WO2014203314A1 - Codeur, moteur muni d'un codeur, et servo-système - Google Patents

Codeur, moteur muni d'un codeur, et servo-système Download PDF

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Publication number
WO2014203314A1
WO2014203314A1 PCT/JP2013/066619 JP2013066619W WO2014203314A1 WO 2014203314 A1 WO2014203314 A1 WO 2014203314A1 JP 2013066619 W JP2013066619 W JP 2013066619W WO 2014203314 A1 WO2014203314 A1 WO 2014203314A1
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WO
WIPO (PCT)
Prior art keywords
light
light receiving
slit
encoder
receiving element
Prior art date
Application number
PCT/JP2013/066619
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English (en)
Japanese (ja)
Inventor
高田　裕司
有永　雄司
次郎 村岡
Original Assignee
株式会社安川電機
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社安川電機 filed Critical 株式会社安川電機
Priority to JP2015522390A priority Critical patent/JPWO2014203314A1/ja
Priority to PCT/JP2013/066619 priority patent/WO2014203314A1/fr
Publication of WO2014203314A1 publication Critical patent/WO2014203314A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Definitions

  • the disclosed embodiment relates to an encoder, a motor with an encoder, and a servo system.
  • a light source unit a light receiving array including a plurality of light receiving elements arranged in an array, an optical grating irradiated with light from the light source unit, and a plurality of lights irradiated to the optical grating
  • An encoder includes a lens array configured by collecting a plurality of lenses that focus light directed to each light receiving element of the light receiving element, and a scale that is disposed to be relatively movable with a gap provided therebetween. ing.
  • the light directed to each light receiving element out of the light irradiated to the optical grating is focused by each lens of the lens array.
  • noise is generated when scattered light or stray light incident from an angle different from the focused light is received by the light receiving element. Such noise causes a decrease in the position detection accuracy of the encoder, but was not taken into account in the prior art.
  • An object of the present invention is to provide an encoder, a motor with an encoder, and a servo system that can improve detection accuracy.
  • a slit track having a plurality of first slits arranged along a measurement direction;
  • An optical module capable of moving relative to the slit track in the measurement direction while facing a part of the slit track, The optical module is A light source configured to emit light to opposing portions of the slit track;
  • a light-receiving array having a plurality of light-receiving elements that are arranged along the measurement direction and each receive light subjected to the action of the first slit;
  • a slit array that is disposed between the slit track and the light receiving array and has a plurality of second slits that are arranged along the measurement direction and each transmit light that has been subjected to the action of the first slit.
  • An encoder is provided.
  • a linear motor in which the mover moves with respect to the stator, or a rotary motor in which the rotor rotates with respect to the stator An encoder-equipped motor comprising: the encoder according to any one of claims 1 to 6 that detects at least one of a position and a speed of the mover or the rotor.
  • a linear motor in which a mover moves with respect to a stator, or a rotary motor in which a rotor rotates with respect to a stator, and ,
  • the encoder according to any one of claims 1 to 6, which detects at least one of a position and a speed of the mover or the rotor;
  • a servo system comprising a control device configured to control the linear motor or the rotary motor based on a detection result of the encoder.
  • the servo system S includes a servo motor SM (an example of a motor with an encoder) and a control device CT.
  • the servo motor SM includes a motor M (an example of a rotary motor) and an optical encoder 100.
  • the motor M is an example of a power generation source that does not include the encoder 100.
  • the motor M alone may be referred to as a servo motor, in this embodiment, a configuration including the encoder 100 is referred to as a servo motor SM.
  • a servo motor SM a configuration including the encoder 100
  • the motor with an encoder is a servo motor that is controlled so as to follow a target value such as position and speed
  • the motor with an encoder includes a motor used other than the servo system as long as the encoder is attached, for example, when the output of the encoder is used only for display.
  • the motor M includes a stator m1, a rotor m2 disposed inside the stator m1 and supported rotatably with respect to the stator m1, and a shaft SH coupled to the rotor m2. That is, the motor M is a so-called “inner rotor type” motor in which the rotor m2 is disposed inside the stator m1.
  • the motor M is not limited to an inner rotor type motor.
  • the motor M may be a so-called “outer rotor type” motor in which a rotor is arranged outside the stator, or a so-called “flat rotor type” in which a rotor and a stator are arranged in the direction of the rotation axis. May be used.
