WO2015039603A1 - X射线装置以及具有该x射线装置的ct设备 - Google Patents
X射线装置以及具有该x射线装置的ct设备 Download PDFInfo
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- WO2015039603A1 WO2015039603A1 PCT/CN2014/086743 CN2014086743W WO2015039603A1 WO 2015039603 A1 WO2015039603 A1 WO 2015039603A1 CN 2014086743 W CN2014086743 W CN 2014086743W WO 2015039603 A1 WO2015039603 A1 WO 2015039603A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/064—Details of the emitter, e.g. material or structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/066—Details of electron optical components, e.g. cathode cups
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/08—Electrical details
- H05G1/26—Measuring, controlling or protecting
- H05G1/30—Controlling
- H05G1/32—Supply voltage of the X-ray apparatus or tube
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/06—Cathode assembly
- H01J2235/068—Multi-cathode assembly
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/086—Target geometry
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
- H01J35/13—Active cooling, e.g. fluid flow, heat pipes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
Definitions
- the present invention relates to a device for generating distributed X-rays, and more particularly to arranging a plurality of independent hot cathode electron-emitting units in an external manner in an X-ray source device and using gate control or cathode control to generate a transformation in a predetermined order An X-ray external hot cathode distributed X-ray device at a focal position and a CT device having the device.
- an X-ray source refers to an apparatus for generating X-rays, and is usually composed of an X-ray tube, a power supply and control system, an auxiliary device such as cooling and shielding, and the like, and the core thereof is an X-ray tube.
- X-ray tubes are typically constructed of a cathode, anode, glass or ceramic housing.
- the cathode is a direct-heating spiral tungsten wire. During operation, it is heated to a high temperature state by electric current to generate a beam of heat-emitting electron beams.
- the cathode is surrounded by a front-end slotted metal cover, and the metal cover focuses the electrons.
- the anode is a tungsten target embedded in the end face of the copper block.
- a high voltage is applied between the anode and the cathode, and electrons generated by the cathode accelerate and move toward the anode under the action of an electric field, and strike the target surface to generate X-rays.
- X-rays have a wide range of applications in industrial non-destructive testing, safety inspection, medical diagnosis and treatment.
- an X-ray fluoroscopic imaging apparatus made by utilizing the high penetration ability of X-rays plays an important role in all aspects of people's daily life.
- a film-type planar fluoroscopy imaging device Early in this type of equipment was a film-type planar fluoroscopy imaging device.
- the current advanced technology is a digital, multi-view and high-resolution stereo imaging device, such as CT (computed tomography), which can obtain high-definition three-dimensional graphics or slices.
- CT computed tomography
- the X-ray source and the detector need to move on the slip ring.
- the movement speed of the X-ray source and the detector is usually very high, resulting in a decrease in the reliability and stability of the whole device.
- the inspection speed of CT is also limited. Therefore, there is a need in the CT apparatus for an X-ray source that can produce multiple viewing angles without moving the position.
- some techniques closely arrange a plurality of independent conventional X-ray sources on a circumference in order to achieve a plurality of viewing angles of a stationary X-ray source instead of the movement of the X-ray source, although this can also achieve multiple viewing angles, but the cost High, and the target pitch is different for different viewing angles, and the imaging quality (stereoscopic resolution) is poor.
- a light source and a method for generating distributed X-rays are proposed in Patent Document 1 (US 4,946,452).
- the anode target has a large area, which alleviates the problem of overheating of the target, and the position of the target varies along the circumference and can be generated. Multiple perspectives.
- Patent Document 1 performs scanning deflection for obtaining an accelerated high-energy electron beam, there is control Difficulty, non-discrete location and poor repeatability, but still an effective way to generate distributed light sources. Further, a light source and a method for generating distributed X-rays are proposed, for example, in Patent Document 2 (US20110075802) and Patent Document 3 (WO2011/119629), the anode target having a large area, alleviating the problem of overheating of the target, and The target positions are dispersed and arranged in an array, and multiple viewing angles can be generated.
- carbon nanotubes are used as cold cathodes, and the cold cathodes are arranged in an array, and the voltage between the cathode gates is used to control the field emission, thereby controlling each cathode to emit electrons in sequence, and bombarding the targets in the corresponding order position on the anode. Point to become a distributed X-ray source.
- the voltage between the cathode gates is used to control the field emission, thereby controlling each cathode to emit electrons in sequence, and bombarding the targets in the corresponding order position on the anode. Point to become a distributed X-ray source.
- the present invention has been made to solve the above problems, and an object thereof is to provide an external hot cathode distributed which can generate a plurality of viewing angles without moving a light source and is advantageous for simplifying structure, improving system stability, reliability, and improving inspection efficiency.
- the present invention provides an external hot cathode distributed X-ray apparatus, comprising: a vacuum box, which is sealed around and has a high internal vacuum; and a plurality of electron emission units, each of which is independent of each other And arranged in a line array on the side wall of the vacuum box; the anode is installed at an intermediate position inside the vacuum box, and is parallel to the arrangement direction of the electron emission unit in the length direction and in the width direction Forming an angle with a mounting angle of the electron-emitting unit at a predetermined angle; a power supply and control system having a high-voltage power source connected to the anode, an emission control device connected to each of the plurality of electron-emitting units, a control system for controlling each power source, the electron emission unit having: a heating filament; a cathode connected to the heating filament; a filament lead drawn from both ends of the heating filament; and an insulating support surrounding the heating filament And the cathode; a focusing electrode disposed at
- a high voltage power supply connecting means for connecting the anode and the cable of the high voltage power source to be mounted near the anode of the vacuum box a side wall of one end; an emission control device connecting device for connecting the heating filament and the emission control device; a vacuum power source included in the power source and control system; and a vacuum device mounted on a side of the vacuum box On the wall, operation is performed using the vacuum power source to maintain a high vacuum within the vacuum box.
- the electron emission unit further has: a gate mounted between the cathode and the focusing electrode and adjacent to the cathode; a gate lead, and The gate connection is connected to the emission control device through the insulating support.
- the electron emission unit further has: a focusing section installed between the focusing pole and the connecting fixture; and a focusing device to surround the The configuration of the focus segment.
- a focus power source included in the power source and control system; a focusing device connecting means for connecting the focusing means and the focusing Electricity source.
- the electron emission units are mounted in two rows on two opposite side walls of the vacuum box.
- the vacuum box is made of glass or ceramic.
- the vacuum box is made of a metal material.
- the plurality of electron emitting units are arranged in a straight line or in a segmented straight line shape.
- the plurality of electron emitting units are arranged in a circular arc shape or a segmented circular arc shape.
- the arrangement intervals of the plurality of electron emission units are uniform.
- the arrangement intervals of the plurality of electron emission units are non-uniform.
- the present invention provides a CT apparatus characterized in that the X-ray source used is an external hot cathode distributed X-ray apparatus as described above.
- an external hot cathode distributed X-ray apparatus for generating X-rays which periodically change the focus position in a certain order in a light source apparatus.
- the electron emission unit of the invention adopts a hot cathode, and has the advantages of large emission current and long life with respect to other designs; a plurality of electron emission units are independently fixed on the vacuum box, and a small two-pole or three-pole electron gun can be directly used.
- the technology is mature, the cost is low, and the application is flexible.
- the design of the long strip type large anode effectively alleviates the problem of overheating of the anode, which is beneficial to increase the power of the light source;
- the electron emission unit can be arranged in a straight line, and the whole becomes a linear distributed X-ray device.
- the electron-emitting units can also be arranged in a ring shape, and the whole is a ring-shaped distributed X-ray device, which is flexible in application; the design of the focusing electrode and the design of the external focusing device can achieve a very small focus.
- the invention has large current, small target point, uniform target position distribution and good repeatability, high output power, simple structure, convenient control and low cost.
- the distributed X-ray source of the present invention By applying the distributed X-ray source of the present invention to a CT device, multiple viewing angles can be generated without moving the light source, so that the slip ring motion can be omitted, which is advantageous for simplifying the structure, improving system stability, reliability, and improving inspection efficiency.
- Figure 1 is a schematic illustration of the construction of an external hot cathode distributed X-ray apparatus of the present invention.
