WO2014177377A3 - Wirbelschichtreaktor und verfahren zur herstellung von granularem polysilicium - Google Patents

Wirbelschichtreaktor und verfahren zur herstellung von granularem polysilicium Download PDF

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Publication number
WO2014177377A3
WO2014177377A3 PCT/EP2014/057655 EP2014057655W WO2014177377A3 WO 2014177377 A3 WO2014177377 A3 WO 2014177377A3 EP 2014057655 W EP2014057655 W EP 2014057655W WO 2014177377 A3 WO2014177377 A3 WO 2014177377A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluidized bed
bed reactor
producing granular
granular polysilicon
reaction gas
Prior art date
Application number
PCT/EP2014/057655
Other languages
English (en)
French (fr)
Other versions
WO2014177377A2 (de
Inventor
Dirk Weckesser
Harald Hertlein
Original Assignee
Wacker Chemie Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie Ag filed Critical Wacker Chemie Ag
Priority to JP2016510986A priority Critical patent/JP6193476B2/ja
Priority to KR1020157034303A priority patent/KR101818685B1/ko
Priority to US14/888,594 priority patent/US9988277B2/en
Priority to CN201480024871.5A priority patent/CN105658577B/zh
Priority to EP14717788.5A priority patent/EP2976296A2/de
Publication of WO2014177377A2 publication Critical patent/WO2014177377A2/de
Publication of WO2014177377A3 publication Critical patent/WO2014177377A3/de

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1809—Controlling processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1818—Feeding of the fluidising gas
    • B01J8/1827—Feeding of the fluidising gas the fluidising gas being a reactant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1872—Details of the fluidised bed reactor
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00548—Flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00628—Controlling the composition of the reactive mixture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00654—Controlling the process by measures relating to the particulate material
    • B01J2208/00663—Concentration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00725—Mathematical modelling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00743—Feeding or discharging of solids
    • B01J2208/00752—Feeding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00743—Feeding or discharging of solids
    • B01J2208/00761—Discharging
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00796—Details of the reactor or of the particulate material
    • B01J2208/00893—Feeding means for the reactants
    • B01J2208/00902—Nozzle-type feeding elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/06—Details of tube reactors containing solid particles
    • B01J2208/065—Heating or cooling the reactor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Gegenstand der Erfindung ist ein Verfahren zur Herstellung von granularem Polysilicium im Wirbelschichtreaktor, umfassend Fluidisierung von Siliciumpartikeln mittels einer Gasströmung in einer Wirbelschicht, die über eine Heizvorrichtung auf eine Temperatur von 850-1100 °C aufgeheizt wird, Zugabe eines siliciumhaltigen Reaktionsgases mittels wenigstens einer Düse und Abscheidung von Silicium auf den Siliciumpartikeln, dadurch gekennzeichnet, dass in wenigstens 56 % eines axialsymmetrischen Bereiches um eine Düsenmündung der wenigstens einen Düse eine Reaktionsgaskonzentration mehr als 75 % einer Maximalkonzentration des Reaktionsgases (10 bis 50 mol%) beträgt, eine Wirbelschichttemperatur höher als 95 % einer Wirbelschichttemperatur außerhalb des axialsymmetrischen Bereichs (850-1100 °C) ist und eine Feststoffkonzentration mehr als 85 % einer Feststoffkonzentration am Rand der Wirbelschicht (55 bis 90 Vol%) beträgt.
PCT/EP2014/057655 2013-05-02 2014-04-15 Wirbelschichtreaktor und verfahren zur herstellung von granularem polysilicium WO2014177377A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016510986A JP6193476B2 (ja) 2013-05-02 2014-04-15 流動床反応器および粒状ポリシリコンの製造方法
KR1020157034303A KR101818685B1 (ko) 2013-05-02 2014-04-15 과립형 폴리실리콘의 제조를 위한 유동상 반응기 및 방법
US14/888,594 US9988277B2 (en) 2013-05-02 2014-04-15 Fluidized bed reactor and method for producing granular polysilicon
CN201480024871.5A CN105658577B (zh) 2013-05-02 2014-04-15 生产粒状多晶硅的流化床反应器和方法
EP14717788.5A EP2976296A2 (de) 2013-05-02 2014-04-15 Wirbelschichtreaktor und verfahren zur herstellung von granularem polysilicium

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013208071.9 2013-05-02
DE201310208071 DE102013208071A1 (de) 2013-05-02 2013-05-02 Wirbelschichtreaktor und Verfahren zur Herstellung von granularem Polysilicium

Publications (2)

Publication Number Publication Date
WO2014177377A2 WO2014177377A2 (de) 2014-11-06
WO2014177377A3 true WO2014177377A3 (de) 2015-01-08