  • the motor M is an inner rotor type motor
  • One of the stator m1 and the rotor m2 functions as an armature, and the other functions as a field.
  • the motor M outputs a rotational force by rotating the shaft SH around the rotation axis AX by rotating the rotor m2 relative to the stator m1.
  • the motor M is not particularly limited as long as it is a motor controlled based on data detected by the encoder 100 such as position data described later.
  • the motor M is not limited to an electric motor that uses electricity as a power source.
  • the motor M is a motor using another power source such as a hydraulic motor, an air motor, or a steam motor. There may be. However, for convenience of explanation, a case where the motor M is an electric motor will be described below.
  • the encoder 100 is connected to a shaft SH on the opposite side (also referred to as “anti-load side”) of the motor M on the rotational force output side (also referred to as “load side”).
  • the connection position of the encoder 100 is not particularly limited.
  • the encoder 100 may be connected to the shaft SH on the torque output side of the motor M, or may be connected to the shaft SH or the like via another mechanism such as a speed reducer, a rotation direction changer, or a brake. Good.
  • the encoder 100 detects the position (angle) of the shaft SH, thereby detecting the position of the rotor m2 (also referred to as “rotation angle”), and outputs position data representing the position.
  • the encoder 100 is also referred to as the speed (also referred to as “rotational speed”, “angular speed”, etc.) and acceleration (“rotational acceleration”, “angular acceleration”, etc.) of the rotor m2. .) May be detected.
  • the speed and acceleration of the rotor m2 can be detected, for example, by a process such as differentiating the position by 1st or 2nd order with respect to time or counting the detection signal for a predetermined time.
  • the physical quantity detected by the encoder 100 is a position.
  • the control device CT acquires the position data output from the encoder 100 and controls the driving of the motor M based on the position data. Therefore, in the present embodiment in which an electric motor is used as the motor M, the control device CT controls the driving of the motor M by controlling the current or voltage applied to the motor M based on the position data. Further, the control device CT acquires a higher control signal from the higher control device, and controls the motor M so that a rotational driving force capable of realizing the position or the like represented by the higher control signal is output from the shaft SH. It is also possible. In addition, when the motor M uses other power sources, such as a hydraulic type, an air type, and a steam type, the control apparatus CT controls the drive of the motor M by controlling supply of those power sources. Is possible.
  • the encoder 100 includes a disk-shaped disk 110 that is a detected medium that detects the position of the rotor m2, an optical module 130, and a position data generation unit 190. .
  • the following directions such as up and down are defined as follows. That is, the positive Z-axis direction that is the anti-load side direction in the rotation axis AX is defined as “up”, and the negative Z-axis direction that is the load side direction in the reverse rotation axis AX is defined as “down”.
  • the positional relationship between the components of the encoder 100 is not limited to the concept of up and down.
  • other directions may be used for the directions determined here, or directions other than these may be used while being described as appropriate.
  • the disk 110 is connected to the shaft SH so that the disk center O substantially coincides with the rotation axis AX, and the circumference of the disk 110 is rotated by the rotation of the shaft SH. It rotates in a direction C (in the direction of arrow C in FIG. 3; hereinafter also referred to as “disk circumferential direction C”).
  • the disk circumferential direction C which is the rotation direction of the disk 110, corresponds to an example of the measurement direction.
  • the disk 110 can be made of glass, metal, resin, or the like. In the present embodiment, the disk 110 is described as an example of the detected medium. However, for example, other members such as the end face of the shaft SH can be used as the detected medium.
  • the slit track ST On the upper surface of the disk 110, a ring-shaped slit track ST centered on the disk center O is formed.
  • the slit track ST has a plurality of reflective slits 111 (an example of a first slit) along the radial direction of the disk 110 (in the direction of arrow R in FIG. 3; hereinafter, also referred to as “disk radial direction R”).
  • the slit track ST is configured by arranging a plurality of reflective slits 111 in a track shape at a predetermined pitch P along the disk circumferential direction C.
  • Each reflection slit 111 reflects light emitted from a light source 131 described later.
  • the reflection slit 111 can be formed, for example, by applying a light reflecting material (for example, aluminum or the like) to a portion that reflects light on the upper surface of the disk 110 configured not to reflect light. is there. Further, the reflection slit 111 reduces the reflectivity by making a portion of the upper surface of the disk 110 made of a metal having high reflectivity that does not reflect light rough or by applying a low reflectivity material by sputtering or the like. May be formed.