- Fig. 2 is a schematic view showing the positional relationship between an anode and an electron-emitting unit in the present invention.
- Fig. 3 is a schematic view showing the structure of an electron-emitting unit in the present invention.
- Figure 4 is a schematic illustration of the structure of an emission control unit in the present invention.
- Figure 5 is a schematic illustration of the structure of an electron-emitting unit having a grid and focusing means in the present invention.
- Fig. 6 is a schematic diagram showing the structure of an emission control unit having a gate control in the present invention.
- Fig. 7 is a schematic structural view of another electron-emitting unit in the present invention.
- Fig. 8 is a plan view showing the structure of a cylindrical electron-emitting unit in the present invention, (A) is a case of a circular gate hole, and (B) is a case of a rectangular grid hole.
- Fig. 9 is a plan view showing the structure of a rectangular parallelepiped electron-emitting unit in the present invention, wherein (A) is a case of a circular gate hole, and (B) is a case of a rectangular grid hole.
- FIG 10 is a schematic view showing the structure of a cathode in the present invention,
- A) is a planar circular cathode
- B) is a planar rectangular cathode
- C is a spherical arc-shaped cathode
- D is a cylindrical arc-shaped cathode.
- Figure 11 is a schematic view showing the structure of a grid in the present invention, (A) being a planar grid, (B) being a spherical grid, and (C) being a U-groove.
- Figure 12 is a schematic illustration of autofocusing by control of the gate of the present invention.
- Figure 13 is a schematic view showing the structure of an external hot cathode distributed X-ray apparatus arranged in a linear double-row arrangement in the present invention
- (A) is a diagram showing the positional relationship between the electron-emitting unit, the anode and the vacuum box
- ( B) is a diagram showing the positional relationship between the electron-emitting unit and the anode.
- Fig. 14 is a view showing the structure of an arc-type double-row opposed external hot cathode distributed X-ray apparatus in the present invention.
- Figure 15 is a schematic illustration of the main structure of a two-dimensional distributed X-ray apparatus of the present invention.
- Figure 16 is a bottom plan view showing the anode structure of the two-dimensional distributed X-ray apparatus of the present invention.
- Figure 17 is a schematic view showing an array of electron-emitting cells in which a gate is separated from a cathode in the present invention, (A) is a side view, (B) is a plan view of respective gate independent control modes, and (C) is a gate interconnection of each Top view of the cathode control mode.
- Figure 18 is a distributed X-ray apparatus in which the filaments are connected in series in the present invention.
- Figure 19 is a schematic illustration of the structure of a curved array distributed X-ray apparatus of the present invention.
- Figure 20 is a schematic end view showing the structure of a curved array distributed X-ray apparatus of the present invention.
- Figure 21 is a schematic illustration of the different structures of the anode in the present invention.
- Fig. 22 is a view showing the arrangement relationship of an electron-emitting unit and an anode of the ring type distributed X-ray apparatus in the present invention.
- FIG. 1 is a schematic illustration of the construction of an external hot cathode distributed X-ray apparatus of the present invention.
- the external hot cathode distributed X-ray apparatus of the present invention comprises a plurality of electron-emitting units 1 (at least two, hereinafter also specifically referred to as electron-emitting units 11, 12, 13, 14, ).
- the anode 2 the vacuum box 3, the high voltage power connection device 4, the emission control device connection device 5, and the power supply and control system 7.
- the electron-emitting unit 1 is composed of a heating filament 101, a cathode 102, an insulating support member 103, a focusing electrode 104, a connection fixing member 105, a filament lead 106, and the like.
- the anode 2 is installed in the middle of the inside of the vacuum box 3, and the electron-emitting unit 1 and the high-voltage power source connecting device 4 are mounted on the wall of the vacuum box 3 and constitute an integral sealing structure with the vacuum box 3.
- FIG. 2 is a schematic view showing the relative positional relationship between the anode 2 and the electron-emitting unit 1 of the external hot cathode distributed X-ray apparatus of the present invention.
- a plurality of electron-emitting units 1 are arranged in a straight line
- an anode 2 is an elongated shape corresponding to the arrangement of the electron-emitting units 1
- an anode 2 is longitudinally opposed to a plurality of electron-emitting units.
- the alignment of the straight lines 1 is parallel, and an angle between the surface of the anode 2 facing the electron emission unit 1 and the surface of the electron emission unit 1 facing the anode 2 is formed at a predetermined angle in the width direction.
- the electron emission unit 1 is configured to generate an electron beam flow as required, is mounted on the side wall of the vacuum box 3, and forms a sealing structure with the side walls of the vacuum box 3 through the connection fixing member 105, and the electron emission unit 1 is entirely outside the vacuum box 3.
- the electron beam flow can enter the inside of the vacuum box 3 through an opening connecting the middle of the fixing member 105.
- a structure of the electron-emitting unit 1 is shown in FIG. 3, and the electron-emitting unit 1 includes a heating filament 101, a cathode 102, an insulating support member 103, a focusing electrode 104, a connection fixing member 105, and a filament lead 106.
- the cathode 102 is connected to the heating filament 101.
- the heating filament 101 is usually made of a tungsten wire.
- the cathode 102 is usually made of a material having high electron-emitting electron power, for example, cerium oxide, cerium citrate, lanthanum hexaboride or the like.
- the insulating support member 103 surrounds the heating filament 101 and the cathode 102, and corresponds to a part of the housing of the electron-emitting unit 1, and is made of an insulating material, usually ceramic.
- the filament lead 106 is led out to the outside of the electron-emitting unit 1 through the insulating support member 103, and a sealed structure is formed between the filament lead 106 and the insulating support member 103.
- the focusing electrode 104 is mounted on the upper end of the insulating support member 103.
- the focusing electrode 104 has a nose-cone design with an opening in the middle, and the center of the opening is vertically aligned with the center of the cathode 102.
- the connection fixing member 105 is for sealingly connecting the electron emission unit 1 to the vacuum box 3, usually a knife edge flange, with an opening in the middle for allowing the electron beam current E to enter the vacuum box 3 from the electron emission unit 1.
- the insulating support member 103, the focusing electrode 104, and the connecting fixing member 105 are closely coupled together to form a vacuum sealing structure of the electron emitting unit 1 except for the central opening of the connecting fixing member 105.
- the power supply and control system 7 includes a control system 701, a high voltage power supply 702, a transmission control device 703, and the like.
- the high voltage power source 702 is connected to the anode 2 through a high voltage power connection device 4 mounted on the wall of the vacuum box 3.
- the emission control means 703 are respectively connected to the filament leads 106 of the respective electron-emitting units 1 by the emission control means connecting means 5, usually having the same number of emission control units as the number of the electron-emitting units 1.
- a structure of a transmission control unit is shown in FIG. 4.
- the emission control device 703 includes a plurality of transmission control units, each of which includes a negative high voltage module 70301, a low voltage direct current module 70302, and a high voltage isolation transformer 70303.
- the negative high voltage module 70301 is configured to generate a negative high voltage pulse under the control of the control system 701, the output of which is connected to the primary side of the high voltage isolation transformer 70303; the low voltage direct current module 70302 is used to generate a current for heating and heating the heating filament 106.
- Output connected to high voltage isolation transformer The low voltage ends of the two parallel parallel sides of the 70303 are output through the transformer windings from the high voltage ends of the two parallel parallel sides to the filament lead 106.
- the emission control device connection device 5 is usually a cable with a connector, the number of which is the same as the number of the electron emission units 1. Further, the control system 701 controls the operating states of the high voltage power source 702 and the emission control device 703.
- the vacuum box 3 is a peripherally sealed cavity housing having a high vacuum inside, and the housing may be made of an insulating material such as glass or ceramic.
- a plurality of electron-emitting units 1 are mounted, and these electron-emitting units 1 are arranged in a straight line, and an elongated anode 2 is mounted inside (see Fig. 1), and the anode 2 is The longitudinal direction is parallel to the arrangement direction of the electron-emitting units 1.
- the space inside the vacuum box 3 is sufficient for the movement of the electron beam in the electric field without any blocking.
