WO2014071708A1 - Technological process for continuously sintering rare earth permanently magnetic alloy and sintering equipment therefor - Google Patents

Technological process for continuously sintering rare earth permanently magnetic alloy and sintering equipment therefor Download PDF

Info

Publication number
WO2014071708A1
WO2014071708A1 PCT/CN2013/071355 CN2013071355W WO2014071708A1 WO 2014071708 A1 WO2014071708 A1 WO 2014071708A1 CN 2013071355 W CN2013071355 W CN 2013071355W WO 2014071708 A1 WO2014071708 A1 WO 2014071708A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
box
valve
plate
rare earth
Prior art date
Application number
PCT/CN2013/071355
Other languages
French (fr)
Chinese (zh)
Inventor
孙宝玉
陈晓东
Original Assignee
沈阳中北通磁科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 沈阳中北通磁科技股份有限公司 filed Critical 沈阳中北通磁科技股份有限公司
Publication of WO2014071708A1 publication Critical patent/WO2014071708A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/003Apparatus, e.g. furnaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/028Multi-chamber type furnaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/045Furnaces with controlled atmosphere
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C2202/00Physical properties
    • C22C2202/02Magnetic
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C33/00Making ferrous alloys
    • C22C33/02Making ferrous alloys by powder metallurgy

Definitions

  • the invention relates to a continuous sintering process method for a NdFeB rare earth permanent magnet alloy and a sintering device thereof, and belongs to the technical field of a permanent magnet alloy processing device and a process.
  • R-Fe-B NdFeB rare earth permanent magnets with R 2 Fe 14 B type compound as the main phase have been used more and more for their excellent magnetic properties, and are widely used in medical magnetic resonance imaging, computers. Hard disk drives, mobile phone vibration motors, hybrid car motors, wind turbines, etc.
  • the existing NdFeB rare earth permanent magnet alloy vacuum sintering furnace is a single-chamber furnace with heating and rapid cooling functions, and some sintering furnaces are also provided with a protective atmosphere glove box. Because the inner heating furnace can only be heated under vacuum, the heating speed is slow, and the long-term use temperature uniformity is deteriorated; because the heating and cooling processes are repeated every time, the inert gas is consumed more, the energy consumption is large, and the heater and The insulation layer causes pollution and the service life of the sintering furnace is greatly shortened.
  • the present invention provides a continuous sintering process of a rare earth permanent magnet alloy and a sintering apparatus therefor.
  • the sintering process method of the present invention has the following process:
  • the press-formed rare earth permanent magnet powder alloy blank is subjected to air-packaging treatment, transferred to a preparation box, closed the door, vacuumed or filled with inert gas to replace the air in the tank; when the pressure of the preparation box and the glove box is balanced, Open the 6ft isolation valve between the boxes, transfer the packaged blanks to the glove box, and close the 6ft isolation valve between the boxes; unpack the blanks into the magazine in the glove box, the boxes are arranged in a row; when the glove box and the transfer box Pressure balance, open the 7ft isolation valve between the boxes, transfer the smashed box to the transfer sealing box, and close the 7ft isolation valve between the boxes; the smashed box is transferred to the robot at the interface with the loading chamber, and the material is fed by the robot The box is loaded into the rack of the loading chamber; in the above process, the oxygen content of each box and the charging chamber is ⁇ 50 ( ⁇ ?111 ;
  • the heating degassing chamber is in a vacuum state, the heating temperature is 400-500 °C, the 2ft isolation valve is opened, the material rack is transferred to the heating degassing chamber, and the 2ft isolation valve is closed; Degree from 400 ° C ⁇ 900 ° C take a number of heating and holding 2-4 hours, the vacuum reached 3E_2Pa;
  • the sintering chamber is in a vacuum state, the heating temperature is up to 850 ° C, the 3 ft isolation valve between the chambers is opened, the material rack is transferred to the heating degassing chamber, and the 3 ft isolation valve is closed; when the vacuum degree is higher than 3E-2 Pa, the temperature is further increased. Heating temperature to 1040 ° C ⁇ 1080 ° C sintering, the degree of vacuum reaches lE-2Pa;
  • the cooling chamber is in a vacuum state, open the 4ft isolation valve between the chambers, the rack is transferred to the cooling chamber, and the 4ft isolation valve is closed; the nitrogen or argon gas is filled to 0. OlMPa, and the rare earth in the box and the box is activated.
  • the magnetic alloy is cooled and cooled to below 80 ° C; when the chamber pressure is balanced to atmospheric pressure, the outlet chamber door is opened, the rack is transferred to the outlet transition frame, and the outlet chamber door is closed; the cartridge in the rack is taken from the material Take out
  • the material rack enters the inlet transition frame through the return line, the lock chamber is inflated to atmospheric pressure, the chamber door is opened, the rack is transferred to the lock chamber, and the inlet chamber door is vacuumed to lPa, and the inert gas is filled.
  • the pressure between the lock chamber and the loading chamber is balanced.
  • the 5ft isolation valve is opened between the chambers. The rack is transported to the loading chamber for loading the cartridge, and the 5ft isolation valve is closed.
  • an aging chamber can be connected in series through the isolation valve, and the rack is transported to the aging chamber at a heating temperature of 800 ° C to 900 ° C for 2 to 4 hours. Hour; heating temperature 450 ° C ⁇ 550 ° C, time 2 ⁇ 4 hours.
  • a cooling chamber 2 may be connected in series through the isolation valve, and the rack is transported to the cooling chamber 2; nitrogen or argon gas is supplied to 0.01 MPa to 0.19 MPa, Start the fan to cool the rare earth permanent magnet alloy in the material box and the material box, and cool it to below 80 °C; when the chamber pressure is balanced to atmospheric pressure, open the end chamber door, the material rack is transferred to the end transition frame, and the outlet end is closed. Door; remove the magazine from the rack from the rack.
  • the invention adopts a sintering device for a continuous sintering process of a rare earth permanent magnet alloy, which comprises a preparation box, a glove box, a sealed transfer box, and a lock chamber, a charging chamber, a preheating chamber, a heating degassing chamber, and a sintering.
  • each outdoor is provided with a return frame with a transmission device, the return frame is connected with the transition frame of the inlet and the exit, the frame is suspended and reciprocated on the transmission device, and the material box is conveyed to the rack through the sealed transfer box, and is preheated.
  • the chamber, the heating degassing chamber and the sintering outdoor wall are respectively provided with a water-cooled tube or a water-cooled jacket, an evacuation line, an inert gas introduction line, a safety valve and a pressure gauge.
  • the preheating chamber, the heating degassing chamber and the sintering chamber are respectively provided with vertical rectangular heating Furnace, the inner wall of the heating furnace is provided with a heat insulation layer, and a plurality of heaters are arranged inside the heat insulation layer, each set of heaters is provided with a thermocouple, and the temperature is grouped and controlled; the transmission device is disposed outside the heating furnace, and the upper part of the heating furnace There is a heat insulation board that can be opened and closed.
  • the isolation valve between the chambers is a one-way sealing flapper valve, comprising a valve body, a second cylinder, a plurality of cylinders or cylinders, a first valve plate and front and rear blind flanges, wherein the valve body corresponds to two
  • the front side is provided with front and rear blind flanges respectively, and the outer part of the front blind flange is provided with a second cylinder and a cooling water pipe assembly;
  • the valve body is provided with a first valve plate parallel to the other two sides, and the first valve plate is passed through the valve plate
  • the device is suspended in the upper part of the valve body, and the valve plate traveling device is rigidly connected with the cylinder rod head portion of the external second cylinder.
  • the bottom of the first valve plate is provided with a second roller and a bottom rail thereof, and the first valve plate is welded with a water-cooled tube or The jacket, the water-cooled pipe or the jacket is connected to the two sealed rigid cooling water pipe shafts through the hose of the cooling water pipe assembly, and the cooling water pipe shaft is connected with the cylinder rod of the second cylinder to realize linkage, and the first valve plate is displaced and cooled.
  • the water pipe shaft is relatively stationary, and a plurality of cylinders or cylinders are respectively connected with the two ends of the first valve plate to lock the first valve plate to achieve sealing.
  • a side wall of the cooling chamber is provided with a second motor, and a bellows is arranged inside, a side plate of the wind box has a plurality of guiding tubes, and a corresponding side has a heat exchanger, and an air outlet of the heat exchanger faces the air inlet of the fan.
  • the fan is connected to the second motor shaft, and a curved baffle is arranged around the cooling chamber wall; the external connection is connected with an evacuation line, an inert gas introduction line and a safety valve line; and the vacuum line is connected with the vacuuming device.
  • the preheating chamber is equipped with a wax collection tank as a dewaxing chamber.
  • the transmission device includes a first motor, a chain, a gear pair, two bearing seats, two parallel rails, two sets of first rollers, two first sprocket wheels, a second sprocket and a chain plate, and the two first
  • the sprocket is mounted on a hinge shaft extending out of the housing through each of the chamber housings, and the first motor output shaft is connected to the first sprocket by a chain, and one end of the two bearing housings is respectively mounted on the sprocket shaft in the housing, and the other end
  • a shaft parallel to the hinge shaft is connected between the shaft and the hinge shaft
  • the second sprocket is mounted on the sprocket shaft in the housing, and the two sets of first rollers are placed in the two parallel guide rails.
  • a chain plate that cooperates with the second sprocket is mounted on the roller shaft by its roller shaft connection, and the other end of the chain plate is connected to the rack link.
  • the spring seat is connected to the bearing housing, and the other end of the spring plate is connected to the housing of each chamber.
  • the spring plate is forced to tightly connect the second sprocket and the chain plate.
  • the preparation box, the glove box and the tunnel transmission sealing box are vacuum or protective atmosphere sealed boxes, respectively provided with an evacuation pipeline connection vacuum device, and an inert gas inflation pipeline is connected to the inert gas system;
  • each box is provided with a pressure gauge and a vacuum gauge,
  • a balance valve line is connected between the adjacent two tanks, and the pressure of the two tanks is balanced by the balance valve line.
  • the inter-chamber isolation valve includes a valve box body, a third cylinder and a second valve plate disposed therein, a hinge plate, a connecting rod, a third roller, a guiding track and a collision block, and the second valve plate passes
  • a plurality of connecting rods are connected to the hinge plate, a guiding rail is arranged in the valve box body, and a third roller sliding along the guiding rail is arranged on the hinge plate, the third cylinder is placed outside the valve box, and the cylinder rod extends into the valve body
  • the collision block is placed on the valve end cover of the valve box body
  • the second valve plate is provided with a rubber ring near the flange end of the valve port side
  • the third cylinder drives the hinge plate to move on the guide roller track, the second valve plate
  • the connecting rod pushes the second valve plate toward the valve port side flange, and the compression apron completes the isolation and sealing function.
  • the invention decomposes the heating, sintering and cooling processes into different vacuum chambers, avoids repeated heating and cooling of the existing single-chamber sintering furnace, and has low energy consumption and low efficiency.
  • the problem that the heater and the heat insulation layer are polluted the problem of dewaxing of the blank can be effectively solved, and the production capacity and product consistency are greatly improved under the premise of energy saving, and the service life of the equipment is improved, and the maintenance time of the equipment is shortened.
  • the vertical rectangular heating furnace is arranged in the preheating chamber, the heating degassing chamber and the sintering chamber of the invention, and the heating temperature is grouped and controlled, the heating zone has a narrow width, uniform heating, fast cooling and high efficiency.
  • anaerobic conveying and continuous sintering improve the performance of the product and ensure the consistency of the magnetic properties of the sintered rare earth permanent magnet alloy.
  • the transmission device of the present invention is provided with the same transmission structure as that of each chamber to realize reciprocating transmission.
  • Figure 1 is a schematic view of the structure of the present invention.
  • 2 is a cross-sectional structural view of the heating degassing chamber of FIG. 1.
  • Figure 3 is a left side view of Figure 2.
  • FIG 4 is a schematic view showing the structure of the cooling chamber of Figure 1.
  • Figure 5 is a schematic view showing the structure of the inter-chamber isolation valve of Figure 1.
  • Figure 6 is a left side view of Figure 5.
  • Figure 7 is a top plan view of Figure 5.
  • Figure 8 is a schematic view showing the structure of the preparation box of Figure 1.
  • Figure 9 is a schematic view showing the structure of the glove box of Figure 1.
  • Figure 10 is a schematic view showing the structure of the isolation valve between the boxes in Figure 1.
  • the rare earth permanent magnet alloy continuous sintering furnace of the present invention is arranged in order a preparation box 37, a glove box 39, a sealed transfer box 41, and a lock chamber 10, a charging chamber 44, a preheating chamber 16, a heating degassing chamber 26, a sintering chamber 29, a cooling chamber 34, and a transmission of each chamber
  • the return line frame and each chamber vacuuming device are arranged, and each chamber is connected by an inter-chamber isolation valve, and the sealed transmission box 41 is connected with the charging chamber 44;
  • each chamber transmission device is arranged at an upper part of each chamber, and each outdoor is provided with a belt
  • a return frame with a transmission, each of the transmissions together with the return frame and the transmission thereon constitutes a suspended conveyor system
  • the return frame is connected to the inlet and outlet transition frames 3, 36, the material frame 2 is suspended and reciprocated on the transmission device, and the cartridge 42 is conveyed to the rack 2 via the sealed transfer box 41, the preheating chamber 16 and the heating off
  • the outer walls of the gas chamber 26 and the sintering chamber 29 are respectively provided with a water-cooling tube 52 or a water-cooling jacket, a vacuuming line, an inert gas introduction line 15, a safety valve 17, a 1 ft pressure gauge 12, and a vacuum gauge 13.
  • the preparation box 37, the glove box 39 and the tunnel-type sealed transfer box 41 are vacuum or protective atmosphere sealed boxes, respectively, and are provided with evacuation lines connected to the vacuum device, and an inert gas inflation line is provided. 1 for filling an inert gas; an isolation valve between the two adjacent boxes is provided, and the other end of the preparation box 37 is provided with a box door, and the sealed transfer box 41 is provided with a magazine 2 for loading the cartridge 42 into the loading chamber.
  • the robot 43 (manipulator 43 is the existing structure); each box is provided with a pressure gauge and a vacuum gauge, and a balance valve line is connected between each tank, and the pressure of the two tanks is balanced by the balance valve line.
  • the preparation box 37, the glove box 39 and the tunnel-type sealed transfer box 41 respectively have lft, 2 ft bottom roller transmissions 97, 104 and a transfer cartridge 42, which are existing structures, and are more Roller parallel transmission structure.
  • the preparation box 37 is a vertical sealed square box, and has a box door 90 at one end, a 6 ft isolation valve 38 at one end, and a l ft deflation valve line 9 1 , 1 ft electric control cabinet on the box body 92, 1 ft viewing window 93, 1 ft inflation valve line 94 and balance gas pressure line and 2 ft pressure gauge 95; the cartridge 42 in the housing is driven by a 1 ft bottom roller drive 97.
  • the glove box 39 is a vertical sealed square box, and one end is a 6 ft isolation valve 38 connected to the preparation box 37, and one end has a 7 ft isolation valve 40.
  • the box body has a glove flange assembly 98 and a 2 ft observation window. 99, 2 ft electric control cabinet 100, 2 ft deflation valve line 10 1, 2 ft inflation valve line 102 and 3 ft pressure gauge 103, a 2 ft bottom roller drive 104 is provided in the casing.
  • the tunnel type sealed transfer box 41 is a vertical sealed box connected to the side of the box of the charging chamber 44, and is provided with a deflation valve line, an inflation valve line, a pressure gauge and a bottom roller. Wheel drive.
  • a box 42 for arranging the chips is arranged in the box.
  • the robot 43 is loaded into the hanging rack 2; the bottom roller driving device is driven by a plurality of rollers arranged side by side.
  • the isolation valve between the boxes is a one-way sealed flap valve structure.
  • a valve housing a third cylinder 105, and a second valve plate 110 disposed therein, a hinge plate 1 1 1 , a connecting rod 12 12, a third roller 107, a guide rail 108, and a collision block 13 13, the second The valve plate 1 10 is connected to the hinge plate 11 1 through a plurality of connecting rods 1 12 , and a guiding rail 108 is disposed in the valve box body, and a third roller 107 sliding along the guiding rail 108 is disposed on the hinge plate 11 1 .
  • the three cylinders 105 are placed outside the valve box, the cylinder rods extend into the valve body and are connected to the hinge plate 111, the block 1 13 is placed on the valve end cover 1 14 of the valve box body, and the second valve plate 1 10 is close to the valve port.
  • the side of the side flange 18 is provided with a rubber ring 109, the third cylinder 105 drives the hinge plate 1 1 1 to move on the guiding rail 108, the second valve plate 1 10 hits the collision block 13, and the connecting rod 1 12 pushes the second valve plate 1 10 Close to the valve port side flange 18, compressing the second apron 109 to complete the isolation and sealing action.
  • the third cylinder 105 is provided with a third magnetic switch 106 for displaying the moving position of the second valve plate 110.
  • the preheating chamber 16, the heating degassing chamber 26 and the sintering chamber 29 are respectively provided with a vertical rectangular heating furnace. As shown in FIG. 2 and FIG. 3, the inner wall of the heating furnace is provided with a heat insulating layer (from top to bottom).
  • the heat insulating layer 56, 61 and the two side heat insulating layers 59 are formed), the heat insulating layer has a plurality of heaters 60 therein, and each set of heaters 60 is provided with a thermocouple 57, and the temperature is grouped and controlled; the transmission device is arranged to be heated Outside the furnace, the upper part of the heating furnace is provided with a heat insulating plate 51 which can be opened and closed, and the first cylinder 66 is respectively connected to both sides of the heat insulating plate 51.
  • the first cylinder 66 controls the opening and closing of the heat insulating plate 51, and the material rack 2 It is placed in the heating furnace, one end is suspended on the transmission through the heat insulation board 51, and the photoelectric switch 67 is disposed on the side wall of the heating furnace to control the walking position of the material rack 2.
  • the transmission device described in this example includes a first motor 64, a chain 63, a gear pair 50, two bearing blocks 48, two parallel rails 54, two sets of first rollers 53, two first a sprocket 49, a second sprocket 65 and a chain plate 96, the two first sprocket wheels 49 are mounted on a hinge shaft extending outside the housing through the chamber housings, the first motor 64 output shaft and the first sprocket 49 pairs are connected by a chain 63.
  • One end of each of the two bearing blocks 48 is respectively mounted on a sprocket shaft in the casing, and the other end is connected with a shaft parallel to the sprocket shaft.
  • the shaft and the hinge shaft are respectively equipped with cooperating gear pairs 50.
