JPH11257869A - Heat treatment furnace - Google Patents

Heat treatment furnace

Info

Publication number
JPH11257869A
JPH11257869A JP10082934A JP8293498A JPH11257869A JP H11257869 A JPH11257869 A JP H11257869A JP 10082934 A JP10082934 A JP 10082934A JP 8293498 A JP8293498 A JP 8293498A JP H11257869 A JPH11257869 A JP H11257869A
Authority
JP
Japan
Prior art keywords
vacuum chamber
heat
treatment furnace
heat treatment
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10082934A
Other languages
Japanese (ja)
Other versions
JP3903448B2 (en
Inventor
Katsumi Matsumoto
克巳 松本
Tetsuo Hiratsuka
哲夫 平塚
Takahiro Fujita
貴弘 藤田
Hideki Yamaguchi
秀樹 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Holdings Co Ltd
Original Assignee
Dowa Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Mining Co Ltd filed Critical Dowa Mining Co Ltd
Priority to JP08293498A priority Critical patent/JP3903448B2/en
Publication of JPH11257869A publication Critical patent/JPH11257869A/en
Application granted granted Critical
Publication of JP3903448B2 publication Critical patent/JP3903448B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To prevent an unacceptable article from being produced by eliminating the scattering of temperature in a heat treatment furnace, especially around a powder molded body and making uniform the degreasing and sintering at each part of the power molded body. SOLUTION: A retort box 26 that is surrounded by a heater 22 and heat- insulating materials 10, 15, and 23 and further accommodates a power molded body where a sweep gas supply part 24 is connected is provided in a vacuum chamber 1 with double wall structure and a cooling water channel 5. Preferably, shutters 13 and 18 are provided at the end part heat-insulating materials 10 and 15 for surrounding the retort box 26, respectively, on the other hand shutters 13 and 18 are provided at the rear of the shutter 18, a high melting-point conductor is included between a heater electrode that is supported through the heat- insulating materials 10, 15, and 23 and a watercool power supply electrode that is supported through the vacuum chamber 1, and also a sheet whose main constituent is graphite is applied to the inner-periphery surface of the heat- insulating materials 10, 15, and 23.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、金属、セラミック
ス等の粉末成形体(以下単に「グリ−ンボデイ」と言
う。)から熱可塑性樹脂、成形助剤等のバインダ−を除
去し(以下単に「脱脂」と言う。)、焼結部品を製造す
る際に使用する熱処理炉に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for removing a binder such as a thermoplastic resin and a molding aid (hereinafter simply referred to as "green body") from a powder compact (hereinafter simply referred to as "green body") of metal, ceramics or the like. The present invention relates to a heat treatment furnace used for producing a sintered part.

【0002】[0002]

【従来の技術】従来、複雑形状の機械部品等を製造する
一つの方法として、金属、セラミックス等の粉末に熱可
塑性樹脂、成形助剤等からなるバインダ−を添加混合
し、所定形状に成形した、いわゆる、グリ−ンボデイを
真空中、さらに雰囲気中で加熱し、前記グリ−ンボデイ
に含有されている前記バインダ−を除去して焼結部品を
製造する方法が提供されている。
2. Description of the Related Art Conventionally, as one method of manufacturing a mechanical part having a complicated shape, a binder made of a thermoplastic resin, a molding aid and the like is added to a powder of metal, ceramics, etc. and mixed to form a predetermined shape. That is, there is provided a method of manufacturing a sintered component by heating a so-called green body in a vacuum and further in an atmosphere to remove the binder contained in the green body.

【0003】[0003]

【発明が解決しようとする課題】前記焼結部品の製造に
おいて、真空炉内、特にグリ−ンボデイ周囲の温度にバ
ラツキが生じると、グリ−ンボデイ各部における脱脂さ
らに焼結が均等に行われず、不良品を発生させるもので
あった。
In the manufacture of the above sintered parts, if the temperature inside the vacuum furnace, especially around the green body, varies, the degreasing and sintering at each part of the green body are not performed uniformly, resulting in an unsatisfactory result. A good product was generated.

