WO2015021820A1 - 零刚度磁悬浮主动隔振器及其构成的六自由度隔振系统 - Google Patents
零刚度磁悬浮主动隔振器及其构成的六自由度隔振系统 Download PDFInfo
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- WO2015021820A1 WO2015021820A1 PCT/CN2014/080356 CN2014080356W WO2015021820A1 WO 2015021820 A1 WO2015021820 A1 WO 2015021820A1 CN 2014080356 W CN2014080356 W CN 2014080356W WO 2015021820 A1 WO2015021820 A1 WO 2015021820A1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
Definitions
- the invention belongs to the field of precision vibration isolation, and particularly relates to a zero-stiffness magnetic suspension active vibration isolator and a six-degree-of-freedom vibration isolation system thereof.
- the zero-stiffness magnetic suspension active vibration isolator according to the present invention has a compact structure, and the six-degree-of-freedom vibration isolation system has the characteristics of quasi-zero stiffness.
- Active vibration control can effectively attenuate vibrations in the frequency band around the natural frequency of the system, but has no effect on the attenuation of high-frequency vibration. Reducing the stiffness of the isolator can increase the overall vibration isolation bandwidth and increase the attenuation of high frequency vibration.
- the traditional magnetic suspension vibration isolator adopts electromagnetic control to realize active control of its bearing and vibration. The stability of electromagnetic control limits the practical application of the electromagnetic suspension isolator, which makes it impossible to achieve better vibration isolation performance.
- the general air spring isolator or air-floating isolator has a large bearing capacity, but its gas leakage has restricted its application in a vacuum environment.
- U.S. Patent No. 7,290,642 B2 provides a negative stiffness magnetic spring that uses a mutual attraction of the magnet to create a negative stiffness characteristic, but which is unstable and must be isolated in parallel with a positive stiffness spring.
- This positive and negative stiffness parallel isolators can achieve a lower natural frequency of the system, which is beneficial to improve the vibration isolation performance.
- U.S. Patent No. 6,220,705 B1 provides an air-floating isolator, which adopts a conical surface air bearing in combination with an air spring, and the stiffness is determined by an air spring; the horizontal direction adopts an end thrust air bearing, which has a quasi-zero stiffness characteristic. .
- the horizontal direction adopts an end thrust air bearing, which has a quasi-zero stiffness characteristic.
- the object of the present invention is to provide a zero-stiffness magnetic suspension active vibration isolator and a six-degree-of-freedom vibration isolation system thereof.
- the zero-stiffness magnetic suspension active vibration isolator has a compact structure, and the six-degree-of-freedom vibration isolation system has quasi-zero stiffness. It not only has good vibration isolation effect on high-frequency vibration interference, but also effectively isolates ultra-low frequency vibration of foundation and environment, providing a stable working environment for ultra-precision machining and measuring equipment.
- the invention provides a zero-stiffness magnetic suspension active vibration isolator, which comprises an upper magnet, an intermediate magnet and a lower magnet.
- the upper magnet and the lower magnet are fixed, and the intermediate magnet can be in three directions (X, y, z).
- the magnetization directions of the upper magnet and the intermediate magnet are the same, and the magnetization directions of the lower magnet and the intermediate magnet are opposite.
- the zero-stiffness magnetic suspension active vibration isolator comprises a permanent magnet passive vibration isolation unit, an active vibration isolation unit and a safety limit component; wherein the permanent magnet passive vibration isolation unit comprises the upper magnet and the lower part
- the magnet and the intermediate magnet further include an upper yoke, a lower yoke, an intermediate magnet case, an intermediate magnet cover, a load connecting rod, an upper limit block, a lower limit block, and a yoke fixed connecting rod;
- the upper magnet is fixedly mounted on the upper magnet a first magnetic pole portion of the permanent magnet passive vibration isolating unit is formed on the yoke;
- the lower magnet is fixedly mounted on the lower yoke to form a second magnetic pole portion of the permanent magnet passive vibration isolating unit;
- the upper yoke is arranged by three triangular yokes arranged in a triangle
- the fixed connecting rod is fixedly connected with the lower yoke, the yoke fixing connecting rod is also used for the horizontal limit of the intermediate
- the intermediate magnet is fixed in the intermediate magnet box; the intermediate magnet box is connected to the load connecting plate through the load connecting rod, and the load connecting rod is connected with the load connecting plate to make the installation direction of the intermediate magnet box unique; the upper limit block and the lower limit block are used for The intermediate magnet box is in the vertical limit; the three upper limit blocks are triangularly mounted on the upper yoke, and the three lower limit blocks are triangularly mounted on the lower yoke; the active vibration isolating unit comprises a vertical Lorentz motor stator , vertical Lorentz motor mover, horizontal Lorentz motor stator, horizontal Lorentz motor mover, vertical speed sensor, horizontal Speed sensor, vertical displacement sensor and horizontal displacement sensor; vertical speed sensor detects vertical vibration speed of load connection plate, and active damping control is applied to load connection plate by vertical Lorentz motor feedback control; vertical displacement sensor Detecting the vertical vibration displacement of the load connecting plate, applying vertical positioning control to the load connecting plate through the vertical Lorentz motor feedback control, and detecting the horizontal vibration speed of the load connecting plate
- the target plate detects the horizontal displacement vibration displacement of the load connecting plate, and the horizontal displacement detecting target plate is fixedly mounted on the load connecting plate; the load connecting plate is connected to the bottom plate through three triangularly arranged columns; the load connecting plate passes the safety limit
- the bit assembly implements mechanical leveling and positioning.
