WO2014162537A1 - ガス分析計 - Google Patents
ガス分析計 Download PDFInfo
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- WO2014162537A1 WO2014162537A1 PCT/JP2013/060207 JP2013060207W WO2014162537A1 WO 2014162537 A1 WO2014162537 A1 WO 2014162537A1 JP 2013060207 W JP2013060207 W JP 2013060207W WO 2014162537 A1 WO2014162537 A1 WO 2014162537A1
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- gas
- light
- absorbing
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- absorption
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- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims abstract description 37
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 claims abstract description 32
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims abstract description 25
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000007789 gas Substances 0.000 claims description 978
- 238000010521 absorption reaction Methods 0.000 claims description 179
- 238000005259 measurement Methods 0.000 claims description 89
- 230000003287 optical effect Effects 0.000 claims description 64
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 49
- 238000001514 detection method Methods 0.000 claims description 49
- 230000005540 biological transmission Effects 0.000 claims description 44
- 238000012545 processing Methods 0.000 claims description 43
- 238000002156 mixing Methods 0.000 claims description 31
- 238000007254 oxidation reaction Methods 0.000 claims description 31
- 238000006243 chemical reaction Methods 0.000 claims description 30
- 238000012937 correction Methods 0.000 claims description 27
- 230000003647 oxidation Effects 0.000 claims description 25
- 239000002994 raw material Substances 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 19
- 230000001678 irradiating effect Effects 0.000 claims description 9
- 230000000644 propagated effect Effects 0.000 claims description 6
- 238000004458 analytical method Methods 0.000 abstract description 30
- 229960003753 nitric oxide Drugs 0.000 abstract 2
- 229940044609 sulfur dioxide Drugs 0.000 abstract 1
- 235000010269 sulphur dioxide Nutrition 0.000 abstract 1
- 230000006870 function Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 8
- 230000031700 light absorption Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000001739 density measurement Methods 0.000 description 2
- 238000004868 gas analysis Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 230000032900 absorption of visible light Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000006477 desulfuration reaction Methods 0.000 description 1
- 230000023556 desulfurization Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
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- 239000003546 flue gas Substances 0.000 description 1
- 235000012055 fruits and vegetables Nutrition 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
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- 239000003921 oil Substances 0.000 description 1
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- 230000002265 prevention Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000005070 ripening Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/61—Non-dispersive gas analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0037—NOx
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0042—SO2 or SO3
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Definitions
- the present invention relates to a gas analyzer that measures gas concentrations of a plurality of gases contained in a sample gas.
- Patent Literature 1 discloses a conventional gas analyzer. This prior art will be described with reference to the drawings.
- FIG. 11 is a prior art absorption spectrometer described in Patent Document 1.
- the absorption spectrometer 300 measures the concentration of NO 2 (nitrogen dioxide) contained in the sample gas using an ultraviolet absorption method.
- the absorption spectrometer 300 includes an ultraviolet light source 301, a visible light source 302, a reference cell 303, a sample cell 304, a light guide mechanism 305, a light detection unit 306, a control unit 307, and a calculation unit 308. ing.
- the ultraviolet light source 301 is a light emitting diode that emits ultraviolet light.
- the central emission wavelength of the ultraviolet light is 360 to 400 nm, and is included in the absorption wavelength band of NO 2 as shown in the wavelength-absorption coefficient characteristic diagram of FIG. Upon irradiation of such ultraviolet light into NO 2, the absorption by the NO 2 is performed.
- the visible light source 302 is a light emitting diode that emits visible light. Since the central emission wavelength of visible light is larger than the wavelength of ultraviolet light, it is included in the absorption wavelength band of NO 2 as shown in the wavelength-absorption coefficient characteristic diagram of FIG. Is different. Such absorption of visible light by NO 2 is irradiated to NO 2 is performed, when compared with the absorption of ultraviolet light by the above NO 2, so that absorbance of visible light is reduced by the NO 2, the visible light source 302 The wavelength is set.
- the reference cell 303 is filled with a reference gas.
- This reference gas is, for example, nitrogen gas.
- Ultraviolet light or visible light is incident through the windows 303a and 303b.
- the sample cell 304 is supplied with a sample gas that is a measurement target. Ultraviolet light or visible light is incident through the windows 304a and 304b. The sample gas flows into the sample cell 304 through the gas inlet 304c and flows out through the gas outlet 304d.
- the light guide mechanism 305 includes a mirror 305a and a half mirror 305b.
- the ultraviolet light from the ultraviolet light source 301 and the visible light from the visible light source 302 are reflected from the half mirror 305b and the mirror 305a and introduced into the reference cell 303 from one end side through the window 303a of the reference cell 303.
- ultraviolet light from the ultraviolet light source 301 and visible light from the visible light source 302 are transmitted through the half mirror 305 b and introduced into the sample cell 304 from one end side through the window 304 a of the sample cell 304. Absorption by NO 2 is performed in the sample cell 304.
- the light detection unit 306 includes light detectors 306a and 306b.
- the photodetector 306a is provided on the other end side of the reference cell 303, and detects ultraviolet light or visible light transmitted through the window 303b of the reference cell 303.
- the photodetector 306b is provided on the other end side of the sample cell 304, and detects ultraviolet light and visible light transmitted through the window 304b of the sample cell 304.
- the control unit 307 causes the ultraviolet light source 301 and the visible light source 302 to emit light in a time-sharing manner.
- the light detection unit 306 obtains two-wavelength transmitted light that passes through the reference cell 303 and the sample cell 304. As a result, there are two optical paths and two wavelengths, and four signals are obtained: a sample signal for ultraviolet transmitted light, a sample signal for visible transmitted light, a reference signal for ultraviolet transmitted light, and a reference signal for visible transmitted light.
- the calculation unit 308 receives the four signals from the light detection unit 306 via the control unit 307, and calculates the NO 2 gas concentration based on the four signals. Thereby, compensation of drift of the ultraviolet light source 301 and visible light source 302, correction of interference of other components other than the measurement component, correction of light amount reduction due to dirt and clouding of the transmission windows 304a and 304b of the sample cell 304, correction of sensitivity drift, and the like. Make it possible. The NO 2 gas concentration can be calculated after performing these corrections, and the measurement accuracy is improved.
- the measurable gas component is limited to one type. Therefore, in order to measure the concentration of two or more types of gases by the absorption method, a plurality of sets of light emitting means for emitting a wavelength for absorbing a certain gas and light receiving means for receiving the light are required for each gas. .
- the configuration increases in order to measure the concentration of two or more kinds of gases.
- NO gas nitrogen monoxide gas
- SO 2 gas sulfur dioxide gas
- NO gas and SO 2 gas do not absorb, and visible transmitted light does not contain information about NO gas and SO 2 gas. Therefore, it is impossible to correct interference caused by NO gas or SO 2 gas, or to use it for concentration measurement of NO gas or SO 2 gas. If it contains gas components NO gas and SO 2 gas in this manner the sample gas was analyzed gas components of these NO gas and SO 2 gas is difficult.
- the present invention has been made to solve the above-described problems, and its purpose is to include nitrogen monoxide gas (NO gas) and nitrogen dioxide gas (contained in the sample gas and not conventionally easy to analyze). analysis of the gas concentration of the two components of the NO 2 gas) or nitrogen gas (NO monoxide gas), and so the analysis of gas concentration 3 components of the nitrogen gas (NO 2 gas) and sulfur dioxide gas dioxide (sO 2)
- Another object of the present invention is to provide a gas analyzer capable of analyzing multi-component gas concentrations with a simple configuration.
- the first invention is An oxidation output state in which the sample gas is mixed with ozone gas to cause an oxidation reaction and then heated and output as the first measurement target gas; and a normal output state in which the sample gas is output as the second measurement target gas without any reaction.
- a gas regulator that can be switched, A NO 2 gas absorption light-emitting unit that irradiates irradiation light for absorbing NO 2 gas having a wavelength of 320 to 600 nm in which nitrogen dioxide gas (NO 2 gas) absorbs; A gas flow cell having a detection space through which the first and second measurement target gases flow, and a light transmission window through which the irradiation light for absorbing NO 2 gas is incident on the detection space; A transmitted light receiver that receives the irradiation light for absorbing NO 2 gas that has passed through the light transmission window and propagated through the gas flow cell; The gas adjusting unit and the NO 2 gas absorption light emitting unit are controlled to irradiate the NO 2 gas absorption irradiation light in a state where the first and second measurement target gases are respectively circulated through the gas flow cell.
