WO2014067177A1 - 一种搬运卡匣的装置及方法 - Google Patents

一种搬运卡匣的装置及方法 Download PDF

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Publication number
WO2014067177A1
WO2014067177A1 PCT/CN2012/084711 CN2012084711W WO2014067177A1 WO 2014067177 A1 WO2014067177 A1 WO 2014067177A1 CN 2012084711 W CN2012084711 W CN 2012084711W WO 2014067177 A1 WO2014067177 A1 WO 2014067177A1
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WIPO (PCT)
Prior art keywords
cassette
processing port
transport
port
empty
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PCT/CN2012/084711
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English (en)
French (fr)
Inventor
陈增宏
吴俊豪
林昆贤
齐明虎
郭振华
杨卫兵
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深圳市华星光电技术有限公司
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US13/701,538 priority Critical patent/US20140119873A1/en
Publication of WO2014067177A1 publication Critical patent/WO2014067177A1/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Definitions

  • the present invention relates to the field of manufacturing liquid crystal panels, and more particularly to an apparatus and method for carrying cassettes.
  • the stacker is transported to the load port 41 (Load Port), and each of the load processing ports 41 corresponds to a conveyor 5 (conveyer, CV) connected to the process machine (EQ) at the loading port.
  • a conveyor 5 Conveyer, CV
  • EQ process machine
  • Fig. 2 a schematic diagram of the conventional automatic storage rejection transport system carrying cassette is shown.
  • the warehouse rejecting stacker (Crane) transports the first "" ⁇ CST1, the second CST2 loaded with the glass substrate to the loading processing port 1 and the loading processing port 2;
  • the glass substrate is taken out from the CST1 and CST2 by the sizing device in the loading processing port, and the glass substrate flows out from the loading processing port 1 and the loading processing port 2, respectively, and is transported to the process machine (EQ) via the carrier device (CV). Complete the corresponding process;
  • the glass substrate that has completed the corresponding process needs to flow into the unloading processing port 3 and the unloading processing port 4 via the conveying device (CV), respectively, through the unloading processing port 3, and the sizing device in the unloading processing port 4,
  • the glass substrate is replaced with CST3 and CST4.
  • CST3 and CST4 Prior to this, it is necessary to carry the empty CST3, CST4 to the unloading processing port 3 and the unloading processing port 4 by the stacker.
  • the stacker needs to transport the empty CST1, CST2 3 ⁇ 4 to the unloading processing port 3, and the unloading processing port 4 for storing the next batch of glass substrates.
  • the stacker needs to be transported twice during each glass flow process, in which the first transport is to transport the CST to the loading and processing port, and the second transport is to empty the CST. ⁇ Organized to the unloading processing port. Due to the large number of loading and processing ports and unloading processing ports installed in the warehouse rejection, the stacking machine is often overloaded and exceeds its maximum handling capacity, which causes the CST to be unloaded and affects the production capacity.
  • the technical problem to be solved by the present invention is to provide an apparatus and method for transporting cassettes, which can reduce the number of times of stacking and increase productivity.
  • an aspect of an embodiment of the present invention provides a device for carrying a cassette for transporting a cassette between a stacker, a load processing port, and an unloading processing port, including:
  • a general port area disposed at a front portion of the loading processing port and the unloading processing port, the general port area including at least two rows of port openings, wherein the number of the port openings in each row of the port and the loading port and the unloading The total number of processing ports corresponds;
  • a horizontal transport mechanism disposed on each of the transport ports, for transporting the cassettes horizontally between the respective transport ports of the current row;
  • the vertical transport mechanism is disposed on the adjacent transport port for vertically transporting the cassette between the transport ports of the adjacent rows;
  • control device for controlling the vertical transport mechanism or/and the horizontal transport mechanism, transporting the cassette storing the glass substrate received from the stacker to the loading port, or transporting the empty cassette at the loading port Transfer to the predetermined unloading processing port, or transfer the cassette containing the glass substrate at the unloading processing port to the stacker.
  • the at least one transport port of the front section of the unloading processing port is configured as a cassette buffer for receiving the empty cassette from the loading processing port when the predetermined unloading processing port currently stores the cassette .
  • a detection sensor is installed in the loading processing port, the unloading processing port, and the cassette buffer to detect whether a cassette is currently stored.
  • control device is further configured to control the vertical transport mechanism or/and the horizontal transport mechanism to store the card in the cassette after the detecting sensor detects that the cassette stored in the predetermined unloading processing port is removed An empty cassette of the buffer is transferred to the predetermined unloading processing port.
  • the storage device stores a pre-designed route including a cassette in which the glass substrate is stored and transported to the loading and processing port, transporting the empty cassette from the loading processing port to a predetermined unloading processing port, and loading the empty cassette from the loading process. Carrying the port to the cassette buffer, transporting the empty cassette from the cassette buffer to the predetermined unloading processing port, and transferring the cassette from the unloading processing port to the stacker;
  • the control device stores the pre-designed route according to the storage device, drives the vertical moving mechanism or the horizontal moving mechanism, and carries the cassette or the empty cassette.
