TWI689378B - Polishing apparatus, method for machining polishing member, method for modifying polishing member, cutting tool for machining shape, and tool for modifying surface - Google Patents

Polishing apparatus, method for machining polishing member, method for modifying polishing member, cutting tool for machining shape, and tool for modifying surface Download PDF

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TWI689378B
TWI689378B TW103134422A TW103134422A TWI689378B TW I689378 B TWI689378 B TW I689378B TW 103134422 A TW103134422 A TW 103134422A TW 103134422 A TW103134422 A TW 103134422A TW I689378 B TWI689378 B TW I689378B
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polishing
shape
polished
tool
curved
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TW103134422A
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TW201536479A (en
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森永均
浅野宏
大月伸悟
玉井一誠
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日商福吉米股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • B24B53/07Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels by means of forming tools having a shape complementary to that to be produced, e.g. blocks, profile rolls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/08Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12Dressing tools; Holders therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

本發明的課題為提供一種研磨裝置,可容易進行具有與平面狀不同形狀之研磨面的形狀加工或形狀修整。研磨裝置具備:研磨構件(10),具有沿著被研磨加工物(K)之端部(KE)形狀的形狀的研磨面;工具(41),具有與端部(KE)的形狀相同的形狀,可作為將研磨構件(10)的研磨面加工成沿端部(KE)形狀的形狀之形狀加工用切削工具或將上述研磨面修整成沿上述研磨部形狀之形狀的表面修整用工具的功能;及接觸機構(40),使工具(41)接觸研磨構件(10)的研磨面。 An object of the present invention is to provide a polishing device that can easily perform shape processing or shape modification of a polishing surface having a shape different from a planar shape. The polishing device includes: a polishing member (10) having a polishing surface having a shape along the end (KE) of the workpiece (K) to be polished; a tool (41) having the same shape as the shape of the end (KE) It can be used as a cutting tool for shape processing that polishes the polished surface of the polishing member (10) into a shape along the end (KE) or a surface trimming tool that trims the polished surface into a shape along the shape of the polished portion And a contact mechanism (40), so that the tool (41) contacts the polishing surface of the polishing member (10).

Description

研磨裝置,研磨構件的加工方法,研磨構件的修整方法,形狀加工用切削工具及表面修整用工具 Polishing device, processing method of polishing member, dressing method of polishing member, cutting tool for shape processing and tool for surface finishing

本發明是關於研磨裝置,研磨構件的加工方法,研磨構件的修整方法,形狀加工用切削工具及表面修整用工具。 The invention relates to a polishing device, a processing method of a polishing member, a dressing method of a polishing member, a cutting tool for shape processing and a tool for surface finishing.

如專利文獻1所記載,以研磨構件研磨被研磨加工物(所研磨加工的對象物)的被研磨部時,使研磨構件的研磨面緩緩地變化形狀。為此,一般是進行研磨面的修整恢復原來的形狀,即所謂的修整。 As described in Patent Document 1, when the polished part of the object to be polished (object to be polished) is polished by the polishing member, the shape of the polishing surface of the polishing member is gradually changed. For this reason, the grinding surface is generally trimmed to restore the original shape, so-called trimming.

[先前技術文獻] [Prior Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開平11-188590號公報 [Patent Document 1] Japanese Patent Laid-Open No. 11-188590

[發明概要] [Summary of the Invention]

但是,上述習知的修整多是以修整平面狀的研磨面為目的,對於沿著被研磨加工物的被研磨部形狀的種種形狀之研磨面的修整幾乎未作任何的考量。 However, the above-mentioned conventional dressing is mostly for the purpose of dressing a planar polishing surface, and almost no consideration is given to dressing of various shapes of polishing surfaces along the shape of the portion to be polished of the workpiece.

本發明是鑒於以上的情況所研創而成,其目的為提供一種研磨裝置,研磨構件的加工方法,研磨構件的修整方法,可容易進行具有與平面狀不同形狀之研磨面的形狀加工或形狀修整。並且,提供一種該等研磨裝置與加工方法所使用的進行研磨面形狀的加工的形狀加工用切削工具,或者該等研磨裝置與加工方法所使用的將研磨面修整成沿著被研磨部形狀的形狀的表面修整用工具。 The present invention was developed in view of the above circumstances, and its object is to provide a polishing device, a method for processing a polishing member, and a method for dressing a polishing member, which can easily perform shape processing or shape modification of a polishing surface having a shape different from a planar shape . Furthermore, a cutting tool for shape processing used for processing the shape of the polished surface used by the polishing apparatus and the processing method, or a dressing surface used by the polishing apparatus and the processing method for trimming the polishing surface along the shape of the portion to be polished Tool for shaping the surface.

解決上述課題的研磨裝置具備:具有沿著被研磨加工物的被研磨部形狀的形狀之研磨面的研磨構件;具有與上述被研磨部的形狀相同的形狀,將上述研磨面加工成沿著上述被研磨部形狀的形狀的形狀加工用切削工具或將上述研磨面修整成沿著上述研磨部形狀的形狀的表面修整用工具;及使上述形狀加工用切削工具或表面修整用工具接觸上述研磨面的接觸機構。 The polishing device for solving the above-mentioned problem includes: a polishing member having a polishing surface having a shape along the shape of the portion to be polished; and having the same shape as the shape of the polishing portion, and processing the polishing surface along the above A cutting tool for shape processing of the shape of the portion to be polished or a surface trimming tool for trimming the polished surface to a shape along the shape of the polishing portion; and bringing the cutting tool for shape processing or the surface trimming tool into contact with the polishing surface Contact agencies.

同構成中,研磨構件具有沿著被研磨加工物之被研磨部形狀的形狀的研磨面。因此,被研磨加工物的被研磨 部,例如即使與曲面或三角形等的平面狀不同的形狀也可進行研磨。 In the same configuration, the polishing member has a polishing surface shaped along the shape of the portion to be polished of the workpiece. Therefore, the workpiece to be polished is polished The portion can be polished even if it has a shape different from a flat surface such as a curved surface or a triangle.

在此,同構成中,藉接觸機構使得具有與被研磨部的形狀相同的形狀將研磨面加工成沿著上述被研磨部形狀的形狀的形狀加工用切削工具或將上述研磨面修整成沿著上述研磨部形狀的形狀的表面修整用工具接觸研磨面。因此,形狀加工用切削供具或表面修整用工具接觸的研磨面,轉印具有和被研磨加工物的被研磨部的形狀相同形狀的形狀加工用切削工具或表面修整用工具,藉此加工或修整成沿著被研磨加工物之被研磨部形狀的形狀。如上述,研磨構件的研磨面雖成為被研磨加工物之被研磨部形狀的形狀,但是該研磨面的形狀與形狀加工用切削工具或表面修整用工具的形狀為一方呈凹陷而另一方成凸出的關係,所以可容易進行與具有平面狀不同形狀之研磨面的形狀加工或形狀修整。 Here, in the same configuration, a cutting tool for shape processing or a trimming of the polished surface along the shape of the polished portion by the contact mechanism such that the polished surface has the same shape as the shape of the polished portion The surface-shaping tool in the shape of the above-mentioned polishing portion contacts the polishing surface. Therefore, the grinding surface in contact with the cutting tool for shape processing or the tool for surface finishing transfers the cutting tool for shape processing or the tool for surface finishing having the same shape as the shape of the portion to be polished of the workpiece to be processed or It is trimmed to a shape along the shape of the portion to be polished. As described above, although the polishing surface of the polishing member has the shape of the part to be polished of the workpiece to be polished, the shape of the polishing surface and the shape processing cutting tool or surface trimming tool are concave on one side and convex on the other Because of the above-mentioned relationship, it is easy to carry out the shape processing or shape modification of the polishing surface having a different shape from the planar shape.

再者,被研磨加工物的被研磨部的形狀與形狀加工用切削工具或表面修整用工具的形狀並無完全相同的必要,在實用上沒有問題的程度也可有彼此形狀若干的不同。 In addition, the shape of the portion to be polished of the object to be polished is not necessarily the same as the shape of the cutting tool for shape processing or the tool for surface finishing, and may be slightly different from each other to the extent that there is no practical problem.

又,形狀加工用切削工具是可適當地加工研磨構件的研磨面,只要具有硬度比上述研磨構件的研磨面高的加工部尤其不加以限制,具體例為可使用顆粒或電塗砂輪等附帶固定磨粒的加工工具、端銑刀或刀頭等的切削加工用工具。 In addition, the cutting tool for shape processing is a polishing surface that can properly process the polishing member, and it is not particularly limited as long as it has a processed portion having a higher hardness than the polishing surface of the polishing member, and specific examples include the use of particles or electrocoat grinding wheels, etc. Abrasive processing tools, cutting tools such as end mills or cutter heads.

並且,作為表面修整用工具則是可使研磨構件的表面 平整,或除去附著在研磨構件表面的污垢或固著物等工具,具體是可使用上述附帶固定磨粒的加工工具或硬質的刷等。 Moreover, as a tool for surface finishing, the surface of the polishing member can be made Tools for smoothing or removing dirt or fixed substances adhering to the surface of the polishing member, specifically, the above-mentioned processing tools with fixed abrasive particles or hard brushes, etc. can be used.

又,上述研磨裝置是藉著接觸機構以各預定周期對研磨面進行形狀加工用切削工具或表面修整用工具的接觸為佳。根據同構成,在各預定周期進行研磨面的加工或修整,因此可適當維持研磨被研磨加工物時的研磨精度。 In addition, it is preferable that the above-mentioned polishing apparatus contacts the cutting tool or the tool for surface finishing on the polishing surface by the contact mechanism at each predetermined cycle. According to the same configuration, the polishing surface is processed or trimmed at each predetermined cycle, so the polishing accuracy when polishing the workpiece to be polished can be appropriately maintained.

另外,上述研磨裝置中,研磨構件的研磨面是以將具有與上述被研磨部的形狀不同形狀之研磨構件表面接觸於上述形狀加工用切削工具或表面修整用工具,藉此形成沿著上述被研磨部形狀的形狀為佳。 In addition, in the above-mentioned polishing apparatus, the polishing surface of the polishing member is formed by contacting the surface of the polishing member having a shape different from that of the portion to be polished with the cutting tool for shape processing or the tool for surface finishing, thereby forming The shape of the shape of the polishing part is preferable.

根據同構成,沿著被研磨加工物的被研磨部形狀之形狀的研磨面的形成是在該研磨裝置上進行。因此與將預先形成沿著被研磨加工物的被研磨部形狀的形狀之研磨面的研磨構件安裝在研磨裝置的場合比較,可高精度形成如上述的研磨面的形狀。 According to the same configuration, the formation of the polishing surface along the shape of the portion to be polished of the workpiece to be polished is performed on the polishing device. Therefore, it is possible to form the shape of the polishing surface as described above with higher accuracy compared to a case where a polishing member having a polishing surface formed in advance along the shape of the portion to be polished is attached to the polishing device.

