WO2015000190A1 - 一种卡匣及搬运玻璃基板的装置 - Google Patents

一种卡匣及搬运玻璃基板的装置 Download PDF

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Publication number
WO2015000190A1
WO2015000190A1 PCT/CN2013/079239 CN2013079239W WO2015000190A1 WO 2015000190 A1 WO2015000190 A1 WO 2015000190A1 CN 2013079239 W CN2013079239 W CN 2013079239W WO 2015000190 A1 WO2015000190 A1 WO 2015000190A1
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WIPO (PCT)
Prior art keywords
cassette
support
suction cup
glass substrate
gas channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2013/079239
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English (en)
French (fr)
Inventor
李晨阳子
林昆贤
齐明虎
汪永强
陈增宏
杨卫兵
蒋运芍
舒志优
杨国坤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
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Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Publication of WO2015000190A1 publication Critical patent/WO2015000190A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/17—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] specially adapted for supporting large square shaped substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames

Definitions

  • the invention relates to a Chinese patent application filed on July 1, 2013 by the Chinese Patent Office, the application number is 201310271289.6, and the invention is entitled "a type of cassette and a device for transporting a glass substrate".
  • the entire contents of the above-identified patents are incorporated herein by reference.
  • the present invention relates to the field of panel manufacturing of glass substrates, and more particularly to a device for chucking and transporting a glass substrate. Background technique
  • the Crane is responsible for transporting the cassettes (CST) in the storage area inside the automated storage system.
  • Fig. 1 a schematic view of a carrying cassette in the prior art is shown. It can be seen that the stacker moves the cassette 7 to other storage positions or stations by extending the robot arm 9 to the bottom end of the cassette 7 and supporting the cassette 7.
  • the four ends of the cassette 7 are provided with a plurality of inwardly extending branch ends 70, and each of the branches 70 is provided with a stop slider 71.
  • the glass substrate 8 in the cassette 7 is supported by the stopper slider 71 on each of the branch ends 70 of the stack, and the relative movement of the glass substrate 8 is prevented by the static friction.
  • the glass substrate 8 in the cassette 7 is easily deflected, causing vibration or even scratching; for example, the glass substrate 8 in FIG. B, C, etc. have occurred in the case of offset, scratches and bumps.
  • the technical problem to be solved by the present invention is to provide a device for chucking and transporting a glass substrate, which can safely transport the glass substrate and prevent damage of the glass substrate during transportation.
  • an aspect of an embodiment of the present invention provides a cassette for placing a glass substrate, including: a top frame, a plurality of vertical columns disposed at the side, and a bottom frame, wherein The vertical column extends a plurality of support columns to the inside of the cassette, each support column is provided with a support suction cup, and a plurality of support columns are formed with a plurality of support planes, and each support plane is disposed for the glass substrate; A card II gas passage is disposed inside the support suction cup, the support column, the vertical column and the bottom frame, and is integrally connected. When a glass substrate is placed on the support suction cup, a negative pressure is formed inside the cassette gas passage, and the glass substrate is adsorbed. .
  • a through hole communicating with the cartridge gas passage is disposed on the bottom frame.
  • the cassette gas passage comprises at least a first gas passage disposed in the support suction cup.
  • the support suction cup further comprises:
  • a pressure sensor is disposed at a position where the upper portion of the support suction cup is in contact with the glass substrate, and is used for collecting pressure information;
  • a gas valve disposed on the first gas passage supporting the suction cup for opening or closing the first gas passage
  • the gas valve controller is disposed between the pressure sensor and the gas valve for driving the gas valve to open or close according to the pressure information collected by the pressure sensor.
  • a cassette for placing a glass substrate comprising: a top frame, a plurality of vertical columns disposed at the side, and a bottom frame, wherein the plurality of vertical columns are facing the card
  • a plurality of support columns are extended inside the support column, and each support column is provided with a support suction cup, and a plurality of support columns are formed with a plurality of support planes, and each support plane is disposed for the glass substrate;
  • a card II gas passage is disposed inside the support suction cup, the support column, the vertical column and the bottom frame, and is integrally connected.
  • a negative pressure is formed inside the cassette gas passage, and the glass substrate is adsorbed.
  • Supporting suction cups further include:
  • a pressure sensor is disposed at a position where the upper portion of the support suction cup is in contact with the glass substrate, and is used for collecting pressure information;
  • a gas valve disposed on the cassette gas passage in the support suction cup for opening or closing the first gas passage
  • the gas valve controller is disposed between the pressure sensor and the gas valve for driving the gas valve to open or close according to the pressure information collected by the pressure sensor.
