WO2015020089A1 - Robot horizontal à articulations multiples et procédé de production pour robot horizontal à articulations multiples - Google Patents

Robot horizontal à articulations multiples et procédé de production pour robot horizontal à articulations multiples Download PDF

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Publication number
WO2015020089A1
WO2015020089A1 PCT/JP2014/070736 JP2014070736W WO2015020089A1 WO 2015020089 A1 WO2015020089 A1 WO 2015020089A1 JP 2014070736 W JP2014070736 W JP 2014070736W WO 2015020089 A1 WO2015020089 A1 WO 2015020089A1
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WO
WIPO (PCT)
Prior art keywords
arm
hand
arm portion
end side
articulated robot
Prior art date
Application number
PCT/JP2014/070736
Other languages
English (en)
Japanese (ja)
Inventor
康行 北原
俊道 風間
保 栗林
正義 齋地
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013247029A external-priority patent/JP6607661B2/ja
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to KR1020167002891A priority Critical patent/KR102294107B1/ko
Priority to US14/899,410 priority patent/US10195743B2/en
Priority to CN201480040746.3A priority patent/CN105408068B/zh
Publication of WO2015020089A1 publication Critical patent/WO2015020089A1/fr
Priority to US15/854,487 priority patent/US20190001500A1/en
Priority to US16/580,276 priority patent/US10780586B2/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Definitions

  • the present invention relates to a horizontal articulated robot in which an arm moves in a horizontal direction and a method for manufacturing the horizontal articulated robot.
  • a horizontal articulated robot that forms part of EFEM (Equipment Front End Module) and transports a semiconductor wafer between a FOUP (Front Open Unified Pod) and a semiconductor wafer processing apparatus is known (for example, a patent) Reference 1).
  • the horizontal articulated robot described in Patent Document 1 includes two hands on which semiconductor wafers are mounted, an arm that is coupled to the two hands so as to be pivotable to the tip side, and a base end side of the arm that is pivotable. And a main body connected to the main body.
  • the arm includes a first arm whose base end side is rotatably connected to the main body, a second arm whose base end side is rotatably connected to the tip end side of the first arm, and a tip end of the second arm.
  • the base end side is rotatably connected to the side, and the hand is rotatably connected to the distal end side.
  • An arm elevating mechanism that elevates and lowers the first arm is housed inside the main body.
  • a vertical articulated robot As a vertical articulated robot, a base, a body fixed to the base, a first arm rotatably connected to the body, and a second arm rotatably connected to the first arm
  • a vertical articulated robot is known that includes a wrist arm that is rotatably connected to a second arm and a hand arm that is rotatably connected to the wrist arm (see, for example, Patent Document 2).
  • a spirit level for adjusting the origin position is attached to the first arm and the hand arm.
  • a horizontal articulated robot described in Patent Document 3 includes a hand on which a semiconductor wafer is mounted, an arm that is pivotally connected to the distal end side, and a base that is pivotally connected to a base end side of the arm. And.
  • the arm has a first arm portion whose base end side is rotatably connected to the base, a base end side rotatably connected to the front end side of the first arm portion, and a hand is turned to the front end side. It is comprised from the 2nd arm part connected so that a movement is possible.
  • the horizontal articulated robot described in Patent Document 3 includes a turning drive unit that rotates the second arm unit with respect to the first arm unit.
  • the turning drive means includes a motor disposed inside the first arm portion so that the axial direction of the output shaft is horizontal, a first bevel gear connected to the output shaft of the motor, and a first bevel.
  • JP 2011-230256 A Japanese Utility Model Publication No. 63-147704 JP 2008-264980 A
  • the FOUP is manufactured based on SEMI (Semiconductor Equipment and Materials Institute) standard, and a plurality of semiconductor wafers are accommodated in the FOUP so as to overlap each other at a constant pitch.
  • a gap is formed between the plurality of semiconductor wafers accommodated in the FOUP, but this gap is relatively narrow.
  • a horizontal articulated robot that transports a semiconductor wafer between a FOUP and a semiconductor wafer processing apparatus places a hand in a narrow gap between a plurality of semiconductor wafers accommodated in the FOUP and then mounts the semiconductor wafer on the hand. Must be taken out. Therefore, this horizontal articulated robot needs to be installed with high precision so that the hand can operate with high precision in the horizontal direction.
  • a first problem of the present invention is that a horizontal articulated robot in which the arm moves in the horizontal direction can be installed so that the hand can move with high precision in the horizontal direction easily in a relatively short time.
  • Another object of the present invention is to provide a horizontal articulated robot manufacturing method in which the arm moves in the horizontal direction, and can be installed so that the hand can move in the horizontal direction with high accuracy in a relatively short time. It is to provide a method for manufacturing a horizontal articulated robot.
  • the motor is arranged inside the first arm unit so that the axial direction of the output shaft is horizontal, the motor is arranged inside the first arm unit. Even if is arranged, the first arm portion can be made thin.
  • the power of the motor constituting the turning drive means is transmitted to the second arm unit via the first bevel gear, the second bevel gear, the second gear, and the third gear. Therefore, it is difficult to increase the reduction ratio in the power transmission path from the motor to the second arm portion. Therefore, in this horizontal articulated robot, a motor with a large output must be used as the motor constituting the turning drive means, and the motor becomes large. Further, in this horizontal articulated robot, the power of the motor is transmitted to the second arm portion via the first bevel gear, the second bevel gear, the second gear, and the third gear. The backlash in the power transmission path to the two arm portions is increased.
  • a second problem of the present invention is that a small-sized motor is provided in a horizontal articulated robot having a motor arranged so that the axial direction of the output shaft is in the horizontal direction inside the arm portion constituting a part of the arm. And providing a horizontal articulated robot capable of reducing backlash.
  • the horizontal articulated robot of the present invention is a horizontal articulated robot in which an arm operates in a horizontal direction.
  • An arm having at least two arm portions, a hand side arm portion that is movably connected and a second hand side arm portion that is pivotally connected to a distal end side of the hand side arm portion;
  • the base end side of the hand-side arm portion is adjusted at least with respect to the vertical direction of the rotation center axis of the hand-side arm portion with respect to the second hand-side arm portion. It is characterized by having a level attached to the main body.
  • the manufacturing method of the horizontal articulated robot of this invention is the hand side by which the conveyance object is mounted, and the hand side rotatably connected to the front end side.
