WO2014054741A1 - 走査型トンネル顕微鏡および観察画像表示方法 - Google Patents
走査型トンネル顕微鏡および観察画像表示方法 Download PDFInfo
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- WO2014054741A1 WO2014054741A1 PCT/JP2013/076957 JP2013076957W WO2014054741A1 WO 2014054741 A1 WO2014054741 A1 WO 2014054741A1 JP 2013076957 W JP2013076957 W JP 2013076957W WO 2014054741 A1 WO2014054741 A1 WO 2014054741A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
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- the present invention relates to a scanning tunneling microscope and an observation image display method.
- a scanning tunneling microscope (STM) has been widely used to observe the fine shape of the sample surface.
- STM scanning tunneling microscope
- the AC component is separated from the current that flows when an AC voltage is applied together with the DC voltage between the probe and the sample, and the conductance component of the admittance between the probe and the sample from the AC component current and
- Patent Document 1 One that analyzes the type and composition of the material on the sample surface by measuring the frequency characteristics of the susceptance component is known (see Patent Document 1).
- the scanning tunnel microscope described in Patent Document 1 requires a circuit for applying an AC voltage between the probe and the sample in addition to the DC voltage used in a normal scanning tunnel microscope. Therefore, even if an existing scanning tunneling microscope is modified to achieve this, it is not easy because a large-scale modification is required to add a circuit as described above. Further, when the scanning tunnel microscope described in Patent Document 1 is used, it may be possible to analyze the type and composition of the material on the sample surface, but the chemical state and internal structure of the sample surface cannot be observed.
- the scanning tunneling microscope includes a probe, a control unit that controls the distance between the probe and the sample, and a voltage that applies a DC voltage between the probe and the sample.
- An application unit a measurement unit that measures a tunnel current flowing between the probe and the sample by a DC voltage, and an extraction unit that extracts a specific frequency component from the instantaneous value of the tunnel current measured by the measurement unit as an observation value
- an observation information generation unit that generates observation information including information on at least one of the chemical state of the surface of the sample and the internal structure based on the observation value extracted by the extraction unit.
- the extraction unit uses, as an observation value, a frequency component whose upper limit is any frequency less than 50 kHz among the instantaneous values of the tunnel current. It is preferable to extract.
- the extraction unit has a frequency component whose lower limit is any frequency of 0.01 kHz or more among the instantaneous values of the tunnel current. Is preferably extracted as an observation value.
- the observation information generation unit further includes a sample based on the time average value of the tunnel current measured by the measurement unit.
- the control unit searches for the time average value of the tunnel current measured by the measurement unit to be constant. It is preferable to control the distance between the needle and the sample.
- the control unit in the scanning tunneling microscope according to any one of the first to fourth aspects, is configured so that the distance between the probe and the sample is constant. It is preferable to control the distance between the two.
- an observation image display method using a scanning tunneling microscope having a probe and a display monitor is provided with a probe when a DC voltage is applied between the probe and the sample.
- the tunnel current flowing between the sample and the sample is measured, and a specific frequency component is extracted as an observed value from the instantaneous value of the measured tunnel current.
- the chemical state of the sample surface and the internal is displayed on a display monitor.
- a frequency component whose upper limit is any frequency less than 50 kHz among the instantaneous values of the tunnel current can be extracted as an observation value. preferable.
- the frequency component having a lower limit of any frequency of 0.01 kHz or more among the instantaneous values of the tunnel current is used as the observation value. It is preferable to extract.
- a scanning tunneling microscope capable of observing the chemical state and internal structure of the sample surface can be easily realized.
- FIG. 1 is a block diagram illustrating a configuration example of a scanning tunneling microscope 1 according to an embodiment of the present invention.
- a scanning tunnel microscope 1 shown in FIG. 1 includes a probe 10, a measurement unit 11, an observation value extraction unit 12, a DC power supply 13, a probe support unit 14, a probe control unit 15, an observation information generation unit 16, and an image display unit. 17.
- FIG. 1 shows a state in which the sample 2 is attached to the scanning tunneling microscope 1 as an observation target.
- the probe 10 is made of a conductive material such as metal and is attached to the probe support portion 14.
- the tip portion of the probe 10 has a sharp pointed shape.
- the measuring unit 11 measures the tunnel current It flowing between the probe 10 and the sample 2 as described above.
