WO2015005265A1 - 着色組成物、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子、および画像表示装置 - Google Patents
着色組成物、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子、および画像表示装置 Download PDFInfo
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- WO2015005265A1 WO2015005265A1 PCT/JP2014/068023 JP2014068023W WO2015005265A1 WO 2015005265 A1 WO2015005265 A1 WO 2015005265A1 JP 2014068023 W JP2014068023 W JP 2014068023W WO 2015005265 A1 WO2015005265 A1 WO 2015005265A1
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- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
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- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
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- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
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- 125000001042 pteridinyl group Chemical group N1=C(N=CC2=NC=CN=C12)* 0.000 description 1
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- 125000004309 pyranyl group Chemical group O1C(C=CC=C1)* 0.000 description 1
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- GZTPJDLYPMPRDF-UHFFFAOYSA-N pyrrolo[3,2-c]pyrazole Chemical compound N1=NC2=CC=NC2=C1 GZTPJDLYPMPRDF-UHFFFAOYSA-N 0.000 description 1
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- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
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- XMVJITFPVVRMHC-UHFFFAOYSA-N roxarsone Chemical group OC1=CC=C([As](O)(O)=O)C=C1[N+]([O-])=O XMVJITFPVVRMHC-UHFFFAOYSA-N 0.000 description 1
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- 238000004062 sedimentation Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- 125000003107 substituted aryl group Chemical group 0.000 description 1
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- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 description 1
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- 230000003746 surface roughness Effects 0.000 description 1
- 125000006318 tert-butyl amino group Chemical group [H]N(*)C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001935 tetracenyl group Chemical group C1(=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C12)* 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- 125000004627 thianthrenyl group Chemical group C1(=CC=CC=2SC3=CC=CC=C3SC12)* 0.000 description 1
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- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
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- 125000005424 tosyloxy group Chemical group S(=O)(=O)(C1=CC=C(C)C=C1)O* 0.000 description 1
- OVTCUIZCVUGJHS-VQHVLOKHSA-N trans-dipyrrin Chemical compound C=1C=CNC=1/C=C1\C=CC=N1 OVTCUIZCVUGJHS-VQHVLOKHSA-N 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- 150000003628 tricarboxylic acids Chemical class 0.000 description 1
- QAEDZJGFFMLHHQ-UHFFFAOYSA-N trifluoroacetic anhydride Chemical compound FC(F)(F)C(=O)OC(=O)C(F)(F)F QAEDZJGFFMLHHQ-UHFFFAOYSA-N 0.000 description 1
- 125000004044 trifluoroacetyl group Chemical group FC(C(=O)*)(F)F 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- 125000003960 triphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C3=CC=CC=C3C12)* 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
- 125000003774 valeryl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 125000004933 β-carbolinyl group Chemical group C1(=NC=CC=2C3=CC=CC=C3NC12)* 0.000 description 1
Classifications
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
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- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
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- C09B11/00—Diaryl- or thriarylmethane dyes
- C09B11/04—Diaryl- or thriarylmethane dyes derived from triarylmethanes, i.e. central C-atom is substituted by amino, cyano, alkyl
- C09B11/10—Amino derivatives of triarylmethanes
- C09B11/12—Amino derivatives of triarylmethanes without any OH group bound to an aryl nucleus
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- C09B11/00—Diaryl- or thriarylmethane dyes
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
- C09B23/02—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups
- C09B23/04—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups one >CH- group, e.g. cyanines, isocyanines, pseudocyanines
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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- C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
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- C09B23/08—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups more than three >CH- groups, e.g. polycarbocyanines
- C09B23/083—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups more than three >CH- groups, e.g. polycarbocyanines five >CH- groups
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B57/00—Other synthetic dyes of known constitution
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B57/00—Other synthetic dyes of known constitution
- C09B57/007—Squaraine dyes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/008—Dyes containing a substituent, which contains a silicium atom
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/02—Dyestuff salts, e.g. salts of acid dyes with basic dyes
- C09B69/06—Dyestuff salts, e.g. salts of acid dyes with basic dyes of cationic dyes with organic acids or with inorganic complex acids
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/10—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds
- C09B69/103—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds containing a diaryl- or triarylmethane dye
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/10—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds
- C09B69/105—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds containing a methine or polymethine dye
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/10—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds
- C09B69/109—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds containing other specific dyes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
- C09K11/06—Luminescent, e.g. electroluminescent, chemiluminescent materials containing organic luminescent materials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/36—Imagewise removal not covered by groups G03F7/30 - G03F7/34, e.g. using gas streams, using plasma
-
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2211/00—Chemical nature of organic luminescent or tenebrescent compounds
- C09K2211/10—Non-macromolecular compounds
- C09K2211/1018—Heterocyclic compounds
- C09K2211/1022—Heterocyclic compounds bridged by heteroatoms, e.g. N, P, Si or B
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2211/00—Chemical nature of organic luminescent or tenebrescent compounds
- C09K2211/10—Non-macromolecular compounds
- C09K2211/1018—Heterocyclic compounds
- C09K2211/1025—Heterocyclic compounds characterised by ligands
- C09K2211/1029—Heterocyclic compounds characterised by ligands containing one nitrogen atom as the heteroatom
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2211/00—Chemical nature of organic luminescent or tenebrescent compounds
- C09K2211/18—Metal complexes
- C09K2211/188—Metal complexes of other metals not provided for in one of the previous groups
Definitions
- the present invention relates to a colored composition, a cured film, a color filter, a method for producing a color filter, a solid-state imaging device, and an image display device, which are suitable for producing a color filter used for liquid crystal display devices and solid-state imaging devices.
- One of the methods for producing color filters used in liquid crystal display devices and solid-state imaging devices is the pigment dispersion method.
- a colored photosensitive composition in which a pigment is dispersed in various photosensitive compositions There is a method of manufacturing a color filter by a photolithography method using an object (Patent Documents 1 to 3). That is, the colored photosensitive composition is coated on a substrate using a spin coater, a roll coater or the like, dried to form a coated film, and the coated film is pattern-exposed and developed to obtain colored pixels. This operation is repeated for the desired hue to produce a color filter.
- the above method is stable against light and heat because it uses a pigment, and because the patterning is performed by photolithography, the positional accuracy is sufficiently ensured, and a method suitable for producing a color filter for a color display, etc. It has been widely used.
- Dyes are generally inferior in light resistance and heat resistance to pigments.
- ITO indium tin oxide
- the dye tends to suppress the radical polymerization reaction, and therefore, in a system using radical polymerization as a curing means, it is difficult to design a colored photosensitive composition.
- the following points become problems.
- the colored layer is required to be a thin film of 1 ⁇ m or less. Therefore, it is necessary to add a large amount of dye in the curable composition to obtain the desired absorption, resulting in the aforementioned problems.
- Japanese Patent Application Publication No. 2005-316012 Patent No. 3309514 Japanese Patent Application Laid-Open No. 06-208021
- Unexamined-Japanese-Patent No. 2006-258916 JP 2012-32754 A Japanese Patent Application Publication No. 2007-138051 Patent No. 3736221 (Unexamined-Japanese-Patent No. 2000-162429) JP 2003-246935 A
- the method of obtaining the dye polymer is obtained by polymerizing a dye having a polymerizable group exclusively, and the molecular weight and the composition of the obtained dye tend to vary. For this reason, in the prior art, the dye has been decomposed in the excessive heating process.
- the present invention has been made in view of such circumstances, and an object thereof is to provide a colored composition excellent in heat resistance, a cured film, a color filter, a method of manufacturing a color filter, a solid-state imaging device and an image display device. .
- the present inventors have found that a coloring composition excellent in heat resistance can be obtained by using a coloring composition containing 2 to 8 dyes, thereby completing the present invention. It reached. Specifically, the above problems are solved by the following means ⁇ 1>, preferably by ⁇ 2> to ⁇ 17>.
- the cation site which constitutes dye residue D in ⁇ 5> general formula (I) is selected from dipyrromethene dye, triarylmethane dye, xanthene dye, cyanine dye and squarylium dye, of ⁇ 1> to ⁇ 4>
- General formula (I) is a sulfonate anion, a sulfonyl imide anion, a bis (alkyl sulfonyl) imide anion, a tris (alkyl sulfonyl) methide anion, a carboxylate anion, a tetra aryl
- the coloring composition as described in ⁇ 3> selected from borate anion, BF 4 ⁇ , PF 6 ⁇ , and SbF 6 ⁇ .
- ⁇ 7> The colored composition according to any one of ⁇ 1> to ⁇ 6>, wherein at least one of the substituents R in the general formula (I) is an acid group.
- ⁇ 13-1> The colored composition according to any one of ⁇ 1> to ⁇ 12>, wherein at least one of the substituents R in the general formula (I) is a polymerizable group.
- ⁇ 15> A cured film obtained by curing the colored composition according to any one of ⁇ 1> to ⁇ 14>.
- ⁇ 16> A color filter comprising the coloring composition according to any one of ⁇ 1> to ⁇ 14>.
- ⁇ 18> A process for forming a colored composition layer by applying the colored composition according to any one of ⁇ 1> to ⁇ 14> on a support and curing to form a colored layer, and on the colored layer
- How to make a color filter including: The solid-state image sensor or image display apparatus which have a color filter manufactured by the manufacturing method of the color filter as described in ⁇ 19> ⁇ 16>, or the color filter as described in ⁇ 17> or ⁇ 18>.
- the notations not describing substitution and non-substitution include those having no substituent and those having a substituent.
- the "alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
- active light or “radiation” in the present specification means, for example, a bright line spectrum of a mercury lamp, far ultraviolet light represented by an excimer laser, extreme ultraviolet (EUV light), X-ray, electron beam and the like. . In the present invention, light means actinic rays or radiation.
- the "exposure” in the present specification is not only exposure by far ultraviolet rays represented by a mercury lamp or excimer laser, X-rays, EUV light, etc., but also drawing by particle beams such as electron beams or ion beams Also included in the exposure.
- a numerical range represented using “to” means a range including the numerical values described before and after “to” as the lower limit value and the upper limit value.
- the total solid content refers to the total mass of the components excluding the solvent from the total composition of the coloring composition.
- (meth) acrylate represents both or either of acrylate and methacrylate
- (meth) acrylic represents both or either of acrylic and methacryl
- ( ) Acryloyl represents both or either of acryloyl and methacryloyl.
- a monomer as used herein is distinguished from an oligomer and a polymer and refers to a compound having a weight average molecular weight of 2,000 or less.
- the polymerizable compound refers to a compound having a polymerizable functional group, and may be a monomer or a polymer.
- the polymerizable functional group refers to a group involved in the polymerization reaction.
- process is included in the term if the intended function of the process is achieved, even if it can not be clearly distinguished from other processes, not only the independent process. .
- the coloring composition of the present invention is characterized by containing (A) a dye represented by the following general formula (I) and (B) a polymerizable compound.
- General formula (I) (R) m- Q-(D) n
- Q represents a (m + n) -valent linking group
- R represents a substituent
- D represents a dye residue
- m represents an integer of 0 to 6
- n Represents an integer of 2 to 8
- (m + n) represents an integer of 2 to 8.
- m is 2 or more, a plurality of R may be different from each other, and when n is 2 or more, a plurality of D May be different from each other)
- the present invention can solve the following problems. Needless to say, it is not an essential condition of the coloring composition of the present invention that all of the following problems can be solved.
- First it is possible to provide a coloring composition in which the decomposition of the dye is suppressed (heat resistance) even in the excessive heating process, and the color transfer to another pattern is suppressed.
- Second it is possible to provide a colored composition capable of forming a colored pattern excellent in pattern defects and pattern linearity even when forming a fine pattern by photolithography.
- the fourth is to provide a cured film having excellent color characteristics and a color filter provided with the cured film.
- 5th can provide the pattern formation method which can form the coloring pattern excellent in the color characteristic, and the manufacturing method of a color filter.
- Sixth it is possible to provide a solid-state imaging device and an image display device (such as a liquid crystal display device or an organic EL display device) provided with a color filter having excellent color characteristics.
- heat resistance is improved by linking a plurality of dye residues, and curing and development are suppressed by suppressing excessive aggregation of dye residues. It is presumed that the infiltration of the solution is uniform.
- the (A) dye has less variation in molecular weight, which makes it easier to solve the above-mentioned problems. Such a problem is likely to occur in dyes, but the present invention can be preferably adopted even when using pigments, particularly when using pigments having performance similar to dyes.
- the (B) polymerizable compound is appropriately selected depending on the use and the production method.
- the coloring composition of this invention contains (C) pigments other than (A) pigment
- the colored composition of the present invention comprises (A) a dye, (B) a polymerizable compound, (C) a pigment, (D) a photopolymerization initiator, (F) an alkali Compositions comprising soluble resins are preferred.
- dye of this invention, (B) polymeric compound, (C) pigment, and (D) photoinitiator is preferable.
- components such as surfactants and solvents may be included. Each of these components may contain only one type, or two or more types.
- components contained in the coloring composition of the present invention will be described in detail.
- composition of the present invention contains at least one dye represented by the following general formula (I) (hereinafter sometimes simply referred to as "pigment (A)").
- the dye (A) is an oligomer having a partial structure having a dye skeleton whose maximum absorption wavelength is in the range of 400 nm to 780 nm in its molecular structure, and is a dimer to an octamer. Encompass any structure.
- the dye (A) functions as, for example, a coloring agent in the coloring composition of the present invention.
- Q in the general formula (I) represents a (m + n) -valent linking group, and is preferably a trivalent to hexavalent linking group.
- the mass of the moiety represented by Q in one dye molecule represented by the general formula (I) is preferably 50 to 2,000, more preferably 200 to 1,000, and 250 to 600. More preferable.
- the (m + n) -valent linking group represented by Q is preferably a linking group represented by the following Formula (Q-1) or (Q-2).
- General formula (Q-1) (In the general formula (Q-1), R 1 to R 4 each independently represent a linking group or a substituent, provided that at least two of R 1 to R 4 are linking groups.)
- the substituent represented by R 1 to R 4 is an alkyl group having 1 to 10 carbon atoms (preferably an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms), or 6 to 20 carbon atoms
- An aryl group preferably an aryl group having 6 to 14 carbon atoms, more preferably an aryl group having 6 to 10 carbon atoms
- an alkyl group having 1 to 10 carbon atoms is more preferable
- a methyl group, an ethyl group or a propyl group is preferable. More preferable.
- the linking group represented by R 1 to R 4 is an alkylene group (preferably a linear or branched alkylene group, more preferably-(CH 2 ) n 1-(n 1 is preferably an integer of 1 to 3). ), -O-, -CO-, -SO 2 -or -NRa- (wherein Ra is an alkyl group having 1 to 5 carbon atoms or a hydrogen atom), and a combination of two or more of these The group is more preferable, and the group consisting of a combination of two or more of an alkylene group, -O-, -CO- and -NRa- is more preferable.
- the number of atoms connecting R or D and central C is preferably 1 to 15, and more preferably 1 to 10, respectively.
- the number of atoms connecting R or D to central C is five.
- a 1 to A 4 each independently represent a carbon atom or a nitrogen atom.
- the six-membered ring including A 1 to A 4 in the general formula (Q-2) includes an aliphatic ring, a heterocyclic ring and a benzene ring, and a heterocyclic ring and a benzene ring are preferable.
- the linking group represented by R 11 to R 16 has the same meaning as the linking group represented by R 1 to R 4 in formula (Q-1), and the preferred range is also the same.
- (1), (7), (10), (13) to (16), (18), (20) and (22) are preferable.
- R's in general formula (I) each independently represent a substituent, and when m is 2 or more, plural R's may be different from each other.
- a substituent represented by R for example, a halogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an alkynyl group, an aryl group, a heterocyclic group, a cyano group, a hydroxyl group, a nitro group, a carboxyl group , Alkoxy group, aryloxy group, silyloxy group, heterocyclic oxy group, acyloxy group, carbamoyloxy group, amino group (including alkylamino group and anilino group), acylamino group, aminocarbonylamino group, alkoxycarbonylamino group, aryl Oxycarbonylamino group, sulfamoylamino group, alkyl or arylsulf
- a halogen atom eg, fluorine atom, chlorine atom, bromine atom, iodine atom
- linear or branched alkyl group linear or branched substituted or unsubstituted alkyl group, preferably alkyl group having 1 to 30 carbon atoms
- alkyl group having 1 to 30 carbon atoms For example, methyl, ethyl, n-propyl, isopropyl, tert-butyl, n-octyl, 2-chloroethyl, 2-cyanoethyl, 2-ethylhexyl
- a cycloalkyl group preferably having a carbon number of 3 to 30
- An unsubstituted cycloalkyl group such as cyclohexyl and cyclopentyl can be mentioned, and a polycycloalkyl group such as a bicycloalkyl group (preferably a substituted or unsubstituted bicycloal
- a linear or branched alkenyl group (a linear or branched substituted or unsubstituted alkenyl group, preferably an alkenyl group having a carbon number of 2 to 30, for example, vinyl, allyl, prenyl, geranyl, oleyl), cycloalkenyl Group (preferably, a substituted or unsubstituted cycloalkenyl group having a carbon number of 3 to 30, and examples thereof include 2-cyclopenten-1-yl and 2-cyclohexen-1-yl; a polycycloalkenyl group such as bicyclo)
- An alkenyl group (preferably a substituted or unsubstituted bicycloalkenyl group having a carbon number of 5 to 30), for example, bicyclo [2,2,1] hept-2-en-1-yl, bicyclo [2,2,2] Octo-2-en-4-yl) or a tricycloalkenyl group, particularly preferably a monocyclic cycl
- An aryl group (preferably a substituted or unsubstituted aryl group having a carbon number of 6 to 30, for example, phenyl, p-tolyl, naphthyl, m-chlorophenyl, o-hexadecanoylaminophenyl), a heterocyclic group (preferably 5 to 6) 7-membered substituted or unsubstituted, saturated or unsaturated, aromatic or non-aromatic, monocyclic or fused heterocyclic group, more preferably, the ring constituting atoms are selected from carbon atoms, nitrogen atoms and sulfur atoms And a heterocyclic group having at least one hetero atom of any of nitrogen atom, oxygen atom and sulfur atom, more preferably a 5- or 6-membered aromatic heterocyclic group having 3 to 30 carbon atoms.
- An alkoxy group preferably, a substituted or unsubstituted alkoxy group having a carbon number of 1 to 30; for example, methoxy, ethoxy, isopropoxy, tert-butoxy, n-octyloxy, 2-methoxyethoxy
- an aryloxy group preferably Is a substituted or unsubstituted aryloxy group having a carbon number of 6 to 30, and examples thereof include phenoxy, 2-methylphenoxy, 2,4-di-tert-amylphenoxy, 4-tert-butylphenoxy, 3-nitrophenoxy, 2-tetradecanoylaminophenoxy
- silyloxy group preferably a silyloxy group having 3 to 20 carbon atoms, for example, trimethylsilyloxy, tert-butyldimethylsilyloxy
- heterocyclic oxy group preferably a carbon number of 2 to 20 30 substituted or unsubstituted heterocyclic oxy groups , Hetero
- An acyloxy group (preferably a formyloxy group, a substituted or unsubstituted alkylcarbonyloxy group having 2 to 30 carbon atoms, a substituted or unsubstituted arylcarbonyloxy group having 6 to 30 carbon atoms, for example, formyloxy, acetyloxy , Pivaloyloxy, stearoyloxy, benzoyloxy, p-methoxyphenylcarbonyloxy), carbamoyloxy group (preferably, a substituted or unsubstituted carbamoyloxy group having 1 to 30 carbon atoms, for example, N, N-dimethylcarbamoyloxy, N, N-diethylcarbamoyloxy, morpholinocarbonyloxy, N, N-di-n-octylaminocarbonyloxy, Nn-octylcarbamoyloxy), alkoxycarbonyloxy group (preferably having a carbon number
- Amino group preferably, amino group, substituted or unsubstituted alkylamino group having 1 to 30 carbon atoms, substituted or unsubstituted arylamino group having 6 to 30 carbon atoms, heterocyclic amino group having 0 to 30 carbon atoms
- amino, methylamino, dimethylamino, anilino, N-methyl-anilino, diphenylamino, N-1,3,5-triazin-2-ylamino an acylamino group (preferably a formylamino group, carbon number) 1-30 substituted or unsubstituted alkylcarbonylamino group, substituted or unsubstituted arylcarbonylamino group having 6 to 30 carbon atoms, and examples thereof include formylamino, acetylamino, pivaloylamino, lauroylamino, benzoylamino, and the like.
- amy A carbonylamino group preferably, a substituted or unsubstituted aminocarbonylamino group having 1 to 30 carbon atoms, for example, carbamoylamino, N, N-dimethylaminocarbonylamino, N, N-diethylaminocarbonylamino, morpholinocarbonylamino
- An alkoxycarbonylamino group preferably a substituted or unsubstituted alkoxycarbonylamino group having a carbon number of 2 to 30, and examples thereof include methoxycarbonylamino, ethoxycarbonylamino, tert-butoxycarbonylamino, n-octadecyloxycarbonylamino, N-methyl- Methoxycarbonylamino),
- An aryloxycarbonylamino group (preferably, a substituted or unsubstituted aryloxycarbonylamino group having 7 to 30 carbon atoms, for example, phenoxycarbonylamino, p-chlorophenoxycarbonylamino, mn-octyloxyphenoxycarbonylamino)
- a sulfamoylamino group (preferably a substituted or unsubstituted sulfamoylamino group having 0 to 30 carbon atoms, for example, sulfamoylamino, N, N-dimethylaminosulfonylamino, Nn-octylamino A sulfonylamino), an alkyl or arylsulfonylamino group (preferably a substituted or unsubstituted alkylsulfonylamino group having 1 to 30 carbon atoms, a substituted or unsubstituted aryls
- alkylthio group preferably a substituted or unsubstituted alkylthio group having 1 to 30 carbon atoms, for example, methylthio, ethylthio, n-hexadecylthio
- an arylthio group preferably a substituted or unsubstituted arylthio group having 6 to 30 carbon atoms
- heterocyclic thio group preferably a substituted or unsubstituted heterocyclic thio group having a carbon number of 2 to 30
- the heterocyclic part is the aforementioned heterocyclic group
- the heterocyclic moiety described in is preferred, for example, 2-benzothiazolylthio, 1-phenyltetrazol-5-ylthio), a sulfamoyl group (preferably a substituted or unsubstituted sulfamo
- An alkyl or arylsulfinyl group (preferably a substituted or unsubstituted alkylsulfinyl group having 1 to 30 carbon atoms, a 6 to 30 substituted or unsubstituted arylsulfinyl group, for example, methylsulfinyl, ethylsulfinyl, phenylsulfinyl, p-methylphenylsulfinyl), an alkyl or arylsulfonyl group (preferably, a substituted or unsubstituted alkylsulfonyl group having 1 to 30 carbon atoms, a 6 to 30 substituted or unsubstituted arylsulfonyl group, for example, methylsulfonyl) , Ethylsulfonyl, phenylsulfonyl, p-methylphenylsulfonyl), an acyl group (preferably a for
- An alkoxycarbonyl group (preferably a substituted or unsubstituted alkoxycarbonyl group having a carbon number of 2 to 30, for example, methoxycarbonyl, ethoxycarbonyl, tert-butoxycarbonyl, n-octadecyloxycarbonyl), a carbamoyl group (preferably, a carbon number 1 to 30 substituted or unsubstituted carbamoyl, such as carbamoyl, N-methylcarbamoyl, N, N-dimethylcarbamoyl, N, N-di-n-octylcarbamoyl, N- (methylsulfonyl) carbamoyl), aryl or hetero
- a ring azo group (preferably a substituted or unsubstituted arylazo group having 6 to 30 carbon atoms, a substituted or unsubstituted heterocyclic azo group having 3 to 30 carbon atoms (the hetero ring
- a phosphinyl oxy group (preferably a substituted or unsubstituted phosphinyl oxy group having 2 to 30 carbon atoms, for example, diphenoxy phosphinyl oxy, dioctyl oxy phosphinyl oxy), a phosphinyl amino group (for example Preferably, it is a substituted or unsubstituted phosphinylamino group having 2 to 30 carbon atoms, for example, dimethoxyphosphinylamino, dimethylaminophosphinylamino), a silyl group (preferably having a carbon number of 3 to 30) Or unsubstituted silyl groups such as trimethylsilyl, tert-butyldimethylsilyl, phenyldimethylsilyl), and phosphono groups (eg, PO 3 H 2 ).
- those having a hydrogen atom may have a hydrogen atom portion in the functional group substituted by any of the above groups.
- the functional group that can be introduced as a substituent include an alkylcarbonylaminosulfonyl group, an arylcarbonylaminosulfonyl group, an alkylsulfonylaminocarbonyl group, and an arylsulfonylaminocarbonyl group, and specifically, methylsulfonylaminocarbonyl, p-Methylphenylsulfonylaminocarbonyl, acetylaminosulfonyl, benzoylaminosulfonyl group can be mentioned.
- R is preferably an acid group or a polymerizable group.
- a radical, an acid, a known polymerizable group crosslinkable by heat can be used.
- a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetane group), a methylol group And the like and in particular, a group containing an ethylenically unsaturated bond is preferable, a (meth) acryloyl group is more preferable, and (meth) derived from glycidyl (meth) acrylate and 3,4-epoxy-cyclohexylmethyl (meth) acrylate An acryloyl group is particularly preferred.
- one or two R as a polymerizable group are preferable, and one is more preferable.
- the number of polymerizable groups in such a range, color loss can be suppressed more effectively.
- the dye residue having a cation site and an anion site is included in the molecule, the effect is significantly exerted.
- the acid group is preferably a carboxyl group, a sulfo group or a phosphoric acid group, more preferably a carboxyl group.
- R as the acid group is preferably 1 to 3, and more preferably 1 or 2.
- n represents an integer of 2 to 8, preferably 2 to 6, and more preferably 2 to 5.
- m + n represents an integer of 2 to 8, preferably an integer of 2 to 7, and more preferably an integer of 3 to 6.
- D each represents a dye residue.
- the dye residue (hereinafter also referred to as “dye structure”) is not particularly limited as long as it has a maximum absorption wavelength in the range of 400 nm to 780 nm, but as the dye residue, a cation site and a counter anion It is preferable that it is the pigment
- the dye residue D in the dye (A) is not particularly limited as long as it has a maximum absorption wavelength in the range of 400 nm to 780 nm, and various dyes including known dye structures can be applied.
- known dye structures include dipyrromethene dyes, carbonium dyes (diphenylmethane dyes, triarylmethane dyes, xanthene dyes, acridine dyes, etc.), polymethine dyes (oxonol dyes, merocyanine dyes, arylidene dyes, styryl dyes, cyanine dyes, squarylium) Dyes, croconium dyes and the like), subphthalocyanine colors, and dye structures derived from dyes selected from those metal complex dyes can be mentioned.
- the dye residue used in the present invention may have a cation site and an anion site in the dye residue, or may be composed of a cation site and a counter anion.
- the dye residue is preferably composed of a cation site and a counter anion.
- the dye residue is composed of the cation site and the counter anion, so that the transmittance at 450 nm can be lower and the transmittance at 550 nm can be higher.
- a dye structure derived from a dye selected from dipyrromethene dyes, caribonium dyes, and polymethine dyes is preferable from the viewpoint of color characteristics, and triarylmethane dyes, xanthene dyes, cyanine dyes, squarylium dyes, quinophthalone dyes
- the dye structure derived from a dye selected from the group consisting of phthalocyanine dyes and subphthalocyanine dyes is more preferable, and the dye structure derived from a dye selected from dipyrromethene dyes, triarylmethane dyes, xanthene dyes, cyanine dyes and squarylium dyes is more preferable.
- dye structures derived from dyes selected from xanthene dyes are preferred from the dyes selected from xanthene dyes.
- dye compounds capable of forming partial structures derived from dyes are described in detail in D in the general formula (I) of the dye (A).
- Dipyrromethene dye is a dye having a partial structure derived from a dipyrromethene dye shown below as a partial structure of a dye moiety.
- a dipyrromethene compound and a dipyrromethene metal complex compound obtained from the dipyrromethene compound and a metal or a metal compound are preferable.
- a compound having a dipyrromethene structure is referred to as a dipyrromethene compound
- a complex in which a compound having a dipyrromethene structure is coordinated to a metal or a metal compound is referred to as a dipyrromethene metal complex compound.
- a dipyrromethene metal complex compound obtained from a dipyrromethene compound represented by the following general formula (M) and a metal or a metal compound and a tautomer thereof are preferable, and among them, the following general formula as a preferable embodiment
- M dipyrromethene metal complex compound represented by the following general formula (M)
- a metal or a metal compound and a tautomer thereof are preferable, and among them, the following general formula as a preferable embodiment
- the dipyrromethene metal complex compound represented by (7) or the dipyrromethene metal complex compound represented by the following general formula (8) may be mentioned, and the dipyrromethene metal complex compound represented by the general formula (8) is most preferable.
- D in the general formula (I) in the dye (A) Is a complex (hereinafter, appropriately referred to as a “specific complex”) in which a compound (dipyrromethene compound) represented by the following general formula (M) or a tautomer thereof is coordinated to a metal or a metal compound as a dye moiety It is the pigment
- R 4 to R 10 each independently represent a hydrogen atom or a monovalent substituent. However, R 4 and R 9 do not combine with each other to form a ring.
- Examples of the monovalent substituent when R 4 to R 9 in the general formula (M) represent a monovalent substituent include the substituents listed in the section of the substituent group A described later.
- the monovalent substituent represented by R 4 to R 9 in the general formula (M) is a substitutable group, it may further have the substituent described for R 4 to R 9 If two or more substituents are present, those substituents may be the same or different.
- R 4 and R 5 in general formula (M) R 5 and R 6 , R 7 and R 8 , and R 8 and R 9 are each independently bonded to each other to be 5, 6, or 7 members Member may form a saturated or unsaturated ring. However, R 4 and R 9 do not combine with each other to form a ring.
- the formed 5-, 6-, and 7-membered rings are further substitutable groups, they may be substituted by the substituents described in R 4 to R 9 , and two or more substituents may be substituted. When substituted by groups, the substituents may be the same or different.
- R 4 and R 5 in the general formula (M), R 5 and R 6 , R 7 and R 8 , and R 8 and R 9 are each independently bonded to each other to have no substituent
- R 10 in the general formula (M) preferably represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group.
- the halogen atom, the alkyl group, the aryl group and the heterocyclic group have the same meanings as the halogen atom, the alkyl group, the aryl group and the heterocyclic group described in the section of Substituent Group A to be described later, and preferred ranges thereof are also It is similar.
- R 10 represents an alkyl group, an aryl group or a heterocyclic group
- the alkyl group, the aryl group and the heterocyclic group may be further substitutable groups.
- the substituents may be substituted by the substituents described in the section, and in the case of being substituted by two or more substituents, those substituents may be the same or different.
- the specific complex in the present invention is a complex in which the dipyrromethene compound represented by the general formula (M) described above or the tautomer thereof is coordinated to a metal or a metal compound.
