WO2015016089A1 - Procédé de formation de motif et agent de traitement de surface utilisé dans celui-ci, procédé de production de dispositif électronique, et dispositif électronique - Google Patents

Procédé de formation de motif et agent de traitement de surface utilisé dans celui-ci, procédé de production de dispositif électronique, et dispositif électronique Download PDF

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Publication number
WO2015016089A1
WO2015016089A1 PCT/JP2014/069211 JP2014069211W WO2015016089A1 WO 2015016089 A1 WO2015016089 A1 WO 2015016089A1 JP 2014069211 W JP2014069211 W JP 2014069211W WO 2015016089 A1 WO2015016089 A1 WO 2015016089A1
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group
sensitive
radiation
resin
actinic ray
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PCT/JP2014/069211
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English (en)
Japanese (ja)
Inventor
雄一郎 榎本
亮介 上羽
三千紘 白川
創 古谷
研由 後藤
雅史 小島
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富士フイルム株式会社
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Publication of WO2015016089A1 publication Critical patent/WO2015016089A1/fr

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G03F7/322—Aqueous alkaline compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G03F7/325—Non-aqueous compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes

Definitions

  • the present invention relates to a pattern forming method applicable to a semiconductor manufacturing process such as an IC, a circuit board such as a liquid crystal or a thermal head, and other photofabrication lithography processes, a surface treatment agent used therefor, and an electronic
  • the present invention relates to a device manufacturing method and an electronic device.
  • the present invention relates to a pattern forming method and a surface treatment agent used therefor, an electronic device manufacturing method, and an electronic device, which are suitable for exposure in an ArF exposure apparatus using far ultraviolet light having a wavelength of 300 nm or less as a light source.
  • a pattern formation method using chemical amplification has been used to compensate for the sensitivity reduction due to light absorption.
  • a photoacid generator contained in an exposed portion is decomposed by light irradiation to generate an acid.
  • PEB Post Exposure Bake
  • the alkali-insoluble group contained in the photosensitive composition is changed to an alkali-soluble group by the catalytic action of the generated acid.
  • development is performed using, for example, an alkaline solution.
  • an exposed part is removed and a desired pattern is obtained.
  • various alkali developers have been proposed.
  • this alkaline developer a 2.38 mass% TMAH (tetramethylammonium hydroxide aqueous solution) aqueous alkaline developer is generally used.
  • the exposure light source has become shorter and the projection lens has a higher numerical aperture (high NA).
  • high NA numerical aperture
  • an exposure machine using an ArF excimer laser having a wavelength of 193 nm as a light source has been developed.
  • immersion liquid a liquid having a high refractive index
  • EUV lithography in which exposure is performed with ultraviolet light having a shorter wavelength (13.5 nm) has also been proposed.
  • Patent Documents 1 and 2 a pattern forming method using a developer containing an organic solvent is being developed (see, for example, Patent Documents 1 and 2).
  • the present invention solves the above-mentioned problems, a pattern forming method capable of forming a pattern excellent in flatness of the pattern top portion and pattern survivability at the time of double development, a surface treatment agent used therefor, and a method for manufacturing an electronic device And an electronic device.
  • the present invention is as follows. [1] (1) forming an actinic ray-sensitive or radiation-sensitive film with an actinic ray-sensitive or radiation-sensitive resin composition containing a resin that decomposes by the action of an acid to generate a polar group; (2) a step of exposing the actinic ray-sensitive or radiation-sensitive film; (4A) a step of causing a surface treatment agent containing a compound that interacts with the polar group of the exposed resin to act on the actinic ray-sensitive or radiation-sensitive film; and (5A) A pattern forming method comprising, in this order, developing the actinic ray-sensitive or radiation-sensitive film using a developer containing an organic solvent.
  • the method includes (6) a step of heating the actinic ray-sensitive or radiation-sensitive film, and includes the step (3) and the step (4B).
  • the pattern forming method according to [2] including a step of heating the first development pattern at 30 ° C. or more higher than the heating temperature in the step (6).
  • the pattern forming method according to [2] or [3] including a step of (8) heating the first development pattern between the step (4B) and the step (5B).
  • the surface treatment agent contains a solvent
  • the step (4A) or (4B) includes a step of bringing the surface treatment agent into contact with the surface of the actinic ray-sensitive or radiation-sensitive film.
  • the pattern formation method of any one of.
  • As the solvent contained in the surface treatment agent a solvent having a film dissolution rate at 23 ° C. of 0.1 nm / s or less when the actinic ray-sensitive or radiation-sensitive film is exposed to an unexposed film, [ [9] The pattern forming method according to [9].
  • step (4A) or (4B) includes a step of bringing a vapor of the surface treatment agent into contact with the surface of the actinic ray-sensitive or radiation-sensitive film.
  • Pattern forming method [12] The pattern forming method according to any one of [1] to [11], wherein the exposure is immersion exposure. [13] [1] A method for manufacturing an electronic device, comprising the pattern forming method according to any one of [12]. [14] The electronic device manufactured by the manufacturing method of the electronic device as described in [13]. [15] [1] A surface treating agent used in the pattern forming method according to any one of [12]. [16] A surface treatment agent containing a resin having a repeating unit having a basic functional group and a solvent containing a monohydric alcohol.
  • a pattern forming method capable of forming a pattern excellent in flatness of a pattern top portion and pattern survivability during double development, a surface treatment agent used therefor, an electronic device manufacturing method, and an electronic device. be able to.
  • the description which does not describe substitution and non-substitution includes the thing which has a substituent with the thing which does not have a substituent.
  • the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
  • “active light” or “radiation” in the present specification means, for example, an emission line spectrum of a mercury lamp, far ultraviolet rays represented by an excimer laser, extreme ultraviolet rays (EUV light), X-rays, electron beams, and the like.
  • light means actinic rays or radiation.
  • exposure in this specification is not only exposure with far-ultraviolet rays such as mercury lamps and excimer lasers, X-rays, EUV light, but also drawing with particle beams such as electron beams and ion beams. Are also included in the exposure.
  • the first pattern forming method of the present invention comprises: (1) Actinic ray sensitive or radiation sensitive resin composition containing an actinic ray sensitive or radiation sensitive resin composition containing a resin that decomposes by the action of an acid to produce a polar group (hereinafter also referred to as “resin (A)”).
  • Forming a conductive film (2) a step of exposing the actinic ray-sensitive or radiation-sensitive film; (4A) a step of causing a surface treatment agent containing a compound that interacts with the polar group of the exposed resin to act on the actinic ray-sensitive or radiation-sensitive film; and (5A) The step of developing the actinic ray-sensitive or radiation-sensitive film using a developer containing an organic solvent is included in this order.
  • the first pattern formation method of the present invention comprises (4A) a surface containing a compound that interacts with a polar group with respect to an actinic ray-sensitive or radiation-sensitive film between step (2) and step (5A).
  • a step of applying a treatment agent thereby, in the exposed part of the actinic ray-sensitive or radiation-sensitive film, the polar group present on the surface of the actinic ray-sensitive or radiation-sensitive film and the compound that interacts with the polar group come into contact with each other to interact with each other. It is considered that the insolubilization with respect to the organic solvent further proceeds. As a result, it is considered that dissolution of the surface of the actinic ray-sensitive or radiation-sensitive film exposed portion during development is suppressed, and the flatness at the top portion of the formed pattern is improved.
  • the second pattern forming method of the present invention is: (1) forming an actinic ray-sensitive or radiation-sensitive film with an actinic ray-sensitive or radiation-sensitive resin composition containing a resin that decomposes by the action of an acid to generate a polar group; (2) a step of exposing the actinic ray-sensitive or radiation-sensitive film; (3) a step of developing the actinic ray-sensitive or radiation-sensitive film using an alkali developer to obtain a first development pattern; (4B) a step of causing a surface treatment agent containing a compound that interacts with a polar group of the exposed resin to act on the first development pattern; and (5B) a step of developing the first development pattern using a developer containing an organic solvent to obtain a second development pattern; Are included in this order.
  • the second pattern forming method of the present invention contains a compound that interacts with the polar group of the exposed resin with respect to the first development pattern (4B) between steps (3) and (5B).
  • 1 to 4 are schematic cross-sectional views illustrating the actinic ray-sensitive or radiation-sensitive film after step (1), respectively, and schematic cross-sections illustrating the actinic ray-sensitive or radiation-sensitive film after step (2). It is a schematic sectional drawing explaining the 1st image development pattern after a figure and a process (3), and the schematic sectional drawing explaining the 2nd image development pattern after a process (5B).
  • an actinic ray-sensitive or radiation-sensitive film 2 is formed on a substrate 1 as shown in FIG. Thereafter, through step (2), an exposed portion 11, an unexposed portion 12, and an intermediate exposed portion 13 are formed in the actinic ray-sensitive or radiation-sensitive film as shown in FIG.
  • the exposure unit 11 is a region where the exposure amount is T 1 or more
  • the unexposed portion 12 is the exposure amount.
  • the intermediate exposure portion 13 is a region exposure is less than T 2 or T 1.
  • the exposed portion 11 is dissolved in an alkaline developer, and the actinic ray-sensitive or radiation-sensitive film is developed. As shown in FIG. 3, the unexposed portion 12 and the intermediate exposed portion sandwiching the unexposed portion 12 13 is formed.
  • the unexposed portion 12 is dissolved using a developer containing an organic solvent, and the first development pattern 3 is further developed, As shown in FIG. 4, the second development pattern 4 including the intermediate exposure unit 13 is formed.
  • the first development pattern 3 is interacted with the polar group of the resin after exposure.
  • a step of causing a surface treatment agent containing the compound to act to act As a result, the surface treatment agent enters the space portion 14 between the intermediate exposure portions 13 and 13 of the first development pattern 3 and interacts with the polar group present on the side wall 13a of the intermediate exposure portion 13 and the polar group.
  • Contact with a compound causes interaction.
  • the intermediate exposure portion 13 is suppressed from being dissolved in the developer containing the organic solvent, and double development (ie, alkali development).
  • the pattern residual property is improved in development in which development with a developer and development with a developer containing an organic solvent are combined. Moreover, since the top part of the intermediate exposure part 13 is also in contact with the surface treatment agent, it is considered that dissolution in the developer containing the organic solvent is similarly suppressed, and as a result, the flatness of the pattern top part is improved. .
  • the surface treatment agent of the present invention penetrates into the intermediate exposure portion 13 or adheres to the surface of the intermediate exposure portion 13 to form an interaction.
  • the line width of the pattern after the step (4B) can be changed as compared with that before the step (4B), reflecting volume fluctuation due to penetration, adhesion, various physical-chemical interactions and the like.
  • the first development pattern 3 composed of an unexposed portion 12 and an intermediate exposed portion 13 sandwiching the unexposed portion 12 (see FIG. 5A); FIG.
  • the intermediate exposure unit 13 expands due to the penetration of the surface treatment agent (see FIG. 5B), the surface treatment agent 21 adheres to the intermediate exposure unit 13, and the surface treatment agent and The intermediate exposure unit 13 contracts in volume due to the interaction (see FIG. 5C).
  • the forming method includes the step (1).
  • the actinic ray-sensitive or radiation-sensitive film in the step (1) is formed from the actinic ray-sensitive or radiation-sensitive resin composition in the step (1). More specifically, A film formed by applying an actinic ray-sensitive or radiation-sensitive resin composition is preferable.
  • the step of forming a film of the actinic ray-sensitive or radiation-sensitive resin composition on the substrate can be performed by a generally known method.
  • the substrate on which the film is formed is not particularly limited, and silicon, SiN, inorganic substrates such as SiO 2 and SiN, coated inorganic substrates such as SOG, semiconductor manufacturing processes such as IC, liquid crystal, and thermal head
  • silicon, SiN, inorganic substrates such as SiO 2 and SiN coated inorganic substrates such as SOG
  • semiconductor manufacturing processes such as IC, liquid crystal, and thermal head
  • a substrate generally used in a circuit board manufacturing process or other photofabrication lithography process can be used.
  • an organic antireflection film may be formed between the film and the substrate.
  • PB preheating step
  • PEB post-exposure heating step
  • the heating temperature is preferably 70 to 130 ° C., more preferably 80 to 120 ° C. for both PB and PEB.
  • the heating time is preferably 30 to 300 seconds, more preferably 30 to 180 seconds, and still more preferably 30 to 90 seconds. Heating can be performed by means provided in a normal exposure / developing machine, and may be performed using a hot plate or the like. The reaction of the exposed part is promoted by baking, and the sensitivity and pattern profile are improved.
  • the first and second pattern forming methods of the present invention include the step (2).
  • limiting in the light source wavelength used for the exposure method of this invention Infrared light, visible light, ultraviolet light, far ultraviolet light, extreme ultraviolet light, X-rays, an electron beam, etc. can be mentioned, Preferably it is 250 nm or less.
  • KrF excimer laser 248 nm
  • ArF excimer laser (193 nm)
  • F 2 excimer laser 157 nm
  • X-ray EUV
  • EUV 13 nm
  • electron beam etc.
  • KrF excimer laser, ArF excimer laser, EUV or electron beam are preferable, and ArF excimer laser is more preferable.
  • an immersion exposure method can be applied.
  • the immersion exposure method can be combined with a super-resolution technique such as a phase shift method or a modified illumination method.
  • a super-resolution technique such as a phase shift method or a modified illumination method.
  • the immersion liquid is preferably a liquid that is transparent to the exposure wavelength and has a refractive index temperature coefficient as small as possible so as to minimize distortion of the optical image projected onto the film.
  • an ArF excimer laser (wavelength: 193 nm)
  • an additive liquid that decreases the surface tension of water and increases the surface activity may be added in a small proportion.
  • This additive is preferably one that does not dissolve the resist layer on the wafer and can ignore the influence on the optical coating on the lower surface of the lens element.
  • an aliphatic alcohol having a refractive index substantially equal to that of water is preferable, and specific examples include methyl alcohol, ethyl alcohol, isopropyl alcohol and the like.
  • an alcohol having a refractive index substantially equal to that of water even if the alcohol component in water evaporates and the content concentration changes, an advantage that the change in the refractive index of the entire liquid can be made extremely small can be obtained.
  • an opaque substance or impurities whose refractive index is significantly different from that of water are mixed with respect to 193 nm light, the optical image projected on the resist is distorted. Therefore, distilled water is preferable as the water to be used. Further, pure water filtered through an ion exchange filter or the like may be used.
  • the electrical resistance of water used as the immersion liquid is preferably 18.3 M ⁇ cm or more, the TOC (organic substance concentration) is preferably 20 ppb or less, and deaeration treatment is preferably performed.
  • an additive that increases the refractive index may be added to water, or heavy water (D 2 O) may be used instead of water.
  • the receding contact angle of the actinic ray-sensitive or radiation-sensitive film formed using the actinic ray-sensitive or radiation-sensitive resin composition in the present invention is 70 ° or more at a temperature of 23 ⁇ 3 ° C. and a humidity of 45 ⁇ 5%. It is suitable for exposure through an immersion medium, preferably 75 ° or more, more preferably 75 to 85 °.
  • the receding contact angle is too small, it cannot be suitably used for exposure through an immersion medium, and the effect of reducing water residue (watermark) defects cannot be sufficiently exhibited.
  • a hydrophobic resin (HR) described later in the actinic ray-sensitive or radiation-sensitive composition it is preferable to include a hydrophobic resin (HR) described later in the actinic ray-sensitive or radiation-sensitive composition.
  • the receding contact angle may be improved by forming a coating layer (so-called “topcoat”) of a hydrophobic resin composition on the actinic ray-sensitive or radiation-sensitive film.
  • topcoats are not particularly limited, and those known in this technical field can be appropriately used.
  • a top coat containing not only a resin but also a basic compound (quencher) as described in JP 2013-61647 A, particularly in OC-5 to OC-11 of Example Table 3 is applied. It is also conceivable to give an auxiliary function to pattern shape adjustment.
  • the immersion head In the immersion exposure process, the immersion head needs to move on the wafer following the movement of the exposure head to scan the wafer at high speed to form the exposure pattern.
  • the contact angle of the immersion liquid with respect to the actinic ray-sensitive or radiation-sensitive film is important, and the resist is required to follow the high-speed scanning of the exposure head without remaining droplets.
  • the second pattern forming method of the present invention includes step (3).
  • the combination of the step (3) and the step (5B) is performed according to FIG. 1-FIG. 11 and the like, it can be expected that a pattern having a half of the spatial frequency of the optical image can be obtained.
  • the alkaline developer in the step (3) contains water as a main component.
  • the main component means that the water content exceeds 50% by mass with respect to the total amount of the developer.
  • the type of the alkaline aqueous solution is not particularly limited.
  • a developing method for example, a method in which a substrate is immersed in a tank filled with a developer for a certain period of time (dip method), a method in which the developer is raised on the surface of the substrate by surface tension and is left stationary for a certain time (paddle) Method), a method of spraying the developer on the substrate surface (spray method), a method of continuously discharging the developer while scanning the developer discharge nozzle on the substrate rotating at a constant speed (dynamic dispensing method) Etc.
  • dip method a method in which a substrate is immersed in a tank filled with a developer for a certain period of time
  • paddle a method in which the developer is raised on the surface of the substrate by surface tension and is left stationary for a certain time
  • spray method a method of spraying the developer on the substrate surface
  • Appropriate amounts of alcohols and surfactants can be added to the alkaline aqueous solution. Specific examples and usage amounts of the surfactant are the same as those of the organic developer described later.
  • the alkali concentration of the aqueous alkali solution is usually 0.1 to 20% by mass.
  • the pH of the alkaline aqueous solution is usually 10.0 to 15.0. Generally, a 2.38% mass aqueous solution of tetramethylammonium hydroxide is used.
  • an appropriate amount of alcohol or surfactant may be added to the alkaline aqueous solution.
  • rinsing may be performed. As a rinsing liquid in the rinsing treatment performed after alkali development, pure water may be used and an appropriate amount of a surfactant may be added.
  • the step of applying a surface treatment agent containing a compound that interacts with the polar group of the exposed resin includes the step (4A).
  • the surface treatment agent in the step (4A) preferably contains a solvent, and the step (4A) is preferably a step of bringing the surface treatment agent into contact with the surface of the actinic ray-sensitive or radiation-sensitive film.
  • the polar group of the resin after exposure is not particularly limited as long as the resin has a polar group after exposure. However, after exposure, the polar group generated by decomposition of the resin by the action of an acid. It is preferable that
  • a method for contacting the surface treatment agent for example, a method in which an actinic ray-sensitive or radiation-sensitive film or a first development pattern is immersed in a tank filled with the surface treatment agent for a predetermined time (dip method), actinic ray sensitivity
  • the surface treatment agent is developed on the surface of the radiation-sensitive film or the first development pattern by surface tension and developed by standing for a certain time (paddle method), the actinic ray-sensitive or radiation-sensitive film, or the first development pattern surface
  • spraying a surface treatment agent on a surface spray method
  • surface treatment while scanning a surface treatment agent discharge nozzle at a constant speed on an actinic ray-sensitive or radiation-sensitive film rotating at a constant speed or a first development pattern
  • the second pattern formation method of the present invention includes a step (4B).
  • Specific examples and preferred examples of the surface treatment agent used in the step (4B) and the contact method of the surface treatment agent are the same as those in the above-described step (4A).
  • the surface treatment agent may be a gas (preferably ammonia) or a solution as long as it contains the compound (A) described later, but is preferably a solution.
  • the surface treatment agent preferably contains a solvent.
  • the steps (4A) and (4B) described above are steps in which a surface treatment agent is brought into contact with the actinic ray-sensitive or radiation-sensitive film surface, respectively. It is preferable to contain.
  • the surface treatment agent is a solution
  • the total mass of the above-described compound (A) is not particularly limited, but is 0.1 to 5% by mass or less based on the total amount of the surface treatment agent in that the effect of the present invention is more excellent. Is preferably 1 to 5% by mass, more preferably 1 to 3% by mass.
  • the compound (A) only one kind of compound may be used, or two or more kinds of compounds having different chemical structures may be used.
  • the surface treatment agent may be a gas as described above.
  • the steps (4A) and (4B) described above are the actinic ray. Or a step of bringing the surface treatment agent into contact with the surface of the radiation-sensitive film.
  • the amount used is not particularly limited as long as it can sufficiently interact with the polar group of the exposed resin, but at least the amount that can cover the entire substrate surface is used. It is preferable to use it.
  • the specific amount used depends on the concentration of the surface treatment agent, the viscosity, the thickness of the actinic ray-sensitive or radiation-sensitive film, and the size of the substrate, for example, when the substrate is a wafer having a diameter of 300 mm, The application amount is appropriately adjusted within the range of 0.1 mL to 100 mL.
  • the 1st pattern formation method of this invention includes the said process (5A).
  • the 2nd pattern formation method of this invention includes the said process (5B).
  • polar solvents such as ketone solvents, ester solvents, alcohol solvents, amide solvents, ether solvents, and hydrocarbon solvents can be used.
  • ketone solvents include 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, acetone, 2-heptanone (methyl amyl ketone), 4-heptanone, 1-hexanone, 2-hexanone, diisobutyl ketone, Examples include cyclohexanone, methylcyclohexanone, phenylacetone, methylethylketone, methylisobutylketone, acetylacetone, acetonylacetone, ionone, diacetylalcohol, acetylcarbinol, acetophenone, methylnaphthylketone, isophorone, and propylene carbonate.
  • ester solvents include methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, pentyl acetate, isopentyl acetate, amyl acetate, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl.
  • Examples include ether acetate, ethyl-3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, methyl formate, ethyl formate, butyl formate, propyl formate, ethyl lactate, butyl lactate, and propyl lactate. be able to.
  • the alcohol solvents include methyl alcohol, ethyl alcohol, n-propyl alcohol, isopropyl alcohol, n-butyl alcohol, sec-butyl alcohol, tert-butyl alcohol, isobutyl alcohol, n-hexyl alcohol, n-heptyl alcohol, alcohols such as n-octyl alcohol and n-decanol, glycol solvents such as ethylene glycol, diethylene glycol and triethylene glycol, ethylene glycol monomethyl ether, propylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monoethyl ether, Diethylene glycol monomethyl ether, triethylene glycol monoethyl ether, methoxymethyl butano It can be mentioned glycol ether solvents such as Le.
  • ether solvent examples include dioxane, tetrahydrofuran and the like in addition to the glycol ether solvent.
  • amide solvents include N-methyl-2-pyrrolidone, N, N-dimethylacetamide, N, N-dimethylformamide, hexamethylphosphoric triamide, 1,3-dimethyl-2-imidazolidinone and the like. Can be used.
  • the hydrocarbon solvent examples include aromatic hydrocarbon solvents such as toluene and xylene, and aliphatic hydrocarbon solvents such as pentane, hexane, octane and decane.
  • the organic developer is preferably a developer containing at least one organic solvent selected from the group consisting of ketone solvents and ester solvents, and in particular, butyl acetate or ketone as the ester solvent.
  • a developer containing methyl amyl ketone (2-heptanone) as a system solvent is preferred.
  • a plurality of solvents may be mixed, or may be used by mixing with a solvent other than those described above or water.
  • the water content of the developer as a whole is preferably less than 10% by mass, and more preferably substantially free of moisture. That is, the amount of the organic solvent used in the organic developer is preferably 90% by mass or more and 100% by mass or less, and more preferably 95% by mass or more and 100% by mass or less, with respect to the total amount of the developer.
  • the vapor pressure of the organic developer is preferably 5 kPa or less, more preferably 3 kPa or less, and particularly preferably 2 kPa or less at 20 ° C.
  • the surfactant is not particularly limited, and for example, ionic or nonionic fluorine-based and / or silicon-based surfactants can be used.
  • fluorine and / or silicon surfactants include, for example, JP-A No. 62-36663, JP-A No. 61-226746, JP-A No. 61-226745, JP-A No. 62-170950, JP-A-63-34540, JP-A-7-230165, JP-A-8-62834, JP-A-9-54432, JP-A-9-5988, US Pat. No. 5,405,720, The surfactants described in the specifications of US Pat.
