WO2014180786A1 - Vorrichtung zur erzeugung einer rotatorischen ultraschallschwingung an einem werkzeug - Google Patents
Vorrichtung zur erzeugung einer rotatorischen ultraschallschwingung an einem werkzeug Download PDFInfo
- Publication number
- WO2014180786A1 WO2014180786A1 PCT/EP2014/059117 EP2014059117W WO2014180786A1 WO 2014180786 A1 WO2014180786 A1 WO 2014180786A1 EP 2014059117 W EP2014059117 W EP 2014059117W WO 2014180786 A1 WO2014180786 A1 WO 2014180786A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piezoelectric vibrating
- axis
- rotation
- tool
- ultrasonic vibration
- Prior art date
Links
- 210000000078 claw Anatomy 0.000 claims abstract description 15
- 238000003801 milling Methods 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 abstract description 4
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 238000003754 machining Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012761 high-performance material Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011151 fibre-reinforced plastic Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B37/00—Boring by making use of ultrasonic energy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/26—Securing milling cutters to the driving spindle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/12—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for securing to a spindle in general
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2260/00—Details of constructional elements
- B23B2260/108—Piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2270/00—Details of turning, boring or drilling machines, processes or tools not otherwise provided for
- B23B2270/10—Use of ultrasound
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2270/00—Details of milling machines, milling processes or milling tools not otherwise provided for
- B23C2270/10—Use of ultrasound
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D3/00—Yielding couplings, i.e. with means permitting movement between the connected parts during the drive
- F16D3/16—Universal joints in which flexibility is produced by means of pivots or sliding or rolling connecting parts
- F16D3/18—Universal joints in which flexibility is produced by means of pivots or sliding or rolling connecting parts the coupling parts (1) having slidably-interengaging teeth
Definitions
- the present invention relates to a device for generating a rotary ultrasonic vibration on a tool.
- an ultrasonic vibration in the direction of rotation is generated with the device on a rotating tool.
- High-performance materials such as high-temperature-resistant nickel-based alloys, titanium or chromium-cobalt alloys or fiber-reinforced plastics are increasingly used in various fields of technology.
- the high-performance materials not only provide high resistance to the loads occurring during operation, but also the machining.
- hybrid cutting devices have been developed in which the chip removal is supported by the superposition of ultrasonic vibrations.
- DE 10 2008 052 326 A1 shows the use of a piezoelectric shear oscillator for generating rotary ultrasonic vibrations for machining.
- the ultrasonic vibration acts in the direction of rotation of the tool.
- piezoelectric shear oscillators can only produce a very low oscillation amplitude with a simultaneously unfavorable power flow.
- the object is achieved by a device for generating a rotary ultrasonic vibration on a tool.
- the device comprises a first part. This first part is designed for non-rotatably connecting the device to a spindle of a machine tool. This spindle rotates about a rotation axis.
- the device comprises a second part. The second part is designed for non-rotatable connection of the device with a tool.
- the two parts, so the first part and the second part of the device are rotatably connected to each other via a jaw clutch.
- This dog clutch is formed as an integral part of the first and second parts. The dog clutch connects the two parts positively. This positive connection has at least one first flank on the first part and a second flank on the second part.
- the device comprises at least one piezoelectric vibrating element.
- the piezoelectric vibrating element is located between the two flanks of the dog clutch.
- the same expands or contracts itself.
- a rotary ultrasonic vibration can be generated about the axis of rotation.
- the cutting forces in the machining can be reduced. This is done by interrupting the cut due to the ultrasonic vibration. This results in a more favorable compared to conventional machining machining without ultrasonic vibration chip formation.
- the device according to the invention makes it possible to machine conventionally non-machinable or non-economically machinable materials. As cutting forces are reduced and reduced friction occurs, tool wear is reduced. At the same time, the rotary ultrasonic vibration enables a very fine surface roughness and a small burr formation on the workpiece. In particular, the reduced tool wear allows a better dimensional accuracy of the workpiece.
- the first part preferably has a plurality of first jaws extending in the direction of the axis of rotation.
- the second part has a plurality of second jaws extending in the direction of the axis of rotation.
- Each of the first jaws has two first flanks.
- Each of the second jaws has two second flanks.
- the first and second jaws engage each other, so that the torque is transmitted from the first part to the second part over a plurality of flanks and thus over as large an area as possible.
- a plurality of claws with a corresponding number of flanks are provided.
- piezoelectric oscillating elements are preferably used between all flanks or between a plurality of flanks. The individual piezoelectric vibrating elements are then arranged in each case between a first and a second flank.