  • a through hole communicating with the cartridge gas passage is disposed on the bottom frame.
  • a cassette for placing a glass substrate comprising: a top frame, a plurality of vertical columns disposed at the side, and a bottom frame, wherein, the plurality of vertical columns Extending a plurality of support columns into the interior of the cassette, each support column is provided with a support suction cup, and a plurality of support columns are formed with a plurality of support planes, and each support plane is disposed for the glass substrate;
  • a card II gas passage is disposed inside the support suction cup, the support column, the vertical column and the bottom frame, and is integrally connected.
  • a negative pressure is formed inside the cassette gas passage, and the glass substrate is adsorbed.
  • Supporting suction cups further include:
  • a pressure sensor is disposed at a position where the upper portion of the support suction cup is in contact with the glass substrate, and is used for collecting pressure information;
  • a gas valve disposed on the cassette gas passage in the support suction cup for opening or closing the first gas passage
  • the gas valve controller is disposed between the pressure sensor and the gas valve for driving the gas valve to open or close according to the pressure information collected by the pressure sensor.
  • a through hole communicating with the cartridge gas passage is disposed on the bottom frame.
  • an apparatus for transporting a glass substrate including a cassette for placing a glass substrate, and a transport mechanism for transporting the cassette,
  • the cassette includes: a top frame, a plurality of vertical columns disposed on the side, and a bottom frame, wherein a plurality of support columns are extended from the plurality of vertical columns toward the inside of the cassette, and each support column is provided with a support suction cup,
  • the support columns are formed with a plurality of support planes, and each support plane is disposed for the glass substrate;
  • the card II gas passages are disposed inside the support suction cup, the support column, the vertical column and the bottom frame, and are integrally connected to each other, and the gas passage is integrated
  • a negative pressure is formed inside for adsorbing the glass substrate, and a plurality of through holes are arranged in the bottom frame;
  • the handling mechanism further includes:
  • the body of the mechanism for inserting the bottom of the cassette, lifting and moving the cassette
  • a plurality of adsorption gas pipes are disposed on the body of the mechanism and can cooperate with the through holes at corresponding positions on the cassette;
  • a transport mechanism gas passage is formed inside the plurality of adsorption gas tubes and the body of the mechanism.
  • the adsorption gas pipe of the transport mechanism cooperates with the through hole of the cassette, the adsorption gas pipe is inserted into the through hole and sealed by a sealing rubber ring to connect the gas passage of the gas to the gas passage of the conveying mechanism.
  • the cassette gas passage comprises at least a first gas passage disposed in the support suction cup.
  • the support suction cup further comprises:
  • a pressure sensor is disposed at a position where the upper portion of the support suction cup is in contact with the glass substrate, and is used for collecting pressure information;
  • a gas valve disposed on the first gas passage supporting the suction cup for opening or closing the first gas passage
  • the gas valve controller is disposed between the pressure sensor and the gas valve for driving the gas valve to open or close according to the pressure information collected by the pressure sensor.
  • the transport mechanism is connected to a gas pump, and the air pump is connected to the gas passage of the transport mechanism for controlling the gas passage of the transport mechanism and the negative pressure in the gas passage of the cassette.
  • the transport mechanism and the air pump are all disposed on a stacker.
  • the glass substrate is stably adsorbed by the negative pressure by forming a click gas passage inside the support suction cup, the support column, the vertical column and the bottom frame of the cassette and communicating with the gas passage of the transport mechanism.
  • the supporting column on each layer of the cassette can prevent the glass substrate from being displaced due to external airflow or vibration during the handling process, thereby improving the safety of transporting the glass substrate and avoiding damage of the glass substrate during handling.
  • a support suction cup is disposed on each support column, and the support suction cup can control the opening and closing of the gas passage thereon by sensing whether a glass substrate is placed thereon, thereby fixing the cassette and the card by negative air pressure adsorption.
  • the glass substrate in the crucible is very intelligent and can increase the handling speed of the cassette, thereby increasing the productivity and the yield of the glass substrate.
  • FIG. 1 is a schematic view of a carrying cassette in the prior art
  • FIG. 2 is a schematic structural view of an embodiment of a device for transporting a glass substrate according to the present invention
  • FIG. 3 is a schematic view of another view of the cassette and the transport mechanism of FIG.
  • Figure 4 is a front view showing the structure of the cassette of Figure 2;
  • FIG. 5 is a schematic view showing the working principle of adsorbing a glass substrate in an apparatus for transporting a glass substrate according to the present invention
  • Figure 6 is a schematic cross-sectional view of the support suction cup of Figure 5.
