JPH0453927B2 - - Google Patents
Info
- Publication number
- JPH0453927B2 JPH0453927B2 JP59043208A JP4320884A JPH0453927B2 JP H0453927 B2 JPH0453927 B2 JP H0453927B2 JP 59043208 A JP59043208 A JP 59043208A JP 4320884 A JP4320884 A JP 4320884A JP H0453927 B2 JPH0453927 B2 JP H0453927B2
- Authority
- JP
- Japan
- Prior art keywords
- window
- stirring fan
- heating
- motor
- vacuum furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 29
- 238000003756 stirring Methods 0.000 claims description 28
- 239000007789 gas Substances 0.000 description 9
- 238000001816 cooling Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/767—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material with forced gas circulation; Reheating thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/16—Arrangements of air or gas supply devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/14—Arrangements of heating devices
- F27B2005/143—Heating rods disposed in the chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/16—Arrangements of air or gas supply devices
- F27B2005/166—Means to circulate the atmosphere
- F27B2005/167—Means to circulate the atmosphere the atmosphere being recirculated through the treatment chamber by a turbine
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
Description
【発明の詳細な説明】 本発明は真空炉の構造に関するものである。[Detailed description of the invention] The present invention relates to the structure of a vacuum furnace.
真空炉において被熱物が1200〜1600℃の高温度
に加熱されるのは大部分がヒータからの輻射熱伝
達によるもので、対流熱伝達或いは熱伝導による
ものは殆どない。このように被熱物を高温度に加
熱する場合はヒータや断熱材の内面等が高温度で
あるため輻射熱のみでも短時間で昇温させること
ができるが、焼戻、焼鈍等150〜600℃程度の比較
的低い温度に被熱物を加熱しようとすると真空炉
の場合対流熱伝達が殆どないため他の雰囲気炉等
に比べて非常に時間がかかる欠点がある。そこ
で、真空炉中に必要に応じてアルゴンガス、チツ
ソガス等の雰囲気ガスを入れ、炉内圧を100〜
760Torrとし対流伝熱による加熱促進を図ること
が考えられるが、真空炉には一般に撹拌扇は設け
られておらず、自然対流が起きるだけであるので
炉内の温度分布が片寄るなどの不都合が生じた。
従つて例えば本発明者等の出願に係る実開昭58−
68948号公報に記載されたように炉内に撹拌扇を
設けて雰囲気ガスを撹拌することが考えられる
が、1200〜1600℃の高温度にも耐えられるような
撹拌扇の製作はかなり困難で仮に耐熱性の高いフ
アインセラミツクス等で製作したとしても高価に
なるという難点があつた。 In a vacuum furnace, objects to be heated are heated to a high temperature of 1,200 to 1,600°C mostly due to radiant heat transfer from the heater, and almost never due to convective heat transfer or heat conduction. When heating an object to a high temperature in this way, the inner surface of the heater or insulation material is at a high temperature, so the temperature can be raised in a short time using only radiant heat, but tempering, annealing, etc. When trying to heat an object to a relatively low temperature, a vacuum furnace has the drawback that it takes much longer than other atmospheric furnaces because there is almost no convective heat transfer. Therefore, if necessary, introduce atmospheric gas such as argon gas or chitsuso gas into the vacuum furnace to increase the furnace internal pressure to 100~100℃.
It is possible to accelerate heating by convection heat transfer at 760 Torr, but vacuum furnaces are generally not equipped with a stirring fan and only natural convection occurs, which may lead to inconveniences such as uneven temperature distribution within the furnace. Ta.
Therefore, for example, the application filed by the present inventors
As described in Publication No. 68948, it is conceivable to install a stirring fan inside the furnace to stir the atmospheric gas, but it is quite difficult to manufacture a stirring fan that can withstand high temperatures of 1200 to 1600°C. Even if it were made of fine ceramics or the like with high heat resistance, it would be expensive.
