WO2014081000A1 - Support d'isolation de base - Google Patents

Support d'isolation de base Download PDF

Info

Publication number
WO2014081000A1
WO2014081000A1 PCT/JP2013/081473 JP2013081473W WO2014081000A1 WO 2014081000 A1 WO2014081000 A1 WO 2014081000A1 JP 2013081473 W JP2013081473 W JP 2013081473W WO 2014081000 A1 WO2014081000 A1 WO 2014081000A1
Authority
WO
WIPO (PCT)
Prior art keywords
base
bridge
holding plate
spheres
dish
Prior art date
Application number
PCT/JP2013/081473
Other languages
English (en)
Japanese (ja)
Inventor
高田 声一
健郎 安達
Original Assignee
Ntn株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ntn株式会社 filed Critical Ntn株式会社
Publication of WO2014081000A1 publication Critical patent/WO2014081000A1/fr

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16DCOUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D59/00Self-acting brakes, e.g. coming into operation at a predetermined speed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/021Decoupling of vibrations by means of point-of-contact supports, e.g. ball bearings

Definitions

  • This invention relates to a base isolation table for protecting precision instruments and important products from earthquake shaking.
  • Patent Document 1 discloses a base isolation table having a structure in which a sphere is arranged in a dish-shaped recess.
  • This base is equipped with a dish-like recess at each of four locations of the square base and the moving board, and the moving board is movably supported on the base via a sphere arranged in each dish-like recess. Precision equipment to be protected is placed on the board.
  • the four spheres arranged in the dish-shaped recess are held by the sphere holding plate and move integrally.
  • the base is supported so as to be horizontally movable on a support plate disposed at the center thereof, and a moving plate is connected to the support plate via a collar and a bolt provided at the center of the support plate.
  • a compression spring is externally fitted to the bolt, and the moving plate is urged toward the base by the force of the compression spring.
  • the moving plate is connected to the support plate by bolts, so that the moving plate does not come off the base even if the moving plate moves in the vertical direction. Since resistance is generated by moving from the deepest position of the dish-shaped concave portion to the shallow position, horizontal shaking is attenuated. When the sphere reaches the edge of the dish-like recess, the cushion provided on the outer periphery of the collar comes into contact with the periphery (guard) of the hole in the base, and further horizontal movement is restricted. The vertical displacement of the moving board at that time is reduced by the expansion and contraction of the compression spring. When the shaking subsides, the spherical body returns to the center position of the dish-shaped recess by the dead weight of the moving board and the precision instrument placed thereon, and returns to the initial state.
  • Patent Document 2 In order to prevent the ⁇ -axis rotation of the moving table in the base-isolated table, there is one in which the moving table is moved along the guide rail (Patent Document 2).
  • the above-mentioned seismic isolation table suppresses the backlash of the moving board by a compression spring and suppresses rattling, there is a risk that the movement of the moving board may be hindered if the force of the compression spring is generated against the moving board. There is. In particular, when the moving plate moves maximum and the sphere comes to the edge of the dish-shaped recess, the force of the compression spring becomes maximum, and the return operation of the moving plate is hindered.
  • a rotational force in the ⁇ -axis direction is generated on the moving plate due to variations in the rolling torque of the sphere generated for each base-isolated table,
  • the moving board may rotate in the ⁇ -axis direction.
  • the seismic isolation effect of the base isolation table decreases, and the load on the base isolation table may randomly rotate in the left-right direction, causing the loads to collide with each other.
  • the seismic isolation table of Patent Document 2 moves the moving table along the guide rail to prevent the rotation of the ⁇ axis, but it is necessary to arrange the four steel balls and adjust the guide rail to each load. There is a problem that it is difficult to modularize the base.
  • the present invention can easily connect a plurality of units to form a seismic isolation device for large equipment, simplify the structure and facilitate the assembly, and prevent the movable table from rotating in the ⁇ -axis direction.
  • the issue is to provide a base isolation table.
  • the present invention provides a base provided with two dish-like recesses, a moving board provided with two dish-like recesses, and two dish-like recesses and a moving board provided on the base.
  • a base provided with two dish-like recesses
  • a moving board provided with two dish-like recesses
  • two dish-like recesses and a moving board provided on the base.
  • Each of the spheres disposed between the two dish-shaped recesses, a cage composed of two holding plates that sandwich and connect the spheres from above and below, and fixed to the base. Between the spheres and fixed to the base-side bridge passing through the upper side of the lower holding plate of the two holding plates, and between the spheres.
