WO2015020088A1 - Robot industriel - Google Patents

Robot industriel Download PDF

Info

Publication number
WO2015020088A1
WO2015020088A1 PCT/JP2014/070735 JP2014070735W WO2015020088A1 WO 2015020088 A1 WO2015020088 A1 WO 2015020088A1 JP 2014070735 W JP2014070735 W JP 2014070735W WO 2015020088 A1 WO2015020088 A1 WO 2015020088A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
main body
robot
housing
industrial robot
Prior art date
Application number
PCT/JP2014/070735
Other languages
English (en)
Japanese (ja)
Inventor
康行 北原
俊道 風間
保 栗林
正義 齋地
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013247027A external-priority patent/JP6509487B2/ja
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to KR1020167002890A priority Critical patent/KR102277372B1/ko
Priority to US14/896,788 priority patent/US9539727B2/en
Priority to CN201480040727.0A priority patent/CN105378908B/zh
Publication of WO2015020088A1 publication Critical patent/WO2015020088A1/fr
Priority to US15/259,539 priority patent/US10213924B2/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Definitions

  • the present invention relates to an industrial robot that constitutes a part of EFEM (Equipment Front End Module) and transports a semiconductor wafer between a FOUP (Front Open Unified Pod) and a semiconductor wafer processing apparatus.
  • EFEM Equipment Front End Module
  • FOUP Front Open Unified Pod
  • an industrial robot that constitutes a part of an EFEM and conveys a semiconductor wafer between a FOUP (or a plurality of FOUPs) and a semiconductor wafer processing apparatus is known (for example, see Patent Document 1).
  • the industrial robot described in Patent Document 1 includes two hands on which semiconductor wafers are mounted, an arm that is coupled to the two hands so as to be pivotable to the distal end side, and a base end side of the arm that is pivotable. And a main body portion to be connected.
  • the arm includes a first arm whose base end side is rotatably connected to the main body, a second arm whose base end side is rotatably connected to the tip end side of the first arm, and a tip end of the second arm.
  • the base end side is rotatably connected to the side, and the hand is rotatably connected to the distal end side.
  • An arm elevating mechanism that elevates and lowers the first arm is housed inside the main body.
  • FOUP is manufactured based on SEMI (Semiconductor Equipment and Materials Institute) standard, and the height of FOUP is a fixed dimension.
  • SEMI semiconductor Equipment and Materials Institute
  • the height of FOUP is arbitrarily set. Therefore, depending on the specifications of the semiconductor wafer processing apparatus, the arm lifting mechanism may not be lifted up and down, and the industrial robot described in Patent Document 1 may not be used as it is in EFEM.
  • a first problem of the present invention is to provide a robot main body in an industrial robot that transports a semiconductor wafer between a plurality of FOUPs arranged in a fixed direction and a semiconductor wafer processing apparatus and constitutes a part of an EFEM.
  • a robot main body in an industrial robot that transports a semiconductor wafer between a plurality of FOUPs arranged in a fixed direction and a semiconductor wafer processing apparatus and constitutes a part of an EFEM.
  • the second problem of the present invention is that, in an industrial robot constituting a part of the EFEM, even if the lifting mechanism for lifting the robot main body is arranged outside the robot main body, the drive unit and guide portion of the lifting mechanism. It is an object of the present invention to provide an industrial robot capable of effectively suppressing the dust generated from the outflow from the connecting portion between the robot body and the lifting mechanism into the EFEM.
  • the industrial robot of the present invention conveys a semiconductor wafer between a plurality of FOUPs arranged in a fixed direction and a semiconductor wafer processing apparatus and constitutes a part of the EFEM.
  • An industrial robot includes a robot body and a lifting mechanism that is disposed outside the robot body and moves the robot body up and down.
  • the robot body is connected to a hand on which a semiconductor wafer is mounted and is connected to each other so as to be relatively rotatable.
  • An arm portion that is rotatably connected to the distal end side, a main body portion that is rotatably connected to the proximal end side of the arm, and an arm lifting mechanism that lifts and lowers the arm.
  • the FOUP arrangement direction is the first direction
  • the vertical direction and the direction orthogonal to the first direction are the second direction
  • one of the second directions is the third direction
  • the other of the second directions When the fourth direction is viewed, the rotation center of the base end side of the arm with respect to the main body when viewed from the up and down direction is disposed on the third direction side with respect to the center of the main body, and the arm contracts to form a plurality of arm portions.
  • a part of the arm is disposed on the fourth direction side of the main body, the main body is fixed to the lifting mechanism, It is characterized by being arranged on at least one of both sides of the main body part in the first direction and / or on the fourth direction side of the main body part.
  • the main body portion of the robot main body is fixed to an elevating mechanism for elevating and lowering the robot main body, and the elevating mechanism includes at least one of both sides of the main body portion in the first direction and / or the main body. In the fourth direction.
  • the industrial robot can be arranged inside the EFEM housing in a state where the side surface on the third direction side of the industrial robot is close to the side surface on the third direction side of the EFEM housing. Become. Therefore, in the present invention, even if the lifting mechanism for raising and lowering the robot body is arranged outside the robot body, the EFEM is set in the second direction perpendicular to the arrangement direction (first direction) and the vertical direction of the plurality of FOUPs. It becomes possible to reduce the size.
