WO2015050185A1 - Polishing device, processing method of polishing member, modification method of polishing member, shape processing cutting tool, and surface modification tool - Google Patents
Polishing device, processing method of polishing member, modification method of polishing member, shape processing cutting tool, and surface modification tool Download PDFInfo
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- WO2015050185A1 WO2015050185A1 PCT/JP2014/076359 JP2014076359W WO2015050185A1 WO 2015050185 A1 WO2015050185 A1 WO 2015050185A1 JP 2014076359 W JP2014076359 W JP 2014076359W WO 2015050185 A1 WO2015050185 A1 WO 2015050185A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
- B24B53/07—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels by means of forming tools having a shape complementary to that to be produced, e.g. blocks, profile rolls
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/08—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
Definitions
- the present invention relates to a polishing apparatus, a polishing member processing method, a polishing member correction method, a shape processing cutting tool, and a surface correction tool.
- the conventional dressing is often performed for the purpose of correcting a flat polishing surface, and almost consideration is given to dressing various shapes of polishing surfaces along the shape of the portion to be polished of the workpiece. It has not been.
- the present invention has been made in view of such circumstances, and the purpose thereof is a polishing apparatus capable of easily performing shape processing and shape correction of a polishing surface having a shape different from a planar shape, and processing of a polishing member.
- the present invention provides a method and a method for correcting an abrasive member.
- a cutting tool for shape processing that is used in these polishing apparatuses and processing methods to process the shape of the polished surface, or a polishing tool that is used in these polishing apparatuses and correction methods to correct the polished surface to the shape of the part to be polished.
- An object of the present invention is to provide a surface correction tool.
- a polishing apparatus that solves the above-described problem has a polishing member having a polishing surface that follows a shape of a portion to be polished of a workpiece, and has the same shape as the shape of the portion to be polished.
- a cutting tool for shape processing that processes the surface into a shape that conforms to the shape of the portion to be polished, or a surface correction tool that corrects the polishing surface to a shape that conforms to the shape of the portion to be polished
- a contact mechanism for contacting the cutting tool for shape processing or the tool for surface correction.
- the polishing member has a polishing surface having a shape that follows the shape of the portion to be polished of the workpiece. Therefore, even if the part to be polished of the workpiece is different from a flat shape such as a curved surface or a triangular shape, it can be polished.
- the shape processing cutting tool for processing the polished surface into a shape along the shape of the portion to be polished or the polishing surface having the same shape as the shape of the portion to be polished is the polishing target.
- a surface correction tool for correcting the shape to the shape of the part is brought into contact with the polishing surface by the contact mechanism. Therefore, the shape of the shape machining cutting tool or surface correction tool having the same shape as the shape of the portion to be polished of the workpiece to be polished is transferred to the polished surface that is contacted by the shape processing cutting tool or the surface correction tool. By doing so, it is processed or corrected to a shape along the shape of the part to be polished of the workpiece.
- the polishing surface of the polishing member has a shape that conforms to the shape of the part to be polished of the workpiece, but one of the shape of the polishing surface and the shape processing cutting tool or the surface correction tool is one of them. Since the concave and the other are in a convex relationship, it is possible to easily perform shape processing or shape correction of the polished surface having a shape different from the planar shape.
- the shape of the part to be polished of the workpiece to be polished and the shape of the cutting tool for shape processing or the tool for surface correction do not have to be completely the same, and their shapes are slightly different to the extent that there is no practical problem. May be.
- the shape processing cutting tool is capable of appropriately processing the polishing surface of the polishing member, and is not particularly limited as long as it has a processing portion having a hardness higher than the polishing surface of the polishing member.
- processing tools with fixed abrasives such as pellets and electrodeposition grindstones, and cutting tools such as end mills and tools.
- the surface correction tool is a tool capable of preparing the surface of the polishing member or removing dirt or fixed matter adhering to the surface of the polishing member.
- the fixed abrasive is attached. It is possible to use a processing tool or a hard brush.
- the polishing apparatus performs contact of the cutting tool for shape processing or the tool for surface correction with respect to the polishing surface by the contact mechanism at predetermined intervals. According to this configuration, since the polishing surface is processed or corrected every predetermined period, it is possible to favorably maintain the polishing accuracy when polishing the workpiece.
- the polishing surface of the polishing member is brought into contact with the surface of the polishing member having a shape different from the shape of the portion to be polished by contacting the cutting tool for shape processing or the tool for surface correction. It is preferably formed in a shape along the shape of the polishing portion.
- the formation of the polished surface along the shape of the portion to be polished of the workpiece is performed on the polishing apparatus. Therefore, it is possible to form the shape of such a polished surface with high accuracy as compared with a case where a polishing member having a polished surface formed in advance along the shape of the portion to be polished of the workpiece is attached to the polishing apparatus. it can.
- the polishing apparatus preferably includes a motor that rotates the polishing member from below, or a surface plate that rotates integrally with the polishing member with the polishing member placed on the top surface. According to these configurations, since stable rotation of the polishing member with less shaft runout or the like can be obtained, more accurate processing can be performed.
- the shape processing cutting tool for processing the polishing surface into a shape along the shape of the portion to be polished or the polishing surface along the shape of the portion to be polished By using the above-mentioned polishing apparatus with a surface correction tool for correcting the shape into a polished shape, it is possible to easily shape or correct the polished surface having a shape different from the planar shape.
- the shape of the portion to be polished with respect to the polishing surface of the polishing member having the polishing surface having a shape that follows the shape of the portion to be polished of the workpiece to be polished is in contact.
- a polishing member having a polishing surface having a shape along the shape of the part to be polished of the workpiece is prepared. Therefore, even if the part to be polished of the workpiece is different from a flat shape such as a curved surface or a triangular shape, it can be polished.
- the shape processing cutting tool for processing the polished surface into a shape along the shape of the portion to be polished, which has the same shape as the shape of the portion to be polished, or the polishing surface is the surface to be polished.