  • the surfactant is a nonionic surfactant.
  • a nonionic surfactant it does not specifically limit as a nonionic surfactant, It is still more preferable to use a fluorochemical surfactant or a silicon-type surfactant.
  • the amount of the surfactant used is usually from 0.001 to 5% by mass, preferably from 0.005 to 2% by mass, more preferably from 0.01 to 0.5% by mass, based on the total amount of the developer.
  • the organic developer may contain a basic compound as necessary.
  • the basic compound include nitrogen-containing basic compounds, for example, nitrogen-containing compounds described in JP-A-2013-11833, particularly [0021] to [0063].
  • the organic developer contains a basic compound, an improvement in contrast during development, suppression of film loss, and the like can be expected.
  • Examples of the developing method include the same methods as the developing method in step (3) described above.
  • the discharge pressure (discharge) of the discharged developer the flow rate per unit area of the developer) is to be, as an example, preferably 2mL / sec / mm 2 or less, more preferably 1.5mL / sec / mm 2 or less, more preferably 1mL / sec / mm 2 or less is there.
  • There is no particular lower limit on the flow rate but 0.2 mL / sec / mm 2 or more is preferable in consideration of throughput. Details of this are described in JP 2010-232550 A, in particular paragraphs 0022 to 0029.
  • the second pattern forming method includes (6) heating the actinic ray-sensitive or radiation-sensitive film between the step (2) and the step (3), and the step (3) It is preferable to include a step of (7) heating the first development pattern at a temperature 30 ° C. or more higher than the heating temperature in the step (6) between the step (4B) and the step (4B).
  • the acid generated from the compound that generates acid upon irradiation with actinic rays or radiation remaining in the intermediate exposure portion in the first development pattern is decomposed by the action of the acid to generate a polar group. It is considered that it reacts with the resin again, and the decomposition of the resin in the intermediate exposure portion is further promoted, and as a result, the pattern remaining property during double development is further improved.
  • the heating temperature in step (6) is preferably 70 ° C. to 130 ° C., more preferably 80 ° C. to 120 ° C.
  • the heating time in the step (6) is preferably 30 to 300 seconds, more preferably 30 to 180 seconds, and further preferably 30 to 90 seconds.
  • the heating in the step (6) can be performed by means provided in a normal exposure / developing machine, and may be performed using a hot plate or the like.
  • the heating temperature in the step (7) is preferably 100 ° C. to 160 ° C., more preferably 110 ° C. to 150 ° C.
  • the heating time in the step (7) is preferably 30 to 300 seconds, more preferably 30 to 180 seconds, still more preferably 30 to 90 seconds.
  • the heating in the step (7) can be performed by means provided in a normal exposure / developing machine, and may be performed using a hot plate or the like.
  • Step of heating first development pattern In the second pattern formation method of the present invention, (8) heating of the first development pattern is performed between step (4B) and step (5B). It is preferable to include the process to perform.
  • the heating temperature in the step (8) is preferably 70 ° C. to 130 ° C., more preferably 80 ° C. to 120 ° C.
  • the heating time in the step (8) is preferably 30 to 300 seconds, more preferably 30 to 180 seconds, and further preferably 30 to 90 seconds. Heating can be performed by means provided in a normal exposure / developing machine, and may be performed using a hot plate or the like.
  • the 1st and 2nd pattern formation method of this invention includes the rinse process wash
  • the rinsing liquid is not particularly limited as long as the resist pattern is not dissolved, and a solution containing a general organic solvent can be used.
  • a rinsing liquid containing at least one organic solvent selected from the group consisting of hydrocarbon solvents, ketone solvents, ester solvents, alcohol solvents, amide solvents and ether solvents is used. It is preferable.
  • hydrocarbon solvent ketone solvent, ester solvent, alcohol solvent, amide solvent and ether solvent
  • hydrocarbon solvent ketone solvent, ester solvent, alcohol solvent, amide solvent and ether solvent
  • the step of washing with a rinse liquid containing at least one organic solvent selected from the group consisting of ketone solvents, ester solvents, alcohol solvents, and amide solvents is performed, and the step of washing with a rinsing solution containing a monohydric alcohol is particularly preferred.
  • a cleaning step is performed using a rinse liquid containing a monohydric alcohol having 5 or more carbon atoms.
  • examples of the monohydric alcohol used in the rinsing step include linear, branched, and cyclic monohydric alcohols. Specific examples include 1-hexanol, 2-hexanol, and 4-methyl-2-pen. Tanol (methyl isobutyl carbinol), 1-pentanol, 3-methyl-1-butanol and the like can be used.
  • the water content in the rinse liquid is preferably 10% by mass or less, more preferably 5% by mass or less, and particularly preferably 3% by mass or less. By setting the water content to 10% by mass or less, good development characteristics can be obtained.
  • the vapor pressure of the rinsing solution used after the step of developing with a developer containing an organic solvent is preferably 0.05 kPa or more and 5 kPa or less, more preferably 0.1 kPa or more and 5 kPa or less at 20 ° C. 12 kPa or more and 3 kPa or less are the most preferable.
  • the cleaning method is not particularly limited. For example, a method of continuing to discharge the rinse liquid onto the substrate rotating at a constant speed (rotary coating method), or immersing the substrate in a tank filled with the rinse liquid for a certain period of time. A method (dip method), a method of spraying a rinsing liquid onto the substrate surface (spray method), etc. can be applied. Among these, a cleaning process is performed by a spin coating method, and after cleaning, the substrate is rotated at a speed of 2000 rpm to 4000 rpm.
  • the developing solution and the rinsing solution remaining between the patterns and inside the patterns are removed by baking.
  • the heating step after the rinsing step is usually performed at 40 to 160 ° C., preferably 70 to 95 ° C., usually 10 seconds to 3 minutes, preferably 30 seconds to 90 seconds.
  • the organic developer, alkali developer, and / or rinse solution used in the present invention preferably have few impurities such as various fine particles and metal elements.
  • these chemicals are manufactured in a clean room, and the impurities are reduced by filtering with various filters such as Teflon filters, polyolefin filters, ion exchange filters, etc. It is preferable.
  • the metal element the metal element concentrations of Na, K, Ca, Fe, Cu, Mg, Mn, Li, Al, Cr, Ni, and Zn are all preferably 10 ppm or less, and preferably 5 ppm or less. More preferred.
  • the storage container for the developer and the rinsing liquid is not particularly limited, and containers such as polyethylene resin, polypropylene resin, and polyethylene-polypropylene resin that are used for electronic materials can be used as appropriate.
  • containers such as polyethylene resin, polypropylene resin, and polyethylene-polypropylene resin that are used for electronic materials can be used as appropriate.
  • a container having a small amount of components eluted from the inner wall of the container into the chemical solution As such a container, a container whose inner wall is made of perfluoro resin (for example, FluoroPure PFA composite drum (wetted inner surface; PFA resin lining) manufactured by Entegris), steel drum can manufactured by JFE (wetted inner surface; zinc phosphate coating) ) And the like.
  • the second pattern forming method of the present invention is actinic ray sensitive or radiation sensitive between the step (1) and the step (2).
  • a step of forming a protective film with the protective film-forming composition may be included.
  • a resin that is different from the actinic ray-sensitive or radiation-sensitive resin composition and decomposes by the action of an acid to generate a polar group is contained.
  • the composition for forming a protective film (particularly, the second actinic ray-sensitive or radiation-sensitive resin composition as a preferred form of the composition for forming a protective film) will be described in detail later.
  • the method for forming a protective film on the first actinic ray-sensitive or radiation-sensitive film with the protective film-forming composition is the actinic ray-sensitive or radiation-sensitive film described in the above step (1). A method similar to the forming method can be employed.
  • Step of removing upper part of first development pattern In the second pattern forming method of the present invention, (11) the upper part of the first development pattern is removed between step (4B) and step (5B). In this case, it is preferable to include (11 ′) a step of etching the first development pattern.
  • the etching in the step (11 ′) may be dry etching or wet etching, but is preferably dry etching.
  • the dry etching method is disclosed in Japanese Patent Laid-Open Nos. 59-126506, 59-46628, 58-9108, 58-2809, 57-148706, 61-41102, and the like. Mention may be made of the methods as described.
  • etching gas used for dry etching a mixed gas containing one or more gases (main etching gas) selected from fluorine-based gas, nitrogen, ammonia, and hydrogen and oxygen gas can be preferably exemplified.
  • main etching gas selected from fluorine-based gas, nitrogen, ammonia, and hydrogen and oxygen gas
  • the organic film can be processed with anisotropy.
  • the mixed gas in the present invention is preferably such that the mixing ratio of main etching gas and oxygen gas (main etching gas / oxygen gas) is 1/1 to 10/1 in terms of flow rate.
  • main etching gas / oxygen gas the mixing ratio of main etching gas and oxygen gas
  • the mixing ratio is preferably 7/1 to 3/1, more preferably 6/1 to 4/1 in terms of flow rate.
  • the mixed gas in the present invention includes other gases such as helium (He), neon (Ne), argon (Ar), krypton (Kr), It is preferable to further include at least one third gas selected from the group of rare gases such as xenon (Xe).
  • the mixing ratio of the third gas and the main etching gas is preferably 1/1 to 1/3 in flow rate ratio.
  • the partial pressure controllability of the etching gas can be maintained, it is not always necessary to mix the third gas.
  • the internal pressure of the chamber is preferably 0.5 to 4.0 Pa, more preferably 1.0 to 4.0 Pa.
  • the internal pressure of the chamber can be adjusted, for example, by appropriately controlling the flow rate of the etching gas and the degree of decompression of the chamber.
  • the flow rate of the mixed gas in the etching is preferably 1500 sccm or less, and more preferably 1200 sccm or less.
  • sscm means a flow rate (mL / min) in a standard state (1 atm (atmospheric pressure: 1013 hPa), 0 ° C.).
  • the applied high frequency can be selected from 400 kHz, 60 MHz, 13.56 MHz, 2.45 GHz, etc., and is preferably 50 to 2000 W, more preferably 100 to 1000 W of RF power.
  • dry etching may be terminated based on an etching processing time calculated in advance, or an end point of the dry etching processing may be detected using an end point detector.
  • the etching may include an over-etching process.
  • the overetching process is preferably performed by setting an overetching ratio. Moreover, it is preferable to calculate the overetching ratio from the etching process time to be performed first.
  • the over-etching ratio can be arbitrarily set, but it is preferably 30% or less of the etching processing time in the etching from the viewpoint of etching resistance of the upper part of the first development pattern and the rectangularity of the pattern to be etched, and 5 to 25%. More preferably, it is 10 to 15%.
  • the pattern obtained by the method of the present invention is typically used, for example, as a mask in an etching process of semiconductor manufacturing. Further, it can be used as a core material (core) for a spacer process as disclosed in JP-A-3-270227 and JP-A-2013-164509. Furthermore, it can also be suitably used for guide pattern formation in DSA (Directed Self-Assembly) (see, for example, ACS Nano Vol. 4, No. 8, Pages 4815-4823). In addition, application to various uses is possible.
  • core material core
  • DSA Directed Self-Assembly
  • the present invention also relates to an electronic device manufacturing method including the pattern forming method of the present invention described above, and an electronic device manufactured by this manufacturing method.
  • the electronic device of the present invention is suitably mounted on electrical and electronic equipment (home appliances, OA / media related equipment, optical equipment, communication equipment, etc.).
  • the surface treatment agent used in the present invention (hereinafter also referred to as “the surface treatment agent of the present invention”) will be described in detail.
  • the surface treatment agent contains a compound that interacts with a polar group (hereinafter also referred to as “compound (A)”).
  • the compound (A) is not particularly limited as long as it interacts with a polar group, but can form at least one of an ionic bond, a hydrogen bond, a chemical bond, and a dipole interaction with the polar group.
  • a compound is preferred.
  • the resin (A) and the surface treatment agent form an interaction, so that the solubility of the resin (A) is changed, and the flatness of the pattern top portion and the pattern persistence in double development are changed.
  • the ionic bond intends an electrostatic interaction between a cation and an anion, and includes salt formation and the like.
  • the compound (A) at least one selected from the group consisting of an onium salt compound, a nitrogen-containing compound, and a phosphorus-based compound can be given in that the effect of the present invention is excellent.
  • the compound (A) may be in the form of a low molecular compound or a polymer compound, but is preferably in the form of a polymer compound.
  • the onium salt compound As the onium salt compound, a compound having an onium salt structure is intended.
  • the onium salt structure refers to a salt structure generated by a coordinate bond between an organic component and a Lewis base.
  • the onium salt compound mainly forms an interaction with the polar group by an ionic bond.
  • the polar group is a carboxyl group
  • a cation in the onium salt compound forms an electrostatic interaction with a carboxyl-derived carboxyl anion (COO ⁇ ) (forms an ionic bond).
  • onium salt structure is not particularly limited, and examples thereof include structures such as ammonium salts, phosphonium salts, oxonium salts, sulfonium salts, selenonium salts, carbonium salts, diazonium salts, iodonium salts having a cation structure shown below. .
  • the cation in the onium salt structure includes those having a positive charge on the hetero atom of the heteroaromatic ring.
  • Examples of such onium salts include pyridinium salts and imidazolium salts. In the present specification, the above pyridinium salt and imidazolium salt are also included as one embodiment of the ammonium salt.
  • the onium salt compound may be a polyvalent onium salt compound having two or more onium ion atoms in one molecule from the viewpoint that the effect of the present invention is more excellent.
  • the polyvalent onium salt compound a compound in which two or more cations are linked by a covalent bond is preferable.
  • the polyvalent onium salt compound include diazonium salts, iodonium salts, sulfonium salts, ammonium salts, and phosphonium salts. Of these, diazonium salts, iodonium salts, sulfonium salts, and ammonium salts are preferable in view of more excellent effects of the present invention, and ammonium salts are more preferable from the viewpoint of stability.
  • the anion (anion) contained in the onium salt compound (onium salt structure) may be any anion as long as it is an anion, but it may be a monovalent ion or a polyvalent ion.
  • examples of the monovalent anion include a sulfonate anion, a formate anion, a carboxylate anion, a sulfinate anion, a boron anion, a halide ion, a phenol anion, an alkoxy anion, and a hydroxide ion.
  • divalent anion examples include oxalate ion, phthalate ion, maleate ion, fumarate ion, tartaric acid ion, malate ion, lactate ion, sulfate ion, diglycolate ion, and 2,5-flange.
  • divalent anion examples include carboxylate ions. More specifically, monovalent anions include Cl ⁇ , Br ⁇ , I ⁇ , AlCl 4 ⁇ , Al 2 Cl 7 ⁇ , BF 4 ⁇ , PF 6 ⁇ , ClO 4 ⁇ , NO 3 ⁇ , CH 3.
  • sulfonate anion carboxylate anion, bis (alkylsulfonyl) amide anion, tris (alkylsulfonyl) methide anion, BF 4 ⁇ , PF 6 ⁇ , SbF 6 — and the like are preferable, and carbon atoms are more preferable.
  • a preferred embodiment of the onium salt compound is composed of the onium salt compound represented by the formula (1-1) and the onium salt compound represented by the formula (1-2) in that the effect of the present invention is more excellent. There may be mentioned at least one selected from the group.
  • the onium salt compound represented by the formula (1-1) may be used alone or in combination of two or more. Further, the onium salt compound represented by the formula (1-2) may be used alone or in combination of two or more. Further, the onium salt compound represented by the formula (1-1) and the onium salt compound represented by the formula (1-2) may be used in combination.
  • M represents a nitrogen atom, a phosphorus atom, a sulfur atom, or an iodine atom. Especially, a nitrogen atom is preferable at the point which the effect of this invention is more excellent.
  • R each independently represents a hydrogen atom, an aliphatic hydrocarbon group that may contain a hetero atom, an aromatic hydrocarbon group that may contain a hetero atom, or a group in which two or more of these are combined. .
  • the aliphatic hydrocarbon group may be linear, branched or cyclic. Further, the number of carbon atoms contained in the aliphatic hydrocarbon group is not particularly limited, but is preferably 1 to 15 and more preferably 1 to 5 in terms of more excellent effects of the present invention.
  • Examples of the aliphatic hydrocarbon group include an alkyl group, a cycloalkyl group, an alkene group, an alkyne group, or a group obtained by combining two or more of these.
  • the aliphatic hydrocarbon group may contain a hetero atom. That is, it may be a heteroatom-containing hydrocarbon group.
  • the type of hetero atom contained is not particularly limited, and examples thereof include a halogen atom, an oxygen atom, a nitrogen atom, a sulfur atom, a selenium atom, and a tellurium atom.
  • Y 1 to Y 4 are each independently selected from the group consisting of an oxygen atom, a sulfur atom, a selenium atom, and a tellurium atom. Of these, an oxygen atom and a sulfur atom are preferred because they are easier to handle.
  • R a , R b and R c are each independently selected from a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms.
  • t represents an integer of 1 to 3.
  • the number of carbon atoms contained in the aromatic hydrocarbon group is not particularly limited, but 6 to 20 is preferable and 6 to 10 is more preferable in terms of more excellent effects of the present invention.
  • Examples of the aromatic hydrocarbon group include a phenyl group and a naphthyl group.
  • the aromatic hydrocarbon group may contain a hetero atom.
  • the aspect in which a hetero atom is contained is as described above.
  • an alkyl group which may contain a heteroatom an alkene group which may contain a heteroatom, or a cycloalkyl group which may contain a heteroatom from the viewpoint that the effects of the present invention are more excellent.
  • an aryl group which may contain a hetero atom an alkyl group which may contain a heteroatom.
  • a plurality of R may be bonded to each other to form a ring.
  • the type of ring formed is not particularly limited, and examples thereof include a 5- to 6-membered ring structure.
  • the ring formed may have aromaticity.
  • the cation of the onium salt compound represented by the formula (1-1) is a pyridinium ring represented by the following formula (10). There may be. Furthermore, a part of the ring formed may contain a hetero atom.
  • the cation of the onium salt compound represented by the formula (1-1) is represented by the following formula (11). It may be an imidazolium ring.
  • the definition of R in Formula (10) and Formula (11) is as above-mentioned.
  • Rv each independently represents a hydrogen atom or an alkyl group. A plurality of Rv may be bonded to each other to form a ring.
  • X ⁇ represents a monovalent anion.
  • the definition of monovalent anion is as described above.
  • n an integer of 2 to 4.
  • n 4
  • M 4
  • M 4
  • M 4
  • M a sulfur atom
  • n 3
  • M iodine atom
  • L represents a divalent linking group.
  • a substituted or unsubstituted divalent aliphatic hydrocarbon group preferably having 1 to 8 carbon atoms, for example, an alkylene group such as a methylene group, an ethylene group, or a propylene group
  • a divalent aromatic hydrocarbon group preferably having 6 to 12 carbon atoms, such as a phenylene group
  • Examples include —CO—, —NH—, —COO—, —CONH—, or a group in which two or more of these are combined (for example, an alkyleneoxy group, an alkyleneoxycarbonyl group, an alkylenecarbonyloxy group, and the like).
  • m independently represents an integer of 1 to 3.
  • m represents 3
  • M is a sulfur atom
  • m represents 2
  • M is an iodine atom
  • a nitrogen-containing compound intends a compound containing a nitrogen atom.
  • the nitrogen-containing compound does not include the onium salt compound.
  • the nitrogen-containing compound mainly forms an interaction between a nitrogen atom in the compound and the polar group.
  • the polar group is a carboxyl group, it interacts with a nitrogen atom in the nitrogen-containing compound to form a salt.
  • the compound represented by following General formula (6) is mentioned, for example.
  • R 4 and R 5 each independently represent a hydrogen atom, a hydroxyl group, a formyl group, an alkoxy group, an alkoxycarbonyl group, a chain hydrocarbon group having 1 to 30 carbon atoms, or a carbon number of 3
  • R 6 represents a hydrogen atom, a hydroxyl group, a formyl group, an alkoxy group, an alkoxycarbonyl group, an n-valent chain hydrocarbon group having 1 to 30 carbon atoms, an n-valent alicyclic hydrocarbon group having 3 to 30 carbon atoms, It is an n-valent aromatic hydrocarbon group having 6 to 14 carbon atoms or a combination of two or more of these groups.
  • n is an integer of 1 or more. However, when n is 2 or more, the plurality of R 4 and R 5 may be the same or different. Further, any two of R 4 to R 6 may be bonded to form a ring structure together with the nitrogen atom to which each is bonded.
  • Examples of the chain hydrocarbon group having 1 to 30 carbon atoms represented by R 4 and R 5 include a methyl group, an ethyl group, an n-propyl group, an i-propyl group, an n-butyl group, and 2-methylpropyl. Group, 1-methylpropyl group, t-butyl group and the like.
  • Examples of the alicyclic hydrocarbon group having 3 to 30 carbon atoms represented by R 4 and R 6 include a cyclopropyl group, a cyclopentyl group, a cyclohexyl group, an adamantyl group, and a norbornyl group.
  • Examples of the aromatic hydrocarbon group having 6 to 14 carbon atoms represented by R 4 and R 6 include a phenyl group, a tolyl group, and a naphthyl group.
  • Examples of the group formed by combining two or more of these groups represented by R 4 and R 5 include aralkyl groups having 6 to 12 carbon atoms such as benzyl, phenethyl, naphthylmethyl, and naphthylethyl groups. Can be mentioned.
  • Examples of the n-valent chain hydrocarbon group having 1 to 30 carbon atoms represented by R 6 include groups exemplified as the chain hydrocarbon group having 1 to 30 carbon atoms represented by R 4 and R 5. And a group obtained by removing (n-1) hydrogen atoms from the same group.
  • Examples of the alicyclic hydrocarbon group having 3 to 30 carbon atoms represented by R 6 include the same groups as those exemplified as the cyclic hydrocarbon group having 3 to 30 carbon atoms represented by R 4 and R 5. And a group obtained by removing (n-1) hydrogen atoms from the group.
  • Examples of the aromatic hydrocarbon group having 6 to 14 carbon atoms represented by R 6 are the same as those exemplified as the aromatic hydrocarbon group having 6 to 14 carbon atoms represented by R 4 and R 5 . And a group obtained by removing (n-1) hydrogen atoms from the group.
  • the group formed by combining two or more of these groups represented by R 6 is the same as the group exemplified as a group formed by combining two or more of these groups represented by R 4 and R 5 , for example. And a group obtained by removing (n-1) hydrogen atoms from the group.
  • the groups represented by R 4 to R 6 may be substituted.
  • the substituent include a methyl group, an ethyl group, a propyl group, an n-butyl group, a t-butyl group, a hydroxyl group, a carboxy group, a halogen atom, and an alkoxy group.
  • the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom.
  • alkoxy group a methoxy group, an ethoxy group, a propoxy group, a butoxy group etc. are mentioned, for example.
  • Examples of the compound represented by the above formula (6) include (cyclo) alkylamine compounds, nitrogen-containing heterocyclic compounds, amide group-containing compounds, urea compounds and the like.
  • Examples of (cyclo) alkylamine compounds include compounds having one nitrogen atom, compounds having two nitrogen atoms, compounds having three or more nitrogen atoms, and the like.
  • Examples of (cyclo) alkylamine compounds having one nitrogen atom include mono (cyclo) alkylamines such as n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, 1-aminodecane, cyclohexylamine and the like.
  • Examples of the (cyclo) alkylamine compound having two nitrogen atoms include ethylenediamine, tetramethylethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenyl ether, and 4,4 ′.
  • Examples of the (cyclo) alkylamine compound having 3 or more nitrogen atoms include polymers such as polyethyleneimine, polyallylamine and 2-dimethylaminoethylacrylamide.
  • nitrogen-containing heterocyclic compounds include nitrogen-containing aromatic heterocyclic compounds and nitrogen-containing aliphatic heterocyclic compounds.