  • the arm includes, as an arm portion, a first arm portion whose base end side is rotatably connected to the main body portion, and the lifting mechanism is a first arm with respect to the main body portion when viewed from the vertical direction. It is preferable to be within the rotation area of the part. If comprised in this way, it will become possible to set the width
  • the main body is formed so that the shape when viewed from above and below is a substantially rectangular shape or a substantially square shape having side surfaces parallel to the first direction.
  • the industrial robot can be arranged inside the EFEM housing with the side surface on the third direction side of the industrial robot closer to the side surface on the third direction side of the EFEM housing. Become. Therefore, the EFEM can be further downsized in the second direction.
  • a side surface on the fourth direction side of the main body is attached to the lifting mechanism.
  • the industrial robot of the present invention is an industrial robot that constitutes a part of the EFEM and transports a semiconductor wafer between the FOUP and the semiconductor wafer processing apparatus.
  • the robot body includes a hand on which a semiconductor wafer is mounted, an arm on which the hand is rotatably connected to the tip side, A main body part rotatably connected to the base end side of the arm and an arm elevating mechanism for elevating the arm are provided.
  • the elevating mechanism includes a drive part for driving the robot main body in the vertical direction and a robot main body in the vertical direction.
  • the cover is formed with a slit-like through hole elongated in the vertical direction so that the coupling member can be moved in the vertical direction, and the coupling member has a through hole passage portion disposed in the through hole.
  • the width of the through hole passage portion and the width of the through hole in the width direction of the through hole orthogonal to the thickness direction and the vertical direction of the cover are narrower than the width of the guide block in the width direction of the through hole. It is characterized by that.
  • the drive unit, the guide rail, and the guide block that constitute a part of the lifting mechanism are accommodated in the housing.
  • a flat cover that constitutes a part of the housing is disposed between the guide block and the main body of the robot body, and a slit-like through hole that is elongated in the vertical direction is formed in the cover.
  • the connecting member for connecting the robot body and the guide block is formed with a through hole passage portion disposed in the through hole, and the width of the through hole passage portion and the through hole in the width direction of the through hole Is narrower than the width of the guide block in the width direction of the through hole.
  • variety of a through-hole can be narrowed. Therefore, in the present invention, even if the lifting mechanism for moving the robot body up and down is disposed outside the robot body, dust generated from the drive unit and the guide unit of the lifting mechanism is EFEM from the connecting portion between the robot body and the lifting mechanism. It is possible to effectively suppress the flow out into the interior of the.
  • the main body is formed so that the shape when viewed from above and below is a substantially rectangular shape or a substantially square shape, and the elevating mechanism is arranged outside the housing and one side surface of the main body is fixed. It is preferable that a fixing member is provided, and the fixing member is fixed to the tip of the through-hole passage portion. If comprised in this way, since a robot main body and a raising / lowering mechanism can be connected using the fixing member arrange
  • the elevating mechanism preferably includes an exhaust fan that is attached to the housing and exhausts the air inside the housing to the outside of the EFEM. If comprised in this way, it will become possible to suppress more effectively that the dust which generate
  • the elevating mechanism is fixed to two guide rails arranged at a predetermined interval in the width direction of the through hole, and a guide block that engages with each of the two guide rails.
  • a semiconductor wafer is transferred between a plurality of FOUPs arranged in a fixed direction and a semiconductor wafer processing apparatus, and a part of the EFEM is configured.
  • the EFEM can be miniaturized in a direction orthogonal to the arrangement direction of the plurality of FOUPs and the vertical direction even if a lifting mechanism for raising and lowering the robot body is arranged outside the robot body. Become.
  • the lifting mechanism that lifts and lowers the robot body is arranged outside the robot body.
  • FIG. 1 is a perspective view of an industrial robot according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of the industrial robot shown in FIG. 1 in a state where the robot body and the arm are raised and the arm is extended.
  • FIG. 2 is a schematic plan view of a semiconductor manufacturing system in which the industrial robot shown in FIG. 1 is used. It is a side view of the robot main body shown in FIG. It is a perspective view of the raising / lowering mechanism shown in FIG. It is a figure for demonstrating the structure of the raising / lowering mechanism shown in FIG. 5 from the front side. It is a figure for demonstrating the structure of the raising / lowering mechanism shown in FIG. 5 from the upper side.
  • (A) is an enlarged view of the E part of FIG. 7
  • (B) is an enlarged view of the F part of FIG.
  • FIG. 1 is a perspective view of an industrial robot 1 according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of the industrial robot 1 shown in FIG. 1 in a state where the robot body 3 and the arm 16 are raised and the arm 16 is extended.
  • FIG. 3 is a schematic plan view of a semiconductor manufacturing system 5 in which the industrial robot 1 shown in FIG. 1 is used.
  • the industrial robot 1 of this embodiment is a horizontal articulated robot for transporting a semiconductor wafer 2 (see FIG. 3).