- a six-degree-of-freedom zero-stiffness active vibration isolation system composed of a zero-stiffness magnetic suspension active vibration isolator, characterized in that the vibration isolation system comprises three or four zero-stiffness magnetic suspension active vibration isolators, a main substrate, a base frame and an adjustment branch Legs; three zero-stiffness magnetic levitation active isolators are respectively located at three corners of the isosceles triangle, or four zero-stiffness magnetic levitation active isolators are respectively located at the four corners of the rectangle, and are fixedly mounted on the base frame, the foundation
- the frame is provided with adjustment legs, main substrate and each The zero-stiffness magnetic suspension active isolators are connected; the horizontal adjustment of the main substrate is achieved by adjusting the adjustment legs.
- the permanent magnet magnetic suspension active vibration isolation technology with positive and negative stiffness parallel connection can not only overcome the defects of electromagnetic suspension active control, but also make the vibration isolator have quasi-zero stiffness characteristics.
- the zero-stiffness magnetic suspension active vibration isolating device and the six-degree-of-freedom vibration isolation system provided by the invention are applied to the field of ultra-low frequency precision vibration isolation, and have the characteristics of quasi-zero stiffness, which overcomes the inability of the general vibration isolator to realize or realize the ultra-low frequency.
- the shortcomings of vibration isolation provide a stable working environment for precision machining and measuring equipment, and are suitable for precision machining and measuring equipment sensitive to low frequency vibration.
- FIG. 1 is a schematic diagram of a zero-stiffness magnetic suspension active vibration isolator provided by the present invention
- FIG. 2 is a stiffness curve of the z-direction in the schematic diagram of the vibration isolator of FIG. 1 according to the present invention
- FIG. 3 is a partial cross-sectional view showing a permanent magnet passive vibration isolation unit of a zero-stiffness magnetic suspension active vibration isolator provided by an example of the present invention
- FIG. 4 is a three-dimensional structural diagram of a permanent magnet passive vibration isolation unit of a zero-stiffness magnetic suspension active vibration isolator provided by an example of the present invention
- FIG. 5 is a three-dimensional structural diagram of a permanent magnet passive vibration isolation unit of a zero-stiffness magnetic suspension active vibration isolator provided by an example of the present invention
- FIG. 6 is a structural arrangement diagram of a permanent magnet passive vibration isolation unit magnet of a zero-stiffness magnetic suspension active vibration isolator provided by an example of the present invention
- FIG. 7 is a three-dimensional structural view of a zero-stiffness magnetic suspension active vibration isolator provided by an example of the present invention
- FIG. 8 is a three-dimensional structural diagram of a zero-stiffness magnetic suspension active vibration isolator provided by an example of the present invention
- the zero-stiffness magnetic suspension active vibration isolator provided by the example of the present invention comprises an upper magnet 1, an intermediate magnet 3 and a lower magnet 2, the upper magnet 1 and the lower magnet 2 are fixed, and the intermediate magnet 3 can be at x, _y, z Move in three directions.
- the direction indicated by the arrow in the figure is the magnetization direction of the magnet, that is, the magnetization directions of the upper magnet 1 and the intermediate magnet 3 are the same, and the magnetization directions of the lower magnet 2 and the intermediate magnet 3 are opposite.
- the intermediate magnet 3 When the intermediate magnet 3 is in the symmetrical intermediate position of the upper magnet 1 and the lower magnet 2, the intermediate magnet 3 receives the suction force of the upper magnet 1, and is simultaneously subjected to the repulsive force of the lower magnet 2, and has an upward combined force in the z direction for supporting the load.
- the load is balanced with the resultant force such that the intermediate magnet 3 is just in the middle of the upper magnet 1 and the lower magnet 2.
- the intermediate magnet 3 is in the symmetrical intermediate position of the upper magnet 1 and the lower magnet 2 and moves in the JC direction; due to the symmetry, the resultant force of the upper magnet 1 and the lower magnet 2 is zero in the direction of the ⁇ and ⁇ , force and Independent of displacement, the horizontal direction has zero stiffness characteristics.
- the stiffness of the zero-stiffness magnetic suspension isolator provided by the present invention is related to the magnet size and the magnet spacing 2, the size of the magnet determines its stiffness.
- the present invention considers the bearing capacity and the overall structure size in consideration of the upper magnet 1 and the lower magnet 2
- the dimensions in the (X, y, z) direction are fixed to 50mm X 50mm X 10mm, and the intermediate magnet 3 has the same size in the direction of the sum, the value is between 20mm and 50mm, and its dimension in the z direction is 10mm to Between 20mm, and the magnet spacing h is between 18mm and 25mm.
- the size of the upper magnet 1 and the lower magnet 2 in the (X, y, z) direction is preferably 50 mm X 50 mm XI 0 mm, and the intermediate magnet 3 is at (X,
- the dimensions in the y, z) direction are 30mm X 30mm XI 7mm, and the magnet spacing is 20mm.
- Figure 2 is a graph showing the stiffness of the z-direction in the schematic diagram of the isolator shown in Figure 1 of the present invention.
- the geometric parameters of the magnet and the spacing of the magnets are as described above. As can be seen from Figure 2, there is a small amplitude in the z direction.
- the z-direction stiffness tends to zero, and it has the characteristics of quasi-zero stiffness.
- the amplitude is usually on the order of micrometers, so that the isolators have a bearing capacity in the z-direction while the stiffness is almost zero.
- Figure 3 shows the mechanism of the permanent magnet passive vibration isolation unit of the zero-stiffness magnetic suspension active vibration isolator provided by the present invention
- Sectional view. 4 and FIG. 5 are three-dimensional structural diagrams of a permanent magnet passive vibration isolation unit of a zero-stiffness magnetic suspension active vibration isolator provided by the present invention.