  • An arm having at least two arm portions, a second hand side arm portion connected to the distal end side of the arm portion and the base end side of the hand side arm portion, and a base end side of the arm is rotatable
  • a method of manufacturing a horizontal articulated robot comprising a main body unit to be connected and a hand, an arm or a level attached to the main body unit, wherein the arm moves in the horizontal direction, and at least the hand side with respect to the second hand side arm unit A level is attached after adjusting the inclination of the rotation center axis of the arm portion with respect to the vertical direction.
  • the horizontal articulated robot of the present invention includes a hand on which an object to be transported is mounted, a hand side arm part to which the hand is rotatably connected, and a second hand side to which the hand side arm part is rotatably connected. And at least a level attached to the hand, arm or main body after the inclination of the rotation center axis of the hand side arm with respect to the second hand side arm is adjusted relative to the vertical direction. Yes.
  • the method for manufacturing a horizontal articulated robot according to the present invention at least after adjusting the inclination of the rotation central axis of the hand side arm portion with respect to the second hand side arm portion with respect to the vertical direction, Is attached.
  • the hand when the horizontal articulated robot is installed, the hand can be rotated by installing the horizontal articulated robot so that the level attached to the horizontal articulated robot shows a predetermined state.
  • the hand-side arm portion In order for the hand-side arm portion to be connected to the second hand-side arm portion to have an appropriate inclination with respect to the vertical direction of the rotation center axis, the horizontal inclination of the hand relative to the horizontal direction becomes an appropriate inclination. It becomes possible to install a joint robot. Therefore, in the present invention, the horizontal articulated robot is installed so that the hand can be operated in the horizontal direction with high accuracy in a relatively short time as compared with the conventional horizontal articulated robot installation method described above. It becomes possible.
  • the hand has a mounting surface on which the object to be transported is mounted, and the level is attached after the inclination of the mounting surface with respect to the horizontal direction is adjusted.
  • the horizontal articulated robot is set so that the hand moves more accurately in the horizontal direction by installing the horizontal articulated robot so that the level attached to the horizontal articulated robot shows a predetermined state. Can be installed.
  • the level is a bubble level having a bubble tube, and at least after the inclination of the rotation center axis of the hand side arm portion with respect to the second hand side arm portion with respect to the vertical direction is adjusted, It is attached so that the bubbles in the tube fall within the reference line marked on the bubble tube.
  • the horizontal articulated robot when installing the horizontal articulated robot, the horizontal articulated robot is installed so that the bubbles in the bubble tube of the spirit level are within the reference line. It is possible to install the horizontal articulated robot so that the inclination of the hand-side arm portion with respect to the vertical direction of the rotation center axis becomes an appropriate inclination and the inclination of the hand with respect to the horizontal direction becomes an appropriate inclination.
  • the spirit level is preferably attached to the main body. If a spirit level is attached to the arm or hand, for example, if the spirit level is a bubble tube level, the position of the bubbles in the bubble tube is likely to fluctuate depending on the expansion / contraction state of the arm. Even if the horizontal articulated robot is installed so that the distance is within the reference line, the horizontal articulated robot is installed so that the hand is tilted appropriately with respect to the horizontal direction, depending on the expansion and contraction of the arm during installation. There is a risk that it cannot be done. On the other hand, if the spirit level is attached to the main body, the position of the bubbles in the bubble tube is less likely to fluctuate even if the arm expands and contracts, so that the bubbles fit within the reference line. By installing the horizontal articulated robot in the horizontal direction, it becomes possible to install the horizontal articulated robot so that the inclination of the hand with respect to the horizontal direction becomes an appropriate inclination regardless of the extension / contraction state of the arm at the time of installation.
  • the horizontal articulated robot of the present invention is a horizontal articulated robot in which an arm moves in a horizontal direction, and a hand on which a conveyance target is mounted and a relative rotation with respect to each other.
  • An arm having at least two arm portions of a support arm portion and a supported arm portion that can be connected to each other, and a hand that is rotatably connected to the distal end side, and a base end side of the arm that are rotatably connected to each other
  • a main body portion and a rotation mechanism that rotates the supported arm portion with respect to the support arm portion, and the rotation mechanism is configured such that the axial direction of the output shaft is horizontal in the support arm portion or the supported arm portion.
  • a harmonic drive that constitutes a motor and a joint that serves as a connecting portion between the support arm and the supported arm and decelerates the power of the motor and transmits it to the support arm or the supported arm.
  • a first bevel gear coupled to the output shaft of the motor
  • a second bevel gear coupled to the wave generator of the harmonic drive (registered trademark) and meshing with the first bevel gear.
  • the power of the motor is decelerated by the harmonic drive (registered trademark) and transmitted to the supporting arm portion or the supported arm portion. Therefore, according to the present invention, the reduction ratio can be increased in the power transmission path from the motor to the support arm portion or the supported arm portion. Therefore, in the present invention, even if a motor with a small output is used, the supported arm portion can be rotated with respect to the support arm portion, and as a result, the motor can be miniaturized.
  • the power of the motor is decelerated and transmitted to the support arm portion or the supported arm portion by the harmonic drive (registered trademark), the power from the motor to the support arm portion or the supported arm portion is transmitted. Backlash can be reduced in the transmission path.
  • the arm is, for example, as an arm portion, a first arm portion whose base end side is rotatably connected to the main body portion, and a base end side rotatably connected to the distal end side of the first arm portion.
  • a second arm portion serving as a support arm portion, and a third arm portion serving as a supported arm portion whose base end side is rotatably connected to the distal end side of the second arm portion.
  • a hand is rotatably connected to the distal end side of the.
  • the horizontal articulated robot includes a first hand and a second hand arranged so as to overlap in the vertical direction as hands, and a first hand that rotates the first hand relative to the third arm portion.
  • the first hand rotation mechanism is disposed in the third arm portion.
  • the second hand rotating mechanism includes a second hand motor disposed inside the third arm portion, the first hand includes a connecting portion connected to the third arm portion, and a conveyance target.
  • the mounting portion is formed to extend horizontally from the upper end side of the connecting portion, and is attached to the third arm portion.
  • the protruding portion is formed at a position shifted from the connecting portion in the longitudinal direction of the third arm portion with the third arm portion and the first hand overlapping in the vertical direction, and up to a height that does not contact the mounting portion.
