WO2014168074A1 - 半導体装置の製造に用いられる接着シート、ダイシングテープ一体型接着シート、半導体装置、及び、半導体装置の製造方法 - Google Patents
半導体装置の製造に用いられる接着シート、ダイシングテープ一体型接着シート、半導体装置、及び、半導体装置の製造方法 Download PDFInfo
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- WO2014168074A1 WO2014168074A1 PCT/JP2014/059875 JP2014059875W WO2014168074A1 WO 2014168074 A1 WO2014168074 A1 WO 2014168074A1 JP 2014059875 W JP2014059875 W JP 2014059875W WO 2014168074 A1 WO2014168074 A1 WO 2014168074A1
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- WIPO (PCT)
- Prior art keywords
- film
- adhesive sheet
- semiconductor
- back surface
- dicing tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
- C08K3/36—Silica
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/08—Homopolymers or copolymers of acrylic acid esters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
- C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/385—Acrylic polymers
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- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/002—Physical properties
- C08K2201/003—Additives being defined by their diameter
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- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/01—Use of inorganic substances as compounding ingredients characterized by their specific function
- C08K3/013—Fillers, pigments or reinforcing additives
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/16—Solid spheres
- C08K7/18—Solid spheres inorganic
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- C—CHEMISTRY; METALLURGY
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/10—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet
- C09J2301/12—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the arrangement of layers
- C09J2301/122—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the arrangement of layers the adhesive layer being present only on one side of the carrier, e.g. single-sided adhesive tape
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/20—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself
- C09J2301/208—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself the adhesive layer being constituted by at least two or more adjacent or superposed adhesive layers, e.g. multilayer adhesive
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/302—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being pressure-sensitive, i.e. tacky at temperatures inferior to 30°C
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
- C09J2301/408—Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the adhesive layer
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2433/00—Presence of (meth)acrylic polymer
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- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
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- H01L2223/54433—Marks applied to semiconductor devices or parts containing identification or tracking information
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- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
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- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
- H01L2223/54486—Located on package parts, e.g. encapsulation, leads, package substrate
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
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Definitions
- the present invention relates to an adhesive sheet used for manufacturing a semiconductor device, a dicing tape integrated adhesive sheet, a semiconductor device, and a method for manufacturing the semiconductor device.
- a flip chip type semiconductor device in which a semiconductor element such as a semiconductor chip is mounted on a substrate by flip chip bonding (flip chip connection) is widely used as a semiconductor device and its package.
- the flip chip connection is fixed in such a manner that the circuit surface of the semiconductor chip faces the electrode forming surface of the substrate.
- the back surface of the semiconductor chip may be protected by a protective film (flip chip type semiconductor back film) to prevent the semiconductor chip from being damaged (see, for example, Patent Document 1).
- the semiconductor chip may be warped, and the suppression thereof is demanded.
- the film for flip chip type semiconductor back surface since the film for flip chip type semiconductor back surface is exposed to the outside, it may be marked and various information may be given. Therefore, the marking contrast is required to be high. Further, not only the flip chip type semiconductor back surface film but also an adhesive sheet used for manufacturing a semiconductor device may be marked.
- the present invention has been made in view of the above problems, and an object thereof is to suppress the occurrence of warping of a semiconductor chip and to provide an adhesive sheet and a dicing tape having a high marking contrast when marking.
- An object of the present invention is to provide an integrated adhesive sheet and a semiconductor device manufactured using the dicing tape integrated adhesive sheet.
- the inventors of the present application include a predetermined amount of filler having a predetermined average particle size or less in the adhesive sheet, and by optimizing the content of the acrylic resin, It has been found that the warpage of the semiconductor chip can be suppressed and the marking contrast when marking can be increased, and the present invention has been completed.
- the adhesive sheet according to the present invention is an adhesive sheet used for manufacturing a semiconductor device, Containing an average particle size of 0.3 ⁇ m or less filler and acrylic resin,
- the content of the filler is in the range of 20 to 45% by weight with respect to the entire adhesive sheet,
- the acrylic resin content is in the range of 40 to 70% by weight with respect to the total resin components.
- the filler having an average particle size of 0.3 ⁇ m or less is contained in the range of 20 to 45% by weight with respect to the entire adhesive sheet. Therefore, when the filler surface is exposed by the marking process, the surface unevenness of the exposed portion becomes fine. Therefore, the amount of reflected light of oblique illumination increases at the time of reading of the marking, and the brightness of the marking processed portion increases. As a result, the marking contrast at the time of marking can be increased. Further, since the acrylic resin is contained in an amount of 40% by weight or more based on the total resin components, the warp of the semiconductor chip can be suppressed. Moreover, since content of an acrylic resin is 70 weight% or less with respect to all the resin components, tackiness can be suppressed.
- the filler has a larger surface area than a filler having an average particle size of greater than 0.3 ⁇ m.
- the contact area and the contact area between the fillers increase, and the elastic modulus tends to increase. Therefore, a large warp is likely to occur in a semiconductor device manufactured using an adhesive sheet containing a nanofiller.
- the elastic modulus is controlled and the warpage is suppressed by setting the content of the acrylic resin within the above range.
- total resin component refers to the entire resin component excluding the filler (when the dye is included, the entire resin component excluding the filler and the dye).
- the adhesive sheet is preferably a flip chip type semiconductor back film for forming on the back surface of a semiconductor element flip chip connected on an adherend. Since the film for flip chip type semiconductor back surface is formed on the back surface of the semiconductor element, it is possible to further suppress the warpage of the semiconductor chip. Moreover, since the film for flip chip type semiconductor back surfaces is exposed to the outside, it is often marked and given various information. Therefore, when the adhesive sheet is used as a film for flip chip type semiconductor back surface where marking visibility is required, it is more useful.
- the maximum particle size of the filler is 0.5 ⁇ m or less.
- the maximum particle size of the filler is 0.5 ⁇ m or less, the surface unevenness of the exposed portion when the filler surface is exposed by the marking process is finer. Therefore, the marking contrast when marking can be further increased.
- the filler is preferably a silica-based filler.
- the filler is a silica-based filler, the dispersibility in a solvent is good, and further, it is excellent in that it is difficult to precipitate after dispersion.
- the adhesive sheet preferably has a tensile storage elastic modulus at 23 ° C. in an uncured state of 1.0 to 3.0 GPa.
- the tensile storage modulus at 23 ° C. in the uncured state is 1.0 to 3.0 GPa, the warp of the semiconductor chip can be suppressed.
- tackiness can be suppressed, sticking to a suction collet or the like when mounting a semiconductor chip can be suppressed.
- a dicing tape integrated adhesive sheet according to the present invention is for solving the above problems
- the adhesive sheet described above is a dicing tape integrated adhesive sheet laminated on a dicing tape
- the dicing tape has a structure in which an adhesive layer is laminated on a base material, and the adhesive sheet is laminated on the adhesive layer.
- a semiconductor device for solving the above-described problems, and is characterized by being manufactured using the dicing tape-integrated adhesive sheet described above.
- a manufacturing method of a semiconductor device is a manufacturing method of a semiconductor device using the dicing tape integrated adhesive sheet described above, Adhering a semiconductor wafer on an adhesive sheet in the dicing tape-integrated adhesive sheet; Forming a semiconductor element by dicing the semiconductor wafer; The step of peeling the semiconductor element from the adhesive layer of the dicing tape together with the dicing tape integrated adhesive sheet; And a step of flip-chip connecting the semiconductor element onto an adherend.
- the adhesive sheet of the present invention is a flip chip type semiconductor back film
- the adhesive sheet of the present invention is not limited to the flip chip type semiconductor back film, for example, a chip is mounted.
- substrate may be sufficient.
- FIG. 1 is a schematic cross-sectional view showing an example of a dicing tape-integrated film for semiconductor back surface according to an embodiment of the present invention. Note that in this specification, parts unnecessary for description are omitted in the drawings, and there are parts illustrated in an enlarged or reduced manner for ease of description.
- the dicing tape-integrated film for semiconductor back surface 1 includes a dicing tape 3 in which a pressure-sensitive adhesive layer 32 is provided on a base material 31, and a flip-chip type semiconductor provided on the pressure-sensitive adhesive layer.
- the backside film (hereinafter, sometimes referred to as “semiconductor backside film”) 2 is provided.
- the dicing tape integrated semiconductor back film 1 corresponds to an embodiment of the dicing tape integrated adhesive sheet of the present invention.
- the dicing tape-integrated film for semiconductor back surface of the present invention has a semiconductor only on the portion 33 corresponding to the bonded portion of the semiconductor wafer on the adhesive layer 32 of the dicing tape 3.
- the structure in which the film 2 for back surfaces was formed may be sufficient, the structure in which the film for semiconductor back surfaces was formed in the whole surface of the adhesive layer 32 may be sufficient, and it is larger than the part 33 corresponding to the adhesion part of a semiconductor wafer. And the structure by which the film for semiconductor back surfaces was formed in the part smaller than the whole surface of the adhesive layer 32 may be sufficient.
- the surface (surface of the side stuck on the back surface of a wafer) of the film 2 for semiconductor back surfaces may be protected by the separator etc. until it is stuck on the wafer back surface.
- the film 2 for semiconductor back surface has a film-like form.
- the film for semiconductor back surface 2 is normally in an uncured state (including a semi-cured state) in the form of a dicing tape integrated semiconductor back surface film as a product, and the dicing tape integrated film for semiconductor back surface is attached to a semiconductor wafer. After being applied, it is heat-cured (details will be described later).
- the film for semiconductor back surface 2 contains a filler having an average particle size of 0.3 ⁇ m or less and an acrylic resin as a thermoplastic resin. Moreover, it is preferable that the said film for semiconductor back surfaces contains a thermosetting resin further.
- the film for semiconductor back surface 2 contains a filler having an average particle size of 0.3 ⁇ m or less.
- the average particle size of the filler is preferably 0.2 ⁇ m or less, and preferably 0.1 ⁇ m or less.
- the average particle diameter of the said filler can be 0.01 micrometer or more, 0.02 micrometer or more, 0.03 micrometer or more, for example.
- the filler content is in the range of 20 to 45% by weight with respect to the entire semiconductor back film 2.
- the filler content is more preferably in the range of 25 to 40% by weight.
- the whole film for semiconductor back surfaces means the whole film for semiconductor back surfaces containing a resin component and a filler, and when it contains dye, it means the whole film for semiconductor back surface containing a resin component, a filler, and dye.
- the filler having an average particle size of 0.3 ⁇ m or less is contained in the range of 20 to 45% by weight with respect to the entire film 2 for semiconductor back surface, the filler surface is exposed on the surface of the film 2 for semiconductor back surface by marking. If it is done, the surface unevenness
- the maximum particle size of the filler is preferably 0.5 ⁇ m or less, and more preferably 0.3 ⁇ m or less.
- the maximum particle size of the filler is 0.5 ⁇ m or less, the surface unevenness of the exposed portion when the filler surface is exposed by the marking process is finer. Therefore, the marking contrast when marking can be further increased.
- the average particle size and the maximum particle size of the filler are values measured by a laser diffraction type particle size distribution measuring device.
- the shape of the inorganic filler is not particularly limited, and may be any shape such as a sphere, an ellipsoid, a plate, a rod, a column, a layer, a chain, a scale, a donut, and an indefinite shape.
- the average particle diameter and the maximum particle diameter are obtained based on the diameter of the sphere when the target inorganic filler is assumed to be spherical.
- the filler may be either an inorganic filler or an organic filler, but is preferably an inorganic filler.
- a filler such as an inorganic filler, it is possible to impart conductivity to the film for semiconductor back surface, improve thermal conductivity, adjust the elastic modulus, and the like.
- the film for semiconductor back surface 2 may be conductive or non-conductive.
- the inorganic filler examples include silica, clay, gypsum, calcium carbonate, barium sulfate, alumina, beryllium oxide, silicon carbide, silicon nitride, and other ceramics, aluminum, copper, silver, gold, nickel, chromium, lead , Various inorganic powders made of metal such as tin, zinc, palladium, solder, or alloys, and other carbon.
- a filler can be used individually or in combination of 2 or more types. Among them, a silica-based filler is preferable in that it has good dispersibility in a solvent and is difficult to precipitate after dispersion.
- the film for semiconductor back surface 2 contains an acrylic resin.