- the high vacuum in the vacuum box 3 is obtained by baking the exhaust gas in a high temperature exhaust furnace, and the degree of vacuum is usually better than 10 -3 Pa, and the recommended degree of vacuum is better than 10 -5 Pa.
- the recommended housing of the vacuum box 3 is made of a metal material.
- the electron-emitting unit 1 is connected to the wall of the vacuum box 3 by a connection fixing member 105 thereof, and the anode 2 is utilized.
- the insulating support material is fixedly mounted in the vacuum box 3, and a sufficient distance is maintained between the anode 2 and the casing of the vacuum box 3, so that high-pressure ignition is not generated.
- the high-voltage power source connecting device 4 is for connecting the cable of the anode 2 and the high-voltage power source 702 to the side wall of the vacuum box 3.
- the high-voltage power connection device 4 is generally a tapered ceramic structure with a metal post inside, one end of which is connected to the anode 2, and the other end is closely connected to the wall of the vacuum box 3 to form a vacuum sealing structure.
- a metal post inside the high voltage power connection 4 is used to form an electrical connection between the anode 2 and the cable connector of the high voltage power supply 702.
- the high-voltage power connection device 4 and the cable connector are designed as a pluggable structure.
- the electron emission unit 1 may further include a gate electrode 107 and a gate lead 108.
- a structure of an electron-emitting unit 1 having a grid and focusing means is shown in FIG.
- the gate 107 is disposed between the cathode 102 and the focusing electrode 104, adjacent to the cathode 102.
- the gate 107 is generally a mesh structure, and the outer shape is generally the same as that of the cathode 102.
- the gate lead 108 is connected to the gate.
- the gate lead 108 is hermetically connected to the insulating support 103, and the gate lead 108 is connected to the emission control device 703 through the emission control device connecting device 5.
- the emission control unit of the emission control device 703 may further include a negative bias module 70304, a positive bias module 70305, and a selection switch 70306.
- a structure of a transmission control unit having gate control is shown in FIG. As shown in FIG.
- the negative high voltage module 70301 is used to generate a negative high voltage, and its output is connected to the primary side of the high voltage isolation transformer 70303; the commercial power is connected to the low voltage end of the two parallel parallel sides of the high voltage isolation transformer 70303, and through the transformer winding
- the power supplies suspended from the high voltage are output from the high voltage terminals of the two parallel parallel sides, and are respectively supplied to the DC module 70302, the negative bias module 70304, and the positive bias module 70305.
- the DC module 70302 generates a current for heating and heating the heating filament 101; the negative biasing module 70304 and the positive biasing module 70305 respectively generate a negative voltage and a positive voltage and output to the two inputs of the selection switch 70306, and the selection switch 70306 is A voltage is output to the gate lead 108 by the control device 701 and finally applied to the gate 107.
- the electron emission unit 1 may further include a focus section 109 and a focusing means 110.
- the focus segment 109 is connected to the focus electrode 104 and the connection fixture 105.
- the focusing electrode 104, the focusing segment 109 and the connecting fixture 105 may be a single piece of metal, or three metal parts may be joined together by welding.
- the focusing device 110 is mounted outside the focusing section 109, and the focusing device 110 Usually the focus line package. Focusing device 110 is coupled to focus power source 704 by focusing device connection device 6, which operates under the drive of focus power source 704, which is controlled by power source and control system 7.
- the external hot cathode distributed X-ray device further includes a focusing device connection device 6, and the power supply and control system 7 further includes a focus power source 704.
- the external hot cathode distributed X-ray apparatus of the present invention may further include a vacuum apparatus 8 and a vacuum power source 705 including a vacuum pump 801 and a vacuum valve 802 mounted on the side wall of the vacuum box 3.
- the vacuum pump 801 operates under the action of a vacuum power source 705 for maintaining a high vacuum inside the vacuum box 3.
- the vacuum pump 801 preferably uses a vacuum ion pump.
- Vacuum valve 802 is typically an all-metal vacuum valve that can withstand high temperature bakes, such as an all-metal manual flapper valve. Vacuum valve 802 is typically in a closed state. Accordingly, the power and control system 7 of the external hot cathode distributed X-ray device further includes a vacuum power supply (Vacc PS) 705 of the vacuum device 8.
- Vacc PS vacuum power supply
- FIG. 7 is a schematic structural view of another electron-emitting unit which can be used in the present invention.
- the electron-emitting unit 1 is composed of a heating filament 101A, a cathode 102A, a grid 103A, an insulating support 104A, a connecting fixture 109A, and the like.
- the electron-emitting unit 1 constitutes an integral sealing structure with the wall of the vacuum box 3 by means of the connection fixing member 109A, but is not limited thereto, as long as the electron-emitting unit 1 can be mounted on the wall of the vacuum box 3 and the whole is placed in the vacuum box 3 Outside (ie, the cathode end of the electron-emitting unit 1 (including the heating filament 101A, the cathode 102A, the gate 103A) and the lead terminals of the electron-emitting unit 1 (including the filament lead 105A, the gate lead 108A, and the connecting fixture 109A) It is outside the vacuum box 3 and can be installed by other means.
- the cathode end of the electron-emitting unit 1 including the heating filament 101A, the cathode 102A, the gate 103A
- the lead terminals of the electron-emitting unit 1 including the filament lead 105A, the gate lead 108A, and the connecting fixture 109A
- the electron emission unit 1 includes a heating filament 101A, a cathode 102A, a gate 103A, an insulating support 104A, a filament lead 105A, a connection fixture 109A, and the gate 103A is composed of a grid 106A, a grid 107A, and a gate lead 108A.
- the cathode 102A is connected to the heating filament 101A, and the heating filament 101A is usually made of a tungsten wire.
- the cathode 102A is usually made of a material having high electron-emitting electron power, for example, cerium oxide, cerium citrate, lanthanum hexaboride or the like.
- the insulating support member 104A surrounds the heating filament 101A and the cathode 102A, and corresponds to the housing of the electron-emitting unit 1, and is made of an insulating material, usually ceramic.
- the filament lead 105A is taken out to the lower end of the electron emission unit 1 through the insulating support 104A (but is not limited thereto, as long as it is taken out to the outside of the electron emission unit 1), and is sealed between the filament lead 105A and the insulating support 104A. structure.
- the gate electrode 103A is mounted on the upper end of the insulating support 104A (i.e., disposed on the opening of the insulating support 104A) and is opposed to the cathode 102A, and preferably the gate 103A is vertically aligned with the center of the cathode 102A.
- the gate 103A includes a grid 106A, a grid 107A, a gate lead 108A, the grid 106A, the grid 107A, and the gate lead 108A are made of metal.
- the grid 106A is made of stainless steel.
- 107A is a molybdenum material
- the gate lead 108A is a kovar (alloy) material.
- the gate lead 108A is led out to the lower end of the electron emission unit 1 through the insulating support 104A (but is not limited thereto, as long as it is taken out to the outside of the electron emission unit 1), between the gate lead 108A and the insulating support 104A To seal the structure.
- the filament lead 105A is connected to the gate lead 108A to the hair Shooting control device 703.
- the main body is a metal plate (for example, stainless steel material), that is, the grid frame 106A, and an opening is formed in the middle of the grid frame 106A, and the shape of the opening may be square. Or a circle or the like, a wire mesh (for example, a molybdenum material), that is, a mesh 107A is fixed at a position of the opening, and a lead (for example, a Kovar material) is drawn from a position of the metal plate.
- the pole lead 108A is capable of connecting the gate 103A to a potential.
- the gate electrode 103A is located directly above the cathode 102A, and the center of the above-mentioned opening of the gate electrode 103A is aligned with the center of the cathode 102A (i.e., up and down on a vertical line), and the shape of the opening corresponds to the shape of the cathode 102A.
- the size of the opening is smaller than the area of the cathode 102A.
- the structure of the gate electrode 103A is not limited to the above configuration.
- the relative position between the gate 103A and the cathode 102A is fixed by the insulating support 104A.
- connection fixing member 109A it is recommended that the main body is a circular knife edge flange, and an opening is formed in the middle, and the shape of the opening may be square or circular, etc., at the position of the opening.
