CN107326155A - A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment - Google Patents
A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment Download PDFInfo
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- CN107326155A CN107326155A CN201610275465.7A CN201610275465A CN107326155A CN 107326155 A CN107326155 A CN 107326155A CN 201610275465 A CN201610275465 A CN 201610275465A CN 107326155 A CN107326155 A CN 107326155A
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
- B22F3/1007—Atmosphere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
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Abstract
The present invention provides a kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment, and the equipment is provided with vacuum furnace body, vacuum heat-insulation room, heater, vacuum gas cooling system；Heat-insulated gear air valve is provided with two sides of vacuum heat-insulation room, vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, and the air inlet of heat exchanger is communicated by the adapter on vacuum furnace body one side with the cooled gas path of vacuum heat-insulation room the same side；The exhaust outlet of vacuum blower is communicated by the adapter on vacuum furnace body another side with the cooled gas path of vacuum heat-insulation room opposite side.The vacuum-sintering heat treatment method includes：Rare earth permanent magnet blank is put into vacuum heat treatment equipment, heated after vacuumizing；Argon gas is filled with cooling, the heat-insulated gear air valve of vacuum heat-insulation room both sides is opened, alternately starts two cooling blowers, be then either alternatively or simultaneously opened and closed the heat-insulated gear air valve of both sides.
Description
Technical field
The present invention relates to a kind of rare earth permanent magnet vacuum-sintering heat treatment method and its vacuum heat treatment equipment used, belong to rare earth permanent magnet manufacturing technology field.The vacuum heat treatment equipment is in addition to for rare earth permanent-magnetic material sintering or timeliness, it may also be used for vacuum-sintering, heat treatment, soldering of other metal materials etc..
Background technology
Nd-Fe-B rare earth permanent magnetic material is the new rare-earth permanent magnetic material found nineteen eighty-three, more and more applied with the magnetic property that its is excellent, it is widely used in the Magnetic resonance imaging of medical treatment, computer hard disc driver, the vibrating motor of mobile phone, electroacoustic apparatus, motor of hybrid power automobile, wind-driven generator etc..
It is widely used in three-zone heating before, during and after neodymium iron boron vacuum-sintering is used along along uniform temperature zone length direction more with the vacuum drying oven of heat treatment in the arrangement of heater at home at present.Using the vacuum heat treatment equipment of this heater arrangement; when heating under vacuum; in-furnace temperature uniformity is fine; but when process gas or protective atmosphere are filled with the need for according to Technology for Heating Processing into vacuum drying oven; because gas can produce convection current; the gas of heat is flowed up, and can raise the temperature of stove internal upper part, the temperature homogeneity in uniform temperature zone is deteriorated.
On the other hand, for using for gas-cooled vacuum heat treatment equipment, cooling uniformity is the key for determining heat treated article quality.It is general to use airduct array gas cooling mode in existing ventilation type vacuum heat treatment equipment, it is difficult to ensure that the cooling uniformity of workpiece in technical process, it is difficult to meet the process requirements of high-quality heat treated article.
The content of the invention
The present invention provides a kind of rare earth permanent magnet vacuum heat treatment equipment, mainly includes：Vacuum fire door, vacuum furnace body, vacuum heat-insulation room, vacuum heat-insulation door, the bonnet with thermal insulation layer, heater, vacuum gas cooling system and vacuum pump set；Observation window is provided with described vacuum fire door；Vacuum furnace body is horizontal Double water-cooled wall construction, and front end is provided with forward flange, and rear end is welded with end socket；Vacuum fire door is in contact with the forward flange of vacuum furnace body；The described bonnet with thermal insulation layer, vacuum heat-insulation room and vacuum heat-insulation door is arranged in the airtight vacuum container that described vacuum furnace body and vacuum fire door are constituted；Vacuum heat-insulation room is horizontal box structure, and front end is contacted with vacuum heat-insulation door, and rear end is connected with the bonnet with thermal insulation layer；Vacuum heat-insulation room is provided with framework and heat-insulation layer；Heat-insulation layer is arranged on the inner side of framework；The heat-insulated gear air valve of more than 1 is respectively arranged with two sides of vacuum heat-insulation room, cooled gas path is respectively arranged with two sides of framework, described heat-insulated gear air valve is enclosed in cooled gas path；In a preferred embodiment, described heat-insulated gear air valve is respectively arranged with 2 on each side of vacuum heat-insulation room；Described heater is arranged on the inwall of vacuum heat-insulation room；Described vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, and the air inlet of heat exchanger is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side；The exhaust outlet of vacuum blower is connected with the adapter on vacuum furnace body another side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room opposite side；Described vacuum pump set is connected by vacuumizing interface with vacuum furnace body.