  • the industrial robot 1 includes a robot body 3 and a lifting mechanism 4 that lifts and lowers the robot body 3.
  • the industrial robot 1 is referred to as “robot 1”
  • the semiconductor wafer 2 is referred to as “wafer 2”.
  • the Y direction orthogonal to the vertical direction and the left-right direction is referred to as “front-rear direction”
  • the X1 direction side is referred to as “right ”Side
  • the X2 direction side is the“ left ”side
  • the Y1 direction side is the“ front ”side
  • the Y2 direction side is the“ rear (back) ”side.
  • the robot 1 is used by being incorporated in a semiconductor manufacturing system 5.
  • the semiconductor manufacturing system 5 includes an EFEM 6 and a semiconductor wafer processing apparatus 7 that performs predetermined processing on the wafer 2.
  • the EFEM 6 is disposed on the front side of the semiconductor wafer processing apparatus 7.
  • the robot 1 constitutes a part of the EFEM 6.
  • the EFEM 6 includes a plurality of load ports 9 that open and close the FOUP 8 and a housing 10 in which the robot 1 is accommodated.
  • the housing 10 is formed in a rectangular parallelepiped box shape elongated in the left-right direction.
  • the front surface and the rear surface of the housing 10 are parallel to a plane composed of an up-down direction and a left-right direction.
  • the inside of the housing 10 is a clean space. That is, the inside of the EFEM 6 is a clean space, and a predetermined cleanliness is secured inside the EFEM 6.
  • the FOUP 8 is manufactured based on the SEMI standard, and the FOUP 8 can accommodate 25 or 13 wafers 2.
  • the load port 9 is disposed on the front side of the housing 10.
  • the EFEM 6 of this embodiment includes four load ports 9 arranged at a predetermined pitch in the left-right direction.
  • four FOUPs 8 are arranged at a predetermined pitch in the left-right direction.
  • the robot 1 transports the wafer 2 between the four FOUPs 8 and the semiconductor wafer processing apparatus 7.
  • the left-right direction as the arrangement direction of the four FOUPs 8 is the first direction
  • the front-rear direction is a second direction orthogonal to the left-right direction, which is the first direction, and the up-down direction.
  • the front direction (Y1 direction) which is one of the second directions is the third direction
  • the rear direction (Y2 direction) which is the other of the second directions is the fourth direction.
  • FIG. 4 is a side view of the robot body 3 shown in FIG.
  • the robot body 3 includes two hands 14 and 15 on which the wafer 2 is mounted, an arm 16 to which the hands 14 and 15 are rotatably connected to the distal end side, and a base end side of the arm 16 to be rotatably connected.
  • the main body part 17 is provided.
  • the arm 16 has a first arm portion 18 whose base end side is rotatably connected to the main body portion 17, and a second arm portion whose base end side is rotatably connected to the distal end side of the first arm portion 18. 19 and a third arm portion 20 whose base end side is rotatably connected to the distal end side of the second arm portion 19. That is, the arm 16 includes three arm portions that are connected to each other so as to be relatively rotatable.
  • the 1st arm part 18, the 2nd arm part 19, and the 3rd arm part 20 are formed in the hollow shape.
  • the length of the first arm portion 18, the length of the second arm portion 19, and the length of the third arm portion 20 are equal.
  • the main body part 17, the first arm part 18, the second arm part 19, and the third arm part 20 are arranged in this order from the lower side in the vertical direction.
  • the hands 14 and 15 are formed so that the shape when viewed from above and below is substantially Y-shaped, and the wafer 2 is mounted on the tips of the hands 14 and 15 having a bifurcated shape.
  • the proximal end sides of the hands 14 and 15 are rotatably connected to the distal end side of the third arm portion 20.
  • the hands 14 and 15 are arranged so as to overlap in the vertical direction. Specifically, the hand 14 is disposed on the upper side and the hand 15 is disposed on the lower side.
  • the hands 14 and 15 are disposed above the third arm portion 20.
  • the hand 14 and the hand 15 may overlap in the vertical direction, but in most cases, the hand 14 and the hand 15 do not overlap in the vertical direction.
  • the rotation angle of the hand 15 relative to the hand 14 is, for example, 120 ° to 150 °.
  • the main body portion 17 includes a housing 21 and a columnar member 22 (see FIG. 2) to which the proximal end side of the first arm portion 18 is rotatably connected.
  • the housing 21 is formed in a substantially rectangular parallelepiped shape elongated in the vertical direction, and the shape of the housing 21 when viewed from the vertical direction is a substantially rectangular shape or a substantially square shape. Further, the front surface and the rear surface of the housing 21 are parallel to a plane composed of an up-down direction and a left-right direction, and both left and right side surfaces of the housing 21 are parallel to a plane composed of an up-down direction and a front-rear direction. It has become.
  • the main body portion 17 is formed in a substantially rectangular parallelepiped shape that is elongated in the vertical direction so that the shape when viewed from the vertical direction is a substantially rectangular shape or a substantially square shape. Further, the front surface and the rear surface of the main body portion 17 are parallel to a plane composed of the up-down direction and the left-right direction, and the left and right side surfaces of the main body portion 17 are planes composed of the up-down direction and the front-back direction. It is parallel to.
  • the columnar member 22 is formed in a vertically long and narrow columnar shape.
  • An arm elevating mechanism (not shown) for elevating the columnar member 22 is accommodated in the housing 21. That is, an arm elevating mechanism that elevates and lowers the first arm portion 18 relative to the main body portion 17 (that is, elevates and lowers the arm 16) is housed in the housing 21.