  • imidazoles such as imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, benzimidazole, 2-phenylbenzimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-methyl-1H-imidazole ; Pyridine, 2-methylpyridine, 4-methylpyridine, 2-ethylpyridine, 4-ethylpyridine, 2-phenylpyridine, 4-phenylpyridine, 2-methyl-4-phenylpyridine, nicotine, nicotinic acid, nicotinamide, Examples thereof include pyridines such as quinoline, 4-hydroxyquinoline, 8-oxyquinoline, acridine, and 2,2 ′: 6 ′, 2 ′′ -terpyridine.
  • nitrogen-containing aliphatic heterocyclic compound examples include piperazines such as piperazine and 1- (2-hydroxyethyl) piperazine; Pyrazine, pyrazole, pyridazine, quinosaline, purine, pyrrolidine, proline, piperidine, piperidine ethanol, 3-piperidino-1,2-propanediol, morpholine, 4-methylmorpholine, 1- (4-morpholinyl) ethanol, 4-acetylmorpholine , 3- (N-morpholino) -1,2-propanediol, 1,4-dimethylpiperazine, 1,4-diazabicyclo [2.2.2] octane, and the like.
  • piperazines such as piperazine and 1- (2-hydroxyethyl) piperazine
  • Examples of the amide group-containing compound include Nt-butoxycarbonyldi-n-octylamine, Nt-butoxycarbonyldi-n-nonylamine, Nt-butoxycarbonyldi-n-decylamine, and Nt-butoxy.
  • a butoxycarbonyl group-containing amino compound Formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, benzamide, pyrrolidone, N-methylpyrrolidone, N-acetyl-1-adamantylamine, isocyanuric And acid tris (2-hydroxyethyl).
  • urea compounds include urea, methylurea, 1,1-dimethylurea, 1,3-dimethylurea, 1,1,3,3-tetramethylurea, 1,3-diphenylurea, tri-n-butylthiourea, etc. Is mentioned.
  • (cyclo) alkylamine compounds and nitrogen-containing aliphatic heterocyclic compounds are preferable, and 1-aminodecane, di-n-octylamine, tri-n-octylamine, tetramethylethylenediamine, N, N-dibutylaniline, Proline is more preferred.
  • a nitrogen-containing compound containing a plurality (two or more) of nitrogen atoms is preferable.
  • an embodiment including three or more is preferable, and an embodiment including four or more is more preferable.
  • the compound represented by Formula (3) is mentioned at the point which the effect of this invention is more excellent.
  • A represents a single bond or an n-valent organic group.
  • n represents an integer of 2 or more.
  • Specific examples of A include a single bond, a group represented by the following formula (1A), a group represented by the following formula (1B),
  • R W represents an organic group, preferably an alkyl group, an alkylcarbonyl group, an alkylsulfonyl group. Further, in the above combination, heteroatoms are not linked to each other.
  • an aliphatic hydrocarbon group (an alkylene group, an alkenylene group, an alkynylene group, a cycloalkylene group), a group represented by the above formula (1B), and —NH— and —NR W — are preferable.
  • the alkylene group, alkenylene group, and alkynylene group preferably have 1 to 40 carbon atoms, more preferably 1 to 20 carbon atoms, and still more preferably 2 to 12 carbon atoms.
  • the alkylene group may be linear or branched and may have a substituent.
  • the cycloalkylene group preferably has 3 to 40 carbon atoms, more preferably 3 to 20 carbon atoms, and still more preferably 5 to 12 carbon atoms.
  • the cycloalkylene group may be monocyclic or polycyclic, and may have a substituent on the ring.
  • the aromatic group may be monocyclic or polycyclic, and includes non-benzene aromatic groups.
  • Monocyclic aromatic groups include benzene, pyrrole, furan, thiophene, and indole residues.
  • Polycyclic aromatic groups include naphthalene, anthracene, tetracene, and benzofuran. Examples include benzothiophene residues and the like.
  • the aromatic group may have a substituent.
  • the n-valent organic group may have a substituent, and the kind thereof is not particularly limited, but an alkyl group, an alkoxy group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkyloxycarbonyl group, an alkenyl group, an alkenyloxy group Alkenylcarbonyl group, alkenylcarbonyloxy group, alkenyloxycarbonyl group, alkynyl group, alkynyleneoxy group, alkynylenecarbonyl group, alkynylenecarbonyloxy group, alkynyleneoxycarbonyl group, aralkyl group, aralkyloxy group, aralkylcarbonyl group Aralkylcarbonyloxy group, aralkyloxycarbonyl group, hydroxyl group, amide group, carboxyl group, cyano group, fluorine atom and the like can be mentioned as examples.
  • B represents a single bond, an alkylene group, a cycloalkylene group, or an aromatic group, and the alkylene group, the cycloalkylene group, and the aromatic group may have a substituent.
  • the explanation of the alkylene group, cycloalkylene group, and aromatic group is the same as described above. However, A and B are not both single bonds.
  • R z each independently represents a hydrogen atom, an aliphatic hydrocarbon group that may contain a heteroatom, or an aromatic hydrocarbon group that may contain a heteroatom.
  • the aliphatic hydrocarbon group include an alkyl group, an alkenyl group, and an alkynyl group.
  • the number of carbon atoms contained in the aliphatic hydrocarbon group is not particularly limited, but 1 to 20 is preferable and 1 to 10 is more preferable in terms of more excellent effects of the present invention.
  • the aromatic hydrocarbon group include a phenyl group and a naphthyl group.
  • the aliphatic hydrocarbon group and the aromatic hydrocarbon group may contain a hetero atom.
  • heteroatom The definition and preferred embodiment of the heteroatom are the same as the definition of the heteroatom described in the above formula (1-1).
  • aliphatic hydrocarbon groups and aromatic hydrocarbon groups include substituents (eg, hydroxyl groups, cyano groups, amino groups, pyrrolidino groups, piperidino groups, morpholino groups, oxo groups and other functional groups, alkoxy groups, halogen atoms, Atoms) may be included.
  • n preferably represents an integer of 2 to 8, more preferably an integer of 3 to 8.
  • the compound represented by the said Formula (3) has three or more nitrogen atoms. In this embodiment, when n is 2, A contains at least one nitrogen atom. “A includes a nitrogen atom” includes, for example, at least one selected from the group consisting of the group represented by the above formula (1B), —NH—, and —NR W —.
  • the phosphorus compound is a compound containing -P ⁇ (phosphorus atom).
  • the phosphorus compound does not include an onium salt compound.
  • the phosphorus compound mainly forms an interaction between a phosphorus atom in the compound and the polar group.
  • the polar group is a carboxyl group, it interacts with the phosphorus atom in the phosphorus compound to form a salt.
  • the phosphorus compound only needs to include at least one phosphorus atom, and may include a plurality (two or more).
  • the molecular weight of the phosphorus compound is not particularly limited, but is preferably from 70 to 500, more preferably from 70 to 300, from the viewpoint that the effects of the present invention are more excellent.
  • a preferred embodiment of the phosphorus compound is selected from the group consisting of the compound represented by the following formula (4-1) and the compound represented by the formula (4-2) in that the effect of the present invention is more excellent.
  • the phosphorus compound is preferable.
  • R W are each independently an aliphatic contain a hetero atom hydrocarbon group, an aromatic may contain a hetero atom hydrocarbon group Or represents a group selected from the group consisting of a combination of two or more of these.
  • the aliphatic hydrocarbon group may be linear, branched or cyclic. Further, the number of carbon atoms contained in the aliphatic hydrocarbon group is not particularly limited, but is preferably 1 to 15 and more preferably 1 to 5 in terms of more excellent effects of the present invention. Examples of the aliphatic hydrocarbon group include an alkyl group, a cycloalkyl group, an alkene group, an alkyne group, or a group obtained by combining two or more of these.
  • the number of carbon atoms contained in the aromatic hydrocarbon group is not particularly limited, but 6 to 20 is preferable and 6 to 10 is more preferable in terms of more excellent effects of the present invention.
  • the aromatic hydrocarbon group include a phenyl group and a naphthyl group.
  • the aliphatic hydrocarbon group and the aromatic hydrocarbon group may contain a hetero atom.
  • the definition and preferred embodiment of the heteroatom are the same as the definition of the heteroatom described in the above formula (1-1).
  • the heteroatom preferably includes an oxygen atom, and is preferably included in the form of —O—.
  • L W represents a divalent linking group.
  • a substituted or unsubstituted divalent aliphatic hydrocarbon group preferably having 1 to 8 carbon atoms, for example, an alkylene group such as a methylene group, an ethylene group, or a propylene group
  • a divalent aromatic hydrocarbon group preferably having 6 to 12 carbon atoms, such as an arylene group
  • Examples include —CO—, —NH—, —COO—, —CONH—, or a group in which two or more of these are combined (for example, an alkyleneoxy group, an alkyleneoxycarbonyl group, an alkylenecarbonyloxy group, and the like).
  • a divalent aliphatic hydrocarbon group or a divalent aromatic hydrocarbon group is preferable in that the effect of the present invention is more
  • the compound (A) may be in the form of a low molecular compound or a polymer compound, but from the viewpoint of performing multipoint interaction with a polar group, the compound (A) is in the form of a polymer compound. Preferably there is.
  • the onium salt compound, the nitrogen-containing compound, and the phosphorus compound the form of the polymer compound will be described in detail.
  • the polymer compound includes a polymer having an onium salt.
  • the polymer having an onium salt intends a polymer having an onium salt structure in a side chain or main chain.
  • a polymer having a repeating unit having an onium salt structure is preferable.
  • the definition of the onium salt structure is as described above, and the definitions of the cation and the anion are also synonymous.
  • a preferred embodiment of the polymer having an onium salt includes a polymer having a repeating unit represented by the formula (5-1) in that the effect of the present invention is more excellent.
  • R p represents a hydrogen atom or an alkyl group.
  • the number of carbon atoms contained in the alkyl group is not particularly limited, but is preferably 1 to 20 and more preferably 1 to 10 in terms of more excellent effects of the present invention.
  • L p represents a divalent linking group.
  • the definition of the divalent linking group represented by L p is the same as the definition of L represented by the above formula (1-2).
  • L p is an alkylene group, an arylene group, —COO—, or a group in which two or more of these are combined (—arylene group—alkylene group—, —COO—) in that the effect of the present invention is more excellent.
  • Alkylene group- and the like are preferable, and an alkylene group is more preferable.
  • a p represents a group having an onium salt structure, specifically, by removing one hydrogen atom from an onium salt represented by any one of formulas (1-1) and (1-2) remaining It is preferable to represent a group.
  • the residue refers to a group having a structure in which one hydrogen atom is extracted from any position in the structural formula showing an onium salt and can be bonded to L p .
  • one of the hydrogen atoms in R is withdrawn and becomes a group having a structure capable of binding to the above L p .
  • the definitions of the groups in formula (1-1) and formula (1-2) are as described above.
  • the content of the repeating unit represented by the above formula (5-1) in the polymer is not particularly limited, but is 30 to 100 mol% with respect to all the repeating units in the polymer in that the effect of the present invention is more excellent. Is preferable, and 50 to 100 mol% is more preferable.
  • the weight average molecular weight of the polymer is not particularly limited, but is preferably from 1000 to 30000, more preferably from 1000 to 10,000, from the viewpoint that the effect of the present invention is more excellent.
  • the weight average molecular weight and dispersity (weight average molecular weight / number average molecular weight) of the above polymer are defined as polystyrene converted values by GPC measurement.
  • HLC-8120 manufactured by Tosoh Corp.
  • TSK gel Multipore HXL-M manufactured by Tosoh Corp., 7.8 mm ID ⁇ 30.0 cm
  • a preferred embodiment of the repeating unit represented by the formula (5-1) includes a repeating unit represented by the formula (5-2).
  • repeating unit represented by the formula (5-2) include repeating units represented by the formulas (5-3) to (5-5).
  • R the definitions of R, R p , and X ⁇ are as described above.
  • R, R p , and X ⁇ are as described above.
  • A represents —O—, —NH—, or —NR—.
  • the definition of R is the same as the definition of R in the above formula (1-1).
  • B represents an alkylene group.
  • R, R p , and X ⁇ are as described above.
  • the polymer compound is preferably a polymer having an amino group in that the effect of the present invention is more excellent.
  • the “amino group” is a concept including a primary amino group, a secondary amino group, and a tertiary amino group.
  • the secondary amino group also includes cyclic secondary amino groups such as pyrrolidino group, piperidino group, piperazino group, hexahydrotriazino group and the like.
  • the amino group may be contained in either the main chain or the side chain of the polymer. Specific examples of the side chain when the amino group is contained in a part of the side chain are shown below.
  • * represents the connection part with a polymer and / or an oligomer residue.
  • polymer having an amino group examples include polyallylamine, polyethyleneimine, polyvinylpyridine, polyvinylimidazole, polypyrimidine, polytriazole, polyquinoline, polyindole, polypurine, polyvinylpyrrolidone, polybenzimidazole and the like.
  • a preferred embodiment of the polymer having an amino group includes a polymer having a repeating unit represented by the formula (2).
  • R 1 represents a hydrogen atom or an alkyl group.
  • the number of carbon atoms contained in the alkyl group is not particularly limited, but is preferably 1 to 4 and more preferably 1 to 2 in terms of more excellent effects of the present invention.
  • R 2 and R 3 are each independently a hydrogen atom, an alkyl group that may contain a hetero atom, a cycloalkyl group that may contain a hetero atom, or an aromatic group that may contain a hetero atom.
  • the number of carbon atoms contained in the alkyl group and cycloalkyl group is not particularly limited, but is preferably 1 to 20, and more preferably 1 to 10.
  • Examples of the aromatic group include aromatic hydrocarbons and aromatic heterocyclic groups.
  • the alkyl group, cycloalkyl group and aromatic group may contain a hetero atom.
  • the definition and preferred embodiment of the heteroatom are the same as the definition of the heteroatom described in the above formula (1-1).
  • the alkyl group, cycloalkyl group, and aromatic group include substituents (eg, hydroxyl group, cyano group, amino group, pyrrolidino group, piperidino group, morpholino group, oxo group functional group, alkoxy group, halogen Atoms) may be included.
  • L a represents a divalent linking group.
  • Definition of the divalent linking group represented by L a is the same definition of L represented by the aforementioned formula (1-2).
  • L a is an alkylene group, an arylene group, —COO—, or a group combining two or more of these (—arylene group—alkylene group—, —COO—).
  • Alkylene group- and the like are preferable, and an alkylene group is more preferable.
  • substituent group e.g., hydroxyl, etc.
  • the content of the repeating unit represented by the above formula (2) in the polymer is not particularly limited, but is preferably 40 to 100 mol% with respect to all the repeating units in the polymer in terms of more excellent effects of the present invention. 70 to 100 mol% is more preferable.
  • other repeating units other than the repeating unit represented by Formula (2) may be contained in the polymer.
  • the weight average molecular weight of the polymer having an amino group is not particularly limited, but is preferably from 1000 to 30000, more preferably from 1000 to 10,000, from the viewpoint that the effect of the present invention is more excellent.
  • the compound (A) is not particularly limited as long as it interacts with a polar group, but is preferably a basic compound.
  • the basic compound is a repeating unit corresponding to a polar group, for example, a —COOH site, more specifically a methacrylic acid structure, contained in the resin in the actinic ray-sensitive or radiation-sensitive resin composition.
  • a compound that forms a salt by an acid-base interaction and specific examples include the nitrogen-containing compounds described above.
  • a surface treating agent is not specifically limited as long as it contains a compound (A), It is preferable to contain resin which has a repeating unit which has a basic functional group as a basic compound.
  • the basic compound may have at least one selected from the group consisting of a tertiary amino group, a quaternary ammonio group, and a heteroaryl group having a nitrogen atom as a ring member, which may have a substituent. It is preferable to have.
  • the compound (A) is preferably soluble in the developer containing the organic solvent in the step (5A) or (5B), and examples thereof include nonionic low molecular weight compounds and resins.
  • Preferable examples include triethylamine, trioctylamine, pyridine, N, N, N ′, N′-tetramethylethylenediamine, poly (dimethylaminoethyl (meth) acrylate) and the like.
  • the solvent is an unexposed coating film of the actinic ray-sensitive or radiation-sensitive film. It is particularly preferable to use a solvent having a film dissolution rate at 23 ° C. of 0.1 nm / s or less when in contact with.
  • an alcohol solvent or an ether solvent is preferable.
  • an alkyl group having 3 or more carbon atoms preferably having 5 to 10 carbon atoms
  • a cycloalkyl group preferably having 5 to 10 carbon atoms
  • an aralkyl group preferably having 7 to 10 carbon atoms are preferable).
  • the film dissolution rate represents the amount of decrease in film thickness per unit time when the solution is brought into contact with the actinic ray-sensitive or radiation-sensitive film.
  • the film dissolution rate is measured with respect to the developer at room temperature (23 ° C.) measured using a QCM (quartz crystal microbalance) sensor after forming an actinic ray-sensitive or radiation-sensitive film on the substrate. It is an average dissolution rate (thickness reduction rate) when the membrane is immersed for 1000 seconds.
  • the composition of the present invention (hereinafter also referred to as a first actinic ray-sensitive or radiation-sensitive resin composition) contains a resin that decomposes by the action of an acid to generate a polar group.
  • the composition of the present invention may further contain at least one of a compound capable of generating an acid upon irradiation with actinic rays or radiation, a hydrophobic resin, a basic compound, and a surfactant.
  • a resin that decomposes by the action of an acid to generate a polar group (hereinafter also referred to as “resin (A)”) is a resin that changes its polarity by the action of an acid, and has a solubility in an organic solvent developer by the action of an acid. Is a resin whose solubility in an alkaline developer is increased.
  • Resin (A) is a group (hereinafter also referred to as “acid-decomposable group”) that decomposes by the action of an acid to generate a polar group in the main chain or side chain of the resin, or both of the main chain and side chain. It is preferable to have.
  • the acid-decomposable group preferably has a structure protected by a group capable of decomposing and leaving a polar group by the action of an acid.
  • the polar group is not particularly limited as long as it is a group that is hardly soluble or insoluble in a developer containing an organic solvent, but a phenolic hydroxyl group, a carboxyl group, a fluorinated alcohol group (preferably a hexafluoroisopropanol group), a sulfonic acid group.
  • the alcoholic hydroxyl group is a hydroxyl group bonded to a hydrocarbon group and means a hydroxyl group other than a hydroxyl group directly bonded on an aromatic ring (phenolic hydroxyl group).
  • An aliphatic alcohol substituted with a functional group for example, a fluorinated alcohol group (such as a hexafluoroisopropanol group)) is excluded.
  • the alcoholic hydroxyl group is preferably a hydroxyl group having a pKa of 12 or more and 20 or less.
  • Preferred polar groups include carboxyl groups, fluorinated alcohol groups (preferably hexafluoroisopropanol groups), and sulfonic acid groups.
  • a preferable group as the acid-decomposable group is a group in which the hydrogen atom of these groups is substituted with a group capable of leaving with an acid.
  • Examples of the group leaving with an acid include —C (R 36 ) (R 37 ) (R 38 ), —C (R 36 ) (R 37 ) (OR 39 ), —C (R 01 ) (R 02 ). ) (OR 39 ) and the like.
  • R 36 to R 39 each independently represents an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group or an alkenyl group.
  • R 36 and R 37 may be bonded to each other to form a ring.
  • R 01 and R 02 each independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group or an alkenyl group.
  • the alkyl group of R 36 to R 39 , R 01 and R 02 is preferably an alkyl group having 1 to 8 carbon atoms.
  • the cycloalkyl group of R 36 to R 39 , R 01 and R 02 may be monocyclic or polycyclic.
  • the aryl group of R 36 to R 39 , R 01 and R 02 is preferably an aryl group having 6 to 10 carbon atoms.
  • the aralkyl group of R 36 to R 39 , R 01 and R 02 is preferably an aralkyl group having 7 to 12 carbon atoms.
  • the alkenyl group of R 36 to R 39 , R 01 and R 02 is preferably an alkenyl group having 2 to 8 carbon atoms.
  • the ring formed by combining R 36 and R 37 is preferably a cycloalkyl group (monocyclic or polycyclic).
  • the cycloalkyl group is preferably a monocyclic cycloalkyl group such as a cyclopentyl group or a cyclohexyl group, or a polycyclic cycloalkyl group such as a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group or an adamantyl group.
  • a monocyclic cycloalkyl group having 5 to 6 carbon atoms is more preferable, and a monocyclic cycloalkyl group having 5 carbon atoms is particularly preferable.
  • the acid-decomposable group is preferably a cumyl ester group, an enol ester group, an acetal ester group, a tertiary alkyl ester group or the like. More preferably, it is a tertiary alkyl ester group.
  • the resin (A) preferably has a repeating unit having an acid-decomposable group.
  • the resin (A) contains, as a repeating unit having an acid-decomposable group, a repeating unit (AI) that is decomposed by an acid to generate a carboxyl group (hereinafter also referred to as “repeating unit (AI)”). It is preferable to have a repeating unit represented by the following general formula (aI) or (aI ′).
  • Xa 1 represents a hydrogen atom, an alkyl group, a cyano group, or a halogen atom.
  • T represents a single bond or a divalent linking group.
  • Rx 1 to Rx 3 each independently represents an alkyl group or a cycloalkyl group. Two of Rx 1 to Rx 3 may combine to form a ring structure. The ring structure may contain a hetero atom such as an oxygen atom in the ring.
  • the divalent linking group for T include an alkylene group, —COO—Rt— group, —O—Rt— group, phenylene group and the like. In the formula, Rt represents an alkylene group or a cycloalkylene group.
  • T in the general formula (aI) is preferably a single bond or a —COO—Rt— group, more preferably a —COO—Rt— group, from the viewpoint of insolubilization of the resist in an organic solvent developer.
  • Rt is preferably an alkylene group having 1 to 5 carbon atoms, more preferably a —CH 2 — group, — (CH 2 ) 2 — group, or — (CH 2 ) 3 — group.
  • T in the general formula (aI ′) is preferably a single bond.
  • the alkyl group of Xa1 may have a substituent, and examples of the substituent include a hydroxyl group and a halogen atom (preferably a fluorine atom).
  • the alkyl group for X a1 preferably has 1 to 4 carbon atoms, and is preferably a methyl group.
  • X a1 is preferably a hydrogen atom or a methyl group.
  • the alkyl group for Rx 1 , Rx 2 and Rx 3 may be linear or branched.
  • Examples of the cycloalkyl group of Rx 1 , Rx 2 and Rx 3 include polycyclic rings such as a monocyclic cycloalkyl group such as a cyclopentyl group and a cyclohexyl group, a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group and an adamantyl group. Are preferred.
  • the ring structure formed by combining two of Rx 1 , Rx 2 and Rx 3 includes a monocyclic cycloalkane ring such as cyclopentyl ring and cyclohexyl ring, norbornane ring, tetracyclodecane ring, tetracyclododecane ring, adamantane ring
  • a polycyclic cycloalkyl group such as is preferable.
  • a monocyclic cycloalkane ring having 5 or 6 carbon atoms is particularly preferable.
  • Rx 1 , Rx 2 and Rx 3 are preferably each independently an alkyl group, more preferably a linear or branched alkyl group having 1 to 4 carbon atoms.
  • Each of the above groups may have a substituent, and examples of the substituent include an alkyl group (1 to 4 carbon atoms), a cycloalkyl group (3 to 8 carbon atoms), a halogen atom, an alkoxy group (carbon 1 to 4), a carboxyl group, an alkoxycarbonyl group (2 to 6 carbon atoms), and the like, and 8 or less carbon atoms are preferable.
  • a substituent having no hetero atom such as an oxygen atom, a nitrogen atom, or a sulfur atom is more preferable (for example, it is more preferable that it is not an alkyl group substituted with a hydroxyl group, etc.), a group consisting of only a hydrogen atom and a carbon atom is more preferable, and a linear or branched alkyl group or a cycloalkyl group is particularly preferable.
  • Specific examples of the repeating unit represented by the general formula (aI) or (aI ′) are shown below, but the present invention is not limited to these specific examples.
  • Rx represents a hydrogen atom, CH 3 , CF 3 , or CH 2 OH.