- 6 is a structural arrangement diagram of a permanent magnet passive vibration isolation unit magnet of a zero-stiffness magnetic suspension active vibration isolator provided by the present invention.
- 7 and 8 are three-dimensional structural views of a zero-stiffness magnetic suspension active vibration isolator provided by the present invention.
- the zero-stiffness magnetic suspension active vibration isolator comprises a permanent magnet passive vibration isolation unit, a main vibration isolation unit and a safety limit component.
- the permanent magnet passive vibration isolation unit includes an upper magnet 1, a lower magnet 2, an intermediate magnet 3, an upper yoke 4, a lower yoke 5, an intermediate magnet case 6, and an intermediate portion.
- One or more upper magnets 1 are fixedly mounted on the upper yoke 4 to form a first magnetic pole portion of the permanent magnet passive vibration isolating unit; one or more lower magnets 2 are fixedly mounted on the lower yoke 5 to form a permanent magnetic passive partition The second magnetic pole portion of the oscillating unit.
- the upper yoke 4 is fixed to the lower yoke 5 by three yoke fixing connecting rods 10 arranged in a triangular shape, and the yoke fixing connecting rod 10 can also be used for the horizontal limit of the intermediate magnet case 6.
- the lower yoke 5 is fixed to the bottom plate 25 by screws.
- the bottom plate 25 is connected to the external base frame by screws.
- the number of the intermediate magnet 3, the upper magnet 1, and the lower magnet 2 is the same.
- the intermediate magnet 3 is placed in the intermediate magnet case 6, and the intermediate magnet case cover 7 and the intermediate magnet case 6 are fixed by screws so that the intermediate magnet 3 is fixed in the intermediate magnet case 6.
- the intermediate magnet case 6 is connected to the load connecting plate 24 via the load connecting rod 8, and the load connecting rod 8 and the load connecting plate 24 are connected by two screws to ensure that the direction in which the intermediate magnet case 6 is mounted is unique.
- the upper limit block 9a and the lower limit block 9b are used for the vertical limit of the intermediate magnet case 6.
- the three upper limit blocks 9a are triangularly mounted on the upper yoke 4, and the three lower limit blocks 9b are triangularly mounted on the lower yoke 5.
- the magnet portion provided by the present invention may adopt a magnet, or a plurality of magnets may be arranged in a ⁇ -type or a lip-shaped manner.
- Eight magnets are arranged in a mouth-shaped configuration.
- the active vibration isolation unit includes a vertical Lorentz motor stator 11, a vertical Lorentz motor mover 12, and a horizontal direction.
- the vertical speed sensor 15 detects the vertical vibration speed of the load connecting plate 24, and applies active damping control to the load connecting plate 24 through the vertical Lorentz motor feedback control; the vertical displacement sensor 19 detects the vertical vibration displacement of the load connecting plate 24.
- the vertical positioning control is applied to the load connecting plate 24 by the vertical Lorentz motor feedback control to ensure the stability of the permanent magnet suspension isolator.
- the horizontal velocity sensor 17 detects the horizontal vibration velocity of the load connecting plate 24, and applies active damping control to the load connecting plate 24 through the horizontal Lorentz motor feedback control; the horizontal displacement sensor 20 detects the horizontal vibration displacement of the load connecting plate 24.
- Horizontal positioning control is applied to the load link plate 24 by horizontal feedback to the Lorentz motor.
- the vertical Lorentz motor stator 11 is mounted on the vertical motor stator mount 110, and the vertical motor stator mount 110 is fixed to the base plate 25 by screws.
- the vertical Lorentz motor mover 12 is fixed to the load connection plate 24.
- the horizontal Lorentz motor stator 13 is mounted on the horizontal motor stator mount 130, and the horizontal motor stator mount 130 is fixedly mounted on the bottom plate 25 by screws, horizontally to the Lorentz motor mover 12 and the load connecting plate 24 even.
- the vertical speed sensor 15 is mounted in the vertical speed sensor mount 16 by a set screw, and the vertical speed sensor mount 16 is fixed to the load connecting plate 24 by screws for detecting the absolute vibration of the load connecting plate 24 in the vertical direction. speed.
- the horizontal speed sensor 17 is mounted in the horizontal speed sensor mount 18 by means of set screws, and the horizontal speed sensor mount 18 is fixed to the load connecting plate 24 by screws for detecting the absolute vibration of the load connecting plate 24 in the horizontal direction. speed.
- the vertical displacement sensor 19 and the horizontal displacement sensor 20 are mounted on the displacement sensor mounting plate 22, which is a sheet metal structure and is mounted on the column 23.
- the vertical displacement sensor 19 detects the vertical vibration displacement of the load connecting plate 25, and the horizontal displacement sensor 20 detects the horizontal displacement vibration displacement of the load connecting plate 25 by the horizontal displacement detecting target plate 21, and fixes the horizontal displacement detecting target plate 21 horizontally.
- Load connection plate 24 through three A column 23 arranged in a triangular shape is connected to the bottom plate 25.
- the safety limit assembly includes a bolt 240 and a lock nut 241.
- the lock nut 241 is threadedly connected to the bolt 240.
- the bolt 240 is connected to the column 23 by a thread.
- the safety limit assembly enables mechanical leveling of the load link plate 24.
- the safety limit component is also used for safety protection, limiting the vertical and horizontal displacement of the load during the operation of the isolator, preventing excessive amplitude, and locking the isolator during transportation. The effect of the vibration of the load connecting plate 24 is prevented.
- FIG. 9 is a structural diagram of a six-degree-of-freedom zero-stiffness active vibration isolation system provided by the present invention.