本発明は上記欠点を解消し高温加熱だけでなく
低温加熱にも適した真空炉を提供しようとするも
ので、真空または雰囲気ガスを装填し得る耐圧性
気密室内に被熱物を断熱壁によつて囲うようにし
て加熱部を形成し該断熱壁の内側に電熱ヒータを
設けてなる真空炉において、断熱壁の一部に窓と
該窓を閉鎖する蓋板を設け、撹拌扇を回転させる
モータを該耐熱性気密室内の該窓の外側で進退動
するように設け、該モータを進出動することで該
撹拌扇が前記窓から加熱部中に進出して被熱物と
相対し、該モータを後退動することで該撹拌扇が
加熱部中から退避し前記蓋板より前記窓を閉鎖し
得るように構成したことを特徴とするものであ
る。 The present invention aims to eliminate the above-mentioned drawbacks and provide a vacuum furnace suitable not only for high-temperature heating but also for low-temperature heating. In a vacuum furnace in which a heating section is formed by enclosing a wall and an electric heater is provided inside the insulating wall, a window and a cover plate for closing the window are provided in a part of the insulating wall, and a motor that rotates a stirring fan is provided. is provided to move forward and backward outside the window in the heat-resistant airtight chamber, and by moving the motor forward, the stirring fan advances from the window into the heating section and faces the object to be heated. The invention is characterized in that the agitating fan is retracted from the heating section by moving backward, and the window can be closed from the cover plate.
次に本発明の一実施例を図面と共に説明する。
この真空炉は耐圧性気密室1と冷却室2とが直列
に継がれ、両室間に中間扉3が配設され、冷却室
2に被熱物装入抽出用の開閉扉4が設けられてい
る。5は被熱物aを乗せるフオーク状のリフト
で、該リフトは天井部に設けられたリフトレール
6に沿つて冷却室2内および耐圧性気密室1内に
進入し被熱物aを該室内に搬入および搬出する。
7は冷却室2に設けられた冷却用雰囲気ガス循環
フアンを示す。3は作動軸の先端を中間扉3に連
結したシリンダで、中間扉3を開けたとき該シリ
ンダを作動させることによつて該中間扉3を収納
部9中に退避させ被熱物aを耐圧性気密室1に装
入抽出するのに邪魔にならないようにする。耐圧
性気密室1内には被熱物aが定置される固定台1
0が配置され、また、その被熱物aを囲う如くに
耐熱性の優れた黒鉛製の断熱壁11を設けて加熱
部12を形成すると共に、該断熱壁11の内側に
電熱ヒータ13を配置する。14はリフト5に乗
せて搬入された被熱物aを固定台10上に降す
際、および固定台10上の被熱物aをリフト5に
再び乗せるときに、該被熱物aを一時的に支持す
るため固定台10に設けられた昇降ロツド、15
は該昇降ロツドを作動させるシリンダを示す。し
かして、断熱壁11によつて囲われた加熱部12
の奥部に窓16を開設し、該窓16から被熱物a
に相対するように撹拌扇17を設け、該撹拌扇1
7を回転させるモータ18をレール19上に摺動
自在に配した台車20にて支持し、該モータ18
の背部にシリンダ21の作動軸端を連結し、該シ
リンダ21の作動によりモータ18がレール19
に沿つて摺動し、撹拌扇17が窓16から加熱部
12中に進出または後退動し得るように構成す
る。なお22は撹拌扇17を窓16に合致させた
とき該窓16を閉鎖するためモータ18の前面に
固着した断熱材料からなる円板、23はモータ1
8の外周に設けられたストツパである。24は第
2図に示したように撹拌扇17を後退動させたと
き窓16を閉鎖する断熱材料からなる蓋板で、該
蓋板は耐圧性気密室1外上部に設けられたシリン
ダ25の作動軸端に連結されていて該シリンダ2
5の作動で窓16を開閉させる。 Next, one embodiment of the present invention will be described with reference to the drawings.
In this vacuum furnace, a pressure-resistant airtight chamber 1 and a cooling chamber 2 are connected in series, an intermediate door 3 is provided between the two chambers, and an opening/closing door 4 for charging and extracting heat materials is provided in the cooling chamber 2. ing. Reference numeral 5 denotes a fork-shaped lift for carrying the heated object a, which enters the cooling chamber 2 and the pressure-resistant airtight chamber 1 along the lift rail 6 provided on the ceiling and carries the heated object a into the room. Loading and unloading.
Reference numeral 7 indicates a cooling atmosphere gas circulation fan provided in the cooling chamber 2. 3 is a cylinder whose operating shaft end is connected to the intermediate door 3, and when the intermediate door 3 is opened, by operating the cylinder, the intermediate door 3 is evacuated into the storage section 9 and the heated object a is placed under pressure. It is made so that it does not get in the way of charging and extracting into the airtight chamber 1. Inside the pressure-resistant airtight chamber 1 is a fixed stand 1 on which the heated object a is placed.