  • Rxa and Rxb each represents an alkyl group having 1 to 4 carbon atoms.
  • Xa 1 represents a hydrogen atom, CH 3 , CF 3 , or CH 2 OH.
  • Z represents a substituent, and when a plurality of Zs are present, the plurality of Zs may be the same as or different from each other.
  • p represents 0 or a positive integer.
  • Specific examples and preferred examples of Z are the same as specific examples and preferred examples of the substituent that each group such as Rx 1 to Rx 3 may have.
  • Xa represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom.
  • the resin (A) preferably contains, as a repeating unit having an acid-decomposable group, a repeating unit having a total of 4 to 9 carbon atoms at the site decomposed by the acid. More preferably, in the above general formula (aI), the —C (Rx 1 ) (Rx 2 ) (Rx 3 ) moiety has 4 to 9 carbon atoms. More preferably, in the general formula (aI), all of Rx 1 , Rx 2 and Rx 3 are methyl groups or ethyl groups, or an aspect represented by the following general formula (aII).
  • R 31 represents a hydrogen atom or an alkyl group.
  • R 32 represents a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group or a sec-butyl group.
  • R 33 represents an atomic group necessary for forming a monocyclic alicyclic hydrocarbon structure together with the carbon atom to which R 32 is bonded. In the alicyclic hydrocarbon structure, a part of carbon atoms constituting the ring may be substituted with a hetero atom or a group having a hetero atom.
  • the total number of carbon atoms of R 32 and R 33 is 8 or less.
  • the alkyl group for R 31 may have a substituent, and examples of the substituent include a fluorine atom and a hydroxyl group.
  • R 31 preferably represents a hydrogen atom, a methyl group, a trifluoromethyl group or a hydroxymethyl group.
  • R 32 is preferably a methyl group, an ethyl group, an n-propyl group, or an isopropyl group, and more preferably a methyl group or an ethyl group.
  • the monocyclic alicyclic hydrocarbon structure formed by R 33 together with the carbon atom is preferably a 3- to 8-membered ring, more preferably a 5- or 6-membered ring.
  • examples of the hetero atom that can form the ring include an oxygen atom and a sulfur atom.
  • examples of the group having a hetero atom include a carbonyl group and the like. Can be mentioned. However, the group having a hetero atom is preferably not an ester group (ester bond).
  • the monocyclic alicyclic hydrocarbon structure formed by R 33 together with the carbon atom is preferably formed only from the carbon atom and the hydrogen atom.
  • the resin (A) is a repeating unit having an acid-decomposable group, the repeating unit having an acid-decomposing site containing 10 to 20 carbon atoms and a polycyclic structure.
  • Unit (aIII) may be included.
  • Rx 1 , Rx 2 and Rx in the above general formula (aI) can be used as the repeating unit (aIII) having 10 to 20 carbon atoms in the acid decomposition site and containing a polycyclic structure in the acid decomposition site.
  • one of 3 is a group having an adamantane skeleton and the remaining two are linear or branched alkyl groups, or in General Formula (aI)
  • two of Rx 1 , Rx 2 and Rx 3 are bonded to each other.
  • an embodiment in which an adamantane structure is formed and the remaining one is a linear or branched alkyl group is preferable.
  • the resin (A) may have a repeating unit that is decomposed by the action of an acid to generate an alcoholic hydroxyl group, as represented below, as a repeating unit having an acid-decomposable group.
  • Xa 1 represents a hydrogen atom, CH 3 , CF 3 , or CH 2 OH.
  • One type of repeating unit having an acid-decomposable group that can be contained in the resin (A) may be used, or two or more types may be used in combination.
  • the resin (A) contains a repeating unit having two or more kinds of acid-decomposable groups, for example, in the above general formula (aI), all of Rx 1 , Rx 2 and Rx 3 are methyl groups or ethyl groups
  • the embodiment or the repeating unit of the embodiment represented by the general formula (aII) and the repeating unit having 10 to 20 carbon atoms in the acid decomposition site and containing a polycyclic structure in the acid decomposition site A combination with a repeating unit represented by aIII) is preferred.
  • the resin (A) contains a repeating unit having two or more kinds of acid-decomposable groups
  • the two preferred combinations are shown below, but are not limited thereto.
  • the total amount of repeating units having an acid-decomposable group is preferably from 30 to 80 mol%, more preferably from 40 to 75 mol%, particularly preferably from 45 to 70 mol%, based on all repeating units constituting the resin (A). 50 to 70 mol% is most preferable.
  • the content of the repeating unit represented by the general formula (aI) is preferably from 30 to 80 mol%, more preferably from 40 to 75 mol%, more preferably from 45 to 70 mol% based on all repeating units constituting the resin (A). % Is particularly preferable, and 50 to 70 mol% is most preferable. Further, the ratio of the repeating unit (aIII) to all repeating units having an acid-decomposable group is preferably 3 to 50 mol%, more preferably 5 to 40 mol%, and most preferably 5 to 30 mol%.
  • Resin (A) may contain a repeating unit having a lactone structure or a sultone structure.
  • Any lactone structure or sultone structure can be used as long as it has a lactone structure or sultone structure, but a 5- to 7-membered ring lactone structure or a 5- to 7-membered ring sultone structure is preferable.
  • Other ring structures are condensed in a form that forms a bicyclo structure or spiro structure in a membered lactone structure, or other rings that form a bicyclo structure or a spiro structure in a 5- to 7-membered ring sultone structure Those having a condensed ring structure are more preferable.
  • Preferred lactone structures are (LC1-1), (LC1-4), (LC1-5), (LC1-6), (LC1-13), (LC1-14), (LC1-17), especially A preferred lactone structure is (LC1-4).
  • the lactone structure portion or the sultone structure portion may or may not have a substituent (Rb 2 ).
  • Preferred substituents (Rb 2 ) include alkyl groups having 1 to 8 carbon atoms, cycloalkyl groups having 4 to 7 carbon atoms, alkoxy groups having 1 to 8 carbon atoms, alkoxycarbonyl groups having 2 to 8 carbon atoms, and carboxyl groups. , Halogen atom, hydroxyl group, cyano group, acid-decomposable group and the like. More preferred are an alkyl group having 1 to 4 carbon atoms, a cyano group, and an acid-decomposable group.
  • n 2 represents an integer of 0 to 4. When n 2 is 2 or more, the plurality of substituents (Rb 2 ) may be the same or different. A plurality of substituents (Rb 2 ) may be bonded to form a ring.
  • the repeating unit having a lactone structure or a sultone structure usually has an optical isomer, but any optical isomer may be used.
  • One optical isomer may be used alone, or a plurality of optical isomers may be mixed and used.
  • the optical purity (ee) thereof is preferably 90% or more, more preferably 95% or more.
  • the repeating unit having a lactone structure or a sultone structure is preferably a repeating unit represented by the following general formula (III).
  • A represents an ester bond (a group represented by —COO—) or an amide bond (a group represented by —CONH—).
  • R 0 represents an alkylene group, a cycloalkylene group, or a combination thereof independently when there are a plurality of R 0 .
  • Z is independently a single bond, an ether bond, an ester bond, an amide bond, or a urethane bond when there are a plurality of Z.
  • each R independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, or an aryl group.
  • R 8 represents a monovalent organic group having a lactone structure or a sultone structure.
  • n is the number of repetitions of the structure represented by —R 0 —Z—, and represents an integer of 0 to 5, preferably 0 or 1, and more preferably 0. When n is 0, —R 0 —Z— does not exist and becomes a single bond.
  • R 7 represents a hydrogen atom, a halogen atom or an alkyl group.
  • the alkylene group and cycloalkylene group represented by R 0 may have a substituent.
  • Z is preferably an ether bond or an ester bond, and particularly preferably an ester bond.
  • the alkyl group for R 7 is preferably an alkyl group having 1 to 4 carbon atoms, and particularly preferably a methyl group.
  • the alkylene group of R 0 , the cycloalkylene group, and the alkyl group in R 7 may each be substituted.
  • the substituent include a halogen atom such as a fluorine atom, a chlorine atom and a bromine atom, a mercapto group, a hydroxyl group, An alkoxy group is mentioned.
  • R 7 is preferably a hydrogen atom, a methyl group, a trifluoromethyl group, or a hydroxymethyl group.
  • a preferable chain alkylene group for R 0 is a chain alkylene having 1 to 10 carbon atoms, and examples thereof include a methylene group, an ethylene group, and a propylene group.
  • a preferred cycloalkylene group is a cycloalkylene group having 3 to 20 carbon atoms, and examples thereof include a cyclohexylene group, a cyclopentylene group, a norbornylene group, and an adamantylene group.
  • a chain alkylene group is more preferable, and a methylene group is particularly preferable.
  • the monovalent organic group having a lactone structure or a sultone structure represented by R 8 is not limited as long as it has a lactone structure or a sultone structure. Specific examples include those represented by the general formulas (LC1-1) to ( LC1-21) and a lactone structure or a sultone structure represented by any of (SL1-1) to (SL1-3), among which the structure represented by (LC1-4) is particularly preferable. Further, n 2 in (LC1-1) to (LC1-21) is more preferably 2 or less.
  • R 8 is preferably a monovalent organic group having an unsubstituted lactone structure or sultone structure, or a monovalent organic group having a lactone structure or sultone structure having a methyl group, a cyano group or an alkoxycarbonyl group as a substituent.
  • a monovalent organic group having a lactone structure (cyanolactone) having a cyano group as a substituent is more preferable.
  • repeating unit having a group having a lactone structure or a sultone structure are shown below, but the present invention is not limited thereto.
  • the content of the repeating unit having a lactone structure or a sultone structure is 5 to 60 mol% with respect to all the repeating units in the resin (A). It is preferably 5 to 55 mol%, more preferably 10 to 50 mol%.
  • the resin (A) may have a repeating unit having a cyclic carbonate structure.
  • the repeating unit having a cyclic carbonate structure is preferably a repeating unit represented by the following general formula (A-1).
  • R A 1 represents a hydrogen atom or an alkyl group.
  • R A 2 each independently represents a substituent when n is 2 or more.
  • A represents a single bond or a divalent linking group.
  • Z represents an atomic group that forms a monocyclic or polycyclic structure together with a group represented by —O—C ( ⁇ O) —O— in the formula.
  • n represents an integer of 0 or more.
  • the alkyl group represented by R A 1 may have a substituent such as a fluorine atom.
  • R A 1 preferably represents a hydrogen atom, a methyl group or a trifluoromethyl group, and more preferably represents a methyl group.
  • the substituent represented by R A 2 is, for example, an alkyl group, a cycloalkyl group, a hydroxyl group, an alkoxy group, an amino group, or an alkoxycarbonylamino group.
  • alkyl groups having 1 to 5 carbon atoms such as linear alkyl groups having 1 to 5 carbon atoms; branched alkyl groups having 3 to 5 carbon atoms.
  • the alkyl group may have a substituent such as a hydroxyl group.
  • N is an integer of 0 or more representing the number of substituents.
  • n is, for example, preferably 0 to 4, more preferably 0.
  • Examples of the divalent linking group represented by A include an alkylene group, a cycloalkylene group, an ester bond, an amide bond, an ether bond, a urethane bond, a urea bond, or a combination thereof.
  • an alkylene group an alkylene group having 1 to 10 carbon atoms is preferable, and an alkylene group having 1 to 5 carbon atoms is more preferable.
  • A is preferably a single bond or an alkylene group.
  • Examples of the polycycle including —O—C ( ⁇ O) —O— represented by Z include, for example, a cyclic carbonate represented by the following general formula (a) together with one or more other ring structures: Examples include a structure forming a condensed ring and a structure forming a spiro ring.
  • the “other ring structure” that can form a condensed ring or a spiro ring may be an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a heterocyclic ring. .
  • one type of repeating units represented by the general formula (A-1) may be contained alone, or two or more types may be contained.
  • the content of the repeating unit having a cyclic carbonate structure (preferably, the repeating unit represented by the general formula (A-1)) is based on the total repeating units constituting the resin (A). It is preferably 3 to 80 mol%, more preferably 3 to 60 mol%, particularly preferably 3 to 30 mol%, and most preferably 10 to 15 mol%. By setting it as such a content rate, the developability as a resist, low defect property, low LWR, low PEB temperature dependence, a profile, etc. can be improved.
  • repeating unit represented by formula (A-1) Specific examples of the repeating unit represented by formula (A-1) are shown below, but the present invention is not limited thereto.
  • R A 1 in the following specific examples are the same meaning as R A 1 in the general formula (A-1).
  • the resin (A) may have a repeating unit having a hydroxyl group, a cyano group, or a carbonyl group. This improves the substrate adhesion and developer compatibility.
  • the repeating unit having a hydroxyl group, a cyano group or a carbonyl group is preferably a repeating unit having an alicyclic hydrocarbon structure substituted with a hydroxyl group, a cyano group or a carbonyl group, and preferably has no acid-decomposable group. .
  • the repeating unit having an alicyclic hydrocarbon structure substituted with a hydroxyl group, a cyano group or a carbonyl group is preferably different from the repeating unit having an acid-decomposable group (that is, a repeating unit which is stable with respect to an acid).
  • the alicyclic hydrocarbon structure in the alicyclic hydrocarbon structure substituted with a hydroxyl group, a cyano group or a carbonyl group is preferably an adamantyl group, a diadamantyl group or a norbornane group.
  • a repeating unit represented by any one of the following general formulas (AIIa) to (AIIe) can be mentioned.
  • R X represents a hydrogen atom, a methyl group, a hydroxymethyl group, or a trifluoromethyl group.
  • Ab represents a single bond or a divalent linking group.
  • Examples of the divalent linking group represented by Ab include an alkylene group, a cycloalkylene group, an ester bond, an amide bond, an ether bond, a urethane bond, a urea bond, or a combination thereof.
  • the alkylene group is preferably an alkylene group having 1 to 10 carbon atoms, more preferably an alkylene group having 1 to 5 carbon atoms, and examples thereof include a methylene group, an ethylene group, and a propylene group.
  • Ab is preferably a single bond or an alkylene group.
  • Rp represents a hydrogen atom, a hydroxyl group, or a hydroxyalkyl group.
  • a plurality of Rp may be the same or different, but at least one of the plurality of Rp represents a hydroxyl group or a hydroxyalkyl group.
  • the resin (A) may or may not contain a repeating unit having a hydroxyl group, a cyano group or a carbonyl group, but the resin (A) contains a repeating unit having a hydroxyl group, a cyano group or a carbonyl group.
  • the content of the repeating unit having a hydroxyl group, a cyano group, or a carbonyl group is preferably 1 to 40 mol%, more preferably 3 to 30 mol%, further more preferably based on all repeating units in the resin (A). Preferably, it is 5 to 25 mol%.
  • repeating unit having a hydroxyl group or a cyano group are listed below, but the present invention is not limited thereto.
  • Resin (A) may have a repeating unit having an acid group.
  • the acid group include a carboxyl group, a sulfonamide group, a sulfonylimide group, a bissulfonylimide group, a naphthol structure, and an aliphatic alcohol group (for example, hexafluoroisopropanol group) in which the ⁇ -position is substituted with an electron withdrawing group. It is more preferable to have a repeating unit having a carboxyl group. By containing the repeating unit having an acid group, the resolution in the contact hole application is increased.
  • the repeating unit having an acid group includes a repeating unit in which an acid group is directly bonded to the main chain of the resin, such as a repeating unit of acrylic acid or methacrylic acid, or an acid group in the main chain of the resin through a linking group.
  • a repeating unit that is bonded, or a polymerization initiator or chain transfer agent having an acid group is introduced at the end of the polymer chain during polymerization, and the linking group is a monocyclic or polycyclic cyclic hydrocarbon structure. You may have. Particularly preferred are repeating units of acrylic acid or methacrylic acid.
  • the resin (A) may or may not contain a repeating unit having an acid group, but when it is contained, the content of the repeating unit having an acid group is relative to all the repeating units in the resin (A). It is preferably 25 mol% or less, and more preferably 20 mol% or less. When resin (A) contains the repeating unit which has an acid group, content of the repeating unit which has an acid group in resin (A) is 1 mol% or more normally. Specific examples of the repeating unit having an acid group are shown below, but the present invention is not limited thereto.
  • Rx represents H, CH 3 , CH 2 OH, or CF 3 .
  • the resin (A) in the present invention can further have a repeating unit that has an alicyclic hydrocarbon structure that does not have a polar group (for example, the acid group, hydroxyl group, cyano group) and does not exhibit acid decomposability. .
  • a repeating unit that has an alicyclic hydrocarbon structure that does not have a polar group (for example, the acid group, hydroxyl group, cyano group) and does not exhibit acid decomposability.
  • a repeating unit include a repeating unit represented by the general formula (IV).
  • R 5 represents a hydrocarbon group having at least one cyclic structure and having no polar group.
  • Ra represents a hydrogen atom, an alkyl group or -CH 2 -O-Ra 2 group.
  • Ra 2 represents a hydrogen atom, an alkyl group, or an acyl group.
  • Ra is preferably a hydrogen atom, a methyl group, a hydroxymethyl group or a trifluoromethyl group, particularly preferably a hydrogen atom or a methyl group.
  • the cyclic structure possessed by R 5 includes a monocyclic hydrocarbon group and a polycyclic hydrocarbon group.
  • the monocyclic hydrocarbon group include cycloalkenyl having 3 to 12 carbon atoms such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and the like, and cycloalkyl groups having 3 to 12 carbon atoms and cyclohexenyl group.
  • a preferred monocyclic hydrocarbon group is a monocyclic hydrocarbon group having 3 to 7 carbon atoms, and more preferred examples include a cyclopentyl group and a cyclohexyl group.
  • the polycyclic hydrocarbon group includes a ring assembly hydrocarbon group and a bridged cyclic hydrocarbon group, and examples of the ring assembly hydrocarbon group include a bicyclohexyl group and a perhydronaphthalenyl group.
  • the bridged cyclic hydrocarbon ring for example, bicyclic such as pinane, bornane, norpinane, norbornane, bicyclooctane ring (bicyclo [2.2.2] octane ring, bicyclo [3.2.1] octane ring, etc.)
  • Hydrocarbon rings and tricyclic hydrocarbon rings such as homobredan, adamantane, tricyclo [5.2.1.0 2,6 ] decane, tricyclo [4.3.1.1 2,5 ] undecane ring, tetracyclo [ 4.4.0.1 2,5 .
  • the bridged cyclic hydrocarbon ring includes a condensed cyclic hydrocarbon ring such as perhydronaphthalene (decalin), perhydroanthracene, perhydrophenanthrene, perhydroacenaphthene, perhydrofluorene, perhydroindene, perhydroindene.
  • a condensed ring in which a plurality of 5- to 8-membered cycloalkane rings such as a phenalene ring are condensed is also included.
  • Preferred examples of the bridged cyclic hydrocarbon ring include a norbornyl group, an adamantyl group, a bicyclooctanyl group, a tricyclo [5,2,1,0 2,6 ] decanyl group, and the like. More preferable examples of the bridged cyclic hydrocarbon ring include a norbornyl group and an adamantyl group. These alicyclic hydrocarbon groups may have a substituent. Preferred examples of the substituent include a halogen atom, an alkyl group, a hydroxyl group substituted with a hydrogen atom, and an amino group substituted with a hydrogen atom. It is done.
  • the resin (A) has an alicyclic hydrocarbon structure having no polar group, and may or may not contain a repeating unit that does not exhibit acid decomposability.
  • the content is preferably 1 to 50 mol%, more preferably 5 to 50 mol%, still more preferably 5 to 30 mol%, based on all repeating units in the resin (A).
  • Ra represents H, CH 3 , CH 2 OH, or CF 3 .
  • the resin (A) is represented by a hydroxystyrene repeating unit. It is preferable to have a repeating unit having an aromatic ring.
  • Resin (A) may be in an embodiment in which a structure corresponding to an acid generator described later is supported. Specifically, as such an embodiment, a structure described in JP2011-248019A (particularly, a structure described in paragraphs 0164 to 0191, a structure included in the resin described in the example in paragraph 0555). Etc. Even if the resin (A) has a structure corresponding to the acid generator, the composition of the present invention further includes an acid generator not supported on the resin (A) (that is, a compound described later). (B)) may be included.
  • repeating unit having a structure corresponding to the acid generator examples include the following repeating units, but are not limited thereto.
  • the resin (A) used in the composition of the present invention includes, in addition to the above repeating structural units, dry etching resistance, standard developer suitability, substrate adhesion, resist profile, and actinic ray sensitive or radiation sensitive resin composition. It is possible to have various repeating structural units for the purpose of adjusting resolving power, heat resistance, sensitivity, and the like, which are general necessary characteristics. Examples of such repeating structural units include, but are not limited to, repeating structural units corresponding to the following monomers.
  • a monomer for example, a compound having one addition polymerizable unsaturated bond selected from acrylic acid esters, methacrylic acid esters, acrylamides, methacrylamides, allyl compounds, vinyl ethers, vinyl esters, etc. Etc.
  • any addition-polymerizable unsaturated compound that can be copolymerized with monomers corresponding to the above various repeating structural units may be copolymerized.
  • the molar ratio of each repeating structural unit is the dry etching resistance, standard developer suitability, substrate adhesion, resist profile of the actinic ray-sensitive or radiation-sensitive resin composition. Furthermore, it is appropriately set for adjusting the resolving power, heat resistance, sensitivity, etc., which are general required performances of the actinic ray-sensitive or radiation-sensitive resin composition.
  • the resin (A) used in the composition of the present invention has substantially no aromatic ring from the viewpoint of transparency to ArF light (specifically,
  • the ratio of the repeating unit having an aromatic group in the resin is preferably 5 mol% or less, more preferably 3 mol% or less, ideally 0 mol%, that is, no aromatic group).
  • the resin (A) preferably has a monocyclic or polycyclic alicyclic hydrocarbon structure.
  • the form of the resin (A) in the present invention may be any of random type, block type, comb type, and star type.
  • Resin (A) is compoundable by the radical, cation, or anion polymerization of the unsaturated monomer corresponding to each structure, for example. It is also possible to obtain the desired resin by conducting a polymer reaction after polymerization using an unsaturated monomer corresponding to the precursor of each structure.
  • the resin (A) does not contain a fluorine atom or a silicon atom from the viewpoint of compatibility with the hydrophobic resin (HR) ( Specifically, the ratio of the repeating unit having a fluorine atom or a silicon atom in the resin is preferably 5 mol% or less, more preferably 3 mol% or less, ideally 0 mol%.
  • the resin (A) used in the composition of the present invention is preferably one in which all of the repeating units are composed of (meth) acrylate-based repeating units.
  • all of the repeating units are methacrylate repeating units, all of the repeating units are acrylate repeating units, or all of the repeating units are methacrylate repeating units and acrylate repeating units.
  • the acrylate-based repeating unit is preferably 50 mol% or less of the total repeating units.
  • the resin (A) in the present invention can be synthesized according to a conventional method (for example, by a method commonly used in the field of polymer synthesis such as radical polymerization, living radical polymerization, anion polymerization, and cation polymerization).
  • a method commonly used in the field of polymer synthesis such as radical polymerization, living radical polymerization, anion polymerization, and cation polymerization.
  • a monomer polymerization method in which a monomer species and an initiator are dissolved in a solvent and the polymerization is performed by heating, and a solution of the monomer species and the initiator is dropped into the heating solvent over 1 to 10 hours.
  • the dropping polymerization method is added, and the dropping polymerization method is preferable.
  • reaction solvent examples include ethers such as tetrahydrofuran, 1,4-dioxane, diisopropyl ether, ketones such as methyl ethyl ketone and methyl isobutyl ketone, ester solvents such as ethyl acetate, amide solvents such as dimethylformamide and dimethylacetamide, Furthermore, the solvent which melt
  • the polymerization reaction is preferably performed in an inert gas atmosphere such as nitrogen or argon.
  • a polymerization initiator a commercially available radical initiator (azo initiator, peroxide, etc.) is used to initiate the polymerization.
  • azo initiator an azo initiator is preferable, and an azo initiator having an ester group, a cyano group, or a carboxyl group is preferable.