  • a method of transporting a cassette including the following steps:
  • a loading processing port that conveys a cassette for storing a glass substrate received from the stacker by a vertical transport mechanism
  • the empty cassette is transported to a predetermined unloading processing port by a vertical transport mechanism or a horizontal transport mechanism.
  • the cassette loaded into the glass substrate is transferred to the stacker by a vertical moving mechanism or a horizontal moving mechanism.
  • the step of transporting the empty unloading processing port to the predetermined unloading processing port further includes: detecting whether the predetermined unloading processing port currently stores a cassette;
  • the empty card H is transported to a cassette buffer, and after detecting that the cassette in the predetermined unloading processing port is removed, the Carrying an empty cassette from the cassette buffer to the predetermined unloading processing port;
  • the step of transporting the empty card 11 to a predetermined unloading processing port is specifically: pre-designing to transport the empty cassette from the loading processing port to a predetermined unloading processing port, and emptying the empty card a route in which the loading port is transported to the cassette buffer, and the empty cassette is transported from the cassette buffer to the predetermined unloading processing port;
  • the vertical moving mechanism or the horizontal moving mechanism is driven to transport the empty cassette to a predetermined unloading processing port.
  • the step of transferring the cassette that has been placed in the glass substrate to the stacker is specifically: pre-designing a route for transferring the cassette from the unloading processing port to the stacker;
  • the vertical movement mechanism or the horizontal movement mechanism is driven according to the pre-designed route to transfer the card 11 to the stacker.
  • the empty cassette is transported from the loading and processing port to the predetermined unloading processing port, eliminating the need for the stacker to participate, greatly reducing the amount of storage and rejection of the stacker, effectively Solve the excessive bottleneck of the existing warehouse refused stacker and increase the production capacity; directly adopt the vertical transport mechanism or/and the horizontal transport mechanism to carry the empty cassette from the loading and processing port to the predetermined unloading processing according to the predetermined route. Mouth, improving handling efficiency;
  • the empty cassette can be registered in the cassette buffer, which can effectively adjust the cassette transmission amount and reduce the Tact time of the cassette movement, thereby increasing the productivity.
  • Figure 1 shows a schematic diagram of an existing automated material handling system
  • FIG. 2 is a schematic view showing a conventional automatic storage and rejection transport system carrying cassette
  • FIG. 3 is a schematic view showing an embodiment of the present invention
  • Figure 4 is a schematic view showing the vertical transport of the cassette in the handling area in one embodiment of the cassette handling device of the present invention
  • Figure 5 is a schematic view showing the horizontal handling of the cassette in the handling area in an embodiment of the cassette handling device of the present invention
  • Figure 6 is a schematic view showing the line of the carrying cassette in one embodiment of the method of carrying the cassette of the present invention. Figure.
  • FIG. 3 it is a schematic diagram of an apparatus for carrying a cassette in the embodiment of the present invention; the apparatus for carrying a cassette of the present invention, which is used for a stacker, a loading processing port and an unloading processing port in a storage rejection Handling card, which includes:
  • a port area 7 disposed at a front portion of the loading processing port and the unloading processing port, the port area 7 including at least two rows of port openings, wherein the number of the port openings in each row of the port and the loading port and The total number of unloading processing ports corresponds, and one of the rows of 3 ⁇ 4 ports is adjacent to the loading and unloading ports.
  • a handling port area having two rows, each having four handling ports, is shown, i.e. including an operating port 1 to an operating port 4 in the first row, and an operating port 5 to the operation in the second row.
  • Port 8 it is easy to understand that this is only an example;
  • a horizontal transport mechanism disposed on each of the transport ports, for transporting the cassettes horizontally between the respective transport ports of the current row;
  • the vertical transport mechanism is disposed on the adjacent transport port for vertically transporting the cassette between the transport ports of the adjacent rows;
  • control device for controlling the vertical transport mechanism or/and the horizontal transport mechanism, transporting the cassette storing the glass substrate received from the stacker to the loading port, or transporting the empty cassette at the loading port Transferring the predetermined storage opening, or transferring the cassette storing the glass substrate at the unloading processing port to the stacker.
  • control device may be, for example, an industrial computer, a programmable logic device PLC or the like. A device that controls the ability.
  • the at least one transport port of the front section of the unloading processing port is configured as a cassette buffer for receiving the empty cassette from the loading processing port when the predetermined unloading processing port currently stores the cassette .
  • the operation port 3 is set as a cassette buffer, and it can be understood that a plurality of operation ports can be set as cassette buffers as needed.
  • the cassette buffer is preferably disposed in an operation port away from the loading processing port or the unloading processing port, that is, not disposed in an operation port adjacent to the loading processing port or the unloading processing port. Card buffer.
  • a detection sensor is mounted on the loading and processing port, the unloading processing port, and the cassette buffer for detecting whether or not a cassette is currently stored in these areas. After detecting that the cassette stored in the predetermined unloading processing port is removed, the control device also controls driving the vertical moving mechanism or the horizontal moving mechanism to empty the buffer in the buffer buffer. The cassette is transferred to the predetermined unloading processing port.