- a surface correcting tool that is corrected to a shape that conforms to the shape of the part is brought into contact with the polishing surface. Therefore, the shape of the shape machining cutting tool or surface correction tool having the same shape as the shape of the portion to be polished of the workpiece to be polished is transferred to the polished surface that is contacted by the shape processing cutting tool or the surface correction tool. As a result, the shape is corrected to the shape of the portion to be polished of the workpiece.
- the polishing surface of the polishing member has a shape that conforms to the shape of the part to be polished of the workpiece, but one of the shape of the polishing surface and the shape processing cutting tool or the surface correction tool is one of them. Since the relationship is concave and the other is convex, the shape of the polished surface having a shape different from the planar shape can be easily corrected.
- polishing apparatus which shows a state when the cutting tool for shape processing or the tool for surface correction is contacting the grinding
- polishing apparatus which shows a state when the cutting tool for shape processing or the tool for surface correction leaves
- FIG. 4B is a cross-sectional view taken along the line CC.
- movement aspect of the contact mechanism in the same modification as FIG. The perspective view of the bar in another modification of the embodiment.
- FIG. FIG. 15 is a side cross-sectional view of a polishing member in the same modification as FIG.
- the partial side view of the to-be-polished workpiece and the polishing member in another modification of the embodiment.
- the partial side view of the to-be-polished workpiece and the polishing member in another modification of the embodiment.
- the partial side view of the to-be-polished workpiece and the polishing member in another modification of the embodiment.
- the partial side view of the to-be-polished workpiece and the polishing member in another modification of the embodiment.
- the partial side view of the to-be-polished workpiece and the polishing member in another modification of the embodiment.
- the partial side view of the polishing member in another modification of the embodiment.
- polishing member in the same modification as FIG.
- the polishing apparatus includes a disk-shaped polishing member 10. Using the outer peripheral surface of the polishing member 10 in the radial direction, the end KE, which is the portion to be polished, of the workpiece K is polished. The end KE is curved by pre-processing.
- the shape of the workpiece K can be any shape depending on the application.
- the material of the polishing member 10 can be arbitrarily selected from those optimal for polishing the end KE.
- any synthetic resin can be used. Examples thereof include a thermosetting resin (phenol resin, epoxy resin, urethane resin, polyimide, etc.) and a thermoplastic resin (polyethylene, polypropylene, acrylic resin, polyamide, polycarbonate, etc.). Further, it may be a woven fabric, a non-woven fabric, a non-woven fabric processed resin product, synthetic leather, or a composite product thereof.
- the hardness of the polishing surface of the polishing member 10 is preferably 5 or more in Shore A hardness.
- a Shore A hardness of 5 or more means that a polishing member 10 having a polished surface, which is a specimen whose hardness is to be measured, is placed in a dry state with a humidity of 20 to 60% at room temperature for 60 minutes or more, and is then placed in JIS K6253. It means that the hardness of the polished surface measured by a compliant rubber hardness meter (type A) is 5 or more.
- the Shore A hardness is 5 or more, the surface of the workpiece K can be suitably processed, and the polishing surface of the polishing member 10 can be prevented from being deformed by short-time polishing.
- the Shore A hardness of the polishing surface of the polishing member 10 is more preferably 40 or more, still more preferably 70 to 95, and particularly preferably 70 to 85. Further, when a metal is used as the material of the polishing member 10, magnesium, aluminum, titanium, iron, nickel, cobalt copper, zinc, manganese, or an alloy mainly composed thereof can be used as the material.
- polishing member 10 may have an abrasive grain.
- the type of abrasive grains used is not particularly limited, but metal oxide particles such as silicon oxide, aluminum oxide, zirconium oxide, cerium oxide, magnesium oxide, calcium oxide, titanium oxide, manganese oxide, iron oxide, and chromium oxide, and carbonized Carbides such as silicon, other nitrides, borides, diamonds and the like can be used.
- ceramics are used as the material of the polishing member 10, as materials, ceramics, glass, oxides such as silicon, aluminum, zirconium, calcium, barium, nitrides, borides, carbides, etc.
- oxides such as silicon, aluminum, zirconium, calcium, barium, nitrides, borides, carbides, etc.
- Aluminum, zirconium oxide, silicon oxide, silicon carbide, silicon nitride, boron nitride and the like can be used.
- any material can be used for the workpiece K to be polished.
- a resin any synthetic resin can be used.
- examples thereof include a thermosetting resin (phenol resin, epoxy resin, urethane resin, polyimide, etc.) and a thermoplastic resin (polyethylene, polypropylene, acrylic resin, polyamide, polycarbonate, etc.).
- ceramics When ceramics are used as the material of the workpiece K, ceramics, glass, fine ceramics, oxides such as silicon, aluminum, zirconium, calcium, barium, carbides, nitrides, borides, etc. Can be used.
- magnesium, aluminum, titanium, iron, nickel, cobalt, copper, zinc, manganese or an alloy containing the same as the main component can be used.
- the specific use of the workpiece K to be polished is also arbitrary.
- a wheel, a shaft, a container, a housing (a case, a housing, etc.), a frame (a frame, etc.), a ball, a wire, a decorative article, and the like can be used.
- the polishing member 10 is detachably fixed to the upper surface of a disk-shaped surface plate 20.
- a rotation shaft of the first motor 21 is fixed to the lower surface of the center portion of the surface plate 20.
- the first motor 21 is provided under the polishing member 10 and the surface plate 20, and the polishing member 10 disposed on the upper surface of the surface plate 20 is rotated together with the identification plate 20 from the bottom, so that the shaft shake and the like are stable. Since the rotation of the polishing member 10 can be obtained, more accurate processing can be performed.
- a polishing surface 11 having a groove-like curved surface extending in the circumferential direction is provided on the radially outer peripheral surface of the polishing member 10.