  • the formation method of the reflective slit 111 is not limited to the above example.
  • the plurality of reflective slits 111 are arranged so as to have an incremental pattern in the disk circumferential direction C.
  • An incremental pattern is a pattern in which the reflective slits 111 are regularly repeated at a predetermined pitch. This incremental pattern represents the position of the rotor m2 for each pitch or within one pitch by the sum of electrical signals from one or more light receiving elements 142 described later.
  • the optical module 130 is formed as a substrate BA.
  • the substrate BA is fixed so as to be substantially parallel to the disk 110 and to face a part of the slit track ST. Accordingly, the optical module 130 moves relative to the slit track ST in the disk circumferential direction C as the disk 110 rotates.
  • the optical module 130 is not necessarily configured in a substrate shape. There is no need.
  • Such an optical module 130 includes a light source 131, a light receiving unit 140, and a translucent member 160.
  • the light source 131 is provided on the lower surface of the substrate BA (on the side facing a part of the slit track ST).
  • the light source 131 is disposed on the lower surface of the substrate BA at a substantially central portion in the X-axis direction and in the negative Y-axis direction.
  • the arrangement position of the light source 131 is not limited to the above position, and may be arranged at a position other than the above.
  • the light source 131 emits light to a part of the slit track ST (hereinafter also referred to as “irradiation region”) that passes through the facing position.
  • the light source 131 is not particularly limited as long as it is a light source that can emit light to the irradiation region.
  • an LED Light Emitting Diode
  • the light source 131 is formed as a point light source in which an optical lens or the like is not particularly disposed, and emits diffused light from the light emitting unit 132.
  • a point light source it is not necessary to be an exact point, and light can be emitted from a finite surface as long as it can be considered that diffuse light is emitted from a substantially point-like position in terms of design and operation principle. Needless to say.
  • the light source 131 emits diffused light to the irradiation area, although there is some influence of a change in the amount of light due to deviation from the optical axis and attenuation due to a difference in optical path length. It is possible to emit light substantially evenly. In addition, since the light is not condensed and diffused by the optical element, an error due to the optical element is hardly generated, and the straightness of the outgoing light to the slit track ST can be improved.
  • the light receiving unit 140 is provided at a position different from the light source 131 on the lower surface of the substrate BA.
  • the light receiving unit 140 is disposed at a position in the positive direction of the Y axis on the lower surface of the substrate BA.
  • the arrangement position of the light receiving unit 140 is not limited to the above position, and may be arranged at a position other than the above.
  • the light receiving unit 140 includes a substrate 141 provided on the lower surface of the substrate BA and a light receiving array PA.
  • the substrate 141 is a chip substrate on which the light receiving array PA is formed. In the present embodiment, the substrate 141 is provided separately from the substrate BA, but may be provided integrally with the substrate BA.
  • the light receiving array PA is provided on the surface of the lower side of the substrate 141 (side facing a part of the slit track ST), and has a plurality of light receiving elements 142 along a direction corresponding to the disk radial direction R.
  • the light receiving array PA is configured by arranging a plurality of light receiving elements 142 in an array at a predetermined pitch along a direction corresponding to the disk circumferential direction C.
  • Each light receiving element 142 emits light from the light source 131 and passes through the opposing position, and is subjected to the action of the reflecting slit 111 of the slit track ST, that is, light reflected by the reflecting slit 111 (hereinafter also referred to as “reflected light”). .) Is received by the light receiving surface 142a. Each light receiving element 142 converts each light signal into an electrical signal corresponding to the amount of light received.
  • the light receiving element 142 is not particularly limited as long as it can receive reflected light by the light receiving surface 142a and convert it into an electrical signal corresponding to the amount of light received, but for example, a photodiode can be used.
  • the encoder 100 is configured as a so-called “reflective” encoder that receives light emitted from the light source 131 and reflected by the reflection slit 111 by the light receiving element 142.
  • the light receiving array PA together with the slit track ST, constitutes a so-called two-grating optical system.
  • a case where a two-grating optical system is used will be described as an example.
  • a two-grating optical system is not necessarily used, and a three-grating optical system may be used.
  • the direction corresponding to the disk circumferential direction C on the substrate 141 is a shape in which the disk circumferential direction C on the disk 110 is projected onto the light receiving array PA.
