance (amine) that functions as a hardening catalyst. As a specific example of the α-aminoacetophenone compound, (4-morpholinylbenzyl) -1-benzyl-1-dimethylaminopropane (IRGACURE 369, trade name, manufactured by BASF, Japan) or 4- (methylthiobenzyl) -1-methyl-1-morpholinoethane (IRGACURE 907, trade name, manufactured by BASF Japan), 2- (dimethylamino) -2- [(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone (IRGACURE 379, trade name, made by Japan BASF Corporation), etc. A commercially available compound or a solution thereof.
肟酯化合物若為藉光照射生成鹼性物質之化合物則可使用任一種。該肟酯化合物列舉市售品為日本BASF(股)製之CGI-325、IRGACURE-OXE01、IRGACURE-OXE02、ADEKA(股)製之N-1919、NCI-831等。且,亦可使用記載於日本專利第4344400號公報中之分子內具有2個肟酯基之化合物。 Any oxime ester compound can be used as long as it is a compound that generates a basic substance by light irradiation. The commercially available oxime ester compounds are CGI-325, IRGACURE-OXE01, IRGACURE-OXE02, and N-1919, NCI-831, manufactured by ADEKA (stock). In addition, a compound having two oxime ester groups in a molecule described in Japanese Patent No. 4344400 can also be used.
另外,可列舉為日本特開2004-359639號公報、日本特開2005-097141號公報、日本特開2005-220097號公報、日本特開2006-160634號公報、日本特開2008-094770號公報、日本特表2008-509967號公報、日本特表2009-040762號公報、日本特開2011-80036號公報記載之咔唑肟酯化合物等。 In addition, Japanese Patent Application Laid-Open No. 2004-359639, Japanese Patent Application Laid-Open No. 2005-097141, Japanese Patent Application Laid-Open No. 2005-220097, Japanese Patent Application Laid-Open No. 2006-160634, Japanese Patent Application Laid-Open No. 2008-094770, The carbazoxime ester compounds described in Japanese Patent Application Publication No. 2008-509967, Japanese Patent Application Publication No. 2009-040762, and Japanese Patent Application Publication No. 2011-80036.
該光鹼產生劑可單獨使用1種,亦可組合2種以上使用。熱硬化性樹脂組成物中之光鹼產生劑之調配量較好相對於熱反應性化合物100質量份,為0.1~40質量份,更好為0.1~30質量份。為0.1質量份以上時,可獲得良好的光照射部/未照射部之耐顯像性之對比性。且,為40質量份以下時,硬化特性提高。 This photobase generator may be used individually by 1 type, and may be used in combination of 2 or more type. The blending amount of the photobase generator in the thermosetting resin composition is preferably 0.1 to 40 parts by mass, more preferably 0.1 to 30 parts by mass, relative to 100 parts by mass of the thermally reactive compound. When it is 0.1 parts by mass or more, good contrast of development resistance of the light-irradiated portion / non-irradiated portion can be obtained. Moreover, when it is 40 mass parts or less, hardening characteristics will improve.
樹脂層(B)中所用之熱反應性化合物為具有可藉熱進行硬化反應之官能基之樹脂,較好為具有環狀(硫)醚基之樹脂,更好列舉為環氧樹脂、多官能氧雜環丁烷化合物等。又,環狀(硫)醚基意指環狀醚基及環狀硫醚基中之至少任一者。 The thermally reactive compound used in the resin layer (B) is a resin having a functional group capable of undergoing a hardening reaction by heat, preferably a resin having a cyclic (thio) ether group, and more preferably an epoxy resin or a polyfunctional resin. Oxetane compounds and the like. The cyclic (thio) ether group means at least one of a cyclic ether group and a cyclic thioether group.
上述環氧樹脂為具有環氧基之樹脂,可使用習知者之任一者。列舉為分子中具有2個環氧基之2官能性環氧樹脂、分子中具有多數個環氧基之多官能環氧樹脂等。又,亦可為氫化之2官能環氧化合物。 The epoxy resin is a resin having an epoxy group, and any one of the conventional ones can be used. Examples thereof include a bifunctional epoxy resin having two epoxy groups in a molecule, a polyfunctional epoxy resin having a plurality of epoxy groups in a molecule, and the like. It may also be a hydrogenated bifunctional epoxy compound.
多官能環氧化合物列舉為雙酚A型環氧樹 脂、溴化環氧樹脂、酚醛清漆型環氧樹脂、雙酚F型環氧樹脂、氫化雙酚A型環氧樹脂、縮水甘油胺型環氧樹脂、乙內醯脲(hydantoin)型環氧樹脂、脂環式環氧樹脂、三羥基苯基甲烷型環氧樹脂、雙二甲苯酚型或聯酚型環氧樹脂或該等脂混合物;雙酚S型環氧樹脂、雙酚A酚醛清漆型環氧樹脂、四羥苯基乙烷型環氧樹脂、雜環式環氧樹脂、二縮水甘油基鄰苯二甲酸酯樹脂、四縮水甘油基二甲苯醯基乙烷樹脂、含萘基之環氧樹脂、具有二環戊二烯骨架之環氧樹脂、甲基丙烯酸縮水甘油酯共聚合系環氧樹脂、環己基馬來醯亞胺與甲基丙烯酸縮水甘油酯之共聚合環氧樹脂、CTBN改質之環氧樹脂等。 Polyfunctional epoxy compounds are listed as bisphenol A epoxy trees Grease, brominated epoxy resin, novolac epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol A epoxy resin, glycidylamine epoxy resin, hydantoin epoxy resin Resin, alicyclic epoxy resin, trihydroxyphenylmethane type epoxy resin, bisxylenol type or biphenol type epoxy resin or a mixture of these lipids; bisphenol S type epoxy resin, bisphenol A novolac Type epoxy resin, tetrahydroxyphenylethane type epoxy resin, heterocyclic epoxy resin, diglycidyl phthalate resin, tetraglycidyl xylyl fluorenyl ethane resin, naphthyl group-containing Epoxy resin, epoxy resin with dicyclopentadiene skeleton, glycidyl methacrylate copolymer epoxy resin, cyclohexyl maleimide and glycidyl methacrylate copolymer epoxy resin , CTBN modified epoxy resin, etc.