又,上述研磨裝置是以具備從下方旋轉上述研磨構件的馬達,或具備以將研磨構件載放在上面的狀態與上述研磨構件成一體旋轉的機床工作台為佳。根據該等的構成,可獲得軸振顫等較低之穩定的研磨構件的旋轉,因此可進行更為高精度的加工。 In addition, it is preferable that the polishing device includes a motor that rotates the polishing member from below, or a machine tool table that rotates integrally with the polishing member in a state where the polishing member is placed on the top. According to such a configuration, it is possible to obtain a stable rotation of the grinding member with low vibration such as shaft chattering, and therefore, it is possible to perform processing with higher accuracy.

並且,具有和被研磨部的形狀相同的形狀,在上述研磨裝置使用將研磨面加工成沿著被研磨部形狀的形狀的形狀加工用切削工具或將上述研磨面修整成沿著上述被研磨 部形狀的形狀的表面修整用工具,藉此可容易進行具有與平面狀不同形狀之研磨面的形狀加工或修整。 Moreover, it has the same shape as the shape of the to-be-polished portion, and the above-mentioned polishing apparatus uses a cutting tool for shape processing that polishes the polished surface into a shape along the shape of the polished portion, or trims the polished surface along the to-be-polished surface The tool for surface trimming of the shape of the partial shape can easily perform the shape processing or trimming of the polishing surface having a shape different from the planar shape.

又,解決上述課題的研磨構件的加工或修整方法是將具有與被研磨部的形狀相同的形狀且將研磨面加工成沿著被研磨部形狀的形狀的形狀加工用切削工具或將上述研磨面修整成沿著上述被研磨部形狀的形狀的表面修整用工具,接觸於具有沿著被研磨加工物的被研磨部形狀的形狀之研磨面的研磨構件的上述研磨面。 In addition, a method of processing or dressing an abrasive member that solves the above-mentioned problems is to use a cutting tool for shape processing that has the same shape as the shape of the portion to be polished and the grinding surface is processed along the shape of the portion to be polished, or to polish the surface The surface trimming tool trimmed to the shape of the to-be-polished portion is in contact with the polishing surface of the polishing member having the polishing surface with the shape of the to-be-polished portion shape of the workpiece to be polished.

在同方法中,準備具有沿著被研磨加工物的被研磨部形狀的形狀之研磨面的研磨構件。因此,被研磨加工物的被研磨部,例如即使是如曲面或三角形等與平面狀不同的形狀仍可進行研磨。 In the same method, a polishing member having a polishing surface having a shape along the shape of the portion to be polished is prepared. Therefore, the portion to be polished of the workpiece to be polished can be polished even if the shape is different from the planar shape such as a curved surface or a triangle.

在此,同方法是使具有與被研磨部的形狀相同的形狀並將研磨面加工成沿著被研磨部形狀的形狀的形狀加工用切削工具或將上述研磨面修整成沿著上述被研磨部形狀的形狀的表面修整用工具接觸於研磨面。因此,形狀加工用切削工具或表面修整用工具接觸的研磨面,進行具有與被研磨加工物的被研磨部的形狀相同形狀的形狀加工用切削工具或表面修整用工具之形狀的轉印,藉此修整成沿著被研磨加工物之被研磨部形狀的形狀。如上述,研磨構件的研磨面雖成為沿著被研磨加工物之被研磨部形狀的形狀,但此研磨面的形狀與形狀加工用切削工具或表面修整用工具的形狀是形成一方為凹而另一方為凸的關係,因此可容易進行具有與平面狀不同形狀之研磨面的形狀修整。 Here, the same method is to shape the cutting tool having the same shape as the shape of the portion to be polished and process the polishing surface into a shape along the shape of the portion to be polished or trim the polishing surface to follow the portion to be polished The shape of the surface finishing tool is in contact with the polishing surface. Therefore, the polishing surface contacted by the cutting tool for shape processing or the tool for surface trimming performs the transfer of the shape of the cutting tool for shape processing or the tool for surface trimming having the same shape as the shape of the portion to be polished This trimming takes a shape along the shape of the portion to be polished of the workpiece. As described above, although the polishing surface of the polishing member has a shape along the shape of the portion to be polished, the shape of the polishing surface and the shape of the cutting tool for surface processing or the tool for surface finishing are formed so that one is concave and the other One of them has a convex relationship, so that it is possible to easily perform the shape modification of the polishing surface having a shape different from the planar shape.

根據本發明,可容易進行具有與平面狀不同形狀之研磨面的形狀加工或形狀修整。 According to the present invention, it is possible to easily perform shape processing or shape modification of a polishing surface having a shape different from that of a planar shape.

10、10A、90‧‧‧研磨構件 10, 10A, 90‧‧‧ abrasive components

11‧‧‧研磨面 11‧‧‧Abrasive surface

20‧‧‧機床工作台 20‧‧‧machine table

21‧‧‧第1馬達 21‧‧‧ 1st motor

30‧‧‧第2馬達 30‧‧‧ 2nd motor

31‧‧‧轉軸 31‧‧‧spindle

32‧‧‧固定台 32‧‧‧Fixed

33‧‧‧馬達移動機構 33‧‧‧Motor moving mechanism

40‧‧‧接觸機構 40‧‧‧ Contact organization

41‧‧‧工具 41‧‧‧Tools

42‧‧‧保持部 42‧‧‧Maintaining Department

43‧‧‧移動機構 43‧‧‧Moving mechanism

50‧‧‧刀具 50‧‧‧Cutter

60‧‧‧接觸機構 60‧‧‧Contact organization

70‧‧‧棒材 70‧‧‧Bar

71‧‧‧研磨面 71‧‧‧Abrasive surface

80‧‧‧圓盤 80‧‧‧disc

91‧‧‧曲面 91‧‧‧Curved

100‧‧‧不織布 100‧‧‧nonwoven

200‧‧‧形狀加工用切削工具 200‧‧‧Cutting tool for shape processing

210‧‧‧切削刃 210‧‧‧Cutting edge

210a‧‧‧前端部 210a‧‧‧Front end

300‧‧‧形狀加工用切削工具 300‧‧‧Cutting tool for shape processing

310‧‧‧前端部 310‧‧‧Front end

400‧‧‧表面修整用工具 400‧‧‧surface finishing tools

410‧‧‧刷 410‧‧‧brush

K‧‧‧被研磨加工物 K‧‧‧Work to be ground

KE‧‧‧(被研磨加工物的)端部 KE‧‧‧(to be processed) end

KU‧‧‧(被研磨加工物的)上面 KU‧‧‧(to be processed)

KD‧‧‧(被研磨加工物的)下面 KD‧‧‧(to be processed)

第1圖是表示一實施形態的研磨裝置之概略構成的上視圖。 Fig. 1 is a top view showing a schematic configuration of a polishing device of an embodiment.

第2圖是表示同實施形態的研磨裝置之概略構成的側視圖。 Fig. 2 is a side view showing a schematic configuration of the polishing apparatus of the same embodiment.

第3圖是表示同實施形態中形狀加工用切削工具或表面修整用工具與研磨構件接觸時的狀態的研磨裝置的部份側視圖。 Fig. 3 is a partial side view of the polishing apparatus showing the state when the cutting tool for shape processing or the tool for surface finishing is in contact with the polishing member in the same embodiment.

第4圖是表示同實施形態中形狀加工用切削工具或表面修整用工具從研磨構件分開時的狀態的研磨裝置的部份側視圖。 Fig. 4 is a partial side view of the polishing apparatus showing the state when the cutting tool for shape processing or the surface finishing tool is separated from the polishing member in the same embodiment.

第5圖是表示同實施形態之變形例的研磨裝置的概略構成的上視圖。 Fig. 5 is a top view showing a schematic configuration of a polishing device according to a modification of the same embodiment.

第6圖是表示同實施形態之其他變形例的形狀加工用切削工具的構造的側視圖。 Fig. 6 is a side view showing the structure of a cutting tool for shape processing according to another modification of the same embodiment.

第7(A)圖是表示同實施形態之其他變形例的形狀加工用切削工具的構造的側視圖。第7(B)圖是沿著C-C線的剖視圖。 Fig. 7(A) is a side view showing the structure of a cutting tool for shape processing according to another modification of the same embodiment. Fig. 7(B) is a cross-sectional view taken along line C-C.

第8圖是表示同實施形態之其他變形例的表面修整用 工具的構造的側視圖。 Fig. 8 is a diagram showing the surface modification of other modified examples of the same embodiment Side view of the construction of the tool.

第9圖是表示同實施形態之其他變形例的接觸機構的動作樣態的側視圖。 Fig. 9 is a side view showing the operation of the contact mechanism in another modification of the same embodiment.

第10圖是表示與第9圖相同之變形例的接觸機構的動作樣態的側視圖。 Fig. 10 is a side view showing the operation of the contact mechanism in the same modified example as Fig. 9.

第11圖是表示與第9圖相同之變形例的接觸機構的動作樣態的側視圖。 FIG. 11 is a side view showing the operation of the contact mechanism in the same modified example as FIG. 9.

第12圖是表示同實施形態之其他變形例的棒材的透視圖。 Fig. 12 is a perspective view showing another modification of the same embodiment.

第13圖是表示與第12圖相同之變形例的研磨構件的上視圖。 Fig. 13 is a top view showing a polishing member of the same modified example as Fig. 12.

第14圖是表示同實施形態之其他變形例的研磨構件的側視圖。 Fig. 14 is a side view showing another modified example of the same embodiment.

第15圖是表示與第14圖相同之變形例的研磨構件的上視圖。 Fig. 15 is a top view showing a polishing member of the same modified example as Fig. 14;

第16圖是表示與第14圖相同之變形例的研磨構件的側面剖視圖。 Fig. 16 is a side cross-sectional view showing a polishing member of the same modified example as Fig. 14.

第17圖是表示同實施形態之其他變形例的被研磨加工物及研磨構件的部份側視圖。 Fig. 17 is a partial side view showing a workpiece to be polished and a polishing member according to another modification of the same embodiment.

第18圖是表示同實施形態之其他變形例的被研磨加工物及研磨構件的部份側視圖。 Fig. 18 is a partial side view showing a workpiece to be polished and a polishing member according to another modification of the same embodiment.

第19圖是表示同實施形態之其他變形例的被研磨加工物及研磨構件的部份側視圖。 Fig. 19 is a partial side view showing a workpiece to be polished and a polishing member according to another modification of the same embodiment.

第20圖是表示同實施形態之其他變形例的被研磨加 工物及研磨構件的部份側視圖。 Fig. 20 is a diagram showing another modified example of the same embodiment Partial side view of works and abrasive components.

第21圖是表示同實施形態之其他變形例的被研磨加工物及研磨構件的部份側視圖。 Fig. 21 is a partial side view showing a workpiece to be polished and a polishing member according to another modification of the same embodiment.

第22圖是表示同實施形態之其他變形例的研磨構件的部份側視圖。 Fig. 22 is a partial side view showing another modified example of the same embodiment.

第23圖是表示與第22圖相同之變形例的研磨構件的部份側視圖。 Fig. 23 is a partial side view showing a polishing member of the same modified example as Fig. 22.

以下,參閱第1圖~第4圖說明使本發明之研磨裝置,及研磨構件的修整方法,形狀加工用切削工具及表面修整用工具具體化後的一實施形態。 Hereinafter, referring to FIGS. 1 to 4, an embodiment in which the polishing apparatus of the present invention, the dressing method of the polishing member, the cutting tool for shape processing, and the tool for surface dressing are embodied will be described.

