WO2014024945A1 - 熱量計および熱量計の設計方法 - Google Patents
熱量計および熱量計の設計方法 Download PDFInfo
- Publication number
- WO2014024945A1 WO2014024945A1 PCT/JP2013/071437 JP2013071437W WO2014024945A1 WO 2014024945 A1 WO2014024945 A1 WO 2014024945A1 JP 2013071437 W JP2013071437 W JP 2013071437W WO 2014024945 A1 WO2014024945 A1 WO 2014024945A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- thermoelectric
- thermoelectric module
- calorimeter
- logarithm
- ratio
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
- G01K17/04—Calorimeters using compensation methods, i.e. where the absorbed or released quantity of heat to be measured is compensated by a measured quantity of heating or cooling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4806—Details not adapted to a particular type of sample
- G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
- G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
- H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
Definitions
- the present invention relates to a calorimeter and a calorimeter design method that contribute to dramatically increasing the heat flow resolution when measuring the calorie of a sample.
- thermal analysis using a calorimeter covers all phenomena such as melting and crystallization, phase transitions such as melting and crystallization, glass transition and thermosetting, as well as purity and compatibility. It is widely used as an analytical method for organic materials such as polymers and liquid crystals, inorganic materials such as metals, glass and ceramics, pharmaceuticals, foods and cosmetics.
- a typical calorimeter used for thermal analysis is a differential scanning calorimeter (DSC).
- a differential scanning calorimeter is a device that measures the difference in heat input and output between a sample and a reference material while scanning the temperature, and measures the endothermic exotherm due to the state change of the sample.
- DSCs There are two types of DSCs: heat flux type and input compensation type.
- the heat flux DSC is a method of recording a temperature difference between a sample and a reference material with respect to time (or temperature) while scanning the temperature.
- Input compensation (thermal compensation) DSC is a method of supplying a heat flow to a sample and a reference material so as to cancel the temperature difference between the sample and the reference material while scanning the temperature, and recording the difference in the supplied heat flow.
- FIG. 16 shows a device configuration of a heat flux DSC that is currently widely used.
- This method has a temperature-controlled heat bath 103, and a sample X and a reference material Y are placed at symmetrical positions therein.
- a thermal resistor 104 is provided between the heat bath 103 and the sample X and between the heat bath 103 and the reference material Y, and a temperature difference is detected at a place where the thermal resistor 104 is fixed. Heat enters and exits the sample X and the reference material Y through the thermal resistor 104.
- the temperature of the heat bath 103 is managed by controlling the heater driving unit 112 by the temperature control unit 111 that receives a command from the computer 110.
- the difference in heat flow between the heat bath 103 and the sample X and between the heat bath 103 and the reference material Y is proportional to the detected temperature difference.
- This temperature difference is detected by a temperature detector 105 using a temperature-voltage conversion element (thermocouple, thermopile, etc.) and output as a thermoelectromotive force difference (DSC signal).
- DSC signal is obtained by calibrating a standard substance such as sapphire having a known heat capacity as a sample X, and obtaining a device constant (V / W) of how much thermoelectromotive force difference is generated with respect to 1 W of heat flow difference. , Converted into heat flow (W). Since this device constant is also called calorimetric sensitivity, it will be called calorimeter sensitivity in this specification.
- the amount of heat (J) that enters and exits the sample can be obtained.
- the thermal resistor 104 and the temperature detector 105 are collectively called a heat flux sensor or a heat flow sensor.
- thermoelectric element instead of a thermocouple as a heat flow sensor, a semiconductor thermoelectric element or a thermoelectric module (also called a Peltier element or a thermo module) is used.
- a semiconductor thermoelectric element or a thermoelectric module also called a Peltier element or a thermo module
- Patent Documents 1 and 2 are known as those having high sensitivity by using).
- Patent Document 3 there exists a well-known technique etc. which are shown in patent document 3 as a thermoelectric element.
- Patent Document 1 has one end of an N-type semiconductor thermoelectric element fixed to a sample container and a reference material container, and the other end of these semiconductor thermoelectric elements fixed to a metal plate.
