WO2015059861A1 - Dispositif de communication et son procédé de commande - Google Patents

Dispositif de communication et son procédé de commande Download PDF

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Publication number
WO2015059861A1
WO2015059861A1 PCT/JP2014/004568 JP2014004568W WO2015059861A1 WO 2015059861 A1 WO2015059861 A1 WO 2015059861A1 JP 2014004568 W JP2014004568 W JP 2014004568W WO 2015059861 A1 WO2015059861 A1 WO 2015059861A1
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WO
WIPO (PCT)
Prior art keywords
time interval
communication device
error
transport carriage
communication
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PCT/JP2014/004568
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English (en)
Japanese (ja)
Inventor
啓 上山
谷本　好史
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村田機械株式会社
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Publication date
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Publication of WO2015059861A1 publication Critical patent/WO2015059861A1/fr

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4185—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the network communication
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the present invention relates to a communication device, and more particularly, to a communication device that performs communication between a placement port for placing a transported object and a transport carriage that transports and transfers the transported object, and a control method thereof.
  • the S84 (Semiconductor Equipment and Materials International) E84 communication sequence is applied to the communication between the mounting port provided in the semiconductor manufacturing apparatus and a transporting carriage such as an overhead traveling carriage.
  • a transporting carriage such as an overhead traveling carriage.
  • the overhead traveling carriage is performed in an E84 communication sequence.
  • a control signal is exchanged between the and the loading port.
  • an interlock sequence consisting of a plurality of processes is adopted so that the process does not proceed to the next process unless a specific signal (L_REQ) is turned off.
  • L_REQ specific signal
  • the pod is transferred from the overhead traveling carriage to the placement port safely and reliably.
  • a parallel interface of 8 bits (one direction: 8 bits, bidirectional: 16 bits) is used.
  • An optical communication device is disposed on the traveling route of the overhead traveling carriage, and the optical communication apparatus and the overhead traveling carriage exchange signals with light.
  • the optical communication device and the placement port are connected by a parallel interface cable.
  • IO ports information of input / output ports
  • network communication such as a LAN (Local Area Network).
  • a parallel signal which is information on the IO port, is converted into a packet and transmitted via a network.
  • the present invention is for solving the above-mentioned problem, in a communication device that performs communication between a placement port on which a transported object is placed and a transport carriage that transports and transfers the transported object.
  • An object is to transmit error information without delay while suppressing an increase in the amount of communication data.
  • a communication device includes a parallel interface that communicates with a placement port on which a transported object is placed, and the placement port between the placement interface and the placement port.
  • a network communication unit that communicates via a network with a transport cart that transfers a transported object, and a control unit that controls the parallel interface and the network communication unit, wherein the control unit includes the placement port and the transport
  • the control unit includes the placement port and the transport
  • the communication cycle between the transport carriage and the loading port can be shortened, so that error information can be transmitted without delay. Further, when no error has occurred, the communication cycle between the transport carriage and the placement port can be made longer than when an error has occurred, so that the amount of communication data can be suppressed.
  • the parallel interface may have a configuration based on the SEMI E84 standard.
  • the communication device may further include an interface for changing at least one of the first time interval and the second time interval from the outside.
  • the first time interval and the second time interval can be adjusted to appropriate values as needed from the outside.
  • control unit may change the second time interval according to an error type in the interlock sequence.
  • the second time interval can be set to a necessary and sufficient value according to the risk of error, urgency, etc., the amount of communication data can be further suppressed.
  • a communication device control method includes a parallel interface that communicates with a placement port on which an object to be transported is placed, and the placement port described above.
  • a communication device control method comprising: a network communication unit that communicates via a network with a transport carriage that transfers the object to be transferred in a network; and a control unit that controls the parallel interface and the network communication unit.
  • Including a communication process between the placement port and the transport carriage, which is repeated in an interlock sequence for transferring the object to be transported between the placement port and the transport carriage, and the communication process includes the network Processing for converting the first packet received by the communication unit into a first parallel signal; and converting the first parallel signal into the parallel interface.
  • the predetermined waiting period is set to a first time interval, and when an error occurs in the interlock sequence, the predetermined waiting period is set to a second time shorter than the first time interval. And processing for setting the interval.