- the content of the acrylic resin is in the range of 40 to 70% by weight and preferably 45 to 65% by weight with respect to the total resin components. Since the acrylic resin is contained in the range of 40 to 70% by weight with respect to the total resin components, the warp of the semiconductor chip can be suppressed.
- the elastic modulus is controlled and the warpage is suppressed by setting the content of the acrylic resin within the above range.
- marking was performed by including a filler having an average particle diameter of 0.3 ⁇ m or less in a range of 20 to 45% by weight with respect to the entire film for semiconductor back surface 2.
- the marking contrast at the time is increased, and the acrylic resin is contained within the range of 40 to 70% by weight with respect to the total resin components, so that it is possible to suppress the warp that may occur when using the nanofiller. .
- the acrylic resin is not particularly limited, and is linear or branched having 30 or less carbon atoms (preferably 4 to 18 carbon atoms, more preferably 6 to 10 carbon atoms, and particularly preferably 8 or 9 carbon atoms). And polymers having one or more esters of acrylic acid or methacrylic acid having an alkyl group as a component. That is, in the present invention, acrylic resin has a broad meaning including methacrylic resin.
- alkyl group examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a t-butyl group, an isobutyl group, a pentyl group, an isopentyl group, a hexyl group, a heptyl group, and a 2-ethylhexyl group.
- Octyl group isooctyl group, nonyl group, isononyl group, decyl group, isodecyl group, undecyl group, dodecyl group (lauryl group), tridecyl group, tetradecyl group, stearyl group, octadecyl group and the like.
- the other monomer for forming the acrylic resin is not particularly limited.
- acrylic acid Methacrylic acid, carboxyethyl acrylate, carboxypentyl acrylate, itaconic acid, maleic acid, fumaric acid or crotonic acid-containing monomer, such as maleic anhydride or itaconic anhydride, etc.
- thermosetting resin examples include an epoxy resin, a phenol resin, an amino resin, an unsaturated polyester resin, a polyurethane resin, a silicone resin, and a thermosetting polyimide resin.
- a thermosetting resin can be used individually or in combination of 2 or more types.
- an epoxy resin containing a small amount of ionic impurities that corrode semiconductor elements is particularly suitable.
- a phenol resin can be used suitably as a hardening
- the epoxy resin is not particularly limited.
- bisphenol A type epoxy resin bisphenol F type epoxy resin, bisphenol S type epoxy resin, brominated bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol AF type epoxy.
- Bifunctional epoxy such as resin, biphenyl type epoxy resin, naphthalene type epoxy resin, fluorene type epoxy resin, phenol novolac type epoxy resin, orthocresol novolak type epoxy resin, trishydroxyphenylmethane type epoxy resin, tetraphenylolethane type epoxy resin
- Epoxy such as resin, polyfunctional epoxy resin, hydantoin type epoxy resin, trisglycidyl isocyanurate type epoxy resin or glycidylamine type epoxy resin It can be used fat.
- epoxy resin among the above examples, novolak type epoxy resin, biphenyl type epoxy resin, trishydroxyphenylmethane type epoxy resin, and tetraphenylolethane type epoxy resin are particularly preferable. This is because these epoxy resins are rich in reactivity with a phenol resin as a curing agent and are excellent in heat resistance and the like.
- the phenol resin acts as a curing agent for the epoxy resin.
- examples include resol-type phenolic resins and polyoxystyrenes such as polyparaoxystyrene.
- a phenol resin can be used individually or in combination of 2 or more types. Of these phenol resins, phenol novolac resins and phenol aralkyl resins are particularly preferred. This is because the connection reliability of the semiconductor device can be improved.
- the mixing ratio of the epoxy resin and the phenol resin is preferably such that, for example, the hydroxyl group in the phenol resin is 0.5 equivalent to 2.0 equivalents per equivalent of epoxy group in the epoxy resin component. More preferred is 0.8 equivalents to 1.2 equivalents. That is, if the blending ratio of both is out of the above range, sufficient curing reaction does not proceed and the properties of the cured epoxy resin are likely to deteriorate.
- thermosetting acceleration catalyst of an epoxy resin and a phenol resin
- the thermosetting acceleration catalyst is not particularly limited, and can be appropriately selected from known thermosetting acceleration catalysts.
- stimulation catalyst can be used individually or in combination of 2 or more types.
- an amine-based curing accelerator, a phosphorus-based curing accelerator, an imidazole-based curing accelerator, a boron-based curing accelerator, a phosphorus-boron-based curing accelerator, or the like can be used.
- the amine curing accelerator is not particularly limited, and examples thereof include monoethanolamine trifluoroborate (manufactured by Stella Chemifa Corporation), dicyandiamide (manufactured by Nacalai Tesque Corporation), and the like.
- the phosphorus curing accelerator is not particularly limited, and examples thereof include triorganophosphine such as triphenylphosphine, tributylphosphine, tri (p-methylphenyl) phosphine, tri (nonylphenyl) phosphine, diphenyltolylphosphine, and the like.
- triorganophosphine such as triphenylphosphine, tributylphosphine, tri (p-methylphenyl) phosphine, tri (nonylphenyl) phosphine, diphenyltolylphosphine, and the like.
- Tetraphenylphosphonium bromide (trade name; TPP-PB), methyltriphenylphosphonium (trade name; TPP-MB), methyltriphenylphosphonium chloride (trade name; TPP-MC), methoxymethyltriphenylphosphonium (trade name; TPP-MOC), benzyltriphenylphosphonium chloride (trade name; TPP-ZC), and the like (all manufactured by Hokuko Chemical Co., Ltd.).
- the triphenylphosphine compound is preferably substantially insoluble in the epoxy resin. It can suppress that thermosetting progresses too much that it is insoluble with respect to an epoxy resin.
- thermosetting catalyst having a triphenylphosphine structure and substantially insoluble in an epoxy resin examples include methyltriphenylphosphonium (trade name: TPP-MB).
- TPP-MB methyltriphenylphosphonium
- the “insoluble” means that the thermosetting catalyst made of a triphenylphosphine compound is insoluble in a solvent made of an epoxy resin, and more specifically, a temperature range of 10 to 40 ° C. It means that 10% by weight or more does not dissolve.
- imidazole curing accelerator examples include 2-methylimidazole (trade name; 2MZ), 2-undecylimidazole (trade name; C11-Z), 2-heptadecylimidazole (trade name; C17Z), 1-2- Dimethylimidazole (trade name; 1.2DMZ), 2-ethyl-4-methylimidazole (trade name; 2E4MZ), 2-phenylimidazole (trade name; 2PZ), 2-phenyl-4-methylimidazole (trade name; 2P4MZ) ), 1-benzyl-2-methylimidazole (trade name; 1B2MZ), 1-benzyl-2-phenylimidazole (trade name; 1B2PZ), 1-cyanoethyl-2-methylimidazole (trade name; 2MZ-CN), 1 -Cyanoethyl-2-undecylimidazole (trade name; C11Z-CN), 1-cyano Ethyl-2-phenylim
- the boron-based curing accelerator is not particularly limited, and examples thereof include trichloroborane.
- the phosphorus-boron curing accelerator is not particularly limited, and examples thereof include tetraphenylphosphonium tetraphenylborate (trade name; TPP-K), tetraphenylphosphonium tetra-p-triborate (trade name; TPP-MK), and benzyl.
- examples include triphenylphosphonium tetraphenylborate (trade name; TPP-ZK), triphenylphosphine triphenylborane (trade name; TPP-S), and the like (all manufactured by Hokuko Chemical Co., Ltd.).
- the ratio of the thermosetting accelerating catalyst can be 0.01 wt% or more and 20 wt% or less with respect to the total amount of the thermosetting resin.
- the ratio of the thermosetting accelerating catalyst is 0.01% by weight or more, even if the semiconductor element flip-chip connected to the adherend is thin (for example, the thickness is 300 ⁇ m or less, and further 200 ⁇ m or less). Even), the warpage can be effectively suppressed or prevented.
- stimulation catalyst 20 weight% or less the shrinkage amount of the film for flip chip type semiconductor back surfaces does not become excessive, and it can control to a moderate magnitude
- the lower limit of the ratio of the thermosetting acceleration catalyst is preferably 0.03% by weight or more (more preferably 0.05% by weight or more).
- the upper limit is preferably 18% by weight or less (more preferably 15% by weight or less).
- the semiconductor back film is preferably formed of a resin composition containing an epoxy resin and a phenol resin, or a resin composition containing an epoxy resin, a phenol resin and an acrylic resin. Since these resins have few ionic impurities and high heat resistance, the reliability of the semiconductor element can be ensured.
- the film 2 for semiconductor back surface has adhesion (adhesion) to the back surface (circuit non-formed surface) of the semiconductor wafer.
- the film for semiconductor back surface 2 can be formed of, for example, a resin composition containing an epoxy resin as a thermosetting resin.
- a polyfunctional compound that reacts with the functional group at the molecular chain end of the polymer as a crosslinking agent.
- the adhesive strength of the film for semiconductor back surface to the semiconductor wafer (23 ° C., peeling angle 180 °, peeling speed 300 mm / min) is preferably in the range of 0.5 N / 20 mm to 15 N / 20 mm, and 0.7 N / 20 mm to 10 N / 20 mm. The range of is more preferable.
- it is stuck to a semiconductor wafer or a semiconductor element with excellent adhesion, and the occurrence of floating or the like can be prevented. Further, it is possible to prevent the occurrence of chip jumping during dicing of the semiconductor wafer.
- the said adhesive force with respect to the semiconductor wafer of the film for semiconductor back surfaces is the value measured as follows, for example. That is, an adhesive tape (trade name “BT315” manufactured by Nitto Denko Corporation) is attached to one surface of the film for semiconductor back surface to reinforce the back surface. Thereafter, a semiconductor wafer having a thickness of 0.6 mm is bonded to the surface of the backside-reinforced film having a length of 150 mm and a width of 10 mm by a thermal laminating method by reciprocating a 2 kg roller at 50 ° C. once.
- an adhesive tape (trade name “BT315” manufactured by Nitto Denko Corporation) is attached to one surface of the film for semiconductor back surface to reinforce the back surface.
- a semiconductor wafer having a thickness of 0.6 mm is bonded to the surface of the backside-reinforced film having a length of 150 mm and a width of 10 mm by a thermal laminating method by reciprocating a 2 kg roller at 50 ° C. once.
- the crosslinking agent is not particularly limited, and a known crosslinking agent can be used. Specifically, for example, an isocyanate crosslinking agent, an epoxy crosslinking agent, a melamine crosslinking agent, a peroxide crosslinking agent, a urea crosslinking agent, a metal alkoxide crosslinking agent, a metal chelate crosslinking agent, a metal salt Examples thereof include a system crosslinking agent, a carbodiimide crosslinking agent, an oxazoline crosslinking agent, an aziridine crosslinking agent, and an amine crosslinking agent.
- the crosslinking agent an isocyanate crosslinking agent or an epoxy crosslinking agent is suitable.
- the said crosslinking agent can be used individually or in combination of 2 or more types.
- isocyanate-based crosslinking agent examples include lower aliphatic polyisocyanates such as 1,2-ethylene diisocyanate, 1,4-butylene diisocyanate, and 1,6-hexamethylene diisocyanate; cyclopentylene diisocyanate, cyclohexylene diisocyanate, Cycloaliphatic polyisocyanates such as isophorone diisocyanate, hydrogenated tolylene diisocyanate, hydrogenated xylene diisocyanate; 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 4,4'- Aromatic polyisocyanates such as diphenylmethane diisocyanate and xylylene diisocyanate, and the like, and trimethylolpropane / tolylene diisocyanate trimer adduct [Nippon Polyurethane Industry Co., Ltd.
- epoxy crosslinking agent examples include N, N, N ′, N′-tetraglycidyl-m-xylenediamine, diglycidylaniline, 1,3-bis (N, N-glycidylaminomethyl) cyclohexane, 1,6-hexanediol diglycidyl ether, neopentyl glycol diglycidyl ether, ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, sorbitol polyglycidyl ether, glycerol polyglycidyl ether , Pentaerythritol polyglycidyl ether, polyglycerol polyglycidyl ether, sorbitan polyglycidyl ether, trimethylolpropane poly In addition to lysidyl ether, a
- the usage-amount of a crosslinking agent in particular is not restrict
- the amount of the crosslinking agent used is, for example, usually 7 parts by weight or less (for example, 0.05 parts by weight) with respect to 100 parts by weight of the polymer component (particularly, the polymer having a functional group at the molecular chain end). To 7 parts by weight).
