WO2014034368A1 - 静圧気体ラジアル軸受 - Google Patents

静圧気体ラジアル軸受 Download PDF

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Publication number
WO2014034368A1
WO2014034368A1 PCT/JP2013/070860 JP2013070860W WO2014034368A1 WO 2014034368 A1 WO2014034368 A1 WO 2014034368A1 JP 2013070860 W JP2013070860 W JP 2013070860W WO 2014034368 A1 WO2014034368 A1 WO 2014034368A1
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WIPO (PCT)
Prior art keywords
metal powder
sintered layer
layer portion
powder sintered
radial bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2013/070860
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English (en)
French (fr)
Japanese (ja)
Inventor
熊谷　真文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oiles Corp
Oiles Industry Co Ltd
Original Assignee
Oiles Corp
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN201380041376.0A priority Critical patent/CN104520600B/zh
Priority to KR1020157002771A priority patent/KR20150051993A/ko
Publication of WO2014034368A1 publication Critical patent/WO2014034368A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • F16C33/122—Multilayer structures of sleeves, washers or liners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/02—Sliding-contact bearings for exclusively rotary movement for radial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2202/00—Solid materials defined by their properties
    • F16C2202/02—Mechanical properties
    • F16C2202/10—Porosity

Definitions

  • the present invention relates to a hydrostatic gas radial bearing that supports a radial load of a rotating body to be supported in a non-contact manner, and in particular, can discharge compressed gas uniformly from the entire surface of the bearing surface, and has a higher throttle effect.
  • the present invention relates to a hydrostatic gas radial bearing capable of obtaining
  • Patent Document 1 discloses a hydrostatic gas bearing capable of accurately adjusting the size and distribution state of pores formed on the bearing surface, and thereby imparting a throttling effect to gas discharge from the bearing surface. ing.
  • This static pressure gas bearing has a surface constriction layer which is a porous material made of a sintered body of bronze powder having an average particle diameter of 5 ⁇ m on a base material which is a sintered material of bronze powder having an average particle diameter of 60 ⁇ m.
  • a base material is prepared by performing a first sintering process on a bronze powder having an average particle diameter of 60 ⁇ m.
  • the surface of the base material to be a joint surface with the surface squeezing layer is finished by machining, and then the base material is applied to the surface of the bronze powder having an average particle size of 5 ⁇ m to be the surface squeezing layer filled in the container.
  • the surface of the base material that becomes the joint surface with the squeezing layer is placed face down, and the second sintering process is performed. Thereby, a static pressure gas bearing made of a sintered body having a two-layer structure of the base material and the surface drawn layer is produced.
  • the hydrostatic gas bearing described in Patent Document 1 is a plate-type bearing used for a thrust bearing, and application to a bush-type bearing used for a radial bearing is not considered.
  • bronze powders having different average particle diameters are used for the base material and the surface drawn layer, the material management and procurement costs increase.
  • the bronze powder constituting the base material is preliminarily sintered to create the base material, and then the bronze powder constituting the surface throttle layer is sintered to form the surface throttle layer on the base material. For this reason, two sintering processes are required, which increases the manufacturing cost. For this reason, cost increases further.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a static pressure gas radial bearing capable of uniformly discharging compressed gas from the entire bearing surface and obtaining a higher squeezing effect. It is to provide. Another object of the present invention is to provide a hydrostatic gas radial bearing that can be manufactured at low cost.
  • the cylindrical first metal powder sintered layer portion having an inner peripheral surface as a bearing surface is used as a core, and the core is placed in a cylindrical mold. By placing and sintering the metal powder in the gap between the core and the mold, it is formed on the outer peripheral surface of the first metal powder sintered layer portion. From the first metal powder sintered layer portion, A hydrostatic gas radial bearing having a second sintered metal powder layer having a high porosity was also formed.