  • Preferred initiators include azobisisobutyronitrile, azobisdimethylvaleronitrile, dimethyl 2,2'-azobis (2-methylpropionate) and the like.
  • an initiator is added or added in portions, and after completion of the reaction, it is put into a solvent and a desired polymer is recovered by a method such as powder or solid recovery.
  • the concentration of the reaction is 5 to 50% by mass, preferably 10 to 30% by mass.
  • the reaction temperature is usually 10 ° C. to 150 ° C., preferably 30 ° C. to 120 ° C., more preferably 60 to 100 ° C.
  • the mixture After completion of the reaction, the mixture is allowed to cool to room temperature and purified. Purification can be accomplished by a liquid-liquid extraction method that removes residual monomers and oligomer components by combining water and an appropriate solvent, and a purification method in a solution state such as ultrafiltration that extracts and removes only those having a specific molecular weight or less.
  • a purification method Reprecipitation method that removes residual monomer by coagulating resin in poor solvent by dripping resin solution into poor solvent and purification in solid state such as washing filtered resin slurry with poor solvent
  • a normal method such as a method can be applied.
  • the resin is precipitated as a solid by contacting a solvent (poor solvent) in which the resin is hardly soluble or insoluble in a volume amount of 10 times or less, preferably 10 to 5 times that of the reaction solution.
  • the solvent (precipitation or reprecipitation solvent) used in the precipitation or reprecipitation operation from the polymer solution may be a poor solvent for the polymer, and may be a hydrocarbon, halogenated hydrocarbon, nitro, depending on the type of polymer.
  • a compound, ether, ketone, ester, carbonate, alcohol, carboxylic acid, water, a mixed solvent containing these solvents, and the like can be appropriately selected for use.
  • a precipitation or reprecipitation solvent a solvent containing at least an alcohol (particularly methanol or the like) or water is preferable.
  • the amount of the precipitation or reprecipitation solvent used can be appropriately selected in consideration of efficiency, yield, and the like, but generally, 100 to 10,000 parts by mass, preferably 200 to 2000 parts by mass with respect to 100 parts by mass of the polymer solution, More preferably, it is 300 to 1000 parts by mass.
  • the temperature at the time of precipitation or reprecipitation can be appropriately selected in consideration of efficiency and operability, but is usually about 0 to 50 ° C., preferably around room temperature (for example, about 20 to 35 ° C.).
  • the precipitation or reprecipitation operation can be performed by a known method such as a batch method or a continuous method using a conventional mixing vessel such as a stirring tank.
  • Precipitated or re-precipitated polymer is usually subjected to conventional solid-liquid separation such as filtration and centrifugation, and dried before use. Filtration is performed using a solvent-resistant filter medium, preferably under pressure. Drying is performed at a temperature of about 30 to 100 ° C., preferably about 30 to 50 ° C. under normal pressure or reduced pressure (preferably under reduced pressure).
  • the resin may be dissolved again in a solvent, and the resin may be contacted with a hardly soluble or insoluble solvent. That is, after completion of the radical polymerization reaction, a solvent in which the polymer is hardly soluble or insoluble is contacted to precipitate a resin (step a), the resin is separated from the solution (step b), and dissolved again in the solvent to obtain a resin solution A. (Step c), and then contact the resin solution A with a solvent in which the resin is hardly soluble or insoluble in a volume amount less than 10 times that of the resin solution A (preferably 5 times or less volume). This may be a method including precipitating a resin solid (step d) and separating the precipitated resin (step e).
  • the synthesized resin is dissolved in a solvent to form a solution.
  • a step of heating at about 30 ° C. to 90 ° C. for about 30 minutes to 4 hours may be added.
  • the weight average molecular weight of the resin (A) in the present invention is preferably from 6000 to 50000, more preferably from 8000 to 30000, and most preferably from 10000 to 25000, in terms of polystyrene by GPC method. By setting this molecular weight range, it can be expected that the solubility in an organic developer becomes an appropriate numerical value.
  • the degree of dispersion is usually 1.0 to 3.0, preferably 1.0 to 2.6, more preferably 1.0 to 2.0, and particularly preferably 1.4 to 2.0. Those in the range are used.
  • the smaller the molecular weight distribution the better the resolution and the resist shape, the smoother the sidewall of the resist pattern, and the better the roughness.
  • the blending ratio of the resin (A) in the entire composition is preferably 30 to 99% by mass, more preferably 60 to 95% by mass in the total solid content. It is.
  • the resin (A) may be used alone or in combination. Although the specific example of resin (A) is shown below, it is not limited to these.
  • composition of the present invention may contain a compound that generates an acid upon irradiation with actinic rays or radiation (hereinafter also referred to as “compound (B)” or “acid generator”).
  • compound (B) a compound that generates an acid upon irradiation with actinic rays or radiation
  • examples of the acid generator include compounds represented by the following general formula (ZI), (ZII), or (ZIII).
  • R 201 , R 202 and R 203 each independently represents an organic group.
  • the organic group as R 201 , R 202 and R 203 generally has 1 to 30 carbon atoms, preferably 1 to 20 carbon atoms.
  • Two of R 201 to R 203 may be bonded to form a ring structure, and the ring may contain an oxygen atom, a sulfur atom, an ester bond, an amide bond, or a carbonyl group.
  • Examples of the group formed by combining two members out of R 201 to R 203 include an alkylene group (eg, butylene group, pentylene group).
  • the compound which has two or more structures represented by general formula (ZI) may be sufficient.
  • at least one of R 201 to R 203 of the compound represented by the general formula (ZI) is a single bond or at least one of R 201 to R 203 of another compound represented by the general formula (ZI) It may be a compound having a structure bonded through a linking group.
  • Z ⁇ represents a non-nucleophilic anion (an anion having an extremely low ability to cause a nucleophilic reaction).
  • Z ⁇ include a sulfonate anion (an aliphatic sulfonate anion, an aromatic sulfonate anion, a camphor sulfonate anion, etc.), a carboxylate anion (an aliphatic carboxylate anion, an aromatic carboxylate anion, an aralkyl carboxylate anion).
  • Etc. sulfonylimide anion, bis (alkylsulfonyl) imide anion, tris (alkylsulfonyl) methide anion and the like.
  • the aliphatic moiety in the aliphatic sulfonate anion and aliphatic carboxylate anion may be an alkyl group or a cycloalkyl group, preferably a linear or branched alkyl group having 1 to 30 carbon atoms and a carbon number. Examples include 3 to 30 cycloalkyl groups.
  • the aromatic group in the aromatic sulfonate anion and aromatic carboxylate anion is preferably an aryl group having 6 to 14 carbon atoms, such as a phenyl group, a tolyl group, and a naphthyl group.
  • the alkyl group, cycloalkyl group and aryl group mentioned above may have a substituent. Specific examples thereof include nitro groups, halogen atoms such as fluorine atoms, carboxyl groups, hydroxyl groups, amino groups, cyano groups, alkoxy groups (preferably having 1 to 15 carbon atoms), cycloalkyl groups (preferably having 3 to 15 carbon atoms). ), An aryl group (preferably 6 to 14 carbon atoms), an alkoxycarbonyl group (preferably 2 to 7 carbon atoms), an acyl group (preferably 2 to 12 carbon atoms), an alkoxycarbonyloxy group (preferably 2 to 2 carbon atoms).
  • an alkylthio group preferably 1 to 15 carbon atoms
  • an alkylsulfonyl group preferably 1 to 15 carbon atoms
  • an alkyliminosulfonyl group preferably 2 to 15 carbon atoms
  • an aryloxysulfonyl group preferably a carbon atom Number 6 to 20
  • alkylaryloxysulfonyl group preferably having 7 to 20 carbon atoms
  • cycloalkylary Examples thereof include an oxysulfonyl group (preferably having 10 to 20 carbon atoms), an alkyloxyalkyloxy group (preferably having 5 to 20 carbon atoms), a cycloalkylalkyloxyalkyloxy group (preferably having 8 to 20 carbon atoms), and the like.
  • the aryl group and ring structure of each group may further have an alkyl group (preferably having 1 to 15 carbon atoms) as a substituent.
  • the aralkyl group in the aralkyl carboxylate anion is preferably an aralkyl group having 7 to 12 carbon atoms such as benzyl group, phenethyl group, naphthylmethyl group, naphthylethyl group, naphthylbutyl group and the like.
  • Examples of the sulfonylimide anion include saccharin anion.
  • the alkyl group in the bis (alkylsulfonyl) imide anion and tris (alkylsulfonyl) methide anion is preferably an alkyl group having 1 to 5 carbon atoms.
  • substituents for these alkyl groups include halogen atoms, alkyl groups substituted with halogen atoms, alkoxy groups, alkylthio groups, alkyloxysulfonyl groups, aryloxysulfonyl groups, cycloalkylaryloxysulfonyl groups, and the like.
  • a fluorine atom or an alkyl group substituted with a fluorine atom is preferred.
  • other Z ⁇ include fluorinated phosphorus (for example, PF 6 ⁇ ), fluorinated boron (for example, BF 4 ⁇ ), fluorinated antimony (for example, SbF 6 ⁇ ), and the like.
  • Z ⁇ represents an aliphatic sulfonate anion substituted with a fluorine atom at least in the ⁇ -position of the sulfonic acid, an aromatic sulfonate anion substituted with a fluorine atom or a group having a fluorine atom, and an alkyl group substituted with a fluorine atom.
  • Bis (alkylsulfonyl) imide anions and tris (alkylsulfonyl) methide anions in which the alkyl group is substituted with a fluorine atom are preferred.
  • the number of fluorine atoms contained in the anion as Z ⁇ is preferably 2 or 3.
  • the pKa of the generated acid is preferably ⁇ 1 or less in order to improve sensitivity.
  • Examples of the organic group for R 201 , R 202 and R 203 include an aryl group (preferably having 6 to 15 carbon atoms), a linear or branched alkyl group (preferably having 1 to 10 carbon atoms), a cycloalkyl group (having 3 carbon atoms). To 15 are preferred).
  • R 201 , R 202 and R 203 at least one is preferably an aryl group, more preferably all three are aryl groups.
  • a heteroaryl group such as an indole residue and a pyrrole residue can be used.
  • These aryl groups, alkyl groups and cycloalkyl groups as R 201 , R 202 and R 203 may further have a substituent.
  • substituents include nitro groups, halogen atoms such as fluorine atoms, carboxyl groups, hydroxyl groups, amino groups, cyano groups, alkoxy groups (preferably having 1 to 15 carbon atoms), cycloalkyl groups (preferably having 3 to 15 carbon atoms). ), An aryl group (preferably 6 to 14 carbon atoms), an alkoxycarbonyl group (preferably 2 to 7 carbon atoms), an acyl group (preferably 2 to 12 carbon atoms), an alkoxycarbonyloxy group (preferably 2 to 2 carbon atoms). 7) and the like, but are not limited thereto.
  • R 201 , R 202 and R 203 may be bonded via a single bond or a linking group.
  • the linking group include an alkylene group (preferably having 1 to 3 carbon atoms), —O—, —S—, —CO—, —SO 2 — and the like, but are not limited thereto.
  • Preferred structures when at least one of R 201 , R 202 and R 203 is not an aryl group include paragraphs 0046 and 0047 of JP-A-2004-233661, paragraphs 0040 to 0046 of JP-A-2003-35948, US Compounds exemplified as Formulas (I-1) to (I-70) in Patent Application Publication No.
  • More preferred examples of the compound represented by the general formula (ZI) include compounds represented by the following general formula (ZI-3) or (ZI-4). First, the compound represented by formula (ZI-3) will be described.
  • R 1 represents an alkyl group, a cycloalkyl group, an alkoxy group, a cycloalkoxy group, an aryl group or an alkenyl group
  • R 2 and R 3 each independently represents a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group, and R 2 and R 3 may be linked to each other to form a ring
  • R 1 and R 2 may combine with each other to form a ring
  • R X and R y each independently represents an alkyl group, a cycloalkyl group, an alkenyl group, an aryl group, a 2-oxoalkyl group, a 2-oxocycloalkyl group, an alkoxycarbonylalkyl group, or an alkoxycarbonylcycloalkyl group
  • R X and R y may be connected to each other to form a ring, and this ring structure may contain an oxygen atom, a nitrogen
  • Z ⁇ represents a non-nucleophilic anion.
  • the alkyl group as R 1 is preferably a linear or branched alkyl group having 1 to 20 carbon atoms, and may have an oxygen atom, a sulfur atom, or a nitrogen atom in the alkyl chain. Specific examples include branched alkyl groups.
  • the alkyl group of R 1 may have a substituent.
  • the cycloalkyl group as R 1 is preferably a cycloalkyl group having 3 to 20 carbon atoms, and may have an oxygen atom or a sulfur atom in the ring.
  • the cycloalkyl group of R 1 may have a substituent.
  • the alkoxy group as R 1 is preferably an alkoxy group having 1 to 20 carbon atoms.
  • the alkoxy group of R 1 may have a substituent.
  • the cycloalkoxy group as R 1 is preferably a cycloalkoxy group having 3 to 20 carbon atoms.
  • the cycloalkoxy group for R 1 may have a substituent.
  • the aryl group as R 1 is preferably an aryl group having 6 to 14 carbon atoms.
  • the aryl group for R 1 may have a substituent.
  • Examples of the alkenyl group as R 1 include a vinyl group and an allyl group.
  • R 2 and R 3 represent a hydrogen atom, an alkyl group, a cycloalkyl group, or an aryl group, and R 2 and R 3 may be connected to each other to form a ring. However, at least one of R 2 and R 3 represents an alkyl group, a cycloalkyl group, or an aryl group. Specific examples and preferred examples of the alkyl group, cycloalkyl group and aryl group for R 2 and R 3 include those similar to the specific examples and preferred examples described above for R 1 .
  • R 1 and R 2 When R 2 and R 3 are connected to each other to form a ring, the total number of carbon atoms that contribute to the formation of the ring contained in R 2 and R 3 is preferably 4 to 7, and is preferably 4 or 5 It is particularly preferred that R 1 and R 2 may be connected to each other to form a ring.
  • R 1 is an aryl group (preferably a phenyl group or a naphthyl group which may have a substituent), and R 2 has 1 to 4 carbon atoms.
  • An alkylene group preferably a methylene group or an ethylene group
  • examples of the preferable substituent include the same substituents that the aryl group as R 1 may have.
  • R 1 is a vinyl group and R 2 is an alkylene group having 1 to 4 carbon atoms.
  • the alkyl group represented by R X and R y is preferably an alkyl group having 1 to 15 carbon atoms.
  • the cycloalkyl group represented by R X and R y is preferably a cycloalkyl group having 3 to 20 carbon atoms.
  • the alkenyl group represented by R X and R y is preferably 2 to 30 alkenyl groups such as a vinyl group, an allyl group, and a styryl group.
  • the aryl group represented by R X and R y is, for example, an aryl group having 6 to 20 carbon atoms, preferably a phenyl group or a naphthyl group, and more preferably a phenyl group.
  • the alkyl group moiety of the 2-oxoalkyl group and alkoxycarbonylalkyl group represented by R X and R y for example, those previously listed as R X and R y.
  • Examples of the cycloalkyl group part of the 2-oxocycloalkyl group and alkoxycarbonylcycloalkyl group represented by R X and R y include those enumerated above as R X and Ry.
  • Z - is, for example, Z in the above general formula (ZI) - include those listed as.
  • the compound represented by the general formula (ZI-3) is preferably a compound represented by the following general formulas (ZI-3a) and (ZI-3b).
  • R 1 , R 2 and R 3 are as defined in the general formula (ZI-3).
  • Y represents an oxygen atom, a sulfur atom or a nitrogen atom, and is preferably an oxygen atom or a nitrogen atom.
  • m, n, p and q represent integers, preferably 0 to 3, more preferably 12, and particularly preferably 1.
  • the alkylene group connecting S + and Y may have a substituent, and preferred examples of the substituent include an alkyl group.
  • R 5 represents a monovalent organic group when Y is a nitrogen atom, and is absent when Y is an oxygen atom or a sulfur atom.
  • R 5 is preferably a group containing an electron withdrawing group, and particularly preferably a group represented by the following general formulas (ZI-3a-1) to (ZI-3a-4).
  • R represents a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group, preferably an alkyl group.
  • Specific examples and preferred examples of the alkyl group, cycloalkyl group and aryl group for R include those similar to the specific examples and preferred examples described above for R 1 in formula (ZI-3).
  • * represents a bond connected to a nitrogen atom as Y in the compound represented by the general formula (ZI-3a).
  • R 5 is particularly preferably a group represented by —SO 2 —R 4 .
  • R 4 represents an alkyl group, a cycloalkyl group or an aryl group, preferably an alkyl group. Specific examples and preferred examples of the alkyl group, cycloalkyl group and aryl group for R 4 include those similar to the specific examples and preferred examples described above for R 1 .
  • Z - is, for example, Z in the above general formula (ZI) - include those listed as. Specific examples of the cation moiety of the compound represented by the general formula (ZI-3) are given below.
  • R 13 represents a group having a hydrogen atom, a fluorine atom, a hydroxyl group, an alkyl group, a cycloalkyl group, an alkoxy group, an alkoxycarbonyl group, or a cycloalkyl group. These groups may have a substituent.
  • R 14 s each independently represents a group having a hydroxyl group, an alkyl group, a cycloalkyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylsulfonyl group, a cycloalkylsulfonyl group, or a cycloalkyl group.
  • R 15 each independently represents an alkyl group, a cycloalkyl group or a naphthyl group.
  • Two R 15 may be bonded to each other to form a ring, and the atoms constituting the ring may include heteroatoms such as an oxygen atom, a sulfur atom and a nitrogen atom. These groups may have a substituent.
  • l represents an integer of 0-2.
  • r represents an integer of 0 to 8.
  • Z ⁇ represents a non-nucleophilic anion, and examples thereof include the same non-nucleophilic anion as Z ⁇ in formula (ZI).
  • the alkyl groups of R 13 , R 14 and R 15 are linear or branched, and those having 1 to 10 carbon atoms are preferable.
  • Examples of the cycloalkyl group represented by R 13 , R 14 and R 15 include a monocyclic or polycyclic cycloalkyl group.
  • the alkoxy group for R 13 and R 14 is preferably linear or branched and has 1 to 10 carbon atoms.
  • the alkoxycarbonyl group for R 13 and R 14 is preferably linear or branched and has 2 to 11 carbon atoms.
  • Examples of the group having a cycloalkyl group of R 13 and R 14 include a group having a monocyclic or polycyclic cycloalkyl group. These groups may further have a substituent.
  • the alkyl group of the alkyl group of R 14, include the same specific examples and the alkyl group as R 13 ⁇ R 15 described above.
  • the alkylsulfonyl group and cycloalkylsulfonyl group for R 14 are linear, branched, or cyclic and preferably have 1 to 10 carbon atoms.
  • each of the above groups may have include a halogen atom (for example, a fluorine atom), a hydroxyl group, a carboxyl group, a cyano group, a nitro group, an alkoxy group, an alkoxyalkyl group, an alkoxycarbonyl group, and an alkoxycarbonyloxy group.
  • This divalent R 15 may have a substituent.
  • substituents examples include a hydroxyl group, a carboxyl group, a cyano group, a nitro group, an alkyl group, a cycloalkyl group, an alkoxy group, an alkoxyalkyl group, an alkoxycarbonyl group. Group, alkoxycarbonyloxy group and the like. There may be a plurality of substituents for the ring structure, or they may be bonded to each other to form a ring.
  • R 15 in the general formula (ZI-4) is preferably a methyl group, an ethyl group, a naphthyl group, or a divalent group in which two R 15 are bonded to each other to form a tetrahydrothiophene ring structure together with a sulfur atom.
  • a divalent group in which two R 15 are bonded to each other to form a tetrahydrothiophene ring structure together with a sulfur atom is particularly preferable.
  • R 13 and R 14 may have is preferably a hydroxyl group, an alkoxy group, an alkoxycarbonyl group, or a halogen atom (particularly a fluorine atom).
  • l is preferably 0 or 1, and more preferably 1.
  • r is preferably from 0 to 2.
  • cation structure possessed by the compound represented by the general formula (ZI-3) or (ZI-4) described above include the above-mentioned JP-A-2004-233661, JP-A-2003-35948, In addition to cationic structures such as compounds exemplified in US Patent Application Publication No. 2003 / 0224288A1 and US Patent Application Publication No.
  • R 204 to R 207 each independently represents an aryl group, an alkyl group, or a cycloalkyl group.
  • the aryl group, alkyl group, and cycloalkyl group of R 204 to R 207 are the same as the aryl group, alkyl group, and cycloalkyl group of R 201 to R 203 in the aforementioned compound (ZI).
  • the aryl group, alkyl group, and cycloalkyl group of R 204 to R 207 may have a substituent.
  • Non-nucleophilic anion Z - is is preferably a sulfonate anion represented by formula (2).
  • Xf each independently represents a fluorine atom or an alkyl group substituted with at least one fluorine atom.
  • R 7 and R 8 each independently represent a hydrogen atom, a fluorine atom, an alkyl group, or an alkyl group substituted with at least one fluorine atom, and when there are a plurality of R 7 and R 8 , R 7 and R 8 are the same But it can be different.
  • L represents a divalent linking group, and when there are a plurality of L, L may be the same or different.
  • A represents an organic group containing a cyclic structure.
  • x represents an integer of 1 to 20.
  • y represents an integer of 0 to 10.
  • z represents an integer of 0 to 10.
  • Xf is a fluorine atom or an alkyl group substituted with at least one fluorine atom as described above, and the alkyl group in the alkyl group substituted with a fluorine atom is preferably an alkyl group having 1 to 10 carbon atoms, An alkyl group having 1 to 4 carbon atoms is more preferable.
  • the alkyl group substituted with a fluorine atom of Xf is preferably a perfluoroalkyl group.
  • Xf is preferably a fluorine atom or a perfluoroalkyl group having 1 to 4 carbon atoms. Specifically, a fluorine atom or CF 3 is preferable. In particular, it is preferable that both Xf are fluorine atoms.
  • R 7 and R 8 represent a hydrogen atom, a fluorine atom, an alkyl group, or an alkyl group substituted with at least one fluorine atom, and the alkyl group preferably has 1 to 4 carbon atoms. More preferred is a perfluoroalkyl group having 1 to 4 carbon atoms.
  • CF 3 is preferable.
  • L represents a divalent linking group, and represents —COO—, —OCO—, —CO—, —O—, —S—, —SO—, —SO 2 —, —N (Ri) — (wherein Ri represents a hydrogen atom or alkyl), an alkylene group (preferably 1 to 6 carbon atoms), a cycloalkylene group (preferably 3 to 10 carbon atoms), an alkenylene group (preferably 2 to 6 carbon atoms), or a plurality of these And a divalent linking group in combination of —COO—, —OCO—, —CO—, —SO 2 —, —CON (Ri) —, —SO 2 N (Ri) —, —CON (Ri ) -Alkylene group-, -N (Ri) CO-alkylene group-, -COO-alkylene group- or -OCO-alkylene group-, preferably -COO-, -OCO-
  • the alkyl group as Ri is preferably a linear or branched alkyl group having 1 to 20 carbon atoms, and may have an oxygen atom, a sulfur atom, or a nitrogen atom in the alkyl chain. Specific examples include straight chain alkyl groups and branched alkyl groups. Examples of the alkyl group having a substituent include a cyanomethyl group, a 2,2,2-trifluoroethyl group, a methoxycarbonylmethyl group, and an ethoxycarbonylmethyl group.
  • the organic group containing the cyclic structure of A is not particularly limited as long as it has a cyclic structure, and is not limited to alicyclic groups, aryl groups, and heterocyclic groups (not only those having an aromatic attribute but also aromaticity).
  • alicyclic groups may be monocyclic or polycyclic.
  • nitrogen atom-containing alicyclic groups such as piperidine group, decahydroquinoline group, decahydroisoquinoline group.
  • an alicyclic group having a bulky structure of 7 or more carbon atoms such as a norbornyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, an adamantyl group, a decahydroquinoline group, and a decahydroisoquinoline group.
