WO2015058733A1 - Contactless magnetic sensor of the magnetic or electrically conductive objects´position - Google Patents

Contactless magnetic sensor of the magnetic or electrically conductive objects´position Download PDF

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Publication number
WO2015058733A1
WO2015058733A1 PCT/CZ2014/000117 CZ2014000117W WO2015058733A1 WO 2015058733 A1 WO2015058733 A1 WO 2015058733A1 CZ 2014000117 W CZ2014000117 W CZ 2014000117W WO 2015058733 A1 WO2015058733 A1 WO 2015058733A1
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Prior art keywords
sensor
magnetic field
excitation
signal
excitation coil
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PCT/CZ2014/000117
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English (en)
French (fr)
Inventor
Pavel Ripka
Jan VYHNÁNEK
Jan VČELÁK
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Czech Technical University In Prague, University Centre For Energy Efficient Buildings
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Application filed by Czech Technical University In Prague, University Centre For Energy Efficient Buildings filed Critical Czech Technical University In Prague, University Centre For Energy Efficient Buildings
Publication of WO2015058733A1 publication Critical patent/WO2015058733A1/en

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Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945Proximity switches
    • H03K17/95Proximity switches using a magnetic detector
    • H03K17/9517Proximity switches using a magnetic detector using galvanomagnetic devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/9046Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents by analysing electrical signals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/096Magnetoresistive devices anisotropic magnetoresistance sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
    • G01V3/10Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices using induction coils