- the outer edge of the upper end of the insulating support member 104A is sealingly connected, such as a welded joint, and the outer edge of the knife edge flange is formed with a screw hole.
- the electron emission unit 1 can be fixed to the wall of the vacuum box 3 by a bolt connection, and the knife edge and the vacuum box A vacuum sealed connection is formed between the walls of 3. This is a flexible structure that is easy to disassemble, and can be flexibly replaced when one of the plurality of electron-emitting units 1 fails.
- connection fixing member 109A is to realize the sealing connection between the insulating support member 104A and the vacuum box 3, and there are various flexible ways, such as welding through a metal flange transition or a high temperature molten sealing connection of glass. , or ceramic metallization and metal welding.
- the electron-emitting unit 1 may have a cylindrical structure, that is, the insulating support member 104A is cylindrical, and the cathode 102A, the grid holder 106A, and the grid 107A may be both circular or rectangular at the same time.
- a top view of a cylindrical electron-emitting unit 1 is shown in Fig. 8, in which (A) shows a structure in which the cathode 102A, the grid frame 106A, and the grid 107A are both circular, and (B) shows The cathode 102A, the grid frame 106A, and the grid 107A have a rectangular structure at the same time.
- the surface of the cathode 102A in order to achieve a better convergence effect of electrons generated on the surface of the cathode 102A, it is generally preferred to process the surface of the cathode 102A into a spherical arc shape (as shown in Fig. 10(C)).
- the diameter of the surface of the cathode 102A is usually several mm, for example, 2 mm in diameter, and the diameter of the opening of the grid 107A mounted on the grid frame 106A is usually several mm, for example, 1 mm in diameter.
- the distance from the gate 103A to the surface of the cathode 102A is usually from a few tenths of a mm to several mm, for example, 2 mm.
- a cylindrical arc shape is generally preferred, which facilitates further convergence of the electron beam current in the narrow side direction.
- the length of the arc surface is several mm to several tens of mm
- the width is several mm, for example, 10 mm in length and 2 mm in width.
- the grid 107A is rectangular, preferably having a width of 1 mm and a length of 10 mm.
- FIG. 10 shows a case where the cathodes 102A are respectively of a planar circular shape, a planar rectangular shape, a spherical arc shape, and a cylindrical arc shape.
- the electron emission unit 1 may also be a rectangular parallelepiped structure, that is, the insulating support member 104A is a rectangular parallelepiped, and the cathode 102A, the grid frame 106A, and the grid 107A may be both circular at the same time or at the same time rectangular.
- a top view of a rectangular parallelepiped electron-emitting unit 1 is shown in Fig. 9, in which (A) shows a structure in which the cathode 102A, the grid frame 106A, and the grid 107A are both circular, and (B) shows The cathode 102A, the grid frame 106A, and the grid 107A are simultaneously rectangular Shaped structure.
- the diagonal lines in FIGS. 8 and 9 are for the purpose of distinguishing between different components, and are not for the cross-section.
- the structure of the grid 107A may be a flat type, a spherical type, or a U-groove type, and a spherical type is recommended because of a spherical type grid. Will make the electron beam have a better focusing effect.
- the emission control means 703 changes only the state of the gate of one of the adjacent electron-emitting units, at the same time, only one of the adjacent electron-emitting units performs electron emission to form an electron beam stream,
- the electric field on both sides of the gate of the electron-emitting unit has an autofocus effect on the beam current.
- the arrow between the electron-emitting unit 1 and the anode 2 in the figure indicates the direction of electron motion (inverse power line direction).
- the anode 2 is a high voltage + 160 kV, and the arrow between the electron-emitting unit 1 and the anode 2 of the large electric field is directed from the electron-emitting unit 1 to the anode 2, that is, as long as the electron-emitting unit 1 emits The electron beam current will move toward the anode 2.
- the voltage of the gate 103A of the electron-emitting unit 13 is changed from -500 V to +2000 V, and the electron-emitting unit 13 enters.
- the voltages of the gates 103A of the adjacent electron-emitting units 12 and the electron-emitting units 14 are still -500 V, and if the electron-emitting units 12, 14 have electron emission, the electrons are emitted from the electron-emitting units 12 and the electron-emitting units 14
- the gate electrode 103A moves toward the gate electrode 103A of the electron emission unit 13, but since there is no electron emission in the electron emission units 12, 14, the electron beam emitted from the electron emission unit 13 is directed from the electron emission unit 13
- the electric fields of the adjacent electron-emitting units 12 and the electron-emitting units 14 are squeezed, and thus have an autofocus effect.
- the external hot cathode distributed X-ray device of the present invention operates in a high vacuum state
- the method for obtaining and maintaining the high vacuum may be: installing the anode 2 in the vacuum box 3, and connecting the high voltage power supply device 4 And the vacuum device 8 completes the sealing connection on the wall of the vacuum box 3, and is sealed with a blind plate flange at the electron-emitting unit connection of the side wall of the vacuum box 3, so that the vacuum box 3 integrally forms a sealed structure;
- the air is baked and degassed in a vacuum furnace, and the vacuum valve 802 is connected to the external vacuum pumping system for removing the gas adsorbed by the materials of the components; and then, in the clean environment at normal temperature, the vacuum valve 802 is injected into the vacuum box 3.
- nitrogen gas is injected from the vacuum valve 802 into the inside of the vacuum box 3 to form protection; in the shortest time, the electron-emitting unit to be replaced is removed, and a new electron-emitting unit is installed; vacuum
- the valve 802 is connected to an external vacuum pumping device to evacuate the vacuum box 3; when the inside of the vacuum box 3 reaches a high vacuum again, the vacuum valve 802 is closed to maintain a high vacuum inside the vacuum box 3.
- FIG. 13 shows a structure of an external hot cathode distributed X-ray apparatus in which linear double-rows are arranged opposite to each other
- (A) is a diagram showing the positional relationship between the electron-emitting unit 1, the anode 2 and the vacuum box 3.
- (B) is a view showing the positional relationship between the electron-emitting unit 1 and the anode 2. As shown in FIG.
- a plurality of electron-emitting units 1 are respectively arranged in two rows on two opposite side walls of the vacuum box 3, and the anode 2 is disposed in the middle of the inside of the vacuum box 3.
- the faces of the anode 2 opposite to the two rows of electron-emitting units 1 are both inclined, and the electron beam current E generated by the electron-emitting unit 1 is accelerated by the electric field between the electron-emitting unit 1 and the anode 2.
- the inclined surface of the anode 2 is bombarded to generate X-rays, and the outgoing direction of the useful X-rays is the oblique direction of the slope of the anode 2. Since the two rows of electron-emitting units 1 are arranged opposite each other, the anode 2 has two inclined faces, and the X-rays generated by the two inclined faces are emitted in the same direction.
- Fig. 14 is a view showing the positional relationship of the electron-emitting unit 1 and the anode 2 of the arc-shaped external hot cathode distributed X-ray apparatus of the present invention.
- the two rows of electron-emitting units 1 are arranged circumferentially and respectively arranged on two opposite sides of the vacuum box 3, the two sides are parallel to each other, and the extending direction of the arrangement of the electron-emitting units 1 is an arc, and the arc of the arrangement can be determined according to needs. .
- the anode 2 is arranged in the middle of the vacuum box 3, that is, in the middle of the two rows of opposite electron-emitting units 1, and the surfaces of the anodes 2 facing the two rows of electron-emitting units 1 are inclined, and the inclined directions of the two inclined surfaces all point to the center of the arc O.
- the electron beam current E is emitted from the upper surface of the electron-emitting unit 1, is accelerated by the high-voltage electric field between the anode 2 and the electron-emitting unit 1, and finally bombards the anode 2, forming two rows of circular arcs on the two inclined faces of the anode 2.
- the series of X-ray targets, the useful X-ray exit direction points to the center of the arc.
- the vacuum box 3 of the arc-shaped external hot cathode distributed X-ray apparatus is also a circular arc type, or ring shape, corresponding to the arrangement of the electron emission unit 1 and the shape of the anode 2.
- the outgoing X-rays of the circular-array distributed X-ray device are directed to the center of the circular arc and can be applied to the case where the radial arrangement of the radiation source is required.