  • diffusibility in the film in the PEB (post-exposure heating) step can be suppressed, which is preferable from the viewpoint of improving exposure latitude.
  • aryl group examples include a benzene ring, a naphthalene ring, a phenanthrene ring, and an anthracene ring.
  • naphthalene having low absorbance is preferred from the viewpoint of light absorbance at 193 nm.
  • heterocyclic group examples include a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, a dibenzofuran ring, a dibenzothiophene ring, and a pyridine ring.
  • a furan ring, a thiophene ring, and a pyridine ring are preferable.
  • the cyclic organic group may have a substituent, and examples of the substituent include an alkyl group (which may be linear, branched or cyclic, preferably 1 to 12 carbon atoms), aryl Group (preferably having 6 to 14 carbon atoms), hydroxy group, alkoxy group, ester group, amide group, urethane group, ureido group, thioether group, sulfonamide group, sulfonic acid ester group, cyano group and the like.
  • alkyl group which may be linear, branched or cyclic, preferably 1 to 12 carbon atoms
  • aryl Group preferably having 6 to 14 carbon atoms
  • hydroxy group alkoxy group
  • ester group amide group, urethane group, ureido group, thioether group, sulfonamide group, sulfonic acid ester group, cyano group and the like.
  • the carbon constituting the organic group containing a cyclic structure may be a carbonyl carbon.
  • x is preferably 1 to 8, more preferably 1 to 4, and particularly preferably 1.
  • y is preferably 0 to 4, more preferably 0 or 1, and still more preferably 0.
  • z is preferably 0 to 8, more preferably 0 to 4, and still more preferably 1.
  • the number of fluorine atoms contained in the anion represented by the general formula (2) is preferably 2 or 3. Thereby, the effect of the present invention can be further enhanced.
  • Z ⁇ is also preferably a sulfonate anion represented by the following general formula (B-1).
  • R b1 each independently represents a hydrogen atom, a fluorine atom or a trifluoromethyl group (CF 3 ).
  • n represents an integer of 0 to 4.
  • n is preferably an integer of 0 to 3, and more preferably 0 or 1.
  • X b1 represents a single bond, an alkylene group, an ether bond, an ester bond (—OCO— or —COO—), a sulfonate ester bond (—OSO 2 — or —SO 3 —), or a combination thereof.
  • X b1 is preferably an ester bond (—OCO— or —COO—) or a sulfonate bond (—OSO 2 — or —SO 3 —), and preferably an ester bond (—OCO— or —COO—). Is more preferable.
  • R b2 represents an organic group having 6 or more carbon atoms.
  • the organic group having 6 or more carbon atoms for R b2 is preferably a bulky group, and examples thereof include alkyl groups, alicyclic groups, aryl groups, and heterocyclic groups having 6 or more carbon atoms.
  • the alkyl group having 6 or more carbon atoms for R b2 may be linear or branched, and is preferably a linear or branched alkyl group having 6 to 20 carbon atoms. Examples thereof include a linear or branched hexyl group, a linear or branched heptyl group, and a linear or branched octyl group. From the viewpoint of bulkiness, a branched alkyl group is preferable.
  • the alicyclic group having 6 or more carbon atoms for R b2 may be monocyclic or polycyclic.
  • an alicyclic group having a bulky structure having 7 or more carbon atoms such as a norbornyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, and an adamantyl group is used in a PEB (post-exposure heating) step.
  • PEB post-exposure heating
  • the aryl group having 6 or more carbon atoms for R b2 may be monocyclic or polycyclic.
  • Examples of the aryl group include a phenyl group, a naphthyl group, a phenanthryl group, and an anthryl group. Among these, a naphthyl group having a relatively low light absorbance at 193 nm is preferable.
  • the heterocyclic group having 6 or more carbon atoms for R b2 may be monocyclic or polycyclic, but polycyclic can suppress acid diffusion more. Moreover, the heterocyclic group may have aromaticity or may not have aromaticity. Examples of the heterocyclic ring having aromaticity include a benzofuran ring, a benzothiophene ring, a dibenzofuran ring, and a dibenzothiophene ring. Examples of the heterocyclic ring not having aromaticity include a tetrahydropyran ring, a lactone ring, a sultone ring, and a decahydroisoquinoline ring.
  • the substituent having 6 or more carbon atoms for R b2 may further have a substituent.
  • the further substituent include an alkyl group (which may be linear or branched, preferably 1 to 12 carbon atoms) and a cycloalkyl group (monocyclic, polycyclic or spiro ring). And preferably having 3 to 20 carbon atoms), aryl group (preferably having 6 to 14 carbon atoms), hydroxy group, alkoxy group, ester group, amide group, urethane group, ureido group, thioether group, sulfonamide group, And sulfonic acid ester groups.
  • the carbon constituting the alicyclic group, aryl group, or heterocyclic group (carbon contributing to ring formation) may be a carbonyl carbon.
  • Z ⁇ is also preferably a sulfonate anion represented by the following general formula (AI).
  • R 1 is an alkyl group, a monovalent alicyclic hydrocarbon group, an aryl group, or a heteroaryl group.
  • R 2 is a divalent linking group.
  • Rf is a fluorine atom or an alkyl group substituted with at least one fluorine atom.
  • n 1 and n 2 are each independently 0 or 1.
  • the alkyl group represented by R 1 is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 10 carbon atoms, and an alkyl group having 1 to 5 carbon atoms. It is more preferable that the alkyl group has 1 to 4 carbon atoms.
  • the alkyl group may have a substituent (preferably a fluorine atom), and the alkyl group having a substituent is an alkyl group having 1 to 5 carbon atoms substituted with at least one fluorine atom. It is preferably a perfluoroalkyl group having 1 to 5 carbon atoms.
  • the alkyl group represented by R 1 is preferably a methyl group, an ethyl group, or a trifluoromethyl group, and more preferably a methyl group or an ethyl group.
  • the monovalent alicyclic hydrocarbon group represented by R 1 preferably has 5 or more carbon atoms.
  • the monovalent alicyclic hydrocarbon group preferably has 20 or less carbon atoms, and more preferably 15 or less.
  • the monovalent alicyclic hydrocarbon group may be a monocyclic alicyclic hydrocarbon group or a polycyclic alicyclic hydrocarbon group. A part of —CH 2 — of the alicyclic hydrocarbon group may be substituted with —O— or —C ( ⁇ O) —.
  • the monocyclic alicyclic hydrocarbon group those having 5 to 12 carbon atoms are preferable, and a cyclopentyl group, a cyclohexyl group, and a cyclooctyl group are preferable.
  • polycyclic alicyclic hydrocarbon group those having 10 to 20 carbon atoms are preferable, and norbornyl group, adamantyl group and noradamantyl group are preferable.
  • the aryl group represented by R 1 preferably has 6 or more carbon atoms.
  • the aryl group preferably has 20 or less carbon atoms, and more preferably 15 or less.
  • the heteroaryl group represented by R 1 preferably has 2 or more carbon atoms.
  • the heteroaryl group preferably has 20 or less carbon atoms, more preferably 15 or less.
  • the aryl group and heteroaryl group may be a monocyclic aryl group or a monocyclic heteroaryl group, or may be a polycyclic aryl group or a polycyclic heteroaryl group.
  • Examples of the monocyclic aryl group include a phenyl group.
  • Examples of the polycyclic aryl group include a naphthyl group and an anthracenyl group.
  • Examples of the monocyclic heteroaryl group include a pyridyl group, a thienyl group, and a furanyl group.
  • Examples of the polycyclic heteroaryl group include a quinolyl group and an isoquinolyl group.
  • the monovalent alicyclic hydrocarbon group, aryl group, and heteroaryl group as R 1 may further have a substituent.
  • a further substituent include a hydroxyl group, a halogen atom, Atom (fluorine atom, chlorine atom, bromine atom, iodine atom, etc.), nitro group, cyano group, amide group, sulfonamido group, alkyl group, alkoxy group, alkoxycarbonyl group, acyl group, acyloxy group, carboxy group .
  • R 1 is particularly preferably a cyclohexyl group or an adamantyl group.
  • the divalent linking group represented by R 2 is not particularly limited, but is —COO—, —OCO—, —CO—, —O—, —S—, —SO—, —SO 2 —, alkylene.
  • a group preferably an alkylene group having 1 to 30 carbon atoms
  • a cycloalkylene group preferably a cycloalkylene group having 3 to 30 carbon atoms
  • an alkenylene group preferably an alkenylene group having 2 to 30 carbon atoms
  • an arylene group preferably May be an arylene group having 6 to 30 carbon atoms
  • a heteroarylene group preferably a heteroarylene group having 2 to 30 carbon atoms
  • alkylene group, cycloalkylene group, alkenylene group, arylene group and heteroarylene group may further have a substituent, and specific examples of such a substituent include a monovalent alicyclic ring as R 1.
  • the substituents that the hydrocarbon group, aryl group, and heteroaryl group may further have are the same as those described above.
  • the divalent linking group represented by R 2 is preferably an alkylene group, a cycloalkylene group, an alkenylene group, an arylene group or a heteroarylene group, more preferably an alkylene group, and further an alkylene group having 1 to 10 carbon atoms.
  • An alkylene group having 1 to 5 carbon atoms is preferable.
  • Rf is a fluorine atom or an alkyl group substituted with at least one fluorine atom.
  • the alkyl group preferably has 1 to 30 carbon atoms, preferably 1 to 10 carbon atoms, and more preferably 1 to 4 carbon atoms.
  • the alkyl group substituted with at least one fluorine atom is preferably a perfluoroalkyl group.
  • Rf is preferably a fluorine atom or a perfluoroalkyl group having 1 to 4 carbon atoms. More specifically, Rf is preferably a fluorine atom or CF 3 .
  • n 1 is preferably 1.
  • n 2 is preferably 1.
  • Non-nucleophilic anion Z - is, may be a di-imide anion represented by the general formula (2 ').
  • Xf is as defined in the general formula (2), and preferred examples are also the same.
  • two Xf's may be linked to each other to form a ring structure.
  • Z - The disulfonylimide anion of, preferably a bis (alkylsulfonyl) imide anion.
  • the alkyl group in the bis (alkylsulfonyl) imide anion is preferably an alkyl group having 1 to 5 carbon atoms.
  • Two alkyl groups in the bis (alkylsulfonyl) imide anion may be linked to each other to form an alkylene group (preferably having 2 to 4 carbon atoms) and form a ring together with the imide group and the two sulfonyl groups.
  • the ring structure that may be formed by the bis (alkylsulfonyl) imide anion is preferably a 5- to 7-membered ring, and more preferably a 6-membered ring.
  • alkyl groups and alkylene groups formed by connecting two alkyl groups to each other can have a halogen atom, an alkyl group substituted with a halogen atom, an alkoxy group, an alkylthio group, an alkyloxysulfonyl group, an aryl Examples thereof include an oxysulfonyl group and a cycloalkylaryloxysulfonyl group, and a fluorine atom or an alkyl group substituted with a fluorine atom is preferred.
  • the acid generator further include compounds represented by the following general formula (ZV).
  • R 208 represents an alkyl group, a cycloalkyl group or an aryl group.
  • A represents an alkylene group, an alkenylene group or an arylene group.
  • Specific examples of the aryl group of R 208 include the same examples as the specific examples of the aryl group as R 201 to R 203 in the general formula (ZI).
  • Specific examples of the alkyl group and cycloalkyl group represented by R 208 include the same examples as the specific examples of the alkyl group and cycloalkyl group represented by R 201 to R 203 in the general formula (ZI).
  • the alkylene group of A is an alkylene group having 1 to 12 carbon atoms (for example, methylene group, ethylene group, propylene group, isopropylene group, butylene group, isobutylene group, etc.), and the alkenylene group of A is 2 carbon atoms.
  • alkenylene groups for example, vinylene group, propenylene group, butenylene group, etc.
  • arylene groups having 6 to 10 carbon atoms for example, phenylene group, tolylene group, naphthylene group, etc.
  • acid generators are listed below. However, the present invention is not limited to these.
  • An acid generator can be used individually by 1 type or in combination of 2 or more types.
  • the content of the acid generator in the composition is preferably 0.1 to 30% by mass, more preferably 1 to 28% by mass, and further preferably 3 to 25% by mass, based on the total solid content of the composition. is there.
  • the actinic ray-sensitive or radiation-sensitive resin composition of the present invention is a hydrophobic resin (hereinafter also referred to as “hydrophobic resin (HR)” or simply “resin (HR)”). It may contain.
  • the hydrophobic resin (HR) is preferably different from the resin (A).
  • the hydrophobic resin (HR) is unevenly distributed on the surface layer of the film, and when the immersion medium is water, the static / dynamic contact angle of the resist film surface with water is improved, and the immersion liquid followability is improved. be able to.
  • the pattern formation of the present invention is performed by EUV exposure, it is possible to apply a hydrophobic resin (HR) in anticipation of so-called outgas suppression.
  • the hydrophobic resin (HR) is preferably designed to be unevenly distributed at the interface as described above.
  • the hydrophobic resin (HR) is not necessarily required to have a hydrophilic group in the molecule. There is no need to contribute to uniform mixing.
  • Hydrophobic resin (HR) is any one of “fluorine atom”, “silicon atom”, and “CH 3 partial structure contained in side chain portion of resin” from the viewpoint of uneven distribution in the surface layer of the film It is preferable to have the above, and it is more preferable to have two or more.
  • the hydrophobic resin (HR) contains a fluorine atom and / or a silicon atom
  • the fluorine atom and / or silicon atom in the hydrophobic resin (HR) may be contained in the main chain of the resin. , May be contained in the side chain.
  • the partial structure having a fluorine atom is a resin having an alkyl group having a fluorine atom, a cycloalkyl group having a fluorine atom, or an aryl group having a fluorine atom. Preferably there is.
  • the alkyl group having a fluorine atom (preferably having 1 to 10 carbon atoms, more preferably 1 to 4 carbon atoms) is a linear or branched alkyl group in which at least one hydrogen atom is substituted with a fluorine atom. It may have a substituent other than.
  • the cycloalkyl group having a fluorine atom is a monocyclic or polycyclic cycloalkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and may further have a substituent other than a fluorine atom.
  • aryl group having a fluorine atom examples include those in which at least one hydrogen atom of an aryl group such as a phenyl group or a naphthyl group is substituted with a fluorine atom, and may further have a substituent other than a fluorine atom. .
  • alkyl group having a fluorine atom examples include groups represented by the following general formulas (F2) to (F4).
  • the invention is not limited to this.
  • R 57 to R 68 each independently represents a hydrogen atom, a fluorine atom or an alkyl group (straight or branched).
  • R 57 to R 61 , at least one of R 62 to R 64 , and at least one of R 65 to R 68 are each independently a fluorine atom or at least one hydrogen atom is a fluorine atom. It represents a substituted alkyl group (preferably having 1 to 4 carbon atoms).
  • R 57 to R 61 and R 65 to R 67 are preferably fluorine atoms.
  • R 62 , R 63 and R 68 are preferably an alkyl group (preferably having 1 to 4 carbon atoms) in which at least one hydrogen atom is substituted with a fluorine atom, and preferably a perfluoroalkyl group having 1 to 4 carbon atoms. Further preferred. R 62 and R 63 may be connected to each other to form a ring.
  • Specific examples of the group represented by the general formula (F2) include a p-fluorophenyl group, a pentafluorophenyl group, and a 3,5-di (trifluoromethyl) phenyl group.
  • Specific examples of the group represented by the general formula (F3) include trifluoromethyl group, pentafluoropropyl group, pentafluoroethyl group, heptafluorobutyl group, hexafluoroisopropyl group, heptafluoroisopropyl group, hexafluoro (2 -Methyl) isopropyl group, nonafluorobutyl group, octafluoroisobutyl group, nonafluorohexyl group, nonafluoro-t-butyl group, perfluoroisopentyl group, perfluorooctyl group, perfluoro (trimethyl) hexyl group, 2,2 , 3,3-tetrafluorocyclobutyl group, perfluorocyclohexyl group and the like.
  • Hexafluoroisopropyl group, heptafluoroisopropyl group, hexafluoro (2-methyl) isopropyl group, octafluoroisobutyl group, nonafluoro-t-butyl group and perfluoroisopentyl group are preferable, and hexafluoroisopropyl group and heptafluoroisopropyl group are preferable. Further preferred.
  • Specific examples of the group represented by the general formula (F4) include, for example, —C (CF 3 ) 2 OH, —C (C 2 F 5 ) 2 OH, —C (CF 3 ) (CH 3 ) OH, —CH (CF 3 ) OH and the like are mentioned, and —C (CF 3 ) 2 OH is preferable.
  • the partial structure containing a fluorine atom may be directly bonded to the main chain, and further from the group consisting of an alkylene group, a phenylene group, an ether bond, a thioether bond, a carbonyl group, an ester bond, an amide bond, a urethane bond and a ureylene bond. You may couple
  • X 1 represents a hydrogen atom, —CH 3 , —F or —CF 3 .
  • X 2 represents —F or —CF 3 .
  • the hydrophobic resin (HR) may contain a silicon atom.
  • the partial structure having a silicon atom is preferably a resin having an alkylsilyl structure (preferably a trialkylsilyl group) or a cyclic siloxane structure.
  • Specific examples of the alkylsilyl structure or the cyclic siloxane structure include groups represented by the following general formulas (CS-1) to (CS-3).
  • R 12 to R 26 each independently represents a linear or branched alkyl group (preferably having 1 to 20 carbon atoms) or a cycloalkyl group (preferably having 3 to 20 carbon atoms).
  • L 3 to L 5 each represents a single bond or a divalent linking group. Examples of the divalent linking group include an alkylene group, a phenylene group, an ether bond, a thioether bond, a carbonyl group, an ester bond, an amide bond, a urethane bond, and a urea bond, or a combination of two or more ( Preferably, the total carbon number is 12 or less).
  • n represents an integer of 1 to 5.
  • n is preferably an integer of 2 to 4.
  • CS-1 the repeating unit having groups represented by general formulas (CS-1) to (CS-3) will be given below, but the present invention is not limited thereto.
  • X 1 represents a hydrogen atom, —CH 3 , —F or —CF 3 .
  • the hydrophobic resin (HR) also preferably includes a CH 3 partial structure in the side chain portion.
  • the CH 3 partial structure possessed by the side chain moiety in the resin (HR) (hereinafter also simply referred to as “side chain CH 3 partial structure”) has a CH 3 partial structure possessed by an ethyl group, a propyl group, or the like. It is included.
  • a methyl group directly bonded to the main chain of the resin (HR) (for example, ⁇ -methyl group of a repeating unit having a methacrylic acid structure) causes the surface uneven distribution of the resin (HR) due to the influence of the main chain. Since the contribution is small, it is not included in the CH 3 partial structure in the present invention.
  • the resin (HR) includes a repeating unit derived from a monomer having a polymerizable moiety having a carbon-carbon double bond, such as a repeating unit represented by the following general formula (M).
  • R 11 to R 14 are CH 3 “as is”, the CH 3 is not included in the CH 3 partial structure of the side chain moiety in the present invention.
  • CH 3 partial structure exists through some atoms from C-C backbone, and those falling under CH 3 partial structures in the present invention.
  • R 11 is an ethyl group (CH 2 CH 3 )
  • R 11 to R 14 each independently represents a side chain portion.
  • R 11 to R 14 in the side chain portion include a hydrogen atom and a monovalent organic group.
  • the monovalent organic group for R 11 to R 14 include an alkyl group, a cycloalkyl group, an aryl group, an alkyloxycarbonyl group, a cycloalkyloxycarbonyl group, an aryloxycarbonyl group, an alkylaminocarbonyl group, and a cycloalkylaminocarbonyl.
  • Group, an arylaminocarbonyl group, and the like, and these groups may further have a substituent.
  • the hydrophobic resin (HR) is preferably a resin having a repeating unit having a CH 3 partial structure in the side chain portion, and as such a repeating unit, a repeating unit represented by the following general formula (II), and It is more preferable to have at least one repeating unit (x) among repeating units represented by the following general formula (V).
  • the repeating unit represented by formula (II) will be described in detail.
  • X b1 represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom
  • R 2 has one or more CH 3 partial structure represents a stable organic radical to acid.
  • the organic group that is stable to acid is more specifically an organic group that does not have the “group that decomposes by the action of an acid to generate a polar group” described in the resin (A).
  • the alkyl group of Xb1 preferably has 1 to 4 carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group, a hydroxymethyl group, and a trifluoromethyl group, and a methyl group is preferable.
  • X b1 is preferably a hydrogen atom or a methyl group.
  • R 2 examples include an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an aryl group, and an aralkyl group having one or more CH 3 partial structures.
  • the above cycloalkyl group, alkenyl group, cycloalkenyl group, aryl group, and aralkyl group may further have an alkyl group as a substituent.
  • R 2 is preferably an alkyl group or an alkyl-substituted cycloalkyl group having one or more CH 3 partial structures.
  • the acid-stable organic group having one or more CH 3 partial structures as R 2 preferably has 2 or more and 10 or less CH 3 partial structures, and more preferably 2 or more and 8 or less.
  • the alkyl group having one or more CH 3 partial structures in R 2 is preferably a branched alkyl group having 3 to 20 carbon atoms.
  • the cycloalkyl group having one or more CH 3 partial structures in R 2 may be monocyclic or polycyclic. Specific examples include groups having a monocyclo, bicyclo, tricyclo, tetracyclo structure or the like having 5 or more carbon atoms. The number of carbon atoms is preferably 6-30, and particularly preferably 7-25. Preferably, they are a norbornyl group, a cyclopentyl group, and a cyclohexyl group.
  • the alkenyl group having one or more CH 3 partial structures in R 2 is preferably a linear or branched alkenyl group having 1 to 20 carbon atoms, and more preferably a branched alkenyl group.
  • the aryl group having one or more CH 3 partial structures in R 2 is preferably an aryl group having 6 to 20 carbon atoms, and examples thereof include a phenyl group and a naphthyl group. is there.
  • the aralkyl group having one or more CH 3 partial structures in R 2 is preferably an aralkyl group having 7 to 12 carbon atoms, and examples thereof include a benzyl group, a phenethyl group, and a naphthylmethyl group.
  • hydrocarbon group having two or more CH 3 partial structures in R 2 include isobutyl, t-butyl, 2-methyl-3-butyl, 2,3-dimethyl- 2-butyl group, 2-methyl-3-pentyl group, 3-methyl-4-hexyl group, 3,5-dimethyl-4-pentyl group, 2,4,4-trimethylpentyl group, 2-ethylhexyl group, 2 , 6-dimethylheptyl group, 1,5-dimethyl-3-heptyl group, 2,3,5,7-tetramethyl-4-heptyl group, 3,5-dimethylcyclohexyl group, 3,5-ditert-butyl A cyclohexyl group, a 4-isopropylcyclohexyl group, a 4-tbutylcyclohexyl group, and an isobornyl group.
  • the repeating unit represented by the general formula (II) is preferably an acid-stable (non-acid-decomposable) repeating unit, and specifically, a group that decomposes by the action of an acid to generate a polar group. It is preferable that it is a repeating unit which does not have.
  • X b2 represents a hydrogen atom, an alkyl group, a cyano group, or a halogen atom
  • R 3 represents an organic group that is stable against an acid having one or more CH 3 partial structures
  • n represents an integer of 1 to 5.
  • the alkyl group of Xb2 is preferably an alkyl group having 1 to 4 carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group, a hydroxymethyl group, and a trifluoromethyl group, and a hydrogen atom is preferable.
  • X b2 is preferably a hydrogen atom.
  • R 3 is an organic group that is stable against an acid, more specifically, an organic group that does not have the “group that decomposes by the action of an acid to generate a polar group” described in the resin (A). It is preferable that R 3 includes an alkyl group having one or more CH 3 partial structures.
  • the acid-stable organic group having one or more CH 3 partial structures as R 3 preferably has 1 or more and 10 or less CH 3 partial structures, more preferably 1 or more and 8 or less, More preferably, it is 1 or more and 4 or less.