- the amount of the crosslinking agent used is more than 7 parts by weight based on 100 parts by weight of the polymer component, the adhesive force is lowered, which is not preferable.
- the amount of crosslinking agent used is preferably 0.05 parts by weight or more with respect to 100 parts by weight of the polymer component.
- the semiconductor back film is preferably colored. Thereby, excellent marking properties and appearance can be exhibited, and a semiconductor device having an added-value appearance can be obtained.
- the colored film for semiconductor back surface has excellent marking properties, the film for semiconductor back surface is applied to the surface of the semiconductor element or the non-circuit surface side of the semiconductor device using the semiconductor element. Accordingly, by using various marking methods such as a printing method and a laser marking method, marking can be performed and various information such as character information and graphic information can be given. In particular, by controlling the coloring color, it is possible to visually recognize information (character information, graphic information, etc.) given by marking with excellent visibility.
- the film for semiconductor back surface is colored, the dicing tape and the film for semiconductor back surface can be easily distinguished, and workability and the like can be improved. Further, for example, as a semiconductor device, it is possible to color-code according to products.
- the color exhibited by coloring is not particularly limited, but is preferably a dark color such as black, blue, red, etc., particularly black It is preferable that
- the dark basically, L * a * b * L * is defined by a color system, 60 or less (0 to 60) [preferably 50 or less (0 to 50) More preferably, it means a dark color of 40 or less (0 to 40)].
- L * a * b * L * defined by the color system is 35 or less (0 to 35) [preferably 30 or less (0 to 30), more preferably 25 This means a blackish color which is (0 to 25) below.
- a * and b * defined in the L * a * b * color system can be appropriately selected according to the value of L * .
- a * and b * for example, both are preferably ⁇ 10 to 10, more preferably ⁇ 5 to 5, particularly in the range of ⁇ 3 to 3 (in particular, 0 or almost 0). Is preferred.
- L * , a * , and b * defined in the L * a * b * color system are color difference meters (trade name “CR-200” manufactured by Minolta Co .; color difference meter). It is calculated
- the L * a * b * color system is a color space recommended by the International Commission on Illumination (CIE) in 1976, and is a color space called the CIE 1976 (L * a * b * ) color system. It means that.
- the L * a * b * color system is defined in JISZ 8729 in the Japanese Industrial Standard.
- a coloring material can be used according to the target color.
- a color material various dark color materials such as a black color material, a blue color material, and a red color material can be suitably used, and a black color material is particularly suitable.
- the color material any of a pigment, a dye and the like may be used. Color materials can be used alone or in combination of two or more.
- the dye any form of dyes such as acid dyes, reactive dyes, direct dyes, disperse dyes, and cationic dyes can be used.
- the form of the pigment is not particularly limited, and can be appropriately selected from known pigments.
- the dye when a dye is used as a coloring material, the dye is dissolved or uniformly dispersed in the semiconductor back film, so that the film for semiconductor back (and hence dicing tape) having a uniform or almost uniform coloring density is obtained.
- Integrated film for semiconductor back surface can be easily manufactured. Therefore, when a dye is used as the coloring material, the film for semiconductor back surface in the dicing tape-integrated film for semiconductor back surface can make the coloring density uniform or almost uniform, and can improve the marking property and appearance.
- the black color material is not particularly limited, and can be appropriately selected from, for example, inorganic black pigments and black dyes.
- a black color material a color material mixture in which a cyan color material (blue-green color material), a magenta color material (red purple color material) and a yellow color material (yellow color material) are mixed. It may be.
- Black color materials can be used alone or in combination of two or more.
- the black color material can be used in combination with a color material other than black.
- the black color material for example, carbon black (furnace black, channel black, acetylene black, thermal black, lamp black, etc.), graphite (graphite), copper oxide, manganese dioxide, azo pigment (azomethine) Azo black, etc.), aniline black, perylene black, titanium black, cyanine black, activated carbon, ferrite (nonmagnetic ferrite, magnetic ferrite, etc.), magnetite, chromium oxide, iron oxide, molybdenum disulfide, chromium complex, complex oxide black Examples thereof include dyes and anthraquinone organic black dyes.
- black color material C.I. I. Solvent Black 3, 7, 22, 27, 29, 34, 43, 70, C.I. I. Direct Black 17, 19, 19, 22, 32, 38, 51, 71, C.I. I. Acid Black 1, 2, 24, 26, 31, 48, 52, 107, 109, 110, 119, 154C.
- Black dyes such as Disperse Black 1, 3, 10, and 24;
- Black pigments such as CI Pigment Black 1 and 7 can also be used.
- Examples of such a black color material include a product name “OilOBlack BY”, a product name “OilBlack BS”, a product name “OilBlackHBB”, a product name “Oil Black803”, a product name “Oil Black860”, and a product name “Oil Black860”.
- Oil Black 5970 ”, trade name“ Oil Black 5906 ”, trade name“ Oil Black 5905 ”(manufactured by Orient Chemical Co., Ltd.) and the like are commercially available.
- color materials other than black color materials include cyan color materials, magenta color materials, and yellow color materials.
- cyan color materials include C.I. I. Solvent Blue 25, 36, 60, 70, 93, 95; I. Cyan dyes such as Acid Blue 6 and 45; I. Pigment Blue 1, 2, 3, 15, 15: 1, 15: 2, 15: 3, 15: 3, 15: 4, 15: 5, 15: 6, 16, 16, 17 17: 1, 18, 22, 25, 56, 60, 63, 65, 66; I. Bat Blue 4; 60, C.I. I. And cyan pigments such as CI Pigment Green 7.
- magenta dye examples include C.I. I. Solvent Red 1, 3, 8, 23, 24, 25, 27, 30, 30, 49, 52, 58, 63, 81, 82, 83, 84, the same 100, 109, 111, 121, 122; I. Disper thread 9; I. Solvent Violet 8, 13, 13, 21, and 27; C.I. I. Disperse violet 1; C.I. I. Basic Red 1, 2, 9, 9, 13, 14, 15, 17, 17, 18, 22, 23, 24, 27, 29, 32, 34, the same 35, 36, 37, 38, 39, 40; I. Basic Violet 1, 3, 7, 10, 14, 15, 21, 21, 25, 26, 27, 28 and the like.
- magenta pigment examples include C.I. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 11, 12, 13, 14, 15, 16, 17, 18, 19, 21, 21, 22, 23, 30, 31, 32, 37, 38, 39, 40, 41, 42, 48: 1, 48: 2, 48: 3, 48: 4, 49, 49: 1, 50, 51, 52, 52: 2, 53: 1, 54, 55, 56, 57: 1, 58, 60, 60: 1, 63, 63: 1, 63: 2, 64, 64: 1, 67, 68, 81, 83, etc.
- yellow color materials include C.I. I. Solvent Yellow 19, 44, 77, 79, 81, 82, 93, 98, 103, 104, 112, 162 and the like yellow dyes; C.I. I. Pigment Orange 31 and 43; C.I. I.
- Various color materials such as a cyan color material, a magenta color material, and a yellow color material can be used alone or in combination of two or more.
- the mixing ratio (or blending ratio) of these color materials is not particularly limited, and each color material. It can be selected as appropriate according to the type and the target color.
- the coloring form is not particularly limited.
- the film for semiconductor back surface may be a single layer film-like material to which a colorant is added. Further, it may be a laminated film in which at least a resin layer formed of a thermosetting resin and a colorant layer are laminated.
- the film 2 for semiconductor back surfaces is a laminated film of a resin layer and a colorant layer
- the film 2 for semiconductor back surface of the laminated form has a laminated form of resin layer / colorant layer / resin layer. It is preferable.
- the two resin layers on both sides of the colorant layer may be resin layers having the same composition or may be resin layers having different compositions.
- the semiconductor back film 2 may be appropriately mixed with other additives as necessary.
- additives include flame retardants, silane coupling agents, ion trapping agents, bulking agents, antiaging agents, antioxidants, surfactants, and the like.
- Examples of the flame retardant include antimony trioxide, antimony pentoxide, and brominated epoxy resin.
- a flame retardant can be used individually or in combination of 2 or more types.
- Examples of the silane coupling agent include ⁇ - (3,4-epoxycyclohexyl) ethyltrimethoxysilane, ⁇ -glycidoxypropyltrimethoxysilane, ⁇ -glycidoxypropylmethyldiethoxysilane, and the like.
- a silane coupling agent can be used individually or in combination of 2 or more types.
- Examples of the ion trapping agent include hydrotalcites and bismuth hydroxide. An ion trap agent can be used individually or in combination of 2 or more types.
- the film for semiconductor back surface 2 is a resin composition obtained by mixing, for example, a thermosetting resin such as an epoxy resin, a thermoplastic resin such as an acrylic resin as necessary, and a solvent or other additives as necessary. It can be formed using conventional methods of preparing the product and forming it into a film-like layer. Specifically, for example, the resin composition is applied onto the pressure-sensitive adhesive layer 32 of the dicing tape, or the resin composition is applied onto an appropriate separator (such as release paper) to form a resin layer (or adhesive).
- a film-like layer (adhesive layer) as a film for a semiconductor back surface can be formed by a method of forming a layer) and transferring (transferring) the layer onto the pressure-sensitive adhesive layer 32.
- the resin composition may be a solution or a dispersion.
- the film 2 for semiconductor back surfaces is formed with the resin composition containing thermosetting resins, such as an epoxy resin
- the film for semiconductor back surfaces is a thermosetting resin in the step before applying to a semiconductor wafer. It is an uncured or partially cured state. In this case, after being applied to the semiconductor wafer (specifically, usually when the sealing material is cured in the flip chip bonding process), the thermosetting resin in the film for semiconductor back surface is completely or almost completely cured. .
- the gel fraction of the film for semiconductor back surface is particularly limited. However, it can be appropriately selected from the range of, for example, 50% by weight or less (0% by weight to 50% by weight), preferably 30% by weight or less (0% by weight to 30% by weight), particularly 10% by weight. The following (0 to 10% by weight) is preferable.
- the measuring method of the gel fraction of the film for semiconductor back surface can be measured by the following measuring method. ⁇ Method for measuring gel fraction> About 0.1 g from the film for semiconductor back surface is sampled and weighed accurately (weight of the sample).
- the gel fraction of the film for semiconductor back surface can be controlled by the heating temperature and the heating time in addition to the type and content of the resin component, the type and content of the crosslinking agent.
- the film for semiconductor back surface is a film-like product formed of a resin composition containing a thermosetting resin such as an epoxy resin, it can effectively exhibit adhesion to a semiconductor wafer.
- the film for the semiconductor back surface may absorb moisture, resulting in a moisture content higher than that in the normal state.
- water vapor may accumulate at the bonding interface between the semiconductor back film 2 and the semiconductor wafer or its processed body (semiconductor), and floating may occur. Therefore, as a film for semiconductor back surface, by providing a core material with high moisture permeability on both sides, water vapor diffuses and this problem can be avoided. From such a viewpoint, a multilayer structure in which the film for semiconductor back surface 2 is formed on one surface or both surfaces of the core material may be used as the film for semiconductor back surface.
- the core material examples include a film (for example, a polyimide film, a polyester film, a polyethylene terephthalate film, a polyethylene naphthalate film, and a polycarbonate film), a resin substrate reinforced with glass fibers or plastic non-woven fibers, a silicon substrate, a glass substrate, or the like. Is mentioned.
- the thickness of the film 2 for semiconductor back surface is not particularly limited, but can be appropriately selected from a range of about 2 ⁇ m to 200 ⁇ m, for example. Further, the thickness is preferably about 4 ⁇ m to 160 ⁇ m, more preferably about 6 ⁇ m to 100 ⁇ m, and particularly preferably about 10 ⁇ m to 80 ⁇ m.
- the film for semiconductor back surface 2 has a tensile storage modulus at 23 ° C. in the uncured state of preferably 1.0 GPa to 3.0 GPa, more preferably 1.2 GPa to 2.9 GPa. .
- the tensile storage modulus at 23 ° C. in the uncured state is 1.0 to 3.0 GPa, the warp of the semiconductor chip can be suppressed.
- tackiness can be suppressed, sticking to a suction collet or the like when mounting a semiconductor chip can be suppressed.
