WO2014057589A1 - Dispositif de presse à axe multiple, et dispositif d'impression mettant en œuvre celui-ci - Google Patents

Dispositif de presse à axe multiple, et dispositif d'impression mettant en œuvre celui-ci Download PDF

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Publication number
WO2014057589A1
WO2014057589A1 PCT/JP2012/076545 JP2012076545W WO2014057589A1 WO 2014057589 A1 WO2014057589 A1 WO 2014057589A1 JP 2012076545 W JP2012076545 W JP 2012076545W WO 2014057589 A1 WO2014057589 A1 WO 2014057589A1
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WIPO (PCT)
Prior art keywords
load
movement control
drive shaft
drive shafts
drive
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PCT/JP2012/076545
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English (en)
Japanese (ja)
Inventor
正治 長谷川
渚 神谷
治則 岡
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アイトリックス株式会社
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Priority to PCT/JP2012/076545 priority Critical patent/WO2014057589A1/fr
Publication of WO2014057589A1 publication Critical patent/WO2014057589A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/16—Control arrangements for fluid-driven presses
    • B30B15/22—Control arrangements for fluid-driven presses controlling the degree of pressure applied by the ram during the pressing stroke
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/28—Arrangements for preventing distortion of, or damage to, presses or parts thereof
    • B30B15/281—Arrangements for preventing distortion of, or damage to, presses or parts thereof overload limiting devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing

Definitions

  • the present invention relates to a multi-axis press device that drives a slide, a ram, a table, or the like by a plurality of drive shafts, and more particularly to a multi-axis press device that controls each drive shaft independently and an imprint device using the multi-axis press device.
  • servo-driven multi-axis press devices such as a press device and a press brake device for driving a slide, a ram, a table or the like with a plurality of servo shafts to form or bend a workpiece such as a plate material are known.
  • the same target position is set for each drive shaft so that the pressing member such as a slide, a ram, or a table can be moved up and down substantially horizontally according to the processing type and the work type.
  • Each drive shaft is synchronously controlled by commanding. In this case, for example, when the target position and the actual workpiece position are misaligned due to a mistake in the mold installation, or when the bending position is biased to one of the multiple servo axes, the load is only applied to one of the drive shafts. When the load is applied, the shaft that is not overloaded is driven based on the same target position, so that an inclination such as a ram occurs.
  • one of a plurality of drive axes is preliminarily distinguished as a master axis, and the other axes are preliminarily distinguished as slave axes, and at the time of machining, the master axis reduces the deviation value between the position feedback value and a predetermined target position.
  • the slave axis Positioning to the target position by control, the slave axis is positioned by following the position feedback value of the master axis, and the load axis (in this case, the master axis) is overloaded and the position deviation from the target position Even if becomes larger, the no-load axis (in this case, the slave axis) is positioned at the same position as the current position of the load axis, so that the position accuracy of multiple servo axes can be kept high, and the inclination of the ram or table is prevented. There is something that can be done (for example, see Patent Document 1).
  • the above-described press apparatus is also used, for example, in a nanoimprint apparatus that transfers a nano-level fine concavo-convex structure pattern on a mold surface as a mold to a workpiece.
  • a position error at the nano level greatly affects the transfer result.
  • FIG. 6 showing the configuration in Patent Document 1, when the workpiece 210 is not parallel (FIG. 6A), the deviation of the master shaft 205 is pressed in parallel while feeding back the deviation of the master shaft 205 by the control method described above. (FIG.
  • the present invention has been made paying attention to such problems, and an object thereof is to provide a multi-axis press device that prevents an overload on a drive shaft and an imprint device using the same. To do.
  • the multi-axis press apparatus of the present invention is In a multi-axis press device that drives a pressing member by a plurality of drive shafts, Load detecting means for detecting the load of each drive shaft of the plurality of drive shafts; Load movement control means for performing movement control of the drive shaft for each drive shaft based on the load of the drive shaft detected by the load detection means and the target load of the drive shaft.
  • the load detection unit detects the load of each drive shaft of the plurality of drive shafts
  • the load movement control unit detects the load of the drive shaft detected by the load detection unit and the load of the drive shaft. Based on the target load, movement control of the drive shaft can be performed for each drive shaft.