- NO 2 gas absorption light-emitting unit that irradiates irradiation light for absorbing NO 2 gas having a wavelength of 320 to 600 nm in which nitrogen dioxide gas
- a drive control unit Based on the calculated value obtained according to the received light amount when the first measurement object gas is irradiated with the irradiation light for absorbing NO 2 gas, based on the calculated value obtained according to the received light amount of the transmitted light receiving unit, The concentration of nitrogen dioxide gas (NO 2 gas) contained in the sample gas is calculated, and from the calculated value obtained according to the amount of light received when the first measurement object gas is irradiated with the irradiation light for absorbing NO 2 gas.
- NO 2 gas nitrogen dioxide gas
- the second invention An oxidation output state in which the sample gas is mixed with ozone gas to cause an oxidation reaction and then heated and output as the first measurement target gas; and a normal output state in which the sample gas is output as the second measurement target gas without any reaction.
- a gas regulator that can be switched, A NO 2 gas absorption light emitting unit for irradiating NO 2 gas absorption irradiation light having a wavelength of 320 nm to 600 nm in which nitrogen dioxide gas (NO 2 gas) absorbs; A SO 2 gas absorption light emitting portion for irradiating SO 2 gas absorption irradiation light having a wavelength of 250 nm to 320 nm in which sulfur dioxide gas (SO 2 gas) and nitrogen dioxide gas (NO 2 gas) absorb; A gas flow cell having a detection space in which the first and second measurement target gases flow, and a light transmission window for allowing the NO 2 gas absorption irradiation light and the SO 2 gas absorption irradiation light to enter the detection space; , A transmitted light receiving unit that receives the irradiation light for absorbing NO 2 gas and the irradiation light for absorbing SO 2 gas that has passed through the light transmission window and propagated in the gas distribution cell; The NO 2 gas absorption irradiation
- a drive control unit for controlling the gas adjusting unit, the NO 2 gas absorbing light emitting unit, and the SO 2 gas absorbing light emitting unit so as to irradiate the irradiation light for NO 2 gas absorbing in a state of being distributed in a cell; Based on the calculated value obtained according to the received light amount when the first measurement object gas is irradiated with the irradiation light for absorbing NO 2 gas, based on the calculated value obtained according to the received light amount of the transmitted light receiving unit, The concentration of nitrogen dioxide gas (NO 2 gas) contained in the sample gas is calculated, and from the calculated value obtained according to the amount of light received when the first measurement object gas is irradiated with the irradiation light for absorbing NO 2 gas.
- NO 2 gas nitrogen dioxide gas
- the first concentration is calculated from a calculated value obtained according to the amount of light received when the first measurement object gas is irradiated with the irradiation light for absorbing SO 2 gas.
- the third invention An oxidation output state in which the sample gas is mixed with ozone gas to cause an oxidation reaction and then heated and output as the first measurement target gas; and a normal output state in which the sample gas is output as the second measurement target gas without any reaction.
- a gas regulator that can be switched, A NO 2 gas absorption light emitting unit for irradiating NO 2 gas absorption irradiation light having a wavelength of 320 nm to 600 nm in which nitrogen dioxide gas (NO 2 gas) absorbs; A SO 2 gas absorption light emitting portion for irradiating SO 2 gas absorption irradiation light having a wavelength of 250 nm to 320 nm in which sulfur dioxide gas (SO 2 gas) and nitrogen dioxide gas (NO 2 gas) absorb; A gas flow cell having a detection space in which the first and second measurement target gases flow, and a light transmission window for allowing the NO 2 gas absorption irradiation light and the SO 2 gas absorption irradiation light to enter the detection space; , A transmitted light receiving unit that receives the irradiation light for absorbing NO 2 gas and the irradiation light for absorbing SO 2 gas that has passed through the light transmission window and propagated in the gas distribution cell; The NO 2 gas in a state where the first NO 2
- the gas adjustment part of the gas analyzer of these 1st, 2nd, 3rd invention When there is no command from the drive control unit, a raw material gas is output, and when there is the command, an ozone generation unit that generates ozone gas from the raw material gas and outputs a raw material gas containing ozone gas, A gas mixing section for mixing and outputting the sample gas and the source gas; A gas heating unit that heats the mixed gas from the gas mixing unit and outputs the mixed gas as the first and second measurement target gases; Consists of
- the gas analyzer of the first invention is A reference light receiving unit that receives the irradiation light for absorbing NO 2 gas as reference light; An optical path for allowing the NO 2 gas absorption irradiation light to pass through the light transmission window and pass through the detection space of the gas flow cell and then reach the transmitted light receiving part; and an optical path to reach the reference light receiving part; An optical path determination unit to be passed by, Further provided,
- the signal processing unit is a gas analyzer that calculates a gas concentration based on a ratio between a received amount of reference light of the reference light receiving unit and a received amount of transmitted light of the transmitted light receiving unit.
- the gas analyzer of the first invention is A reference light receiving unit that receives the irradiation light for absorbing NO 2 gas as reference light; An optical path through which the irradiation light for absorbing NO 2 gas passes through the light transmission window and passes through the gas flow cell and then reaches the transmitted light receiving unit, and the reference light without passing through a detection space of the gas flow cell An optical path to reach the light receiving unit, an optical path determination unit to pass through, A correction unit that controls the drive current of the light emitting unit for absorbing NO 2 gas based on the amount of received reference light of the reference light receiving unit; The gas analyzer was further provided.
- the gas analyzers of the second and third inventions A reference light receiving unit that receives the irradiation light for absorbing NO 2 gas and the irradiation light for absorbing SO 2 gas as reference light; An optical path through which the irradiation light for NO 2 gas absorption and the irradiation light for SO 2 gas absorption pass through the light transmission window and pass through the gas circulation cell to reach the transmitted light receiving unit; and the reference light receiving unit An optical path to reach, an optical path determination unit to pass through, Further provided, The signal processing unit is a gas analyzer that calculates a gas concentration based on a ratio between a received amount of reference light of the reference light receiving unit and a received amount of transmitted light of the transmitted light receiving unit.
- the gas analyzers of the second and third inventions A reference light receiving unit that receives the irradiation light for absorbing NO 2 gas and the irradiation light for absorbing SO 2 gas as reference light; An optical path through which the irradiation light for NO 2 gas absorption and the irradiation light for SO 2 gas absorption pass through the light transmission window and pass through the gas circulation cell to reach the transmitted light receiving unit; and the reference light receiving unit An optical path to reach, an optical path determination unit to pass through, A correction unit that controls drive currents of the NO 2 gas absorption light-emitting unit and the SO 2 gas absorption light-emitting unit based on the amount of reference light received by the reference light receiving unit;
- the gas analyzer was further provided.
- the gas analyzer of the first invention is
- the drive control unit is a pulse that alternately performs output and stop of the NO 2 gas absorption light-emitting unit that is a light-emitting diode (LED) or a laser diode (LD), and a duty ratio that makes the output shorter than the stop
- the gas analyzer is configured to output the drive current of 2 to the NO 2 gas absorption light emitting section.
- the gas analyzers of the second and third inventions The drive control unit is a pulse that alternately performs output and stop of the NO 2 gas absorption light-emitting unit that is a light-emitting diode (LED) or a laser diode (LD), and a duty ratio that makes the output shorter than the stop Is output to the NO 2 gas absorption light-emitting unit, and the output of the SO 2 gas absorption light-emitting unit, which is a light emitting diode (LED), is alternately output and stopped.
- the gas analyzer is configured to output a drive current having a duty ratio that is shortened to the SO 2 gas absorption light emitting unit.
- analysis of gas concentrations of two components of nitrogen monoxide gas (NO gas) and nitrogen dioxide gas (NO 2 gas), which are included in the sample gas and were not easily analyzed in the past, or monoxide Enables analysis of multi-component gas concentrations with a simple configuration, such as analysis of three-component gas concentrations of nitrogen gas (NO gas), nitrogen dioxide gas (NO 2 gas), and sulfur dioxide gas (SO 2 ).
- a gas analyzer can be provided.
- FIG. 1 It is a whole block diagram of the gas analyzer which concerns on the form for implementing this invention. It is a whole block diagram of the gas analyzer which concerns on the other form for implementing this invention. It is a partial block diagram of the gas analyzer which concerns on the other form for implementing this invention. It is a partial block diagram of the gas analyzer which concerns on the other form for implementing this invention. It is a partial block diagram of the gas analyzer which concerns on the other form for implementing this invention. It is a partial block diagram of the gas analyzer which concerns on the other form for implementing this invention. It is a partial block diagram of the gas analyzer which concerns on the other form for implementing this invention. It is a partial block diagram of the gas analyzer which concerns on the other form for implementing this invention. FIG.
- FIG. 6 is a characteristic diagram showing a duty ratio-allowable current characteristic of a light emitting diode. It is explanatory drawing of the time change of the drive signal of the light emitting diode produced
- FIG. 6 is a wavelength-absorption coefficient characteristic diagram showing absorption coefficients of NO, NO 2 , and SO 2 gases in the visible region and the ultraviolet region.