  • the third arm protrudes upward, and the first hand motor and the second hand motor have the third arm so that the output shaft faces downward and a part thereof is disposed in the protrusion. It is preferable that it is arrange
  • the rotation mechanism preferably includes a magnetic fluid seal disposed on the outer peripheral side of the harmonic drive (registered trademark). If comprised in this way, it will become possible to prevent the outflow of the dust which generate
  • the horizontal articulated robot according to the present invention can easily operate in a relatively short time and with high accuracy in the horizontal direction. Can be installed. Further, in the horizontal articulated robot manufactured by the method for manufacturing a horizontal articulated robot of the present invention, the horizontal articulated robot is installed so that the hand can move with high precision in the horizontal direction easily in a relatively short time. It becomes possible.
  • the present invention includes a motor that is arranged so that the axial direction of the output shaft is in the horizontal direction inside the arm portion that constitutes a part of the arm.
  • the motor can be reduced in size and backlash can be reduced.
  • FIG. 1 is a perspective view of a horizontal articulated robot according to a first embodiment of the present invention.
  • FIG. 2 is a perspective view of the horizontal articulated robot shown in FIG. 1 in a state where the arm is lifted and extended.
  • FIG. 2 is a schematic plan view of a semiconductor manufacturing system in which the horizontal articulated robot shown in FIG. 1 is used. It is a side view of the horizontal articulated robot shown in FIG.
  • FIG. 6 is a perspective view of the horizontal articulated robot shown in FIG. 5 in a state where the arm is lifted and extended.
  • FIG. 6 is a schematic plan view of a semiconductor manufacturing system in which the horizontal articulated robot shown in FIG. 5 is used.
  • FIG. 6 is a side view of the horizontal articulated robot shown in FIG. 5. It is sectional drawing for demonstrating the structure of the rotation mechanism shown in FIG.
  • FIG. 1 is a perspective view of a horizontal articulated robot 1 according to a first embodiment of the present invention.
  • FIG. 2 is a perspective view of the horizontal articulated robot 1 shown in FIG. 1 in a state where the arm 6 is lifted and extended.
  • FIG. 3 is a schematic plan view of a semiconductor manufacturing system 9 in which the horizontal articulated robot 1 shown in FIG. 1 is used.
  • FIG. 4 is a side view of the horizontal articulated robot 1 shown in FIG.
  • the horizontal articulated robot 1 of this embodiment is a robot for transporting a semiconductor wafer 2 (see FIG. 3) that is a transport object.
  • the horizontal articulated robot 1 includes two hands 4 and 5 on which a semiconductor wafer 2 is mounted, arms 4 and 5 that are rotatably connected to the distal end side, and move in a horizontal direction.
  • 6 is provided with a main body 7 to which the base end side of 6 is rotatably connected.
  • the horizontal articulated robot 1 is referred to as “robot 1”
  • the semiconductor wafer 2 is referred to as “wafer 2”.
  • the Y direction orthogonal to the vertical direction and the left-right direction is referred to as “front-rear direction”
  • the X1 direction side is referred to as “right ”Side
  • the X2 direction side is the“ left ”side
  • the Y1 direction side is the“ front ”side
  • the Y2 direction side is the“ rear (back) ”side.
  • the robot 1 is used by being incorporated in a semiconductor manufacturing system 9.
  • the semiconductor manufacturing system 9 includes an EFEM 10 and a semiconductor wafer processing apparatus 11 that performs predetermined processing on the wafer 2.
  • the EFEM 10 is disposed on the front side of the semiconductor wafer processing apparatus 11.
  • the robot 1 constitutes a part of the EFEM 10.
  • the EFEM 10 includes a plurality of load ports 13 that open and close the FOUP 12 and a housing 14 in which the robot 1 is accommodated.
  • the housing 14 is formed in a rectangular parallelepiped box shape elongated in the left-right direction.
  • the inside of the housing 14 is a clean space. That is, the inside of the EFEM 10 is a clean space, and a predetermined cleanliness is secured inside the EFEM 10.
  • the FOUP 12 is manufactured based on the SEMI standard, and 25 or 13 wafers 2 can be accommodated in the FOUP 12 in a state where they are overlapped in the vertical direction.
  • the load port 13 is disposed on the front side of the housing 14.
  • the EFEM 10 of this embodiment includes four load ports 13 arranged at a predetermined pitch in the left-right direction. In the EFEM 10, four FOUPs 12 are arranged at a predetermined pitch in the left-right direction.
  • the robot 1 transports the wafer 2 between the four FOUPs 12 and the semiconductor wafer processing apparatus 11.
  • the arm 6 has a first arm part 16 whose base end side is rotatably connected to the main body part 7 and a second arm part whose base end side is rotatably connected to the distal end side of the first arm part 16. 17 and a third arm portion 18 whose base end side is rotatably connected to the distal end side of the second arm portion 17. That is, the arm 6 includes three arm portions that are connected to each other so as to be relatively rotatable.
  • the first arm part 16, the second arm part 17, and the third arm part 18 are formed in a hollow shape. In this embodiment, the length of the first arm portion 16, the length of the second arm portion 17, and the length of the third arm portion 18 are equal.
  • the main body part 7, the first arm part 16, the second arm part 17, and the third arm part 18 are arranged in this order from the lower side in the vertical direction.
  • the 3rd arm part 18 of this form is a hand side arm part
  • the 2nd arm part 17 is a 2nd hand side arm part.
  • the hands 4 and 5 are formed so as to have a substantially Y shape when viewed in the vertical direction, and a connecting portion 19 connected to the third arm portion 18 and a wafer mounting portion on which the wafer 2 is mounted. 20.
  • the hands 4 and 5 are arranged so as to overlap in the vertical direction. Specifically, the hand 4 is disposed on the upper side and the hand 5 is disposed on the lower side. Further, the hands 4 and 5 are disposed above the third arm portion 18.
  • the connecting portion 19 constitutes a base end side portion of the hands 4 and 5 and is rotatably connected to the distal end side of the third arm portion 18.
  • the wafer mounting portion 20 constitutes the tip side portion of the hands 4 and 5 and is formed in a bifurcated shape.
  • the upper surface of the wafer mounting unit 20 is a mounting surface 20a on which the wafer 2 is mounted. That is, the mounting surfaces 20 a are formed on the hands 4 and 5.
  • An adjustment bolt (not shown) for finely adjusting the inclination of the mounting surface 20a with respect to the horizontal direction is attached to a connection portion between the connection portion 19 and the third arm portion 18.