  • the multi-axis press apparatus can control the movement of the drive shaft so that the target load is obtained in each drive shaft, and can apply a desired pressure to each drive shaft. For example, even when a certain drive shaft has reached the target position and other drive shafts have not reached the target position, the actual load is detected by the load detection means for each drive shaft and the position of the drive shaft is controlled. Therefore, even if only a certain drive shaft comes into contact with the workpiece, an unbalanced load is not applied, and it is possible to prevent a failure due to a mold breakage or shaft overload. Also, for example, when applying uniform pressure with a nanoimprinting device, etc., if the target load is specified to be the same, it is possible to apply uniform pressure to each drive shaft, so the pattern can be applied to the workpiece. Can be faithfully reproduced.
  • Position detecting means for detecting the position of each drive shaft of the plurality of drive shafts;
  • a position movement control means for performing movement control of the drive shaft for each drive axis based on the position of the drive shaft detected by the position detection means and the target position of the drive shaft;
  • the movement control by the load movement control means is performed when the movement control by the position movement control means satisfies a predetermined condition.
  • the position detection unit detects the position of each drive shaft of the plurality of drive shafts
  • the position movement control unit detects the position of the drive shaft detected by the position detection unit and the drive shaft.
  • the movement control of the drive shaft is performed for each drive shaft based on the target position, and the movement control by the load movement control means is performed when the movement control by the position movement control means satisfies a predetermined condition.
  • the position movement control means performs the movement control of the drive shaft according to the position of the drive shaft detected by the position detection means, and then the movement control by the position movement control means satisfies a predetermined condition.
  • the control is performed by switching from the movement control by the position movement control means to the movement control by the load movement control means. For example, even when a certain drive shaft has reached the target position and other drive shafts have not reached the target position, the position of the drive shaft is detected by the position detection means.
  • the movement control of each drive shaft is performed by the position movement control means until the value reaches, and the control is performed by switching to the movement control by the load movement control means under a predetermined condition that all the drive shafts have reached the target position. After that, the actual load for each drive shaft can be detected by the load detection means and the position of the drive shaft can be controlled, so even if only a certain drive shaft contacts the workpiece, an unbalanced load is applied. Therefore, it is possible to prevent failure due to mold breakage or shaft overload.
  • the load movement control unit When the movement control by the load movement control unit satisfies a predetermined condition, the load movement control unit includes a load holding control unit that performs a movement control for each driving shaft so as to hold a target load of the driving shaft.
  • the load holding control means performs movement control for each drive shaft so as to hold the target load of the drive shaft when the movement control by the load movement control means satisfies a predetermined condition.
  • control is performed by switching from the movement control by the load movement control means to the movement control by the load holding control means.
  • the position of the drive shaft can be controlled so as to be held by the motor. For example, when it is desired to press with a target load for a certain time with a nanoimprint apparatus or the like, a pressure can be applied for a certain time with a target load for each drive shaft, and the pattern can be faithfully reproduced.
  • the load movement control means has a difference between a maximum and a minimum exceeding a predetermined tolerance for the load of the drive shaft detected by the load detection means for each drive shaft. It is characterized by judging that it is abnormal. According to this feature, since the load movement control means performs movement control for each drive axis, an error due to movement control in each drive axis may occur, but the load movement control means does not change the load for each drive axis. When the difference between the maximum and minimum of the difference between the load on the drive shaft detected by the detection means and the target load on the drive shaft exceeds a predetermined tolerance, the emergency stop is made. You can
  • the position movement control means has a difference between a maximum and a minimum exceeding a predetermined tolerance for the position of the drive shaft detected by the position detection means for each drive shaft. It is characterized by judging that it is abnormal. According to this feature, since the position movement control means performs movement control for each drive axis, an error due to movement control in each drive axis may occur. However, the position movement control means does not change the position for each drive axis. An emergency stop can be made by determining that the position of the drive shaft detected by the detection means is abnormal when the difference between the maximum and minimum exceeds a predetermined tolerance.
  • An imprint apparatus including any of the multi-axis press apparatuses described above, A pressing member moved by the plurality of drive shafts; A receiving unit for receiving a desired load desired for the pressing member, The load movement control means performs movement control of the drive shaft based on the target load received by the receiving unit.