  • the arm elevating mechanism includes, for example, a ball screw arranged with the vertical direction as an axial direction, a nut member that engages with the ball screw, a motor that rotates the ball screw, and the like. As shown in FIG.
  • the arm elevating mechanism has a columnar shape between a position where the columnar member 22 is accommodated in the housing 21 and a position where the columnar member 22 protrudes upward from the housing 21 as shown in FIG.
  • the member 22 is moved up and down. That is, the arm lifting mechanism moves the arm 16 up and down between a position where the columnar member 22 is accommodated in the housing 21 and a position where the columnar member 22 protrudes upward from the housing 21.
  • the columnar member 22 is disposed on the front end side of the housing 21.
  • the proximal end side of the first arm portion 18 is rotatably connected to the upper end of the columnar member 22. That is, as shown in FIG. 3, when viewed from above and below, the rotation center of the first arm portion 18 relative to the main body portion 17 (that is, the rotation center on the base end side of the arm 16) C1 is the main body portion 17. It is arranged on the front side (FOUP8 side) from the center of.
  • the columnar member 22 is disposed at the center position of the housing 21 in the left-right direction.
  • the arm 16 is contracted, and the first arm 18, the second arm 19, the third arm 20, and the hands 14 and 15 overlap each other in the vertical direction.
  • 1 standby state In this standby state, a part of the arm 16 and the hands 14 and 15 protrude rearward from the main body portion 17.
  • the robot body 3 includes an arm unit driving mechanism that rotates the first arm unit 18 and the second arm unit 19 to extend and contract a part of the arm 16 including the first arm unit 18 and the second arm unit 19.
  • the arm unit drive mechanism includes a motor 25 serving as a drive source, a speed reducer 26 that decelerates the power of the motor 25 and transmits the power to the first arm unit 18, and decelerates the power of the motor 25. And a speed reducer 27 for transmission to the second arm portion 19.
  • the motor 25 is disposed inside the housing 21.
  • the reduction gear 26 constitutes a joint portion that connects the main body portion 17 and the first arm portion 18.
  • the reduction gear 27 constitutes a joint portion that connects the first arm portion 18 and the second arm portion 19.
  • the reduction gears 26 and 27 are, for example, harmonic drive (registered trademark) which is a wave gear device.
  • the motor 25 and the speed reducer 26 are connected via a pulley and a belt (not shown), and the motor 25 and the speed reducer 27 are not shown. Are connected via a pulley and a belt.
  • the third arm unit drive mechanism includes a motor 28 serving as a drive source, and a speed reducer 29 for decelerating the power of the motor 28 and transmitting it to the third arm unit 20.
  • the motor 28 is disposed inside the distal end side of the second arm portion 19.
  • the speed reducer 29 constitutes a joint portion that connects the second arm portion 19 and the third arm portion 20.
  • the reducer 29 is, for example, a harmonic drive (registered trademark).
  • the motor 28 and the speed reducer 29 are connected via a gear train (not shown).
  • the first hand drive mechanism includes a motor 30 as a drive source and a speed reducer 31 for decelerating the power of the motor 30 and transmitting it to the hand 14.
  • the second hand drive mechanism includes a motor 32 as a drive source and a speed reducer 33 for decelerating the power of the motor 32 and transmitting it to the hand 15.
  • the motors 30 and 32 and the speed reducers 31 and 33 are disposed inside the third arm unit 20.
  • the reducers 31 and 33 are, for example, harmonic drives (registered trademark).
  • the speed reducer 31 is attached to the output shaft of the motor 30, and the speed reducer 33 is attached to the output shaft of the motor 32.
  • the hand 14 and the speed reducer 31 are connected via a pulley and a belt (not shown), and the hand 15 and the speed reducer 33 are connected via a pulley and a belt (not shown).
  • the wafer 2 can be taken in and out of the FOUP 8 even with the robot main body 3 alone. That is, even in the robot body 3 in the state where the lifting mechanism 4 is not attached, the columnar member 22 is raised and lowered, and the first arm 18, the second arm 19, and the third arm 20 are rotated to expand and contract the arm 16. In addition, by rotating the hands 14 and 15, the wafer 2 can be taken in and out of the FOUP 8.
  • FIG. 5 is a perspective view of the lifting mechanism 4 shown in FIG.
  • FIG. 6 is a diagram for explaining the configuration of the lifting mechanism 4 shown in FIG. 5 from the front side.
  • FIG. 7 is a diagram for explaining the configuration of the lifting mechanism 4 shown in FIG. 5 from above.
  • FIG. 8A is an enlarged view of a portion E in FIG. 7, and
  • FIG. 8B is an enlarged view of a portion F in FIG.
  • the elevating mechanism 4 is formed separately from the robot body 3 and is disposed outside the robot body 3.
  • the lifting mechanism 4 is fixed to the bottom surface of the housing 10.
  • the elevating mechanism 4 is engaged with a drive unit 36 for driving the robot main body 3 in the vertical direction, two guide rails 37 for guiding the robot main body 3 in the vertical direction, and the two guide rails 37.
  • the guide block 38 that slides in the vertical direction, the housing 39 in which the drive unit 36, the guide rail 37, and the guide block 38 are accommodated, and the robot body 3 disposed outside the housing 39 and the guide block 38 are coupled.
  • Two connecting members 40 for fixing, a fixing member 41 arranged outside the housing 39 and to which the robot main body 3 is fixed, and air inside the housing 39 are discharged to the outside of the EFEM 6 (that is, outside the housing 10).
  • Two exhaust fans 42 are provided.
  • the housing 39 is formed in a substantially rectangular parallelepiped shape that is long in the vertical direction as a whole.
