WO2014196360A1 - Capteur piézoélectrique et dispositif électronique - Google Patents

Capteur piézoélectrique et dispositif électronique Download PDF

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Publication number
WO2014196360A1
WO2014196360A1 PCT/JP2014/063468 JP2014063468W WO2014196360A1 WO 2014196360 A1 WO2014196360 A1 WO 2014196360A1 JP 2014063468 W JP2014063468 W JP 2014063468W WO 2014196360 A1 WO2014196360 A1 WO 2014196360A1
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WIPO (PCT)
Prior art keywords
electrode
piezoelectric
unit
piezoelectric layer
piezoelectric sensor
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PCT/JP2014/063468
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English (en)
Japanese (ja)
Inventor
裕次 渡津
喜子 末▲富▼
栄二 角谷
啓佑 尾▲崎▼
柴田　淳一
勝己 ▲徳▼野
奥村　秀三
面　了明
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日本写真印刷株式会社
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Publication of WO2014196360A1 publication Critical patent/WO2014196360A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays

Definitions

  • the present invention relates to a piezoelectric sensor that generates a piezoelectric signal corresponding to a load, and more particularly to a piezoelectric sensor that can detect a position where a load is applied.
  • Patent Document 1 discloses a transparent piezoelectric sensor including a transparent pressure-sensitive layer and a pair of transparent conductive layers.
  • the transparent piezoelectric sensor of Patent Document 1 can detect a given load, but cannot detect the position in the transparent piezoelectric sensor.
  • the present invention is configured as follows.
  • the piezoelectric sensor includes a piezoelectric layer, a first electrode and a second electrode portion stacked on the first main surface of the piezoelectric layer, and a second main surface opposite to the first main surface of the piezoelectric layer. And a reference electrode.
  • the first electrode unit is composed of a plurality of first unit electrodes arranged at intervals. The first unit electrode extends from the first side to the second side opposite to the first side, and decreases in size in the width direction as it approaches the second side.
  • the second electrode portion is composed of a plurality of second unit electrodes arranged at intervals. The second unit electrode extends in the same direction as the first electrode, and decreases in size in the width direction as it approaches the first side.
  • the second unit electrode is arranged so as to mesh with the first unit electrode in plan view.
  • the proportion of the first unit electrode increases, and conversely, the proportion of the second unit electrode increases as it approaches the second side. Therefore, when the load is applied to the piezoelectric sensor and the charge is generated, the load amount is detected at the position where the load is applied by calculating the ratio between the unit electrode position where the charge is detected and the charge amount. Is possible.
  • the pitch length of the first unit electrode and the second unit electrode is designed to be shorter than the length of the short diameter of the contact surface formed between the input unit and the piezoelectric sensor when the input unit contacts the piezoelectric sensor. It may be.
  • the input means comes into contact with the piezoelectric sensor, the input means comes into contact with at least the first unit electrode and the second unit electrode.
  • the number of places where the input means can be detected increases, so that more accurate position detection is possible.
  • the pitch length of the first unit electrode and the pitch length of the second unit electrode may be 1 mm to 16 mm.
  • the piezoelectric layer may be composed of an active piezoelectric portion and an inactive piezoelectric portion, and a first electrode and a second electrode may be laminated on the active piezoelectric portion.
  • the first electrode may be provided on the first main surface side of the piezoelectric sensor, and the second electrode may be provided on the second main surface side of the piezoelectric sensor.
  • the crosstalk phenomenon that occurs between the first electrode and the second electrode is reduced. As a result, the accuracy of position detection and load detection is improved.
  • the upper electrode may contain indium tin oxide or polyethyldioxothiophene.
  • a piezoelectric sensor can be disposed on a display device such as a liquid crystal or an organic EL.
  • the lower electrode may contain indium tin oxide or polyethyldioxothiophene.
  • the piezoelectric sensor can be disposed on a display device such as a liquid crystal or an organic EL.
  • the piezoelectric layer may be composed of an organic piezoelectric material.
  • the piezoelectric sensor can be arranged on an R curved surface.
  • the organic piezoelectric material may contain polyvinylidene fluoride or polylactic acid.
  • the piezoelectric sensor can be disposed on a display device such as a liquid crystal or an organic EL.
  • the piezoelectric layer may be made of an inorganic material.