  • the first aspect of the present invention is a hydrostatic gas radial bearing that supports a radial load of a rotating body to be supported in a non-contact manner on a bearing surface, A cylindrical first metal powder sintered layer portion having an inner peripheral surface as the bearing surface; A second metal powder sintered layer portion formed on the outer peripheral surface of the first metal powder sintered layer portion and having a porosity larger than that of the first metal powder sintered layer portion, The first metal powder sintered layer portion is formed by primary sintering, The second metal powder sintered layer has the first metal powder sintered layer portion as a core, the core is disposed in a cylindrical mold, and the gap between the core and the mold is filled with the metal powder. Then, it is formed by secondary sintering.
  • a metal powder having substantially the same average particle diameter is used for the first and second metal powder sintered layers, and the temperature is lower and shorter than the primary sintering condition of the first metal powder sintered layer.
  • the second metal powder sintered layer portion may be formed by sintering under secondary sintering conditions.
  • a cylindrical green compact made of a mixed powder containing electrolytic copper powder and tin powder is used as a core, and the core is disposed in a cylindrical mold.
  • the cylindrical first metal powder sintered layer portion having the inner peripheral surface as a bearing surface and the outer periphery of the first metal powder sintered layer portion are filled with a spherical bronze alloy powder and sintered in the gap between A static pressure gas radial bearing having a second metal powder sintered layer portion formed on the surface and having a porosity higher than that of the first metal powder sintered layer portion was formed.
  • the second aspect of the present invention is a static pressure gas radial bearing that supports a radial load of a rotating body to be supported in a non-contact manner on a bearing surface,
  • a cylindrical first metal powder sintered layer portion having an inner peripheral surface as the bearing surface;
  • a second metal powder sintered layer portion formed on the outer peripheral surface of the first metal powder sintered layer portion and having a porosity larger than that of the first metal powder sintered layer portion,
  • the first and second metal powder sintered layer portions have a cylindrical green compact made of a mixed powder containing electrolytic copper powder and tin powder as a core, and the core is disposed in a cylindrical mold. They are formed together by filling a gap between the core and the mold with spherical bronze alloy powder and sintering.
  • a metal sleeve may be used as the cylindrical mold so that the sleeve functions as a back metal.
  • a molding die as a cylindrical mold, a laminate composed of the first metal powder sintered layer portion and the second metal powder sintered layer portion is first formed, and then the laminate is made of metal.
  • the sleeve may function as a back metal by press-fitting into a manufactured sleeve.
  • the first metal powder sintered layer portion or a cylindrical green compact made of a mixed powder containing electrolytic copper powder and tin powder is used as a core, and the core is disposed in a cylindrical mold.
  • the second metal powder sintered with a larger porosity than the cylindrical first metal powder sintered layer portion having the inner peripheral surface as the bearing surface is formed on the outer peripheral surface of the first metal powder sintered layer portion, a static pressure gas capable of uniformly discharging compressed gas from the entire bearing surface and obtaining a higher squeezing effect.
  • a radial bearing can be provided.
  • metal powder having substantially the same average particle diameter is used for the first and second metal powder sintered layers, and the temperature is lower and shorter than the primary sintering conditions of the first metal powder sintered layer.
  • the second metal powder sintered layer is formed according to the secondary sintering conditions to be performed, the same material can be used for the first and second metal powder sintered layers, so the material management and procurement costs Thus, a hydrostatic gas radial bearing can be manufactured at low cost.
  • a cylindrical green compact made of a mixed powder containing electrolytic copper powder and tin powder is used as a core, the core is placed in a cylindrical mold, and a spherical bronze is placed in the gap between the core and the mold.
  • the first and second metal powder sintered layer portions are formed by filling and sintering the alloy powder, the first and second metal powder sintered layer portions are formed by a single sintering. Since a columnar core for forming a through-hole into which a support object is inserted can be formed at the same time, the manufacturing cost can be reduced, and thereby a hydrostatic gas radial bearing can be manufactured at a low cost.
  • FIG. 1 (A) is an external view of static pressure gas radial bearings 1A to 1C according to the first to third embodiments of the present invention
  • FIG. 1 (B) shows the first embodiment of the present invention
  • FIG. 1C is a front view of the static pressure gas radial bearing 1A
  • FIG. 1C is a cross-sectional view taken along the line AA of the static pressure gas radial bearing 1A shown in FIG. 1B
  • FIG. 2 (A) is a front view of the static pressure gas radial bearing 1B according to the second embodiment of the present invention
  • FIG. 2 (B) is a diagram of the static pressure gas radial bearing 1B shown in FIG. 2 (A).