- FIG. 1 is an overall configuration diagram of a gas analyzer according to this embodiment.
- thick solid arrows indicate gas flow paths
- dotted arrows indicate light paths
- thin solid lines indicate electrical signal paths.
- the gas analyzer 100 includes a light emitting unit 11 for absorbing NO 2 gas, a light emitting unit 12 for absorbing SO 2 gas, an optical path determining unit 13, a gas flow cell 21, a transmitted light receiving unit 31, and a reference light receiving unit.
- Unit 32 gas adjustment unit 41, gas suction unit 51, and signal processing / drive control unit 61.
- NO 2 gas absorption for the light emitting unit 11 is a wavelength NO 2 gas absorption, and a light emitting unit that SO 2 gas to emit NO 2 gas absorption for the irradiation light of wavelengths not absorption.
- a light source of irradiation light having a central emission wavelength in a wavelength range of 320 nm to 600 nm in a region extending from ultraviolet light to visible light for example, a light emitting diode (LED) or a laser diode (LD) can be selected.
- LED light emitting diode
- LD laser diode
- SO 2 gas absorption for the light emitting unit 12 is a wavelength SO 2 gas absorption, and a light emitting portion for emitting SO 2 gas absorption for the irradiation light of a wavelength that NO gas is not absorption.
- a light source of irradiation light having a central emission wavelength in the wavelength region of 250 nm to 320 nm in the ultraviolet region for example, a light emitting diode (LED) can be selected at present.
- LED light emitting diode
- the optical path determination unit 13 is a half mirror that transmits the irradiation light for absorbing NO 2 gas with a predetermined transmittance and reflects the irradiation light with a predetermined reflectance. Further, the optical path determination unit 13 transmits the irradiation light for absorbing the SO 2 gas and reflects the irradiation light with a predetermined reflectance. As will be described later, the NO 2 gas absorption irradiation light and the SO 2 gas absorption irradiation light are not output at the same time. For example, only one of them is output independently for each time.
- the irradiation light for NO 2 gas absorption irradiated from the NO 2 gas absorption light emitting unit 11 enters the optical path determination unit 13.
- the optical path determination unit 13 a part of the irradiation light for absorbing NO 2 gas is reflected, and the remaining irradiation light for absorbing NO 2 gas is transmitted.
- the irradiation light for absorbing NO 2 gas reflected by the optical path determination unit 13 enters the reference light receiving unit 32. Further, the irradiation light for absorbing NO 2 gas that has passed through the optical path determination unit 13 enters the gas flow cell 21. Similarly, the irradiation light emitted from the SO 2 gas absorption light emitting unit 12 also enters the optical path determination unit 13.
- part of the irradiation light for absorbing SO 2 gas is reflected and the rest of the irradiation light for absorbing SO 2 gas is transmitted.
- SO 2 irradiation light gas absorption reflected by the optical path determining part 13 is incident on the reference light receiving unit 32.
- the irradiation light for absorbing SO 2 gas transmitted through the optical path determination unit 13 is incident on the gas flow cell 21.
- the gas distribution cell 21 further includes a tube 22, light transmission windows 23 and 24, a detection space 25, a gas inlet 26, and a gas outlet 27.
- the tube 22 is a cylinder.
- the inner surface of the tube 22 can be, for example, a polished stainless steel inner surface. Thereby, the reflectance of irradiation light can be kept favorable, preventing adsorption of measurement object gas. In the tube 22, the irradiation light propagates while being reflected by the inner surface of the tube 22.
- the light transmission window 23 and the light transmission window 24 are made of a material exhibiting light transmittance in the emission wavelength region of the irradiation light irradiated from the NO 2 gas absorption light emitting unit 11 and the SO 2 gas absorption light emitting unit 12.
- synthetic quartz or calcium fluoride can be used as the material.
- the detection space 25 is a closed space defined by the tube 22, the light transmission window 23, and the light transmission window 24.
- the gas inlet 26 and the gas outlet 27 communicate with the detection space 25.
- the measurement target gas flows into the detection space 25 from the gas inlet 26 and flows out of the gas outlet 27.
- irradiation light is irradiated to the flowing measurement target gas, and light absorption occurs.
- Transmitted light receiving unit 31 is irradiated from the NO 2 gas absorption for the light emitting unit 11, and receives the irradiated light for NO 2 gas absorption which has passed through the gas flow cell 21 and outputs a detection signal corresponding to the light intensity. Further, the transmitted light receiving unit 31 is irradiated from the SO 2 gas absorption for the light emitting unit 12, and outputs a detection signal corresponding to the light intensity by receiving the irradiated light for SO 2 gas absorption which has passed through the gas flow cell 21.
- a photodiode, a photomultiplier tube, or the like having sensitivity to the emission wavelength of the NO 2 gas absorption irradiation light or the SO 2 gas absorption irradiation light can be selected.
- a silicon photodiode can be selected.
- Such a transmitted light receiving unit 31 detects light absorption by the measurement target gas, and has a function of outputting a light intensity signal proportional to the amount of received irradiation light to the signal processing / drive control unit 61. That is, compared with the case where there is no light absorption by the measurement target gas, the light intensity of the irradiation light received by the transmitted light receiving unit 31 decreases when there is light absorption.
- the gas concentration is measured using the correlation between the two.
- the NO 2 gas absorption irradiation light and the SO 2 gas absorption irradiation light transmitted through the optical path determining unit 13 pass through the light-transmitting light transmission window 23 constituting one end of the gas flow cell 21, and The light propagates through the internal detection space 25, passes through the light-transmitting light transmitting window 24 that forms the other end, and enters the transmitted light receiving unit 31.
- Reference-light receiving part 32 is radiated from the NO 2 gas absorption for the light emitting unit 11 receives the NO 2 gas absorption irradiation light reflected by the optical path determining section 13, the signal processing light amount intensity signal proportional to the amount of light that is received A function for outputting to the drive control unit 61 is provided.
- the reference light receiving unit 32 is irradiated from the SO 2 gas absorption for the light emitting unit 12 receives the SO 2 gas absorption irradiation light reflected by the optical path determining section 13, the light amount intensity signal proportional to the amount of light that is received It has a function of outputting to the signal processing / drive control unit 61.
- a photodiode, a photomultiplier tube, or the like having sensitivity to the emission wavelength of the NO 2 gas absorption irradiation light or the SO 2 gas absorption irradiation light can be selected.
- a silicon photodiode can be selected.
- the gas adjusting unit 41 further includes an ozone generating unit 42, a gas mixing unit 43, and a gas heating unit 44.
- the ozone generator 42 has a function of generating ozone. Atmosphere containing oxygen to the ozone generator 42, instrument air, or the raw material gas G O such as oxygen gas flows.
- the operation of the ozone generator 42 is controlled by a signal processing / drive controller 61.
- Gas mixing unit 43 at the time the raw material gas G O (operation from the sample gas G S and ozone generator 42 is a raw material gas G O containing O 3 gas in large quantities, also in an off-state free of O 3 gas is provided to mix the free feed gas is G O).
- the ozone generator 42 intermediate reactant gas portion and a chemical reaction occurs in a portion sample gas G S of the O 3 gas in the gas mixing portion 43 will be described later is generated, the intermediate reaction gas, excess O 3 gas, thereby discharging the material gas G O and excess sample gas G S excess.
- the ozone generator 42 when not in operation of the ozone generator 42 is allowed to flow out by mixing it with a raw material gas G O and the sample gas G S from the ozone generator 42. Further, as will be described later, when the zero gas G ZERO or the span gas G SPAN flows in, the gas mixing unit 43 flows out as it is.
- the gas heating unit 44 heats the gas flowing in from the gas mixing unit 43.
- the intermediate reaction gas, O 3 gas, and heating the raw material gas G O and the sample gas G S excess is further flow out proceeded a reaction gas as a measurement target gas.
- a reaction gas as a measurement target gas.
- the measurement target gas flowing out from the gas heating unit 44 flows through the detection space 25 in the gas flow cell 21 from the gas inlet 26 and flows out from the gas outlet 27.
- the gas suction unit 51 has a function of sucking gas. By exhausting the detection space 25 of the gas flow cell 21, the measurement target gas from the gas heating unit 44 is drawn into the detection space 25.
- the gas suction part 51 can also be provided between the gas heating part 44 and the gas inlet 26.
- the signal processing / drive control unit 61 is an integration of the signal processing unit and the drive control unit of the present invention, and performs both a function as a signal processing unit and a function as a drive control unit. is there.
- the signal processing / drive control unit 61 has a function of supplying a drive current necessary for causing the NO 2 gas absorption light emitting unit 11 and the SO 2 gas absorption light emitting unit 12 to emit light.