【0004】本発明は、前記事情に鑑み為されたもの
で、グリ−ンボデイの脱脂及び焼結時におけるグリ−ン
ボデイ周囲の温度の均一化を図り、不良品の発生を防止
すると共に、スイ−プガスの供給効率を改善し、焼結後
の冷却を迅速にし、かつ炉寿命の長期化を図り、品質の
優れた安価な焼結品を提供することができる熱処理炉を
提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and aims at equalizing the temperature around the green body during degreasing and sintering of the green body, preventing the occurrence of defective products, and preventing the occurrence of a switch. The purpose of the present invention is to provide a heat treatment furnace capable of improving the gas supply efficiency, rapidly cooling after sintering, prolonging the life of the furnace, and providing high-quality and inexpensive sintered products. I do.

【0005】[0005]

【課題を解決するための手段】本発明は、前記目的を達
成するため、請求項1の発明は、二重壁構造で冷却水路
を有する真空チャンバ−内にヒ−タ−及び断熱材で囲ま
れ、さらにスイ−プガス供給部を連結したグリ−ンボデ
イを収容するレトルトボックスを設けたものである。
According to the present invention, in order to achieve the above object, the present invention is directed to a vacuum chamber having a double-walled structure having a cooling water passage surrounded by a heater and a heat insulating material. And a retort box for accommodating a green body connected to a sweep gas supply unit.

【0006】この構成によれば、レトルトボックス周囲
がヒ−タ−により加熱され、その内部の温度が均一化さ
れ、該内部に収容されたグリ−ンボデイの加熱及び脱脂
が均一に行われ、さらにスイ−プガスの供給も効率よく
行われる。
[0006] According to this configuration, the periphery of the retort box is heated by the heater, the temperature inside the retort box is made uniform, and the heating and degreasing of the green body contained in the inside are performed uniformly. The supply of the sweep gas is also performed efficiently.

【0007】請求項2の発明は、前記レトルトボックス
を囲む両端部断熱材にそれぞれシャッタ−が設けられ、
一方シャッタ−の後方に前記レトルトボックスに向けら
れた冷却ファンを設けたものである。
According to a second aspect of the present invention, both ends of the heat insulating material surrounding the retort box are provided with shutters, respectively.
On the other hand, a cooling fan directed to the retort box is provided behind the shutter.

【0008】この構成によれば、両シャッタ−を開放
し、冷却ファンを駆動させることにより前記冷却水路を
有する真空チャンバ−と前記断熱材間及び該断熱材内部
のレトルトボックス部に冷却用ガスを循環させて焼結完
了後の冷却を迅速に行うことができる。
According to this configuration, the two shutters are opened and the cooling fan is driven to drive the cooling gas between the vacuum chamber having the cooling water passage and the heat insulating material and into the retort box portion inside the heat insulating material. It is possible to quickly circulate and cool after completion of sintering.

【0009】請求項3の発明は、前記断熱材を貫通して
設けられたヒ−タ電極と前記真空チャンバ−を貫通して
設けられた水冷電源電極間に高融点導電材を介在させた
ものである。この構成によれば、前記ヒ−タ−電極及び
その周辺部の温度が従来のごとく前記水冷電源電極によ
って低下させられることがなく、炉内各部の温度の均一
化が向上させられ、品質の優れた焼結品を提供すること
ができ、不良品の発生が防止される。
A third aspect of the present invention is that a high melting point conductive material is interposed between a heater electrode provided through the heat insulating material and a water-cooled power supply electrode provided through the vacuum chamber. It is. According to this configuration, the temperature of the heater electrode and its peripheral portion is not lowered by the water-cooled power supply electrode as in the related art, and the uniformity of the temperature in each part in the furnace is improved, resulting in excellent quality. A sintered product can be provided, and generation of defective products can be prevented.

【0010】請求項4の発明は、前記断熱材の内周面に
グラファイトを主成分とするシ−トを貼着したものであ
る。この構成によれば、断熱効果の向上とともに脱脂時
に除去されたバインダ−の付着による断熱材の劣化を防
止でき、炉寿命の長期化を図ることができる。
According to a fourth aspect of the present invention, a sheet containing graphite as a main component is adhered to an inner peripheral surface of the heat insulating material. According to this configuration, it is possible to prevent the deterioration of the heat insulating material due to the adhesion of the binder removed at the time of degreasing as well as to improve the heat insulating effect, and to prolong the furnace life.

