WO2015030075A1

WO2015030075A1 - Mask for printing, and printing method using said mask

Info

Publication number: WO2015030075A1
Application number: PCT/JP2014/072478
Authority: WO
Inventors: 水村　通伸
Original assignee: 株式会社ブイ・テクノロジー
Priority date: 2013-08-29
Filing date: 2014-08-27
Publication date: 2015-03-05
Also published as: CN105492215A; TW201529339A; JP2015044382A; JP6159203B2; KR20160047467A

Abstract

A mask for printing, said mask comprising: a mask substrate (4), which has a printing groove pattern (4a) formed on a printing surface side thereof and corresponding to a pattern to be printed, and has through holes (4b) that pass through the bottom surface of the printing groove pattern and have an inner diameter that is smaller than the width of said bottom surface; and a holding member (3) that is laminated on the mask substrate and has an opening pattern (3a) for communicating with the inside of the printing groove pattern via the through holes in the mask substrate, and filling the printing groove pattern with a transfer material. In addition, the printing groove pattern is capable of suppressing positional displacement and deformation of the mask substrate pattern by being connected in peripheral regions (4c) other than the through holes.

Description

Printing mask and printing method using the mask

The present invention relates to a mask for printing a pattern on a substrate and a printing method using the mask, and more specifically, to suppress a positional deviation or deformation of a pattern by using a laminated structure of a mask base material and a holding member. And a printing method using the mask.

A conventional printing screen mask has a configuration in which, for example, a resist pattern is formed on a screen mesh stretched on a screen plate frame. As the material for the screen mesh, resin fibers such as silk, nylon and polyester, stainless mesh, and the like are used. The resist pattern is formed by applying a photosensitive emulsion on a screen mesh and drying it to form a photosensitive film, and then exposing and developing the photosensitive film in close contact with the photosensitive film.

When printing, a screen mask stretched on a screen frame is set on the printing surface at a slight distance, and ink (or paste) is supplied onto the screen mask. Then, while pressing the screen mask against the printing surface with the pressure of the squeegee, the ink is pushed out from the opening of the screen mask onto the printing surface, thereby transferring the pattern onto the printing surface (for example, Patent Document 1). reference).

JP-A-9-216330

However, the conventional printing mask and printing method have a problem in that the resist pattern is displaced or deformed due to the pressure applied when the ink is extended with the squeegee, and the pattern accuracy is not obtained. In particular, in a pattern or the like in which thin and long straight wirings are arranged at a narrow pitch, the resist pattern is likely to be shifted or deformed in the lateral direction perpendicular to the extending direction of the wiring, and the pattern accuracy is significantly reduced.

Accordingly, a problem to be solved by the present invention that addresses such problems is a printing mask that attempts to suppress pattern misalignment and deformation by adopting a laminated structure of a mask base material and a holding member. And a printing method using the mask.

In order to solve the above problems, the printing mask according to the present invention is formed on the printing surface side, penetrates the printing groove pattern corresponding to the pattern to be printed, and the bottom surface of the printing groove pattern, and is smaller than the bottom surface width. A mask base material having a through hole of an inner diameter, and a holding member having an opening pattern that is laminated on the mask base material and communicates with the transfer groove pattern through the through hole of the mask base material. , And the printing groove pattern is connected in a peripheral region other than the through hole.

In addition, a plurality of the through holes may be provided on the bottom surface of the printing groove pattern.

Further, the mask base material may be made of a resin film, the holding member may be a sheet shape, and the opening pattern may be made of a magnetic metal material formed at a predetermined pitch in at least one of the longitudinal direction and the short side direction.

Furthermore, a plate-making frame that surrounds the periphery of the mask base material and the holding member and on which the both members are stretched may be further provided.

In order to solve the above-described problems, a printing method according to the present invention includes a printing groove pattern corresponding to a pattern to be printed formed on the printing surface side, and an inner diameter smaller than the bottom width of the printing groove pattern. And a holding member having an opening pattern that is laminated on the mask base material and communicates with the transfer groove pattern through the through holes of the mask base material and fills the transfer material. A printing method using a printing mask in which the printing groove pattern is connected in a peripheral region other than the through-hole, wherein the printing surface of the printing mask is arranged on the printing surface of the substrate. Fixing the transfer material onto the holding member, filling the transfer groove pattern into the printing groove pattern from the opening pattern of the holding member through the through hole of the mask base, The transfer material printed groove pattern of disk substrate, wherein those comprising a step of transferring a pattern by depositing on the substrate, a step of removing the mask for printing from the printing substrate, the.