  • the receiving unit receives a desired target load for the pressing member, and the load movement control unit performs movement control of the drive shaft based on the target load received by the receiving unit. Since it can be performed, it can press according to a target load.
  • it is desired to apply a uniform pressure if the target loads are specified to be the same, it is possible to apply a uniform pressure to each drive shaft, so that the pattern can be reproduced faithfully to the workpiece.
  • a mode for carrying out an imprint apparatus using a multi-axis press apparatus according to the present invention will be described below based on examples.
  • FIG. 1 shows a configuration diagram of an imprint apparatus 100 using the multi-axis press apparatus in the embodiment, and FIGS. 2 to 5 show control flow charts in the imprint apparatus 100.
  • FIG. FIG. 1 conceptually shows a configuration diagram including a control unit based on a front view in a vertical section of the imprint apparatus 100.
  • an imprint apparatus 100 using a multi-axis press device that drives a pressing member by a plurality of driving shafts includes an upper table 108A and a lower table 108B as pressing members such as a slide, a ram, or a table.
  • An upper mold 109A serving as a mold is mounted on the table 108A
  • a lower mold 109B serving as a mold is mounted on the lower table 108B, and the workpiece 110 to be transferred is placed at a predetermined position.
  • the imprint apparatus 100 includes a plurality of drive shafts 104 and 105, sensors 106 and 107 of load detection means for detecting the load values of the drive shafts 104 and 105, and drive units 102 and 103 that drive the drive shafts 104 and 105. And at least a CPU 101 of control means for controlling the drive units 102 and 103. Further, the imprint apparatus 100 can include a position detector as a position detection unit that detects the positions of the plurality of drive shafts 104 and 105. The position detector can be provided by sensors 106 and 107. In this case, the sensors 106 and 107 include a load cell that detects load values of the drive shafts 104 and 105 and a position detection sensor that detects positions of the drive shafts 104 and 105 in the vertical direction.
  • the plurality of drive shafts 104 and 105 are shown as two drive shafts in FIG. 1, but two or more, three shafts, four shafts, five shafts,... N-axis, depending on the size and shape of the pressing member. Can be provided as appropriate.
  • the upper table 108A is pressed by the drive shafts 104 and 105 from above, but may be pressed by the drive shafts 104 and 105 from below the lower table 108B. You may make it press from upper direction and the downward direction with the drive shafts 104 and 105 with which the upper table 108A and the lower table 108B are provided, respectively.
  • the drive units 102 and 103 are instructed by the CPU 101 of the control means as to command signals such as movement amounts or target positions of the drive shafts 104 and 105, and move the positions of the drive shafts 104 and 105 in the vertical direction according to the instructions.
  • command signals such as movement amounts or target positions of the drive shafts 104 and 105, and move the positions of the drive shafts 104 and 105 in the vertical direction according to the instructions.
  • the CPU 101 of the control means Based on the load values of the drive shafts 104 and 105 detected by the load cells of the sensors 106 and 107 and the target load values designated in advance of the drive shafts 104 and 105, the CPU 101 of the control means is connected to the drive shafts 104 and 105. This movement control is performed for each of the drive shafts 104 and 105. Further, the CPU 101 of the control means performs the movement control for each drive shaft so as to hold the target load of the drive shafts 104 and 105 when the load movement control satisfies a predetermined holding switching condition.
  • the CPU 101 of the control means moves the drive shafts 104 and 105 based on the positions of the drive shafts 104 and 105 detected by the position detection sensors of the sensors 106 and 107 and the target positions of the drive shafts 104 and 105. Control is performed for each drive shaft. In this case, the movement control based on the load value and the target load value of the drive shafts 104 and 105 is performed based on the predetermined load control switching condition based on the movement control based on the position of the drive shafts 104 and 105 and the target position of the drive shafts 104 and 105. When you meet.
  • feedforward control may be performed so that the detection value from the sensor follows a specified value (target load value, target position) indicating the target signal, or the specified value indicating the target signal and the sensor. If there is a difference between the specified value and the detected value from the sensor by feeding back the detected value from the sensor so that it matches the detected value from the Alternatively, control may be performed by a so-called servo motor mechanism in which feedback is continued until the specified value is reached or the allowable range is entered, or control combining these may be performed. In this embodiment, a case where control is performed by a servo motor mechanism is taken as an example.