- the tensile storage elastic modulus (23 ° C.) in the uncured state of the film for semiconductor back surface is the type and content of resin components (thermoplastic resin, thermosetting resin), the type and content of filler such as silica filler. It can be controlled by. In particular, it can be controlled by the content of the acrylic resin.
- the tensile storage elastic modulus was not laminated on the dicing tape 3, but an uncured semiconductor back film 2 was prepared, and a dynamic viscoelasticity measuring device “Solid Analyzer RS A2” manufactured by Rheometric was used.
- the tension mode the sample width: 10 mm, the sample length: 22.5 mm, the sample thickness: 0.2 mm, the frequency: 1 Hz, the heating rate: 10 ° C./min, a predetermined temperature under a nitrogen atmosphere ( 23 ° C.) and the obtained tensile storage modulus was obtained.
- the semiconductor back film 2 preferably has at least one surface protected by a separator (release liner) (not shown).
- a separator may be provided only on one surface of the film for semiconductor back surface, while in the case of a film for semiconductor back surface that is not integrated with the dicing tape, A separator may be provided on one or both sides of the film for semiconductor back surface.
- the separator has a function as a protective material for protecting the film for semiconductor back surface until it is practically used.
- the separator can be further used as a support base material when the semiconductor back surface film 2 is transferred to the adhesive layer 32 on the base material of the dicing tape.
- the separator is peeled off when the semiconductor wafer is stuck on the film for semiconductor back surface.
- the separator it is also possible to use polyethylene, polypropylene, plastic films (polyethylene terephthalate, etc.), paper or the like whose surface is coated with a release agent such as a fluorine release agent or a long-chain alkyl acrylate release agent.
- the separator can be formed by a conventionally known method. Further, the thickness of the separator is not particularly limited.
- the semiconductor back surface film 2 When the semiconductor back surface film 2 is not laminated on the dicing tape 3, the semiconductor back surface film 2 is wound in a roll using one separator having a release layer on both sides, and the release layer is provided on both sides. It may be protected by the separator which has, and may be protected by the separator which has a peeling layer in at least one surface.
- the light transmittance (visible light transmittance) of visible light (wavelength: 400 nm to 800 nm) in the film 2 for semiconductor back surface is not particularly limited, but is, for example, in the range of 20% or less (0% to 20%). It is preferably 10% or less (0% to 10%), particularly preferably 5% or less (0% to 5%). If the visible light transmittance of the film 2 for semiconductor back surface is larger than 20%, the semiconductor element may be adversely affected by the passage of light.
- the visible light transmittance (%) depends on the type and content of the resin component of the film 2 for semiconductor back surface, the type and content of colorant (pigment, dye, etc.), the content of inorganic filler, etc. Can be controlled.
- the visible light transmittance (%) of the film 2 for semiconductor back surface can be measured as follows. That is, a single film for semiconductor back surface 2 having a thickness (average thickness) of 20 ⁇ m is produced. Next, the film 2 for semiconductor back surface was irradiated with visible light having a wavelength of 400 nm to 800 nm [apparatus: visible light generator manufactured by Shimadzu Corporation (trade name “ABSORPTION SPECTRO PHOTOMETR”)] at a predetermined intensity and transmitted. Measure the intensity of visible light. Furthermore, the value of visible light transmittance can be determined from the intensity change before and after the visible light passes through the semiconductor back film 2.
- the visible light transmittance (%; wavelength: 20 ⁇ m) of the film 2 for semiconductor back surface is determined by the value of the visible light transmittance (%; wavelength: 400 nm to 800 nm) of the film 2 for semiconductor back surface. 400 nm to 800 nm) can also be derived. Further, in the present invention, the visible light transmittance (%) in the case of the film for semiconductor back surface 2 having a thickness of 20 ⁇ m is obtained, but the film for semiconductor back surface according to the present invention is limited to a film having a thickness of 20 ⁇ m. is not.
- the moisture absorption rate is lower. Specifically, the moisture absorption rate is preferably 1% by weight or less, more preferably 0.8% by weight or less. By making the moisture absorption rate 1% by weight or less, the laser marking property can be improved. Further, for example, in the reflow process, generation of voids between the film 2 for semiconductor back surface and the semiconductor element can be suppressed or prevented.
- the said moisture absorption is the value computed by the weight change before and behind leaving the film 2 for semiconductor back surfaces in the atmosphere of temperature 85 degreeC and relative humidity 85% RH for 168 hours.
- the moisture absorption rate is under an atmosphere of a temperature of 85 ° C. and a relative humidity of 85% RH with respect to the film for semiconductor back surface after thermosetting. Means the value when left for 168 hours. Moreover, the said moisture absorption rate can be adjusted by changing the addition amount of an inorganic filler, for example.
- the ratio of volatile components is small.
- the weight reduction rate (weight reduction ratio) of the film 2 for semiconductor back surface after the heat treatment is preferably 1% by weight or less, and more preferably 0.8% by weight or less.
- the heat treatment conditions are, for example, a heating temperature of 250 ° C. and a heating time of 1 hour.
- the weight reduction rate can be adjusted, for example, by adding an inorganic substance that can reduce the generation of cracks during lead-free solder reflow.
- the said weight reduction rate is the heating temperature 250 degreeC with respect to the film for semiconductor back surfaces after thermosetting, heating time 1 hour.
- the dicing tape 3 is configured by forming an adhesive layer 32 on a base material 31.
- the dicing tape 3 should just have the structure by which the base material 31 and the adhesive layer 32 were laminated
- the base material support base material
- the substrate 31 preferably has a radiation transparency.
- the substrate 31 examples include paper-based substrates such as paper; fiber-based substrates such as cloth, nonwoven fabric, felt, and net; metal-based substrates such as metal foils and metal plates; plastic films and sheets Plastic base materials; Rubber base materials such as rubber sheets; Foams such as foam sheets, and laminates thereof [particularly, laminates of plastic base materials and other base materials, and plastic films (or sheets) An appropriate thin leaf body such as a laminated body of each other] can be used.
- a plastic substrate such as a plastic film or sheet can be suitably used as the substrate.
- plastic material examples include olefin resins such as polyethylene (PE), polypropylene (PP), and ethylene-propylene copolymer; ethylene-vinyl acetate copolymer (EVA), ionomer resin, ethylene- Copolymers containing ethylene as a monomer component such as (meth) acrylic acid copolymers and ethylene- (meth) acrylic acid ester (random, alternating) copolymers; polyethylene terephthalate (PET), polyethylene naphthalate (PEN), Polyester such as polybutylene terephthalate (PBT); Acrylic resin; Polyvinyl chloride (PVC); Polyurethane; Polycarbonate; Polyphenylene sulfide (PPS); Amide resin such as polyamide (nylon) and wholly aromatic polyamide (aramid); Ether ether ketone (PEEK); polyimides; polyetherimides; polyvinylidene chloride; ABS (acrylonitrile - butadiene -
- the material of the base material 31 includes a polymer such as a crosslinked body of the resin.
- the plastic film may be used unstretched or may be uniaxially or biaxially stretched as necessary. According to the resin sheet imparted with heat shrinkability by stretching or the like, the adhesive area between the pressure-sensitive adhesive layer 32 and the semiconductor back surface film 2 is reduced by thermally shrinking the base material 31 after dicing, The collection can be facilitated.
- the surface of the base material 31 is chemically treated by conventional surface treatments such as chromic acid treatment, ozone exposure, flame exposure, high piezoelectric impact exposure, ionizing radiation treatment, etc. in order to improve adhesion and retention with adjacent layers.
- a physical treatment or a coating treatment with a primer for example, an adhesive substance described later can be performed.
- the base material 31 can be appropriately selected from the same type or different types, and can be used by blending several types as necessary.
- the base material 31 is provided with a vapor-deposited layer of a conductive material having a thickness of about 30 to 500 mm made of a metal, an alloy, an oxide of these, or the like on the base material 31 in order to impart an antistatic ability. be able to.
- the base material 31 may be a single layer or a multilayer of two or more types.
- the thickness of the base material 31 is not particularly limited and can be appropriately selected according to strength, flexibility, purpose of use, and the like, for example, generally 1000 ⁇ m or less (for example, 1 ⁇ m to 1000 ⁇ m), preferably 10 ⁇ m to 500 ⁇ m, more preferably 20 ⁇ m to 300 ⁇ m, particularly about 30 ⁇ m to 200 ⁇ m, but is not limited thereto.
- the base material 31 includes various additives (coloring agent, filler, plasticizer, anti-aging agent, antioxidant, surfactant, flame retardant, etc.) as long as the effects of the present invention are not impaired. It may be.
- the pressure-sensitive adhesive layer 32 is formed of a pressure-sensitive adhesive and has adhesiveness.
- Such an adhesive is not particularly limited, and can be appropriately selected from known adhesives.
- examples of the adhesive include acrylic adhesive, rubber adhesive, vinyl alkyl ether adhesive, silicone adhesive, polyester adhesive, polyamide adhesive, urethane adhesive, fluorine Type adhesives, styrene-diene block copolymer adhesives, and known adhesives such as a creep property-improving adhesive in which a hot-melt resin having a melting point of about 200 ° C.
- a pressure sensitive adhesive a radiation curable pressure sensitive adhesive (or energy ray curable pressure sensitive adhesive) or a thermally expandable pressure sensitive adhesive can be used.
- An adhesive can be used individually or in combination of 2 or more types.
- an acrylic pressure-sensitive adhesive or a rubber-based pressure-sensitive adhesive can be preferably used, and an acrylic pressure-sensitive adhesive is particularly preferable.
- an acrylic adhesive an acrylic adhesive based on an acrylic polymer (homopolymer or copolymer) using one or more (meth) acrylic acid alkyl esters as monomer components. Agents.
- Examples of the (meth) acrylic acid alkyl ester in the acrylic pressure-sensitive adhesive include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, isopropyl (meth) acrylate, and (meth) acrylic.
- the (meth) acrylic acid alkyl ester is preferably a (meth) acrylic acid alkyl ester having an alkyl group having 4 to 18 carbon atoms.
- the alkyl group of the (meth) acrylic acid alkyl ester may be either linear or branched.
- the said acrylic polymer is another monomer component (for example) copolymerizable with the said (meth) acrylic-acid alkylester as needed for the purpose of modification
- a unit corresponding to the copolymerizable monomer component may be included.
- copolymerizable monomer components include (meth) acrylic acid (acrylic acid, methacrylic acid), carboxyl such as carboxyethyl acrylate, carboxypentyl acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid.
- Acid anhydride group-containing monomer such as maleic anhydride, itaconic anhydride; hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, hydroxybutyl (meth) acrylate, hydroxy (meth) acrylate Hydroxyl group-containing monomers such as hexyl, hydroxyoctyl (meth) acrylate, hydroxydecyl (meth) acrylate, hydroxylauryl (meth) acrylate, (4-hydroxymethylcyclohexyl) methyl methacrylate; styrene sulfonic acid, Sulfonic acid group-containing monomers such as rylsulfonic acid, 2- (meth) acrylamide-2-methylpropanesulfonic acid, (meth) acrylamidepropanesulfonic acid, sulfopropyl (meth) acrylate, (meth) acryloyloxynaphthalenes
- Succinimide monomers such as N-imide
- glycol-based acrylic ester monomers such as (meth) acrylic acid polyethylene glycol, (meth) acrylic acid polypropylene glycol, (meth) acrylic acid methoxyethylene glycol, (meth) acrylic acid methoxypolypropylene glycol
- Acrylic acid ester monomer having heterocycle such as tetrahydrofurfuryl acrylate, fluorine (meth) acrylate, silicone (meth) acrylate, halogen atom, silicon atom, etc .
- a radiation curable pressure sensitive adhesive or energy beam curable pressure sensitive adhesive
- examples of the radiation curable pressure sensitive adhesive include a radical reactive carbon-carbon double bond having a polymer side chain or main chain.
- Intrinsic radiation curable adhesives that use polymers in the chain or at the end of the main chain as the base polymer, and radiation curable adhesives that contain UV-curable monomer or oligomer components in the adhesive It is done.
- the heat-expandable adhesive as an adhesive
- the heat-expandable adhesive containing an adhesive and a foaming agent especially heat-expandable microsphere
- the pressure-sensitive adhesive layer 32 has various additives (for example, a tackifier resin, a colorant, a thickener, an extender, a filler, a plasticizer, and an anti-aging agent as long as the effects of the present invention are not impaired. , Antioxidants, surfactants, cross-linking agents, etc.).