The gear ring for the hinge of vacuum stove door switch and for vacuum drying oven door locking is additionally provided with described vacuum fire door, sealing ring is additionally provided between the forward flange of described vacuum fire door and vacuum furnace body；Vacuum heat-insulation door is connected with vacuum fire door, is switched together with vacuum fire door.
Described vacuum gas cooling system is additionally provided with another vacuum blower between the adapter on the air inlet and vacuum furnace body one side of heat exchanger, the exhaust outlet of another vacuum blower is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side.
The gear ring for the hinge of vacuum stove door switch and for vacuum drying oven door locking is additionally provided with described vacuum fire door, the cylinder of driven gear ring rotation is provided between gear ring and vacuum furnace body, the cylinder for driving vacuum fire door to rotate is also equipped between vacuum fire door and vacuum furnace body, sealing ring is additionally provided between the forward flange of described vacuum fire door and vacuum furnace body；Vacuum heat-insulation door is connected with vacuum fire door, is switched together with vacuum fire door.
Temperature thermocouple is additionally provided with described vacuum furnace body and heater power source introduces electrode, described temperature thermocouple there are more than 3；Described heater power source introduces in electrode and is connected with cooling water.
Described vacuum heat-insulation room is horizontal symmetrical octagon casing, and upper and lower and two sides the length of side is more than the length of side of 4 hypotenuses；Gusset is welded with the outside of the framework of vacuum heat-insulation room, the height of gusset is less than 200mm.
It is provided with the inside of the framework of described vacuum heat-insulation room on the inside of heat-insulation layer, heat-insulation layer and is provided with molybdenum sheet, framework, heat-insulation layer and molybdenum sheet is linked together by molybdenum rod；The material of described heat-insulation layer be ceramic fibre and carbon fiber more than one.
Heat-insulation layer is provided with the inside of the framework of described vacuum heat-insulation room；The material of described heat-insulation layer is hard carbon felt.
Described heater is made up of preceding heater, post-heater, upper heater, lower heater and 2 side heaters, preceding heater and post-heater are all loop configuration, the front-end and back-end of vacuum heat-insulation room are separately positioned on, upper heater, lower heater and 2 side heaters are separately positioned on the upside, downside and two sides of vacuum heat-insulation room；Described heater material is molybdenum or graphite.
Inner side, which is provided with below siege, siege, below described vacuum heat-insulation room is connected with column, and column is supported on the inwall of vacuum furnace body through heat-insulation layer；The top of siege is uniform temperature zone, and uniform temperature zone is located in the space that upper heater, lower heater and 2 side heaters are constituted；The workpiece for being sintered or being heat-treated is placed on siege, is placed in uniform temperature zone；The width of described uniform temperature zone is in the range of 400-1200mm, highly in the range of 400-1200mm, and length is in the range of 800-3500mm；The maximum temperature of described uniform temperature zone is in the range of 500-1400 DEG C.
Described vacuum pump set includes oily diffusion vacuum pump, Roots vaccum pump and oil-sealed rotary pump；Final vacuum is higher than 5 × 10-1Pa。
A kind of rare earth permanent magnet vacuum-sintering heat treatment method, it is characterised in that：Described rare earth permanent magnet vacuum-sintering heat treatment method is first turned on the vacuum fire door of rare earth permanent magnet vacuum heat treatment equipment, and rare earth permanent magnet blank is sent on the siege in vacuum heat-insulation room, closes vacuum drying oven and is evacuated to vacuum 5 × 10 behind the door-1More than Pa, continue to vacuumize and begin to warm up, heat time 1-30 hour, maximum heating temperature is in the range of 450-1100 DEG C, stop heating afterwards, close vacuum-pumping valve, be filled with argon gas, open the heat-insulated gear air valve of vacuum heat-insulation room both sides respectively after gas pressure is more than 4000KPa and alternately start two cooling blowers, the heat-insulated gear air valve of both sides is either alternatively or simultaneously opened or closed afterwards；Stop cooling blower afterwards.