  • Fig. 2 shows the overall control flow diagram of the multi-axis press machine.
  • the CPU 101 when the CPU 101 starts pressing in the imprint apparatus, first, as position movement control (subroutine T1), the CPU 101 detects the driving shafts 104 and 105 detected by the position detection sensors of the sensors 106 and 107. Based on the position and the target position of the drive shafts 104 and 105, movement control of the drive shafts 104 and 105 is performed for each drive shaft. Specifically, the control is performed according to the control flowchart shown in FIG. Next, the CPU 101 switches to load movement control (subroutine T2) when a predetermined load control switching condition is satisfied.
  • the CPU 101 performs load movement control (subroutine T2) based on the load values of the drive shafts 104 and 105 detected by the load cells of the sensors 106 and 107 and the target load values designated in advance of the drive shafts 104 and 105.
  • load movement control (subroutine T2) based on the load values of the drive shafts 104 and 105 detected by the load cells of the sensors 106 and 107 and the target load values designated in advance of the drive shafts 104 and 105.
  • movement control of the drive shafts 104 and 105 is performed for each of the drive shafts 104 and 105.
  • the control is performed according to the control flowchart shown in FIG.
  • the CPU 101 switches to load holding control (subroutine T3) when a predetermined condition is satisfied.
  • the CPU 101 performs load holding control (subroutine T3) based on the load values of the drive shafts 104 and 105 detected by the load cells of the sensors 106 and 107 and the target load values designated in advance of the drive shafts 104 and 105.
  • load holding control subroutine T3
  • movement control of the drive shafts 104 and 105 is performed for each of the drive shafts 104 and 105 so as to hold the target load value.
  • the control is performed according to the control flowchart shown in FIG.
  • the position movement control (subroutine T1) is controlled for each drive shaft as shown in FIG. Since the same control is performed for each drive shaft, control of the first axis of the drive shaft 104 will be described as an example.
  • the position movement control first, the moving speed: S of the drive shaft 104 and the target coordinate value: Z indicating the target position are input from the outside (step S1).
  • the target coordinate value: Z is set, for example, by a receiving unit (not shown) provided in the imprint apparatus 100 for each drive axis at a position where the upper mold 109A contacts the workpiece 110.
  • the current coordinate value Z 'of the drive shaft 104 is detected by the position detector of the sensor 106 (step S2).
  • a difference ZZ ′ ⁇ Z between the current coordinate value Z ′ and the target coordinate value Z is calculated (step S3). If the current coordinate value Z ′ is equal to the target coordinate value Z (step S4), It is determined that the drive shaft 104 has reached the target position, the position movement control is terminated (step S7), and the process proceeds to the next step. If the current coordinate value Z ′ is not equal to the target coordinate value Z in step S 4, the drive shaft 104 is moved by ⁇ Z at the moving speed S, and then the current coordinate value Z ′ of the drive shaft 104 is changed to the sensor 106. The process of step S2 to step S4 is repeated until the current coordinate value Z ′ becomes equal to the target coordinate value Z. The other drive shafts are similarly processed.
  • the current coordinate value Z ′ of the drive shaft 104 and the other drive shaft is detected by the position detector of the sensor 106, the current coordinate value Z ′ of the 1st axis to the nth axis in the monitoring subroutine T4. It is determined whether the difference between the MAX value and the MIN value does not exceed the permissible error G. If the permissible error G is exceeded, the emergency stop is determined. If the permissible error G is not reached, the monitoring subroutine is continued. Monitoring is continued at T4. The monitoring subroutine T4 may periodically perform interrupt processing as timer interrupt processing, or may perform processing when the current coordinate values Z ′ of all the drive axes are detected. . When the current coordinate value Z ′ is equal to the target coordinate value Z in all the drive axes 1 to n, the CPU 101 switches to load holding control (subroutine T2) assuming that a predetermined condition is satisfied.
  • the current coordinate value Z ′ can be controlled so as to reach the target coordinate value Z on the 1st axis to the nth axis of all the drive axes.