  • a screw hole into which the adjustment bolt is screwed is formed at a connection portion between the connection portion 19 and the third arm portion 18, and mounting in the horizontal direction is performed depending on the screwing amount of the adjustment bolt into the screw hole.
  • the inclination of the surface 20a is adjusted.
  • the hand 4 and the hand 5 may overlap in the vertical direction, but in most cases, the hand 4 and the hand 5 do not overlap in the vertical direction.
  • the rotation angle of the hand 5 with respect to the hand 4 is, for example, 120 ° to 150 °.
  • the main body portion 7 includes a housing 21 and a columnar member 22 (see FIG. 2) to which the proximal end side of the first arm portion 16 is rotatably connected.
  • the housing 21 is formed in a substantially rectangular parallelepiped shape elongated in the vertical direction, and the shape of the housing 21 when viewed from the vertical direction is a substantially rectangular shape or a substantially square shape. Further, the front surface and the rear surface of the housing 21 are substantially parallel to a plane composed of the up-down direction and the left-right direction, and the left and right side surfaces of the housing 21 are planar surfaces composed of the up-down direction and the front-back direction. It is almost parallel.
  • the bottom surface of the housing 21 is formed in a planar shape that is substantially orthogonal to the vertical direction.
  • the columnar member 22 is formed in a vertically long and narrow columnar shape.
  • the base end side of the first arm portion 16 is rotatably connected to the upper end of the columnar member 22.
  • An arm elevating mechanism (not shown) for elevating the columnar member 22 is accommodated in the housing 21. That is, an arm elevating mechanism for elevating and lowering the first arm portion 16 relative to the main body portion 7 (that is, elevating and lowering the arm 6) is housed in the housing 21.
  • the arm elevating mechanism includes, for example, a ball screw arranged with the vertical direction as an axial direction, a nut member that engages with the ball screw, a motor that rotates the ball screw, and the like. As shown in FIG. 1, the arm elevating mechanism has an arm between a position where the columnar member 22 is accommodated in the housing 21 and a position where the columnar member 22 protrudes upward from the housing 21 as shown in FIG. 6 and the columnar member 22 are moved up and down.
  • the columnar member 22 is disposed on the front end side of the housing 21.
  • the columnar member 22 is disposed at the center position of the housing 21 in the left-right direction.
  • a protruding portion 21 a that protrudes upward is formed.
  • the protruding portion 21 a is formed so as to surround the left and right sides and the rear side of the columnar member 22.
  • the upper surface of the protruding portion 21a is formed in a planar shape orthogonal to the vertical direction.
  • bolt attachment portions 21 b to which adjustment bolts (not shown) for finely adjusting the inclination of the entire robot 1 with respect to the horizontal direction are formed at the four corners at the lower end of the housing 21.
  • a screw hole into which the adjustment bolt is screwed is formed in the bolt mounting portion 21b so as to penetrate in the vertical direction. The inclination of the robot 1 with respect to the horizontal direction depends on the screwing amount of the adjustment bolt into the screw hole. Adjusted.
  • a level 23 is attached to the upper surface side of the protruding portion 21a. That is, a level 23 is attached to the main body 7.
  • the level 23 in this embodiment is a bubble tube level having a bubble tube.
  • the level 23 is a so-called eyeball level (eyeball level, omnidirectional level) in which the shape of the bubble tube is circular when viewed from above and below, and viewed from above and below.
  • a circular reference line is marked at the center of the bubble tube.
  • the level 23 is a uniaxial bubble tube level that can confirm the inclination in one horizontal direction (for example, the left-right direction), and the inclination in a direction (for example, the front-rear direction) orthogonal to the one horizontal direction. It may be a bubble tube level other than the eye level, such as a two-axis level in combination with a single-axis type bubble level that can be confirmed.
  • the robot 1 rotates the first arm unit 16 and the second arm unit 17 to extend and contract a part of the arm 6 composed of the first arm unit 16 and the second arm unit 17;
  • a third arm drive mechanism that rotationally drives the third arm portion 18, a first hand drive mechanism that rotationally drives the hand 4, and a second hand drive mechanism that rotationally drives the hand 5 are provided.
  • the arm unit driving mechanism includes a motor 125 as a driving source, a speed reducer 126 for decelerating and transmitting the power of the motor 125 to the first arm unit 16, and the power of the motor 25. And a speed reducer 127 for transmitting the speed to the second arm portion 17.
  • the motor 125 is disposed inside the housing 21.
  • the reduction gear 126 constitutes a joint portion that connects the main body portion 7 and the first arm portion 16.
  • the speed reducer 127 constitutes a joint portion that connects the first arm portion 16 and the second arm portion 17.
  • the reduction gears 126 and 127 are, for example, harmonic drive (registered trademark) which is a wave gear device.
  • the motor 125 and the speed reducer 126 are connected via a pulley and a belt (not shown), and the motor 125 and the speed reducer 127 are illustrated. It is connected via an omitted pulley and belt.
  • the third arm unit driving mechanism includes a motor 128 serving as a driving source and a speed reducer 129 for decelerating the power of the motor 128 and transmitting it to the third arm unit 18.
  • the motor 28 is disposed inside the distal end side of the second arm portion 17.
  • the speed reducer 129 constitutes a joint portion that connects the second arm portion 17 and the third arm portion 18.
  • the reducer 129 is, for example, a harmonic drive (registered trademark).
  • the motor 128 and the speed reducer 129 are connected, for example, via a gear train (not shown).
  • the first hand drive mechanism includes a motor 130 as a drive source and a speed reducer 131 for decelerating the power of the motor 130 and transmitting it to the hand 4.
  • the second hand drive mechanism includes a motor 132 serving as a drive source and a speed reducer 133 for decelerating and transmitting the power of the motor 132 to the hand 5.
  • the motors 130 and 132 and the speed reducers 131 and 133 are disposed inside the third arm unit 18.
  • the reducers 131 and 133 are, for example, harmonic drives (registered trademark).
  • the speed reducer 131 is attached to the output shaft of the motor 130, and the speed reducer 133 is attached to the output shaft of the motor 132.
  • the connecting portion 19 of the hand 4 and the speed reducer 131 are connected via a pulley and a belt (not shown), and the connecting portion 19 and the speed reducer 133 of the hand 5 are connected via a pulley and a belt (not shown). Are connected.