  • the pressure detection device may include a piezoelectric sensor and a touch panel.
  • the load position can be detected even when the load is hardly applied to the piezoelectric sensor.
  • the capacitive touch panel may be a capacitive touch panel. If it does so, the transparency of the whole pressure detection apparatus will improve.
  • position detection can be performed within the piezoelectric sensor.
  • FIG. 2 is a cross-sectional view taken along line A-A ′ of FIG. 1. It is the flowchart which showed the process which detects a position and a load. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. FIG. 6 is a B-B ′ sectional view of FIG. 5. It is a top view of a piezoelectric sensor. It is sectional drawing of a piezoelectric sensor. It is sectional drawing of the pressure detection apparatus which combined the piezoelectric sensor and the electrostatic touch panel. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor.
  • FIG. 1 is a schematic view of a pressure detection device.
  • FIG. 2 is a sectional view of the piezoelectric sensor.
  • FIG. 3 is a diagram showing a contact portion between the piezoelectric sensor and the finger when the piezoelectric sensor comes into contact with the finger.
  • the pressure detection device has a function of detecting the amount and position of a given load.
  • the pressure detection device 1 includes a piezoelectric sensor 10, a detection unit 20, and a control unit 30.
  • the piezoelectric sensor 10 is a device that generates an electric charge according to a given load.
  • the detection unit 20 includes a first detection unit 21 and a second detection unit 22, and the control unit 30 includes a first control unit 31 and a second control unit 32.
  • the first detection unit 21 and the second detection unit 22 are devices that detect charges generated by the piezoelectric sensor 10.
  • the first control unit 31 is a device that controls the switch S installed in the piezoelectric sensor 10 and the first detection unit 21, and the second control unit 32 is a switch installed in the piezoelectric sensor 10 and the second detection unit 22. It is a device for controlling S ′.
  • the structure of the pressure detection apparatus 1 is demonstrated in detail.
  • the piezoelectric sensor 10 includes a first electrode 11, a second electrode 12, a piezoelectric layer 13, a reference electrode 14, a substrate 15, and an adhesive 16. Composed.
  • the first electrode 11 includes first unit electrodes 11a, 11b,... 11e.
  • the second electrode 12 includes second unit electrodes 12a, 12b,.
  • the reference electrode 14 is a pattern that covers the first electrode 11 and the second electrode 12, and fixes the potential to the reference potential (GND) when detecting the charge.
  • the first unit electrodes 11a, 11b,... 11e are composed of isosceles triangles having a first side of the piezoelectric layer 13 as a base and a second side opposite to the first side as a vertex. .
  • the first unit electrodes 11a, 11b,... 11e each have a base length of L, and are arranged with an interval D in the Y-axis direction.
  • the second unit electrodes 12a, 12b,... 12e are composed of isosceles triangles having the second side as the base, the first side as the apex, and the base length being l in the piezoelectric layer 13. Yes.
  • the second unit electrodes 12a, 12b,... 12e are arranged in the Y-axis direction with an interval d so as to mesh with the first unit electrodes 11a, 11b,.
  • the length L of the bottom of the first unit electrode and the total length of the distance D are the same as the piezoelectric sensor 10 and the input means when the input means such as a finger contacts the piezoelectric sensor 10. Is preferably set to be shorter than the length of the minor axis of the contact surface formed therebetween.
  • the length l of the bottom of the second unit electrode and the total length of the distance d are also measured when the input means such as a finger and the piezoelectric sensor 10 come into contact with each other. It is preferable that the length of the short diameter of the contact surface formed between the input means and the input means is set to be shorter.
  • the number of contacts between the input means and the second unit electrodes 12a, 12b When configured as described above, the number of contacts between the input means and the second unit electrodes 12a, 12b,. As a result, the detection function of the piezoelectric sensor 10 is improved.
  • the input means refers to, for example, a finger or a stylus pen.
  • the pitch length of the first electrode 11 and the pitch length of the second electrode 12 are 1 mm to 16 mm. 0.5 mm to 4 mm.
  • Electrode The 1st electrode 11, the 2nd electrode 12, and the reference electrode 14 can be comprised with the material which has electroconductivity.
  • the conductive material include transparent conductive oxides such as indium-tin oxide (ITO), tin-zinc oxide (Tin), polyethylene dioxythiophene A conductive polymer such as (Polyethylenedioxythiophene, PEDOT) can be used.