  • the predetermined condition may be set so that the load holding control (subroutine T2) is switched when the current coordinate value Z ′ reaches the target coordinate value Z on at least one specific drive axis. Good.
  • feedback control can be performed according to the target position for each drive shaft by the servo motor mechanism.
  • the next load movement control (subroutine T2) is controlled for each drive shaft as shown in FIG. Since the same control is performed for each drive shaft, control of the first axis of the drive shaft 104 will be described as an example.
  • the load movement control first, the moving speed: S of the drive shaft 104 and the target load value P indicating the target load are input from the outside (step S11).
  • the target load value P is, for example, a receiving unit (not shown) provided in the imprint apparatus 100 with a load value that can transfer the pattern of the upper mold 109A and the lower mold 109B to the workpiece 110 for each drive axis. )).
  • the current load value P 'of the drive shaft 104 is detected by the load cell of the sensor 106 (step S12).
  • a difference load PP ⁇ P ′ ⁇ P between the current load value P ′ and the target load value P is calculated (step S13), and if the current load value P ′ is equal to the target load value P (step S13).
  • step S14 It is determined that the drive shaft 104 has reached the target position, the position movement control is terminated (step S17), and the process proceeds to the next step. If the current load value P ′ is not equal to the target load value P in step S14, a movement amount ⁇ D corresponding to the deviation load ⁇ P is obtained, and the drive shaft 104 is moved at the movement speed S.
  • the current load value P ′ is detected by the position detector of the sensor 106, and the processing of steps S12 to S14 is repeated until the current load value P ′ becomes equal to the target load value P.
  • the other drive shafts are similarly processed.
  • the MAX of the current load value P ′ of the 1st axis to the nth axis is monitored in the monitoring subroutine T5. It is determined whether or not the difference between the value and the MIN value is larger than the allowable error G. If it is larger than the allowable error G, it is determined to make an emergency stop. If it is smaller than the allowable error G, the monitoring subroutine T5 is continued. And continue monitoring.
  • the monitoring subroutine T5 may periodically perform interrupt processing as timer interrupt processing, or may perform processing when the current load value P ′ of all the drive shafts is detected. .
  • the CPU 101 switches to load holding control (subroutine T3) assuming that a predetermined condition is satisfied.
  • the current load value P ′ can be controlled so as to reach the target load value P in all the drive shafts 1 to n.
  • the predetermined condition may be set to switch to the load holding control (subroutine T3) when the current load value P ′ reaches the target load value P on at least one specific drive shaft. Good.
  • feedback control can be performed on each drive shaft according to the target load by the servo motor mechanism.
  • the next load holding control (subroutine T3) is controlled for each drive shaft as shown in FIG. Since the same control is performed for each drive shaft, control of the first axis of the drive shaft 104 will be described as an example.
  • the current load value B of the drive shaft 104 is detected by the load cell of the sensor 106, the current load value B is compared with the target load value A, and the current load value B is determined as the target load value A.
  • the amount of movement is set to 0 (step S31), the load is maintained as it is, and ⁇ T of the process processing time is added to the process processing stacking time Tx.
  • the process processing lamination time Tx indicates the total time during which the load is held since the load holding control (subroutine T3) is started, and ⁇ T of the process processing time is one step from step S21 to step 32. The processing time required for this process is shown. Then, it is determined whether or not the process processing stacking time Tx has reached the desired holding time T. When the processing time has reached the holding time T, the process is terminated, and when the desired holding time T has not been reached, Returning to step S21 again, the current load value B is acquired, and the process proceeds to the next step. In step S21, the current load value B is compared with the target load value A.
  • the current load value B is larger than the target load value A, the current load value B is decreased in order to decrease the load value.
  • Is calculated as a deviation load AB ⁇ P difference load ⁇ P (step S22).
  • ⁇ D is larger than a predetermined threshold E of the deviation moving distance (step S23). If ⁇ D> E, the driving is performed so that the moving amount is ⁇ E.
  • the axis is moved (step S24), and ⁇ T of the process processing time is added to the process processing stacking time Tx (step S31).
  • step S21 the current load value B is compared with the target load value A. If the target load value A is larger than the current load value B, the current load value B is increased to increase the load value.