  • FIG. 2 is a schematic structural view of an embodiment of a device for transporting a glass substrate according to the present invention.
  • the device for transporting a glass substrate includes:
  • Stacker 3 which can slide on the guide rail 4, which is responsible for carrying the cassette 1 in the storage space between the interiors of the automatic storage system; in particular, it can be moved along the guide rail to a designated storage location or process temporary storage Port (EQ port), pick and place the cassette 1 in the storage area, you can carry the cassette 1 to the other storage or process temporary storage port.
  • EQ port process temporary storage Port
  • the transport mechanism 2 is configured to pick up and place the cassette 1 in the storage position, which is disposed on the stacker 3, can be vertically moved on the stacker 3, and can move horizontally with the stacker 3; specifically, the transport The mechanism can be a robotic arm that can extend into the bottom end of the cassette in the storage or process temporary storage port, and slowly rises to support the cassette. As the stacker 3 moves, the handling of the cassette is achieved.
  • the cassette 1 is a frame structure including a top frame 15, a plurality of vertical columns 10 disposed at the side portions, and a bottom frame 13; wherein, the plurality of vertical columns 10 are facing the inside of the cassette Extending a plurality of support columns 11, each support column 11 is provided with at least one support suction cup 12, and the plurality of support columns 11 are formed with a plurality of support planes, each of which is disposed for the glass substrate 4; A suction passage 12, a vertical column 10 and a bottom frame 13 are respectively provided with a gas passage.
  • a first passage 126 is disposed in each of the support suction cups 12, and a second passage 110 is disposed in each support column 11 at each vertical column.
  • the third channel 100 is disposed on the bottom of the bottom frame 13
  • the fourth channel 130 is disposed in the bottom frame 13
  • the first channel 120 , the second channel 110 , the third channel 100 , and the fourth channel 130 are integrally connected to each other.
  • a plurality of through holes 14 are provided in the bottom frame 13, and a sealing rubber ring is disposed inside each of the through holes 13.
  • Each of the support suction cups 12 further includes:
  • the pressure sensor 126 is disposed at a position where the upper portion of the support suction cup 12 is in contact with the glass substrate 4 for collecting pressure information. When the glass substrate 4 is placed on the support suction cup 12, the pressure sensor 126 can collect corresponding information. ;
  • a gas valve 124 is disposed on the first gas passage 120 supporting the suction cup 12 for opening or closing the first gas passage 120;
  • the gas valve controller 122 is disposed between the pressure sensor 126 and the gas valve 124 for driving the gas valve 124 to be opened or closed according to the pressure information collected by the pressure sensor 126. Specifically, when the pressure sensor 126 is collected thereon, The pressure signal (i.e., the glass substrate is placed thereon) drives the valve 124 to open, thereby causing a negative pressure in the first gas passage 120 to adsorb the glass substrate. It can be understood that in other embodiments, the valve controller can also be replaced with a mechanical spring to achieve a similar switching action.
  • handling mechanism 2 further comprises:
  • the mechanism body 20 is configured to insert the bottom of the cassette 1 to lift and move the cassette 1;
  • a plurality of adsorption air tubes 22 are disposed on the mechanism body 20, and are engageable with the plurality of through holes 14 provided on the bottom frame 13 of the cassette 1.
  • four adsorption air tubes can be disposed on the card.
  • Four through holes 14 are disposed in the bottom frame 13 of the crucible 1, and it can be understood that the number and position of the adsorption air tubes 22 can be adjusted according to actual needs;
  • a transport mechanism gas passage 200 is formed inside the plurality of adsorption gas tubes 22 and the mechanism body 20. Specifically, when the adsorption gas pipe 22 of the conveying mechanism 2 is engaged with the through hole 14 of the cassette 1, the adsorption gas pipe 22 is inserted into the corresponding through hole 14 and sealed by the sealing rubber ring to make the gas passage and the conveying mechanism of the cartridge The gas passages 200 are in communication, and the sealing action can be achieved under the weight pressure of the cassette 1 to prevent air leakage.
  • the transport mechanism 2 is coupled to an air pump (not shown) that communicates with the transport mechanism gas passage 200 for controlling the formation of a negative pressure in the transport mechanism gas passage 200 and the cassette gas passage;
  • the air pump is disposed on the stacker 3.
  • the automatic storage system needs to transfer the cassette 1 from the storage position to the process temporary storage port, and the stacker 3 moves to the designated storage position according to the preset logical path, and drives the handling mechanism 2 to reach the storage position.