- the curved surface of the polishing surface 11 is shaped along the shape of the end KE of the workpiece K (the shape of the portion to be polished). That is, the curvature of the polished surface 11 is the same as the curvature of the end KE.
- the work piece K to be polished is detachably held on the fixed base 32.
- the fixed base 32 is fixed to the rotating shaft 31 of the second motor 30.
- the second motor 30 is attached to a motor moving mechanism 33 that reciprocates the second motor 30 in a direction orthogonal to the rotation axis of the polishing member 10 (the direction of the arrow X shown in FIGS. 1 and 2).
- the second motor 30 is moved by the motor moving mechanism 33, the second motor 30, the rotating shaft 31, the fixed base 32, and the workpiece K to be polished are integrated in a direction orthogonal to the rotating shaft of the polishing member 10. Move to.
- the end KE of the workpiece K is pressed against the polishing surface 11.
- the working fluid or the like is supplied to the contact portion between the end KE and the polishing surface 11 in an appropriate manner, and the first motor 21 and the second motor 30 are driven at a predetermined rotational speed, whereby a curved surface is obtained.
- the end KE having the shape is polished. Note that when the end KE of the workpiece K is pressed against the polishing surface 11, the pressing force is adjusted so that a predetermined pressure is applied.
- Processing fluid can be supplied directly from the outside to the contact portion between the end KE and the polishing surface 11.
- a machining fluid supply mechanism such as a rotary joint is interposed at the connection portion between the polishing member 10 and the first motor 21. Then, the machining liquid is supplied from the machining liquid supply mechanism to the inside of the polishing member 10, and the machining liquid supplied to the inside of the polishing member 10 is supplied to the contact portion through a supply path formed inside the polishing member 10. It can also be supplied.
- the processing liquid can be supplied more efficiently.
- the above-described types of processing fluid can be used in accordance with the material to be polished K and the polishing member 10. Specifically, cutting and grinding working fluids, lapping materials, polishing agents, chemical mechanical polishing polishing fluids, and the like can be used.
- the processing liquid may contain abrasive grains.
- the type of abrasive grains used is not particularly limited, but metal oxide particles such as silicon oxide, aluminum oxide, zirconium oxide, cerium oxide, magnesium oxide, calcium oxide, titanium oxide, manganese oxide, iron oxide, and chromium oxide, and carbonized Carbides such as silicon, nitrides, borides, diamonds and the like can be used.
- the content of abrasive grains in the working fluid is preferably 1% by mass or more, more preferably 2% by mass or more.
- content of the abrasive grain in a processing liquid is 50 mass% or less, More preferably, it is 40 mass% or less.
- the average secondary particle diameter of the abrasive grains in the working fluid is preferably 0.1 ⁇ m or more, more preferably 0.3 ⁇ m or more. As the average secondary particle diameter of the abrasive grains increases, the processing speed by the processing liquid is improved.
- the average secondary particle diameter of the abrasive grains in the working fluid is preferably 20 ⁇ m or less, more preferably 5 ⁇ m or less.
- the average secondary particle diameter of the abrasive grains in the processing liquid decreases, the surface of the workpiece K can be more uniformly polished.
- the average secondary particle diameter of abrasive grains is, for example, the volume average particle diameter measured using a laser diffraction / scattering particle size distribution measuring device such as “LA-950” manufactured by Horiba Ltd. is there.
- a pH adjuster In the above-mentioned processing liquid, a pH adjuster, an etching agent, an oxidizing agent, a water-soluble polymer, a copolymer and a salt thereof, a derivative, an anticorrosive agent, a chelating agent, a dispersion aid, an antiseptic agent, and an antifungal agent, as necessary It may further contain other components such as an agent.
- pH adjuster known acids, bases, or salts thereof can be used.
- acids that can be used as pH adjusters include inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, hydrofluoric acid, boric acid, carbonic acid, hypophosphorous acid, phosphorous acid, and phosphoric acid, formic acid, acetic acid, Propionic acid, butyric acid, valeric acid, 2-methylbutyric acid, n-hexanoic acid, 3,3-dimethylbutyric acid, 2-ethylbutyric acid, 4-methylpentanoic acid, n-heptanoic acid, 2-methylhexanoic acid, n-octane Acid, 2-ethylhexanoic acid, benzoic acid, glycolic acid, salicylic acid, glyceric acid, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, maleic acid,
- a salt such as an ammonium salt or an alkali metal salt of the above-mentioned acid may be used as a pH adjuster.
- a pH adjuster is used to adjust the pH value of the processing liquid to an optimum value that varies depending on the type of workpiece K to be polished.
- etching agent examples include inorganic acids such as nitric acid, sulfuric acid and phosphoric acid, acetic acid, citric acid, organic acids such as tartaric acid and methanesulfonic acid, inorganic alkalis such as potassium hydroxide and sodium hydroxide, ammonia, amines, And organic alkalis such as quaternary ammonium hydroxides.
- oxidizing agent examples include hydrogen peroxide, peracetic acid, percarbonate, urea peroxide, perchlorate, persulfate and the like, oxo acids such as sulfuric acid, nitric acid, phosphoric acid and salts thereof, and the like. Examples include salts.
- water-soluble polymers, copolymers, salts and derivatives thereof examples include polycarboxylic acids such as polyacrylates, polysulfonic acids such as polyphosphonic acid and polystyrene sulfonic acid, polysaccharides such as chitansan gum and sodium alginate, hydroxy Cellulose derivatives such as ethyl cellulose and carboxymethyl cellulose, polyethylene glycol, polyvinyl alcohol, polyvinyl pyrrolidone, sorbitan monooleate, oxyalkylene polymers having one or more oxyalkylene units, nonionic surfactants, anionic surfactants Agents and the like.