- the signal processing / drive control unit 61 has a received light signal processing function for calculating the gas concentration based on the light intensity signal output from the transmitted light receiving unit 31 and the reference light receiving unit 32.
- the signal processing / drive control unit 61 has a control function for switching operation / non-operation of the ozone generation unit 42.
- the configuration of the gas analyzer 100 is as described above.
- the principle of measurement is an absorption method based on the following Lambert-Beer law.
- P 1 is the output intensity of the transmitted light that has passed through the measurement target gas flowing in the detection space 25
- P 0 is the output intensity of the reference light before passing through the measurement target gas
- ⁇ is the molar extinction coefficient
- c is The gas concentration, L, represents the optical path length.
- the molar extinction coefficient ⁇ is uniquely determined by determining the type of gas and the wavelength of the light source, and since the optical path length L is constant, the ratio between the output intensities P 1 and P 0 is an exponential function of the gas concentration c.
- irradiation light for absorbing NO 2 gas (or irradiation light for absorbing SO 2 gas) is irradiated.
- a part of the irradiation light for absorbing NO 2 gas (or irradiation light for absorbing SO 2 gas) at this time is reflected by the optical path determination unit 13 with a known constant reflectance and is incident on the reference light receiving unit 32 as reference light. To do.
- the output intensity P 0 by the reference light can be obtained from the signal of the reference light receiving unit 32.
- Part of the irradiation light for absorbing NO 2 gas (or irradiation light for absorbing SO 2 gas) is transmitted through the optical path determination unit 13 with a known constant transmittance, and propagates through the detection space 25 through the light transmission window 23. After being absorbed, the light passes through the light transmission window 24 and enters the transmitted light receiving unit 31 as transmitted light.
- the output intensity P 1 by the transmitted light can be obtained from the signal of the transmitted light receiving unit 31. Therefore, the gas concentration c can be obtained from the ratio between the output intensities P 1 and P 0 obtained simultaneously.
- This principle can be applied to both the detection by the irradiation light for NO 2 gas absorption and the detection by the irradiation light for SO 2 gas absorption. The detection principle is like this.
- the transmitted light receiving unit 31 and the reference light receiving unit 32 are commonly used when measuring the NO 2 gas concentration, and are commonly used when measuring the SO 2 gas concentration. Therefore, if the NO 2 gas absorption light-emitting unit 11 and the SO 2 gas absorption light-emitting unit 12 emit light at the same time, the light reception signal becomes the sum of the two and cannot be separated.
- the signal processing / drive control unit 61 controls the NO 2 gas absorption light-emitting unit 11 and the SO 2 gas absorption light-emitting unit 12 to emit light alternately without simultaneously emitting light. Further, the measurement and processing of the received light signal are also performed in synchronization with the light emission period, thereby separating the signals.
- Such measurement is performed when the ozone generation unit 42 is in an operating state and the gas adjustment unit 41 is in an oxidized output, and when the ozone generation unit 42 is in a non-operational state and the gas adjustment unit 41 is in a normal output.
- a gas analyzer 100 is (A) Analysis with irradiation light for absorbing NO 2 gas at the time of oxidation output, (B) Analysis with irradiation light for SO 2 gas absorption at the time of oxidation output, (C) Analysis with irradiation light for absorbing NO 2 gas at normal output, (D) Analysis with irradiation light for absorbing SO 2 gas at normal output, Four types of analysis are possible. Among these, the gas concentration is calculated by analysis of (a), (b), and (c).
- the ozone generator 42 is in an operating state. At this time, ozone generator 42 generates air, the instrument air or O 2 gas contained in the raw material gas G 0, such as oxygen gas, O 3 gas (oxygen gas) (ozone). Although the generation amount of O 3 gas can be determined as appropriate, it is supplied in excess of at least the maximum amount in the measured concentration range of NO gas. From the ozone generator 42 to the gas mixing unit 43 supplies the raw material gas G O containing O 3 gas sufficiently.
- O 3 gas amount supplied from the ozone generator 42 is, because it is excessive relative to NO gas amount in the sample gas G S, NO gas in the sample gas G S is according to the chemical reaction formula (1), All are converted to NO 2 gas.
- the SO 2 gas and the O 3 gas do not cause a chemical reaction.
- the gas mixing unit 43, and converted all NO gas in the sample gas G S is the NO 2 gas.
- some of the NO 2 gas in the sample gas G S, and, in some NO 2 gas produced by a chemical reaction formula (1) is converted to N 2 O 5 gas, further excess O 3 gas one The SO 2 gas remains unreacted. From the gas mixing unit 43, such NO 2 gas, N 2 O 5 gas, surplus O 3 gas, surplus raw material gas GO, and surplus sample gas G S flow out to the gas heating unit 44.
- the gas heating unit 44 heats the above gas, but particularly N 2 O 5 gas and surplus O 3 gas cause a thermal decomposition reaction represented by the following chemical reaction formulas (3) and (4) by heating. .
- N 2 O 5 gas which is a by-product generated in the gas mixing unit 43 is thermally decomposed into NO 2 gas, and the remaining O 3 gas is thermally decomposed into oxygen.
- the SO 2 gas remains unreacted.
- the gas concentration of NO 2 gas after the chemical reaction and thermal decomposition reaction is the sum of the gas concentration and the gas concentration of the original NO 2 gas of the original NO gas contained in the sample gas G S.
- the concentration of SO 2 gas is the raw material gas G O and the sample gas G S Depending on the dilution.
- the gas adjustment unit 41 outputs the measurement target gas that is the nitrogen monoxide gas (NO gas) contained in the sample gas after being oxidized by ozone and reacted with the nitrogen dioxide gas (NO 2 ). Output.
- a measurement target gas is introduced into the gas distribution cell 21.
- NO 2 irradiation light gas absorption incident on the detection space 25 of the passes through the optical path determination unit 13 light transmission window 23 a gas flow cell 21 through, while propagating the detection space 25, absorption by NO 2 gas Is done.
- Such absorbed light for absorbing NO 2 gas passes through the light transmission window 24 and enters the transmitted light receiving unit 31. Therefore, the output intensity P 1 can be obtained from the light intensity signal of the transmitted light receiving unit 31.
- the transmitted light receiving unit 31 and the reference light receiving unit 32 as the light receiving elements in this way, not only can the concentration be measured, but also the output of the NO 2 gas absorbing light emitting unit 11 varies due to various factors. Also, there is an effect that an error in density measurement can be reduced by calculating the ratio of the two received light signals.
- Light intensity signals from the transmitted light receiving unit 31 and the reference light receiving unit 32 are transmitted to the signal processing / drive control unit 61.
- the signal processing / drive control unit 61 calculates the NO 2 gas concentration c 4 ′ before the flow mixture ratio correction in the gas flow cell 21 based on the above mathematical formula 1, and further calculates the flow mixture ratio in the gas mixer 43. by multiplying, calculating the NO 2 gas concentration c 4 contained in the sample gas G S.
- the light emitting unit 12 for absorbing SO 2 gas emits light.
- the irradiation light for absorbing SO 2 gas from the light emitting unit 12 for absorbing SO 2 gas is reflected by the optical path determining unit 13 with a known constant reflectance and is incident on the reference light receiving unit 32. Therefore, the output intensity P 0 can be obtained from the light intensity signal of the reference light receiving unit 32.
- the SO 2 gas absorption irradiation light that has passed through the optical path determination unit 13 and has entered the detection space 25 in the gas flow cell 21 through the light transmission window 23 propagates through the detection space 25, while the SO 2 gas and NO NO. Absorbed by two gases.
- Such absorbed light for absorbing SO 2 gas passes through the light transmission window 24 and enters the transmitted light receiving unit 31. Therefore, the output intensity P 1 can be obtained from the signal of the transmitted light receiving unit 31.
- the output intensity P 1 includes absorption due to NO 2 gas, if the SO 2 gas concentration before concentration correction calculated from P 0 and P 1 is c 3 ′′, c 3 ′′
- the processing / drive control unit 61 needs the following density correction processing.
- the SO 2 gas absorption light emitting unit 12 is turned on, and NO 2 based on the decrease in light intensity from the output intensities P 0 and P 1.
- the concentration correction coefficient ⁇ of the light reception intensity by the span gas is calculated. However, it is assumed that always the raw material gas G 0 is distributed mixture even during calibration. And ⁇ of the flow rate mixing ratio is calculated in real time uncorrected NO 2 gas concentration c 4 'and, since the density before correction SO 2 gas concentration c 3 ", the flow mixing ratio correction before SO 2 gas concentration c 3' Is calculated by density correction processing according to the following equation.