  • d1 is the optical path distance of the light from the light emission part 132 of the light source 131 to the slit track ST (reflection slit 111).
  • d2 is an optical path distance of light from the slit track ST (reflection slit 111) to the light receiving array PA (light receiving element 142).
  • each including four light receiving elements 142 are arranged in one pitch of the reflective slits 111 arranged so as to have an incremental pattern (one pitch in the image projected on the light receiving array PA, which is the same as the pitch P). It has been.
  • a plurality of sets each including four light receiving elements 142 are arranged at a predetermined pitch ⁇ P along a direction corresponding to the disk circumferential direction C.
  • Each light receiving element 142 generates a periodic signal of one period at one pitch (also referred to as “electrical angle of 360 °”) by the rotation of the disk 110. Accordingly, when four light receiving elements 142 are included in one set corresponding to one pitch, adjacent light receiving elements 142 in one set generate electrical signals having a phase difference of 90 ° from each other.
  • phase signal also referred to as “A + signal”
  • B phase signal signal having a phase difference of 90 ° with respect to the A + signal
  • A-bar phase signal a signal having a phase difference of 180 ° with respect to the A + signal.
  • a ⁇ signal also referred to as “A ⁇ signal”
  • B-bar phase signal a signal having a phase difference of 180 ° with respect to the B + signal.
  • B ⁇ signal also called.
  • the case where four light receiving elements 142 are included in one set corresponding to one pitch of the plurality of reflecting slits 111 arranged so as to have an incremental pattern has been described.
  • the number of light receiving elements 142 in one set is not particularly limited.
  • the translucent member 160 is fixed to the light receiving surfaces 142 a of the plurality of light receiving elements 142 that form the light receiving array PA provided on the lower surface of the substrate 141. Thereby, the light receiving surface 142a of each light receiving element 142 is covered with the light transmitting member 160, respectively.
  • the translucent member 160 is made of a material that has translucency with respect to light emitted from the light source 131 (for example, glass or transparent resin).
  • a slit array SA is formed on the surface of the lower side of the translucent member 160 (the side facing a part of the slit track ST). That is, the slit array SA is disposed between the slit track ST and the light receiving array PA.
  • the slit array SA has a plurality of transmission slits 166 (an example of a second slit) along a direction corresponding to the disk radial direction R.
  • the slit track SA has a light shielding portion 162 in a region other than the transmission slit 166 on the lower surface of the translucent member 160 so that the plurality of transmission slits 166 are arranged in an array along the direction corresponding to the disk circumferential direction C. Is provided.
  • Each transmission slit 166 transmits the reflected light.
  • Each light shielding unit 162 shields (blocks) light.
  • Each of the light shielding portions 162 can be formed by applying a light shielding material (such as chromium oxide) to the lower surface of the light transmitting member 160 configured to transmit light.
  • a light shielding material such as chromium oxide
  • the material and manufacturing method of the translucent member 160 are not particularly limited.
  • each light receiving element 142 receives scattered light or stray light incident from an angle different from the reflected light that should be received, noise is generated. Such noise becomes a factor that reduces the position detection accuracy of the encoder 100.
  • the light source 131 is formed as a point light source that emits diffused light
  • the reflected light is not incident on the light receiving surface 142 of each light receiving element 142 from the vertical direction as in the case of parallel light, but obliquely. It will enter from the direction of.
  • each transmission slit 166 is arranged corresponding to a direction perpendicular to the light receiving surface 142a of each light receiving element 142 (in the disc circumferential direction C between each transmission slit 166 and the light receiving surface 142a of each light receiving element 142).
  • the light receiving element 142 Even if part of the reflected light that has passed through the transmission slit 166 is received by the light receiving element 142 that should be received by the light, the light penetrates through the substrate 141, and an area E (described later) related to the adjacent light receiving element 142. 6), carrier CA (see FIG. 6 described later) may occur.
  • the region E is a region where the generated carrier CA can reach the corresponding light receiving element 142.
  • crosstalk in which an electric signal is generated in the light receiving element 142 occurs. Such crosstalk causes noise.