- the vibration isolation system is composed of three zero-stiffness magnetic suspension active isolators 100, a main substrate 101, a base frame 102, and adjustment legs 103, and is arranged in an isosceles triangle.
- Three zero-stiffness magnetic levitation active isolators 100 are respectively located at three corner points of the isosceles triangle, fixedly mounted on the base frame 102, and the base frame is placed on the foundation by three adjustment legs 103, the main substrate 101 and three zeros
- the stiffness magnetic suspension active isolators 100 are connected.
- the level adjustment of the main substrate 101 can be achieved by adjusting the adjustment legs 103.
- the main substrate 101 is used to house components such as external precision instruments and equipment that require precise vibration isolation.
- components such as external precision instruments and equipment that require precise vibration isolation.
- the vibration isolation system composed of three zero-stiffness magnetic suspension active vibration isolators 100 shown in FIG. 9, in order to further increase the load-carrying capacity of the vibration isolation system, four zero-stiffness magnetic suspension active vibration isolators 100 can also be used. Forms a rectangular arrangement.
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Abstract
一种结构紧凑的零刚度磁悬浮主动隔振器及其构成的六自由度隔振系统,属于精密隔振领域。零刚度磁悬浮主动隔振器包括永磁被动隔振单元、主动隔振单元和安全限位组件。永磁被动隔振单元包括上部磁铁(1)、下部磁铁(2)、中间磁铁(3)及其相关连接部件,磁铁为矩形磁铁。主动隔振单元可施加垂向和水平向的定位控制与振动主动控制,包括洛伦兹电机、速度传感器和位移传感器。安全限位组件具有机械水平调节和限位安全保护作用。零刚度磁悬浮主动隔振器在水平向具有零刚度且在垂向具有承载力的同时具有准零刚度的特点,其构成的六自由度隔振系统适用于对低频振动敏感的精密加工与测量。
Description
零刚度磁悬浮主动隔振器及其构成的六自由度隔掘系统 【技术领域】
本发明属于精密隔振领域, 具体涉及一种零刚度磁悬浮主动隔振器及 其构成的六自由度隔振系统。 本发明所涉及的零刚度磁悬浮主动隔振器结 构紧凑, 其构成的六自由度隔振系统具有准零刚度的特点。
【背景技术】
随着精密加工与测量设备对振动的要求越来越严格, 提高隔振器的性 能变得越来越重要。 引入振动主动控制和降低隔振器刚度是提高隔振性能 的两种有效的方法。
振动主动控制能有效衰减系统固有频率附近频带范围内的振动, 但对 高频振动的衰减无作用。 降低隔振器刚度可以提高整个隔振带宽, 提升对 高频振动的衰减作用。 随着 EUV极紫外光刻技术的发展, 采用磁悬浮隔振 的技术方案克服了一般隔振器难以实现真空环境应用的缺陷。 传统的磁悬 浮隔振器采用电磁控制实现其承载与振动主动控制, 电磁控制的稳定性限 制了电磁悬浮隔振器的实际应用, 使得其无法实现更加优良的隔振性能。 而一般的空气弹簧隔振器或者气浮隔振器虽然具有较大的承载力, 但由于 其存在气体的泄露, 制约了其在真空环境中的应用。
美国专利 US7290642B2提供了一种负刚度磁弹簧, 该负刚度磁弹簧利 用磁铁的相互吸引作用形成负的刚度特性, 但其不稳定, 必须与正刚度弹 簧并联进行隔振。 这种正负刚度并联隔振器可实现较低的系统固有频率, 有利于提高隔振性能。