【0011】[0011]

【発明の実施の形態】図面は、本発明の実施の一形態を
示すもので、図1は全体平面図、図2は図1の正面図、
図3は図2の左側面図、図4は真空チャンバ−の拡大縦
断面図、図5は図4のV−V線方向断面図、図6はヒ−
タ電極及び水冷電極部の拡大断面図、図7はレトルトボ
ックス部の概略断面図である。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows an embodiment of the present invention. FIG. 1 is an overall plan view, FIG. 2 is a front view of FIG.
3 is a left side view of FIG. 2, FIG. 4 is an enlarged vertical sectional view of the vacuum chamber, FIG. 5 is a sectional view taken along line VV of FIG. 4, and FIG.
FIG. 7 is an enlarged cross-sectional view of the retort box and the water electrode.

【0012】真空チャンバ−1は、中央の本体部2と、
その両端部に設けられた前扉3及び後扉4で構成され、
さらに前記本体部2、前記前扉3及び後扉4がそれぞれ
二重壁構造とされ、その間にそれぞれ冷却水路5を有す
る。図中、6はそれぞれ注水及び循環口である。
The vacuum chamber-1 has a central main body 2 and
It is composed of a front door 3 and a rear door 4 provided at both ends thereof,
Further, the main body 2, the front door 3, and the rear door 4 each have a double wall structure, and each have a cooling water passage 5 therebetween. In the figure, 6 is a water injection and circulation port, respectively.

【0013】前記前扉3及び後扉4は、それぞれ前記本
体部2にヒンジ7により開閉自在に支持され、さらに前
記本体部2の両端には前記前扉3及び後扉4のロック装
置8が設けられ、底部にはバインダ−収集ポット9が設
けられている。
The front door 3 and the rear door 4 are respectively supported by the main body 2 so as to be openable and closable by hinges 7. Further, at both ends of the main body 2, locking devices 8 for the front door 3 and the rear door 4 are provided. A binder collection pot 9 is provided at the bottom.

【0014】さらに前記前扉3には、後に述べる本体部
1側に設けられた断熱材23の前扉3側を閉塞する端部
断熱材10が支持部11により取り付けられ、さらに該
端部断熱材10に形成された開口部12を開閉するシャ
ッタ−13及び該シャッタ−13の駆動シリンダ14が
設けられている。
Further, to the front door 3, an end heat insulating material 10 for closing the front door 3 side of a heat insulating material 23 provided on the main body 1 side, which will be described later, is attached by a support portion 11. A shutter 13 for opening and closing an opening 12 formed in the material 10 and a drive cylinder 14 for the shutter 13 are provided.

【0015】また、後扉4には、後に述べる本体部1側
に設けられた断熱材23の後扉4側を閉塞する端部断熱
材15が支持部16により取り付けられ、さらに該端部
断熱材15に形成された開口部17を開閉するシャッタ
−18及び該シャッタ−18の駆動シリンダ19、さら
に該シャッタ−18の後方に後述するレトルトボックス
26に向けた冷却ファン20及び該冷却ファン20の駆
動モ−タ21が設けられている。
The rear door 4 is provided with an end heat insulating material 15 for closing a rear door 4 side of a heat insulating material 23 provided on the main body 1 side, which will be described later, by a support portion 16. Shutter 18 for opening and closing the opening 17 formed in the member 15, a drive cylinder 19 for the shutter 18, and a cooling fan 20 toward the retort box 26, which will be described later, behind the shutter 18, and a cooling fan 20 for the cooling fan 20. A drive motor 21 is provided.

【0016】本発明では、前記真空チャンバ−1内、具
体的には、前記本体部2内にヒ−タ22、断熱材23さ
らに前記前扉3に設けられた端部断熱材10及び後扉4
に設けられた端部断熱材15で囲まれ、さらにスイ−プ
ガス供給部24が連結されたグリ−ンボデイ25を収容
するレトルトボックス26が設けられる。
According to the present invention, a heater 22, a heat insulating material 23, an end heat insulating material 10 provided on the front door 3 and a rear door are provided in the vacuum chamber 1, specifically, in the main body 2. 4
A retort box 26 is provided which accommodates a green body 25 which is surrounded by the end heat insulating material 15 provided with the swivel gas supply unit 24.