- additives for example, a tackifier resin, a colorant, a thickener, an extender, a filler, a plasticizer, and an anti-aging agent as long as the effects of the present invention are not impaired. , Antioxidants, surfactants, cross-linking agents, etc.).
- the crosslinking agent is not particularly limited, and a known crosslinking agent can be used. Specifically, as the crosslinking agent, an isocyanate crosslinking agent, an epoxy crosslinking agent, a melamine crosslinking agent, a peroxide crosslinking agent, a urea crosslinking agent, a metal alkoxide crosslinking agent, a metal chelate crosslinking agent. , Metal salt crosslinking agents, carbodiimide crosslinking agents, oxazoline crosslinking agents, aziridine crosslinking agents, amine crosslinking agents, and the like, and isocyanate crosslinking agents and epoxy crosslinking agents are preferred.
- a crosslinking agent can be used individually or in combination of 2 or more types. In addition, the usage-amount of a crosslinking agent is not restrict
- isocyanate-based crosslinking agent examples include lower aliphatic polyisocyanates such as 1,2-ethylene diisocyanate, 1,4-butylene diisocyanate, and 1,6-hexamethylene diisocyanate; cyclopentylene diisocyanate, cyclohexylene diisocyanate, Cycloaliphatic polyisocyanates such as isophorone diisocyanate, hydrogenated tolylene diisocyanate, hydrogenated xylene diisocyanate; 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 4,4'- Aromatic polyisocyanates such as diphenylmethane diisocyanate and xylylene diisocyanate, and the like, and trimethylolpropane / tolylene diisocyanate trimer adduct [Nippon Polyurethane Industry Co., Ltd.
- epoxy crosslinking agent examples include N, N, N ′, N′-tetraglycidyl-m-xylenediamine, diglycidylaniline, 1,3-bis (N, N-glycidylaminomethyl) cyclohexane, 1,6-hexanediol diglycidyl ether, neopentyl glycol diglycidyl ether, ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, sorbitol polyglycidyl ether, glycerol polyglycidyl ether , Pentaerythritol polyglycidyl ether, polyglycerol polyglycidyl ether, sorbitan polyglycidyl ether, trimethylolpropane poly In addition to lysidyl ether, a
- the pressure-sensitive adhesive layer 32 is formed by using, for example, a conventional method of forming a sheet-like layer by mixing a pressure-sensitive adhesive (pressure-sensitive adhesive) and, if necessary, a solvent or other additives. be able to. Specifically, for example, a method of applying a mixture containing a pressure-sensitive adhesive and, if necessary, a solvent and other additives onto the base material 31, and applying the mixture onto an appropriate separator (such as a release paper)
- the pressure-sensitive adhesive layer 32 can be formed by a method in which the pressure-sensitive adhesive layer 32 is formed and transferred (transferred) onto the substrate 31.
- the thickness of the adhesive layer 32 is not particularly limited, and is, for example, about 5 ⁇ m to 300 ⁇ m (preferably 5 ⁇ m to 200 ⁇ m, more preferably 5 ⁇ m to 100 ⁇ m, particularly preferably 7 ⁇ m to 50 ⁇ m). When the thickness of the pressure-sensitive adhesive layer 32 is within the above range, an appropriate pressure-sensitive adhesive force can be exhibited.
- the pressure-sensitive adhesive layer 32 may be either a single layer or multiple layers.
- the adhesive force (23 ° C., peel angle 180 °, peel speed 300 mm / min) of the adhesive layer 32 of the dicing tape 3 to the flip chip type semiconductor back film 2 is in the range of 0.02 N / 20 mm to 10 N / 20 mm.
- a range of 0.05 N / 20 mm to 5 N / 20 mm is more preferable.
- the flip chip type semiconductor back film 2 and the dicing tape integrated semiconductor back film 1 can have an antistatic ability. As a result, it is possible to prevent the circuit from being broken due to the generation of static electricity during the bonding and peeling, and the resulting charging of the semiconductor wafer or the like.
- the antistatic ability is imparted by a method of adding an antistatic agent or a conductive substance to the base material 31, the adhesive layer 32 or the semiconductor backside film 2, a conductive layer comprising a charge transfer complex or a metal film to the base material 31. It can be performed by an appropriate method, such as a method of attaching a mark. As these methods, a method in which impurity ions that may change the quality of the semiconductor wafer are less likely to be generated is preferable.
- the film 2 for flip chip type semiconductor back surfaces and the film 1 for semiconductor back surfaces integrated with a dicing tape may be formed in a form wound in a roll shape, or formed in a form in which sheets (films) are laminated. May be.
- it rolls in the state which protected the laminated body of the film 2 for semiconductor back surfaces, or the film 2 for semiconductor back surfaces, and the dicing tape 3 with the separator as needed.
- It can be produced as a film 2 for semiconductor back surface or a film 1 for semiconductor back surface integrated with dicing tape in a state or form wound in a roll shape.
- a base material 31 As the dicing tape-integrated film for semiconductor back surface 1 in a state or form wound in a roll shape, a base material 31, an adhesive layer 32 formed on one surface of the base material 31, and the adhesive You may be comprised with the film for semiconductor back surfaces formed on the agent layer 32, and the peeling process layer (back process layer) formed in the other surface of the said base material 31.
- FIG. 1 As the dicing tape-integrated film for semiconductor back surface 1 in a state or form wound in a roll shape, a base material 31, an adhesive layer 32 formed on one surface of the base material 31, and the adhesive You may be comprised with the film for semiconductor back surfaces formed on the agent layer 32, and the peeling process layer (back process layer) formed in the other surface of the said base material 31.
- the thickness of the dicing tape-integrated film for semiconductor back surface 1 (the thickness of the film for semiconductor back surface and the total thickness of the dicing tape composed of the base material 31 and the adhesive layer 32) is, for example, 8 ⁇ m to 1500 ⁇ m.
- the range is preferably 20 ⁇ m to 850 ⁇ m (more preferably 31 ⁇ m to 500 ⁇ m, particularly preferably 47 ⁇ m to 330 ⁇ m).
- the ratio of the thickness of the film for semiconductor back surface 2 to the thickness of the adhesive layer 32 of the dicing tape 3, the thickness of the film for semiconductor back surface 2, and the thickness of the dicing tape 3 By controlling the ratio with the thickness (total thickness of the base material 31 and the adhesive layer 32), the dicing property during the dicing process, the picking property during the pick-up process, etc. can be improved, and the dicing tape integrated semiconductor
- the back film 1 can be effectively used in a semiconductor wafer dicing process to a semiconductor chip flip chip bonding process.
- the base material 31 can be formed by a conventionally known film forming method.
- the film forming method include a calendar film forming method, a casting method in an organic solvent, an inflation extrusion method in a closed system, a T-die extrusion method, a co-extrusion method, and a dry lamination method.
- the pressure-sensitive adhesive composition is applied on the substrate 31 and dried (heat-crosslinked as necessary) to form the pressure-sensitive adhesive layer 32.
- the coating method include roll coating, screen coating, and gravure coating.
- the pressure-sensitive adhesive layer composition may be applied directly to the base material 31 to form the pressure-sensitive adhesive layer 32 on the base material 31.
- a release paper or the like that has been subjected to a release treatment on the surface of the pressure-sensitive adhesive composition.
- the pressure-sensitive adhesive layer 32 may be transferred to the substrate 31 after being applied to the substrate. Thereby, the dicing tape 3 in which the adhesive layer 32 is formed on the base material 31 is produced.
- the forming material for forming the film 2 for the semiconductor back surface is applied on the release paper so that the thickness after drying becomes a predetermined thickness, and further dried under predetermined conditions (in the case where thermosetting is necessary, If necessary, heat treatment is performed and drying is performed to form a coating layer.
- the semiconductor back surface film 2 is formed on the pressure-sensitive adhesive layer 32.
- it dries on predetermined conditions (In the case where thermosetting is required, it heat-processes as needed.
- the film for semiconductor back surface 2 can also be formed on the pressure-sensitive adhesive layer 32 by applying and drying.
- the dicing tape-integrated film for semiconductor back surface 1 according to the present invention can be obtained.
- heat-curing when heat-curing when forming the film 2 for semiconductor back surfaces, it is important to perform heat-curing to such an extent that it will be in the state of partial hardening, However Preferably heat-curing is not performed.
- the dicing tape-integrated film for semiconductor back surface 1 of the present invention can be suitably used for manufacturing a semiconductor device having a flip chip bonding process. That is, the dicing tape-integrated film for semiconductor back surface 1 of the present invention is used when manufacturing a flip-chip mounted semiconductor device, and the film for semiconductor back surface of the dicing tape-integrated film for semiconductor back surface 1 is formed on the back surface of the semiconductor chip.
- a flip-chip mounted semiconductor device is manufactured in a state or form in which 2 is adhered.
- the dicing tape-integrated film for semiconductor back surface 1 of the present invention is applied to a flip-chip mounted semiconductor device (a semiconductor device in a state or form in which the semiconductor chip is fixed to an adherend such as a substrate by a flip-chip bonding method). Can be used.
- the semiconductor back film 2 is a flip chip mounted semiconductor device (in a state where the semiconductor chip is fixed to an adherend such as a substrate or the like by a flip chip bonding method, similarly to the dicing tape integrated semiconductor back film 1. It can be used for the semiconductor device of the embodiment.
- the semiconductor wafer is not particularly limited as long as it is a known or commonly used semiconductor wafer, and can be appropriately selected from semiconductor wafers of various materials.
- a silicon wafer can be suitably used as the semiconductor wafer.
- FIG. 2 is a schematic cross-sectional view showing a method for manufacturing a semiconductor device when the dicing tape-integrated film for semiconductor back surface 1 is used.
- the semiconductor device manufacturing method can manufacture a semiconductor device using the dicing tape-integrated film for semiconductor back surface 1. Specifically, a step of attaching a semiconductor wafer on the dicing tape-integrated film for semiconductor back surface, a step of dicing the semiconductor wafer, a step of picking up a semiconductor element obtained by dicing, and the semiconductor element And at least a flip-chip connection process on the adherend.
- a semiconductor device can be manufactured by the method according to the manufacturing method of the semiconductor device at the time of using the film 1 for semiconductor back surfaces integrated with a dicing tape.
- the semiconductor back surface film 2 can be used as a dicing tape-integrated film for semiconductor back surface, which is bonded to a dicing tape and integrated with the dicing tape.
- the manufacturing method of the semiconductor device using the film for semiconductor back surface 2 further includes the step of the method for manufacturing the film for semiconductor back surface integrated with the dicing tape, and further includes a film for semiconductor back surface and a dicing tape. And a dicing tape pressure-sensitive adhesive layer in contact with each other.
- the film 2 for a semiconductor back surface can be used by being attached to a semiconductor wafer without being integrated with a dicing tape.
- the manufacturing method of the semiconductor device using the film for semiconductor back surface 2 includes a step of attaching a semiconductor wafer on the film for dicing tape integrated semiconductor back surface in the method for manufacturing the film for semiconductor back integrated dicing tape, A process of adhering a film for semiconductor back surface to a semiconductor wafer, a process of adhering a dicing tape to a film for semiconductor back surface adhered to a semiconductor wafer in a form in which the film for semiconductor back surface and the adhesive layer of the dicing tape are in contact with each other
- the manufacturing method is as follows.
- the film 2 for a semiconductor back surface can be used by being attached to a semiconductor chip obtained by dividing a semiconductor wafer.
- a method for manufacturing a semiconductor device using the film for semiconductor back surface 2 includes, for example, a step of sticking a dicing tape to a semiconductor wafer, a step of dicing the semiconductor wafer, and a semiconductor element obtained by dicing.
- the manufacturing method may include at least a step of performing a flip-chip connection of the semiconductor element on the adherend, and a step of attaching a film for semiconductor back surface to the semiconductor element.
- a separator arbitrarily provided on the film 2 for semiconductor back surface of the film 1 for semiconductor back surface integrated with dicing tape is appropriately peeled off, and the film 2 for semiconductor back surface is formed.
- the semiconductor wafer 4 is attached, and this is adhered and held and fixed (mounting process).
- the film 2 for semiconductor back surface is in an uncured state (including a semi-cured state).