- the measurement value of the tunnel current It by the measurement unit 11 is output from the measurement unit 11 to the observation value extraction unit 12, the probe control unit 15, and the observation information generation unit 16.
- the observation value extraction unit 12 extracts a specific frequency component from the measurement value (instantaneous value) of the tunnel current It output from the measurement unit 11 as an observation value.
- the range of frequency components that the observation value extraction unit 12 extracts as observation values may be set in advance, or may be arbitrarily set by an observer.
- the observation value extracted by the observation value extraction unit 12 is output from the observation value extraction unit 12 to the observation information generation unit 16.
- the observation value extraction unit 12 can be realized by using, for example, a spectrum analyzer.
- the probe support unit 14 to which the probe 10 is attached changes the position of the probe 10 with respect to the sample 2 precisely according to the control of the probe control unit 15.
- the probe control unit 15 controls the position of the probe 10 with respect to the sample 2 by controlling the movement of the probe support unit 14 based on the measured value of the tunnel current It output from the measurement unit 11. Accordingly, the distance between the probe 10 and the sample 2 can be controlled based on the tunnel current It, and the probe 10 can be scanned along the surface of the sample 2.
- the result of the position control of the probe 10 by the probe control unit 15 is output from the probe control unit 15 to the observation information generation unit 16.
- the probe support part 14 can be comprised by a piezoelectric element etc., for example.
- the observation information generation unit 16 scans the probe 10 along the surface of the sample 2 by the above-described position control performed by the probe control unit 15, and the measurement unit 11, the observation value extraction unit 12, and the probe control unit 15. Each of the above information output from each is acquired. That is, the measurement value of the tunnel current It output from the measurement unit 11, the observation value extracted from the tunnel current It by the observation value extraction unit 12 and output from the observation value extraction unit 12, and output from the probe control unit 15 The result of the position control of the probe 10 is obtained. Based on the acquired information, image information for representing two types of observation images related to the sample 2 is generated and output to the image display unit 17.
- the image display unit 17 displays two types of observation images related to the sample 2 simultaneously or selectively based on the image information output from the observation information generation unit 16.
- the image display part 17 can be comprised by the display monitor using a liquid crystal display etc., for example.
- One observation image displayed on the image display unit 17 is a time average obtained by averaging the measured values of the tunnel current It from the measurement unit 11 for each predetermined time unit, similarly to the observation image obtained by the conventional scanning tunneling microscope. It is an image based on values.
- this observation image is referred to as a “conventional observation image”.
- the other observation image is different from an observation image obtained by a conventional scanning tunneling microscope, and is an image based on an observation value from the observation value extraction unit 12, that is, an image obtained by extracting a specific frequency component from the instantaneous value of the tunnel current It. It is.
- this observation image is referred to as a “new observation image”.
- the tunnel current It flowing between the probe 10 and the sample 2 greatly depends on the distance between the probe 10 and the sample 2 and varies greatly even at a distance of about half an atom.
- the scanning tunnel microscope 1 observes the fine shape of the surface of the sample 2 by using this. That is, the probe controller 15 controls the distance between the probe 10 and the sample 2 so that the time average value obtained by averaging the tunnel current It every predetermined time unit is constant.
- the fine shape of the surface of the sample 2 can be observed by scanning the needle 10 and observing the movement of the probe support portion 14 in the height direction with respect to the sample 2 at this time. Such an observation method is called a constant current mode.
- the probe control unit 15 scans the probe 10 while keeping the height of the probe 10 with respect to the sample 2 constant, and a time average value obtained by averaging the tunnel current It at every predetermined time unit. Even by observing the size, the fine shape of the surface of the sample 2 can be observed. Such an observation method is called a constant height mode.
- the conventional observation image based on the time average value of the tunnel current It represents the observation result by the above-described known observation method as an image. It is. That is, in the case of the constant current mode, the scanning tunnel microscope 1 is based on the result of the position control of the probe 10 output from the probe control unit 15 when the time average value of the tunnel current It is constant. An image representing the height of the probe 10 with respect to the sample 2 at each scanning position is displayed on the image display unit 17 as a conventional observation image. In the case of the constant height mode, the tunnel current It at each scanning position is measured based on the measured value of the tunnel current It output from the measurement unit 11 when the height of the probe 10 with respect to the sample 2 is constant. An image representing the size of the time average value is displayed on the image display unit 17 as a conventional observation image.