【0017】前記レトルトボックス26は、前記真空チ
ャンバ−1内に起立させた中空材27によって支持され
たハ−スレ−ル28上に載置支持され、その内部には図
7に示すように、グリ−ンボデイ25を収容する多段の
棚29が設けられ、さらに該棚29は同図に示すように
両端を交互に開放し、スイ−プガス供給部24から供給
されたスイ−プガスがそれぞれの棚29の上面、すなわ
ち、該棚29の上面に収容されたグリ−ンボデイ25部
を蛇行して下部排気口42から前記断熱材23の外部、
すなわち、真空チャンバ−1内に排出されるように設け
られている。
The retort box 26 is mounted and supported on a hearth rail 28 supported by a hollow member 27 erected in the vacuum chamber 1, and inside thereof, as shown in FIG. A multi-stage shelf 29 for accommodating a green body 25 is provided, and the shelf 29 is opened at both ends alternately as shown in FIG. 1 so that the sweep gas supplied from the sweep gas supply section 24 is supplied to each shelf. 29, that is, the portion of the green body 25 accommodated in the upper surface of the shelf 29 is meandered to the outside of the heat insulating material 23 from the lower exhaust port 42.
That is, it is provided so as to be discharged into the vacuum chamber-1.

【0018】また、前記ヒ−タ−22は、ラジアントチ
ュ−ブ型であり、前記前扉3から後扉4方向に前記レト
ルトボックス26を囲んで設けられ、さらに、該ヒ−タ
−22と所要間隔をあけてその外側に前記断熱材23が
設けられている。
The heater 22 is of a radiant tube type and is provided from the front door 3 to the rear door 4 so as to surround the retort box 26. The heat insulating material 23 is provided on the outside at a required interval.

【0019】前記断熱材10及び端部断熱材15、23
は、耐熱レンガ等からなり、さらにその内周面にグラフ
ァイトを主成分とするシ−ト30が貼着されている。
The heat insulating material 10 and the end heat insulating materials 15, 23
Is made of a heat-resistant brick or the like, and a sheet 30 mainly composed of graphite is adhered to the inner peripheral surface thereof.

【0020】つぎに、ヒ−タ−電極31部について説明
する。該ヒ−タ−電極31はカ−ボン等からなり、図6
に示されているように、前記ヒ−タ−22及び断熱材2
3部を貫通して支持されている。
Next, the heater electrode 31 will be described. The heater electrode 31 is made of carbon or the like.
As shown in FIG.
It is supported through three parts.

【0021】一方、電源(図示せず)に連なる水冷電源
電極32は銅からなり、内部に冷却水路33を有する二
重管に構成され、冷却水供給口34及び循環口35を有
し、前記ヒ−タ−電極31と適当間隔をあけて前記真空
チャンバ−1部を貫通して支持されている。
On the other hand, a water-cooled power supply electrode 32 connected to a power supply (not shown) is made of copper, is formed as a double pipe having a cooling water passage 33 therein, and has a cooling water supply port 34 and a circulation port 35. The heater electrode 31 is supported through the vacuum chamber 1 at an appropriate distance from the heater electrode 31.

【0022】従来は、前記ヒ−タ−電極31と水冷電源
電極32が直接連結されていたものであるが、本発明で
は、前記ヒ−タ−電極31と前記水冷電源電極32間に
高融点導電体、好ましくはモリブデン(融点:2625
℃)、あるいはタングステン(融点:3410℃)等か
らなる高融点導電体36が介在させられる。
Conventionally, the heater electrode 31 and the water-cooled power supply electrode 32 are directly connected. However, in the present invention, a high melting point is provided between the heater electrode 31 and the water-cooled power supply electrode 32. Conductor, preferably molybdenum (melting point: 2625
C.) or a high melting point conductor 36 made of tungsten (melting point: 3410 ° C.) or the like.

【0023】下記表1には、前記高融点導電体の有無に
おける炉内温度分布の比較実験例が示されている。
Table 1 below shows comparative examples of furnace temperature distributions with and without the high melting point conductor.

【0024】[0024]

【表1】 すなわち、前記ヒ−タ−電極31と水冷電源電極32間
に、前記高融点導電体36を介在させた場合と介在させ
ない場合の比較実験例である。
[Table 1] That is, this is a comparative example in which the high-melting-point conductor 36 is interposed between the heater electrode 31 and the water-cooled power supply electrode 32 and not interposed.