- the arrangement of the electron emission units may be linear, or may be a segmental straight shape such as an L shape or a U shape, and further, each electron emission
- the arrangement of the cells may be an arc shape, or may be a segmented arc shape, for example, a curve formed by connecting arc segments of different diameters or a combination of a straight line segment and an arc segment.
- the arrangement pitch of each of the electron emission units may be uniform or non-uniform.
- the electron-emitting unit can also be arranged in a two-dimensional array distribution manner, whereby a two-dimensional array distributed X-ray apparatus can be obtained.
- the two-dimensional array distributed X-ray apparatus has a plurality of electron-emitting units 1 (at least four, and later specifically referred to as electron-emitting units 11a, 12a, 13a, 14a, ..., electron emission).
- the electron emission unit may be any one of the electron emission units as described above, and the anode 2 is provided by the anode plate 201 and mounted on the anode plate 201 and with the electron emission unit 1
- the plurality of targets 202 are arranged in correspondence, but the anode 2 is not limited to this structure, and an anode which is generally used in the art may be used.
- a plurality of electron-emitting units 1 are disposed on one side wall of the vacuum box 3 in a two-dimensional arrangement and are parallel to the plane in which the anode sheets 201 are located. Further, as described above, the electron-emitting unit 1 as a whole is outside the vacuum box 3, and the anode The pole 2 is disposed inside the vacuum box 3.
- FIG. 15 A schematic structural view of the spatial arrangement of the electron-emitting unit 1 and the anode 2 is shown in Fig. 15 (here, the illustration of the vacuum box 3 is omitted).
- the electron-emitting units 1 are arranged in two rows on one plane (i.e., one side wall of the vacuum box 3), and the electron-emitting units 1 of the front and rear rows are staggered (see Fig. 15), but are not limited thereto, even before and after The electron-emitting units are not interlaced with each other.
- the target 202 on the anode 2 is in one-to-one correspondence with the electron-emitting unit 1, the top surface of the target 202 is directed to the electron-emitting unit 1, and the line connecting the center of the electron-emitting unit 1 and the center of the target 202 is perpendicular to the plane of the anode plate 201.
- the line is also the moving path of the electron beam stream E emitted by the electron-emitting unit 1.
- the electron bombardment target produces X-rays, the exit direction of the useful X-rays is parallel to the plane of the anode plate 201, and each useful X-ray is parallel to each other.
- the anode 2 includes an anode plate 201 and a plurality of targets 202 distributed in a two-dimensional array.
- the anode plate 201 is a flat plate made of a metal material, and is preferably a high temperature resistant metal material, which is completely parallel to the plane formed by the upper surface of the electron-emitting unit 1, and when a positive high voltage is applied to the anode 2, it is usually From several tens of kV to several hundred kV, typically for example 180 kV, a parallel high voltage electric field is formed between the anode plate 201 and the electron emission unit 1.
- the target 202 is mounted on the anode plate 201 in a position corresponding to the position of the electron-emitting unit 1, respectively, and the surface of the target 202 is usually made of a high-temperature resistant heavy metal material such as tungsten or a tungsten alloy.
- the target 202 has a circular frustum structure, and the height is usually several mm, for example, 3 mm.
- the larger diameter bottom surface is connected to the anode plate 201.
- the diameter of the top surface is small, usually several mm, for example, 2 mm, and the top surface is not connected to the anode plate.
- 201 parallel usually with a small angle of a few degrees to a dozen degrees, to facilitate the emission of useful X-rays generated by electronic targets.
- All of the targets 202 are arranged in such a manner that the top surface is inclined in the same direction, that is, the direction in which all the useful X-rays are emitted is uniform.
- This structural design of the target corresponds to a small protrusion that grows on the anode plate 201, changing the local electric field distribution of the surface of the anode plate 201, so that the electron beam has an autofocus effect before bombarding the target, making the target point smaller. , is conducive to improving image quality.
- the anode plate 201 uses a common metal, and only the surface of the target 202 is tungsten or a tungsten alloy, thereby reducing the cost.
- the electron emission unit may be a structure in which the gate electrode and the cathode are separated.
- An array of electron-emitting cells separated from the gate and cathode is shown in FIG.
- the flat gate 9 is composed of an insulating frame 901, a grid 902, a grid 903, and a gate lead 904.
- the grid 902 is disposed on the insulating frame 901
- the grid 903 is disposed at an opening formed in the grid 902, and the gate lead 904 is drawn from the grid 902.
- the cathode array 10 is composed of a plurality of cathode structures closely arranged, each cathode structure being composed of a filament 1001, a cathode 1002, and an insulating support member 1004.
- the plate grid 9 is above the cathode array 10 and the distance between the two is small, typically a few mm, for example 3 mm.
- the gate structure composed of the grid plate 902, the grid 903, and the gate lead 904 has a one-to-one correspondence with the cathode structure, and the center of the circle of each grid 903 coincides with the center of the circle of each cathode 1002 as viewed in the vertical direction.
- the gate structure may be a structure in which the respective gate leads are independently drawn and the state control is independently performed by the gate control means.
- Each cathode 1002 of the cathode array 10 can be at the same potential, such as ground, each gate being switched between two states of minus several hundred volts and several thousand kilovolts, for example, switching between -500V and +2000V, thereby controlling each electron-emitting unit.
- the working state for example, if a certain gate is -500V at a certain time, the electric field between the gate and the corresponding cathode is a negative electric field, and electrons emitted from the cathode are confined to the cathode.
- the gate electrodes may be in parallel with each of the gate leads, and at the same potential, the operating state of each of the electron-emitting units is controlled by the filament power source.
- all of the gates are at -500V, each cathode filament is independently drawn, the voltage difference between the two terminals of each cathode filament is constant, and the overall voltage of each cathode is switched between 0V and -2500V.
- the cathode is at a potential of 0V, a negative electric field between the gate and the cathode, and electrons emitted from the cathode are confined to the surface of the cathode.
- the voltage of the cathode becomes -2500V, between the gate and the corresponding cathode.
- the electric field becomes a positive electric field, and electrons emitted from the cathode move toward the gate and pass through the grid, are emitted into an accelerating electric field between the gate and the anode, accelerate and eventually bombard the target, and generate X-rays at corresponding target positions. .
- the filament leads of the respective electron-emitting units may be respectively connected to respective output ends of the filament power source, or may be integrally connected to one output end of the filament power source after being connected in series.
- a schematic diagram of a filament lead of an electron-emitting unit connected in series to a filament power source is shown in FIG.
- the cathodes are at the same potential, and the respective gate leads need to be independently led out, and the operating state of the electron-emitting unit is controlled by the gate control device.
- the array of electron-emitting units may be two rows or a plurality of rows.
- the target of the anode may be a circular frustum structure, a cylindrical structure, a square structure, a polygonal structure, or other polygonal protrusions, or other irregular protrusions. And other structures.
- the top surface of the target of the anode may be a flat surface, a bevel surface, a spherical surface, or other irregular surface.
- the two-dimensional array arrangement of the electron-emitting units may be linearly extended in both directions, or one direction may be a straight line extension and the other direction may be an arc extension, or one direction may be a straight line. Stretching while the other direction is a segmental straight line extension, and may also be a combination of one direction extending in a straight line and the other direction being a segmented curved stretching.
- the two-dimensional array arrangement of the electron-emitting units may be evenly spaced in two directions, and may be uniform in each direction and inconsistent in the two directions, or may be evenly spaced in one direction. If the direction is uneven, the interval between the two directions may be uneven.
- the electron-emitting units can also be arranged in a curved array, whereby a curved array distributed X-ray device can be obtained.
- Figure 19 is a block diagram showing the structure of a curved array distributed X-ray apparatus of the present invention.
- Figure 20 is a schematic side view showing the internal structure of a curved array distributed X-ray apparatus of the present invention.
- Figure 21 is a schematic illustration of the different configurations of the anode of the present invention.
- a plurality of electron-emitting units 1 are along the axis on the curved surface.
- the directions are arranged in a plurality of rows facing the axis O.