  • the moving mechanism 2 rises slowly, and the adsorption air tube 22 on the bottom of the cassette 1 is docked with the through hole 11 at the bottom of the cassette 1 to support the cassette 1 , and the pressure sensor 126 on the cassette 1 drives the air valve 124 to be opened, and The pumping operation of the air pump is driven to form a negative pressure in the gas passage 200 of the transport mechanism and the gas passage of the cassette, so that the glass substrate 4 in the cassette 1 is adsorbed and fixed, and the stacker 3 starts to move to the process temporary storage port.
  • the transport mechanism 2 extends to the process temporary storage port, at which time the control air pump stops working, the negative pressure in the transport mechanism gas passage 200 and the cassette gas passage is released, the adsorption force of the support suction cup is released, and then the transport mechanism 2 slowly descends and The cassette 1 is placed on the process temporary storage port, and subsequent work such as taking a film is performed.
  • the glass substrate is stably adsorbed by the negative pressure by forming a click gas passage inside the support suction cup, the support column, the vertical column and the bottom frame of the cassette and communicating with the gas passage of the transport mechanism.
  • the supporting column on each layer of the cassette can prevent the glass substrate from being displaced due to external airflow or vibration during the handling process, thereby improving the safety of transporting the glass substrate and avoiding damage of the glass substrate during handling.
  • a support suction cup is disposed on each support column, and the support suction cup can control the opening and closing of the gas passage thereon by sensing whether a glass substrate is placed thereon, thereby fixing the cassette and the card by negative air pressure adsorption.