  • the communication interval between the transport carriage and the loading port can be shortened, so that error information can be transmitted without delay. Further, when no error has occurred, the communication interval between the transport carriage and the loading port can be made longer than when an error has occurred, so that the amount of communication data can be suppressed.
  • the present invention can be realized not only as an apparatus and a control method, but also as a program that causes a computer to execute steps in the control method. Further, it can be realized as a computer-readable recording medium in which the program is recorded, and can be realized as information, data, or a signal indicating the program. These programs, information, data, and signals may be distributed via a communication network such as the Internet.
  • a communication device that performs communication between a placement port on which a transported object is placed and a transport carriage that transports and delivers the transported object, an increase in the amount of communication data is suppressed without delay. Error information can be transmitted.
  • FIG. 1 is an external view showing an outline of a semiconductor manufacturing system including a communication device according to an embodiment of the present invention.
  • FIG. 2 is a block diagram showing a functional configuration of the semiconductor manufacturing system including the communication device according to the embodiment of the present invention.
  • FIG. 3 is a diagram showing an example of a processing procedure of the communication device according to the embodiment of the present invention.
  • FIG. 4 is a flowchart showing detailed processing steps of the active side interlock execution step according to the embodiment of the present invention.
  • FIG. 5 is a flowchart showing detailed processing steps of the Passive side interlock execution step according to the embodiment of the present invention.
  • FIG. 6 is a flowchart showing detailed processing steps of the Passive signal reception step of the communication device according to the embodiment of the present invention.
  • FIG. 1 is an external view showing an outline of a semiconductor manufacturing system.
  • the semiconductor manufacturing system 1 mainly includes a communication device 10, a semiconductor manufacturing apparatus 50, a mounting port 20, a travel route 2, a transport cart 30, and an access point 40.
  • 1 is an apparatus for processing a wafer, and includes a FOUP loading / unloading port 51 for loading and unloading a FOUP (Front Opening Unified Pod) 100 in which the wafer is stored.
  • FOUP Front Opening Unified Pod
  • the mounting port 20 is a port on which the FOUP 100 that is the object to be transported is placed, and is placed near the FOUP loading / unloading port 51 of the semiconductor manufacturing apparatus 50 and delivers the semiconductor manufacturing apparatus 50 and the FOUP 100.
  • the mounting port 20 transfers the FOUP 100 to and from the transport cart 30.
  • the placement port 20 includes a parallel interface 21 and transmits / receives a signal to / from the communication device 10 via the parallel cable 60.
  • the transport cart 30 is a cart that transfers the FOUP 100 to and from the placement port 20 and transports it along the travel route 2, and includes a grip portion 31 that grips the FOUP 100 inside.
  • the grip portion 31 is provided so as to be movable up and down, and is lowered to the vicinity of the placement port 20 when the FOUP 100 is transferred to and from the placement port 20.
  • the communication device 10 is a device that mediates transmission / reception of signals between the placement port 20 and the transport carriage 30.
  • the communication device 10 includes a parallel interface 11 and transmits / receives a parallel signal to / from the parallel interface 21 of the placement port 20 via the parallel cable 60.
  • the communication device 10 further includes a LAN port 12 and transmits / receives packets to / from the transport carriage 30 via the LAN cable 70 and the access point 40.
  • the access point 40 is a device that mediates transmission / reception of packets between the transport cart 30 and the communication device 10.
  • the access point 40 transmits the packet received from the communication device 10 via the LAN cable 70 to the transport cart 30 by wireless communication (for example, IEEE 802.11), and the packet received from the transport cart 30 by wireless communication is transmitted to the LAN.
  • the data is transmitted to the communication device 10 via the cable 70.
  • FIG. 2 is a block diagram showing a characteristic functional configuration of a semiconductor manufacturing apparatus including a communication device.
  • the transport cart 30 functionally includes a cart control unit 32 and a cart communication unit 33.
  • the carriage control unit 32 receives a signal indicating information on the placement port 20 from the carriage communication unit 33 and controls the operation of the transport carriage 30. Further, the carriage control unit 32 transmits a packet indicating the state of the transport carriage 30 to the carriage communication unit 33.