- the anode 2 is arranged on the axis O of the curved surface.
- the electron-emitting unit 1 is mounted on the wall of the vacuum box 3, and is entirely outside the vacuum box 3, and the anode 2 is mounted in the vacuum box.
- Figure 20 is a schematic side view showing the internal structure of a curved array distributed X-ray apparatus of the present invention. Specifically, Fig. 20 is a schematic view showing the internal structure of a cylindrical array distributed X-ray apparatus.
- the electron emission units 1 are arranged in a plurality of rows along the axial direction on the cylindrical surface, and the upper surface (electron emission surface) of the electron emission unit 1 faces the axis O.
- the anode 2 is arranged on the axis O of the cylinder.
- the electron-emitting unit 1 is at the same low potential, the anode 2 is at a high potential, and a positive electric field is formed between the anode 2 and the electron-emitting unit 1, and an electric field is concentrated from the surface of each electron-emitting unit 1 toward the axis of the anode 2, the electron beam
- the stream E moves from the electron-emitting unit 1 to the axis of the anode 2, bombards the anode 2, and finally generates X-rays.
- the above-mentioned electron-emitting unit 1 is arranged in a plurality of rows on the curved surface along the axial direction facing the axis, and the plurality of rows of electron-emitting units may be aligned in front and rear rows, or the recommended front-rear row positions may be shifted so that each electron-emitting unit generates The position of the electron beam bombarding the anode is not coincident.
- the anode 2 has a hollow pipe-like structure capable of causing a coolant to flow inside thereof.
- the structure of an anode and its support member in the present invention is shown in FIG.
- the anode 2 is composed of an anode support 201A, an anode conduit 202A, and an anode target surface 203A.
- the anode support 201A is mounted on the anode conduit 202A and is coupled to the top end (small end) of the high voltage power connection unit 4 for supporting and fixing the anode 2.
- the anode pipe 202A is a main structure of the anode 2, and both ends are respectively connected to one ends of the two cooling connecting devices 9A, and the inside thereof communicates with the cooling connecting device 9A to become a passage for circulating circulation of the coolant.
- the anode pipe 202A is usually made of a metal material resistant to high temperature, and has various structural forms, and is recommended as a circular pipe. Further, in some cases, for example, in the case where the anode heat power is small, the anode 2 may also be a cylindrical structure of a non-hollow pipe.
- the anode target surface 203A is a position where the electron beam bombards the anode tube 202A, and has various designs on the fine structure. For example, as shown in FIG.
- the outer circular surface of the anode tube 202A is the bombardment position of the electron beam.
- the anode pipe 202A is entirely made of a high temperature resistant heavy metal material, such as tungsten or a tungsten alloy.
- FIG. 21 (2) the outer circumference of the anode pipe 202A is cut away to form a small inclined plane.
- the oblique plane becomes the bombardment position of the electron beam, and the oblique direction of the oblique plane is a useful X-ray exit direction.
- This structural design is advantageous for the direction of the useful X-rays to be uniformly drawn.
- an anode target surface 203A is specially designed on the outer surface of the anode pipe 202A, and the anode target surface 203A is made of a high temperature resistant heavy metal material, such as tungsten or a tungsten alloy, and has a thickness of not less than 20 ⁇ m (micrometer), by plating, pasting, welding or the like. It is fixed on a small inclined plane which is machined on the outer edge of the anode pipe 202A. In this case, the anode pipe 202A can be made of a common metal material, so that the cost can be reduced.
- a high temperature resistant heavy metal material such as tungsten or a tungsten alloy
- the above-mentioned axis may be a straight line or an arc, and the whole may be a linear distributed X-ray device or a ring-shaped distributed X-ray device to meet different application requirements.
- An effect diagram of an annularly distributed electron-emitting unit and anode arrangement is shown in FIG.
- the anode 2 is arranged on a planar circumference
- the electron-emitting unit 1 is disposed below the anode 2
- the two rows of electron-emitting units 1 are circumferentially arranged in the direction of the anode 2 while being arranged on a circular arc surface centered on the center of the anode 2.
- each electron-emitting unit 1 is directed to the axis of the anode 2.
- the electron beam stream E is emitted from the electron-emitting unit 1, is accelerated by a high-voltage electric field between the anode 2 and the electron-emitting unit 1, bombards the lower edge of the anode 2, and forms a circular array of X-ray targets on the anode 2.
- the useful X-ray exit directions are directed to the center of the circumference of the anode 2.
- the arrangement and the shape of the anode 2 are also a ring-shaped structure.
- the circular distributed X-ray device can be a complete ring or a length of a ring, and can be applied to a situation where a circular arrangement of the ray source is required.
- the array of electron-emitting units may be two rows or a plurality of rows.
- each electron-emitting unit has the ability to independently emit an electron beam stream, and may be a discrete structure or an associated connection in a specific structure. Structure.
- curved surface refers to various forms of curved surfaces, including cylindrical surfaces, torus surfaces, elliptical surfaces, or curved surfaces composed of segmented straight lines, such as regular polygonal columns. For surfaces such as faces or segmented arcs, it is recommended to have a cylindrical surface and a toroidal surface as described above.
- the "axis” refers to the true axis or the form axis of various forms of the curved surface on which the electron-emitting unit is disposed, for example, the axis of the cylindrical surface refers to the central axis of the cylinder, and the ring
- the axis of the face refers to the central axis inside the ring
- the axis of the elliptical surface refers to the paraxial axis close to the ellipse of the segment
- the axis of the regular polygonal cylinder refers to the axis formed by the center of the regular polygon.
- the inner tube cut surface of the anode may be a circular hole, a square hole, a polygonal hole, an internal gear-like hole with a fin structure, or other shape capable of increasing a heat dissipation area.
- the curved array of the electron-emitting units is arranged in a line in which the arrangement direction is a curve and in the other arrangement direction is a straight line, a segmented line, an arc, a segmented arc, or a straight line segment and an arc segment. combination.
- the curved array arrangement of the electron-emitting units may be uniformly spaced in two directions, and may be evenly spaced in each direction, the two directions may be inconsistent, or may be evenly spaced in one direction, and the other may be If the direction is not uniform, the interval between the two directions may be uneven.
- the outer shape of the vacuum box may be a rectangular parallelepiped shape as a whole, a cylindrical shape, a circular ring shape, or other structures that do not affect the relative arrangement relationship between the electron emission unit and the anode.
- the external hot cathode distributed X-ray apparatus of the present invention comprises a plurality of electron emission units 1, an anode 2, a vacuum box 3, a high voltage power connection device 4, a transmission control device connection device 5, and a focus.
- the device connection device 6, the vacuum device 8, and the power supply and control system 7 are comprised.
- a plurality of electron-emitting units 1 are arranged in a linear array on one side wall of the vacuum box 3, each of the electron-emitting units 1 is independent of each other, and the elongated anode 2 is installed in the middle of the vacuum box 3 in the direction of the linear arrangement.
- the alignment lines of the anode 2 and the electron-emitting unit 1 are parallel to each other, and the vertical section of the line type arrangement, the anode 2 forms a small angle with the upper surface of the electron-emitting unit 1.
- the electron emission unit 1 includes a heating filament 101, a cathode 102, a gate 107, an insulating support 103, a focusing electrode 104, a focusing section 109, a connection fixture 105, a filament lead 106, a gate lead 108, and a focusing device 110.
- the high voltage power connection device 4 is mounted on the side wall of the vacuum box 3, internally connected to the anode 2, and externally connected to the high voltage cable in a pluggable form.
- the emission control device connection device 5 connects the filament lead 106 and the gate lead 108 of each of the electron emission units 1 to each of the emission control devices 703.
- the vacuum device 8 is mounted on the side wall of the vacuum box 3, and the vacuum device 8 includes a vacuum pump 801 and a vacuum valve 802.
- Power and control system 7 includes control The system 701, the high voltage power supply 702, the emission control device 703, the focus power supply 704, the vacuum power supply 705, and the like, pass through the power cable and the control cable and the heating filament 101, the gate 107 and the anode 2 of the plurality of electron emission units 1 of the system.
- the vacuum device 8 and the like are connected.