  • step S27 it is determined whether or not ⁇ D is larger than a predetermined threshold E of the deviation movement distance (step S27). If ⁇ D> E, the drive shaft is moved so as to move by + E as the movement amount. (Step S29), and ⁇ T of the process processing time is added to the process processing stacking time Tx (step S31).
  • the drive shaft is moved so as to move by + D as the movement amount (step S28), and ⁇ T of the process processing time is added to the process processing stacking time Tx (step S31). .
  • the process processing lamination time Tx reaches a desired holding time T, the processing is ended.
  • the process processing stacking time Tx reaches the desired holding time T for all the drive axes 1 to n, the CPU 101 ends the load holding control and finishes the pressing process assuming that a predetermined condition is satisfied. To do.
  • the load holding control If the load holding control is not performed, it may be pushed too much when the workpiece expands, or if the workpiece contracts, pattern loss may occur. Pressure can be applied for a certain period of time with a load, and the pattern can be faithfully reproduced on the workpiece.
  • the load holding control (subroutine T3) may be ended when the process processing lamination time Tx reaches the desired holding time T on at least one specific drive shaft.
  • feedback control can be performed according to the target load and the desired load time for each drive shaft by the servo motor mechanism.
  • the multi-axis press device that drives the upper table 108A and the lower table 108B of the pressing member by the plurality of drive shafts 104, 105, the respective loads of the plurality of drive shafts 104, 105.
  • load cells of the sensors 106 and 107 as load detecting means for detecting the load
  • the target loads of the drive shafts 104 and 105 Load movement control means (subroutine T2) that performs movement control of the shafts 104 and 105 for each of the drive shafts 104 and 105.
  • the load cells of the sensors 106 and 107 detect the loads of the drive shafts 104 and 105 of the plurality of drive shafts 104 and 105, and the load movement control means (subroutine T2) Based on the current load of the drive shafts 104 and 105 detected by the load cell and the target load of the drive shafts 104 and 105, movement control of the drive shafts 104 and 105 can be performed for each of the drive shafts 104 and 105.
  • the multi-axis press device can control the movement of the drive shafts 104 and 105 so that the drive shafts 104 and 105 have target loads, and applies a desired pressure to each of the drive shafts 104 and 105. Can do.
  • the actual load is detected by the load detection means for each drive shaft 104, 105.
  • the positions of the drive shafts 104 and 105 can be controlled, so that even if only one drive shaft 104 or 105 comes into contact with the workpiece, an offset load is not applied. It can be prevented from causing a failure.
  • the nanoimprinting device when you want to apply a uniform pressure, you can apply a uniform pressure to each of the drive shafts 104 and 105 by specifying the target loads to be the same. Can be faithfully reproduced.
  • the load movement control means (subroutine T2) for each drive shaft may control each drive shaft in synchronization so that the target loads are the same.
  • each drive shaft can be controlled with synchronized timing so that each load value does not deviate even in the process of adding the load value to the target load value.
  • each drive shaft always has the same load at the same timing.For example, even when a fluid resin or the like is disposed on a tilted workpiece, Uniform pressure can be applied without bias, and the pattern can be faithfully reproduced on the workpiece.
  • control is performed so that each subroutine is sequentially performed, but load control may be performed only by the load movement control means (subroutine T2).
  • the position detection sensors of the position detection means 106 and 107 for detecting the positions of the drive shafts 104 and 105 of the plurality of drive shafts 104 and 105, and the sensors 106 and 107, respectively.
  • Position movement for controlling the movement of the drive shafts 104 and 105 for each of the drive shafts 104 and 105 based on the current positions of the drive shafts 104 and 105 detected by the position detection sensors and the target positions of the drive shafts 104 and 105.
  • the movement control by the load movement control means (subroutine T2) is performed when the movement control by the position movement control means (subroutine T1) satisfies a predetermined load control switching condition.
  • the position detection sensors of the sensors 106 and 107 detect the positions of the drive shafts 104 and 105 of the plurality of drive shafts 104 and 105, and the position movement control means (subroutine T1) Based on the current position of the drive shafts 104 and 105 detected by the position detection sensor 107 and the target position of the drive shafts 104 and 105, the movement control of the drive shafts 104 and 105 is performed for each of the drive shafts 104 and 105.