- the transmitted light receiving unit 31 and the reference light receiving unit 32 as the light receiving elements in this way, not only can the concentration be measured, but also the output of the SO 2 gas absorbing light emitting unit 12 varies due to various factors. Also, there is an effect that an error in density measurement can be reduced by calculating the ratio of the two received light signals.
- Output signals from the transmitted light receiving unit 31 and the reference light receiving unit 32 are transmitted to the signal processing / drive control unit 61.
- the signal processing / drive control unit 61 calculates the output intensities P 0 and P 1 , and based on the formulas 1 and 2, the NO 2 gas concentration c 4 ′ before the flow mixture ratio correction and the SO 2 gas before the flow mixture ratio correction. to calculate the concentration c 3 ', further by multiplying the flow mixing ratio of a gas mixing section 43, calculates the NO 2 gas concentration c 4 and SO 2 gas concentration c 3 contained in the sample gas G S.
- the measurement is performed after the ozone generating unit 42 is in an inoperative state and the gas adjusting unit 41 is normally output. At this time, the NO 2 gas concentration c 2 is obtained. This is (c) analysis with irradiation light for absorbing NO 2 gas at normal output.
- the ozone generator 42 is in an inoperative state. At this time, the raw material gas G O is passes through the ozone generator 42 as described above, is mixed with the sample gas G S in the gas mixing portion 43. O 3 because the gas does not exist without a chemical reaction occurs, and the raw material gas G O and the sample gas G S-free reaction as it flows out from the gas mixing unit 43. Also, flowing out of the chemical reaction does not occur in the non-reactive material gas G O and the sample gas G S and is directly gas heating unit 44 even in the gas heating unit 44. Gas conditioning unit 41 performs a normal output that outputs the sample gas G S and the raw material gas G O unresponsive as a measurement target gas.
- the state of the gas contained in the sample gas flowing through the gas circulation cell 21 is the state in which all of the NO gas, NO 2 gas, and SO 2 gas contained in the sample gas are intact. Further, since the source gas is mixed in the gas mixing unit 43, the concentrations of NO gas, NO 2 gas, and SO 2 gas are diluted according to the flow rate mixing ratio of the source gas and the sample gas. And such feed gas G O and the sample gas G S is introduced into the gas flow cell 21.
- the detection of the gas concentration itself is obtained in the same manner as when the ozone generator 42 is in operation (at the time of oxidation output).
- the signal processing / drive control unit 61 calculates the NO 2 gas concentration in the gas distribution cell 21 based on the above mathematical formula 1, and further multiplies the flow rate mixing ratio in the gas mixing unit 43 to obtain the sample gas G S.
- the NO 2 gas concentration c 2 contained in is calculated.
- the signal processing / drive control unit 61 calculates the NO gas concentration c 1 in the sample gas from the combination of the gas concentration during operation of the ozone generation unit 42 and the gas concentration during non-operation.
- NO 2 gas concentration c 4 calculated by analysis with irradiation light for absorbing NO 2 gas during oxidation output
- B NO 2 gas concentration c 4 and SO 2 gas concentration c 3 calculated by analysis with irradiation light for absorbing O 3 gas during oxidation output
- C NO 2 gas concentration c 2 calculated by analysis with irradiation light for absorbing NO 2 gas at normal output, Has been measured.
- the SO 2 gas concentration c 3 is also determined.
- the NO 2 gas concentration c 4 in the oxidation output state is the sum of the NO gas concentration c 1 and the NO 2 gas concentration c 2 at the normal output, it is possible to calculate c 1 from the following equation. it can.
- the signal processing / drive control unit 61 calculates the NO gas concentration c 1 based on the NO 2 gas concentration c 4 at the time of oxidation output and the NO 2 gas concentration c 2 at the time of normal output.
- the NO gas concentration c 1 , the NO 2 gas concentration c 4 , and the SO 2 gas concentration c 3 can be measured. That is, while the signal processing / drive control unit 61 switches the operation / non-operation of the ozone generation unit 42 in time, NO 2 (including NO content), SO 2 at the time of oxidation output during operation of the ozone generation unit 42 The gas concentration is measured, and the NO 2 (not including NO content) gas concentration is measured at the normal output when the ozone generator 42 is not operating. The NO gas concentration is determined from the NO 2 gas concentration at the oxidation output. The NO gas concentration can be obtained by subtracting the NO 2 gas concentration during normal output.
- zero gas G ZERO or span gas G SPAN can be used for gas concentration calibration.
- Zero gas G ZERO is a gas, for example, nitrogen gas, in which the NO 2 gas absorption light-emitting unit 11 and the SO 2 gas absorption light-emitting unit 12 do not absorb light.
- the span gas G SPAN is a gas calibrated with the maximum concentration value in a desired measurement range, and NO, NO 2 , and SO 2 are used as gas types.
- Stopping the supply of the sample gas G S, followed by performing the supply of the zero gas G ZERO calibrated by measuring the light signal at the zero gas G ZERO distribution, or at the time span G SPAN flow by performing the supply of the span gas G SPAN Calibration can be performed by measuring the absorbed light-receiving signal. Although this calibration can be performed at any time, it is performed when it is assumed that the gas concentration indicating value fluctuates due to aging of the component parts, and an accurate value is indicated.
- the analysis by the irradiation light for SO 2 gas absorption at the normal output is not used, but (b) instead of the analysis by the irradiation light for SO 2 gas absorption at the oxidation output, this (
- the analysis of (a), (c), (d) can also be performed using the analysis of d).
- the measurement procedure may be the same as the measurement procedure at the time of oxidation output. This is because SO 2 is not oxidized by ozone and is not decomposed by the heating unit, so that there is no change in concentration both during oxidation output and during normal output.
- the NO 2 gas concentration c 4 at the oxidation output is calculated by (a), (c) the NO 2 gas concentration c 2 calculated by the analysis by the irradiation light for absorbing NO 2 gas at the normal output is calculated, and (d ) To calculate the NO 2 gas concentration c 2 and the SO 2 gas concentration c 3 . Since the SO 2 gas concentration c 3 is not oxidized by ozone, it is the same as the SO 2 gas concentration c 3 at the time of oxidation output. In this way, the SO 2 gas concentration c 3 may be calculated.
- the present invention can also be implemented by analysis based on these (a), (c), and (d).
- the gas analyzer 100 performs the analysis in this way.
- the gas analyzer 200 includes an NO 2 gas absorption light emitting unit 11, an SO 2 gas absorption light emitting unit 12, an optical path determination unit 13, a gas flow cell 21, a transmitted light receiving unit 31, and a reference light receiving unit.
- Unit 32 gas adjustment unit 41, gas suction unit 51, signal processing / drive control unit 61, and correction unit 71.
- correction unit 71 is added.
- the correction unit 71 and its operation will be described with emphasis, and the other components will be assigned the same numbers and redundant description will be omitted.
- the correction unit 71 is connected to the reference light receiving unit 32, the signal processing / drive control unit 61, the NO 2 gas absorption light emitting unit 11, and the SO 2 gas absorption light emitting unit 12. Based on this, it has a function of correcting the current for driving the NO 2 gas absorption light emitting unit 11 and the SO 2 gas absorption light emitting unit 12.
- Reference-light receiving part 32 by receiving the reference light by NO 2 gas absorption for the irradiation light from the NO 2 gas absorption for the light emitting unit 11 and outputs the light amount intensity signal. Based on the intensity signal, the correction unit 71 corrects the drive signal, which is a light emitting diode drive current, so that the output intensity is constant, and then outputs the correction signal to the NO 2 gas absorption light emission unit 11. For example, the light intensity signal of the irradiation light for NO 2 gas absorption is first stored in the memory unit and controlled to be the same as the initial light intensity signal.
- the reference light receiving unit 32 by receiving the reference light by SO 2 gas absorption for the irradiation light from the SO 2 gas absorption for the light emitting unit 12 and outputs the intensity signal.
- the correction unit 71 corrects the drive signal, which is a light-emitting diode drive current, so that the output intensity is constant, and then outputs the correction signal to the SO 2 gas absorption light-emitting unit 12.
- the light intensity signal of the irradiation light for SO 2 gas absorption is first stored in the memory unit and controlled so as to be the same as the initial light intensity signal.
- a lens 14 is further provided on the optical axis of the NO 2 gas absorption light emitting unit 11, and the SO 2 A lens 15 is provided on the optical axis of the gas absorption light emitting unit 12.
- NO 2 gas absorption light-emitting unit 11 and the lens 14 may be integrally configured by modularization, and the SO 2 gas absorption light-emitting unit 12 and the lens 15 may be integrated by modularization.
- a light emitting unit 16 is arranged in place of the NO 2 gas absorbing light emitting unit 11 and the SO 2 gas absorbing light emitting unit 12.