  • FIG. 1 (A) is an external view of static pressure gas radial bearings 1A to 1C according to the first to third embodiments of the present invention
  • FIG. 1 (B) shows the first embodiment of the present invention
  • FIG. 1C is a front view of the static pressure gas radial bearing 1A
  • FIG. 2C is a sectional view taken along the line BB, and FIG. 2C is a diagram for explaining the arrangement in the mold.
  • FIG. 3 (A) is a front view of a static pressure gas radial bearing 1C according to the third embodiment of the present invention
  • FIG. 3 (B) is a diagram of the static pressure gas radial bearing 1C shown in FIG. 3 (A). It is CC sectional drawing.
  • FIG. 1 (A) is an external view of static pressure gas radial bearings 1A to 1C according to the first to third embodiments of the present invention.
  • FIG. 1 (B) is a front view of a static pressure gas radial bearing 1A according to the present embodiment
  • FIG. 1 (C) is a cross section taken along the line AA of the static pressure gas radial bearing 1A shown in FIG. 1 (B).
  • a hydrostatic gas radial bearing 1A includes a cylindrical first metal powder sintered layer portion 2A having an inner peripheral surface 21 as a bearing surface, and a first metal powder sintered material.
  • a second metal powder sintered layer portion 3 formed on the outer peripheral surface 22 of the layer portion 2A, and a back metal 4 formed on the outer peripheral surface 32 of the second metal powder sintered layer portion 3. ing.
  • the static pressure gas radial bearing 1A supports the radial load of the rotating body to be supported in a non-contact manner.
  • the first metal powder sintered layer portion 2A is composed of a porous body obtained by sintering a spherical bronze alloy powder.
  • the cylindrical cores are arranged in the cylindrical mold in the axial center of each other. Is prepared by filling the gap between the outer peripheral surface of the core and the inner peripheral surface of the mold with a spherical bronze alloy powder having a desired average particle diameter, followed by primary sintering after pressurization. Is done. At this time, primary sintering conditions such as sintering temperature and sintering time are adjusted so that the porosity of the first metal powder sintered layer portion 2A is, for example, 10% or less.
  • the second metal powder sintered layer portion 3 is composed of a porous body obtained by sintering a spherical bronze alloy powder having substantially the same average particle diameter as the first metal powder sintered layer portion 2A.
  • a cylindrical first metal powder sintered layer portion 2A is used as a core, and the cores are arranged in a metal cylindrical sleeve using the core as a mold so that their axes coincide with each other.
  • Second metal powder sintering by filling the gap between the surface and the inner peripheral surface of the sleeve with spherical bronze alloy powder and secondary sintering the core, filled spherical bronze alloy powder and sleeve together
  • the layer portion 3 is formed on the outer peripheral surface 22 of the first metal powder sintered layer portion 2A in a state of being diffusion bonded to the first metal powder sintered layer portion 2A.
  • the secondary sintering conditions such as the sintering temperature and the sintering time are such that the porosity of the second metal powder sintered layer portion 3 is larger than the porosity of the first metal powder sintered layer portion 2A.
  • the temperature is set at a lower temperature and in a shorter time than the primary sintering conditions.
  • the compressed gas supplied to the outer peripheral surface 32 of the second metal powder sintered layer portion 3 via the back metal 4 by an air supply pump (not shown) It reaches the inner peripheral surface 31 of the second metal powder sintered layer portion 3 through the pores in the metal powder sintered layer portion 3 and is supplied to the outer peripheral surface 22 of the first metal powder sintered layer portion 2A. . Then, it reaches the inner peripheral surface 21 of the first metal powder sintered layer portion 2A, which is the bearing surface, through the pores in the first metal powder sintered layer portion 2A, and from the entire inner peripheral surface 21. It is discharged uniformly.