- the thermoelectromotive force of 160 ⁇ V / K is obtained by measuring the difference in thermoelectromotive force between the two semiconductor thermoelectric elements and detecting the temperature difference between the two sample containers. It merely disclosed the basic configuration of the scanning calorimeter, and it is difficult to say that it pursued the measurement of minute heat flow of the order of 10 nW or less.
- the first control for improving the heat flow resolution is to improve the heating / cooling control method by making the temperature control multi-stage, and the second countermeasure is between the heat flux sensor and the thermo module.
- a semiconductor thermoelectric element is used as a heat flux sensor and a difference in thermoelectromotive force between the first semiconductor thermoelectric element and the second semiconductor thermoelectric element is detected.
- Patent Document 3 in order to reduce heat conduction from one end to the other end of the first conductive member and the second conductive member having different Seebeck coefficients, the cross-sectional areas of the intermediate portions in the respective length directions are reduced.
- the thermal conductivity of the intermediate part smaller than the thermal conductivity of the both end parts by making it smaller than the cross-sectional area of the both end parts, or instead of setting the cross-sectional area small, the intermediate part of the conductive member is divided into a plurality of parts By changing the shape of the cross section or forming the material of the middle part using amorphous silicon etc.
- thermoelectric element capable of maintaining a predetermined temperature difference for a long time and a method for manufacturing the same.
- this Seebeck element for a calorimeter, if the thermal resistance of the intermediate part is increased, the electrical resistance also increases, so that only a smaller current can flow than the thermoelectric element that does not form the intermediate part, and the intermediate part is formed. This is the same as using a thermoelectric element with a small maximum current value.
- the intermediate portion is formed, it becomes mechanically weak and the structure becomes complicated, making it difficult to manufacture. It is hard to say that they are focusing on optimizing the shape and structure of thermoelectric elements for the measurement of minute heat flows.
- thermoelectric module As a heat flow sensor, the signal voltage can be larger than that of a device using a thermocouple or thermopile, but existing calorimeters are small commercial products designed for thermoelectric cooling.
- the thermoelectric module is used as it is, including its shape and size, and there is no idea of optimizing it for heat flow measurement, and the heat flow resolution remains at about 10-50 nW, so precise analysis However, the performance is not sufficiently pursued.
- the present invention attempts to optimize the thermoelectric module itself in order to pursue the performance of the thermoelectric module as a heat flow sensor to the limit.
- the calorimeter sensitivity increases in proportion to the logarithm n of the thermoelectric element.
- the thermal conductance K M of the thermoelectric module is different from that of the thermoelectric element such as gas.
- thermal conductance K M is the thermal conductance K a smaller becomes the calorimeter sensitivity to saturation, it is heat flow resolution is too large L / a ratio decreases, the thermal conductance K a varies due convection, thermal conductance K M is greater than the thermal conductance K a I came to discover new things.
- thermoelectric module suitable for a calorimeter in order to further increase the resolution of the calorimeter, and includes a differential scanning calorimeter and a calorimeter having a heat flow resolution of 10 nW or less and The purpose is to provide a calorimeter design method that contributes to this realization.
- the calorimeter according to the present invention provides a sample so that heat enters and exits through a thermoelectric module in a temperature-controlled heat bath, and the heat flow that flows when the sample absorbs heat at a predetermined position of the thermoelectric module.
- thermoelectric module Depending on at least one of the ambient atmosphere occupied by the thermoelectric module or heat conduction through a reinforcing material such as a material filled between thermoelectric elements constituting the thermoelectric module, convection in the ambient atmosphere, and heat radiation through the ambient atmosphere
- the calorimeter sensitivity of the thermoelectric module according to the thermal conductance and the thermal conductance between the substrates of the thermoelectric module and the noise based on the electric resistance of the thermoelectric module are L / A ratio of the thermoelectric element constituting the thermoelectric module (L: length, A: cross-sectional area) and a structure that depends on the logarithm n of the thermoelectric element, the L / A ratio of the 6 mm -1 or more
- the logarithm n is set to 4 or more.
- thermoelectric module By setting the L / A ratio and the logarithm n to the above ranges, the heat flow resolution represented by the calorimeter sensitivity and noise of the thermoelectric module can be dramatically improved as compared with the conventional case.
- the L / A ratio is further set to 50 mm ⁇ 1 or more and the logarithm n is set to 32 or more.