  • a bridge on the moving board passing through the lower side of the upper holding plate among the holding plates, and between the lower holding plate and the bridge on the base side, or between the upper holding plate and the bridge on the moving board side. At least one of the holding plate and the bridge slides according to the movement of the moving plate. Those that cross angle of the bridge were placed sandwiching the ⁇ -axis rotation preventing member for holding constant.
  • the ⁇ -axis rotation preventing member has a holding plate guide groove for slidably guiding the holding plate on one surface, and a planar member having a bridge guide groove for slidably guiding the bridge on the other surface. Can be configured.
  • ⁇ A brake mechanism that restricts the movement of the sphere held by the cage can be provided.
  • the brake mechanism can be constituted by a sliding member provided between the cage and the sphere, which presses the sphere and applies a frictional force.
  • two or three spheres are arranged between the base and the moving board, and a brake member (friction member) is arranged between each set of spheres.
  • the speed of movement of a set of two or three spheres by applying a frictional force by pressing a brake member (friction member) arranged between each set of spheres with a force of the spheres toward the center of the dish-shaped recess. You may perform the braking which decelerates.
  • a large seismic isolation device can be obtained by connecting a plurality of the base isolation tables of the present invention with connecting members.
  • a base isolation base with a ⁇ -axis rotation prevention member sandwiched between the lower holding plate and the bridge on the base side, and the upper base isolation device It is possible to alternately combine a base plate with a ⁇ -axis rotation prevention member sandwiched between the holding plate and the bridge on the moving board side.
  • the present invention is advantageous in that it is easy to connect a plurality of units to form a seismic isolation device for a large-sized device, simplify the structure and facilitate assembly, and prevent the rotation of the moving board in the ⁇ -axis direction. Play.
  • FIGS. 2A and 2B are diagrams illustrating the X-direction operation of the base isolation table of FIG. 1, in which FIG. 1A is a plan view and FIG.
  • FIGS. 2A and 2B are diagrams illustrating the Y-direction operation of the base isolation table of FIG. 1, in which FIG. 1A is a plan view and FIG. It is the top view which showed the seismic isolation apparatus which connected the some base isolation table.
  • 9A is a cross-sectional view taken along line AA in FIG. 9, and FIG. 9B is a cross-sectional view taken along line BB in FIG.
  • It is sectional drawing which showed the base isolation table with the brake part which concerns on other embodiment of this invention.
  • the base isolation table 1 of this embodiment is a rectangular base 2 provided with two circular dish-shaped recesses 21. And a rectangular moving board 3 provided with two circular dish-like recesses 31. Support protrusions 21a and 31a are respectively formed at the center of the back surface of the dish-shaped recess 21 and the dish-shaped recess 31, and the support protrusion 21a is fitted and fixed in a support hole 22 formed in the base 2. The support protrusion 31 a is fitted and fixed in a support hole 32 formed in the moving plate 3.
  • a steel sphere 4 is disposed between the dish-shaped recess 21 of the base 2 and the dish-shaped recess 31 of the moving board 3. At the origin position in the base isolation table 1, the sphere 4 is located at the bottom of the dish-shaped recesses 21 and 31.
  • the direction in which the two spheres 4 are arranged in the base isolation table 1 is the Y direction
  • the horizontal direction perpendicular to the Y direction is the X direction
  • the vertical direction Is the Z direction.
  • the two spheres 4 arranged between the dish-shaped recesses 21 and 31 are held by the cage 5 and can move integrally.
  • the lower (board side) holding plate 51 and the upper (moving plate side) holding plate 52 in the cage 5 are connected in a state where the two spheres 4 are sandwiched from above and below.
  • a spacer 53 is provided between the lower holding plate 51 and the upper holding plate 52.
  • the lower holding plate 51 has a mortar-shaped receiving hole 51a for receiving the sphere 4 at both ends thereof. Further, four screw holes 51b are formed around the receiving hole 51a.
  • the upper holding plate 52 has a mortar-shaped receiving hole 52a for receiving the sphere 4 at both ends thereof.
  • the inclined raised portion 52b has a constant height in the X direction. Screw insertion holes 52b are formed at four locations around the receiving hole 52a.
  • the spacer 53 has a through hole 53a for accommodating the steel ball 4 in the center as shown in FIGS. 4 (A) and 4 (B). Further, screw insertion holes 53b are formed at four locations around the through hole 53a.
  • a bridge 23 on the base side is fixed to the base 2.
  • the bridge 23 on the base side is provided so that its horizontal portion passes between the two spheres 4 and passes above the lower holding plate 51.
  • the bridge 33 on the movable board side is provided so that the horizontal portion passes between the two spheres 4 and below the upper holding plate 52.
  • both the bridges 23, 33 have leg portions 23a, 33a at both ends, and the leg portions 23a, Two screw insertion holes through which screws for fixing the bridges 23 and 33 to the base 2 or the moving board 3 are inserted are formed in 33a.