  • the electrode can be formed by using vapor deposition or screen printing.
  • a conductive metal such as copper or silver may be used as the conductive material.
  • the electrode may be formed by vapor deposition, or may be formed using a metal paste such as a copper paste or a silver paste.
  • a conductive material in which conductive materials such as carbon nanotubes, metal particles, and metal nanofibers are dispersed may be used as the conductive material.
  • a conductive material in which conductive materials such as carbon nanotubes, metal particles, and metal nanofibers are dispersed may be used as the conductive material.
  • Piezoelectric layer Examples of the material constituting the piezoelectric layer 13 include inorganic piezoelectric materials and organic piezoelectric materials.
  • inorganic piezoelectric materials include barium titanate, lead titanate, lead zirconate titanate, potassium niobate, lithium niobate, and lithium tantalate.
  • Examples of the organic piezoelectric material include a fluoride polymer or a copolymer thereof, and a polymer material having chirality.
  • Examples of the fluoride polymer or a copolymer thereof include polyvinylidene fluoride, vinylidene fluoride-tetrafluoroethylene copolymer, and vinylidene fluoride-trifluoroethylene copolymer.
  • Examples of the polymer material having chirality include L-type polylactic acid and R-type polylactic acid.
  • the piezoelectric layer is made of a transparent material so that the display of the display device can be seen, or It is preferable that the thickness be thin enough to transmit light sufficiently.
  • Substrate The substrate 15 is a protective member that protects the piezoelectric sensor 10. From the viewpoint of protecting the piezoelectric sensor 10, the substrate 15 is preferably composed of a member having a hardness of 2H or higher. As a material constituting the substrate 15, an inorganic material, an organic material, or an inorganic-organic hybrid material can be used.
  • the inorganic material a glass plate or the like can be used.
  • resin materials such as polycarbonate, acrylic, and polyethylene terephthalate can be used.
  • the inorganic-organic hybrid material a resin material in which a fiber material such as glass fiber is kneaded can be used.
  • a hard coat material may be laminated on the substrate 10.
  • the first electrode 11 (first unit electrodes 11a to 11e) is connected to the first detection unit 21.
  • the second electrode 12 (second unit electrodes 12a to 12e) is connected to the second detection unit 22.
  • the reference electrode 14 is connected to ground.
  • the first detection unit 21 can detect the electric charge generated between the first electrode 11 and the reference electrode 40 when the piezoelectric layer 13 is pressed.
  • the charge generated between the second electrode 12 and the reference electrode 40 can be detected by the second detector 22.
  • the 1st detection part 21 and the 2nd detection part 22 can use the detection apparatus provided with amplifier and AD converter.
  • the first control unit 31 is connected to the switch S that connects the first electrode 11 and the first detection unit 21.
  • the second control unit 32 is connected to a switch S ′ that connects the second electrode 11 and the second detection unit 22.
  • the 1st control part 31 and the 2nd control part 32 are provided with the function which can output the switching signal of ON-OFF about switch S and switch S ', respectively.
  • the 1st control part 31 and the 2nd control part 32 can be included in the drive system of pressure detector 1, for example.
  • the drive system may be a microcomputer including a CPU (Central Processing Unit), a storage unit, and an interface for driving a piezoelectric sensor.
  • the drive system may be integrated into one IC by a custom IC or the like.
  • control unit may be realized by causing a CPU or a custom IC to execute a program stored in a storage unit such as the microcomputer or the custom IC.
  • the charge generated in the piezoelectric layer 13 disposed under the first electrode 11 can be detected by the first detection unit 20 and is disposed under the second electrode 12.
  • the charge generated in the piezoelectric layer 13 can be detected by the second detection unit 21. Then, it is possible to detect the position and amount of the load from the detected charge. A method for detecting the position and amount of the load will be described below.
  • the detection of the position and amount where the load is applied is achieved through the steps 1 to 5.
  • STEP1 ⁇ Applying load to the piezoelectric sensor> As shown in FIGS. 3 and 4, in STEP 1, a load is applied to the region A of the piezoelectric sensor 10 by the finger. Then, an electric charge is generated on the unit electrode arranged in the region A, that is, on the piezoelectric layer 13 arranged below the first unit electrode 11b, the second unit electrode 12b, and the second unit electrode 12c.