如第1圖表示,該研磨裝置具備圓盤狀的研磨構件10。使用該研磨構件10的徑向外圍面,進行被研磨加工物K之被研磨部的端部KE的研磨。該端部KE是藉預先加工形成曲面形狀。被研磨加工物K的形狀是可根據其用途等為任意的形狀。 As shown in FIG. 1, this polishing apparatus includes a disc-shaped polishing member 10. Using the radial peripheral surface of the polishing member 10, the end KE of the portion to be polished of the workpiece K to be polished is polished. The end portion KE is formed into a curved shape by pre-processing. The shape of the workpiece K to be polished may be any shape according to its use or the like.

研磨構件10的材質除研磨端部KE之外可任意使用最適當材質。例如,使用樹脂作為研磨構件10的材質的場合,可使用任意的合成樹脂。可舉其例如:熱固性樹脂(酚醛樹脂、環氧樹脂、聚氨酯樹脂、聚醯亞胺等),或熱塑性樹脂(聚乙烯、聚丙烯、丙烯酸樹脂、聚醯亞胺、聚碳酸酯等)。並且也可以是織物、不織布、不織布的樹脂加工品、合成皮革或該等的複合品,研磨構件10的研 磨面的硬度是以肖氏A硬度5以上為佳。所謂肖氏A硬度5以上,即是將測量硬度的試樣具有研磨面的研磨構件10在濕度20~60%的乾燥狀態放置於室溫60分鐘以上之後,以JIS K6253為依據之橡膠硬度計(A型)所測量的研磨面的硬度為5以上。肖氏A硬度5以上時,可適當進行被研磨加工物K的表面加工,並可抑制研磨構件10的研磨面在短時間的研磨產生變形。 The material of the polishing member 10 may be any material other than the polishing end KE. For example, when resin is used as the material of the polishing member 10, any synthetic resin can be used. Examples thereof include thermosetting resins (phenol resin, epoxy resin, polyurethane resin, polyimide, etc.), or thermoplastic resins (polyethylene, polypropylene, acrylic resin, polyimide, polycarbonate, etc.). Also, it may be a woven fabric, a non-woven fabric, a non-woven resin processed product, a synthetic leather, or a composite product of these, and the grinding member 10 may be developed. The hardness of the grinding surface is preferably Shore A hardness 5 or more. The Shore A hardness of 5 or more means a rubber hardness tester based on JIS K6253 after the polishing member 10 having a polished surface of the hardness measurement sample is left at room temperature for 60 minutes or more in a dry state with a humidity of 20 to 60%. (Type A) The measured hardness of the polished surface is 5 or more. When the Shore A hardness is 5 or more, the surface of the workpiece K to be polished can be appropriately processed, and the polishing surface of the polishing member 10 can be prevented from being deformed by polishing in a short time.

再者,研磨構件10的研磨面的肖氏A硬度是以40以上為佳,並以70~95更佳,尤其以70~85最佳。 Furthermore, the Shore A hardness of the polishing surface of the polishing member 10 is preferably 40 or more, more preferably 70 to 95, and particularly 70 to 85.

又,作為研磨構件10的材質使用金屬的場合,其材質可使用鎂、鋁、鈦、鐵、鎳、鈷、銅、鋅、錳或者以該等為主成份的合金。 In addition, when a metal is used as the material of the polishing member 10, magnesium, aluminum, titanium, iron, nickel, cobalt, copper, zinc, manganese, or alloys containing these as main components can be used.

並且,作為研磨構件10的材質使用樹脂或金屬的場合,研磨構件10也可具有磨粒。使用的磨粒的種類尤其不加以限定,但可以使用氧化矽、氧化鋁、氧化鋯、氧化鈰、氧化鎂、氧化鈣、氧化鈦、氧化錳、氧化鐵、氧化鉻等的金屬氧化物粒子或碳化矽等的碳化物、其他氮化物、硼化物、鑽石等。 In addition, when resin or metal is used as the material of the polishing member 10, the polishing member 10 may have abrasive grains. The type of abrasive particles used is not particularly limited, but metal oxide particles such as silicon oxide, aluminum oxide, zirconium oxide, cerium oxide, magnesium oxide, calcium oxide, titanium oxide, manganese oxide, iron oxide, chromium oxide, etc., or Carbides such as silicon carbide, other nitrides, borides, diamonds, etc.

又,作為研磨構件10的材質使用陶瓷的場合,材質除了陶瓷器或玻璃之外,可使用矽、鋁、鋯、鈣、鋇等的氧化物、氮化物、硼化物、碳化物等或氧化鋁、氧化鋯、氧化矽、碳化矽、氮化矽、碳化硼等。 In addition, when ceramic is used as the material of the polishing member 10, in addition to ceramics or glass, oxides, nitrides, borides, carbides, etc. such as silicon, aluminum, zirconium, calcium, and barium, or alumina can be used , Zirconium oxide, silicon oxide, silicon carbide, silicon nitride, boron carbide, etc.

被研磨加工物K的材質也可使用任意的材質。例如,作為被研磨加工物K的材質使用樹脂的場合,可使用任意 的合成樹脂。可舉其例如:熱固性樹脂(酚醛樹脂、環氧樹脂、聚氨酯樹脂、聚醯亞胺等),或熱塑性樹脂(聚乙烯、聚丙烯、丙烯酸樹脂、聚醯亞胺、聚碳酸酯等)。 The material of the workpiece K to be polished may be any material. For example, when resin is used as the material of the workpiece K to be polished, any material can be used. Synthetic resin. Examples thereof include thermosetting resins (phenol resin, epoxy resin, polyurethane resin, polyimide, etc.), or thermoplastic resins (polyethylene, polypropylene, acrylic resin, polyimide, polycarbonate, etc.).

又,作為被研磨加工物K的材質使用陶瓷的場合,除了陶瓷器、玻璃或精陶瓷之外,可使用矽、鋁、鋯、鈣、鋇等的氧化物、碳化物、氮化物、硼化物等。 In addition, when using ceramics as the material of the workpiece K, in addition to ceramics, glass, or fine ceramics, oxides, carbides, nitrides, and borides such as silicon, aluminum, zirconium, calcium, and barium can be used. Wait.

另外,作為被研磨加工物K的材質使用金屬的場合,可使用鎂、鋁、鈦、鐵、鎳、鈷、銅、鋅、錳或者以該等為主成份的合金等。 In addition, when a metal is used as the material of the workpiece K, magnesium, aluminum, titanium, iron, nickel, cobalt, copper, zinc, manganese, or alloys containing these as main components can be used.

又,針對被研磨加工物K的具體用途也可為任意。例如可以滾輪、軸、容器、框體(箱體、外殼等)、框(框架等)、滾珠、纜線、裝飾品等為其用途。 In addition, the specific use for the workpiece K to be polished may be arbitrary. For example, rollers, shafts, containers, frames (boxes, casings, etc.), frames (frames, etc.), balls, cables, ornaments, etc. can be used for this purpose.

如第2圖表示,研磨構件10是可裝卸地固定在圓盤狀的機床工作台20的上面。在機床工作台20的中心部下面固定著第1馬達21的轉軸。旋轉驅動第1馬達21時,機床工作台20及研磨構件10一起旋轉。在研磨構件10及機床工作台20之下設置第1馬達21,將配置在機床工作台20上面的研磨構件10和同機床工作台20一起從下面旋轉,藉此獲得軸振顫等較低的穩定研磨構件10的旋轉,可進行更為高精度的加工。 As shown in FIG. 2, the polishing member 10 is detachably fixed to the upper surface of the disc-shaped machine table 20. The rotating shaft of the first motor 21 is fixed under the center of the machine table 20. When the first motor 21 is driven to rotate, the machine table 20 and the polishing member 10 rotate together. The first motor 21 is provided below the grinding member 10 and the machine tool table 20, and the grinding member 10 disposed on the machine tool table 20 rotates together with the machine tool table 20 from below, thereby obtaining low vibration such as shaft vibration. The rotation of the polishing member 10 is stabilized, and processing with higher accuracy can be performed.

在研磨構件10的徑向外圍面上,設置具有朝周圍方向延伸的溝槽狀之曲面形狀的研磨面11。該研磨面11的曲面是形成沿著被研磨加工物K之端部KE形狀(被研磨部的形狀)的形狀。亦即,研磨面11的曲率是與端部KE 的曲率相同。 On the radial peripheral surface of the polishing member 10, a polishing surface 11 having a groove-like curved surface shape extending in the peripheral direction is provided. The curved surface of the polishing surface 11 is formed along the end KE shape (shape of the polished portion) of the workpiece K to be polished. That is, the curvature of the grinding surface 11 is the same as the end KE Has the same curvature.

被研磨加工物K可裝卸地被保持在固定台32上。固定台32被固定在第2馬達30的轉軸31上。第2馬達30被安裝在使該第2馬達30朝著與研磨構件10的轉軸正交的方向(第1圖及第2圖表示的箭頭X方向)往返移動的馬達移動機構33上。藉此馬達移動機構33移動第2馬達時,第2馬達30及轉軸31及固定台32及被研磨加工物K是成一體朝著與研磨構件10的轉軸正交的方向移動。 藉著如上述馬達移動機構33之第2馬達30的移動,被研磨加工物K的端部KE被推壓至研磨面11。並且,對端部KE與研磨面11的接觸部,以適當的樣態供應加工液等,並以預定地轉速驅動第1馬達21及第2馬達30,藉此進行具有曲面形狀之端部KE的研磨加工。並且,在將被研磨加工物K的端部KE推壓至研磨面11時,調整推壓力以賦予預先所決定之規定的壓力。 The workpiece K to be polished is detachably held on the fixed table 32. The fixed table 32 is fixed to the rotating shaft 31 of the second motor 30. The second motor 30 is mounted on a motor moving mechanism 33 that reciprocates the second motor 30 in a direction orthogonal to the rotation axis of the polishing member 10 (arrow X direction shown in FIGS. 1 and 2 ). When the motor moving mechanism 33 moves the second motor by this, the second motor 30 and the rotating shaft 31 and the fixed table 32 and the object to be polished K move integrally in a direction orthogonal to the rotating axis of the polishing member 10. By the movement of the second motor 30 of the motor moving mechanism 33 described above, the end KE of the workpiece K is pressed against the polishing surface 11. In addition, the contact portion of the end portion KE and the polishing surface 11 is supplied with processing fluid or the like in an appropriate state, and the first motor 21 and the second motor 30 are driven at a predetermined rotation speed, thereby performing the end portion KE having a curved shape Grinding process. Then, when the end KE of the workpiece K is pressed against the polishing surface 11, the pressing force is adjusted to give a predetermined pressure determined in advance.