- polycarboxylic acids such as polyacrylates
- polysulfonic acids such as polyphosphonic acid and polystyrene sulfonic acid
- polysaccharides such as chitansan gum and sodium alginate
- hydroxy Cellulose derivatives such as ethyl cellulose and carboxymethyl cellulose
- nonionic surfactants include polyoxyethylene alkyl ether, polyoxyethylene alkyl phenyl ether, sorbitan monooleate, oxyalkylene polymers having a single kind or plural kinds of oxyalkylene units.
- anionic surfactants include alkyl sulfonic acid compounds, alkyl benzene sulfonic acid compounds, alkyl naphthalene sulfonic acid compounds, methyl tauric acid compounds, alkyl diphenyl ether disulfonic acid compounds, ⁇ -olefin sulfonic acid compounds, Naphthalenesulfonic acid condensate, sulfosuccinic acid diester compound and the like.
- anticorrosives examples include amines, pyridines, tetraphenylphosphonium salts, benzotriazoles, triazoles, tetrazoles, benzoic acid, monocyclic compounds, polycyclic compounds having a condensed ring, heterocyclic compounds, etc. Is mentioned.
- the chelating agents include carboxylic acid chelating agents such as gluconic acid, amine chelating agents such as ethylenediamine, diethylenetriamine, and trimethyltetraamine, ethylenediaminetetraacetic acid, nitrilotriacetic acid, hydroxyethylethylenediaminetriacetic acid, triethylenetetramine hexa Polyaminopolycarboxylic chelating agents such as acetic acid and diethylenetriaminepentaacetic acid, 2-aminoethylphosphonic acid, 1-hydroxyethylidene-1,1-diphosphonic acid, aminotri (methylenephosphonic acid), ethylenediaminetetrakis (methylenephosphonic acid), diethylenetriaminepenta (Methylenephosphonic acid), ethane-1,1-diphosphonic acid, ethane-1,1,2-triphosphonic acid, methanehydroxyphosphonic acid, 1-phosphonobutane-2,3 - organic phosphonic acid chel
- dispersion aid examples include condensed phosphates such as pyrophosphate and hexametaphosphate.
- preservative include sodium hypochlorite and the like.
- the antifungal agent examples include oxazolines such as oxazolidine-2,5-dione.
- the end portions KE of the plurality of workpieces K can be simultaneously polished on the outer peripheral surface of the polishing member 10. , Productivity can be improved.
- the diameter of the polishing member 10 is made as large as possible, even if the rotation speed of the polishing member 10 is the same, a large linear velocity can be obtained on the outer periphery. Even if it is relatively low, a sufficient linear velocity can be obtained. Therefore, for example, scattering of the processing liquid can be suppressed.
- a contact mechanism 40 is provided at a position near the outer peripheral surface in the radial direction of the polishing member 10 and facing the polishing surface 11.
- the contact mechanism 40 is provided with a tool 41.
- the tool 41 has a rod shape, and the processed portion at the tip thereof has the same shape as the shape of the end KE, more specifically, the same curvature as the curvature of the end KE.
- the tool 41 functions as a shape cutting tool for processing the polishing surface 11 into a shape along the shape of the end KE, or as a surface correction tool for correcting the polishing surface 11 into a shape along the shape of the end KE. To do.
- As the material of the tool 41 an optimum material for processing or correcting the polishing surface 11 is selected.
- the shape of the end KE of the workpiece K and the shape of the tool 41 are not necessarily the same, and the shapes may be slightly different from each other to the extent that there is no practical problem.
- the contact mechanism 40 includes a holding portion 42 to which the tool 41 is detachably fixed, and a moving mechanism for reciprocating the holding portion 42 in a direction perpendicular to the rotation axis of the polishing member 10 (in the direction of arrow M shown in FIG. 1). 43 is also provided.
- a power source of the moving mechanism 43 electric power, hydraulic pressure, or the like can be used.
- the contact mechanism 40 is driven by automatic driving by a control device including a CPU, RAM, ROM, or the like, or by a switch operation of an operator who operates the polishing apparatus.
- FIG. 3 and 4 show an operation mode of the contact mechanism 40.
- the holding unit 42 is moved toward the rotation center of the polishing member 10 (in the direction of the arrow M ⁇ b> 1) by the contact mechanism 40, the tool 41 contacts the polishing surface 11. More specifically, the tool 41 is pressed against the polishing surface 11.
- the constant pressure processing is a processing method mainly used for improving the surface roughness, and is a processing method in which the tool 41 is pressed against the polishing surface 11 with a constant pressing force for polishing.
- the sizing processing is a processing method mainly used for finishing the shape, and is a processing method in which the tool 41 is cut into the polishing surface 11 by a certain dimension and ground. Since the sizing process is suitable for finishing the shape, it is suitable for a processing method when the shape of the polishing surface 11 is corrected or processed using the tool 41, and compared with a case where constant pressure processing is performed. The shape can be corrected and processed with higher accuracy.
- the above-described constant pressure processing can be performed.
- the surface roughness of the workpiece K to be polished is determined. It is possible to perform processing for the purpose of improving accuracy, and it is possible to perform suitable processing mainly when the tool 41 is a surface correction tool and the polishing surface 11 is corrected.
- the tool 41 is separated from the polishing surface 11.
- the tool 41 is arranged at a position in FIG. 4 away from the polishing surface 11.
- the tool 41 is rotated in a state where the polishing member 10 is driven to rotate. 3 is brought into contact with the polishing surface 11.
- water or a working fluid may be supplied to the contact portion between the tool 41 and the polishing surface 11.
- the processing or correction of the polishing surface 11 by the tool 41 can be assisted, or the contact portion can be cooled.
- the type of the working fluid to be used can be arbitrarily selected according to the type of the shape processing cutting tool or the surface correction tool or according to the material of the polishing member.
- a cutting fluid can be used.
- a working fluid for grinding can be used.
- a cleaning solution or the like can be used.