In addition, a heat insulating wall 11 made of graphite with excellent heat resistance is provided to surround the heated object a to form a heating section 12, and an electric heater 13 is arranged inside the heat insulating wall 11. do. Reference numeral 14 indicates that when the heated object a carried in on the lift 5 is lowered onto the fixed table 10 and when the heated object a on the fixed table 10 is placed on the lift 5 again, the heated object a is temporarily removed. A lifting rod 15 provided on the fixed base 10 to support the
indicates the cylinder that operates the lifting rod. Thus, the heating section 12 surrounded by the heat insulating wall 11
A window 16 is opened in the inner part of the
A stirring fan 17 is provided so as to face the stirring fan 1.
A motor 18 for rotating the motor 7 is supported by a cart 20 slidably disposed on a rail 19.
The operating shaft end of a cylinder 21 is connected to the back of the cylinder 21, and the motor 18 is moved to the rail 19 by the operation of the cylinder
The stirring fan 17 is configured to be able to advance or retreat from the window 16 into the heating section 12 by sliding along the window 16 . Note that 22 is a disc made of a heat insulating material fixed to the front surface of the motor 18 in order to close the window 16 when the stirring fan 17 is aligned with the window 16;
This is a stopper provided on the outer periphery of 8. 24 is a cover plate made of a heat insulating material that closes the window 16 when the stirring fan 17 is moved backward, as shown in FIG. The cylinder 2 is connected to the end of the operating shaft.
5 opens and closes the window 16.
このように構成された真空炉においては、低温
加熱の際耐圧性気密室1内に雰囲気ガスを装填し
第1図に示したように撹拌扇17を窓16から加
熱部12中に進出させ該撹拌扇17を回転させて
被熱物a周囲の加熱部12の雰囲気ガスを撹拌す
ることで対流熱伝達を促進させ被熱物aを短時間
で均一加熱させる。一方高温加熱の際は耐圧性気
密室1内を真空にし第2図に示したように撹拌扇
17を退動させて蓋板24を閉じる。そうすれば
撹拌扇17は加熱部12からの輻射熱を受けるこ
となく過熱を防止できる。なお撹拌扇17はこの
ために格別の耐熱性を必要とせず既存のもので耐
用できるが、温度分布、加熱能力とのバランスを
取るために回転数が調節できるようなものが望ま
しい。 In the vacuum furnace configured in this way, when heating at a low temperature, atmospheric gas is charged into the pressure-resistant airtight chamber 1, and the stirring fan 17 is advanced into the heating section 12 through the window 16 as shown in FIG. By rotating the stirring fan 17 and stirring the atmospheric gas in the heating section 12 around the object a, convective heat transfer is promoted and the object a is uniformly heated in a short time. On the other hand, when heating at a high temperature, the inside of the pressure-resistant airtight chamber 1 is evacuated, and the stirring fan 17 is moved back as shown in FIG. 2, and the lid plate 24 is closed. In this way, the stirring fan 17 will not receive radiant heat from the heating section 12 and can be prevented from overheating. Note that the stirring fan 17 does not require special heat resistance for this purpose and can be used as an existing stirring fan, but it is desirable to use one whose rotational speed can be adjusted in order to balance temperature distribution and heating capacity.
以上実施例について説明したように本発明の真
空炉は、断熱壁の一部に窓と該窓を閉鎖する蓋板
を設け、撹拌扇を回転させるモータを耐圧性気密
室内の該窓の外側で進退動するように設けてなる
ので、低温加熱時には雰囲気ガスを装填し撹拌扇
を該窓から加熱部中に進出させてその雰囲気ガス
を撹拌し対流熱伝達を促進させることで被熱物を
短時間で均一加熱することを可能にする。また、
高温加熱時には撹拌扇を加熱部から退避させ該窓
を蓋板で閉鎖することにより撹拌扇が加熱部内の
高温度にさらされ過熱するような虞れがなくなる
ため撹拌扇の耐熱性、耐久性の問題はなくなる。
従つて本発明によれば高温加熱時も低温加熱時も
効率の良い加熱を実現できる真空炉が提供できる
有益な効果がある。 As described above in the embodiments, the vacuum furnace of the present invention is provided with a window and a cover plate for closing the window in a part of the heat insulating wall, and the motor for rotating the stirring fan is operated outside the window in the pressure-resistant airtight chamber. Since it is provided to move forward and backward, when heating at low temperatures, atmospheric gas is charged and the stirring fan is advanced into the heating section through the window to stir the atmospheric gas and promote convection heat transfer, thereby shortening the temperature of the object to be heated. Allows for uniform heating over time. Also,
During high-temperature heating, the stirring fan is removed from the heating section and the window is closed with a cover plate, which eliminates the risk of the stirring fan being exposed to the high temperature inside the heating section and overheating, which improves the heat resistance and durability of the stirring fan. The problem will go away.