【0025】前記表1に記載された温度測定個所は、J
ISで定められている9地点、すなわち、炉内の上部四
隅部の4個所、下部四隅部の4個所及び炉中央部の9地
点である。いずれの実験も前記高融点導電体36の有無
のみ相違するだけでその他の実験諸条件は全く同じであ
る。
The temperature measurement points shown in Table 1 are J
Nine points defined by IS, namely, four points at the upper four corners, four points at the lower four corners, and nine points at the center of the furnace in the furnace. All the experiments were the same except for the presence or absence of the high-melting-point conductor 36.

【0026】測定結果は、同表から明らかなように、前
記高融点導電体を介在させない場合の前記9地点の最大
温度差が27℃であるのに対し、前記高融点導電体を介
在させた場合の最大温度差が4.5℃であり、極めて顕
著な相違が確認されたものである。
As is clear from the table, the maximum temperature difference at the nine points when the high-melting-point conductor was not interposed was 27 ° C., but the high-melting-point conductor was interposed. In this case, the maximum temperature difference was 4.5 ° C., and a very remarkable difference was confirmed.

【0027】つぎに、真空装置について説明する。前記
真空チャンバ−1の本体部2の適位置から設けられた配
管37が水冷式バッフル38を介してディフ−ジョンポ
ンプ39に連結され、さらに該ディフ−ジョンポンプ3
8には順次メカニカルブ−スタ−40及びロ−タリ−ポ
ンプ41が連結される。
Next, the vacuum apparatus will be described. A pipe 37 provided from an appropriate position of the main body 2 of the vacuum chamber-1 is connected to a diffusion pump 39 via a water-cooled baffle 38, and further connected to the diffusion pump 3
8, a mechanical booster 40 and a rotary pump 41 are sequentially connected.

【0028】さらに前記配管37の前記水冷式バッフル
38より前記真空チャンバ−1寄りの地点から分岐配管
40が設けられて前記メカニカルブ−スタ−40に連結
され、ロ−タリ−ポンプ41による吸気を切り換えでき
るように構成されている。
Further, a branch pipe 40 is provided from the water-cooled baffle 38 of the pipe 37 at a point closer to the vacuum chamber 1 and is connected to the mechanical booster 40 so that the suction by the rotary pump 41 is taken. It is configured to be switchable.

【0029】すなわち、ロ−タリ−ポンプ41によって
前記水冷式バッフル38、ディフ−ジョンポンプ39及
びメカニカルブ−スタ−40を介して真空チャンバ−1
内の吸気を行うことができる他、前記ディフ−ジョンポ
ンプ39を介さず、メカニカルブ−スタ−40のみを介
してロ−タリ−ポンプ41によって真空チャンバ−1内
の吸気を行うことができる様に構成されている。
That is, the vacuum chamber-1 is rotated by the rotary pump 41 via the water-cooled baffle 38, the diffusion pump 39 and the mechanical booster 40.
In addition to the above, it is possible to perform the suction in the vacuum chamber 1 by the rotary pump 41 only through the mechanical booster 40 without passing through the diffusion pump 39. Is configured.

【0030】前記構成の熱処理炉炉において、バインダ
−除去及び焼結部品製造の一例を以下に説明する。
An example of removing the binder and manufacturing a sintered part in the heat treatment furnace having the above-described configuration will be described below.

【0031】まず、公知の方法によって、前記粉末成形
体、すなわち、グリ−ンボデイ25が準備される。つぎ
に前記レトルトボックス26内の棚29上にグリ−ンボ
デイ25が並べられ、前記前扉3を開放して前記レトル
トボックス26がハ−スレ−ル28上に供給される。
First, the powder compact, that is, the green body 25, is prepared by a known method. Next, the green bodies 25 are arranged on a shelf 29 in the retort box 26, the front door 3 is opened, and the retort box 26 is supplied onto a hearth rail 28.

【0032】その後、前記扉が閉められ、前記ロ−タリ
−ポンプ41及びメカニカルブ−スタ−40が駆動させ
られて真空排気が行われ、その後ヒ−タ−22によりレ
トルトボックス26部が加熱され、同時に真空チャンバ
−1の水路5内に冷却水が循環させられる。
Thereafter, the door is closed, the rotary pump 41 and the mechanical booster 40 are driven to evacuate, and then the heater 22 heats the retort box 26. At the same time, cooling water is circulated in the water channel 5 of the vacuum chamber-1.