  • the storage device stores a pre-designed route including a cassette in which the glass substrate is stored and transported to the loading and processing port, transporting the empty cassette from the loading processing port to a predetermined unloading processing port, and loading the empty cassette from the loading process. Carrying the port to the cassette buffer, transporting the empty cassette from the cassette buffer to the predetermined unloading processing port, and transferring the cassette from the unloading processing port to the stacker;
  • the control device stores the pre-designed route according to the storage device, drives the vertical moving mechanism or the horizontal moving mechanism, and carries the cassette or the empty cassette.
  • FIG. 4 a schematic diagram of the vertical transport of the cassette in the general port area in the embodiment of the present invention is shown; by the vertical transport mechanism, the cassettes can be vertically transported between the transport ports of the adjacent rows, 4 shows that the CST1 is vertically transported from the operation port 1 to the operation port 5, and similarly, the CST1 can be transported from the operation port 5 to the operation port 1; likewise, the operation of the cassette at the operation port 1 can be performed by the vertical conveyance mechanism.
  • the port 6 is vertically conveyed between the operation port 7 of the operation port 3 and the operation port 8 of the operation port 4.
  • FIG. 5 a schematic diagram of a horizontally-operated card in a general port area in the embodiment of the present invention is shown; by means of a horizontal carrying mechanism, the cassettes can be horizontally transported between the carrying ports of the same row,
  • the cassette is horizontally transported from the operation port 5 to the operation port 8. Similarly, the cassette can be transported horizontally from the operation port 8 to the operation port 5; likewise, the cassette can be clamped to the operation port 1 by the horizontal transfer mechanism. Horizontal operation between the operation port 2, the operation port 3 and the operation port 4.
  • FIG. 6 it is a schematic diagram of a line for carrying a cassette in one embodiment of the method of carrying a cassette of the present invention.
  • a detailed flow chart of the method of carrying the cassette of the present invention will be further described below with reference to FIG.
  • the transportation process of the first "" ⁇ ⁇ CST1 and the second ⁇ CST2 is indicated by a solid line and a broken line, respectively.
  • the following description will be made by taking the first "" ⁇ ⁇ CST1 as an example.
  • the warehouse rejects the stacker (Crane) and transports the first "" ⁇ CST1 with the glass substrate to the 3 ⁇ 4 port 1;
  • the unloading processing port corresponding to the first "" ⁇ ⁇ CST1 is the unloading processing port 3, and the process specifically includes: pre-designing to transport the empty cassette from the loading processing port to a predetermined unloading processing port, and loading the empty cassette from the loading process The port is transported to the cassette buffer, and the empty cassette is transported from the cassette buffer to the predetermined unloading processing port;
  • the vertical moving mechanism or the horizontal moving mechanism is driven to transport the empty cassette to a predetermined unloading processing port.
  • the method further includes:
  • the empty card H is transported to a cassette buffer, and after detecting that the cassette in the predetermined unloading processing port is removed, the Carrying an empty cassette from the cassette buffer to the predetermined unloading processing port;
  • the port 3 is used as a cassette buffer, and a jam is temporarily stored in the unloading port 3 during transportation. Therefore, in Fig. 6, the first "" ⁇ CST1 glass substrate is taken out of the empty cassette, first transported through the vertical 3 ⁇ 4 transport mechanism 3 ⁇ 4 to the 3 ⁇ 4 port 5, and then transported to the port 7 by a horizontal mechanism. Then, it is transported to the cassette buffer by the vertical transport mechanism, and after detecting that the cassette in the unloading processing port 3 is removed, it is then transported to the predetermined unloading processing port 3 by the vertical transport device.
  • the cassette that has been placed in the glass substrate is transferred to the glass substrate by the vertical moving mechanism or the horizontal moving mechanism.
  • the stacker in particular, is transported to the transport port 7 by a vertical transport mechanism 3, and then transported to the transport port 8 by a horizontal transport mechanism, and then transported to the transport port 4 by a vertical transport mechanism, waiting for the stacker to be transported to the corresponding The warehouse refused.
  • CTS1 and CTS2 transportation routes are merely examples, and various different routes can be preset for each card according to a specific application.
  • a preset route may be stored, and the vertical transport mechanism is driven by a control device such as an industrial computer.
  • the level mechanism controls the route to carry the corresponding cassette.