  • the movement control by the load movement control means (subroutine T2) can be performed when the movement control by the position movement control means (subroutine T1) satisfies a predetermined load control switching condition.
  • the movement control of the drive shafts 104 and 105 is performed by the position movement control means (subroutine T1) according to the current positions of the drive shafts 104 and 105 detected by the position detection sensors of the sensors 106 and 107, and then When the movement control by the position movement control means (subroutine T1) satisfies a predetermined load control switching condition, the movement control by the position movement control means (subroutine T1) is switched to the movement control by the load movement control means (subroutine T2). Control will be performed.
  • the position movement control means controls the movement of each of the drive shafts 104 and 105 until each of the drive shafts 104 and 105 reaches the target position.
  • the load movement control means (subroutine T2) using the fact that the position has been reached as a predetermined load control switching condition, the actual load is then detected for each of the drive shafts 104 and 105.
  • control is performed so that each subroutine is sequentially performed, but the movement control may be performed only by the position movement control means (subroutine T1). Further, the position movement control means (subroutine T1) for each drive axis may control each drive axis in synchronization so that the target position is the same.
  • each drive shaft can be controlled in synchronization so that the position of each drive shaft does not shift even in the process of moving to the target position.
  • the drive shafts According to the synchronized position movement control, the drive shafts always move in parallel. For example, when a fluid resin or the like is unevenly arranged on a flat workpiece, it is forcibly flat. Can be.
  • the movement control by the load movement control means (subroutine T2) satisfies a predetermined holding switching condition, the movement control is performed so as to hold the target load of the drive shafts 104 and 105.
  • Load holding control means (subroutine T3) is provided for each of the drive shafts 104 and 105.
  • the load holding control means (subroutine T3) holds the target load of the drive shafts 104 and 105 when the movement control by the load movement control means (subroutine T2) satisfies a predetermined holding switching condition.
  • the movement control can be performed for each of the drive shafts 104 and 105. For example, using a predetermined holding switching condition that all the drive shafts 104 and 105 have reached the target load, the movement control by the load movement control means (subroutine T2) is switched to the movement control by the load holding control means (subroutine T3).
  • the positions of the drive shafts 104 and 105 can be controlled so that the drive shafts 104 and 105 are held at the target loads.
  • a pressure can be applied for a certain time with the target load for each of the drive shafts 104 and 105, and the pattern can be reproduced faithfully to the workpiece.
  • the load movement control means (subroutine T2) is the maximum and minimum of the current loads of the drive shafts 104 and 105 detected by the load cells of the sensors 106 and 107 for each of the drive shafts 104 and 105. Is determined to be abnormal (subroutine T5).
  • the load movement control means performs movement control for each of the drive shafts 104 and 105, errors due to movement control in the respective drive shafts 104 and 105 may occur, but the load movement control means Regarding the difference between the current load of the drive shafts 104 and 105 detected by the load cells of the sensors 106 and 107 for each of the drive shafts 104 and 105 and the target load of the drive shafts 104 and 105, the difference between the maximum and the minimum is a predetermined allowable value. If the difference is exceeded, an emergency stop can be made by determining that there is an abnormality.
  • the position movement control means determines the maximum and minimum values of the current positions of the drive shafts 104 and 105 detected by the position detection sensors 106 and 107 for each of the drive shafts 104 and 105. When the difference exceeds a predetermined tolerance, it is determined that there is an abnormality (subroutine T4).
  • the position movement control unit performs movement control for each of the drive shafts 104 and 105, an error due to movement control in each of the drive shafts 104 and 105 may occur.
  • the position detection sensors 106 and 107 for each of the drive shafts 104 and 105 as abnormal when the difference between the maximum and minimum exceeds a predetermined tolerance. Can be emergency stop.
  • the imprint apparatus 100 including the multi-axis press apparatus in the present embodiment, desired targets for the upper table 108A and the lower table 108B and the upper table 108A and the lower table 108B that are moved by the plurality of drive shafts 104 and 105.
  • a load movement control means (subroutine T3) that controls the movement of the drive shafts 104 and 105 based on the target load received by the reception section.