  • a compressed gas layer is formed between the bearing surface 21 and the outer peripheral surface of the rotating body (not shown) inserted into the through hole 11 of the hydrostatic gas radial bearing 1A, and the radial load of the rotating body is not increased. Supported by contact.
  • the porosity (for example, 10% or less) of the first metal powder sintered layer portion 2A is smaller than the porosity (for example, 25% or more) of the second metal powder sintered layer portion 3; Since the pores in the metal powder sintered layer portion 3 function as a throttle portion of the compressed gas flow path, the compressed gas discharged from the inner peripheral surface 21 of the first metal powder sintered layer portion 2A is throttled, The discharge amount is adjusted.
  • the forming material of the first and second metal powder sintered layer portions 2A and 3 is determined by a common measurement / calculation method (for example, a sieving method).
  • the second metal is sintered under secondary sintering conditions using a spherical bronze alloy powder having an approximately equal average particle diameter and lower temperature and shorter time than the primary sintering conditions of the first metal powder sintered layer portion 2A.
  • the porosity of the second metal powder sintered layer portion 3 is made larger than the porosity of the first metal powder sintered layer portion 2A.
  • the back metal 4 can be formed together with the second metal powder sintered layer portion 3, thereby further reducing the manufacturing cost.
  • the first metal powder sintered layer portion 2A is subjected to two sintering processes (primary sintering and secondary sintering), the first metal powder sintering is performed during the secondary sintering. While the layer part 2A is diffusion bonded to the second metal powder sintered layer part 3, the sintering of the first metal powder sintered layer part 2A further proceeds, and the pores of the first metal powder sintered layer part 2A The rate is even smaller. For this reason, the compressed gas discharged from the inner peripheral surface 21 of the first metal powder sintered layer portion 2A can be more effectively squeezed, the amount of compressed air consumed is smaller, and the static rigidity is higher. A pressurized gas radial bearing 1A can be realized.
  • the first and second metal powder sintered layers are provided by providing seal layers (not shown) on both end faces 23 and 33 of the first and second metal powder sintered layer portions 2A and 3. You may make it prevent the leak of the compressed gas from the both end surfaces 23 and 33 of 2 A of layered parts.
  • FIG. 2 (A) is a front view of the static pressure gas radial bearing 1B according to the present embodiment
  • FIG. 2 (B) is a BB cross section of the static pressure gas radial bearing 1B shown in FIG. 2 (A).
  • FIG. 2 (B) components having the same functions as those of the static pressure gas radial bearing 1A according to the first embodiment shown in FIG.
  • the hydrostatic gas radial bearing 1B supports the radial load of the rotating body to be supported in a non-contact manner, similarly to the hydrostatic gas radial bearing 1A according to the first embodiment.
  • a static pressure gas radial bearing 1B includes a cylindrical first metal powder sintered layer portion 2B having an inner peripheral surface 21 as a bearing surface and outer peripheral surfaces of the first metal powder sintered layer portion 2B.
  • the second metal powder sintered layer portion 3 formed on 22 and the back metal 4 formed on the outer peripheral surface 32 of the second metal powder sintered layer portion 3 are provided.
  • the first metal powder sintered layer 2B sinters a cylindrical green compact 5 made of a copper-tin mixed powder containing at least electrolytic copper powder and tin powder. It is formed by.
  • the electrolytic copper powder has a branch and leaf shape that can be easily solidified, and the tin powder is softer than the spherical bronze alloy powder. For this reason, the cylindrical green compact 5 can be easily obtained by pressure molding of the copper tin mixed powder containing the electrolytic copper powder and the tin powder.
  • the second metal powder sintered layer portion 3 is composed of a porous body obtained by sintering a spherical bronze alloy powder.
  • the green compact 5 is sintered by a single sintering process to form the first metal powder sintered layer portion 2B, and the filled spherical bronze alloy powder 6 is sintered.
  • the second metal powder sintered layer portion 3 is formed on the outer peripheral surface 22 of the first metal powder sintered layer portion 2B while being diffusion bonded to the first metal powder sintered layer portion 2B.