Definitions

  • the subject of this invention is a contactless sensor of the magnetic or electrically conductive objects' position capable of detecting objects even behind metallic sheath.
  • the sensor uses a method of the signal self-demodulation.
  • Standard induction-type proximity/position sensors are based on generation of eddy currents in the approaching electrically conductive object, see e.g. patents US2013229174, US6803757 and US4042876.
  • Another large group of position/proximity sensors are sensors with variable magnetic circuit (see e.g. US5027066) or with saturable coil core - see e.g. US 4719362, US4587486, US4140971, EP 0538037 B1.
  • Last type is a magnetic position sensor using the permanent magnet direct current magnetic field detection - see e.g. JP3460363 and US484116.
  • Fig. 1 Sensors operating on the induction principle, Fig. 1 , consist of the excitation coil 10 excited by the source 20 of alternating current.
  • the sensor detects the position of conductive or ferromagnetic object 50.
  • the coil inductance changes as either a conductive object or permanent magnet approaches.
  • Output amplifier 60 with the signal processing circuit 61 usually evaluates losses in the coil, that are converted to binary or continuous information about the object's position.
  • eddy currents are induced in the object and their magnetic field acts against the field that induced them. This leads to reduced inductance of the excitation coil 10, higher losses and overall decrease of the excitation coil quality factor.
  • Proximity sensors very often Use coils excited in resonance, and the RLC circuit resonance vanish when the conductive object approaches, or the RLC circuit frequency changes as the conductive material approaches or recedes (Tumanski S, Thin film magnetoresistive sensors, ISBN-10: 0750307021 , 1SBN-13: 978- 0750307024, Edition: 1st, IOP (2001) and Ripka P. Magnetic Sensors and Magnetometers, ISBN-10: 1580530575, ISBN-13: 978-1580530576, Artech House Publishing (2001)). Induction sensors operate at excitation frequencies 1-100 kHz. The advantage of this solution is simple and inexpensive design.
  • the induction methods drawback is the dependence of the induced voltage on frequency; the higher the frequency, the higher the induced voltage and sensitivity of the sensor. In general, this is the reason why these sensors cannot be used at frequencies lower than 1 kHz. On the other hand, as the frequency gets higher, the penetration depth decreases, and the sensor is affected by stray capacitances.
  • the magnetic field induced by the eddy currents may be measured by other magnetic field sensor.
  • the example may be the AMR/GMR sensor located in the excitation coil that measures the overall magnetic field, Fig. 2.
  • Fig. 2 shows the block diagram of the proximity/position sensor using the inductance coil 10 excited by the source 20 of the alternating current.
  • the sensor detects the position of a conductive or ferromagnetic object 50.
  • the resulting field formed by the combination of the coil excitation and near conductive object 50 or a permanent magnet is detected by the magnetic field sensor 40.
  • Signal from the sensor is amplified by the amplifier 60 and evaluated by synchronous demodulator 61..
  • the demodulator output is the measure-bearing quality.
  • the overall measured field decreases due to the effects of eddy currents in the detected conductive object 50.
  • the contact!ess magnetic sensor of the magnetic or electrically conductive objects' position consisting of at least one excitation coil connected to a source of the alternating signal where the magnetic field sensor is located in the cavity of the excitation coil.
  • the output of the magnetic field sensor is connected to the input of an amplifier, the output of which is connected to the input of the low-pass filter, to the input of the band-pass filter and to the input of the high-pass filter.
  • the connection further includes an excitation modulator.
  • the principle of the new solution is that the modulator of the sensor's magnetic field excitation is connected to a source of the alternating excitation signal for the coil.
  • the source of the alternating excitation signal is a source of rectangular-shaped signal.
  • Magnetic field sensor may also be formed by a Hall probe or by an anisotropic magnetoresistor.
  • the magnetic field sensor excitation modulator is formed by a separating capacitor. One terminal of the separating capacitor is connected to the flipping input of the anisotropic magnetoresistor and the other terminal is connected to the source of the alternating excitation voltage for the excitation coil.
  • the advantage of proposed sensor is its sensitivity to direct current magnetic field as well as to alternating current field induced by eddy currents in conductive materials.
  • the sensor is capable to detect wide range of materials and to discriminate, which material is being detected at a given moment.
  • Materials that can be detected may be electrically conductive non-magnetic materials, such as Al, Cu; soft magnetic materials, hard magnetic materials, i.e. permanent magnets; or combination of the materials mentioned above.
  • the proposed sensor significantly simplifies the electronic circuitry needed for the sensor's signal evaluation. It exploits the principle of self-demodulation when the magnetic field sensor's output is modulated by identical or derived signal as the excitation coil.
  • Fig. 1 and Fig. 2 schematically show the presently known sensors of position or proximity of metallic or electrically conductive objects.
  • Fig. 3 shows the block diagram of the position/proximity sensor exploiting self-demodulation principle according to the presented solution.