  • the second sprocket 65 is mounted on the sprocket shaft in the housing, and the two sets of first rollers 53 placed in the two parallel guide rails 54 are connected by the roller shaft thereof, and the chain plate matched with the second sprocket 65 is mounted on the roller shaft.
  • 96 the other end of the chain plate 96 is connected to the rack 2 link.
  • a spring plate 62 is attached to the bearing housing 48. The other end of the spring plate 62 is connected to the housing of each chamber, and is forced to tightly connect the second sprocket 65 and the chain plate 96 during operation.
  • the lock chamber 10 is a vertical box, is a vacuum and atmospheric conversion chamber, is provided with an inert gas introduction line and an lft vacuum device 5, and the 1 ft vacuum device 5 is composed of a rough valve 6, a 1ft slide valve pump 7 or a rotary vane.
  • the rack 2 carrying the box 42 is suspended vertically in the transmission
  • the device is driven by a speed reducer of the second motor 68 of the transmission device, and is transmitted through the transmission device.
  • the photoelectric switch displays the position of the control rack 2, and the second motor 68 of the transmission device realizes frequency conversion speed regulation.
  • the loading chamber 44 is a vertical box, and has a 5 ft isolation valve 45 connected to the lock chamber 10 at one end, and an lft isolation valve 14 connected to the preheating chamber 16 at one end, and a side of the loading chamber 44 and a tunnel sealed transmission box. 41.
  • the robot 43 in the sealed transfer case 41 houses the magazine 42 which is arranged in a row into the hanging rack 2, and the charging chamber 44 is provided with an inert gas introduction line.
  • the rack 2 carrying the box 42 is suspended vertically on the transmission device, the photoelectric switch displays the position of the control rack 2, and the second motor 68 of the transmission realizes the frequency conversion speed regulation.
  • the preheating chamber 16, the heating degassing chamber 26 and the sintering chamber 29 are provided with a vertical rectangular heating furnace, and the heating furnace is provided with upper, side and lower heat insulating layers 56, 59, 61, and the heat insulating layer is internally provided.
  • the plurality of heaters 60 are connected to the heating power source through the water-cooling electrode 58.
  • Each group of heaters 60 has a thermocouple 57 connected to the temperature control computer in the electric control cabinet to control the output power of the external power supply of the heater to achieve heating.
  • the transmission device is outside the heating furnace, and the upper part of the heating furnace is provided with a heat-insulating plate 5 1 for opening and closing, and the first and second sides of the heat-insulating plate 5 1 are respectively connected to the first cylinder 66 to push the partition which can be opened and closed
  • the hot plate 51 moves, when the rack moves, the heat shield 5 1 is opened, when the rack is prohibited in the heating furnace, the heat shield 5 1 is closed;
  • the upper chamber side wall outside the heating furnace is two parallels of the transmission
  • the guide rail 54, the plurality of first rollers 53 of the connecting rack 2 are suspended on the guide rail 54, and the outdoor first motor 64 reducer drives the power through the sprocket chain 63 to the indoor transmission sealing sprocket shaft, and is biased by the spring plate 62.
  • Gear pair 50 The torque transmitted to the first sprocket 49, both ends of the sub-bearing housing 48 is the gear, chain plate 2 on the first sprocket 49 toggle rack 96, rack 2 traveling drive.
  • the preheating chamber 16 is a vertical tank, and the outer wall is provided with a water cooling pipe 52.
  • the upper air suction pipe flange 55 is connected to a 2 ft vacuum device, and the gas filling flange 47 is connected to the inert gas introduction pipe 15, and the safety valve nozzle flange 46. Connect the safety valve 17.
  • Material rack 2 carrying material box 42 vertical suspension is transported on the track on the transmission device.
  • the photoelectric switch is provided on the symmetric side plate of the upper part of the preheating chamber box to display the position of the control material rack 2 and frequency conversion speed regulation.
  • the preheating chamber 16 is provided with a wax collecting tank, and the outer casing insulating layer can serve as a dewaxing chamber.
  • Each vacuum device is of the existing structure, and the 2ft, 3ft and 4ft vacuum devices 24, 27, 30 have the same structure, and are bypassed by the main valve 19, the diffusion pump 20, the 2ft Roots pump 2 1 , the 2ft spool valve 22 , 2ft Valve 23 and vacuum line; 1 ft vacuum 5 consists of rough valve 6, 1 ft bypass valve 9, 1 ft spool pump 7 and l ft Roots pump 8; 5 ft vacuum unit by slide valve pump, Roots The pump and the main valve are constructed.
  • the heating degassing chamber 26 is a vertical tank, and the outer wall has a water-cooling pipe 52 or a water-cooling jacket, and is also connected with a 3 ft vacuum device 27, an inert gas introduction pipe, and a safety valve. Shelf 2 carrier material
  • the box 42 is suspended vertically on its transmission device, and the heating dehydrogenation chamber is provided on the symmetrical side plate.
  • the heating furnace is equipped with an on-beam photoelectric switch, which displays the position of the control rack 2 and frequency conversion.
  • the sintering chamber 29 is a vertical tank having a water-cooled tube on the outer wall, and is connected to a 4 ft vacuum unit 30, an inert gas introduction line, and a safety valve.
  • Material rack 2 carrying material box 42 vertical suspension is transported on the track on the transmission device, and the photoelectric switch is arranged on the symmetric side plate of the upper part of the box to display the position of the control material rack 2 and frequency conversion speed regulation.
  • the cooling chamber 34 is a vertical box body, the outer wall is welded with a water-cooling tube, the side wall is provided with a second motor 68, and a wind box is inside, and a plurality of air guiding tubes 71 are disposed on the side plate of the wind box.
  • the other side has a heat exchanger 70, the air outlet of the heat exchanger 70 is opposite to the fan 33, the fan 33 is connected to the shaft of the second motor 68, and the arc-shaped baffle 72 is arranged around the wall of the cooling chamber; Pipeline, inert gas introduction pipe and safety valve pipe; vacuum pipe is connected with 5ft vacuum device 32; material frame 2 carrying material box 42 is suspended vertically on the transmission device, photoelectric switch display control material frame 2 position, frequency conversion speed.
  • the isolation valve between the chambers is a one-way sealed isolation flapper valve, as shown in FIG. 5-7, including a valve body 76, a second cylinder 73, a plurality of cylinders or cylinders 78, a first valve plate 80 and a front,
  • the rear blind flanges 75 and 82 are respectively provided with front and rear blind flanges 75 and 82 on opposite sides of the valve body 76, and a second cylinder 73 and a cooling water pipe assembly are disposed on the outer upper portion of the front blind flange 75; the valve body 76
  • a first valve plate 80 is disposed in parallel with the other two sides.
  • the first valve plate 80 is suspended from the upper portion of the valve body 76 by the valve plate traveling device, and the valve plate traveling device is rigid with the cylinder rod portion of the external second cylinder 73. Connecting, the bottom of the first valve plate 80 is provided with a second roller 83 and a bottom rail 84 thereof.
  • the first valve plate 80 is welded with a water-cooling tube or a jacket, and the water-cooling tube or the jacket is connected to the two through the hose 87 of the cooling water pipe assembly.
  • the cooling water pipe shaft 86 and the cylinder rod of the second cylinder 73 are connected by the connecting rod 85, and the first valve plate 80 is displaced relative to the cooling water pipe shaft 86 when the first valve plate 80 is displaced, and the plurality of cylinders or The cylinders 78 are respectively connected to both ends of the first valve plate 80 , for locking the first valve plate 80; the second magnetic switch 77 is respectively disposed on two rows of cylinders or cylinders 78 to control the position of the first valve plate 80.
  • the valve plate travel device includes an upper rail 88, a roller and a hinge plate 89 disposed at an upper end of the valve body.
  • the roller is placed in the upper rail 88 and slides along the upper rail 88.
  • the roller hangs the first valve plate 80 on the upper rail through the hinge joint plate 89.
  • On the 88, the sliding on the upper rail 88 is achieved.
  • the first valve plate 80 is provided with a heat insulating plate 81 corresponding to the valve port side.
  • the cylinder rod of the second cylinder 73 drives the first valve plate 80 to be displaced, and the position of the first valve plate 80 is controlled by the first magnetic switch 74 disposed on the second cylinder 73.
  • the one-way seal is composed of a plurality of locking cylinders. Or the cylinder rod is applied to the first valve plate 80 to complete.
  • the first valve plate 80 is pushed by a plurality of cylinders or cylinders 78 to ensure the first valve plate.
  • the force is 80
  • the first valve plate 80 is provided with a sealed first rubber ring 79
  • the first rubber ring 79 has a large compression amount to ensure the sealing performance of the large-size valve port valve plate.
  • the front and rear blind flanges 75, 82 of the valve body 76 function to remove the first valve plate 80 from the side of the valve body 76 during maintenance.
  • the preheating chamber described in this example may also be equipped with a wax collection tank as a dewaxing chamber.
  • the power, the power source, the circulating water for cooling, and the medium source are checked.
  • the dispersing operation mode is adopted to make the equipment meet the production process state, that is, the vacuum system is started and interlocked, the inter-chamber isolation valve is closed, the compartment isolation valve, the glove box, the tunnel transmission sealing box and the charging chamber are in a protective atmosphere (oxygen content) ⁇ 500PPm), other chambers are in a vacuum state; the heater in the furnace is intact; the inert gas is set to a predetermined value, and all sensors are in a stable state of operation.
  • the tank door 90 is opened under atmospheric pressure, the billet is loaded into the preparation box 37, the tank door 90 is closed, the inert gas is filled in the tank, and the oxygen content is ⁇ 500 ppm ; the preparation tank 37 and the glove box 39 are pressure balanced, and the 6 ft isolation valve is opened. , start the transmission, the blank enters the glove box 39, closes the 6ft isolation valve 38; pulls the material in the glove box 39, loads the blank into the graphite box, and finishes the stacking of the material.
  • the 7ft isolation valve 40 When the glove box 39 and the sealed transfer box 41 are pressure balanced, the 7ft isolation valve 40 is opened, the transmission is activated, the cassette 42 is inserted into the sealed transfer box 41, and the 7ft isolation valve 40 is closed; the cassette 42 is transported in the closed transfer box to Wait for the robot 43 before.
  • the loading chamber 44 has no rack 2, the loading chamber 44 is pressure balanced with the lock chamber 10, the 5# isolation valve 45 is opened, the rack 2 enters the loading chamber 44, and the 5ft isolation valve 45 is closed; the transfer seal box 4 1 The robot 43 loads the cartridge 42 into the rack 2.
  • Preheating chamber 16 There is no rack 2, preheating chamber 16 and loading chamber 44 are pressure balanced, open 1 ft isolation valve 14, rack 2 enters preheating chamber 16, closes l ft isolation valve 14. 2ft vacuum unit 24 vacuums the preheating chamber to l Pa and heats it to 430 °C at the heating rate required by the process.
  • the 3 ft vacuum unit 27 evacuates the heated degassing chamber 26.
  • the rack 2 the preheating chamber 16 and the heating degassing chamber 26 are pressure balanced, the 2 ft isolation valve 25 is opened, the rack 2 enters the heating degassing chamber 26, the 2 ft isolation valve 25 is closed, and the heating temperature of the degassing chamber 26 is heated 850. °C.
  • the 4 ft vacuum unit 30 vacuums the sintering chamber 29.
  • the sintering chamber 29 and the heating degassing chamber 26 are pressure balanced, the 3 ft isolation valve 28 is opened, the rack 2 enters the sintering chamber 29, and the 3 ft isolation valve 28 is closed.
  • the heating temperature of the sintering chamber is 1080 °. C.
  • the 5 ft vacuum unit 32 draws a vacuum on the cooling chamber 34.
  • the cooling chamber 34 has no rack 2
  • the 4ft isolation valve 3 is opened, the rack 2 enters the cooling chamber 34, and the 4ft isolation valve 3 1 is closed. Filled with inert gas, when the pressure reaches 0. O lMpa, the starter fan 33 starts to forcibly cool the magnet block in the magazine and the cartridge.
  • the magnet block in the cartridge 42 and the cartridge 42 is cooled to below 80 ° C.
  • the pressure of the cooling chamber 34 is atmospheric pressure, the outlet door 35 is opened, and the rack 2 enters the outlet transition frame 36.
  • the rack 2 passes through the return frame and enters the transition frame 3 of the inlet, waiting.
  • the conveyance of the rack 2 between the chambers is driven by a motor, and the power is introduced into the transmission shaft of the gear pair 50 in the vacuum chamber through the sealed transmission shaft, and transmitted to the first sprocket 49 through the bearing housing 48 and the gear pair 50.
  • the spring plate 62 is forced to the shaft of the rack 2, the first roller 53 on the rack 2 travels on the guide rail 54, and the photoelectric switch 67 is a limit switch.
  • control system continuously scans the condition of the equipment and automatically runs according to pre-programmed procedures. The entire operation is done on the human machine interface of the computer.
  • the display of the electrical control system or system can provide the following information: operating status of the vacuum pump, vacuum valve and vacuum line vacuum; drive and display rack 2 transport and operating status; drive and display inter-chamber valve and oven operating status; Vacuum, pressure and heating temperature of each independent vacuum chamber; medium gas operating state, safety valve status; actual cooling water, power gas pressure, medium gas alarm; alarm management; display all relevant process parameters (setpoint and actual) Value); Parameter input; Historical process parameters / data display and storage; All major components of the device can be operated through the display.
  • Comparative Example 18% by weight of Nd, 8.5%Pr, 3%Dy, 1.02%B, 0.3%A1, the balance is Fe, after smelting, hydrogen crushing, jet milling, Magnetic field forming press, pressure
  • the billet is evacuated and sintered in a single-chamber sintering furnace equipped with a protective glove box.
  • the temperature is raised to 430 ° C for heat preservation and degassing for 3 hours.
  • the vacuum is higher than lPa.
  • the temperature is raised to 850 ° C.
  • the temperature was raised to 1080 ° C for vacuum sintering for 2 hours, and the degree of vacuum reached E-2Pa, and then aging at 900 ° C for two hours and 500 ° C for four hours.
  • Example 1 Sintering was carried out by using the same sintering ratio method as in the comparative example, using the continuous sintering process of the present invention and its sintering apparatus.
  • the press-formed rare earth permanent magnet powder alloy blank is subjected to an air-packaging treatment, and is sent to a preparation box 37, which closes the tank door 90, and evacuates or fills the air in the inert gas to replace the air in the tank; when the preparation box 37 and the glove box 39 are prepared Pressure balance, open the 6ft isolation valve 38 between the boxes, transfer the packaged blank to the glove box 39, close the box 6ft isolation valve 38; place the blank in the glove box 39 into the magazine 42, the cartridge 42 is arranged in a row; When the pressure of the glove box 39 and the sealed transfer box 41 is balanced, the 7ft isolation valve 40 is opened, the cassette 42 is conveyed to the sealed transfer box 41, and the 7ft isolation valve 40 is closed; the cassette 42 is transferred to the cassette At the robot 43 at the interface with the loading chamber 44, the cartridge 42 is loaded into the rack 2 in the loading chamber 44 by the robot 43; in the above process, the oxygen content of each tank and the charging chamber is ⁇ 50 ( ⁇ ?111 ;
  • the heating degassing chamber 26 is in a vacuum state, the heating temperature is 400 ° C, the inter-chamber 2 ft isolation valve 25 is opened, the material rack 2 is transferred to the heating degassing chamber 26, and the 2ft isolation valve 25 is closed; the temperature in the heating furnace is from 430°. C ⁇ 850 °C take multiple heating and heat preservation for 2 hours, the vacuum degree reaches 3E-2Pa ;
  • the sintering chamber is in a vacuum state, the heating temperature is up to 850 ° C, the inter-chamber 3 ft isolation valve 28 is opened, the material rack 2 is transferred to the heating degassing chamber 26, and the 3 ft isolation valve 28 is closed; when the vacuum degree is higher than 3E-2Pa , continue to heat up, the heating temperature is sintered to 1080 ° C, the degree of vacuum reaches E-2Pa level;
  • the ventilating chamber 34 is in a vacuum state, the chamber 4ft isolation valve 31 is opened, the rack 2 is transferred to the cooling chamber 34, the 4 ft isolation valve 31 is closed, and the nitrogen or argon gas is charged to 0. OlMPa,
  • the moving fan 33 cools the rare earth permanent magnet alloy in the cartridge 42 and the cartridge 42 and cools it to below 80 ° C; when the chamber pressure is balanced to atmospheric pressure, the outlet chamber door 35 is opened, and the rack 2 is transferred to the outlet end.
  • the transition frame 36 is closed, and the outlet door 35 is closed; the cartridge 42 in the rack 2 is taken out from the rack 2;
  • the rack 2 enters the inlet transition frame 3 via the return frame, the lock chamber 10 is inflated to atmospheric pressure, opens into the end chamber door 4, the rack 2 is transferred to the lock chamber 10, and the end chamber door 4 is evacuated to lPa.
  • the inert gas is filled.
  • the lock chamber 10 and the charging chamber 44 are pressure balanced, the 5 ft isolation valve 45 is opened between the chambers, and the rack 2 is transferred to the charging chamber 44 to wait for loading the cartridge, and the 5 ft isolation valve 45 is closed.
  • the invention can also add step (7).
  • an aging chamber can be connected in series through the isolation valve, and the material rack is transferred to the aging chamber at a heating temperature of 900 ° C for 2 hours; the heating temperature is 500 ° C, time. 4 hours.
  • the invention can also add step (8).
  • a cooling chamber 2 can be connected in series through the isolation valve, and the rack is transferred to the cooling chamber 2; nitrogen or argon gas is charged to 0.01 MPa to 0.09 MPa, and the fan pair is activated.
  • the rare earth permanent magnet alloy in the cartridge and the cartridge is cooled and cooled to below 80 ° C; when the chamber pressure is balanced to atmospheric pressure, the outlet chamber door 35 is opened, the rack 2 is transferred to the outlet transition frame 36, and the outlet end is closed. The door 35; the cartridge 42 in the rack 2 is taken out from the rack 2.
  • Example 2 Sintering and aging were carried out by the continuous sintering process of Example 1 using the same material ratio as in the comparative example.
  • the preheating chamber is evacuated. When the vacuum is higher than lPa, the heating is started to 400 °C for 3 hours.
  • the temperature of the degassing heating chamber is increased from 450 °C to 800 °C, and the temperature is maintained at 800 °C. Hours, the degree of vacuum reached 3E-2Pa; the temperature was further increased, and the temperature in the sintering chamber was heated to 1080 ° C for 2 hours, and the degree of vacuum reached E-2Pa; and the aging was carried out by the aging method in Example 1.
  • Example 3 Sintering and aging were carried out by the continuous sintering process of Example 1 using the same material ratio as in the comparative example.
  • the preheating chamber is evacuated. When the vacuum is higher than lPa, the heating is started to 500 °C for 3 hours.
  • the temperature of the degassing heating chamber is increased from 500 °C to 850 °C, and the temperature is raised at 850 °C. Hours, the degree of vacuum reached 3E-2Pa; the temperature was further increased, and the temperature in the sintering chamber was heated to 1080 ° C for 2 hours, and the degree of vacuum reached E-2Pa; and the aging was carried out by the aging method in Example 1.
  • Example 4 Sintering and aging were carried out by the continuous sintering process of Example 1 using the same material ratio as in the comparative example.
  • the preheating chamber is evacuated. When the vacuum is higher than l Pa, the heating is started to 500 °C for 3 hours.
  • the temperature of the degassing heating chamber is increased from 500 °C to 900 °C, and the temperature is raised at 900 °C. Hours, the degree of vacuum reached 3 E-2Pa; the temperature was raised, the temperature in the sintering chamber was heated to 1 080 ° C for 2 hours, and the degree of vacuum reached E-2Pa; and the aging method in Example 1 was used for aging.
  • the rare earth alloy improves the magnetic performance through the continuous sintering process, and the degree of automation of production is greatly improved.