【0033】その結果、融点の低い、成形助剤、例え
ば、パラフィン等の低分子がグリ−ンボデイ26から蒸
発させられて一部脱脂が行われ、該パラフィン等がレト
ルトボックス26の下部排気口42から前記真空チャン
バ−1内に排出される。
As a result, a molding aid having a low melting point, for example, a low molecule such as paraffin is evaporated from the green body 26 and partially degreased, and the paraffin and the like are exhausted from the lower exhaust port 42 of the retort box 26. From the vacuum chamber-1.

【0034】そして前記真空チャンバ−1内に排出され
たパラフィン等は、該真空チャンバ−1の内周面が冷却
されているため、該真空チャンバ−1の内周面に凝縮付
着する。
The paraffin and the like discharged into the vacuum chamber-1 condense and adhere to the inner peripheral surface of the vacuum chamber-1 because the inner peripheral surface of the vacuum chamber-1 is cooled.

【0035】同時に、真空装置への排気に含まれた前記
パラフィン等は、前記配管37部に設けられた水冷式バ
ッフル38、さらにディフ−ジョンポンプ39部で回収
され、該パラフィン等を除去された排気はメカニカルブ
−スタ−40及びロ−タリ−ポンプ41を介して外部に
排出される。
At the same time, the paraffin and the like contained in the exhaust gas to the vacuum device were collected by a water-cooled baffle 38 provided in the pipe 37 and a diffusion pump 39 to remove the paraffin and the like. The exhaust gas is discharged to the outside via a mechanical booster 40 and a rotary pump 41.

【0036】なお、前記真空チャンバ−1の内周面に凝
縮付着したパラフィン等の除去は、前記水路5に冷却水
に変えて温水を供給することにより、溶解させることが
でき、溶解させた前記パラフィン等は、真空チャンバ−
1を構成する本体部2の底部に設けられたバインダ−収
集ポット9に採集される。
The removal of paraffin and the like condensed on the inner peripheral surface of the vacuum chamber-1 can be achieved by supplying hot water instead of cooling water to the water channel 5 and dissolving it. Paraffin etc. are in a vacuum chamber
The sample is collected in a binder-collecting pot 9 provided at the bottom of the main body 2 constituting 1.

【0037】その後、ヒ−タ−22によるレトルトボッ
クス26部の昇温が行われて残されている高分子バイン
ダの脱脂が行われる。この脱脂に際しては、前記スイ−
プガス供給部24からスイ−プガスが供給され、供給さ
れたスイ−プガスはレトルトボックス26内を蛇行させ
られて棚29上のグリ−ンボディ25の脱脂を助長す
る。
Thereafter, the temperature of the retort box 26 is raised by the heater 22, and the remaining polymer binder is degreased. In this degreasing, the switch
The sweep gas is supplied from the gas supply unit 24, and the supplied sweep gas is meandered in the retort box 26, and promotes the degreasing of the green body 25 on the shelf 29.

【0038】このスイ−プガス使用の脱脂時には、真空
装置への排気はディフ−ジョンポンプ31を通さず、配
管37からメカニカルブ−スタ−40及びロ−タリ−ポ
ンプ41を介して行われる。
At the time of the degreasing using the sweep gas, the exhaust to the vacuum device is performed via the mechanical booster 40 and the rotary pump 41 from the pipe 37 without passing through the diffusion pump 31.

【0039】その後、脱脂の完了が確認されたら、スイ
−プガスの供給を止め、高温、高真空を維持して焼結を
行い、焼結完了時には前記シャッタ−13及び18が開
放され、冷却ファン20を駆動させて、焼結製品を急冷
する。
Thereafter, when the completion of the degreasing is confirmed, the supply of the sweep gas is stopped, the sintering is performed while maintaining the high temperature and the high vacuum, and when the sintering is completed, the shutters 13 and 18 are opened and the cooling fan is opened. 20 is driven to quench the sintered product.

【0040】すなわち、前記シャッタ−13がその駆動
シリンダ14によって後方へ引かれ、端部断熱材10に
設けられた開口部12が開放され、同時に前記シャッタ
−18がその駆動シリンダ19によって後方及び横方向
に逃がされ、端部断熱材15に設けられた開口部17が
開放される。
That is, the shutter 13 is pulled rearward by the driving cylinder 14 and the opening 12 provided in the end heat insulating material 10 is opened, and at the same time, the shutter 18 is moved rearward and laterally by the driving cylinder 19. The opening 17 provided in the end heat insulating material 15 is opened.