- the polishing apparatus includes a polishing member 10 having a polishing surface 11 having a shape along the shape of the end KE of the workpiece K to be polished. Therefore, even if the end KE of the workpiece K is different from a flat shape, that is, a curved shape, the end KE can be polished.
- the polishing apparatus has the same shape as the shape of the end portion KE, a tool 41 for correcting or processing the polishing surface 11 into a shape along the shape of the end portion KE, and a tool for the polishing surface 11 And a contact mechanism 40 for bringing 41 into contact therewith. Therefore, as shown in FIG. 3, the shape of the tool 41 having the same curvature as the shape of the end KE of the workpiece K is transferred to the polishing surface 11 with which the tool 41 is in contact. Then, it is corrected or processed into a shape along the shape of the end KE of the workpiece K to be polished.
- the polishing surface 11 of the polishing member 10 has a shape along the shape of the end KE of the workpiece K to be polished.
- the shape of the polishing surface 11 and the shape of the tool 41 are concave on one side and the other is on the other side. Convex relationship. Therefore, the shape processing or shape correction of the polished surface 11 having a shape different from the planar shape, that is, the curved shape can be easily performed.
- the said embodiment can also be changed and implemented as follows.
- the correction of the polishing surface 11 by the tool 41 is performed during polishing of the workpiece K to be polished, or is performed at the same time as polishing using a part or all of the time during polishing of the workpiece K to be polished. May be.
- the cutting tool for shape processing described above is capable of appropriately processing the polishing surface of the polishing member, and is not particularly limited as long as it has a processed portion having a hardness higher than the polishing surface of the polishing member.
- a processing tool with fixed abrasives such as pellets or an electrodeposition grindstone, or a cutting tool such as an end mill or a bite.
- the above-mentioned surface correction tool is a tool capable of adjusting the surface of the polishing member or removing dirt or fixed matter adhering to the surface, and as a specific example, the processing tool with fixed abrasive Alternatively, a hard brush or the like can be used.
- the tool 41 functioning as a shape processing cutting tool or surface correction tool has the same shape as the end KE of the workpiece K, and the polishing surface 11 You may make it use the rotary cutter which equips the outer periphery with the blade corrected to the shape along the shape of the edge part KE.
- FIG. 5 shows a schematic configuration of the polishing apparatus in this modification.
- a contact mechanism 60 is provided near the outer peripheral surface in the radial direction of the polishing member 10 and at a position facing the polishing surface 11.
- the contact mechanism 60 is provided with the cutter 50 as described above and a moving mechanism that reciprocates the rotation axis of the cutter 50 in a direction orthogonal to the rotation axis of the polishing member 10 (the direction of arrow M shown in FIG. 5).
- the cutter 50 is moved toward the rotation center of the polishing member 10 (in the direction of the arrow M1) by the contact mechanism 60, the blade of the cutter 50 is brought into contact with the polishing surface 11 as shown by a two-dot chain line in FIG. Contact.
- the blade of the cutter 50 is separated from the polishing surface 11.
- the shape of the polishing surface 11 and the shape of the blade of the cutter 50 are in a relationship in which one is concave and the other is convex, so that the polishing surface 11 has a shape different from a flat shape, that is, a curved shape. The shape can be easily corrected.
- a tool different from the tool 41 described above may be used as a tool that functions as a cutting tool for shape processing or a tool for surface correction. Some of these variations are described below.
- 6 has a plurality of cutting blades 210 extending in the axial direction at intervals in the circumferential direction.
- the outer shape of the cutting edge 210 at the tip end portion 210a of the cutting tool 200 for shape processing has the same curvature as the curvature of the end portion KE.
- the polishing surface 11 of the polishing member 10 is made to contact the tip surface 210a with the polishing surface 11 while rotating the cutting tool for shape machining 200. It can be processed into a shape along the shape of the end KE.
- FIGS. 7 (A) and 7 (B) has a flat plate shape, and a tip 310 thereof has a circular cutting edge having the same curvature as that of the end KE. It has become. Further, as shown in FIG. 7B, the thickness of the cutting tool 300 for shape processing becomes thinner toward the tip portion 310. Even when such a shape machining cutting tool 300 is used instead of the tool 41, the polishing surface 11 of the polishing member 10 is made to contact the tip surface 310 with the polishing surface 11 while rotating the shape machining cutting tool 300. It can be processed into a shape along the shape of the end KE.
- a plurality of such flat shape cutting tools 300 may be used in combination. For example, a plurality of shape cutting tools 300 may be combined so that they intersect each other at a fixed angle such as 60 ° or 90 °. Also good.
- the tip of the brush 410 has a hemispherical shape as a whole, and the curvature of the hemispherical shape has substantially the same curvature as that of the end KE.
- the polishing surface 11 of the polishing member 10 is brought into contact with the end KE by bringing the brush 410 into contact with the polishing surface 11 while rotating the surface correction tool 400. It can be corrected to a shape along the shape.
- the polishing member 10 provided with the curved polishing surface 11 in advance is fixed to the surface plate 20.
- the shape of the polishing surface 11 can be formed using a cutting tool for shape processing, for example, a polishing member that does not have a surface having a shape along the shape of the portion to be polished is prepared, and shape processing is performed. You may form the grinding
- the end KE is brought into contact with the tool 41 by bringing the outer peripheral surface of a polishing member 10A having a shape different from the shape of the end KE of the workpiece K to be polished. You may make it form the grinding
- the polishing member 10 ⁇ / b> A whose outer peripheral surface in the radial direction is planar is fixed to the surface plate 20.
- the tool 41 is moved in the radial direction of the polishing member 10A by moving the holding portion 42 toward the rotation center of the polishing member 10A (in the direction of the arrow M1) by the contact mechanism 40. In contact with the outer peripheral surface. More specifically, the tool 41 is pressed against the outer peripheral surface in the radial direction of the polishing member 10A. By the pressing of the tool 41, the polishing surface 11 is formed on the outer peripheral surface of the polishing member 10A which is flat. Note that it is desirable to supply the above-described processing liquid also when forming the polished surface 11. After the polishing surface 11 is formed, the tool 42 is moved by the contact mechanism 40 in a direction away from the center of rotation of the polishing member 10A (in the direction of the arrow M2), as shown in FIG. 41 is separated from the polishing surface 11.