Further, the holding member is made of a sheet-like magnetic metal material, and the step of arranging and fixing the printing surface of the printing mask includes fixing by attracting magnetic force from the side opposite to the printing surface of the substrate. Also good.

Furthermore, the transfer material may include a photoresist, and may be formed by printing a photoresist pattern on the substrate.

According to the printing mask of the present invention, a laminated structure of a mask base material having a printing groove pattern and a through hole and a holding member having an opening pattern is formed, and the printing groove pattern is connected in a peripheral region other than the through hole. Thereby, the position shift and deformation | transformation of the printing groove pattern currently formed in the mask base material can be suppressed.

Further, according to the printing method of the present invention, in the step of applying and filling the transfer material, the printing groove pattern is connected in the peripheral region other than the through-hole, so that it takes when the transfer material is extended with the squeegee. Due to the pressure, positional deviation and deformation of the printing groove pattern formed on the mask base material can be suppressed. Therefore, even a fine and close pattern can be printed with high pattern accuracy with little displacement and deformation of the printed pattern.

1 is a perspective view of a schematic configuration showing an embodiment of a printing mask according to the present invention. FIG. 2 is an enlarged view of a partial region of the printing mask illustrated in FIG. 1, and is a plan view of the partial region. FIG. 2 is an enlarged view of a partial region of the printing mask shown in FIG. 1, and is a cross-sectional view taken along line X1-X1 ′ of FIG. 2A. FIG. 2 is an enlarged view of a part of the printing mask shown in FIG. 1, and is a cross-sectional view taken along line X2-X2 ′ of FIG. 2A. The printing method using the printing mask by this invention is shown, and it is a perspective view which shows the application | coating process of an ink. FIG. 3B is an enlarged cross-sectional view taken along line Y-Y ′ of FIG. 3A, showing a printing method using the printing mask according to the present invention. The printing method using the printing mask by this invention is shown, and it is a perspective view which shows the process of peeling a printing mask from to-be-printed material. FIG. 4B is an enlarged cross-sectional view of the printing mask taken along the line Z1-Z1 ′ of FIG. 4A, illustrating a printing method using the printing mask according to the present invention. FIG. 4A is an enlarged cross-sectional view of a substrate to be printed along the line Z2-Z2 ′ of FIG. 4A, showing a printing method using a printing mask according to the present invention. It is a top view which shows the other structural example of the opening pattern in a holding member.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a diagram showing an embodiment of a printing mask according to the present invention. This printing mask is printed by transferring a pattern of ink (or paste, photoresist, etc.) as a transfer material on a printing surface, and comprises a composite mask 1 and a metal frame (plate making frame) 2. . The composite mask 1 is stretched inside a rectangular metal frame 2 and is held in a tensioned state.

The composite mask 1 is formed by laminating a resin film 4 as a mask base material and a holding member 3 as shown in FIG. 2A, FIG. 2B and FIG. It has a composite structure. On the printing surface (lower surface) side of the resin film 4, a printing groove pattern 4a corresponding to the pattern to be printed is formed. Moreover, the through-hole 4b is formed in the bottom face of the printing groove pattern 4a. The thickness of the resin film 4 is, for example, about 12 μm to 24 μm. In this example, a plurality of linear printing groove patterns 4a are arranged adjacent to each other.

On the upper surface side of the printing surface of the resin film 4, there are provided holding members 3 having slit-like opening patterns 3a arranged at a constant pitch in the lateral direction and made of a magnetic metal material in the form of a sheet. The holding member 3 is for holding and fixing the composite mask 1 with magnetic force during printing, and has a thickness that can be held with magnetic force, for example, about 30 μm. The opening pattern 3a of the holding member 3 communicates with the printing groove pattern 4a through the through hole 4b. The inner diameter of the through hole 4b is smaller than the bottom width of the printing groove pattern 4a and the inner diameter of the opening pattern 3a, and the opening pattern 3a and the printing groove pattern 4a communicate with each other through one or more through holes 4b. ing.