- the dicing tape-integrated film for semiconductor back surface 1 is attached to the back surface of the semiconductor wafer 4.
- the back surface of the semiconductor wafer 4 means a surface opposite to the circuit surface (also referred to as a non-circuit surface or a non-electrode forming surface).
- the sticking method is not specifically limited, the method by pressure bonding is preferable.
- the crimping is usually performed while pressing with a pressing means such as a crimping roll.
- the semiconductor wafer 4 is diced. As a result, the semiconductor wafer 4 is cut into a predetermined size and divided into pieces (small pieces), whereby the semiconductor chip 5 is manufactured. Dicing is performed according to a conventional method from the circuit surface side of the semiconductor wafer 4, for example. Further, in this step, for example, a cutting method called full cut in which cutting is performed up to the dicing tape-integrated film for semiconductor back surface 1 can be employed. It does not specifically limit as a dicing apparatus used at this process, A conventionally well-known thing can be used.
- the semiconductor wafer 4 is bonded and fixed with excellent adhesion by the dicing tape-integrated semiconductor back surface film 1 having the semiconductor back surface film, chip chipping and chip jumping can be suppressed, and the semiconductor wafer 4 is damaged. Can also be suppressed.
- the film 2 for semiconductor back surface is formed with the resin composition containing an epoxy resin, even if it cut
- the expanding can be performed using a conventionally known expanding apparatus.
- the expander supports a donut-shaped outer ring that can push down the dicing tape-integrated semiconductor back surface film 1 downward through the dicing ring, and a dicing tape-integrated semiconductor back surface film that is smaller in diameter than the outer ring. And an inner ring.
- the semiconductor chip 5 is picked up as shown in FIG.
- the film 2 is peeled off from the dicing tape 3.
- the pickup method is not particularly limited, and various conventionally known methods can be employed. For example, a method of pushing up individual semiconductor chips 5 from the substrate 31 side of the dicing tape-integrated film for semiconductor back surface 1 with a needle and picking up the pushed-up semiconductor chips 5 with a pickup device or the like can be mentioned. Note that the back surface of the picked-up semiconductor chip 5 is protected by the film 2 for semiconductor back surface.
- the picked-up semiconductor chip 5 is fixed to an adherend such as a substrate by a flip chip bonding method (flip chip mounting method).
- the semiconductor chip 5 is always placed on the adherend 6 such that the circuit surface (also referred to as a surface, a circuit pattern formation surface, an electrode formation surface, etc.) of the semiconductor chip 5 faces the adherend 6.
- the circuit surface also referred to as a surface, a circuit pattern formation surface, an electrode formation surface, etc.
- the bump 51 formed on the circuit surface side of the semiconductor chip 5 is brought into contact with a bonding conductive material (solder or the like) 61 attached to the connection pad of the adherend 6 while pressing the conductive material.
- the semiconductor chip 5 and the adherend 6 By melting, it is possible to secure electrical continuity between the semiconductor chip 5 and the adherend 6 and fix the semiconductor chip 5 to the adherend 6 (flip chip bonding step). At this time, a gap is formed between the semiconductor chip 5 and the adherend 6, and the air gap distance is generally about 30 ⁇ m to 300 ⁇ m. After the flip chip bonding (flip chip connection) of the semiconductor chip 5 on the adherend 6, the facing surface and the gap between the semiconductor chip 5 and the adherend 6 are cleaned, and a sealing material (sealing) is placed in the gap. It is important to seal by filling with a stop resin or the like.
- various substrates such as a lead frame and a circuit substrate (such as a wiring circuit substrate) can be used.
- the material of such a substrate is not particularly limited, and examples thereof include a ceramic substrate and a plastic substrate.
- the plastic substrate include an epoxy substrate, a bismaleimide triazine substrate, and a polyimide substrate.
- the material of the bump or the conductive material is not particularly limited, and for example, a tin-lead metal material, a tin-silver metal material, a tin-silver-copper metal material, a tin-zinc metal Materials, solders (alloys) such as tin-zinc-bismuth metal materials, gold metal materials, copper metal materials, and the like.
- the conductive material is melted to connect the bumps on the circuit surface side of the semiconductor chip 5 and the conductive material on the surface of the adherend 6.
- the temperature is usually about 260 ° C. (for example, 250 ° C. to 300 ° C.).
- the dicing tape-integrated film for semiconductor back surface of the present invention can have heat resistance that can withstand high temperatures in the flip chip bonding process by forming the film for semiconductor back surface with an epoxy resin or the like.
- the cleaning liquid used for the cleaning is not particularly limited, and examples thereof include an organic cleaning liquid and an aqueous cleaning liquid.
- the film for semiconductor back surface in the dicing tape-integrated film for semiconductor back surface of the present invention has solvent resistance to the cleaning liquid, and has substantially no solubility in these cleaning liquids. Therefore, as described above, various cleaning liquids can be used as the cleaning liquid, and no special cleaning liquid is required, and cleaning can be performed by a conventional method.
- a sealing step is performed to seal the gap between the flip chip bonded semiconductor chip 5 and the adherend 6.
- the sealing step is performed using a sealing resin.
- the sealing conditions at this time are not particularly limited.
- the sealing resin is thermally cured by heating at 175 ° C. for 60 seconds to 90 seconds, but the present invention is not limited to this. For example, it can be cured at 165 ° C. to 185 ° C. for several minutes.
- the heat treatment in this step not only the sealing resin but also the thermosetting of the semiconductor back surface film 2 can be performed simultaneously. Thereby, both sealing resin and the film 2 for semiconductor back surfaces carry out hardening shrinkage with progress of thermosetting.
- the stress applied to the semiconductor chip 5 due to the curing shrinkage of the sealing resin can be offset or alleviated by the semiconductor back film 2 being cured and shrunk.
- the film 2 for semiconductor back surfaces can be thermoset completely or almost completely by the said process, and can be stuck on the back surface of a semiconductor element with the outstanding adhesiveness.
- the film for semiconductor back surface 2 according to the present invention can be thermally cured together with the sealing material in the sealing step even in an uncured state, the film for semiconductor back surface 2 is thermally cured. There is no need to add a new process.
- the sealing resin is not particularly limited as long as it is an insulating resin (insulating resin), and can be appropriately selected from sealing materials such as known sealing resins. Is more preferable.
- sealing resin the resin composition containing an epoxy resin etc. are mentioned, for example.
- the epoxy resin include the epoxy resins exemplified above.
- a thermosetting resin other than an epoxy resin such as a phenol resin
- a thermoplastic resin may be included as a resin component. Good.
- a phenol resin it can utilize also as a hardening
- the semiconductor device manufactured using the dicing tape-integrated film 1 for semiconductor back surface and the film 2 for semiconductor back surface has the film for semiconductor back surface attached to the back surface of the semiconductor chip.
- Various markings can be applied with excellent visibility.
- marking method is a laser marking method
- marking can be performed with an excellent contrast ratio, and various information (character information, Zuken information, etc.) applied by laser marking can be seen well. is there.
- a well-known laser marking apparatus can be utilized.
- the laser various lasers such as a gas laser, a solid laser, and a liquid laser can be used.
- the gas laser is not particularly limited, and a known gas laser can be used, but a carbon dioxide laser (CO 2 laser), an excimer laser (ArF laser, KrF laser, XeCl laser, XeF laser). Etc.) are preferred.
- the solid laser is not particularly limited, and a known solid laser can be used, but a YAG laser (Nd: YAG laser or the like) and a YVO 4 laser are preferable.
- the semiconductor device manufactured using the dicing tape-integrated film for semiconductor back surface and the film for semiconductor back surface of the present invention is a semiconductor device mounted by a flip chip mounting method, the semiconductor device mounted by a die bonding mounting method Instead, the shape is reduced in thickness and size. For this reason, it can use suitably as various electronic devices and electronic components, or those materials and members.
- a so-called “mobile phone” or “PHS” a so-called “mobile phone” or “PHS”
- a small computer for example, a so-called “PDA” (personal digital assistant)
- PDA personal digital assistant
- Netbook a so-called “Netbook (trademark)”
- wearable computer etc.
- mobile phone and small electronic devices integrated with a computer
- digital camera so-called “digital”
- Mobile devices such as video cameras, small TVs, small game devices, small digital audio players, so-called “electronic notebooks”, so-called “electronic dictionaries”, so-called “electronic books” electronic device terminals, small digital-type watches, etc.
- Type electronic devices may be an electronic device other than a mobile type (such as a setting type) (for example, a so-called “disc top PC”, a flat-screen TV, a recording / playback electronic device (hard disk recorder, DVD player, etc.), a projector, a micromachine, etc.) .
- a mobile type such as a setting type
- Examples of materials and members of electronic components or electronic devices / electronic components include so-called “CPU” members, members of various storage devices (so-called “memory”, hard disks, etc.), and the like.
- solid content means the total of resin solid content, spherical silica, and dye.
- solid content concentration means weight% of solid content when the sum total of methyl ethyl ketone (solvent) and the said solid content is made into the whole.
- the adhesive composition solution A was applied as a release liner (separator) on a release film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m, and then dried at 130 ° C. for 2 minutes. An adhesive sheet A having a thickness of 30 ⁇ m was produced.
- Adhesive sheet A was placed on a pressure-sensitive adhesive layer of a dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet A.
- the adhesive composition solution B was applied as a release liner (separator) on a release film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m, and then dried at 130 ° C. for 2 minutes to obtain a thickness.
- An adhesive sheet B having a thickness of 30 ⁇ m was produced.
- Adhesive sheet B was placed on a pressure-sensitive adhesive layer of a dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet B.
- the adhesive composition solution C was applied as a release liner (separator) on a release film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m, and then dried at 130 ° C. for 2 minutes. An adhesive sheet C having a thickness of 30 ⁇ m was produced.
- Adhesive sheet C was placed on a pressure-sensitive adhesive layer of a dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet C.
- Example 4 ⁇ Preparation of adhesive sheet> Acrylic ester polymer based on ethyl acrylate-methyl methacrylate (trade name “Paracron W-197CM”, manufactured by Negami Kogyo Co., Ltd.): 100 parts epoxy resin (trade name “Epicoat 1004”, JER 70 parts, phenol resin (trade name “Millex XLC-4L”, manufactured by Mitsui Chemicals): 75 parts, spherical silica filler having an average particle size of 0.05 ⁇ m and a maximum particle size of 0.3 ⁇ m or less , Manufactured by Admatechs Co., Ltd .: 230 parts, dye 1 (trade name “OIL GREEN 502”, manufactured by Orient Chemical Co., Ltd.): 12 parts, and dye 2 (trade name “OIL BLACK BS”, Orient Chemical Industry Co., Ltd.) (Manufactured by the company): 24 parts is dissolved in methyl ethyl ketone and the solid content concentration is 23.
- the adhesive composition solution D was applied as a release liner (separator) onto a release treatment film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m and then dried at 130 ° C. for 2 minutes to obtain a thickness.
- An adhesive sheet D having a thickness of 30 ⁇ m was produced.
- Adhesive sheet D was placed on the pressure-sensitive adhesive layer of a dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet D.
- the adhesive composition solution E was applied as a release liner (separator) onto a release treatment film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m and then dried at 130 ° C. for 2 minutes to obtain a thickness.
- An adhesive sheet E having a thickness of 30 ⁇ m was produced.
- Adhesive sheet E was placed on a pressure-sensitive adhesive layer of a dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet E.
- Comparative Example 1 ⁇ Production of dicing tape integrated adhesive sheet> Instead of adding 69 parts of a spherical silica filler having an average particle diameter of 0.05 ⁇ m and a maximum particle diameter of 0.3 ⁇ m or less (manufactured by Admatex Co., Ltd.), a spherical silica filler having an average particle diameter of 0.5 ⁇ m (trade name)
- the dicing tape-integrated adhesive sheet F according to Comparative Example 1 is the same as the dicing tape-integrated adhesive sheet A according to Example 1 except that 134 parts of “SO-25R” (manufactured by Admatechs Co., Ltd.) is added. Produced.
- Adhesive sheet G was placed on a pressure-sensitive adhesive layer of a dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet G.
- the adhesive composition solution H was applied as a release liner (separator) on a release treatment film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m and then dried at 130 ° C. for 2 minutes to obtain a thickness.
- An adhesive sheet H having a thickness of 30 ⁇ m was produced.