其他液狀2官能性環氧樹脂可列舉為乙烯基環己烯二環氧化物、(3’,4’-環氧基環己基甲基)-3,4-環氧基環己烷羧酸酯、(3’,4’-環氧基-6’-甲基環己基甲基)-3,4-環氧基-6-甲基環己烷羧酸酯等脂環族環氧樹脂。該等環氧樹脂可單獨使用1種,亦可併用2種以上。 Other liquid bifunctional epoxy resins include vinyl cyclohexene diepoxide, (3 ', 4'-epoxycyclohexylmethyl) -3,4-epoxycyclohexanecarboxylic acid. Aliphatic epoxy resins such as esters, (3 ', 4'-epoxy-6'-methylcyclohexylmethyl) -3,4-epoxy-6-methylcyclohexanecarboxylate. These epoxy resins may be used individually by 1 type, and may use 2 or more types together.
上述多官能氧雜環丁烷化合物列舉為雙[(3-甲基-3-氧雜環丁基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁基甲氧基)甲基]苯、丙烯酸(3-甲基-3-氧雜環丁基)甲酯、丙烯酸(3-乙基-3-氧雜環丁基)甲酯、甲基丙烯酸(3-甲基-3-氧雜環丁基)甲酯、甲基丙烯酸(3-乙基-3-氧雜環丁基)甲酯、或該等之寡聚物或共聚物等多官能氧雜環丁烷 類,以及具有氧雜環丁烷醇與酚醛清漆樹脂、聚(對-羥基苯乙烯)、卡多(cardo)型雙酚類、杯芳烴(calixarene)類、間苯二酚杯芳烴(calixresorcinarene)類、或倍半氧烷等之具有羥基之樹脂之醚化物等。此外,亦列舉為具有氧雜環丁烷環之不飽和單體與(甲基)丙烯酸烷酯之共聚物等。 Examples of the polyfunctional oxetane compound include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether and bis [(3-ethyl-3-oxetanylmethoxy) Methyl] ether, 1,4-bis [(3-methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) (Meth) methyl] benzene, (3-methyl-3-oxetanyl) methyl acrylate, (3-ethyl-3-oxetanyl) methyl acrylate, (3-methyl methacrylate) Multifunctional oxetanyl, such as methyl-3-oxetanyl) methyl ester, (3-ethyl-3-oxetanyl) methacrylate, or oligomers or copolymers thereof alkyl With oxetanol and novolac resins, poly (p-hydroxystyrene), cardo type bisphenols, calixarenes, resorcinol calixarene Type, or ethers of resins having a hydroxyl group, such as sesquioxane. In addition, a copolymer of an unsaturated monomer having an oxetane ring and an alkyl (meth) acrylate is also cited.
上述熱反應性化合物之調配量較好為與鹼溶解性樹脂之當量比(羧基等之鹼溶解性基:環氧基等之熱反應性基)為1:0.1~1:10。藉由成為該調配比之範圍,顯像性變良好,可容易地形成微細圖型。上述當量比更好為1:0.2~1:5。 The blending amount of the thermally reactive compound is preferably such that the equivalent ratio to the alkali-soluble resin (alkali-soluble group such as carboxyl group: thermally reactive group such as epoxy group) is 1: 0.1 to 1:10. By setting it as the range of this blending ratio, developability becomes favorable, and a fine pattern can be formed easily. The above equivalent ratio is more preferably 1: 0.2 to 1: 5.
如以上說明之樹脂層(A)及樹脂層(B)中使用之樹脂組成物中,為了提高所得硬化物之可撓性、指觸乾燥性,而可調配習知慣用之高分子樹脂。該高分子樹脂列舉為纖維素系、聚酯系、苯氧樹脂系聚合物、聚乙烯乙縮醛系、聚乙烯丁縮醛系、聚醯胺系、聚醯胺醯亞胺系黏結劑聚合物、嵌段共聚物、彈性體等。 In the resin composition used in the resin layer (A) and the resin layer (B) described above, a conventional polymer resin may be blended in order to improve the flexibility and touch-dryness of the obtained cured product. The polymer resin is exemplified by cellulose-based, polyester-based, phenoxy resin-based polymers, polyethylene acetal-based, polyvinyl butyral-based, polyamido-based, polyamido-imide-based binder polymerization Materials, block copolymers, elastomers, etc.
該高分子樹脂可單獨使用1種,亦可併用2種以上。 This polymer resin may be used singly or in combination of two or more kinds.
且,樹脂層(A)及樹脂層(B)中使用之樹脂組成物中,為了抑制硬化物之硬化收縮、提高密著性、硬度等 特性,而可調配無機填充劑。該無機填充劑列舉為例如硫酸鋇、無定形二氧化矽、熔融二氧化矽、球狀二氧化矽、滑石、黏土、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、氮化矽、氮化鋁、氮化硼、諾益堡矽藻土(Neuburg siliceous earth)等。 In addition, in the resin composition used in the resin layer (A) and the resin layer (B), in order to suppress the hardening shrinkage of the cured material, and to improve the adhesion and hardness, etc. Characteristics, and can be adjusted with inorganic fillers. Examples of the inorganic filler include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, silicon nitride, and nitride. Aluminum, boron nitride, Neuburg siliceous earth, etc.