美国专利 US6226075B1 提供了一种气浮式隔振器,垂向采用圆锥面气 浮轴承与空气弹簧相结合, 刚度由空气弹簧决定; 水平向采用端面止推气 浮轴承, 具有准零刚度的特点。 但由于其存在气体泄漏, 无法在真空环境 中应用。
【发明内容】
本发明的目的在于提供一种零刚度磁悬浮主动隔振器及其构成的六自 由度隔振系统, 该零刚度磁悬浮主动隔振器结构紧凑, 其构成的六自由度 隔振系统具有准零刚度的特点, 不仅对高频振动干扰具有良好的隔振效果, 还能够有效地隔离地基和环境的超低频振动, 为超精密加工与测量设备提 供平稳的工作环境。
本发明提供的一种零刚度磁悬浮主动隔振器, 其特征在于, 它包括上 部磁铁、 中间磁铁和下部磁铁, 上部磁铁和下部磁铁固定, 中间磁铁能够 在 (X, y, z ) 三个方向上运动, 上部磁铁和中间磁铁的磁化方向相同, 下 部磁铁与中间磁铁的磁化方向相反。
作为上述技术方案的改进, 所述零刚度磁悬浮主动隔振器包括永磁被 动隔振单元、 主动隔振单元和安全限位组件; 其中, 永磁被动隔振单元除 包括所述上部磁铁、 下部磁铁和中间磁铁外, 还包括上部磁轭、 下部磁轭、 中间磁铁盒、 中间磁铁盒盖、 负载连接杆、 上限位块、 下限位块以及磁轭 固定连接杆; 上部磁铁固定安装在上部磁轭上, 组成永磁被动隔振单元的 第一磁极部分; 下部磁铁固定安装在下部磁轭上, 组成永磁被动隔振单元 的第二磁极部分; 上部磁轭通过三角形布置的三个磁轭固定连接杆与下部 磁轭固连, 磁轭固定连接杆还用于中间磁铁盒的水平向限位; 下部磁轭固 定安装在底板上; 底板与外部基础框架相连; 中间磁铁、 上部磁铁、 下部 磁铁三者的数量相同; 中间磁铁安置在中间磁铁盒中, 中间磁铁盒盖与中 间磁铁盒固连, 使得中间磁铁固定在中间磁铁盒中; 中间磁铁盒通过负载 连接杆与负载连接板相连, 负载连接杆与负载连接板相连使中间磁铁盒的 安装方向唯一; 上限位块和下限位块用于中间磁铁盒在垂向的限位; 三个 上限位块呈三角形安装在上部磁轭上, 三个下限位块呈三角形安装在下部 磁轭上; 主动隔振单元包括垂向洛伦兹电机定子、 垂向洛伦兹电机动子、 水平向洛伦兹电机定子、 水平向洛伦兹电机动子、 垂向速度传感器、 水平
向速度传感器、 垂向位移传感器和水平向位移传感器; 垂向速度传感器检 测负载连接板的垂向振动速度, 通过垂向洛伦兹电机反馈控制对负载连接 板施加主动阻尼控制; 垂向位移传感器检测负载连接板的垂向振动位移, 通过垂向洛伦兹电机反馈控制对负载连接板施加垂向定位控制, 水平向速 度传感器检测负载连接板的水平向振动速度, 通过水平向洛伦兹电机反馈 控制对负载连接板施加主动阻尼控制; 水平向位移传感器检测负载连接板 的水平向振动位移, 通过水平向洛伦兹电机反馈控制对负载连接板施加水 平定位控制; 垂向洛伦兹电机定子安装在垂向电机定子安装座上, 垂向电 机定子安装座固定安装在底板上; 垂向洛伦兹电机动子与负载连接板固连; 水平向洛伦兹电机定子安装在水平向电机定子安装座上, 水平向电机定子 安装座固定安装在底板上, 水平向洛伦兹电机动子与负载连接板固连; 垂 向速度传感器安装在垂向速度传感器安装座内, 垂向速度传感器安装座与 负载连接板固连, 用于检测负载连接板在垂向的绝对振动速度; 水平向速 度传感器安装在水平向速度传感器安装座内, 水平向速度传感器安装座与 负载连接板固连, 用于检测负载连接板在水平向的绝对振动速度; 垂向位 移传感器与水平向位移传感器安装在位移传感器安装板上, 位移传感器安 装板安装在立柱上; 垂向位移传感器检测负载连接板在垂向的振动位移, 水平向位移传感器通过水平向位移检测靶板检测负载连接板在水平向的振 动位移, 水平向位移检测靶板固定安装在负载连接板上; 负载连接板通过 三个呈三角形布置的立柱与底板相连; 负载连接板通过所述安全限位组件 实现机械调平定位和限位。
由零刚度磁悬浮主动隔振器构成的六自由度零刚度主动隔振系统, 其 特征在于, 该隔振系统包括三个或四个零刚度磁悬浮主动隔振器、 主基板、 基础框架以及调整支腿; 三个零刚度磁悬浮主动隔振器分别位于等腰三角 形的三个角点, 或者四个零刚度磁悬浮主动隔振器分别位于长方形的四个 角点, 并固定安装在基础框架上, 基础框架设置有调整支腿, 主基板与各
零刚度磁悬浮主动隔振器相连; 通过调节调整支腿实现主基板的水平度调 节。
本发明采用正负刚度并联的永磁磁悬浮主动隔振技术不仅可以克服电 磁悬浮主动控制的缺陷, 而且使得隔振器具有准零刚度的特点。 本发明提 供的零刚度磁悬浮主动隔振器及其构成的六自由度隔振系统应用于超低频 精密隔振领域, 具有准零刚度的特点, 克服了一般隔振器无法实现或难以 实现超低频隔振的缺点 , 能为精密加工与测量设备提供平稳的工作环境, 适用于对低频振动敏感的精密加工与测量设备。
【附图说明】
图 1为本发明所提供的零刚度磁悬浮主动隔振器的原理图;
图 2为本发明图 1所述隔振器原理图中 z向的刚度曲线;
图 3 为本发明实例所提供的零刚度磁悬浮主动隔振器永磁被动隔振单 元的局部剖视图;
图 4 为本发明实例所提供的零刚度磁悬浮主动隔振器永磁被动隔振单 元的三维结构图;
图 5 为本发明实例所提供的零刚度磁悬浮主动隔振器永磁被动隔振单 元的三维结构图;
图 6 为本发明实例所提供的零刚度磁悬浮主动隔振器永磁被动隔振单 元磁铁的结构布置图;