- the light emitting section 16 is a light emitting diode array in which the NO 2 gas absorbing light emitting section 11 and the SO 2 gas absorbing light emitting section 12 are integrated in close proximity.
- a lens 17 is disposed on the optical axis of the light emitting unit 11 for absorbing NO 2 gas and the light emitting unit 12 for absorbing SO 2 gas.
- the optical axes of the NO 2 gas absorbing light emitting portion 11 and the SO 2 gas absorbing light emitting portion 12 are close to each other, so that one lens 17 for increasing directivity is sufficient. Further, since the optical axes are close to each other, the incident efficiency to the reference light receiving unit 32 is also improved. As a result, there is an effect that the signal intensity is increased, and consequently the accuracy and stability of the gas concentration measurement are improved.
- a lens 18 is further disposed between the light transmission window 24 and the transmitted light receiving unit 31. It is.
- the lens 18 condenses the NO 2 gas absorption laser and the SO 2 gas absorption laser that have passed through the light transmission window 24, and efficiently enters the transmitted light receiving portion 31. As a result, there is an effect that the signal intensity is increased, and consequently the accuracy and stability of the gas concentration measurement are improved.
- the light transmission window 24 and the lens 18 may be integrally configured by modularization.
- the light transmission window 24 itself may be a convex lens 18 that is light transmissive and has a light collecting effect, and the gas flow cell 21 may be configured by fixing the lens 18 to the tube 22.
- FIG. 1 This is provided with a light emitting / receiving unit 19 in which the NO 2 gas absorbing light emitting unit 11, the SO 2 gas absorbing light emitting unit 12, and the transmitted light receiving unit 31 are integrated in a modular manner. Further, the light transmission window 24 of the gas flow cell 21 is replaced with a reflection unit 28, and the transmitted light receiving unit 31 is arranged at a position where the return path light is transmitted by the optical path determination unit 13.
- the lens 17 condenses the irradiation light incident on the transmitted light receiving unit 31 and the function of increasing the directivity of the irradiation light from the NO 2 gas absorption light emitting unit 11 and the SO 2 gas absorption light emitting unit 12. It will have the function to do. Further, since the optical path length with light absorption by gas is doubled, it is possible to expect the effect of improving the light absorption signal and improving the accuracy and stability of gas concentration measurement.
- the optical path determination unit 13 employs a mechanical mirror that mechanically moves a mirror having a mirror surface where light is totally reflected, or a mirror in which mirror surface and transparency appear alternately by electrical switching. Also good.
- the transmitted light receiving unit 31 and the reference light receiving unit 32 include a storage unit that stores a light intensity signal.
- the signal processing / drive control unit 61 controls the mirror of the optical path determination unit 13 so that light can be selected to enter the transmitted light receiving unit 31 or the reference light receiving unit 32.
- the optical path determination unit 13 is controlled so that the reference light is incident on the reference light receiving unit 32, and then the light intensity signal P 0 of the reference light is used as a reference.
- the storage unit of the light receiving unit 32 (or the signal processing / drive control unit 61). Subsequently, when detecting the transmitted light of the irradiation light for NO 2 gas absorption, the light intensity determination signal P 1 of the transmitted light is obtained after controlling the optical path determination unit 13 so that the transmitted light is incident on the transmitted light receiving unit 31.
- the storage unit of the transmitted light receiving unit 31 (or the signal processing / drive control unit 61) stores it. And separately acquired separately the amount of light intensity signal P 0 and the light amount intensity signal P 1 and the time of the transmitted light of the reference light also detected by SO 2 gas absorption for the irradiation light.
- the light intensity intensity signals P 0 and P 1 of the irradiation light for absorbing NO 2 gas and the irradiation light for absorbing SO 2 gas are used to calculate based on the above formulas 1 and 2.
- the light intensity of the reference light and the transmitted light is doubled compared to the half mirror, so that the detection capability can be enhanced.
- the light transmission window 24 of the gas flow cell 21 is replaced with a reflection unit 28, and the transmitted light receiving unit 31 is disposed at a position where the return light is reflected by the optical path determination unit 13.
- forward light which is irradiation light emitted from the NO 2 gas absorption light-emitting unit 11 and the SO 2 gas absorption light-emitting unit 12, passes through the light transmission window 23 and propagates in the detection space 25 of the tube 22. Then, the light is reflected by the reflecting portion 28 and becomes return path light. The reflected return light propagates in the detection space 25 of the tube 22 in the opposite direction, exits from the light transmission window 23, is reflected by the optical path determination unit 13, and enters the transmitted light receiving unit 31.
- the optical path length with light absorption is doubled compared to the first and second embodiments of FIGS. 1 and 2, so that the light absorption signal is improved and the accuracy and stability of gas concentration measurement are improved.
- the effect that improves can be expected.
- FIG. 8 is a duty ratio-allowable current characteristic diagram of a light emitting diode or a laser diode. This embodiment further improves the measurement accuracy of the gas analyzers of the first, second, third, fourth, fifth, sixth, and seventh embodiments described above.
- the allowable current of a light emitting diode or a laser diode is characterized in that, generally, the smaller the duty ratio and the shorter the output period, the larger the current value can be secured. Therefore, the drive currents of the NO 2 gas absorption light emitting unit 11 and the SO 2 gas absorption light emitting unit 12 are changed from a large duty ratio as shown in FIG. 9 to a small duty ratio as shown in FIG. Shorter). At this time, the output time is shortened as shown in FIG. 10, but the drive current value can be increased. Therefore, the output intensity of the irradiation light can be increased to ensure a high signal level, the signal level against noise is relatively high, and a stable gas concentration value can be calculated.
- the light emission time of the light emitting diode 11 for absorbing NO 2 gas, which is a light emitting diode or laser diode, and the light emitting portion 12 for absorbing SO 2 gas, which is a light emitting diode can be shortened, deterioration due to heat or the like is suppressed. Thus, it is possible to maintain a long lifetime as compared with continuous light emission.
- Such a gas analyzer of the present invention comprises two components, nitrogen monoxide gas (NO gas) and nitrogen dioxide gas (NO 2 gas), as well as nitrogen monoxide gas (NO gas) and nitrogen dioxide gas (NO 2 gas). ) And sulfur dioxide gas (SO 2 ), and is optimal for analysis of combustion exhaust gas such as boilers and garbage incineration.
- NO gas nitrogen monoxide gas
- NO 2 gas nitrogen dioxide gas
- SO 2 sulfur dioxide gas
- gas analysis for steel blast furnace, converter, heat treatment furnace, sintering (pellet equipment), coke oven], fruit and vegetable storage and ripening, biochemistry (microorganism) [fermentation], air pollution [incinerator, flue gas desulfurization / Denitration], exhaust gas (removal tester) of internal combustion engines such as automobiles and ships, disaster prevention [explosive gas detection, toxic gas detection, new building material combustion gas analysis], plant growth, chemical analysis [oil refinery plant, petrochemical Plants, gas generation plants], environmental [landing concentration, concentration in tunnels, parking lots, building management], and analytical instruments for various physics and chemistry experiments.