Further, described heat time 1-30 hour, maximum heating temperature is in the range of 450-1100 DEG C, first by blank heating is to 400-600 DEG C and is incubated in 1-9 hours, then blank is heated to 800-900 DEG C from 400-600 DEG C in 1-9 hours and be incubated, then blank is heated to 1010-1090 DEG C from 800-900 DEG C in 1-5 hours and be incubated, then heating is stopped, the heat-insulated gear air valve for starting cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides is filled with, two cooling blower alternation switches of 3-15 minutes are once afterwards.
In another embodiment, described heat time 1-30 hour, maximum heating temperature is in the range of 450-1100 DEG C, first by blank heating is to 1010-1090 DEG C and is incubated in 1-19 hours；Then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating is to 800-950 DEG C and is incubated；Then heating is stopped, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, two cooling blower alternation switches of 3-15 minutes are once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 400 DEG C, then continue to heat after vacuumizing, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, two cooling blower alternation switches of 3-15 minutes are once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 100 DEG C.
In another embodiment, described heat time 1-30 hour, maximum heating temperature is then interior at 1-20 hour that blank is heated into 1010-1090 DEG C from 300-600 DEG C and is incubated by blank heating is to 300-600 DEG C and is incubated first in 1-9 hours in the range of 450-1100 DEG C；Then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating is to 800-950 DEG C and is incubated；Then heating is stopped, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, two cooling blower alternation switches of 3-15 minutes are once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 400 DEG C, then continue to heat after vacuumizing, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, two cooling blower alternation switches of 3-15 minutes are once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 100 DEG C.
In another preferred embodiment, described heat time 1-30 hour, maximum heating temperature is in the range of 450-1100 DEG C, first by blank heating is to 800-950 DEG C and is incubated in 1-20 hours；Then heating is stopped, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, two cooling blower alternation switches of 3-15 minutes are once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 400 DEG C, then continue to heat after vacuumizing, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, two cooling blower alternation switches of 3-15 minutes are once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 100 DEG C.
Beneficial effects of the present invention：
1. the heater point area of upper, middle and lower three arrangement, the two ends of uniform temperature zone are respectively arranged with independent heater, make vacuum heat treatment furnace heating-up temperature in the case of loading uniform, overcome existing equipment load after, the shortcoming that especially temperature homogeneity declines after inflation.
2nd, by setting multiple heat-insulated gear air valves respectively on two side walls of vacuum heat-insulation room, multiple heat-insulated gear air valve alternation switches allow gas to produce uniform vortex cyclone in uniform temperature zone, realize the uniform cooling to workpiece, overcome the shortcoming of existing equipment；In heating, heat-insulated gear air valve is closed, homogeneous heating, the few efficiency high of leakage heat, energy-conservation；Heat-insulated gear air valve alternation switch reduces windage during cooling, improves cooling effectiveness and cooling velocity.
3rd, two fans realize the positive and negative flowing of air-flow, solve the cooling uniformity in width of the workpiece direction.
Brief description of the drawings
Fig. 1 is a kind of schematic front view of embodiment of middle rare earth permanent magnet vacuum Equipment for Heating Processing of the present invention.
Fig. 2 is a kind of schematic top plan view of embodiment of middle rare earth permanent magnet vacuum Equipment for Heating Processing of the present invention.
Embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
As depicted in figs. 1 and 2, a kind of rare earth permanent magnet vacuum heat treatment equipment of the invention, mainly includes：Vacuum fire door 1, vacuum furnace body 2, vacuum heat-insulation room 3, vacuum heat-insulation door 16, the bonnet 27 with thermal insulation layer, heater, vacuum gas cooling system 21 and vacuum pump set 7；Observation window 15 is provided with vacuum fire door 1；Vacuum furnace body 2 is horizontal Double water-cooled wall construction, and front end is provided with forward flange 19, and rear end is welded with end socket 28；Vacuum fire door 1 is in contact with the forward flange 19 of vacuum furnace body 2；Bonnet 27, vacuum heat-insulation room 3 with thermal insulation layer and vacuum heat-insulation door 16 are arranged in the airtight vacuum container that vacuum furnace body 2 and vacuum fire door 1 are constituted；Vacuum heat-insulation room 3 is horizontal box structure, and front end is contacted with vacuum heat-insulation door 16, and rear end is connected with the bonnet 27 with thermal insulation layer；Vacuum heat-insulation room 16 is provided with framework 4 and heat-insulation layer 5；Heat-insulation layer 5 is arranged on the inner side of framework 4；The heat-insulated gear air valve 11 of more than 1 is respectively arranged with two sides of vacuum heat-insulation room 3, cooled gas path 29,6 is respectively arranged with two sides of framework 4, heat-insulated gear air valve 11 is enclosed in cooled gas path 29,6.The present invention it is a kind of preferred embodiment in, it is heat-insulated gear air valve 11 be respectively arranged with 2 on each side of vacuum heat-insulation room 3.Vacuum gas cooling system 21 is provided with heat exchanger 22 and vacuum blower 23；The gas outlet of heat exchanger 22 is connected with the air entry of vacuum blower 23, and the air inlet of heat exchanger 22 is connected with the adapter 31 on the one side of vacuum furnace body 2, and adapter 31 is communicated through vacuum furnace body 2 with the cooled gas path 29 of the same side of vacuum heat-insulation room 3；The exhaust outlet of vacuum blower 23 is connected with the adapter 32 on the another side of vacuum furnace body 2, and adapter 32 is communicated through vacuum furnace body 2 with the cooled gas path 6 of the opposite side of vacuum heat-insulation room 3；Vacuum pump set 7 is connected by vacuumizing interface with vacuum furnace body 2；Heater is arranged on the inwall of vacuum heat-insulation room 3.In one embodiment of the invention, described heater is made up of preceding heater 24, post-heater 26, upper heater 10, lower heater 14 and 2 side heaters 25, preceding heater 24 and post-heater 26 are all loop configuration, the front-end and back-end of vacuum heat-insulation room 3 are separately positioned on, upper heater 10, lower heater 14 and 2 side heaters 25 are separately positioned on the upside, downside and two sides of vacuum heat-insulation room 3.The gear ring 18 for the hinge 17 of the switch of vacuum fire door 1 and for vacuum drying oven door locking is additionally provided with vacuum fire door 1, sealing ring 20 is additionally provided between vacuum fire door 1 and the forward flange of vacuum furnace body 19；Vacuum heat-insulation door 16 is connected with vacuum fire door 1, is switched together with vacuum fire door 1.The cylinder of the rotation of driven gear ring 18 is provided between gear ring 18 and vacuum furnace body 2, the cylinder for driving vacuum fire door 1 to rotate is also equipped between vacuum fire door 1 and vacuum furnace body 2.Temperature thermocouple 9 is additionally provided with vacuum furnace body 2 and heater power source introduces electrode 8, described temperature thermocouple 9 there are more than 3；Heater power source introduces in electrode 8 and is connected with cooling water.Inner side, which is provided with below siege 12, siege 12, below vacuum heat-insulation room 3 is connected with column 13, and column 13 is supported on the inwall of vacuum furnace body 2 through heat-insulation layer 5；The top of siege 12 is uniform temperature zone, and uniform temperature zone is located in the space that upper heater 10, lower heater 14 and 2 side heaters 25 are constituted；The workpiece for being sintered or being heat-treated is placed on siege 12, is placed in uniform temperature zone.
In another embodiment of the invention, vacuum gas cooling system 21 is additionally provided with another vacuum blower 30 between the adapter 31 on the air inlet and the one side of vacuum furnace body 2 of heat exchanger 22, the exhaust outlet of another vacuum blower 30 is connected with the adapter 31 on the one side of vacuum furnace body 2, and adapter 31 is communicated through vacuum furnace body 2 with the cooled gas path 29 of the same side of vacuum heat-insulation room 3.