  • the robot 1 In the manufacturing process of the robot 1, when the hands 4, 5, the arm 6, and the main body 7 are connected and the robot 1 is in an operable state, the robot 1 is installed on a predetermined reference surface that ensures flatness. The In this state, the level 23 is not attached to the main body portion 7. Thereafter, the inclination of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction (vertical direction) is adjusted. Further, the inclination of the mounting surface 20a of the hands 4, 5 with respect to the horizontal direction is adjusted.
  • the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 is attached to the bolt attachment portion 21b of the casing 21 so as not to be inclined more than a predetermined angle with respect to the vertical direction.
  • the connecting portion 19 and the third portion are arranged so that the mounting surface 20a is not inclined more than a predetermined angle with respect to the horizontal direction.
  • the inclination of the mounting surface 20a with respect to the horizontal direction is adjusted by an adjusting bolt attached to a connection portion with the arm portion 18. Note that the distance between the hand 4 and the hand 5 in the vertical direction is also adjusted.
  • the level 23 is attached to the main body 7. Specifically, the level 23 is fixed to the main body portion 7 so that the bubbles in the bubble tube of the level 23 are within the reference line marked on the bubble tube.
  • the inclination of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction and the inclination of the mounting surface 20a of the hands 4 and 5 with respect to the horizontal direction are adjusted.
  • the level 23 is attached to the main body portion 7 so that the bubbles in the bubble tube of the level 23 are within the reference line marked on the bubble tube.
  • the robot 4 is installed so that the bubbles in the bubble tube of the level 23 are within the reference line.
  • the third arm portion 18 that is rotatably connected to the second arm portion 17 has an appropriate inclination with respect to the vertical direction of the rotation center axis, and the inclination of the mounting surface 20a with respect to the horizontal direction is an appropriate inclination.
  • the robot 1 can be installed. Therefore, in this embodiment, it is possible to install the robot 1 on the housing 14 so that the hands 4 and 5 can move with high precision in the horizontal direction easily in a relatively short time.
  • the position of the bubbles in the bubble tube of the level 23 tends to fluctuate according to the expansion / contraction state of the arm 6. Even if the robot 1 is installed on the housing 14 so that the bubbles are within the reference line, depending on the extension / contraction state of the arm 6 at the time of installation, the robot 1 can be moved so that the hands 4 and 5 can move in the horizontal direction with high accuracy. There is a possibility that it cannot be installed on the housing 14. On the other hand, in this embodiment, since the level 23 is attached to the main body 7, even if the expansion / contraction state of the arm 6 is changed, the position of the bubbles in the bubble tube of the level 23 is not easily changed. .
  • the robot 1 is installed on the housing 14 so that the bubbles of the level 23 are within the reference line, so that the hands 4, 5 can be moved horizontally regardless of the extension / contraction state of the arm 6 at the time of installation. It is possible to install the robot 1 on the housing 14 so as to operate with high accuracy.
  • a level 23 is attached to the main body portion 7 so that the bubbles in the bubble tube 23 fall within the reference line marked on the bubble tube.
  • the inclination of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction is adjusted, and the inclination of the mounting surface 20a with respect to the horizontal direction is adjusted.
  • the level 23 may be attached to the main body unit 7 so that the bubbles in the bubble tube of the level 23 are within the reference line marked on the bubble tube in the absence of the level. If the inclination of the rotation center axis of the third arm part 18 with respect to the second arm part 17 with respect to the vertical direction is adjusted, the inclination of the hands 4 and 5 with respect to the horizontal direction can be suppressed. Even if the robot 1 is installed on the housing 14 so that the bubbles in the bubble tube of the level 23 are within the reference line, the robot 1 can move the hands 4 and 5 accurately in the horizontal direction. Can be installed in the housing 14.
  • the level 23 is attached to the main body 7.
  • the level 23 may be attached to the arm 6 or may be attached to the hand 4 or the hand 5.
  • the level 23 is a bubble tube level, but the level 23 may be a level other than the bubble level, such as a laser level or a digital level.
  • the main body portion 7 is formed in a substantially rectangular parallelepiped shape that is elongated in the vertical direction.
  • the main body portion 7 may be formed in a substantially cylindrical shape, and the shape when viewed from the vertical direction is approximately. You may form in the polygonal column shape used as a hexagon shape or a substantially octagon shape.
  • the two hands 4 and 5 are attached to the distal end side of the third arm portion 18, but one hand may be attached to the distal end side of the third arm portion 18.
  • the arm 6 is constituted by the three arm portions of the first arm portion 16, the second arm portion 17, and the third arm portion 18.
  • the arm 6 has two arm portions. It may be comprised by 4 or more arm parts.
  • the semiconductor wafer processing apparatus 11 is disposed behind the EFEM 10.
  • the semiconductor wafer processing apparatus 11 may be disposed on the right side, the left side, or the left and right sides of the EFEM 10.
  • the semiconductor wafer processing apparatus 11 may be disposed on the right side of the EFEM 10 as indicated by a two-dot chain line in FIG.
  • the robot 1 is a robot for transporting the wafer 2, but the robot 1 may be a robot for transporting other transport objects such as a glass substrate for liquid crystal.
  • FIG. 5 is a perspective view of the horizontal articulated robot 1 according to the second embodiment of the present invention.
  • FIG. 6 is a perspective view of the horizontal articulated robot 1 shown in FIG. 5 in a state where the arm 6 is raised and extended.
  • FIG. 7 is a schematic plan view of a semiconductor manufacturing system 9 in which the horizontal articulated robot 1 shown in FIG. 5 is used.
  • FIG. 8 is a side view of the horizontal articulated robot 1 shown in FIG.
  • symbol is attached
  • the horizontal articulated robot 1 is a robot for transporting a semiconductor wafer 2 (see FIG. 7) which is a transport object.
  • the horizontal articulated robot 1 includes two hands 4 and 5 on which a semiconductor wafer 2 is mounted, arms 4 and 5 that are rotatably connected to the distal end side, and move in a horizontal direction. 6 is provided with a main body 7 to which the base end side of 6 is rotatably connected.
  • the horizontal articulated robot 1 is referred to as “robot 1”
  • the semiconductor wafer 2 is referred to as “wafer 2”.
  • the Y direction orthogonal to the up and down direction and the left and right direction is referred to as “front and back direction”
  • the X1 direction side is ”Side
  • the X2 direction side is the“ left ”side
  • the Y1 direction side is the“ front ”side
  • the Y2 direction side is the“ rear (back) ”side.