- another new observation image displayed on the image display unit 17 is an image based on an extracted value of a specific frequency component of the instantaneous value of the tunnel current It as described above. That is, on the basis of the observation value output from the observation value extraction unit 12, an image representing the spectrum size of a specific frequency component among the instantaneous values of the tunnel current It at each scanning position is used as a new observation image. 17 is displayed. This is the same in both cases of the constant current mode and the constant height mode.
- the frequency component of the tunnel current It extracted by the observation value extraction unit 12 is a frequency component corresponding to local vibration generated on the surface of the sample 2 when the tunnel current It flows.
- FIG. 2 is an example of a conventional observation image obtained by the scanning tunneling microscope 1 according to an embodiment of the present invention.
- This observation image was obtained by observing the sample 2 in a constant current mode using a sample of Co nano islands formed by depositing a Co monoatomic layer on a clean surface of an Au (111) substrate as a sample 2. It is the obtained conventional observation image.
- the measurement conditions at this time were a DC bias voltage Vs of 0.6 V and a tunnel current It of 0.5 nA.
- the height of the probe 10 with respect to the sample 2 at each scanning position is represented by the contrast of the image. That is, the high portion on the surface of the sample 2 is shown with a high contrast bright shade, and the low portion is shown with a low contrast dark shade. Therefore, the surface shape of the sample 2 can be observed from the conventional observation image shown in FIG. For example, it can be seen that four rows of Co nano islands are formed from the upper left to the lower right, and a terrace that is one step lower than the other portions is formed in the lower part of the figure. There is also a large flat island on the right side of the center (probably an Au island due to the shape and flatness of the whole island and the edge shape).
- FIG. 3 is an example of a new observation image obtained by the scanning tunneling microscope 1 according to an embodiment of the present invention.
- This observation image is a new observation image obtained by observing the same part under the same measurement conditions using the same sample 2 as in FIG.
- the observation value extraction unit 12 extracted a frequency component of 0.01 to 50 kHz from the instantaneous value of the tunnel current It output from the measurement unit 11 as an observation value.
- the magnitude of the observation value at each scanning position is represented by the contrast of the image. That is, of the instantaneous value of the tunnel current It, the portion where the spectrum of the frequency component of 0.01 to 50 kHz extracted as the observation value by the observation value extraction unit 12 is shown in bright shades with high contrast, and on the contrary, the small portion is Shown in dark shades with low contrast.
- the terrace formed in the lower part of the image is shown in a bright color with high contrast as compared to the terrace below one level.
- the upper and lower sides of the terrace are shown with the same level of contrast (because of the same Au).
- the large island on the right in the center of FIG. 2 also looks bright in the height contrast (FIG. 2), but in FIG. 3, it is the same brightness as the terrace around the island, and this island is the same Au as the surrounding terrace. It proves that there is also (this is not understood in FIG. 2).
- the new observation image of FIG. 3 it can be confirmed that Co is adsorbed along the steps located at the outer boundary of the large island and the boundary of the terrace below the image. This cannot be confirmed with the conventional observation image of FIG.
- the new observation image in FIG. 3 adsorbs not only the type and composition of the material on the surface of the sample 2 but also its chemical state (element state), that is, along the terrace boundary step.
- Co and the internal structure of the surface of sample 2 surface chemical species, chemical state, or extremely fine surface layer distribution due to other electromagnetic and structural factors), that is, the internal structure of Co nano islands, etc.
- the chemical state and internal structure of the surface of the sample 2 can be observed from the quantum local vibration of the surface of the sample 2 caused by the tunnel current. Therefore, unlike the conventional case of inducing micro vibrations on the sample surface using the photoacoustic effect or the like, local vibration induction and sample observation can be performed simultaneously in one system.
- the probe control unit 15 controls the distance between the probe 10 and the sample 2.
- the measuring unit 11 measures a tunnel current It flowing between the probe 10 and the sample 2 by a DC voltage applied between the probe 10 and the sample 2 by the DC power source 13.
- the observation value extraction unit 12 extracts a specific frequency component from the instantaneous value of the tunnel current It measured by the measurement unit 11 as an observation value.