再者,樹脂層(A)及樹脂層(B)中所用之樹脂組成物中可調配習知慣用之著色劑。 Furthermore, a conventionally-used coloring agent may be blended in the resin composition used in the resin layer (A) and the resin layer (B).
過去,印刷配線板中之銅電路之邊緣部會有圖型層之著色力不足之情況,圖型層形成後之熱經歷中,銅會變色,外觀上僅薄的部分見到變色。代表性之熱經歷為標記之熱硬化、翹曲矯直、安裝前之預加熱、安裝等。 In the past, the edge of the copper circuit in the printed wiring board may have insufficient coloring power of the pattern layer. In the thermal history after the pattern layer is formed, the copper will discolor, and only the thin part of the appearance will be discolored. Typical thermal experiences are thermal curing of tags, warping and straightening, pre-heating before installation, installation, and the like.
因此,過去係在圖型層中調配較多著色劑以提高著色力,藉此消解僅銅電路之邊緣部分見到變色之問題。 Therefore, in the past, more coloring agents were deployed in the pattern layer to improve the tinting power, thereby eliminating the problem of discoloration seen only at the edge portion of the copper circuit.
然而,由於著色劑具有光吸收性,故會阻礙光透過到深部。結果,含有著色劑之組成物容易產生底切(undercut),難以獲得充分之密著性。 However, since the colorant is light-absorbing, it prevents light from being transmitted to the deep part. As a result, a composition containing a colorant is liable to undercut, and it is difficult to obtain sufficient adhesion.
相對於此,本發明所用之樹脂組成物藉由使鹼化學性增生至深部,可充分硬化至樹脂層之深部。 In contrast, the resin composition used in the present invention can be sufficiently hardened to the deep portion of the resin layer by chemically accelerating alkali to the deep portion.
因此,依據本發明所用之樹脂組成物,於含有著色劑時,仍可形成銅電路之隱蔽性優異、且密著性優異之圖型層。 Therefore, according to the resin composition used in the present invention, when a colorant is contained, a pattern layer having excellent concealability and excellent adhesion of a copper circuit can be formed.
樹脂層(A)及樹脂層(B)中所用之樹脂組成物中,為了調製樹脂組成物,或為了調整用以塗佈於基材或載體膜之黏度,可使用有機溶劑。 Among the resin compositions used in the resin layer (A) and the resin layer (B), an organic solvent may be used in order to adjust the resin composition or to adjust the viscosity for coating on a substrate or a carrier film.
該有機溶劑可列舉為酮類、芳香族烴類、二醇醚類、二醇醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。該有機溶劑可單獨使用1種,亦可以2種以上之混合物使用。 Examples of the organic solvent include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum-based solvents. This organic solvent may be used individually by 1 type, and may be used in mixture of 2 or more type.
樹脂層(A)及樹脂層(B)中所用之樹脂組成物中,可視需要進一步調配硫醇化合物、密著促進劑、抗氧化劑、紫外線吸收劑等成分。該等可使用電子材料領域中習知慣用者。且,可調配微粉二氧化矽、水滑石、有機膨潤土、蒙脫土等習知慣用之增黏劑、聚矽氧系、氟系、高分子系等消泡劑及/或調平劑、矽烷偶合劑、防銹劑等之習知慣用之添加劑類。 In the resin composition used in the resin layer (A) and the resin layer (B), components such as a thiol compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber may be further blended as necessary. These are known to those skilled in the art of electronic materials. In addition, conventionally used thickeners such as micronized silicon dioxide, hydrotalcite, organic bentonite, and montmorillonite can be blended, such as defoamers and / or leveling agents such as silicone, fluorine, and polymer, and silane Coupling agents, rust inhibitors, and the like are commonly used additives.
接著,針對本發明之可撓性印刷配線板之製造方法之實施形態加以詳述。本發明之可撓性印刷配線板之製造方法之特徵係包含以下步驟:於可撓性印刷配線板上形成至少一層由鹼顯像型感光性樹脂組成物(A1)所構成之樹脂層(A)的步驟、於前述樹脂層(A)上形成至少一層由包含具有醯亞胺環之鹼溶解性樹脂、光鹼產生劑、及熱反應性化合物之感光性熱硬化性樹脂組成物 (B1)所構成之樹脂層(B)的步驟、於前述步驟中已形成之樹脂層(A)與(B)上將光照射成圖型狀之步驟、加熱於前述步驟中經光照射之樹脂層(A)與(B)的步驟、及鹼顯像前述經光照射之樹脂層(A)與(B)而形成覆蓋膜及防焊劑中之至少任意一者的步驟。 Next, the embodiment of the manufacturing method of the flexible printed wiring board of this invention is demonstrated in detail. The method for manufacturing a flexible printed wiring board of the present invention is characterized by including the following steps: forming at least one resin layer (A) composed of an alkali-developing photosensitive resin composition (A1) on the flexible printed wiring board. Step), forming at least one layer of a photosensitive thermosetting resin composition comprising an alkali-soluble resin having a fluorene imine ring, a photo-alkali generator, and a heat-reactive compound on the resin layer (A). (B1) A step of forming the resin layer (B), a step of irradiating light into a pattern on the resin layers (A) and (B) formed in the foregoing step, and heating the light-irradiated portion in the foregoing step. The steps of the resin layers (A) and (B), and the step of alkali developing the aforementioned light-irradiated resin layers (A) and (B) to form at least one of a cover film and a solder resist.
本發明中,樹脂層(B)中,藉由(1)使用分子中存在醯亞胺環之樹脂,與(2)使用引起鹼溶解性樹脂與熱反應性化合物之加成反應之組成物,可使樹脂層(B)作為強化層發揮功能。 In the present invention, in the resin layer (B), by using (1) a resin having a fluorene imine ring in the molecule, and (2) using a composition that causes an addition reaction between an alkali-soluble resin and a heat-reactive compound, The resin layer (B) can function as a reinforcing layer.