  • the back metal 4 is formed by the sleeve 7 on the outer peripheral surface 32 of the second metal powder sintered layer portion 3 in a state of being diffusion bonded to the second metal powder sintered layer portion 3.
  • the spherical bronze alloy powder used for forming the second metal powder sintered layer portion 3 has at least the porosity of the second metal powder sintered layer portion 3 as the first metal powder sintered layer.
  • the thing of the average particle diameter which can be made larger than the porosity of the part 2B is used.
  • the porosity of the first metal powder sintered layer portion 2B is 10% or less
  • the second metal powder so that the porosity of the second metal powder sintered layer portion 3 is 25% or more.
  • the average particle diameter of the spherical bronze alloy powder used for forming the sintered layer portion 3 is selected.
  • the compressed gas supplied to the outer peripheral surface 32 of the second metal powder sintered layer portion 3 through the back metal 4 by an air supply pump (not shown) It reaches the inner peripheral surface 31 of the second metal powder sintered layer portion 3 through the pores in the metal powder sintered layer portion 3 and is supplied to the outer peripheral surface 22 of the first metal powder sintered layer portion 2B. . Then, it reaches the inner peripheral surface 21 of the first metal powder sintered layer portion 2B, which is the bearing surface, through the pores in the first metal powder sintered layer portion 2B, and is uniform from the entire inner peripheral surface 21. Discharged.
  • a compressed gas layer is formed between the bearing surface 21 and a rotating body (not shown) inserted into the through hole 11 of the static pressure gas radial bearing 1B, and the radial load of the rotating body is supported without contact. Is done.
  • the porosity (for example, 10% or less) of the first metal powder sintered layer portion 2B is smaller than the porosity (for example, 25% or more) of the second metal powder sintered layer portion 3; Since the pores in the metal powder sintered layer portion 3 function as a throttle portion of the compressed gas flow path, the compressed gas discharged from the inner peripheral surface 21 of the first metal powder sintered layer portion 2B is throttled, The discharge amount is adjusted.
  • a cylindrical green compact 5 made of a copper-tin mixed powder containing at least electrolytic copper powder and tin powder is used as a core, and the green compact 5 is used as a cylindrical sleeve.
  • the spherical bronze alloy powder 6 is filled in the gap between the outer peripheral surface of the green compact 5 and the inner peripheral surface of the sleeve 7 and sintered.
  • the second metal powder sintered layer portions 2B and 3 can be simultaneously manufactured in a state of being bonded to each other, and the back metal 4 is simultaneously bonded onto the outer peripheral surface 32 of the second metal powder sintered layer portion 3. be able to.
  • the green compact 5 obtained by press-molding the copper tin mixed powder containing at least electrolytic copper powder and tin powder can be used as the core, the first metal powder sintered layer for use as the core It is not necessary to prepare 2B in advance by primary sintering. For this reason, unlike the first embodiment described above, the sintering process is only required once. Therefore, the manufacturing cost can be further reduced as compared with the first embodiment described above, whereby the static gas radial bearing 1B can be manufactured at a lower cost.
  • a sealing layer (not shown) is provided on both end faces 23 and 33 of the first and second metal powder sintered layer portions 2B and 3.
  • a sealing layer (not shown) is provided on both end faces 23 and 33 of the first and second metal powder sintered layer portions 2B and 3.
  • FIG. 3A is a front view of the static pressure gas radial bearing 1C according to the present embodiment
  • FIG. 3B is a cross-sectional view taken along the line CC of the static pressure gas radial bearing 1C shown in FIG. FIG.
  • a static pressure gas radial bearing 1C includes a cylindrical first metal powder sintered layer portion 2C having an inner peripheral surface 21 as a bearing surface, and an outer peripheral surface 22 of the first metal powder sintered layer 2C.
  • the second metal powder sintered layer portion 3 formed above and the back metal 4 formed on the outer peripheral surface 32 of the second metal powder sintered layer portion 3 are provided.
  • the first metal powder sintered layer portion 2C is composed of a porous body obtained by sintering a spherical bronze alloy powder.