  • the coil 10 is excited by the signal from the source 20 of excitation signal 20.
  • Flipping circuit of the magnetic field sensor 40 anisotropic magnetoresistor
  • the sensor output signal is amplified by the amplifier 60 and processed by filters of various types 80, 81, 82.
  • the sensor allows to detect proximity-position of conductive or ferromagnetic object 50 through a sheath made of conductive material 70.
  • Fig. 4.1 shows the excitation coil voltage waveform.
  • Fig. 4.2 shows the flipping current waveform of the anisotropic magnetoresistor, which here forms the magnetic field sensor.
  • Fig. 4.3 shows the output voltage waveform of the relevant sensor when it is placed in zero magnetic field and when in the vicinity of such sensor no conductive object or permanent magnet is present. Direct current value of the waveform is given by the magnetic field intensity generated directly by the excitation coil.
  • Fig. 4.4 shows the output voltage waveform of the sensor in case when the sensor measures external magnetic field of non-zero value - for example when a permanent magnet is present close to the sensor.
  • Fig. 4.5 shows the output voltage waveform of the sensor in case when a conductive object is present close to the sensor.
  • Fig. 4.6 shows the output voltage waveform of the sensor in case when the sensor measures proximity/position of the object, permanent magnet in this case, through a conductive (Al) sheath 70.
  • Fig. 5.2 to 5.4 show the output voltage waveforms after processing the sensor output voltage LUt by filters, which are the low-pass filter Ui, band-pass filter lb and high-pass filter lb.
  • filters which are the low-pass filter Ui, band-pass filter lb and high-pass filter lb.
  • the principle of presented invention is a position/proximity sensor exploiting an improved method of material detection.
  • the sensor shown schematically in Fig. 3, consists of the source 20 of the alternating, advantageously rectangular- shaped excitation signal, the excitation coil 10 or a setup of coils, excitation modulator 2J . , magnetic field sensor 40 located in the excitation coil 10 cavity, while its output is connected to input of the amplifier 60.
  • Excitation modulator 21 exciting the magnetic field sensor 40 is connected to the source 20 of the alternating excitation signal.
  • the output of amplifier 60 is connected to the input of the low-pass filter 80, to the input of the band-pass filter 81 , and to the input of the high-pass filter 82.
  • the following is an example when the sensor allows to detect proximity-position of a conductive or ferromagnetic object 50 through a sheath made of conductive material 70.
  • the source 20 of the alternating signal for the excitation coil 10 generates current with rectangular waveform with given frequency f and amplitude /.
  • the source 20 of the alternating signal is connected to contacts of the excitation coil 10.
  • Current / passing through the excitation coil 10 generates alternating current magnetic field that induces eddy currents in the detected conductive material which is present nearby.
  • Magnetic field sensor 40 is located in the center of the excitation coil 10 in such a way that it sensitivity axis is identical with the axis of the excitation coil 10, it means with the normal line of the excitation coil 10 passing through its imaginary center.
  • the magnetic field sensor 40 may be formed by an anisotropic magnetoresistor (AMR) or a Hall probe.
  • AMR anisotropic magnetoresistor
  • the AMR sensor as such consists of the dedicated AMR element that measures the magnetic field, a flipping coil and possibly a compensating coil. Signal that excites the coil is via the separating capacitor 30 connected directly to the flipping input of the coil of the AMR sensor. If an ambient DC magnetic field is present, it would lead to modulation of the sensor's output. Since the excitation signal of the excitation coil 10. and therefore the generated magnetic field are in-phase, and the magnetic field sensor 40 is modulated, it results in controlled rectification of the sensor's output signal and self-demodulation of the output signal.
  • the capacitor 30 ensures the AMR element flipping by means of narrow current pulses. This provides self- demodulation of the magnetic field sensor's 40 output without the need for additional electronics or synchronous demodulator.
  • the magnetic field sensor 40 is amplified by the amplifier 60 with the voltage Uout at its output 90, which is processed by three basic filters, specifically by the low-pass filter 80, the band-pass filter 81, and the high-pass filter 82.
  • the sensor's output signal may feature waveforms shown in Fig. 4.1 to 4.6 and 5.1 to 5.4.
  • UA is the voltage in the first half-period of the excitation signal and UB is the voltage in the second half-period of the excitation signal.
  • This voltage consists of several components.
  • Component UAC is proportional to the intensity of the magnetic field generated by the excitation coil 10 itself, possibly amplified, when a soft-magnetic material is present nearby.
  • Component UDC is proportional to the external direct current magnetic field generated for instance by permanent magnet or the Earth's magnetic field.
  • Components shown by bold lines represent the effects of eddy currents generated as a response to excitation field in the objects 50 made of electrically conductive materials.
  • the result is the voltage y_i, which corresponds to the mean value of the Uout signal.
  • Ui is equal to the value of UAC, which is directly proportional to the intensity of the magnetic field generated by the excitation coil 10, possibly amplified by the soft-magnetic material in its vicinity.