- the L / A ratio is further set to 6 to 1000 mm ⁇ 1 and the logarithm n is set to 4 to 256 or less.
- the L / A ratio is further set to 50 to 1000 mm ⁇ 1 and the logarithm n is set to 32 to 256 or less.
- thermal conductance K M between the substrates constituting the thermoelectric module is dependent on L / A ratio and the logarithm n, conduction, convection, thermal conductance K A by thermal radiation depends on the correlation of the heat bath and the thermoelectric module It is preferable that the L / A ratio and the logarithm n are set so that K M ⁇ K A.
- thermoelectric module one electrical resistance R M is configured to be dependent on L / A ratio and the logarithm n, when the amplifier for voltage amplification is connected, the number x, the amplifier of the thermoelectric module It is preferable that the L / A ratio and the logarithm n are set so that the relationship xR M ⁇ R A ⁇ R W is established with the equivalent noise resistance R A.
- the heat flow resolution is saturated when the L / A ratio is changed under a predetermined logarithm n.
- the L / A ratio and the logarithm n are preferably selected so as to be within 50 to 10 times the value.
- thermoelectric module in order to reduce the influence of heat conductance due to heat conduction and convection, and to increase the heat flow resolution more effectively, it is preferable to provide the calorimeter with a decompression means for decompressing the ambient atmosphere occupied by the thermoelectric module.
- the calorimeter design method according to the present invention provides a sample in which a sample is provided through a thermoelectric module in a temperature-controlled heat bath, and the temperature of the sample is detected at a predetermined position of the thermoelectric module. As shown in FIG.
- thermoelectric module 1, heat conduction through a reinforcing material such as an ambient atmosphere occupied by the thermoelectric module or a material filled between thermoelectric elements constituting the thermoelectric module, convection of the ambient atmosphere, and heat radiation through the ambient atmosphere thermal conductance K a by at least one thermal conductance K a between the substrates of the thermoelectric module includes a respective value of the electrical resistance of the thermoelectric module that is the parameter of noise, and the thermoelectric element constituting the thermoelectric module L / a
- L / A ratio of the semiconductor elements (L: length, A: cross-sectional area) and logarithm n can be appropriately associated with the heat flow resolution, so that the L / A ratio and logarithm n can be easily obtained even when the device configuration or shape changes It becomes possible to select appropriately.
- a sample is provided in a temperature-controlled heat bath via a thermoelectric module, and a calorimeter that detects the temperature of the sample at a predetermined position of the thermoelectric module is configured.
- x number of thermoelectric modules A P : cross-sectional area of P-type thermoelectric element L P : length of P-type thermoelectric element A N : cross-sectional area of N-type thermoelectric element L N : length of N-type thermoelectric element ⁇ P : P ⁇ N : Electric resistivity of the N-type semiconductor
- n Logarithm of thermoelectric elements constituting the thermoelectric module
- R M Electric resistance of one thermoelectric module
- T M Absolute temperature of the thermoelectric module
- R W Thermoelectric module Resistance of conductor from T to amplifier T W : Absolute temperature of conductor
- R A Equivalent noise resistance of amplifier T A : Standard noise temperature
- k Boltzmann constant
- ⁇ f Frequency bandwidth to be measured
- ⁇ P Thermal conductivity of P-type
- a function for calculating the heat flow resolution with the L / A ratio (L: length, A: cross-sectional area) and logarithm n of the thermoelectric elements of the thermoelectric module as variables is provided. It is effective to use a design program configured to calculate the heat flow resolution by executing the calculation given the L / A ratio and logarithmic value n to the function.
- the L / A ratio and the logarithm n are selected by applying the function relating to the heat flow resolution as described above, the L / A ratio and the logarithm n are selected so that the heat flow resolution (noise / calorimeter sensitivity) is 10 nW or less. Therefore, a calorimeter having a remarkably improved heat flow resolution as compared with the conventional one can be configured easily and appropriately.
- thermoelectric module which comprises a calorimeter
- thermoelectric module can also apply to a part of thermoelectric module.
- the effect of reducing the heat flow resolution is reduced, but other effects such as increasing the mechanical strength and facilitating the production can be brought about.