- the metal or metal compound any metal or metal compound capable of forming a complex may be used, and a divalent metal atom, a divalent metal oxide, a divalent metal hydroxide, Or a divalent metal chloride is included.
- metals or metal compounds include metals such as Zn, Mg, Si, Sn, Rh, Pt, Pd, Mo, Pb, Cu, Ni, Co, Fe, etc., AlCl, InCl, FeCl, TiCl, and the like.
- metal chlorides such as SnCl 2 , SiCl 2 and GeCl 2 , metal oxides such as TiO and VO, and metal hydroxides such as Si (OH) 2 .
- VO is preferred, Zn, Mg, Si, Pt, Pd, Cu, Ni, Co or VO is more preferred, and Zn is particularly preferred.
- R 4 and R 9 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, a silyl group, a hydroxyl group, Cyano group, alkoxy group, aryloxy group, heterocyclic oxy group, acyl group, alkoxycarbonyl group, carbamoyl group, amino group, anilino group, heterocyclic amino group, carbonamide group, ureido group, imide group, alkoxycarbonylamino group , Aryloxycarbonylamino group, sulfonamide group, azo group, alkylthio group, arylthio group, heterocyclic thio group, alkylsulfonyl group, arylsulfonyl group, or phosphinoylamino group; R 5 and R 8 each represent Independently, hydrogen atom, halogen atom
- R 4 and R 9 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, a cyano group or an acyl group , Alkoxycarbonyl group, carbamoyl group, amino group, heterocyclic amino group, carbonamide group, ureido group, imide group, alkoxycarbonylamino group, aryloxycarbonylamino group, sulfonamide group, azo group, alkylsulfonyl group, arylsulfonyl R 5 and R 8 each independently represent an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, a cyano group, a nitro group, an acyl group, an alkoxycarbonyl group, an aryloxy group Carbonyl group, carbamoyl group, imide group, alkyl
- R 4 and R 9 each independently represent a hydrogen atom, an alkyl group, an aryl group, a heterocyclic group, an amino group, a heterocyclic amino group, A carbonamido group, a ureido group, an imide group, an alkoxycarbonylamino group, a sulfonamide group, an azo group, an alkylsulfonyl group, an arylsulfonyl group, or a phosphinoylamino group; and R 5 and R 8 are each independently An alkyl group, an aryl group, a heterocyclic group, a cyano group, an acyl group, an alkoxycarbonyl group, a carbamoyl group, an alkylsulfonyl group, or an arylsulfonyl group; R 6 and R 7 each independently represent a hydrogen atom or an alkyl group
- dipyrromethene metal complex compound represented by the general formula (7) or the general formula (8) described in detail below is also a particularly preferred embodiment of the dipyrromethene dye.
- Dipyrromethene Metal Complex Compound Represented by General Formula (7) One of the preferred embodiments of D in the general formula (I) in the dye (A) is a dipyrromethene metal complex compound represented by the following general formula (7) It is a pigment structure derived from.
- R 4 to R 9 each independently represent a hydrogen atom or a monovalent substituent
- R 10 represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group
- Ma represents a metal atom or a metal compound.
- X 1 represents a group capable of binding to Ma
- X 2 represents a group capable of neutralizing the charge of Ma
- X 1 and X 2 are mutually bound to be 5, 6, or 7 members together with Ma. May form a ring of However, R 4 and R 9 do not combine with each other to form a ring.
- the dipyrromethene metal complex compound represented by General formula (7) contains a tautomer.
- the site of introduction of the dipyrromethene metal complex compound represented by the general formula (7) into Q in the general formula (I) is not particularly limited, but in terms of synthetic compatibility, R 4 to R 9 Is preferably introduced at any one of the sites, more preferably at any one of R 4 , R 6 , R 7 and R 9 , and in any one of R 4 and R 9 It is further preferred to be introduced.
- dye (A) has an alkali-soluble group
- any one or two or more of R 4 to R 10 , X 1 and X 2 in the general formula (7) A method of providing an alkali-soluble group to the substituent of the above can be used.
- any one of R 4 to R 9 and X 1 is preferable, any one of R 4 , R 6 , R 7 and R 9 is more preferable, and any one of R 4 and R 9 is more preferable.
- the dipyrromethene metal complex compound represented by the general formula (7) may have a functional group other than the alkali-soluble group, as long as the effect of the present invention is not impaired.
- R 4 ⁇ R 9 medium in the general formula (7) has the same meaning as R 4 ⁇ R 9 in the general formula (M), preferable embodiments thereof are also the same.
- Ma represents a metal atom or a metal compound.
- the metal atom or metal compound may be any metal atom or metal compound capable of forming a complex, and is a divalent metal atom, a divalent metal oxide, a divalent metal hydroxide, or It contains divalent metal chlorides.
- metal oxides such as TiO, V ⁇ O, and metal hydroxides such as Si (OH) 2 .
- Fe, Zn, Mg, Si, Pt, Pd, Mo, Mn, Cu as a metal atom or a metal compound, from the viewpoints of stability of the complex, spectral characteristics, heat resistance, light resistance, and production suitability.
- R 10 represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group, preferably a hydrogen atom.
- X 1 may be any group as long as it can be bonded to Ma, and specifically, water, alcohols (eg, methanol, ethanol, propanol), etc. Chelate] ([1] Sakaguchi Takeichi and Ueno Keihei (1995: Minami-Edo), [2] (1996), [3] (1997), etc.). Among them, in terms of production, water, a carboxylic acid compound, and an alcohol are preferable, and water and a carboxylic acid compound are more preferable.
- Examples of the “group neutralizing the charge of Ma” represented by X 2 in the general formula (7) include, for example, a halogen atom, a hydroxyl group, a carboxylic acid group, a phosphoric acid group, a sulfonic acid group and the like. From the viewpoint of production, halogen atoms, hydroxyl groups, carboxylic acid groups and sulfonic acid groups are preferable, and hydroxyl groups and carboxylic acid groups are more preferable.
- X 1 and X 2 may be combined with each other to form a 5-, 6-, or 7-membered ring with Ma.
- the formed 5-, 6-, and 7-membered rings may be saturated or unsaturated rings.
- the 5-, 6-, and 7-membered rings may be composed of only carbon atoms, and form a heterocycle having at least one atom selected from nitrogen atom, oxygen atom, and / or sulfur atom. It may be done.
- R 4 to R 9 are each independently a preferred embodiment described in the explanation of R 4 to R 9
- R 10 is described in the explanation of R 10 Ma is Zn, Cu, Co, or VOO
- X 1 is water or a carboxylic acid compound
- X 2 is a hydroxyl group or a carboxylic acid group
- X 1 and X 2 are And may be bonded to each other to form a 5- or 6-membered ring.
- One of the preferable embodiments of D in the general formula (I) of the dye (A) is a dye structure derived from a dipyrromethene metal complex compound represented by the following general formula (8).
- R 11 and R 16 each independently represent an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an alkoxy group, an aryloxy group, an alkylamino group, an arylamino group or a heterocyclic amino group Represents a group.
- Each of R 12 to R 15 independently represents a hydrogen atom or a substituent.
- R 17 represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group.
- Ma represents a metal atom or a metal compound.
- X 2 and X 3 each independently represent NR (R represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an acyl group, an alkylsulfonyl group or an arylsulfonyl group), a nitrogen atom, Represents an oxygen atom or a sulfur atom.
- Y 1 and Y 2 each independently represent NR c (wherein R c represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an acyl group, an alkylsulfonyl group, or an arylsulfonyl group), nitrogen Represents an atom or a carbon atom.
- R 11 and Y 1 may be combined with each other to form a 5-, 6-, or 7-membered ring, and R 16 and Y 2 may be combined with each other to be 5, 6, or 7-membered May form a ring of X 1 represents a group capable of binding to Ma, and a represents 0, 1 or 2.
- the dipyrromethene metal complex compound represented by General formula (8) contains a tautomer.
- R 11 ⁇ R 17, X 1 The site for introducing general formula (8) dipyrromethene metal complex compound represented by the Q in the general formula (I), but unless not particularly limited to impair the effects of the present invention, R 11 ⁇ R 17, X 1, It is preferable that it is any one of Y 1 to Y 2 . Among these, it is preferable that any one of R 11 to R 16 and X 1 be introduced, and more preferably any of R 11 , R 13 , R 14 and R 16 in terms of synthetic compatibility. It is an embodiment inserted in one, more preferably an embodiment inserted in any one of R 11 and R 16 .
- the dye (A) has an alkali-soluble group
- a method for introducing an alkali-soluble group when a dye monomer or a structural unit having an alkali-soluble group is used, R 11 to R in the general formula (8) 17, X 1, Y 1 in either one or more substituents of ⁇ Y 2 it is possible to use a method to provide an alkali-soluble group.
- substituents any one of R 11 to R 16 and X 1 is preferable, any one of R 11 , R 13 , R 14 and R 16 is more preferable, and any one of R 11 and R 16 is more preferable.
- the dipyrromethene metal complex compound represented by the general formula (8) may have a functional group other than the alkali-soluble group as long as the effect of the present invention is not impaired.
- R 12 to R 15 have the same meanings as R 5 to R 8 in the general formula (M), and preferred embodiments are also the same.
- R 17 has the same meaning as R 10 in General Formula (M), and preferred embodiments are also the same.
- Ma is synonymous with Ma in General formula (7), and its preferable range is also the same.
- R 12 and R 15 are an alkoxycarbonyl group, an aryloxycarbonyl group, a carbamoyl group, an alkylsulfonyl group, an arylsulfonyl group, a nitrile group, Imido group or carbamoylsulfonyl group is preferable, and alkoxycarbonyl group, aryloxycarbonyl group, carbamoyl group, alkylsulfonyl group, nitrile group, imide group, carbamoylsulfonyl group is more preferable, alkoxycarbonyl group, aryloxycarbonyl group, carbamoyl group Groups, nitrile groups, imide groups and carbamoylsulfonyl groups are more preferred, and alkoxycarbonyl groups, aryloxycarbonyl groups and carbamoyl groups are particularly preferred.
- a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group, a substituted or unsubstituted heterocyclic group is preferable, and a substituted or unsubstituted alkyl group, further preferably a substituted or unsubstituted group Is an aryl group of
- specific examples of the more preferable alkyl group, aryl group and heterocyclic group can be the same as specific examples listed for R 6 and R 7 in the general formula (M).
- R 11 and R 16 each represent an alkyl group (preferably a linear, branched or cyclic alkyl group having 1 to 36 carbon atoms, more preferably 1 to 12 carbon atoms, Group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, hexyl group, 2-ethylhexyl group, dodecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group, 1-adamantyl group), alkenyl Group (preferably an alkenyl group having a carbon number of 2 to 24, more preferably a carbon number of 2 to 12, and examples thereof include a vinyl group, an allyl group and a 3-buten-1-yl group) and an aryl group (preferably a carbon number of 6 to 6).
- alkyl group preferably a linear, branched or cyclic alkyl group having 1 to 36 carbon
- an aryl group having 6 to 18 carbon atoms for example, a phenyl group, a naphthyl group
- a heterocyclic group preferably having a carbon number of 1 to 24, more preferably Or a heterocyclic group having 1 to 12 carbon atoms, for example, 2-thienyl group, 4-pyridyl group, 2-furyl group, 2-pyrimidinyl group, 2-pyridyl group, 2-benzothiazolyl group, 1-imidazolyl group, 1-pyrazolyl group, benzotriazol-1-yl group
- alkoxy group preferably having 1 to 36 carbon atoms, more preferably 1 to 18 carbon atoms
- examples thereof include a methoxy group, an ethoxy group, and a propyloxy group, For example, butoxy, hexyloxy, 2-ethylhexyloxy, dodecyloxy, cyclohexyloxy), aryloxy (preferably having 6 to 24 carbon atoms,
- an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an alkylamino group, an arylamino group and a heterocyclic amino group are preferable, and an alkyl group, an alkenyl group, an aryl group and a hetero
- the cyclic group is more preferable, the alkyl group, the alkenyl group and the aryl group are more preferable, and the alkyl group is particularly preferable.
- an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an alkoxy group, an aryloxy group, an alkylamino group, an arylamino group or a heterocyclic amino group represented by R 11 and R 16 is And when it is a further substitutable group, it may be substituted by a substituent described in the section of Substituent Group A described later, and when it is substituted by two or more substituents, those groups The substituents may be the same or different.
- X 2 and X 3 each independently represent NR, a nitrogen atom, an oxygen atom or a sulfur atom.
- R is a hydrogen atom, an alkyl group (preferably a linear, branched or cyclic alkyl group having 1 to 36 carbon atoms, more preferably 1 to 12 carbon atoms, and examples thereof include a methyl group, an ethyl group, Propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, hexyl group, 2-ethylhexyl group, dodecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group, 1-adamantyl group, alkenyl group (preferably carbon)
- the alkenyl group is preferably an alkenyl group having a number of 2 to 24, more preferably 2 to 12 carbon atoms, and for example, a vinyl group, an allyl group or
- alkylsulfonyl group preferably alkylsulfonyl group having 1 to 24 carbon atoms, more preferably 1 to 18 carbon atoms, for example, methylsulfonyl group, ethylsulfonyl group, isopropylsulfonyl group, cyclohexylsulfonyl group
- An arylsulfonyl group preferably having 6 to 24 carbon atoms, more preferably 6 to 18 carbon atoms
- Arylsulfonyl group represented, for example, a phenylsulfonyl group, a naphthylsulfonyl group).
- Y 1 and Y 2 each independently represent NR C , a nitrogen atom or a carbon atom, R C has the same meaning as R of X 2 and X 3 , and preferred embodiments are also the same. It is.
- R 11 and Y 1 are bonded to each other to form a 5-membered ring (for example, cyclopentane ring, pyrrolidine ring, tetrahydrofuran ring, dioxolane ring, tetrahydrothiophene ring, pyrrole ring, furan ring) together with carbon atoms Thiophene ring, indole ring, benzofuran ring, benzothiophene ring), 6-membered ring (eg, cyclohexane ring, morpholine ring, tetrahydropyran ring, dioxane ring, pentamethylene sulfide ring, dithian ring, benzene ring, piperidine ring, piperazine ring, It may form a pyridazine ring, a quinoline ring, a quinazoline ring), or a 7-membered ring (
- R 16 and Y 2 are mutually bonded to form a 5-membered ring (for example, cyclopentane ring, pyrrolidine ring, tetrahydrofuran ring, dioxolane ring, tetrahydrothiophene ring, pyrrole ring, furan ring, etc.) together with carbon atoms Thiophene ring, indole ring, benzofuran ring, benzothiophene ring), 6-membered ring (eg, cyclohexane ring, piperidine ring, piperazine ring, morpholine ring, tetrahydropyran ring, dioxane ring, pentamethylene sulfide ring, dithian ring, benzene ring, A piperidine ring, a piperazine ring, a pyridazine ring, a quinoline ring, a quinazoline
- R 11 and R 16 are each independently preferably a monovalent substituent having a steric parameter -Es' value of 1.5 or more, and is 2.0 or more. Is more preferable, 3.5 or more is further preferable, and 5.0 or more is particularly preferable.
- the steric parameter -Es' value is a parameter representing the steric bulk of the substituent, and it is described in the literature (JA Macphee, et al, Tetrahedron, Vol. 34, pp 3553 to 3562, Toshio Fujita, Chemical special edition 107 And Druck Design, published Feb. 20, 1986 (Chem. Dojin)-use the Es' value.
- X 1 represents a group capable of binding to Ma, and specific examples thereof include the same groups as X 1 in general formula (7), and preferred embodiments are also the same.
- a represents 0, 1 or 2;
- R 12 to R 15 are each independently the preferred embodiments described in the description of R 5 to R 8 in the general formula (M), R 17 is a preferred embodiment described in the explanation of R 10 in the general formula (M), Ma is Zn, Cu, Co or VVO, X 2 is NR (R is a hydrogen atom, an alkyl group), A nitrogen atom or an oxygen atom, X 3 is NR (R is a hydrogen atom or an alkyl group), or an oxygen atom, Y 1 is NR C (R C is a hydrogen atom or an alkyl group), a nitrogen atom or carbon an atom, Y 2 is a nitrogen atom or a carbon atom, each independently R 11 and R 16 are an alkyl group, an aryl group, a heterocyclic group, an alkoxy group or alkylamino group, X 1 is oxygen A group bonded through an atom, a is 0 or 1. R 11 and Y 1 may be
- R 12 to R 15 are each independently the preferred embodiment described in the explanation of R 5 to R 8 in the compound represented by the general formula (M)
- R 17 is a preferred embodiment described in the description of R 10 in the general formula (M)
- Ma is Zn
- X 2 and X 3 are oxygen atoms
- Y 1 is NH
- Y 2 is a nitrogen atom
- R 11 and R 16 are each independently an alkyl group, an aryl group, a heterocyclic group, an alkoxy group, or an alkylamino group
- X 1 is a group bonded via an oxygen atom Yes, a is 0 or 1.
- R 11 and Y 1 may be bonded to each other to form a 5- or 6-membered ring, or R 16 and Y 2 may be bonded to each other to form a 5- or 6-membered ring.
- the molar absorption coefficient of the dipyrromethene metal complex compound represented by the general formula (7) and the general formula (8) is preferably as high as possible from the viewpoint of coloring power.
- the maximum absorption wavelength ⁇ max is preferably 520 nm to 580 nm, and more preferably 530 nm to 570 nm, from the viewpoint of improving color purity. By being in this region, a color filter having good color reproducibility can be produced using the coloring composition of the present invention.
- the dye (A) having a dye structure derived from a dipyrromethene dye preferably has an absorbance at a maximum absorption wavelength ( ⁇ max) of at least 1,000 times, preferably at least 10,000 times the absorbance at 450 nm. Is more preferable, and more preferably 100,000 times or more. When the ratio is in this range, it is possible to form a color filter with higher transmittance, particularly when producing a blue color filter, using the coloring composition of the present invention.
- the maximum absorption wavelength and the molar absorption coefficient are measured by a spectrophotometer cary 5 (manufactured by Varian).
- the melting point of the dipyrromethene metal complex compound represented by the general formula (7) and the general formula (8) should not be too high from the viewpoint of solubility.
- the dipyrromethene metal complex compounds represented by the general formula (7) and the general formula (8) are disclosed in U.S. Patent Nos. 4,774,339, 5,433,896, and JP-A-2001-240761. Publication No. 2002-155052, Patent No. 3614586, Aust. J. Chem, 1965, 11, 1835-1845, J. Am. H. Boger et al, Heteroatom Chemistry, Vol. 1, No. 5, 389 (1990) and the like. Specifically, the method described in paragraphs [0131] to [0157] of JP-A-2008-292970 can be applied.
- a dipyrromethene pigment that forms a structure adopted in the examples described later is also preferably used.
- X is selected from those obtained by removing the charge from the counter anion group X described later.
- (PM-8) and (PM-10) are particularly preferable from the viewpoint of color characteristics and heat resistance.
- Triarylmethane dye is one having a partial structure derived from a triarylmethane dye (triarylmethane compound).
- the dye (A) includes a dye having a partial structure derived from a compound (triarylmethane compound) represented by the following general formula (TP) as a partial structure of a dye moiety.
- the triarylmethane compound is a generic term for compounds having a dye moiety containing a triarylmethane skeleton in the molecule.
- Rtp 1 to Rtp 4 each independently represent a hydrogen atom, an alkyl group or an aryl group.
- Rtp 5 represents a hydrogen atom, an alkyl group, an aryl group or NRtp 9 Rtp 10 (Rtp 9 and Rtp 10 represents a hydrogen atom, an alkyl group or an aryl group).
- Rtp 6 , Rtp 7 and Rtp 8 represent substituents.
- a, b and c each represents an integer of 0 to 4; When a, b and c are 2 or more, Rtp 6 , Rtp 7 and Rtp 8 may be respectively linked to form a ring.
- X - represents an anion. When X - is absent, at least one of Rtp 1 to Rtp 7 contains an anion.
- Rtp 1 to Rtp 6 a hydrogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, and a phenyl group are preferable.
- Rtp 5 is preferably a hydrogen atom or NRtp 9 Rtp 10 , particularly preferably NRtp 9 Rtp 10 .
- Rtp 9 and Rtp 10 are preferably a hydrogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, or a phenyl group.
- substituents represented by Rtp 6 , Rtp 7 and Rtp 8 substituents mentioned in the section of Substituent Group A to be described later can be used, and in particular, a linear or branched alkyl group having 1 to 5 carbon atoms, carbon Alkenyl group of 1 to 5 atoms, an aryl group of 6 to 15 carbon atoms, a carboxyl group or a sulfo group is preferable, and a linear or branched alkyl group of 1 to 5 carbon atoms, an alkenyl group of 1 to 5 carbon atoms, a phenyl group Or a carboxyl group is more preferred.
- Rtp 6 and Rtp 8 are preferably an alkyl group having 1 to 5 carbon atoms
- Rtp 7 is preferably an alkenyl group (particularly preferably a phenyl group in which two adjacent alkenyl groups are linked), a phenyl group or a carboxyl group.
- Each of a, b and c independently represents an integer of 0 to 4.
- a and b are preferably 0 to 1
- c is preferably 0 to 2.
- X ⁇ is preferably selected from the group of counter anions X described later.
- X ⁇ is preferably selected from the group of counter anions X described later.
- (tp-4), (tp-5), (tp-6) and (tp-8) are particularly preferable from the viewpoint of color characteristics and heat resistance.
- a preferred embodiment of D in the general formula (I) of the dye in the present invention is one having a partial structure derived from a xanthene dye (xanthene compound).
- the dye (A) includes a dye having a partial structure derived from a xanthene compound represented by the following general formula (J) as a partial structure of a dye moiety.
- R 81 , R 82 , R 83 and R 84 each independently represent a hydrogen atom or a monovalent substituent, and R 85 each independently represents a monovalent substituent, m represents an integer of 0 to 5; X - represents a counter anion. When X - is absent, at least one of R 81 to R 85 contains an anion.
- R 81 to R 84 and R 85 in the general formula (J) are the same as the substituents mentioned in the section of the substituent group A described later.
- R 81 and R 82 in the general formula (J), R 83 and R 84 , and R 85 when m is 2 or more are each independently bonded to each other to be 5-membered, 6-membered or 7-membered saturated It may form a ring or a 5-, 6- or 7-membered unsaturated ring.
- the 5-, 6- or 7-membered ring to be formed is a further substitutable group, it may be substituted by the substituents described in R 81 to R 85 , and two or more substituents When substituted, the substituents may be the same or different.
- R 81 and R 82 in the above general formula (J), R 83 and R 84 , and R 85 when m is 2 or more are each independently bonded to each other and have no substituent, 5-membered
- the 5-, 6- and 7-membered saturated ring or 5-membered, 6-membered and 7-membered -Membered unsaturated ring includes, for example, pyrrole ring, furan ring, thiophene ring, pyrazole ring, imidazole ring, triazole ring, oxazole ring, thiazole ring, pyrrolidine ring, piperidine ring, cyclopentene ring, cyclohexene ring, benzene ring, pyridine A ring, a pyrazine ring and a pyridazine ring can be mentioned
- R 82 and R 83 are preferably a hydrogen atom or a substituted or unsubstituted alkyl group
- R 81 and R 84 are preferably a substituted or unsubstituted alkyl group or a phenyl group
- R 85 is preferably a halogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, a sulfo group, a sulfonamido group, a carboxyl group or an amide group, and a sulfo group, a sulfonamido group, a carboxyl group, More preferably, it is an amido group.
- R 85 is preferably bonded to the adjacent part of the carbon linked to the xanthene ring.
- the substituent which the phenyl group of R 81 and R 84 has is most preferably a hydrogen atom, a halogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, a sulfo group, a sulfonamide group or a carboxyl group.
- X ⁇ is preferably selected from the group of counter anions X described later.
- the compound having a xanthene skeleton represented by the general formula (J) can be synthesized by a method described in the literature. Specifically, methods described in Tetrahedron Letters, 2003, vol. 44, No. 23, pages 4355 to 4360, Tetrahedron, 2005, vol. 61, No. 12, pages 3097 to 3106, etc. Can be applied.
- xanthene compound Although the specific example of a xanthene compound is shown below, this invention is not limited to this. Moreover, the compound which forms the xanthene structure used by the Example mentioned later is also used preferably.
- X ⁇ is preferably selected from the group of counter anions X described later.
- Cyanine dye is one having a partial structure derived from a cyanine dye (cyanine compound).
- the dye (A) includes a dye having a partial structure derived from a compound (cyanine compound) represented by the following general formula (PM) as a partial structure of a dye moiety.
- the cyanine compound is a generic term for compounds having a dye moiety containing a cyanine skeleton in the molecule.
- ring Z 1 and ring Z 2 each independently represent a heterocyclic ring which may have a substituent.
- l represents an integer of 0 or more and 3 or less.
- X - represents an anion.
- ring Z 1 and ring Z 2 each independently include oxazole, benzoxazole, oxazoline, thiazole, thiazoline, benzothiazole, indolenine, benzoindolenine, 1,3-thiadiazine and the like.
- the substituents which may be taken by ring Z 1 and ring Z 2 are the same as the substituents described in the section of substituent group A described later.
- X - represents a counter anion.
- X ⁇ is preferably selected from the group of counter anions X described later.
- the compound represented by Formula (PM) is preferably a compound represented by the following Formula (PM-2).
- the ring Z 5 and ring Z 6 each independently represent a naphthalene ring that may have a benzene ring or a substituted group which may have a substituent.
- X - represents a counter anion.
- n represents an integer of 0 or more and 3 or less.
- Each of A 1 and A 2 independently represents an oxygen atom, a sulfur atom, a selenium atom, a carbon atom or a nitrogen atom.
- R 1 and R 2 each independently represent a monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a substituent.
- R 3 and R 4 each independently represent a hydrogen atom or a monovalent aliphatic hydrocarbon group having 1 to 6 carbon atoms, or one R 3 and one R 4 are formed together And a divalent aliphatic hydrocarbon group having 2 to 6 carbon atoms.
- Each of a and b independently represents an integer of 0 or more and 2 or less.
- X ⁇ is preferably selected from the group of counter anions X described later.
- the dye (A) includes a dye having a partial structure derived from a compound (subphthalocyanine compound) represented by the following general formula (SP) as a partial structure of a dye moiety.
- the subphthalocyanine compound is a generic term for a compound having a dye moiety containing a subphthalocyanine skeleton in the molecule.
- the following compound forms a cation site, but for example, a boron atom of the general formula (SP) can form a cation site.
- Z 1 to Z 12 each independently represent a hydrogen atom, an alkyl group, an aryl group, a hydroxy group, a mercapto group, an amino group, an alkoxy group, an aryloxy group or a thioether group.
- X represents a counter anion. When X - is absent, at least one of Z 1 to Z 12 contains an anion.
- the alkyl group which Z 1 to Z 12 in general formula (SP) may have represents a linear or branched substituted or unsubstituted alkyl group.
- Z 1 to Z 12 in particular, a carbon number of 1 to 20 is preferable, and a carbon number of 1 to 10 is more preferable.
- Examples of the substituent that Z 1 to Z 12 may have include the substituents listed in the section of Substituent Group A to be described later, and a fluorine atom, a hydroxy group and a mercapto group are particularly preferable.
- X ⁇ is preferably selected from the group of counter anions X described later.
- X ⁇ is preferably selected from the group of counter anions X described later. Note that formally X - but has a separate notation, X boron atom to form a sub-phthalocyanine may be coordinated.
- D in general formula (I) may have a hydrogen atom in the dye structure substituted by a substituent selected from the following substituent group A.
- the squarylium dye used in the present invention is preferably a dye represented by the following general formula (K).
- a and B each independently represent an aryl group or a heterocyclic group.
- the aryl group is preferably an aryl group having a carbon number of 6 to 48, more preferably 6 to 24, and examples thereof include phenyl and naphthyl.
- the heterocyclic group is preferably a 5- or 6-membered heterocyclic group, and examples thereof include pyroyl, imidazoyl, pyrazoyl, thienyl, pyridyl, pyrimidyl, pyridazyl, triazol-1-yl, furyl, thiadiazoyl and the like.
- general formula (K) As a compound represented by general formula (K), it is particularly represented by the following general formula (K-1), general formula (K-2), general formula (K-3) or general formula (K-4) It is preferably a compound.
- each of R 91 , R 92 , R 94 , R 95 , R 96 and R 98 independently represents a hydrogen atom, a halogen atom, a linear or branched alkyl group, a cycloalkyl group , Linear or branched alkenyl group, cycloalkenyl group, alkynyl group, aryl group, heterocyclic group, cyano group, hydroxyl group, nitro group, carboxyl group, alkoxy group, aryloxy group, silyloxy group, heterocyclic oxy group, Acyloxy, carbamoyloxy, amino (including alkylamino and anilino), acylamino, aminocarbonylamino, alkoxycarbonylamino, aryloxycarbonylamino, sulfamoylamino, alkyl or arylsulfonylamino Group, mercapto group, alkylthio group, ary
- R 93 and R 97 each independently represent a hydrogen atom, a linear or branched alkyl group, a cycloalkyl group, a cycloalkenyl group, an alkynyl group, an aryl group or a heterocyclic group.
- R 91 and R 92 , and R 95 and R 96 may be linked to each other to form a ring.
- R 91 to R 98 are preferably each independently a hydrogen atom, an alkyl group, a hydroxy group, an amino group, an aryl group or a heterocyclic group, and R 93 , R 94 , R 97 and R 98 are alkyl groups. And R 91 and R 92 , and R 95 and R 96 are more preferably linked to each other to form an aryl ring, and R 93 , R 94 , R 97 and R 98 each have 1 to 20 carbon atoms. Most preferably, R 91 and R 92 , and R 95 and R 96 are linked to each other to form a benzene ring.
- R 101 , R 103 , R 104 , R 105 , R 107 and R 108 are each R 91 , R 93 , R 94 , R 95 , R 97 in the general formula (K-1) And R 98 respectively.
- R 103 and R 107 have the same meaning as R 93 and R 97 in formula (K-1).
- each of R 101 , R 103 , R 104 , R 105 , R 107 and R 108 is a hydrogen atom, an alkyl group, a hydroxy group, an amino group, an aryl group or a heterocyclic group
- R 101 , R 103 , R 105 and R 107 each is an alkyl group or an aryl group, and R 104 and R 108 each more preferably is a hydroxy group or an amino group
- R 103 and R 107 are preferably a hydrogen atom, a linear or branched alkyl group, and an aryl group, and more preferably an alkyl group having 1 to 5 carbon atoms and a phenyl group.
- R 109 , R 110 , R 111 , R 112 , R 113 , R 114 , R 115 , R 118 and R 119 are each R 91 , R 93 in the general formula (K-3) , R 94 , R 95 , R 97 and R 98 .
- R 116 and R 117 have the same meanings as R 93 and R 97 in General Formula (K-1).
- each of R 109 , R 110 , R 111 , R 112 , R 113 , R 114 , R 115 , R 118 and R 119 represents a hydrogen atom, a halogen atom, or a linear or branched alkyl group And is preferably a hydroxy group or an alkoxy group.