Therefore, the present invention has the advantageous effect of providing a vacuum furnace that can realize efficient heating both during high-temperature heating and low-temperature heating.
図面は本発明に係る真空炉の一実施例を示した
もので、第1図はその部分断面側面図、第2図は
要部の作動状態を表わした拡大縦断面図、第3図
は第2図のX−X線断面図である。
a……被熱物、1……耐圧性気密室、11……
断熱壁、12……加熱部、13……電熱ヒータ、
16……窓、17……撹拌扇、18……モータ、
24……蓋板。
The drawings show an embodiment of the vacuum furnace according to the present invention. FIG. 1 is a partially sectional side view of the vacuum furnace, FIG. 2 is an enlarged longitudinal sectional view showing the operating state of the main parts, and FIG. FIG. 2 is a sectional view taken along line X-X in FIG. 2; a... Heated object, 1... Pressure-resistant airtight chamber, 11...
heat insulating wall, 12... heating section, 13... electric heater,
16...window, 17...stirring fan, 18...motor,
24...Lid plate.
Claims (1)
密室内に被熱物を断熱壁によつて囲うようにして
加熱部を形成し該断熱壁の内側に電熱ヒータを設
けてなる真空炉において、断熱壁の一部に窓と該
窓を閉鎖する蓋板を設け、攪拌扇を回転させるモ
ータを該耐熱性気密室内の該窓の外側で進退動す
るように設け、該モータを進出動することで該攪
拌扇が前記窓から加熱部中に進出して被熱物と相
対し、該モータを後退動することで該攪拌扇が加
熱部中から退避し前記蓋板より前記窓を閉鎖し得
るように構成したことを特徴とする真空炉。1. In a vacuum furnace in which a heating part is formed by surrounding an object to be heated in a pressure-resistant airtight chamber that can be charged with a vacuum or an atmospheric gas, and an electric heater is provided inside the insulating wall, the insulating wall A window and a cover plate for closing the window are provided in a part of the chamber, and a motor for rotating a stirring fan is provided to move forward and backward outside the window in the heat-resistant airtight chamber, and by moving the motor forward and backward, The stirring fan advances into the heating section through the window and faces the object to be heated, and by moving the motor backward, the stirring fan retreats from the heating section and the window can be closed from the cover plate. A vacuum furnace characterized by the following configurations.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4320884A JPS60187620A (en) | 1984-03-06 | 1984-03-06 | Vacuum furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4320884A JPS60187620A (en) | 1984-03-06 | 1984-03-06 | Vacuum furnace |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60187620A JPS60187620A (en) | 1985-09-25 |
JPH0453927B2 true JPH0453927B2 (en) | 1992-08-28 |
Family
ID=12657499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4320884A Granted JPS60187620A (en) | 1984-03-06 | 1984-03-06 | Vacuum furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60187620A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008285746A (en) * | 2007-04-20 | 2008-11-27 | Hitachi Industrial Equipment Systems Co Ltd | Annealing furnace for iron core |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3736501C1 (en) * | 1987-10-28 | 1988-06-09 | Degussa | Process for the heat treatment of metallic workpieces |
JP2513194Y2 (en) * | 1988-07-22 | 1996-10-02 | 株式会社島津製作所 | Heat treatment furnace |
JPH03199891A (en) * | 1989-12-28 | 1991-08-30 | Ishikawajima Harima Heavy Ind Co Ltd | Vacuum furnace |
CN116718017B (en) * | 2023-08-10 | 2023-11-07 | 厦门达斯智能装备有限公司 | Double-furnace-door feeding and discharging device convenient to maintain and carbon tube furnace |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5868948U (en) * | 1981-11-04 | 1983-05-11 | 大同特殊鋼株式会社 | Quenching equipment in vacuum heat treatment furnace |
-
1984
- 1984-03-06 JP JP4320884A patent/JPS60187620A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008285746A (en) * | 2007-04-20 | 2008-11-27 | Hitachi Industrial Equipment Systems Co Ltd | Annealing furnace for iron core |
Also Published As
Publication number | Publication date |
---|---|
JPS60187620A (en) | 1985-09-25 |
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