  • the slit array SA having the plurality of transmission slits 166 that respectively transmit the reflected light is disposed between the slit track ST and the light receiving array PA. Then, as shown in FIG. 6, each transmission slit 166 is incident on the light receiving surface 142a of the light receiving element 142 corresponding to the reflected light (hereinafter also referred to as “reflected light L1”) that each light receiving element 142 should originally receive. As described above, the light receiving element 142 is disposed at a position corresponding to the traveling direction of the reflected light L1. At the same time, the slit array SA is formed by providing a light shielding portion 162 in a region other than the transmission slit 166 on the lower surface of the translucent member 160.
  • each light shielding portion 162 does not block the reflected light L1, but can block scattered light and stray light incident from an angle different from the reflected light L1. And the distance between the adjacent light shielding portion 162 and the adjacent light shielding portion 162 are adjusted.
  • each transmission slit 166 causes the disc circle from a direction perpendicular to the light receiving surface 142a according to the traveling direction of the reflected light L1 so that the reflected light L1 is incident on the light receiving surface 142a of the corresponding light receiving element 142. They are arranged at positions offset in a direction corresponding to the circumferential direction C.
  • each transmission slit 166 is not limited to the above position, and the reflected light is reflected on the light receiving element 142 so that the reflected light L1 is incident on the light receiving surface 142a of the corresponding light receiving element 142. Any position corresponding to the traveling direction of L1 may be used. Furthermore, the arrangement position of each transmission slit 166 is a position corresponding to the traveling direction of the reflected light L1 with respect to the light receiving element 142 so that the reflected light L1 is incident on the light receiving surface 142a of the corresponding light receiving element 142. The position is not limited to this, and any position may be used as long as it is arranged in a direction corresponding to the circumferential direction C of the disk so as to transmit the reflected light L1.
  • the reflected light L1 can be transmitted through the transmission slit 166 and incident on the light receiving surface 142a of the corresponding light receiving element 142. Even if a part of the reflected light L1 received by the light receiving surface 142 of the corresponding light receiving element 142 penetrates the substrate 141, the carrier CA is generated in the region E (or the vicinity thereof) related to the light receiving element 142. It is possible. As a result, the carrier CA is moved to the light receiving element 142, so that the light receiving element 142 can generate an electrical signal.
  • a part of the light that is reflected by the reflected light L1 and incident on the light receiving surface 142a of the corresponding light receiving element 142 and reflected by the light receiving surface 142a may be incident on the light receiving surface 142a again by internal reflection of the translucent member 160. Is possible.
  • the position data generation unit 190 detects four incremental signals (A + signal, A + signal, phase shift from the plurality of light receiving elements 142 of the optical module 130 by 90 ° at the timing of detecting the position of the rotor m2. B + signal, A ⁇ signal, and B ⁇ signal). Then, based on the acquired incremental signal, the position data generation unit 190 calculates the position of the rotor m2 represented by the incremental signal, and outputs position data representing the position to the control device CT. Note that the position data generation method by the position data generation unit 190 is not limited to the case where the position data is generated by calculating the position of the rotor m2 from the incremental signal, and various methods can be used.
  • a slit array SA is disposed between the slit track ST and the light receiving array PA.
  • the slit array SA includes a plurality of transmission slits 166 that are arranged along a direction corresponding to the disk circumferential direction C and each transmit reflected light.
  • Each of the transmission slits 166 allows the reflected light L1 to pass therethrough and blocks scattered light and stray light incident from other different angles. As a result, noise can be reduced and detection accuracy can be improved.
  • each transmission slit 166 is arranged at a position corresponding to the traveling direction of the reflected light L1 with respect to the corresponding light receiving element 142.
  • the light transmitting member 160 is fixed to the light receiving surfaces 142a of the plurality of light receiving elements 142 forming the light receiving array PA.
  • the slit array SA is formed by providing the light shielding portion 162 in a region other than the transmission slit 166 on the lower surface of the light transmitting member 160.
  • each light shielding portion 162 is arranged such that each transmissive slit 166 corresponds to a direction perpendicular to the light receiving surface 142a of each light receiving element 142 (each transmissive slit 166 and The positions in the direction corresponding to the disk circumferential direction C with the light receiving surface 142a of each light receiving element 142 are substantially the same).
  • each transmission slit 166 is disposed at a position corresponding to a direction perpendicular to the light receiving surface 142a of each light receiving element 142.
  • a deflecting member 170 is provided at each of the transmitting slits 166 located below the light receiving surface 142a of each light receiving element 142 in the light transmitting member 160A.