- Gas analyzer 11 NO 2 gas absorption for the light emitting portion 12: SO 2 gas absorption for the light emitting unit 13: optical path determining section 14: Lens 15: Lens 16: light-emitting unit 17: Lens 18: Lens 19: light receiving and emitting Unit 21: Gas distribution cell 22: Tube 23, 24: Light transmission window 25: Detection space 26: Gas inlet 27: Gas outlet 31: Transmitted light receiving unit 32: Reference light receiving unit 41: Gas adjusting unit 42: Ozone Generation unit 43: Gas mixing unit 44: Gas heating unit 51: Gas suction unit 61: Signal processing / drive control unit 71: Correction unit
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Abstract
Description
吸光分析計300は、紫外吸収法を用いてサンプルガスに含まれるNO2(二酸化窒素)濃度を測定する。吸光分析計300は、紫外光源301と、可視光源302と、リファレンスセル303と、サンプルセル304と、光案内機構305と、光検出部306と、制御部307と、演算部308と、を備えている。
このようにサンプルガスにNOガスおよびSO2ガスのガス成分が含まれている場合には、これらのNOガスおよびSO2ガスのガス成分の分析が困難であった。
サンプルガスをオゾンガスと混合して酸化反応させた後、加熱して第1測定対象ガスとして出力する酸化出力状態と、前記サンプルガスを無反応のまま第2測定対象ガスとして出力する通常出力状態と、が切換えられるガス調整部と、
二酸化窒素ガス(NO2ガス)が吸光する320~600nmの波長のNO2ガス吸光用照射光を照射するNO2ガス吸光用発光部と、
前記第1,第2測定対象ガスが流通する検出空間と、前記NO2ガス吸光用照射光を検出空間へ入射させる光透過窓と、を有するガス流通セルと、
前記光透過窓を透過しガス流通セル内を伝播した前記NO2ガス吸光用照射光を受光する透過光受光部と、
前記第1,第2測定対象ガスを前記ガス流通セルにそれぞれ流通させた状態で前記NO2ガス吸光用照射光を照射するように前記ガス調整部および前記NO2ガス吸光用発光部を制御する駆動制御部と、
前記透過光受光部の受光量に応じて得られる算出値に基づいて、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記サンプルガスに含まれる二酸化窒素ガス(NO2ガス)のガス濃度を算出し、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第2測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる一酸化窒素ガス(NOガス)のガス濃度を算出する信号処理部と、
を備えるガス分析計とした。
サンプルガスをオゾンガスと混合して酸化反応させた後、加熱して第1測定対象ガスとして出力する酸化出力状態と、前記サンプルガスを無反応のまま第2測定対象ガスとして出力する通常出力状態と、が切換えられるガス調整部と、
二酸化窒素ガス(NO2ガス)が吸光する320nm~600nmの波長のNO2ガス吸光用照射光を照射するNO2ガス吸光用発光部と、
二酸化硫黄ガス(SO2ガス)および二酸化窒素ガス(NO2ガス)が吸光する250nm~320nmの波長のSO2ガス吸光用照射光を照射するSO2ガス吸光用発光部と、
前記第1,第2測定対象ガスが流通する検出空間と、前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を検出空間へ入射させる光透過窓と、を有するガス流通セルと、
前記光透過窓を透過しガス流通セル内を伝播した前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する透過光受光部と、
前記第1測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光をおよび前記SO2ガス吸光用照射光を順次照射し、前記第2測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光を照射するように前記ガス調整部、前記NO2ガス吸光用発光部および前記SO2ガス吸光用発光部を制御する駆動制御部と、
前記透過光受光部の受光量に応じて得られる算出値に基づいて、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記サンプルガスに含まれる二酸化窒素ガス(NO2ガス)のガス濃度を算出し、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第2測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる一酸化窒素ガス(NOガス)のガス濃度を算出し、前記第1測定対象ガスに前記SO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる二酸化硫黄ガス(SO2ガス)のガス濃度を算出する信号処理部と、
を備えるガス分析計とした。
サンプルガスをオゾンガスと混合して酸化反応させた後、加熱して第1測定対象ガスとして出力する酸化出力状態と、前記サンプルガスを無反応のまま第2測定対象ガスとして出力する通常出力状態と、が切換えられるガス調整部と、
二酸化窒素ガス(NO2ガス)が吸光する320nm~600nmの波長のNO2ガス吸光用照射光を照射するNO2ガス吸光用発光部と、
二酸化硫黄ガス(SO2ガス)および二酸化窒素ガス(NO2ガス)が吸光する250nm~320nmの波長のSO2ガス吸光用照射光を照射するSO2ガス吸光用発光部と、
前記第1,第2測定対象ガスが流通する検出空間と、前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を検出空間へ入射させる光透過窓と、を有するガス流通セルと、
前記光透過窓を透過しガス流通セル内を伝播した前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する透過光受光部と、
前記第1測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光を照射し、前記第2測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を順次照射するように前記ガス調整部、前記NO2ガス吸光用発光部および前記SO2ガス吸光用発光部を制御する駆動制御部と、
前記透過光受光部の受光量に応じて得られる算出値に基づいて、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記サンプルガスに含まれる二酸化窒素ガス(NO2ガス)のガス濃度を算出し、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第2測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる一酸化窒素ガス(NOガス)のガス濃度を算出し、前記第2測定対象ガスに前記SO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる二酸化硫黄ガス(SO2ガス)のガス濃度を算出する信号処理部と、
を備えるガス分析計とした。
前記駆動制御部からの指令がない時は原料ガスを出力し、前記指令がある時は前記原料ガスからオゾンガスを生成してオゾンガスを含む原料ガスを出力するオゾン発生部と、
前記サンプルガスと前記原料ガスとを混合して出力するガス混合部と、
前記ガス混合部からの混合ガスを加熱して前記第1,第2測定対象ガスとして出力するガス加熱部と、
から構成される。
基準光として前記NO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルの検出空間を通過後に前記透過光受光部へ到達させる光路と、前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
を更に設け、
前記信号処理部は、前記基準光受光部の基準光の受光量と前記透過光受光部の透過光の受光量との比に基づいてガス濃度を算出するガス分析計とした。
基準光として前記NO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルを通過後に前記透過光受光部へ到達させる光路と、前記ガス流通セルの検出空間を不通過で前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
前記基準光受光部の基準光の受光量に基づいて、前記NO2ガス吸光用発光部の駆動電流を制御する補正部と、
を更に設けたガス分析計とした。
基準光として前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルを通過後に前記透過光受光部へ到達させる光路と、前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
を更に設け、
前記信号処理部は、前記基準光受光部の基準光の受光量と前記透過光受光部の透過光の受光量との比に基づいてガス濃度を算出するガス分析計とした。
基準光として前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルを通過後に前記透過光受光部へ到達させる光路と、前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
前記基準光受光部の基準光の受光量に基づいて、前記NO2ガス吸光用発光部および前記SO2ガス吸光用発光部の駆動電流を制御する補正部と、
を更に設けたガス分析計とした。
前記駆動制御部は、発光ダイオード(LED)またはレーザダイオード(LD)である前記NO2ガス吸光用発光部の出力と停止とを交互に行うパルスであって停止より出力が短くなるようなデューティー比の駆動電流を前記NO2ガス吸光用発光部に出力するガス分析計とした。
前記駆動制御部は、発光ダイオード(LED)またはレーザダイオード(LD)である前記NO2ガス吸光用発光部の出力と停止とを交互に行うパルスであって停止より出力が短くなるようなデューティー比の駆動電流を前記NO2ガス吸光用発光部に出力し、また、発光ダイオード(LED)である前記SO2ガス吸光用発光部の出力と停止とを交互に行うパルスであって停止より出力が短くなるようなデューティー比の駆動電流を前記SO2ガス吸光用発光部に出力するガス分析計とした。
ガス流入口26、ガス流出口27はこの検出空間25と連通する。測定対象ガスは、ガス流入口26から検出空間25へ流入し、ガス流出口27から流出する。
このようなガス流通セル21内では、流通する測定対象ガスに照射光が照射されて吸光が起こる。
ガス分析計100の構成はこのようなものである。
P1=P0・exp(-ε・c・L)
(a)酸化出力時のNO2ガス吸光用照射光による分析、
(b)酸化出力時のSO2ガス吸光用照射光による分析、
(c)通常出力時のNO2ガス吸光用照射光による分析、
(d)通常出力時のSO2ガス吸光用照射光による分析、
という4種類の分析が可能である。このうち(a),(b),(c)の分析によりガス濃度を算出する。
測定としては、上記(a),(b),(c)の分析を行い、それぞれ得られたガス濃度を用いて、NO,NO2,SO2の3成分のガス濃度を算出する。以下、各出力に分けて説明する。
NO+O3 → NO2+O2 ・・・化学反応式(1)
2NO2+O3 → N2O5+O2 ・・・化学反応式(2)
2N2O5 → 4NO2+O2 ・・・化学反応式(3)
2O3 → 3O2 ・・・化学反応式(4)
c3’=c3”―α×c4’
先に説明したように、