  • the glass substrate in the crucible is very intelligent and can increase the handling speed of the cassette, thereby increasing the productivity and the yield of the glass substrate.

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

一种卡匣，至少包括设置于侧部的多个竖柱（10）和底部框架（13），由所述多个竖柱（10）向卡匣内部延伸出多个支撑柱（11），每一支撑柱（11）上设置有支撑吸盘（12），每层支撑柱可供玻璃基板（4）放置；在支撑吸盘（12）、支撑柱（11）、竖柱（15）及底部框架（13）内部均设置有卡匣气体通道并连通形成一体，并能形成负压，用于吸附住所述玻璃基板（4）。一种搬运玻璃基板的装置，包括上述卡匣。上述卡匣和搬运玻璃基板的装置可以提高搬运玻璃基板的安全性及搬运速度。

Description

一种卡匣及搬运玻璃基板的装置 本申请要求于 2013 年 7 月 1 日提交中国专利局、 申请号为 201310271289.6、 发明名称为 "一种卡匣及搬运玻璃基板的装置" 的中国专 利申请的优先权， 上述专利的全部内容通过引用结合在本申请中。 技术领域
本发明涉及玻璃基板的面板制程领域，特别涉及一种卡匣及搬运玻璃基 板的装置。 背景技术
在自动仓储系统（ STK )中，堆垛机 ( Crane )负责将储位内的卡匣（ CST ) 在自动仓储系统内部进行搬送。 如图 1所示， 示出了现有技术中搬运卡匣的 示意图。 从中可以看出， 堆垛机通过伸出机械手臂 9到卡匣 7底端， 并支撑 起该卡匣 7后， 再将卡匣 7搬送到其他储位或工位上。 其中， 该卡匣 7的四 周设置有多层向内伸出的分支端 70, 每一层分支 70上设置有止滑块 71。 在 此搬送途中， 卡匣 7内的玻璃基板 8通过卡匣每层分支端 70上的止滑块 71 来支撑， 依靠静摩擦力防止玻璃基板 8的相对移动。 但是， 由于受到环境局 部强气流或者震动量过大的影响， 卡匣 7内的玻璃基板 8极易发生偏移， 产 生震动甚至产生刮伤等情形； 例如图 1中的玻璃基板 8在八、 B、 C等处就 出现了偏移、 刮伤及撞片的情形。
发明内容
本发明所要解决的技术问题在于， 提供一种卡匣及搬运玻璃基板的装 置， 可以安全地搬运玻璃基板， 避免玻璃基板在搬运中出现损伤的情形。
为了解决上述技术问题， 本发明的实施例的一方面提供了一种卡匣， 用 于放置玻璃基板， 包括： 顶部框架、 设置于侧部的多个竖柱以及底部框架， 其中， 由多个竖柱向卡匣内部延伸出多个支撑柱， 每一支撑柱上设置有支撑 吸盘， 由多个支撑柱形成有多层支撑平面， 每层支撑平面均可供玻璃基板放 置； 在支撑吸盘、 支撑柱、 竖柱及底部框架内部均设置有卡 II气体通道并连 通形成一体， 当支撑吸盘上放置有玻璃基板时， 卡匣气体通道内部可形成负 压， 并吸附住玻璃基板。
其中， 在底部框架上设置有与卡匣气体通道连通的通孔。
其中， 卡匣气体通道至少包括设置于支撑吸盘中的第一气体通道。 其中， 支撑吸盘进一步包括：
压力传感器， 设置于支撑吸盘上部与玻璃基板接触的位置上， 用于采集 压力信息；
气阀， 设置于支撑吸盘的第一气体通道上， 用于开启或关闭第一气体通 道；
气阀控制器， 设置于压力传感器和气阀之间， 用于根据压力传感器所采 集的压力信息， 驱动气阀实现开启或关闭。
相应地， 本发明的另一方面提供一种卡匣， 用于放置玻璃基板， 其中， 包括： 顶部框架、 设置于侧部的多个竖柱以及底部框架， 其中， 由多个竖柱 向卡匣内部延伸出多个支撑柱， 每一支撑柱上设置有支撑吸盘， 由多个支撑 柱形成有多层支撑平面， 每层支撑平面均可供玻璃基板放置；
在支撑吸盘、 支撑柱、 竖柱及底部框架内部均设置有卡 II气体通道并连 通形成一体， 当支撑吸盘上放置有玻璃基板时， 卡匣气体通道内部可形成负 压， 并吸附住玻璃基板；
支撑吸盘进一步包括：
压力传感器， 设置于支撑吸盘上部与玻璃基板接触的位置上， 用于采集 压力信息；
气阀， 设置于支撑吸盘中的卡匣气体通道上， 用于开启或关闭第一气体 通道；
气阀控制器， 设置于压力传感器和气阀之间， 用于根据压力传感器所采 集的压力信息， 驱动气阀实现开启或关闭。
其中， 在底部框架上设置有与卡匣气体通道连通的通孔。
相应地， 本发明的另一方面提供一种卡匣， 用于放置玻璃基板， 其中， 包括： 顶部框架、 设置于侧部的多个竖柱以及底部框架， 其中， 由多个竖柱 向卡匣内部延伸出多个支撑柱， 每一支撑柱上设置有支撑吸盘， 由多个支撑 柱形成有多层支撑平面， 每层支撑平面均可供玻璃基板放置；
