CN201327292Y - Continuous-type vacuum-atmosphere sintering furnace - Google Patents
Continuous-type vacuum-atmosphere sintering furnace Download PDFInfo
- Publication number
- CN201327292Y CN201327292Y CNU2008201335695U CN200820133569U CN201327292Y CN 201327292 Y CN201327292 Y CN 201327292Y CN U2008201335695 U CNU2008201335695 U CN U2008201335695U CN 200820133569 U CN200820133569 U CN 200820133569U CN 201327292 Y CN201327292 Y CN 201327292Y
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- tight door
- sintering
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Abstract
The utility model relates to a continuous-type vacuum-atmosphere sintering furnace which mainly comprises a first furnace body, a first switching system, a second furnace body, a transportation device and a furnace outlet switching system. The transportation device is arranged outside the furnace bodies and respectively connected with the furnace outlet switching system of the first furnace body and the second furnace body, so as to be used as a transportation platform that holds a carrier of a component to be sintered; the first furnace body is divided into vacuum degreasing areas according to technologies and provided with a preheating and heating component needed by a degreasing program; the second furnace body is airtight, and is divided into a sintering zone and a cooling zone; heat-proof materials and a heating component depending on the temperature needed by a sintering program are arranged in the sintering zone; a cooling device is arranged in the cooling zone, and an atmosphere gas supplying device is also arranged in the cooling device; and two air sealing doors are arranged in the first switching system and the furnace outlet switching system respectively, a splicing chamber is formed, and a displacement device and a gas displacement device are also arranged. The continuous-type vacuum-atmosphere sintering furnace can achieve the effects of improving the sintering quality of elements and reducing the usage amount of atmosphere gas.
Description
Technical field
The utility model is subordinate to continous way atmosphere sintering furnace technical field, refers in particular to a kind of push-plate type continuous fritting furnace design that atmosphere gas comes sintered component of adding.
Background technology
At present, in the technology of electronic component or powder metallurgy, need to import different atmosphere gas sintering in kiln, sintering is a considerable technology, the quality of electronic component or powder metallurgy product quality because sintering process concerns.The example that is sintered to heat pipe; be not allow oxygen to exist when sintering, just will add atmosphere gas (as hydrogen, nitrogen ...) as protection, therefore in the sintering program; how to keep the furnace atmosphere environment, become the key that influences quality in the electronic component technology.The sintering of known heat pipe mostly adopts the atmosphere sintering furnace of net belt type, but because the mode of movement of guipure is open, can't seal whole body of heater, for keeping the atmosphere of sintering program, atmosphere gas must constantly be provided, and (central authorities import atmosphere gas by body of heater, and by discharging the body of heater both sides, borrow the atmosphere gas of discharging to prevent that the stove outer air from entering in the stove), therefore the atmosphere gas amount that consumes is very big, and metal system guipure is through the constantly repeated use of high temperature, cooling, cause surface oxidation easily, make its life-span limited, this is one of shortcoming.In addition, because the capillary structure of heat pipe inboard wall of tube body face is made (being generally copper powder) with thermal conductivity good metal material sintering, and this copper powder is before sintering, manufacturer is for preventing oxidization of copper powder, can when producing copper powder, add antioxidant, make the copper powder surface form one deck oxidation-resistant film, also remaining between copper powder and copper powder in addition have oxygen, and remaining oxygen between the lip-deep oxide-film of copper powder and copper powder and copper powder, during with atmosphere gas positive air pressure sintering, often degreasing is discharged fully in atmosphere furnace, and this situation is obvious more when heat pipe length is long more, this quality for heat pipe has bad influence, and this is two of a shortcoming.The disadvantage of existing known technology existence that Here it is, this shortcoming becomes the difficult problem that industry is demanded urgently overcoming.
The utility model content
In view of this, main purpose of the present utility model is to provide a kind of continuous vacuum atmosphere sintering furnace that improves to be sintered sintering quality.