  • the alkyl group having one or more CH 3 partial structures in R 3 is preferably a branched alkyl group having 3 to 20 carbon atoms.
  • alkyl group having two or more CH 3 partial structures in R 3 include isopropyl group, t-butyl group, 2-methyl-3-butyl group, 2-methyl-3-pentyl. Group, 3-methyl-4-hexyl group, 3,5-dimethyl-4-pentyl group, 2,4,4-trimethylpentyl group, 2-ethylhexyl group, 2,6-dimethylheptyl group, 1,5-dimethyl A -3-heptyl group, a 2,3,5,7-tetramethyl-4-heptyl group, and a 2,6-dimethylheptyl group;
  • N represents an integer of 1 to 5, more preferably an integer of 1 to 3, and still more preferably 1 or 2.
  • the repeating unit represented by the general formula (V) is preferably an acid-stable (non-acid-decomposable) repeating unit, and specifically, a group that decomposes by the action of an acid to generate a polar group. It is preferable that it is a repeating unit which does not have.
  • the content of at least one repeating unit (x) among the repeating units represented by (V) is preferably 90 mol% or more, and 95 mol% or more with respect to all the repeating units of the resin (C). It is more preferable that The content is usually 100 mol% or less with respect to all repeating units of the resin (C).
  • the resin (HR) is a repeating unit represented by the general formula (II), and at least one repeating unit (x) among the repeating units represented by the general formula (V) is all the repeating units of the resin (HR).
  • the surface free energy of the resin (C) increases.
  • the resin (HR) is less likely to be unevenly distributed on the surface of the resist film, so that the static / dynamic contact angle of the resist film with respect to water can be reliably improved and the immersion liquid followability can be improved.
  • the hydrophobic resin (HR) includes the following (x) to (z) even when (i) contains a fluorine atom and / or a silicon atom, and (ii) contains a CH 3 partial structure in the side chain portion. ) May have at least one group selected from the group of (X) an acid group, (Y) a group having a lactone structure, an acid anhydride group, or an acid imide group, (Z) A group capable of decomposing by the action of an acid As the acid group (x), a phenolic hydroxyl group, a carboxylic acid group, a fluorinated alcohol group, a sulfonic acid group, a sulfonamide group, a sulfonylimide group, (alkylsulfonyl) (alkylcarbonyl) ) Methylene group, (alkylsulfonyl) (alkylcarbonyl) imide group, bis (alkylcarbonyl) methylene group, bis (alkyl
  • Preferred acid groups include fluorinated alcohol groups (preferably hexafluoroisopropanol), sulfonimide groups, and bis (alkylcarbonyl) methylene groups.
  • the repeating unit having an acid group (x) includes a repeating unit in which an acid group is directly bonded to the main chain of the resin, such as a repeating unit of acrylic acid or methacrylic acid, or a resin having a linking group. Examples include a repeating unit in which an acid group is bonded to the main chain, and a polymerization initiator or chain transfer agent having an acid group can be introduced at the end of the polymer chain at the time of polymerization. preferable.
  • the repeating unit having an acid group (x) may have at least one of a fluorine atom and a silicon atom.
  • the content of the repeating unit having an acid group (x) is preferably 1 to 50 mol%, more preferably 3 to 35 mol%, still more preferably 5 to 5 mol% with respect to all repeating units in the hydrophobic resin (HR). 20 mol%.
  • Rx represents a hydrogen atom, CH 3 , CF 3 , or CH 2 OH.
  • the group having a lactone structure As the group having a lactone structure, the acid anhydride group, or the acid imide group (y), a group having a lactone structure is particularly preferable.
  • the repeating unit containing these groups is a repeating unit in which this group is directly bonded to the main chain of the resin, such as a repeating unit of acrylic acid ester and methacrylic acid ester.
  • this repeating unit may be a repeating unit in which this group is bonded to the main chain of the resin via a linking group.
  • this repeating unit may be introduce
  • Examples of the repeating unit having a group having a lactone structure include those similar to the repeating unit having a lactone structure described above in the section of the acid-decomposable resin (A).
  • the content of the repeating unit having a group having a lactone structure, an acid anhydride group, or an acid imide group is preferably 1 to 100 mol% based on all repeating units in the hydrophobic resin (HR).
  • the content is more preferably 3 to 98 mol%, further preferably 5 to 95 mol%.
  • examples of the repeating unit having a group (z) that is decomposed by the action of an acid are the same as the repeating unit having an acid-decomposable group listed for the resin (A).
  • the repeating unit having a group (z) that is decomposed by the action of an acid may have at least one of a fluorine atom and a silicon atom.
  • the content of the repeating unit having a group (z) that is decomposed by the action of an acid is preferably 1 to 80 mol% with respect to all repeating units in the resin (HR). The amount is preferably 10 to 80 mol%, more preferably 20 to 60 mol%.
  • the hydrophobic resin (HR) may further have a repeating unit represented by the following general formula (VI).
  • R c31 represents a hydrogen atom, an alkyl group (which may be substituted with a fluorine atom or the like), a cyano group, or a —CH 2 —O—Rac 2 group.
  • Rac 2 represents a hydrogen atom, an alkyl group or an acyl group.
  • R c31 is preferably a hydrogen atom, a methyl group, a hydroxymethyl group or a trifluoromethyl group, particularly preferably a hydrogen atom or a methyl group.
  • R c32 represents a group having an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group or an aryl group. These groups may be substituted with a group containing a fluorine atom or a silicon atom.
  • L c3 represents a single bond or a divalent linking group.
  • the alkyl group represented by R c32 is preferably a linear or branched alkyl group having 3 to 20 carbon atoms.
  • the cycloalkyl group is preferably a cycloalkyl group having 3 to 20 carbon atoms.
  • the alkenyl group is preferably an alkenyl group having 3 to 20 carbon atoms.
  • the cycloalkenyl group is preferably a cycloalkenyl group having 3 to 20 carbon atoms.
  • the aryl group is preferably an aryl group having 6 to 20 carbon atoms, more preferably a phenyl group or a naphthyl group, and these may have a substituent.
  • R c32 is preferably an unsubstituted alkyl group or an alkyl group substituted with a fluorine atom.
  • the divalent linking group of L c3 is preferably an alkylene group (preferably having a carbon number of 1 to 5), an ether bond, a phenylene group, or an ester bond (a group represented by —COO—).
  • the content of the repeating unit represented by the general formula (VI) is preferably 1 to 100 mol%, more preferably 10 to 90 mol%, based on all repeating units in the hydrophobic resin. 30 to 70 mol% is more preferable.
  • the hydrophobic resin (HR) preferably further has a repeating unit represented by the following general formula (CII-AB).
  • R c11 ′ and R c12 ′ each independently represents a hydrogen atom, a cyano group, a halogen atom or an alkyl group.
  • Zc ′ represents an atomic group for forming an alicyclic structure containing two bonded carbon atoms (C—C).
  • the content of the repeating unit represented by the general formula (CII-AB) is preferably 1 to 100 mol%, based on all repeating units in the hydrophobic resin, and preferably 10 to 90 mol%. More preferred is 30 to 70 mol%.
  • Ra represents H, CH 3 , CH 2 OH, CF 3 or CN.
  • the fluorine atom content is preferably 5 to 80% by mass with respect to the weight average molecular weight of the hydrophobic resin (HR), and is 10 to 80% by mass. More preferably.
  • the repeating unit containing a fluorine atom is preferably 10 to 100 mol%, more preferably 30 to 100 mol%, based on all repeating units contained in the hydrophobic resin (HR).
  • the hydrophobic resin (HR) has a silicon atom
  • the silicon atom content is preferably 2 to 50% by mass, preferably 2 to 30% by mass, based on the weight average molecular weight of the hydrophobic resin (HR). More preferably.
  • the repeating unit containing a silicon atom is preferably 10 to 100 mol%, more preferably 20 to 100 mol% in all repeating units contained in the hydrophobic resin (HR).
  • the resin (HR) includes a CH 3 partial structure in the side chain portion
  • the resin (HR) does not substantially contain a fluorine atom and a silicon atom.
  • the content of the repeating unit having a fluorine atom or a silicon atom is preferably 5 mol% or less, more preferably 3 mol% or less, more preferably 1 mol based on all repeating units in the resin (HR). % Or less, ideally 0 mol%, that is, no fluorine atom and no silicon atom.
  • resin (HR) is substantially comprised only by the repeating unit comprised only by the atom chosen from a carbon atom, an oxygen atom, a hydrogen atom, a nitrogen atom, and a sulfur atom. More specifically, the repeating unit composed only of atoms selected from a carbon atom, an oxygen atom, a hydrogen atom, a nitrogen atom, and a sulfur atom is 95 mol% or more in all the repeating units of the resin (HR). Preferably, it is 97 mol% or more, more preferably 99 mol% or more, and ideally 100 mol%.
  • the weight average molecular weight of the hydrophobic resin (HR) in terms of standard polystyrene is preferably 1,000 to 100,000, more preferably 1,000 to 50,000, and still more preferably 2,000 to 15,000. is there.
  • the hydrophobic resin (HR) may be used alone or in combination.
  • the content of the hydrophobic resin (HR) in the composition is preferably 0.01 to 10% by mass, more preferably 0.05 to 8% by mass, based on the total solid content in the composition of the present invention. More preferably, it is 1 to 7% by mass.
  • the hydrophobic resin (HR), like the resin (A), naturally has few impurities such as metals, and the residual monomer and oligomer components are preferably 0.01 to 5% by mass, and more preferably Is more preferably 0.01 to 3% by mass and 0.05 to 1% by mass.
  • an actinic ray-sensitive or radiation-sensitive resin composition that does not change over time such as foreign matter in liquid or sensitivity can be obtained.
  • the molecular weight distribution (Mw / Mn, also referred to as dispersity) is preferably in the range of 1 to 5, more preferably 1 to 3, and still more preferably from the viewpoints of resolution, resist shape, resist pattern sidewall, roughness, and the like. It is in the range of 1-2.
  • hydrophobic resin As the hydrophobic resin (HR), various commercially available products can be used, or they can be synthesized according to a conventional method (for example, radical polymerization).
  • a conventional method for example, radical polymerization
  • a monomer polymerization method in which a monomer species and an initiator are dissolved in a solvent and the polymerization is performed by heating, and a solution of the monomer species and the initiator is dropped into the heating solvent over 1 to 10 hours.
  • the dropping polymerization method is added, and the dropping polymerization method is preferable.
  • the reaction solvent, the polymerization initiator, the reaction conditions (temperature, concentration, etc.) and the purification method after the reaction are the same as described in the resin (A), but in the synthesis of the hydrophobic resin (HR),
  • the concentration of the reaction is preferably 30 to 50% by mass.
  • hydrophobic resin HR
  • the following table shows the molar ratio of repeating units in each resin (corresponding to each repeating unit in order from the left), weight average molecular weight, and degree of dispersion.
  • the actinic ray-sensitive or radiation-sensitive resin composition of the present invention preferably contains a basic compound in order to reduce changes in performance over time from exposure to heating.
  • Usable basic compounds are not particularly limited, and for example, compounds classified into the following (1) to (6) can be used.
  • Basic compound (N) Preferred examples of the basic compound include compounds (N) having structures represented by the following formulas (A) to (E).
  • R 200 , R 201 and R 202 may be the same or different and are a hydrogen atom, an alkyl group (preferably having a carbon number of 1 to 20), a cycloalkyl group (preferably having a carbon number of 3 to 20) or an aryl group (having a carbon number). 6-20), wherein R 201 and R 202 may combine with each other to form a ring.
  • R 203 , R 204 , R 205 and R 206 may be the same or different and each represents an alkyl group having 1 to 20 carbon atoms.
  • the alkyl group having a substituent is preferably an aminoalkyl group having 1 to 20 carbon atoms, a hydroxyalkyl group having 1 to 20 carbon atoms, or a cyanoalkyl group having 1 to 20 carbon atoms.
  • the alkyl groups in the general formulas (A) and (E) are more preferably unsubstituted.
  • Preferable compound (N) includes guanidine, aminopyrrolidine, pyrazole, pyrazoline, piperazine, aminomorpholine, aminoalkylmorpholine, piperidine, and more preferable compound (N) includes imidazole structure, diazabicyclo structure, onium hydroxy group.
  • Compound (N) having an alkyl group structure, an onium carboxylate structure, a trialkylamine structure, an aniline structure or a pyridine structure, an alkylamine derivative having a hydroxyl group and / or an ether bond, an aniline derivative having a hydroxyl group and / or an ether bond, etc. be able to.
  • Examples of the compound (N) having an imidazole structure include imidazole, 2,4,5-triphenylimidazole, benzimidazole, 2-phenylbenzimidazole and the like.
  • Examples of the compound (N) having a diazabicyclo structure 1,4-diazabicyclo [2,2,2] octane, 1,5-diazabicyclo [4,3,0] non-5-ene, 1,8-diazabicyclo [5, 4,0] undec-7-ene and the like.
  • Examples of the compound (N) having an onium hydroxide structure include tetrabutylammonium hydroxide, triarylsulfonium hydroxide, phenacylsulfonium hydroxide, sulfonium hydroxide having a 2-oxoalkyl group, specifically, triphenylsulfonium hydroxide. , Tris (t-butylphenyl) sulfonium hydroxide, bis (t-butylphenyl) iodonium hydroxide, phenacylthiophenium hydroxide, 2-oxopropylthiophenium hydroxide, and the like.
  • the anion portion of the compound (N) having an onium hydroxide structure is converted to a carboxylate.
  • the compound (N) having a trialkylamine structure include tri (n-butyl) amine and tri (n-octyl) amine.
  • the aniline compound (N) include 2,6-diisopropylaniline, N, N-dimethylaniline, N, N-dibutylaniline, N, N-dihexylaniline and the like.
  • alkylamine derivative having a hydroxyl group and / or an ether bond examples include ethanolamine, diethanolamine, triethanolamine, N-phenyldiethanolamine, and tris (methoxyethoxyethyl) amine.
  • aniline derivatives having a hydroxyl group and / or an ether bond examples include N, N-bis (hydroxyethyl) aniline.
  • Preferred examples of the basic compound (N) further include an amine compound having a phenoxy group, an ammonium salt compound having a phenoxy group, an amine compound having a sulfonic acid ester group, and an ammonium salt compound having a sulfonic acid ester group.
  • these compounds include compounds (C1-1) to (C3-3) exemplified in paragraph [0066] of US Patent Application Publication No. 2007 / 0224539A1.
  • the following compounds are also preferable as the basic compound (N).
  • the basic compound (N) in addition to the above-mentioned compounds, JP 2011-22560 A [0180] to [0225], JP 2012-137735 A [0218] to [0219], International Publication Pamphlet WO 2011 / 158687A1 [0416] to [0438] can also be used.
  • the basic compound (N) may be a basic compound or an ammonium salt compound whose basicity is lowered by irradiation with actinic rays or radiation.
  • These basic compounds (N) may be used alone or in combination of two or more.
  • the composition of the present invention may or may not contain the basic compound (N), but when it is contained, the content of the basic compound (N) is the actinic ray-sensitive or radiation-sensitive resin composition. Is usually 0.001 to 10% by mass, preferably 0.01 to 5% by mass, based on the solid content.
  • the acid generator / basic compound (N) (molar ratio) is more preferably from 5.0 to 200, still more preferably from 7.0 to 150.
  • the actinic ray-sensitive or radiation-sensitive resin composition in the present invention contains a basic compound or an ammonium salt compound (hereinafter also referred to as “compound (F)”) whose basicity is lowered by irradiation with actinic rays or radiation. It is preferable to do.
  • the compound (F) is preferably a compound (F-1) having a basic functional group or an ammonium group and a group capable of generating an acidic functional group upon irradiation with actinic rays or radiation.
  • the compound (F) is a basic compound having a basic functional group and a group capable of generating an acidic functional group upon irradiation with actinic light or radiation, or an acidic functional group upon irradiation with an ammonium group and active light or radiation.
  • An ammonium salt compound having a group to be generated is preferable.
  • PA-I Compounds with reduced basicity generated by the decomposition of compound (F) or (F-1) upon irradiation with actinic rays or radiation are represented by the following general formulas (PA-I), (PA-II) or (PAIII)
  • PA-II general formulas
  • PAIII general formulas
  • the compound represented by formula (PA-II) or (PA Compounds represented by -III) are preferred.
  • a 1 represents a single bond or a divalent linking group.
  • Q represents —SO 3 H or —CO 2 H.
  • Q corresponds to an acidic functional group generated by irradiation with actinic rays or radiation.
  • X represents —SO 2 — or —CO—.
  • n represents 0 or 1.
  • B represents a single bond, an oxygen atom or —N (Rx) —.
  • Rx represents a hydrogen atom or a monovalent organic group.
  • R represents a monovalent organic group having a basic functional group or a monovalent organic group having an ammonium group.
  • Q 1 -X 1 -NH-X 2 -Q 2 (PA-II)
  • Q 1 and Q 2 each independently represents a monovalent organic group. However, either Q 1 or Q 2 has a basic functional group. Q 1 and Q 2 may combine to form a ring, and the formed ring may have a basic functional group.
  • X 1 and X 2 each independently represents —CO— or —SO 2 —. Note that —NH— corresponds to an acidic functional group generated by irradiation with actinic rays or radiation.
  • Q 1 -X 1 -NH-X 2 -A 2- (X 3 ) m -BQ 3 (PA-III)
  • Q 1 and Q 3 each independently represents a monovalent organic group.
  • either one of Q 1 and Q 3 are a basic functional group.
  • Q 1 and Q 3 may combine to form a ring, and the formed ring may have a basic functional group.
  • X 1 , X 2 and X 3 each independently represents —CO— or —SO 2 —.
  • a 2 represents a divalent linking group.
  • B represents a single bond, an oxygen atom or —N (Qx) —.
  • Qx represents a hydrogen atom or a monovalent organic group.
  • —NH— corresponds to an acidic functional group generated by irradiation with actinic rays or radiation.
  • preferred specific examples of the compound (E) include compounds (A-1) to (A-44) of US Patent Application Publication No. 2010/0233629, US Pat. (A-1) to (A-23) of 2012/0156617.
  • the molecular weight of the compound (F) is preferably 500 to 1,000.
  • the actinic ray-sensitive or radiation-sensitive resin composition in the present invention may or may not contain the compound (F), but when it is contained, the content of the compound (F) is actinic ray-sensitive or sensitive.
  • the content is preferably 0.1 to 20% by mass, more preferably 0.1 to 10% by mass, based on the solid content of the radiation resin composition.
  • the composition of the present invention may contain a compound having a nitrogen atom and a group capable of leaving by the action of an acid (hereinafter also referred to as “compound (G)”).
  • the group capable of leaving by the action of an acid is not particularly limited, but is preferably an acetal group, a carbonate group, a carbamate group, a tertiary ester group, a tertiary hydroxyl group, or a hemiaminal ether group, and a carbamate group or a hemiaminal ether group. It is particularly preferred.
  • the molecular weight of the compound (N ′′) having a group capable of leaving by the action of an acid is preferably 100 to 1000, more preferably 100 to 700, and particularly preferably 100 to 500.
  • the compound (G) an amine derivative having a group capable of leaving by the action of an acid on the nitrogen atom is preferable.
  • Compound (G) may have a carbamate group having a protecting group on the nitrogen atom.
  • the protecting group constituting the carbamate group can be represented by the following general formula (d-1).
  • Rb independently represents a hydrogen atom, an alkyl group (preferably having 1 to 10 carbon atoms), a cycloalkyl group (preferably having 3 to 30 carbon atoms), an aryl group (preferably having 3 to 30 carbon atoms), an aralkyl group ( Preferably, it represents 1 to 10 carbon atoms) or an alkoxyalkyl group (preferably 1 to 10 carbon atoms).
  • Rb may be connected to each other to form a ring.
  • the alkyl group, cycloalkyl group, aryl group, and aralkyl group represented by Rb are substituted with a functional group such as hydroxyl group, cyano group, amino group, pyrrolidino group, piperidino group, morpholino group, oxo group, alkoxy group, or halogen atom. It may be.
  • Rb is preferably a linear or branched alkyl group, cycloalkyl group, or aryl group. More preferably, it is a linear or branched alkyl group or cycloalkyl group.
  • Examples of the ring formed by connecting two Rb to each other include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a heterocyclic hydrocarbon group, or a derivative thereof.
  • Specific examples of the group represented by the general formula (d-1) include a structure disclosed in paragraph [0466] of US Patent Application Publication No. 2012 / 0135348A1, and examples thereof include: It is not limited.
  • the compound (G) has a structure represented by the following general formula (6).
  • Ra represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or an aralkyl group.
  • l 2
  • two Ras may be the same or different, and two Ras may be connected to each other to form a heterocyclic ring together with the nitrogen atom in the formula.
  • the heterocyclic ring may contain a hetero atom other than the nitrogen atom in the formula.
  • Rb has the same meaning as Rb in formula (d-1), and preferred examples are also the same.
  • l represents an integer of 0 to 2
  • the alkyl group, cycloalkyl group, aryl group and aralkyl group as Ra are described above as the groups in which the alkyl group, cycloalkyl group, aryl group and aralkyl group as Rb may be substituted. It may be substituted with a group similar to the group.
  • Preferred examples of the Ra alkyl group, cycloalkyl group, aryl group, and aralkyl group (these alkyl group, cycloalkyl group, aryl group, and aralkyl group may be substituted with the above groups) include: The same group as the preferable example mentioned above about Rb is mentioned.
  • the heterocyclic ring formed by connecting the Ra to each other preferably has 20 or less carbon atoms.
  • particularly preferable compound (G) in the present invention include compounds disclosed in paragraph [0475] of US Patent Application Publication No. 2012 / 0135348A1, but are not limited thereto. Absent.
  • the compound represented by the general formula (6) can be synthesized based on JP2007-298869A, JP2009-199021A, and the like.
  • the low molecular compound (G) can be used singly or in combination of two or more.
  • the content of the compound (G) in the actinic ray-sensitive or radiation-sensitive resin composition of the present invention is preferably 0.001 to 20% by mass, more preferably based on the total solid content of the composition.
  • the amount is 0.001 to 10% by mass, more preferably 0.01 to 5% by mass.
  • the composition of the present invention may contain an onium salt as a basic compound.
  • the onium salt include onium salts represented by the following general formula (6A) or (6B). This onium salt is expected to control the diffusion of the generated acid in the resist system in relation to the acid strength of the photoacid generator usually used in the resist composition.
  • Ra represents an organic group. However, those in which a fluorine atom is substituted for a carbon atom directly bonded to a carboxylic acid group in the formula are excluded.
  • X + represents an onium cation.
  • Rb represents an organic group. However, those in which a fluorine atom is substituted for a carbon atom directly bonded to the sulfonic acid group in the formula are excluded.
  • X + represents an onium cation.
  • the atom directly bonded to the carboxylic acid group or sulfonic acid group in the formula is preferably a carbon atom.
  • the fluorine atom does not substitute for the carbon atom directly bonded to the sulfonic acid group or carboxylic acid group.
  • Examples of the organic group represented by Ra and Rb include an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, and an aralkyl group having 7 to 30 carbon atoms.
  • a heterocyclic group having 3 to 30 carbon atoms can be used. In these groups, some or all of the hydrogen atoms may be substituted.
  • Examples of the substituent that the alkyl group, cycloalkyl group, aryl group, aralkyl group and heterocyclic group may have include a hydroxyl group, a halogen atom, an alkoxy group, a lactone group, and an alkylcarbonyl group.
  • Examples of the onium cation represented by X + in the general formulas (6A) and (6B) include a sulfonium cation, an ammonium cation, an iodonium cation, a phosphonium cation, and a diazonium cation. Among these, a sulfonium cation is more preferable.
  • an arylsulfonium cation having at least one aryl group is preferable, and a triarylsulfonium cation is more preferable.
  • the aryl group may have a substituent, and the aryl group is preferably a phenyl group.