  • Each deflection member 170 is formed by appropriately processing a portion of each transmission slit 166 in the translucent member 160A or a material (for example, glass or transparent resin) having translucency with respect to light emitted from the light source 131. It is comprised by the member (for example, a lens, a prism, etc.) formed by processing using.
  • each deflecting member 170 deflects the reflected light L1 transmitted through the corresponding transmission slit 166, respectively. Specifically, each deflecting member 170 causes the reflected light L1 transmitted through the corresponding transmission slit 166 to be perpendicular to the straight line CL along the traveling direction of the reflected light L1 and the light receiving surface 142a of the corresponding light receiving element 142. Each is deflected in a direction in which the angle ⁇ with the straight line SL decreases. In this example, each deflection member 170 deflects the reflected light L1 transmitted through the corresponding transmission slit 166 in a direction in which the angle ⁇ is approximately 0 °.
  • each deflecting member 170 is configured so that the reflected light L1 transmitted through the corresponding transmission slit 166 is incident on the light receiving surface 142a in a direction substantially perpendicular to the light receiving surface 142a of the corresponding light receiving element 142.
  • Each deflection member 170 is not limited to deflecting the reflected light L1 transmitted through the corresponding transmission slit 166 in a direction in which the angle ⁇ is approximately 0 °, but in a direction in which the angle ⁇ is decreased. Anything to do.
  • each deflecting member 170 is not limited to the one that deflects the reflected light L1 transmitted through the corresponding transmission slit 166 in the direction in which the angle ⁇ decreases, but may simply deflect it.
  • each deflecting member 170 is provided on the translucent member 160A. Therefore, the position corresponding to the direction perpendicular to the light receiving surface 142a of each light receiving element 142 at which each transmission slit 166 is arranged is such that the reflected light L1 is incident on the light receiving surface 142a of the corresponding light receiving element 142. It can be said that the position corresponds to the traveling direction of the reflected light L1 with respect to the light receiving element 142.
  • the reflected light L1 is deflected as described above by the deflecting member 170 when passing through the transmissive slit 166.
  • the reflected light L1 transmitted through the corresponding transmission slit 166 can be incident on the light receiving surface 142a in a direction perpendicular to the light receiving surface 142a of the corresponding light receiving element 142.
  • the carrier CA is generated in the region E (or the vicinity thereof) related to the light receiving element 142. It is possible.
  • the light L3 can be incident on the light receiving surface 142a of the corresponding light receiving element 142 in a direction perpendicular to the light receiving surface 142a of the corresponding light receiving element 142.
  • the behavior in the case where the deflection member 170 is not provided is indicated by an imaginary line.
  • a part of the light incident on the light receiving surface 142a of the corresponding light receiving element 142 and reflected by the light receiving surface 142a is reflected again on the light receiving surface 142a by the internal reflection of the light transmitting member 160A or the deflecting member 170. It is possible to make it incident.
  • the translucent member 160 ⁇ / b> A includes a deflecting member 170 configured to deflect the reflected light L ⁇ b> 1 transmitted through the corresponding transmitting slit 166.
  • the deflecting member 170 is configured to deflect the reflected light L1 transmitted through the corresponding transmission slit 166 in a direction in which the angle ⁇ decreases.
  • the encoder 100 can have high resolution.
  • each deflection member 170A condenses the reflected light L1 transmitted through the corresponding transmission slit 166 in the substantially central direction of the light receiving surface 142a of the corresponding light receiving element 142. That is, each deflecting member 170A enters the reflected light L1 transmitted through the corresponding transmission slit 166 into the light receiving surface 142a in a direction toward the substantially central side of the light receiving surface 142a of the corresponding light receiving element 142. , Each is condensed.
  • Each deflecting member 170A is not limited to condensing the reflected light L1 transmitted through the corresponding transmission slit 166 in a substantially central direction of the light receiving surface 142a of the corresponding light receiving element 142, but simply deflects. It may be a thing.
  • the reflected light L1 is deflected as described above by the deflecting member 170A when passing through the transmissive slit 166.
  • the reflected light L1 transmitted through the corresponding transmission slit 166 can be incident on the light receiving surface 142a in a direction toward the substantially central side of the light receiving surface 142a of the corresponding light receiving element 142.
  • the carrier CA is generated in the region E (or the vicinity thereof) related to the light receiving element 142. It is possible.