Abstract

Provided in this invention is a technological process for continuously sintering a rare earth permanently magnetic alloy, comprising: connecting a preparation box, a glove box, a tunnel-type sealed conveying box, a lock chamber, a charging chamber, a pre-heating chamber, a heated degassing chamber, a sintering chamber, and a cooling chamber in series, by means of isolation valves between the boxes and chambers; conveying the rare earth permanently magnetic powder alloy formed by compacting through an oxygen-free atmosphere; and subjecting the same to treatment, such as heating, degassing, sintering, and cooling in different chambers. The preparation box, glove box, and tunnel-type sealed conveying box are driven by bottom rollers, while the driving devices in other chambers are arranged in the upper part of the respective chambers with conveying roller tracks, a roller of a material rack is suspended on a track of the conveying device, and a drawer-type material rack can contain a plurality of material boxes. A vertical rectangular furnace is also provided, having a narrow heating zone width, even heating, and fast cooling with high efficiency. Under the premise of a substantial energy saving, oxygen-free conveying and continuous sintering improve the performance of products and ensure that the sintered rare-earth permanently magnetic alloy has a consistent magnetic performance.

Description

稀土永磁合金连续烧结工艺方法及其烧结设备  Rare earth permanent magnet alloy continuous sintering process method and sintering device thereof
技术领域  Technical field
本发明涉及一种钕铁硼稀土永磁合金的连续烧结工艺方法及其烧结设备, 属于永磁合金处理设备及工艺的技术领域。  The invention relates to a continuous sintering process method for a NdFeB rare earth permanent magnet alloy and a sintering device thereof, and belongs to the technical field of a permanent magnet alloy processing device and a process.
背景技术  Background technique
以 R2Fe14B型化合物为主相的 R-Fe-B系钕铁硼稀土永磁体,以其优良的磁性 能得到越来越多的应用, 被广泛用于医疗的核磁共振成像, 计算机硬盘驱动器, 手机的振动电机, 混合动力汽车的电机, 风力发电机等。 R-Fe-B NdFeB rare earth permanent magnets with R 2 Fe 14 B type compound as the main phase have been used more and more for their excellent magnetic properties, and are widely used in medical magnetic resonance imaging, computers. Hard disk drives, mobile phone vibration motors, hybrid car motors, wind turbines, etc.
现有的钕铁硼稀土永磁合金真空烧结炉是一种单室炉, 具备加热和快冷功 能, 有的烧结炉还附带有一个保护气氛手套箱。 因为是内加热炉只能在真空状 态下加热, 加热速度慢, 长期使用温度均匀性变差; 因为每炉次都要重复加热 和冷却过程, 惰性气体消耗多, 能耗大, 对加热器和隔热层造成污染, 烧结炉 使用寿命大大缩短。  The existing NdFeB rare earth permanent magnet alloy vacuum sintering furnace is a single-chamber furnace with heating and rapid cooling functions, and some sintering furnaces are also provided with a protective atmosphere glove box. Because the inner heating furnace can only be heated under vacuum, the heating speed is slow, and the long-term use temperature uniformity is deteriorated; because the heating and cooling processes are repeated every time, the inert gas is consumed more, the energy consumption is large, and the heater and The insulation layer causes pollution and the service life of the sintering furnace is greatly shortened.
发明内容  Summary of the invention
针对上述存在的技术问题, 本发明提供一种稀土永磁合金的连续烧结工艺 及其烧结设备。  In view of the above technical problems, the present invention provides a continuous sintering process of a rare earth permanent magnet alloy and a sintering apparatus therefor.
本发明烧结工艺方法, 其工艺过程如下:  The sintering process method of the present invention has the following process:
( 1 ) 将压制成型的稀土永磁粉末合金坯料经隔绝空气包装处理, 传送至 准备箱, 关箱门, 抽真空或充惰性气体置换箱内的空气; 当准备箱和 手套箱的压力平衡, 打开箱间 6ft隔离阀门, 将包装的坯料传送至手套 箱, 关箱间 6ft隔离阀门; 在手套箱内将坯料拆包放入料盒, 料盒码排 成垛; 当手套箱和传送密封箱的压力平衡, 打开箱间 7ft隔离阀门, 将 成垛的料盒传送至传送密封箱, 关箱间 7ft隔离阀门; 成垛的料盒传送 至与装料室接口处的机械手处, 由机械手将料盒装入装料室内的料架; 在上述流程中, 各箱和装料室的氧含量< 50(^ ?111 ; (1) The press-formed rare earth permanent magnet powder alloy blank is subjected to air-packaging treatment, transferred to a preparation box, closed the door, vacuumed or filled with inert gas to replace the air in the tank; when the pressure of the preparation box and the glove box is balanced, Open the 6ft isolation valve between the boxes, transfer the packaged blanks to the glove box, and close the 6ft isolation valve between the boxes; unpack the blanks into the magazine in the glove box, the boxes are arranged in a row; when the glove box and the transfer box Pressure balance, open the 7ft isolation valve between the boxes, transfer the smashed box to the transfer sealing box, and close the 7ft isolation valve between the boxes; the smashed box is transferred to the robot at the interface with the loading chamber, and the material is fed by the robot The box is loaded into the rack of the loading chamber; in the above process, the oxygen content of each box and the charging chamber is < 50 (^ ?111 ;
( 2 ) 当装料室与预热室压力平衡, 打开室间 1 ft隔离阀门, 料架传 送至预热室, 关闭 l ft隔离阀门; 开始抽真空, 当真空度高于 l Pa时, 开始加热到 400-500 °C, 保温 1 -3小时;  (2) When the pressure between the charging chamber and the preheating chamber is balanced, open the 1 ft isolation valve between the chambers, transfer the rack to the preheating chamber, close the l ft isolation valve; start vacuuming, when the vacuum is higher than l Pa, start Heat to 400-500 °C, keep warm for 1-3 hours;
( 3 ) 加热脱气室处于真空状态, 加热温度 400-500 °C, 打开室间 2ft隔离阀门, 料架传送至加热脱气室, 关闭 2ft隔离阀门; 加热炉内温 度从 400°C〜900°C取多段升温保温 2-4小时, 真空度达到 3E_2Pa;(3) The heating degassing chamber is in a vacuum state, the heating temperature is 400-500 °C, the 2ft isolation valve is opened, the material rack is transferred to the heating degassing chamber, and the 2ft isolation valve is closed; Degree from 400 ° C ~ 900 ° C take a number of heating and holding 2-4 hours, the vacuum reached 3E_2Pa;
(4) 烧结室处于真空状态, 加热温度至 850°C, 打开室间 3ft隔离 阀门,料架传送至加热脱气室,关闭 3ft隔离阀门;当真空度高于 3E-2Pa 后, 继续升温, 加热温度到 1040°C〜 1080°C烧结, 真空度达到 lE-2Pa; (4) The sintering chamber is in a vacuum state, the heating temperature is up to 850 ° C, the 3 ft isolation valve between the chambers is opened, the material rack is transferred to the heating degassing chamber, and the 3 ft isolation valve is closed; when the vacuum degree is higher than 3E-2 Pa, the temperature is further increased. Heating temperature to 1040 ° C ~ 1080 ° C sintering, the degree of vacuum reaches lE-2Pa;
(5) 冷却室处于真空状态, 打开室间 4ft隔离阀门, 料架传送至 冷却室, 关闭 4ft隔离阀门; 充氮气或氩气至 0. OlMPa, 启动风机对料 盒及料盒内的稀土永磁合金进行冷却, 冷却至 80°C以下; 当室腔压力 平衡至大气压, 打开出端室门, 料架传送至出端过渡架, 关闭出端室 门; 将料架中的料盒从料架取出;  (5) The cooling chamber is in a vacuum state, open the 4ft isolation valve between the chambers, the rack is transferred to the cooling chamber, and the 4ft isolation valve is closed; the nitrogen or argon gas is filled to 0. OlMPa, and the rare earth in the box and the box is activated. The magnetic alloy is cooled and cooled to below 80 ° C; when the chamber pressure is balanced to atmospheric pressure, the outlet chamber door is opened, the rack is transferred to the outlet transition frame, and the outlet chamber door is closed; the cartridge in the rack is taken from the material Take out
(6) 料架经回线进入进端过渡架, 锁室充气平衡至大气压, 开进 端室门, 料架传送至锁室, 关闭进端室门抽真空到 lPa时, 充惰性气 体, 当锁室与装料室压力平衡, 开室间 5ft隔离阀门, 料架传送至装料 室等待装载料盒, 关闭 5ft隔离阀门。  (6) The material rack enters the inlet transition frame through the return line, the lock chamber is inflated to atmospheric pressure, the chamber door is opened, the rack is transferred to the lock chamber, and the inlet chamber door is vacuumed to lPa, and the inert gas is filled. The pressure between the lock chamber and the loading chamber is balanced. The 5ft isolation valve is opened between the chambers. The rack is transported to the loading chamber for loading the cartridge, and the 5ft isolation valve is closed.
进一步地, 本发明还可增加第 (7) 步, 在冷却室后还可以通过隔 离阀门串接一个时效室,料架传送至时效室,加热温度 800°C〜900°C, 时间 2〜4小时; 加热温度 450°C〜550°C, 时间 2〜4小时。  Further, the present invention can also add step (7). After the cooling chamber, an aging chamber can be connected in series through the isolation valve, and the rack is transported to the aging chamber at a heating temperature of 800 ° C to 900 ° C for 2 to 4 hours. Hour; heating temperature 450 ° C ~ 550 ° C, time 2 ~ 4 hours.
进一步地, 本发明还可增加第 (8) 步, 在时效室后还可以通过隔 离阀门串接一个冷却室 2,料架传送至冷却室 2; 充氮气或氩气至 0.01 MPa 〜0.19 MPa, 启动风机对料盒及料盒内的稀土永磁合金进行冷却, 冷却至 80°C以下; 当室腔压力平衡至大气压, 打开出端室门, 料架传 送至出端过渡架, 关闭出端室门; 将料架中的料盒从料架取出。  Further, the present invention may further increase the step (8). After the aging chamber, a cooling chamber 2 may be connected in series through the isolation valve, and the rack is transported to the cooling chamber 2; nitrogen or argon gas is supplied to 0.01 MPa to 0.19 MPa, Start the fan to cool the rare earth permanent magnet alloy in the material box and the material box, and cool it to below 80 °C; when the chamber pressure is balanced to atmospheric pressure, open the end chamber door, the material rack is transferred to the end transition frame, and the outlet end is closed. Door; remove the magazine from the rack from the rack.
本发明采用稀土永磁合金连续烧结工艺方法的烧结设备, 由依次排列的准 备箱、 手套箱、 密封传送箱, 以及依次排列的锁室、 装料室、 预热室、 加热脱 气室、 烧结室、 冷却室、 各室的传动装置、 回线架和抽真空装置组成, 各室通 过室间隔离阀门连接, 所述密封传送箱与装料室连接; 各室传动装置设置在各 室的上部, 各室外设置有带有传动装置的回线架, 回线架与进、 出端过渡架相 连, 料架悬挂在传动装置上循环往复, 料盒经密封传送箱传送至料架上, 预热 室、 加热脱气室和烧结室外壁分别设有水冷管或水冷夹套、 抽真空管路、 惰性 气体导入管路、 安全阀和压力表。  The invention adopts a sintering device for a continuous sintering process of a rare earth permanent magnet alloy, which comprises a preparation box, a glove box, a sealed transfer box, and a lock chamber, a charging chamber, a preheating chamber, a heating degassing chamber, and a sintering. a chamber, a cooling chamber, a transmission of each chamber, a return frame and a vacuuming device, each chamber being connected by an inter-chamber isolation valve, the sealed transfer box being connected to the charging chamber; each chamber transmission being disposed at an upper portion of each chamber Each outdoor is provided with a return frame with a transmission device, the return frame is connected with the transition frame of the inlet and the exit, the frame is suspended and reciprocated on the transmission device, and the material box is conveyed to the rack through the sealed transfer box, and is preheated. The chamber, the heating degassing chamber and the sintering outdoor wall are respectively provided with a water-cooled tube or a water-cooled jacket, an evacuation line, an inert gas introduction line, a safety valve and a pressure gauge.
进一步地, 所述预热室、 加热脱气室和烧结室内部分别设有立式矩形加热 炉, 所述加热炉内壁设有隔热层, 隔热层内部有多组加热器, 每组加热器均设 置有一热电偶, 温度分组控制; 所述传动装置设置在加热炉外, 加热炉上部设 有可左右开合的隔热板。 Further, the preheating chamber, the heating degassing chamber and the sintering chamber are respectively provided with vertical rectangular heating Furnace, the inner wall of the heating furnace is provided with a heat insulation layer, and a plurality of heaters are arranged inside the heat insulation layer, each set of heaters is provided with a thermocouple, and the temperature is grouped and controlled; the transmission device is disposed outside the heating furnace, and the upper part of the heating furnace There is a heat insulation board that can be opened and closed.
进一步地, 所述室间的隔离阀门为单向密封插板阀, 包括阀体、 第二气缸、 多个气缸或油缸、 第一阀板和前、 后盲法兰, 其中, 阀体对应两侧分别设置有 前、 后盲法兰, 前盲法兰外上部设有第二气缸及冷却水管组件; 阀体内设置有 与另外两侧平行的第一阀板, 第一阀板通过阀板行走装置吊在阀体内上部, 阀 板行走装置与外部第二气缸的气缸杆缸头部分刚性连接, 第一阀板底部设置有 第二滚轮及其底导轨, 第一阀板上焊有水冷管或夹套, 水冷管或夹套通过冷却 水管组件的软管连接到两个密封刚性冷却水管轴上, 冷却水管轴与第二气缸的 气缸杆连接, 实现联动, 第一阀板移位时与冷却水管轴相对静止, 多个气缸或 油缸分别与第一阀板的两端连接锁紧第一阀板, 实现密封。  Further, the isolation valve between the chambers is a one-way sealing flapper valve, comprising a valve body, a second cylinder, a plurality of cylinders or cylinders, a first valve plate and front and rear blind flanges, wherein the valve body corresponds to two The front side is provided with front and rear blind flanges respectively, and the outer part of the front blind flange is provided with a second cylinder and a cooling water pipe assembly; the valve body is provided with a first valve plate parallel to the other two sides, and the first valve plate is passed through the valve plate The device is suspended in the upper part of the valve body, and the valve plate traveling device is rigidly connected with the cylinder rod head portion of the external second cylinder. The bottom of the first valve plate is provided with a second roller and a bottom rail thereof, and the first valve plate is welded with a water-cooled tube or The jacket, the water-cooled pipe or the jacket is connected to the two sealed rigid cooling water pipe shafts through the hose of the cooling water pipe assembly, and the cooling water pipe shaft is connected with the cylinder rod of the second cylinder to realize linkage, and the first valve plate is displaced and cooled. The water pipe shaft is relatively stationary, and a plurality of cylinders or cylinders are respectively connected with the two ends of the first valve plate to lock the first valve plate to achieve sealing.