  • the robot 1 is incorporated into a semiconductor manufacturing system 9 and used.
  • the semiconductor manufacturing system 9 includes an EFEM 10 and a semiconductor wafer processing apparatus 11 that performs predetermined processing on the wafer 2.
  • the EFEM 10 is disposed on the front side of the semiconductor wafer processing apparatus 11.
  • the robot 1 constitutes a part of the EFEM 10.
  • the EFEM 10 includes a plurality of load ports 13 that open and close the FOUP 12 and a housing 14 in which the robot 1 is accommodated.
  • the housing 14 is formed in a rectangular parallelepiped box shape elongated in the left-right direction.
  • the inside of the housing 14 is a clean space. That is, the inside of the EFEM 10 is a clean space, and a predetermined cleanliness is secured inside the EFEM 10.
  • the FOUP 12 is manufactured based on the SEMI standard, and the FOUP 12 can accommodate 25 or 13 wafers 2.
  • the load port 13 is disposed on the front side of the housing 14.
  • the EFEM 10 of this embodiment includes four load ports 13 arranged at a predetermined pitch in the left-right direction. In the EFEM 10, four FOUPs 12 are arranged at a predetermined pitch in the left-right direction.
  • the robot 1 transports the wafer 2 between the four FOUPs 12 and the semiconductor wafer processing apparatus 11.
  • the arm 6 has a first arm part 16 whose base end side is rotatably connected to the main body part 7 and a second arm part whose base end side is rotatably connected to the distal end side of the first arm part 16. 17 and a third arm portion 18 whose base end side is rotatably connected to the distal end side of the second arm portion 17. That is, the arm 6 includes three arm portions that are connected to each other so as to be relatively rotatable.
  • the first arm part 16, the second arm part 17, and the third arm part 18 are formed in a hollow shape. In this embodiment, the length of the first arm portion 16, the length of the second arm portion 17, and the length of the third arm portion 18 are equal.
  • the main body part 7, the first arm part 16, the second arm part 17, and the third arm part 18 are arranged in this order from the lower side in the vertical direction.
  • the 2nd arm part 17 of this form is a support arm part, and the 3rd arm part 18 is a supported arm part.
  • the hands 4 and 5 are formed so as to have a substantially Y shape when viewed from above and below, and a connecting portion 19 connected to the third arm portion 18 and a mounting portion 20 on which the wafer 2 is mounted. It consists of and.
  • the hands 4 and 5 are arranged so that the connecting portion 19 of the hand 4 and the connecting portion 19 of the hand 5 overlap in the vertical direction. Specifically, the hand 4 is disposed on the upper side and the hand 5 is disposed on the lower side. Further, the hands 4 and 5 are disposed above the third arm portion 18.
  • the hand 5 of this embodiment is a first hand, and the hand 4 is a second hand.
  • the connecting portion 19 constitutes a base end side portion of the hands 4 and 5 and is rotatably connected to the distal end side of the third arm portion 18.
  • the mounting portion 20 constitutes the tip side portion of the hands 4 and 5 and is formed in a bifurcated shape. Moreover, the mounting part 20 is formed in flat form. As shown in FIG. 8, in the hand 4, the mounting portion 20 is formed to extend in the horizontal direction from the lower end side of the connecting portion 19, and in the hand 5, the mounting portion 20 is in the horizontal direction from the upper end side of the connecting portion 19. It is formed to extend.
  • the upper surface of the mounting unit 20 is a mounting surface on which the wafer 2 is mounted.
  • the hand 4 and the hand 5 may overlap in the vertical direction, but in most cases, the hand 4 and the hand 5 do not overlap in the vertical direction.
  • the rotation angle of the hand 5 with respect to the hand 4 is, for example, 120 ° to 150 °.
  • the third arm portion 18 is formed with a protruding portion 18a protruding upward.
  • the protruding portion 18 a has a longitudinal length of the third arm portion 18 so as not to contact the connecting portion 19 of the hand 5 when the third arm portion 18 and the hand 5 overlap each other in the vertical direction. It is formed at a position shifted from the connecting portion 19 of the hand 5 in the direction (front-rear direction in the state shown in FIG. 8). Further, the protruding portion 18 a protrudes upward to a height that does not contact the mounting portion 20 of the hand 5.
  • the main body portion 7 includes a housing 21 and a columnar member 22 (see FIG. 6) to which the proximal end side of the first arm portion 16 is rotatably connected.
  • the housing 21 is formed in a substantially rectangular parallelepiped shape elongated in the vertical direction, and the shape of the housing 21 when viewed from the vertical direction is a substantially rectangular shape or a substantially square shape.
  • the front surface and the rear surface of the housing 21 are substantially parallel to a plane composed of the up-down direction and the left-right direction. It is almost parallel.
  • the columnar member 22 is formed in a vertically long and narrow columnar shape.
  • the base end side of the first arm portion 16 is rotatably connected to the upper end of the columnar member 22.
  • An arm elevating mechanism (not shown) for elevating the columnar member 22 is accommodated in the housing 21. That is, an arm elevating mechanism for elevating and lowering the first arm portion 16 relative to the main body portion 7 (that is, elevating and lowering the arm 6) is housed in the housing 21.
  • the arm elevating mechanism includes, for example, a ball screw arranged with the vertical direction as an axial direction, a nut member that engages with the ball screw, a motor that rotates the ball screw, and the like. As shown in FIG.
  • the arm elevating mechanism has an arm between a position where the columnar member 22 is accommodated in the housing 21 and a position where the columnar member 22 protrudes upward from the housing 21 as shown in FIG. 6 and the columnar member 22 are moved up and down.
  • the columnar member 22 is disposed on the front end side of the housing 21.
  • the columnar member 22 is disposed at the center position of the housing 21 in the left-right direction.
  • the robot 1 rotates the first arm portion 16 and the second arm portion 17 to expand and contract a part of the arm 6 including the first arm portion 16 and the second arm portion 17;
  • a third arm rotation mechanism 26 as a rotation mechanism for rotating the third arm 18 with respect to the second arm 17, and a first hand for rotating the hand 5 with respect to the third arm 18.
  • a rotation mechanism 27 and a second hand rotation mechanism 28 that rotates the hand 4 with respect to the third arm portion 18 are provided.