  • the housing 39 constitutes an upper surface portion 39 a constituting the upper surface of the housing 39, a bottom surface portion 39 b constituting the bottom surface of the housing 39, side surface portions 39 c constituting the left and right side surfaces of the housing 39, and a front surface of the housing 39. It is comprised from the front-surface part 39d and the rear surface part 39e which comprises the rear surface of the housing 39.
  • the upper surface portion 39a and the bottom surface portion 39b are formed in a substantially rectangular flat plate shape having the vertical direction as the thickness direction.
  • the front surface portion 39d and the rear surface portion 39e are formed in a substantially rectangular flat plate shape having the front-rear direction as the thickness direction and the vertical direction as the longitudinal direction.
  • the side part 39c is formed in a trapezoidal flat plate shape with the left-right direction being the thickness direction.
  • the upper end surface and the lower end surface of the side surface portion 39c are orthogonal to the up-down direction, and the rear end surface of the side surface portion 39c is orthogonal to the front-rear direction.
  • the front end surface of the side surface portion 39c is an inclined surface that inclines so as to expand to the front side as it goes downward.
  • the lower surface of the upper surface portion 39a is in contact with the upper end surface of the side surface portion 39c, and the front surface of the rear surface portion 39e is in contact with the rear end surface of the side surface portion 39c.
  • the outer side surface in the left-right direction of the bottom surface portion 39b is in contact with the lower end side of the inner surface in the left-right direction of the side surface portion 39c.
  • the upper surface of the front surface portion 39d is in contact with the lower surface of the upper surface portion 39a, and the lower surface of the front surface portion 39d is in contact with the upper surface of the bottom surface portion 39b.
  • the front end surface of the upper surface portion 39a and the front end surface of the bottom surface portion 39b substantially coincide with the front surface of the front surface portion 39d.
  • the left and right inner surfaces of the side surface portion 39c are in contact with the left and right end surfaces of the front surface portion 39d.
  • the front end side of the side surface portion 39c is a protruding portion 39f that protrudes to the front side of the front surface portion 39d.
  • the front surface portion 39d is formed with a slit-like through hole 39g that is elongated in the vertical direction.
  • the through hole 39g is formed in substantially the entire area of the front surface portion 39d in the vertical direction so that the connecting member 40 can move in the vertical direction.
  • two through holes 39g are formed in the front surface portion 39d with a predetermined interval in the left-right direction.
  • the left-right direction is the width direction of the through hole 39g.
  • the drive unit 36 includes a motor 45 serving as a drive source, a ball screw 46 that is rotated by the power of the motor 45, and a nut member 47 that is screwed into the ball screw 46.
  • the motor 45 is fixed to a holding member 48 fixed to the upper surface of the bottom surface portion 39 b and is disposed on the lower end side inside the housing 39.
  • the motor 45 is fixed to the holding member 48 so that its output shaft protrudes downward.
  • a pulley 49 is fixed to the output shaft of the motor 45.
  • the ball screw 46 is arranged with the vertical direction as the axial direction.
  • the lower end side of the ball screw 46 is rotatably supported by a bearing 50 disposed on the lower end side inside the housing 39.
  • the bearing 50 is attached to the holding member 48.
  • a pulley 51 is fixed to the lower end side of the ball screw 46.
  • a belt 52 is bridged between the pulley 49 and the pulley 51.
  • the nut member 47 is fixed to one of the two connecting members
  • the guide rail 37 is fixed to a rail mounting portion 39h that protrudes inward in the left-right direction from the inner side surface in the left-right direction of the side surface portion 39c. That is, the two guide rails 37 are arranged in a state where a predetermined interval is left in the left-right direction.
  • a drive unit 36 is disposed between the two guide rails 37 in the left-right direction.
  • the guide rail 37 is fixed to the rail attachment portion 39h with the vertical direction as the longitudinal direction.
  • the guide rail 37 is fixed to the front surface of the rail attachment portion 39h.
  • the guide block 38 is engaged with the front side of the guide rail 37.
  • the connecting member 40 is formed in a substantially rectangular parallelepiped block shape that is long in the vertical direction.
  • An outer portion in the left-right direction of the connecting member 40 is a block fixing portion 40 a that is fixed to the guide block 38.
  • the block fixing portion 40a is fixed to the front surface of the guide block 38.
  • the block fixing portion 40a is fixed to the front surface of the guide block 38 in a state where the front surface of the guide block 38 and the rear surface of the block fixing portion 40a are in contact with each other. That is, each of the two connecting members 40 is fixed to a guide block 38 that engages with each of the two guide rails 37.
  • the two connecting members 40 are connected by a connecting member 54 formed in a flat plate shape.
  • the connection member 54 is disposed inside the housing 39.
  • the left and right ends of the connection member 54 are fixed to the front surface of the inner side portion of the connecting member 40 in the left-right direction.
  • a nut member 47 is fixed to one of the two connecting members 40.
  • the ball screw 46 and the nut member 47 are arranged on the right side of the motor 45, and the nut member 47 is fixed to the left end surface of the connecting member 40 arranged on the right side.
  • a through-hole passage portion 40b disposed in the through-hole 39g is formed in the inner portion in the left-right direction of the connecting member 40 so as to pass through the through-hole 39g in the front-rear direction.
  • the through-hole passage portion 40b is formed so as to protrude forward from the block fixing portion 40a.