  • the cart communication unit 33 transmits the packet indicating the state of the transport cart 30 transmitted from the cart control unit 32 to the access point 40 by wireless communication. In addition, the cart communication unit 33 receives the packet transmitted from the access point 40 and transmits the packet to the cart control unit 32.
  • the placement port 20 functionally includes an LP control unit 22 and a parallel interface 21.
  • the LP control unit 22 receives a parallel signal indicating the state of the transport carriage 30 from the parallel interface 21 and controls the placement port 20.
  • the LP control unit 22 transmits a parallel signal indicating the state of the placement port 20 to the parallel interface 21.
  • the parallel interface 21 is an input / output unit that inputs and outputs parallel signals, and includes a receptacle for connecting a connector (Dsub-25pin) included in the parallel cable 60.
  • the communication device 10 functionally includes a parallel interface 11, a LAN port 12, a control unit 13, and a network communication unit 14.
  • the parallel interface 11 is an interface that communicates with the placement port 20, and includes an 8-bit one-way and bi-directional 16-bit IO port to which a parallel cable 60 is connected.
  • the control unit 13 In the interlock sequence for transferring the FOUP 100 between the placement port 20 and the transport carriage 30, the control unit 13 repeatedly performs communication processing between the placement port 20 and the transport carriage 30 at a predetermined communication cycle. It is a processing unit.
  • the control unit 13 performs at least the following six processes in the communication process.
  • the standby period is set to the first time interval, and when an error occurs in the interlock sequence, the standby period is set to the second time interval shorter than the first time interval. The process to set for the time interval.
  • the control unit 13 includes a CPU, a storage unit, and the like for performing the communication process.
  • the network communication unit 14 is a communication unit that communicates with the transport cart 30 via a network.
  • the LAN port 12 is an input / output unit that inputs and outputs packets, and is connected to a LAN cable 70.
  • FIG. 3 is a diagram illustrating an example of a processing procedure when the communication device 10 performs communication processing based on the E84 interlock sequence when transferring the FOUP 100 between the mounting port 20 and the transport carriage 30. is there.
  • the Passive side in the E84 interlock sequence is the placement port 20, and the Active side is the transport carriage 30.
  • the E84 interlock sequence is composed of a plurality of steps, and each time the steps on the Active side and the Passive side are completed without error, the value of each bit of the parallel signal on the Active side or 8 bits on the Passive side is updated.
  • the next process is executed, and when it is determined that an error has occurred, the interlock sequence is interrupted.
  • packets corresponding to the parallel signals of the active side 8 bits and the passive side 8 bits are transmitted and received between the active transport cart 30 and the communication device 10.
  • the communication device 10 repeats the communication process of the process steps S1 to S6 of FIG. Further, for example, when an error has occurred on the Passive side, the communication process of the process steps S6 to S11 of FIG. 3 is executed. Hereinafter, each processing step will be described.
  • the communication device 10 transmits a packet indicating the state of the placement port 20 on the Passive side to the transport carriage 30 on the Active side by wireless communication.
  • the transport carriage 30 on the Active side receives the packet from the communication device 10 and detects the state on the Passive side. And if the conveyance trolley 30 confirms that the error on the E84 interlock sequence has not occurred, the next step of the E84 interlock sequence is executed, and the packet indicating the state of the conveyance trolley 30 after the execution is transmitted to the communication device. 10 is transmitted by wireless communication.
  • the communication device 10 receives the packet transmitted from the transport carriage 30, converts it into a parallel signal, and transmits it to the mounting port 20 on the Passive side via the parallel interface 11. To do.
  • the placement port 20 receives a parallel signal indicating the state of the Active side from the communication device 10, and detects the state of the Active side. When it is confirmed that no error has occurred in the E84 interlock sequence, the placement port 20 executes the next step of the E84 interlock sequence, and a parallel signal indicating the state of the placement port 20 after execution. Is transmitted from the parallel interface 21.
  • the communication device 10 receives the parallel signal from the placement port 20 and converts it into a packet. Furthermore, the state of the mounting port 20 is determined based on the parallel signal received from the mounting port 20.
  • the communication device 10 determines that an error in the E84 interlock sequence has not occurred in the placement port 20, the communication device 10 enters a standby state.
  • the communication device 10 performs the Passive side signal transmission process (S6). In the Passive side signal transmission process, the communication device 10 transmits a packet indicating the state of the placement port 20 to the transport carriage 30 by wireless communication.