  • the arm unit drive mechanism 25 includes a motor 30 serving as a drive source, a speed reducer 31 for decelerating and transmitting the power of the motor 30 to the first arm unit 16, and the power of the motor 30.
  • the motor 30 is disposed inside the housing 21.
  • the speed reducer 31 constitutes a joint portion that connects the main body portion 7 and the first arm portion 16.
  • the speed reducer 32 constitutes a joint portion that connects the first arm portion 16 and the second arm portion 17.
  • the reduction gears 31 and 32 are harmonic drives (registered trademark) which are wave gear devices.
  • the motor 30 and the speed reducer 31 are connected via a pulley and a belt (not shown) as in the horizontal articulated robot described in, for example, Japanese Patent Application Laid-Open No. 2011-230256. Further, the motor 30 and the speed reducer 32 are connected via a pulley and a belt (not shown) as in the horizontal articulated robot described in Japanese Patent Application Laid-Open No. 2011-230256, for example.
  • the third arm portion rotation mechanism 26 includes a motor 33 serving as a drive source, and a speed reducer 34 for decelerating and transmitting the power of the motor 33 to the third arm portion 18. Yes.
  • a specific configuration of the third arm portion rotation mechanism 26 will be described later.
  • the first hand rotating mechanism 27 includes a motor 35 serving as a drive source and a speed reducer 36 for decelerating the power of the motor 35 and transmitting it to the hand 5.
  • the second hand rotation mechanism 28 includes a motor 37 as a drive source and a speed reducer 38 for decelerating the power of the motor 37 and transmitting it to the hand 4. Yes.
  • the motor 35 of this embodiment is a first hand motor
  • the motor 37 is a second hand motor.
  • the motors 35 and 37 and the speed reducers 36 and 38 are disposed inside the third arm portion 18.
  • the motors 35 and 37 are arranged so that their output shafts face downward and a part of the opposite output shaft side is arranged in the protruding portion 18 a of the third arm portion 18.
  • the reduction gears 36 and 38 are harmonic drives (registered trademark).
  • the reduction gear 36 is attached to the output shaft of the motor 35 protruding downward
  • the reduction gear 38 is attached to the output shaft of the motor 37 protruding downward.
  • the connecting portion 19 of the hand 5 and the speed reducer 36 are connected via a pulley and a belt (not shown)
  • the four connecting portions 19 and the speed reducer 38 are connected via a pulley and a belt (not shown).
  • FIG. 9 is a cross-sectional view for explaining the configuration of the third arm rotation mechanism 26 shown in FIG.
  • the third arm portion rotation mechanism 26 includes the motor 33 and the speed reducer 34 as described above.
  • the motor 33 is disposed inside the second arm portion 17.
  • the motor 33 is fixed inside the second arm portion 17 so that the axial direction of the output shaft is horizontal.
  • the motor 33 is fixed inside the second arm portion 17 so that the output shaft protrudes toward the distal end side of the second arm portion 17.
  • the one end side of the rotating shaft 42 is connected to the output shaft of the motor 33 through the coupling 41.
  • the rotating shaft 42 is disposed inside the second arm portion 17 so that the axial direction thereof coincides with the horizontal direction.
  • a bevel gear 43 as a first bevel gear is fixed to the other end side of the rotating shaft 42. That is, the bevel gear 43 is connected to the output shaft of the motor 33 via the coupling 41 and the rotating shaft 42. Further, the other end side of the rotating shaft 42 is rotatably held by a bearing 44 fixed inside the second arm portion 17.
  • the reduction gear 34 constitutes a joint part that connects the second arm part 17 and the third arm part 18. That is, the speed reducer 34 constitutes a joint portion that is a connection portion between the second arm portion 17 and the third arm portion 18.
  • the speed reducer 34 is arranged so that its axial direction coincides with the vertical direction.
  • the speed reducer 34 is a harmonic drive (registered trademark), and includes a wave generator 45, a circular spline 46, and a flex spline 47 as shown in FIG.
  • the flex spline 47 is fixed to the base end side of the third arm portion 18 via the frame 48.
  • the circular spline 46 is fixed to the distal end side of the second arm portion 17 via the frame 49.
  • a bevel gear 50 as a second bevel gear is fixed to the lower end of the wave generator 45. That is, the bevel gear 50 is connected to the lower end of the wave generator 45.
  • the bevel gear 50 meshes with the bevel gear 43.
  • a magnetic fluid seal 51 for preventing dust generated in the speed reducer 34 from flowing out of the second arm portion 17 and the third arm portion 18 is disposed on the outer peripheral side of the speed reducer 34. Further, a hollow shaft 52 disposed so as to pass through the center of the speed reducer 34 is fixed to the proximal end side of the third arm portion 18. The wave generator 45 is rotatably arranged on the outer peripheral side of the hollow shaft 52. A predetermined wiring is routed using the inner peripheral side of the hollow shaft 52.
  • the power of the motor 33 is decelerated and transmitted to the third arm unit 18 by the speed reducer 34 that is a harmonic drive (registered trademark). Therefore, in this embodiment, it is possible to increase the reduction ratio in the power transmission path from the motor 33 to the third arm unit 18. Therefore, in this embodiment, even if the motor 33 having a small output is used, the third arm portion 18 can be rotated with respect to the second arm portion 17, and as a result, the motor 33 can be downsized. Is possible.
  • the power of the motor 33 is decelerated and transmitted to the third arm unit 18 by the reduction gear 34 that is a harmonic drive (registered trademark), the power from the motor 33 to the third arm unit 18 is reduced. It is possible to reduce backlash in the transmission path.
  • the third arm portion 18 is formed with a protruding portion 18a protruding upward.
  • the protruding portion 18a is formed at a position shifted from the connecting portion 19 of the hand 5 in the longitudinal direction of the third arm portion 18 in a state where the third arm portion 18 and the hand 5 overlap in the vertical direction. It protrudes upward to a height at which it does not contact the mounting portion 20 of the hand 5.
  • the motors 35 and 37 are disposed inside the third arm portion 18 so that the output shaft faces downward, and a part of the motors 35 and 37 on the side opposite to the output shaft is It arrange
  • the motor 33 is disposed inside the second arm portion 17, but the motor 33 may be disposed inside the third arm portion 18.
  • the circular spline 46 is fixed to the proximal end side of the third arm portion 18 via the frame 49
  • the flex spline 47 is fixed to the proximal end side of the third arm portion 18 via the frame 48.