  • the ⁇ -axis rotation preventing member 8 includes a holding plate guide groove 81 that slidably guides the holding plates 51 and 52 on one surface, and slidably guides the bridges 23 and 33 on the other surface. It consists of a planar member having a bridge guide groove 82.
  • the holding plate guide groove 81 and the bridge guide groove 82 are orthogonal to each other in accordance with the crossing angle (90 °) between the holding plates 51 and 52 and the bridges 23 and 33.
  • the sliding portions of the holding plate guide groove 81 and the bridge guide groove 82 of the ⁇ -axis rotation preventing member 8 on which the holding plates 51 and 52 and the bridges 23 and 33 slide are provided on a sliding material such as a lubricant and resin, plating, and the like. It is preferable to perform the surface modification treatment or combination treatment thereof.
  • two large seismic isolation devices can be manufactured by connecting two seismic isolation tables 1 with a connecting material 11.
  • the said spherical body 4 increases in units of two. Since the two spheres 4 are integrated by the cage 5 in each seismic isolation table 1, it is possible to increase the number of spheres 4 even when the cages 5 are not coupled to each other. On the other hand, it is not particularly necessary to increase the rigidity of the cage 5, and there are no disadvantages such as an increase in weight and a slow movement of the moving plate.
  • the said base isolation table 1 since the said base isolation table 1 has connected the said moving board 3 to the said base
  • the holding plates 51 and 52 and the bridges 23 and 33 are guided by the holding plate guide groove 81 and the bridge guide groove 82 of the ⁇ -axis rotation preventing member 8 so that the crossing angle is held constant. Therefore, rotation in the ⁇ -axis direction is prevented between the base 2 and the moving board 3, and the degree of rattling can be reduced.
  • the holding plate 5 is configured to contact the base-side bridge 23 and the mobile-board side bridge 33 at the maximum setting position of the relative position change between the base 2 and the mobile board 3, the mobile board 3 Can be limited within the range of the maximum setting position.
  • the edge position of the said dish-shaped recessed parts 21 and 31 was illustrated as said maximum setting position, it can also be set as the position just before an edge.
  • the base isolation table 1 (the right side in FIG. 9) in which the ⁇ -axis rotation preventing member 8 is sandwiched between the lower holding plate 51 and the bridge 23 on the base side
  • a base isolation table (left side in FIG. 9) in which the ⁇ -axis rotation preventing member 8 is sandwiched between the holding plate 52 and the bridge 33 on the moving board side is combined.
  • FIGS. 11 to 13 are cross-sectional views showing a base isolation table 1 having a brake mechanism 6 according to another embodiment of the present invention.
  • the brake mechanism 6 of the base isolation table 1 shown in FIG. 11 is formed with a bottomed hole 61 in the spacer 53 between the lower holding plate 51 and the upper holding plate 52 and directed toward the sphere 4.
  • a spring (biasing member) 62 is provided in the bottom hole 61.
  • a cylindrical brake member (friction member) 63 is inserted into the bottomed hole 61, and the tip end side of the brake member 63 comes into contact with the sphere 4 by the bias of the spring 61, thereby Braking is performed to reduce the moving speed.
  • FIG. 12 is a cross-sectional view showing a base isolation table 1 having a brake mechanism 6 according to another embodiment of the present invention.
  • the brake mechanism 6 of the base isolation table 1 shown in FIG. 12 includes a mortar-shaped receiving hole 51 a that receives the sphere 4 of the lower holding plate 51 and a mortar-shaped receiving hole that receives the sphere 4 of the upper holding plate 52.
  • a brake member (friction member) 64 for applying a frictional force to the sphere 4 is provided at 52a to perform braking to decelerate the moving speed of the sphere 4.
  • FIG. 13 is a cross-sectional view showing a base isolation table 1 having a brake mechanism 6 according to another embodiment of the present invention.
  • two or three spheres 4 arranged between the dish-shaped recesses 21 and 31 are made into one set, and a brake member (friction member) 65 is arranged between the spheres 4 of each set.
  • the pair of spheres 4 presses the brake member (friction member) 65 disposed between the spheres 4 of each set with a force toward the center of the dish-shaped recesses 21 and 31 by the load so that a friction force is applied.
  • shear pin that breaks when a force of a predetermined value or more is generated in the horizontal direction.
  • the shear pin is provided so as to connect, for example, one place or a plurality of places on the base plate 2 and the moving board 3 between the end faces.
  • Base isolation table 2 Base 21 Dish-shaped recessed part 23 Bridge on the base side 23a Leg part 3 Moving board 31 Dish-shaped recessed part 33 Bridge on the moving board side 33a Leg part 4 Steel ball 5 Cage 51 Lower holding plate 51b Screw hole 52 Upper holding plate 52b Screw insertion hole 53 Spacer 6 Brake mechanism 61 Bottomed hole 62 Spring (biasing member) 63 Brake member (friction member) 64 Brake member (friction member) 65 Brake member (friction member) 8 ⁇ -axis rotation prevention member 81 Holding plate guide groove 82 Bridge guide groove