进一步地, 所述冷却室侧壁设有第二电机, 内部有风箱, 风箱的侧板有多 个导流管, 对应的另一侧有换热器, 换热器出风口对着风机进风口, 风机与第 二电机轴连接, 冷却室壁周边设有弧形导流板; 外部连接有抽空管路、 惰性气 体导入管路和安全阀管路; 抽真空管路与抽真空装置连接。  Further, a side wall of the cooling chamber is provided with a second motor, and a bellows is arranged inside, a side plate of the wind box has a plurality of guiding tubes, and a corresponding side has a heat exchanger, and an air outlet of the heat exchanger faces the air inlet of the fan. The fan is connected to the second motor shaft, and a curved baffle is arranged around the cooling chamber wall; the external connection is connected with an evacuation line, an inert gas introduction line and a safety valve line; and the vacuum line is connected with the vacuuming device.
进一步地, 所述预热室配蜡收集罐作为脱蜡室。  Further, the preheating chamber is equipped with a wax collection tank as a dewaxing chamber.
进一步地, 所述传动装置包括第一电机、 链条、 齿轮副、 两轴承座、 两平 行导轨、 两组第一滚轮、 两第一链轮、 第二链轮和链条板, 所述两第一链轮安 装在穿过各室壳体伸出壳体外的铰链轴上, 第一电机输出轴与第一链轮间通过 链条连接, 两轴承座一端分别安装在壳体内的链轮轴上, 另一端间连接有与铰 链轴平行的轴, 该轴和铰链轴上分别安装有相互配合的齿轮副, 第二链轮安装 在壳体内的链轮轴上, 置于两平行导轨内的两组第一滚轮通过其滚轮轴连接, 在滚轮轴上安装有与第二链轮配合的链条板, 所述链条板另一端连接料架连杆。  Further, the transmission device includes a first motor, a chain, a gear pair, two bearing seats, two parallel rails, two sets of first rollers, two first sprocket wheels, a second sprocket and a chain plate, and the two first The sprocket is mounted on a hinge shaft extending out of the housing through each of the chamber housings, and the first motor output shaft is connected to the first sprocket by a chain, and one end of the two bearing housings is respectively mounted on the sprocket shaft in the housing, and the other end A shaft parallel to the hinge shaft is connected between the shaft and the hinge shaft, and the second sprocket is mounted on the sprocket shaft in the housing, and the two sets of first rollers are placed in the two parallel guide rails. A chain plate that cooperates with the second sprocket is mounted on the roller shaft by its roller shaft connection, and the other end of the chain plate is connected to the rack link.
进一步地, 所述在轴承座上连接有弹簧板, 弹簧板另一端连接各室的壳体, 工作时弹簧板受力使第二链轮和链条板紧密连接。  Further, the spring seat is connected to the bearing housing, and the other end of the spring plate is connected to the housing of each chamber. When working, the spring plate is forced to tightly connect the second sprocket and the chain plate.
进一步地, 所述准备箱、 手套箱和隧道式传送密封箱是真空或保护气氛密 封箱体, 分别设有抽空管路连接真空装置, 设有惰性气体充气管路连接惰性气 体系统; 相邻两箱间分别设有箱间隔离阀门、 准备箱另一端设有箱门, 传送密 封箱内设有机械手将料盒装入装料室的料架; 每个箱设有压力表和真空规, 相 邻两箱之间连接有平衡阀管路, 通过平衡阀管路平衡两箱压力。 Further, the preparation box, the glove box and the tunnel transmission sealing box are vacuum or protective atmosphere sealed boxes, respectively provided with an evacuation pipeline connection vacuum device, and an inert gas inflation pipeline is connected to the inert gas system; There is a compartment isolation valve between the boxes, a box door at the other end of the preparation box, and a magazine for loading the cartridge into the loading chamber by the robot in the transmission sealing box; each box is provided with a pressure gauge and a vacuum gauge, A balance valve line is connected between the adjacent two tanks, and the pressure of the two tanks is balanced by the balance valve line.
进一步地, 所述箱间隔离阀门包括阀箱体、 第三气缸及其内部设置的 第二阀板、 铰链板、 连杆、 第三滚轮、 导向轨道和撞块, 所述第二阀 板通过多个连杆连接到铰链板上, 阀箱体内设有导向轨道, 铰链板上 设有沿导向轨道滑动的第三滚轮, 第三气缸置于阀箱体外, 其气缸杆 伸入阀体内与铰链板连接, 撞块置于阀箱体内阀端盖上, 第二阀板靠 近阀口侧法兰端设有胶圈, 第三气缸带动铰链板在导向滚轮轨道上移 动, 第二阀板撞击撞块, 连杆推动第二阀板向阀口侧法兰靠近, 压缩 胶圈完成隔离密封作用。  Further, the inter-chamber isolation valve includes a valve box body, a third cylinder and a second valve plate disposed therein, a hinge plate, a connecting rod, a third roller, a guiding track and a collision block, and the second valve plate passes A plurality of connecting rods are connected to the hinge plate, a guiding rail is arranged in the valve box body, and a third roller sliding along the guiding rail is arranged on the hinge plate, the third cylinder is placed outside the valve box, and the cylinder rod extends into the valve body Connected to the hinge plate, the collision block is placed on the valve end cover of the valve box body, the second valve plate is provided with a rubber ring near the flange end of the valve port side, and the third cylinder drives the hinge plate to move on the guide roller track, the second valve plate When the impact block is hit, the connecting rod pushes the second valve plate toward the valve port side flange, and the compression apron completes the isolation and sealing function.
本发明的有益效果:  The beneficial effects of the invention:
1.本发明与现有的真空烧结炉相比, 把加热、 烧结和冷却处理分 解到不同的真空室内完成, 避免现有单室烧结炉每次都重复加热和冷 却, 耗能大效率低, 以及存在加热器和隔热层被污染的问题, 可有效 解决坯料的脱蜡问题, 在节能的前提下大大提高生产能力和产品的一 致性, 同时提高设备使用寿命, 缩短了设备维护保养时间。  1. Compared with the existing vacuum sintering furnace, the invention decomposes the heating, sintering and cooling processes into different vacuum chambers, avoids repeated heating and cooling of the existing single-chamber sintering furnace, and has low energy consumption and low efficiency. As well as the problem that the heater and the heat insulation layer are polluted, the problem of dewaxing of the blank can be effectively solved, and the production capacity and product consistency are greatly improved under the premise of energy saving, and the service life of the equipment is improved, and the maintenance time of the equipment is shortened.
2.本发明预热室、 加热脱气室和烧结室内均设置立式矩形加热炉, 加热温 度分组控制, 加热区宽度窄, 加热均匀, 冷却快, 效率高。 在大幅节能的前提 下, 无氧传送, 连续烧结提高了产品性能, 保证了烧结稀土永磁合金体磁性能 一致性的要求。  2. The vertical rectangular heating furnace is arranged in the preheating chamber, the heating degassing chamber and the sintering chamber of the invention, and the heating temperature is grouped and controlled, the heating zone has a narrow width, uniform heating, fast cooling and high efficiency. Under the premise of large energy saving, anaerobic conveying and continuous sintering improve the performance of the product and ensure the consistency of the magnetic properties of the sintered rare earth permanent magnet alloy.
3.本发明回线架上设置与各室结构相同的传动装置, 实现往复传送。  3. The transmission device of the present invention is provided with the same transmission structure as that of each chamber to realize reciprocating transmission.
附图说明  DRAWINGS
图 1为本发明的结构示意图。 图 2为图 1中加热脱气室的剖视结构示意图。 图 3为图 2的左视示意图。  Figure 1 is a schematic view of the structure of the present invention. 2 is a cross-sectional structural view of the heating degassing chamber of FIG. 1. Figure 3 is a left side view of Figure 2.
图 4为图 1中冷却室的结构示意图。  Figure 4 is a schematic view showing the structure of the cooling chamber of Figure 1.
图 5为图 1中室间隔离阀门结构示意图。  Figure 5 is a schematic view showing the structure of the inter-chamber isolation valve of Figure 1.
图 6为图 5的左视示意图。  Figure 6 is a left side view of Figure 5.
图 7为图 5的俯视示意图。  Figure 7 is a top plan view of Figure 5.
图 8为图 1中准备箱结构示意图。  Figure 8 is a schematic view showing the structure of the preparation box of Figure 1.
图 9为图 1中手套箱结构示意图。  Figure 9 is a schematic view showing the structure of the glove box of Figure 1.
图 10为图 1中箱间隔离阀门结构示意图。 图中: 1、 悬挂式输送系统; 2、 料架; 3、 进端过渡架; 4、 进端室 门; 5、 1 ft真空装置; 6、 粗抽阀; 7、 1 ft滑阀泵; 8、 1 ft罗茨泵; 9、 l ft 旁通阀; 10、 锁室; 1 1、 充气管路; 12、 1 ft压力表; 13、 真空规; 14、 l ft隔离阀门; 15、 惰性气体导入管路; 16、 预热室; 17、 安全阀; 18、 法兰; 19、 主阀; 20、 扩散泵; 21、 2ft罗茨泵; 22、 2ft滑阀泵; 23、 2ft旁通阀; 24、 2ft真空装置; 25、 2ft隔离阀门; 26、 加热脱气室; 27、 3ft真空装置; 28、 3ft隔离阀门; 29、 烧结室; 30、 4ft真空装置; 31、 4ft隔离阀门; 32、 5ft真空装置; 33、 风机; 34、 冷却室; 35、 出端室 门; 36、 出端过渡架; 37、 准备箱; 38、 6ft隔离阀门; 39、 手套箱; 40、 7ft隔离阀门; 41、 密封传送箱; 42、 料盒; 43、 机械手; 44、 装 料室; 45、 5ft隔离阀门; 46、 安全阀接管法兰; 47、 充气法兰; 48、 轴承座; 49、 第一链轮; 50、 齿轮副; 51、 隔热板; 52、 水冷管; 53、 第一滚轮、 54、 导轨; 55、 抽气接管法兰; 56、 上隔热层; 57、 热电 偶; 58、 水冷电极; 59、 侧隔热层; 60、 加热器; 61、 下隔热层; 62、 弹簧板; 63、 链条; 64、 第一电机; 65、 第二链轮; 66、 第一气缸; 67、 光电开关; 68、 第二电机; 70、 换热器; 71、 导流管; 72、 导流板; 73、 第二气缸; 74、 第一磁力开关; 75、 前盲法兰; 76、 阀体; 77、 第二 磁力开关; 78、 气缸或油缸; 79、 第一胶圈; 80、 第一阀板; 81、 隔 热板; 82、 后盲法兰; 83、 第二滚轮; 84、 底导轨; 85、 连扳; 86、 冷却水管轴; 87、 软管; 88、 上轨道; 89、 铰链连板; 90、 箱门; 91、 l ft放气阀管路; 92、 1 ft电控柜; 93、 1 #观察窗; 94、 1 ft充气阀门管路; 95、 2ft压力表; 96、 链条板; 97、 1 ft底辊轮传动装置; 98、 手套法兰 组件; 99、 2ft观察窗; 100、 2ft电控柜; 101、 2ft放气阀管路; 102、 2ft 充气阀门管路; 103、 3ft压力表; 104、 2ft底辊轮传动装置; 105、 第 三气缸; 106、 第三磁力开关; 107、 第三滚轮; 108、 轨道; 109、 第 二胶圈; 1 10、 第二阀板; 1 1 1、 铰链板; 1 12、 连杆; 1 13、 撞块, 1 14、 阀端盖 Figure 10 is a schematic view showing the structure of the isolation valve between the boxes in Figure 1. In the figure: 1, hanging conveyor system; 2, material rack; 3, the end transition frame; 4, the entrance door; 5, 1 ft vacuum device; 6, rough pump valve; 7, 1 ft spool valve; 8, 1 ft Roots pump; 9, l ft bypass valve; 10, lock chamber; 1 1, pneumatic pipeline; 12, 1 ft pressure gauge; 13, vacuum gauge; 14, l ft isolation valve; Gas introduction pipeline; 16, preheating chamber; 17, safety valve; 18, flange; 19, main valve; 20, diffusion pump; 21, 2ft Roots pump; 22, 2ft spool valve; 23, 2ft bypass Valve; 24, 2ft vacuum device; 25, 2ft isolation valve; 26, heating degassing chamber; 27, 3ft vacuum device; 28, 3ft isolation valve; 29, sintering chamber; 30, 4ft vacuum device; 31, 4ft isolation valve; 32, 5ft vacuum device; 33, fan; 34, cooling room; 35, outlet door; 36, outlet transition frame; 37, preparation box; 38, 6ft isolation valve; 39, glove box; 40, 7ft isolation valve 41, sealed transfer box; 42, cartridge; 43, robot; 44, loading chamber; 45, 5ft isolation valve; 4 6, safety valve take-over flange; 47, inflatable flange; 48, bearing seat; 49, the first sprocket; 50, gear pair; 51, heat insulation board; 52, water-cooled tube; 53, the first roller, 54, 55; suction pipe flange; 56, upper insulation layer; 57, thermocouple; 58, water-cooled electrode; 59, side insulation; 60, heater; 61, lower insulation; 62, spring plate 63, the chain; 64, the first motor; 65, the second sprocket; 66, the first cylinder; 67, the photoelectric switch; 68, the second motor; 70, the heat exchanger; 71, the draft tube; Flow plate; 73, second cylinder; 74, first magnetic switch; 75, front blind flange; 76, valve body; 77, second magnetic switch; 78, cylinder or cylinder; 79, first apron; 81, heat shield; 82, rear blind flange; 83, second roller; 84, bottom rail; 85, connecting plate; 86, cooling water pipe shaft; 87, hose; 88, upper track; , hinge plate; 90, box door; 91, l ft bleed valve line; 92, 1 ft electric control cabinet; 93, 1 # observation window; 1 ft inflatable valve line; 95, 2ft pressure gauge; 96, chain plate; 97, 1 ft bottom roller drive; 98, glove flange assembly; 99, 2ft observation window; 100, 2ft electric control cabinet; 2ft bleed valve line; 102, 2ft inflatable valve line; 103, 3ft pressure gauge; 104, 2ft bottom roller drive; 105, third cylinder; 106, third magnetic switch; 107, third roller; , track; 109, second apron; 1 10, second valve plate; 1 1 1, hinge plate; 1 12, connecting rod; 1 13, bumper, 1 14, valve end cap
具体实施方式  detailed description
下面结合附图和实施例对本发明做进一步说明。  The invention will be further described below in conjunction with the drawings and embodiments.
实施例: 如图 1 所示, 本发明的稀土永磁合金连续烧结炉, 由依次排列的 准备箱 37、 手套箱 39、 密封传送箱 41, 以及依次排列的锁室 10、 装料室 44、 预热室 16、 加热脱气室 26、 烧结室 29、 冷却室 34、 各室的传动装置、 回线架 和各室抽真空装置组成, 各室通过室间隔离阀门连接, 所述密封传送箱 41与装 料室 44连接; 各室传动装置设置在各室的上部, 各室外设置有带有传动装置的 回线架, 各室传动装置与回线架及其上的传动装置共同组成悬挂式输送系统Embodiments: As shown in FIG. 1, the rare earth permanent magnet alloy continuous sintering furnace of the present invention is arranged in order a preparation box 37, a glove box 39, a sealed transfer box 41, and a lock chamber 10, a charging chamber 44, a preheating chamber 16, a heating degassing chamber 26, a sintering chamber 29, a cooling chamber 34, and a transmission of each chamber The return line frame and each chamber vacuuming device are arranged, and each chamber is connected by an inter-chamber isolation valve, and the sealed transmission box 41 is connected with the charging chamber 44; each chamber transmission device is arranged at an upper part of each chamber, and each outdoor is provided with a belt A return frame with a transmission, each of the transmissions together with the return frame and the transmission thereon constitutes a suspended conveyor system
1 ; 回线架与进、 出端过渡架 3、 36相连, 料架 2悬挂在传动装置上循环往复, 料盒 42经密封传送箱 41传送至料架 2上, 预热室 16、加热脱气室 26和烧结室 29外壁分别设有水冷管 52或水冷夹套、 抽真空管路、 惰性气体导入管路 15、 安全阀 17、 1ft压力表 12和真空规 13。 1; the return frame is connected to the inlet and outlet transition frames 3, 36, the material frame 2 is suspended and reciprocated on the transmission device, and the cartridge 42 is conveyed to the rack 2 via the sealed transfer box 41, the preheating chamber 16 and the heating off The outer walls of the gas chamber 26 and the sintering chamber 29 are respectively provided with a water-cooling tube 52 or a water-cooling jacket, a vacuuming line, an inert gas introduction line 15, a safety valve 17, a 1 ft pressure gauge 12, and a vacuum gauge 13.