  • the columnar cores are arranged in the center of the cylindrical mold. Are arranged so as to coincide with each other, and a spherical bronze alloy powder having a desired average particle diameter is filled in a gap between the outer peripheral surface of the core and the inner peripheral surface of the molding die, and primary sintering is performed.
  • primary sintering conditions such as sintering temperature and sintering time are adjusted so that the porosity of the first metal powder sintered layer portion 2C is, for example, 10% or less.
  • 3 parts of the second sintered metal powder layer is a porous body obtained by sintering a spherical bronze alloy powder having a larger average particle diameter than the spherical bronze alloy powder used in the first sintered metal powder layer 2C.
  • a cylindrical first metal powder sintered layer portion 2C is used as a core, and the core is disposed in a metal cylindrical sleeve using the core as a mold so that the axes of the cores coincide with each other.
  • a spherical bronze alloy powder having an average particle size larger than the spherical bronze alloy powder used for the first metal powder sintered layer portion 2C is filled in the gap between the surface and the inner peripheral surface of the sleeve, and the core is filled.
  • the second metal powder sintered layer portion 3 is formed on the outer peripheral surface 22 of the first metal powder sintered layer portion 2C in a state of being diffusion bonded to the first metal powder sintered layer portion 2C, and the back metal 4 is formed by this sleeve.
  • the second It is formed in a state of being diffusion bonded and attributes powder sintered layer portion 3.
  • the porosity of the second metal powder sintered layer portion 3 is set to the porosity of the first metal powder sintered layer portion 2C.
  • An average particle size that can be made larger is used. For example, when the porosity of the first metal powder sintered layer portion 2C is 10% or less, the spherical bronze alloy powder is formed so that the porosity of the second metal powder sintered layer portion 3 is 25% or more. An average particle size is selected.
  • the compressed gas supplied to the outer peripheral surface 32 of the second metal powder sintered layer portion 3 via the back metal 4 by an air supply pump (not shown) It reaches the inner peripheral surface 31 of the second metal powder sintered layer 3 via the pores in the metal powder sintered layer 3 and is supplied to the outer peripheral surface 22 of the first metal powder sintered layer 2C. Then, it reaches the inner peripheral surface 21 of the first metal powder sintered layer portion 2C, which is the bearing surface, through the pores in the first metal powder sintered layer portion 2C, and is uniform from the entire inner peripheral surface 21. Discharged.
  • a compressed gas layer is formed between the bearing surface 21 and the outer peripheral surface of the rotating body (not shown) inserted into the through hole 11 of the static pressure gas radial bearing 1C, and the radial load of the rotating body is not increased. Supported by contact.
  • the porosity (for example, 10% or less) of the first metal powder sintered layer portion 2C is smaller than the porosity (for example, 25% or more) of the second metal powder sintered layer portion 3; Since the pores in the powder sintered layer portion 2C function as a throttle portion of the compressed gas flow path, the compressed gas discharged from the inner peripheral surface 21 of the first metal powder sintered layer portion 2C is throttled and discharged. The amount is adjusted.
  • the static pressure gas radial bearing 1C it is possible to form the back metal 4 together with the second metal powder sintered layer portion 3 by using a metal sleeve as a mold. As a result, the manufacturing cost can be reduced.
  • a common measurement / calculation method (for example, a sieving method or the like) is used as a forming material of the second metal powder sintered layer portion 3 rather than a spherical bronze alloy powder used as a forming material of the first metal powder sintered layer portion 2C.
  • a common measurement / calculation method for example, a sieving method or the like.
  • the first metal powder sintering is performed during the secondary sintering. While the layer part 2C is diffusion bonded to the second metal powder sintered layer part 3, the sintering of the first metal powder sintered layer part 2C further proceeds, and the pores of the first metal powder sintered layer part 2C The rate is even smaller. For this reason, clogging occurs more reliably in the entire first metal powder sintered layer portion 2C, and the compressed gas discharged from the inner peripheral surface 21 of the first metal powder sintered layer portion 2C is more effectively reduced. Therefore, it is possible to realize the static pressure gas radial bearing 1C that consumes less compressed air and has higher rigidity.