图 7为本发明实例所提供的零刚度磁悬浮主动隔振器的三维结构图; 图 8为本发明实例所提供的零刚度磁悬浮主动隔振器的三维结构图; 图 9为本发明实例所提供的六自由度零刚度主动隔振系统的结构图。 【具体实施方式】
下面结合附图对本发明的具体实施方式作进一歩说明。 在此需要说明 的是, 对于这些实施方式的说明用于帮助理解本发明, 但并不构成对本发 明的限定。 此外, 下面所描述的本发明各个实施方式中所涉及到的技术特
征只要彼此之间未构成冲突就可以相互组合。
如图 1 所示, 本发明实例所提供的零刚度磁悬浮主动隔振器包括上部 磁铁 1、 中间磁铁 3和下部磁铁 2, 上部磁铁 1和下部磁铁 2固定, 中间磁 铁 3可在 x、 _y、 z三个方向上运动。 图中箭头所示方向为磁铁的磁化方向, 即上部磁铁 1和中间磁铁 3的磁化方向相同, 下部磁铁 2与中间磁铁 3的 磁化方向相反。 当中间磁铁 3处于上部磁铁 1和下部磁铁 2的对称中间位 置时, 中间磁铁 3受到上部磁铁 1的吸力, 同时受到下部磁铁 2的斥力, 在 z向具有向上的合力, 用于支承负载。负载与该合力平衡, 使得中间磁铁 3刚好处于上部磁铁 1和下部磁铁 2的中间位置。当中间磁铁 3处于上部磁 铁 1和下部磁铁 2的对称中间位置并且在 JC和;方向运动时,由于对称性其 在 ^和^方向上受到上部磁铁 1和下部磁铁 2的合力为零, 力与位移无关, 水平向具有零刚度特性。 由于本发明所提供的零刚度磁悬浮隔振器的刚度 与磁铁尺寸以及磁铁间距 2有关, 且磁铁尺寸大小决定了其刚度大小。 本 发明实例综合考虑承载能力和整个结构大小, 上部磁铁 1和下部磁铁 2在
(X , y, z) 方向上的尺寸均固定为 50mm X 50mm X 10mm, 中间磁铁 3在 ^和 方向上的尺寸相同, 数值在 20mm到 50mm之间, 其在 z方向上的尺 寸在 10mm到 20mm之间, 而磁铁间距 h在 18mm到 25mm之间。 另外, 为了获得较为理想的零刚度特性, 本发明中优化选择上部磁铁 1 和下部磁 铁 2在 (X , y, z) 方向上的尺寸均为 50mm X 50mm X I 0mm, 中间磁铁 3 在(X, y, z)方向上的尺寸为 30mm X 30mm X I 7mm,磁铁间距 为 20mm。
图 2为本发明图 1所述隔振器原理图中 z向的刚度曲线。其中磁铁的几 何参数和磁铁间距 如上所述。从图 2中可以看出,在 z向具有较小的振幅
( ± lmm 以内) 的条件下, z 向刚度趋于零, 具有准零刚度的特点。 在精 密隔振领域,振幅通常在微米级别, 因此所述隔振器在 z向上具有承载力的 同时刚度几乎为零。
图 3 为本发明所提供零刚度磁悬浮主动隔振器永磁被动隔振单元的局
部剖视图。 图 4和图 5为本发明所提供的零刚度磁悬浮主动隔振器永磁被 动隔振单元的三维结构图。 图 6为本发明所提供的零刚度磁悬浮主动隔振 器永磁被动隔振单元磁铁的结构布置图。 图 7和图 8为本发明所提供的零 刚度磁悬浮主动隔振器的三维结构图。
本发明所提供的零刚度磁悬浮主动隔振器包括永磁被动隔振单元、 主 动隔振单元和安全限位组件。
如图 3、 图 4、 图 5和图 8所示, 永磁被动隔振单元包括上部磁铁 1、 下部磁铁 2、 中间磁铁 3、 上部磁轭 4、 下部磁轭 5、 中间磁铁盒 6、 中间磁 铁盒盖 7、 负载连接杆 8、 上限位块 9a、 下限位块 9b以及磁轭固定连接杆 10。 一个或者多个上部磁铁 1 固定安装在上部磁轭 4上, 组成永磁被动隔 振单元的第一磁极部分; 一个或者多个下部磁铁 2 固定安装在下部磁轭 5 上, 组成永磁被动隔振单元的第二磁极部分。 上部磁轭 4通过三角形布置 的三个磁轭固定连接杆 10与下部磁轭 5固连, 磁轭固定连接杆 10还可用 于中间磁铁盒 6的水平向限位。下部磁轭 5通过螺钉固定安装在底板 25上。 底板 25通过螺钉与外部基础框架相连。 中间磁铁 3、 上部磁铁 1、 下部磁 铁 2三者的数量相同。 中间磁铁 3安置在中间磁铁盒 6中, 中间磁铁盒盖 7 与中间磁铁盒 6通过螺钉固连, 使得中间磁铁 3固定在中间磁铁盒 6中。 中间磁铁盒 6通过负载连接杆 8与负载连接板 24相连, 负载连接杆 8与负 载连接板 24通过两个螺钉相连, 确保中间磁铁盒 6的安装方向唯一。 上限 位块 9a和下限位块 9b用于中间磁铁盒 6在垂向的限位。 三个上限位块 9a 呈三角形安装在上部磁轭 4上, 三个下限位块 9b呈三角形安装在下部磁轭 5上。
如图 6所示, 本发明所提供的磁铁部分可采用一个磁铁, 或多个磁铁 呈 Δ型或者口字型布置, 为了使得隔振器结构紧凑且具有较大的承载力, 本实施例中采用八个磁铁呈口字型的布置形式。 如图 7和图 8所示, 主动 隔振单元包括垂向洛伦兹电机定子 11、 垂向洛伦兹电机动子 12、 水平向洛
伦兹电机定子 13、 水平向洛伦兹电机动子 14、 垂向速度传感器 15、 水平向 速度传感器 17、 垂向位移传感器 19和水平向位移传感器 20。 垂向速度传 感器 15检测负载连接板 24的垂向振动速度, 通过垂向洛伦兹电机反馈控 制对负载连接板 24施加主动阻尼控制; 垂向位移传感器 19检测负载连接 板 24的垂向振动位移, 通过垂向洛伦兹电机反馈控制对负载连接板 24施 加垂向定位控制, 保证永磁悬浮隔振器的稳定性。 水平向速度传感器 17检 测负载连接板 24的水平向振动速度, 通过水平向洛伦兹电机反馈控制对负 载连接板 24施加主动阻尼控制; 水平向位移传感器 20检测负载连接板 24 的水平向振动位移, 通过水平向洛伦兹电机反馈控制对负载连接板 24施加 水平定位控制。