  • the empty cassette is transported from the loading and processing port to the predetermined unloading processing port, eliminating the need for the stacker to participate, greatly reducing the amount of storage and rejection of the stacker, effectively Solve the excessive bottleneck of the existing warehouse refused stacker and increase the production capacity; directly adopt the vertical transport mechanism or/and the horizontal transport mechanism to carry the empty cassette from the loading and processing port to the predetermined unloading processing according to the predetermined route. Mouth, improving handling efficiency;
  • the empty cassette can be registered in the cassette buffer, which can effectively adjust the cassette transmission amount and reduce the Tact time of the cassette movement, thereby increasing the productivity.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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Abstract

一种搬运卡匣的方法和装置，用于在仓储柜的堆垛机、装载加工口和卸载加工口之间搬运卡匣，其通过在装载加工口和卸载加工口前段设置搬运口区（7），并在搬运口区（7）设置水平搬运机构和垂直搬运机构，将装载加工口处的空卡匣搬运至预定的卸载加工口。该方法和装置可以减少仓储柜中堆垛机的搬运量，有效地解决现有仓储柜中堆垛机搬运量过大的瓶颈，提升产能。

Description

一种搬运卡匣的装置及方法
本申请要求于 2012 年 10 月 31 日提交中国专利局、 申请号为 201210426617.0、 发明名称为 "一种搬运卡匣的装置及方法" 的中国专利申 请的优先权， 上述专利的全部内容通过引用结合在本申请中。 技术领域
本发明涉及本发明涉及液晶面板制造领域， 尤其是涉及一种搬运卡匣的 装置及方法。
背景技术
在液晶面板制造行业中， 玻璃基板分层存储于卡匣（Cassette, CST )之 中， 而 CST存储于各个仓储拒（Stocker ) 中， 全部仓储拒加上相应的搬运 装置 （如堆垛机） 以及控制装置共同构成了一个自动化物料搬运系统 ( Automated Material Handling System, AMHS ), 每个仓储拒中的 CST由堆 垛机（Crane )搬送到各制程机台 （ EQ ) 以完成相应工序。 如图 1所示， 示 出了一个现有的自动化仓储拒搬送系统， 其中示出了两排仓储拒 1 , 在每个 仓储拒 1中至少存放有一个卡匣 2, 所述卡匣 2通过堆垛机搬运至装载加工 口 41 ( Load Port ) 中， 每个装载加工口 41均对应有搬运装置 5 (conveyer, CV), 该搬运装置 5与制程机台 （EQ )相连， 在装载加工口 41旁边设有卸 载加工口 40 ( Unload Port )„
如图 2所示，示出了在现有的自动化仓储拒搬送系统搬运卡匣的示意图。 首先，仓储拒中堆垛机（Crane )分别将装有玻璃基板的第一"" ^匣 CST1、 第二 CST2搬运至装载加工口 1和装载加工口 2;
通过装载加工口中的分片装置将玻璃基板分别从 CST1和 CST2中取出， 该玻璃基板分别从装载加工口 1、 装载加工口 2流出， 经过搬运装置 (CV)传 送至进程机台 （EQ ) 以完成相应制程；
已完成相应制程的玻璃基板需要经由搬运装置 （CV )分别流进卸载加 工口 3、 卸载加工口 4, 通过卸载加工口 3、 卸载加工口 4中的分片装置， 将 玻璃基板装回 CST3、 CST4。 在此之前就需要通过堆垛机将空 CST3、 CST4 搬运至卸载加工口 3和卸载加工口 4处。 等 CST1、 CST2流完玻璃基板变为 空卡匣， 堆垛机又需将空 CST1、 CST2 ¾运至卸载加工口 3、 卸载加工口 4 用于存放下一批玻璃基板。