  • the through-hole passage portion 40b is formed in the entire area of the connecting member 40 in the vertical direction, and is formed in a substantially rectangular parallelepiped shape that is elongated in the vertical direction.
  • the front end side (front end side) of the through-hole passage portion 40b protrudes forward from the front surface portion 39d. That is, the portion of the connecting member 40 excluding the tip end side of the through hole passage portion 40 b is accommodated in the housing 39.
  • the front end surface (front end surface) of the through-hole passage portion 40b is formed in a planar shape orthogonal to the front-rear direction.
  • the width H1 of the through-hole passage portion 40b in the left-right direction is narrower than the width H2 of the guide block 38 in the left-right direction. Further, the width H3 of the through hole 39g in the left-right direction is narrower than the width H2 of the guide block 38.
  • the fixing member 41 is formed in a flat plate shape having the front-rear direction as the thickness direction.
  • the fixing member 41 is disposed on the front side of the front surface portion 39d. Further, the fixing member 41 is disposed between the two protruding portions 39f in the left-right direction.
  • the fixing member 41 is fixed to the front end surface of the through-hole passage portion 40b. Specifically, the fixing member 41 is fixed to the front end surface of the through-hole passage portion 40b in a state where the front end surface of the through-hole passage portion 40b and the rear surface of the fixing member 41 are in contact with each other.
  • the robot body 3 is fixed to the front surface of the fixing member 41.
  • the rear surface of the casing 21 that is one side surface of the main body portion 17 is fixed to the front surface of the fixing member 41. That is, the rear surface of the main body portion 17 is attached to the elevating mechanism 4, and the elevating mechanism 4 is disposed on the rear side of the main body portion 17. Further, a part of the rear surface side of the main body portion 17 is disposed between the two protruding portions 39f in the left-right direction.
  • the front surface portion 39 d of the second embodiment is a cover that is disposed between the guide block 38 and the main body portion 17.
  • the elevating mechanism 4 is within the rotation region of the first arm portion 18 relative to the main body portion 17 when viewed from the vertical direction.
  • the elevating mechanism 4 has a trajectory of the tip of the first arm portion 18 when the first arm portion 18 rotates around the rotation center C1 of the first arm portion 18 when viewed from the vertical direction ( Specifically, it is within the inner circumference side of the arcuate locus (R).
  • the exhaust fan 42 is attached to the upper surface of the bottom 39b of the housing 39. Further, the exhaust fan 42 is disposed behind the drive unit 36. The two exhaust fans 42 are adjacently arranged in the left-right direction. A through hole through which air discharged from the exhaust fan 42 passes is formed in the bottom surface portion 39b. A through-hole through which air exhausted by the exhaust fan 42 passes is also formed in a portion of the bottom surface of the housing 10 where the lifting mechanism 4 is fixed. Therefore, the air inside the housing 39 is discharged to the outside of the EFEM 6 by the exhaust fan 42.
  • the robot body 3 moves up and down with respect to the casing 39 of the lifting mechanism 4 as necessary.
  • the arm 16 is contracted, and the first arm portion 18, the second arm portion 19, the third arm portion 20, and the hands 14, 15 overlap in the vertical direction.
  • some of the arms 16 and the hands 14 and 15 protrude rearward from the main body portion 17.
  • the main body portion 17 of the robot main body 3 is fixed to the elevating mechanism 4, and the elevating mechanism 4 is disposed on the rear side of the main body portion 17. Therefore, in this embodiment, it is possible to place the robot 1 inside the housing 10 with the front surface of the robot 1 being close to the front surface of the housing 10 of the EFEM 6. Therefore, in this embodiment, the EFEM 6 can be miniaturized in the front-rear direction even when the lifting mechanism 4 that lifts and lowers the robot body 3 is disposed outside the robot body 3.
  • the main body portion 17 is formed so that the shape when viewed in the vertical direction is a substantially rectangular shape or a substantially square shape. Since it is parallel to the plane formed, the robot 1 can be placed inside the housing 10 with the front surface of the robot 1 being closer to the front surface of the housing 10 of the EFEM 6. Therefore, in this embodiment, the EFEM 6 can be further downsized in the front-rear direction.
  • the first arm portion 18 is rotated when the first arm portion 18 is rotated around the rotation center C1 of the first arm portion 18 when viewed from the vertical direction. Since the elevating mechanism 4 is accommodated on the inner peripheral side of the locus R of the tip, the width of the casing 10 in the front-rear direction can be set to rotate the first arm unit 18 with respect to the main body unit 17 without considering the size of the elevating mechanism 4. It becomes possible to set based on the radius. Therefore, in this embodiment, the EFEM 6 can be further downsized in the front-rear direction.
  • the elevating mechanism 4 is disposed on the rear side of the main body portion 17, the robot 1 can be reduced in size in the left-right direction.
  • the drive unit 36, the guide rail 37, and the guide block 38 that constitute the elevating mechanism 4 are accommodated in the housing 39.
  • a flat plate-like front surface portion 39d is disposed between the guide block 38 and the main body portion 17, and a slit-like through hole 39g elongated in the vertical direction is formed in the front surface portion 39d.
  • a through hole passage portion 40b is formed in the connecting member 40 for connecting the robot body 3 and the guide block 38, and the width H1 of the through hole passage portion 40b and the width H3 of the through hole 39g in the left-right direction. However, it is narrower than the width H2 of the guide block 38 in the left-right direction.