- the at least one piezoelectric vibrating element is a thickness oscillator, that is to say a longitudinal or transversal oscillator.
- the piezoelectric vibrating elements between the first and second Flanks of a dog clutch arranged. This makes it possible to use simple piezoelectric vibrating elements which increase or reduce their thickness when subjected to voltage.
- the piezoelectric vibrating elements are preferably arranged so that they change their thickness tangentially to the circumferential direction of the device for generating the rotary ultrasonic vibration.
- the circumferential direction is defined around the axis of rotation of the spindle. It therefore requires according to the invention no use of Scherschwingern.
- the piezoelectric vibrating elements are preferably arranged concentrically around the axis of rotation.
- the piezoelectric vibrating elements are preferably arranged as far as possible outside the axis of rotation in order to exert the greatest possible torque.
- all the piezoelectric vibrating elements used are arranged with respect to their polarity and contacting in such a way to act in the same direction when generating the rotary ultrasonic vibration. As a result, the piezoelectric vibrating elements do not hinder each other.
- the two parts of the device are connected to each other via at least one tension element.
- This tension element preferably extends in the direction of the axis of rotation.
- the tension element is arranged coaxially to the axis of rotation. By means of the tension element, the two parts are preferably screwed.
- the at least one piezoelectric vibrating element rests simultaneously on the first flank and on the second flank. As a result, there is no play between the flanks and the at least one piezoelectric vibrating element.
- first and the second flank are inclined with respect to the axis of rotation.
- the respective surface normals of the flanks are inclined by an angle ⁇ with respect to the axis of rotation.
- This angle ⁇ is in particular 45 ° to 89 °, particularly preferably 60 ° up to 85 °.
- the surface normals are aligned tangentially to the circumferential direction.
- opposite flanks are aligned parallel to each other.
- respective opposite edges are not aligned parallel to each other, i. that their surface normals enclose an angle ⁇ and that the piezoelectric vibrating element arranged between two opposite flanks is wedge-shaped.
- the opposite flanks are not inclined at the same angle ⁇ with respect to the axis of rotation.
- the at least one piezoelectric vibrating element can be prestressed in the dog clutch. This is possible in particular when using the tension element.
- the bias of the at least one piezoelectric vibrating element can be set variably.
- At least one edge is used as the electrode of the at least one piezoelectric vibrating element.
- the first and / or second part can be used in particular when using longitudinal oscillators as electrode / electrodes.
- electrodes can be introduced between the piezoelectric vibrating elements and the claws.
- electrodes are attached to the free end surfaces of the piezoelectric vibrating element.
- the claws are preferably electrically insulated from the piezoelectric elements. This is preferably done with ceramic discs.
- a control unit is preferably provided for voltage application of the at least one piezoelectric vibrating element.
- the device is preferably operated in its resonance in order to achieve the highest possible vibration amplitude.
- Piezoelectric vibrating elements are preferably arranged and driven in such a way that they mutually contract and expand.
- the first part is designed for non-rotatable connection of the device to the spindle of the machine tool.
- This connection preferably takes place via a steep cone or a hollow shaft cone.
- the connection between the second part and the tool preferably takes place via collets or a shrink chuck.
- the invention further comprises a machine tool, in particular a milling machine.
- the machine tool has one of the devices just described.
- the first part is rotatably connected to a rotating spindle of the machine tool.
- FIG. 1 shows a device according to the invention according to an embodiment in a side view
- Fig. 2 shows an axial section of the device according to the invention according to the
- Figs. 1 and 2 show two views of a device 1 for generating a rotary ultrasonic vibration on a tool.
- the device 1 comprises a first part 11, a second part 12 and a plurality of piezoelectric vibrating elements 8.
- the piezoelectric vibrating elements 8 are designed as longitudinal or transversal oscillators.
- the device 1 comprises a control unit 18 for driving the piezoelectric vibrating elements 8.
- the control unit 18 is shown purely schematically.
- the first part 11 has a spindle connection 15 shown purely schematically.
- this spindle connection 15 the first part 11 rotatably connected to a rotating spindle of a machine tool can be connected.
- This spindle rotates about a rotation axis 2. Accordingly, the device 1 and an associated tool also rotate about the rotation axis 2.
- the second part 12 has a tool connection 16 shown purely schematically.
- the second part 12 rotatably connected to a tool, in particular a router.
- a circumferential direction 3 is defined.
- a dog clutch 10 is formed at the two parts 11, 12, a dog clutch 10 is formed.
- the first part 11 comprises a plurality of first claws 4.
- the second part 12 comprises a plurality of second claws 6.