- thermoelectric module Since the present invention is the method and configuration described above, it is possible to appropriately control thermal conductance such as gas, etc. that cannot be ignored when trying to make the calorimeter ultra-sensitive, thermal conductance due to convection and thermal radiation, and thermal noise of the thermoelectric module. Therefore, it is possible to dramatically increase the heat flow resolution of the calorimeter to 10 nW or less, preferably 5 nW, more preferably 1 nW or less as compared with the prior art, without adopting a complicated structure for the thermoelectric element. . And by realizing such a high-performance calorimeter, a sufficient thermoelectromotive force can be obtained from the thermoelectric module even if the temperature scanning speed is slowed down, and minute thermal abnormalities such as heat denaturation of proteins are prevented. It can be measured with high accuracy and is useful when applied to various measurement objects including biological samples, skin stratum corneum, and liquid crystals.
- the figure which shows the method of this invention notionally The figure which shows the differential scanning calorimeter which concerns on one Embodiment of this invention.
- the figure which shows the thermoelectric module which comprises the same calorimeter.
- the typical block diagram of the thermoelectric module Explanatory drawing regarding the thermoelectric element which comprises the thermoelectric module.
- Explanatory drawing regarding the thermal conductance of the thermoelectric module The figure which shows the aspect of use of the thermoelectric module.
- the graph which shows the dependence with respect to L / A ratio and logarithm n of a calorimeter sensitivity regarding the thermoelectric module.
- graph heat bath temperature exhibits dependency on L / A ratio and the logarithm n of heat flow resolution (W) when the 175K.
- graph heat bath temperature exhibits dependency on L / A ratio and the logarithm n of heat flow resolution (W) when the 338 K.
- graph heat bath temperature exhibits dependency on L / A ratio and the logarithm n of heat flow resolution (W) when the 520K.
- the graph which shows the dependence with respect to L / A ratio and logarithm n of heat flow resolution (W) when S is made small.
- the graph which shows the dependence with respect to L / A ratio and logarithm n of heat flow resolution (W) when S is enlarged.
- the graph which shows the dependence with respect to L / A ratio and logarithm n of heat flow resolution (W) when (kappa) P (kappa) N and (kappa) P and (kappa) N are enlarged.
- the graph which shows the dependence with respect to L / A ratio and logarithm n of heat flow resolution (W) when (rho) P and (rho) N are made small as (rho) P (rho) N.
- the graph which shows the dependence with respect to the L / A ratio and logarithm n of heat flow resolution (W) when (rho) P (rho) N and (rho) P and (rho) N are enlarged.
- the structure as described above functions as a thermal high-frequency cutoff filter for attenuating fluctuations in the outside temperature so as not to affect the samples X and Y as much as possible. Good. Other materials can be used for the block 21 as long as they serve as a heat bath.
- thermoelectric modules 1 and 1 ′ are arranged in the sample storage spaces S 4 and S 4 , and the sample X to be measured is set as the detection end of one thermoelectric module 1 and the detection end of the other thermoelectric module 1 ′ is used as a reference.
- Each substance (reference sample) Y is arranged, these thermoelectromotive force differences are taken out, amplified by a chopper type amplifier (ultra-low noise amplifier) 6, and displayed or recorded as a thermoelectromotive force difference by a digital voltmeter 7. I am doing so.
- thermoelectric module 1 (1 ′) attempts to optimize the thermoelectric module 1 (1 ′) in order to dramatically increase its sensitivity as compared with the conventional calorimeter.
- thermoelectric module 1 (1 ′) attempts to optimize the thermoelectric module 1 (1 ′) in order to dramatically increase its sensitivity as compared with the conventional calorimeter.
- commercially available small thermoelectric modules designed for thermoelectric cooling are not optimized for calorimetric measurements as described above, and calorimeters using thermoelectric modules optimized for calorimetric measurements are still being developed. Not only has it not been found, but even the eye of optimizing for calorimetry has not been found.
- thermoelectric module suitable for the calorimeter Therefore, the conditions of the thermoelectric module suitable for the calorimeter were theoretically examined, and an actual trial was made to increase the effect.