从这一过程中可以看出， 在每次玻璃流转的过程中， 堆垛机均需要进行 两次搬运， 其中第一次搬运为将 CST搬运至装载加工口， 第二次搬运为将 空 CST ^般运至卸载加工口。 由于仓储拒中搭载的装载加工加工口和卸载加 工口较多， 往往会造成堆垛机搬运量过大， 超过其最大搬运量， 从而造成 CST滞留无法搬运， 影响产能。
发明内容
本发明所要解决的技术问题在于， 提供一种搬运卡匣的装置及方法， 可 以降低堆垛机的搬运次数， 提高产能。
为了解决上述技术问题，本发明的实施例的一方面提供一种搬运卡匣的 装置， 用于在仓储拒的堆垛机、 装载加工口和卸载加工口之间搬运卡匣， 包 括：
设置于所述装载加工口和卸载加工口前段的般运口区，所述般运口区包 括至少两排搬运口， 其中， 每一排搬运口中搬运口的数量与所述装载加工口 和卸载加工口的总数相对应；
水平搬运机构， 设置于每排搬运口上， 用于将卡匣在当前排的各搬运口 之间水平般运；
垂直搬运机构， 设置于相邻排搬运口上， 用于将卡匣在相邻排的搬运口 之间垂直般运；
控制装置，用于控制所述垂直搬运机构或 /和水平搬运机构，将从堆垛机 处接收的存放有玻璃基板的卡匣搬运至装载加工口， 或将装载加工口处的空 卡匣搬运至预定的卸载加工口， 或将卸载加工口处的存放有玻璃基板的卡匣 传送给堆垛机。
其中， 将所述卸载加工口前段的至少一个搬运口设置为卡匣緩沖区， 用 于在所述预定的卸载加工口当前存放有卡匣时，接收所述来自装载加工口处 的空卡匣。 其中， 在所述装载加工口、 卸载加工口、 卡匣緩沖区均安装有检测传感 器， 用于检测当前是否存放有卡匣。
其中，控制装置进一步用于在所述检测传感器检测到所述预定的卸载加 工口所存放的卡匣被移走后 ,控制所述垂直搬运机构或 /和水平搬运机构将所 述存放于卡匣緩沖区的空卡匣传送至所述预定的卸载加工口。
其中， 进一步包括有：
存储装置， 存储有预先设计的路线， 所述路线包括存放有玻璃基板的卡 匣搬运至装载加工口、 将空卡匣从装载加工口搬运至预定的卸载加工口、 将 空卡匣从装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定 的卸载加工口， 将卡匣从卸载加工口传送给堆垛机的路线；
所述控制装置根据所述存储装置存储预先设计的路线，驱动所述垂直搬 动机构或 /水平搬动机构， 搬运所述卡匣或空卡匣。
相应地， 本发明实施例的另一方面， 提供一种搬运卡匣的方法， 包括如 下步骤：
通过垂直搬运机构将从堆垛机处接收的存放有玻璃基板的卡匣搬运至 的装载加工口；
在所述卡匣中的玻璃基板被分片装置取出后，通过垂直搬运机构或 /水平 搬运机构， 将所述空卡匣搬运至预定的卸载加工口。
其中， 进一步包括：
在所述卸载加工口的空卡匣被分片装置重新放入玻璃基板后，通过垂直 搬动机构或 /水平搬动机构， 将所述已放入玻璃基板的卡匣传送给堆垛机。
其中， 所述空卡匣般运至预定的卸载加工口的步骤进一步包括： 检测所述预定的卸载加工口当前是否存放有卡匣；
如果所述预定的卸载加工口当前存放有卡 H , 则将所述空卡 H搬运至一 卡匣緩沖区， 在检测到所述预定的卸载加工口中的卡匣被移走后， 将所述空 卡匣从所述卡匣緩沖区搬运至所述预定的卸载加工口；
否则， 则直接将所述空卡匣搬运至所述预定的卸载加工口。
其中， 所述将所述空卡 11般运至预定的卸载加工口的步骤具体为： 预先设计将空卡匣从装载加工口搬运至预定的卸载加工口、将空卡匣从 装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定的卸载加 工口的路线；
根据所述预先设计的路线，驱动所述垂直搬动机构或 /水平搬动机构，将 所述空卡匣般运至预定的卸载加工口。
其中， 所述将所述已放入玻璃基板的卡匣传送给堆垛机的步骤具体为： 预先设计将卡匣从卸载加工口传送给堆垛机的路线；
根据所述预先设计的路线，驱动所述垂直搬动机构或 /水平搬动机构，将 所述卡 11传送给堆垛机。
实施本发明实施例， 具有如下有益效果：
由于采用了垂直搬运机构或 /和水平搬运机构，将空卡匣从装载加工口搬 运至预定的卸载加工口， 无需堆垛机的参与， 大大减少了仓储拒中堆垛机的 搬运量， 有效地解决现有仓储拒中堆垛机的搬运量过大瓶颈， 提升产能； 直接采用垂直搬运机构或 /和水平搬运机构根据预定的路线，将空卡匣从 装载加工口搬运至预定的卸载加工口， 提高了搬运效率；
通过设置卡匣緩沖区， 可以将空卡匣寄存在卡匣緩沖区， 可以有效地调 节卡匣传送量， 降低卡匣移动的节拍时间 （Tact time ), 从而提升产能。 附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案， 下面将对实 施例或现有技术描述中所需要使用的附图作筒单地介绍， 显而易见地， 下面 描述中的附图仅仅是本发明的一些实施例， 对于本领域普通技术人员来讲， 在不付出创造性劳动的前提下， 还可以根据这些附图获得其他的附图。