  • Preferred examples of the sulfonium cation and the iodonium cation include the aforementioned sulfonium cation structure of the general formula (ZI) and the iodonium structure of the general formula (ZII) in the compound (B).
  • ZI sulfonium cation structure of the general formula
  • ZII iodonium structure of the general formula (ZII) in the compound (B).
  • a specific structure of the onium salt represented by the general formula (6A) or (6B) is shown below.
  • the content is usually based on the solid content of the actinic ray-sensitive or radiation-sensitive resin composition. 0.01 to 10% by mass, preferably 0.1 to 5% by mass.
  • the composition of the present invention includes a compound contained in the formula (I) of JP2012-189777A, a compound represented by the formula (I) of JP2013-6827A, An onium salt structure and an acid anion structure in one molecule such as a compound represented by the formula (I) of Kaikai 2013-8020 and a compound represented by the formula (I) of JP 2012-252124 A
  • a compound having both of these (hereinafter also referred to as betaine compounds) can be preferably used.
  • the onium salt structure include a sulfonium, iodonium, and ammonium structure, and a sulfonium or iodonium salt structure is preferable.
  • an acid anion structure a sulfonate anion or a carboxylate anion is preferable. Examples of this compound include the following.
  • solvent examples of the solvent that can be used in preparing the actinic ray-sensitive or radiation-sensitive resin composition of the present invention include alkylene glycol monoalkyl ether carboxylate, alkylene glycol monoalkyl ether, lactate alkyl ester, and alkoxypropion.
  • Organic solvents such as alkyl acid, cyclic lactone (preferably having 4 to 10 carbon atoms), monoketone compound which may have a ring (preferably having 4 to 10 carbon atoms), alkylene carbonate, alkyl alkoxyacetate, alkyl pyruvate, etc. be able to.
  • the solvent containing a hydroxyl group and the solvent not containing a hydroxyl group can be selected as appropriate.
  • the solvent containing a hydroxyl group alkylene glycol monoalkyl ether, alkyl lactate and the like are preferable, and propylene glycol monomethyl ether ( PGME, also known as 1-methoxy-2-propanol), ethyl lactate is more preferred.
  • alkylene glycol monoalkyl ether acetate, alkyl alkoxypropionate, monoketone compound which may contain a ring, cyclic lactone, alkyl acetate and the like are preferable, and among these, propylene glycol monomethyl ether Acetate (PGMEA, also known as 1-methoxy-2-acetoxypropane), ethyl ethoxypropionate, 2-heptanone, ⁇ -butyrolactone, cyclohexanone, butyl acetate are particularly preferred, propylene glycol monomethyl ether acetate, ethyl ethoxypropionate, propylene Most preferred is carbonate, 2-heptanone.
  • PGMEA propylene glycol monomethyl ether Acetate
  • the mixing ratio (mass) of the solvent containing a hydroxyl group and the solvent not containing a hydroxyl group is 1/99 to 99/1, preferably 10/90 to 90/10, more preferably 20/80 to 60/40. .
  • a mixed solvent containing 50% by mass or more of a solvent not containing a hydroxyl group is particularly preferred from the viewpoint of coating uniformity.
  • the solvent preferably contains propylene glycol monomethyl ether acetate, and is preferably a propylene glycol monomethyl ether acetate (PGMEA) single solvent or a mixed solvent of two or more kinds containing propylene glycol monomethyl ether acetate (PGMEA).
  • Preferred specific examples of the mixed solvent include a mixed solvent containing PGMEA and a ketone solvent (cyclohexanone, 2-heptanone, etc.), a mixed solvent containing PGMEA and a lactone solvent ( ⁇ -butyrolactone, etc.), and a mixed solvent containing PGMEA and PGME.
  • PGMEA / PGME / lactone solvent a mixed solvent containing three types of PGMEA / PGME / ketone solvent
  • the actinic ray-sensitive or radiation-sensitive resin composition in the present invention may or may not further contain a surfactant.
  • a surfactant fluorine and / or silicon-based surfactant (fluorinated surfactant, It is more preferable to contain any one of a silicon-based surfactant and a surfactant having both a fluorine atom and a silicon atom, or two or more thereof.
  • the actinic ray-sensitive or radiation-sensitive resin composition in the present invention contains a surfactant
  • adhesion and development defects can be obtained with good sensitivity and resolution when using an exposure light source of 250 nm or less, particularly 220 nm or less.
  • a small resist pattern can be provided.
  • fluorine-based and / or silicon-based surfactant include surfactants described in [0276] of US Patent Application Publication No. 2008/0248425.
  • Polysiloxane polymer KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.) can also be used as a silicon-based surfactant.
  • surfactants are derived from fluoroaliphatic compounds produced by the telomerization method (also referred to as the telomer method) or the oligomerization method (also referred to as the oligomer method).
  • a surfactant using a polymer having a fluoroaliphatic group can be used.
  • the fluoroaliphatic compound can be synthesized by the method described in JP-A-2002-90991.
  • Megafac F178, F-470, F-473, F-475, F-476, F-472 manufactured by DIC Corporation
  • surfactants other than the fluorine-based and / or silicon-based surfactants described in [0280] of US Patent Application Publication No. 2008/0248425 may also be used.
  • surfactants may be used alone or in some combination.
  • the amount of the surfactant used is preferably relative to the total amount of the actinic ray-sensitive or radiation-sensitive resin composition (excluding the solvent). Is 0.0001 to 2% by mass, more preferably 0.0005 to 1% by mass.
  • the surface unevenness of the hydrophobic resin is increased by setting the addition amount of the surfactant to 10 ppm or less with respect to the total amount of the actinic ray-sensitive or radiation-sensitive resin composition (excluding the solvent).
  • the surface of the resist film can be made more hydrophobic, and the water followability during immersion exposure can be improved.
  • the composition of the present invention can be prepared by appropriately mixing the above components. During the preparation, a process of reducing metal impurities in the composition to the ppb level using an ion exchange membrane, a process of filtering impurities such as various particles using an appropriate filter, a deaeration process, etc. Good. Specifics of these steps are described in JP 2012-88574 A, JP 2010-189563 A, JP 2001-12529 A, JP 2001-350266 A, and JP 2002-99076 A. JP-A-5-307263, JP-A-2010-164980, WO2006 / 121162A, JP-A-2010-243866, JP-A-2010-020297, and the like.
  • the composition of the present invention preferably has a low water content. Specifically, the water content is preferably 2.5% by mass or less, more preferably 1.0% by mass or less, and still more preferably 0.3% by mass or less in the total weight of the composition.
  • the pattern forming method of the present invention may include (10) a step of forming a protective film with the protective film forming composition between the step (1) and the step (2).
  • the composition for forming a protective film is different from the first actinic ray-sensitive or radiation-sensitive resin composition, and is a second actinic ray-sensitive or sensitive material containing a resin that decomposes by the action of an acid to generate a polar group.
  • a radiation resin composition is preferred. That is, in the pattern forming method of the present invention, (10 ′) the action of an acid different from the first actinic ray-sensitive or radiation-sensitive resin composition on the first actinic ray-sensitive or radiation-sensitive film.
  • a step of forming a second actinic ray-sensitive or radiation-sensitive film with a second actinic ray-sensitive or radiation-sensitive resin composition containing a resin that decomposes by the above to generate a polar group preferable is especially in the step (3) of the second pattern forming method of the present invention described above, it becomes easier to reliably remove the region located above the exposed portion 11 in the protective film.
  • each component that the second actinic ray-sensitive or radiation-sensitive resin composition may contain, and these second components
  • the preferred range of the content of the actinic ray-sensitive or radiation-sensitive resin composition with respect to the total solid content is the same as that in the first actinic-ray-sensitive or radiation-sensitive resin composition.
  • the second actinic ray-sensitive or radiation-sensitive resin composition is different from the first actinic ray-sensitive or radiation-sensitive resin composition.
  • the first actinic ray sensitive or radiation sensitive resin composition and the component contained in the second actinic ray sensitive or radiation sensitive resin composition are the same
  • the concentration of any of the components is different
  • the first actinic ray-sensitive or radiation-sensitive resin composition and the second actinic ray-sensitive or radiation-sensitive resin composition are different.
  • the resin (A) in the first actinic ray-sensitive or radiation-sensitive resin composition contains a lactone structure, and the second actinic ray. It is preferable that the resin (A) in the light-sensitive or radiation-sensitive resin composition does not contain a lactone structure.
  • the resin (A) in the second actinic ray-sensitive or radiation-sensitive resin composition has substantially a repeating unit having a lactone structure.
  • the second actinic ray-sensitive or radiation-sensitive resin composition is preferably 10 mol% or less with respect to all repeating units in the resin (A), and undergoes a nucleophilic reaction from the surface treatment agent. It is preferable in that it is difficult to exhibit the performance as a protective film.
  • the second actinic ray-sensitive or radiation-sensitive resin composition may or may not contain an acid generator.
  • the resin (A) in the second actinic ray-sensitive or radiation-sensitive resin composition is generated from this acid generator.
  • the acid can be decomposed to generate a polar group.
  • the second actinic ray-sensitive or radiation-sensitive resin composition does not contain an acid generator, it is generated from the acid generator in the first actinic ray-sensitive or radiation-sensitive resin composition
  • the second actinic ray-sensitive or radiation-sensitive resin composition by diffusing the generated acid from the first actinic ray-sensitive or radiation-sensitive film to the second actinic ray-sensitive or radiation-sensitive film
  • the resin (A) in can be decomposed by the diffused acid to generate a polar group.
  • the first actinic ray-sensitive or radiation-sensitive film and the protective film have little intermix.
  • preferred examples of the solvent that the protective film-forming composition may contain include alcohol solvents, ether solvents, and combinations thereof. Specifically, an alkyl group having 3 or more carbon atoms (preferably having 5 to 10 carbon atoms), a cycloalkyl group (preferably having 5 to 10 carbon atoms), and an aralkyl group (preferably having 7 to 10 carbon atoms are preferable). ) And / or dialkyl ethers.
  • the present invention includes the above-mentioned hydrophobic resin (HR) in the first actinic ray-sensitive or radiation-sensitive resin composition in the step (1), and as described above, the hydrophobic resin (HR) ) May be unevenly distributed on the surface of the film to form a film corresponding to the protective film.
  • the hydrophobic resin (HR) is a resin having substantially no repeating unit having a lactone structure and having a repeating unit that decomposes by the action of an acid to generate a polar group for the reasons described above. Is preferred.
  • the top coat described in the step (2) may be a film corresponding to the protective film. In this case, for the reasons described above, it is preferable that the top coat contains a resin having substantially no repeating unit having a lactone structure and having a repeating unit that is decomposed by the action of an acid to generate a polar group.
  • the obtained resin (P-1) had a weight average molecular weight of 12,000 and a dispersity (Mw / Mn) of 1.6.
  • Resins (P-2) to (P-11) and hydrophobicity were prepared in the same manner as in Synthesis Example 1 except that the monomers corresponding to each repeating unit were used so as to have a desired composition ratio (molar ratio). Resins (N-1) to (N-3) were synthesized.
  • Resist preparation The components shown in Table 4 below were dissolved in the solvent shown in the same table to give a total solids concentration of 3.5% by mass, and each was filtered through a polyethylene filter having a pore size of 0.05 ⁇ m. 1 to Ar-17 were prepared.
  • W-1 Megafuck F176 (manufactured by DIC Corporation) (fluorine-based)
  • W-2 Megafuck R08 (manufactured by DIC Corporation) (fluorine and silicon)
  • W-3 Polysiloxane polymer KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.) (silicon-based)
  • W-4 PolyFox PF-6320 (manufactured by OMNOVA) (fluorine-based)
  • a resist pattern was formed by the following method using the prepared resist composition.
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 75 nm. Thereafter, heating is performed at 100 ° C. for 60 seconds, the surface treatment agent S-1 is applied at a rotation speed of 1500 rpm, baking is performed at 100 ° C. for 60 seconds, and the developer described in Table 6 is developed by paddle for 30 seconds. After paddle rinsing with the rinsing solution shown in Table 6 for 30 seconds, the wafer was rotated at 2000 rpm for 30 seconds, and baked at 90 ° C. for 60 seconds to obtain a 1: 1 line and space with a line width of 75 nm. A resist pattern was obtained.
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 75 nm. After that, it was heated at 100 ° C. for 60 seconds, and the surface treatment agent S-2 was applied at a rotation speed of 1500 rpm, baked at 100 ° C. for 60 seconds, padded with the stripping solution shown in Table 6 for 30 seconds, and rotated at 2000 rpm. The wafer was rotated for 30 seconds. Paddle the developer listed in Table 6 for 30 seconds to develop, paddle and rinse with the rinse solution listed in Table 6 for 30 seconds, then rotate the wafer for 30 seconds at 2000 rpm and 60 seconds at 90 ° C. By baking, a 1: 1 line and space resist pattern with a line width of 75 nm was obtained.
  • Examples 3, 11, 12, 36, 37 A 1: 1 line and space resist pattern with a line width of 75 nm was obtained in the same manner as in Example 2 except that the resist, surface treating agent and conditions shown in Table 6 were employed.
  • Examples 4 to 10, 13, 35, Comparative Example 1 A 1 1 line and space resist pattern having a line width of 75 nm was obtained in the same manner as in Example 1 except that the resist, surface treating agent and conditions shown in Table 6 were employed.
  • Example 14 An organic antireflection film ARC29SR (manufactured by Nissan Chemical Industries, Ltd.) was applied onto a 12-inch diameter silicon wafer, and baked at 205 ° C. for 60 seconds to form an antireflection film having a thickness of 95 nm. A resist composition Ar-1 was applied thereon, and baked at 100 ° C. for 60 seconds to form a resist film having a thickness of 100 nm. The obtained wafer was subjected to an exposure mask (6% HTPSM, XT1700i, NA1.20, C-Quad, outer sigma 0.981, inner sigma 0.895, XY deflection manufactured by ASML) using an ArF excimer laser immersion scanner.
  • an exposure mask 6 HTPSM, XT1700i, NA1.20, C-Quad, outer sigma 0.981, inner sigma 0.895, XY deflection manufactured by ASML
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 112.5 nm. Thereafter, heating is performed at 100 ° C. for 60 seconds, and a 2.38 wt% TMAH aqueous solution is padded for 30 seconds to develop, padded with pure water for 30 seconds, rinsed, and then the wafer is rotated at a rotational speed of 2000 rpm for 30 seconds. Heated at 100 ° C. for 60 seconds, coated with surface treating agent S-1 at a rotation speed of 1500 rpm, baked at 100 ° C. for 60 seconds, developed by paddle the developer shown in Table 6 for 30 seconds, After the paddle was rinsed for 30 seconds with the rinse liquid described in No.
  • the wafer was rotated for 30 seconds at a rotational speed of 2000 rpm, and baked at 90 ° C. for 60 seconds, whereby a 1: 1 line and line with a line width of 37.5 nm was obtained. A space resist pattern was obtained.
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 112.5 nm. Thereafter, heating is performed at 100 ° C. for 60 seconds, and a 2.38 wt% TMAH aqueous solution is padded for 30 seconds to develop, padded with pure water for 30 seconds, rinsed, and then the wafer is rotated at a rotational speed of 2000 rpm for 30 seconds. Heat at 100 ° C. for 60 seconds, apply the surface treatment agent S-2 at a rotation speed of 1500 rpm, perform baking at 100 ° C. for 60 seconds, paddle the stripping solution shown in Table 6 for 30 seconds, and rotate at 2000 rpm. The wafer was rotated for 30 seconds.
  • Examples 17, 25, 26, 39, 40 A 1: 1 line and space resist pattern with a line width of 37.5 nm was obtained in the same manner as in the method of Example 16 except that the resist, surface treating agent and conditions shown in Table 6 were employed.
  • Examples 18 to 24, 27, 38, Comparative Example 2 A 1 line and space resist pattern with a line width of 37.5 nm was obtained in the same manner as in Example 15 except that the resist, surface treating agent and conditions shown in Table 6 were employed.
  • Example 28 An organic antireflection film ARC29SR (manufactured by Nissan Chemical Industries, Ltd.) was applied onto a 12-inch diameter silicon wafer, and baked at 205 ° C. for 60 seconds to form an antireflection film having a thickness of 95 nm. A resist composition Ar-1 was applied thereon, and baked at 100 ° C. for 60 seconds to form a resist film having a thickness of 100 nm. The obtained wafer was subjected to an exposure mask (6% HTPSM, XT1700i, NA1.20, C-Quad, outer sigma 0.981, inner sigma 0.895, XY deflection manufactured by ASML) using an ArF excimer laser immersion scanner.
  • an exposure mask 6 HTPSM, XT1700i, NA1.20, C-Quad, outer sigma 0.981, inner sigma 0.895, XY deflection manufactured by ASML
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 75 nm.
  • the mouth was opened and left in a desiccator (23 ° C., 1 atm) for 1 hour together with a bottle containing 100 g of the surface treatment agent S-10.
  • baking was performed at 100 ° C. for 60 seconds, and the developer shown in Table 6 was paddled for 30 seconds for development, padded with a rinse solution shown in Table 6 for 30 seconds, rinsed, and then rotated at 2000 rpm.
  • the wafer was rotated for 2 seconds and baked at 90 ° C. for 60 seconds to obtain a 1: 1 line and space resist pattern with a line width of 75 nm.
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 112.5 nm. Thereafter, heating is performed at 100 ° C. for 60 seconds, and a 2.38 wt% TMAH aqueous solution is padded for 30 seconds to develop, padded with pure water for 30 seconds, rinsed, and then the wafer is rotated at a rotational speed of 2000 rpm for 30 seconds. After heating at 100 ° C. for 60 seconds, the mouth was opened and left in a desiccator (23 ° C., 1 atm) for 1 hour together with a bottle containing 100 g of the surface treatment agent S-10. Further, baking was performed at 100 ° C.
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 75 nm. Thereafter, heating is performed at 100 ° C. for 60 seconds, and the surface treatment agent S-10 is applied at a rotation speed of 1500 rpm, and the developer shown in Table 6 is paddled for 30 seconds to develop, and the rinse solution shown in Table 6 is used for 30 seconds. After paddling and rinsing, the wafer was rotated at 2000 rpm for 30 seconds and baked at 90 ° C. for 60 seconds to obtain a 1: 1 line and space resist pattern with a line width of 75 nm.
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 75 nm. Thereafter, heating is performed at 100 ° C. for 60 seconds, the surface treatment agent S-10 is applied at a rotation speed of 1500 rpm, baking is performed at 100 ° C. for 60 seconds, and the developer described in Table 6 is developed by paddle for 30 seconds. The wafer was rotated at 2000 rpm for 30 seconds and baked at 90 ° C. for 60 seconds to obtain a 1: 1 line and space resist pattern having a line width of 75 nm.
  • Example 33 An organic antireflection film ARC29A (manufactured by Nissan Chemical Co., Ltd.) was applied on an 8-inch diameter silicon wafer, and baked at 205 ° C. for 60 seconds to form an antireflection film having a thickness of 84 nm.
  • a resist composition Ar-1 was applied thereon and baked at 100 ° C. for 60 seconds to form a first resist film having a thickness of 100 nm.
  • a resist composition Ar-14 was further applied thereon, and baked at 100 ° C. for 60 seconds to form a second resist film having a thickness of 100 nm.
  • PES5500 / 1100 ArF excimer laser scanner
  • PAS5500 / 1100 manufactured by ASML, NA0.75, Dipole, outer sigma 0.89, inner sigma 0.65.
  • pattern exposure was performed with an exposure amount at which the line width of the line pattern was 112.5 nm. Thereafter, heating is performed at 100 ° C. for 60 seconds, and a 2.38 wt% TMAH aqueous solution is padded for 30 seconds to develop, padded with pure water for 30 seconds, rinsed, and then the wafer is rotated at a rotational speed of 2000 rpm for 30 seconds.
  • the wafer was rotated for 30 seconds at a rotation speed of 2000 rpm, developed with the developer listed in Table 6 for 30 seconds, and then paddled with the rinse solution listed in Table 6 for 30 seconds. After rinsing, the wafer was rotated at 2000 rpm for 30 seconds and baked at 90 ° C. for 60 seconds to obtain a 1: 1 line and space resist pattern having a line width of 37.5 nm.
  • the surface treating agent was used in an amount that sufficiently covers the resist film and the first pattern on the substrate.
  • PB heating before exposure
  • PEB heating after exposure.
  • EEP represents ethyl-3-ethoxypropionate.
  • Examples 1 to 14, 29, 31, 32, and 35 to 37 in which the first pattern forming method of the present invention was performed were compared with Comparative Example 1 in which the step (4A) was not performed.
  • the flatness of the pattern top portion is excellent.
  • Examples 1 to 14 using the surface treatment agent containing a solvent are particularly excellent in the flatness of the pattern top portion.
  • the pattern top portion was compared with Comparative Example 2 in which the step (4B) was not performed. It can be seen that the flatness of the film and the pattern persistence in double development are excellent. Further, it can be seen that Examples 15 to 28 using the surface treating agent containing a solvent are particularly excellent in the flatness of the pattern top portion and the pattern remaining property in double development.
  • a pattern can be formed in the following manner.
  • a nitrogen-containing basic compound such as trioctylamine
  • an ArF excimer laser is used.
  • a pattern forming method capable of forming a pattern excellent in flatness of a pattern top portion and pattern survivability during double development, a surface treatment agent used therefor, an electronic device manufacturing method, and an electronic device. be able to.

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Abstract

La présente invention concerne un procédé de formation de motif au moyen duquel un motif présentant une excellente planéité d'une partie supérieure de motif et une durabilité de motif à double développement peut être formé, le procédé comprenant les étapes successives suivantes : (1) une étape de formation de film sensible aux rayons actiniques ou sensible à un rayonnement à partir d'une composition de résine sensible aux rayons actiniques ou sensible à un rayonnement contenant une résine qui produit des groupements polaires lorsqu'elle est décomposée au moyen d'une exposition à un acide ; (2) une étape d'exposition du film sensible aux rayons actiniques ou sensible à un rayonnement ; (4A) une étape d'exposition du film sensible aux rayons actiniques ou sensible à un rayonnement à un agent de traitement de surface contenant un composé qui interagit avec les groupements polaires contenus dans la résine après exposition ; et (5A) une étape de développement du film sensible aux rayons actiniques ou sensible à un rayonnement à l'aide d'une solution de développement contenant un solvant organique. L'invention concerne également un agent de traitement de surface utilisé dans le procédé de formation de motif, un procédé de production d'un dispositif électronique, et un dispositif électronique.
PCT/JP2014/069211 2013-08-02 2014-07-18 Procédé de formation de motif et agent de traitement de surface utilisé dans celui-ci, procédé de production de dispositif électronique, et dispositif électronique WO2015016089A1 (fr)

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WO2016203834A1 (fr) * 2015-06-19 2016-12-22 富士フイルム株式会社 Procédé de formation de motif et procédé de production de dispositif électronique
CN110850681A (zh) * 2018-08-21 2020-02-28 财团法人工业技术研究院 感光胶组合物、感光导电胶组合物及包含感光导电胶组合物的电子装置
US10866514B2 (en) * 2016-09-20 2020-12-15 Tokyo Ohka Kogyo Co., Ltd. Resist composition and method of forming resist pattern
WO2022212269A1 (fr) 2021-03-29 2022-10-06 Illumina, Inc. Procédés améliorés de préparation de banques

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JP6159746B2 (ja) * 2014-02-28 2017-07-05 富士フイルム株式会社 パターン形成方法、処理剤、電子デバイス及びその製造方法
JP6539499B2 (ja) * 2015-05-27 2019-07-03 東京応化工業株式会社 レジストパターン形成方法
JP2018124298A (ja) * 2015-05-29 2018-08-09 富士フイルム株式会社 パターン形成方法及び電子デバイスの製造方法
JP6540379B2 (ja) * 2015-08-27 2019-07-10 Jsr株式会社 パターン形成方法
JP6757623B2 (ja) * 2016-08-10 2020-09-23 東京応化工業株式会社 レジストパターン厚肉化用ポリマー組成物、及びレジストパターン形成方法

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