- thermoelectric module 1 (1 ′) used as a heat flow sensor is a P-type thermoelectric element that is a pair of thermoelectric elements that constitute a thermoelectric module between upper and lower metal plates 14 and 15 that are conductive members.
- Elements (P-type semiconductors) 16 and N-type thermoelectric elements (N-type semiconductors) 17 are alternately connected so as to be ⁇ -type.
- the metal plates 14 and 15 and the thermoelectric elements 16 and 17 are sandwiched between electrically insulating substrates 18 and 19.
- thermoelectric module 1 (1 ′) When this thermoelectric module 1 (1 ′) is used as a heat flow sensor of a calorimeter, it is necessary to increase the calorimeter sensitivity in order to reduce the heat flow resolution. However, as will be described below, since the influence of thermal noise cannot be ignored if the calorimeter sensitivity is increased as much as possible, the thermoelectric module must be optimized from both viewpoints.
- the semiconductors 16 and 17 are made of Bi-Te semiconductors having a large Seebeck coefficient, and are arranged as heat flow sensors between the heat bath 21 and the sample X and between the heat bath 21 and the reference material Y shown in FIG. .
- thermoelectric module 1 (1 ′) Assuming that the thermal conductance between the substrates 18 and 19 of the thermoelectric module 1 (1 ′) is K (W / K), the temperature difference ⁇ T (K) generated when the sample absorbs and generates heat by the heat flow Q (W) is Q / K. (K). Therefore, the calorimeter sensitivity is It is represented by Here, as shown in FIG. 5, the cross-sectional area of the P-type thermoelectric element is A P , the length is L P , the cross-sectional area of the N-type thermoelectric element is A N , and the length is L N.
- the thermoelectric element is a quadrangular prism, but other prisms, cylinders, elliptic cylinders, etc. may be used.
- the thermal conductance K 0 between the substrates 18 and 19 of the thermoelectric module (a pair of single elements) 13 (a single element pair) 13 is used.
- (W / K) is It becomes. Therefore, the thermal conductance K M (W / K) between the substrates 18 and 19 of the thermoelectric module 1 (1 ′) by n single element pairs 13 1 , 13 2 ,..., 13 n shown in FIG.
- thermoelectric modules If the thermal resistance of the joint due to is negligible, It is represented by In conventional thermoelectric modules, the heat conductance K M is very large compared to the thermal conductance K A by thermal conduction, convection, thermal radiation through the reinforcement of such material filled between surrounding gas or a thermoelectric element Therefore, although the thermal conductance K A can be ignored, if K M is decreased to increase the sensitivity to the limit, the value of K A cannot be ignored and must be considered.
- thermoelectric module 1 the path of thermal conductance K M comprising a thermal conductance due to thermal conductance and the thermoelectric elements 16 and 17 between the two sides 18, 19 of the thermoelectric element 13 constituting the thermoelectric module 1 (1 ') by a solid line, gas etc. the path of thermal conductance K a based on the correlation of the heat bath and the thermoelectric module according indicated by a dotted line. Since the thermoelectric elements 16 and 17 are fragile, if reinforced, such as by filling a resin between the thermoelectric elements 16 and 17, and the heat conductance of the reinforcing material such as a resin it is included in the K A.
- thermoelectric module 1 (1 ′).
- Thermal noise is expressed as follows: resistance is R, absolute temperature of resistance is T, Boltzmann constant is k, and frequency bandwidth to be measured is ⁇ f. It is represented by Therefore, as shown in FIG.
- thermoelectric module 1 (1 ′) composed of n pairs of thermoelectric elements 16 and 17
- the electrical resistance RM is It is expressed.
- the absolute temperature of the thermoelectric module 1 (1 ′) is T M
- the resistance of the conductor 60 (see FIG. 2) from the thermoelectric module 1 (1 ′) to the amplifier 6 is R W
- the absolute temperature of the conductor 60 is T W
- the amplifier 6 In the case of the form of FIG.
- thermoelectric module 1 using two thermoelectric modules 1, 1 ′, the equivalent noise resistance is R A and the standard noise temperature is T A. It becomes. Moreover, in the case of the format of FIG.7 (b) which uses one thermoelectric module 1, It is expressed. Therefore, the heat flow resolution F (minimum heat flow that can be measured) is It is expressed.