Family

ID=50489111

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/057655 WO2014177377A2 (de) 2013-05-02 2014-04-15 Wirbelschichtreaktor und verfahren zur herstellung von granularem polysilicium

Country Status (9)

Country Link
US (1) US9988277B2 (de)
EP (1) EP2976296A2 (de)
JP (1) JP6193476B2 (de)
KR (1) KR101818685B1 (de)
CN (1) CN105658577B (de)
DE (1) DE102013208071A1 (de)
MY (1) MY170026A (de)
TW (1) TWI538735B (de)
WO (1) WO2014177377A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016204651A1 (de) * 2016-03-21 2017-09-21 Wacker Chemie Ag Quetschmanschetten für die Herstellung von Polysilicium-Granulat
KR102220841B1 (ko) 2016-12-14 2021-02-26 와커 헤미 아게 다결정 실리콘을 제조하기 위한 방법
CN109772236B (zh) * 2017-11-14 2022-08-12 中国石油化工股份有限公司 一种流体分布器、反应装置及其应用
KR102422089B1 (ko) 2019-02-28 2022-07-18 주식회사 엘지화학 유동층 반응기
EP3999469B1 (de) * 2019-07-16 2023-08-30 Wacker Chemie AG Verfahren zur herstellung von polykristallinem silicium
EP4182266B1 (de) * 2020-07-17 2024-01-03 Wacker Chemie AG Verfahren zur herstellung von polykristallinem siliciumgranulat
CN112340737B (zh) * 2020-11-07 2022-04-05 内蒙古东立光伏电子有限公司 一种太阳能级多晶硅生产装置
CN114225849A (zh) * 2021-12-06 2022-03-25 亚洲硅业(青海)股份有限公司 一种硅颗粒生产装置及方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
DE102005042753A1 (de) * 2005-09-08 2007-03-15 Wacker Chemie Ag Verfahren und Vorrichtung zur Herstellung von granulatförmigem polykristallinem Silicium in einem Wirbelschichtreaktor
US20080299291A1 (en) * 2007-05-04 2008-12-04 Wacker Chemie Ag Process For The Continuous Production Of Polycrystalline High-Purity Silicon Granules
US7927984B2 (en) * 2008-11-05 2011-04-19 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor utilizing tetrachlorosilane to reduce wall deposition
US20120230903A1 (en) * 2008-06-30 2012-09-13 Memc Electronic Materials, Inc. Methods for introducting a first gas and a seceond gas into a reaction chamber

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KR880000618B1 (ko) 1985-12-28 1988-04-18 재단법인 한국화학연구소 초단파 가열 유동상 반응에 의한 고순도 다결정 실리콘의 제조 방법
US5037503A (en) 1988-05-31 1991-08-06 Osaka Titanium Co., Ltd. Method for growing silicon single crystal
WO1996041036A2 (en) * 1995-06-07 1996-12-19 Advanced Silicon Materials, Inc. Method and apparatus for silicon deposition in a fluidized-bed reactor
DE19735378A1 (de) 1997-08-14 1999-02-18 Wacker Chemie Gmbh Verfahren zur Herstellung von hochreinem Siliciumgranulat
TW200902442A (en) * 2007-06-15 2009-01-16 Solar Silicon Technology Corp Reactor for producing silicon material for solar cell
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005042753A1 (de) * 2005-09-08 2007-03-15 Wacker Chemie Ag Verfahren und Vorrichtung zur Herstellung von granulatförmigem polykristallinem Silicium in einem Wirbelschichtreaktor
US20080299291A1 (en) * 2007-05-04 2008-12-04 Wacker Chemie Ag Process For The Continuous Production Of Polycrystalline High-Purity Silicon Granules
US20120230903A1 (en) * 2008-06-30 2012-09-13 Memc Electronic Materials, Inc. Methods for introducting a first gas and a seceond gas into a reaction chamber
US7927984B2 (en) * 2008-11-05 2011-04-19 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor utilizing tetrachlorosilane to reduce wall deposition

Also Published As

Publication number Publication date
KR20160003255A (ko) 2016-01-08
TWI538735B (zh) 2016-06-21
CN105658577A (zh) 2016-06-08
WO2014177377A2 (de) 2014-11-06
US20160236940A1 (en) 2016-08-18
CN105658577B (zh) 2017-12-05
US9988277B2 (en) 2018-06-05
TW201442783A (zh) 2014-11-16
KR101818685B1 (ko) 2018-01-16
JP6193476B2 (ja) 2017-09-06
EP2976296A2 (de) 2016-01-27
DE102013208071A1 (de) 2014-11-06
MY170026A (en) 2019-06-25
JP2016522778A (ja) 2016-08-04

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