For achieving the above object, the utility model provides a kind of continuous vacuum atmosphere sintering furnace, and it mainly is made of first body of heater, first exchange system, second body of heater, conveying device and outlet of still exchange system; This conveying device is located at first body of heater and the second body of heater outside, and links the outlet of still exchange system of first body of heater and second body of heater respectively, with the delivery platform as to be sintered carrier of placement; First body of heater is divided into the vacuum degreasing district according to process island, and is provided with the required preheating heating component of degreasing program; This second body of heater is a closed, is divided into sintering zone and cooling zone according to process island, has heat-resisting material in the sintering zone and looks the temperature required heating component of sintering program, and the cooling zone has cooling device, and is provided with the atmosphere gas feedway; First exchange system links first body of heater and second body of heater, it has first gas-tight door and second gas-tight door, form first switch room between first gas-tight door and second gas-tight door, form second switch room between second gas-tight door and second body of heater, first switch room is provided with first gearshift and second gearshift, second switch room is provided with the triple motion device, and is provided with the gas displacement device; The outlet of still exchange system is located at the second body of heater port of export, and it has first gas-tight door and second gas-tight door, forms the switch room between first gas-tight door and second gas-tight door, and this switch room is provided with gearshift, and is provided with the gas displacement device.
Continuous vacuum atmosphere sintering furnace of the present utility model can reach the atmosphere that keeps consistent in the stove, the effect that improves the element sintering quality, and can reduce the atmosphere gas use amount effectively.
Description of drawings
Fig. 1 is the embodiment vertical view of the utility model continuous vacuum atmosphere sintering furnace;
Fig. 2 is first body of heater and the second body of heater sintering zone sectional view of the utility model continuous vacuum atmosphere sintering furnace;
Fig. 3 is the second body of heater cooling zone sectional view of the utility model continuous vacuum atmosphere sintering furnace;
Fig. 4 is the embodiment vertical view of another continuous vacuum atmosphere sintering furnace of the utility model;
Fig. 5 is the embodiment vertical view that the utlity model has the continuous vacuum atmosphere sintering furnace of outer conveying device.
Description of reference numerals
1 first body of heater
10 heating components, 11 gas displacement devices
2 first exchange systems
20 first gas-tight doors, 21 second gas-tight doors
23 second switch rooms, 22 first switch rooms
24 first gearshifts, 25 second gearshifts
26 gas displacement devices, 27 triple motion devices
3 second bodies of heater
31 cooling zones, 30 sintering zones
32 heat-resisting material 33 heating components
34 cooling devices, 35 atmosphere gas feedwaies
4 conveying devices
5 outlet of still exchange systems
50 first gas-tight doors, 51 second gas-tight doors
52 switch rooms, 53,54 gearshifts
55 gas displacement devices
6 stoves inlet exchange system
60 first gas-tight doors, 61 second gas-tight doors
62 switch rooms, 63 first gearshifts
64 second gearshifts
65 gas displacement devices
7 outer conveying devices
The specific embodiment
For realizing the technological means of the aforementioned purpose of the utility model, enumerate embodiment, and the conjunction with figs. explanation as after, the effect that can understand structure of the present utility model, feature more and be reached.
At first, see also shown in Figure 1ly, the utility model mainly includes as seen from the figure:
First body of heater 1 sees also shown in Figure 2ly, is divided into the vacuum degreasing district according to process island, and it is provided with the required heating component 10 of technology (as the degreasing program);
Second body of heater 3, be closed, be divided into sintering zone 30 and cooling zone 31, have heat-resisting material 32 in the sintering zone 30 and look the temperature required heating component of sintering program 33 (seeing also Fig. 2) according to process island, cooling zone 31 is provided with cooling device 34 (seeing also Fig. 3), and is provided with atmosphere gas feedway 35;
Conveying device 4 is located at first body of heater 1 and second body of heater, 3 outsides, and links the outlet of still exchange system 5 of first body of heater 1 and second body of heater 3 respectively, with the delivery platform as to be sintered carrier of placement;
Outlet of still exchange system 5 is located at second body of heater, 3 ports of export, and it has first gas-tight door 50 and second gas-tight door, 51, the first gas- tight doors 50 and 51 of second gas-tight doors and forms switch room 52, and switch room 52 is provided with gearshift 53,54, and is provided with gas displacement device 55.