  • STEP2 ⁇ Charge detection in the first detection unit>
  • the charge generated on the first unit electrode 11 b is detected by the first detection unit 21.
  • the first detection unit 21 stores the information on the detected charge and the charge amount.
  • the charge Q1 passes through the first unit electrode 11b, and the charge amount q1 of the charge Q1 is stored in the first detection unit 21.
  • STEP3 ⁇ Charge detection in the second detection unit>
  • the charges Q2 and Q3 generated on the second unit electrode 12b and the second unit electrode 12c are detected by the second detector.
  • the route information of the charge Q2 and the charge Q3 and the charge amounts q2 and q3 are stored in the second detection unit.
  • the charge Q2 is stored through the second unit electrode 12b and the charge amount q2.
  • the fact that it has passed through the second unit electrode 12c and the charge amount q3 are stored.
  • STEP4 ⁇ Specification of Y direction>
  • the component in the Y-axis direction at the position where the load is applied is specified.
  • the route information stored in STEP2 and STEP3 is used.
  • the charge Q1 passes through the first unit electrode 11b, and that the charge Q2 and the charge Q3 pass through the second unit electrode 12b and the second unit electrode 12c, respectively. From these pieces of information, it is specified that the component in the Y-axis direction at the position where the load is applied extends from the second unit electrode 12b to the region of the second unit electrode 12c.
  • STEP5 ⁇ Specification of X direction>
  • the ratio between the charge amount q1 detected in STEP2 and the charge amounts q2 and q3 detected in STEP3 is calculated.
  • the contact between the finger and the first unit electrode increases.
  • the contact between the finger and the second unit electrode becomes larger as going to the second side. That is, the closer the contact between the piezoelectric sensor and the finger is to the first side (left side), the more charge is detected from the first unit electrode, and the contact between the piezoelectric sensor and the finger is on the second side.
  • the amount of charge detected from the second unit electrode increases as the value is (right side).
  • the position in the X direction can be specified by comparing the charge amounts detected by the first detector 21 and the second detector 22.
  • the charge amount q1 detected in STEP2 is compared with the charge amounts q2 and q3 detected in STEP3 to identify the component in the X-axis direction at the position where the load is applied.
  • STEP6 ⁇ Identification of load position>
  • the position information in the X direction and Y direction specified in STEP 4 and STEP 5 is combined. As a result, the position where the load is applied can be specified.
  • STEP7 ⁇ Specification of load amount>
  • the sum of the charge amount q1 stored in STEP 2 and the charge amounts q2 and q3 stored in STEP 3 is obtained.
  • the load amount given to the piezoelectric sensor 10 can be specified.
  • the amount of load applied to the piezoelectric sensor 10 can be specified by obtaining the total value of the charge amount q1 and the charge amount q2 and the charge amount q3.
  • the configuration as described above makes it possible to detect a given load and load amount. It should be noted that the same process can be used when a plurality of places are loaded. That is, the pressure detection device 1 can perform multi-force detection.
  • the first unit electrodes 11a to 11e and the first detection unit 21 are connected via the switch S.
  • the first unit electrodes 11a to 11e may be short-circuited to connect the first unit electrodes 11a to 11e and the first detection unit 21.
  • the switch S and the first control unit 31 are not necessary, and thus the overall configuration of the pressure detection device 1 can be simplified.
  • the second unit electrodes 12a to 12e may be short-circuited to connect the second unit electrodes 12a to 12e and the second detection unit 22.
  • the switch S ′ and the second control unit 32 are unnecessary, so that the overall configuration of the pressure detection device 1 can be further simplified.
  • the first electrode and the second electrode are arranged on one side of the piezoelectric layer.
  • the first electrode may be disposed on one surface side of the piezoelectric layer, and the second electrode may be disposed on the other surface side.
  • FIG. 5 is a plan view of the piezoelectric sensor according to the second embodiment. 6 is a cross-sectional view taken along the line B-B 'of FIG.
  • the piezoelectric sensor 10 includes a first electrode 11, a second electrode 12, piezoelectric layers 13 a and 13 b, and a reference electrode 14.
  • the first electrode 11 includes a plurality of first unit electrodes 11a to 11e
  • the second electrode 12 includes a plurality of second unit electrodes 12a to 12e.