加工液的供應可從外部直接供應到端部KE與研磨面11的接觸部。或者在研磨構件10與第1馬達21的接觸部隔設聯軸等的加工液供應機構。並可從該加工液供應機構朝研磨構件10的內部供應加工液,將供應研磨構件10內部的加工液,透過形成在研磨構件10內部的供應道供應至上述接觸部。如上述從研磨構件10的內部朝著接觸部供應加工液,可進一步有效供應加工液。又,為了有效使用加工液,以在研磨構件10的周圍設置外罩具備提升加工液的回收效率的回收裝置更佳。 The supply of the machining liquid may be directly supplied from the outside to the contact portion of the end KE and the polishing surface 11. Alternatively, a machining fluid supply mechanism such as a coupling is provided at the contact portion between the polishing member 10 and the first motor 21. The machining liquid can be supplied from the machining liquid supply mechanism to the inside of the grinding member 10, and the machining liquid supplied to the inside of the grinding member 10 can be supplied to the contact portion through the supply channel formed inside the grinding member 10. As described above, the machining fluid is supplied from the inside of the polishing member 10 toward the contact portion, and the machining fluid can be further effectively supplied. In addition, in order to effectively use the machining liquid, it is more preferable to provide a cover around the polishing member 10 to provide a recovery device that improves the recovery efficiency of the machining liquid.

上述加工液的種類可因應被研磨加工物K或研磨構件10的材質適當地使用。具體是可使用切削用、磨削用加工液或研磨材、拋光劑、化學機械研磨用研磨液等。加工液也可含有磨粒。使用的磨粒的種類尤其不加以限定,但可以使用氧化矽、氧化鋁、氧化鋯、氧化鈰、氧化鎂、氧化鈣、氧化鈦、氧化錳、氧化鐵、氧化鉻等的金屬氧化物粒子或碳化矽等的碳化物、氮化物、硼化物、鑽石等。 The type of the above-mentioned working fluid can be appropriately used according to the material of the workpiece K to be polished or the material of the polishing member 10. Specifically, a machining liquid for grinding or grinding, an abrasive, a polishing agent, a polishing liquid for chemical mechanical polishing, and the like can be used. The machining fluid may also contain abrasive particles. The type of abrasive particles used is not particularly limited, but metal oxide particles such as silicon oxide, aluminum oxide, zirconium oxide, cerium oxide, magnesium oxide, calcium oxide, titanium oxide, manganese oxide, iron oxide, chromium oxide, etc., or Carbide, nitride, boride, diamond, etc. of silicon carbide.

例如,加工液中的磨粒的含量以1質量%以上為佳,並以2質量%以上更佳。又,加工液中的磨粒的含量以50質量%以下為佳,並以40質量%以下更佳。 For example, the content of the abrasive particles in the processing fluid is preferably 1% by mass or more, and more preferably 2% by mass or more. In addition, the content of the abrasive particles in the processing fluid is preferably 50% by mass or less, and more preferably 40% by mass or less.

加工液中的磨粒的平均次級粒徑是以0.1μm以上為佳,並以0.3μm以上更佳。隨著磨粒之平均次級粒徑的變大,可提高加工液的加工速度。 The average secondary particle size of the abrasive particles in the machining fluid is preferably 0.1 μm or more, and more preferably 0.3 μm or more. As the average secondary particle size of the abrasive particles becomes larger, the processing speed of the processing fluid can be increased.

另一方面,加工液中的磨粒的平均次級粒徑是以20μm以下為佳,並以5μm以下更佳。隨著加工液中的磨粒之平均次級粒徑的變小,可更為均勻研磨被研磨加工物K的表面。附帶地,磨粒的平均次級粒徑是例如使用掘場製作所公司製的“LA-950”等的雷射衍射/散射式粒徑分佈測量裝置來測量的體積平均粒徑等。 On the other hand, the average secondary particle size of the abrasive particles in the machining fluid is preferably 20 μm or less, and more preferably 5 μm or less. As the average secondary particle size of the abrasive particles in the processing fluid becomes smaller, the surface of the workpiece K to be polished can be more uniformly ground. Incidentally, the average secondary particle size of the abrasive particles is, for example, a volume average particle size measured using a laser diffraction/scattering type particle size distribution measuring device such as "LA-950" manufactured by Excavation Corporation.

在上述加工液中,可根據需要進一步包含PH調整劑、蝕刻劑、氧化劑、水溶性聚合體、共聚合體或其鹽、衍生物、防蝕劑、螯合劑、分散助劑、防腐劑、防黴劑的其他成份。 The above-mentioned processing liquid may further contain a pH adjuster, an etchant, an oxidizing agent, a water-soluble polymer, a copolymer or a salt thereof, a derivative, an anticorrosive agent, a chelating agent, a dispersion aid, a preservative, and an antifungal agent as needed Other ingredients.

作為上述PH調整劑的例,可使用習知的酸、鹼、或 該等的鹽。作為PH調整劑可使用的酸的例,可舉例如鹽酸、硫酸、硝酸、氫氟酸、硼酸、碳酸、次磷酸、亞磷酸及磷酸等的無機酸,或甲酸、乙酸、丙酸、丁酸、戊酸、2-甲基丁酸、n-己烷、3,3-二甲基丁酸、2-乙基丁酸、4-甲基戊酸、n-庚酸、2-甲基己酸、n-辛烷酸、2-乙基己酸、苯酸、乙醇酸、水楊酸、甘油酸、草酸、丙二酸、琥珀酸、戊二酸、已二酸、庚二酸、馬來酸、苯二酸、蘋果酸、酒石酸、檸檬酸、乳酸、二乙醇酸、2-呋喃羧酸、2,5-呋喃二羧酸、3-呋喃羧酸、2-四氫呋喃羧酸、甲氧基乙酸、甲氧苯基乙酸及苯氧基乙酸等的有機酸。 As an example of the above-mentioned pH adjuster, conventional acids, bases, or Such salts. Examples of the acid that can be used as the pH adjuster include inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, hydrofluoric acid, boric acid, carbonic acid, hypophosphorous acid, phosphorous acid, and phosphoric acid, or formic acid, acetic acid, propionic acid, butyric acid , Valeric acid, 2-methylbutyric acid, n-hexane, 3,3-dimethylbutyric acid, 2-ethylbutyric acid, 4-methylpentanoic acid, n-heptanoic acid, 2-methylhexyl Acid, n-octane acid, 2-ethylhexanoic acid, benzoic acid, glycolic acid, salicylic acid, glyceric acid, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, equine Maleic acid, phthalic acid, malic acid, tartaric acid, citric acid, lactic acid, diglycolic acid, 2-furancarboxylic acid, 2,5-furandicarboxylic acid, 3-furancarboxylic acid, 2-tetrahydrofurancarboxylic acid, methoxy Organic acids such as acetic acid, methoxyphenylacetic acid and phenoxyacetic acid.

作為PH調整劑使用的鹼的例,可舉例有脂肪族胺、芳香族的胺等的胺、氫氧化第四銨等的有機鹼、氫氧化鉀等的鹼金屬的氫氧化物、鹼土類金屬的氫氧化物及銨等。 Examples of the base used as the pH adjuster include amines such as aliphatic amines and aromatic amines, organic bases such as fourth ammonium hydroxide, hydroxides of alkali metals such as potassium hydroxide, and alkaline earth metals Hydroxides and ammonium.

又,在上述酸的取代,或與上述酸的組合,也可使用上述酸的銨鹽或鹼金屬鹽等的鹽作為PH調整劑。並且,以上的PH調整劑是使用在將加工液的pH值調整至根據被研磨加工物K之不同種類的最適當值。 In addition, in the substitution of the acid or the combination with the acid, a salt such as an ammonium salt or an alkali metal salt of the acid may be used as a pH adjuster. In addition, the above-mentioned pH adjusting agent is used to adjust the pH value of the processing liquid to the most appropriate value according to different types of the workpiece K to be polished.

作為上述蝕刻劑的例,可舉例如硝酸、硫酸、磷酸等的無機酸、乙酸、檸檬酸、酒石酸或甲磺酸等的有機酸、氫氧化鉀、氫氧化鈉等的無機鹼、氨、胺、第四級銨氫氧化物等的有機鹼等。 Examples of the etchant include inorganic acids such as nitric acid, sulfuric acid, and phosphoric acid, organic acids such as acetic acid, citric acid, tartaric acid, or methanesulfonic acid, inorganic bases such as potassium hydroxide, and sodium hydroxide, ammonia, and amine. , Organic bases such as the fourth-grade ammonium hydroxide.

作為上述氧化劑的例,可舉例如過氧化氫、過乙酸、滲碳酸鹽、過氧化脲、過氯酸鹽、過氯酸鹽等的其他、硫酸、硝酸、磷酸及其鹽等的羧酸或其鹽等。 Examples of the oxidizing agent include hydrogen peroxide, peracetic acid, percarbonate, urea peroxide, perchlorate, and perchlorate, and other carboxylic acids such as sulfuric acid, nitric acid, phosphoric acid, and salts thereof. Or its salts.

上述水溶性聚合體、共聚合體或其鹽、衍生物的例,可舉例如聚丙烯酸鹽等的聚羧酸、聚碸酸、磺化聚苯乙烯等的聚碸酸、黃原膠、褐藻酸鈉等的多醣類、羥乙基纖維素、羧甲基纖維素等的纖維素衍生物、聚乙二醇、聚乙烯醇、聚乙烯吡咯烷酮、山梨醇單硬脂酸酯、具有單一種或複數種的氧化烯單位的氧化烯系聚合體、非離子型界面活性劑、陰離子型界面活性劑等。作為非離子型界面活性劑的例,可舉例如聚氧化亞乙基烷基醚、聚氧化亞乙基烷基苯基醚、山梨醇單硬脂酸酯、具有單一種或複數種的氧化烯單位的氧化烯系聚合體等。作為陰離子型界面活性劑等,可舉例有烷基磺酸系化合物、烷基苯磺酸系化合物、烷基萘磺酸系化合物、甲基氨基乙磺酸系化合物、烷基二苯醚二磺酸系化合物、α-烯屬磺酸酯系化合物、萘磺酸縮合物、磺基琥珀酸酯系化合物等。 Examples of the water-soluble polymers, copolymers, or salts and derivatives thereof include polycarboxylic acids such as polyacrylic acid salts, polyacid acids, sulfonated polystyrene, and the like, xanthan gum, and alginic acid. Polysaccharides such as sodium, cellulose derivatives such as hydroxyethyl cellulose, carboxymethyl cellulose, polyethylene glycol, polyvinyl alcohol, polyvinylpyrrolidone, sorbitol monostearate, with a single or An alkylene oxide polymer of a plurality of alkylene oxide units, a nonionic surfactant, an anionic surfactant, etc. Examples of nonionic surfactants include polyoxyethylene alkyl ethers, polyoxyethylene alkyl phenyl ethers, sorbitol monostearate, and single or plural alkylene oxides. Units of alkylene oxide polymers, etc. Examples of the anionic surfactants include alkylsulfonic acid-based compounds, alkylbenzenesulfonic acid-based compounds, alkylnaphthalenesulfonic acid-based compounds, methylaminoethanesulfonic acid-based compounds, and alkyldiphenyl ether disulfonic acid. Acid compounds, α-olefin sulfonate compounds, naphthalenesulfonic acid condensates, sulfosuccinate compounds, and the like.