  • the signal is filtered by the band-pass filter 81 set at the frequency equal to the excitation signal frequency f, the result is the signal L while according to the equation (4) its total amplitude, it means its peak-to-peak value, is equal to 2 UDC and therefore it is directly proportional to the measured external direct current magnetic field.
  • the resulting signal U_3 corresponds only to the effects of eddy currents and therefore the proximity of object 50 made of conductive material.
  • the sensor When detecting the alternating current magnetic field, the sensor is functional already from very low frequencies where the induction-based sensors feature low sensitivity.
  • the AMR sensor's sensitivity is frequency independent up to the frequencies below 100 kHz.
  • the magnetic field penetration depth depends on the excitation field frequency. The higher the frequency, the lower the penetration depth.
  • Using the AMR sensors as the magnetic field detector allows to use low excitation frequencies and thus increase the penetration depth.
  • such sensor may be used for measuring the position of objects behind the sheath made of electrically conductive material.
  • the proposed sensor significantly simplifies the electronic circuitry needed to evaluate the signal from the sensor. It uses the principle of self-demodulation when the magnetic field sensor's output is modulated by the identical or derived signal as the excitation coil.
  • Filtering the sensor output signal allows to discriminate the detected materials based on their electric and magnetic properties. This brings extra benefit in situations when the detected material is not known in advance.
  • this sensor works also as the position sensor detecting objects behind electrically conductive sheath. It is possible to measure position of an object made of ferromagnetic material behind an sheath made of conductive non-ferromagnetic material, such as aluminium or copper. In case the object 50, position of which is to be detected, is hidden behind a metal sheet made of magnetic material, its position may be measured when the magnetic material of the cover 70 is magnetically saturated.
  • the sensor measures both the direct current component of the magnetic field as well as the response of the eddy currents. Evaluation of the output signal allows to obtain the information not only about the position but also about the type of the material in proximity. The sensor's output response allows also to discriminate the detected materials as conductive, ferromagnetic or their combinations.
  • a device shown in Fig. 3 was produced. It consists of the circular-shaped excitation coil 10 with 75 turns with the diameter of 46 mm and length of 22 mm.
  • the excitation coil 10 is powered by the source 20 of the alternating signal by rectangular-shaped current with the amplitude of 70 mA p-p and frequency 1 kHz. Applied frequency may vary, depending on the required penetration depth.
  • the excitation coil 10 generates around the magnetic field sensor 40, which in this case is an AMR sensor, an alternating current magnetic field with the intensity of 115 A/m.
  • the magnetic field sensor 40 flipping is provided by the integrated coil in the magnetic field sensor 40 with pulse current 1.2 A p-p by the discharge of capacitor 30 with the capacity of 6.8 nF.
  • Excitation modulator 30 is formed by the capacitor, which is directly connected to the excitation signal from the source 20 of the alternating signal 30 V p-p. in the center of the excitation coil 10 is located magnetic field sensor 40 l- MC1001. The output of the magnetic field sensor 40 is amplified by the amplifier 60 and subject for subsequent signal processing by individual filters.
  • Sensor featuring self-demodulation may be used for detection of position/proximity of an object behind the sheath made of electrically conductive materials, such as aluminium sheet, zinc-galvanized metal sheet, etc.
  • the sensor may be used as a position switch located behind a metal sheath or as the position switch with the closing phase detection.
  • the sensor may be used as a detector of metal parts befiind the cover made of conductive materials.
  • Described sensor may be used for non-destructive contactless flaw detection of thickness/condition of storage tanks or piping through metal cover and insulation layer. Comparative measurements allow to determine the degree of corrosion or disruption of the inner wall.
  • Described sensor may be used for discrimination of materials to electrically conductive ones, soft-magnetic ones and hard-magnetic ones or their combinations. In addition, it is possible to measure the magnitude of each component and thus to estimate the proximity of an object, its position or size.

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  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Remote Sensing (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
PCT/CZ2014/000117 2013-10-25 2014-10-17 Contactless magnetic sensor of the magnetic or electrically conductive objects´position WO2015058733A1 (en)

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CZPV2013-822 2013-10-25
CZ2013-822A CZ304954B6 (cs) 2013-10-25 2013-10-25 Bezkontaktní magnetický senzor polohy magnetických nebo elektricky vodivých objektů

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US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
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US10495699B2 (en) 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10753769B2 (en) 2014-10-31 2020-08-25 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
CN113945608A (zh) * 2021-09-30 2022-01-18 中国计量大学 一种基于磁电传感器的磁感应相移测量系统
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
CN114706025A (zh) * 2022-04-15 2022-07-05 深圳技术大学 一种基于磁电效应的谐振式dc磁传感器
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents

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