  • the light blocking portion 162 In addition, if there is no light blocking portion 162, scattered light and stray light incident on the light receiving surface 142a of the light receiving element 142 from other different angles are blocked by the light blocking portion 162 and not incident on the light receiving surface 142a of the light receiving element 142. It is possible. At the same time, if there is no light blocking portion 162, it is possible to block the light that can cause the above-described crosstalk by the light blocking portion 162 so that it does not enter the light receiving surface 142a of the light receiving element 142. Further, if the deflecting member 170A is not provided, the light L4 that can cause the above-described crosstalk is deflected by the deflecting member 170 as described above.
  • the light L4 can be incident on the light receiving surface 142a of the corresponding light receiving element 142 in the direction toward the substantially central side of the light receiving surface 142a of the corresponding light receiving element 142.
  • FIG. 8 for convenience of explanation, the behavior in the case where there is no deflection member 170 ⁇ / b> A is shown by imaginary lines.
  • a part of the light incident on the light receiving surface 142a of the corresponding light receiving element 142 and reflected by the reflected light L1 is again reflected on the light receiving surface 142a by the internal reflection of the light transmitting member 160A or the deflecting member 170A. It is possible to make it incident.
  • the deflecting member 170A is configured to collect the reflected light L1 transmitted through the corresponding transmission slit 166 in a substantially central direction of the light receiving surface 142a of the corresponding light receiving element 142. As a result, when the reflected light L1 passes through each transmission slit 166, the deflecting member 170A can concentrate the light in the substantially central direction of the light receiving surface 142a of the corresponding light receiving element 142 and enter the light receiving surface 142a. Crosstalk can be reliably reduced.
  • the translucent member 160B includes a bubble wall 180 as an example of a scattering portion formed so as to surround each deflection member 170A (excluding the incident surface of the reflected light L1).
  • the bubble wall 180 can scatter the reflected light L1 propagating through the deflection member 170A into the deflection member 170A.
  • the scattering portion is not limited to the bubble wall 180 as long as it is a portion that can scatter the reflected light L1 propagating through the deflection member 170A into the deflection member 170A.
  • a crack, a muddy part, etc. may be sufficient.
  • the plurality of bubbles constituting the bubble wall 180 can be formed by processing the peripheral portion of each deflecting member 170A in the translucent member 160B using an appropriate processing method (for example, three-dimensional processing by laser irradiation). It is. Note that the deflection member 170 described above may be provided instead of the deflection member 170A.
  • a transmissive member 160B in which a bubble wall 180 is formed so as to surround the periphery of the deflecting member 170A is formed. Accordingly, when the reflected light L1 is transmitted through the transmission slit 166 and condensed by the deflecting member 170A as described above and transmitted through the corresponding transmission slit 166, the reflected light L1 is deflected by the bubble wall 180. Scattering to the outside of the deflecting member 170A due to refraction or diffusion by the member 170A can be prevented. As shown in FIG.
  • the translucent member 160B has a bubble wall 180 formed so as to surround the deflection member 170A.
  • the bubble wall 180 can prevent the reflected light L1 from being scattered outside the deflecting member 170A due to refraction or diffusion when the reflected light L1 transmitted through the corresponding transmitting slit 166 is collected by the deflecting member 170A. .
  • the reflected light L1 can be collected more and made incident on the corresponding light receiving element 142, so that the effect of reducing crosstalk can be further enhanced.
  • the slit track ST having the plurality of reflective slits 111 arranged so as to have the incremental pattern is formed on the disk 110, but the embodiment of the present disclosure is not limited to this example.
  • a slit track having a plurality of reflective slits arranged so as to have a serial absolute pattern may be formed on the disk 110 instead of or in addition to the slit track ST.
  • the absolute position of the rotor m2 is provided by providing a light receiving array in which a plurality of light receiving elements for receiving the light emitted from the light source 131 and reflected by the reflection slit are arranged on the substrate BA side of the optical module 130. It is possible to detect (absolute angle).
  • a slit array having a plurality of transmission slits that transmit the light reflected by the reflection slit may be provided between the slit track corresponding to the serial absolute pattern and the light receiving array.
  • the slit track may be, for example, an absolute pattern other than the serial absolute pattern, a PWM modulated pattern, a reflective slit corresponding to a pattern representing the origin position, or the like.