Here, in the present invention, as shown in FIG. 2C, the composite mask 1 is a peripheral region other than the through-holes 4b on the bottom surface of the printing groove pattern 4a (between adjacent through-holes 4b). Region) 4c.

That is, the through-hole 4b in the mask base 4 allows the opening pattern 3a and the printing groove pattern 4a to communicate with each other, and the ink applied to the holding member 3 is transferred from the opening pattern 3a to the printing groove pattern 4a through the through-hole 4b. Functions to fill. Further, since the peripheral region 4c other than the through hole 4b is connected, it functions to suppress the deviation and deformation of the adjacent print groove pattern 4a.

According to the printing mask having the above-described configuration, the adjacent printing groove pattern 4a is connected in the peripheral region 4c other than the through hole 4b on the bottom surface of the printing groove pattern 4a. Can be suppressed. For example, even if the pattern is such that long straight lines are continuously arranged at a narrow pitch, or a pattern that is fine and close, the displacement or deformation in the lateral direction perpendicular to the extending direction of the linear pattern It can be suppressed in the peripheral region 4c.

The printing mask described above can be formed by, for example, the following manufacturing method.
First, for example, a liquid resin is applied and cured on the holding member 3 on which the slit-shaped opening pattern 3a is formed, and the resin film 4 is laminated. Alternatively, the metal film is plated on the resin film 4 to form the holding member 3 and the holding member 3 is etched to form the slit-shaped opening pattern 3a.

Next, for example, a laser beam is irradiated through the opening pattern 3a of the holding member 3 to form the through hole 4b. The through holes 4b can be formed in a matrix at a predetermined pitch in the opening pattern 3a or can be formed randomly. In consideration of the size of the printing groove pattern 4a and the viscosity of the ink, a plurality of through holes 4b are arranged at the bottom for a large pattern and at least one for a small pattern. In addition, the pitch and the like may be considered.

Subsequently, a laminated structure of the holding member 3 and the resin film 4 is stretched inside the metal frame 2. Then, in a state where tension is applied to the holding member 3 and the resin film 4, a laser beam or the like is irradiated from the printing surface side of the resin film 4 to form a printing groove pattern 4a corresponding to the pattern to be printed. At this time, the power of the laser beam and the irradiation time are set so that the depth of the printing groove pattern 3 a is shallower than the thickness of the resin film 4.

In addition, when plating a magnetic metal on the resin film 4, the resin film 4 in which the through-hole 4b was previously formed by the predetermined pitch or random can also be used. In this case, since the through hole 4b in the region other than the opening pattern 3a is covered with the holding member 3, the ink does not permeate the printing surface side. Even when the resin film 4 having the through holes 4b is used, the inner diameter, pitch, and arrangement of the through holes 4b are set so that one or more through holes 4b are arranged on the bottom surface of the printing groove pattern 4a. Good.

Next, a printing method using the printing mask will be described with reference to FIGS. 3A, 3B, 4A, 4B, and 4C.
First, the metal frame 2 is mounted on a printing apparatus, the composite mask 1 is disposed on the substrate 5, and the magnet 6 (see FIG. 3B) is disposed on the lower surface (opposite to the printing surface) of the substrate 5. The holding member 3 is attracted by a magnetic force to fix the composite mask 1. In this state, as shown in FIG. 3A, the ink 7 is supplied onto the surface of the composite mask 1 (the surface of the holding member 3), and the squeegee 8 is moved to the arrow while pressing the composite mask 1 against the printing surface by the pressure of the squeegee 8. The ink 7 is applied by moving in the direction. As shown in FIG. 3B, the ink 7 applied to the surface of the holding member 3 is filled into the printing groove pattern 4a from the opening pattern 3a through the through holes 4b of the resin film 4. Subsequently, the ink 7 is extruded onto the printing surface of the substrate 5 to be applied and transferred.

Next, as shown in FIG. 4A, the composite mask 1 is peeled from the substrate 5. Then, as shown in FIG. 4B, the composite mask 1 is peeled off from the substrate 5 without deformation, and the ink 7 in the printing groove pattern 4a is transferred onto the substrate 5 as shown in FIG. 7a is formed.