- the observation information generation unit 16 Based on this observation value, the observation information generation unit 16 generates image information for representing a new observation image including information on the chemical state of the surface of the sample 2 and the internal structure. Then, a new observation image as shown in FIG. 3 is displayed on the image display unit 17. Thereby, the scanning tunnel microscope 1 which can observe the chemical state and internal structure of the surface of the sample 2 can be easily realized.
- the observation information generation unit 16 further generates image information for representing a conventional observation image related to the shape of the surface of the sample 2 based on the time average value of the tunnel current It measured by the measurement unit 11. Then, the conventional observation image as shown in FIG. 2 is displayed on the image display unit 17. Thereby, while acquiring a new observation image like FIG. 3, the conventional observation image like FIG. 2 can also be acquired in parallel with it.
- the probe control unit 15 sets the distance between the probe 10 and the sample 2 so that the time average value of the tunnel current It measured by the measurement unit 11 is constant. Control. In the constant height mode, the distance between the probe 10 and the sample 2 is controlled so that the distance between the probe 10 and the sample 2 is constant. Since it did in this way, according to the kind of sample 2, the shape of the surface, various conditions at the time of measurement, etc., the distance between the probe 10 and the sample 2 can be controlled by an appropriate method.
- an observation image as shown in FIG. 2 is illustrated as a conventional observation image. Further, as a new observation image, an observation image as shown in FIG. 3 in which the chemical state and the internal structure of the surface of the sample 2 is shown is illustrated.
- the observation image obtained by the scanning tunneling microscope according to the present invention is not limited to these. For example, an observation image in which only one of the chemical state of the surface of the sample 2 or the internal structure is shown as a new observation image may be acquired.
- the observation value extraction unit 12 extracts the frequency component of 0.01 to 50 kHz from the instantaneous value of the tunnel current It as the observation value.
- the range of frequency components extracted by the observation value extraction unit 12 is not limited to this example.
- the range can be set narrower by setting the upper limit of the frequency component to be extracted as the observation value lower than 50 kHz or setting the lower limit higher than 0.01 kHz. That is, a frequency component whose upper limit is any frequency lower than 50 kHz and a frequency component whose lower limit is any frequency equal to or higher than 0.01 kHz can be extracted as an observation value from the instantaneous value of the tunnel current It. Even in this way, a new observation image as shown in FIG.
- frequency components in a range other than 0.01 to 50 kHz may be extracted as observation values. Any range of frequency components may be extracted from the instantaneous value of the tunnel current It as an observation value as long as observation information on at least one of the chemical state and internal structure of the surface of the sample 2 can be generated. .
- the observation information generation unit 16 generates image information based on each acquired information, and outputs the image information to the image display unit 17, as shown in FIG.
- the scanning tunneling microscope according to the present invention is not limited to displaying such an observation image.
- a printer may be mounted instead of the image display unit 17 and a conventional observation image or a new observation image may be printed using this printer.
- the image information generated by the observation information generation unit 16 may be output to an externally connected computer or storage device.
- the observation information generation unit 16 may generate and output the spectrum information of the specific frequency component extracted by the observation value extraction unit 12 in a format other than the image information. .
- the observation information generation unit 16 can generate various observation information related to the shape of the surface of the sample 2 based on the time average value of the tunnel current It measured by the measurement unit 11.
- various observation information including information on at least one of the chemical state of the surface of the sample 2 and the internal structure can be generated.
- the observation image is displayed by a printer or some medium, but also an implementation method that can understand the chemical state and the internal structure without depending on the observation image is possible.
- the probe instead of scanning the probe to acquire an image, the probe is stopped at one point on the observation area, and the DC applied voltage is scanned there, and the resulting high-frequency component of the tunnel current I is IV A spectrum is acquired (V is an applied voltage).
- This IV spectrum shows a more detailed chemical state and internal structure that reflects the local electronic state at the position fixed just below the atom at the tip of the probe. ) Can be obtained in the form of a high-frequency component of the tunneling current I.