- Adhesive sheet H was placed on the pressure-sensitive adhesive layer of dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape integrated adhesive sheet H.
- the adhesive composition solution I was applied as a release liner (separator) on a release treatment film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m after silicone release treatment, the adhesive composition solution I was dried at 130 ° C. for 2 minutes. An adhesive sheet I having a thickness of 30 ⁇ m was produced.
- Adhesive sheet I was placed on a pressure-sensitive adhesive layer of dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of base material: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet I.
- the adhesive composition solution J was applied as a release liner (separator) onto a release treatment film made of a polyethylene terephthalate film having a thickness of 50 ⁇ m and then dried at 130 ° C. for 2 minutes to obtain a thickness.
- An adhesive sheet J having a thickness of 30 ⁇ m was prepared.
- Adhesive sheet J was placed on a pressure-sensitive adhesive layer of a dicing tape (trade name “V-8-T”, manufactured by Nitto Denko Corporation; average thickness of substrate: 65 ⁇ m, average thickness of pressure-sensitive adhesive layer: 10 ⁇ m). Bonding was performed using a hand roller to prepare a dicing tape-integrated adhesive sheet J.
- a 100 ⁇ m thick silicon wafer was heated to 80 ° C. on a hot plate.
- the dicing tape integrated adhesive sheet produced in the example and the comparative example is placed on the silicon wafer so that the adhesive sheet surface of the dicing tape integrated adhesive sheet and the silicon wafer face each other, and is adhered by a hand roller.
- the silicon wafer was diced into 10 mm ⁇ 10 mm together with the adhesive sheet with a dicer (manufactured by Disco Corporation) to obtain a chip with an adhesive sheet.
- tip with an adhesive sheet was peeled from the dicing tape, and the chip
- the chip with an adhesive sheet for evaluation was placed on a flat table so that the adhesive sheet was on the bottom surface, and the thickness was measured with a contact-type dial gauge. The thickness was measured as the thickness from the base surface to the farthest part. Next, a value obtained by subtracting the wafer thickness: 100 ⁇ m and the adhesive sheet thickness: 30 ⁇ m from the obtained measured thickness was evaluated as a warp amount, and a case where the warp amount was less than 100 ⁇ m was evaluated as “ ⁇ ” and a case where the warp amount was 100 ⁇ m or more was evaluated as “X”. The results are shown in Table 2.
- tip with the adhesive sheet for evaluation which concerns on an Example and a comparative example was obtained by the method similar to the evaluation of the said curvature.
- a chip with an adhesive sheet for evaluation is placed so that the adhesive sheet is on the upper surface, and laser printing is performed using a laser printing apparatus (trade name “MD-S9900”, manufactured by KEYENCE) under the following irradiation conditions. did.
- Laser printing irradiation conditions Laser wavelength: 532nm Laser power: 1.2W Frequency: 32kHz
- a laser-printed adhesive sheet is irradiated with oblique illumination from all directions on the adhesive sheet surface using a KEYENCE device name: CA-DDW8, and a CCD camera (device name: CV-0350) (Keyence Corporation).
- the reflected light was captured.
- the brightness of the reflected light taken in was measured using a device name: CV-5000 manufactured by KEYENCE Corporation.
- the brightness measurement was performed on both the laser printing part and the non-printing part.
- the lightness is a value in which white is 100% and black is 0%, and in this specification, the value is measured using the above-mentioned KEYENCE device name, CV-5000.
- the difference between the lightness of the laser-printed portion and the lightness of the non-printed portion was defined as contrast [%], and the case of 40% or more was evaluated as ⁇ , and the case of less than 40% was evaluated as ⁇ .
- the results are shown in Table 2.
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Abstract
Description
平均粒子径が0.3μm以下のフィラーとアクリル樹脂とを含有し、
前記フィラーの含有量が、接着シート全体に対して20~45重量%の範囲内であり、
前記アクリル樹脂の含有量が、全樹脂成分に対して40~70重量%の範囲内であることを特徴とする。
また、アクリル樹脂が、全樹脂成分に対して40重量%以上含有されているため、半導体チップの反りが抑制することができる。また、アクリル樹脂の含有量が、全樹脂成分に対して70重量%以下であるため、タック性を抑制することができる。その結果、半導体チップ実装時の吸着コレット等への固着が抑制できる。
平均粒子径が0.3μm以下のようなフィラー(以下、ナノフィラーともいう)を用いる場合、平均粒子径が0.3μmより大きいフィラーと比較して、フィラーの表面積が大きいことから、樹脂との接触面積や、フィラー同士の接触面積が増加し、弾性率が高くなる傾向となる。そのため、ナノフィラーを含有する接着シートを用いて製造した半導体装置に大きな反りが発生し易い。しかしながら、本発明では、アクリル樹脂の含有量を上記範囲内とすることにより、弾性率を制御し、反りを抑制している。
このように、本発明では、平均粒子径が0.3μm以下のフィラーを接着シート全体に対して20~45重量%の範囲内含有させることによりマーキングした際のマーキングコントラストを高くするとともに、アクリル樹脂を全樹脂成分に対して40~70重量%の範囲内で含有させることより、ナノフィラーを用いる際に発生し得る反りを抑制することが可能となる。
なお、本明細書において、「全樹脂成分」とは、フィラーを除いた樹脂成分全体(染料を含む場合はフィラー及び染料を除く樹脂成分全体)をいう。
本発明に係る半導体装置の製造方法は、前記に記載のダイシングテープ一体型接着シートを用いた半導体装置の製造方法であって、
前記ダイシングテープ一体型接着シートにおける接着シート上に半導体ウエハを貼着する工程と、
前記半導体ウエハをダイシングして半導体素子を形成する工程と、
前記半導体素子を前記ダイシングテープ一体型接着シートとともに、ダイシングテープの粘着剤層から剥離する工程と、
前記半導体素子を被着体上にフリップチップ接続する工程とを具備することを特徴とする。
図1で示されるように、ダイシングテープ一体型半導体裏面用フィルム1は、基材31上に粘着剤層32が設けられたダイシングテープ3と、前記粘着剤層上に設けられたフリップチップ型半導体裏面用フィルム(以下、「半導体裏面用フィルム」という場合がある)2とを備える構成である。なお、ダイシングテープ一体型半導体裏面用フィルム1は、本発明のダイシングテープ一体型接着シートの一実施形態に相当する。また、本発明のダイシングテープ一体型半導体裏面用フィルムは、図1で示されているように、ダイシングテープ3の粘着剤層32上において、半導体ウエハの貼着部分に対応する部分33のみに半導体裏面用フィルム2が形成された構成であってもよいが、粘着剤層32の全面に半導体裏面用フィルムが形成された構成でもよく、また、半導体ウエハの貼着部分に対応する部分33より大きく且つ粘着剤層32の全面よりも小さい部分に半導体裏面用フィルムが形成された構成でもよい。なお、半導体裏面用フィルム2の表面(ウエハの裏面に貼着される側の表面)は、ウエハ裏面に貼着されるまでの間、セパレータ等により保護されていてもよい。
半導体裏面用フィルム2はフィルム状の形態を有している。半導体裏面用フィルム2は、通常、製品としてのダイシングテープ一体型半導体裏面用フィルムの形態では、未硬化状態(半硬化状態を含む)であり、ダイシングテープ一体型半導体裏面用フィルムを半導体ウエハに貼着させた後に熱硬化される(詳細については後述する)。
また、前記フィラーの含有量は、半導体裏面用フィルム2全体に対して20~45重量%の範囲内で含有されている。前記フィラーの含有量は、25~40重量%の範囲内であることがより好ましい。なお、半導体裏面用フィルム全体とは、樹脂成分、及び、フィラーを含む半導体裏面用フィルム全体をいい、染料を含む場合は、樹脂成分、フィラー、及び、染料を含む半導体裏面用フィルム全体をいう。
平均粒子径が0.3μm以下のフィラーが半導体裏面用フィルム2全体に対して20~45重量%の範囲内で含有されているため、マーキング加工によってフィラー表面が半導体裏面用フィルム2の表面に露出されると、露出部の表面凹凸は細かくなる。そのため、マーキングの読み取り時における、斜光照明の反射光量が増大し、マーキング加工部の明度が増加する。その結果、マーキングした際のマーキングコントラストを高くすることができる。
このように、本実施形態に係る半導体裏面用フィルム2では、平均粒子径が0.3μm以下のフィラーを半導体裏面用フィルム2全体に対して20~45重量%の範囲内含有させることによりマーキングした際のマーキングコントラストを高くするとともに、アクリル樹脂を全樹脂成分に対して40~70重量%の範囲内で含有させることより、ナノフィラーを用いる際に発生し得る反りを抑制することが可能となる。
<ゲル分率の測定方法>
半導体裏面用フィルムから約0.1gをサンプリングして精秤し(試料の重量)、該サンプルをメッシュ状シートで包んだ後、約50mlのトルエン中に室温で1週間浸漬させる。その後、溶剤不溶分(メッシュ状シートの内容物)をトルエンから取り出し、130℃で約2時間乾燥させ、乾燥後の溶剤不溶分を秤量し(浸漬・乾燥後の重量)、下記式(a)よりゲル分率(重量%)を算出する。
ゲル分率(重量%)=[(浸漬・乾燥後の重量)/(試料の重量)]×100 (a)
前記ダイシングテープ3は、基材31上に粘着剤層32が形成されて構成されている。このように、ダイシングテープ3は、基材31と、粘着剤層32とが積層された構成を有していればよい。基材(支持基材)は粘着剤層等の支持母体として用いることができる。前記基材31は放射線透過性を有していることが好ましい。前記基材31としては、例えば、紙などの紙系基材;布、不織布、フェルト、ネットなどの繊維系基材;金属箔、金属板などの金属系基材;プラスチックのフィルムやシートなどのプラスチック系基材;ゴムシートなどのゴム系基材;発泡シートなどの発泡体や、これらの積層体[特に、プラスチック系基材と他の基材との積層体や、プラスチックフィルム(又はシート)同士の積層体など]等の適宜な薄葉体を用いることができる。本発明では、基材としては、プラスチックのフィルムやシートなどのプラスチック系基材を好適に用いることができる。このようなプラスチック材における素材としては、例えば、ポリエチレン(PE)、ポリプロピレン(PP)、エチレン-プロピレン共重合体等のオレフィン系樹脂;エチレン-酢酸ビニル共重合体(EVA)、アイオノマー樹脂、エチレン-(メタ)アクリル酸共重合体、エチレン-(メタ)アクリル酸エステル(ランダム、交互)共重合体等のエチレンをモノマー成分とする共重合体;ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)、ポリブチレンテレフタレート(PBT)等のポリエステル;アクリル系樹脂;ポリ塩化ビニル(PVC);ポリウレタン;ポリカーボネート;ポリフェニレンスルフィド(PPS);ポリアミド(ナイロン)、全芳香族ポリアミド(アラミド)等のアミド系樹脂;ポリエーテルエーテルケトン(PEEK);ポリイミド;ポリエーテルイミド;ポリ塩化ビニリデン;ABS(アクリロニトリル-ブタジエン-スチレン共重合体);セルロース系樹脂;シリコーン樹脂;フッ素樹脂などが挙げられる。
本実施の形態に係るダイシングテープ一体型半導体裏面用フィルムの製造方法について、図1に示すダイシングテープ一体型半導体裏面用フィルム1を例にして説明する。先ず、基材31は、従来公知の製膜方法により製膜することができる。当該製膜方法としては、例えばカレンダー製膜法、有機溶媒中でのキャスティング法、密閉系でのインフレーション押出法、Tダイ押出法、共押出し法、ドライラミネート法等が例示できる。
半導体ウエハとしては、公知乃至慣用の半導体ウエハであれば特に制限されず、各種素材の半導体ウエハから適宜選択して用いることができる。本発明では、半導体ウエハとしては、シリコンウエハを好適に用いることができる。
本実施の形態に係る半導体装置の製造方法について、図2を参照しながら以下に説明する。図2は、前記ダイシングテープ一体型半導体裏面用フィルム1を用いた場合の半導体装置の製造方法を示す断面模式図である。
先ず、図2(a)で示されるように、ダイシングテープ一体型半導体裏面用フィルム1の半導体裏面用フィルム2上に任意に設けられたセパレータを適宜に剥離し、当該半導体裏面用フィルム2上に半導体ウエハ4を貼着して、これを接着保持させ固定する(マウント工程)。このとき前記半導体裏面用フィルム2は未硬化状態(半硬化状態を含む)にある。また、ダイシングテープ一体型半導体裏面用フィルム1は、半導体ウエハ4の裏面に貼着される。半導体ウエハ4の裏面とは、回路面とは反対側の面(非回路面、非電極形成面などとも称される)を意味する。貼着方法は特に限定されないが、圧着による方法が好ましい。圧着は、通常、圧着ロール等の押圧手段により押圧しながら行われる。
次に、図2(b)で示されるように、半導体ウエハ4のダイシングを行う。これにより、半導体ウエハ4を所定のサイズに切断して個片化(小片化)し、半導体チップ5を製造する。ダイシングは、例えば、半導体ウエハ4の回路面側から常法に従い行われる。また、本工程では、例えば、ダイシングテープ一体型半導体裏面用フィルム1まで切込みを行うフルカットと呼ばれる切断方式等を採用できる。本工程で用いるダイシング装置としては特に限定されず、従来公知のものを用いることができる。また、半導体ウエハ4は、半導体裏面用フィルムを有するダイシングテープ一体型半導体裏面用フィルム1により優れた密着性で接着固定されているので、チップ欠けやチップ飛びを抑制できると共に、半導体ウエハ4の破損も抑制できる。なお、半導体裏面用フィルム2がエポキシ樹脂を含む樹脂組成物により形成されていると、ダイシングにより切断されても、その切断面において半導体裏面用フィルムの接着剤層の糊はみ出しが生じるのを抑制又は防止することができる。その結果、切断面同士が再付着(ブロッキング)することを抑制又は防止することができ、後述のピックアップを一層良好に行うことができる。