图 1示出了现有的一种自动化物料般运系统示意图；
图 2示出了在现有的自动化仓储拒搬送系统搬运卡匣的示意图； 图 3示出了本发明卡匣般运装置一个实施例的示意图；
图 4示出了本发明卡匣搬运装置一个实施例中在搬运口区垂直搬运卡匣 的示意图；
图 5示出了本发明卡匣搬运装置一个实施例中在搬运口区水平搬运卡匣 的示意图；
图 6示出了本发明搬运卡匣的方法的一个实施例中搬运卡匣的线路示意 图。
具体实施方式
下面参考附图对本发明的优选实施例进行描述。
如图 3所示， 是本发明的实施例中一种搬运卡匣的装置的示意图； 本发明的搬运卡匣的装置， 用于在仓储拒的堆垛机、 装载加工口和卸载 加工口之间搬运卡匣， 其包括：
设置于所述装载加工口和卸载加工口前段的般运口区 7, 所述搬运口区 7包括至少两排搬运口， 其中， 每一排搬运口中搬运口的数量与所述装载加 工口和卸载加工口的总数相对应，且其中有一排 ¾运口与装载加工口和卸载 加工口相邻。 在图 2中示出了一个具有两排， 每排具有四个搬运口的搬运口 区， 即在第一排中包括操作口 1至操作口 4, 在第二排中包括操作口 5至操 作口 8, 易于理解的是， 此仅为举例；
水平搬运机构， 设置于每排搬运口上， 用于将卡匣在当前排的各搬运口 之间水平般运；
垂直搬运机构， 设置于相邻排搬运口上， 用于将卡匣在相邻排的搬运口 之间垂直般运；
控制装置，用于控制所述垂直搬运机构或 /和水平搬运机构，将从堆垛机 处接收的存放有玻璃基板的卡匣搬运至装载加工口， 或将装载加工口处的空 卡匣搬运至预定的卸载加工口，或将卸载加工口处的存放有玻璃基板的卡匣 传送给堆垛机， 在具体地实施中， 该控制装置可以是诸如工业电脑、 可编程 逻辑器件 PLC或其他具有控制能力的装置。
其中， 将所述卸载加工口前段的至少一个搬运口设置为卡匣緩沖区， 用 于在所述预定的卸载加工口当前存放有卡匣时，接收所述来自装载加工口处 的空卡匣。 在图 3中， 将操作口 3设置为卡匣緩沖区， 可以理解的是， 根据 需要可以将多个操作口设置为卡匣緩沖区。 在一些实施例中， 最好将所述卡 匣緩沖区设置于远离所述装载加工口或卸载加工口的操作口中， 即在与所述 装载加工口或卸载加工口相邻的操作口中不设置卡匣緩沖区。
在所述装载加工口、 卸载加工口、 卡匣緩沖区均安装有检测传感器， 用 于检测在这些区域中当前是否存放有卡匣。 在检测到所述预定的卸载加工口所存放的卡匣被移走后，控制装置还会 控制驱动所述垂直搬动机构或 /水平搬动机构，将所述存放于卡匣緩沖区的空 卡匣传送至所述预定的卸载加工口。
在该搬运卡匣的装置中， 进一步包括有：
存储装置， 存储有预先设计的路线， 所述路线包括存放有玻璃基板的卡 匣搬运至装载加工口、 将空卡匣从装载加工口搬运至预定的卸载加工口、 将 空卡匣从装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定 的卸载加工口， 将卡匣从卸载加工口传送给堆垛机的路线；
所述控制装置根据所述存储装置存储预先设计的路线，驱动所述垂直搬 动机构或 /水平搬动机构， 搬运所述卡匣或空卡匣。
如图 4所示，示出了本发明实施例中在般运口区垂直般运卡匣的示意图； 通过垂直搬运机构， 可以将卡匣在相邻排的搬运口之间垂直搬运， 在图 4中示出了将 CST1从操作口 1垂直搬运到操作口 5 ,同理也可以将 CST1从 操作口 5搬运至操作口 1 ; 同样， 通过垂直搬运机构可以将卡匣在操作口 1 的操作口 6、 对于操作口 3的操作口 7、 对于操作口 4的操作口 8之间垂直 搬运。
如图 5所示，示出了本发明实施例中在般运口区水平般运卡匣的示意图； 通过水平搬运机构， 可以将卡匣在同一排的搬运口之间水平搬运， 在图
5中示出了将卡匣从操作口 5水平搬运到操作口 8, 同理也可以卡匣从操作 口 8水平搬运到操作口 5; 同样， 通过水平搬运机构可以将卡匣在操作口 1、 操作口 2、 操作口 3和操作口 4之间水平搬运。
如图 6所示，是本发明搬运卡匣的方法的一个实施例中搬运卡匣的线路 示意图。 结合图 6, 下面进一步说明本发明搬运卡匣的方法的详细流程示意 图。
其中， 分别采用实线和虚线表示第一"" ^匣 CST1和第二卡匣 CST2的搬 运过程。 为描述方便， 下述以第一"" ^匣 CST1为例进行说明。
首先， 仓储拒中堆垛机（Crane )将装有玻璃基板的第一"" ^匣 CST1、 搬 运至 ¾运口 1 ;