如图 1所示, 所述准备箱 37、 手套箱 39和隧道式密封传送箱 41是真空或 保护气氛密封箱体, 分别设有抽空管路连接其真空装置, 设有惰性气体充气管 路 1 1用于填充惰性气体; 相邻两箱间设有箱间隔离阀门, 准备箱 37另一端设 有箱门,密封传送箱 41内设有将料盒 42装入装料室的料架 2上的机械手 43 (机 械手 43 为现有结构); 每个箱设有压力表和真空规, 各箱之间连接有平衡阀管 路, 通过平衡阀管路平衡两箱压力。所述准备箱 37、 手套箱 39和隧道式密封传 送箱 41内分别带有 lft、 2ft底辊轮传动装置 97、 104、 传送料盒 42, 所述辊轮传 动装置为现有结构, 是多辊轮并列传动结构。  As shown in FIG. 1, the preparation box 37, the glove box 39 and the tunnel-type sealed transfer box 41 are vacuum or protective atmosphere sealed boxes, respectively, and are provided with evacuation lines connected to the vacuum device, and an inert gas inflation line is provided. 1 for filling an inert gas; an isolation valve between the two adjacent boxes is provided, and the other end of the preparation box 37 is provided with a box door, and the sealed transfer box 41 is provided with a magazine 2 for loading the cartridge 42 into the loading chamber. The robot 43 (manipulator 43 is the existing structure); each box is provided with a pressure gauge and a vacuum gauge, and a balance valve line is connected between each tank, and the pressure of the two tanks is balanced by the balance valve line. The preparation box 37, the glove box 39 and the tunnel-type sealed transfer box 41 respectively have lft, 2 ft bottom roller transmissions 97, 104 and a transfer cartridge 42, which are existing structures, and are more Roller parallel transmission structure.
如图 8所示, 所述准备箱 37是立式密封方箱, 一端有箱门 90, 一端有 6ft隔离阀门 38, 箱体上有 l ft放气阀管路 9 1、 1 ft电控柜 92、 1 ft观察窗 93、 1 ft充气阀门管路 94及平衡气体压力管路和 2ft压力表 95 ; 箱体内 的料盒 42通过 1 ft底辊轮传动装置 97传动。  As shown in FIG. 8, the preparation box 37 is a vertical sealed square box, and has a box door 90 at one end, a 6 ft isolation valve 38 at one end, and a l ft deflation valve line 9 1 , 1 ft electric control cabinet on the box body 92, 1 ft viewing window 93, 1 ft inflation valve line 94 and balance gas pressure line and 2 ft pressure gauge 95; the cartridge 42 in the housing is driven by a 1 ft bottom roller drive 97.
如图 9所示, 所述手套箱 39是立式密封方箱, 一端是 6ft隔离阀门 38与准备箱 37连接, 一端有 7ft隔离阀门 40, 箱体上有手套法兰组件 98、 2ft观察窗 99、 2 ft电控柜 100、 2 ft放气阀管路 10 1、 2 ft充气阀门管 路 102和 3ft压力表 1 03, 箱体内设置有 2ft底辊轮传动装置 104。  As shown in FIG. 9, the glove box 39 is a vertical sealed square box, and one end is a 6 ft isolation valve 38 connected to the preparation box 37, and one end has a 7 ft isolation valve 40. The box body has a glove flange assembly 98 and a 2 ft observation window. 99, 2 ft electric control cabinet 100, 2 ft deflation valve line 10 1, 2 ft inflation valve line 102 and 3 ft pressure gauge 103, a 2 ft bottom roller drive 104 is provided in the casing.
如图 1所示, 所述的隧道式密封传送箱 41是立式密封箱, 与装料室 44箱体 侧面连接, 并设有放气阀管路、 充气阀门管路、 压力表和底辊轮传动装置。 箱 内设有将码排成垛的料盒 42装入悬挂式料架 2中的机械手 43 ;其中的底辊轮传 动装置为多个并列设置的辊轮实现传动。  As shown in FIG. 1, the tunnel type sealed transfer box 41 is a vertical sealed box connected to the side of the box of the charging chamber 44, and is provided with a deflation valve line, an inflation valve line, a pressure gauge and a bottom roller. Wheel drive. A box 42 for arranging the chips is arranged in the box. The robot 43 is loaded into the hanging rack 2; the bottom roller driving device is driven by a plurality of rollers arranged side by side.
如图 10所示, 所述箱间的隔离阀门为单向密封的插板阀结构。 包 括阀箱体、 第三气缸 105及其内部设置的第二阀板 1 10、 铰链板 1 1 1、 连杆 1 12、第三滚轮 107、导向轨道 108和撞块 1 13,所述第二阀板 1 10 通过多个连杆 1 12连接到铰链板 1 1 1上, 阀箱体内设有导向轨道 108, 铰链板 1 1 1上设有沿导向轨道 108滑动的第三滚轮 107,第三气缸 105 置于阀箱体外, 其气缸杆伸入阀体内与铰链板 1 1 1连接, 撞块 1 13置 于阀箱体内阀端盖 1 14上,第二阀板 1 10靠近阀口侧法兰 18端设有胶 圈 109, 第三气缸 105带动铰链板 1 1 1在导向轨道 108上移动, 第二 阀板 1 10撞击撞块 1 13, 连杆 1 12推动第二阀板 1 10 向阀口侧法兰 18 靠近, 压缩第二胶圈 109完成隔离密封作用。 第三气缸 105上设有第 三磁力开关 106, 显示第二阀板 1 10移动位置。 As shown in FIG. 10, the isolation valve between the boxes is a one-way sealed flap valve structure. Package a valve housing, a third cylinder 105, and a second valve plate 110 disposed therein, a hinge plate 1 1 1 , a connecting rod 12 12, a third roller 107, a guide rail 108, and a collision block 13 13, the second The valve plate 1 10 is connected to the hinge plate 11 1 through a plurality of connecting rods 1 12 , and a guiding rail 108 is disposed in the valve box body, and a third roller 107 sliding along the guiding rail 108 is disposed on the hinge plate 11 1 . The three cylinders 105 are placed outside the valve box, the cylinder rods extend into the valve body and are connected to the hinge plate 111, the block 1 13 is placed on the valve end cover 1 14 of the valve box body, and the second valve plate 1 10 is close to the valve port. The side of the side flange 18 is provided with a rubber ring 109, the third cylinder 105 drives the hinge plate 1 1 1 to move on the guiding rail 108, the second valve plate 1 10 hits the collision block 13, and the connecting rod 1 12 pushes the second valve plate 1 10 Close to the valve port side flange 18, compressing the second apron 109 to complete the isolation and sealing action. The third cylinder 105 is provided with a third magnetic switch 106 for displaying the moving position of the second valve plate 110.
所述预热室 16、加热脱气室 26和烧结室 29内部分别设有立式矩形加热炉, 如图 2、 图 3所示, 所述加热炉内壁设有隔热层 (由上、 下隔热层 56、 61及两 侧隔热层 59构成) , 隔热层内部有多组加热器 60, 每组加热器 60均设置有一 热电偶 57, 温度分组控制; 所述传动装置设置在加热炉外, 加热炉上部设有可 左右开合的隔热板 51, 隔热板 51两侧分别连接第一气缸 66; 工作时, 第一气 缸 66控制隔热板 51的开合, 料架 2置于加热炉内, 一端穿过隔热板 51悬挂在 传动装置上, 光电开关 67设置在加热炉侧壁上, 控制料架 2的行走位置。  The preheating chamber 16, the heating degassing chamber 26 and the sintering chamber 29 are respectively provided with a vertical rectangular heating furnace. As shown in FIG. 2 and FIG. 3, the inner wall of the heating furnace is provided with a heat insulating layer (from top to bottom). The heat insulating layer 56, 61 and the two side heat insulating layers 59 are formed), the heat insulating layer has a plurality of heaters 60 therein, and each set of heaters 60 is provided with a thermocouple 57, and the temperature is grouped and controlled; the transmission device is arranged to be heated Outside the furnace, the upper part of the heating furnace is provided with a heat insulating plate 51 which can be opened and closed, and the first cylinder 66 is respectively connected to both sides of the heat insulating plate 51. When working, the first cylinder 66 controls the opening and closing of the heat insulating plate 51, and the material rack 2 It is placed in the heating furnace, one end is suspended on the transmission through the heat insulation board 51, and the photoelectric switch 67 is disposed on the side wall of the heating furnace to control the walking position of the material rack 2.
如图 2、 图 3所示, 本例中所述的传动装置包括第一电机 64、 链条 63、 齿 轮副 50、 两轴承座 48、 两平行导轨 54、 两组第一滚轮 53、 两第一链轮 49、 第 二链轮 65和链条板 96, 所述两第一链轮 49安装在穿过各室壳体伸出壳体外的 铰链轴上, 第一电机 64输出轴与第一链轮 49间通过链条 63连接, 两轴承座 48 一端分别安装在壳体内的链轮轴上, 另一端间连接有与链轮轴平行的轴, 该轴 和铰链轴上分别安装有相互配合的齿轮副 50,第二链轮 65安装在壳体内的链轮 轴上, 置于两平行导轨 54内的两组第一滚轮 53通过其滚轮轴连接, 在滚轮轴 上安装有与第二链轮 65配合的链条板 96, 所述链条板 96另一端连接料架 2连 杆。 在轴承座 48上连接有弹簧板 62, 弹簧板 62另一端连接各室的壳体, 工作 时受力使第二链轮 65和链条板 96紧密连接。  As shown in FIG. 2 and FIG. 3, the transmission device described in this example includes a first motor 64, a chain 63, a gear pair 50, two bearing blocks 48, two parallel rails 54, two sets of first rollers 53, two first a sprocket 49, a second sprocket 65 and a chain plate 96, the two first sprocket wheels 49 are mounted on a hinge shaft extending outside the housing through the chamber housings, the first motor 64 output shaft and the first sprocket 49 pairs are connected by a chain 63. One end of each of the two bearing blocks 48 is respectively mounted on a sprocket shaft in the casing, and the other end is connected with a shaft parallel to the sprocket shaft. The shaft and the hinge shaft are respectively equipped with cooperating gear pairs 50. The second sprocket 65 is mounted on the sprocket shaft in the housing, and the two sets of first rollers 53 placed in the two parallel guide rails 54 are connected by the roller shaft thereof, and the chain plate matched with the second sprocket 65 is mounted on the roller shaft. 96, the other end of the chain plate 96 is connected to the rack 2 link. A spring plate 62 is attached to the bearing housing 48. The other end of the spring plate 62 is connected to the housing of each chamber, and is forced to tightly connect the second sprocket 65 and the chain plate 96 during operation.
所述锁室 10是立式箱体, 是真空与大气的转化室, 设有惰性气体导入管路 和 lft真空装置 5, 1ft真空装置 5由粗抽阀 6、 1ft滑阀泵 7或旋片泵、 1ft罗 茨泵 8、 1ft旁通阀 9和真空管路组成。 料架 2承载料盒 42立式悬挂在传动 装置上, 通过传动装置的第二电机 68减速机驱动, 通过传动装置输送, 光电开 关显示控制料架 2的位置, 传动装置的第二电机 68实现变频调速。 The lock chamber 10 is a vertical box, is a vacuum and atmospheric conversion chamber, is provided with an inert gas introduction line and an lft vacuum device 5, and the 1 ft vacuum device 5 is composed of a rough valve 6, a 1ft slide valve pump 7 or a rotary vane. The pump, 1 ft Roots pump 8, 1 ft bypass valve 9 and vacuum line. The rack 2 carrying the box 42 is suspended vertically in the transmission The device is driven by a speed reducer of the second motor 68 of the transmission device, and is transmitted through the transmission device. The photoelectric switch displays the position of the control rack 2, and the second motor 68 of the transmission device realizes frequency conversion speed regulation.
所述装料室 44是立式箱体, 一端有 5ft隔离阀门 45与锁室 10连接, 一端有 lft隔离阀门 14与预热室 16连接, 装料室 44箱体侧面与隧道式密封传送箱 41 连接,密封传送箱 41内的机械手 43将码排成垛的料盒 42装入悬挂式料架 2内, 装料室 44上设有惰性气体导入管路。 料架 2承载料盒 42立式悬挂在传动装置 上, 光电开关显示控制料架 2位置, 传动装置的第二电机 68实现变频调速。  The loading chamber 44 is a vertical box, and has a 5 ft isolation valve 45 connected to the lock chamber 10 at one end, and an lft isolation valve 14 connected to the preheating chamber 16 at one end, and a side of the loading chamber 44 and a tunnel sealed transmission box. 41. The robot 43 in the sealed transfer case 41 houses the magazine 42 which is arranged in a row into the hanging rack 2, and the charging chamber 44 is provided with an inert gas introduction line. The rack 2 carrying the box 42 is suspended vertically on the transmission device, the photoelectric switch displays the position of the control rack 2, and the second motor 68 of the transmission realizes the frequency conversion speed regulation.
所述预热室 16、 加热脱气室 26和烧结室 29内部设有立式矩形加热炉, 加 热炉内部设有上、 侧、 下隔热层 56、 59、 61, 隔热层内部设有多组加热器 60, 通过水冷电极 58引出室外与加热电源连接, 每组加热器 60有一个热电偶 57连 接到电控柜中的温控电脑, 控制加热器外连电源的输出功率, 达到加热炉分区 域的温度控制; 传动装置在加热炉外, 加热炉上部设有左右开合的隔热 板 5 1, 隔热板 5 1 两侧分别连接第一气缸 66, 推动可左右开合的隔热板 51 移动, 当料架走动时, 隔热板 5 1打开, 当料架禁止在加热炉内, 隔热 板 5 1关闭; 加热炉外的上方室侧壁上为传动装置的两条平行导轨 54, 连接料 架 2的多个第一滚轮 53悬挂在导轨 54上, 室外第一电机 64减速机通过链轮链 条 63将动力引入到室内传动密封链轮轴上, 通过弹簧板 62受力的齿轮副 50将 扭矩传递到第一链轮 49上, 齿轮副两端是轴承座 48, 第一链轮 49拨动料架 2 上的链条板 96, 带动料架 2行走。  The preheating chamber 16, the heating degassing chamber 26 and the sintering chamber 29 are provided with a vertical rectangular heating furnace, and the heating furnace is provided with upper, side and lower heat insulating layers 56, 59, 61, and the heat insulating layer is internally provided. The plurality of heaters 60 are connected to the heating power source through the water-cooling electrode 58. Each group of heaters 60 has a thermocouple 57 connected to the temperature control computer in the electric control cabinet to control the output power of the external power supply of the heater to achieve heating. Temperature control of the furnace sub-zone; The transmission device is outside the heating furnace, and the upper part of the heating furnace is provided with a heat-insulating plate 5 1 for opening and closing, and the first and second sides of the heat-insulating plate 5 1 are respectively connected to the first cylinder 66 to push the partition which can be opened and closed The hot plate 51 moves, when the rack moves, the heat shield 5 1 is opened, when the rack is prohibited in the heating furnace, the heat shield 5 1 is closed; the upper chamber side wall outside the heating furnace is two parallels of the transmission The guide rail 54, the plurality of first rollers 53 of the connecting rack 2 are suspended on the guide rail 54, and the outdoor first motor 64 reducer drives the power through the sprocket chain 63 to the indoor transmission sealing sprocket shaft, and is biased by the spring plate 62. Gear pair 50 The torque transmitted to the first sprocket 49, both ends of the sub-bearing housing 48 is the gear, chain plate 2 on the first sprocket 49 toggle rack 96, rack 2 traveling drive.