Embodiment 1
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, shaping is carried out to alloy powder using press rare earth permanent magnet blank is made, then rare earth permanent magnet blank is sent in vacuum heat treatment furnace of the present invention, carries out following vacuum-sintering process：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, insulation 2 hours, then with 3 hours by blank heating to 850 DEG C, insulation 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, insulation 2.5 hours, then heating is stopped, argon gas is filled with, when furnace pressure is more than 4000Pa, starts a vacuum blower and alternately opens the heat-insulated gear air valve of vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches once, stop cooling down until temperature is cooled into 100 DEG C with ShiShimonoseki vacuum blower.
After the completion of sintering, sintering briquette is taken out from vacuum heat treatment furnace, common vacuum heat treatment furnace is put into（The areas of Zhong Hou tri- before heater, wind pipe type is air-cooled）Middle 900 DEG C of progress insulation 2 hours and 500 DEG C insulation vacuum aging processing in 3 hours, carries out the air-cooled step of applying argon gas after terminating after 900 DEG C of insulations terminate with 500 DEG C of insulations, Nd-Fe-B rare earth permanent magnetic material P1 is made respectively.
Embodiment 2
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, shaping is carried out to alloy powder using press rare earth permanent magnet blank is made, then rare earth permanent magnet blank is sent in vacuum heat treatment furnace of the present invention, the following vacuum-sintering of progress and heat treatment step：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, insulation 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, insulation 5 hours, then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating to 900 DEG C, insulation 2 hours, then heating is stopped, it is filled with argon gas, when furnace pressure is more than 4000Pa, start a vacuum blower and alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, vacuum blower is closed when temperature is cooled into 300 DEG C and stops cooling, then continue to heat after vacuumizing, by blank heating to 500 DEG C, insulation 3 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a vacuum blower after argon gas and alternately opening vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, stop cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C, Nd-Fe-B rare earth permanent magnetic material P2 is made.
Embodiment 3
Prepare permanent-magnet rare-earth NdFeB alloy first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, and carrying out shaping to alloy powder using press is made rare earth permanent magnet blank, is then sent to rare earth permanent magnet blank and is put into common vacuum sintering furnace（The areas of Zhong Hou tri- before heater, wind pipe type is air-cooled）In, carry out following vacuum-sintering process：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, be incubated 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, be incubated 5 hours, it is air-cooled to be filled with argon gas, stop cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C.
Then sintering briquette is taken out to be put into the vacuum heat treatment furnace of the present invention and carries out vacuum aging processing：By blank heating to 900 DEG C, insulation 2 hours, then heating is stopped, it is filled with argon gas, when furnace pressure is more than 4000Pa, start a vacuum blower and alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, vacuum blower is closed when temperature is cooled into 300 DEG C and stops cooling, then continue to heat after vacuumizing, by blank heating to 500 DEG C, insulation 3 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a vacuum blower after argon gas and alternately opening vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, stop cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C, Nd-Fe-B rare earth permanent magnetic material P3 is made.
Comparative example：
Prepare permanent-magnet rare-earth NdFeB alloy first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, and carrying out shaping to alloy powder using press is made rare earth permanent magnet blank, is then sent to rare earth permanent magnet blank and is put into common vacuum sintering furnace（The areas of Zhong Hou tri- before heater, wind pipe type is air-cooled）In, carry out following vacuum-sintering process：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, insulation 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, be incubated 5 hours, then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating to 900 DEG C, 2 hours are incubated, then stops heating, it is filled with argon gas air-cooled, stops cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C.
Then by sintering briquette take out be put into common vacuum heat treatment furnace carry out be heated to 500 DEG C be incubated 3 hours, then applying argon gas it is air-cooled vacuum aging processing, Nd-Fe-B rare earth permanent magnetic material C1 is made.
After testing, under the premise of alloying component identical, coercivity 940Oe and 560Oe higher than C1 respectively are grasped in P2, P3, maximum magnetic energy product 2MGOe and 0.8MGOe higher than C1 respectively, coercivity 300Oe higher than C1 is grasped in P1, maximum magnetic energy product 1.2MGOe higher than C1, and the P2 of completion vacuum-sintering and vacuum aging processing consistency of performance will be significantly better than C1, P1 and P3 in vacuum heat treatment equipment of the present invention.