作為上述防蝕劑,可舉例如胺類、吡啶類、四苯基鏻根鹽、苯并三唑類、三唑類、四唑類、苯酸等、單環化合物、具有稠環的多環化合物、雜環化合物等。 Examples of the anticorrosive agent include amines, pyridines, tetraphenylphosphonium root salts, benzotriazoles, triazoles, tetrazoles, benzoic acid, etc., monocyclic compounds, and polycyclic compounds having condensed rings , Heterocyclic compounds, etc.

作為上述螯合劑,可舉例有葡萄糖酸等的羧酸系螯合劑、乙二胺、二亞乙基三胺、三乙烯四胺等的胺系螯合劑、乙二胺四乙酸、次氨基三乙酸、羥乙基乙二胺三乙酸、三亞乙基四胺六乙酸、二亞乙基三胺五乙酸等的多氨基多羧酸系螯合劑、2-氨基乙基磷酸、1-羥亞乙基-1,1-二磷酸鹽、氨基三(亞甲基磷酸)、乙二胺四(亞甲基磷酸)、二乙三胺五(亞甲基磷酸)、乙烷-1,1-二磷酸鹽、 乙烷-1,1,2-三磷酸鹽、甲烷羥磺酸、1-磷丁烷-2,3,4-三元羧酸等的有機磷酸系螯合劑、苯酚衍生物、1,3-二酮等。 Examples of the chelating agent include carboxylic acid-based chelating agents such as gluconic acid, amine-based chelating agents such as ethylenediamine, diethylenetriamine, and triethylenetetramine, ethylenediaminetetraacetic acid, and nitrilotriacetic acid. , Hydroxyethylethylenediamine triacetic acid, triethylenetetraminehexaacetic acid, diethylenetriaminepentaacetic acid and other polyaminopolycarboxylic acid-based chelating agents, 2-aminoethylphosphoric acid, 1-hydroxyethylene -1,1-diphosphate, aminotri (methylene phosphoric acid), ethylenediamine tetra (methylene phosphoric acid), diethylenetriamine penta (methylene phosphoric acid), ethane-1,1-diphosphate salt, Organic phosphoric acid-based chelating agents such as ethane-1,1,2-triphosphate, methane hydroxysulfonic acid, 1-phosphobutane-2,3,4-tricarboxylic acid, phenol derivatives, 1,3- Dione, etc.

作為上述分散助劑的例,可舉例如焦磷酸鹽或六偏磷酸鹽等的縮合磷酸鹽等。 Examples of the above-mentioned dispersion aids include condensed phosphates such as pyrophosphate and hexametaphosphate.

作為上述防腐劑的例,可舉例如次氯酸鈉等。 Examples of the preservatives include sodium hypochlorite.

作為上述防黴劑的例,可舉例如噁唑烷-2,5-丙二酮等的噁唑啉等。 Examples of the antifungal agent include oxazoline such as oxazolidine-2,5-propanedione.

附帶地,只要在可適當維持研磨精度的範圍內盡可能加大研磨構件10的直徑,在研磨構件10的外圍面可同時研磨複數被研磨加工物K的端部KE,因此可提高生產性。並且,盡可能加大研磨構件10的直徑時,即使研磨構件10的轉速相同,由於在外圍可獲得大的線速度,在研磨加工時即使研磨構件10的轉速比較低時仍可獲得充分的線速度。因此,例如可抑制後述之加工液的飛散等。 Incidentally, as long as the diameter of the polishing member 10 is increased as much as possible within the range in which the polishing accuracy can be appropriately maintained, the end surface KE of a plurality of workpieces K to be polished can be simultaneously polished on the outer peripheral surface of the polishing member 10, so that productivity can be improved. Moreover, when the diameter of the polishing member 10 is increased as much as possible, even if the rotation speed of the polishing member 10 is the same, since a large linear velocity can be obtained on the periphery, a sufficient line can be obtained even when the rotation speed of the polishing member 10 is relatively low during the polishing process speed. Therefore, for example, it is possible to suppress scattering of the machining fluid described later.

如先前的第1圖表示,在研磨構件10徑向的外圍面附近與研磨面11相對的位置,設有接觸機構40。 As shown in the previous FIG. 1, a contact mechanism 40 is provided at a position facing the polishing surface 11 in the vicinity of the radial outer surface of the polishing member 10.

在該接觸機構40設有工具41。該工具41為成棒狀其前端的加工部是與端部KE的形狀相同的形狀,更詳細而具有與端部KE的曲率相同的曲率。並且,工具41具有將研磨面11加工成沿著端部KE形狀之形狀的形狀加工用切削工具,或將研磨面11修整成沿著端部KE形狀之形狀的表面修整用工具的功能。再者,工具41的材質是除進行研磨面11的加工或修整外選擇最適當的材質。又,被研磨加工物K的端部KE的形狀與工具41的形狀 並無完全相同的必要,在實用上沒有問題的程度也可有彼此形狀若干的不同。 The contact mechanism 40 is provided with a tool 41. The tool 41 is rod-shaped, and the processed portion at the tip thereof has the same shape as the shape of the end portion KE, and has more detail and has the same curvature as the curvature of the end portion KE. In addition, the tool 41 has a function of a cutting tool for shape processing that grinds the polishing surface 11 into a shape along the end KE shape, or a surface trimming tool that trims the grinding surface 11 into a shape along the end KE shape. In addition, the material of the tool 41 is the most suitable material except for processing or dressing of the polished surface 11. The shape of the end KE of the workpiece K and the shape of the tool 41 There is no need to be exactly the same, and the degree of practically no problem may be slightly different from each other.

在上述接觸機構40也設置有可自由裝卸地固定工具41的保持部42,或使保持部42在與研磨構件10的轉軸正交的方向(第1圖表示的箭頭M方向)往返移動的移動機構43。再者,作為移動機構43的動力源,可使用電力或油壓等。又,接觸機構40的驅動是可藉具備CPU、RAM及ROM等的控制裝置進行自動驅動或操作研磨裝置的操作人員的開關操作等進行。 The contact mechanism 40 is also provided with a holding portion 42 that detachably fixes the tool 41, or a reciprocating movement of the holding portion 42 in a direction orthogonal to the rotation axis of the polishing member 10 (arrow M direction shown in FIG. 1) Agency 43. In addition, as the power source of the moving mechanism 43, electric power, hydraulic pressure, or the like can be used. In addition, the driving of the contact mechanism 40 can be automatically driven by a control device including a CPU, RAM, ROM, or the like, or a switch operation by an operator who operates the polishing device.

第3圖及第4圖表示接觸機構40的動作樣態。 3 and 4 show the operation of the contact mechanism 40.

如第3圖表示,藉接觸機構40使保持部42朝著研磨構件10的旋轉中心(朝箭頭M1的方向)移動時,工具41接觸於研磨面11。更詳細而言,工具41是對研磨面11進行推壓。 As shown in FIG. 3, when the holding portion 42 is moved toward the rotation center of the polishing member 10 (in the direction of arrow M1) by the contact mechanism 40, the tool 41 contacts the polishing surface 11. In more detail, the tool 41 presses the polishing surface 11.

在工具41推壓於研磨面11時,也可進行定壓加工,但以定尺寸加工(定尺寸切深加工)來進行為佳。定壓加工則主要是提升表面粗糙度所使用的加工方法,將工具41以一定的推壓力推壓於研磨面11進行研磨的加工方法。另一方面,定尺寸加工則主要是進行形狀精加工所使用的加工方法,將工具41相對於研磨面11僅以一定的尺寸切深進行磨削的加工方法。如上述的定尺寸加工是適合於形狀的精加工,因此適合於使用工具41進行研磨面11形狀的修整或加工時的加工方法,與進行定壓加工的場合比較可更精度良好地進行形狀的修整與加工。 When the tool 41 is pressed against the polishing surface 11, fixed-pressure processing may be performed, but it is preferable to perform fixed-size processing (fixed-size cutting processing). The constant pressure processing is mainly a processing method used to increase the surface roughness, and a tool 41 is pressed against the polishing surface 11 with a certain pressing force to perform polishing. On the other hand, the fixed-size machining is mainly a machining method used to perform shape finishing, and a machining method in which the tool 41 is ground with a certain depth of cut with respect to the polishing surface 11. As described above, the fixed-size processing is suitable for the finishing of the shape, so it is suitable for the method of trimming or processing the shape of the polishing surface 11 using the tool 41, and the shape can be performed with higher accuracy than when the fixed-pressure processing is performed. Dressing and processing.

再者,使用工具41進行研磨面11形狀的修整或加工時的加工方法,也可進行上述的定壓加工,此時例如可進行以被研磨加工物K的表面粗糙度之精度提升為目的的加工,主要是工具41為表面修整用工具在修整研磨面11時可進行適當的加工。 In addition, the method of trimming or machining the shape of the polishing surface 11 using the tool 41 may also perform the above-described constant pressure processing. In this case, for example, the accuracy of the surface roughness of the workpiece K may be improved. Processing is mainly because the tool 41 is a tool for surface trimming. When the polishing surface 11 is trimmed, proper processing can be performed.

如第4圖表示,藉接觸機構40使保持部42朝著從離開研磨構件10的旋轉中心離開的方向(朝箭頭M2的方向)移動時,工具41從研磨面11分開。 As shown in FIG. 4, when the holding portion 42 is moved away from the center of rotation of the polishing member 10 (in the direction of arrow M2) by the contact mechanism 40, the tool 41 is separated from the polishing surface 11.

基本上,工具41是配置在從研磨面11分開的第4圖的位置。並且,在每預定的週期,例如研磨時間的累積值超過所預定的值的場合,或操作人員進行開關操作的場合,在旋轉驅動研磨構件10的狀態下,將工具41朝著與研磨面11接觸的第3圖的位置移動。 Basically, the tool 41 is arranged at the position of FIG. 4 separated from the polishing surface 11. In addition, at every predetermined cycle, for example, when the cumulative value of the polishing time exceeds a predetermined value, or when the operator performs a switch operation, the tool 41 is directed toward the polishing surface 11 while the polishing member 10 is rotationally driven. Touch the position of Figure 3 to move.

並且,在工具41位在與研磨面11接觸的狀態時,可對工具41和研磨面11的接觸部進行水或加工液的供應。此時,可輔助工具41進行之研磨面11的加工或修整,並使得接觸部冷卻。 In addition, when the tool 41 is in contact with the polishing surface 11, water or machining fluid can be supplied to the contact portion of the tool 41 and the polishing surface 11. At this time, the processing or dressing of the grinding surface 11 by the tool 41 may be assisted, and the contact portion may be cooled.

使用之加工液的種類是因應形狀加工用切削工具或表面修整用工具的種類,或因應研磨構件的材質,可任意地選擇適當物。例如使用切削加工用工具的場合,可以使用切削加工用的加工液。使用附帶固定磨粒的加工工具的場合,可使用磨削加工用加工液。在使用硬質的刷的場合,則可以使用洗淨液等。 The type of machining fluid used depends on the type of cutting tool for shape processing or tool for surface finishing, or the material of the abrasive member, and an appropriate one can be arbitrarily selected. For example, when a tool for cutting is used, a working fluid for cutting can be used. When a processing tool with fixed abrasive particles is used, a machining fluid for grinding can be used. When using a hard brush, you can use a cleaning solution.

根據以上說明的本實施形態,可獲得以下的作用效 果。 According to the present embodiment described above, the following effects can be obtained fruit.