  • the receiving unit receives desired target loads for the upper table 108A and the lower table 108B, and the movement control of the drive shafts 104 and 105 is performed based on the target loads received by the receiving unit. Therefore, it can press according to a target load. If you want to apply a uniform pressure, you can apply a uniform pressure to each of the drive shafts 104 and 105 by specifying the target loads to be the same, so that the pattern can be faithfully reproduced on the workpiece. .
  • an imprint apparatus using a multi-axis press apparatus is shown as an example.
  • An axial press device may be used.
  • the servo motor mechanism is used as an example.
  • feedforward control is performed so that the detection value from the sensor follows the specified value (target load value, target position) indicating the target signal. It may be.
  • the position movement control (subroutine T1), the load movement control (subroutine T2), and the load holding control (subroutine T3) are controlled independently for each drive shaft.
  • the drive axes are controlled in synchronization so that the target values are the same, and in load holding control (subroutine T3), each drive axis is controlled.
  • Independent control is also possible.
  • each drive shaft is controlled with the timing synchronized so that the position of each drive shaft does not shift so that the target position is the same, and then synchronized.
  • each axis is Since the target load value A can be maintained following the change in the state of the workpiece, even if the state of the workpiece changes, it can be kept pressed with the same load value, and the pattern can be reproduced faithfully to the workpiece.

Abstract

L'invention fournit un dispositif de presse à axe multiple empêchant une surcharge vis-à-vis d'un axe d'entraînement, et un dispositif d'impression mettant en œuvre ce dispositif de presse à axe multiple. Le dispositif d'impression (100) qui met en œuvre ce dispositif de presse à axe multiple dans lequel un élément de pression est entraîné par une pluralité d'axes d'entraînement, est équipé : de la pluralité d'axes d'entraînement (104, 105) ; de capteurs (106, 107) d'un moyen de détection de charge détectant une valeur de charge pour les axes d'entraînement (104, 105) ; de parties entraînement (102, 103) entraînant les axes d'entraînement (104, 105) ; et d'une unité centrale (101) d'un moyen de commande commandant les parties entraînement (102, 103). L'unité centrale (101) effectue une commande de déplacement des axes d'entraînement (104, 105) pour chacun d'entre eux, sur la base de la valeur de charge des axes d'entraînement (104, 105) détectée par une cellule de mesure de chacun des capteurs (106, 107), et d'une valeur de charge cible prédéterminée des axes d'entraînement (104, 105). Enfin, l'unité centrale (101) effectue une commande de déplacement pour chacun des axes d'entraînement afin de maintenir la valeur de charge cible des axes d'entraînement (104, 105), lorsque la commande de déplacement de charge satisfait des conditions prédéfinies.
PCT/JP2012/076545 2012-10-12 2012-10-12 Dispositif de presse à axe multiple, et dispositif d'impression mettant en œuvre celui-ci WO2014057589A1 (fr)

Priority Applications (1)

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PCT/JP2012/076545 WO2014057589A1 (fr) 2012-10-12 2012-10-12 Dispositif de presse à axe multiple, et dispositif d'impression mettant en œuvre celui-ci

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Application Number Priority Date Filing Date Title
PCT/JP2012/076545 WO2014057589A1 (fr) 2012-10-12 2012-10-12 Dispositif de presse à axe multiple, et dispositif d'impression mettant en œuvre celui-ci

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008230027A (ja) * 2007-03-20 2008-10-02 Hitachi High-Technologies Corp 微細構造転写装置および微細構造体の製造方法
JP2008279772A (ja) * 2008-06-23 2008-11-20 Canon Inc 微細加工方法及び微細加工装置
JP2009137286A (ja) * 2007-11-08 2009-06-25 Ev Group E Thallner Gmbh 基板の均一な構造化のためのシステム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008230027A (ja) * 2007-03-20 2008-10-02 Hitachi High-Technologies Corp 微細構造転写装置および微細構造体の製造方法
JP2009137286A (ja) * 2007-11-08 2009-06-25 Ev Group E Thallner Gmbh 基板の均一な構造化のためのシステム
JP2008279772A (ja) * 2008-06-23 2008-11-20 Canon Inc 微細加工方法及び微細加工装置

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