在支撑吸盘、 支撑柱、 竖柱及底部框架内部均设置有卡 II气体通道并连 通形成一体， 当支撑吸盘上放置有玻璃基板时， 卡匣气体通道内部可形成负 压， 并吸附住玻璃基板；
支撑吸盘进一步包括：
压力传感器， 设置于支撑吸盘上部与玻璃基板接触的位置上， 用于采集 压力信息；
气阀， 设置于支撑吸盘中的卡匣气体通道上， 用于开启或关闭第一气体 通道；
气阀控制器， 设置于压力传感器和气阀之间， 用于根据压力传感器所采 集的压力信息， 驱动气阀实现开启或关闭。
其中， 在底部框架上设置有与卡匣气体通道连通的通孔。
相应地， 本发明实施例的再一方面提供一种搬运玻璃基板的装置， 包括 用于放置玻璃基板的卡匣， 以及搬运卡匣的搬运机构，
卡匣包括： 顶部框架、 设置于侧部的多个竖柱以及底部框架， 其中， 由 多个竖柱向卡匣内部延伸出多个支撑柱， 每一支撑柱上设置有支撑吸盘， 由 多个支撑柱形成有多层支撑平面 , 每层支撑平面均可供玻璃基板放置； 在支撑吸盘、 支撑柱、 竖柱及底部框架内部均设置有卡 II气体通道并连 通形成一体， 卡匣气体通道内部可形成负压， 用于吸附住玻璃基板， 在底部 框架设置有多个通孔；
搬运机构进一步包括：
机构本体， 用于插入卡匣底部， 托起并移动卡匣；
多个吸附气管， 设置于机构本体上， 可与卡匣上的相应位置的通孔相配 合；
在多个吸附气管及机构本体内部形成有搬运机构气体通道。
其中， 搬运机构的吸附气管与卡匣的通孔相配合时， 吸附气管插入通孔 中， 并通过一密封胶圈进行密封， 使卡匣气体通道与搬运机构气体通道相连 通。 其中， 卡匣气体通道至少包括设置于支撑吸盘中的第一气体通道。 其中， 支撑吸盘进一步包括：
压力传感器， 设置于支撑吸盘上部与玻璃基板接触的位置上， 用于采集 压力信息；
气阀， 设置于支撑吸盘的第一气体通道上， 用于开启或关闭第一气体通 道；
气阀控制器， 设置于压力传感器和气阀之间， 用于根据压力传感器所采 集的压力信息， 驱动气阀实现开启或关闭。
其中， 搬运机构与一气泵相连接， 气泵与搬运机构气体通道相连通， 用 于控制搬运机构气体通道以及卡匣气体通道中形成负压。
其中， 搬运机构与气泵均设置于一堆垛机上。
实施本发明实施例， 具有如下有益效果：
根据本发明的实施例， 通过在卡匣的支撑吸盘、 支撑柱、 竖柱及底部框 架内部形成卡匣气体通道， 并与搬运机构气体通道相连通， 通过负压可以将 玻璃基板稳定地吸附在卡匣中每层的支撑柱上， 可以使玻璃基板在搬运过程 中不会由于外部气流或震动等影响出现偏移， 提高了搬运玻璃基板的安全 性， 可以避免玻璃基板在搬运中出现损伤的情形；
另外， 在每一支撑柱上设置有支撑吸盘， 所述支撑吸盘可以通过感知其 上是否放置有玻璃基板， 从而控制其上气体通道的开启与关闭， 从而通过负 气压吸附来固定卡匣及卡匣内的玻璃基板， 操作非常智能， 可以提升卡匣搬 运速度， 从而提高产能与玻璃基板的良率。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案， 下面将对实 施例或现有技术描述中所需要使用的附图作简单地介绍， 显而易见地， 下面 描述中的附图仅仅是本发明的一些实施例， 对于本领域普通技术人员来讲， 在不付出创造性劳动的前提下， 还可以根据这些附图获得其它的附图。
图 1是现有技术中搬运卡匣的示意图；
图 2是根据本发明一种搬运玻璃基板的装置一个实施例的结构示意图； 图 3是图 2中卡匣与搬运机构的另一个视角的示意图； 图 4是图 2中卡匣的正面结构示意图；
图 5是根据本发明一种搬运玻璃基板的装置中吸附玻璃基板的工作原理 示意图；
图 6是图 5中支撑吸盘处的剖面结构示意图。
具体实施方式
下面参考附图对本发明的优选实施例进行描述。
如图 2所示，是本发明一种搬运玻璃基板的装置一个实施例的结构示意 图； 在本实施例中， 该搬运玻璃基板的装置包括：
堆垛机 3 , 其可以在导轨 4上滑动， 其负责将储位内的卡匣 1在自动仓 储系统内部之间进行搬运； 具体地， 其可以沿着导轨移动到指定储位或制程 暂存端口 （EQ port ), 取放储位内的卡匣 1 , 可以将卡匣 1搬运至搬送到其 他储位或制程暂存端口。
搬运机构 2, 用于取放储位内的卡匣 1 , 其设置于堆垛机 3上， 可以在 堆垛机 3上垂直移动， 并能随堆垛机 3水平移动； 具体地， 该搬运机构可以 为一机械手臂， 其可以伸入到储位或制程暂存端口内的卡匣底端， 并緩慢上 升支撑起卡匣， 随着堆垛机 3的移动， 实现对卡匣的搬运。