  • the second electrode 12 is arranged on a surface different from the surface on which the first electrode 11 is laminated, and the first piezoelectric layer 13a in which the piezoelectric layer is in contact with the first electrode 11;
  • the second piezoelectric layer 13b is in contact with the second electrode 12, and the reference electrode 14 is disposed between the first piezoelectric layer 13a and the second piezoelectric layer 13b.
  • the 1st electrode 11 and the 2nd electrode 12 may be arrange
  • FIG. 7 is a plan view of a piezoelectric sensor according to a third embodiment.
  • the first unit electrodes 11a to 11e and the second unit electrodes 12a to 12e are isosceles triangles.
  • the pattern of the first unit electrodes 11a to 11e extends from the first side of the piezoelectric layer 13 to the second side on the opposite side, and becomes smaller as the size in the width direction approaches the second side.
  • the pattern of the two unit electrodes 12a to 12e extends in the same direction as the first unit electrodes 11a to 11e and is formed so that the size in the width direction becomes smaller as it approaches the first side, It is not limited to equilateral triangles. For example, as shown in FIG.
  • the first unit electrodes 11a to 11e may be right triangles having a base on the first side and a vertex on the second side.
  • the second unit electrodes 12a to 12e may also be right triangles having a base on the second side and a vertex on the first side.
  • the first unit electrodes 11a to 11e may be trapezoids having a base on the first side and an upper side on the second side.
  • the second unit electrodes 12a to 12e may also be trapezoids having a bottom side on the second side and an upper side on the first side.
  • two or more adjacent ones of the first unit electrodes 11a to 11e may be coupled on the first side.
  • two or more adjacent ones may be coupled on the second side.
  • the piezoelectric layer 13 may include an active piezoelectric portion 130 and an inactive piezoelectric portion 131.
  • FIG. 8 is a cross-sectional view of the piezoelectric sensor according to the fourth embodiment.
  • the piezoelectric layer 13 may be composed of an active piezoelectric portion 130 and an inactive piezoelectric portion 131.
  • the active piezoelectric portion 130 is a portion where electric charges are generated when a load is applied to the piezoelectric sensor 10.
  • the inactive piezoelectric portion 131 is a portion where no charge is generated even when a load is applied.
  • the piezoelectric layer 13 includes the active piezoelectric portion 130 and the inactive piezoelectric portion 131, and the first electrode 11 and the second electrode 12 are provided only on the active piezoelectric portion 130. It differs from the piezoelectric sensor of the first embodiment in that it is laminated.
  • the first electrode 11 and the second electrode 12 are directly laminated on the active piezoelectric portion 130. However, the active piezoelectric portion 130 and the upper electrode 2 or the active piezoelectric portion 130 and the lower electrode are illustrated. Between 3, an insulating material such as an adhesive or a film may be laminated.
  • the position of the applied load can be detected using the touch panel 50 even when the applied load is so small that it cannot be detected by the piezoelectric sensor 10 (in the case of feather touch). .
  • Pressure detection device 10 Piezoelectric sensor 11: First electrode 11a-11e: First unit electrode 12: Second electrode 12a-12e: Second unit electrode 13: Piezoelectric layer 14: Reference electrode 15: Substrate 16: Adhesive 20: detection unit 21: first detection unit 22: second detection unit 30: control unit 31: first control unit 32: second control unit 40: reference electrode 50: touch panel 130: active piezoelectric unit 131: inactive piezoelectric unit S: Switch S ′: Switch Q1, Q2, Q3: Charge q1, q2, q3: Charge amount

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

La présente invention vise à proposer un capteur piézoélectrique dans lequel une détection de position et une détection de charge peuvent être réalisées dans le capteur. À cet effet, la présente invention porte sur un capteur (10) piézoélectrique qui comporte une couche (13) piézoélectrique, une première électrode (11) stratifiée sur une première surface principale de la couche (13) piézoélectrique, une deuxième électrode (12) stratifiée sur la première surface principale de la couche (13) piézoélectrique ayant la première électrode (11), une électrode (14) de référence stratifiée sur une seconde surface principale de la couche (13) piézoélectrique qui est sur le côté opposé depuis la première surface principale, et le capteur piézoélectrique selon la présente invention est de telle sorte que la première électrode comporte une pluralité de premières électrodes unitaires qui s'étendent depuis un premier côté de la couche (13) piézoélectrique vers un second côté opposé au premier côté et ont des largeurs qui deviennent plus petites à mesure que les premières électrodes unitaires s'approchent du second côté, la seconde électrode comporte une pluralité de secondes électrodes unitaires qui s'étendent dans la même direction que les premières électrodes unitaires et ont des largeurs qui deviennent plus petites à mesure que les secondes électrodes unitaires s'approchent du premier côté, et les premières électrodes unitaires et les secondes électrodes unitaires sont configurées de manière à venir en prise dans une vue dans le plan.