  • a sealing layer (not shown) is provided on both end surfaces 23 and 33 of the first and second metal powder sintered layer portions 2C and 3. Further, leakage of compressed gas from both end faces 23 and 33 of the first and second metal powder sintered layer portions 2C and 3 may be prevented.
  • the present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the gist.
  • the outer shape of the back metal 4 is formed in a cylindrical shape, but may be a prismatic shape.
  • the shape of the bearing surface of the first metal powder sintered layer portions 2A to 2C is not limited to a cylindrical shape, and may be a shape that matches the shape of the support target, such as a prismatic shape.
  • the back metal 4 is formed together with the second metal powder sintered layer portion 3 by using a metal sleeve as a mold.
  • a metal sleeve as a mold
  • a general cylindrical mold is used to form a laminate composed of the first metal powder sintered layer portion 2C and the second metal powder sintered layer portion 3.
  • This sleeve is formed by press-fitting the first and second metal powder sintered layer portions 2A to 2C 3 formed before the back metal 4 and then diffusion-bonded and integrated with each other into the metal sleeve. May function as the back metal 4.
  • the present invention can be applied to a hydrostatic gas radial bearing that supports a radial load of a rotating body to be supported in a non-contact manner.
  • 1A, 1B, 1C static pressure gas radial bearing
  • 2A, 2B, 2C first metal powder sintered layer portion
  • 3 second metal powder sintered layer portion
  • 4 back metal
  • 5 green compact
  • 6 spherical bronze alloy powder
  • 7 sleeve
  • 11 through hole
  • 21 inner peripheral surface (bearing surface) of first metal powder sintered layers 2A to 2C
  • 22 first metal powder sintered layer 2A To 2C outer peripheral surface
  • 23 both end surfaces of the first metal powder sintered layers 2A to 2C
  • 31 inner peripheral surface of the second metal powder sintered layer 3
  • 32 second metal powder sintered layer 3 33: both end faces of the second metal powder sintered layer 3

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  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Sliding-Contact Bearings (AREA)
PCT/JP2013/070860 2012-08-28 2013-08-01 静圧気体ラジアル軸受 Ceased WO2014034368A1 (ja)

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TWI644029B (zh) * 2016-06-30 2018-12-11 祥瑩有限公司 雙層滑動軸承
CN115057101A (zh) * 2022-06-02 2022-09-16 深圳市恒歌科技有限公司 一种金属香水挥发盖及其制作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1162966A (ja) * 1997-08-28 1999-03-05 Toshiba Mach Co Ltd 静圧軸受及びその製造方法
JP2000009142A (ja) * 1998-06-18 2000-01-11 Asahi Optical Co Ltd 軸受装置の製造方法および軸受装置
JP2005221002A (ja) * 2004-02-05 2005-08-18 Nsk Ltd 気体絞り層の形成方法
JP2006097797A (ja) * 2004-09-29 2006-04-13 Oiles Ind Co Ltd 多孔質静圧気体軸受及びその製造方法

Family Cites Families (2)

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Publication number Priority date Publication date Assignee Title
JP4385618B2 (ja) * 2002-08-28 2009-12-16 オイレス工業株式会社 多孔質静圧気体軸受用の軸受素材及びこれを用いた多孔質静圧気体軸受
KR100600668B1 (ko) * 2004-10-18 2006-07-13 한국과학기술연구원 다공성 포일을 갖는 공기 포일 베어링

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1162966A (ja) * 1997-08-28 1999-03-05 Toshiba Mach Co Ltd 静圧軸受及びその製造方法
JP2000009142A (ja) * 1998-06-18 2000-01-11 Asahi Optical Co Ltd 軸受装置の製造方法および軸受装置
JP2005221002A (ja) * 2004-02-05 2005-08-18 Nsk Ltd 気体絞り層の形成方法
JP2006097797A (ja) * 2004-09-29 2006-04-13 Oiles Ind Co Ltd 多孔質静圧気体軸受及びその製造方法

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CN104520600A (zh) 2015-04-15
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TW201408897A (zh) 2014-03-01
JP2014043918A (ja) 2014-03-13
KR20150051993A (ko) 2015-05-13

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