  • the encoder 100 which is a reflective encoder in which both the light source 131 and the light receiving array PA are arranged on the substrate BA side of the optical module 130. It is not limited to examples.
  • a so-called “transmission type” encoder in which a light source 131 and a light receiving array are disposed to face each other with a disk interposed therebetween may be used.
  • a slit track having a plurality of transmission slits (an example of a first slit) that transmits light emitted from the light source 131 may be formed on the disk.
  • each light receiving element forming the light receiving array can receive the light emitted from the light source 131 and transmitted through the transmission slit of the slit track passing through the facing position.
  • a slit array having a plurality of transmission slits (an example of second slits) that respectively transmit the light transmitted through the transmission slits may be provided between the slit track and the light receiving array.
  • the servo system includes the motor M that is a rotary motor, the encoder 100 that detects the position of the rotor m2 of the motor M, and the controller CT that controls the motor M based on the position data from the encoder 100.
  • the case of applying to S has been described as an example.
  • the embodiment of the present disclosure is not limited to this example.
  • a linear motor that moves the mover relative to the stator, an encoder that detects at least one of the position and speed of the mover of the linear motor, and a control that controls the linear motor based on the detection result of the encoder You may apply to a servo system provided with an apparatus.

Abstract

Le problème décrit par la présente invention est de proposer un codeur, un moteur équipé d'un codeur, et un servo-système pouvant améliorer la précision de détection. La solution de l'invention porte sur un codeur (100) qui dispose d'une piste (ST) de fentes ayant une pluralité de fentes réfléchissantes (111) disposées le long de la direction circonférentielle (C) d'un disque et disposant d'un module optique (130) pouvant se déplacer par rapport à la piste (ST) de fentes dans la direction circonférentielle (C) du disque en s'opposant à une partie de la piste (ST) de fentes. Le module optique (130) comprend une source de lumière (131) destinée à exposer à la lumière la partie opposée de la piste (ST) de fentes, un ensemble (PA) de réception de lumière comprenant une pluralité d'éléments (142) de réception de lumière qui sont agencés le long de la direction circonférentielle (C) du disque et qui reçoivent la lumière réfléchie par chacune des fentes réfléchissantes (111), et un ensemble (SA) de fentes comprenant une pluralité de fentes de transmission (166) qui sont disposées entre la piste (ST) de fentes et l'ensemble (PA) de réception de lumière, et qui sont agencées le long de la direction circonférentielle (C) du disque, et transmettent la lumière réfléchie (L1) par chacune des fentes réfléchissantes (111).
PCT/JP2013/066619 2013-06-17 2013-06-17 Codeur, moteur muni d'un codeur, et servo-système WO2014203314A1 (fr)

Priority Applications (2)

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JP2015522390A JPWO2014203314A1 (ja) 2013-06-17 2013-06-17 エンコーダ、エンコーダ付きモータ、及びサーボシステム
PCT/JP2013/066619 WO2014203314A1 (fr) 2013-06-17 2013-06-17 Codeur, moteur muni d'un codeur, et servo-système

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PCT/JP2013/066619 WO2014203314A1 (fr) 2013-06-17 2013-06-17 Codeur, moteur muni d'un codeur, et servo-système

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016142536A (ja) * 2015-01-29 2016-08-08 ファナック株式会社 クロストークを防止する光学式エンコーダ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60222719A (ja) * 1984-04-20 1985-11-07 Yokogawa Hokushin Electric Corp 変位変換器
JP2004028667A (ja) * 2002-06-24 2004-01-29 Mitsutoyo Corp 光電式エンコーダおよびスケールの製造方法
JP2007183115A (ja) * 2006-01-04 2007-07-19 Fuji Electric Holdings Co Ltd 光学式エンコーダ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60222719A (ja) * 1984-04-20 1985-11-07 Yokogawa Hokushin Electric Corp 変位変換器
JP2004028667A (ja) * 2002-06-24 2004-01-29 Mitsutoyo Corp 光電式エンコーダおよびスケールの製造方法
JP2007183115A (ja) * 2006-01-04 2007-07-19 Fuji Electric Holdings Co Ltd 光学式エンコーダ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016142536A (ja) * 2015-01-29 2016-08-08 ファナック株式会社 クロストークを防止する光学式エンコーダ
US9874463B2 (en) 2015-01-29 2018-01-23 Fanuc Corporation Optical encoder for preventing crosstalk

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