【0041】その後、冷却ファン20を吸気回転させる
と、前記断熱材23及び端部断熱材10、15内部の冷
却用ガスが開口部17から吸引されて前記冷却水路5を
有する真空チャンバ−1と前記断熱材23及び端部断熱
材10、15間で冷却されて循環させられてレトルトボ
ックス26及びその内部の焼結部品を急冷することがで
きるものである。
Thereafter, when the cooling fan 20 is rotated by suction, the cooling gas inside the heat insulating material 23 and the end heat insulating materials 10 and 15 is sucked from the opening 17 to form the vacuum chamber 1 having the cooling water passage 5 therein. The retort box 26 and the sintered components therein can be rapidly cooled by being cooled and circulated between the heat insulating material 23 and the end heat insulating materials 10 and 15.

【0042】[0042]

【発明の効果】本発明によれば、熱処理炉内、特にグリ
−ンボデイ周囲の温度にバラツキが生じることがなく、
したがって、グリ−ンボデイ各部における脱脂及び焼結
の均一化が図られ、不良品の発生が防止される。
According to the present invention, there is no variation in the temperature inside the heat treatment furnace, especially around the green body.
Therefore, the degreasing and sintering in each part of the green body are made uniform, and the occurrence of defective products is prevented.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の熱処理炉の全体平面図である。FIG. 1 is an overall plan view of a heat treatment furnace of the present invention.

【図2】図1の正面図である。FIG. 2 is a front view of FIG.

【図3】図2の左側面図である。FIG. 3 is a left side view of FIG. 2;

【図4】真空チャンバ−の拡大縦断面図である。FIG. 4 is an enlarged vertical sectional view of a vacuum chamber.

【図5】図4のV−V線方向断面図である。FIG. 5 is a sectional view taken along line VV of FIG. 4;

【図6】ヒ−タ電極及び水冷電極部の拡大断面図であ
る。
FIG. 6 is an enlarged sectional view of a heater electrode and a water-cooled electrode part.

【図7】レトルトボックス部の概略断面図である。FIG. 7 is a schematic sectional view of a retort box section.

【符号の説明】[Explanation of symbols]

1 真空チャンバ− 10,15,23 断熱材 13,18 シャッタ− 20 冷却ファン 22 ヒ−タ− 24 スイ−プガス供給部 25 粉末成形体 26 レトルトボックス 30 シ−ト 31 ヒ−タ電極 32 水冷電極 36 高融点導電体 DESCRIPTION OF SYMBOLS 1 Vacuum chamber 10, 15, 23 Insulation material 13, 18 Shutter 20 Cooling fan 22 Heater 24 Sweep gas supply part 25 Powder compact 26 Retort box 30 Sheet 31 Heater electrode 32 Water cooling electrode 36 High melting point conductor

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山口 秀樹 東京都千代田区丸の内一丁目8番2号 同 和鉱業株式会社内 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hideki Yamaguchi 1-8-2 Marunouchi, Chiyoda-ku, Tokyo Dowa Mining Co., Ltd.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 二重壁構造で冷却水路を有する真空チャ
ンバ−(1)内にヒ−タ−及び断熱材で囲まれ、さらに
スイ−プガス供給部が連結された粉末成形体を収容する
レトルトボックス(26)を備えてなることを特徴とす
る熱処理炉。
1. A retort for accommodating a powder compact which is surrounded by a heater and a heat insulating material in a vacuum chamber (1) having a double wall structure and having a cooling water passage, and further connected to a sweep gas supply unit. A heat treatment furnace comprising a box (26).
【請求項2】 前記レトルトボックスを囲む両端部断熱
材にそれぞれシャッタ−(13),(18)が設けら
れ、一方シャッタ−の後方に前記レトルトボックスに向
けられた冷却ファン(20)が設けられてなる請求項1
に記載の熱処理炉。
2. Insulating materials at both ends surrounding the retort box are provided with shutters (13) and (18), respectively, while a cooling fan (20) directed toward the retort box is provided behind the shutter. Claim 1
2. The heat treatment furnace according to 1.
【請求項3】 前記断熱材を貫通して支持されたヒ−タ
−電極(31)と前記真空チャンバ−を貫通して支持さ
れた水冷電源電極間に高融点導電体(36)を介在させ
たことを特徴とする前記請求項1又は2に記載の熱処理
炉。
3. A high melting point conductor (36) is interposed between a heater electrode (31) supported through the heat insulating material and a water-cooled power supply electrode supported through the vacuum chamber. The heat treatment furnace according to claim 1 or 2, wherein:
【請求項4】 前記断熱材の内周面にグラファイトを主
成分とするシ−トを貼着したことを特徴とする請求項
1、2又は3に記載の熱処理炉。
4. The heat treatment furnace according to claim 1, wherein a sheet containing graphite as a main component is adhered to an inner peripheral surface of the heat insulating material.
JP08293498A 1998-03-13 1998-03-13 Heat treatment furnace Expired - Fee Related JP3903448B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08293498A JP3903448B2 (en) 1998-03-13 1998-03-13 Heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08293498A JP3903448B2 (en) 1998-03-13 1998-03-13 Heat treatment furnace