亦即,藉由形成由過去之防焊劑組成物所構成之樹脂層(A),且於該樹脂層(A)上層合樹脂層(B),可於可撓性印刷配線板上一次性形成耐衝擊性、彎曲性、及低翹曲性等信賴性與加工精度優異之覆蓋膜與防焊劑。又,亦可形成層間絕緣膜作為絕緣膜。 That is, by forming a resin layer (A) composed of a conventional solder resist composition, and laminating the resin layer (B) on the resin layer (A), it can be formed at one time on a flexible printed wiring board. Cover film and solder resist with excellent reliability and processing accuracy, such as impact resistance, bendability, and low warpage. Alternatively, an interlayer insulating film may be formed as the insulating film.
以下,基於圖3說明本發明之可撓性印刷配線板之製造方法之一例。 Hereinafter, an example of a method for manufacturing a flexible printed wiring board of the present invention will be described based on FIG. 3.
該步驟係於可撓性印刷配線板上形成至少一層由鹼顯像型感光性樹脂組成物(A1)所構成之樹脂層(A)。樹脂層(A)由於可鹼顯像故可形成圖型。且藉由層合樹脂層(A)可提高電路追隨性及與基板之密著性。 This step is to form at least one resin layer (A) composed of an alkali-developing photosensitive resin composition (A1) on a flexible printed wiring board. The resin layer (A) can be patterned due to alkali development. And by laminating the resin layer (A), it is possible to improve circuit followability and adhesion to the substrate.
可撓性印刷配線板係於可撓性基材1上形成銅電路2者。形成樹脂層(A)之位置為彎曲部及非彎曲部中之任 意一者即可,但較好為彎曲部與非彎曲部兩者。所謂彎曲部係可重複彎折之要求彎曲性的部分,非彎曲部係晶片安裝部等之未彎折部分。 The flexible printed wiring board is formed by forming a copper circuit 2 on a flexible substrate 1. The position where the resin layer (A) is formed is any of a curved portion and a non-curved portion. Either one can be used, but both curved and non-curved portions are preferred. The so-called bent portion is a portion that can be repeatedly bent and requires bendability, and the non-bent portion is an unbent portion such as a wafer mounting portion.
至於樹脂層(A)之形成方法列舉為塗佈法、層合法。 The method for forming the resin layer (A) includes a coating method and a layer method.
塗佈法之情況,藉由網版印刷、簾塗法、噴霧塗佈法、輥塗佈法等方法,將鹼顯像型感光性樹脂組成物(A1)塗佈於可撓性印刷配線板上,在50~130℃左右之溫度加熱15~60分鐘左右而形成樹脂層(A)。 In the case of the coating method, an alkali-developing photosensitive resin composition (A1) is applied to a flexible printed wiring board by methods such as screen printing, curtain coating, spray coating, and roll coating. Then, the resin layer (A) is formed by heating at a temperature of about 50 to 130 ° C for about 15 to 60 minutes.
層合法之情況,係首先以有機溶劑稀釋鹼顯像型感光性樹脂組成物(A1)調整成適當黏度,且塗佈於載體膜上,經乾燥作成具有樹脂層(A)之乾膜。接著,藉由層合機等以使樹脂層(A)與可撓性印刷配線板接觸之方式貼合後,剝離載體。 In the case of lamination, first, the alkali-developing photosensitive resin composition (A1) is diluted with an organic solvent to adjust the viscosity to the appropriate viscosity, and then coated on a carrier film, and dried to form a dry film having a resin layer (A). Next, after laminating | bonding by a laminator etc. so that a resin layer (A) may contact a flexible printed wiring board, a carrier is peeled.
該步驟係於樹脂層(A)上形成至少一層由含具有醯亞胺環之鹼溶解性樹脂、光鹼產生劑、及熱反應性化合物之感光性熱硬化性樹脂組成物(B1)所構成之樹脂層(B)。樹脂層(B)由於可鹼顯像,故可形成微細圖型,且加工精度優異。此外,藉由層合樹脂層(B),可提高耐衝擊性與彎曲性及低翹曲性。 This step is to form at least one layer of a photosensitive thermosetting resin composition (B1) containing an alkali-soluble resin having a fluorene imine ring, a photobase generator, and a thermoreactive compound on the resin layer (A). Resin layer (B). Since the resin layer (B) can be developed by alkali, fine patterns can be formed and the processing accuracy is excellent. In addition, by laminating the resin layer (B), impact resistance, bendability, and low warpage can be improved.
形成樹脂層(B)之位置較好為樹脂層(A)上之彎曲部與非彎曲部兩者。但,亦可於樹脂層(A)上僅於彎 曲部、或僅於非彎曲部形成樹脂層(B)。 The position where the resin layer (B) is formed is preferably both the curved portion and the non-curved portion on the resin layer (A). However, it is also possible to bend the resin layer (A) only The resin layer (B) is formed in a curved portion or only in a non-curved portion.
且,樹脂層(B)與樹脂層(A)之間亦可介隔其他層。 In addition, another layer may be interposed between the resin layer (B) and the resin layer (A).
樹脂層(B)可藉與樹脂層(A)之形成方法相同之方法形成。 The resin layer (B) can be formed by the same method as the method of forming the resin layer (A).
又,樹脂層(A)與(B)亦可將該等作成1個層合型乾膜後,藉由將該層合型乾膜層合於可撓性印刷配線板上而形成。 Further, the resin layers (A) and (B) may be formed into a laminated dry film, and then the laminated dry film is laminated on a flexible printed wiring board.