下面一并结合图 3至图 6所示，对本实施例中的卡匣 1和搬运机构 2进 行详细说明。 在本实施例中， 该卡匣 1为一框架结构， 其包括顶部框架 15、 设置于侧部的多个竖柱 10、 底部框架 13 ; 其中， 由所述多个竖柱 10向卡匣 内部延伸出多个支撑柱 11 , 每一支撑柱 11上设置有至少一支撑吸盘 12, 由 该多个支撑柱 11形成有多层支撑平面， 每层支撑平面均可供玻璃基板 4放 置；在支撑吸盘 12、竖柱 10及底部框架 13内部均设置有气体通道，具体地， 在各支撑吸盘 12中设有第一通道 126 ,在各支撑柱 11中设置有第二通道 110, 在各竖柱 10上设置有第三通道 100,在底部框架 13中设置有第四通道 130, 且该第一通道 120、 第二通道 110、 第三通道 100及第四通道 130连通形成 一体， 下文统一称为卡匣气体通道； 当支撑吸盘 12上放置有玻璃基板 4时， 在卡匣气体通道内部可形成负压，从而吸附将玻璃基板 4吸附在每层的支撑 柱 11上。
在底部框架 13设置有多个通孔 14,且每一通孔 13内侧设置有密封胶圈。 其中， 每一支撑吸盘 12进一步包括：
压力传感器 126,设置于支撑吸盘 12上部与玻璃基板 4相接触的位置上， 用于采集压力信息， 当玻璃基板 4被放置于支撑吸盘 12上时， 该压力传感 器 126就可以采集到相应的信息；
气阀 124,设置支撑吸盘 12的第一气体通道 120上，用于开启或关闭所 述第一气体通道 120;
气阀控制器 122, 设置于压力传感器 126和气阀 124之间， 用于根据压 力传感器 126所采集的压力信息， 驱动气阀 124实现开启或关闭， 具体地， 当压力传感器 126采集到其上有压力信号 （即其上放置有玻璃基板）， 则驱 动气阀 124打开，从而使第一气体通道 120中产生负压，以吸附住玻璃基板。 可以理解的是，在其他的实施例中，该气阀控制器也可以采用机械弹簧替换， 实现类似的切换作用。
其中， 该搬运机构 2进一步包括：
机构本体 20, 用于插入卡匣 1的底部， 托起并移动该卡匣 1 ;
多个吸附气管 22, 设置于机构本体 20上， 其可与卡匣 1的底部框架 13 上所设置的多个通孔 14相配合， 在一个实施例中， 可以设置四个吸附气管， 在卡匣 1的底部框架 13上设置四个通孔 14, 可以理解的是， 该吸附气管 22 的数量和位置可以根据实际的需要进行调整；
在多个吸附气管 22及机构本体 20内部形成有搬运机构气体通道 200。 具体地， 搬运机构 2的吸附气管 22与卡匣 1的通孔 14相配合时， 该吸 附气管 22会插入相应的通孔 14中， 并通过密封胶圈密封， 使卡匣气体通道 与搬运机构气体通道 200相连通，在卡匣 1的重量压力下可以 4艮好的实现密 封作用以防止漏气。
进一步地， 搬运机构 2与一气泵 (未示出 )相连接， 该气泵与搬运机构 气体通道 200相连通，用于控制搬运机构气体通道 200以及卡匣气体通道中 形成负压； 在一个实施例中， 该气泵设置于堆垛机 3上。
下述简要说明一个本发明的工作原理：
假设自动仓储系统现需要将卡匣 1从储位搬运到制程暂存端口， 堆垛机 3按照预设的逻辑路径移动到指定储位， 驱动搬运机构 2伸到储位中卡匣 1 的底端， 搬动机构 2緩慢上升， 其上的吸附气管 22与卡匣 1底部的通孔 11 对接后支撑起卡匣 1 , 此时卡匣 1上压力传感器 126驱动打开气阀 124, 且 驱动气泵抽气工作 ,使搬运机构气体通道 200以及卡匣气体通道中形成负压， 使而使卡匣 1内的玻璃基板 4被吸附固定后， 堆垛机 3开始移动到制程暂存 端口， 搬运机构 2伸到制程暂存端口， 此时控制气泵停止工作， 解除搬运机 构气体通道 200以及卡匣气体通道中的负压， 使得支撑吸盘的吸附力解除， 然后， 搬运机构 2緩慢下降并将卡匣 1置于制程暂存端口上， 后续进行取片 等工作。
实施本发明实施例， 具有如下有益效果：
根据本发明的实施例， 通过在卡匣的支撑吸盘、 支撑柱、 竖柱及底部框 架内部形成卡匣气体通道， 并与搬运机构气体通道相连通， 通过负压可以将 玻璃基板稳定地吸附在卡匣中每层的支撑柱上， 可以使玻璃基板在搬运过程 中不会由于外部气流或震动等影响出现偏移， 提高了搬运玻璃基板的安全 性， 可以避免玻璃基板在搬运中出现损伤的情形；
另外， 在每一支撑柱上设置有支撑吸盘， 所述支撑吸盘可以通过感知其 上是否放置有玻璃基板， 从而控制其上气体通道的开启与关闭， 从而通过负 气压吸附来固定卡匣及卡匣内的玻璃基板， 操作非常智能， 可以提升卡匣搬 运速度， 从而提高产能与玻璃基板的良率。