(a)酸化出力時のNO2ガス吸光用照射光による分析で算出されたNO2ガス濃度c4、
(b)酸化出力時のO3ガス吸光用照射光による分析で算出されたNO2ガス濃度c4およびSO2ガス濃度c3
(c)通常出力時のNO2ガス吸光用照射光による分析で算出されたNO2ガス濃度c2、
が測定されている。ここで、NO2ガス濃度c4が判別しているため、SO2ガス濃度c3も判別している。
c1 = c4 - c2
分析を利用し、(a),(c),(d)による分析を行うこともできる。その際、測定手順は酸化出力時の測定手順と同様でよい。なぜならば、SO2はオゾンによって酸化されないし、加熱部によって分解もされないため、酸化出力時においても通常出力時においても濃度に変化がないからである。すなわち(a)により酸化出力時のNO2ガス濃度c4を算出し、(c)通常出力時のNO2ガス吸光用照射光による分析で算出したNO2ガス濃度c2を算出し、(d)によりNO2ガス濃度c2およびSO2ガス濃度c3を算出する。SO2ガス濃度c3はオゾンに酸化されないため、酸化出力時のSO2ガス濃度c3と同じである。このようにしてSO2ガス濃度c3を算出するようにしても良い。これら(a),(c),(d)による分析でも本発明の実施が可能である。
ガス分析計100はこのようにして分析を行う。
同様に、基準光受光部32がSO2ガス吸光用発光部12からのSO2ガス吸光用照射光による基準光を受光してその強度信号を出力する。補正部71は、強度信号に基づき、出力強度が一定になるように発光ダイオード駆動電流である駆動信号を補正した上でSO2ガス吸光用発光部12へ出力する。例えば、最初にSO2ガス吸光用照射光の光量強度信号をメモリ部に記憶させておき、その最初の光量強度信号と同じとなるように制御するものである。
11:NO2ガス吸光用発光部
12:SO2ガス吸光用発光部
13:光路決定部
14:レンズ
15:レンズ
16:発光部
17:レンズ
18:レンズ
19:受発光部
21:ガス流通セル
22:管
23,24:光透過窓
25:検出空間
26:ガス流入口
27:ガス流出口
31:透過光受光部
32:基準光受光部
41:ガス調整部
42:オゾン発生部
43:ガス混合部
44:ガス加熱部
51:ガス吸引部
61:信号処理・駆動制御部
71:補正部
Claims (10)
- サンプルガスをオゾンガスと混合して酸化反応させた後、加熱して第1測定対象ガスとして出力する酸化出力状態と、前記サンプルガスを無反応のまま第2測定対象ガスとして出力する通常出力状態と、が切換えられるガス調整部と、
二酸化窒素ガス(NO2ガス)が吸光する320nm~600nmの波長のNO2ガス吸光用照射光を照射するNO2ガス吸光用発光部と、
前記第1,第2測定対象ガスが流通する検出空間と、前記NO2ガス吸光用照射光を検出空間へ入射させる光透過窓と、を有するガス流通セルと、
前記光透過窓を透過しガス流通セル内を伝播した前記NO2ガス吸光用照射光を受光する透過光受光部と、
前記第1,第2測定対象ガスを前記ガス流通セルにそれぞれ流通させた状態で前記NO2ガス吸光用照射光を照射するように前記ガス調整部および前記NO2ガス吸光用発光部を制御する駆動制御部と、
前記透過光受光部の受光量に応じて得られる算出値に基づいて、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記サンプルガスに含まれる二酸化窒素ガス(NO2ガス)のガス濃度を算出し、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第2測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる一酸化窒素ガス(NOガス)のガス濃度を算出する信号処理部と、
を備えることを特徴とするガス分析計。 - サンプルガスをオゾンガスと混合して酸化反応させた後、加熱して第1測定対象ガスとして出力する酸化出力状態と、前記サンプルガスを無反応のまま第2測定対象ガスとして出力する通常出力状態と、が切換えられるガス調整部と、
二酸化窒素ガス(NO2ガス)が吸光する320nm~600nmの波長のNO2ガス吸光用照射光を照射するNO2ガス吸光用発光部と、
二酸化硫黄ガス(SO2ガス)および二酸化窒素ガス(NO2ガス)が吸光する250nm~320nmの波長のSO2ガス吸光用照射光を照射するSO2ガス吸光用発光部と、
前記第1,第2測定対象ガスが流通する検出空間と、前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を検出空間へ入射させる光透過窓と、を有するガス流通セルと、
前記光透過窓を透過しガス流通セル内を伝播した前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する透過光受光部と、
前記第1測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光をおよび前記SO2ガス吸光用照射光を順次照射し、前記第2測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光を照射するように前記ガス調整部、前記NO2ガス吸光用発光部および前記SO2ガス吸光用発光部を制御する駆動制御部と、
前記透過光受光部の受光量に応じて得られる算出値に基づいて、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記サンプルガスに含まれる二酸化窒素ガス(NO2ガス)のガス濃度を算出し、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第2測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる一酸化窒素ガス(NOガス)のガス濃度を算出し、前記第1測定対象ガスに前記SO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる二酸化硫黄ガス(SO2ガス)のガス濃度を算出する信号処理部と、
を備えることを特徴とするガス分析計。 - サンプルガスをオゾンガスと混合して酸化反応させた後、加熱して第1測定対象ガスとして出力する酸化出力状態と、前記サンプルガスを無反応のまま第2測定対象ガスとして出力する通常出力状態と、が切換えられるガス調整部と、
二酸化窒素ガス(NO2ガス)が吸光する320nm~600nmの波長のNO2ガス吸光用照射光を照射するNO2ガス吸光用発光部と、
二酸化硫黄ガス(SO2ガス)および二酸化窒素ガス(NO2ガス)が吸光する250nm~320nmの波長のSO2ガス吸光用照射光を照射するSO2ガス吸光用発光部と、
前記第1,第2測定対象ガスが流通する検出空間と、前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を検出空間へ入射させる光透過窓と、を有するガス流通セルと、
前記光透過窓を透過しガス流通セル内を伝播した前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する透過光受光部と、
前記第1測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光を照射し、前記第2測定対象ガスを前記ガス流通セルに流通させた状態で前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を順次照射するように前記ガス調整部、前記NO2ガス吸光用発光部および前記SO2ガス吸光用発光部を制御する駆動制御部と、
前記透過光受光部の受光量に応じて得られる算出値に基づいて、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記サンプルガスに含まれる二酸化窒素ガス(NO2ガス)のガス濃度を算出し、前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第2測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる一酸化窒素ガス(NOガス)のガス濃度を算出し、前記第2測定対象ガスに前記SO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値から前記第1測定対象ガスに前記NO2ガス吸光用照射光を照射した時の受光量に応じて得られる算出値を減じて得た受光量の差を表す算出値を用いて前記サンプルガスに含まれる二酸化硫黄ガス(SO2ガス)のガス濃度を算出する信号処理部と、
を備えることを特徴とするガス分析計。 - 請求項1~請求項3の何れか一項に記載のガス分析計において、
前記ガス調整部は、
前記駆動制御部からの指令がない時は原料ガスを出力し、前記指令がある時は前記原料ガスからオゾンガスを生成してオゾンガスを含む原料ガスを出力するオゾン発生部と、
前記サンプルガスと前記原料ガスとを混合して出力するガス混合部と、
前記ガス混合部からの混合ガスを加熱して前記第1,第2測定対象ガスとして出力するガス加熱部と、
から構成されることを特徴とするガス分析計。 - 請求項1に記載のガス分析計において、
基準光として前記NO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルの検出空間を通過後に前記透過光受光部へ到達させる光路と、前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
を更に設け、
前記信号処理部は、前記基準光受光部の基準光の受光量と前記透過光受光部の透過光の受光量との比に基づいてガス濃度を算出することを特徴とするガス分析計。 - 請求項1に記載のガス分析計において、
基準光として前記NO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルを通過後に前記透過光受光部へ到達させる光路と、前記ガス流通セルの検出空間を不通過で前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
前記基準光受光部の基準光の受光量に基づいて、前記NO2ガス吸光用発光部の駆動電流を制御する補正部と、
を更に設けたことを特徴とするガス分析計。 - 請求項2または請求項3に記載のガス分析計において、
基準光として前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルを通過後に前記透過光受光部へ到達させる光路と、前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
を更に設け、
前記信号処理部は、前記基準光受光部の基準光の受光量と前記透過光受光部の透過光の受光量との比に基づいてガス濃度を算出することを特徴とするガス分析計。 - 請求項2または請求項3に記載のガス分析計において、
基準光として前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を受光する基準光受光部と、
前記NO2ガス吸光用照射光および前記SO2ガス吸光用照射光を、前記光透過窓を透過して前記ガス流通セルを通過後に前記透過光受光部へ到達させる光路と、前記基準光受光部へ到達させる光路と、により通過させる光路決定部と、
前記基準光受光部の基準光の受光量に基づいて、前記NO2ガス吸光用発光部および前記SO2ガス吸光用発光部の駆動電流を制御する補正部と、
を更に設けたことを特徴とするガス分析計。 - 請求項1に記載のガス分析計において、
前記駆動制御部は、発光ダイオード(LED)またはレーザダイオード(LD)である前記NO2ガス吸光用発光部の出力と停止とを交互に行うパルスであって停止より出力が短くなるようなデューティー比の駆動電流を前記NO2ガス吸光用発光部に出力することを特徴とするガス分析計。 - 請求項2または請求項3に記載のガス分析計において、
前記駆動制御部は、発光ダイオード(LED)またはレーザダイオード(LD)である前記NO2ガス吸光用発光部の出力と停止とを交互に行うパルスであって停止より出力が短くなるようなデューティー比の駆動電流を前記NO2ガス吸光用発光部に出力し、また、発光ダイオード(LED)である前記SO2ガス吸光用発光部の出力と停止とを交互に行うパルスであって停止より出力が短くなるようなデューティー比の駆動電流を前記SO2ガス吸光用発光部に出力することを特徴とするガス分析計。
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