本發明中,基於對銅電路之追隨性之觀點,樹脂層(A)較好形成為比樹脂層(B)更厚。 In the present invention, the resin layer (A) is preferably formed to be thicker than the resin layer (B) from the viewpoint of followability to a copper circuit.
該步驟係對樹脂層(A)與(B)以負型圖型狀照射光。藉由該步驟,可使感光性熱硬化性樹脂組成物中所含之光鹼產生劑活性化可使光照射部硬化。藉由如此產生鹼而化學增生至樹脂層之深部,認為可充分的硬化至樹脂層之深部。於隨後之熱硬化時,該鹼一方面作為鹼顯像性樹脂與熱反應性化合物之加成反應之觸媒發揮作用,一方面進行加成反應,故在光照射部樹脂層可充分硬化至深部。如此,本發明之硬化性樹脂組成物之硬化例如由於為利用熱反應之環氧基之開環反應,故相較於藉光反應進行時可抑制變形或硬化收縮。 In this step, the resin layers (A) and (B) are irradiated with light in a negative pattern. By this step, the photobase generator contained in the photosensitive thermosetting resin composition can be activated, and the light-irradiated part can be hardened. By generating alkali in this way, it chemically accumulates to the deep part of the resin layer, and it is considered that it can be sufficiently hardened to the deep part of the resin layer. During subsequent thermal hardening, the base functions as a catalyst for the addition reaction between the alkali-developing resin and the heat-reactive compound on the one hand, and performs the addition reaction on the other hand, so the resin layer in the light-irradiated part can be sufficiently hardened to Deep. In this way, the hardening of the curable resin composition of the present invention is, for example, a ring-opening reaction using an epoxy group that is thermally reacted, so that deformation or hardening shrinkage can be suppressed compared to when the light reaction proceeds.
至於光照射機可使用直接繪圖裝置(例如藉由電腦之CAD數據直接以雷射描繪圖像之雷射直接繪圖裝置)、 搭載金屬鹵素燈之光照射機、搭載(超)高壓水銀燈之光照射機、搭載短弧水銀燈之光照射機、或使用(超)高壓水銀燈之紫外線燈之直接繪圖裝置。 As for the light irradiation machine, a direct drawing device can be used (e.g., a laser direct drawing device that directly draws an image by laser using CAD data of a computer), A direct drawing device equipped with a light irradiating machine equipped with a metal halide lamp, a light irradiating machine equipped with an (ultra-high pressure) mercury lamp, a light irradiating machine equipped with a short arc mercury lamp, or an ultraviolet lamp using a (ultra-high pressure) mercury lamp.
光照射所用之活性能量線較好使用最大波長為350~450nm範圍之雷射光或散射光。且,其光照射量雖隨著膜厚等而異,但一般可為50~1500mJ/cm2,較好為100~1000mJ/cm2之範圍內。 The active energy ray used for light irradiation preferably uses laser light or scattered light having a maximum wavelength in the range of 350 to 450 nm. In addition, although the amount of light irradiation varies depending on the film thickness and the like, it may be generally within a range of 50 to 1500 mJ / cm 2 , and preferably within a range of 100 to 1000 mJ / cm 2 .
於該步驟加熱樹脂層(A)與(B)。藉此,可藉由以光照射產生之鹼充分硬化至深部。該步驟為稱為所謂PEB(曝光後烘烤)步驟之步驟。 In this step, the resin layers (A) and (B) are heated. Thereby, the alkali generated by light irradiation can be sufficiently hardened to a deep part. This step is a step called a so-called PEB (post-exposure baking) step.
加熱溫度較好為熱硬化性樹脂組成物中之光照射部熱硬化,但未照射部未熱硬化之溫度。 The heating temperature is preferably a temperature at which the light-irradiated portion in the thermosetting resin composition is thermally cured, but the non-irradiated portion is not thermally cured.
例如,加熱步驟較好在比未照射之熱硬化性樹脂組成物之發熱起始溫度或發熱峰值溫度低,且比光照射之熱硬化性樹脂組成物之發熱起始溫度或發熱峰值溫度高之溫度下加熱。藉由如此加熱,可僅使光照射部選擇性硬化。 For example, the heating step is preferably lower than the heat generation onset temperature or peak heating temperature of the non-irradiated thermosetting resin composition and higher than the heat generation onset temperature or peak heating temperature of the light-cured thermosetting resin composition. Heating at temperature. By heating in this way, only the light irradiation part can be selectively hardened.
加熱溫度為例如80~140℃。藉由將加熱溫度設為80℃以上,可使光照射部充分硬化。另一方面,藉由將加熱溫度設為140℃以下,可選擇性僅使光照射部硬化。加熱時間為例如10~100分鐘。又,未照射部由於未自光鹼產生劑產生鹼,故熱硬化受到抑制。 The heating temperature is, for example, 80 to 140 ° C. By setting the heating temperature to 80 ° C or higher, the light-irradiated portion can be sufficiently hardened. On the other hand, by setting the heating temperature to 140 ° C. or lower, it is possible to selectively harden only the light irradiation portion. The heating time is, for example, 10 to 100 minutes. Moreover, since the non-irradiated part does not generate an alkali from a photobase generator, thermal hardening is suppressed.
該步驟係使經光照射之樹脂層(A)與(B)顯像,而形成覆蓋膜及防焊劑中之至少任意一者。藉由該顯像,可一次性獲得圖型狀之覆蓋膜與防焊劑。 In this step, the resin layers (A) and (B) irradiated with light are developed to form at least one of a cover film and a solder resist. With this development, a pattern-like cover film and solder resist can be obtained at one time.
顯像方法為鹼顯像,可利用浸漬法、淋洗法、噴霧法、刷塗法等習知之方法。 The imaging method is alkaline imaging, and a known method such as a dipping method, a rinsing method, a spray method, or a brushing method can be used.