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Braking Arrangements (AREA)
  • Buildings Adapted To Withstand Abnormal External Influences (AREA)

Abstract

La présente invention aborde le problème de réalisation d'un support d'isolation de base, qui peut facilement être fabriqué en un support d'isolation de base pour grand équipement, pour lequel la structure a été simplifiée et l'assemblage est aisé, et qui peut également prévenir la rotation du support mobile dans la direction de l'axe θ. Le support d'isolation de base est équipé de : une base (2) pourvue de deux concavités en forme de cuvette (21); un plateau mobile (3) pourvu de deux concavités en forme de cuvette (31); des sphères (4) disposées entre les deux concavités en forme de cuvette (21) et les deux concavités en forme de cuvette (31); une cage (5) obtenue à partir de deux plaques de retenue (51, 52) qui sont reliées, intercalant les sphères (4) entre elles par le haut et par le bas; un pont côté base (23) qui passe au-dessus de la plaque de retenue inférieure (51) des deux plaques de retenue (51, 52); et un pont côté plateau mobile (33) qui passe en dessous de la plaque de retenue supérieure (52). Entre la plaque de retenue inférieure (51) et le pont côté base (23) et/ou entre la plaque de retenue supérieure (52) et le pont côté plateau mobile (33), est intercalé un élément de prévention de rotation dans l'axe θ (8), qui maintient l'angle d'intersection de la plaque de retenue (51, 52) et du pont (23, 33) constant en conséquence des plaques de retenue (51, 52) qui coulissent par rapport aux ponts (23, 33) selon le mouvement du plateau mobile (3).
PCT/JP2013/081473 2012-11-26 2013-11-22 Support d'isolation de base WO2014081000A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012257139A JP5956315B2 (ja) 2012-11-26 2012-11-26 免震台
JP2012-257139 2012-11-26