所述预热室 16是立式箱体, 外壁设有水冷管 52, 其上抽气接管法兰 55连 接 2ft真空装置, 充气法兰 47连接惰性气体导入管路 15, 安全阀接管法兰 46连 接安全阀 17。 料架 2承载料盒 42立式悬挂在传动装置上轨道输送, 预热室箱 体上部对称侧板上设有的光电开关, 显示控制料架 2位置, 变频调速。 所述 预热室 16配蜡收集罐, 室体外包隔热层可作为脱蜡室。  The preheating chamber 16 is a vertical tank, and the outer wall is provided with a water cooling pipe 52. The upper air suction pipe flange 55 is connected to a 2 ft vacuum device, and the gas filling flange 47 is connected to the inert gas introduction pipe 15, and the safety valve nozzle flange 46. Connect the safety valve 17. Material rack 2 carrying material box 42 vertical suspension is transported on the track on the transmission device. The photoelectric switch is provided on the symmetric side plate of the upper part of the preheating chamber box to display the position of the control material rack 2 and frequency conversion speed regulation. The preheating chamber 16 is provided with a wax collecting tank, and the outer casing insulating layer can serve as a dewaxing chamber.
各真空装置均为现有结构, 2ft、 3ft和 4ft真空装置 24、 27、 30结构相同, 均 由主阀 19、 扩散泵 20、 2ft罗茨泵 2 1、 2ft滑阀泵 22、 2ft旁通阀 23和真 空管路构成; 1 ft真空装置 5 由粗抽阀 6、 1 ft旁通阀 9、 1 ft滑阀泵 7和 l ft罗茨泵 8构成; 5ft真空装置由滑阀泵、 罗茨泵和主阀构成。  Each vacuum device is of the existing structure, and the 2ft, 3ft and 4ft vacuum devices 24, 27, 30 have the same structure, and are bypassed by the main valve 19, the diffusion pump 20, the 2ft Roots pump 2 1 , the 2ft spool valve 22 , 2ft Valve 23 and vacuum line; 1 ft vacuum 5 consists of rough valve 6, 1 ft bypass valve 9, 1 ft spool pump 7 and l ft Roots pump 8; 5 ft vacuum unit by slide valve pump, Roots The pump and the main valve are constructed.
如图 2、 图 3所示, 所述加热脱气室 26是立式箱体, 外壁有水冷管 52或水 冷夹套, 还连接有 3ft真空装置 27、 惰性气体导入管路和安全阀。 料架 2承载料 盒 42立式悬挂在其传动装置上轨道输送, 加热脱氢室对称侧板上部加热炉 外设有对射式光电开关, 显示控制料架 2位置, 变频调速。 As shown in Fig. 2 and Fig. 3, the heating degassing chamber 26 is a vertical tank, and the outer wall has a water-cooling pipe 52 or a water-cooling jacket, and is also connected with a 3 ft vacuum device 27, an inert gas introduction pipe, and a safety valve. Shelf 2 carrier material The box 42 is suspended vertically on its transmission device, and the heating dehydrogenation chamber is provided on the symmetrical side plate. The heating furnace is equipped with an on-beam photoelectric switch, which displays the position of the control rack 2 and frequency conversion.
所述烧结室 29是立式箱体, 外壁有水冷管, 还连接有 4ft真空装置 30、 惰性 气体导入管路和安全阀。 料架 2承载料盒 42立式悬挂在传动装置上轨道输送, 箱体上部对称侧板上设有的光电开关, 显示控制料架 2位置, 变频调速。  The sintering chamber 29 is a vertical tank having a water-cooled tube on the outer wall, and is connected to a 4 ft vacuum unit 30, an inert gas introduction line, and a safety valve. Material rack 2 carrying material box 42 vertical suspension is transported on the track on the transmission device, and the photoelectric switch is arranged on the symmetric side plate of the upper part of the box to display the position of the control material rack 2 and frequency conversion speed regulation.
如图 4所示, 所述冷却室 34是立式箱体, 外壁焊有水冷管, 侧壁设有第二 电机 68, 内部有风箱, 风箱的侧板上设有多个导流管 71, 对应的另一侧有换热 器 70, 换热器 70出风口对着风机 33, 风机 33与第二电机 68的轴连接, 冷却 室壁周边设有弧形导流板 72 ; 外部连接有抽空管路、 惰性气体导入管路和安全 阀管路; 抽真空管路与 5ft真空装置 32连接; 料架 2承载料盒 42立式悬挂在传 动装置上, 光电开关显示控制料架 2位置, 变频调速。  As shown in FIG. 4, the cooling chamber 34 is a vertical box body, the outer wall is welded with a water-cooling tube, the side wall is provided with a second motor 68, and a wind box is inside, and a plurality of air guiding tubes 71 are disposed on the side plate of the wind box. The other side has a heat exchanger 70, the air outlet of the heat exchanger 70 is opposite to the fan 33, the fan 33 is connected to the shaft of the second motor 68, and the arc-shaped baffle 72 is arranged around the wall of the cooling chamber; Pipeline, inert gas introduction pipe and safety valve pipe; vacuum pipe is connected with 5ft vacuum device 32; material frame 2 carrying material box 42 is suspended vertically on the transmission device, photoelectric switch display control material frame 2 position, frequency conversion speed.
所述室间的隔离阀门为单向密封隔离插板阀, 如图 5-图 7所示, 包括阀体 76、 第二气缸 73、 多个气缸或油缸 78、 第一阀板 80和前、 后盲法兰 75、 82, 其中, 阀体 76对应两侧分别设置有前、 后盲法兰 75、 82, 前盲法兰 75外上部 设有第二气缸 73及冷却水管组件; 阀体 76内设置有与另外两侧平行的第一阀 板 80, 第一阀板 80通过阀板行走装置吊在阀体 76内上部, 阀板行走装置与外 部第二气缸 73的气缸杆缸头部分刚性连接, 第一阀板 80底部设置有第二滚轮 83及其底导轨 84, 第一阀板 80上焊有水冷管或夹套, 水冷管或夹套通过冷却 水管组件的软管 87连接到两个密封刚性冷却水管轴 86上, 冷却水管轴 86与第 二气缸 73的气缸杆通过连扳 85连接, 实现联动, 第一阀板 80移位时与冷却水 管轴 86相对静止, 多个气缸或油缸 78分别与第一阀板 80的两端连接, 用于锁 紧第一阀板 80; 第二磁力开关 77分别设置在两列气缸或油缸 78上, 控制第一 阀板 80的位置。  The isolation valve between the chambers is a one-way sealed isolation flapper valve, as shown in FIG. 5-7, including a valve body 76, a second cylinder 73, a plurality of cylinders or cylinders 78, a first valve plate 80 and a front, The rear blind flanges 75 and 82 are respectively provided with front and rear blind flanges 75 and 82 on opposite sides of the valve body 76, and a second cylinder 73 and a cooling water pipe assembly are disposed on the outer upper portion of the front blind flange 75; the valve body 76 A first valve plate 80 is disposed in parallel with the other two sides. The first valve plate 80 is suspended from the upper portion of the valve body 76 by the valve plate traveling device, and the valve plate traveling device is rigid with the cylinder rod portion of the external second cylinder 73. Connecting, the bottom of the first valve plate 80 is provided with a second roller 83 and a bottom rail 84 thereof. The first valve plate 80 is welded with a water-cooling tube or a jacket, and the water-cooling tube or the jacket is connected to the two through the hose 87 of the cooling water pipe assembly. On the sealed rigid cooling water pipe shaft 86, the cooling water pipe shaft 86 and the cylinder rod of the second cylinder 73 are connected by the connecting rod 85, and the first valve plate 80 is displaced relative to the cooling water pipe shaft 86 when the first valve plate 80 is displaced, and the plurality of cylinders or The cylinders 78 are respectively connected to both ends of the first valve plate 80 , for locking the first valve plate 80; the second magnetic switch 77 is respectively disposed on two rows of cylinders or cylinders 78 to control the position of the first valve plate 80.
所述阀板行走装置包括设置于阀体上端的上轨道 88、滚轮以及铰链连板 89, 滚轮置于上轨道 88内, 沿上轨道 88滑动, 滚轮通过铰链连板 89将第一阀板 80 吊在上轨道 88上, 实现在上轨道 88上的滑动。 第一阀板 80对应阀口侧设置有 隔热板 81。第二气缸 73的气缸杆带动第一阀板 80移位, 通过第二气缸 73上设 置的第一磁力开关 74控制第一阀板 80的位置, 所述的单向密封由多个锁紧气 缸或油缸杆作用于第一阀板 80完成。  The valve plate travel device includes an upper rail 88, a roller and a hinge plate 89 disposed at an upper end of the valve body. The roller is placed in the upper rail 88 and slides along the upper rail 88. The roller hangs the first valve plate 80 on the upper rail through the hinge joint plate 89. On the 88, the sliding on the upper rail 88 is achieved. The first valve plate 80 is provided with a heat insulating plate 81 corresponding to the valve port side. The cylinder rod of the second cylinder 73 drives the first valve plate 80 to be displaced, and the position of the first valve plate 80 is controlled by the first magnetic switch 74 disposed on the second cylinder 73. The one-way seal is composed of a plurality of locking cylinders. Or the cylinder rod is applied to the first valve plate 80 to complete.
如图 7所示, 所述第一阀板 80由多个气缸或油缸 78推动, 保证第一阀板 80受力均匀, 第一阀板 80设置有密封第一胶圈 79, 第一胶圈 79的压缩量大, 保证大尺寸阀口阀板密封性能。 阀体 76的前、 后盲法兰 75、 82的作用是维修 时第一阀板 80可以从阀体 76侧面移出。 As shown in FIG. 7, the first valve plate 80 is pushed by a plurality of cylinders or cylinders 78 to ensure the first valve plate. The force is 80, the first valve plate 80 is provided with a sealed first rubber ring 79, and the first rubber ring 79 has a large compression amount to ensure the sealing performance of the large-size valve port valve plate. The front and rear blind flanges 75, 82 of the valve body 76 function to remove the first valve plate 80 from the side of the valve body 76 during maintenance.
根据热处理需要, 本例所述预热室还可配备有蜡收集罐作为脱蜡室。  According to the heat treatment requirements, the preheating chamber described in this example may also be equipped with a wax collection tank as a dewaxing chamber.
本发明的工作过程如下:  The working process of the present invention is as follows:
下面参照图 1 加以说明, 检查动力电、 动力气源、 冷却用循环水和介质气 源。 检查所有主辅设备完好无损, 处于工作状态。 采用分散操作模式, 使设备 满足生产工艺状态即真空系统启动并处于互锁状态, 关闭室间隔离阀门, 箱间 隔离阀门, 手套箱、 隧道式传送密封箱和装料室处于保护气氛中 (氧含量< 500PPm) , 其他室处于真空状态; 加热炉内加热器完整无损; 惰性气体设定至预 定值, 所有传感器处于工作的稳定状态。  Referring to Fig. 1, the power, the power source, the circulating water for cooling, and the medium source are checked. Check that all the main and auxiliary equipment are in good condition and in working condition. The dispersing operation mode is adopted to make the equipment meet the production process state, that is, the vacuum system is started and interlocked, the inter-chamber isolation valve is closed, the compartment isolation valve, the glove box, the tunnel transmission sealing box and the charging chamber are in a protective atmosphere (oxygen content) < 500PPm), other chambers are in a vacuum state; the heater in the furnace is intact; the inert gas is set to a predetermined value, and all sensors are in a stable state of operation.
在大气压力下打开箱门 90, 将坯料装入准备箱 37, 关闭箱门 90, 充惰性气 体置换箱内氧气, 氧含量 < 500PPm ; 准备箱 37和手套箱 39压力平衡, 打开 6ft隔离阀门 38, 启动传动装置, 坯料进入到手套箱 39, 关闭 6ft 隔离阀门 38 ; 在手套箱 39 拔料, 将坯料装入石墨料盒, 将料盒落垛 码排完毕。 The tank door 90 is opened under atmospheric pressure, the billet is loaded into the preparation box 37, the tank door 90 is closed, the inert gas is filled in the tank, and the oxygen content is < 500 ppm ; the preparation tank 37 and the glove box 39 are pressure balanced, and the 6 ft isolation valve is opened. , start the transmission, the blank enters the glove box 39, closes the 6ft isolation valve 38; pulls the material in the glove box 39, loads the blank into the graphite box, and finishes the stacking of the material.
当手套箱 39和密封传送箱 41压力平衡, 打开 7ft隔离阀门 40, 启 动传动装置,成垛料盒 42进入到密封传送箱 41,关闭 7ft隔离阀门 40 ; 料盒 42在密闭传送箱内输送到机械手 43前等待。  When the glove box 39 and the sealed transfer box 41 are pressure balanced, the 7ft isolation valve 40 is opened, the transmission is activated, the cassette 42 is inserted into the sealed transfer box 41, and the 7ft isolation valve 40 is closed; the cassette 42 is transported in the closed transfer box to Wait for the robot 43 before.
在大气压力下打开进端室门 4, 在进端过渡架 3等待的料架 2进 入锁室 10, 关闭进端室门 4 ; 1 ft真空系统 5对锁室 1 0抽真空, 当压力 Open the inlet chamber door 4 under atmospheric pressure, enter the lock chamber 10 at the inlet transition frame 3, and close the inlet chamber door 4; 1 ft vacuum system 5 pairs of lock chambers 1 0 vacuum, when pressure
5E-2Pa时, 回充惰性气体。  At 5E-2Pa, refill with inert gas.
装料室 44没有料架 2, 装料室 44与锁室 10压力平衡, 打开 5# 隔离阀门 45, 料架 2进入到装料室 44, 关闭 5ft隔离阀门 45 ; 传送密 封箱 4 1 内的机械手 43将料盒 42装入料架 2中。  The loading chamber 44 has no rack 2, the loading chamber 44 is pressure balanced with the lock chamber 10, the 5# isolation valve 45 is opened, the rack 2 enters the loading chamber 44, and the 5ft isolation valve 45 is closed; the transfer seal box 4 1 The robot 43 loads the cartridge 42 into the rack 2.
预热室 1 6没有料架 2, 预热室 16和装料室 44压力平衡, 打开 1 ft 隔离阀门 14, 料架 2进入预热室 16, 关闭 l ft隔离阀门 14。 2ft真空装 置 24对预热室抽真空到 l Pa , 按工艺要求的升温速率加热到 430 °C保 温  Preheating chamber 16 There is no rack 2, preheating chamber 16 and loading chamber 44 are pressure balanced, open 1 ft isolation valve 14, rack 2 enters preheating chamber 16, closes l ft isolation valve 14. 2ft vacuum unit 24 vacuums the preheating chamber to l Pa and heats it to 430 °C at the heating rate required by the process.
3ft真空装置 27对加热脱气室 26抽真空。当加热脱气室 26没有料 架 2, 预热室 1 6和加热脱气室 26压力平衡, 打开 2 ft隔离阀门 25, 料 架 2进入加热脱气室 26, 关 2 ft隔离阀门 25, 加热脱气室 26的加热温 度 850 °C。 The 3 ft vacuum unit 27 evacuates the heated degassing chamber 26. When the heating degassing chamber 26 is not expected The rack 2, the preheating chamber 16 and the heating degassing chamber 26 are pressure balanced, the 2 ft isolation valve 25 is opened, the rack 2 enters the heating degassing chamber 26, the 2 ft isolation valve 25 is closed, and the heating temperature of the degassing chamber 26 is heated 850. °C.
4ft真空装置 30对烧结室 29抽真空。 当烧结室 29没有料架 2, 烧 结室 29和加热脱气室 26压力平衡, 打开 3 ft隔离阀门 28, 料架 2进入 烧结室 29, 关闭 3 ft隔离阀门 28, 烧结室的加热温度 1080 °C。  The 4 ft vacuum unit 30 vacuums the sintering chamber 29. When the sintering chamber 29 has no rack 2, the sintering chamber 29 and the heating degassing chamber 26 are pressure balanced, the 3 ft isolation valve 28 is opened, the rack 2 enters the sintering chamber 29, and the 3 ft isolation valve 28 is closed. The heating temperature of the sintering chamber is 1080 °. C.
5ft真空装置 32对冷却室 34抽真空。 当烧结室 29和冷却室 34压 力平衡, 冷却室 34没有料架 2, 打开 4ft隔离阀门 3 1, 料架 2进入冷 却室 34, 关闭 4ft隔离阀门 3 1。 充惰性气体, 当压力达到 0. O lMpa , 启 动风机 33开始对料盒和料盒内的磁体块强制冷却。  The 5 ft vacuum unit 32 draws a vacuum on the cooling chamber 34. When the pressure between the sintering chamber 29 and the cooling chamber 34 is balanced, the cooling chamber 34 has no rack 2, the 4ft isolation valve 3 is opened, the rack 2 enters the cooling chamber 34, and the 4ft isolation valve 3 1 is closed. Filled with inert gas, when the pressure reaches 0. O lMpa, the starter fan 33 starts to forcibly cool the magnet block in the magazine and the cartridge.