鹼顯像液可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、乙醇胺、咪唑等胺類,氫氧化四甲基銨水溶液(TMAH)等鹼性水溶液或該等之混合液。 As the alkali developing solution, amines such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, ethanolamine, imidazole, and tetramethylammonium hydroxide aqueous solution (TMAH) can be used. Or a mixture of these.
本發明亦可視需要追加以下步驟。 The present invention can also add the following steps as needed.
於顯像步驟之後亦可對樹脂層(A)與(B)進行光照射。藉由該光照射,使先前之光照射步驟中,樹脂層(B)內未活性化而殘留之光鹼產生劑活性化,而充分產生鹼。 After the developing step, the resin layers (A) and (B) may also be irradiated with light. By this light irradiation, the photo-alkali generator remaining in the resin layer (B) which has not been activated in the previous light irradiation step is activated to sufficiently generate alkali.
該光照射中之紫外線之波長及光照射量(曝光量)可與前述光照射步驟相同,亦可不同。光照射量為例如150~2000mJ/cm2。 The wavelength and light irradiation amount (exposure amount) of the ultraviolet rays in the light irradiation may be the same as or different from the aforementioned light irradiation step. The light irradiation amount is, for example, 150 to 2000 mJ / cm 2 .
且,顯像步驟之後,亦可進一步藉加熱使樹脂層(A)與(B)熱硬化(後硬化)。該熱硬化步驟係利用藉由光照射步驟、或光照射步驟及第2光照射步驟自光鹼產生劑產生之鹼,使圖型層充分熱硬化。熱硬化步驟之時點,由於未照射部既已去除,故熱硬化步驟可在未照射之熱硬化性樹脂組成物之硬化反應起始溫度以上之溫度進行。藉由熱硬化,可使樹脂層(A)與(B)充分熱硬化。加熱溫度為例如150℃以上。 Further, after the developing step, the resin layers (A) and (B) may be further thermally cured (post-cured) by heating. This thermal curing step is to sufficiently thermally harden the pattern layer by using an alkali generated from the photo-alkali generator in the light irradiation step, the light irradiation step, and the second light irradiation step. At the time of the thermal curing step, since the unirradiated portion has been removed, the thermal curing step can be performed at a temperature higher than the curing reaction start temperature of the unirradiated thermosetting resin composition. By thermal curing, the resin layers (A) and (B) can be sufficiently thermally cured. The heating temperature is, for example, 150 ° C or higher.
以下例示實施例及比較例,針對本發明具體加以說明,但本發明並不限於下述實施例。 Examples and comparative examples are given below to specifically describe the present invention, but the present invention is not limited to the following examples.
以下述表1所示之比例(質量份)調配該表1中所示之各種成分,以攪拌機預混合後,以3軸輥混練機混練,調製感光性樹脂組成物。 Various components shown in Table 1 were prepared in the proportions (parts by mass) shown in Table 1 below, pre-mixed with a blender, and kneaded with a 3-axis roller kneader to prepare a photosensitive resin composition.
關於實施例1係使用層合法。實施例1中係將(b)層用之感光性樹脂組成物塗佈於載體薄膜上並乾燥,形成 顯像性保護層後,於其表面塗佈(a)層用之感光性樹脂組成物並乾燥而獲得乾膜。將該乾膜於120℃壓著於可撓性印刷配線板上,形成感光性樹脂構造物。膜厚示於表1。 Regarding the first embodiment, the use layer is legal. In Example 1, the photosensitive resin composition for layer (b) was coated on a carrier film and dried to form After the developable protective layer, the photosensitive resin composition for the layer (a) is coated on the surface and dried to obtain a dry film. This dry film was pressed onto a flexible printed wiring board at 120 ° C to form a photosensitive resin structure. The film thickness is shown in Table 1.
關於實施例2係使用全面印刷法,將(a)層用之感光性樹脂組成物塗佈於可撓性印刷配線板上並乾燥後,於其表面塗佈(b)用之感光性樹脂組成物並乾燥,形成感光性樹脂構造物。膜厚示於表1。 About Example 2, the photosensitive resin composition for the layer (a) was coated on a flexible printed wiring board using a full-printing method, and dried, and then the photosensitive resin composition for (b) was coated on the surface. And dried to form a photosensitive resin structure. The film thickness is shown in Table 1.
關於比較例1係使用全面印刷法,將(b)層用之感光性樹脂組成物塗佈於可撓性印刷配線板上並乾燥,獲得僅(b)層之可撓性印刷配線板。膜厚示於表1。 In Comparative Example 1, a full-print method was used, and the photosensitive resin composition for layer (b) was applied to a flexible printed wiring board and dried to obtain a flexible printed wiring board having only (b) layers. The film thickness is shown in Table 1.
關於比較例2係使用全面印刷法,將(a)層用之感光性樹脂組成物塗佈於可撓性印刷配線板上並乾燥,獲得僅(a)層之可撓性印刷配線板。膜厚示於表1。 In Comparative Example 2, a full-print method was used, and the photosensitive resin composition for the (a) layer was applied to a flexible printed wiring board and dried to obtain a flexible printed wiring board having only the (a) layer. The film thickness is shown in Table 1.
關於比較例3係使用層合法。比較例3係於藉由沖壓加工,形成5mm×5mm之開口圖型之聚醯亞胺膜上塗佈 (a)層用之樹脂並乾燥後,在120℃下壓著於可撓性印刷配線板上。藉此,獲得具有圖型之可撓性印刷配線板。其膜厚示於表1。 The comparative example 3 is a layer-based method. Comparative Example 3 was applied on a polyimide film having an opening pattern of 5 mm × 5 mm by press processing. (a) The resin for the layer is dried and then pressed onto a flexible printed wiring board at 120 ° C. Thereby, a flexible printed wiring board having a pattern is obtained. The film thickness is shown in Table 1.