Claims (15)
1. a kind of vacuum heat treatment equipment, including：Vacuum fire door, vacuum furnace body, vacuum heat-insulation room, vacuum heat-insulation door, the bonnet with thermal insulation layer, heater, vacuum gas cooling system and vacuum pump set；Observation window is provided with described vacuum fire door；Vacuum furnace body is horizontal Double water-cooled wall construction, and front end is provided with forward flange, and rear end is welded with end socket；Vacuum fire door is in contact with the forward flange of vacuum furnace body；The described bonnet with thermal insulation layer, vacuum heat-insulation room and vacuum heat-insulation door is arranged in the airtight vacuum container that described vacuum furnace body and vacuum fire door are constituted；Vacuum heat-insulation room is horizontal box structure, and front end is contacted with vacuum heat-insulation door, and rear end is connected with the bonnet with thermal insulation layer；Vacuum heat-insulation room is provided with framework and heat-insulation layer；Heat-insulation layer is arranged on the inner side of framework；The heat-insulated gear air valve of more than 1 is respectively arranged with two sides of vacuum heat-insulation room, cooled gas path is respectively arranged with two sides of framework, described heat-insulated gear air valve is enclosed in cooled gas path；Described heater is arranged on the inwall of vacuum heat-insulation room；Described vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, and the air inlet of heat exchanger is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side；The exhaust outlet of vacuum blower is connected with the adapter on vacuum furnace body another side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room opposite side；Described vacuum pump set is connected by vacuumizing interface with vacuum furnace body.
2. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：The gear ring for the hinge of vacuum stove door switch and for vacuum drying oven door locking is additionally provided with described vacuum fire door, sealing ring is additionally provided between the forward flange of described vacuum fire door and vacuum furnace body；Vacuum heat-insulation door is connected with vacuum fire door, is switched together with vacuum fire door.
3. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：Described heat-insulated gear air valve is respectively arranged with 2 on each side of vacuum heat-insulation room.
4. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：Described vacuum gas cooling system is additionally provided with another vacuum blower between the adapter on the air inlet and vacuum furnace body one side of heat exchanger, the exhaust outlet of another vacuum blower is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side.
5. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：Temperature thermocouple is additionally provided with described vacuum furnace body and heater power source introduces electrode, described temperature thermocouple there are more than 3；Described heater power source introduces in electrode and is connected with cooling water.
6. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：Described vacuum heat-insulation room is horizontal symmetrical octagon casing, and upper and lower and two sides the length of side is more than the length of side of 4 hypotenuses；Gusset is welded with the outside of the framework of vacuum heat-insulation room, the height of gusset is less than 200mm.
7. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：It is provided with the inside of the framework of described vacuum heat-insulation room on the inside of heat-insulation layer, heat-insulation layer and is provided with molybdenum sheet, framework, heat-insulation layer and molybdenum sheet is linked together by molybdenum rod；The material of described heat-insulation layer be ceramic fibre and carbon fiber more than one.
8. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：Heat-insulation layer is provided with the inside of the framework of described vacuum heat-insulation room；The material of described heat-insulation layer is hard carbon felt.
9. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：Described heater is made up of preceding heater, post-heater, upper heater, lower heater and 2 side heaters, preceding heater and post-heater are all loop configuration, the front-end and back-end of vacuum heat-insulation room are separately positioned on, upper heater, lower heater and 2 side heaters are separately positioned on the upside, downside and two sides of vacuum heat-insulation room；Described heater material is molybdenum or graphite.
10. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that：Inner side, which is provided with below siege, siege, below described vacuum heat-insulation room is connected with column；The top of siege is uniform temperature zone, and uniform temperature zone is located in the space that upper heater, lower heater and 2 side heaters are constituted；The workpiece for being sintered or being heat-treated is placed on siege, is placed in uniform temperature zone；The width of described uniform temperature zone is in the range of 400-1200mm, highly in the range of 400-1200mm, and length is in the range of 800-3500mm；The maximum temperature of described uniform temperature zone is in the range of 500-1400 DEG C.