- R 109 , R 113 , R 115 , R 118 and R 119 are hydrogen atoms
- R 110 , R 111 and R 112 are hydrogen atoms or alkoxy groups
- R 114 is a hydrogen atom, a halogen atom And most preferably a hydroxy group, an alkyl group of 1 to 5 carbon atoms, or an alkoxy group of 1 to 5 carbon atoms.
- each of R 120 and R 121 independently represents a halogen atom, an alkyl group, an alkoxy group, or an alkenyl group.
- m1 and m2 each independently represent an integer of 1 to 4.
- n1 and n2 each independently represent an integer of 0 to 4.
- R 120 and R 121 are particularly preferably an alkyl group of 1 to 5 carbon atoms or an alkoxy group of 1 to 5 carbon atoms.
- m1 and m2 are preferably 1 to 3, and most preferably m1 and m2 are 3.
- n1 and n2 are preferably 0 to 3, and 0 or 1 is preferable.
- a squalilium compound represented by General Formula (K-1) is preferable from the viewpoint of hue.
- substituent which the dye may have include a halogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an alkynyl group, an aryl group, a heterocyclic group, a cyano group, a hydroxyl group, a nitro group and a carboxyl group , Alkoxy group, aryloxy group, silyloxy group, heterocyclic oxy group, acyloxy group, carbamoyloxy group, amino group (including alkylamino group and anilino group), acylamino group, aminocarbonylamino group, alkoxycarbonylamino group, aryl Oxycarbonylamino group, sulfamoylamino group, alkyl or arylsulfonylamino group, mercapto group, alkylthio group, arylthio group, heterocycl
- a halogen atom eg, fluorine atom, chlorine atom, bromine atom, iodine atom
- linear or branched alkyl group linear or branched substituted or unsubstituted alkyl group, preferably alkyl group having 1 to 30 carbon atoms
- alkyl group having 1 to 30 carbon atoms For example, methyl, ethyl, n-propyl, isopropyl, tert-butyl, n-octyl, 2-chloroethyl, 2-cyanoethyl, 2-ethylhexyl
- a cycloalkyl group preferably having a carbon number of 3 to 30
- An unsubstituted cycloalkyl group such as cyclohexyl and cyclopentyl can be mentioned, and a polycycloalkyl group such as a bicycloalkyl group (preferably a substituted or unsubstituted bicycloal
- a linear or branched alkenyl group (a linear or branched substituted or unsubstituted alkenyl group, preferably an alkenyl group having a carbon number of 2 to 30, for example, vinyl, allyl, prenyl, geranyl, oleyl), cycloalkenyl Group (preferably, a substituted or unsubstituted cycloalkenyl group having a carbon number of 3 to 30, and examples thereof include 2-cyclopenten-1-yl and 2-cyclohexen-1-yl; a polycycloalkenyl group such as bicyclo)
- An alkenyl group (preferably a substituted or unsubstituted bicycloalkenyl group having a carbon number of 5 to 30), for example, bicyclo [2,2,1] hept-2-en-1-yl, bicyclo [2,2,2] Octo-2-en-4-yl) or a tricycloalkenyl group, particularly preferably a monocyclic cycl
- An aryl group (preferably a substituted or unsubstituted aryl group having a carbon number of 6 to 30, for example, phenyl, p-tolyl, naphthyl, m-chlorophenyl, o-hexadecanoylaminophenyl), a heterocyclic group (preferably 5 to 6) 7-membered substituted or unsubstituted, saturated or unsaturated, aromatic or non-aromatic, monocyclic or fused heterocyclic group, more preferably, the ring constituting atoms are selected from carbon atoms, nitrogen atoms and sulfur atoms And a heterocyclic group having at least one hetero atom of any of nitrogen atom, oxygen atom and sulfur atom, more preferably a 5- or 6-membered aromatic heterocyclic group having 3 to 30 carbon atoms.
- An alkoxy group preferably, a substituted or unsubstituted alkoxy group having a carbon number of 1 to 30; for example, methoxy, ethoxy, isopropoxy, tert-butoxy, n-octyloxy, 2-methoxyethoxy
- an aryloxy group preferably Is a substituted or unsubstituted aryloxy group having a carbon number of 6 to 30, and examples thereof include phenoxy, 2-methylphenoxy, 2,4-di-tert-amylphenoxy, 4-tert-butylphenoxy, 3-nitrophenoxy, 2-tetradecanoylaminophenoxy
- silyloxy group preferably a silyloxy group having 3 to 20 carbon atoms, for example, trimethylsilyloxy, tert-butyldimethylsilyloxy
- heterocyclic oxy group preferably a carbon number of 2 to 20 30 substituted or unsubstituted heterocyclic oxy groups , Hetero
- An acyloxy group (preferably a formyloxy group, a substituted or unsubstituted alkylcarbonyloxy group having 2 to 30 carbon atoms, a substituted or unsubstituted arylcarbonyloxy group having 6 to 30 carbon atoms, for example, formyloxy, acetyloxy , Pivaloyloxy, stearoyloxy, benzoyloxy, p-methoxyphenylcarbonyloxy), carbamoyloxy group (preferably, a substituted or unsubstituted carbamoyloxy group having 1 to 30 carbon atoms, for example, N, N-dimethylcarbamoyloxy, N, N-diethylcarbamoyloxy, morpholinocarbonyloxy, N, N-di-n-octylaminocarbonyloxy, Nn-octylcarbamoyloxy), alkoxycarbonyloxy group (preferably having a carbon number
- Amino group preferably, amino group, substituted or unsubstituted alkylamino group having 1 to 30 carbon atoms, substituted or unsubstituted arylamino group having 6 to 30 carbon atoms, heterocyclic amino group having 0 to 30 carbon atoms
- amino, methylamino, dimethylamino, anilino, N-methyl-anilino, diphenylamino, N-1,3,5-triazin-2-ylamino an acylamino group (preferably a formylamino group, carbon number) 1-30 substituted or unsubstituted alkylcarbonylamino group, substituted or unsubstituted arylcarbonylamino group having 6 to 30 carbon atoms, and examples thereof include formylamino, acetylamino, pivaloylamino, lauroylamino, benzoylamino, and the like.
- amy A carbonylamino group preferably, a substituted or unsubstituted aminocarbonylamino group having 1 to 30 carbon atoms, for example, carbamoylamino, N, N-dimethylaminocarbonylamino, N, N-diethylaminocarbonylamino, morpholinocarbonylamino
- An alkoxycarbonylamino group preferably a substituted or unsubstituted alkoxycarbonylamino group having a carbon number of 2 to 30, and examples thereof include methoxycarbonylamino, ethoxycarbonylamino, tert-butoxycarbonylamino, n-octadecyloxycarbonylamino, N-methyl- Methoxycarbonylamino),
- An aryloxycarbonylamino group (preferably, a substituted or unsubstituted aryloxycarbonylamino group having 7 to 30 carbon atoms, for example, phenoxycarbonylamino, p-chlorophenoxycarbonylamino, mn-octyloxyphenoxycarbonylamino)
- a sulfamoylamino group (preferably a substituted or unsubstituted sulfamoylamino group having 0 to 30 carbon atoms, for example, sulfamoylamino, N, N-dimethylaminosulfonylamino, Nn-octylamino A sulfonylamino), an alkyl or arylsulfonylamino group (preferably a substituted or unsubstituted alkylsulfonylamino group having 1 to 30 carbon atoms, a substituted or unsubstituted aryls
- alkylthio group preferably a substituted or unsubstituted alkylthio group having 1 to 30 carbon atoms, for example, methylthio, ethylthio, n-hexadecylthio
- an arylthio group preferably a substituted or unsubstituted arylthio group having 6 to 30 carbon atoms
- heterocyclic thio group preferably a substituted or unsubstituted heterocyclic thio group having a carbon number of 2 to 30
- the heterocyclic part is the aforementioned heterocyclic group
- the heterocyclic moiety described in is preferred, for example, 2-benzothiazolylthio, 1-phenyltetrazol-5-ylthio), a sulfamoyl group (preferably a substituted or unsubstituted sulfamo
- An alkyl or arylsulfinyl group (preferably a substituted or unsubstituted alkylsulfinyl group having 1 to 30 carbon atoms, a 6 to 30 substituted or unsubstituted arylsulfinyl group, for example, methylsulfinyl, ethylsulfinyl, phenylsulfinyl, p-methylphenylsulfinyl), an alkyl or arylsulfonyl group (preferably, a substituted or unsubstituted alkylsulfonyl group having 1 to 30 carbon atoms, a 6 to 30 substituted or unsubstituted arylsulfonyl group, for example, methylsulfonyl) , Ethylsulfonyl, phenylsulfonyl, p-methylphenylsulfonyl), an acyl group (preferably a for
- An alkoxycarbonyl group (preferably a substituted or unsubstituted alkoxycarbonyl group having a carbon number of 2 to 30, for example, methoxycarbonyl, ethoxycarbonyl, tert-butoxycarbonyl, n-octadecyloxycarbonyl), a carbamoyl group (preferably, a carbon number 1 to 30 substituted or unsubstituted carbamoyl, such as carbamoyl, N-methylcarbamoyl, N, N-dimethylcarbamoyl, N, N-di-n-octylcarbamoyl, N- (methylsulfonyl) carbamoyl), aryl or hetero
- a ring azo group (preferably a substituted or unsubstituted arylazo group having 6 to 30 carbon atoms, a substituted or unsubstituted heterocyclic azo group having 3 to 30 carbon atoms (the hetero ring
- a phosphinyl oxy group (preferably a substituted or unsubstituted phosphinyl oxy group having 2 to 30 carbon atoms, for example, diphenoxy phosphinyl oxy, dioctyl oxy phosphinyl oxy), a phosphinyl amino group (for example Preferably, it is a substituted or unsubstituted phosphinylamino group having 2 to 30 carbon atoms, for example, dimethoxyphosphinylamino, dimethylaminophosphinylamino), a silyl group (preferably having a carbon number of 3 to 30) Or unsubstituted silyl groups such as trimethylsilyl, tert-butyldimethylsilyl, phenyldimethylsilyl).
- those having a hydrogen atom may have a hydrogen atom portion in the functional group substituted by any of the above groups.
- the functional group that can be introduced as a substituent include an alkylcarbonylaminosulfonyl group, an arylcarbonylaminosulfonyl group, an alkylsulfonylaminocarbonyl group, and an arylsulfonylaminocarbonyl group, and specifically, methylsulfonylaminocarbonyl, p-Methylphenylsulfonylaminocarbonyl, acetylaminosulfonyl, benzoylaminosulfonyl group can be mentioned.
- the counter anion preferably contained in the dye residue D in the general formula (I) is not particularly limited as long as it is a counter anion, but is preferably a non-nucleophilic anion from the viewpoint of heat resistance.
- the non-nucleophilic counter anion known non-nucleophilic anions described in JP 2007-310315 A etc.
- counter anion group X is more preferable; Sulfonate anion, carboxylate anion, sulfonylimide anion, bis (alkylsulfonyl) imide anion and tris (alkylsulfonyl) methide anion, carboxylate anion, tetra aryl volley de anion, -CON - CO -, - CON - SO 2 -, BF 4 -, PF 6 -, SbF 6 -, B - (CN) 3 OMe.
- the counter anion group X is more preferably a sulfonate anion, a sulfonylimide anion, a bis (alkylsulfonyl) imide anion, a tris (alkylsulfonyl) methide anion, a carboxylate anion, a tetraarylborate anion, BF 4 ⁇ , PF 6 ⁇ , And SbF 6 - is more preferred.
- the counter anion group X is more preferably a non-nucleophilic anion having a structure represented by the following (AN-1) to (AN-5).
- AN-1 a non-nucleophilic anion having a structure represented by the following (AN-1) to (AN-5).
- X 1 and X 2 each independently represent a fluorine atom or an alkyl group having a fluorine atom having 1 to 10 carbon atoms.
- X 1 and X 2 are respectively bonded to form a ring May do.
- Each of X 1 and X 2 is preferably independently a C 1-10 perfluoroalkyl group, and more preferably a C 1-4 perfluoroalkyl group.
- X 3 , X 4 and X 5 each independently represent a fluorine atom or an alkyl group having a carbon number of 1 to 10).
- Each of X 3 , X 4 and X 5 is preferably a C 1-10 perfluoroalkyl group, and more preferably a C 1-4 perfluoroalkyl group.
- X 6 represents an alkyl group having a fluorine atom of 1 to 10 carbon atoms.
- X 6 is preferably a C 1-10 perfluoroalkyl group, more preferably a C 1-4 perfluoroalkyl group.
- X 7 represents an alkylene group having a fluorine atom of 1 to 10 carbon atoms.
- X 7 is preferably a C 1-10 perfluoroalkylene group, more preferably a C 1-4 perfluoroalkylene group.
- Ar 1 , Ar 2 , Ar 3 and Ar 4 represent an aryl group.
- the aryl group represented by Ar 1 , Ar 2 , Ar 3 and Ar 4 may have a substituent.
- substituents include a halogen atom, an alkyl group, an aryl group, an alkoxy group, a carbonyl group, a carbonyloxy group, a carbamoyl group, a sulfo group, a sulfonamide group and a nitro group, but a fluorine atom and an alkyl group are particularly preferable. More preferred is a perfluoroalkyl group having 1 to 4 carbon atoms.
- Ar 1 , Ar 2 , Ar 3 and Ar 4 are preferably a phenyl group, a pentafluorophenyl group or a 3,5-trifluorophenyl group, and most preferably a pentafluorophenyl group.
- the mass per molecule of the non-nucleophilic counter anion used in the present invention is preferably 100 to 1000, more preferably 200 to 800.
- the dye of the present invention may contain only one type of non-nucleophilic counter anion, or may contain two or more types.
- the dye residue D may have a polymerizable group.
- a radical, an acid, a known polymerizable group crosslinkable by heat can be used.
- a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetane group), a methylol group And the like and in particular, a group containing an ethylenically unsaturated bond is preferable, a (meth) acryloyl group is more preferable, and (meth) derived from glycidyl (meth) acrylate and 3,4-epoxy-cyclohexylmethyl (meth) acrylate An acryloyl group is particularly preferred.
- the number of polymerizable groups in the dye residue D is preferably one for one dye residue.
- the Tg of the dye (A) according to the present invention is preferably 50 ° C. or higher, and more preferably 100 ° C. or higher.
- the 5% weight loss temperature by thermogravimetric analysis (TGA measurement) is preferably 120 ° C. or more, more preferably 150 ° C. or more, and still more preferably 200 ° C. or more.
- the molar absorptivity of the dye (A) used in the coloring composition of the present invention is preferably as high as possible from the viewpoint of coloring power.
- the molecular weight of the dye (A) is preferably 500 to 10000, more preferably 1000 to 8000, and still more preferably 2000 to 6000.
- the molecular weight dispersion degree is preferably 1.00 to 2.00, more preferably 1.00 to 1.50, and 1.00 to 1.20. Is more preferred.
- the molecular weight distribution is in the above range, the variation in molecular weight is reduced and the pattern property is improved.
- Molecular weight distribution can be measured, for example, by gel permeation chromatography (GPC) or the like.
- R in the general formula (1) is an acid group or a polymerizable group, but an oligomer in an intramolecular portion other than R (for example, Q or D) Even when a group or a polymerizable group is contained, the same effect as in the case where R contains an acid group or a polymerizable group is exhibited.
- at least one selected from the linking group Q, the substituent R and the dye residue D in the general formula (1) contains an acid group.
- the acid group is preferably a carboxyl group, a sulfo group or a phosphoric acid group, more preferably a carboxyl group.
- the number of polymerizable groups contained in the entire dye (A) is preferably 1 to 2, and more preferably 1.
- the number of acid groups contained in the entire dye (A) is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 to 2.
- the acid value of the dye (A) is not particularly limited, but is preferably 0.1 to 1.0 mmol / g, more preferably 0.2 to 1.0 mmol / g, and 0.2 to 0.7 mmol / g. More preferable.
- the acid value is 0.1 mmol / g or more, the developability can be further improved.
- an acid value is 1.0 mmol or less, the cured film which is hard to be discolored can be formed with a developing solution, stripping solution, etc.
- C C value of pigment (A)
- 0.2 mmol / g or more is more preferable
- 0.3 mmol / g or more is still more preferable.
- a cured film which is hard to lose color can be formed by a developer, a peeling solution, or the like.
- the dye (A) according to the present invention is preferably a dye.
- the dye refers to a dye having substantial solubility in water or an organic solvent, and in particular, an organic solvent-soluble dye that is soluble in the following organic solvent is preferable.
- the organic solvent esters (eg, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl lactate, butyl acetate, methyl 3-methoxypropionate, etc.), ethers (eg, methyl cellosolve acetate, ethyl cellosolve acetate) And propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, etc., ketones (methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone etc.), aromatic hydrocarbons (eg, toluene, xylene etc.), these solvents On the other hand, it is preferably dissolved in an amount
- the dye (A) may be used alone or in combination of two or more.
- the content of the dye (A) in the coloring composition of the present invention is set in consideration of the content ratio to the (C) pigment described later.
- the mass ratio of pigment to pigment (pigment (A) / pigment) is preferably 0.1 to 5, more preferably 0.2 to 2, and still more preferably 0.3 to 1.
- the content of the dye in the coloring composition of the present invention is preferably 1.0 to 50% by mass, more preferably 5.0 to 30% by mass, and further preferably 10 to 25% by mass with respect to the total solid content in the coloring composition. % Is particularly preferred.
- dye used by the coloring composition of this invention the compound shown by the Example mentioned later is illustrated.
- the present invention is not limited to these.
- the coloring composition of the present invention may contain a known dye other than the dye represented by (A) the general formula (I).
- a known dye other than the dye represented by (A) the general formula (I) For example, JP-A 64-90403, JP-A 64-91102, JP-A-1-94301, JP-A-6-11614, JP-B-2592207, U.S. Pat. No. 4,808,501, U.S. Pat. No. 5,667,920. No. 505950, U.S. Pat. No. 5,667,920, Japanese Patent Laid-Open Nos. 5-333207, 6-325183, 6-51115, 6-194828, etc.
- the dyes disclosed in can be used.
- the chemical structure includes pyrazole azo, pyrromethene, anilinoazo, triphenylmethane, anthraquinone, benzylidene, oxonol, pyrazolotriazole azo, pyridone azo, cyanine, phenothiazine, pyrrolopyrazole azomethine, etc.
- Dye can be used.
- the coloring composition of the present invention contains a polymerizable compound.
- a polymerizable compound known polymerizable compounds which can be crosslinked by a radical, an acid or heat can be used.
- polymerizable compounds including ethylenic unsaturated bond, cyclic ether (epoxy, oxetane), methylol and the like can be mentioned.
- the polymerizable compound is suitably selected from compounds having at least one, preferably two or more terminal ethylenically unsaturated bonds, from the viewpoint of sensitivity. Among them, tetrafunctional or higher polyfunctional polymerizable compounds are preferable, and pentafunctional or higher polyfunctional polymerizable compounds are more preferable. Further, an alkali-soluble resin having a polymerizable group described later can also be used as the polymerizable compound.
- Such compounds are widely known in the relevant industrial field, and they can be used in the present invention without particular limitation. These may be, for example, any of chemical forms such as monomers, prepolymers, that is, dimers, trimers and oligomers or mixtures thereof and oligomers thereof. In the present invention, the polymerizable compounds may be used alone or in combination of two or more.
- examples of monomers and prepolymers thereof include unsaturated carboxylic acids (eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid etc.) and esters thereof, amides, etc.
- unsaturated carboxylic acids eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid etc.
- esters thereof preferably esters of unsaturated carboxylic acids and aliphatic polyhydric alcohol compounds, and amides of unsaturated carboxylic acids and aliphatic polyhydric amine compounds, and multimers thereof. is there.
- addition reaction products of unsaturated carboxylic acid esters or amides having a nucleophilic substituent such as hydroxyl group, amino group, mercapto group etc.
- a compound having at least one addition-polymerizable ethylene group and having an ethylenically unsaturated group having a boiling point of 100 ° C. or more under normal pressure is also preferable.
- monofunctional acrylates and methacrylates such as polyethylene glycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate and phenoxyethyl (meth) acrylate; polyethylene glycol di (meth) acrylate, trimethylolethane tri ( (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, hexanedio
- Polyfunctional (meth) acrylate obtained by reacting a compound having a cyclic ether group such as glycidyl (meth) acrylate and an ethylenically unsaturated group with a polyfunctional carboxylic acid can also be mentioned.
- it has a fluorene ring and is described in, for example, JP-A-2010-160418, JP-A-2010-129825, and JP-A-4364216, and an ethylenically unsaturated group is described. It is also possible to use a compound having two or more functions, a cardo resin.
- radically polymerizable monomers represented by the following general formulas (MO-1) to (MO-5) can also be suitably used.
- T is an oxyalkylene group
- the terminal on the carbon atom side is bonded to R.
- n 0 to 14 and m is 1 to 8.
- a plurality of R and T in one molecule may be identical to or different from each other.
- the compounds described in paragraph No. 0248 to paragraph No. 0251 of JP-A-2007-269779 are disclosed. Can also be suitably used.
- dipentaerythritol triacrylate commercially available as KAYARAD D-330; Nippon Kayaku Co., Ltd.
- dipentaerythritol tetraacrylate commercially available as KAYARAD D-320; Nippon Kayaku Co., Ltd.
- the polymerizable compound is a polyfunctional monomer, and may have an acid group such as a carboxyl group, a sulfonic acid group or a phosphoric acid group. If the ethylenic compound has an unreacted carboxyl group as in the case of a mixture as described above, this can be used as it is, but, if necessary, to the hydroxyl group of the above ethylenic compound Non-aromatic carboxylic acid anhydride may be reacted to introduce an acid group.
- non-aromatic carboxylic acid anhydrides include tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, alkylated hexahydrophthalic anhydride, succinic anhydride, anhydride Maleic acid is mentioned.
- the monomer having an acid group is an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound.
- Polyfunctional monomers having an acid group are preferred, and particularly preferably in this ester, the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol.
- Examples of commercially available products include M-510 and M-520 as polybasic acid-modified acrylic oligomers manufactured by Toagosei Co., Ltd.
- One of these monomers may be used alone, but two or more of these monomers may be used in combination because it is difficult to use a single compound in production.
- a polyfunctional monomer having no acid group and a polyfunctional monomer having an acid group may be used in combination as monomers.
- the acid value of the polyfunctional monomer having an acid group is preferably 0.1 to 40 mg KOH / g, particularly preferably 5 to 30 mg KOH / g.
- the acid value of the polyfunctional monomer is too low, the development dissolution property is deteriorated, and when too high, the production and handling become difficult, the photopolymerization performance is deteriorated, and the curability such as the surface smoothness of the pixel is deteriorated. Therefore, when using two or more types of polyfunctional monomers having different acid groups in combination, or using a polyfunctional monomer having no acid group, adjust the acid value of the entire polyfunctional monomer to fall within the above range. Is preferred.
- the polyfunctional monomer which has a caprolactone structure is not particularly limited as long as it has a caprolactone structure in the molecule, and examples thereof include trimethylol ethane, ditrimethylol ethane, trimethylol propane, ditrimethylol propane and penta ⁇ -caprolactone modified polyfunctional ( ⁇ ) obtained by esterifying (meth) acrylic acid and ⁇ -caprolactone with a polyhydric alcohol such as erythritol, dipentaerythritol, tripentaerythritol, glycerin, diglycerol, trimethylolmelamine Mention may be made of meta) acrylates.
- polyfunctional monomers having a caprolactone structure represented by the following general formula (Z-1) are preferable.
- R 1 represents a hydrogen atom or a methyl group
- m represents a number of 1 or 2
- “*” represents a bond.
- R 1 represents a hydrogen atom or a methyl group, and “*” represents a bond.
- polyfunctional monomers having a caprolactone structure can be used alone or in combination of two or more.
- the specific monomer in the present invention is also preferably at least one selected from the group of compounds represented by the following general formulas (Z-4) or (Z-5).
- E are each independently, - ((CH 2) y CH 2 O) -, or - ((CH 2) y CH (CH 3) O) And each y independently represents an integer of 0 to 10.
- Each X independently represents an acryloyl group, a methacryloyl group, a hydrogen atom or a carboxyl group.
- the total of acryloyl group and methacryloyl group is 3 or 4
- m each independently represents an integer of 0 to 10
- the total of each m is an integer of 0 to 40 .
- any one of X is a carboxyl group.
- n is each independently an integer of 0 to 10
- each n is an integer of 0 to 60 .
- any one of X is a carboxyl group.
- n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12.
- the compounds represented by formula (Z-4) or (Z-5) may be used alone or in combination of two or more.
- a form in which all six X's are an acryloyl group is preferable.
- the total content of the compound represented by Formula (Z-4) or Formula (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more.
- the compounds represented by the general formula (Z-4) or the general formula (Z-5) are prepared by ring-opening addition of ethylene oxide or propylene oxide to pentaerythritol or dipentaerythritol which is a conventionally known step.
- the compound can be synthesized from the step of binding the ring-opened skeleton by reaction, and the step of reacting the terminal hydroxyl group of the ring-opened skeleton with, for example, (meth) acryloyl chloride to introduce a (meth) acryloyl group.
- Each step is a well-known step, and those skilled in the art can easily synthesize a compound represented by general formula (Z-4) or (Z-5).
- pentaerythritol derivatives and / or dipentaerythritol derivatives are more preferable.
- Specific examples thereof include compounds represented by the following formulas (a) to (f) (hereinafter also referred to as “exemplified compounds (a) to (f)”), and among them, exemplified compounds (a) and (f) b), (e) and (f) are preferred.
- SR-494 which is a tetrafunctional acrylate having four ethyleneoxy chains manufactured by Sartmar, Nippon Kayaku Co., Ltd.
- examples thereof include DPCA-60, which is a hexafunctional acrylate having 6 pentylene oxy chains, and TPA-330, which is a trifunctional acrylate having 3 isobutylene oxy chains.
- urethane acrylates as described in JP-B-48-41708, JP-A-51-37193, JP-B-2-32293 and JP-B-2-16765. Further, urethane compounds having an ethylene oxide-based skeleton described in JP-B-58-49860, JP-B-56-17654, JP-B-62-39417, and JP-B-62-39418 are also suitable.
- cyclic ether for example, as those having an epoxy group, as bisphenol A epoxy resin, JER-827, JER-828, JER-834, JER-1001, JER-1002, JER-1003 JER-1055, JER-1007, JER-1009, JER-1010 (all available from Japan Epoxy Resins Co., Ltd.), EPICLON 860, EPICLON 1050, EPICLON 1051, EPICLON 1055 (all available from DIC Corporation), etc., and bisphenol F Type epoxy resins, such as JER-806, JER-807, JER-4004, JER-4005, JER-4007, JER-4010 (all manufactured by Japan Epoxy Resins Co., Ltd.), EPICLON 83 EPICLON 835 (all, DIC Corporation), LCE-21, RE-602S (all, Nippon Kayaku Co., Ltd.), etc., and as phenol novolac epoxy resins, JER-152, J
- the details of the structure, single use or combined use, details of usage methods such as addition amount can be arbitrarily set in accordance with the final performance design of the coloring composition.
- a structure having a high unsaturated group content per molecule is preferable, and in many cases, a bifunctional or more functional is preferable.
- trifunctional or higher functional groups are preferable, and further, different functional group number and different polymerizable groups (for example, acrylic acid ester, methacrylic acid ester, styrenic compound, It is also effective to control both sensitivity and intensity by using vinyl ether compounds in combination.
- the selection and use method of the polymerizable compound is also for compatibility and dispersibility with other components (for example, a photopolymerization initiator, a material to be dispersed, an alkali-soluble resin, etc.) contained in the coloring composition It is an important factor, and it may be possible to improve the compatibility, for example, by the use of a low purity compound or a combination of two or more.
- a specific structure may be selected from the viewpoint of improving the adhesion to a hard surface such as a support.
- the content of the polymerizable compound in the coloring composition of the present invention is preferably 0.1% by mass to 90% by mass, and more preferably 1.0% by mass to 50% by mass, with respect to the total solid content in the coloring composition. Preferably, 2.0% by mass to 30% by mass is particularly preferable.
- the coloring composition of the present invention may contain a polyfunctional thiol compound having two or more mercapto groups in the molecule for the purpose of accelerating the reaction of the polymerizable compound.
- the polyfunctional thiol compound is preferably a secondary alkanethiol, and particularly preferably a compound having a structure represented by the following general formula (T1).
- T1 In the formula (T1), n represents an integer of 2 to 4 and L represents a divalent to tetravalent linking group.
- the linking group L is preferably an aliphatic group having a carbon number of 2 to 12, and it is particularly preferable that n is 2 and L is an alkylene group having a carbon number of 2 to 12.
- Specific examples of the polyfunctional thiol compound include compounds represented by the following structural formulas (T2) to (T4), and a compound represented by formula (T2) is particularly preferable. These polyfunctional thiols can be used alone or in combination.
- the blending amount of the multifunctional thiol in the coloring composition of the present invention is preferably 0.3 to 8.9% by mass, more preferably 0.8 to 6.4% by mass, with respect to the total solid content excluding the solvent. It is desirable to add in the range of The polyfunctional thiol may be added for the purpose of improving the stability, odor, resolution, developability, adhesion and the like.
- the coloring composition of the present invention preferably contains a pigment.
- a pigment various known inorganic pigments or organic pigments can be used.
- the pigment preferably has high transmittance.
- the inorganic pigment examples include metal compounds represented by metal oxides, metal complex salts, etc.
- black pigments such as carbon black and titanium black, iron, cobalt, aluminum, cadmium, lead, copper
- metal oxides such as titanium, magnesium, chromium, zinc and antimony and composite oxides of metals.
- organic pigment for example, C. I. Pigment yellow 11, 24, 31, 53, 83, 93, 99, 108, 110, 138, 139, 147, 150, 151, 154, 155, 167, 180, 185, 199; C. I. Pigment orange 36, 38, 43, 71; C. I. Pigment red 81, 105, 122, 149, 150, 155, 171, 175, 176, 177, 209, 220, 224, 242, 254, 255, 264, 270; C. I. Pigment violet 19, 23, 32, 39; C. I. Pigment blue 1, 2, 15, 15: 1, 15: 3, 15: 6, 16, 22, 60, 66; C. I. Pigment green 7, 36, 37, 58; C. I. Pigment brown 25, 28; C. I. Pigment black 1; Etc. can be mentioned.
- the following can be mentioned as a pigment which can be preferably used in the present invention.
- the present invention is not limited to these.
- organic pigments can be used alone or in various combinations in order to adjust the spectrum and to improve the color purity.
- the specific example of the said combination is shown below.
- red pigments anthraquinone pigments, perylene pigments, diketopyrrolopyrrole pigments alone or at least one of them, disazo yellow pigments, isoindoline yellow pigments, quinophthalone yellow pigments or perylene red pigments And the like can be used.
- anthraquinone pigments C.I. I. Pigment red 177
- perylene pigments include C.I. I. Pigment red 155, C.I. I.
- Pigment red 224 examples of the diketopyrrolopyrrole pigment include C.I. I. Pigment red 254, and C.I. I.
- the mixing with pigment yellow 139 is preferred.