垂向洛伦兹电机定子 11安装在垂向电机定子安装座 110上, 垂向电机 定子安装座 110通过螺钉固定安装在底板 25上。 垂向洛伦兹电机动子 12 与负载连接板 24固连。 水平向洛伦兹电机定子 13安装在水平向电机定子 安装座 130上,水平向电机定子安装座 130通过螺钉固定安装在底板 25上, 水平向洛伦兹电机动子 12与负载连接板 24固连。
垂向速度传感器 15通过紧定螺钉安装在垂向速度传感器安装座 16内, 垂向速度传感器安装座 16通过螺钉与负载连接板 24固连, 用于检测负载 连接板 24在垂向的绝对振动速度。 水平向速度传感器 17通过紧定螺钉安 装在水平向速度传感器安装座 18内, 水平向速度传感器安装座 18通过螺 钉与负载连接板 24固连, 用于检测负载连接板 24在水平向的绝对振动速 度。
垂向位移传感器 19与水平向位移传感器 20安装在位移传感器安装板 22上, 位移传感器安装板 22是一种钣金结构, 安装在立柱 23上。 垂向位 移传感器 19检测负载连接板 25在垂向的振动位移, 水平向位移传感器 20 通过水平向位移检测靶板 21检测负载连接板 25在水平向的振动位移, 水 平向位移检测靶板 21固定安装在负载连接板 25上。 负载连接板 24通过三
个呈三角形布置的立柱 23与底板 25相连。
安全限位组件包括螺栓 240和锁紧螺母 241。锁紧螺母 241通过螺纹与 螺栓 240相连。 螺栓 240通过螺纹与立柱 23相连。 安全限位组件可实现负 载连接板 24的机械调平定位。 此外, 安全限位组件还用于安全保护作用, 限制隔振器工作中负载在垂向和水平向的位移, 防止出现过大的振幅, 在 运输过程中还能起到锁紧隔振器, 防止负载连接板 24振动的作用。
图 9 为本发明所提供六自由度零刚度主动隔振系统的结构图。 如图 9 所示, 该隔振系统由三个零刚度磁悬浮主动隔振器 100、 主基板 101、 基础 框架 102以及调整支腿 103组成, 且呈等腰三角形布置。 三个零刚度磁悬 浮主动隔振器 100分别位于等腰三角形的三个角点, 固定安装在基础框架 102上, 基础框架通过三个调整支腿 103放置在地基上, 主基板 101与三个 零刚度磁悬浮主动隔振器 100相连。 通过调节调整支腿 103可以实现主基 板 101 的水平度调节。 主基板 101用于安置外部精密仪器与设备等需要精 密隔振的部件。 除了图 9所示的采用三个零刚度磁悬浮主动隔振器 100组 成的隔振系统之外, 为了进一歩增大隔振系统承载能力, 还可采用由四个 零刚度磁悬浮主动隔振器 100构成长方形的布置形式。
以上所述为本发明的较佳实施例而已, 但本发明不应该局限于该实施 例和附图所公开的内容。 所以, 凡是不脱离本发明所公开的精神下完成的 等效或修改, 都落入本发明保护的范围。
Claims
1、一种零刚度磁悬浮主动隔振器, 其特征在于, 它包括上部磁铁(1)、 中间磁铁 (3) 和下部磁铁 (2), 上部磁铁 (1) 和下部磁铁 (2) 固定, 中 间磁铁 (3) 能够在 (X, _y, z) 三个方向上运动, 上部磁铁 (1) 和中间磁 铁(3) 的磁化方向相同, 下部磁铁(2)与中间磁铁(3) 的磁化方向相反。
2、 根据权利要求 1所述的零刚度磁悬浮主动隔振器, 其特征在于, 上 部磁铁(1)和下部磁铁(2)在(X, _y, z)方向上的尺寸均为 50mmX50mm X 10mm,中间磁铁( 3 )在 x和;;方向上的尺寸相同,数值在 20mm到 50mm 之间, 其在 z方向上的尺寸在 10mm到 20mm之间, 上部磁铁 (1) 和中间 磁铁 (3), 以及中间磁铁 (3) 和下部磁铁 (2) 之间的间距均在 18mm到 25mm之间。
3、 根据权利要求 1所述的零刚度磁悬浮主动隔振器, 其特征在于, 上 部磁铁(1)和下部磁铁(2)在(X, _y, z)方向上的尺寸均为 50mmX50mm XlOmm,中间磁铁(3)在(x,_y, 方向上的尺寸为 30mm X 30mm X 17mm, 上部磁铁 (1) 和中间磁铁 (3), 以及中间磁铁 (3) 和下部磁铁 (2) 之间 的间距均为 20mm。
4、 根据权利要求 1所述的零刚度磁悬浮主动隔振器, 其特征在于, 它 包括永磁被动隔振单元、 主动隔振单元和安全限位组件;
其中, 永磁被动隔振单元除包括所述上部磁铁 (1)、 下部磁铁 (2) 和 中间磁铁(3)外, 还包括上部磁轭(4)、 下部磁轭(5)、 中间磁铁盒(6)、 中间磁铁盒盖 (7)、 负载连接杆 (8)、 上限位块 (9a)、 下限位块 (9b) 以 及磁轭固定连接杆 (10); 上部磁铁 (1) 固定安装在上部磁轭 (4) 上, 组