11. a kind of rare earth permanent magnet vacuum-sintering heat treatment method, comprises the following steps：
Heating process：Open on the vacuum fire door of rare earth permanent magnet vacuum heat treatment equipment, the siege that rare earth permanent magnet blank is sent to vacuum heat-insulation room, close vacuum drying oven and be evacuated to vacuum 5 × 10 behind the door-1More than Pa, continues to vacuumize and begins to warm up, heat time 1-30 hour, and then maximum heating temperature stops heating in the range of 450-1100 DEG C；
Refrigerating work procedure：Argon gas is filled with, when gas pressure is more than 4000Pa, the heat-insulated gear air valve of vacuum heat-insulation room both sides is opened respectively, alternately starts two cooling blowers, the heat-insulated gear air valve of both sides is then either alternatively or simultaneously opened and closed.
12. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 11, it is characterised in that：In described heating process, first by blank heating is to 400-600 DEG C and is incubated in 1-9 hours, then blank is heated to 800-900 DEG C from 400-600 DEG C in 1-9 hours and be incubated, then blank is heated to 1010-1090 DEG C from 800-900 DEG C in 1-5 hours and be incubated, then stop heating；In described refrigerating work procedure, it is filled with after argon gas and first starts a cooling blower, alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, then per two cooling blower alternation switches of 3-15 minutes once.
13. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 11, it is characterised in that：In described heating process, first by blank heating is to 1010-1090 DEG C and is incubated in 1-19 hours；Then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating is to 800-950 DEG C and is incubated, then stop heating；In described refrigerating work procedure, it is filled with after argon gas and first starts a cooling blower, the heat-insulated gear air valve of vacuum heat-insulation room both sides is alternately opened, per two cooling blower alternation switches of 3-15 minutes once afterwards, cooling is stopped until temperature to be cooled to pass cooling blower after less than 400 DEG C；
Then heated after vacuumizing again, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with after argon gas and first starts a cooling blower, alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, per two cooling blower alternation switches of 3-15 minutes once afterwards, until temperature being cooled to after less than 100 DEG C close cooling blower stopping cooling.
14. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 11, it is characterised in that：In described heating process, first by blank heating is to 300-600 DEG C and is incubated in 1-9 hours, then blank is heated to 1010-1090 DEG C from 300-600 DEG C in 1-20 hours and be incubated, then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating is to 800-950 DEG C and is incubated, then stop heating；In described refrigerating work procedure, it is filled with after argon gas and first starts a cooling blower, the heat-insulated gear air valve of vacuum heat-insulation room both sides is alternately opened, per two cooling blower alternation switches of 3-15 minutes once afterwards, stops cooling down with ShiShimonoseki cooling blower until temperature is cooled into 400 DEG C；
Then heated after vacuumizing again, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with after argon gas and first starts a cooling blower, alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, per two cooling blower alternation switches of 3-15 minutes once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 100 DEG C.
15. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 11, it is characterised in that：In described heating process, by blank heating is to 800-950 DEG C and is incubated first in 1-20 hours, then stop heating；In described refrigerating work procedure, it is filled with after argon gas and first starts a cooling blower, the heat-insulated gear air valve of vacuum heat-insulation room both sides is alternately opened, per two cooling blower alternation switches of 3-15 minutes once afterwards, stops cooling down with ShiShimonoseki cooling blower until temperature is cooled into 400 DEG C；
Then heated after vacuumizing again, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with after argon gas and first starts a cooling blower, alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, per two cooling blower alternation switches of 3-15 minutes once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 100 DEG C.
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| CN109097540A (en) * | 2018-07-23 | 2018-12-28 | 沈阳中北真空技术有限公司 | A kind of parallel vacuum Equipment for Heating Processing and vacuum heat-treating method |
| CN109273230A (en) * | 2018-07-23 | 2019-01-25 | 沈阳中北真空技术有限公司 | A kind of intelligence rare earth permanent magnet sintered production line and sintering method |
| CN110094967A (en) * | 2019-05-07 | 2019-08-06 | 株洲瑞德尔冶金设备制造有限公司 | A kind of vacuum drying oven using dry type screw pump |
| CN111471953A (en) * | 2020-05-20 | 2020-07-31 | 威势特(上海)技术服务有限公司 | Crystallizer copper plate thermal treatment equipment after thermal spraying coating |
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