  • the first time interval is preferably set to a value that suppresses the communication data amount and does not take too much time to execute the interlock sequence.
  • processing steps S6 to S12 in FIG. 3 will be described.
  • processing steps S6 to S8 processing is performed in the same manner as the processing steps S1 to S3 described above.
  • the Passive side interlock execution step (S9) the placement port 20 receives a parallel signal indicating the state on the Active side from the communication device 10, and detects the state on the Active side.
  • the mounting port 20 executes the next step of the E84 interlock sequence.
  • the mounting port 20 transmits a parallel signal indicating a state where the error has occurred from the parallel interface 21.
  • the communication device 10 receives the parallel signal from the mounting port 20 and detects the state of the mounting port 20.
  • the communication device 10 confirms that an error in the E84 interlock sequence has occurred in the placement port 20
  • the communication device 10 converts the parallel signal received from the placement port 20 into a packet and waits.
  • the communication device 10 performs a Passive side signal transmission process (S11).
  • the communication device 10 transmits a packet indicating the state of the placement port 20 to the transport carriage 30 by wireless communication, similarly to the processing step S6 described above.
  • the communication device 10 when an error occurs in the E84 interlock sequence, the communication device 10, the loading port 20, and the transport carriage 30 perform the processing steps from S6 to S11 in the second cycle shorter than the first cycle. Execute. Then, in the active side interlock execution step (S12), the transport carriage 30 receives the packet from the communication device 10 and detects the state on the passive side. Then, when it is confirmed on the Passive side that an error on the E84 interlock sequence has occurred, the transport carriage 30 interrupts the E84 interlock sequence.
  • the second time interval is an interlock sequence while reliably receiving a signal on the Passive side (while ensuring a time for chattering processing when reading a signal of an IO port). It is set to a value that ensures the safety.
  • the standby period is provided in the Passive signal reception process, but it may be provided in other processes such as the Active side interlock execution process or Passive side interlock execution process, or in a plurality of processes. May be.
  • time interval may not be fixed.
  • an interface for input may be provided in the communication device 10, and each time interval and period stored in the storage unit in the control unit 13 may be changed from an external input device via this interface. According to this configuration, each time interval and cycle can be adjusted to appropriate values as needed.
  • the first time interval described above may be changed according to the processing steps of each interlock sequence. According to this configuration, since an appropriate time interval and cycle can be adopted according to the time required for each processing step of the interlock sequence, it is possible to avoid performing communication with a cycle shorter than necessary, and communication data The amount can be suppressed. For example, in the interlock sequence, when there is a process that is unlikely to cause an error and requires a time sufficiently longer than the first time interval, the first time interval is set according to the time required for the process. It may be longer.
  • the above-described second time interval may be changed according to the type of error. For example, in the case of a dangerous error such as when it is detected that an operator approaches the mounting port 20, the second time interval is shortened as much as possible, and in the case of a minor error such as a communication error, It is good also as a structure which lengthens a 2nd time interval. According to this configuration, it is possible to adopt an appropriate second time interval according to the risk of error, urgency, etc., so it is possible to avoid performing communication at intervals shorter than necessary, and to reduce the amount of communication data Can be suppressed.
  • FIG. 4 is a flowchart showing detailed processing steps of the active side interlock execution step.
  • the transport carriage 30 on the Active side receives a packet indicating the state of the loading port 20 on the Passive side (S21).
  • the transport carriage 30 updates a signal indicating the state of the mounting port 20 stored therein (S22).
  • it is determined whether or not an error has occurred in the loading port 20 S23. If it is determined in the processing step S23 that an error has occurred, the transport carriage 30 interrupts the interlock sequence (S26). If it is determined in the processing step S23 that no error has occurred, the Active side interlock sequence is continued (S24).
  • the interlock sequence it is determined whether or not an error has occurred in the transport carriage 30 on the active side (S25).
  • the interlock sequence is interrupted (S26).
  • the transfer cart 30 stored in the transport cart 30 on the active side is stored.
  • the signal indicating the state is updated (S27).