(1)研磨裝置具備有沿著被研磨加工物K的端部KE形狀之形狀的研磨面11的研磨構件10。因此,被研磨加工物K的端部KE即使是與平面狀不同的形狀,即曲面形狀,仍可研磨其端部KE。 (1) The polishing device includes a polishing member 10 having a polishing surface 11 having a shape along the shape of the end KE of the workpiece K to be polished. Therefore, even if the end KE of the workpiece K has a shape different from the planar shape, that is, a curved surface shape, the end KE can be polished.

(2)研磨裝置具有與端部KE的形狀相同的形狀並沿著端部KE形狀的形狀進行研磨面11的修整或加工的工具41,及使工具41接觸於研磨面11的接觸機構40。因此,如先前的第3圖表示,工具41接觸的研磨面11是藉著轉印具有和被研磨加工物K的端部KE的形狀相同曲率之工具41的形狀,修整或加工成沿著被研磨加工物K的端部KE形狀的形狀。 (2) The polishing device has a tool 41 that has the same shape as the shape of the end portion KE and performs dressing or processing of the polishing surface 11 along the shape of the end portion KE, and a contact mechanism 40 that causes the tool 41 to contact the polishing surface 11. Therefore, as shown in the previous FIG. 3, the polishing surface 11 contacted by the tool 41 is trimmed or processed along the surface by transferring the shape of the tool 41 having the same curvature as the shape of the end KE of the workpiece K to be polished The shape of the end KE shape of the polished workpiece K.

如上述研磨構件10的研磨面11雖是成沿著被研磨加工物K之端部KE形狀的形狀,但是該研磨面11的形狀與工具41的形狀為一方呈凹陷而另一方成凸出的關係。因此,可容易進行與平面狀不同的形狀,即曲面形狀的研磨面11的形狀加工或形狀修整。 As described above, although the polishing surface 11 of the polishing member 10 is shaped along the end KE of the workpiece K, the shape of the polishing surface 11 and the shape of the tool 41 are concave on one side and convex on the other relationship. Therefore, it is possible to easily perform the shape processing or the shape modification of the polishing surface 11 having a shape different from the planar shape, that is, the curved surface.

(3)藉接觸機構40之工具41對研磨面11的接觸是以每預定周期進行。因此,在每預定周期進行研磨面11的修整,因此可長期間維持著研磨被研磨加工物K之端部KE時的研磨精度。 (3) The tool 41 of the contact mechanism 40 contacts the polishing surface 11 every predetermined cycle. Therefore, since the polishing surface 11 is trimmed every predetermined period, the polishing accuracy when polishing the end KE of the workpiece K to be polished can be maintained for a long period of time.

並且,上述實施形態也可如以下變更來實施。 In addition, the above-mentioned embodiment may be implemented as follows.

‧藉上述工具41進行研磨面11的修整,也可以在研磨被研磨加工物K的期間進行,或者使用被研磨加工物K 的研磨中的一部份時間或全部的時間與研磨同時進行。 ‧The grinding of the polished surface 11 by the tool 41 may be performed while the workpiece K is being polished, or the workpiece K may be used Part of or all of the time in the grinding is performed simultaneously with the grinding.

‧上述形狀加工用切削工具只要是可適當進行研磨構件之研磨面的加工,具有比上述研磨構件的研磨面硬度高的加工部即可不加以限定,具體例為可使用顆粒或電塗砂輪等附帶固定磨粒的加工工具、端銑刀或刀頭等的切削加工用工具。 ‧The cutting tool for shape processing is not limited as long as it can properly process the polishing surface of the polishing member, and has a processed portion with a hardness higher than that of the polishing surface of the polishing member. Specific examples include the use of granules or electro-coated grinding wheels. Cutting tools such as fixed abrasive grain processing tools, end mills or cutter heads.

並且,使用上述電塗砂輪的場合,在切削研磨構件10的研磨面11時會有磨粒脫落而損傷被研磨加工物K表面的場合。如此的傷痕在以研磨構件10進行被研磨加工物K的研磨中,尤其在以電塗砂輪合併進行研磨面11的磨削時必須加以注意。為此,以硬質層進行電塗砂輪之表面的塗層處理,例如藉DLC(類鑽石碳)進行塗層等,抑制上述磨粒的脫落,可藉此抑制如上述傷痕的產生。 In addition, when using the above-mentioned electro-coated grinding wheel, when the polishing surface 11 of the polishing member 10 is cut, abrasive particles may fall off and the surface of the workpiece K to be polished may be damaged. Such scratches must be paid attention to when the workpiece K is polished by the polishing member 10, and especially when the electro-coated grinding wheel is used to grind the polishing surface 11. To this end, coating the surface of the electro-coated grinding wheel with a hard layer, for example, coating by DLC (diamond-like carbon), etc., suppresses the shedding of the above-mentioned abrasive particles, thereby suppressing the occurrence of the above-mentioned scratches.

‧上述表面修整用工具是可使研磨構件的表面平整,或除去附著在表面的污垢或固著物等的工具,具體例為可使用附帶上述固定磨粒的加工工具或硬質的刷等。 ‧The above-mentioned tool for surface finishing is a tool that can smooth the surface of the polishing member, or remove dirt or fixed substances adhering to the surface. Specific examples include the use of a processing tool with the above-mentioned fixed abrasive or a hard brush.

‧如第5圖表示,作為具有形狀加工用切削工具或表面修整用工具的功能的工具41,也可使用具有和被研磨加工物K的端部KE的形狀相同的形狀,在外圍具備將研磨面11修整成沿端部KE形狀之形狀的刀刃的旋轉式刀具。 ‧As shown in FIG. 5, as the tool 41 having the function of a cutting tool for shape processing or a tool for surface finishing, it is also possible to use the same shape as the shape of the end KE of the workpiece K to be polished, with The surface 11 is a rotary cutter with a cutting edge shaped along the shape of the end KE.

在第5圖表示該變形例中的研磨裝置的概略構成。如該第5圖表示,在研磨構件10的徑向的外圍面附近與研磨面11相對的位置設置接觸機構60。在該接觸機構60 設有如上述的刀具50,及使刀具50的轉軸朝著與研磨構件10的轉軸正交的方向(第5圖表示的箭頭M方向)往返移動的移動機構。並藉著接觸機構60,使刀具50朝著(朝箭頭M1的方向)研磨構件10的旋轉中心移動,將刀具50的刀刃如第5圖中兩點虛線表示接觸於研磨面11。另一方面,藉接觸機構60,使刀具50朝著從研磨構件10的旋轉中心離開的方向(朝箭頭M2的方向)移動時,刀具50的刀刃從研磨面11分開。即使是如上述的變形例,由於研磨面11的形狀與刀具50的刀刃形狀為一方呈凹陷而另一方成凸出的關係,因此仍可容易進行與平面狀不同的形狀,即成為曲面形狀之研磨面11的形狀修整。 FIG. 5 shows a schematic configuration of the polishing device in this modification. As shown in FIG. 5, the contact mechanism 60 is provided at a position facing the polishing surface 11 near the radial outer surface of the polishing member 10. In the contact mechanism 60 A cutter 50 as described above is provided, and a moving mechanism that reciprocates the rotation axis of the cutter 50 in a direction orthogonal to the rotation axis of the polishing member 10 (arrow M direction shown in FIG. 5). The contact mechanism 60 moves the cutter 50 toward (in the direction of arrow M1) the center of rotation of the polishing member 10, and the blade of the cutter 50 contacts the polishing surface 11 as indicated by the two dotted lines in FIG. 5. On the other hand, when the cutter 50 is moved away from the rotation center of the polishing member 10 (in the direction of arrow M2) by the contact mechanism 60, the blade of the cutter 50 is separated from the polishing surface 11. Even in the above-described modification, since the shape of the polishing surface 11 and the shape of the blade of the cutter 50 are concave on one side and convex on the other, it is still possible to easily perform a shape different from a planar shape, that is, a curved shape The shape of the polishing surface 11 is trimmed.

‧作為具有形狀加工用切削工具或表面修整用工具之功能的工具,也可使用與上述工具41不同的工具。在以下說明如上述的數種變形例。 ‧A tool different from the above-mentioned tool 41 can also be used as a tool having the function of a cutting tool for shape processing or a tool for surface finishing. Several modifications as described above will be described below.

第6圖表示的圓筒狀的形狀加工用切削工具200是在周圍方向隔著間隔設有複數個朝其軸向延伸的切削刃210。形狀加工用切削工具200的前端部210a之切削刃210的外型形狀具有與端部KE的曲率相同的曲率。在使用此形狀加工用切削工具200取代工具41的場合,將形狀加工用切削工具200一邊旋轉並使得前端部210a接觸於研磨面11,可藉此將研磨構件10的研磨面11加工成沿著端部KE形狀的形狀。 The cylindrical shape cutting tool 200 shown in FIG. 6 is provided with a plurality of cutting edges 210 extending in the axial direction at intervals in the circumferential direction. The outer shape of the cutting edge 210 of the front end portion 210a of the cutting tool 200 for shape processing has the same curvature as the curvature of the end portion KE. When the cutting tool 200 for shape processing is used instead of the tool 41, by rotating the cutting tool 200 for shape processing while bringing the tip portion 210a into contact with the polishing surface 11, the polishing surface 11 of the polishing member 10 can be processed along The shape of the end KE shape.

第7(A)圖及第7(B)圖表示之其他的形狀加工用 切削工具300是形成平板狀,其前端部310形成具有和端部KE的曲率相同曲率之圓形的切削刃。又如第7(B)圖表示,形狀加工用切削工具300的厚度是朝向前端部310逐漸變薄。將如此的形狀加工用切削工具300取代工具41使用的場合,也可藉著將形狀加工用切削工具300一邊旋轉並使得前端部310與研磨面11接觸,將研磨構件10的研磨面11加工成沿著端部KE形狀的形狀。再者,也可組合複數以上之平板狀的形狀加工用切削工具300來使用,例如組合使複數的形狀加工用切削工具300以60°或90°的一定角度彼此交叉。 For other shapes shown in Figure 7(A) and Figure 7(B) The cutting tool 300 is formed into a flat plate shape, and its front end portion 310 forms a circular cutting edge having the same curvature as the curvature of the end portion KE. As also shown in FIG. 7(B), the thickness of the cutting tool 300 for shape processing gradually becomes thinner toward the tip portion 310. When such a cutting tool 300 for shape processing is used instead of the tool 41, the polishing surface 11 of the polishing member 10 may be processed by rotating the cutting tool 300 for shape processing while bringing the tip portion 310 into contact with the polishing surface 11 A shape along the end KE shape. Furthermore, a plurality of flat-shaped cutting tools 300 for shape processing may be used in combination, for example, a plurality of cutting tools for shape processing 300 may be combined to cross each other at a certain angle of 60° or 90°.