  • the width of the through hole 39g can be made narrower than in the case where the guide block 38 is disposed in the through hole 39g. Therefore, in this embodiment, even if the lifting mechanism 4 that lifts and lowers the robot body 3 is disposed outside the robot body 3, dust generated from the drive unit 36, the guide rail 37, and the guide block 38 is lifted and lowered by the robot body 3. It is possible to effectively suppress the outflow from the connecting portion with the mechanism 4 to the inside of the EFEM 6.
  • the exhaust fan 42 for discharging the air inside the housing 39 to the outside of the EFEM 6 is attached to the housing 39, so that it is generated from the drive unit 36, the guide rail 37, and the guide block 38. It is possible to more effectively suppress the dust that flows out from the connecting portion between the robot body 3 and the lifting mechanism 4 into the EFEM 6.
  • the rear surface of the casing 21 of the main body portion 17 is fixed to a fixing member 41 arranged outside the casing 39. That is, in this embodiment, the robot main body 3 and the lifting mechanism 4 are connected by using a flat fixing member 41 arranged outside the housing 39 and the rear surface of the housing 21 formed in a flat shape. Therefore, in this embodiment, the robot body 3 and the lifting mechanism 4 can be easily connected.
  • the rotation center C1 of the first arm portion 18 is arranged in front of the center of the main body portion 17 when viewed from the vertical direction, and the first arm portion 18 and the first In the standby state of the robot 1 in which the two arm part 19, the third arm part 20, and the hands 14, 15 overlap in the vertical direction, a part of the arm 16 and the hands 14, 15 are located behind the main body part 17. It protrudes. Further, in the embodiment described above, the lifting mechanism 4 is disposed on the rear side of the main body portion 17.
  • the rotation center C1 of the first arm portion 18 is disposed behind the center of the main body portion 17, and the arm 16 and A part of the hands 14, 15 may protrude forward from the main body 17, the front surface of the main body 17 may be fixed to the lifting mechanism 4, and the lifting mechanism 4 may be disposed on the front side of the main body 17.
  • the robot 1 can be disposed inside the housing 10 with the rear surface of the robot 1 being close to the rear surface of the housing 10 of the EFEM 6, the EFEM 6 can be downsized in the front-rear direction. It becomes possible.
  • the elevating mechanism 4 is disposed on the rear side of the main body portion 17, but the elevating mechanism 4 may be disposed on the right side or the left side of the main body portion 17. Further, the elevating mechanism 4 may be arranged on both the left and right sides of the main body portion 17. Even in this case, it is possible to place the robot 1 inside the housing 10 with the front surface of the robot 1 being close to the front surface of the housing 10 of the EFEM 6, or the rear surface of the robot 1 is the housing 10. Since the robot 1 can be disposed inside the housing 10 in the state of being close to the rear surface, the EFEM 6 can be downsized in the front-rear direction.
  • the motor 45 of the raising / lowering mechanism 4 arrange
  • the elevating mechanism 4 may be disposed on the left and right sides and the rear side of the main body portion 17. Even in this case, since the robot 1 can be arranged inside the housing 10 with the front surface of the robot 1 being close to the front surface of the housing 10, the EFEM 6 can be downsized in the front-rear direction. It becomes possible.
  • the elevating mechanism 4 is the first when the first arm portion 18 is rotated around the rotation center C1 of the first arm portion 18 when viewed from the vertical direction. It is within the inner circumference of the locus R at the tip of the arm portion 18. In addition to this, for example, when viewed from the vertical direction, the corner portion on the rear surface side of the lifting mechanism 4 may protrude to the outer peripheral side of the locus R of the tip of the first arm portion 18.
  • the main body portion 17 is formed in a substantially rectangular parallelepiped shape that is elongated in the vertical direction.
  • the main body portion 17 may be formed in a substantially cylindrical shape, or a shape when viewed from the vertical direction. May be formed in a polygonal column shape having a substantially hexagonal shape or a substantially octagonal shape.
  • the two hands 14 and 15 are attached to the distal end side of the third arm portion 20, but one hand is attached to the distal end side of the third arm portion 20. Also good.
  • the arm 16 is constituted by three arm portions, that is, the first arm portion 18, the second arm portion 19, and the third arm portion 20, but the arm 16 is composed of two arm portions. It may be comprised by 4 or more arm parts.
  • the fixing member 41 is fixed to the through-hole passage portion 40b of the connecting member 40, and the robot body 3 is fixed to the fixing member 41.
  • the robot body 3 may be directly fixed to the through-hole passage portion 40b.
  • the main body portion 17 is formed in a substantially rectangular parallelepiped shape that is elongated in the vertical direction, but the main body portion 17 may be formed in a substantially cylindrical shape.
  • the main-body part 17 may be formed in the polygonal column shape from which a shape when it sees from an up-down direction becomes a substantially hexagonal shape or a substantially octagonal shape.
  • the nut member 47 is fixed to one of the two connecting members 40, but the nut member 47 may be fixed to the connecting member 54.
  • the semiconductor wafer processing apparatus 7 is arranged behind the EFEM 6 in the semiconductor manufacturing system 5.
  • the semiconductor wafer processing apparatus 7 may be disposed on the right side, the left side, or the left and right sides of the EFEM 6.
  • a semiconductor wafer processing apparatus 7 may be arranged on the right side of the EFEM 6 as indicated by a two-dot chain line in FIG.