以上所揭露的仅为本发明较佳实施例而已， 当然不能以此来限定本发明 之权利范围， 因此等同变化， 仍属本发明所涵盖的范围。

Claims

权 利 要 求
1、 一种卡匣， 用于放置玻璃基板， 其中， 包括： 顶部框架、 设置于侧 部的多个竖柱以及底部框架， 其中， 由所述多个竖柱向卡匣内部延伸出多个 支撑柱， 每一支撑柱上设置有支撑吸盘， 由所述多个支撑柱形成有多层支撑 平面， 每层支撑平面均可供玻璃基板放置；
在支撑吸盘、 支撑柱、 竖柱及底部框架内部均设置有卡 II气体通道并连 通形成一体， 当所述支撑吸盘上放置有玻璃基板时， 所述卡匣气体通道内部 可形成负压， 并吸附住所述玻璃基板。
2、 如权利要求 1 所述的卡匣， 其中， 在所述底部框架上设置有与卡匣 气体通道连通的通孑 L。
3、 如权利要求 1 所述的卡匣， 其中， 所述卡匣气体通道至少包括设置 于所述支撑吸盘中的第一气体通道。
4、 如权利要求 3所述的卡匣， 其中， 所述支撑吸盘进一步包括： 压力传感器， 设置于所述支撑吸盘上部与所述玻璃基板接触的位置上， 用于采集压力信息；
气阀， 设置于所述支撑吸盘的第一气体通道上， 用于开启或关闭所述第 一气体通道；
气阀控制器， 设置于所述压力传感器和所述气阀之间， 用于根据所述压 力传感器所采集的压力信息， 驱动气阀实现开启或关闭。
5、 一种卡匣， 用于放置玻璃基板， 其中， 包括： 顶部框架、 设置于侧 部的多个竖柱以及底部框架， 其中， 由所述多个竖柱向卡匣内部延伸出多个 支撑柱， 每一支撑柱上设置有支撑吸盘， 由所述多个支撑柱形成有多层支撑 平面， 每层支撑平面均可供玻璃基板放置；
在支撑吸盘、 支撑柱、 竖柱及底部框架内部均设置有卡 II气体通道并连 通形成一体， 当所述支撑吸盘上放置有玻璃基板时， 所述卡匣气体通道内部 可形成负压， 并吸附住所述玻璃基板；
其中， 所述支撑吸盘进一步包括：
压力传感器， 设置于所述支撑吸盘上部与所述玻璃基板接触的位置上， 用于采集压力信息；
气阀， 设置于所述支撑吸盘中的卡匣气体通道上， 用于开启或关闭所述 第一气体通道；
气阀控制器， 设置于所述压力传感器和所述气阀之间， 用于根据所述压 力传感器所采集的压力信息， 驱动气阀实现开启或关闭。
6、 如权利要求 5所述的卡匣， 其中， 在所述底部框架上设置有与卡匣 气体通道连通的通孑 L。
7、 一种搬运玻璃基板的装置， 包括用于放置玻璃基板的卡匣， 以及搬 运所述卡匣的搬运机构， 其中，
所述卡匣包括： 顶部框架、设置于侧部的多个竖柱以及底部框架，其中， 由所述多个竖柱向卡匣内部延伸出多个支撑柱，每一支撑柱上设置有支撑吸 盘， 由所述多个支撑柱形成有多层支撑平面， 每层支撑平面均可供玻璃基板 放置；
在支撑吸盘、 支撑柱、 竖柱及底部框架内部均设置有卡 II气体通道并连 通形成一体，所述卡匣气体通道内部可形成负压，用于吸附住所述玻璃基板， 在所述底部框架设置有多个通孔；
所述搬运机构进一步包括：
机构本体， 用于插入所述卡匣底部， 托起并移动所述卡匣；
多个吸附气管， 设置于所述机构本体上， 可与所述卡匣上的相应位置的 所述通孔相配合；
在所述多个吸附气管及机构本体内部形成有搬运机构气体通道。
8、 如权利要求 7所述的搬运玻璃基板的装置， 其中， 所述搬运机构的 吸附气管与所述卡匣的通孔相配合时， 所述吸附气管插入所述通孔中， 并通 过一密封胶圈进行密封，使所述卡匣气体通道与所述搬运机构气体通道相连 通。
9、 如权利要求 8所述的搬运玻璃基板的装置， 其中， 所述卡匣气体通 道至少包括设置于所述支撑吸盘中的第一气体通道。
10、 如权利要求 9所述的搬运玻璃基板的装置， 其中， 所述支撑吸盘进 一步包括：
压力传感器， 设置于所述支撑吸盘上部与所述玻璃基板接触的位置上， 用于采集压力信息；
气阀， 设置于所述支撑吸盘的第一气体通道上， 用于开启或关闭所述第 一气体通道；
气阀控制器， 设置于所述压力传感器和所述气阀之间， 用于根据所述压 力传感器所采集的压力信息， 驱动气阀实现开启或关闭。
11、 如权利要求 10所述的搬运玻璃基板的装置， 其中， 所述搬运机构 与一气泵相连接， 所述气泵与搬运机构气体通道相连通， 用于控制所述搬运 机构气体通道以及所述卡 II气体通道中形成负压。
12、 如权利要求 11 所述的搬运玻璃基板的装置， 其中， 所述搬运机构 与所述气泵均设置于一堆垛机上。
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