- the emission control device 703 is composed of a plurality of emission control units (the same number as the electron emission unit 1), and each emission control unit is composed of a negative high voltage module 70301, a DC module 70302, a high voltage isolation transformer 70303, and a negative bias module 70304.
- the positive bias module 70305 and the selection switch 70306 are formed.
- the power supply and control system 7 controls the focus power source 704, the emission control device 703, and the high voltage power source 702.
- the respective units of the emission control device 703 start to work, and the negative high voltage module 70301 generates a negative high voltage output to the primary side of the high voltage isolation transformer 70303, so that a set of parallel ends of the secondary side of the high voltage isolation transformer 70303 is suspended at a high voltage, that is, the DC module 70302, negative
- the biasing module 70304, the positive biasing module 70305, and the selection switch 70306 are all at the same negative high voltage.
- the DC module 70302 generates a direct current floating on the negative high voltage to the heating filament 101, and the heating filament 101 heats the cathode 102. At a high temperature (e.g., 500 to 2000 ° C) emission state, the cathode 102 generates a large amount of electrons on its surface.
- Negative biasing module 70304 and positive biasing module 70305 respectively generate a negative voltage and a positive voltage suspended at a negative high voltage, and selection switch 70306 typically connects a negative voltage strobe to gate 107.
- the filament 101, the cathode 102 and the gate 107 are both at a negative high voltage, usually a few kilovolts to a negative tens of kilovolts, and the focusing electrode 104 is connected to the focusing section 109 and connected through the fixing member 105.
- a small accelerating electric field is formed between the gate 107 and the focusing electrode 104.
- the gate 107 also has a lower negative voltage relative to the cathode 102. Therefore, electrons generated by the cathode 102 cannot pass through the gate 107 and are confined to the surface of the cathode 102 by the gate 107.
- the high voltage power supply 702 places the anode 2 at a very high positive high voltage, typically a positive tens of kilovolts to hundreds of kilovolts, in the electron-emitting unit 1 (ie, the side wall of the vacuum box 3, typically ground potential) and the anode 2 A positive large acceleration electric field is formed between them.
- the power supply and control system 7 causes the output of the selection switch 70306 of one of the emission control units of the emission control device 703 to be switched from a negative voltage to a positive voltage in accordance with an instruction or a preset program, and in accordance with the timing.
- the output signals of the selection switches 70306 of the respective emission control units respectively connected to the respective electron-emitting units 1 are converted. For example, at time 1, the output of the selection switch 70306 of the first emission control unit of the emission control device 703 is switched from a negative voltage to a positive voltage, and in the corresponding electron emission unit 11, the electric field between the gate 107 and the cathode 102 is changed.
- the small-diameter electron beam enters the inside of the vacuum chamber 3 through a hole connecting the center of the fixing member 105, is accelerated by a large acceleration electric field between the electron-emitting unit 11 and the anode 2, obtains energy, bombards the anode 2, and generates a target on the anode 2. 21, and, at the position of the target point 21, an emission of X-rays is generated.
- the output of the selection switch 70306 of the second emission control unit of the emission control device 703 is switched from a negative voltage to a positive voltage, the corresponding electron emission unit 12 emits electrons, a target 22 is generated on the anode 2, and at the target point The 22 position produces an emission of X-rays.
- the output of the selection switch 70306 of the third emission control unit of the emission control device 703 is cut by a negative voltage
- the corresponding electron-emitting unit 13 emits electrons, generates a target 23 on the anode 2, and generates an emission of X-rays at a position of the target 23, and so on, and then the position of the target 24 generates an emission of X-rays, and then The position of the target 25 produces an emission of X-rays... and cycles back and forth.
- the power source and control system 7 causes the respective electron-emitting units 1 to alternately operate at predetermined timings to emit electron beams by the emission control means 703, and alternately generate X-rays at different positions of the anode 2, thereby becoming distributed X-rays. source.
- the power supply and control system 7 controls each power supply to drive the various components to coordinate according to the setting program, and can receive external commands through the communication interface and the human-machine interface, modify and set key parameters of the system, update the program and Make automatic control adjustments.
- the present invention is directed to an external hot cathode distributed X-ray apparatus for generating X-rays that periodically change a focus position in a predetermined order in a light source apparatus.
- the electron emission unit of the invention adopts a hot cathode, and has the advantages of large emission current and long life with respect to other designs; a plurality of electron emission units are independently fixed on the vacuum box, and a small two-pole or three-pole electron gun can be directly used.
- the technology is mature, the cost is low, and the application is flexible.