- a second edge 7 is defined on each side of each second claw 6. The claws 4, 6 engage in one another, so that a torque about the axis of rotation 2 from the first part 11 to the second part 12 can be transmitted via the flanks 5, 7.
- one of the piezoelectric vibrating elements 8 is arranged.
- this comprises corresponding electrodes and isolators.
- the piezoelectric vibrating elements 8 change their thickness. As a result, an ultrasonic vibration can be transmitted to the second part 12 and thus to the tool. This ultrasonic vibration is aligned in the circumferential direction 3. The ultrasonic vibration thus superimposed on the rotational movement generated by the spindle.
- the surface normals 17 on the first and second flanks 5, 7 are inclined at an angle ⁇ relative to the axis of rotation 2. Directly opposite flanks 5, 7 are aligned parallel to one another.
- the device 1 further comprises a tension element 3.
- This tension element 13 extends in the direction of the axis of rotation 2.
- the two parts 11, 12 are screwed together.
- the tension element 13 exerts a prestress on the piezoelectric vibrating elements 8 via the engaged flanks 5, 7.
- an end-side pocket 14 is provided, which receives the head of the tension element 13.
- the second part 12 has a corresponding thread for receiving the tension element 13.
- the piezo-vibrating elements 8 each have two opposite bearing surfaces 9. These bearing surfaces 9 abut directly on the first flank 5 and on the second flank 7.
- the embodiment shows that by means of the device 1, the rotational movement of a tool with a rotary ultrasonic vibration is superimposed.
- the piezoelectric vibrating elements 8 used are thickness oscillators, that is, longitudinal or transversal oscillators. According to the invention, no translatory oscillation in the direction of the axis of rotation 2 is generated. There are also no piezoelectric shear effects needed.
- the translatory oscillation would have the disadvantage that the surface quality of the workpiece during machining is bad.
- the piezoelectric shear effects would have the disadvantage that only small amplitudes and correspondingly low machining forces are possible because the entire process force acts as a shearing force on the piezoceramics.
- the piezoelectric vibrating elements 8 are acted upon in the pressure direction and can thus transmit significantly higher forces, which are possible with the apparatus 1 shown very high Zeitspanungsvolumina in ultrasound-assisted milling.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
- Drilling And Boring (AREA)
- Milling Processes (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201480026115.6A CN105531057A (zh) | 2013-05-08 | 2014-05-05 | 用于在刀具上产生旋转超声振动的装置 |
US14/889,745 US20160114441A1 (en) | 2013-05-08 | 2014-05-05 | Device for generating a rotatory ultrasonic vibration on a tool |
JP2016512320A JP2016524545A (ja) | 2013-05-08 | 2014-05-05 | ツール上に超音波回転振動を生成する装置 |
KR1020157031938A KR20160005038A (ko) | 2013-05-08 | 2014-05-05 | 툴에 회전 초음파 진동을 발생하기 위한 디바이스 |
EP14724670.6A EP2994259A1 (de) | 2013-05-08 | 2014-05-05 | Vorrichtung zur erzeugung einer rotatorischen ultraschallschwingung an einem werkzeug |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013007957.8A DE102013007957B3 (de) | 2013-05-08 | 2013-05-08 | Vorrichtung zur Erzeugung einer rotatorischen Ultraschallschwingung an einem Werkzeug |
DE102013007957.8 | 2013-05-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014180786A1 true WO2014180786A1 (de) | 2014-11-13 |
Family
ID=50733027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2014/059117 WO2014180786A1 (de) | 2013-05-08 | 2014-05-05 | Vorrichtung zur erzeugung einer rotatorischen ultraschallschwingung an einem werkzeug |
Country Status (7)
Country | Link |
---|---|
US (1) | US20160114441A1 (de) |
EP (1) | EP2994259A1 (de) |
JP (1) | JP2016524545A (de) |
KR (1) | KR20160005038A (de) |
CN (1) | CN105531057A (de) |
DE (1) | DE102013007957B3 (de) |