- the mass ratio of the red pigment to the yellow pigment is preferably 100: 5 to 100: 50. If it is 100: 4 or less, it is difficult to suppress the light transmittance of 400 nm to 500 nm, and if it is 100: 51 or more, the main wavelength tends to be a short wavelength and color resolution may not be able to be improved. In particular, the range of 100: 10 to 100: 30 is optimum as the above mass ratio.
- the green pigment it is possible to use a halogenated phthalocyanine-based pigment alone or a mixture thereof with a disazo-based yellow pigment, a quinophthalone-based yellow pigment, an azomethine-based yellow pigment or an isoindoline-based yellow pigment.
- a disazo-based yellow pigment e.g., a quinophthalone-based yellow pigment, an azomethine-based yellow pigment or an isoindoline-based yellow pigment.
- the mixing with pigment yellow 185 is preferred.
- the mass ratio of the green pigment to the yellow pigment is preferably 100: 5 to 100: 150.
- the mass ratio is particularly preferably in the range of 100: 30
- a blue pigment a phthalocyanine-based pigment can be used alone, or a mixture of this with a dioxazine-based purple pigment can be used.
- the mixing with pigment violet 23 is preferred.
- the mass ratio of the blue pigment to the purple pigment is preferably 100: 0 to 100: 100, and more preferably 100: 10 or less.
- carbon, titanium black, iron oxide, titanium oxide alone or in combination is used as a pigment for the black matrix, and a combination of carbon and titanium black is preferable.
- the mass ratio of carbon to titanium black is preferably in the range of 100: 0 to 100: 60.
- the primary particle size of the pigment is preferably 100 nm or less from the viewpoint of color unevenness and contrast, and is preferably 5 nm or more from the viewpoint of dispersion stability.
- the primary particle size of the pigment is more preferably 5 to 75 nm, still more preferably 5 to 55 nm, and particularly preferably 5 to 35 nm.
- the specific dispersion resin according to the present invention can exhibit particularly good effects in combination with a pigment having a primary particle size in the range of 5 to 35 nm.
- the primary particle size of the pigment can be measured by a known method such as an electron microscope.
- the pigment is preferably a pigment selected from anthraquinone pigments, diketopyrrolopyrrole pigments, phthalocyanine pigments, quinophthalone pigments, isoindoline pigments, azomethine pigments, and dioxazine pigments.
- C.I. I. Pigment red 177 anthraquinone pigment
- C.I. I. Pigment red 254 diketopyrrolopyrrole pigment
- C.I. I. Pigment green 7, 36, 58 C.I. I. Pigment blue 15: 6 (phthalocyanine pigment), C.I. I. Pigment yellow 138 (quinophthalone pigment), C.I. I. Pigment yellow 139, 185 (isoindoline pigment), C.I. I. Pigment yellow 150 (azomethine pigment), C.I. I. Pigment Violet 23 (dioxazine pigment) is most preferred.
- the content of the pigment is preferably 10% by mass to 70% by mass, more preferably 20% by mass with respect to all components excluding the solvent contained in the coloring composition.
- % By mass to 60% by mass, more preferably 30% by mass to 60% by mass.
- a pigment dispersant can be used in combination as desired.
- a pigment dispersant polymer dispersants [for example, polyamide amine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meth) acrylate, (meth) acrylic And copolymers thereof, surfactants such as polyoxyethylene alkyl phosphoric acid ester, polyoxyethylene alkyl amine, alkanolamine, and pigment derivatives.
- Polymer dispersants can be further classified into linear polymers, terminal modified polymers, graft polymers, and block polymers according to their structures.
- terminal-modified polymers having an anchor site on the pigment surface include polymers having a phosphoric acid group at the terminals described in JP-A-3-112929 and JP-A-2003-533455, etc., JP-A-2002 Examples thereof include polymers having a sulfonic acid group at the terminal as described in JP-273191A and the like, and polymers having a partial skeleton of an organic dye and a heterocycle described in JP-A-9-77994 and the like.
- polymers described in JP-A-2007-277514 in which two or more anchor sites (acid group, basic group, partial skeleton of organic dye, heterocyclic ring, etc.) are introduced at the polymer end are also available. It is excellent in dispersion stability and preferable.
- polyester type dispersants and the like can be mentioned.
- JP-A-54-37082, JP-A-8-507960, and JP 2009-258668, etc. reaction product of poly (lower alkylenimine) and polyester
- JP, 9-169821, etc. reaction product of polyallylamine and polyester
- JP 10-339949 A Copolymers of a macromonomer and a nitrogen atom monomer described in JP-A-2004-37986, International Publication Pamphlet WO2010 / 110491, etc.
- amphoteric dispersion resin having a basic group and an acidic group described in JP-A-2009-203462 has the dispersibility of the pigment dispersion, the dispersion stability, and the developability exhibited by the coloring composition using the pigment dispersion. Particularly preferred from the viewpoint of
- a known macromonomer can be used as a macromonomer to be used when producing a graft type polymer having an anchor site to a pigment surface by radical polymerization, and a macromonomer AA-6 (terminally manufactured by Toagosei Co., Ltd.) Poly (methyl methacrylate) in which the group is methacryloyl, AS-6 (polystyrene in which the terminal is methacryloyl), AN-6S (copolymer of styrene and acrylonitrile in which the terminal is methacryloyl), AB-6 Butyl acrylate having a methacryloyl group as the terminal group, Plaxel FM5 ( ⁇ -caprolactone 5-mole equivalent adduct of 2-hydroxyethyl methacrylate) manufactured by Daicel Chemical Industries, Ltd., FA 10 L (2-hydroxyethyl acrylate) ⁇ -caprolactone (10 molar equivalent adduct), and JP-A 2-27
- polyester-based macromonomers that are particularly excellent in flexibility and lipophilicity are particularly preferable from the viewpoint of the dispersibility of the pigment dispersion, the dispersion stability, and the developability exhibited by the colored composition using the pigment dispersion, Furthermore, polyester-based macromonomers represented by polyester-based macromonomers described in JP-A-2-272009 are most preferable.
- block type polymer having an anchor site to the pigment surface block type polymers described in JP-A 2003-49110, JP-A 2009-52010, etc. are preferable.
- pigment dispersants that can be used in the present invention are also commercially available, and specific examples thereof include “DA-7301” manufactured by Kushimoto Chemical Co., Ltd., “Disperbyk-101 (polyamide amine) manufactured by BYK Chemie Phosphate), 107 (carboxylic acid ester), 110 (copolymer containing an acid group), 130 (polyamide), 161, 162, 163, 164, 165, 166, 170 (polymer copolymer) "," BYK-P104, P105 (high molecular weight unsaturated polycarboxylic acid), EFKA “EFKA 4047, 4050 to 4010 to 4165 (polyurethane type), EFKA 4330 to 4340 (block copolymer), 4400 to 4402 (modified polyacrylate), 5010 (polyesteramide), 5765 (high molecular weight polycarboxylate) , 6220 (fatty acid polyester), 6745 (phthalocyanine derivative), 6750 (azo pigment derivative) ", A
- pigment dispersants may be used alone or in combination of two or more. In the present invention, it is particularly preferable to use a combination of a pigment derivative and a polymer dispersant.
- the pigment dispersant may be used in combination with an alkali-soluble resin together with a terminal-modified polymer having an anchor site on the pigment surface, a graft polymer, and a block polymer.
- alkali-soluble resin (meth) acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partially esterified maleic acid copolymer, etc., and carboxylic acid in the side chain And the like, and particularly preferred is (meth) acrylic acid copolymer.
- the total content of the pigment dispersant in the coloring composition is preferably 1 to 80 parts by mass, more preferably 5 to 70 parts by mass, and still more preferably 10 to 60 parts by mass with respect to 100 parts by mass of the pigment.
- the use amount thereof is preferably 5 to 100 parts by mass, and more preferably 10 to 80 parts by mass with respect to 100 parts by mass of the pigment.
- the amount of the pigment derivative used is preferably 1 to 30 parts by mass, more preferably 3 to 20 parts by mass, and particularly preferably 5 to 15 parts by mass with respect to 100 parts by mass of the pigment. .
- the total content of the colorant component and the pigment dispersant is preferably 50 to 90% by mass or more with respect to the total solid content of the coloring composition, and 55 to 85 % By mass is more preferable, and 60 to 80% by mass is even more preferable.
- the coloring composition of this invention contains a photoinitiator from a viewpoint of a further sensitivity improvement.
- the photopolymerization initiator is not particularly limited as long as it has the ability to initiate the polymerization of the polymerizable compound, and can be appropriately selected from known photopolymerization initiators. For example, those having photosensitivity to light rays visible from the ultraviolet region are preferable.
- it may be an activator that produces an action with a photoexcited sensitizer and generates active radicals, or may be an initiator that initiates cationic polymerization depending on the type of monomer.
- the photopolymerization initiator preferably contains at least one compound having a molecular absorption coefficient of at least about 50 in the range of about 300 nm to 800 nm (more preferably 330 nm to 500 nm).
- a halogenated hydrocarbon derivative for example, one having a triazine skeleton, one having an oxadiazole skeleton, etc.
- an acylphosphine compound such as an acyl phosphine oxide, a hexaarylbiimidazole, an oxime derivative And oxime compounds, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, aminoacetophenone compounds, hydroxyacetophenone and the like.
- trihalomethyl triazine compounds benzyl dimethyl ketal compounds, ⁇ -hydroxy ketone compounds, ⁇ -amino ketone compounds, acyl phosphine compounds, phosphine oxide compounds, metallocene compounds, oxime compounds, triallyl imidazole dimers, oniums
- compounds selected from the group consisting of compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and derivatives thereof, cyclopentadiene-benzene-iron complexes and salts thereof, halomethyl oxadiazole compounds and 3-aryl substituted coumarin compounds are preferred.
- trihalomethyl triazine compounds More preferable are trihalomethyl triazine compounds, ⁇ -amino ketone compounds, acyl phosphine compounds, phosphine oxide compounds, oxime compounds, triallyl imidazole dimers, triaryl imidazole compounds, benzimidazole compounds, onium compounds, benzophenone compounds, acetophenone compounds.
- the triarylimidazole compound may also be a mixture with benzimidazole.
- the following compounds are exemplified as the trihalomethyl triazine compound. Ph is a phenyl group.
- the following compounds are illustrated as a triaryl imidazole compound and a
- a commercially available product can also be used as the trihalomethyl triazine compound, and for example, TAZ-107 (manufactured by Midori Kagaku Co., Ltd.) can also be used.
- TAZ-107 manufactured by Midori Kagaku Co., Ltd.
- an oxime compound is particularly preferable as the photopolymerization initiator.
- stepper exposure is used for curing exposure, but this exposure machine may be damaged by halogen, and the amount of addition of the photopolymerization initiator also needs to be suppressed low. Therefore, in consideration of these points, it is most preferable to use an oxime compound as the photopolymerization initiator (D) to form a fine pattern as in a solid-state imaging device.
- halogenated hydrocarbon compound having a triazine skeleton for example, Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), a compound described in British Patent No. 1388492, a compound described in JP-A-53-133428, a compound described in German Patent No. 3337024, an F. compound. C. Schaefer et al. Org. Chem. 29, 1527 (1964), compounds described in JP-A-62-58241, compounds described in JP-A-5-281728, compounds described in JP-A-5-34920, specification of U.S. Pat. No. 4,129,976 Compounds described in the book, and the like.
- Examples of the compounds described in US Pat. No. 4,129,976 include compounds having an oxadiazole skeleton (eg, 2-trichloromethyl-5-phenyl-1,3,4-oxadiazole, 2-trichloro) Methyl-5- (4-chlorophenyl) -1,3,4-oxadiazole, 2-trichloromethyl-5- (1-naphthyl) -1,3,4-oxadiazole, 2-trichloromethyl-5- (2-naphthyl) -1,3,4-oxadiazole, 2-tribromomethyl-5-phenyl-1,3,4-oxadiazole, 2-tribromomethyl-5- (2-naphthyl)- 1,3,4-oxadiazole; 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5- (4-chlorostyryl) 1,3,4-oxadiazole, 2-trichloromethyl
- polyhalogen compounds eg, acridine derivatives (eg, 9-phenylacridine, 1,7-bis (9,9′-acridinyl) heptane, etc.), N-phenylglycine, etc.
- the ketone compound includes, for example, benzophenone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 4-methoxybenzophenone, 2-chlorobenzophenone, 4-chlorobenzophenone, 4-bromobenzophenone, 2-carboxybenzophenone, 2 -Ethoxycarbonylbenzophenone, benzophenonetetracarboxylic acid or its tetramethyl ester, 4,4'-bis (dialkylamino) benzophenones (eg, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bisdicyclohexylamino ) Benzophenone, 4,4′-bis (diethylamino) benzophenone, 4,4′-bis (dihydroxyethylamino) benzophenone, 4-methoxy-4′-dimethylamino Zophenone, 4,4'-dimethoxybenzophenone, 4-dimethylamino
- a hydroxyacetophenone compound, an aminoacetophenone compound, and an acyl phosphine compound can also be suitably used. More specifically, for example, an aminoacetophenone initiator described in JP-A-10-291969 and an acylphosphine oxide initiator described in Japanese Patent No. 4225898 can also be used.
- a hydroxyacetophenone type initiator IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, IRGACURE-127 (trade name: all manufactured by BASF Corp.) can be used.
- aminoacetophenone initiators commercially available products IRGACURE-907, IRGACURE-369, and IRGACURE-379, IRGACURE-OXE379 (trade names: all manufactured by BASF Corp.) can be used.
- the aminoacetophenone-based initiator compounds described in JP-A-2009-191179 in which the absorption wavelength is matched to a long wave light source such as 365 nm or 405 nm can also be used.
- group initiator IRGACURE-819 and DAROCUR-TPO (brand name: all are BASF Corporation make) which are commercial items can be used.
- an oxime compound is mentioned.
- compounds described in JP-A-2001-233842 compounds described in JP-A-2000-80068, and compounds described in JP-A-2006-342166 can be used.
- IRGACURE-OXE01 manufactured by BASF
- IRGACURE-OXE02 manufactured by BASF
- TR-PBG-304 manufactured by Changzhou Strong Electronic New Materials Co., Ltd.
- Adeka ARKLS NCI-831 Adeka ARKLES NCI-930 (Made by ADEKA) is also used suitably.
- oxime compounds other than those described above compounds described in JP-T-2009-519904, in which an oxime is linked to the carbazole N-position, compounds described in US Pat. No. 7,626,957, in which a hetero substituent is introduced into a benzophenone moiety, Compounds described in JP-A-2010-15025 and U.S. Patent Publication 2009-292039, in which a nitro group is introduced to a dye site, ketooxime compounds described in WO2009-131189, triazine skeleton and oxime skeleton have the same molecule
- the compound described in US Pat. No. 7,556,910, the compound described in JP-A 2009-221114 having an absorption maximum at 405 nm and good sensitivity to a g-line light source may be used.
- the cyclic oxime compounds described in JP-A-2007-231000 and JP-A-2007-322744 can also be suitably used.
- cyclic oxime compounds cyclic oxime compounds fused to a carbazole dye described in, for example, JP-A-2010-32985 and JP-A-2010-185072 have high light absorption and high sensitivity. preferable.
- the compound described in JP-A-2009-242469, which has an unsaturated bond at a specific site of the oxime compound can also be used preferably because high sensitivity can be achieved by regenerating the active radical from the polymerization inactive radical. it can.
- an oxime compound having a specific substituent described in JP-A-2007-269779 or an oxime compound having a thioaryl group shown in JP-A-2009-191061 can be mentioned.
- an oxime compound which is a photopolymerization initiator a compound represented by the following general formula (OX-1) is preferable.
- the N—O bond of the oxime may be an oxime compound of (E) form, an oxime compound of (Z) form, or a mixture of (E) form and (Z) form. .
- R and B each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group.
- the monovalent substituent represented by R is preferably a monovalent nonmetal atomic group.
- the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group and an arylthiocarbonyl group.
- these groups may have one or more substituents.
- the substituent mentioned above may be further substituted by the other substituent.
- substituents examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, an aryl group and the like.
- the alkyl group is preferably an alkyl group having a carbon number of 1 to 30, and specifically, methyl group, ethyl group, propyl group, butyl group, hexyl group, octyl group, decyl group, dodecyl group, octadecyl group, isopropyl group , Isobutyl, sec-butyl, tert-butyl, 1-ethylpentyl, cyclopentyl, cyclohexyl, trifluoromethyl, 2-ethylhexyl, phenacyl, 1-naphthoylmethyl, 2-naphthoyl Methyl group, 4-methylsulfanylphenacyl group, 4-phenylsulfanylphenacyl group, 4-dimethylaminophenacyl group, 4-cyanophenacyl group, 4-methylphenacyl group, 2-methylphenacyl group, 3-fluorophenayl
- the aryl group is preferably an aryl group having a carbon number of 6 to 30, and specifically, phenyl group, biphenyl group, 1-naphthyl group, 2-naphthyl group, 9-anthryl group, 9-phenanthryl group, 1-pyrenyl group Group, 5-naphthacenyl group, 1-indenyl group, 2-azulenyl group, 9-fluorenyl group, terphenyl group, quarter phenyl group, o-tolyl group, m-tolyl group, p-tolyl group, xylyl group, o- Cumenyl group, m-cumenyl group and p-cumenyl group, mesityl group, pentalenyl group, binaphthalenyl group, ternaphthalenyl group, quarternaphthalenyl group, heptarenyl group, biphenylenyl group, indasenyl group, flu
- the acyl group is preferably an acyl group having a carbon number of 2 to 20. Specifically, an acetyl group, a propanoyl group, a butanoyl group, a trifluoroacetyl group, a pentanoyl group, a benzoyl group, a 1-naphthoyl group, and a 2-naphthoyl group , 4-Methylsulfanylbenzoyl group, 4-phenylsulfanylbenzoyl group, 4-dimethylaminobenzoyl group, 4-diethylaminobenzoyl group, 2-chlorobenzoyl group, 2-methylbenzoyl group, 2-methoxybenzoyl group, 2-butoxybenzoyl group Group, 3-chlorobenzoyl group, 3-trifluoromethylbenzoyl group, 3-cyanobenzoyl group, 3-nitrobenzoyl group, 4-fluorobenzoyl group, 4-
- the alkoxycarbonyl group is preferably an alkoxycarbonyl group having a carbon number of 2 to 20, and specifically, a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, a butoxycarbonyl group, a hexyloxycarbonyl group, an octyloxycarbonyl group, decyl. Examples thereof include an oxycarbonyl group, an octadecyloxycarbonyl group, and a trifluoromethyloxycarbonyl group.
- aryloxycarbonyl group examples include phenoxycarbonyl group, 1-naphthyloxycarbonyl group, 2-naphthyloxycarbonyl group, 4-methylsulfanylphenyloxycarbonyl group, 4-phenylsulfanylphenyloxycarbonyl group, 4-dimethylamino Phenyloxycarbonyl group, 4-diethylaminophenyloxycarbonyl group, 2-chlorophenyloxycarbonyl group, 2-methylphenyloxycarbonyl group, 2-methoxyphenyloxycarbonyl group, 2-butoxyphenyloxycarbonyl group, 3-chlorophenyloxycarbonyl group , 3-trifluoromethylphenyloxycarbonyl group, 3-cyanophenyloxycarbonyl group, 3-nitrophenyloxycarbonyl group, 4-fluorophenyl Oxycarbonyl group, 4-cyanophenyl oxycarbonyl group, and, 4-methoxy phenyloxycarbony
- the heterocyclic group is preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom, an oxygen atom, a sulfur atom or a phosphorus atom.
- thienyl group benzo [b] thienyl group, naphtho [2,3-b] thienyl group, thianthrenyl group, furyl group, pyranyl group, isobenzofuranyl group, chromenyl group, xanthenyl group, phenoxatyi.
- alkylthiocarbonyl group examples include methylthiocarbonyl group, propylthiocarbonyl group, butylthiocarbonyl group, hexylthiocarbonyl group, octylthiocarbonyl group, decylthiocarbonyl group, octadecylthiocarbonyl group, and trifluoromethylthiocarbonyl group. Can be illustrated.
- arylthiocarbonyl group 1-naphthylthiocarbonyl group, 2-naphthylthiocarbonyl group, 4-methylsulfanylphenylthiocarbonyl group, 4-phenylsulfanylphenylthiocarbonyl group, 4-dimethylaminophenylthiocarbonyl group , 4-diethylaminophenylthiocarbonyl group, 2-chlorophenylthiocarbonyl group, 2-methylphenylthiocarbonyl group, 2-methoxyphenylthiocarbonyl group, 2-butoxyphenylthiocarbonyl group, 3-chlorophenylthiocarbonyl group, 3-triphenylthiocarbonyl group Fluoromethylphenylthiocarbonyl group, 3-cyanophenylthiocarbonyl group, 3-nitrophenylthiocarbonyl group, 4-fluorophenylthiocarbonyl group, 4-cyanophenylthiocarbonyl group,
- the monovalent substituent represented by B represents an aryl group, a heterocyclic group, an arylcarbonyl group or a heterocyclic carbonyl group. Also, these groups may have one or more substituents. As the substituent, the above-mentioned substituents can be exemplified. Moreover, the substituent mentioned above may be further substituted by the other substituent.
- Y, X and n are respectively synonymous with Y, X and n in General Formula (OX-2) described later, and preferred examples are also the same.
- examples of the divalent organic group represented by A include an alkylene group having 1 to 12 carbon atoms, a cycloalkylene group and an alkynylene group. Also, these groups may have one or more substituents. As the substituent, the above-mentioned substituents can be exemplified. Moreover, the substituent mentioned above may be further substituted by the other substituent. Among them, as A in the formula (OX-1), an unsubstituted alkylene group, an alkyl group (for example, a methyl group, an ethyl group, a tert-butyl group, dodecyl group) from the viewpoint of enhancing sensitivity and suppressing coloring due to heating and aging.
- an alkyl group for example, a methyl group, an ethyl group, a tert-butyl group, dodecyl group
- alkylene group substituted alkylene group, alkenyl group (eg, vinyl group, allyl group) substituted alkylene group, aryl group (eg, phenyl group, p-tolyl group, xylyl group, cumenyl group, naphthyl group, anthryl group) Groups, phenanthryl groups, styryl groups) -substituted alkylene groups are preferred.
- the aryl group represented by Ar in the formula (OX-1) is preferably an aryl group having a carbon number of 6 to 30, and may have a substituent.
- substituents those similar to the substituents introduced into the substituted aryl group mentioned as the specific example of the aryl group which may have a substituent can be exemplified. Among them, a substituted or unsubstituted phenyl group is preferable from the viewpoint of enhancing sensitivity and suppressing coloring due to heating and aging.
- the structure of “SAr” formed of Ar in formula (OX-1) and S adjacent thereto is preferably a structure shown below in view of sensitivity.
- Me represents a methyl group
- Et represents an ethyl group.
- the oxime compound is preferably a compound represented by the following general formula (OX-2).
- R and X each independently represent a monovalent substituent
- a and Y each independently represent a divalent organic group
- Ar represents an aryl group
- n is 0 to It is an integer of five.
- R, A and Ar in General Formula (OX-2) have the same meanings as R, A and Ar in General Formula (OX-1), and preferred examples are also the same.
- the monovalent substituent represented by X in the general formula (OX-2) is, for example, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyloxy group, an acyl group, an alkoxycarbonyl group, an amino group or a heterocyclic ring And halogen atoms. Also, these groups may have one or more substituents. As the substituent, the above-mentioned substituents can be exemplified. Moreover, the substituent mentioned above may be further substituted by the other substituent.
- X in the general formula (OX-2) an alkyl group is preferable from the viewpoint of solvent solubility and improvement of absorption efficiency in a long wavelength region.
- n represents an integer of 0 to 5, preferably an integer of 0 to 2.
- Examples of the divalent organic group represented by Y in General Formula (OX-2) include the structures shown below. In the groups shown below, “*” represents a bonding position between Y and the adjacent carbon atom in formula (OX-2).
- the following structure is preferable from the viewpoint of high sensitivity.
- the oxime compound is preferably a compound represented by the following general formula (OX-3) or (OX-4).
- R and X each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group
- n is 0 It is an integer of ⁇ 5.
- R, X, A, Ar and n in the general formula (OX-3) or (OX-4) have the same meanings as R, X, A, Ar and n in the general formula (OX-2) Preferred examples are also the same.
- the oxime compound has a maximum absorption wavelength in a wavelength range of 350 nm to 500 nm, preferably an absorption wavelength in a wavelength range of 360 nm to 480 nm, and particularly preferably one having a high absorbance at 365 nm and 455 nm.
- the oxime compound preferably has a molar absorption coefficient at 365 nm or 405 nm of 1,000 to 300,000, more preferably 2,000 to 300,000, from the viewpoint of sensitivity, and more preferably 5,000 to 200 And particularly preferably 1,000.
- the molar absorption coefficient of the compound may be a known method, and specifically, for example, 0.01 g of an ethyl acetate solvent is used in a UV-visible spectrophotometer (Cary-5 spctrophotometer manufactured by Varian). It is preferable to measure at a concentration of / L.
- the photopolymerization initiators used in the present invention may be used in combination of two or more as needed.
- the content of the (D) photopolymerization initiator is preferably 0.1 to 50% by mass with respect to the total solid content of the coloring composition, More preferably, it is 0.5 to 30% by mass, and still more preferably 1 to 20% by mass. Within this range, better sensitivity and patternability can be obtained.
- the coloring composition of the present invention preferably further contains an alkali soluble resin.
- the component contained in the coloring composition of this invention as a pigment dispersant is not contained in alkali-soluble resin here.
- the alkali-soluble resin is a linear organic polymer, and promotes at least one alkali solubility in a molecule (preferably a molecule having an acrylic copolymer or a styrene copolymer as a main chain) It can be suitably selected from alkali-soluble resins having a group. From the viewpoint of heat resistance, polyhydroxystyrene resins, polysiloxane resins, acrylic resins, acrylamide resins, and acrylic / acrylamide copolymer resins are preferable. From the viewpoint of control of developability, acrylic resins and acrylamide resins are preferable. Resins and acrylic / acrylamide copolymer resins are preferred.
- Examples of groups promoting alkali solubility include, for example, carboxyl groups, phosphoric acid groups, sulfonic acid groups, and phenolic hydroxyl groups, but they are soluble in organic solvents and developed with weak alkaline aqueous solutions. Possible are preferred, and (meth) acrylic acid is mentioned as being particularly preferred. These acid groups may be of only one type, or of two or more types.
- a monomer capable of giving an acid group after polymerization for example, a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, a monomer having an epoxy group such as glycidyl (meth) acrylate, 2-isocyanatoethyl (meth)
- the monomer etc. which have isocyanate groups, such as an acrylate are mentioned.
- the monomers for introducing these acid groups may be only one type or two or more types.
- a monomer having an acid group and / or a monomer capable of providing an acid group after polymerization (hereinafter, may be referred to as "monomer for introducing an acid group”). ) May be polymerized as a monomer component.
- monomer for introducing an acid group a monomer having an acid group and / or a monomer capable of providing an acid group after polymerization
- ) May be polymerized as a monomer component.
- transducing an acidic radical by using as a monomer component the monomer which can provide an acidic radical after superposition
- polymerization is needed.
- a known radical polymerization method can be applied to the production of the alkali-soluble resin.
- the polymerization conditions such as temperature, pressure, type of radical initiator and amount thereof, type of solvent, etc. when producing an alkali-soluble resin by radical polymerization method can be easily set by those skilled in the art, and the conditions are determined experimentally. You can also do so.
- a polymer having a carboxylic acid in a side chain is preferable, and a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, a crotonic acid copolymer Maleic acid copolymer, partially esterified maleic acid copolymer, alkali-soluble phenol resin such as novolak resin, etc., acid cellulose derivative having carboxylic acid in side chain, acid anhydride added to polymer having hydroxyl group are listed.
- copolymers of (meth) acrylic acid and other monomers copolymerizable therewith are suitable as the alkali-soluble resin.
- alkyl (meth) acrylates examples include alkyl (meth) acrylates, aryl (meth) acrylates, vinyl compounds and the like.
- alkyl (meth) acrylate and aryl (meth) acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, pentyl (meth) acrylate, Hexyl (meth) acrylate, octyl (meth) acrylate, phenyl (meth) acrylate, benzyl (meth) acrylate, tolyl (meth) acrylate, naphthyl (meth) acrylate, cyclohexyl (meth) acrylate, etc., vinyl compounds such as styrene, ⁇ -methylstyrene, vinyl tolu
- the alkali-soluble resin may also include a polymer (a) formed by polymerizing a monomer component essentially comprising a compound represented by the following general formula (ED) (hereinafter sometimes referred to as "ether dimer”). preferable.
- ED general formula
- R 1 and R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
- the hydrocarbon group having 1 to 25 carbon atoms which may have a substituent represented by R 1 and R 2 in the general formula (ED) representing an ether dimer is not particularly limited, and, for example, methyl , Linear or branched alkyl groups such as ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, tert-amyl, stearyl, lauryl, 2-ethylhexyl; aryl groups such as phenyl; Alicyclic groups such as tert-butylcyclohexyl, dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl, 2-methyl-2-adamantyl; substituted with alkoxy such as 1-methoxyethyl or 1-e
- ether dimer examples include, for example, dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, n-Propyl) -2,2 '-[oxybis (methylene)] bis-2-propenoate, di (isopropyl) -2,2'-[oxybis (methylene)] bis-2-propenoate, di (n-butyl) -2,2 '-[Oxybis (methylene)] bis-2-propenoate, di (isobutyl) -2,2'-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl) -2,2 '-[Oxybis (methylene)] bis-2-propenoate, di (tert-amyl) -2,2'-[oxybis (methylene)] bis-2-propeno Di (stearyl
- dimethyl-2,2 '-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2'-[oxybis (methylene)] bis-2-propenoate, dicyclohexyl-2,2'- [Oxybis (methylene)] bis-2-propenoate and dibenzyl-2,2 '-[oxybis (methylene)] bis-2-propenoate are preferred.
- One of these ether dimers may be used alone, or two or more thereof may be used.
- the structure derived from the compound represented by the general formula (ED) may be copolymerized with other monomers.
- alkali-soluble resin which has a polymeric group.
- an alkali-soluble resin containing an allyl group, a (meth) acrylic group, an allyloxyalkyl group or the like in a side chain is useful.
- the alkali-soluble resin having a polymerizable group include Diamond NR series (made by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (containing COOH containing polyurethane acrylic oligomer. Diamond Shamrock Co.
- an alkali-soluble resin having a polymerizable group an isocyanate group and an OH group are reacted in advance to leave one unreacted isocyanate group, and a reaction between a compound containing a (meth) acryloyl group and an acrylic resin containing a carboxyl group Urethane-modified polymerizable double bond-containing acrylic resin, unsaturated group-containing acrylic resin obtained by the reaction of an acrylic resin containing a carboxyl group and a compound having both an epoxy group and a polymerizable double bond in the molecule, Acid pendant type epoxy acrylate resin, polymerizable double bond-containing acrylic resin obtained by reacting acrylic resin containing OH group and dibasic acid anhydride having polymerizable double bond, acrylic resin containing OH group, isocyanate and polymerizable Resin in which a compound having a hydroxyl group is reacted, as described in JP-A-2002-229207 Resins obtained by basic treatment of a resin having an ester group
- alkali-soluble resin in particular, a multicomponent copolymer composed of a benzyl (meth) acrylate / (meth) acrylic acid copolymer and a benzyl (meth) acrylate / (meth) acrylic acid / other monomer is preferable.