Publications (1)

Publication Number Publication Date
WO2014081000A1 true WO2014081000A1 (fr) 2014-05-30

Family

ID=50776176

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/081473 WO2014081000A1 (fr) 2012-11-26 2013-11-22 Support d'isolation de base

Country Status (2)

Country Link
JP (1) JP5956315B2 (fr)
WO (1) WO2014081000A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106838110A (zh) * 2017-03-17 2017-06-13 四川世诚电子信息系统有限责任公司 滚珠限位夹持套、夹持组件及其隔震装置
CN108221652A (zh) * 2018-03-19 2018-06-29 西安建筑科技大学 一种球形摩擦摆隔震支座
CN110241930A (zh) * 2019-07-15 2019-09-17 无锡安特斯密减隔震科技有限公司 一种摩擦摆支座

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7144314B2 (ja) * 2018-12-27 2022-09-29 株式会社神鋼環境ソリューション 回転構造物及び焼却炉
KR102263376B1 (ko) * 2020-10-13 2021-06-10 주식회사 에스앤와이시스템 볼캐스터를 구비한 최소높이 구조의 면진장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000240721A (ja) * 1999-02-22 2000-09-05 Itoki Crebio Corp 免震台
JP2000314443A (ja) * 1999-04-30 2000-11-14 Itoki Crebio Corp ボール式免震台のダンパー装置
JP2005054869A (ja) * 2003-08-04 2005-03-03 Nachi Fujikoshi Corp 免震装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000240721A (ja) * 1999-02-22 2000-09-05 Itoki Crebio Corp 免震台
JP2000314443A (ja) * 1999-04-30 2000-11-14 Itoki Crebio Corp ボール式免震台のダンパー装置
JP2005054869A (ja) * 2003-08-04 2005-03-03 Nachi Fujikoshi Corp 免震装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106838110A (zh) * 2017-03-17 2017-06-13 四川世诚电子信息系统有限责任公司 滚珠限位夹持套、夹持组件及其隔震装置
CN108221652A (zh) * 2018-03-19 2018-06-29 西安建筑科技大学 一种球形摩擦摆隔震支座
CN110241930A (zh) * 2019-07-15 2019-09-17 无锡安特斯密减隔震科技有限公司 一种摩擦摆支座

Also Published As

Publication number Publication date
JP2014105723A (ja) 2014-06-09
JP5956315B2 (ja) 2016-07-27

Similar Documents

Publication Publication Date Title
WO2014081000A1 (fr) Support d'isolation de base
JP2017040366A (ja) 上下免震装置
JP2008025830A (ja) 免震装置
JP4454722B2 (ja) 物品搭載用の免震装置
JP4754393B2 (ja) 免震テーブル
JP4711055B2 (ja) 水平移動装置又は免震装置及びその組立方法
US10770259B2 (en) Stage device and charged particle beam device
WO2013125390A1 (fr) Support d'isolation sismique
JP6274172B2 (ja) 免震テーブル装置
JP2010180961A (ja) 振動絶縁装置及び摩擦ダンパ
JP4110056B2 (ja) 免震装置
JP2013083299A (ja) 免震台
JP2006307915A (ja) 水平移動部品及び水平移動装置又は免震装置
JP2005325850A (ja) 免震装置
JPH04113046A (ja) 防振装置
JP2005147218A (ja) 転がり免震支承体
JP2011085183A (ja) 平面軸受
JP5199203B2 (ja) 収納ボックス
JPH04107339A (ja) 防振装置
JP6288579B2 (ja) 免震構造
JP5554950B2 (ja) 免震又は制振機構
KR102195904B1 (ko) 스테이지장치
JP2013249946A (ja) 免震装置
JP5574505B2 (ja) 免震床構造
JP4221512B2 (ja) 移動テーブル装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13857171

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13857171

Country of ref document: EP

Kind code of ref document: A1