Abstract

La présente invention concerne un robot industriel permettant de transporter des tranches de semi-conducteur entre une pluralité de nacelles FOUP agencées dans une direction fixe et un dispositif de traitement de tranches de semi-conducteur, le robot faisant partie d'un module EFEM, la taille du module EFEM pouvant être réduite dans la direction orthogonale à la direction d'agencement de la pluralité de nacelles FOUP et dans la direction verticale, y compris lorsqu'un mécanisme d'élévation et d'abaissement permettant d'élever et d'abaisser le corps de robot est disposé à l'extérieur du corps de robot. Dans un état d'attente dans lequel un bras (16) du robot industriel (1) est rétracté et une pluralité de parties de bras (18-20) et de mains (14, 15) se chevauchent verticalement, une partie du bras (16) est disposée plus loin vers la direction (Y2) qu'une section corps (17) d'un corps de robot (3). La section corps (17) du robot industriel (1) est fixée à un mécanisme (4) d'élévation et d'abaissement permettant d'élever et d'abaisser le corps de robot (3), le mécanisme (4) d'élévation et d'abaissement étant disposé sur le côté direction (Y2) de la section corps (17).
PCT/JP2014/070735 2013-08-09 2014-08-06 Robot industriel WO2015020088A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020167002890A KR102277372B1 (ko) 2013-08-09 2014-08-06 산업용 로봇
US14/896,788 US9539727B2 (en) 2013-08-09 2014-08-06 Industrial robot with elevating mechanism and arm-elevating mechanism
CN201480040727.0A CN105378908B (zh) 2013-08-09 2014-08-06 工业用机器人
US15/259,539 US10213924B2 (en) 2013-08-09 2016-09-08 Industrial robot with slit through-hole in cover

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201361864272P 2013-08-09 2013-08-09
US61/864,272 2013-08-09
JP2013-247028 2013-11-29
JP2013247027A JP6509487B2 (ja) 2013-08-09 2013-11-29 産業用ロボット
JP2013-247027 2013-11-29
JP2013247028A JP6235881B2 (ja) 2013-08-09 2013-11-29 産業用ロボット

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US14/896,788 A-371-Of-International US9539727B2 (en) 2013-08-09 2014-08-06 Industrial robot with elevating mechanism and arm-elevating mechanism
US15/259,539 Division US10213924B2 (en) 2013-08-09 2016-09-08 Industrial robot with slit through-hole in cover

Publications (1)

Publication Number Publication Date
WO2015020088A1 true WO2015020088A1 (fr) 2015-02-12

Family

ID=52461419

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/070735 WO2015020088A1 (fr) 2013-08-09 2014-08-06 Robot industriel

Country Status (1)

Country Link
WO (1) WO2015020088A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111745659A (zh) * 2020-06-03 2020-10-09 陈曦 一种更加人性化的迎宾机器人
CN113211471A (zh) * 2021-04-29 2021-08-06 沈阳芯源微电子设备股份有限公司 一种晶圆搬运机器人上的晶圆夹持机构

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008264980A (ja) * 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd 基板搬送ロボット
WO2009066573A1 (fr) * 2007-11-21 2009-05-28 Kabushiki Kaisha Yaskawa Denki Robot de transport, boîtier nettoyé localement muni du robot de transport et dispositif de fabrication de composants à semi-conducteur muni du boîtier
JP2012056033A (ja) * 2010-09-09 2012-03-22 Sinfonia Technology Co Ltd ロボットアーム装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008264980A (ja) * 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd 基板搬送ロボット
WO2009066573A1 (fr) * 2007-11-21 2009-05-28 Kabushiki Kaisha Yaskawa Denki Robot de transport, boîtier nettoyé localement muni du robot de transport et dispositif de fabrication de composants à semi-conducteur muni du boîtier
JP2012056033A (ja) * 2010-09-09 2012-03-22 Sinfonia Technology Co Ltd ロボットアーム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111745659A (zh) * 2020-06-03 2020-10-09 陈曦 一种更加人性化的迎宾机器人
CN113211471A (zh) * 2021-04-29 2021-08-06 沈阳芯源微电子设备股份有限公司 一种晶圆搬运机器人上的晶圆夹持机构

Similar Documents

Publication Publication Date Title
JP6235881B2 (ja) 産業用ロボット
TWI415778B (zh) Multi - joint robots
JP2011119556A (ja) 水平多関節ロボットおよびそれを備えた搬送装置
US8807911B2 (en) Transfer robot and equipment front end module including transfer robot with vent part
JP2011199121A (ja) 搬送装置
WO2016189565A1 (fr) Robot articulé horizontal
KR102612257B1 (ko) 수평 다관절 로봇 및 제조 시스템
US20200016765A1 (en) Horizontal articulated robot with bevel gears
TW201343344A (zh) 機器人
JP2007030163A (ja) ダブルアーム型ロボット
KR102314362B1 (ko) 기판 반송용 로봇
WO2015020088A1 (fr) Robot industriel
WO2015020089A1 (fr) Robot horizontal à articulations multiples et procédé de production pour robot horizontal à articulations multiples
KR101312821B1 (ko) 기판 이송 장치
KR102612256B1 (ko) 제조 시스템
JP6722460B2 (ja) 産業用ロボット
WO2017026256A1 (fr) Robot industriel
KR102314364B1 (ko) 기판 반송용 로봇
JP7191564B2 (ja) 産業用ロボット
JP6630162B2 (ja) 産業用ロボット
JP4471874B2 (ja) 直線駆動装置
JP2013082067A (ja) 産業用ロボット
JP3488393B2 (ja) 多関節ロボット装置
KR102312697B1 (ko) 기판 반송용 로봇
JP5474328B2 (ja) 基板搬送ロボット

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14834084

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 14896788

Country of ref document: US

ENP Entry into the national phase

Ref document number: 20167002890

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14834084

Country of ref document: EP

Kind code of ref document: A1