通过垂直搬运机构将第一"" ^匣 CST1搬运至的装载加工口 1 ; 在所述第一"" ^匣 CST1中的玻璃基板被分片装置取出后， 通过垂直搬运 机构 /水平搬运机构， 将所述空卡匣搬运至预定的卸载加工口， 在图 6中， 所 述第一"" ^匣 CST1对应的卸载加工口为卸载加工口 3 , 该过程具体地包括： 预先设计将空卡匣从装载加工口搬运至预定的卸载加工口、将空卡匣从 装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定的卸载加 工口的路线；
根据所述预先设计的路线，驱动所述垂直搬动机构或 /水平搬动机构，将 所述空卡匣般运至预定的卸载加工口。
具体地， 进一步包括：
检测所述预定的卸载加工口当前是否存放有卡匣；
如果所述预定的卸载加工口当前存放有卡 H , 则将所述空卡 H搬运至一 卡匣緩沖区， 在检测到所述预定的卸载加工口中的卡匣被移走后， 将所述空 卡匣从所述卡匣緩沖区搬运至所述预定的卸载加工口；
否则， 则直接将所述空卡匣搬运至所述预定的卸载加工口。
在图 6中， 搬运口 3作为卡匣緩沖区， 并且在搬运过程中检测到卸载加 工口 3中暂存有卡匣。 故在图 6中， 第一"" ^匣 CST1玻璃基板被取出后的空 卡匣， 首先通过垂直 ¾运机构 ¾运至 ¾运口 5 , 然后通过水平 ¾运机构般运 至搬运口 7, 然后通过垂直搬运机构搬运至卡匣緩沖区， 在检测到卸载加工 口 3中的卡匣被移走后，然后通过垂直般运装置般运至预定的卸载加工口 3。
在卸载加工口 3处，空卡匣被分片装置重新放入经处理后的玻璃基板后， 通过垂直搬动机构或 /水平搬动机构，将所述已放入玻璃基板的卡匣传送给堆 垛机， 具体地， 通过垂直 ¾运机构 ¾运至 ¾运口 7, 然后通过水平 ¾运机构 搬运至搬运口 8, 然后通过垂直搬运机构搬运至搬运口 4, 等待堆垛机搬运 到相应的仓储拒中。
同理， 对 CTS2的搬运可以参见图中的虚线所示， 原理与对 CTS1的搬 运的说明类似， 不再赘述。
可以理解的是， 上述 CTS1和 CTS2的搬运路线仅为举例， 当可根据具 体的运用场合为各卡匣预先设定各种不同的路线。 具体地， 可以将预先设定 的路线进行存储， 通过控制装置（如工业电脑）来驱运所述的垂直搬运机构 或水平机构控制所述路线来搬运相应的卡匣。
实施本发明实施例， 具有如下有益效果：
由于采用了垂直搬运机构或 /和水平搬运机构，将空卡匣从装载加工口搬 运至预定的卸载加工口， 无需堆垛机的参与， 大大减少了仓储拒中堆垛机的 搬运量， 有效地解决现有仓储拒中堆垛机的搬运量过大瓶颈， 提升产能； 直接采用垂直搬运机构或 /和水平搬运机构根据预定的路线，将空卡匣从 装载加工口搬运至预定的卸载加工口， 提高了搬运效率；
通过设置卡匣緩沖区， 可以将空卡匣寄存在卡匣緩沖区， 可以有效地调 节卡匣传送量， 降低卡匣移动的节拍时间 （Tact time ), 从而提升产能。
以上所揭露的仅为本发明较佳实施例而已， 当然不能以此来限定本发明 之权利范围， 因此等同变化， 仍属本发明所涵盖的范围。

Claims

权 利 要 求
1、 一种搬运卡匣的装置， 用于在仓储拒的堆垛机、 装载加工口和卸载 加工口之间搬运卡匣， 其中， 包括：
设置于所述装载加工口和卸载加工口前段的般运口区，所述般运口区包 括至少两排搬运口， 其中， 每一排搬运口中搬运口的数量与所述装载加工口 和卸载加工口的总数相对应；
水平搬运机构， 设置于每排搬运口上， 用于将卡匣在当前排的各搬运口 之间水平般运；
垂直搬运机构， 设置于相邻排搬运口上， 用于将卡匣在相邻排的搬运口 之间垂直般运；
控制装置，用于控制所述垂直搬运机构或 /和水平搬运机构，将从堆垛机 处接收的存放有玻璃基板的卡匣搬运至装载加工口， 或将装载加工口处的空 卡匣搬运至预定的卸载加工口，或将卸载加工口处的存放有玻璃基板的卡匣 传送给堆垛机。
2、 如权利要求 1所述的一种搬运卡匣的装置， 其中， 将所述卸载加工 口前段的至少一个搬运口设置为卡匣緩沖区， 用于在所述预定的卸载加工口 当前存放有卡匣时， 接收所述来自装载加工口处的空卡匣。
3、 如权利要求 2所述的一种搬运卡匣的装置， 其中， 在所述装载加工 口、 卸载加工口、 卡匣緩沖区均安装有检测传感器， 用于检测当前是否存放 有卡匣。
4、 如权利要求 2所述的一种搬运卡匣的装置， 其中， 控制装置进一步 用于在所述检测传感器检测到所述预定的卸载加工口所存放的卡匣被移走 后，控制所述垂直搬运机构或 /和水平搬运机构将所述存放于卡匣緩沖区的空 卡匣传送至所述预定的卸载加工口。
5、 如权利要求 2所述的一种搬运卡匣的装置， 其中， 进一步包括有： 存储装置， 存储有预先设计的路线， 所述路线包括存放有玻璃基板的卡 匣搬运至装载加工口、 将空卡匣从装载加工口搬运至预定的卸载加工口、 将 空卡匣从装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定 的卸载加工口， 将卡匣从卸载加工口传送给堆垛机的路线； 所述控制装置根据所述存储装置存储预先设计的路线，驱动所述重直搬 动机构或 /水平搬动机构， 搬运所述卡匣或空卡匣。