成永磁被动隔振单元的第一磁极部分; 下部磁铁(2) 固定安装在下部磁轭 (5) 上, 组成永磁被动隔振单元的第二磁极部分; 上部磁轭 (4) 通过三 角形布置的三个磁轭固定连接杆 (10) 与下部磁轭 (5) 固连, 磁轭固定连 接杆 (10) 还用于中间磁铁盒 (6) 的水平向限位; 下部磁轭 (5) 固定安 装在底板 (25) 上; 底板 (25) 与外部基础框架相连; 中间磁铁 (3)、 上 部磁铁 (1)、 下部磁铁 (2) 三者的数量相同; 中间磁铁 (3) 安置在中间 磁铁盒 (6) 中, 中间磁铁盒盖 (7) 与中间磁铁盒 (6) 固连, 使得中间磁 铁 (3) 固定在中间磁铁盒 (6) 中; 中间磁铁盒 (6) 通过负载连接杆 (8) 与负载连接板 (24) 相连, 负载连接杆 (8) 与负载连接板 (24) 相连使中 间磁铁盒 (6) 的安装方向唯一; 上限位块 (9a) 和下限位块 (9b) 用于中 间磁铁盒 (6) 在垂向的限位; 三个上限位块 (9a) 呈三角形安装在上部磁 轭 (4) 上, 三个下限位块 (9b) 呈三角形安装在下部磁轭 (5) 上;
主动隔振单元包括垂向洛伦兹电机定子 (11)、 垂向洛伦兹电机动子 (12)、 水平向洛伦兹电机定子 (13)、 水平向洛伦兹电机动子 (14)、 垂向 速度传感器 (15)、 水平向速度传感器 (17)、 垂向位移传感器 (19) 和水 平向位移传感器 (20); 垂向速度传感器 (15)检测负载连接板 (24) 的垂 向振动速度, 通过垂向洛伦兹电机反馈控制对负载连接板 (24) 施加主动 阻尼控制; 垂向位移传感器 (19) 检测负载连接板 (24) 的垂向振动位移, 通过垂向洛伦兹电机反馈控制对负载连接板 (24) 施加垂向定位控制, 水 平向速度传感器 (17) 检测负载连接板 (24) 的水平向振动速度, 通过水 平向洛伦兹电机反馈控制对负载连接板 (24) 施加主动阻尼控制; 水平向 位移传感器 (20) 检测负载连接板 (24) 的水平向振动位移, 通过水平向 洛伦兹电机反馈控制对负载连接板 (24) 施加水平定位控制;
垂向洛伦兹电机定子 (11) 安装在垂向电机定子安装座 (110) 上, 垂 向电机定子安装座 (110) 固定安装在底板 (25) 上; 垂向洛伦兹电机动子 (12) 与负载连接板 (24) 固连; 水平向洛伦兹电机定子 (13) 安装在水
平向电机定子安装座 (130) 上, 水平向电机定子安装座 (130) 固定安装 在底板 (25) 上, 水平向洛伦兹电机动子 (12) 与负载连接板 (24) 固连; 垂向速度传感器 (15) 安装在垂向速度传感器安装座 (16) 内, 垂向 速度传感器安装座 (16) 与负载连接板 (24) 固连, 用于检测负载连接板
(24) 在垂向的绝对振动速度; 水平向速度传感器 (17) 安装在水平向速 度传感器安装座 (18) 内, 水平向速度传感器安装座 (18) 与负载连接板
(24) 固连, 用于检测负载连接板 (24) 在水平向的绝对振动速度;
垂向位移传感器 (19) 与水平向位移传感器 (20) 安装在位移传感器 安装板 (22) 上, 位移传感器安装板 (22) 安装在立柱 (23) 上; 垂向位 移传感器 (19) 检测负载连接板 (25) 在垂向的振动位移, 水平向位移传 感器 (20) 通过水平向位移检测靶板 (21) 检测负载连接板 (25) 在水平 向的振动位移, 水平向位移检测靶板 (21) 固定安装在负载连接板 (25) 上; 负载连接板 (24) 通过三个呈三角形布置的立柱 (23) 与底板 (25) 相连;
负载连接板 (24) 通过所述安全限位组件实现机械调平定位。
5、 根据权利要求 4所述的零刚度磁悬浮主动隔振器, 所述安全限位组 件包括螺栓 (240) 和锁紧螺母 (241); 锁紧螺母 (241) 通过螺纹与螺栓
(240) 相连; 螺栓 (240) 通过螺纹与立柱 (23) 相连。
6、 根据权利要求 4所述的零刚度磁悬浮主动隔振器, 其特征在于, 所 述上部磁铁 (1)、 下部磁铁 (2) 和中间磁铁 (3) 均采用一个磁铁, 或由 多个磁铁呈 Δ型或者口字型布置构成。
7、 一种由权利要求 1至 6中任一所述的零刚度磁悬浮主动隔振器构成 的六自由度零刚度主动隔振系统, 其特征在于, 该隔振系统包括主基板
(101)、 基础框架 (102)、 调整支腿(103) 和三个零刚度磁悬浮主动隔振 器 (100), 三个零刚度磁悬浮主动隔振器 (100) 分别位于等腰三角形的三 个角点, 固定安装在基础框架 (102) 上, 基础框架 (102) 设置有三个调 整支腿 (103), 主基板 (101) 与三个零刚度磁悬浮主动隔振器 (100) 相 连; 通过调节调整支腿 (103) 实现主基板 (101) 的水平度调节和限位。
8、 一种由权利要求 1至 6中任一所述的零刚度磁悬浮主动隔振器构成 的六自由度零刚度主动隔振系统, 其特征在于, 该隔振系统包括主基板 (101)、 基础框架 (102)、 调整支腿(103) 和四个零刚度磁悬浮主动隔振 器 (100)、 四个零刚度磁悬浮主动隔振器 (100) 分别位于长方形的四个角 点, 固定安装在基础框架 (102) 上, 基础框架 (102) 设置有四个调整支 腿 (103), 主基板 (101) 与四个零刚度磁悬浮主动隔振器 (100) 相连。
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