比較例4係使用圖型印刷法,於藉由開口5mm×5mm之圖型印刷於聚醯亞胺膜上塗佈(b)層用之樹脂並乾燥,獲得僅具有(b)層之圖型之可撓性印刷配線板。其膜厚示於表1。 Comparative Example 4 used a pattern printing method to print a pattern of 5 mm × 5 mm on a polyimide film and apply a resin for layer (b) and dried to obtain a pattern having only (b) layer. Flexible printed wiring board. The film thickness is shown in Table 1.
針對實施例1、2及比較例1、2之感光性樹脂構造物,使用搭載金屬鹵素燈之曝光裝置(HMW-680-GW20),透過負型遮罩以曝光量500mJ/cm2進行光照射並顯像(30℃、0.2MPa,1質量%碳酸鈉水溶液),調查可否進行鹼顯像。 For the photosensitive resin structures of Examples 1 and 2 and Comparative Examples 1 and 2, an exposure device (HMW-680-GW20) equipped with a metal halide lamp was used to irradiate light through a negative mask at an exposure of 500 mJ / cm 2 And imaging was performed (30 ° C, 0.2 MPa, 1% by mass sodium carbonate aqueous solution), and it was investigated whether alkali imaging was possible.
針對實施例1、2之感光性構造物及比較例1、2之樹脂層,與上述鹼顯像性試驗同樣,藉由光照射及顯像,形成具有開口部(5×5mm)之圖型。 With respect to the photosensitive structures of Examples 1 and 2 and the resin layers of Comparative Examples 1 and 2, the pattern of openings (5 x 5 mm) was formed by light irradiation and development in the same manner as the alkali developability test described above. .
將具有實施例1、2及比較例1~4之圖型之可撓性印刷配線板彎折180°。未出現破裂時記為良好,發生破裂時記為不良。 The flexible printed wiring boards having the patterns of Examples 1, 2 and Comparative Examples 1 to 4 were bent by 180 °. When no rupture occurred, it was recorded as good, and when rupture occurred, it was recorded as bad.
於形成有梳型電極(線/間隔=100μm/100μm)之可撓性印刷配線板上,與上述鹼顯像性試驗同樣,藉由光照射及顯像,形成實施例1、2及比較例1~4之圖型,製作評價基板。將該評價基板放入130℃、濕度85%之環境下之高溫高濕槽中,以電壓50V帶電,進行槽內HAST試驗1000小時。未短路者記為良好,短路者記為不良。 On a flexible printed wiring board with comb electrodes (line / space = 100 μm / 100 μm), as in the alkali developability test described above, Examples 1, 2 and Comparative Examples were formed by light irradiation and development. Patterns 1 to 4 were used to produce evaluation boards. The evaluation substrate was placed in a high-temperature and high-humidity tank under an environment of 130 ° C. and 85% humidity, and was charged at a voltage of 50 V to perform a HAST test in the tank for 1,000 hours. Those who were not short-circuited were regarded as good, and those who were short-circuited were regarded as bad.
針對實施例1、2之感光性樹脂構造物及比較例1、2之樹脂層,與上述鹼顯像性試驗同樣,藉由光照射及顯像,形成具有開口部(5×5mm)之圖型。 As for the photosensitive resin structures of Examples 1 and 2 and the resin layers of Comparative Examples 1 and 2, similar to the alkali developability test described above, a figure with openings (5 x 5 mm) was formed by light irradiation and development. type.
針對實施例1、2及比較例1~4之圖型,評價有無滲出到開口部(5×5mm)之內側。前述各評價試驗之結果示於表2。 For the patterns of Examples 1, 2 and Comparative Examples 1 to 4, the presence or absence of bleeding to the inside of the opening (5 × 5 mm) was evaluated. The results of the aforementioned evaluation tests are shown in Table 2.
由上述表2所示之結果可知,實施例1及2 之感光性樹脂構造物可在可撓性印刷配線板上藉顯像形成微細圖型。且,可知實施例1、2之保護膜之彎曲性及電絕緣性優異。 As can be seen from the results shown in Table 2 above, Examples 1 and 2 The photosensitive resin structure can be developed on a flexible printed wiring board to form a fine pattern. In addition, it can be seen that the protective films of Examples 1 and 2 are excellent in flexibility and electrical insulation.
相對於此,比較例1之保護膜無法獲得彎曲性,比較例2之保護膜之絕緣性不足。另一方面,比較例3、4之保護膜均在可撓性印刷配線板上,出現滲出至開口部,可知不適於形成微細圖型。 On the other hand, the protective film of Comparative Example 1 cannot obtain flexibility, and the protective film of Comparative Example 2 has insufficient insulation properties. On the other hand, the protective films of Comparative Examples 3 and 4 both bleed to the openings on the flexible printed wiring board, and it was found that it was not suitable for forming a fine pattern.
以下,藉實施例、比較例更詳細說明本發明,但本發明並不因該等實施例、比較例而受限。 Hereinafter, the present invention will be described in more detail with reference to examples and comparative examples, but the present invention is not limited by these examples and comparative examples.