  • the packet which shows the state of the updated conveyance trolley 30 is transmitted to the communication device 10 from the conveyance trolley 30 (S28), and an Active side interlock execution process is complete
  • FIG. 5 is a flowchart showing detailed processing steps of the Passive side interlock execution step.
  • the placement port 20 on the Passive side receives a parallel signal indicating the state of the transport carriage 30 on the Active side via the parallel interface 21 (S31).
  • a parallel signal indicating the state of the transport carriage 30 S32. If it is determined in the processing step S32 that an error has occurred, the placement port 20 interrupts the interlock sequence (S35). If it is determined in the processing step S32 that no error has occurred, the Passive side interlock sequence is continued (S33). Then, in the interlock sequence, it is determined whether or not an error has occurred in the mounting port 20 on the Passive side (S34).
  • the interlock sequence is interrupted (S35).
  • the parallel signal indicating the state of the placement port 20 is updated, and the parallel interface 21 To the communication device 10 (S36). This completes the Passive side interlock execution process.
  • FIG. 6 is a flowchart showing detailed processing steps of the Passive signal receiving step.
  • the communication device 10 receives a parallel signal indicating the state of the placement port 20 on the Passive side (S41). Next, the received parallel signal is converted into a packet (S42). Then, based on the received parallel signal, it is determined whether or not an error has occurred in the placement port 20 (S43). If it is determined in the processing step S43 that no error has occurred, the communication device 10 waits until the first time interval elapses from the time when the parallel signal is received from the placement port 20 (S44). If it is determined in the processing step S43 that an error has occurred, the communication device 10 has passed a second time interval shorter than the first time interval from the time when the parallel signal was received from the placement port 20. (S45), and the Passive signal reception process ends.
  • the communication interval between the transport carriage and the placement port is set. Since it can be shortened, error information can be transmitted without delay. Further, when no error has occurred, the communication cycle between the transport carriage and the placement port can be made longer than when an error has occurred, so that the amount of communication data can be suppressed.
  • the communication device of the present invention has been described based on the embodiment, the present invention is not limited to this embodiment. Unless it deviates from the meaning of this invention, the form which carried out the various deformation
  • the interlock sequence is interrupted when an error has occurred, but the interlock sequence may be tried again depending on the type of error. For example, when only a communication error occurs, the communication may be retried without interrupting the interlock sequence.
  • the present invention can be used for a communication device that performs communication between a placement port on which a transported object is placed and a transport carriage that transports and transfers the transported object.

Abstract

La présente invention concerne un dispositif de communication (10) qui est pourvu: d'une interface parallèle (11) qui communique avec un port de placement (20); d'une unité de communication réseau (14) qui communique avec un chariot de transport (30) par l'intermédiaire d'un réseau; d'une unité de commande (13) qui commande l'interface parallèle (11) et l'unité de communication réseau (14). Dans une séquence de synchronisation pour transférer, entre le port de placement (20) et le chariot de transport (30), un sujet à transporter, l'unité de commande (13) utilise une période d'attente prédéterminée avant de transmettre un paquet au chariot de transport (30) après qu'un signal a été appliqué par le port de placement (20), la période d'attente prédéterminée étant changée en fonction de l'existence ou de l'inexistence d'une erreur.
PCT/JP2014/004568 2013-10-22 2014-09-05 Dispositif de communication et son procédé de commande WO2015059861A1 (fr)

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JP2013219643A JP6052132B2 (ja) 2013-10-22 2013-10-22 通信デバイス及びその制御方法
JP2013-219643 2013-10-22

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JP2018142859A (ja) * 2017-02-28 2018-09-13 サイレックス・テクノロジー株式会社 通信装置、搬送装置、搬送システム、及び、通信装置の制御方法
WO2020066458A1 (fr) * 2018-09-27 2020-04-02 村田機械株式会社 Procédé de commande, système de transport et dispositif de communication
JPWO2020066458A1 (ja) * 2018-09-27 2021-08-30 村田機械株式会社 制御方法、搬送システム、及び通信デバイス
JP7083119B2 (ja) 2018-09-27 2022-06-10 村田機械株式会社 制御方法、搬送システム、及び通信デバイス
WO2023074291A1 (fr) * 2021-10-29 2023-05-04 村田機械株式会社 Système de communication sans fil, dispositif de communication côté support de transport et procédé de communication

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