The enforcement of present embodiment: send into first body of heater 1 by conveying device 4 for to be sintered, this moment, first gas-tight door 20 and second gas-tight door 21 were for closing, and begin to carry out preheating degreasing program, treat that preheating degreasing program finishes, first gas-tight door 20 is opened (because when preheating degreasing program is carried out, first gas-tight door 20 is for cutting out, so the waste gas that this program produces can not enter in first switch room 22), first gearshift 24 of first exchange system 2 is sent into place, 22 location, first switch room with electronic component to be sintered by first body of heater 1, and close first gas-tight door 20, gas displacement device 26 work of first exchange system 2, vacuumize earlier send into again atmosphere gas make first switch room 22 and second switch room 23 reach with the 3 same settings pressure balances of second body of heater after, open second gas-tight door 21, second gearshift 25 will be sent into 23 location, second switch room by first switch room 22 through to be sintered that the degreasing program is finished and locate, close second gas-tight door 21, triple motion device 27 is sent into second body of heater 3 with to be sintered by second switch room 23, behind first switch room 22 and second switch room 23, just be admitted to second body of heater 3 from first body of heater 1 owing to be sintered, and has the isolated setting of first gas-tight door 20 between this first body of heater 1 and first switch room 22, the isolated setting that has second gas-tight door 21 between first switch room 22 and second switch room 23, utilize closing of twice gas-tight door, cooperate gas displacement device 26 to adjust the balance of two switch room's pressure atmospheres, can carry out the sintering program under the furnace atmosphere environment not changing, thereby improve to be sintered quality, to be sintered of this moment is carried out sintering and cooling programs at second body of heater 3, when sintering and cooling program are finished, gearshift 53 work of outlet of still exchange system 5, open first gas-tight door 50 earlier, the element that gearshift 53 is finished sintering is sent into switch room 52 by second body of heater 3, close first gas-tight door 50 this moment, and open second gas-tight door 51, start bit moving device 54 is sent element to output device 4 by switch room 52, and close second gas- tight door 51,55 work of gas displacement device, start vacuum exhaust and reach setting vacuum, and send into atmosphere gas and reach the setting pressure balance, wait pending next procedure operation.
Present embodiment has the switch room's design that utilizes the sealing of twice gas-tight door by first exchange system 2 and outlet of still exchange system 5, when changing body of heater because of program, can avoid stove outer air and preceding program body of heater technology waste gas to sneak in the program body of heater of back, so as to keeping atmosphere consistent in each body of heater, therefore can improve the effect of element sintering quality, compare with known net belt type, also can effectively reduce the atmosphere gas use amount.The preheating degreasing program of the utility model first body of heater 1 can heat the degreasing program with wait for that as passive device such as heat pipe or powder metallurgy remaining oxygen is carried out between oxide-film on the sintered part inner surface and metal powder and metal powder under aerobic environment, and discharge fully, send into second body of heater 3 again, import atmosphere gas and carry out malleation atmosphere sintering program, passive device or powder metallurgy wait sintered parts such as heat pipe that sintering like this is finished, because oxygen remaining between the lip-deep oxide-film of metal powder and metal powder and metal powder is discharged when the degreasing program fully, more can effectively promote passive device such as heat pipe or powder metallurgy and wait for the quality of sintered part sintering, so reach the utility model purpose of design, can be rated as the creation of a practicality.
Another embodiment of the present utility model sees also shown in Figure 4, first body of heater 1 is a closed, be provided with gas displacement device 11 and be provided with stove inlet exchange system 6 at first body of heater 1 at arrival end, this stove inlet exchange system 6 has first gas-tight door 60 and second gas-tight door 61, form switch room 62 between first gas-tight door 60 and second gas-tight door 61, switch room 62 is provided with first gearshift 63 and second gearshift 64, and is provided with gas displacement device 65, so that first body of heater 1 is constituted closed.The enforcement of present embodiment: before electronic building brick to be sintered is sent to first body of heater 1, first gas-tight door 60 of stove inlet exchange system 6 and second gas-tight door 61 are for closing, when electronic building brick to be sintered enters switch room 62 by conveying device 4, stove inlet exchange system 6 is opened first gas-tight door 60, first gearshift 63 moves into place, 62 location, switch room with electronic building brick to be sintered by conveying device 4, close first gas-tight door 60 again, 65 work of gas displacement this moment device, after sending into atmosphere gas and making switch room 62 reach the setting pressure balance, open second gas-tight door 61, after making second gearshift 64 that electronic building brick to be sintered is pushed first body of heater, 1 interior location, second gearshift 64 is return the home position, and closes second gas-tight door, 61, the first bodies of heater, 1 beginning preheating vacuum degreasing program, thereafter program is identical with preceding embodiment, repeats no more.
Present embodiment has switch room's 62 designs of sealing by stove inlet exchange system 6, can avoid the stove outer air to sneak in first body of heater 1, so as to keeping first body of heater, 1 inner consistent atmosphere, compare the effect that more can improve the electronic building brick sintering quality with preceding embodiment, and present embodiment utilizes aforementioned gas displacement device 11 earlier first body of heater 1 to be vacuumized, to carry out heating in vacuum, with will as in the electronic building bricks to be sintered such as heat pipe between the lip-deep oxide-film of copper powder to be sintered and copper powder and the copper powder remaining oxygen under vacuum environment, carry out heating in vacuum degreasing program, thereby discharge fully, send into second body of heater 3 again, import atmosphere gas and carry out malleation atmosphere sintering program, passive device or powder metallurgy wait sintered parts such as heat pipe that sintering like this is finished, because oxygen remaining between the lip-deep oxide-film of metal powder and metal powder and metal powder is discharged when the degreasing program fully, more can effectively promote the quality of heat pipe sintering.