PCT/JP2014/063468 2013-06-04 2014-05-21 Capteur piézoélectrique et dispositif électronique WO2014196360A1 (fr)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016117434A1 (fr) * 2015-01-20 2016-07-28 株式会社村田製作所 Module de capteur, dispositif de détection de pression
WO2018225407A1 (fr) * 2017-06-05 2018-12-13 株式会社村田製作所 Capteur de détection de position pressée et appareil électronique
US10254894B2 (en) 2015-12-23 2019-04-09 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
US10282046B2 (en) 2015-12-23 2019-05-07 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
US10310659B2 (en) 2014-12-23 2019-06-04 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
US10318038B2 (en) 2014-12-23 2019-06-11 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
US10496210B2 (en) 2012-04-07 2019-12-03 Cambridge Touch Technologies Ltd. Pressure sensing display device
US10817116B2 (en) 2017-08-08 2020-10-27 Cambridge Touch Technologies Ltd. Device for processing signals from a pressure-sensing touch panel
US11093088B2 (en) 2017-08-08 2021-08-17 Cambridge Touch Technologies Ltd. Device for processing signals from a pressure-sensing touch panel

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US5054323A (en) * 1989-04-04 1991-10-08 The Charles Stark Draper Laboratory, Inc. Pressure distribution characterization system
JP2000321013A (ja) * 1999-05-13 2000-11-24 Sony Corp 圧力検出による形状認識装置及びこれを用いたモーションキャプチャー装置
JP2002504223A (ja) * 1995-11-03 2002-02-05 トラスティーズ オブ ボストン ユニバーシティ リアルタイムのサイドインパクト検知及びオフライン・ダイアグノスティックス
WO2010095581A1 (fr) * 2009-02-18 2010-08-26 株式会社クラレ Capteur de déformation multicouche

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Publication number Priority date Publication date Assignee Title
US5054323A (en) * 1989-04-04 1991-10-08 The Charles Stark Draper Laboratory, Inc. Pressure distribution characterization system
JP2002504223A (ja) * 1995-11-03 2002-02-05 トラスティーズ オブ ボストン ユニバーシティ リアルタイムのサイドインパクト検知及びオフライン・ダイアグノスティックス
JP2000321013A (ja) * 1999-05-13 2000-11-24 Sony Corp 圧力検出による形状認識装置及びこれを用いたモーションキャプチャー装置
WO2010095581A1 (fr) * 2009-02-18 2010-08-26 株式会社クラレ Capteur de déformation multicouche

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10496210B2 (en) 2012-04-07 2019-12-03 Cambridge Touch Technologies Ltd. Pressure sensing display device
US10310659B2 (en) 2014-12-23 2019-06-04 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
US10318038B2 (en) 2014-12-23 2019-06-11 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
WO2016117434A1 (fr) * 2015-01-20 2016-07-28 株式会社村田製作所 Module de capteur, dispositif de détection de pression
JPWO2016117434A1 (ja) * 2015-01-20 2017-10-12 株式会社村田製作所 押圧検出装置
US10254894B2 (en) 2015-12-23 2019-04-09 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
US10282046B2 (en) 2015-12-23 2019-05-07 Cambridge Touch Technologies Ltd. Pressure-sensitive touch panel
WO2018225407A1 (fr) * 2017-06-05 2018-12-13 株式会社村田製作所 Capteur de détection de position pressée et appareil électronique
US10817116B2 (en) 2017-08-08 2020-10-27 Cambridge Touch Technologies Ltd. Device for processing signals from a pressure-sensing touch panel
US11093088B2 (en) 2017-08-08 2021-08-17 Cambridge Touch Technologies Ltd. Device for processing signals from a pressure-sensing touch panel

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