- the design of the long strip type large anode effectively alleviates the problem of overheating of the anode, which is beneficial to increase the power of the light source;
- the electron emission unit can be arranged in a straight line, and the whole becomes a linear distributed X-ray device.
- the electron-emitting units can also be arranged in a ring shape, and the whole is a ring-shaped distributed X-ray device, which is flexible in application; the design of the focusing electrode and the design of the external focusing device can achieve a very small focus.
- the invention has large current, small target point, uniform target position distribution and good repeatability, high output power, simple structure, convenient control and low cost.
- the external hot cathode distributed X-ray source of the present invention is applied to a CT device, and multiple viewing angles can be generated without moving the light source, so that the slip ring motion can be omitted, which is advantageous for simplifying the structure and improving system stability and reliability. Improve inspection efficiency.
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Abstract
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Claims (34)
- 一种X射线装置,其特征在于,具备:真空盒,四周密封并且内部为高真空;多个电子发射单元,每个电子发射单元互相独立且排成线形阵列安装在所述真空盒的侧壁上;阳极,安装在所述真空盒内部的中间位置,并且,在长度方向上与所述电子发射单元的排列方向平行且在宽度方向上与所述电子发射单元的安装平面形成预定角度的夹角。
- 如权利要求1所述的X射线装置,其特征在于,每个电子发射单元的整体处于所述真空盒之外;来自所述电子发射单元的电子束流轰击所述阳极,从而在所述阳极的靶点位置产生X射线的发射。
- 如权利要求1所述的X射线装置,其特征在于,多个电子发射单元,在所述真空盒的侧壁上以二维排列的方式布置,并且,每个电子发射单元的整体处于所述真空盒之外;以及来自所述电子发射单元的电子束流轰击所述阳极,从而在所述阳极的靶点位置产生X射线的发射。
- 如权利要求3所述的X射线装置,其特征在于,所述电子发射单元以二维排列的方式安装在所述真空盒的两个相对的侧壁上。
- 如权利要求1所述的X射线装置,其特征在于,多个电子发射单元,在所述真空盒的侧壁上以在曲面上沿所述曲面的轴线方向面向所述轴线排列多排的方式配置,并且,每个电子发射单元的整体处于所述真空盒之外;以及阳极,由金属构成并且以布置在所述轴线上的方式配置在所述真空盒内部的中间位置,来自所述电子发射单元的电子束流轰击所述阳极,从而在所述阳极的靶点位置产生X射线的发射。
- 如权利要求1所述的X射线装置,其特征在于,所述X射线装置还具有:电源与控制系统,具有与所述阳极连接的高压电源、与所述多个电子发射单元的每一个连接的发射控制装置、用于对各电源进行控制的控制系统,所述电子发射单元具有:加热灯丝;与所述加热灯丝连接的阴极;从所述加热灯丝的两端引出的灯丝引线;绝缘支撑件,包围所述加热灯丝以及所述阴极;聚焦极,以位于所述阴极的上方的方式配置在所述绝缘支撑件的顶端;连接固定件,配置在所述聚焦极的上方,与所述真空盒的盒壁密封连接,所述灯丝引线穿过所述绝缘支撑件与所述发射控制装置连接。
- 如权利要求6所述的X射线装置,其特征在于,还具有:高压电源连接装置,将所述阳极和所述高压电源的电缆连接,安装在所述真空盒的靠近所述阳极的一端的侧壁;发射控制装置连接装置,用于连接所述加热灯丝和所述发射控制装置;真空电源,包括在所述电源与控制系统内;真空装置,安装在所述真空盒的侧壁上,利用所述真空电源进行工作,维持所述真空盒内的高真空。
- 如权利要求6所述的X射线装置,其特征在于,所述电子发射单元还具有:栅极,以与所述阴极对置的方式配置在所述阴极的上方,安装在所述阴极与所述聚焦极之间并且紧邻阴极;栅极引线,与所述栅极连接,穿过所述绝缘支撑件,与所述发射控制装置连接。
- 如权利要求6所述的X射线装置,其特征在于,所述电子发射单元还具有:聚焦段,安装在所述聚焦极与所述连接固定件之间;聚焦装置,以包围所述聚焦段的方式配置。
- 如权利要求9所述的X射线装置,其特征在于,还具有:聚焦电源,包括在所述电源与控制系统内;聚焦装置连接装置,用于连接所述聚焦装置和所述聚焦电源。
- 如权利要求1所述的X射线装置,其特征在于,所述电子发射单元分两排安装在所述真空盒的两个相对的侧壁上。
- 如权利要求1所述的X射线装置,其特征在于,所述真空盒由玻璃或陶瓷制成。
- 如权利要求1所述的X射线装置,其特征在于,所述真空盒由金属材料制成。
- 如权利要求6~13的任意一项所述的X射线装置,其特征在于,所述多个电子发射单元排列成直线形或者分段直线形。
- 如权利要求6~13的任意一项所述的X射线装置,其特征在于,所述多个电子发射单元排列成圆弧形或者分段弧线形。
- 如权利要求6~13的任意一项所述的X射线装置,其特征在于,所述多个电子发射单元的排列间隔是均匀的。
- 如权利要求6~13的任意一项所述的X射线装置,其特征在于,所述多个电子发射单元的排列间隔是非均匀的。
- 如权利要求2所述的X射线装置,其特征在于,还具备:电源与控制系统,具有与所述阳极连接的高压电源、与所述多个电子发射单元的每一个连接的发射控制装置、用于对各电源进行控制的控制系统,所述阳极在长度方向上与所述电子发射单元的排列方向平行且在宽度方向上与所述电子发射单元的安装平面形成预定角度的夹角,所述电子发射单元具有:加热灯丝;与所述加热灯丝连接的阴极;灯丝引线,从所述加热灯丝的两端引出并且与所述发射控制装置连接;栅极,以与所述阴极对置的方式配 置在所述阴极的上方;绝缘支撑件,具有开口,并且,包围所述加热灯丝以及所述阴极;连接固定件,连接在所述绝缘支撑件的上端外沿,所述栅极具有:栅极架,由金属制成并且在中间形成有开孔;栅网,由金属制成并且固定在所述栅极架的所述开孔的位置;栅极引线,从所述栅极架引出并且与所述发射控制装置连接,所述栅极以与所述阴极对置的方式配置在所述绝缘支撑件的所述开口上,所述灯丝引线以及所述栅极引线穿过所述绝缘支撑件从所述电子发射单元引出到外部,所述连接固定件与所述真空盒的盒壁密封连接。
- 如权利要求18所述的X射线装置,其特征在于,还具有:高压电源连接装置,将所述阳极和所述高压电源的电缆连接,安装在所述真空盒的靠近所述阳极的一端的侧壁;发射控制装置连接装置,用于将所述加热灯丝以及所述栅极引线和所述发射控制装置连接;真空电源,包括在所述电源与控制系统内;真空装置,安装在所述真空盒的侧壁上,利用所述真空电源进行工作,维持所述真空盒内的高真空。
- 如权利要求18或19所述的X射线装置,其特征在于,所述绝缘支撑件为圆柱形,所述栅极架、所述阴极以及所述栅网为圆形。
- 如权利要求18或19所述的X射线装置,其特征在于,所述绝缘支撑件为圆柱形,所述栅极架、所述阴极以及所述栅网为长方形。
- 如权利要求18或19所述的X射线装置,其特征在于,所述绝缘支撑件为长方体形,所述栅极架、所述阴极以及所述栅网为圆形。
- 如权利要求18或19所述的X射线装置,其特征在于,所述绝缘支撑件为长方体形,所述栅极架、所述阴极以及所述栅网为长方形。
- 如权利要求18或19所述的X射线装置,其特征在于,所述栅网为平面形、球面形或者U槽形。
- 如权利要求3所述的X射线装置,其特征在于,所述阳极包括:阳极板,由金属材料制成并且与所述电子发射单元的上表面平行;多个靶子,安装在所述阳极板上并且以分别与所述电子发射单元的位置对应的方式布置,所述靶子的底面与所述阳极板连接并且顶面与所述阳极板形成预定的角度。
- 如权利要求1或3所述的X射线装置,其特征在于,所述电子发射单元包括:平板栅极,由绝缘骨架板、栅板、栅网、栅极引线构成;阴极阵列,由多个阴极结构紧密排列构成,每个阴极结构由灯丝、与所述灯丝连接的阴极、从所述灯丝的两端引出的灯丝引线、包围所述灯丝以及所述阴极的绝缘支撑件构成,所述栅板设置于所述绝缘骨架板,并且,所述栅网设置于在所述栅板上形成的开孔的位置,所述栅极引线从所述栅板引出,所述平板栅极位于所述阴极阵列的上方,在垂直方向上,所述栅网的中心与所述阴极的中心两两重合,所述灯丝引线和所述栅极引线分别与所述发射控制装置连接,所述阳极包括:阳极板,由金属材料制成并且与所述电子发射单元的上表面平行;多个靶子,安装在所述阳极板上并且以分别与所述电子发射单元的位置对应的方式布置,所述靶子的底面与所述阳极板连接并且顶面与所述阳极板形成预定的角度。
- 如权利要求1、3、4、6至13、25和26的任意一项所述的X射线装置,其特征在于,所述多个电子发射单元排列的阵列在两个方向上均为直线、或者一个方向为直线另一个方向为分段直线。
- 如权利要求1、3、4、6至13、25和26的任意一项所述的X射线装置,其特征在于,所述多个电子发射单元排列的阵列在一个方向上为直线并且在另一个方向上为弧线或者分段弧线。
- 如权利要求1或5所述的X射线装置,其特征在于,所述阳极包括:阳极管道,由金属构成并且具有中空的管状形状;阳极支撑件,配置在所述阳极管道上;阳极靶面,设置在所述阳极管道的外表面并且与所述电子发射单元相面对。
- 如权利要求29所述的X射线装置,其特征在于,所述阳极靶面是所述阳极管道的外圆被切除一部分而形成的斜平面。
- 如权利要求29所述的X射线装置,其特征在于,所述阳极靶面是在将所述阳极管道的外圆切除一部分所形成斜平面上形成有重金属材料钨或者钨合金而形成的。
- 如权利要求5、29至32的任意一项所述的X射线装置,其特征在于,所述轴线为直线或者分段直线。
- 如权利要求5、29至32的任意一项所述的X射线装置,其特征在于,所述轴线为圆弧或者分段圆弧。
- 一种CT设备,其特征在于,所使用的X射线源是权利要求1~33的任意一项所述的X射线装置。
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- 2014-09-17 KR KR1020167008295A patent/KR101855931B1/ko active IP Right Grant
- 2014-09-17 JP JP2016543304A patent/JP6526014B2/ja active Active
- 2014-09-17 WO PCT/CN2014/086743 patent/WO2015039603A1/zh active Application Filing
- 2014-09-17 RU RU2016114671A patent/RU2655916C2/ru active
- 2014-09-18 US US14/490,526 patent/US9653251B2/en active Active
- 2014-09-18 EP EP14185376.2A patent/EP2858087B1/en active Active
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RU2016114671A (ru) | 2017-10-23 |
JP6526014B2 (ja) | 2019-06-05 |
RU2655916C2 (ru) | 2018-05-30 |
EP2858087A1 (en) | 2015-04-08 |
ES2749725T3 (es) | 2020-03-23 |
JP2016537795A (ja) | 2016-12-01 |
US9653251B2 (en) | 2017-05-16 |
US20150078532A1 (en) | 2015-03-19 |
KR101855931B1 (ko) | 2018-05-10 |
KR20160083848A (ko) | 2016-07-12 |
PL2858087T3 (pl) | 2019-12-31 |
EP2858087B1 (en) | 2019-07-03 |
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