Please consult shown in Figure 5 again, the utility model is located at first body of heater 1 and second body of heater, 3 outsides and is linked first body of heater 1 and the conveying device of the stove of second body of heater, 3 both sides inlet exchange system 6 and outlet of still exchange system 54 links outer conveying device 7 is arranged, and outer conveying device 7 can realize the continuous and automatic operation.
The above, only being the preferable possible embodiments of the utility model, is not in order to limit scope of the present utility model, as long as be familiar with the personage of this skill, the equivalent structure that utilization the utility model specification and claims are done changes, and ought to be included in the claim of the present utility model.
Claims (3)
1, a kind of continuous vacuum atmosphere sintering furnace is characterized in that, includes:
First body of heater, it is provided with the required heating component of processing technology;
Second body of heater, it is a closed, is divided into sintering zone and cooling zone according to process island, has heat-resisting material and heating component in this sintering zone, this cooling zone is provided with cooling device, and is provided with the atmosphere gas feedway;
First exchange system, it links this first body of heater and second body of heater, it has first gas-tight door and second gas-tight door, form first switch room between this first gas-tight door and this second gas-tight door, form second switch room between this second gas-tight door and second body of heater, this first switch room is provided with first gearshift and second gearshift, and this second switch room is provided with the triple motion device, and is provided with the gas displacement device;
The outlet of still exchange system, it is located at this second body of heater port of export, and it has first gas-tight door and second gas-tight door, forms the switch room between this first gas-tight door and this second gas-tight door, and this switch room is provided with gearshift, and is provided with the gas displacement device;
Conveying device, it is located at this first body of heater and this second body of heater outside, and links the outlet of still exchange system of this first body of heater and this second body of heater respectively, and this conveying device is placed the delivery platform of to be sintered carrier.
2, continuous vacuum atmosphere sintering furnace as claimed in claim 1, it is characterized in that, described first body of heater is a closed, it is provided with the gas displacement device, and stove inlet exchange system is set at arrival end, this stove inlet exchange system has first gas-tight door and second gas-tight door, forms the switch room between this first gas-tight door and this second gas-tight door, and this switch room is provided with first gearshift and second gearshift.
3, continuous vacuum atmosphere sintering furnace as claimed in claim 2, it is characterized in that, describedly be located at first body of heater and the second body of heater outside and link first body of heater and the conveying device of the stove of second body of heater both sides inlet exchange system and outlet of still exchange system links the outer conveying device that can realize the continuous and automatic operation is arranged.
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CNU2008201335695U CN201327292Y (en) | 2008-09-12 | 2008-09-12 | Continuous-type vacuum-atmosphere sintering furnace |
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CNU2008201335695U CN201327292Y (en) | 2008-09-12 | 2008-09-12 | Continuous-type vacuum-atmosphere sintering furnace |
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CN102589282A (en) * | 2012-03-05 | 2012-07-18 | 南京深宁磁电有限公司 | Device for sintering magnetic material |
WO2014071708A1 (en) * | 2012-11-08 | 2014-05-15 | 沈阳中北通磁科技股份有限公司 | Technological process for continuously sintering rare earth permanently magnetic alloy and sintering equipment therefor |
CN103801688A (en) * | 2012-11-08 | 2014-05-21 | 沈阳中北真空科技有限公司 | Rare earth permanent magnetic alloy continuous sintering equipment |
CN103868350A (en) * | 2014-03-25 | 2014-06-18 | 宁夏日晶新能源装备股份有限公司 | Semiconductor target sintering device and method |
CN105016740A (en) * | 2015-07-24 | 2015-11-04 | 深圳市亿达光电技术有限公司 | Preparation method for ceramic ferrule and degreasing sintering furnace |
CN105783514A (en) * | 2016-04-27 | 2016-07-20 | 苏州汇科机电设备有限公司 | Glue discharging and sintering combined furnace for sintering electronic elements |
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CN102589282B (en) * | 2012-03-05 | 2013-07-31 | 南京深宁磁电有限公司 | Device for sintering magnetic material |
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