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Abstract
Description
本発明の第2の態様によると、第1の態様の走査型トンネル顕微鏡において、抽出部は、トンネル電流の瞬時値のうち、50kHz未満のいずれかの周波数を上限とする周波数成分を観察値として抽出することが好ましい。
本発明の第3の態様によると、第1または2の態様の走査型トンネル顕微鏡において、抽出部は、トンネル電流の瞬時値のうち、0.01kHz以上のいずれかの周波数を下限とする周波数成分を観察値として抽出することが好ましい。
本発明の第4の態様によると、第1乃至3のいずれか一態様の走査型トンネル顕微鏡において、観察情報生成部は、さらに計測部により計測されたトンネル電流の時間平均値に基づいて、試料の表面の形状に関する第2の観察情報を生成することが好ましい。
本発明の第5の態様によると、第1乃至4のいずれか一態様の走査型トンネル顕微鏡において、制御部は、計測部により計測されたトンネル電流の時間平均値が一定となるように、探針と試料との間の距離を制御することが好ましい。
本発明の第6の態様によると、第1乃至4のいずれか一態様の走査型トンネル顕微鏡において、制御部は、探針と試料との間の距離が一定となるように、探針と試料との間の距離を制御することが好ましい。
本発明の第7の態様によると、探針と表示モニタとを備えた走査型トンネル顕微鏡を用いた観察画像表示方法は、探針と試料との間に直流電圧を印加したときに探針と試料との間に流れるトンネル電流を計測し、計測されたトンネル電流の瞬時値のうち特定の周波数成分を観察値として抽出し、抽出された観察値に基づいて、試料の表面の化学状態および内部構造のいずれか少なくとも一つに関する情報を含む観察画像を表示モニタに表示する。
本発明の第8の態様によると、第7の態様の観察画像表示方法において、トンネル電流の瞬時値のうち、50kHz未満のいずれかの周波数を上限とする周波数成分を観察値として抽出することが好ましい。
本発明の第9の態様によると、第7または8の態様の観察画像表示方法において、トンネル電流の瞬時値のうち、0.01kHz以上のいずれかの周波数を下限とする周波数成分を観察値として抽出することが好ましい。
日本国特許出願2012年第221324号(2012年10月3日出願)
2 試料
10 探針
11 計測部
12 観察値抽出部
13 直流電源
14 探針支持部
15 探針制御部
16 観察情報生成部
17 画像表示部
Claims (9)
- 探針と、
前記探針と試料との間の距離を制御する制御部と、
前記探針と前記試料との間に直流電圧を印加する電圧印加部と、
前記直流電圧によって前記探針と前記試料との間に流れるトンネル電流を計測する計測部と、
前記計測部により計測された前記トンネル電流の瞬時値のうち特定の周波数成分を観察値として抽出する抽出部と、
前記抽出部により抽出された前記観察値に基づいて、前記試料の表面の化学状態および内部構造のいずれか少なくとも一つに関する情報を含む観察情報を生成する観察情報生成部とを備える走査型トンネル顕微鏡。 - 請求項1に記載の走査型トンネル顕微鏡において、
前記抽出部は、前記トンネル電流の瞬時値のうち、50kHz未満のいずれかの周波数を上限とする周波数成分を前記観察値として抽出する走査型トンネル顕微鏡。 - 請求項1または2に記載の走査型トンネル顕微鏡において、
前記抽出部は、前記トンネル電流の瞬時値のうち、0.01kHz以上のいずれかの周波数を下限とする周波数成分を前記観察値として抽出する走査型トンネル顕微鏡。 - 請求項1乃至3のいずれか一項に記載の走査型トンネル顕微鏡において、
前記観察情報生成部は、さらに前記計測部により計測された前記トンネル電流の時間平均値に基づいて、前記試料の表面の形状に関する第2の観察情報を生成する走査型トンネル顕微鏡。 - 請求項1乃至4のいずれか一項に記載の走査型トンネル顕微鏡において、
前記制御部は、前記計測部により計測された前記トンネル電流の時間平均値が一定となるように、前記探針と前記試料との間の距離を制御する走査型トンネル顕微鏡。 - 請求項1乃至4のいずれか一項に記載の走査型トンネル顕微鏡において、
前記制御部は、前記探針と前記試料との間の距離が一定となるように、前記探針と前記試料との間の距離を制御する走査型トンネル顕微鏡。 - 探針と表示モニタとを備えた走査型トンネル顕微鏡を用いた観察画像表示方法であって、
前記探針と試料との間に直流電圧を印加したときに前記探針と前記試料との間に流れるトンネル電流を計測し、
前記計測されたトンネル電流の瞬時値のうち特定の周波数成分を観察値として抽出し、
前記抽出された観察値に基づいて、前記試料の表面の化学状態および内部構造のいずれか少なくとも一つに関する情報を含む観察画像を前記表示モニタに表示する観察画像表示方法。 - 請求項7に記載の観察画像表示方法において、
前記トンネル電流の瞬時値のうち、50kHz未満のいずれかの周波数を上限とする周波数成分を前記観察値として抽出する観察画像表示方法。 - 請求項7または8に記載の観察画像表示方法において、
前記トンネル電流の瞬時値のうち、0.01kHz以上のいずれかの周波数を下限とする周波数成分を前記観察値として抽出する観察画像表示方法。
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EP13843566.4A EP2905624A4 (en) | 2012-10-03 | 2013-10-03 | RASTER TUNNEL MICROSCOPE AND OBSERVATION IMAGING PROCEDURE |
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JPH07239337A (ja) | 1994-02-28 | 1995-09-12 | Nippon Telegr & Teleph Corp <Ntt> | 走査型トンネル顕微鏡および表面分析方法 |