  • the power of the motor 33 is decelerated by the speed reducer 34 and transmitted to the second arm unit 17.
  • the arm 6 is configured by the three arm portions of the first arm portion 16, the second arm portion 17, and the third arm portion 18, but the arm 6 is configured by the two arm portions. It may be configured by four or more arm portions.
  • the two hands 4 and 5 are attached to the distal end side of the third arm portion 18, but one hand may be attached to the distal end side of the third arm portion 18.
  • the semiconductor wafer processing apparatus 11 is disposed behind the EFEM 10.
  • the semiconductor wafer processing apparatus 11 may be disposed on the right side, the left side, or the left and right sides of the EFEM 10.
  • the semiconductor wafer processing apparatus 11 may be disposed on the right side of the EFEM 10 as indicated by a two-dot chain line in FIG.
  • the robot 1 is a robot for transporting the wafer 2, but the robot 1 may be a robot for transporting other transport objects such as a glass substrate for liquid crystal.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)

Abstract

La présente invention concerne un robot horizontal à articulations multiples présentant un bras qui se déplace dans la direction horizontale et qui peut être installé de sorte qu'un bras se déplace avec précision dans la direction horizontale de manière aisée en un temps relativement court. Le robot horizontal à articulations multiples (1) qui présente un bras (6) qui se déplace dans la direction horizontale est pourvu : de mains (4, 5) sur lesquelles un objet à transporter est monté ; du bras (6), qui comprend au moins deux sections bras, à savoir, une section bras côté main (18) dont les mains (4, 5) sont raccordées en rotation à son côté pointe et une seconde section bras côté main (17) dont l'extrémité de base de la section bras côté main (18) est raccordée en rotation à son côté pointe ; d'une section corps principal (7) auquel le côté d'extrémité de base du bras (6) est raccordé en rotation ; et d'un niveau (23) qui est fixé à la section corps principal (7). Le niveau (23) est fixé à la section corps principal (7) après que son inclinaison est réglée par rapport à au moins la direction verticale de l'axe central de rotation de la section bras côté main (18) par rapport à la seconde section bras côté main (17).
PCT/JP2014/070736 2013-08-09 2014-08-06 Robot horizontal à articulations multiples et procédé de production pour robot horizontal à articulations multiples WO2015020089A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020167002891A KR102294107B1 (ko) 2013-08-09 2014-08-06 수평 다관절 로봇 및 수평 다관절 로봇의 제조 방법
US14/899,410 US10195743B2 (en) 2013-08-09 2014-08-06 Horizontal articulated robot and method for manufacturing horizontal articulated robot
CN201480040746.3A CN105408068B (zh) 2013-08-09 2014-08-06 水平多关节机器人以及水平多关节机器人的制造方法
US15/854,487 US20190001500A1 (en) 2013-08-09 2017-12-26 Horizontal multi-joint robot and production method for horizontal multi-joint robot
US16/580,276 US10780586B2 (en) 2013-08-09 2019-09-24 Horizontal articulated robot with bevel gears

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201361864272P 2013-08-09 2013-08-09
US61/864,272 2013-08-09
JP2013247029A JP6607661B2 (ja) 2013-08-09 2013-11-29 水平多関節ロボット
JP2013-247029 2013-11-29
JP2013247026A JP6374156B2 (ja) 2013-08-09 2013-11-29 水平多関節ロボットおよび水平多関節ロボットの製造方法
JP2013-247026 2013-11-29

Related Child Applications (2)

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US14/899,410 A-371-Of-International US10195743B2 (en) 2013-08-09 2014-08-06 Horizontal articulated robot and method for manufacturing horizontal articulated robot
US15/854,487 Division US20190001500A1 (en) 2013-08-09 2017-12-26 Horizontal multi-joint robot and production method for horizontal multi-joint robot

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CN107534007A (zh) * 2015-03-03 2018-01-02 川崎重工业株式会社 衬底搬送机器人及衬底处理系统
WO2018151210A1 (fr) * 2017-02-17 2018-08-23 日本電産シンポ株式会社 Réducteur de vitesse pourvu d'un moteur électrique
EP3778141A1 (fr) * 2015-08-07 2021-02-17 Nidec Sankyo Corporation Robot industriel
CN112573189A (zh) * 2020-12-04 2021-03-30 安徽机电职业技术学院 一种智能工业机器人系统

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JPH0890463A (ja) * 1994-09-19 1996-04-09 Kansai Electric Power Co Inc:The 水平多関節形ロボット
JP2001235036A (ja) * 2000-02-23 2001-08-31 Shinano Kenshi Co Ltd 磁性流体シール装置
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JPH04304985A (ja) * 1991-03-30 1992-10-28 Sanyo Electric Co Ltd ロボット支持装置
JPH0890463A (ja) * 1994-09-19 1996-04-09 Kansai Electric Power Co Inc:The 水平多関節形ロボット
JP2001235036A (ja) * 2000-02-23 2001-08-31 Shinano Kenshi Co Ltd 磁性流体シール装置
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Publication number Priority date Publication date Assignee Title
CN107534007A (zh) * 2015-03-03 2018-01-02 川崎重工业株式会社 衬底搬送机器人及衬底处理系统
CN107534007B (zh) * 2015-03-03 2021-02-05 川崎重工业株式会社 衬底搬送机器人及衬底处理系统
EP3778141A1 (fr) * 2015-08-07 2021-02-17 Nidec Sankyo Corporation Robot industriel
WO2018151210A1 (fr) * 2017-02-17 2018-08-23 日本電産シンポ株式会社 Réducteur de vitesse pourvu d'un moteur électrique
JP2018132154A (ja) * 2017-02-17 2018-08-23 日本電産シンポ株式会社 電動機付き減速機
CN110300863A (zh) * 2017-02-17 2019-10-01 日本电产新宝株式会社 具电动机的减速机
EP3584466A4 (fr) * 2017-02-17 2020-10-21 Nidec Shimpo Corporation Réducteur de vitesse pourvu d'un moteur électrique
US11041557B2 (en) 2017-02-17 2021-06-22 Nidec-Shimpo Corporation Speed reducer with electric motor
CN112573189A (zh) * 2020-12-04 2021-03-30 安徽机电职业技术学院 一种智能工业机器人系统
CN112573189B (zh) * 2020-12-04 2021-08-10 安徽机电职业技术学院 一种智能工业机器人系统

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