WO (1) | WO2014180786A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6781391B1 (ja) * | 2019-11-22 | 2020-11-04 | 株式会社東京精密 | 表面形状測定機、及び表面形状測定方法 |
CN111557784B (zh) * | 2020-07-15 | 2020-11-13 | 微创视神医疗科技(上海)有限公司 | 超声振子、超声乳化手柄以及超声乳化系统 |
CN113477997B (zh) * | 2021-07-27 | 2022-06-10 | 杭州电子科技大学 | 一种加工吸波蜂窝的超声弧刃锯片铣刀 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03289119A (ja) * | 1990-04-06 | 1991-12-19 | Tokin Corp | 微小回転テーブル |
DE9212079U1 (de) * | 1992-09-08 | 1992-12-03 | Kopp Verfahrenstechnik GmbH, 7970 Leutkirch | Ultraschallerregter Antriebskopf für Bearbeitungswerkzeuge |
US20040244208A1 (en) * | 2003-06-05 | 2004-12-09 | Fanuc Ltd | Microscopic positioning device and tool position/orientation compensating method |
DE102008052326A1 (de) * | 2008-10-20 | 2010-04-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Werkzeughalter an einer Werkzeugmaschine und Bearbeitungsverfahren eines Werkstücks |
US20110056713A1 (en) * | 2009-09-08 | 2011-03-10 | California Institute Of Technology | Single piezo-actuator rotary-hammering (sparh) drill |
US20120081804A1 (en) * | 2010-09-30 | 2012-04-05 | Nikon Corporation | Driving mechanism, lens barrel, and camera |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3766291B2 (ja) * | 2001-05-21 | 2006-04-12 | 正夫 村川 | 超音波ミリング装置 |
JP2003334735A (ja) * | 2002-05-13 | 2003-11-25 | Nakanishi:Kk | 工具駆動装置 |
DE102004056716B4 (de) * | 2004-11-24 | 2008-07-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Werkzeughalteeinrichtung und Werkzeugmaschine mit einer Werkzeughaltevorrichtung, insbesondere zum Tieflochbohren |
JP2007007810A (ja) * | 2005-07-01 | 2007-01-18 | Bosch Corp | 超音波加工スピンドル装置 |
WO2008156116A1 (ja) * | 2007-06-19 | 2008-12-24 | Kazumasa Ohnishi | 切削もしくは研削装置 |
JP5197102B2 (ja) * | 2008-03-31 | 2013-05-15 | 雅彦 神 | 超音波スピンドル装置、超音波スピンドル装置の工具連結方法、工具連結装置、工具連結方法及び工具交換システム |
DE102009004337B3 (de) * | 2009-01-12 | 2010-09-30 | Emag Holding Gmbh | Verfahren und Vorrichtung zur spanenden Bearbeitung eines um eine Mittelachse rotierenden Werkstücks |
JP2012078398A (ja) * | 2010-09-30 | 2012-04-19 | Nikon Corp | 駆動装置、レンズ鏡筒及びカメラ |
DE102011003785A1 (de) * | 2011-02-08 | 2012-08-09 | Robert Bosch Gmbh | Werkzeugspannsystem und Werkzeugmaschine mit einem Werkzeugspannsystem |
-
2013
- 2013-05-08 DE DE102013007957.8A patent/DE102013007957B3/de not_active Expired - Fee Related
-
2014
- 2014-05-05 JP JP2016512320A patent/JP2016524545A/ja active Pending
- 2014-05-05 US US14/889,745 patent/US20160114441A1/en not_active Abandoned
- 2014-05-05 EP EP14724670.6A patent/EP2994259A1/de not_active Withdrawn
- 2014-05-05 KR KR1020157031938A patent/KR20160005038A/ko not_active Application Discontinuation
- 2014-05-05 WO PCT/EP2014/059117 patent/WO2014180786A1/de active Application Filing
- 2014-05-05 CN CN201480026115.6A patent/CN105531057A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03289119A (ja) * | 1990-04-06 | 1991-12-19 | Tokin Corp | 微小回転テーブル |
DE9212079U1 (de) * | 1992-09-08 | 1992-12-03 | Kopp Verfahrenstechnik GmbH, 7970 Leutkirch | Ultraschallerregter Antriebskopf für Bearbeitungswerkzeuge |
US20040244208A1 (en) * | 2003-06-05 | 2004-12-09 | Fanuc Ltd | Microscopic positioning device and tool position/orientation compensating method |
DE102008052326A1 (de) * | 2008-10-20 | 2010-04-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Werkzeughalter an einer Werkzeugmaschine und Bearbeitungsverfahren eines Werkstücks |
US20110056713A1 (en) * | 2009-09-08 | 2011-03-10 | California Institute Of Technology | Single piezo-actuator rotary-hammering (sparh) drill |
US20120081804A1 (en) * | 2010-09-30 | 2012-04-05 | Nikon Corporation | Driving mechanism, lens barrel, and camera |
Also Published As
Publication number | Publication date |
---|---|
KR20160005038A (ko) | 2016-01-13 |
JP2016524545A (ja) | 2016-08-18 |
EP2994259A1 (de) | 2016-03-16 |
CN105531057A (zh) | 2016-04-27 |
DE102013007957B3 (de) | 2014-10-30 |
US20160114441A1 (en) | 2016-04-28 |
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