6、 如权利要求 3所述的一种搬运卡匣的装置， 其中， 进一步包括有： 存储装置， 存储有预先设计的路线， 所述路线包括存放有玻璃基板的卡 匣搬运至装载加工口、 将空卡匣从装载加工口搬运至预定的卸载加工口、 将 空卡匣从装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定 的卸载加工口， 将卡匣从卸载加工口传送给堆垛机的路线；
所述控制装置根据所述存储装置存储预先设计的路线，驱动所述重直搬 动机构或 /水平搬动机构， 搬运所述卡匣或空卡匣。
7、 如权利要求 4所述的一种搬运卡匣的装置， 其中， 进一步包括有： 存储装置， 存储有预先设计的路线， 所述路线包括存放有玻璃基板的卡 匣搬运至装载加工口、 将空卡匣从装载加工口搬运至预定的卸载加工口、 将 空卡匣从装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定 的卸载加工口， 将卡匣从卸载加工口传送给堆垛机的路线；
所述控制装置根据所述存储装置存储预先设计的路线，驱动所述重直搬 动机构或 /水平搬动机构， 搬运所述卡匣或空卡匣。
8、 一种般运卡匣的方法， 其中， 包括如下步骤：
通过垂直搬运机构将从堆垛机处接收的存放有玻璃基板的卡匣搬运至 的装载加工口；
在所述卡匣中的玻璃基板被分片装置取出后，通过垂直搬运机构或 /水平 搬运机构， 将所述空卡匣搬运至预定的卸载加工口。
9、 如权利要求 8所述的一种搬运卡匣的方法， 其中， 进一步包括： 在所述卸载加工口的空卡匣被分片装置重新放入玻璃基板后，通过重直 搬动机构或 /水平搬动机构， 将所述已放入玻璃基板的卡匣传送给堆垛机。
10、 如权利要求 9所述的一种搬运卡匣的方法， 其中， 所述空卡匣搬运 至预定的卸载加工口的步骤进一步包括：
检测所述预定的卸载加工口当前是否存放有卡匣；
如果所述预定的卸载加工口当前存放有卡 H , 则将所述空卡 H搬运至一 卡匣緩沖区， 在检测到所述预定的卸载加工口中的卡匣被移走后， 将所述空 卡匣从所述卡匣緩沖区搬运至所述预定的卸载加工口；
否则， 则直接将所述空卡匣搬运至所述预定的卸载加工口。
11、 如权利要求 10所述的一种搬运卡匣的方法， 其中， 所述将所述空 卡匣 ¾运至预定的卸载加工口的步骤具体为：
预先设计将空卡匣从装载加工口搬运至预定的卸载加工口、将空卡匣从 装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定的卸载加 工口的路线；
根据所述预先设计的路线，驱动所述重直搬动机构或 /水平搬动机构，将 所述空卡匣般运至预定的卸载加工口。
12、 如权利要求 10所述的一种搬运卡匣的方法， 其中， 所述将所述已 放入玻璃基板的卡匣传送给堆垛机的步骤具体为：
预先设计将卡匣从卸载加工口传送给堆垛机的路线；
根据所述预先设计的路线，驱动所述重直搬动机构或 /水平搬动机构，将 所述卡 11传送给堆垛机。
13、 一种般运卡匣的方法， 其中， 包括如下步骤：
通过垂直搬运机构将从堆垛机处接收的存放有玻璃基板的卡匣搬运至 的装载加工口；
在所述卡匣中的玻璃基板被分片装置取出后，通过垂直搬运机构或 /水平 搬运机构， 将所述空卡匣搬运至预定的卸载加工口；
在所述卸载加工口的空卡匣被分片装置重新放入玻璃基板后，通过重直 搬动机构或 /水平搬动机构， 将所述已放入玻璃基板的卡匣传送给堆垛机。
14、 如权利要求 13所述的一种搬运卡匣的方法， 其中， 所述空卡匣搬 运至预定的卸载加工口的步骤进一步包括：
检测所述预定的卸载加工口当前是否存放有卡匣；
如果所述预定的卸载加工口当前存放有卡 H , 则将所述空卡 H搬运至一 卡匣緩沖区， 在检测到所述预定的卸载加工口中的卡匣被移走后， 将所述空 卡匣从所述卡匣緩沖区搬运至所述预定的卸载加工口；
否则， 则直接将所述空卡匣搬运至所述预定的卸载加工口。
15、 如权利要求 14所述的一种搬运卡匣的方法， 其中， 所述将所述空 卡匣 ¾运至预定的卸载加工口的步骤具体为：
预先设计将空卡匣从装载加工口搬运至预定的卸载加工口、将空卡匣从 装载加工口搬运至卡匣緩沖区、将空卡匣从卡匣緩沖区搬运至预定的卸载加 工口的路线；
根据所述预先设计的路线，驱动所述重直搬动机构或 /水平搬动机构，将 所述空卡匣般运至预定的卸载加工口。
16、 如权利要求 15所述的一种搬运卡匣的方法， 其中， 所述将所述已 放入玻璃基板的卡匣传送给堆垛机的步骤具体为：
预先设计将卡匣从卸载加工口传送给堆垛机的路线；
根据所述预先设计的路线，驱动所述重直搬动机构或 /水平搬动机构，将 所述卡 11传送给堆垛机。
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