- Binder Resins Described in 0098 and Binder Resins Used in Examples Binder Resins Described in Paragraphs 0022 to 0032 of JP 2012-137531 A and Binder Resins Used in Examples Binder resins described in paragraphs 0132 to 0143 of 024934 and binder resins used in the examples, binder resins used in paragraphs 0092 to 0098 of JP 2011-242752 A and examples, Paragraph number of the open 2012-032770 gazette It preferred to use a binder resin according to 030-0072. The contents of these are incorporated herein. More specifically, the following resins are preferred.
- the acid value of the alkali-soluble resin is preferably 30 mg KOH / g to 200 mg KOH / g, more preferably 50 mg KOH / g to 150 mg KOH / g, and most preferably 70 mg KOH / g to 120 mg KOH / g.
- the weight average molecular weight (Mw) of the alkali-soluble resin is preferably 2,000 to 50,000, more preferably 5,000 to 30,000, and most preferably 7,000 to 20,000.
- the measuring method of the molecular weight of the compound used by this invention can be measured by gel permeation chromatography (GPC), and is defined as a polystyrene conversion value by measurement of GPC.
- the content of the alkali-soluble resin in the coloring composition is preferably 1 to 15% by mass, and more preferably, the total solid content of the coloring composition. It is 2 to 12% by mass, particularly preferably 3 to 10% by mass.
- the coloring composition of the present invention may contain only one type of alkali-soluble resin, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- the coloring composition of the present invention may further contain other components such as an organic solvent and a crosslinking agent in addition to the above-described components, as long as the effects of the present invention are not impaired.
- the coloring composition of the present invention may contain an organic solvent.
- the organic solvent is basically not particularly limited as long as the solubility of each component and the coatability of the coloring composition are satisfied, but in particular, the solubility, coatability and safety of the ultraviolet absorber, alkali soluble resin and dispersant. It is preferable to select in consideration of the nature. Moreover, when preparing the coloring composition in this invention, it is preferable that an at least 2 type of organic solvent is included.
- organic solvents examples include esters such as ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, ethyl lactate Alkyl oxyacetate (eg, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (eg, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate etc.), alkyl 3-hydroxypropionate Esters (eg methyl 3-oxypropionate, ethyl 3-oxypropionate etc.
- esters such as ethyl acetate, n-butyl acetate, is
- Alkyl oxypropionates eg, methyl 2-oxypropionate, ethyl 2-oxypropionate, propyl 2-oxypropionate, etc.
- ethers For example, diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cello
- methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, ethyl are particularly preferable in this case.
- the content of the organic solvent in the coloring composition is preferably from 5% by mass to 80% by mass, and preferably 5% by mass to 60% by mass, from the viewpoint of coatability. More preferably, 10% by mass to 50% by mass is particularly preferable.
- a crosslinking agent may be additionally used in the coloring composition of the present invention to further increase the hardness of a cured film obtained by curing the coloring composition.
- the crosslinking agent is not particularly limited as long as it can perform film curing by a crosslinking reaction, and for example, at least at least one selected from (a) epoxy resin, (b) methylol group, alkoxymethyl group, and acyloxymethyl group At least one substituent selected from melamine compounds, guanamine compounds, glycoluril compounds or urea compounds, (c) methylol groups, alkoxymethyl groups, and acyloxymethyl groups, which are substituted by one substituent; A phenol compound, a naphthol compound or a hydroxyanthracene compound is mentioned.
- the compounding amount of the crosslinking agent is not particularly limited, but preferably 2 to 30% by mass, and 3 to 20% by mass of the total solid content of the composition. More preferable.
- the coloring composition of the present invention may contain only one type of crosslinking agent, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- ⁇ polymerization inhibitor In the coloring composition of the present invention, it is desirable to add a small amount of a polymerization inhibitor in order to prevent unnecessary thermal polymerization of the polymerizable compound during production or storage of the coloring composition.
- a polymerization inhibitor which can be used in the present invention, hydroquinone, p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, tert-butyl catechol, benzoquinone, 4,4′-thiobis (3-methyl-6- (6-methyl) tert-Butylphenol), 2,2'-methylenebis (4-methyl-6-tert-butylphenol), N-nitrosophenylhydroxyamine cerous salt and the like.
- the addition amount of the polymerization inhibitor is preferably about 0.01% by mass to about 5% by mass with respect to the mass of the entire composition.
- the composition of the present invention may contain only one type of polymerization inhibitor, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- surfactant Various surfactants may be added to the coloring composition of the present invention from the viewpoint of further improving the coating properties.
- various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, a silicone surfactant and the like can be used.
- the coloring composition of the present invention further improves the liquid properties (in particular, the fluidity) when prepared as a coating liquid by containing a fluorine-based surfactant, the uniformity of the coating thickness and the saving of the coating Liquidity can be further improved. That is, in the case of forming a film using a coating liquid to which a coloring composition containing a fluorine-based surfactant is applied, the interfacial tension between the surface to be coated and the coating liquid is reduced to wet the surface to be coated The properties are improved, and the coatability on the surface to be coated is improved. For this reason, even in the case where a thin film of about several ⁇ m is formed with a small amount of liquid, it is effective in that film formation with a uniform thickness with small thickness unevenness can be more suitably performed.
- the liquid properties in particular, the fluidity
- the fluorine content in the fluorine-based surfactant is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and particularly preferably 7 to 25% by mass.
- the fluorine-based surfactant having a fluorine content in this range is effective in terms of the uniformity of the thickness of the coating film and the liquid saving property, and the solubility in the coloring composition is also good.
- fluorine-based surfactants include Megafac F171, F172, F173, F176, F177, F141, F142, F143, F44, R30, F437, F475, F479, and the like.
- Same F482, same F554, same F780, same F781 above, DIC Corporation
- Florard FC430 same FC431, same FC171 (above, Sumitomo 3M Co., Ltd.)
- Surfron S-382 same SC-101, The SC-103, SC-104, SC-105, SC1068, SC-381, SC-383, S393, KH-40 (all manufactured by Asahi Glass Co., Ltd.) and the like can be mentioned.
- nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane and their ethoxylates and propoxylates (eg, glycerol propoxylate, glycerine ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene Stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62 manufactured by BASF, 10R5, 17R2, 25R2, Tetronics 304, 701, 704, 901, 904, 150R1) Solsperse 20000 (Lubrizol Japan Co., Ltd.), and the like.
- cationic surfactants include phthalocyanine derivatives (trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid Co) polymer poly flow No. 75, no. 90, no. 95 (manufactured by Kyoeisha Chemical Co., Ltd.), W001 (manufactured by Yusho Co., Ltd.), and the like.
- phthalocyanine derivatives trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.
- organosiloxane polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
- (meth) acrylic acid Co) polymer poly flow No. 75, no. 90, no. 95 manufactured by Kyoeisha Chemical Co., Ltd.
- W001 manufactured by Yusho Co., Ltd.
- anionic surfactant examples include W004, W005, W017 (manufactured by Yusho Co., Ltd.), and the like.
- silicone type surfactant for example, Toray Dow Corning Co., Ltd. product "Tore silicone DC3PA”, “Tore silicone SH7PA”, “Tore silicone DC11PA”, “Tore silicone SH21PA”, “Tore silicone SH28PA”, “Tore silicone SH21PA” Silicone SH29PA, Toray Silicone SH30PA, Toray Silicone SH8400, Momentive Performance Materials' TSF-4440, TSF-4300, TSF-4445, TSF-4460, TSF “4452”, “KP341”, “KF6001”, “KF6002” manufactured by Shin-Etsu Silicone Co., Ltd., “BYK307”, “BYK323”, “BYK330” manufactured by BIC Chemie, and the like.
- the coloring composition of the present invention contains a surfactant, the amount of the surfactant added is preferably 0.001 to 2.0% by mass, more preferably 0 based on the total solid content of the coloring composition. It is .005 to 1.0% by mass.
- the composition of the present invention may contain only one surfactant or two or more surfactants. When it contains two or more types, it is preferable that the total amount becomes the said range.
- additives for example, a filler, an adhesion promoter, an antioxidant, an ultraviolet light absorber, an aggregation inhibitor and the like can be blended, if necessary.
- these additives include those described in paragraphs [0155] to [0156] of JP-A-2004-295116.
- the coloring composition of the present invention may contain the sensitizer and the light stabilizer described in paragraph 0078 of JP-A-2004-295116, and the thermal polymerization inhibitor described in paragraph 0081 of the same publication.
- the coloring composition of the present invention may contain an organic carboxylic acid having a molecular weight of 1000 or less and / or an organic carboxylic acid anhydride. Specifically as an organic carboxylic acid compound, aliphatic carboxylic acid or aromatic carboxylic acid is mentioned.
- aliphatic carboxylic acids include monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid and methacrylic acid, oxalic acid, malonic acid, succinic acid, Glutaric acid, adipic acid, pimelic acid, cyclohexanedicarboxylic acid, cyclohexene dicarboxylic acid, itaconic acid, citraconic acid, dicarboxylic acids such as maleic acid and fumaric acid, and tricarboxylic acids such as tricarballylic acid and aconic acid.
- monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid and methacrylic acid, oxalic acid, malonic acid, succinic acid, Glutaric acid,
- aromatic carboxylic acids include carboxylic acids such as benzoic acid and phthalic acid in which a carboxyl group is directly bonded to a phenyl group, and carboxylic acids in which a carboxyl group is bonded from a phenyl group via a carbon bond.
- carboxylic acids such as benzoic acid and phthalic acid in which a carboxyl group is directly bonded to a phenyl group
- carboxylic acids in which a carboxyl group is bonded from a phenyl group via a carbon bond.
- those having a molecular weight of 600 or less, particularly 50 to 500 and specifically, for example, maleic acid, malonic acid, succinic acid and itaconic acid are preferable.
- organic carboxylic acid anhydrides include aliphatic carboxylic acid anhydrides and aromatic carboxylic acid anhydrides. Specifically, for example, acetic acid anhydride, trichloroacetic acid anhydride, trifluoroacetic acid anhydride, tetrahydrophthalic acid anhydride Succinic anhydride, maleic anhydride, citraconic anhydride, itaconic anhydride, glutaric anhydride, 1,2-cyclohexene dicarboxylic acid anhydride, n-octadecyl succinic anhydride, 5-norbornene-2,3-dicarboxylic acid anhydride, etc. Aliphatic carboxylic anhydrides may be mentioned.
- aromatic carboxylic anhydride examples include phthalic anhydride, trimellitic anhydride, pyromellitic anhydride, naphthalic anhydride and the like. Among these, those having a molecular weight of 600 or less, particularly 50 to 500, and specifically, for example, maleic anhydride, succinic anhydride, citraconic anhydride and itaconic anhydride are preferable.
- the amount of the organic carboxylic acid and / or the organic carboxylic acid anhydride added is usually 0.01 to 10% of the total solids.
- the content is preferably in the range of 0.03% to 5% by mass, more preferably 0.05% to 3% by mass.
- the coloring composition of the present invention is prepared by mixing the above-mentioned components.
- each component which comprises a coloring composition may be mix
- the order of introduction and working conditions at the time of blending are not particularly limited.
- the composition may be prepared by dissolving and dispersing all the components simultaneously in a solvent, or, if necessary, appropriately setting each component as two or more solutions / dispersions at the time of use ) And these may be mixed to prepare a composition.
- the colored composition prepared as described above is preferably used after being separated by filtration using a filter having a pore diameter of about 0.01 ⁇ m to 3.0 ⁇ m, more preferably about 0.05 ⁇ m to about 0.5 ⁇ m. It can be provided.
- the colored composition of the present invention can form a cured film having excellent heat resistance and color characteristics, and is therefore suitably used to form a colored pattern (colored layer) of a color filter.
- the coloring composition of the present invention is suitably used for forming a coloring pattern such as a color filter used in an image display device such as a solid-state imaging device (for example, CCD, CMOS etc.) or a liquid crystal display (LCD). Can.
- a solid-state imaging device for example, CCD, CMOS etc.
- LCD liquid crystal display
- it can be used suitably also as preparation applications, such as printing ink, inkjet ink, and a paint.
- color filters for solid-state imaging devices such as CCD and CMOS can be suitably used as a production application.
- the first aspect of the pattern forming method of the present invention comprises the steps of: applying the colored composition of the present invention on a support to form a colored composition layer; and exposing the colored composition layer in a pattern-wise manner. And b. Developing and removing the unexposed area to form a colored pattern.
- the 2nd aspect of the pattern formation method of this invention is a process of applying the coloring composition of this invention on a support body, forming a coloring composition layer, hardening, and forming a coloring layer, and a coloring layer A step of forming a photoresist layer thereon, a step of patterning the photoresist layer by exposure and development to obtain a resist pattern, and a step of dry etching the colored layer using the resist pattern as an etching mask to form a colored pattern And. That is, in the present invention, a pattern can be formed by photolithography, and a pattern can be formed by dry etching.
- the pattern formation method of the present invention can be suitably applied to the formation of a colored pattern (pixel) of a color filter.
- the support for forming a pattern by the pattern forming method of the present invention is not particularly limited as long as it is a support that can be applied to pattern formation other than plate-like materials such as a substrate.
- the method for producing a color filter of the present invention applies the pattern forming method of the present invention, and includes the step of forming a colored pattern on a support using the pattern forming method of the present invention. That is, the method for producing a color filter of the present invention is to apply the pattern forming method of the present invention.
- the first embodiment of the method for producing a color filter of the present invention comprises the steps of applying the colored composition of the present invention on a support to form a colored composition layer, and exposing the colored composition layer in a pattern-wise manner And developing and removing the unexposed area to form a colored pattern. Furthermore, if necessary, a step of baking the colored composition layer (pre-baking step) and a step of baking the developed colored pattern (post-baking step) may be provided.
- the colored composition according to the present invention is applied onto a support to form a colored composition layer and cured to form a colored layer;
- a step of The color filter of the present invention can be suitably obtained by the above-mentioned production method.
- the color filter for solid-state imaging device may be simply referred to as “color filter”.
- the method for producing a color filter according to the present invention is to apply the method for forming a pattern according to the present invention, and includes forming a colored pattern on a substrate using the method for forming a pattern according to the present invention.
- ⁇ Step of Forming a Colored Composition Layer> At the process of forming a coloring composition layer, the coloring composition of this invention is applied on a support body, and a coloring composition layer is formed.
- an imaging element such as a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) is provided on a substrate (for example, a silicon substrate)
- CMOS complementary metal oxide semiconductor
- the colored pattern in the present invention may be formed on the imaging device forming surface side (front surface) of the substrate for a solid-state imaging device, or may be formed on the imaging device non-forming surface side (rear surface).
- a light shielding film may be provided between colored patterns in the solid-state imaging device or on the back surface of the substrate for the solid-state imaging device.
- a subbing layer may be provided on the support to improve the adhesion with the upper layer, to prevent the diffusion of substances, or to planarize the substrate surface.
- various coating methods such as slit coating, ink jet method, spin coating, cast coating, roll coating, screen printing can be applied.
- Drying (pre-baking) of the colored composition layer applied on the support can be carried out at a temperature of 50 ° C. to 140 ° C. for 10 seconds to 300 seconds by a hot plate, an oven or the like.
- the colored composition layer formed in the colored composition layer forming step is pattern-exposed through a mask having a predetermined mask pattern, using an exposure apparatus such as a stepper, for example. Thereby, a cured film is obtained.
- ultraviolet rays such as g-line and i-line are preferably used (particularly preferably i-line).
- Irradiation dose is more preferably 30mJ / cm 2 ⁇ 1500mJ / cm 2 is preferably 50mJ / cm 2 ⁇ 1000mJ / cm 2, and most preferably 80mJ / cm 2 ⁇ 500mJ / cm 2.
- the thickness of the cured film is preferably 1.0 ⁇ m or less, more preferably 0.1 ⁇ m to 0.9 ⁇ m, and still more preferably 0.2 ⁇ m to 0.8 ⁇ m.
- the film thickness is preferably 1.0 ⁇ m or less, high resolution and high adhesion can be obtained, which is preferable.
- a cured film having a thin film thickness of 0.7 ⁇ m or less can also be suitably formed, and the obtained cured film is developed in a pattern forming step to be described later to form a thin film. Although it is possible to obtain a colored pattern excellent in developability, surface roughness suppression and pattern shape.
- the colored composition layer in the non-light-irradiated portion in the exposure step is eluted in the aqueous alkali solution, and only the photocured portion remains.
- the developing solution an organic alkaline developing solution which does not cause damage to the underlying imaging element or circuit is desirable.
- the development temperature is usually 20 ° C. to 30 ° C., and the development time is conventionally 20 seconds to 90 seconds. In recent years, it may be carried out for 120 seconds to 180 seconds in order to remove more residue. Furthermore, in order to further improve the residue removability, the process of shaking off the developer every 60 seconds and further supplying the developer anew may be repeated several times.
- alkaline agent used for a developing solution for example, ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide
- Organic alkaline compounds such as choline, pyrrole, piperidine and 1,8-diazabicyclo- [5,4,0] -7-undecene and the like, and the concentration of these alkali agents is 0.001% to 10% by mass
- An alkaline aqueous solution diluted with pure water to preferably 0.01% by mass to 1% by mass is preferably used as a developer.
- An inorganic alkali may be used for the developer, and as the inorganic alkali, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium borate, sodium metaborate and the like are preferable.
- the developing solution which consists of such alkaline aqueous solution, generally it wash
- Post-baking is a heat treatment after development to complete the curing, and a heat curing treatment is usually performed at 100 ° C. to 240 ° C., preferably 200 ° C. to 240 ° C.
- This post-baking treatment is carried out continuously or batchwise using a heating means such as a hot plate, convection oven (hot air circulation dryer), high frequency heater or the like so that the coated film after development is under the above conditions. be able to.
- the dry etching can be performed using an etching gas with the colored layer as a mask and the patterned photoresist layer as a mask.
- a positive or negative radiation sensitive composition is applied onto the colored layer and dried to form a photoresist layer.
- a pre-bake treatment it is desirable that the heat treatment (PEB) after exposure and the heat treatment (post-bake treatment) after development be performed.
- a positive type radiation sensitive composition As a photoresist, for example, a positive type radiation sensitive composition is used.
- the positive-working radiation-sensitive composition may be a positive-working photoresist sensitive to radiation such as ultraviolet (g-ray, h-ray, i-ray), far-ultraviolet radiation including excimer laser, etc., electron beam, ion beam and X-ray.
- Suitable positive resist compositions can be used.
- the radiation g-ray, h-ray and i-ray are preferable, and i-ray is more preferable among them.
- a composition containing a quinone diazide compound and an alkali-soluble resin is preferable as the positive type radiation sensitive composition.
- the positive radiation-sensitive composition containing a quinonediazide compound and an alkali-soluble resin is that the quinonediazide group is decomposed by irradiation with light having a wavelength of 500 nm or less to form a carboxyl group, and as a result, it becomes alkaline soluble to alkaline insoluble. It is used. Since this positive photoresist has extremely excellent resolution, it is used for the fabrication of integrated circuits such as ICs and LSIs.
- a naphthoquinone diazide compound is mentioned as a quinone diazide compound. Examples of commercially available products include FHi 622 BC "(manufactured by Fujifilm Electronics Materials Co., Ltd.).
- the thickness of the photoresist layer is preferably 0.1 to 3 ⁇ m, more preferably 0.2 to 2.5 ⁇ m, and still more preferably 0.3 to 2 ⁇ m.
- coating of a photoresist layer can be suitably performed using the application method in a colored layer as stated above.
- the photoresist layer is exposed and developed to form a resist pattern (patterned photoresist layer) provided with a group of resist through holes.
- the formation of the resist pattern can be carried out by appropriately optimizing the conventionally known photolithography technology without any particular limitation.
- a resist through hole group in the photoresist layer by exposure and development, a resist pattern as an etching mask used in the next etching is provided on the colored layer.
- Exposure of the photoresist layer is carried out by subjecting a positive or negative radiation sensitive composition to exposure through g-ray, h-ray, i-ray or the like, preferably i-ray, through a predetermined mask pattern. Can. After exposure, development processing with a developer is performed to remove the photoresist in accordance with the area where the colored pattern is to be formed.
- any developer may be used as long as it does not affect the colored layer containing a colorant and dissolves the exposed portion of the positive resist and the uncured portion of the negative resist.
- combinations of various organic solvents and alkaline aqueous solutions can be used.
- alkaline compound examples include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium borate, sodium metaborate, aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, Pyrrole, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene and the like can be mentioned.
- an alkaline aqueous solution is used as a developing solution, washing treatment with water is generally performed after development.
- the resist pattern as an etching mask, patterning is performed by dry etching so that through holes are formed in the colored layer. Thereby, a coloring pattern is formed.
- the through hole group is provided in a checkered manner in the colored layer. Therefore, the first colored pattern in which the through holes are provided in the colored layer has a plurality of square-shaped first colored pixels in a checkered manner.
- the dry etching is preferably performed in the following manner from the viewpoint of forming the pattern cross section closer to a rectangle or from the viewpoint of reducing damage to the support.
- a mixed gas of fluorine-based gas and oxygen gas (O 2 ) etching is performed to a region (depth) where the support is not exposed, and after this first-stage etching, nitrogen gas ( Second step etching using a mixed gas of N 2 ) and oxygen gas (O 2 ), preferably to the vicinity of the region (depth) where the support is exposed, and over-etching performed after the support is exposed And the form containing is preferable.
- Dry etching is performed by obtaining etching conditions in advance by the following method.
- (1) The etching rate (nm / min) in the first stage etching and the etching rate (nm / min) in the second stage etching are respectively calculated.
- (2) The time for etching the desired thickness in the first stage etching and the time for etching the desired thickness in the second stage etching are respectively calculated.
- (3) The first-stage etching is performed in accordance with the etching time calculated in (2) described above.
- the second stage etching is performed in accordance with the etching time calculated in (2) described above. Alternatively, the etching time may be determined by end point detection, and the second etching may be performed according to the determined etching time.
- (5) The over-etching time is calculated with respect to the total time of (3) and (4) described above, and over-etching is performed.
- the mixed gas used in the first-stage etching step preferably contains a fluorine-based gas and an oxygen gas (O 2 ) from the viewpoint of processing the organic material to be etched into a rectangular shape.
- a fluorine-based gas and an oxygen gas (O 2 ) from the viewpoint of processing the organic material to be etched into a rectangular shape.
- O 2 oxygen gas
- damage to the support can be avoided by etching to the area where the support is not exposed.
- etching is performed to a region where the support is not exposed by the mixed gas of fluorine-based gas and oxygen gas in the first-step etching step. From the viewpoint, it is preferable to perform the etching process using a mixed gas of nitrogen gas and oxygen gas.
- the ratio of the latter in the total etching amount (the sum of the etching amount in the first step etching step and the etching amount in the second step etching step) is preferably in the range of more than 0% and 50% or less And 10 to 20% is more preferable.
- the etching amount refers to an amount calculated from the difference between the remaining film thickness of the film to be etched and the film thickness before etching.
- the etching preferably includes an over-etching process.
- the over-etching process is preferably performed with the over-etching ratio set. Moreover, it is preferable to calculate the over-etching ratio from the etching processing time to be performed first.
- the over-etching ratio can be set arbitrarily, it is preferably 30% or less of the etching processing time in the etching step, and it is 5 to 25% in terms of etching resistance of the photoresist and maintaining rectangularity of the pattern to be etched. Is more preferable, and 10 to 15% is particularly preferable.
- the resist pattern ie, the etching mask
- the removal of the resist pattern preferably includes the steps of: applying a stripping solution or a solvent onto the resist pattern to make the resist pattern removable; and removing the resist pattern using cleaning water.
- a step of applying a stripping solution or a solvent on the resist pattern to make the resist pattern removable for example, a step of applying a stripping solution or a solvent on at least a resist pattern, and stagnating for a predetermined time for paddle development Can be mentioned.
- the time for which the stripping solution or solvent is stagnated is not particularly limited, but is preferably several tens of seconds to several minutes.
- a process of removing the resist pattern using cleaning water for example, a process of removing the resist pattern by spraying cleaning water onto the resist pattern from a spray type or shower type spray nozzle can be mentioned.
- washing water pure water can be preferably used.
- examples of the injection nozzle include an injection nozzle in which the entire support is included in the injection range, and an injection nozzle which is a movable injection nozzle and whose movable range includes the entire support.
- the spray nozzle is movable, the resist pattern can be removed more effectively by moving the support from the center to the end of the support twice or more during the process of removing the resist pattern to spray the washing water. be able to.
- the stripping solution generally contains an organic solvent, but may further contain an inorganic solvent.
- organic solvent for example, 1) hydrocarbon compound, 2) halogenated hydrocarbon compound, 3) alcohol compound, 4) ether or acetal compound, 5) ketone or aldehyde compound, 6) ester compound 7) Polyhydric alcohol compounds, 8) carboxylic acids or acid anhydride compounds thereof, 9) phenolic compounds, 10) nitrogen-containing compounds, 11) sulfur-containing compounds, 12) fluorine-containing compounds.
- the stripping solution preferably contains a nitrogen-containing compound, and more preferably contains a non-cyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- the non-cyclic nitrogen-containing compound is preferably a non-cyclic nitrogen-containing compound having a hydroxyl group.
- monoisopropanolamine, diisopropanolamine, triisopropanolamine, N-ethylethanolamine, N, N-dibutylethanolamine, N-butylethanolamine, monoethanolamine, diethanolamine, triethanolamine and the like It is preferably monoethanolamine, diethanolamine or triethanolamine, more preferably monoethanolamine (H 2 NCH 2 CH 2 OH).
- cyclic nitrogen-containing compounds isoquinoline, imidazole, N-ethylmorpholine, ⁇ -caprolactam, quinoline, 1,3-dimethyl-2-imidazolidinone, ⁇ -picoline, ⁇ -picoline, ⁇ -picoline, 2- Pipecoline, 3-pipecoline, 4-pipecoline, piperazine, piperidine, pyrazine, pyridine, pyrrolidine, N-methyl-2-pyrrolidone, N-phenylmorpholine, 2,4-lutidine, 2,6-lutidine and the like, and preferred Is N-methyl-2-pyrrolidone, N-ethyl morpholine, more preferably N-methyl-2-pyrrolidone (NMP).
- NMP N-methyl-2-pyrrolidone
- the stripping solution preferably contains a non-cyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- a non-cyclic nitrogen-containing compound at least one selected from monoethanolamine, diethanolamine, and triethanolamine, and cyclic It is more preferable to contain at least one selected from N-methyl-2-pyrrolidone and N-ethyl morpholine as the nitrogen-containing compound, and it is even more preferable to contain monoethanolamine and N-methyl-2-pyrrolidone.
- the deposit means an etching product adhering to and deposited on the side wall of the colored layer.
- the content of the non-cyclic nitrogen-containing compound is 9 parts by mass to 11 parts by mass with respect to 100 parts by mass of the stripping solution, and the content of the cyclic nitrogen-containing compound is 100 parts by mass of the stripping solution.
- those which are 65 parts by mass or more and 70 parts by mass or less are desirable.
- the stripping solution is preferably one obtained by diluting a mixture of a non-cyclic nitrogen-containing compound and a cyclic nitrogen-containing compound with pure water.
- the manufacturing method of the color filter of this invention may have a well-known process as a manufacturing method of the color filter for solid-state image sensors as processes other than the above as needed.
- a curing step of curing the formed colored pattern by heating and / or exposure may be included, if necessary.
- the solvent related to the coloring composition of the present invention Is preferably used as a cleaning solution.
- the cleaning solution described in JP2007-2101A, JP2007-2102A, JP2007-281523A, and the like can also be suitably used as the removal of the colored composition according to the present invention.
- alkylene glycol monoalkyl ether carboxylate and alkylene glycol monoalkyl ether are preferable. These solvents may be used alone or in combination of two or more. When mixing 2 or more types, it is preferable to mix the solvent which has a hydroxyl group, and the solvent which does not have a hydroxyl group.
- the mass ratio of the solvent having a hydroxyl group to the solvent having no hydroxyl group is 1/99 to 99/1, preferably 10/90 to 90/10, and more preferably 20/80 to 80/20.
- the surfactant related to the composition described above may be added to the cleaning solution.
- the color filter of the present invention uses the coloring composition of the present invention, it can perform exposure with an excellent exposure margin, and the formed coloring pattern (colored pixel) is excellent in the pattern shape, and the surface of the pattern is rough or Since the residue in the developing unit is suppressed, the color characteristic is excellent.
- the color filter of the present invention can be suitably used for solid-state imaging devices such as CCDs and CMOSs, and is particularly suitable for high-resolution CCDs and CMOSs having one million pixels or more.
- the color filter for solid-state imaging device of the present invention can be used, for example, as a color filter disposed between a light receiving portion of each pixel constituting a CCD or a CMOS and a microlens for collecting light.
- the film thickness of the colored pattern (colored pixel) in the color filter of the present invention is preferably 2.0 ⁇ m or less, more preferably 1.0 ⁇ m or less, and still more preferably 0.7 ⁇ m or less.
- the size (pattern width) of the colored pattern (colored pixel) is preferably 2.5 ⁇ m or less, more preferably 2.0 ⁇ m or less, and particularly preferably 1.7 ⁇ m or less.
- the solid-state imaging device of the present invention comprises the color filter of the present invention.
- the configuration of the solid-state imaging device according to the present invention is the configuration provided with the color filter according to the present invention, and is not particularly limited as long as it functions as a solid-state imaging device. .
- a support there are a plurality of photodiodes constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.) and transfer electrodes made of polysilicon etc., and photodiodes and photodiodes on the transfer electrodes.
- a device protection film made of silicon nitride or the like formed so as to cover the entire surface of the light shielding film and the light receiving portion of the photodiode on the light shielding film;
- the color filter for the solid-state imaging device of the present invention is provided on the upper side.
- a configuration having a condensing means for example, a micro lens etc. hereinafter the same
- a condensing means for example, a micro lens etc. hereinafter the same
- a constitution having a condensing means on the color filter It may be
- the color filter of the present invention can be used not only for solid-state imaging devices but also for image display devices such as liquid crystal display devices and organic EL display devices, and is particularly suitable for use in liquid crystal display devices.
- the liquid crystal display device provided with the color filter of the present invention can display a high quality image excellent in display characteristics with good color tone of the display image.
- the color filter of the present invention may be used in a color TFT liquid crystal display device.
- the color TFT liquid crystal display device is described, for example, in “Color TFT liquid crystal display (Kyoritsu Publishing Co., Ltd., published in 1996)”.
- the present invention is applied to a liquid crystal display device with a wide viewing angle such as IPS or other horizontal electric field drive method, MVA or other pixel division method, STN, TN, VA, OCS, FFS, R-OCB, etc. it can.