- Equation (10) is for two thermoelectric modules
- Equation (11) is for one thermoelectric module
- x is the number of thermoelectric modules.
- Heat flow resolution (W) F (L / A, n) It can be expressed as.
- a function ⁇ calculating the heat flow resolution using the L / A ratio (L: length, A: cross-sectional area) and logarithm n of the thermoelectric elements constituting the thermoelectric module 1 as the variables ⁇ expression (10) above, (11 ), Or a program for executing (13)) is written in the computer memory as a design program, and after giving realistic values to necessary constants, the values of L / A ratio and logarithm n are set.
- the heat flow resolution is calculated by the CPU by appropriately inputting through the interface or by repeatedly inputting the L / A ratio and logarithmic value n in the program.
- a flexible disk, a hard disk, a solid state disk, an optical disk, a magneto-optical disk, a CD-ROM, a CD-R, a Blu-ray disk, a magnetic tape, a nonvolatile memory card, and a ROM can be used.
- the OS or the like operating on the computer performs part or all of the actual processing based on the instruction of the program code of the program read by the computer, and the functions of the present invention are realized by the processing. Are also included in the present invention.
- Module size (n 32): 3mm x 3mm x 2mm
- the smaller the module the better from the viewpoint of response speed, but it is difficult to place the sample.
- the thinner the upper substrate the better.
- FIG. 8 is realistic for the thermal conductivity ⁇ , resistivity ⁇ , thermal conductivity K A due to gas, the resistance R w of the conductor, the equivalent noise resistance R A of the amplifier, and the like of the materials of the Bi-Te thermoelectric elements 16, 17.
- the graph shows the dependence of the calorimeter sensitivity on the L / A ratio and logarithm n when calculating the calorimeter sensitivity (V / W) with various values.
- FIG. 9 is a graph showing the dependency of the noise (V) on the L / A ratio and the logarithm n in the same manner.
- xR M ⁇ R in use of 2R M ⁇ R A -R W, also R M ⁇ R A -R W in the configuration shown in FIG. 7 (b) or x number of thermoelectric modules, in the configuration shown in FIG. 7 (a) a -R W may be one of the preferred conditions.
- the electrical resistance R M of the thermoelectric module, 2R M ⁇ R A -R W in the case of FIG. 7 (a), R M ⁇ R A -R W in the case of FIG. 7 (b), in the case of x pieces xR M ⁇ R A ⁇ R W can be cited as a suitable example.
- thermoelectric modules 1 and 1 ′ are provided with the samples X and Y so that heat can be transferred to and from the sample holder 2 which is a temperature-controlled heat bath via the thermoelectric modules 1 and 1 ′.
- the thermoelectric modules 1 and 1 ′ are connected to a pair of P-type thermoelectric elements 16 and N-type thermoelectrics for the purpose of taking out a voltage corresponding to the heat flow flowing through the samples 1 and 1 ′ at the predetermined positions of 1 and 1 ′.
- n pairs of the elements 17 between the substrates 18 and 19 so as to be alternately ⁇ -type, the ambient atmosphere occupied by the thermoelectric modules 1 and 1 ′ or the thermoelectric elements 16 and 17 constituting the thermoelectric modules 1 and 1 ′.
- thermoelectric elements 16 and 17 constituting the thermoelectric module 1,1'
- the structure depends on the L / A ratio (L: length, A: cross-sectional area) and the logarithm n of the thermoelectric element. It has been found that there is a good L / A ratio and a logarithmic value n, and that this embodiment can be selected easily and appropriately.
- FIG. 10 is a graph showing the dependence of the heat flow resolution (W) on the L / A ratio and the logarithm n based on the equation (10).
- the logarithm n and L / A ratio of the thermoelectric module type heat flow sensor most suitable for the calorimeter can be obtained by giving the conductance K A , the resistance R W of the conductive wire, the equivalent noise resistance of the amplifier, and the like.
- FIGS. 8, 9 and 10 are provided as part of the functions of the design program, and the computer displays these figures on a display or a monitor screen by the execution of the program. Accordingly, it can be output to a printer or various storages as print data or image data.