Publications (2)

Publication Number Publication Date
JPH11257869A true JPH11257869A (en) 1999-09-24
JP3903448B2 JP3903448B2 (en) 2007-04-11

Family

ID=13788067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08293498A Expired - Fee Related JP3903448B2 (en) 1998-03-13 1998-03-13 Heat treatment furnace

Country Status (1)

Country Link
JP (1) JP3903448B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1205724A2 (en) * 2000-11-07 2002-05-15 Püschner GmbH & Co. KG Device for drying and/or sintering pressed articles made of composit materials
KR100637274B1 (en) 2005-07-15 2006-10-23 한국에너지기술연구원 Transfer equipment for tray in low pressure carburizing furnace
KR101254547B1 (en) 2010-12-22 2013-04-19 한국수력원자력 주식회사 A high temperature vacuum furnace system for fracture toughness testing, which involves an accessory chamber for installing displacement measurement sensors
CN103398577A (en) * 2013-08-02 2013-11-20 宁波宁港永磁材料有限公司 Samarium cobalt permanent magnet vacuum sintering furnace
CN103464748A (en) * 2013-08-26 2013-12-25 苏州米莫金属科技有限公司 Electric-heating-type degreasing furnace
JP2016223733A (en) * 2015-06-02 2016-12-28 Dowaサーモテック株式会社 Vacuum defatting and sintering furnace
CN108895830A (en) * 2018-07-11 2018-11-27 昆山金美创机械有限公司 One kind being suitable for LED semiconductor vacuum oven
JP2022025689A (en) * 2020-07-29 2022-02-10 株式会社ノリタケカンパニーリミテド Debinding furnace
JP2022123050A (en) * 2020-07-29 2022-08-23 株式会社ノリタケカンパニーリミテド Debinding furnace

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1205724A2 (en) * 2000-11-07 2002-05-15 Püschner GmbH & Co. KG Device for drying and/or sintering pressed articles made of composit materials
EP1205724A3 (en) * 2000-11-07 2003-01-02 Püschner GmbH & Co. KG Device for drying and/or sintering pressed articles made of composit materials
KR100637274B1 (en) 2005-07-15 2006-10-23 한국에너지기술연구원 Transfer equipment for tray in low pressure carburizing furnace
KR101254547B1 (en) 2010-12-22 2013-04-19 한국수력원자력 주식회사 A high temperature vacuum furnace system for fracture toughness testing, which involves an accessory chamber for installing displacement measurement sensors
CN103398577A (en) * 2013-08-02 2013-11-20 宁波宁港永磁材料有限公司 Samarium cobalt permanent magnet vacuum sintering furnace
CN103464748A (en) * 2013-08-26 2013-12-25 苏州米莫金属科技有限公司 Electric-heating-type degreasing furnace
JP2016223733A (en) * 2015-06-02 2016-12-28 Dowaサーモテック株式会社 Vacuum defatting and sintering furnace
CN108895830A (en) * 2018-07-11 2018-11-27 昆山金美创机械有限公司 One kind being suitable for LED semiconductor vacuum oven
CN108895830B (en) * 2018-07-11 2019-12-06 昆山金美创机械有限公司 Vacuum baking oven suitable for LED semiconductor
JP2022025689A (en) * 2020-07-29 2022-02-10 株式会社ノリタケカンパニーリミテド Debinding furnace
JP2022123050A (en) * 2020-07-29 2022-08-23 株式会社ノリタケカンパニーリミテド Debinding furnace

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