ダイシングテープ一体型半導体裏面用フィルム1に接着固定された半導体チップ5を回収する為に、図2(c)で示されるように、半導体チップ5のピックアップを行って、半導体チップ5を半導体裏面用フィルム2とともにダイシングテープ3より剥離させる。ピックアップの方法としては特に限定されず、従来公知の種々の方法を採用できる。例えば、個々の半導体チップ5をダイシングテープ一体型半導体裏面用フィルム1の基材31側からニードルによって突き上げ、突き上げられた半導体チップ5をピックアップ装置によってピックアップする方法等が挙げられる。なお、ピックアップされた半導体チップ5は、その裏面が半導体裏面用フィルム2により保護されている。
ピックアップした半導体チップ5は、図2(d)で示されるように、基板等の被着体に、フリップチップボンディング方式(フリップチップ実装方式)により固定させる。具体的には、半導体チップ5を、半導体チップ5の回路面(表面、回路パターン形成面、電極形成面などとも称される)が被着体6と対向する形態で、被着体6に常法に従い固定させる。例えば、半導体チップ5の回路面側に形成されているバンプ51を、被着体6の接続パッドに被着された接合用の導電材(半田など)61に接触させて押圧しながら導電材を溶融させることにより、半導体チップ5と被着体6との電気的導通を確保し、半導体チップ5を被着体6に固定させることができる(フリップチップボンディング工程)。このとき、半導体チップ5と被着体6との間には空隙が形成されており、その空隙間距離は、一般的に30μm~300μm程度である。尚、半導体チップ5を被着体6上にフリップチップボンディング(フリップチップ接続)した後は、半導体チップ5と被着体6との対向面や間隙を洗浄し、該間隙に封止材(封止樹脂など)を充填させて封止することが重要である。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):21部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):22部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):69部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):5部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):11部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Aを調製した。なお、本実施例において、固形分とは、樹脂の固形分と球状シリカと染料との合計を意味する。また、固形分濃度とは、メチルエチルケトン(溶媒)と上記固形分との合計を全体としたときの固形分の重量%を意味する。
接着シートAを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートAを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):21部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):22部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):134部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):7部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):14部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Bを調製した。
接着シートBを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートBを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):21部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):22部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):40部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):4部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):10部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Cを調製した。
接着シートCを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートCを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):70部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):75部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):230部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):12部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):24部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Dを調製した。
接着シートDを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートDを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):70部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):75部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):68部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):7部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):17部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Eを調製した。
接着シートEを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートEを作製した。
<ダイシングテープ一体型接着シートの作製>
平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製)を69部添加するのに代えて、平均粒子径0.5μmの球状シリカフィラー(商品名「SO-25R」、株式会社アドマテックス製)を134部添加したこと以外は、実施例1に係るダイシングテープ一体型接着シートAと同様にして比較例1に係るダイシングテープ一体型接着シートFを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):70部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):75部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):47部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):6部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):16部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Gを調製した。
接着シートGを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートGを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):70部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):75部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):286部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):13部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):27部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Hを調製した。
接着シートHを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートHを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):100部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):107部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):85部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):9部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):21部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Iを調製した。
接着シートIを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートIを作製した。
<接着シートの作製>
アクリル酸エチル-メチルメタクリレートを主成分とするアクリル酸エステル系ポリマー(商品名「パラクロンW-197CM」、根上工業株式会社製):100部に対して、エポキシ樹脂(商品名「エピコート1004」、JER株式会社製):12部、フェノール樹脂(商品名「ミレックスXLC-4L、」三井化学株式会社製):13部、平均粒子径0.05μmであり且つ最大粒子径0.3μm以下の球状シリカフィラー、株式会社アドマテックス製):118部、染料1(商品名「OIL GREEN 502」、オリエント化学工業株式会社製):6部、及び、染料2(商品名「OIL BLACK BS」、オリエント化学工業株式会社製):13部をメチルエチルケトンに溶解して、固形分濃度が23.6重量%となる接着剤組成物溶液Jを調製した。
接着シートJを、ダイシングテープ(商品名「V-8-T」、日東電工株式会社製;基材の平均厚さ:65μm、粘着剤層の平均厚さ:10μm)の粘着剤層上に、ハンドローラーを用いて貼り合せ、ダイシングテープ一体型接着シートJを作製した。
まず、ホットプレート上で厚さ100μmのシリコンウエハを80℃に加熱した。次に、実施例、及び、比較例で作製したダイシングテープ一体型接着シートを、ダイシングテープ一体型接着シートの接着シート面とシリコンウエハとが対向するようにシリコンウエハ上に置き、ハンドローラーで貼り合わせた。次に、ダイサー(ディスコ社製)でシリコンウエハを接着シートと共に10mm×10mmに個片化し、接着シート付きチップとした。次に、接着シート付きチップをダイシングテープから剥離し、その後、165℃で2時間硬化することで評価用の接着シート付きチップを得た。
まず、上記反りの評価と同様の方法で、実施例、及び、比較例に係る評価用の接着シート付きチップを得た。次に、評価用の接着シート付きチップを接着シートが上面となるように置き、レーザー印字装置(商品名「MD-S9900」、KEYENCE社製)を用いて、下記の照射条件にて、レーザー印字した。
レーザー波長:532nm
レーザーパワー:1.2W
周波数:32kHz
[引張貯蔵弾性率の測定]
各実施例及び比較例で作製した接着シートの23℃での引張貯蔵弾性率を、粘弾性測定装置(レオメトリックス社製:形式:RSA-II)を用いて測定した。具体的には、作製した接着シートを切断してサンプルサイズを長さ30mm×幅5mmとし、測定試料をフィルム引っ張り測定用治具にセットし、-20℃~100℃の温度域で周波数1Hz、歪み0.01%、昇温速度10℃/minの条件下で測定した。結果を表2に示す。
実施例及び比較例で作製した接着シートを厚さ500μmのシリコンウエハに貼り合せ、10mm角に個片化(ダイシング)して接着シート付チップを得た。次に、接着シート付チップを、厚み50μmのポリエチレンテレフタレートフィルム上に、接着シート面とポリエチレンテレフタレートフィルムとが対向するように裁置した。次に、チップ上に50gの重りを置いて荷重をかけ、40℃環境下で3日間保管した。その後、重りを外してポリエチレンテレフタレートフィルムを反転した。接着シート付チップがポリエチレンテレフタレートフィルムに貼り付かずに落下した場合を〇、落下せずにポリエチレンテレフタレートフィルムに貼り付いた場合を×として評価した。結果を表2に示す。
2 フリップチップ型半導体裏面用フィルム(半導体裏面用フィルム)
3 ダイシングテープ
31 基材
32 粘着剤層
33 半導体ウエハの貼着部分に対応する部分
4 半導体ウエハ
5 半導体チップ
51 半導体チップ5の回路面側に形成されているバンプ
6 被着体
61 被着体6の接続パッドに被着された接合用の導電材
Claims (8)
- 半導体装置の製造に用いられる接着シートであって、
平均粒子径が0.3μm以下のフィラーとアクリル樹脂とを含有し、
前記フィラーの含有量が、接着シート全体に対して20~45重量%の範囲内であり、
前記アクリル樹脂の含有量が、全樹脂成分に対して40~70重量%の範囲内であることを特徴とする接着シート。 - 前記接着シートが、被着体上にフリップチップ接続された半導体素子の裏面に形成するためのフリップチップ型半導体裏面用フィルムであることを特徴とする請求項1に記載の接着シート。
- 前記フィラーの最大粒子径が0.5μm以下であることを特徴とする請求項1又は2に記載の接着シート。
- 前記フィラーがシリカ系フィラーであることを特徴とする請求項1~3のいずれか1に記載の接着シート。
- 未硬化状態における23℃での引張貯蔵弾性率が、1.0GPa~3.0GPaであることを特徴とする請求項1~4のいずれか1に記載の接着シート。
- 請求項1~5のいずれか1に記載の接着シートが、ダイシングテープ上に積層されたダイシングテープ一体型接着シートであって、
前記ダイシングテープは基材上に粘着剤層が積層された構造であり、前記接着シートは前記粘着剤層上に積層されていることを特徴とするダイシングテープ一体型接着シート。 - 請求項6に記載のダイシングテープ一体型接着シートを用いて製造されたことを特徴とする半導体装置。
- 請求項6に記載のダイシングテープ一体型接着シートを用いた半導体装置の製造方法であって、
前記ダイシングテープ一体型接着シートにおける接着シート上に半導体ウエハを貼着する工程と、
前記半導体ウエハをダイシングして半導体素子を形成する工程と、
前記半導体素子を前記ダイシングテープ一体型接着シートとともに、ダイシングテープの粘着剤層から剥離する工程と、
前記半導体素子を被着体上にフリップチップ接続する工程とを具備することを特徴とする半導体装置の製造方法。
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US14/783,339 US9620403B2 (en) | 2013-04-09 | 2014-04-03 | Adhesive sheet used in manufacture of semiconductor device, adhesive sheet integrated with dicing tape, semiconductor device, and method of manufacturing semiconductor device |
CN201480020512.2A CN105102566B (zh) | 2013-04-09 | 2014-04-03 | 半导体装置的制造中使用的粘接片、切割带一体型粘接片、半导体装置、以及半导体装置的制造方法 |
KR1020157031914A KR20150143594A (ko) | 2013-04-09 | 2014-04-03 | 반도체 장치의 제조에 이용되는 접착 시트, 다이싱 테이프 일체형 접착 시트, 반도체 장치, 및 반도체 장치의 제조 방법 |
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JP6204639B1 (ja) * | 2016-03-30 | 2017-09-27 | 三井化学東セロ株式会社 | 半導体装置の製造方法 |
JP6797559B2 (ja) * | 2016-05-23 | 2020-12-09 | 日東電工株式会社 | ダイシングテープ |
CN107204333B (zh) * | 2017-05-23 | 2019-08-09 | 华进半导体封装先导技术研发中心有限公司 | 一种柔性基板封装结构的封装方法 |
US10847419B2 (en) * | 2018-03-14 | 2020-11-24 | Raytheon Company | Stress compensation and relief in bonded wafers |
KR102488314B1 (ko) * | 2018-12-27 | 2023-01-13 | 주식회사 두산 | 반도체 패키지용 비전도성 접착필름 및 이를 이용하는 반도체 패키지의 제조방법 |
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US20160056066A1 (en) | 2016-02-25 |
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JP2014204084A (ja) | 2014-10-27 |
KR20150143594A (ko) | 2015-12-23 |
CN105102566B (zh) | 2018-03-23 |
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JP6435088B2 (ja) | 2018-12-05 |
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