- the polishing surface 11 having a shape along the shape of the end KE of the workpiece K is formed on the polishing apparatus. Therefore, the shape of the polishing surface 11 is formed with higher accuracy than when the polishing member 10 in which the polishing surface 11 having a shape corresponding to the shape of the end KE of the workpiece K is previously formed is attached to the polishing apparatus. Will be able to. Moreover, the trouble of preparing the polishing member 10 on which the polishing surface 11 is formed in advance can be saved.
- a polishing surface 71 having a shape similar to that of the polishing surface 11 is provided on one side surface in the longitudinal direction of the linear bar 70.
- An arbitrary material can be selected as the material of the bar 70.
- a rod 70 is wound around the disk 80 so that the polishing surface 71 faces outward, and the wound rod 70 is fixed to the disk 80 by an appropriate method.
- An abrasive member composed of 70 and a disk 80 is made. Even in such an embodiment, a polishing member similar to the polishing member 10 can be formed.
- the material of the disk 80 can also be selected arbitrarily. For example, metal or ceramic can be used, but a material that is as light as possible is preferable.
- the polishing surface 71 is provided on the rod 70 and then the rod 70 is wound around the disk 80.
- a linear rod is used. After the material 70 is wound around the disk 80, a polishing surface 71 may be provided on the rod 70.
- a curved surface 91 similar to the polishing surface 11 extending in the circumferential direction is provided on the radially outer peripheral surface of the disc-shaped polishing member 90, and another member is pasted or coated on the curved surface 91.
- a polishing surface may be provided.
- a tape-like nonwoven fabric 100 serving as a polishing surface may be attached to a curved surface 91 formed on the outer circumferential surface of the polishing member 90 in the radial direction. In this case, the polishing surface can be returned to a new state by replacing the nonwoven fabric 100.
- a material having a relatively high durability such as a metal such as stainless steel
- the material of the polishing member 90 can be arbitrarily selected.
- the polishing member 90 may be made of metal, and the curved surface 91 may be provided with a resin coating serving as a polishing surface.
- the polishing member 90 may be made of ceramic, and the curved surface 91 may be provided with a resin coating serving as a polishing surface.
- the polishing member 10 is provided on the upper surface of the surface plate 20, the surface plate 20 may be omitted and the rotation shaft of the first motor 21 may be directly fixed to the center of the polishing member 10.
- the end KE is pressed against the polishing surface 11 by driving the motor moving mechanism 33, a mechanism for pressing the end KE against the polishing surface 11 may be provided separately.
- polishing member 10 Although the polishing member 10 is rotated, it may be reciprocated linearly. -Although the edge part KE of the workpiece K was grind
- the shape of the end KE of the workpiece K may be a non-planar shape other than a curved surface, for example, a triangular shape as shown in FIG. 17 or a substantially triangular shape as shown in FIG. The shape may have a tinge. Further, the shape of the end KE of the workpiece K may be a staircase shape shown in FIG. 19 or a substantially staircase shape as shown in FIG. 20 with rounded corners. Further, as shown in FIG. 21, the end KE may have a curved shape that is recessed toward the inside of the workpiece K to be polished. Further, it may be a curved surface composed of a plurality of curvatures or a curved surface partially including a straight line portion. Also in these modifications, the end KE is polished by making the polishing surface 11 of the polishing member 10 along the shape of the end KE of the workpiece K (the shape of the part to be polished). Can do.
- the workpiece K to be polished with respect to the polishing surface 11 is perpendicular to the rotation axis of the polishing member 10 (the direction of the arrow X shown in FIG. 2 and the like). ),
- the end portion KE of the workpiece K to be polished was polished.
- the end KE thus pressed can be polished, but the upper and lower surfaces of the workpiece K, that is, the object to be polished which is parallel to the plane in which the rotation axis of the polishing member 10 is orthogonal. Since both sides of the workpiece K do not require excessive pressure during polishing, there is a possibility that sufficient polishing cannot be performed.
- the polishing member 10 is formed of a material that has a certain degree of elasticity such as resin and that is elastically deformed.
- the width H1 of the polishing surface 11 in the direction parallel to the rotation axis of the polishing member 10 is the thickness T1 of the workpiece K to be polished before processing. That is, it is made smaller by a predetermined amount ⁇ than the length between the upper surface KU and the lower surface KD of the workpiece K.
- the upper surface KU and the lower surface KD of the workpiece K are divided by the predetermined amount ⁇ .
- a pressing force F is applied from the polishing member 10 which is elastically deformed only. Therefore, when the workpiece K is polished, not only the end KE but also the upper surface KU and the lower surface KD can be simultaneously polished.
- the predetermined amount ⁇ is increased, the amount of elastic deformation of the polishing member 10 when polishing the workpiece K is increased. Therefore, by optimizing the predetermined amount ⁇ , the workpiece K can be polished.
- the pressing force F applied to the upper surface KU and the lower surface KD can be optimized.
- the workpiece K can be appropriately processed.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
図1に示すように、この研磨装置は、円盤状の研磨部材10を備えている。この研磨部材10の径方向の外周面を使って、被研磨加工物Kの被研磨部である端部KEが研磨される。この端部KEは、予めの加工によって曲面形状にされている。被研磨加工物Kの形状は、その用途等に応じて任意の形状とすることができる。 Hereinafter, an embodiment embodying a polishing apparatus, a polishing member correction method, a shape processing cutting tool, and a surface correction tool according to the present invention will be described with reference to FIGS.