於裝置攪拌機、氮氣導入管、分餾環、冷卻環之可分離3頸燒瓶中添加12.2g之3,5-二胺基苯甲酸、8.2g之2,2’-雙[4-(4-胺基苯氧基)苯基]丙烷、30g NMP、30g γ-丁內酯、27.9g之4,4’-氧基二鄰苯二甲酸酐、3.8g之偏苯三酸酐,在氮氣環境下、於室溫、100rpm下攪拌4小時。接著,添加20g甲苯,於矽油浴溫度180℃、150rpm下邊餾除甲苯及水邊攪拌4小時,獲得聚醯亞胺溶液。 Add 12.2 g of 3,5-diaminobenzoic acid and 8.2 g of 2,2'-bis [4- (4-amine) to a separable 3-necked flask equipped with a stirrer, nitrogen introduction tube, fractionation ring, and cooling ring. Phenylphenoxy) phenyl] propane, 30g NMP, 30g γ-butyrolactone, 27.9g of 4,4'-oxydiphthalic anhydride, 3.8g of trimellitic anhydride, at room temperature in a nitrogen atmosphere Stir at 100 rpm for 4 hours. Next, 20 g of toluene was added, and the toluene and water were stirred at a silicone oil bath temperature of 180 ° C and 150 rpm for 4 hours to obtain a polyimide solution.
根據下述表3所記載之調配,分別調配實施例及比較例所記載之材料,以攪拌機預混合後,以3軸混練機混練,調製構成各樹脂之樹脂組成物。表中之值若無特別指 明則為質量份。 According to the formulations described in Table 3 below, the materials described in the Examples and Comparative Examples were prepared, pre-mixed with a blender, and kneaded with a 3-axis kneader to prepare the resin composition constituting each resin. The values in the table Ming is the mass part.
準備形成有銅厚18μm之電路之可撓性印刷配線基材,使用Merck公司之CZ-8100進行前處理。隨後,分別以表3所示之塗佈方法,於前述進行前處理之可撓性印刷配線基材上,以使乾燥後之膜厚成為25μm之方式進行實施例3、4及比較例5之樹脂組成物之塗佈。隨後,以熱風循環式乾燥爐進行90℃/30分鐘之乾燥,形成由樹脂組成物所構成之樹脂層(A)。 A flexible printed wiring substrate on which a circuit having a copper thickness of 18 μm was formed was prepared using Merck CZ-8100 for pretreatment. Subsequently, according to the coating methods shown in Table 3, the flexible printed wiring substrates subjected to the pretreatment were subjected to the methods of Examples 3, 4 and Comparative Example 5 so that the film thickness after drying was 25 μm. Coating of resin composition. Subsequently, drying was performed at 90 ° C./30 minutes in a hot-air circulation drying furnace to form a resin layer (A) composed of a resin composition.
於上述形成之樹脂層(A)上,以表3所示之塗佈方法,以使乾燥後成為10μm之方式進行實施例3及4之樹脂組成物之塗佈。隨後,以熱風循環式乾燥爐進行90℃/30分鐘之乾燥,形成由樹脂組成物所構成之樹脂層(B)。又,比較例1未進行樹脂層(B)之形成。 On the resin layer (A) formed as described above, the resin composition of Examples 3 and 4 was coated by the coating method shown in Table 3 so that it became 10 μm after drying. Subsequently, drying was performed in a hot-air circulation type drying furnace at 90 ° C. for 30 minutes to form a resin layer (B) composed of a resin composition. In addition, in Comparative Example 1, formation of the resin layer (B) was not performed.
實施例3、4中,對上述獲得之具備樹脂層(A)與(B)之可撓性印刷配線板,利用ORC公司之HMW680GW(金屬鹵素燈,散射光),以表3所示之曝光量以負型圖型狀進行光照射。接著,在90℃進行加熱處理60分鐘。隨後,將基材浸漬於30℃之1質量%之碳 酸鈉水溶液中進行顯像3分鐘,評價能否有顯像性。比較例5係對具備上述獲得之樹脂層(A)之可撓性印刷配線板,與實施例3同樣,評價能否有顯像性。所得結果示於表3。 In Examples 3 and 4, the flexible printed wiring boards having the resin layers (A) and (B) obtained as described above were exposed as shown in Table 3 by using HMW680GW (metal halide lamp, scattered light) from ORC. The amount is irradiated with light in a negative pattern. Then, it heat-processed at 90 degreeC for 60 minutes. Subsequently, the substrate was immersed in 1% by mass of carbon at 30 ° C. The development was performed in an aqueous sodium solution for 3 minutes to evaluate whether or not there was developability. In Comparative Example 5, the flexible printed wiring board provided with the resin layer (A) obtained as described above was evaluated in the same manner as in Example 3 to determine whether or not there was developability. The results obtained are shown in Table 3.
接著,使用熱風循環式乾燥爐,進行150℃/60分鐘之熱處理,獲得圖型狀之硬化塗膜。對所得硬化塗膜,實施MIT試驗(使用R=0.38mm/宇部興產(股)製之UPILEX 12.5μm之基材)及表面硬度試驗(鉛筆硬度試驗),評價彎曲性及表面硬度。所得結果示於下述表3。 Next, a hot air circulation type drying furnace was used to perform a heat treatment at 150 ° C / 60 minutes to obtain a patterned hardened coating film. The obtained cured coating film was subjected to a MIT test (using a base material of UPILEX 12.5 μm manufactured by Ube Kosan Co., Ltd.) and a surface hardness test (pencil hardness test) to evaluate bendability and surface hardness. The results obtained are shown in Table 3 below.
如由表3所示之評價結果所了解,實施例3及4之可撓性印刷配線板可與比較例5之可撓性印刷配線板同樣進行顯像,關於彎曲性及表面硬度則大幅優異。 As can be understood from the evaluation results shown in Table 3, the flexible printed wiring boards of Examples 3 and 4 can be developed in the same manner as the flexible printed wiring board of Comparative Example 5, and have excellent flexibility and surface hardness. .
1‧‧‧感光性樹脂構造物 1‧‧‧ photosensitive resin structure
2‧‧‧可撓性基材 2‧‧‧ flexible substrate
3‧‧‧銅電路 3‧‧‧copper circuit
a‧‧‧顯像性接著層 a‧‧‧Imaging layer
b‧‧‧顯像性保護層 b‧‧‧ Imaging protective layer
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