- the color filter in the present invention can also be used for a bright and high-definition color-filter on array (COA) system.
- COA color-filter on array
- the required characteristics for the color filter layer are required to have the required characteristics for the interlayer insulating film, that is, the low dielectric constant and the stripping solution resistance, in addition to the usual required characteristics as described above.
- the color filter of the present invention since the dye multimer having excellent hue is used, the color purity, light transmittance and the like are good and the color pattern (pixel) has excellent color tone, so the resolution is high and the long-term durability is excellent.
- a liquid crystal display device of a COA system can be provided.
- a resin film may be provided on the color filter layer.
- the liquid crystal display device provided with the color filter in the present invention is composed of various members such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, a viewing angle ensuring film, in addition to the color filter in the present invention.
- the color filter of the present invention can be applied to a liquid crystal display composed of these known members.
- these members for example, “'94 Liquid crystal display peripheral materials and chemicals market (Kentaro Shima, Inc., CMSC Co., Ltd. 1994 issue),” “Present state and future prospect of liquid crystal related market in 2003 (second volume) (Yoshikichi Co., Ltd. Fuji Chimera Research Institute, published in 2003).
- For backlight see SID meeting Digest 1380 (2005) (A. Konno et. Al), pages 18 to 24 of Monthly Display December 2005 (Yasuhiro Shima), pages 25 to 30 (Takaaki Yagi), etc. Have been described.
- the color filter according to the present invention When the color filter according to the present invention is used in a liquid crystal display device, high contrast can be realized when it is combined with a conventionally known cold cathode tube three wavelength tube, but red, green and blue LED light sources (RGB-LED) By using as a backlight, it is possible to provide a liquid crystal display device having high luminance and high color purity and good color reproducibility.
- RGB-LED red, green and blue LED light sources
- Synthesis Example 1 ⁇ Synthesis of Dye (S-37)> The synthesis of dye (S-37) was performed according to the following scheme.
- composition example 2 ⁇ Synthesis of Dye (S-40)> A dye (S-40) was prepared in the same manner as in Synthesis Example 1 except that lithium salt of tris (trifluoromethylsulfonyl) methide was used instead of lithium salt of bis (trifluoromethylsulfonyl) imide in Synthesis Example 1. Synthesized.
- composition example 3 ⁇ Synthesis of Dye (S-26)> The synthesis of the dye (S-26) was performed according to the following scheme.
- This intermediate (C-1) is added to 20 ml of a 1N aqueous solution of potassium hydroxide, and after stirring for 1 hour, an aqueous solution of a lithium salt of bis (trifluoromethylsulfonyl) imide is added, and the resulting precipitate is collected by filtration. Thus, 4.5 g of (S-26) was obtained.
- composition example 4 ⁇ Synthesis of Dye (S-46)> Synthesis Example 3 and Synthesis Example 3 except that Rhodamine B was used instead of (A-1), and lithium salt of tetrakis (pentafluorophenyl) borate was used instead of lithium salt of bis (trifluoromethylsulfonyl) imide.
- Dye (S-46) was synthesized in the same manner.
- the molecular weight of (S-51) is 3622 and the molecular weight of (S-52) is 4146.
- the dye residue D is shown below. * Is a binding site to Q.
- the obtained organic layer was dried over magnesium sulfate, and the organic layer was concentrated under reduced pressure to remove ethyl acetate to obtain 169.7 g of Compound (A-2).
- DMAc dimethylacetamide
- AOI (2-isocyanatoethyl acrylate)
- BHT dibutylhydroxytoluene
- Color composition 3-1 Preparation of coloring composition 3-1.
- Preparation of Blue Pigment Dispersion Blue pigment dispersion 1 was prepared as follows. C. I. Pigment Blue 15: 6 (blue pigment, average particle size 55 nm), and a mixture consisting of 5.0 parts of the pigment dispersant Disperbyk 111 and 82.0 parts of PGMEA, as a beads mill (zirconia beads) The pigment dispersion was prepared by mixing and dispersing for 3 hours with a 0.3 mm diameter).
- dispersion treatment was carried out at a flow rate of 500 g / min under a pressure of 2000 kg / cm 3 using a high pressure disperser NANO-3000-10 (manufactured by Nippon Bei Co., Ltd.) with a pressure reducing mechanism.
- This dispersion process was repeated 10 times to obtain a blue pigment dispersion 1 (CI Pigment Blue 15: 6 dispersion, 13% pigment concentration) used for the coloring composition of the example or the comparative example.
- the particle size of the pigment in the resulting blue pigment dispersion was measured by a dynamic light scattering method (Microtrac Nanotrac UPA-EX 150 (manufactured by Nikkiso Co., Ltd.)) and found to be 24 nm.
- Example 1 of pattern formation to which photolithographic method is applied Each of the coloring compositions of the examples and comparative examples prepared as described above is referred to the above 2. It apply
- the silicon wafer on which the coloring pattern is formed is fixed to a horizontal rotary table by a vacuum chuck method, and the silicon wafer substrate is rotated at a number of revolutions of 50 r. p. m. While rotating at the same time, pure water was supplied in the form of a shower from a jet nozzle from above the rotation center to perform a rinse process, and then spray drying was performed. As described above, a color filter having a coloring pattern formed by the coloring composition of the example or the comparative example was produced. Thereafter, the size of the colored pattern was measured using a length measurement SEM “S-9260A” (manufactured by Hitachi High-Technologies Corporation). The exposure amount at which the pattern size becomes 1.0 ⁇ m was taken as the optimum exposure amount.
- Performance evaluation 5-1 One hundred colored patterns were observed, and the number of defective patterns was counted. The larger the number, the worse the pattern defect. The results are shown in the following table.
- Pattern linearity One hundred patterns were observed with a length measurement SEM to determine pattern linearity. A: The shape is rectangular, and the side of the pattern is a straight line B: The shape is rectangular, and the side of the pattern is a slightly distorted straight line but there is no problem in practical use C: The shape is rounded and the pattern is flat The side is rough and there is a problem in practical use
- a differential interference image was observed by reflection observation (magnification of 50 times) using an optical microscope BX60 manufactured by OLYMPUS. Then, it is immersed in an alkali developing solution FHD-5 (manufactured by Fujifilm Electronics Materials Co., Ltd.) for 5 minutes and dried, and then the spectroscopic measurement is performed again, and from the following formula (1), before and after immersion in the alkali developing solution
- the transmittance fluctuation was determined and evaluated according to the following criteria.
- Transmittance fluctuation before and after immersion in alkaline developer
- T0 Transmittance of color filter before immersion in alkaline developer
- T1 Permeability of color filter after immersion in alkaline developer: Good AA: The transmittance fluctuation before and after immersion in alkaline developer is 2 over the entire region of 300 nm to 800 nm % Less A: Slightly better in the whole region of 300 nm to 800 nm, the transmittance fluctuation before and after immersion in the alkaline developer is 2% or more and less than 5% B: sufficient in all the region of 300 nm to 800 nm C: 5% or more and less than 10% C: Insufficient The transmittance fluctuation before and after immersion in the alkaline developer is 10% or more in the entire region of 300 nm to 800 nm.
- Preparation of Colored Composition The following components were mixed, dispersed and dissolved to obtain a colored composition of Examples 90 to 192.
- Cyclohexanone 17.12 parts Alkali-soluble resin 1 (copolymer of benzyl methacrylate (BzMA) and methacrylic acid (MAA), 30% PGMEA solution): 1.23 parts Alkali-soluble resin 2 (Acrycure-RD-F8) (Manufactured by Nippon Shokubai Co., Ltd.): 0.23 parts
- Photopolymerization initiator I-2 (IRGACURE OXE-02): 0.975 parts
- Dye solution (compound described in the following table) in cyclohexanone solution (solid content concentration 12.) 3%): 24.57 parts pigment dispersion (CI Pigment Blue 15: 6 dispersion, PGMEA solution, solid content concentration 12.8%): 51.
- polymerizable compound (dipentaerythritol hexaacrylate) NK ester A-DPH-12E (manufactured by Shin-Nakamura Chemical Co., Ltd.): 1.96 parts
- Polymerization inhibitor (p-methoxyphenol): .0007 parts
- Fluorine-containing surfactant (DIC Corporation F475,1% PGMEA solution): 2.50 parts
- the silicon wafer substrate on which the irradiated coating film is formed is placed on the horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics Co., Ltd.), and CD-2000 (Fuji Film) Paddling development was carried out at 23 ° C. for 60 seconds using Electronic Materials (manufactured by Shin-Etsu Materials Co., Ltd.) to form a colored pattern on the undercoat layer of the undercoat layer-coated silicon wafer.
- DW-30 type manufactured by Chemitronics Co., Ltd.
- CD-2000 Fujiji Film
- a silicon wafer substrate on which a coloring pattern is formed is fixed to a horizontal rotating table by a vacuum chuck method, and while rotating the silicon wafer substrate at a rotation speed of 50 rpm by a rotating device, pure water is showered from above the rotation center from a nozzle The solution was rinsed in water and then spray dried. Next, post-baking was performed on a hot plate at 200 ° C. for 300 seconds to obtain a colored pattern (cured film) with a film thickness of 1 ⁇ m on a silicon wafer substrate. Thus, a color filter having a coloring pattern formed of the coloring composition of Examples 90 to 192 was produced.
- the size of the colored pattern was measured using a length measurement SEM “S-9260A” (manufactured by Hitachi High-Technologies Corporation).
- the transmittance, the developability, and the color loss were evaluated using a colored pattern having an exposure amount of 1.0 ⁇ m.
- Transmissivity at 8-4.450 nm and 550 nm The obtained color filter is transmitted in a wavelength range of 300 nm to 800 nm by a spectrophotometer (reference: glass substrate) of an ultraviolet-visible near-infrared spectrophotometer UV3600 (manufactured by Shimadzu Corporation) The rate was measured. Thereafter, the transmittance at 450 nm and 550 nm was calculated, and the transmittance at 450 nm and 550 nm was evaluated according to the following criteria. A: The transmittance at 450 nm is 85% or more, and the transmittance at 550 nm is 5% or less.
- B The transmittance at 450 nm is 80% to 85%, and the transmittance at 550 nm is 5% to less than 10%.
- C The transmittance at 450 nm is 80% or less, and the transmittance at 550 nm is 10% or more
- D Not applicable to any of A to C
- Transmittance fluctuation before and after immersion in alkaline developer
- T0 Transmittance of color filter before immersion in alkaline developer
- T1 Permeability of color filter after immersion in alkaline developer: Good
- AA The transmittance fluctuation before and after immersion in alkaline developer is 2 over the entire region of 300 nm to 800 nm % Or more and less than 5%
- B Sufficiently fluctuated by 5% or more and less than 10%
- C insufficiently before and after immersion in the alkaline developer over the entire area 10% or more of transmittance fluctuation
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Abstract
Description
上記の方法は、顔料を用いることから光や熱に対して安定であると共に、フォトリソグラフィ法によってパターニングを行うことから位置精度が充分に確保され、カラーディスプレー用カラーフィルタ等の製造に好適な方法として広く利用されてきた。
(1)染料は、一般に顔料に比べて、耐光性、耐熱性に劣る。特に、液晶ディスプレイなどの電極として多用されているITO(酸化インジウムスズ)の成膜時の高温工程により、光学特性が変化してしまうという問題がある。
(2)染料は、ラジカル重合反応を抑制する傾向があるため、ラジカル重合を硬化手段として用いる系では、着色感光性組成物の設計に困難が伴う。
特に、カラーフィルタの作製にフォトリソグラフィ法を用いる場合には、以下に示す点が問題となる。
(3)通常の染料は、アルカリ水溶液または有機溶剤(以下単に溶剤ともいう)への溶解度が低いため、所望のスペクトルを有する着色感光性組成物を得るのが困難である。
(4)染料は、着色感光性組成物中の他の成分と相互作用を示すことが多く、露光部、未露光部の溶解性(現像性)の調節が難しい。
(5)染料のモル吸光係数(ε)が低い場合には多量の染料を添加しなければならず、そのために着色感光性組成物中の重合性化合物、光重合開始剤等の他の成分を相対的に減らさざるを得ず、組成物の硬化性、硬化後の耐熱性、現像性等が低下する。
本発明はかかる状況に鑑みてなされたものであり、耐熱性に優れた着色組成物、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置を提供することを目的とする。
具体的には、下記手段<1>により、好ましくは、<2>~<17>により、上記課題は解決された。
<1>(A)下記一般式(I)で示される色素および(B)重合性化合物を含有する着色組成物;
一般式(I)
(R)m-Q-(D)n
一般式(I)中、Qは、(m+n)価の連結基を表し、Rは、置換基を表し、Dは、色素残基を表し、mは、0~6の整数を表し、nは、2~8の整数を表し、(m+n)は2~8の整数を表し、mが2以上の場合、複数のRは互いに異なっていても良く、nが2以上の場合、複数のDは互いに異なっていても良い。
<2>一般式(1)中の、連結基Q、置換基Rおよび色素残基Dから選ばれる少なくとも一つが、酸基を含有する、<1>に記載の着色組成物。
<3>一般式(I)中の色素残基Dが、カチオン部位と対アニオンから構成される、<1>または<2>に記載の着色組成物。
<4>一般式(I)中の色素残基Dが、分子内にカチオン部位とアニオン部位とを有する、<1>または<2>に記載の着色組成物。
<5>一般式(I)中の色素残基Dを構成するカチオン部位が、ジピロメテン色素、トリアリールメタン色素、キサンテン色素、シアニン色素およびスクアリリウム色素から選択される、<1>~<4>のいずれかに記載の着色組成物。
<6>一般式(I)中の色素残基Dを構成する対アニオンが、スルホン酸アニオン、スルホニルイミドアニオン、ビス(アルキルスルホニル)イミドアニオン、トリス(アルキルスルホニル)メチドアニオン、カルボン酸アニオン、テトラアリールボレートアニオン、BF4 -、PF6 -、およびSbF6 -から選択される、<3>に記載の着色組成物。
<7>一般式(I)中の置換基Rの少なくとも1つが酸基である、<1>~<6>のいずれかに記載の着色組成物。
<8>さらに(A)色素以外の(C)顔料を含む、<1>~<7>のいずれかに記載の着色組成物。
<9>さらに(D)光重合開始剤を含む、<1>~<8>のいずれかに記載の着色組成物。
<10>(D)光重合開始剤が、オキシム化合物である、<9>に記載の着色組成物。
<11>カラーフィルタの着色層形成用である、<1>~<10>のいずれかに記載の着色組成物。
<12>一般式(I)で示される色素が有機溶剤溶解性染料である、<1>~<11>のいずれかに記載の着色組成物。
<13>一般式(I)で示される色素が重合性基を有する、<1>~<12>のいずれかに記載の着色組成物。
<13-1>一般式(I)中の置換基Rの少なくとも1つが重合性基である、<1>~<12>のいずれかに記載の着色組成物。
<14>一般式(I)で示される色素の分子量が2000~6000である、<1>~<13>のいずれかに記載の着色組成物。
<15><1>~<14>のいずれかに記載の着色組成物を硬化して得られた硬化膜。
<16><1>~<14>のいずれかに記載の着色組成物を用いてなるカラーフィルタ。
<17><1>~<14>のいずれかに記載の着色組成物を支持体上に適用して着色組成物層を形成する工程と、着色組成物層をパターン状に露光する工程と、未露光部を現像除去して着色パターンを形成する工程と、を含むカラーフィルタの製造方法。
<18><1>~<14>のいずれかに記載の着色組成物を支持体上に適用して着色組成物層を形成し、硬化して着色層を形成する工程と、着色層上にフォトレジスト層を形成する工程と、露光および現像することによりフォトレジスト層をパターニングしてレジストパターンを得る工程と、レジストパターンをエッチングマスクとして着色層をドライエッチングして着色パターンを形成する工程とを含む、カラーフィルタの製造方法。
<19><16>に記載のカラーフィルタ、または、<17>もしくは<18>に記載のカラーフィルタの製造方法によって製造したカラーフィルタを有する固体撮像素子または画像表示装置。
また、本発明によれば、かかる着色組成物を利用した、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置を提供可能になった。
また、本明細書中における「活性光線」または「放射線」とは、例えば、水銀灯の輝線スペクトル、エキシマレーザーに代表される遠紫外線、極紫外線(EUV光)、X線、電子線等を意味する。また、本発明において光とは、活性光線または放射線を意味する。本明細書中における「露光」とは、特に断らない限り、水銀灯、エキシマレーザーに代表される遠紫外線、X線、EUV光などによる露光のみならず、電子線、イオンビーム等の粒子線による描画も露光に含める。
本明細書において、全固形分とは、着色組成物の全組成から溶剤を除いた成分の総質量をいう。
また、本明細書において、“単量体”と“モノマー”とは同義である。本明細書における単量体は、オリゴマーおよびポリマーと区別され、重量平均分子量が2,000以下の化合物をいう。本明細書において、重合性化合物とは、重合性官能基を有する化合物のことをいい、単量体であっても、ポリマーであってもよい。重合性官能基とは、重合反応に関与する基を言う。
本発明の着色組成物は、(A)下記一般式(I)で示される色素および(B)重合性化合物を含有することを特徴とする。
一般式(I)
(R)m-Q-(D)n
(一般式(I)中、Qは、(m+n)価の連結基を表し、Rは、置換基を表し、Dは、色素残基を表す。mは、0~6の整数を表し、nは、2~8の整数を表し、(m+n)は2~8の整数を表す。mが2以上の場合、複数のRは互いに異なっていても良く、nが2以上の場合、複数のDは互いに異なっていても良い。)
第1は、過度の加熱プロセスにおいても染料の分解を抑制(耐熱性付与)し、且つ別パターンへの色移りが抑制される着色組成物を提供できる。
第2は、フォトリソグラフィ法で微細なパターンを形成する際においても、パターン欠損やパターンの直線性に優れた着色パターンが形成できる着色組成物を提供できる。
第3は、ドライエッチング法でパターンを形成する際においても、フォトレジストの現像液および剥離液耐性に優れた着色パターンが形成できる着色組成物を提供できる。
第4は、色特性に優れた硬化膜および硬化膜を備えたカラーフィルタを提供することである。
第5は、色特性に優れた着色パターンを形成しうるパターン形成方法およびカラーフィルタの製造方法を提供できる。
第6は、色特性に優れたカラーフィルタを備えた固体撮像素子および画像表示装置(液晶表示装置や有機EL表示装置等)を提供できる。
上記課題を達成できる作用機構については未だ明確ではないが、複数の色素残基を連結することで耐熱性が良好になり、且つ色素残基の過度な凝集が抑制されることにより、硬化および現像液の浸透が均一になることが一因だと推定している。
また、(A)色素は、従来の色素多量体(ポリマー)の場合と異なり分子量のばらつきが少ないので、上記課題をより解決しやすくなる。このような課題は、染料に起こりやすいが、顔料を用いる場合にも、特に、染料に近い性能を有する顔料を用いる場合に、本発明は好ましく採用できる。
例えば、フォトレジストによって、着色層を形成する場合、本発明の着色組成物は、(A)色素、(B)重合性化合物、(C)顔料、(D)光重合開始剤、(F)アルカリ可溶性樹脂を含む組成物が好ましい。
また、ドライエッチングによって、着色層を形成する場合、本発明の(A)色素、(B)重合性化合物、(C)顔料および(D)光重合開始剤を含む組成物が好ましい。さらに、界面活性剤、溶剤等の成分を含んでいてもよい。
これらの成分は、それぞれ、1種類のみ含んでいても良いし、2種類以上含んでいても良い。
以下、本発明の着色組成物に含まれる成分について、詳細に説明する。
本発明の組成物は、下記一般式(I)で表される色素(以下、単に「色素(A)」ということがある。)の少なくとも1種を含有する。
(R)m-Q-(D)n
(一般式(I)中、Qは、(m+n)価の連結基を表し、Rは、置換基を表し、Dは、色素残基を表す。mは、0~6の整数を表し、nは、2~8の整数を表し、(m+n)は2~8の整数を表す。mが2以上の場合、複数のRは互いに異なっていても良く、nが2以上の場合、複数のDは互いに異なっていても良い。)
一般式(1)中の、連結基Q、置換基Rおよび色素残基Dから選ばれる少なくとも一つが、酸基を含有することが好ましい。
一般式(Q-1)
R1~R4が表す連結基は、RまたはDと中心のCをつなぐ原子の数が、それぞれ、1~15であることが好ましく、それぞれ、1~10であることがより好ましい。例えば、連結基が、-CH2-CH2-C(=O)-O-CH2-の場合、RまたはDと中心のCをつなぐ原子の数は5となる。
Rにより表される置換基としては、例えば、ハロゲン原子、アルキル基、シクロアルキル基、アルケニル基、シクロアルケニル基、アルキニル基、アリール基、ヘテロ環基、シアノ基、ヒドロキシル基、ニトロ基、カルボキシル基、アルコキシ基、アリールオキシ基、シリルオキシ基、ヘテロ環オキシ基、アシルオキシ基、カルバモイルオキシ基、アミノ基(アルキルアミノ基、アニリノ基を含む)、アシルアミノ基、アミノカルボニルアミノ基、アルコキシカルボニルアミノ基、アリールオキシカルボニルアミノ基、スルファモイルアミノ基、アルキルまたはアリールスルホニルアミノ基、メルカプト基、アルキルチオ基、アリールチオ基、ヘテロ環チオ基、スルファモイル基、スルホ基、アルキルまたはアリールスルフィニル基、アルキルまたはアリールスルホニル基、アシル基、アリールオキシカルボニル基、アルコキシカルボニル基、カルバモイル基、アリールまたはヘテロ環アゾ基、イミド基、ホスフィノ基、ホスフィニル基、ホスフィニルオキシ基、ホスフィニルアミノ基、ホスホノ基、シリル基などが挙げられる。以下詳細に記述する。