As shown in FIG. 1, the polishing apparatus includes a disk-shaped polishing
また、研磨部材10の材質として金属を使用する場合には、材質として、マグネシウム、アルミニウム、チタン、鉄、ニッケル、コバルト銅、亜鉛、マンガン或いはそれを主成分とする合金を使用することができる。 The Shore A hardness of the polishing surface of the polishing
Further, when a metal is used as the material of the polishing
上記防腐剤の例としては、次亜塩素酸ナトリウム等が挙げられる。 Examples of the dispersion aid include condensed phosphates such as pyrophosphate and hexametaphosphate.
Examples of the preservative include sodium hypochlorite and the like.
ちなみに、研磨精度を好適に維持できる範囲内で研磨部材10の直径をできる限り大きくすれば、研磨部材10の外周面において同時に複数の被研磨加工物Kの端部KEを研磨することができるため、生産性を向上させることができる。また、研磨部材10の直径をできる限り大きくすれば、研磨部材10の回転速度が同じであっても、外周では大きな線速度が得られるようになるため、研磨加工に際して研磨部材10の回転速度を比較的低くしても十分な線速度が得られるようになる。そのため、例えば加工液の飛散等を抑えることができる。 Examples of the antifungal agent include oxazolines such as oxazolidine-2,5-dione.
Incidentally, if the diameter of the polishing
この接触機構40には、工具41が設けられている。この工具41は、棒状をなしておりその先端の加工部が端部KEの形状と同一の形状、より詳細には端部KEの曲率と同じ曲率を有している。そして工具41は、研磨面11を端部KEの形状に沿った形状に加工する形状加工用切削工具、又は研磨面11を端部KEの形状に沿った形状に修正する表面修正用工具として機能する。なお、工具41の材質は、研磨面11を加工又は修正する上で最適なものが選択されている。また、被研磨加工物Kの端部KEの形状と工具41の形状とは完全に同一である必要は無く、実用上問題が無い程度に互いの形状が若干異なっていてもよい。 As shown in FIG. 1, a
The
図3に示すように、接触機構40によって、保持部42が研磨部材10の回転中心に向かって(矢印M1の向きに)移動すると、工具41が研磨面11に接触する。より詳細には、工具41が研磨面11に対して押圧される。 3 and 4 show an operation mode of the
As shown in FIG. 3, when the holding
基本的に、工具41は研磨面11から離れた図4の位置に配置されている。そして、所定周期毎、例えば研磨時間の累積値が予め定められた値を超えた場合や、操作者がスイッチ操作を行った場合に、研磨部材10が回転駆動されている状態で、工具41は研磨面11に接触した図3の位置に移動される。 As shown in FIG. 4, when the holding
Basically, the
(1)研磨装置は、被研磨加工物Kの端部KEの形状に沿った形状の研磨面11を有する研磨部材10を備えている。従って、被研磨加工物Kの端部KEが平面状とは異なる形状、つまり曲面形状であっても、その端部KEを研磨することができる。 According to this embodiment described above, the following effects can be obtained.
(1) The polishing apparatus includes a polishing
・上記工具41による研磨面11の修正を、被研磨加工物Kを研磨する合間に行ったり、被研磨加工物Kの研磨中の一部の時間又は全部の時間を用いて研磨と同時に行ったりしてもよい。 In addition, the said embodiment can also be changed and implemented as follows.
The correction of the polishing
図6に示す円筒状の形状加工用切削工具200は、その軸方向に延びる切れ刃210が周方向に間隔をおいて複数設けられている。形状加工用切削工具200の先端部210aにおける切れ刃210の外形形状は、端部KEの曲率と同じ曲率を有している。こうした形状加工用切削工具200を工具41の代わりに用いた場合には、形状加工用切削工具200を回転させながら先端部210aを研磨面11に接触させることにより、研磨部材10の研磨面11を端部KEの形状に沿った形状に加工することができる。 A tool different from the
6 has a plurality of cutting
・モータ移動機構33を駆動させることにより端部KEを研磨面11に押し付けるようにしたが、端部KEを研磨面11に押し付ける機構を別途設けてもよい。 Although the polishing
Although the end KE is pressed against the polishing
・被研磨加工物Kの端部KEを研磨するようにしたが、被研磨部はそうした端部に限定されるものではなく、他の部位でもよい。 Although the polishing
-Although the edge part KE of the workpiece K was grind | polished, a to-be-polished part is not limited to such an edge part, Other parts may be sufficient.
Claims (9)
- 被研磨加工物の被研磨部の形状に沿った形状の研磨面を有する研磨部材と、
前記被研磨部の形状と同一の形状を有しており、前記研磨面を前記被研磨部の形状に沿った形状に加工する形状加工用切削工具又は前記研磨面を前記被研磨部の形状に沿った形状に修正する表面修正用工具と、
前記研磨面に対して前記形状加工用切削工具又は表面修正用工具を接触させる接触機構と、を備える
ことを特徴とする研磨装置。 A polishing member having a polishing surface having a shape along the shape of the part to be polished of the workpiece;
It has the same shape as the shape of the portion to be polished, and the shape processing cutting tool for processing the polishing surface into a shape along the shape of the portion to be polished or the polishing surface into the shape of the portion to be polished A surface correction tool to correct the shape along
A polishing mechanism comprising: a contact mechanism for bringing the cutting tool for shape processing or the tool for surface correction into contact with the polishing surface. - 前記接触機構による前記研磨面に対する前記形状加工用切削工具又は表面修正用工具の接触を所定周期毎に行う
請求項1に記載の研磨装置。 The polishing apparatus according to claim 1, wherein the contact mechanism makes contact with the shape processing cutting tool or surface correction tool with respect to the polishing surface at predetermined intervals. - 前記研磨部材の研磨面は、前記被研磨部の形状とは異なる形状を有した研磨部材表面を前記形状加工用切削工具又は表面修正用工具に接触させることにより、前記被研磨部の形状に沿った形状に形成されている
請求項1または2に記載の研磨装置。 The polishing surface of the polishing member follows the shape of the polished portion by bringing a polishing member surface having a shape different from the shape of the polished portion into contact with the cutting tool for shape processing or the tool for surface correction. The polishing apparatus according to claim 1, wherein the polishing apparatus is formed into a shape. - 前記研磨部材を下方から回転させるモータを備える
請求項1~3のいずれか1項に記載の研磨装置。 The polishing apparatus according to any one of claims 1 to 3, further comprising a motor that rotates the polishing member from below. - 前記研磨部材を上面に載置した状態で前記研磨部材と一体回転する定盤を備える
請求項1~4のいずれか1項に記載の研磨装置。 The polishing apparatus according to any one of claims 1 to 4, further comprising a surface plate that rotates integrally with the polishing member in a state where the polishing member is placed on an upper surface. - 請求項1~5のいずれか1項に記載の研磨装置で用いられる部材であって前記被研磨部の形状と同一の形状を有しており、前記研磨面を前記被研磨部の形状に沿った形状に加工する形状加工用切削工具。 A member used in the polishing apparatus according to any one of claims 1 to 5, wherein the member has the same shape as the shape of the portion to be polished, and the polishing surface follows the shape of the portion to be polished. Cutting tool for shape processing to process into a new shape.