第8圖表示其他的圓筒狀的表面修切削工具400,在其前端部具備硬質的刷410。該刷410前端形狀的整體是形成半球形狀,其半球形狀的曲率具有與端部KE的曲率大致相同的曲率。在使用以上的表面修切削工具400取代工具41的場合,將表面修切削工具400一邊旋轉使得刷410接觸於研磨面11,可藉此將研磨構件10的研磨面11修整成沿著端部KE形狀的形狀。 FIG. 8 shows another cylindrical surface trimming cutting tool 400, which is provided with a hard brush 410 at its tip portion. The entire shape of the tip of the brush 410 is formed in a hemispherical shape, and the curvature of the hemispherical shape has substantially the same curvature as the curvature of the end KE. When the above surface trimming cutting tool 400 is used instead of the tool 41, the surface trimming cutting tool 400 is rotated so that the brush 410 contacts the polishing surface 11, whereby the polishing surface 11 of the polishing member 10 can be trimmed along the end KE Shape shape.

‧上述實施形態是將預先設有曲面狀的研磨面11的研磨構件10固定在機床工作台20。但是,研磨面11的形狀形成是可使用形狀加工用切削工具來進行,例如也可準備不具有沿著被研磨部形狀的形狀的面的研磨構件,使用形狀加工用切削工具形成沿著被研磨加工物之被研磨部形狀的形狀的研磨面。作為此一例如第9圖~第11圖表示,也可將具有與被研磨加工物K的端部KE形狀不同形 狀的研磨構件10A的外圍面與工具41接觸,形成沿著端部KE形狀的形狀的研磨面11。 ‧ In the above embodiment, the polishing member 10 provided with the curved polishing surface 11 is fixed to the machine table 20 in advance. However, the shape formation of the polishing surface 11 can be performed using a cutting tool for shape processing, for example, a polishing member having no surface along the shape of the portion to be polished can be prepared, and the cutting tool for shape processing can be used to form The polishing surface of the shape of the part to be polished of the workpiece. For example, as shown in FIGS. 9 to 11, the shape of the end KE having the workpiece K to be polished may be different from the shape The peripheral surface of the polishing member 10A in the shape is in contact with the tool 41 to form a polishing surface 11 having a shape along the shape of the end KE.

更詳細而言,如第9圖表示,將徑向的外圍面成為平面狀的研磨構件10A固定在機床工作台20。並且,如第10圖表示,藉著接觸構件40將保持部42朝向(朝箭頭M1的方向)研磨構件10A的旋轉中心的移動,使工具41接觸於研磨構件10A的徑向的外圍面。更詳細而言,將工具41推壓於研磨構件10A的徑向的外圍面。藉此工具41的推壓,在平面狀的研磨構件10A的外圍面形成有上述研磨面11。並且在上述研磨面11的形成時,同樣以供應上述的加工液為佳。並且,在形成研磨面11之後,如第11圖表示,藉著接觸機構40,將保持部42朝著從研磨構件10A的旋轉中心離開的方向(朝箭頭M2的方向)移動,使工具41從研磨面11分開。 In more detail, as shown in FIG. 9, the polishing member 10A whose radial outer surface is planar is fixed to the machine table 20. Then, as shown in FIG. 10, the holding member 42 is moved toward the rotation center of the polishing member 10A (in the direction of arrow M1) by the contact member 40, so that the tool 41 is brought into contact with the radial outer surface of the polishing member 10A. In more detail, the tool 41 is pressed against the radial outer peripheral surface of the polishing member 10A. By the pressing of the tool 41, the polishing surface 11 is formed on the outer peripheral surface of the planar polishing member 10A. In the formation of the polishing surface 11, it is also preferable to supply the above-mentioned machining liquid. After the polishing surface 11 is formed, as shown in FIG. 11, by the contact mechanism 40, the holding portion 42 is moved away from the center of rotation of the polishing member 10A (in the direction of arrow M2 ), and the tool 41 is moved from The grinding surface 11 is separated.

藉此一變形例,沿著被研磨加工物K的端部KE形狀的形狀之研磨面11的形成是在研磨裝置上進行。因此,與將預先形成有被研磨加工物K的端部KE形狀的形狀之研磨面11的研磨構件10安裝在研磨裝置的場合比較,可以高精度形成研磨面11的形狀。並可節省事先準備形成有研磨面11之研磨構件10的時間與勞力。 With this modification, the formation of the polishing surface 11 along the shape of the end KE of the workpiece K is performed on the polishing device. Therefore, compared with the case where the polishing member 10 in which the polishing surface 11 of the shape of the end KE of the workpiece K is formed in advance is attached to the polishing device, the shape of the polishing surface 11 can be formed with high accuracy. It can save time and labor for preparing the polishing member 10 with the polishing surface 11 formed in advance.

‧如第12圖表示,在直線狀的棒材70長方向的一側面設置具有和上述研磨面11相同形狀的研磨面71。並且,作為棒材70的材質可選擇任意的材質。例如彎曲加工容易的材質,例如以使用合成樹脂或黃銅等為佳。 ‧ As shown in FIG. 12, a polishing surface 71 having the same shape as the polishing surface 11 is provided on one side surface of the linear rod 70 in the longitudinal direction. Moreover, any material can be selected as the material of the rod 70. For example, a material that is easy to bend is preferably made of synthetic resin or brass.

並且,如第13圖表示,在圓盤80的周圍捲繞棒材70使研磨面71朝向外側。以適當的方法將已捲繞的棒材70固定於圓盤80,藉此製作以棒材70及圓盤80所構成的研磨構件。以上的樣態,也可形成與上述研磨構件10相同的研磨構件。再者,圓盤80的材質也可任意選擇。例如,雖可使用金屬或陶瓷等,但盡可能以輕量的材質為佳。 Further, as shown in FIG. 13, the rod 70 is wound around the disc 80 so that the polishing surface 71 faces outward. The wound rod 70 is fixed to the disc 80 by an appropriate method, thereby producing an abrasive member composed of the rod 70 and the disc 80. In the above aspect, the same polishing member as the above-described polishing member 10 may be formed. Furthermore, the material of the disc 80 can also be arbitrarily selected. For example, although metal or ceramics can be used, it is preferable to use a lightweight material as much as possible.

附帶地,先前第12圖及第13圖表示的變形例是在棒材70設置研磨面71之後,將同棒材70捲繞於圓盤80,但是在其取代上,例如也可在直線狀的棒材70捲繞於圓盤80之後,將研磨面71設置在同棒材70上。 Incidentally, the modification shown in the previous FIGS. 12 and 13 is that after the rod 70 is provided with the grinding surface 71, the same rod 70 is wound on the disc 80, but instead of this, for example, it may be linear After the rod 70 is wound on the disc 80, the grinding surface 71 is set on the same rod 70.

根據以上的變形例,例如在研磨面71磨損的場合等,僅更換設有同研磨面71的棒材70即可,與如上述的研磨構件10比較可抑制更換成本等。並在進行被研磨部的形狀為種種不同的被研磨加工物K研磨的場合,藉棒材70的更換,可容易因應如上述被研磨部之形狀的不同。 According to the above modification, for example, when the polishing surface 71 is worn out, only the bar 70 provided with the same polishing surface 71 may be replaced, and the replacement cost can be suppressed compared to the polishing member 10 as described above. In addition, when the shape of the portion to be polished is polished by various workpieces K to be polished, the replacement of the bar 70 can easily cope with the difference in the shape of the portion to be polished as described above.

‧如第14圖表示,也可以在圓盤狀的研磨構件90的徑向外圍面,設置與朝周圍方向延伸的上述研磨面11相同的曲面91,在其曲面91上形成貼附其他構件的塗層而設置研磨面。例如第15圖及第16圖表示,也可在形成於研磨構件90之徑向外圍面的曲面91,貼附成為研磨面的帶狀的不織布100。此時,更換不織布100,即可以使研磨面恢復到新品的狀態。因此,例如研磨構件90的材質以採用比較耐久性高的材質,例如不銹鋼等的金屬為佳。 但是,研磨構件90的材質為可任意選擇。例如也可以金屬製作研磨構件90,在曲面91施以成為研磨面的樹脂塗層。並且,也可以陶瓷製作研磨構件90,在曲面91施以成為研磨面的樹脂塗層。 ‧ As shown in FIG. 14, the radial outer surface of the disc-shaped polishing member 90 may be provided with the same curved surface 91 as the above-mentioned polishing surface 11 extending in the peripheral direction, and a surface to which other members are attached may be formed on the curved surface 91 Abrasive surface is provided for coating. For example, FIG. 15 and FIG. 16 show that the band-shaped nonwoven fabric 100 that becomes the polishing surface may be attached to the curved surface 91 formed on the radially outer surface of the polishing member 90. At this time, replacing the nonwoven fabric 100 can restore the polished surface to a new state. Therefore, for example, the material of the polishing member 90 is preferably a relatively durable material, such as a metal such as stainless steel. However, the material of the polishing member 90 can be arbitrarily selected. For example, the polishing member 90 may be made of metal, and a resin coating that becomes the polishing surface may be applied to the curved surface 91. Furthermore, the polishing member 90 may be made of ceramics, and a resin coating to be a polishing surface may be applied to the curved surface 91.

‧雖是在機床工作台20的上面設置研磨構件10,但也可省略機床工作台20,在研磨構件10的中心直接固定第1馬達21的轉軸。 ‧Although the polishing member 10 is provided on the upper surface of the machine tool table 20, the machine tool table 20 may be omitted, and the rotating shaft of the first motor 21 may be directly fixed at the center of the polishing member 10.

‧雖是藉馬達移動機構33的驅動將端部KE推壓於研磨面11,但也可另外設置將端部KE推壓於研磨面11的機構。 ‧Although the end KE is pressed against the polishing surface 11 by driving the motor moving mechanism 33, a mechanism for pressing the end KE against the polishing surface 11 may be provided separately.

‧雖是旋轉研磨構件10,但也可使其成直線狀往返移動。 ‧Although the rotary grinding member 10 is rotated, it can also be moved back and forth in a straight line.

‧雖是進行被研磨加工物K之端部KE的研磨,但被研磨部不限於上述的端部,也可以是其他的部位。 ‧Although the end KE of the object K to be polished is polished, the part to be polished is not limited to the above-mentioned end, but may be other parts.

‧被研磨加工物K的端部KE的形狀也可以是曲面以外的非平面狀,例如也可以是如第17圖表示的三角形或如第18圖表示的大致三角形狀而頂部為帶圓形的形狀。又,被研磨加工物K的端部KE的形狀也可以是如第19圖表示的階梯形狀或如第20圖表示的大致階梯形狀而頂部為帶圓形的形狀。又,如第21圖表示,端部KE也可以呈朝著被研磨加工物K內側凹陷的曲面形狀。並且,也可以複數曲率所構成的曲面或一部份具備直線部的曲面。該等的變形例中,使研磨構件10的研磨面11成為沿著被研磨加工物K的端部KE形狀(被研磨部的形狀)的方 式,可進行端部KE的研磨。 ‧The shape of the end KE of the workpiece K may be a non-planar shape other than a curved surface, for example, it may be a triangle as shown in FIG. 17 or a substantially triangular shape as shown in FIG. 18 with a rounded top shape. In addition, the shape of the end portion KE of the workpiece K may be a stepped shape as shown in FIG. 19 or a substantially stepped shape as shown in FIG. 20 and the top portion may be rounded. Also, as shown in FIG. 21, the end portion KE may have a curved shape that is recessed toward the inside of the workpiece K to be polished. Furthermore, a curved surface formed by a plurality of curvatures or a curved surface partially including a straight portion may be used. In these modified examples, the polishing surface 11 of the polishing member 10 has a shape along the end KE shape (shape of the polished portion) of the workpiece K to be polished It can grind the end KE.