料盒 42和料盒 42 内的磁体块冷却到 80 °C以下, 当冷却室 34压 力为大气压时, 打开出端室门 35, 料架 2进入到出端过渡架 36。  The magnet block in the cartridge 42 and the cartridge 42 is cooled to below 80 ° C. When the pressure of the cooling chamber 34 is atmospheric pressure, the outlet door 35 is opened, and the rack 2 enters the outlet transition frame 36.
料架 2经回线架, 进入到进端过渡架 3, 等待。  The rack 2 passes through the return frame and enters the transition frame 3 of the inlet, waiting.
其中料架 2在各室间的输送是电机带动链条, 将动力通过密封传 动轴引入到真空室箱体内齿轮副 50 的传动轴上, 通过轴承座 48、 齿 轮副 50传递到第一链轮 49上, 通过弹簧板 62受力到料架 2拨轴上, 料架 2上的第一滚轮 53在导轨 54上行走, 光电开关 67是限位开关。  The conveyance of the rack 2 between the chambers is driven by a motor, and the power is introduced into the transmission shaft of the gear pair 50 in the vacuum chamber through the sealed transmission shaft, and transmitted to the first sprocket 49 through the bearing housing 48 and the gear pair 50. Above, the spring plate 62 is forced to the shaft of the rack 2, the first roller 53 on the rack 2 travels on the guide rail 54, and the photoelectric switch 67 is a limit switch.
在生产中, 控制系统能连续不断的对设备状况进行扫描, 并根据 预先设定的程序来自动运行。整个操作是在计算机的人机界面上完成。  In production, the control system continuously scans the condition of the equipment and automatically runs according to pre-programmed procedures. The entire operation is done on the human machine interface of the computer.
电气控制系统或系统的显示屏可以提供以下信息: 真空泵、 真空 阀门及真空管路真空度的运行状态; 驱动和显示料架 2输送和运行状 态; 驱动和显示室间阀门和炉门运行状态; 显示每个独立真空室的真 空度、 压力和加热温度; 介质气体运行状态、 安全阀状态; 实际冷却 水、 动力气压力、 介质气体报警; 报警管理; 显示所有相关的工艺参 数 (设定值和实际值) ; 参数输入; 历史工艺参数 /数据显示和储存; 设备所有主要元器件都可以透过显示屏操作。  The display of the electrical control system or system can provide the following information: operating status of the vacuum pump, vacuum valve and vacuum line vacuum; drive and display rack 2 transport and operating status; drive and display inter-chamber valve and oven operating status; Vacuum, pressure and heating temperature of each independent vacuum chamber; medium gas operating state, safety valve status; actual cooling water, power gas pressure, medium gas alarm; alarm management; display all relevant process parameters (setpoint and actual) Value); Parameter input; Historical process parameters / data display and storage; All major components of the device can be operated through the display.
根据本发明工艺方法与现有工艺方法分别制得的产品性能对比如 下:  The product performance pairs obtained according to the process method of the present invention and the existing process methods are as follows:
对比例: 按重量百分比为 18%Nd, 8. 5%Pr , 3%Dy, 1 . 02%B, 0. 3%A 1 , 余量为 Fe进行配料, 经过熔炼、 氢破碎、 气流磨、 磁场成型压制, 压 制后的坯块, 采用配有保护手套箱的单室烧结炉进行抽空烧结, 升温 到 430°C进行保温脱气保温 3小时, 真空度高于 lPa, 保温后, 升温到 850°C, 保温 2小时, 之后升温到 1080°C进行真空烧结保温 2 小时, 真空度达到 E-2Pa级,然后分别进行在 900°C两个小时和 500°C四个小 时的时效。 Comparative Example: 18% by weight of Nd, 8.5%Pr, 3%Dy, 1.02%B, 0.3%A1, the balance is Fe, after smelting, hydrogen crushing, jet milling, Magnetic field forming press, pressure After the preparation, the billet is evacuated and sintered in a single-chamber sintering furnace equipped with a protective glove box. The temperature is raised to 430 ° C for heat preservation and degassing for 3 hours. The vacuum is higher than lPa. After the heat preservation, the temperature is raised to 850 ° C. After 2 hours, the temperature was raised to 1080 ° C for vacuum sintering for 2 hours, and the degree of vacuum reached E-2Pa, and then aging at 900 ° C for two hours and 500 ° C for four hours.
实施例 1: 采用与对比例中相同的材料配比, 采用本发明的连续烧结 工艺方法及其烧结设备进行烧结。  Example 1: Sintering was carried out by using the same sintering ratio method as in the comparative example, using the continuous sintering process of the present invention and its sintering apparatus.
具体实施步骤为:  The specific implementation steps are as follows:
( 1) 将压制成型的稀土永磁粉末合金坯料经隔绝空气包装处理, 传送至准备箱 37, 关箱门 90, 抽真空或充惰性气体置换箱内的空气; 当准备箱 37和手套箱 39的压力平衡, 打开箱间 6ft隔离阀门 38, 将包 装的坯料传送至手套箱 39, 关箱间 6ft隔离阀门 38; 在手套箱 39将坯 料放入料盒 42, 料盒 42码排成垛; 当手套箱 39和密封传送箱 41 的 压力平衡, 打开箱间 7ft隔离阀门 40, 将成垛的料盒 42传送至密封传 送箱 41, 关箱间 7ft隔离阀门 40; 成垛的料盒 42 传送至与装料室 44 接口处的机械手 43处, 由机械手 43将料盒 42装入装料室 44内的料 架 2; 在上述流程中, 各箱和装料室的氧含量<50(^?111; (1) The press-formed rare earth permanent magnet powder alloy blank is subjected to an air-packaging treatment, and is sent to a preparation box 37, which closes the tank door 90, and evacuates or fills the air in the inert gas to replace the air in the tank; when the preparation box 37 and the glove box 39 are prepared Pressure balance, open the 6ft isolation valve 38 between the boxes, transfer the packaged blank to the glove box 39, close the box 6ft isolation valve 38; place the blank in the glove box 39 into the magazine 42, the cartridge 42 is arranged in a row; When the pressure of the glove box 39 and the sealed transfer box 41 is balanced, the 7ft isolation valve 40 is opened, the cassette 42 is conveyed to the sealed transfer box 41, and the 7ft isolation valve 40 is closed; the cassette 42 is transferred to the cassette At the robot 43 at the interface with the loading chamber 44, the cartridge 42 is loaded into the rack 2 in the loading chamber 44 by the robot 43; in the above process, the oxygen content of each tank and the charging chamber is <50 (^?111 ;
(2) 当装料室 44 与预热室 16压力平衡, 打开室间 1ft隔离阀门 14, 料架 2传送至预热室 16, 关闭 1ft隔离阀门 14; 开始抽真空, 当 真空度高于 lPa时, 开始加热到 430°C, 保温 3小时;  (2) When the charging chamber 44 is pressure balanced with the preheating chamber 16, open the 1ft isolation valve 14 between the chambers, the rack 2 is transferred to the preheating chamber 16, and the 1ft isolation valve 14 is closed; the vacuum is started, when the vacuum is higher than lPa At the beginning, start heating to 430 ° C, keep warm for 3 hours;
(3) 加热脱气室 26 处于真空状态, 加热温度 400°C, 打开室间 2ft隔离阀门 25, 料架 2传送至加热脱气室 26, 关 2ft隔离阀门 25; 加 热炉内温度从 430°C〜 850°C取多段升温保温 2 小时, 真空度达到 3E-2Pa; (3) The heating degassing chamber 26 is in a vacuum state, the heating temperature is 400 ° C, the inter-chamber 2 ft isolation valve 25 is opened, the material rack 2 is transferred to the heating degassing chamber 26, and the 2ft isolation valve 25 is closed; the temperature in the heating furnace is from 430°. C ~ 850 °C take multiple heating and heat preservation for 2 hours, the vacuum degree reaches 3E-2Pa ;
(4) 烧结室处于真空状态, 加热温度至 850°C, 打开室间 3ft隔离 阀门 28, 料架 2传送至加热脱气室 26, 关闭 3ft隔离阀门 28; 当真空 度高于 3E-2Pa后, 继续升温, 加热温度到 1080°C烧结, 真空度达到 E-2Pa级;  (4) The sintering chamber is in a vacuum state, the heating temperature is up to 850 ° C, the inter-chamber 3 ft isolation valve 28 is opened, the material rack 2 is transferred to the heating degassing chamber 26, and the 3 ft isolation valve 28 is closed; when the vacuum degree is higher than 3E-2Pa , continue to heat up, the heating temperature is sintered to 1080 ° C, the degree of vacuum reaches E-2Pa level;
(5) 冷却室 34处于真空状态, 打开室间 4ft隔离阀门 31, 料架 2 传送至冷却室 34, 关闭 4ft隔离阀门 31; 充氮气或氩气至 0. OlMPa, 启 动风机 33, 对料盒 42及料盒 42 内的稀土永磁合金进行冷却, 冷却至 80°C以下; 当室腔压力平衡至大气压, 打开出端室门 35, 料架 2传送 至出端过渡架 36, 关闭出端室门 35; 将料架 2 中的料盒 42从料架 2 取出; The ventilating chamber 34 is in a vacuum state, the chamber 4ft isolation valve 31 is opened, the rack 2 is transferred to the cooling chamber 34, the 4 ft isolation valve 31 is closed, and the nitrogen or argon gas is charged to 0. OlMPa, The moving fan 33 cools the rare earth permanent magnet alloy in the cartridge 42 and the cartridge 42 and cools it to below 80 ° C; when the chamber pressure is balanced to atmospheric pressure, the outlet chamber door 35 is opened, and the rack 2 is transferred to the outlet end. The transition frame 36 is closed, and the outlet door 35 is closed; the cartridge 42 in the rack 2 is taken out from the rack 2;
(6) 料架 2 经回线架进入进端过渡架 3, 锁室 10充气平衡至大 气压, 开进端室门 4, 料架 2传送至锁室 10, 关进端室门 4抽真空到 lPa时, 充惰性气体, 当锁室 10与装料室 44压力平衡, 开室间 5ft隔 离阀门 45, 料架 2传送至装料室 44等待装载料盒, 关闭 5ft隔离阀门 45。  (6) The rack 2 enters the inlet transition frame 3 via the return frame, the lock chamber 10 is inflated to atmospheric pressure, opens into the end chamber door 4, the rack 2 is transferred to the lock chamber 10, and the end chamber door 4 is evacuated to lPa. The inert gas is filled. When the lock chamber 10 and the charging chamber 44 are pressure balanced, the 5 ft isolation valve 45 is opened between the chambers, and the rack 2 is transferred to the charging chamber 44 to wait for loading the cartridge, and the 5 ft isolation valve 45 is closed.
本发明还可增加第 (7) 步, 在冷却室后还可以通过隔离阀门串接 一个时效室, 料架传送至时效室, 加热温度 900°C, 时间 2 小时; 加 热温度 500°C, 时间 4小时。  The invention can also add step (7). After the cooling chamber, an aging chamber can be connected in series through the isolation valve, and the material rack is transferred to the aging chamber at a heating temperature of 900 ° C for 2 hours; the heating temperature is 500 ° C, time. 4 hours.
本发明还可增加第 (8) 步, 在时效室后还可以通过隔离阀门串接 一个冷却室 2,料架传送至冷却室 2;充氮气或氩气至 0.01 MPa 〜0.09 MPa,启动风机对料盒及料盒内的稀土永磁合金进行冷却,冷却至 80°C 以下; 当室腔压力平衡至大气压, 打开出端室门 35, 料架 2传送至出 端过渡架 36, 关闭出端室门 35; 将料架 2中的料盒 42从料架 2取出。  The invention can also add step (8). After the aging chamber, a cooling chamber 2 can be connected in series through the isolation valve, and the rack is transferred to the cooling chamber 2; nitrogen or argon gas is charged to 0.01 MPa to 0.09 MPa, and the fan pair is activated. The rare earth permanent magnet alloy in the cartridge and the cartridge is cooled and cooled to below 80 ° C; when the chamber pressure is balanced to atmospheric pressure, the outlet chamber door 35 is opened, the rack 2 is transferred to the outlet transition frame 36, and the outlet end is closed. The door 35; the cartridge 42 in the rack 2 is taken out from the rack 2.
实施例 2: 采用与对比例中相同的材料配比, 采用实施例 1 中的连续 烧结工艺方法进行烧结及其时效。 预热室抽真空, 当真空度高于 lPa 时,开始加热到 400 °C,保温 3小时;脱气加热室内温度从 450 °C〜 800 °C 取多段升温, 且在 800°C时保温 3小时, 真空度达到 3E-2Pa; 继续升 温,加热烧结室内温度到 1080°C烧结 2个小时,真空度达到 E-2Pa级; 并以实施例 1 中的时效方法进行时效。  Example 2: Sintering and aging were carried out by the continuous sintering process of Example 1 using the same material ratio as in the comparative example. The preheating chamber is evacuated. When the vacuum is higher than lPa, the heating is started to 400 °C for 3 hours. The temperature of the degassing heating chamber is increased from 450 °C to 800 °C, and the temperature is maintained at 800 °C. Hours, the degree of vacuum reached 3E-2Pa; the temperature was further increased, and the temperature in the sintering chamber was heated to 1080 ° C for 2 hours, and the degree of vacuum reached E-2Pa; and the aging was carried out by the aging method in Example 1.
实施例 3: 采用与对比例中相同的材料配比, 采用实施例 1 中的连续 烧结工艺方法进行烧结及其时效。 预热室抽真空, 当真空度高于 lPa 时,开始加热到 500 °C,保温 3小时;脱气加热室内温度从 500 °C〜 850 °C 取多段升温, 且在 850°C时保温 4小时, 真空度达到 3E-2Pa; 继续升 温,加热烧结室内温度到 1080°C烧结 2个小时,真空度达到 E-2Pa级; 并以实施例 1 中的时效方法进行时效。 实施例 4 : 采用与对比例中相同的材料配比, 采用实施例 1 中的连续 烧结工艺方法进行烧结及其时效。 预热室抽真空, 当真空度高于 l Pa 时,开始加热到 500 °C,保温 3小时;脱气加热室内温度从 500 °C 900 °C 取多段升温, 且在 900 °C时保温 3小时, 真空度达到 3 E-2Pa ; 继续升 温,加热烧结室内温度到 1 080 °C烧结 2个小时,真空度达到 E-2Pa级; 并以实施例 1 中的时效方法进行时效。 Example 3: Sintering and aging were carried out by the continuous sintering process of Example 1 using the same material ratio as in the comparative example. The preheating chamber is evacuated. When the vacuum is higher than lPa, the heating is started to 500 °C for 3 hours. The temperature of the degassing heating chamber is increased from 500 °C to 850 °C, and the temperature is raised at 850 °C. Hours, the degree of vacuum reached 3E-2Pa; the temperature was further increased, and the temperature in the sintering chamber was heated to 1080 ° C for 2 hours, and the degree of vacuum reached E-2Pa; and the aging was carried out by the aging method in Example 1. Example 4: Sintering and aging were carried out by the continuous sintering process of Example 1 using the same material ratio as in the comparative example. The preheating chamber is evacuated. When the vacuum is higher than l Pa, the heating is started to 500 °C for 3 hours. The temperature of the degassing heating chamber is increased from 500 °C to 900 °C, and the temperature is raised at 900 °C. Hours, the degree of vacuum reached 3 E-2Pa; the temperature was raised, the temperature in the sintering chamber was heated to 1 080 ° C for 2 hours, and the degree of vacuum reached E-2Pa; and the aging method in Example 1 was used for aging.
Figure imgf000016_0001
Figure imgf000016_0001
通过上述各例可以看出, 稀土合金通过连续烧结工艺, 提高了磁 体性能, 生产的自动化程度大大提高。  It can be seen from the above examples that the rare earth alloy improves the magnetic performance through the continuous sintering process, and the degree of automation of production is greatly improved.
本专业的普通技术人员应能了解本发明的实质, 并认识到本发明 的具体实施细节可以在权利要求保护范围内做出例如扩展多个加热脱 气室、 烧结室和冷却室等各种变化。  Those skilled in the art should be able to understand the essence of the present invention, and recognize that the specific implementation details of the present invention can make various changes such as expanding a plurality of heating degassing chambers, sintering chambers, and cooling chambers within the scope of the claims. .