JPH08285871A (ja) * | 1995-04-19 | 1996-11-01 | Hitachi Ltd | 走査型トンネル分光法およびその装置 |
JP3009199B2 (ja) | 1990-09-28 | 2000-02-14 | 株式会社日立製作所 | 光音響信号検出方法及び装置 |
WO2002023159A1 (en) * | 2000-09-13 | 2002-03-21 | Center For Advanced Science And Technology Incubation,Ltd. | Scanning probe microscope, method for measuring band structure of substance by using the microscope, and microscopic spectroscopy |
Family Cites Families (4)
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WO1994002840A1 (en) * | 1992-07-17 | 1994-02-03 | The Penn State Research Foundation | System for detecting atomic or molecular spectra of a substance, and/or threshold phenomena associated with the same |
JPH06251435A (ja) * | 1993-03-01 | 1994-09-09 | Canon Inc | 記録再生装置 |
WO1996020406A1 (fr) * | 1994-12-27 | 1996-07-04 | Research Development Corporation Of Japan | Procede d'analyse elementaire par microscope a sonde de balayage utilisant un procede d'application de haute tension a impulsions ultracourtes |
US20070194225A1 (en) * | 2005-10-07 | 2007-08-23 | Zorn Miguel D | Coherent electron junction scanning probe interference microscope, nanomanipulator and spectrometer with assembler and DNA sequencing applications |
-
2013
- 2013-10-03 JP JP2014511006A patent/JP5593007B1/ja not_active Expired - Fee Related
- 2013-10-03 US US14/432,728 patent/US9335342B2/en not_active Expired - Fee Related
- 2013-10-03 WO PCT/JP2013/076957 patent/WO2014054741A1/ja active Application Filing
- 2013-10-03 EP EP13843566.4A patent/EP2905624A4/en not_active Withdrawn
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3009199B2 (ja) | 1990-09-28 | 2000-02-14 | 株式会社日立製作所 | 光音響信号検出方法及び装置 |
JPH07239337A (ja) | 1994-02-28 | 1995-09-12 | Nippon Telegr & Teleph Corp <Ntt> | 走査型トンネル顕微鏡および表面分析方法 |
JPH08285871A (ja) * | 1995-04-19 | 1996-11-01 | Hitachi Ltd | 走査型トンネル分光法およびその装置 |
WO2002023159A1 (en) * | 2000-09-13 | 2002-03-21 | Center For Advanced Science And Technology Incubation,Ltd. | Scanning probe microscope, method for measuring band structure of substance by using the microscope, and microscopic spectroscopy |
Non-Patent Citations (1)
Title |
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See also references of EP2905624A4 * |
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US20150260756A1 (en) | 2015-09-17 |
CA2886980C (en) | 2016-11-01 |
EP2905624A1 (en) | 2015-08-12 |
JPWO2014054741A1 (ja) | 2016-08-25 |
CA2886980A1 (en) | 2014-04-10 |
EP2905624A4 (en) | 2016-08-10 |
JP5593007B1 (ja) | 2014-09-17 |
US9335342B2 (en) | 2016-05-10 |
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