‧如先前第2圖等的表示,上述實施形態是相對於研磨面11將被研磨加工物K朝著與研磨構件10的轉軸正交的方向(第2圖等表示的箭頭X方向)推壓,藉此進行被研磨加工物K之端部KE的研磨。此時,針對如上述所推壓的端部KE可進行研磨之被研磨加工物K的上面及下面,即相對於研磨構件10的轉軸正交的平面成平行之被研磨加工物K的兩面,在研磨時並未施予多餘的壓力,而會有不能充分進行研磨加工之虞。 ‧ As shown in the previous FIG. 2 and the like, the above-mentioned embodiment pushes the workpiece K to be polished toward the polishing surface 11 in the direction orthogonal to the rotation axis of the polishing member 10 (arrow X direction shown in FIG. 2 etc.) As a result, the end KE of the workpiece K is polished. At this time, with respect to the upper and lower surfaces of the object to be polished K that can be polished at the end KE pressed as described above, that is, both surfaces of the object to be polished K that are parallel to the plane orthogonal to the rotation axis of the polishing member 10, No excessive pressure is applied during polishing, and there is a possibility that the polishing process cannot be sufficiently performed.

為此,首先,以具有如樹脂等具有某程度的彈性而可彈性變形的材質形成研磨構件10。並且,如第22圖表示,平行於研磨構件10的轉軸的方向(第22圖表示的箭頭Y方向)的研磨面11的寬度H1只比加工前之被研磨加工物K的厚度T1(即被研磨加工物K的上面KU及下面KD間的長度)小預定量α。如上述,以彈性體形成研磨構件10,將研磨面11的形狀形成比被研磨加工物K的形狀小的變形例,可獲得以下的效果。 For this reason, first, the polishing member 10 is formed of a material having a certain degree of elasticity such as resin and elastically deformable. Moreover, as shown in FIG. 22, the width H1 of the polishing surface 11 parallel to the direction of the rotation axis of the polishing member 10 (arrow Y direction shown in FIG. 22) is only greater than the thickness T1 (i.e. The length between the upper KU and the lower KD of the polishing product K is smaller than the predetermined amount α. As described above, the polishing member 10 is formed of an elastic body, and the shape of the polishing surface 11 is formed to be smaller than the shape of the workpiece K to be polished, and the following effects can be obtained.

如第23圖表示,根據此變形例,將被研磨加工物K推壓於研磨構件10進行研磨時,對被研磨加工物K的上面KU及下面KD,賦予僅上述預定量α之彈性變形的來自研磨構件10的推壓力F。因此,被研磨加工物K的研磨時,不僅是端部KE,並可獲得同時研磨上面KU及下面KD的效果。並且,上述預定量α越大,研磨被研磨加工物K時的研磨構件10的彈性變形量會變得越大,因此 藉同預定量α的最適當化,可使得賦予被研磨加工物K的上面KU及下面KD的推壓力F最適當化。 As shown in FIG. 23, according to this modification, when the object K to be polished is pressed against the polishing member 10 for polishing, the upper surface KU and the lower surface KD of the object K to be polished are given elastic deformation of only the above-mentioned predetermined amount α The pressing force F from the grinding member 10. Therefore, when polishing the workpiece K, not only the end KE, but also the effect of simultaneously grinding the upper KU and the lower KD. Moreover, the larger the above-mentioned predetermined amount α, the larger the amount of elastic deformation of the polishing member 10 when polishing the workpiece K is polished. Therefore, By optimizing the predetermined amount α, the pressing force F given to the upper KU and lower KD of the workpiece K can be optimized.

並且,將被研磨加工物K的端部KE推壓於研磨面11的力和賦予被研磨加工物K的上面KU及下面KD的力F,根據需要進行調整,可藉此適當進行被研磨加工物K的加工。 In addition, the force that pushes the end KE of the workpiece K against the polishing surface 11 and the force F given to the upper surface KU and the lower surface KD of the workpiece K can be adjusted as necessary, thereby enabling proper polishing Processing of object K.

10‧‧‧研磨構件 10‧‧‧Abrasive components

40‧‧‧接觸機構 40‧‧‧ Contact organization

41‧‧‧工具 41‧‧‧Tools

42‧‧‧保持部 42‧‧‧Maintaining Department

43‧‧‧移動機構 43‧‧‧Moving mechanism

K‧‧‧被研磨加工物 K‧‧‧Work to be ground

KE‧‧‧(被研磨加工物的)端部 KE‧‧‧(to be processed) end

Claims (12)

一種研磨裝置,其特徵為,具備:具有沿著被研磨加工物的被研磨部形狀的曲面狀之研磨面的研磨構件;具有與上述被研磨部的形狀相同的形狀,將上述研磨面加工成沿著上述被研磨部形狀的曲面狀的形狀加工用切削工具或將上述研磨面修整成沿著上述被研磨部形狀的曲面狀的表面修整用工具;及使上述形狀加工用切削工具或表面修整用工具接觸上述研磨面的接觸機構;藉由將能夠更換的棒材捲繞於圓盤而構成上述研磨構件。 A polishing device is characterized by comprising: a polishing member having a curved polishing surface along the shape of the portion to be polished; and having the same shape as the portion to be polished, and processing the polishing surface into A curved shape machining tool along the shape of the to-be-polished portion or a surface trimming tool for trimming the polished surface into a curved shape along the shape of the to-be-polished portion; and the cutting tool or surface trimming for the shape processing A contact mechanism for contacting the grinding surface with a tool; the winding member is formed by winding a replaceable bar material on a disc. 如申請專利範圍第1項記載的研磨裝置,其中,上述曲面狀之研磨面,為複數曲率所構成的曲面或一部份具備直線部的曲面。 According to the polishing device described in item 1 of the patent application range, the above-mentioned curved polishing surface is a curved surface composed of a plurality of curvatures or a curved surface partially including a straight portion. 如申請專利範圍第1項記載的研磨裝置,其中,藉著接觸機構以各預定周期對上述研磨面進行上述形狀加工用切削工具或表面修整用工具的接觸。 The polishing apparatus as described in item 1 of the patent application scope, wherein the above-mentioned polished surface is brought into contact with the cutting tool for shape processing or the tool for surface finishing at each predetermined cycle by a contact mechanism. 如申請專利範圍第1項記載的研磨裝置,其中,上述研磨構件的研磨面,是將藉由將能夠更換的棒材捲繞於圓盤而構成且具有與上述被研磨部的形狀不同形狀之研磨構件表面接觸於上述形狀加工用切削工具或表面修整用工具,藉此形成沿著上述被研磨部形狀的曲面狀。 The polishing apparatus as described in item 1 of the patent application range, wherein the polishing surface of the polishing member is formed by winding a replaceable bar material on a disc and has a shape different from that of the portion to be polished The surface of the polishing member is in contact with the cutting tool for shape processing or the tool for surface finishing, thereby forming a curved shape along the shape of the portion to be polished. 如申請專利範圍第1項記載的研磨裝置,其中, 具備從下方旋轉上述研磨構件的馬達。 The polishing device described in item 1 of the patent application scope, wherein, A motor that rotates the polishing member from below is provided. 如申請專利範圍第1項記載的研磨裝置,其中,具備以將上述研磨構件載放於上面的狀態與上述研磨構件成一體旋轉的機床工作台。 The polishing apparatus as described in item 1 of the patent application range includes a machine tool table that rotates integrally with the polishing member in a state where the polishing member is placed on the upper surface. 一種形狀加工用切削工具,其特徵為:如申請專利範圍第1~6項中任一項記載之研磨裝置所使用的構件具有與上述被研磨部的形狀相同的形狀,將藉由將能夠更換的棒材捲繞於圓盤而構成的上述研磨構件的上述研磨面加工成沿著上述被研磨部的形狀的曲面狀。 A cutting tool for shape processing, characterized in that the member used in the polishing device described in any one of claims 1 to 6 has the same shape as the above-mentioned portion to be polished, and will be replaced by The polishing surface of the polishing member formed by winding a rod material around a disc is processed into a curved shape along the shape of the portion to be polished. 一種表面修整用工具,其特徵為:如申請專利範圍第1~6項中任一項記載之研磨裝置所使用的構件具有與上述被研磨部的形狀相同的形狀,將藉由將能夠更換的棒材捲繞於圓盤而構成的上述研磨構件的上述研磨面修整成沿著上述被研磨部的形狀的曲面狀。 A tool for surface finishing, characterized in that the member used in the polishing device described in any one of claims 1 to 6 has the same shape as the above-mentioned polished part, and will be replaced by the The polishing surface of the polishing member formed by winding a bar material on a disk is trimmed into a curved shape along the shape of the portion to be polished. 一種研磨構件的加工方法,其特徵為:將具有與被研磨部的形狀相同的形狀且將研磨面加工成沿著上述被研磨部形狀的曲面狀的形狀加工用切削工具,接觸於藉由將能夠更換的棒材捲繞於圓盤而構成且具有沿著被研磨加工物的被研磨部形狀的曲面狀之研磨面的研磨構件的上述研磨面。 A method of processing a polishing member, characterized in that a cutting tool for shape processing having the same shape as the shape of the portion to be polished and processing the polishing surface into a curved shape along the shape of the portion to be polished is contacted by The above-mentioned polishing surface of the polishing member having a curved polishing surface along the shape of the portion to be polished of the workpiece to be polished is formed by a replaceable bar material wound around a disc. 如申請專利範圍第9項記載的研磨構件的加工方法,其中,上述曲面狀之研磨面,為複數曲率所構成的曲面或一部份具備直線部的曲面。 The method for processing a polishing member as described in item 9 of the patent application range, wherein the curved polishing surface is a curved surface composed of a plurality of curvatures or a curved surface partially including a straight portion. 一種研磨構件的修整方法,其特徵為:將具有與 被研磨部的形狀相同的形狀且將研磨面修整成沿著上述被研磨部的形狀的曲面狀的表面修整用工具,接觸於藉由將能夠更換的棒材捲繞於圓盤而構成且具有沿著被研磨加工物的上述被研磨部的形狀的曲面狀之研磨面的研磨構件的上述研磨面。 A method for dressing abrasive components, characterized by the following: The surface to be polished portion has the same shape and the polishing surface is trimmed to a curved surface along the shape of the surface to be polished. The surface trimming tool is formed by winding a replaceable rod into a disc and having The polishing surface of the polishing member along the curved polishing surface of the shape of the polished portion of the workpiece. 如申請專利範圍第11項記載的研磨構件的修整方法,其中,上述曲面狀之研磨面,為複數曲率所構成的曲面或一部份具備直線部的曲面。 The polishing method for polishing members as described in item 11 of the patent application range, wherein the curved polishing surface is a curved surface composed of a plurality of curvatures or a curved surface partially including a straight portion.
TW103134422A 2013-10-04 2014-10-02 Polishing apparatus, method for machining polishing member, method for modifying polishing member, cutting tool for machining shape, and tool for modifying surface TWI689378B (en)

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