- 請求項1~5のいずれか1項に記載の研磨装置で用いられる部材であって前記被研磨部の形状と同一の形状を有しており、前記研磨面を前記被研磨部の形状に沿った形状に修正する表面修正用工具。 A member used in the polishing apparatus according to any one of claims 1 to 5, wherein the member has the same shape as the shape of the portion to be polished, and the polishing surface follows the shape of the portion to be polished. Surface correction tool to correct the shape.
- 被研磨加工物の被研磨部の形状に沿った形状の研磨面を有する研磨部材の前記研磨面に対して、前記被研磨部の形状と同一の形状を有しており前記研磨面を前記被研磨部の形状に沿った形状に加工する形状加工用切削工具を接触させる
ことを特徴とする研磨部材の加工方法。 The polishing surface of the polishing member having a polishing surface having a shape along the shape of the portion to be polished of the workpiece to be polished has the same shape as the shape of the portion to be polished, and the polishing surface is covered with the surface to be polished. A method for processing an abrasive member, comprising contacting a cutting tool for shape processing that forms a shape along a shape of a polishing portion. - 被研磨加工物の被研磨部の形状に沿った形状の研磨面を有する研磨部材の前記研磨面に対して、前記被研磨部の形状と同一の形状を有しており前記研磨面を前記被研磨部の形状に沿った形状に修正する表面修正用工具を接触させる
ことを特徴とする研磨部材の修正方法。 The polishing surface of the polishing member having a polishing surface having a shape along the shape of the portion to be polished of the workpiece to be polished has the same shape as the shape of the portion to be polished, and the polishing surface is covered with the surface to be polished. A method for correcting a polishing member, comprising contacting a surface correction tool for correcting the shape in accordance with a shape of a polishing portion.
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KR1020167008527A KR20160067107A (en) | 2013-10-04 | 2014-10-02 | Polishing device, processing method of polishing member, modification method of polishing member, shape processing cutting tool, and surface modification tool |
JP2015540533A JPWO2015050185A1 (en) | 2013-10-04 | 2014-10-02 | Polishing apparatus, polishing member processing method, polishing member correction method, shape processing cutting tool, and surface correction tool |
EP14851154.6A EP3053704A4 (en) | 2013-10-04 | 2014-10-02 | Polishing device, processing method of polishing member, modification method of polishing member, shape processing cutting tool, and surface modification tool |
CN201480054332.6A CN105636743B (en) | 2013-10-04 | 2014-10-02 | Method for machining polishing member and method for correcting polishing member |
US15/026,096 US20160236322A1 (en) | 2013-10-04 | 2014-10-02 | Polishing device, processing method of polishing member, modification method of polishing member, shape processing cutting tool, and surface modification tool |
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- 2014-10-02 WO PCT/JP2014/076359 patent/WO2015050185A1/en active Application Filing
- 2014-10-02 US US15/026,096 patent/US20160236322A1/en not_active Abandoned
- 2014-10-02 TW TW103134422A patent/TWI689378B/en active
- 2014-10-02 KR KR1020167008527A patent/KR20160067107A/en not_active Application Discontinuation
- 2014-10-02 EP EP14851154.6A patent/EP3053704A4/en not_active Withdrawn
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2017
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Cited By (4)
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WO2018173421A1 (en) * | 2017-03-22 | 2018-09-27 | 株式会社 荏原製作所 | Substrate polishing device and substrate polishing method |
CN110461542A (en) * | 2017-03-22 | 2019-11-15 | 株式会社荏原制作所 | The grinding device and grinding method of substrate |
KR20190131501A (en) * | 2017-03-22 | 2019-11-26 | 가부시키가이샤 에바라 세이사꾸쇼 | Polishing apparatus and polishing method of substrate |
KR102482181B1 (en) | 2017-03-22 | 2022-12-29 | 가부시키가이샤 에바라 세이사꾸쇼 | Substrate polishing device and polishing method |
Also Published As
Publication number | Publication date |
---|---|
KR20160067107A (en) | 2016-06-13 |
EP3053704A1 (en) | 2016-08-10 |
CN105636743B (en) | 2021-01-08 |
JP2017185623A (en) | 2017-10-12 |
CN105636743A (en) | 2016-06-01 |
US20160236322A1 (en) | 2016-08-18 |
JP6474861B2 (en) | 2019-02-27 |
JPWO2015050185A1 (en) | 2017-03-09 |
EP3053704A4 (en) | 2017-07-19 |
TW201536479A (en) | 2015-10-01 |
TWI689378B (en) | 2020-04-01 |
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