重合性基としては、ラジカル、酸、熱により架橋可能な公知の重合性基を用いることができ、例えば、エチレン性不飽和結合を含む基、環状エーテル基(エポキシ基、オキセタン基)、メチロール基等が挙げられるが、特にエチレン性不飽和結合を含む基が好ましく、(メタ)アクリロイル基がさらに好ましく、(メタ)アクリル酸グリシジルおよび3,4-エポキシーシクロヘキシルメチル(メタ)アクリレート由来の(メタ)アクリロイル基が特に好ましい。
本発明では、一般式(I)で示される色素中、重合性基としてのRは1個または2個が好ましく、1個がより好ましい。重合性基の数をこのような範囲とすることにより、色抜けをより効果的に抑制できる。特に、分子内にカチオン部位とアニオン部位とを有する色素残基を有する場合にその効果が顕著に発揮される。
本発明では、一般式(I)で示される色素中、酸基としてのRは1~3個が好ましく、1または2個がより好ましい。酸基の数をこのような範囲とすることにより、現像性がより向上する傾向にある。特に、分子内にカチオン部位とアニオン部位とを有する色素残基を有する場合にその効果が顕著に発揮される。
nは2~8の整数を表し、2~6の整数であることが好ましく、2~5の整数であることがより好ましい。
m+nは、2~8の整数を表し、2~7の整数であることが好ましく、3~6の整数であることがより好ましい。
色素(A)における色素残基Dとしては、最大吸収波長が400nm~780nmの範囲に存在するものであれば特に制限はなく、公知の色素構造を含む種々のものを適用することができる。公知の色素構造としては、例えば、ジピロメテン色素、カルボニウム色素(ジフェニルメタン色素、トリアリールメタン色素、キサンテン色素、アクリジン色素など)、ポリメチン色素(オキソノール色素、メロシアニン色素、アリーリデン色素、スチリル色素、シアニン色素、スクアリリウム色素、クロコニウム色素など)、サブフタロシアニン色、およびそれらの金属錯体色素から選ばれる色素に由来する色素構造などを挙げることができる。また、本発明で用いる色素残基は、色素残基内で、カチオン部位とアニオン部位を有していても良いし、カチオン部位と対アニオンから構成されていてもよい。本発明では、色素残基は、カチオン部位と対アニオンから構成されていることが好ましい。色素残基が、カチオン部位と対アニオンから構成されていることにより、450nmにおける透過率をより低くでき、550nmにおける透過率をより高くできる。
本発明に係る色素(A)における一般式(I)中のDの態様の一つは、下記に示すジピロメテン色素に由来する部分構造を、色素部位の部分構造として有する色素である。
なお、本発明では、ジピロメテン構造を含む化合物をジピロメテン化合物と称し、ジピロメテン構造を含む化合物に金属または金属化合物に配位した錯体をジピロメテン金属錯体化合物と称する。
色素(A)における一般式(I)中のDの好ましい態様の一つは、下記一般式(M)で表される化合物(ジピロメテン化合物)またはその互変異性体が、金属または金属化合物に配位した錯体(以下、適宜「特定錯体」と称する。)を色素部位として含む色素構造である。
R10がアルキル基、アリール基、または、ヘテロ環基を表す場合の、アルキル基、アリール基、および、ヘテロ環基が、さらに置換可能な基である場合には、後述する置換基群Aの項において説明する置換基で置換されていてもよく、2個以上の置換基で置換されている場合には、それらの置換基は同一であっても異なっていてもよい。
本発明における特定錯体は、既述の一般式(M)で表されるジピロメテン化合物またはその互変異性体が金属または金属化合物に配位した錯体である。
ここで、金属または金属化合物としては、錯体を形成可能な金属または金属化合物であればいずれであってもよく、2価の金属原子、2価の金属酸化物、2価の金属水酸化物、または2価の金属塩化物が含まれる。金属または金属化合物としては、例えば、Zn、Mg、Si、Sn、Rh、Pt、Pd、Mo、Mn、Pb、Cu、Ni、Co、Fe等の金属の他に、AlCl、InCl、FeCl、TiCl2、SnCl2、SiCl2、GeCl2などの金属塩化物、TiO、VO等の金属酸化物、Si(OH)2等の金属水酸化物も含まれる。
これらの中でも、錯体の安定性、分光特性、耐熱、耐光性、および製造適性等の観点から、Fe、Zn、Mg、Si、Pt、Pd、Mo、Mn、Cu、Ni、Co、TiO、またはVOが好ましく、Zn、Mg、Si、Pt、Pd、Cu、Ni、Co、またはVOがさらに好ましく、Znが特に好ましい。
色素(A)における一般式(I)中のDの好適な態様の一つは、下記一般式(7)で表されるジピロメテン金属錯体化合物に由来する色素構造である。
なお、一般式(7)で表されるジピロメテン金属錯体化合物は、互変異性体を含む。
一般式(7)における中のR4~R9は、一般式(M)におけるR4~R9と同義であり、好ましい態様も同様である。
例えば、Zn、Mg、Si、Sn、Rh、Pt、Pd、Mo、Mn、Pb、Cu、Ni、Co、Fe等、およびAlCl、InCl、FeCl、TiCl2、SnCl2、SiCl2、GeCl2などの金属塩化物、TiO、V=O等の金属酸化物、Si(OH)2等の金属水酸化物が含まれる。
なお、一般式(8)で表されるジピロメテン金属錯体化合物は、互変異性体を含む。
R13およびR14としては、置換または無置換のアルキル基、置換または無置換のアリール基、置換または無置換のヘテロ環基が好ましく、さらに好ましくは置換または無置換のアルキル基、置換または無置換のアリール基である。ここで、より好ましいアルキル基、アリール基、およびヘテロ環基の具体例は、一般式(M)のR6およびR7において列記した具体例を同様に挙げることができる。
ここで、立体パラメータ-Es’値は、置換基の立体的嵩高さを表すパラメータであり、文献(J.A.Macphee,et al,Tetrahedron,Vol.34,pp3553~3562、藤田稔夫編 化学増刊107 構造活性相関とドラックデザイン、1986年2月20日発行(化学同人))に示されている-Es'値を用いる。
本発明に係る色素における一般式(I)中のDの態様の一つは、トリアリールメタン色素(トリアリールメタン化合物)に由来する部分構造を有するものである。色素(A)としては、下記一般式(TP)で表される化合物(トリアリールメタン化合物)に由来する部分構造を、色素部位の部分構造として有する色素が含まれる。本発明においてトリアリールメタン化合物とは、分子内にトリアリールメタン骨格を含む色素部位を有する化合物を総称するものである。
X-は後述する対アニオンX群から選択されることが好ましい。
本発明における色素における一般式(I)中のDの好ましい態様は、キサンテン色素(キサンテン化合物)に由来する部分構造を有するものである。色素(A)としては、下記一般式(J)で表されるキサンテン化合物に由来する部分構造を、色素部位の部分構造として有する色素が含まれる。
上記一般式(J)中のR81とR82、R83とR84、およびmが2以上の場合のR85同士は、各々独立に、互いに結合して、置換基を有しない5員、6員並びに7員の飽和環または5員、6員並びに7員の不飽和環を形成する場合、置換基を有しない5員、6員並びに7員の飽和環または5員、6員並びに7員の不飽和環としては、例えば、ピロール環、フラン環、チオフェン環、ピラゾール環、イミダゾール環、トリアゾール環、オキサゾール環、チアゾール環、ピロリジン環、ピペリジン環、シクロペンテン環、シクロヘキセン環、ベンゼン環、ピリジン環、ピラジン環、ピリダジン環が挙げられ、好ましくは、ベンゼン環、ピリジン環が挙げられる。
X-は後述する対アニオンX群から選択されることが好ましい。
本発明に係る色素における一般式(I)中のDの態様の一つは、シアニン色素(シアニン化合物)に由来する部分構造を有するものである。色素(A)としては、下記一般式(PM)で表される化合物(シアニン化合物)に由来する部分構造を、色素部位の部分構造として有する色素が含まれる。本発明においてシアニン化合物とは、分子内にシアニン骨格を含む色素部位を有する化合物を総称するものである。
環Z1および環Z2が取りうる置換基は、後述する置換基群Aの項で説明する置換基と同様である。X-は対アニオンを表す。X-は後述する対アニオンX群から選択されることが好ましい。
nは、0以上3以下の整数を表す。
A1およびA2は、それぞれ独立に、酸素原子、硫黄原子、セレン原子、炭素原子または窒素原子を表す。
R1およびR2は、それぞれ独立に、置換基を有していてもよい1価の炭素数1~20の脂肪族炭化水素基を表す。
R3およびR4は、それぞれ独立に水素原子または1価の炭素数1~6の脂肪族炭化水素基を表すか、1個のR3と1個のR4とが一緒になって形成された2価の炭素数2~6の脂肪族炭化水素基を表す。
aおよびbは、それぞれ独立に、0以上2以下の整数を表す。
本発明に係る色素における一般式(I)中のDの態様の一つは、サブフタロシアニン色素(フタロシアニン化合物)に由来する部分構造を有するものである。色素(A)としては、下記一般式(SP)で表される化合物(サブフタロシアニン化合物)に由来する部分構造を、色素部位の部分構造として有する色素が含まれる。本発明においてサブフタロシアニン化合物とは、分子内にサブフタロシアニン骨格を含む色素部位を有する化合物を総称するものである。本発明では、下記化合物がカチオン部位を形成するが、例えば、一般式(SP)のホウ素原子がカチオン部位を形成しうる。
一般式(SP)中のZ1~Z12が有してもよいアルキル基は直鎖または分岐の置換または無置換のアルキル基を表す。Z1~Z12としては、特に、炭素数1~20が好ましく、炭素数1~10がさらに好ましい。Z1~Z12が有してもよい置換基としては後述する置換基群Aの項で挙げる置換基が挙げられるが、特にフッ素原子、ヒドロキシ基およびメルカプト基が好ましい。
X-は後述する対アニオンX群から選択されることが好ましい。
本発明で用いるスクアリリウム色素としては、下記一般式(K)で表される色素が好ましい。
R93及びR97は、それぞれ独立に、水素原子、直鎖もしくは分岐のアルキル基、シクロアルキル基、シクロアルケニル基、アルキニル基、アリール基又はヘテロ環基を表す。
R91とR92、及び、R95とR96は、それぞれ、互いに連結して環を形成してもよい。
色素が有してもよい置換基としては、ハロゲン原子、アルキル基、シクロアルキル基、アルケニル基、シクロアルケニル基、アルキニル基、アリール基、ヘテロ環基、シアノ基、ヒドロキシル基、ニトロ基、カルボキシル基、アルコキシ基、アリールオキシ基、シリルオキシ基、ヘテロ環オキシ基、アシルオキシ基、カルバモイルオキシ基、アミノ基(アルキルアミノ基、アニリノ基を含む)、アシルアミノ基、アミノカルボニルアミノ基、アルコキシカルボニルアミノ基、アリールオキシカルボニルアミノ基、スルファモイルアミノ基、アルキルまたはアリールスルホニルアミノ基、メルカプト基、アルキルチオ基、アリールチオ基、ヘテロ環チオ基、スルファモイル基、スルホ基、アルキルまたはアリールスルフィニル基、アルキルまたはアリールスルホニル基、アシル基、アリールオキシカルボニル基、アルコキシカルボニル基、カルバモイル基、アリールまたはヘテロ環アゾ基、イミド基、ホスフィノ基、ホスフィニル基、ホスフィニルオキシ基、ホスフィニルアミノ基、シリル基などが挙げられる。以下詳細に記述する。
一般式(I)中の色素残基Dに好ましく含まれる対アニオンは、対アニオンであれば特に制限は無いが、耐熱性の観点で非求核性のアニオンであることが好ましい。非求核性の対アニオンとしては、特開2007-310315号公報[0075]等に記載の公知の非求核性アニオンが好ましく、以下の対アニオン群Xがより好ましい;
スルホン酸アニオン、カルボン酸アニオン、スルホニルイミドアニオン、ビス(アルキルスルホニル)イミドアニオン、トリス(アルキルスルホニル)メチドアニオン、カルボン酸アニオン、テトラアリールボレードアニオン、-CON-CO-、-CON-SO2-、BF4 -、PF6 -、SbF6 -、B-(CN)3OMe。
対アニオン群Xは、さらに好ましくは、スルホン酸アニオン、スルホニルイミドアニオン、ビス(アルキルスルホニル)イミドアニオン、トリス(アルキルスルホニル)メチドアニオン、カルボン酸アニオン、テトラアリールボレートアニオン、BF4 -、PF6 -、およびSbF6 -がさらに好ましい。
本発明の色素は、非求核性対アニオンを1種類のみ含んでいても良いし、2種類以上を含んでいても良い。
色素残基Dは、重合性基を有していてもよい。
重合性基としては、ラジカル、酸、熱により架橋可能な公知の重合性基を用いることができ、例えば、エチレン性不飽和結合を含む基、環状エーテル基(エポキシ基、オキセタン基)、メチロール基等が挙げられるが、特にエチレン性不飽和結合を含む基が好ましく、(メタ)アクリロイル基がさらに好ましく、(メタ)アクリル酸グリシジルおよび3,4-エポキシーシクロヘキシルメチル(メタ)アクリレート由来の(メタ)アクリロイル基が特に好ましい。
色素残基D中の重合性基は、色素残基1つに対し、1つであるであることが好ましい。
本発明に係る色素(A)のTgは、50℃以上であることが好ましく、100℃以上であることがより好ましい。また、熱重量分析(TGA測定)による5%重量減少温度が、120℃以上であることが好ましく、150℃以上であることがより好ましく、200℃以上であることがさらに好ましい。この領域にあることで、本発明の着色組成物をカラーフィルタ等の作製に適用する際に、加熱プロセスに起因する濃度変化を低減する事ができるようになる。
本発明においては、一般式(1)の連結基Q、置換基Rおよび色素残基Dから選ばれる少なくとも一つが、酸基を含有することが好ましい。酸基としては、カルボキシル基、スルホ基、リン酸基が好ましく、さらに好ましくはカルボキシル基である。
本発明において、色素(A)全体に含まれる重合性基の数は、1~2個が好ましく、1個がより好ましい。また、色素(A)全体に含まれる酸基の数は、1~4個が好ましく、1~3個がより好ましく、1~2個がさらに好ましい。
有機溶剤としては、エステル類(例えば、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、乳酸エチル、酢酸ブチル、3-メトキシプロピオン酸メチル等)、エーテル類(例えばメチルセロソルブアセテート、エチルセロソルブアセテート、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート等)、ケトン類(メチルエチルケトン、シクロヘキサノン、2-ヘプタノン、3-ヘプタノン等)、芳香族炭化水素類(例えば、トルエン、キシレン等)が挙げられ、これら溶剤に対し、1質量%以上50質量%以下溶解することが好ましく、より好ましくは5質量%以上40質量%以下、さらに好ましくは10質量%以上30質量%以下であることが好ましい。この領域にあることで、本発明の着色組成物をカラーフィルタ等の作製に適用する際に、好適な塗布面状や、他色塗布後の溶出による濃度低下を低減するができるようになる。
顔料に対する色素の質量比(色素(A)/顔料)としては、0.1~5が好ましく、0.2~2がよりに好ましく、0.3~1がさらに好ましい。
本発明の着色組成物は、重合性化合物を含有する。重合性化合物としては、ラジカル、酸、熱により架橋可能な公知の重合性化合物を用いることができる。例えば、エチレン性不飽和結合、環状エーテル(エポキシ、オキセタン)、メチロール等を含む重合性化合物が挙げられる。重合性化合物は、感度の観点から、末端エチレン性不飽和結合を少なくとも1個、好ましくは2個以上有する化合物から好適に選ばれる。中でも、4官能以上の多官能重合性化合物が好ましく、5官能以上の多官能重合性化合物がさらに好ましい。また、後述する重合性基を有したアルカリ可溶性樹脂を、重合性化合物として用いることもできる。
これらの具体的な化合物としては、特開2009-288705号公報の段落番号〔0095〕~〔0108〕に記載されている化合物を本発明においても好適に用いることができる。
多官能カルボン酸にグリシジル(メタ)アクリレート等の環状エーテル基とエチレン性不飽和基を有する化合物を反応させ得られる多官能(メタ)アクリレートなども挙げることができる。
また、その他の好ましい重合性化合物として、特開2010-160418号公報、特開2010-129825号公報、特許第4364216号明細書等に記載される、フルオレン環を有し、エチレン性不飽和基を2官能以上有する化合物、カルド樹脂も使用することが可能である。
一般式(MO-1)~(MO-5)で表される重合性化合物の各々において、複数存在するRの少なくとも1つは、-OC(=O)CH=CH2、または、-OC(=O)C(CH3)=CH2で表される基を表す。
一般式(MO-1)~(MO-5)で表される重合性化合物の具体例としては、特開2007-269779号公報の段落番号0248~段落番号0251に記載されている化合物を本発明においても好適に用いることができる。
酸基を有する多官能モノマーの好ましい酸価としては、0.1~40mgKOH/gであり、特に好ましくは5~30mgKOH/gである。多官能モノマーの酸価が低すぎると現像溶解特性が落ち、高すぎると製造や取扱いが困難になり光重合性能が落ち、画素の表面平滑性等の硬化性が劣るものとなる。従って、異なる酸基の多官能モノマーを2種以上併用する場合、或いは酸基を有しない多官能モノマーを併用する場合、全体の多官能モノマーとしての酸価が上記範囲に入るように調整することが好ましい。
カプロラクトン構造を有する多官能性単量体としては、その分子内にカプロラクトン構造を有する限り特に限定されるものではないが、例えば、トリメチロールエタン、ジトリメチロールエタン、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリペンタエリスリトール、グリセリン、ジグリセロール、トリメチロールメラミン等の多価アルコールと、(メタ)アクリル酸およびε-カプロラクトンをエステル化することにより得られる、ε-カプロラクトン変性多官能(メタ)アクリレートを挙げることができる。なかでも下記一般式(Z-1)で表されるカプロラクトン構造を有する多官能性単量体が好ましい。
本発明において、カプロラクトン構造を有する多官能性単量体は、単独でまたは2種以上を混合して使用することができる。
一般式(Z-4)中、アクリロイル基およびメタクリロイル基の合計は3個または4個であり、mは各々独立に0~10の整数を表し、各mの合計は0~40の整数である。但し、各mの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
一般式(Z-5)中、アクリロイル基およびメタクリロイル基の合計は5個または6個であり、nは各々独立に0~10の整数を表し、各nの合計は0~60の整数である。但し、各nの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
また、各mの合計は、2~40の整数が好ましく、2~16の整数がより好ましく、4~8の整数が特に好ましい。
一般式(Z-5)中、nは、0~6の整数が好ましく、0~4の整数がより好ましい。
また、各nの合計は、3~60の整数が好ましく、3~24の整数がより好ましく、6~12の整数が特に好ましい。
また、一般式(Z-4)または一般式(Z-5)中の-((CH2)yCH2O)-または-((CH2)yCH(CH3)O)-は、酸素原子側の末端がXに結合する形態が好ましい。
具体的には、下記式(a)~(f)で表される化合物(以下、「例示化合物(a)~(f)」ともいう。)が挙げられ、中でも、例示化合物(a)、(b)、(e)、(f)が好ましい。
重合性化合物の市販品としては、ウレタンオリゴマーUAS-10、UAB-140(山陽国策パルプ社製)、UA-7200」(新中村化学社製、DPHA-40H(日本化薬社製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600(共栄社製)などが挙げられる。
また、着色組成物に含有される他の成分(例えば、光重合開始剤、被分散体、アルカリ可溶性樹脂等)との相溶性、分散性に対しても、重合性化合物の選択・使用法は重要な要因であり、例えば、低純度化合物の使用や2種以上の併用により相溶性を向上させうることがある。また、支持体などの硬質表面との密着性を向上させる観点で特定の構造を選択することもあり得る。
本発明の着色組成物は、重合性化合物の反応を促進させることなどを目的として、分子内に2個以上のメルカプト基を有する多官能チオール化合物を含んでいてもよい。多官能チオール化合物は、2級のアルカンチオール類であることが好ましく、特に下記一般式(T1)で表される構造を有する化合物であることが好ましい。
一般式(T1)
本発明の着色組成物は、顔料を含有することが好ましい。
顔料としては、従来公知の種々の無機顔料または有機顔料を用いることができる。顔料としては、高透過率であることが好ましい。
C.I.ピグメントイエロー11,24,31,53,83,93,99,108,109,110,138,139,147,150,151,154,155,167,180,185,199,;
C.I.ピグメントオレンジ36,38,43,71;
C.I.ピグメントレッド81,105,122,149,150,155,171,175,176,177,209,220,224,242,254,255,264,270;
C.I.ピグメントバイオレット19,23,32,39;
C.I.ピグメントブルー1,2,15,15:1,15:3,15:6,16,22,60,66;
C.I.ピグメントグリーン7,36,37,58;
C.I.ピグメントブラウン25,28;
C.I.ピグメントブラック1;
等を挙げることができる。
C.I.ピグメントオレンジ36,71,
C.I.ピグメントレッド122,150,171,175,177,209,224,242,254,255,264,
C.I.ピグメントバイオレット19,23,32,
C.I.ピグメントブルー15:1,15:3,15:6,16,22,60,66,
C.I.ピグメントグリーン7,36,37,58;
C.I.ピグメントブラック1
顔料の一次粒子サイズは、電子顕微鏡等の公知の方法で測定することができる。
本発明の着色組成物が顔料を有する場合は、顔料分散剤を、所望により併用することができる。
顔料分散剤としては、高分子分散剤〔例えば、ポリアミドアミンとその塩、ポリカルボン酸とその塩、高分子量不飽和酸エステル、変性ポリウレタン、変性ポリエステル、変性ポリ(メタ)アクリレート、(メタ)アクリル系共重合体、ナフタレンスルホン酸ホルマリン縮合物〕、および、ポリオキシエチレンアルキルリン酸エステル、ポリオキシエチレンアルキルアミン、アルカノールアミン等の界面活性剤、および、顔料誘導体等を挙げることができる。
高分子分散剤は、その構造からさらに直鎖状高分子、末端変性型高分子、グラフト型高分子、ブロック型高分子に分類することができる。
また、顔料誘導体を併用する場合、顔料誘導体の使用量としては、顔料100質量部に対し、1~30質量部が好ましく、3~20質量部がより好ましく、5~15質量部のが特に好ましい。
本発明の着色組成物は、光重合開始剤を含有することが、さらなる感度向上の観点から好ましい。
光重合開始剤としては、重合性化合物の重合を開始する能力を有する限り、特に制限はなく、公知の光重合開始剤の中から適宜選択することができる。例えば、紫外線領域から可視の光線に対して感光性を有するものが好ましい。また、光励起された増感剤と何らかの作用を生じ、活性ラジカルを生成する活性剤であってもよく、モノマーの種類に応じてカチオン重合を開始させるような開始剤であってもよい。
また、光重合開始剤は、約300nm~800nm(330nm~500nmがより好ましい。)の範囲内に少なくとも約50の分子吸光係数を有する化合物を、少なくとも1種含有していることが好ましい。
具体的には、トリハロメチルトリアジン化合物としては、以下の化合物が例示される。なお、Phはフェニル基である。
特に、固体撮像素子用のカラーフィルタの作製に使用する場合には、微細なパターンをシャープな形状で形成する必要があるために、硬化性とともに未露光部に残渣がなく現像されることが重要である。このような観点からは、光重合開始剤としてはオキシム化合物が特に好ましい。特に、固体撮像素子において微細なパターンを形成する場合、硬化用露光にステッパー露光を用いるが、この露光機はハロゲンにより損傷される場合があり、光重合開始剤の添加量も低く抑える必要があるため、これらの点を考慮すれば、固体撮像素子の如き微細パターンを形成するには(D)光重合開始剤としては、オキシム化合物を用いるのが最も好ましい。
ヒドロキシアセトフェノン系開始剤としては、IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959,IRGACURE-127(商品名:いずれもBASF社製)を用いることができる。アミノアセトフェノン系開始剤としては、市販品であるIRGACURE-907、IRGACURE-369、および、IRGACURE-379、IRGACURE-OXE379(商品名:いずれもBASF社製)を用いることができる。アミノアセトフェノン系開始剤として、365nmまたは405nm等の長波光源に吸収波長がマッチングされた特開2009-191179公報に記載の化合物も用いることができる。また、アシルホスフィン系開始剤としては市販品であるIRGACURE-819やDAROCUR-TPO(商品名:いずれもBASF社製)を用いることができる。
市販品ではIRGACURE-OXE01(BASF社製)、IRGACURE-OXE02(BASF社製)、TR-PBG-304(常州強力電子新材料有限公司製)、アデカアークルズNCI-831、アデカアークルズNCI-930(ADEKA社製)も好適に用いられる。
また、オキシム化合物の特定部位に不飽和結合を有する特開2009-242469号公報に記載の化合物も、重合不活性ラジカルから活性ラジカルを再生することで高感度化を達成でき好適に使用することができる。
具体的には、光重合開始剤であるオキシム化合物としては、下記一般式(OX-1)で表される化合物が好ましい。なお、オキシムのN-O結合が(E)体のオキシム化合物であっても、(Z)体のオキシム化合物であっても、(E)体と(Z)体との混合物であってもよい。
一般式(OX-1)中、Rで表される一価の置換基としては、一価の非金属原子団であることが好ましい。
一価の非金属原子団としては、アルキル基、アリール基、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、複素環基、アルキルチオカルボニル基、アリールチオカルボニル基等が挙げられる。また、これらの基は、1以上の置換基を有していてもよい。また、前述した置換基は、さらに他の置換基で置換されていてもよい。
置換基としてはハロゲン原子、アリールオキシ基、アルコキシカルボニル基またはアリールオキシカルボニル基、アシルオキシ基、アシル基、アルキル基、アリール基等が挙げられる。
具体的には、チエニル基、ベンゾ[b]チエニル基、ナフト[2,3-b]チエニル基、チアントレニル基、フリル基、ピラニル基、イソベンゾフラニル基、クロメニル基、キサンテニル基、フェノキサチイニル基、2H-ピロリル基、ピロリル基、イミダゾリル基、ピラゾリル基、ピリジル基、ピラジニル基、ピリミジニル基、ピリダジニル基、インドリジニル基、イソインドリル基、3H-インドリル基、インドリル基、1H-インダゾリル基、プリニル基、4H-キノリジニル基、イソキノリル基、キノリル基、フタラジニル基、ナフチリジニル基、キノキサリニル基、キナゾリニル基、シンノリニル基、プテリジニル基、4aH-カルバゾリル基、カルバゾリル基、β-カルボリニル基、フェナントリジニル基、アクリジニル基、ペリミジニル基、フェナントロリニル基、フェナジニル基、フェナルサジニル基、イソチアゾリル基、フェノチアジニル基、イソキサゾリル基、フラザニル基、フェノキサジニル基、イソクロマニル基、クロマニル基、ピロリジニル基、ピロリニル基、イミダゾリジニル基、イミダゾリニル基、ピラゾリジニル基、ピラゾリニル基、ピペリジル基、ピペラジニル基、インドリニル基、イソインドリニル基、キヌクリジニル基、モルホリニル基、および、チオキサントリル基が例示できる。
下記の構造中、Y、X、および、nは、それぞれ、後述する一般式(OX-2)におけるY、X、および、nと同義であり、好ましい例も同様である。
中でも、式(OX-1)におけるAとしては、感度を高め、加熱経時による着色を抑制する点から、無置換のアルキレン基、アルキル基(例えば、メチル基、エチル基、tert-ブチル基、ドデシル基)で置換されたアルキレン基、アルケニル基(例えば、ビニル基、アリル基)で置換されたアルキレン基、アリール基(例えば、フェニル基、p-トリル基、キシリル基、クメニル基、ナフチル基、アンスリル基、フェナントリル基、スチリル基)で置換されたアルキレン基が好ましい。
なかでも、感度を高め、加熱経時による着色を抑制する点から、置換または無置換のフェニル基が好ましい。
また、式(2)におけるnは、0~5の整数を表し、0~2の整数が好ましい。
一般式(OX-3)または(OX-4)におけるR、X、A、Ar、および、nは、一般式(OX-2)におけるR、X、A、Ar、および、nとそれぞれ同義であり、好ましい例も同様である。
化合物のモル吸光係数は、公知の方法を用いることができるが、具体的には、例えば、紫外可視分光光度計(Varian社製Cary-5 spctrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。
本発明の着色組成物は、さらに、アルカリ可溶性樹脂を含有することが好ましい。なお、ここでいうアルカリ可溶性樹脂には、顔料分散剤として本発明の着色組成物に含有される成分は含まれない。
なお、重合後に酸基を付与しうるモノマーを単量体成分として酸基を導入する場合には、重合後に例えば後述するような酸基を付与するための処理が必要となる。
重合性基を有するアルカリ可溶性樹脂の例としては、ダイヤナ-ルNRシリーズ(三菱レイヨン株式会社製)、Photomer6173(COOH含有 polyurethane acrylic oligomer. Diamond Shamrock Co.Ltd.,製)、ビスコートR-264、KSレジスト106(いずれも大阪有機化学工業株式会社製)、サイクロマーPシリーズ、プラクセル CF200シリーズ(いずれもダイセル化学工業株式会社製)、Ebecryl3800(ダイセルユーシービー株式会社製)などが挙げられる。重合性基を有するアルカリ可溶性樹脂としては、予めイソシアネート基とOH基を反応させ、未反応のイソシアネート基を1つ残し、かつ(メタ)アクリロイル基を含む化合物とカルボキシル基を含むアクリル樹脂との反応によって得られるウレタン変性した重合性二重結合含有アクリル樹脂、カルボキシル基を含むアクリル樹脂と分子内にエポキシ基および重合性二重結合を共に有する化合物との反応によって得られる不飽和基含有アクリル樹脂、酸ペンダント型エポキシアクリレート樹脂、OH基を含むアクリル樹脂と重合性二重結合を有する2塩基酸無水物を反応させた重合性二重結合含有アクリル樹脂、OH基を含むアクリル樹脂とイソシアネートと重合性基を有する化合物を反応させた樹脂、特開2002-229207号公報および特開2003-335814号公報に記載されるα位またはβ位にハロゲン原子或いはスルホネート基などの脱離基を有するエステル基を側鎖に有する樹脂を、塩基性処理することで得られる樹脂などが好ましい。
さらに、特開2012-32767号公報に記載の段落番号0029~0063に記載の共重合体(B)および実施例で用いられているアルカリ可溶性樹脂、特開2012-208474号公報の段落番号0088~0098に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2012-137531号公報の段落番号0022~0032に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2013-024934号公報の段落番号0132~0143に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2011-242752号公報の段落番号0092~0098および実施例で用いられているバインダー樹脂、特開2012-032770号公報の段落番号0030~0072の記載のバインダー樹脂を用いること好ましい。これらの内容は本願明細書に組み込まれる。より具体的には、下記の樹脂が好ましい。
また、アルカリ可溶性樹脂の重量平均分子量(Mw)としては、2,000~50,000が好ましく、5,000~30,000がさらに好ましく、7,000~20,000が最も好ましい。本発明で用いられる化合物の分子量の測定方法は、ゲル浸透クロマトグラフィー(GPC)により測定でき、GPCの測定によるポリスチレン換算値として定義される。例えば、HLC-8220(東ソー(株)製)を用い、カラムとしてTSKgel Super AWM―H(東ソー(株)製、6.0mmID×15.0cmを、溶離液として10mmol/L リチウムブロミドNMP(N-メチルピロリジノン)溶液を用いることによって求めることができる。
本発明の着色組成物は、アルカリ可溶性樹脂を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物は、上述の各成分に加えて、本発明の効果を損なわない範囲で、さらに、有機溶剤、架橋剤などの他の成分を含んでいてもよい。
本発明の着色組成物は、有機溶剤を含有してもよい。
有機溶剤は、各成分の溶解性や着色組成物の塗布性を満足すれば基本的には特に制限はないが、特に紫外線吸収剤、アルカリ可溶性樹脂や分散剤等の溶解性、塗布性、安全性を考慮して選ばれることが好ましい。また、本発明における着色組成物を調製する際には、少なくとも2種類の有機溶剤を含むことが好ましい。
本発明の着色組成物に補足的に架橋剤を用い、着色組成物を硬化させてなる硬化膜の硬度をより高めることもできる。
架橋剤としては、架橋反応により膜硬化を行なえるものであれば、特に限定はなく、例えば、(a)エポキシ樹脂、(b)メチロール基、アルコキシメチル基、およびアシロキシメチル基から選ばれる少なくとも1つの置換基で置換された、メラミン化合物、グアナミン化合物、グリコールウリル化合物またはウレア化合物、(c)メチロール基、アルコキシメチル基、およびアシロキシメチル基から選ばれる少なくとも1つの置換基で置換された、フェノール化合物、ナフトール化合物またはヒドロキシアントラセン化合物、が挙げられる。中でも、多官能エポキシ樹脂が好ましい。
架橋剤の具体例などの詳細については、特開2004-295116号公報の段落0134~0147の記載を参照することができる。
本発明の着色組成物中に架橋剤を含有する場合、架橋剤の配合量は、特に定めるものではないが、組成物の全固形分の2~30質量%が好ましく、3~20質量%がより好ましい。
本発明の着色組成物は、架橋剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物においては、着色組成物の製造中または保存中において、重合性化合物の不要な熱重合を阻止するために、少量の重合禁止剤を添加することが望ましい。
本発明に用いうる重合禁止剤としては、ハイドロキノン、p-メトキシフェノール、ジ-tert-ブチル-p-クレゾール、ピロガロール、tert-ブチルカテコール、ベンゾキノン、4,4’-チオビス(3-メチル-6-tert-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-tert-ブチルフェノール)、N-ニトロソフェニルヒドロキシアミン第一セリウム塩等が挙げられる。
本発明の着色組成物中に重合禁止剤を含有する場合、重合禁止剤の添加量は、全組成物の質量に対して、約0.01質量%~約5質量%が好ましい。
本発明の組成物は、重合禁止剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物には、塗布性をより向上させる観点から、各種の界面活性剤を添加してもよい。界面活性剤としては、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、シリコーン系界面活性剤などの各種界面活性剤を使用できる。
即ち、フッ素系界面活性剤を含有する着色組成物を適用した塗布液を用いて膜形成する場合においては、被塗布面と塗布液との界面張力を低下させることにより、被塗布面への濡れ性が改善され、被塗布面への塗布性が向上する。このため、少量の液量で数μm程度の薄膜を形成した場合であっても、厚みムラの小さい均一厚の膜形成をより好適に行える点で有効である。
界面活性剤は、1種のみを用いてもよいし、2種類以上を組み合わせてもよい。
本発明の着色組成物に界面活性剤を含有する場合、界面活性剤の添加量は、着色組成物の全固形分に対して、0.001~2.0質量%が好ましく、より好ましくは0.005~1.0質量%である。
本発明の組成物は、界面活性剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
着色組成物には、必要に応じて、各種添加物、例えば、充填剤、密着促進剤、酸化防止剤、紫外線吸収剤、凝集防止剤等を配合することができる。これらの添加物としては、特開2004-295116号公報の段落0155~0156に記載のものを挙げることができる。