According to the printing method as described above, in the step of applying the ink 7, the holding member 3 is attracted by the magnetic force to fix the resin film 4, and the peripheral region 4c other than the through hole 4b at the bottom of the printing groove pattern 4a. Since the printing groove patterns are connected to each other, the displacement and deformation of the pattern of the resin film 4 can be suppressed by the pressure applied when the ink 7 is extended by the squeegee 8. In particular, a pattern in which linear long wirings are arranged at a narrow pitch, which is difficult to form with conventional screen masks, or a fine and close pattern, for example, an extraction wiring pattern formed in a frame region of a touch panel is formed. Therefore, it is possible to perform printing with high pattern accuracy by suppressing the displacement and deformation of the printed wiring pattern.

Moreover, in the etching process using a photoresist, a photoresist coating process, an exposure process, a developing process, and an etching process are required to form a pattern. However, by using a photoresist as a transfer material, By directly forming the pattern on the object to be etched by printing and performing etching using this resist pattern, the exposure process and the development process are not required, and the etching process can be greatly simplified.

The opening pattern of the holding member 3 is not limited to the slit shape, and may be an arrangement in which rectangular opening patterns 3b are arranged in a matrix form vertically and horizontally as shown in FIG. In such an opening pattern 3b, the frame-

like portions

3c and 3d of the holding member 3 between the adjacent opening patterns 3b can be reinforced in a vertically and horizontally connected state, and therefore, compared to the slit-like opening pattern 3a shown in FIG. The deviation of the opening pattern 3b can be reduced when the ink 7 is applied by the squeegee 8.
In the above-described embodiment, an example in which the through-hole is circular has been shown. However, if the printing groove pattern can be filled with ink and adjacent printing groove patterns can be connected in the peripheral region, the shape is not limited to a circle. Absent.

1 ... Composite mask 2 ... Metal frame (plate making frame)
3 ... Holding

member

3a, 3b ... Opening pattern 4 ... Resin film (mask base material)
4a ... Print groove pattern 4b ... Through hole 4c ... Peripheral region 5 ... Printed material 6 ... Magnet 7 ... Ink (transfer material)

Claims

A mask substrate formed on the printing surface side and having a printing groove pattern corresponding to a pattern to be printed, and a through hole having an inner diameter smaller than the bottom surface width of the printing groove pattern;
A holding member having an opening pattern that is laminated on the mask base material and communicates with the transfer groove pattern through the through holes of the mask base material to fill the transfer material;
The printing mask, wherein the printing groove pattern is connected in a peripheral region other than the through hole.
The printing mask according to claim 1, wherein a plurality of the through holes are provided on a bottom surface of the printing groove pattern.
The mask substrate is made of a resin film, the holding member is a sheet, and the opening pattern is made of a magnetic metal material formed at a predetermined pitch in at least one of a longitudinal direction and a short direction. Item 3. A printing mask according to Item 1 or 2.
The printing mask according to claim 1 or 2, further comprising a plate-making frame surrounding the mask base material and the holding member so that both members are stretched.
The printing mask according to claim 3, further comprising a plate making frame surrounding the mask base material and the holding member and on which both members are stretched.
A mask substrate formed on the printing surface side and penetrating the bottom surface of the printing groove pattern corresponding to the pattern to be printed, and having a through hole having an inner diameter smaller than the bottom surface width; And a holding member having an opening pattern that is stacked and communicated into the printing groove pattern through the through hole of the mask base material and is filled with the transfer material, and the printing groove pattern is other than the through hole. A printing method using a mask for printing connected in a peripheral area,
Placing and fixing the printing surface of the printing mask on the printing surface of the substrate; and
Applying the transfer material to the holding member, and filling the printing groove pattern from the opening pattern of the holding member through the through hole of the mask base material,
A step of depositing a transfer material in a printing groove pattern of the mask base material on the substrate and transferring the pattern;
Peeling the mask for printing from the substrate,
A printing method comprising:
The holding member is made of a sheet-like magnetic metal material, and the step of arranging and fixing the printing surface of the printing mask is fixed by attracting magnetically from the opposite side of the printing surface of the substrate. The printing method according to claim 6.
The printing method according to claim 6 or 7, wherein the transfer material includes a photoresist and is formed by printing a photoresist pattern on the substrate.