Claims

权 利 要 求 Rights request
1、 一种稀土永磁合金连续烧结工艺方法, 其特征在于: 包括如下 步骤: 1. A continuous sintering process method for rare earth permanent magnet alloys, which is characterized by: including the following steps:
( 1) 将压制成型的稀土永磁粉末合金坯料经隔绝空气包装处理, 传送至准备箱, 关箱门, 抽真空或充惰性气体置换箱内的空气; 当准 备箱和手套箱的压力平衡, 打开箱间 6ft隔离阀门, 将包装的坯料传送 至手套箱, 关箱间 6ft隔离阀门; 在手套箱内将坯料拆包放入料盒, 料 盒码排成垛; 当手套箱和传送密封箱的压力平衡, 打开箱间 7ft隔离阀 门, 将成垛的料盒传送至传送密封箱, 关箱间 7ft隔离阀门; 成垛的料 盒传送至与装料室接口处的机械手处, 由机械手将料盒装入装料室内 的料架; 在上述流程中, 各箱和装料室的氧含量<50(^?111; (1) The pressed rare earth permanent magnet powder alloy billet is packaged in an air-isolated manner, transferred to the preparation box, the box door is closed, and the air in the box is evacuated or filled with inert gas; when the pressures of the preparation box and glove box are balanced, Open the 6ft isolation valve between the boxes, transfer the packaged blanks to the glove box, and close the 6ft isolation valve between the boxes; Unpack the blanks and put them into the boxes in the glove box, and arrange the box numbers into stacks; When the glove box and the transfer seal box To balance the pressure, open the 7ft isolation valve between the boxes, transfer the stacked boxes to the transmission seal box, close the 7ft isolation valve between the boxes; transfer the stacked boxes to the manipulator at the interface with the loading room, and the manipulator will transfer the materials The boxes are loaded into the material rack in the loading chamber; In the above process, the oxygen content of each box and the loading chamber is <50(^?111 ;
(2) 当装料室与预热室压力平衡, 打开室间 1ft隔离阀门, 料架 传送至预热室, 关闭 1ft隔离阀门; 开始抽真空, 当真空度高于 lPa时, 开始加热到 400-500°C, 保温 1-3小时; (2) When the pressure of the charging chamber and the preheating chamber is balanced, open the 1ft isolation valve between the chambers, transfer the material rack to the preheating chamber, close the 1ft isolation valve; start vacuuming, and when the vacuum degree is higher than lPa, start heating to 400 -500°C, keep warm for 1-3 hours;
(3) 加热脱气室处于真空状态, 加热温度 400-500°C, 打开室间 (3) The heating degassing chamber is in a vacuum state, the heating temperature is 400-500°C, and the chamber is opened
2ft隔离阀门, 料架传送至加热脱气室, 关闭 2ft隔离阀门; 加热炉内温 度从 400°C〜900°C取多段升温保温 2-4小时, 真空度达到 3E_2Pa; 2ft isolation valve, the material rack is transferred to the heating degassing chamber, and the 2ft isolation valve is closed; the temperature in the heating furnace is heated in multiple stages from 400°C to 900°C for 2-4 hours, and the vacuum reaches 3E_2Pa;
(4) 烧结室处于真空状态, 加热温度至 850°C, 打开室间 3ft隔离 阀门,料架传送至加热脱气室,关闭 3ft隔离阀门;当真空度高于 3E-2Pa 后, 继续升温, 加热温度到 1020°C〜 1080°C烧结, 时间 2〜4 小时, 真空度达到 lE-2Pa; (4) The sintering chamber is in a vacuum state, heating temperature to 850°C, open the 3ft isolation valve between chambers, transfer the material rack to the heating degassing chamber, close the 3ft isolation valve; when the vacuum degree is higher than 3E-2Pa, continue to heat up, Heating temperature to 1020°C~1080°C for sintering, time 2~4 hours, vacuum degree reaches 1E-2Pa;
(5) 冷却室处于真空状态, 打开室间 4ft隔离阀门, 料架传送至 冷却室, 关闭 4ft隔离阀门; 充氮气或氩气至 0.01MPa〜0.19 MPa, 启 动风机对料盒及料盒内的稀土永磁合金进行冷却, 冷却至 80°C以下; 当室腔压力平衡至大气压, 打开出端室门, 料架传送至出端过渡架, 关闭出端室门; 将料架中的料盒从料架取出; (5) The cooling chamber is in a vacuum state, open the 4ft isolation valve between the rooms, transfer the material rack to the cooling chamber, close the 4ft isolation valve; fill with nitrogen or argon to 0.01MPa~0.19MPa, start the fan to blow the material box and the material inside the box The rare earth permanent magnet alloy is cooled to below 80°C; when the chamber pressure is balanced to atmospheric pressure, the outlet chamber door is opened, the material rack is transferred to the outlet transition rack, and the outlet chamber door is closed; the material box in the material rack is Take it out from the material rack;
(6) 料架经回线进入进端过渡架, 锁室充气平衡至大气压, 开进 端室门, 料架传送至锁室, 关闭进端室门抽真空到 lPa时, 充惰性气 体, 当锁室与装料室压力平衡, 开室间 5ft隔离阀门, 料架传送至装料 室等待装载料盒, 关闭 5ft隔离阀门。 2、 如权利要求 1所述的稀土永磁合金连续烧结工艺方法, 其特征 在于: 还包括步骤 (7 ) : 在冷却室后通过隔离阀门串接一个时效室, 料架传送至时效室, 加热温度 800 °C〜900 °C, 时间 2〜4 小时; 加热 温度 450 °C〜550 °C, 时间 2〜4小时。 (6) The material rack enters the inlet transition frame through the return line, and the lock chamber is inflated and balanced to atmospheric pressure. Open the inlet end chamber door, and the material rack is transferred to the lock chamber. Close the inlet end chamber door and evacuate to lPa, then fill it with inert gas. The pressures of the lock chamber and the loading chamber are balanced, the 5ft isolation valve between the chambers is opened, the material rack is transferred to the charging chamber to wait for loading of the material box, and the 5ft isolation valve is closed. 2. The continuous sintering process method of rare earth permanent magnet alloy according to claim 1, characterized in that: it also includes step (7): after the cooling chamber, an aging chamber is connected in series through an isolation valve, and the material rack is transferred to the aging chamber, and heated Temperature 800°C~900°C, time 2~4 hours; heating temperature 450°C~550°C, time 2~4 hours.
3、 如权利要求 1所述的稀土永磁合金连续烧结工艺方法, 其特 征在于: 还包括步骤 (8 ) , 在时效室后通过隔离阀门串接一个冷却室 ( 2 ) , 料架传送至冷却室 (2 ) ; 充氮气或氩气至 0. 01MPa〜0. 19 MPa, 启动风机对料盒及料盒内的稀土永磁合金进行冷却, 冷却至 80 °C以 下; 当室腔压力平衡至大气压, 打开出端室门, 料架传送至出端过渡 架, 关闭出端室门; 将料架中的料盒从料架取出。 3. The continuous sintering process method of rare earth permanent magnet alloy according to claim 1, characterized in that: it also includes step (8), a cooling chamber (2) is connected in series through an isolation valve after the aging chamber, and the material rack is transferred to the cooling chamber. Chamber (2); fill with nitrogen or argon to 0.01MPa~0.19MPa, start the fan to cool the material box and the rare earth permanent magnet alloy in the material box to below 80 °C; when the chamber pressure is balanced to Atmospheric pressure, open the outlet chamber door, transfer the material rack to the outlet transition rack, close the outlet chamber door; take out the material box in the material rack from the material rack.
4.采用如权利要求 1 所述稀土永磁合金连续烧结工艺方法的烧结设备, 其 特征是: 由依次排列的准备箱、 手套箱、 密封传送箱, 以及依次排列的锁室、 装料室、 预热室、 加热脱气室、 烧结室、 冷却室、 各室的传动装置、 回线架和 抽真空装置组成, 各室通过室间隔离阀门连接, 所述密封传送箱与装料室连接; 各室传动装置设置在各室的上部, 各室外设置有带有传动装置的回线架, 回线 架与进、 出端过渡架相连, 料架悬挂在传动装置上循环往复, 料盒经密封传送 箱传送至料架上, 预热室、 加热脱气室和烧结室外壁分别设有水冷管或水冷夹 套、 抽真空管路、 惰性气体导入管路、 安全阀和压力表。 4. Sintering equipment using the rare earth permanent magnet alloy continuous sintering process as claimed in claim 1, which is characterized by: a preparation box, a glove box, a sealed transfer box arranged in sequence, and a lock chamber, a charging chamber, and It consists of a preheating chamber, a heating degassing chamber, a sintering chamber, a cooling chamber, a transmission device for each chamber, a return frame and a vacuum device. Each chamber is connected through an isolation valve between the chambers, and the sealed transfer box is connected to the charging chamber; The transmission device of each chamber is set at the upper part of each chamber. Each outdoor room is equipped with a return frame with a transmission device. The return frame is connected to the transition frame at the inlet and outlet. The material rack is suspended on the transmission device and circulates back and forth. The material box is sealed. The transfer box is transferred to the material rack. The walls of the preheating chamber, heating degassing chamber and sintering chamber are respectively equipped with water-cooling pipes or water-cooling jackets, vacuum pipes, inert gas introduction pipes, safety valves and pressure gauges.
5.根据权利要求 4所述的稀土永磁合金连续烧结设备, 其特征在于: 所述 预热室、 加热脱气室和烧结室内部分别设有立式矩形加热炉, 所述加热炉内壁 设有隔热层, 隔热层内部有多组加热器, 每组加热器均设置有一热电偶, 温度 分组控制; 所述传动装置设置在加热炉外, 加热炉上部设有可左右开合的隔热 板。 5. The rare earth permanent magnet alloy continuous sintering equipment according to claim 4, characterized in that: the preheating chamber, the heating degassing chamber and the sintering chamber are each equipped with a vertical rectangular heating furnace, and the inner wall of the heating furnace is equipped with There is a heat insulation layer, and there are multiple sets of heaters inside the heat insulation layer. Each set of heaters is equipped with a thermocouple, and the temperature is controlled in groups; the transmission device is set outside the heating furnace, and the upper part of the heating furnace is provided with a partition that can be opened and closed left and right. hot plate.
6.根据权利要求 4所述的稀土永磁合金连续烧结设备, 其特征在于: 所述 室间的隔离阀门为单向密封插板阀, 包括阀体、 第二气缸、 多个气缸或油缸、 第一阀板和前、 后盲法兰, 其中, 阀体对应两侧分别设置有前、 后盲法兰, 前 盲法兰外上部设有第二气缸及冷却水管组件; 阀体内设置有与另外两侧平行的 第一阀板, 第一阀板通过阀板行走装置吊在阀体内上部, 阀板行走装置与外部 第二气缸的气缸杆缸头部分刚性连接, 第一阀板底部设置有第二滚轮及其底导 轨, 第一阀板上焊有水冷管或夹套, 水冷管或夹套通过冷却水管组件的软管连 接到两个密封刚性冷却水管轴上, 冷却水管轴与第二气缸的气缸杆连接, 实现 联动, 第一阀板移位时与冷却水管轴相对静止, 多个气缸或油缸分别与第一阀 板的两端连接锁紧第一阀板, 实现密封。 6. The rare earth permanent magnet alloy continuous sintering equipment according to claim 4, characterized in that: the isolation valve between the chambers is a one-way sealing gate valve, including a valve body, a second cylinder, a plurality of cylinders or oil cylinders, The first valve plate and the front and rear blind flanges, wherein the valve body is provided with front and rear blind flanges respectively on both sides, and the outer upper part of the front blind flange is provided with a second cylinder and a cooling water pipe assembly; the valve body is provided with a In addition, the first valve plate is parallel on both sides. The first valve plate is suspended from the upper part of the valve body through the valve plate traveling device. The valve plate traveling device is rigidly connected to the cylinder rod head part of the external second cylinder. The bottom of the first valve plate is provided with The second roller and its bottom guide rail, the first valve plate are welded with a water-cooling pipe or jacket, and the water-cooling pipe or jacket is connected through the hose of the cooling water pipe assembly. Connected to two sealed rigid cooling water pipe shafts, the cooling water pipe shaft is connected to the cylinder rod of the second cylinder to achieve linkage. When the first valve plate is displaced, it is relatively stationary with the cooling water pipe shaft. Multiple cylinders or oil cylinders are connected to the first valve respectively. The two ends of the plate are connected and locked to the first valve plate to achieve sealing.
7.根据权利要求 4所述的稀土永磁合金连续烧结设备, 其特征在于: 所述 冷却室侧壁设有第二电机, 内部有风箱, 风箱的侧板有多个导流管, 对应的另 一侧有换热器, 换热器出风口对着风机进风口, 风机与第二电机轴连接, 冷却 室壁周边设有弧形导流板; 外部连接有抽空管路、 惰性气体导入管路和安全阀 管路; 抽真空管路与抽真空装置连接。 7. The rare earth permanent magnet alloy continuous sintering equipment according to claim 4, characterized in that: the side wall of the cooling chamber is provided with a second motor, and there is a wind box inside, and the side plates of the wind box have a plurality of guide tubes, corresponding to There is a heat exchanger on the other side. The air outlet of the heat exchanger faces the air inlet of the fan. The fan is connected to the second motor shaft. There is an arc deflector around the wall of the cooling chamber; the external connection is an evacuation pipeline and an inert gas introduction pipe. pipeline and safety valve pipeline; the vacuum pipeline is connected to the vacuum device.
8.根据权利要求 4所述的稀土永磁合金连续烧结设备, 其特征在于: 所述 预热室配蜡收集罐作为脱蜡室。 8. The rare earth permanent magnet alloy continuous sintering equipment according to claim 4, characterized in that: the preheating chamber is equipped with a wax collection tank as a dewaxing chamber.
9.根据权利要求 4所述的稀土永磁合金连续烧结设备, 其特征在于: 所述 传动装置包括第一电机、 链条、 齿轮副、 两轴承座、 两平行导轨、 两组第一滚 轮、 两第一链轮、 第二链轮和链条板, 所述两第一链轮安装在穿过各室壳体伸 出壳体外的铰链轴上, 第一电机输出轴与第一链轮间通过链条连接, 两轴承座 一端分别安装在壳体内的链轮轴上, 另一端间连接有与铰链轴平行的轴, 该轴 和铰链轴上分别安装有相互配合的齿轮副, 第二链轮安装在壳体内的链轮轴上, 置于两平行导轨内的两组第一滚轮通过其滚轮轴连接, 在滚轮轴上安装有与第 二链轮配合的链条板, 所述链条板另一端连接料架连杆。 9. The rare earth permanent magnet alloy continuous sintering equipment according to claim 4, characterized in that: the transmission device includes a first motor, a chain, a gear pair, two bearing seats, two parallel guide rails, two sets of first rollers, two The first sprocket, the second sprocket and the chain plate. The two first sprockets are installed on the hinge shaft that passes through the housing of each chamber and extends out of the housing. The first motor output shaft and the first sprocket are connected by a chain. connection, one end of the two bearing seats is installed on the sprocket shaft in the housing, and the other end is connected to a shaft parallel to the hinge shaft. The shaft and the hinge shaft are respectively equipped with matching gear pairs, and the second sprocket is installed on the housing. On the sprocket shaft in the body, two sets of first rollers placed in two parallel guide rails are connected through their roller shafts. A chain plate matching the second sprocket is installed on the roller shaft. The other end of the chain plate is connected to the material rack. pole.
10. 根据权利要求 9所述的稀土永磁合金连续烧结设备, 其特征在于: 所 述在轴承座上连接有弹簧板, 弹簧板另一端连接各室的壳体, 工作时弹簧板受 力使第二链轮和链条板紧密连接。 10. The rare earth permanent magnet alloy continuous sintering equipment according to claim 9, characterized in that: a spring plate is connected to the bearing seat, and the other end of the spring plate is connected to the shell of each chamber. During operation, the spring plate is forced to The second sprocket and the chain plate are tightly connected.
11.根据权利要求 4所述的稀土永磁合金连续烧结设备, 其特征在于: 所述 准备箱、 手套箱和隧道式传送密封箱是真空或保护气氛密封箱体, 分别设有抽 空管路连接真空装置, 设有惰性气体充气管路连接惰性气体系统; 相邻两箱间 分别设有箱间隔离阀门、 准备箱另一端设有箱门, 传送密封箱内设有机械手将 料盒装入装料室的料架; 每个箱设有压力表和真空规, 相邻两箱之间连接有平 衡阀管路, 通过平衡阀管路平衡两箱压力。 11. The rare earth permanent magnet alloy continuous sintering equipment according to claim 4, characterized in that: the preparation box, glove box and tunnel transmission sealed box are vacuum or protective atmosphere sealed boxes, respectively equipped with evacuation pipeline connections The vacuum device is equipped with an inert gas inflation pipeline connected to the inert gas system; two adjacent boxes are equipped with isolation valves between the boxes, a door is provided at the other end of the preparation box, and a manipulator is installed in the transmission sealed box to load the material box into the container. Material rack in the material chamber; each box is equipped with a pressure gauge and vacuum gauge, and a balance valve pipeline is connected between two adjacent boxes to balance the pressure of the two boxes through the balance valve pipeline.
12. 根据权利要求 4所述的稀土永磁合金连续烧结设备, 其特征在于: 所 述箱间隔离阀门包括阀箱体、 第三气缸及其内部设置的第二阀板、 铰链 板、 连杆、 第三滚轮、 导向轨道和撞块, 所述第二阀板通过多个连杆 连接到铰链板上, 阀箱体内设有导向轨道, 铰链板上设有沿导向轨道 滑动的第三滚轮, 第三气缸置于阀箱体外, 其气缸杆伸入阀体内与铰 链板连接, 撞块置于阀箱体内阀端盖上, 第二阀板靠近阀口侧法兰端 设有胶圈, 第三气缸带动铰链板在导向滚轮轨道上移动, 第二阀板撞 击撞块, 连杆推动第二阀板向阀口侧法兰靠近, 压缩胶圈完成隔离密 封作用。 12. The rare earth permanent magnet alloy continuous sintering equipment according to claim 4, characterized in that: the box isolation valve includes a valve box body, a third cylinder and a second valve plate, a hinge plate and a connecting rod arranged inside it. , the third roller, the guide track and the impact block, the second valve plate passes through multiple connecting rods Connected to the hinge plate, the valve box is provided with a guide track, and the hinge plate is provided with a third roller that slides along the guide track. The third cylinder is placed outside the valve box, and its cylinder rod extends into the valve body to connect with the hinge plate. , the impact block is placed on the valve end cover in the valve box, the second valve plate is equipped with a rubber ring at the flange end near the valve port side, the third cylinder drives the hinge plate to move on the guide roller track, the second valve plate hits the impact block, The connecting rod pushes the second valve plate closer to the valve port side flange, and compresses the rubber ring to complete the isolation and sealing function.
PCT/CN2013/071355 2012-11-08 2013-02-05 Technological process for continuously sintering rare earth permanently magnetic alloy and sintering equipment therefor WO2014071708A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201210445601.4A CN103805835B (en) 2012-11-08 2012-11-08 RE permanent magnetic alloy stoking processing method
CN201210445601.4 2012-11-08

Publications (1)

Publication Number Publication Date
WO2014071708A1 true WO2014071708A1 (en) 2014-05-15

Family

ID=50683995

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2013/071355 WO2014071708A1 (en) 2012-11-08 2013-02-05 Technological process for continuously sintering rare earth permanently magnetic alloy and sintering equipment therefor

Country Status (2)

Country Link
CN (1) CN103805835B (en)
WO (1) WO2014071708A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018149814A1 (en) * 2017-02-15 2018-08-23 Gkn Sinter Metals Engineering Gmbh Cooling module of a continuous sintering furnace

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107321977B (en) * 2016-04-29 2022-12-23 沈阳中北通磁科技股份有限公司 Rare earth permanent magnet vacuum sintering method and vacuum sintering heat treatment equipment
CN108376607A (en) * 2017-12-31 2018-08-07 江西荧光磁业有限公司 A kind of preparation method reducing heavy rare earth sintered NdFeB

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113240A (en) * 1976-01-16 1978-09-12 P. R. Mallory & Co. Inc. Continuous open-ended sintering furnace system
JP2007177285A (en) * 2005-12-28 2007-07-12 Chugai Ro Co Ltd Continuous sintering furnace
CN201327292Y (en) * 2008-09-12 2009-10-14 秦文隆 Continuous-type vacuum-atmosphere sintering furnace

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102568732B (en) * 2012-02-22 2015-08-12 沈阳中北通磁科技股份有限公司 A kind of Nd-Fe-Bo permanent magnet material of sandwich construction and processing technology thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4113240A (en) * 1976-01-16 1978-09-12 P. R. Mallory & Co. Inc. Continuous open-ended sintering furnace system
JP2007177285A (en) * 2005-12-28 2007-07-12 Chugai Ro Co Ltd Continuous sintering furnace
CN201327292Y (en) * 2008-09-12 2009-10-14 秦文隆 Continuous-type vacuum-atmosphere sintering furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018149814A1 (en) * 2017-02-15 2018-08-23 Gkn Sinter Metals Engineering Gmbh Cooling module of a continuous sintering furnace

Also Published As

Publication number Publication date
CN103805835A (en) 2014-05-21
CN103805835B (en) 2015-11-25

Similar Documents

Publication Publication Date Title
CN103801688B (en) RE permanent magnetic alloy continuous sintering plant
WO2014071709A1 (en) Technological process for flexible sintering of rare earth permanently magnetic alloy and apparatus therefor
US20140127072A1 (en) Continuous sintering method for rare earth permanent magnetic alloy and equipment therefor
CN103805825B (en) RE permanent magnetic alloy vacuum induction melting rapid hardening equipment
CN202943253U (en) Rare-earth permanent magnet alloy hydrogen breaking continuous production equipment
CN205957664U (en) Full -automatic continuous type vacuum drying system
CN109097540A (en) A kind of parallel vacuum Equipment for Heating Processing and vacuum heat-treating method
WO2020108409A1 (en) Externally heated vacuum continuous sintering furnace
CN202945304U (en) Vacuum-induction smelting and rapid hardening equipment for rare-earth permanent-magnet alloy
CN103801692B (en) RE permanent magnetic alloy flexible sintered equipment
CN202943251U (en) Rare-earth permanent magnet alloy continuous sintering equipment
CN107321977B (en) Rare earth permanent magnet vacuum sintering method and vacuum sintering heat treatment equipment
CN107326155A (en) A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment
CN107902877A (en) A kind of 3D bend glass hot-bending machines using vacuum displacement technology
WO2014071708A1 (en) Technological process for continuously sintering rare earth permanently magnetic alloy and sintering equipment therefor
CN202943252U (en) Rare-earth permanent magnet alloy flexible sintering equipment
JP4451632B2 (en) Hydrogen crusher for rare earth magnet materials
US20140348690A1 (en) Method for flexibly sintering rare earth permanent magnetic alloy and sintering equipment thereof
CN103801701B (en) The flexible hydrogen of RE permanent magnetic alloy breaks equipment
CN110468262A (en) Segmented continuous heat treating furnace and material heat treatment process
CN112038084B (en) Sintering process for magnet production
CN202943254U (en) Rare-earth permanent magnet alloy flexible hydrogen breaking equipment
CN113587635A (en) Continuous vacuum sintering furnace
CN111397360A (en) Three-section type vacuum sintering device
CN109158608B (en) Vacuum hydrogen crushing production line and hydrogen crushing method

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13853902

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13853902

Country of ref document: EP

Kind code of ref document: A1