本発明の着色組成物においては、特開2004-295116号公報の段落0078に記載の増感剤や光安定剤、同公報の段落0081に記載の熱重合防止剤を含有することができる。
本発明の着色組成物は、分子量1000以下の有機カルボン酸、および/または有機カルボン酸無水物を含有していてもよい。
有機カルボン酸化合物としては、具体的には、脂肪族カルボン酸または芳香族カルボン酸が挙げられる。脂肪族カルボン酸としては、例えば、ギ酸、酢酸、プロピオン酸、酪酸、吉草酸、ピバル酸、カプロン酸、グリコール酸、アクリル酸、メタクリル酸等のモノカルボン酸、シュウ酸、マロン酸、コハク酸、グルタル酸、アジピン酸、ピメリン酸、シクロヘキサンジカルボン酸、シクロヘキセンジカルボン酸、イタコン酸、シトラコン酸、マレイン酸、フマル酸等のジカルボン酸、トリカルバリル酸、アコニット酸等のトリカルボン酸等が挙げられる。また、芳香族カルボン酸としては、例えば、安息香酸、フタル酸等のフェニル基に直接カルボキシル基が結合したカルボン酸、およびフェニル基から炭素結合を介してカルボキシル基が結合したカルボン酸類が挙げられる。これらの中では、特に分子量600以下、とりわけ分子量50~500のもの、具体的には、例えば、マレイン酸、マロン酸、コハク酸、イタコン酸が好ましい。
これら分子量1000以下の有機カルボン酸、および/または有機カルボン酸無水物を添加することによって、高いパターン密着性を保ちながら、着色組成物の未溶解物の残存をより一層低減することが可能である。
本発明の着色組成物は、前述の成分を混合することで調製される。
なお、着色組成物の調製に際しては、着色組成物を構成する各成分を一括配合してもよいし、各成分を溶剤に溶解・分散した後に逐次配合してもよい。また、配合する際の投入順序や作業条件は特に制約を受けない。例えば、全成分を同時に溶剤に溶解・分散して組成物を調製してもよいし、必要に応じては、各成分を適宜2つ以上の溶液・分散液としておいて、使用時(塗布時)にこれらを混合して組成物として調製してもよい。
上記のようにして調製された着色組成物は、好ましくは、孔径0.01μm~3.0μm、より好ましくは孔径0.05μm~0.5μm程度のフィルタなどを用いて濾別した後、使用に供することができる。
次に、本発明における硬化膜、パターン形成方法およびカラーフィルタについて、その製造方法を通じて詳述する。
また、本発明のパターン形成方法の第二の態様は、本発明の着色組成物を支持体上に適用して着色組成物層を形成し、硬化して着色層を形成する工程と、着色層上にフォトレジスト層を形成する工程と、露光および現像することによりフォトレジスト層をパターニングしてレジストパターンを得る工程と、レジストパターンをエッチングマスクとして着色層をドライエッチングして着色パターンを形成する工程と、を含むことを特徴とする。
すなわち、本発明では、フォトリソグラフィ法でパターン形成することもでき、また、ドライエッチング法でパターン形成することもできる。
本発明のパターン形成方法は、カラーフィルタが有する着色パターン(画素)の形成に好適に適用することができる。
本発明のカラーフィルタの製造方法の第一の態様は、本発明の着色組成物を支持体上に適用して着色組成物層を形成する工程と、着色組成物層をパターン様に露光する工程と、未露光部を現像除去して着色パターンを形成する工程と、を含むことを特徴とする。さらに、必要に応じて、着色組成物層をベークする工程(プリベーク工程)、および、現像された着色パターンをベークする工程(ポストベーク工程)を設けてもよい。以下、これらの工程をあわせて、パターン形成工程ということがある。
また、本発明のカラーフィルタの製造方法の第二の態様は、本発明の着色組成物を支持体上に適用して着色組成物層を形成し、硬化して着色層を形成する工程と、着色層上にフォトレジスト層を形成する工程と、露光および現像することによりフォトレジスト層をパターニングしてレジストパターンを得る工程と、レジストパターンをエッチングマスクとして着色層をドライエッチングして着色パターンを形成する工程とを含むことを特徴とする。
本発明のカラーフィルタは、上記製造方法により好適に得ることができる。
以下、固体撮像素子用カラーフィルタを単に「カラーフィルタ」ということがある。
着色組成物層を形成する工程では、支持体上に、本発明の着色組成物を適用して着色組成物層を形成する。
本発明における着色パターンは、固体撮像素子用基板の撮像素子形成面側(おもて面)に形成されてもよいし、撮像素子非形成面側(裏面)に形成されてもよい。
固体撮像素子における着色パターンの間や、固体撮像素子用基板の裏面には、遮光膜が設けられていてもよい。
また、支持体上には、必要により、上部の層との密着改良、物質の拡散防止或いは基板表面の平坦化のために下塗り層を設けてもよい。
<<<露光工程>>>
露光工程では、着色組成物層形成工程において形成された着色組成物層を、例えば、ステッパー等の露光装置を用い、所定のマスクパターンを有するマスクを介してパターン露光する。これにより、硬化膜が得られる。
露光に際して用いることができる放射線(光)としては、特に、g線、i線等の紫外線が好ましく(特に好ましくはi線)用いられる。照射量(露光量)は30mJ/cm2~1500mJ/cm2が好ましく50mJ/cm2~1000mJ/cm2がより好ましく、80mJ/cm2~500mJ/cm2が最も好ましい。
膜厚を、1.0μm以下とすることにより、高解像性、高密着性を得られるため、好ましい。
また、本工程においては、0.7μm以下の薄い膜厚を有する硬化膜も好適に形成することができ、得られた硬化膜を、後述するパターン形成工程にて現像処理することで、薄膜でありながらも、現像性、表面荒れ抑制、およびパターン形状に優れた着色パターンを得ることができる。
次いでアルカリ現像処理を行うことにより、露光工程における光未照射部分の着色組成物層がアルカリ水溶液に溶出し、光硬化した部分だけが残る。
現像液としては、下地の撮像素子や回路などにダメージを起さない、有機アルカリ現像液が望ましい。現像温度としては通常20℃~30℃であり、現像時間は、従来20秒~90秒であった。より残渣を除去するため、近年では120秒~180秒実施する場合もある。さらには、より残渣除去性を向上するため、現像液を60秒ごとに振り切り、さらに新たに現像液を供給する工程を数回繰り返す場合もある。
なお、現像液には無機アルカリを用いてもよく、無機アルカリとしては、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸水素ナトリウム、硅酸ナトリウム、メタ硅酸ナトリウムなどが好ましい。
なお、このようなアルカリ性水溶液からなる現像液を使用した場合には、一般に現像後純水で洗浄(リンス)する。
ポストベークは、硬化を完全なものとするための現像後の加熱処理であり、通常100℃~240℃、好ましくは200℃~240℃の熱硬化処理を行う。
このポストベーク処理は、現像後の塗布膜を、上記条件になるようにホットプレートやコンベクションオーブン(熱風循環式乾燥機)、高周波加熱機等の加熱手段を用いて、連続式あるいはバッチ式で行うことができる。
ドライエッチングは、着色層を、パターニングされたフォトレジスト層をマスクとしてエッチングガスを用いて行うことができる。具体的には、着色層上にポジ型またはネガ型の感放射線性組成物を塗布し、これを乾燥させることによりフォトレジスト層を形成する。フォトレジスト層の形成においては、さらにプリベーク処理を施すことが好ましい。特に、フォトレジストの形成プロセスとしては、露光後の加熱処理(PEB)、現像後の加熱処理(ポストベーク処理)を実施する形態が望ましい。
具体的には、ポジ型の感放射線性組成物として、キノンジアジド化合物およびアルカリ可溶性樹脂を含有する組成物が好ましい。キノンジアジド化合物およびアルカリ可溶性樹脂を含有するポジ型の感放射線性組成物は、500nm以下の波長の光照射によりキノンジアジド基が分解してカルボキシル基を生じ、結果としてアルカリ不溶状態からアルカリ可溶性になることを利用するものである。このポジ型フォトレジストは解像力が著しく優れているので、ICやLSI等の集積回路の作製に用いられている。キノンジアジド化合物としては、ナフトキノンジアジド化合物が挙げられる。市販品としては例えばFHi622BC」(富士フイルムエレクトロニクスマテリアルズ社製)などが挙げられる。
フッ素系ガスと酸素ガス(O2)との混合ガスを用い、支持体が露出しない領域(深さ)までエッチングを行なう第1段階のエッチングと、この第1段階のエッチングの後に、窒素ガス(N2)と酸素ガス(O2)との混合ガスを用い、好ましくは支持体が露出する領域(深さ)付近までエッチングを行なう第2段階のエッチングと、支持体が露出した後に行なうオーバーエッチングとを含む形態が好ましい。以下、ドライエッチングの具体的手法、並びに第1段階のエッチング、第2段階のエッチング、およびオーバーエッチングについて説明する。
(1)第1段階のエッチングにおけるエッチングレート(nm/min)と、第2段階のエッチングにおけるエッチングレート(nm/min)とをそれぞれ算出する。
(2)第1段階のエッチングで所望の厚さをエッチングする時間と、第2段階のエッチングで所望の厚さをエッチングする時間とをそれぞれ算出する。
(3)上述した(2)で算出したエッチング時間に従って第1段階のエッチングを実施する。
(4)上述した(2)で算出したエッチング時間に従って第2段階のエッチングを実施する。あるいはエンドポイント検出でエッチング時間を決定し、決定したエッチング時間に従って第2段階のエッチングを実施してもよい。
(5)上述した(3)および(4)の合計時間に対してオーバーエッチング時間を算出し、オーバーエッチングを実施する。
上記のうち、アルキレングリコールモノアルキルエーテルカルボキシレートおよびアルキレングリコールモノアルキルエーテルが好ましい。
これら溶媒は、単独で用いても2種以上を混合して用いてもよい。2種以上を混合する場合、水酸基を有する溶剤と水酸基を有しない溶剤とを混合することが好ましい。水酸基を有する溶剤と水酸基を有しない溶剤との質量比は、1/99~99/1、好ましくは10/90~90/10、さらに好ましくは20/80~80/20である。プロピレングリコールモノメチルエーテルアセテート(PGMEA)とプロピレングリコールモノメチルエーテル(PGME)の混合溶剤で、その比率が60/40であることが特に好ましい。なお、汚染物に対する洗浄液の浸透性を向上させるために、洗浄液には前掲の本組成物に関する界面活性剤を添加してもよい。
本発明のカラーフィルタは、CCD、CMOS等の固体撮像素子に好適に用いることができ、特に100万画素を超えるような高解像度のCCDやCMOS等に好適である。本発明の固体撮像素子用カラーフィルタは、例えば、CCDまたはCMOSを構成する各画素の受光部と、集光するためのマイクロレンズと、の間に配置されるカラーフィルタとして用いることができる。
また、着色パターン(着色画素)のサイズ(パターン幅)としては、2.5μm以下が好ましく、2.0μm以下がより好ましく、1.7μm以下が特に好ましい。
本発明の固体撮像素子は、本発明のカラーフィルタを備える。本発明の固体撮像素子の構成としては、本発明におけるカラーフィルタが備えられた構成であり、固体撮像素子として機能する構成であれば特に限定はないが、例えば、以下のような構成が挙げられる。
さらに、デバイス保護膜上であってカラーフィルタの下(支持体に近い側)に集光手段(例えば、マイクロレンズ等。以下同じ)を有する構成や、カラーフィルタ上に集光手段を有する構成等であってもよい。
本発明のカラーフィルタは、固体撮像素子のみならず、液晶表示装置や有機EL表示装置などの、画像表示装置に用いることができ、特に液晶表示装置の用途に好適である。本発明のカラーフィルタを備えた液晶表示装置は、表示画像の色合いが良好で表示特性に優れた高画質画像を表示することができる。
また、本発明におけるカラーフィルタは、明るく高精細なCOA(Color-filter On Array)方式にも供することが可能である。COA方式の液晶表示装置にあっては、カラーフィルタ層に対する要求特性は、前述のような通常の要求特性に加えて、層間絶縁膜に対する要求特性、すなわち低誘電率および剥離液耐性が必要とされることがある。本発明のカラーフィルタにおいては、色相に優れた染料多量体を用いることから、色純度、光透過性などが良好で着色パターン(画素)の色合いに優れるので、解像度が高く長期耐久性に優れたCOA方式の液晶表示装置を提供することができる。なお、低誘電率の要求特性を満足するためには、カラーフィルタ層の上に樹脂被膜を設けてもよい。
これらの画像表示方式については、例えば、「EL、PDP、LCDディスプレイ-技術と市場の最新動向-(東レリサーチセンター調査研究部門 2001年発行)」の43ページなどに記載されている。
バックライトに関しては、SID meeting Digest 1380(2005)(A.Konno et.al)や、月刊ディスプレイ 2005年12月号の18~24ページ(島 康裕)、同25~30ページ(八木隆明)などに記載されている。
市販のローダミンB(10g)をクロロホルム40mlに溶解し、塩化ホスホリル5gを加えて2時間加熱還流した後、上記中間体(B-1)を1.7g添加した。さらに2時間加熱還流した後、溶液を水洗し、硫酸ナトリウムで乾燥後に溶媒を留去した。赤色残渣をイソプロパノール100mlで再結晶し、中間体(C-1)を5g得た。この中間体(C-1)を1規定の水酸化カリウム水溶液20mlに添加して1時間攪拌後、ビス(トリフルオロメチルスルホニル)イミドのリチウム塩の水溶液を添加し、生じる沈殿を濾取することで、(S-37)を4.5g得た。
<色素(S-40)の合成>
合成例1において、ビス(トリフルオロメチルスルホニル)イミドのリチウム塩の代わりに、トリス(トリフルオロメチルスルホニル)メチドのリチウム塩を用いた以外は合成例1と同様にして色素(S-40)を合成した。
<色素(S-46)の合成>
合成例3において、(A-1)の代わりにローダミンBを、ビス(トリフルオロメチルスルホニル)イミドのリチウム塩の代わりにテトラキス(ペンタフルオロフェニル)ボレートのリチウム塩を用いた以外は合成例3と同様にして色素(S-46)を合成した。
得られた化合物(A-1) 150gにメタノール 985mL、2-メルカプトエタノール 49.0gを加え、窒素気流下、室温にてトリエチルアミン64.5gを加えた。室温にて1h攪拌した後、反応溶液を減圧濃縮することでメタノールを除去した。濃縮した化合物に酢酸エチル900mL、飽和食塩水 800mL、飽和重曹水 100mLを加えて分液操作を行い、さらに有機層を水で3回洗浄した。得られた有機層を硫酸マグネシウムで脱水した後、有機層を減圧濃縮することで酢酸エチルを除去し、化合物(A-2)169.7gを得た。
得られた化合物(A-2)48.8gに、ジメチルアセトアミド(DMAc) 95mL、(2-イソシアナトエチルアクリラート)(AOI) 24.8g、ジブチルヒドロキシトルエン(BHT) 0.190gを加えた後、窒素気流下、室温にてネオスタンU-600 0.100gを加えた。85℃で1h攪拌した後、室温まで冷却してから酢酸エチル500 mL、飽和食塩水500 mLを加えて分液操作を行い、さらに有機層を水で3回洗浄した。得られた有機層を硫酸マグネシウムで脱水した後、有機層を減圧濃縮することで酢酸エチルを除去した。濃縮した化合物に0℃でクロロホルムを170mL加えることで再結晶を行い、さらにろ過することで化合物(A-3)59.7gを得た。
得られた化合物(A-3) 50.0gに塩化メチレン 500 mL、トリエチルアミン 34.0gを加え、窒素気流下、室温にて酸クロリド(A-4)108.0gを加えた。室温にて2h攪拌した後、クロロホルム200mL、水 500mL、飽和食塩水 200mLを加えて、分液操作を行った。得られた有機層を硫酸マグネシウムで脱水し、減圧濃縮することで酢酸エチルを除去した後、シリカゲルカラムクロマトグラフィー(展開溶媒 クロロホルム:酢酸エチル=10:1→5:5)で精製を行った。目的物の溶液を減圧濃縮し、得られた固体にアセトニトリル400mLを加えて1h攪拌した後、ろ過することで色素(D4´)108.0gを得た。
続いて、化合物(B-2)を30質量%含むNEP溶液 4.0gに対して、NEP9.6g、トリエチルアミン0.57g、色素(D4´)4.40gを加えて、室温にて1日反応させた。その後、反応溶液をヘキサン:酢酸エチル(1:5)溶液300mLに滴下することで再沈殿を行い、さらにろ過することでオリゴマー(B-3)を4.6g得た。
さらに、オリゴマー(B-3) 3.0gに、DMAc 24mL、(2-イソシアナトエチルメタクリレート)(MOI) 0.22g、BHT 0.10gを加えて、室温にて3時間反応させた。その後、反応溶液をヘキサン:酢酸エチル(1:5)溶液300mLに滴下することで再沈殿を行い、さらにろ過することで色素(48)を1.9g得た。
続いて、化合物(C-1)を30質量%含むNEP溶液 4.0gに対して、NEP9.6g、トリエチルアミン0.51g、色素(D4´)5.13gを加えて1日撹拌した。その後、反応溶液をヘキサン:酢酸エチル(1:5)溶液300mLに滴下することで再沈殿を行い、さらにろ過することで色素(52)を4.8g得た。
下記組成の成分を混合して溶解し、下塗り層用レジスト液を調製した。
<下塗り層用レジスト液の組成>
・溶剤:プロピレングリコールモノメチルエーテルアセテート
19.20部
・溶剤:乳酸エチル 36.67部
・アルカリ可溶性樹脂:メタクリル酸ベンジル/メタクリル酸/メタクリル酸-2-ヒドロキシエチル共重合体(モル比=60/22/18、重量平均分子量15,000、数平均分子量9,000)の40%PGMEA溶液 30.51部
・エチレン性不飽和二重結合含有化合物:ジペンタエリスリトールヘキサアクリレート 12.20部
・重合禁止剤:p-メトキシフェノール 0.0061部
・フッ素系界面活性剤:F-475、DIC(株)製 0.83部
・光重合開始剤:トリハロメチルトリアジン系の光重合開始剤
(TAZ-107、みどり化学社製) 0.586部
6inchシリコンウエハをオーブン中で200℃のもと30分加熱処理した。次いで、このシリコンウエハ上に、レジスト液を乾燥膜厚が1.5μmになるように塗布し、さらに220℃のオーブン中で1時間加熱乾燥させて下塗り層を形成し、下塗り層付シリコンウエハ基板を得た。
3-1.青色顔料分散液の調製
青色顔料分散液1を、以下のようにして調製した。
C.I.Pigment Blue15:6を13.0部(青色顔料、平均粒子サイズ55nm)、および顔料分散剤であるDisperbyk111を5.0部、PGMEA82.0部からなる混合液を、ビーズミル(beads mill)(ジルコニアビーズ0.3mm径)により3時間混合・分散して、顔料分散液を調製した。その後さらに、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2000kg/cm3の圧力下で流量500g/minとして分散処理を行なった。この分散処理を10回繰り返し、実施例または比較例の着色組成物に用いる青色用顔料分散液1(C.I.Pigment Blue15:6分散液、顔料濃度13%)を得た。
得られた青色顔料分散液について、顔料の粒子サイズを動的光散乱法(Microtrac Nanotrac UPA-EX150(日機装社(Nikkiso Co., Ltd.)製))により測定したところ、24nmであった。
下記の各成分を混合して分散、溶解し、実施例1~58、比較例1~2の各着色組成物を得た。
・シクロヘキサノン 1.133部
・アルカリ可溶性樹脂(下記J1またはJ2:表1に記載の化合物)
0.030部
・ソルスパース20000(1%シクロヘキサン溶液、日本ルーブリゾール(株)製) 0.125部
・光重合開始剤(下記構造の化合物:下記表に記載の化合物)
0.012部
・色素(下記表に記載の化合物) 固形分として0.040部
・下記表に記載の顔料分散液(顔料濃度13.0%) 0.615部
・ジペンタエリスリトールヘキサアクリレート 0.070部
・グリセロールプロポキシレート(1%シクロヘキサン溶液)0.048部
PB15:3 C.I.ピグメントブルー15:3
PR254: C.I.ピグメントレッド254
<フォトリソグラフィ法を適用したパターン形成の例1>
上記のように調製した実施例および比較例の着色組成物の各々を、上記2.で得られた下塗り層付シリコンウエハ基板の下塗り層上に塗布し、着色組成物層(塗布膜)を形成した。そして、この塗布膜の乾燥膜厚が0.6μmになるように、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行なった。
その後、照射された塗布膜が形成されているシリコンウエハ基板をスピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2000(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像を行ない、シリコンウエハ基板に着色パターンを形成した。
以上のようにして、実施例または比較例の着色組成物により形成された着色パターンを有するカラーフィルタを作製した。
その後、測長SEM「S-9260A」(日立ハイテクノロジーズ(株)製)を用いて、着色パターンのサイズを測定した。パターンサイズが1.0μmとなる露光量を最適露光量とした。
5-1.パターン欠損
着色パターンを100個観察し、欠損しているパターンの個数を数えた。個数が多いほどパターン欠損が悪いことを示す。結果を下記表に示す。
パターン100個を測長SEMで観察し、パターン直線性を判定した。
A:形状は矩形であり、パターンの辺が直線である
B:形状は矩形であり、パターンの辺がややゆがんだ直線であるが実用上問題ないレベル
C:形状は丸みをおびており、パターンの辺は粗く、実用上問題があるレベル
各カラーフィルタにおける着色パターンの吸光度を、MCPD-3000(大塚電子(株)製)にて測定した(吸光度A)。
カラーフィルタの着色パターン形成面に、乾燥膜厚が1μmとなるようにCT-2000L溶液(富士フイルムエレクトロニクスマテリアルズ(株)製;透明下地剤)を塗布し、乾燥させて、透明膜を形成した後、280℃で5分間加熱処理を行なった。
加熱終了後、着色パターンに隣接する透明膜の吸光度を、MCPD-3000(大塚電子(株)製)にて測定した(吸光度B)。
得られた透明膜の吸光度Bの値について、加熱前に測定した着色パターンの吸光度Aの値に対する割合[%]を算出した〔下記(式A)〕。これを隣接ピクセルへの色移りを評価する指標とした。
(式A) 色移り(%)=吸光度B/吸光度A×100
上記得た着色組成物が塗布されたガラス基板を、基板面で接するように200℃のホットプレートに載置して1時間加熱した後、色度計MCPD-1000(大塚電子(株)製)にて、加熱前後での色差(ΔE*ab値)を測定して熱堅牢性を評価する指標とし、下記判定基準に従って評価した。ΔE*ab値は、値の小さい方が、耐熱性が良好なことを示す。なお、ΔE*ab値は、CIE1976(L*,a*,b*)空間表色系による以下の色差公式から求められる値である(日本色彩学会編 新編色彩科学ハンドブック(昭和60年)p.266)。
ΔE*ab={(ΔL*)2+(Δa*)2+(Δb*)2}1/2
6-1.着色組成物の調製
下記の各成分を混合して分散、溶解し、実施例59~89、比較例3~4の各着色組成物を得た。
・シクロヘキサノン 1.133部
・光重合開始剤(下記構造の化合物:表3に記載の化合物) 0.012部
・色素(下記表に記載の化合物) 固形分として0.040部
・下記表に記載の顔料分散液(顔料濃度13.0%) 0.615部
・重合性化合物(EHPE-3150(ダイセル化学社製2,2-ビス(ヒドロキシメチル)-1-ブタノールの1,2-エポキシ-4-(2-オキシラニル)シクロヘキサン付加物)) 0.070部
・グリセロールプロポキシレート(1%シクロヘキサン溶液)0.048部
7-1.耐アルカリ現像液性(現像液耐性)
ガラス基板上に、着色組成物を膜厚が0.6μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行った。次いで、220℃のホットプレートを用いて300秒間加熱処理(ポストベーク)を行い、硬化膜を作製した。
このようにして得られたカラーフィルタを、紫外可視近赤外分光光度計UV3600(島津製作所製)の分光光度計(レファレンス:ガラス基板)で300nm~800nmの波長域で透過率を測定した。また、OLYMPUS製光学顕微鏡 BX60を用いて、反射観測(倍率50倍)にて微分干渉像を観察した。
次いで、アルカリ現像液FHD-5(富士フイルムエレクトロニクスマテリアルズ(株)製)の中に5分間浸漬し、乾燥させた後に再度分光測定を実施し、下記式(1)からアルカリ現像液浸漬前後の透過率変動を求めて、以下の基準で評価した。
アルカリ現像液浸漬前後の透過率変動=|T0-T1| ・・・(1)
T0:アルカリ現像液に浸漬前のカラーフィルタの透過率
T1:アルカリ現像液に浸漬後のカラーフィルタの透過率
AA:良好 300nm~800nmの全領域において、アルカリ現像液浸漬前後の透過率変動が2%未満
A:やや良好 300nm~800nmの全領域において、アルカリ現像液浸漬前後の透過率変動が2%以上5%未満
B:十分 300nm~800nmの全領域において、アルカリ現像液浸漬前後の透過率変動が5%以上10%未満
C:不十分 300nm~800nmの全領域において、アルカリ現像液浸漬前後の透過率変動が10%以上
7-1で作製した着色膜上にポジ型フォトレジスト「FHi622BC」(富士フイルムエレクトロニクスマテリアルズ社製)を塗布し、プリベークを実施し、膜厚0.8μmのフォトレジスト層を形成した。続いて、フォトレジスト層を、i線ステッパー(キャノン(株)製)を用い、350mJ/cm2の露光量でパターン露光し、フォトレジスト層の温度または雰囲気温度が90℃となる温度で1分間、加熱処理を行なった。その後、フォトレジスト剥離液「MS230C」(富士フイルムエレクトロニクスマテリアルズ社製)を使用して120秒間、剥離処理を実施してレジストパターンを除去し、さらに純水による洗浄、スピン乾燥を実施した。その後、100℃で2分間の脱水ベーク処理を行った。
フォトレジスト剥離液浸漬前後の透過率変動=|T0-T2| ・・・(2)
T0:フォトレジスト剥離液に浸漬前のカラーフィルタの透過率
T2:フォトレジスト剥離液に浸漬後のカラーフィルタの透過率
AA:良好 300nm~800nmの全領域において、フォトレジスト剥離液浸漬前後の透過率変動が2%未満
A:やや良好 300nm~800nmの全領域において、フォトレジスト剥離液浸漬前後の透過率変動が2%以上5%未満
B:十分 300nm~800nmの全領域において、フォトレジスト剥離液浸漬前後の透過率変動が5%以上10%未満
C:不十分 300nm~800nmの全領域において、フォトレジスト剥離液浸漬前後の透過率変動が10%以上
8-1.着色組成物の調製
下記の各成分を混合して分散、溶解し、実施例90~192の着色組成物を得た。
・シクロヘキサノン:17.12部
・アルカリ可溶性樹脂1(ベンジルメタクリレート(BzMA)とメタクリル酸(MAA)の共重合体、30%PGMEA溶液):1.23部
・アルカリ可溶性樹脂2(アクリキュア-RD-F8(日本触媒社製)):0.23部
・光重合開始剤I-2(IRGACURE OXE-02):0.975部
・色素(下記表に記載の化合物)のシクロヘキサノン溶液(固形分濃度12.3%):24.57部
・顔料分散液(C.I.Pigment Blue15:6分散液、PGMEA溶液、固形分濃度12.8%):51.40部
・重合性化合物(ジペンタエリスリトールヘキサアクリレート、NKエステル A-DPH-12E(新中村化学社製)):1.96部
・重合禁止剤(p-メトキシフェノール):0.0007部
・フッ素系界面活性剤(DIC社製F475、1%PGMEA溶液):2.50部
上記で調製した着色組成物を、上記2.で得られた下塗り層付シリコンウエハ基板の下塗り層上に塗布し、着色組成物層(塗布膜)を形成した。そして、この塗布膜の乾燥膜厚が1μmになるように、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行なった。
次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して365nmの波長でパターンが1.0μm四方のIslandパターンマスクを通して50~1200mJ/cm2の種々の露光量で露光した。
その後、照射された塗布膜が形成されているシリコンウエハ基板をスピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2000(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像を行ない、下塗り層付シリコンウエハの下塗り層上に着色パターンを形成した。
着色パターンが形成されたシリコンウエハ基板を、真空チャック方式で水平回転テーブルに固定し、回転装置によってシリコンウエハ基板を回転数50rpmで回転させつつ、その回転中心の上方より純水を噴出ノズルからシャワー状に供給してリンス処理を行ない、その後スプレー乾燥した。次いで、200℃で300秒間、ホットプレートでポストベークを行い、シリコンウエハ基板上の膜厚1μmの着色パターン(硬化膜)を得た。
以上により、実施例90~192の着色組成物により形成された着色パターンを有するカラーフィルタを作製した。
その後、測長SEM「S-9260A」(日立ハイテクノロジーズ(株)製)を用いて、着色パターンのサイズを測定した。
パターンサイズが1.0μmとなる露光量の着色パターンを用い、透過率、現像性、色抜けの評価を行った。
色素に導入した重合性基数を色素の分子量で割ることで、色素のC=C価を算出した。
得られたカラーフィルタを、紫外可視近赤外分光光度計UV3600(島津製作所製)の分光光度計(レファレンス:ガラス基板)で300nm~800nmの波長域で透過率を測定した。その後、450nmおよび550nmにおける透過率を算出し、下記基準に従って、450nmおよび550nmにおける透過率を評価した。
A: 450nmにおける透過率が85%以上、かつ、550nmにおける透過率が5%以下
B: 450nmにおける透過率が80%以上85%未満、かつ、550nmにおける透過率が5%以上10%未満
C: 450nmにおける透過率が80%以下、かつ、550nmにおける透過率が10%以上
D: A~Cのいずれにも該当しない
作成したカラーフィルタをガラス切りにて切り出し、その断面を、走査式電子顕微鏡(S-4800、日立株式会社製)を用いて、倍率15,000倍にて観察し、下記評価基準に従って評価した。
A:パターンが問題なく形成されている
B:パターンがやや歪んでいるが、実用上問題ないレベルである
C:パターンが歪んでいるあるいは形成されておらず、実用上問題あるレベルである
8-6.色抜け
ガラス基板上に、実施例90~192の着色組成物を膜厚が0.6μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行った。次いで、220℃のホットプレートを用いて300秒間加熱処理(ポストベーク)を行い、硬化膜を作製した。
得られたカラーフィルタを、紫外可視近赤外分光光度計UV3600(島津製作所製)の分光光度計(レファレンス:ガラス基板)で300nm~800nmの波長域で透過率を測定した。また、OLYMPUS製光学顕微鏡 BX60を用いて、反射観測(倍率50倍)にて微分干渉像を観察した。
次いで、アルカリ現像液FHD-5(富士フイルムエレクトロニクスマテリアルズ(株)製)の中に5分間浸漬し、乾燥させた後に再度分光測定を実施し、下記式(1)からアルカリ現像液浸漬前後の透過率変動を求めて、以下の基準で評価した。
アルカリ現像液浸漬前後の透過率変動=|T0-T1| ・・・(1)
T0:アルカリ現像液に浸漬前のカラーフィルタの透過率
T1:アルカリ現像液に浸漬後のカラーフィルタの透過率
AA:良好 300nm~800nmの全領域において、アルカリ現像液浸漬前後の透過率変動が2%以上5%未満
B:十分 300nm~800nmの全領域において、アルカリ現像液浸漬前後の透過率変動が5%以上10%未満
C:不十分 300nm~800nmの全領域において、アルカリ現像液浸漬前後の透過率変動が10%以上
さらには、450nmにおける透過率が低く、かつ、550nmにおける透過率が高いことが分かった。青色用カラーフィルタにおいては、450nmにおける透過率が低く、かつ、550nmにおける透過率が高いことが望ましいため、実施例90~192のカラーフィルタは、青色用カラーフィルタとして特に好ましい分光特性を有していることが分かった。
Claims (20)
- (A)下記一般式(I)で示される色素および(B)重合性化合物を含有する着色組成物;
一般式(I)
(R)m-Q-(D)n
一般式(I)中、Qは、(m+n)価の連結基を表し、Rは、置換基を表し、Dは、色素残基を表し、mは、0~6の整数を表し、nは、2~8の整数を表し、(m+n)は2~8の整数を表し、mが2以上の場合、複数のRは互いに異なっていても良く、nが2以上の場合、複数のDは互いに異なっていても良い。 - 一般式(1)中の、連結基Q、置換基Rおよび色素残基Dから選ばれる少なくとも一つが、酸基を含有する、請求項1に記載の着色組成物。
- 一般式(I)中の色素残基Dが、カチオン部位と対アニオンから構成される、請求項1または2に記載の着色組成物。
- 一般式(I)中の色素残基Dが、分子内にカチオン部位とアニオン部位とを有する、請求項1または2に記載の着色組成物。
- 一般式(I)中の色素残基Dを構成するカチオン部位が、ジピロメテン色素、トリアリールメタン色素、キサンテン色素、シアニン色素およびスクアリリウム色素から選択される、請求項1~4のいずれか1項に記載の着色組成物。
- 一般式(I)中の色素残基Dを構成する対アニオンが、スルホン酸アニオン、スルホニルイミドアニオン、ビス(アルキルスルホニル)イミドアニオン、トリス(アルキルスルホニル)メチドアニオン、カルボン酸アニオン、テトラアリールボレートアニオン、BF4 -、PF6 -、およびSbF6 -から選択される、請求項3に記載の着色組成物。
- 一般式(I)中の置換基Rの少なくとも1つが酸基である、請求項1~6のいずれか1項に記載の着色組成物。
- さらに(A)色素以外の(C)顔料を含む、請求項1~7のいずれか1項に記載の着色組成物。
- さらに(D)光重合開始剤を含む、請求項1~8のいずれか1項に記載の着色組成物。
- (D)光重合開始剤が、オキシム化合物である、請求項9に記載の着色組成物。
- カラーフィルタの着色層形成用である、請求項1~10のいずれか1項に記載の着色組成物。
- 一般式(I)で示される色素が有機溶剤溶解性染料である、請求項1~11のいずれか1項に記載の着色組成物。
- 一般式(I)で示される色素が重合性基を有する、請求項1~12のいずれか1項に記載の着色組成物。
- 一般式(I)で示される色素の分子量が2000~6000である、請求項1~13のいずれか1項に記載の着色組成物。
- 請求項1~14のいずれか1項に記載の着色組成物を硬化して得られた硬化膜。
- 請求項1~14のいずれか1項に記載の着色組成物を用いてなるカラーフィルタ。
- 請求項1~14のいずれか1項に記載の着色組成物を支持体上に適用して着色組成物層を形成する工程と、
前記着色組成物層をパターン状に露光する工程と、
未露光部を現像除去して着色パターンを形成する工程と、
を含むカラーフィルタの製造方法。 - 請求項1~14のいずれか1項に記載の着色組成物を支持体上に適用して着色組成物層を形成し、硬化して着色層を形成する工程と、
前記着色層上にフォトレジスト層を形成する工程と、
露光および現像することにより前記フォトレジスト層をパターニングしてレジストパターンを得る工程と、
前記レジストパターンをエッチングマスクとして前記着色層をドライエッチングして着色パターンを形成する工程と、
を含むカラーフィルタの製造方法。 - 請求項16に記載のカラーフィルタ、または、請求項17もしくは18に記載のカラーフィルタの製造方法によって製造したカラーフィルタを有する固体撮像素子。
- 請求項16に記載のカラーフィルタ、または、請求項17もしくは18に記載のカラーフィルタの製造方法によって製造したカラーフィルタを有する画像表示装置。
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CN105392806B (zh) | 2018-04-17 |
KR101938600B1 (ko) | 2019-01-15 |
JP6333604B2 (ja) | 2018-05-30 |
KR20160014699A (ko) | 2016-02-11 |
JP2015034966A (ja) | 2015-02-19 |
KR20180069138A (ko) | 2018-06-22 |
US20160116838A1 (en) | 2016-04-28 |
US10409158B2 (en) | 2019-09-10 |
TWI631190B (zh) | 2018-08-01 |
TW201502213A (zh) | 2015-01-16 |
CN105392806A (zh) | 2016-03-09 |
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