- the saturation value of the heat flow resolution is about (0.22 nW, 0.18 nW), respectively. Since the selection of the L / A ratio becomes arbitrary if it is almost saturated, the L / A ratio can be freely selected. In the example of FIG. 10A, if the value is 100 mm ⁇ 1 or more, the value of the heat flow resolution is almost saturated, so the L / A ratio can be freely selected. Even if it deviates from the saturation region, for example, if it is about 50 times the saturation value in FIG.
- the L / A ratio is 10 mm ⁇ 1 or more, the selection becomes free, and the degree of design freedom is further improved. If it is within about 5 times the saturation value, the heat flow resolution is further improved to about 1 nW.
- the selection range is sufficiently wide with the L / A ratio being 10 mm ⁇ 1 as a lower limit.
- the / A ratio is preferably set to 6 mm ⁇ 1 or more and the logarithm n is set to 4 or more.
- the L / A ratio exceeds 1000 mm ⁇ 1 , the mechanical strength becomes weak. Therefore, it can be said that it is preferable to set the L / A ratio to 6 to 1000 or less and the logarithm n to 4 to 512 or less.
- L / A is 50
- L / A is 100 logarithmic 128, L / A is In the case of 200, when the logarithm is 256, it is estimated that K M ⁇ K A respectively.
- K M ⁇ K A may not be satisfied depending on the material, it is not excluded to make the logarithm n larger than 512 within a range that satisfies K M ⁇ K A.
- FIG. 11 shows the noise value under constant temperature of the ultra-high sensitivity DSC using the prototype thermoelectric module.
- FIG. 12 shows the temperature under constant temperature of the ultra-high sensitivity DSC using the prototype thermoelectric module. It shows the value of heat flow resolution at. 8 to 10, the positions indicated by reference numerals 30 and 31 indicate the calculated values when conditions similar to the prototype conditions in FIGS. 11 and 12 are given. In the data shown in FIG. 11, it can be confirmed that the heat flow resolution is improved to 5 nW or less, and in the data shown in FIG. 12, the heat flow resolution is increased to 1 nW or less. Confirmed.
- the sample must be placed on the electronic module in the heat flow meter, it is also desirable to keep the L / A ratio at a slightly larger value of 500 mm ⁇ 1 or less or 200 mm ⁇ 1 or less.
- the logarithm n can also be confirmed to have a range of selection within a range in which the required heat flow resolution can be obtained, and the optimal logarithm n can be selected from the viewpoint of cost and strength in consideration of the L / A ratio. Become.
- thermoelectric module 1 (1 ′) having substrates 18 and 19 between which the samples X and Y are provided, and a calorimeter that detects the temperature of the samples X and Y at a predetermined position of the thermoelectric module 1 (1 ′).
- thermoelectric module 1 (1 ′) In the ambient atmosphere occupied by the thermoelectric module 1 (1 ′) or heat conduction through a reinforcing material such as a material filled between the thermoelectric elements 16 and 17 constituting the thermoelectric module 1 (1 ′), convection around atmosphere, in consideration of the K M (thermal conductance between the substrate 18, 19) the thermal conductance of the thermal conductance K a and the thermoelectric module 1 by thermal radiation through the ambient atmosphere (1 '), and In consideration of noise, the heat flow resolution with the L / A ratio (L: length, A: cross-sectional area) and logarithm n of the thermoelectric elements 16 and 17 constituting the thermocouple 13 of the module 1 (1 ′) as variables.
- FIG. 13 illustrates a baseline by a differential scanning calorimeter using the present invention.
- the baseline of heat flow is measured at a scanning speed of 0.1 K / min in the absence of a sample and a reference sample.
- FIG. 14 is an example of noise caused by a differential scanning calorimeter using the present invention.
- the baseline of the heat flow was measured at a scanning speed of 0.1 K / min, and the baseline was fitted with a quadratic curve, and the residual with the quadratic curve was It is shown.
- FIG. 15 shows an example of measurement by a differential scanning calorimeter using the present invention.
- the heat flow in the phase transition of the linear hydrocarbon n-tetracosane (C 24 H 50 ) to the rotating phase and the phase transition from the rotating phase to the liquid phase was measured.
- the measurement was performed using a very small sample of 13 ⁇ g.
- the heat flow curve at a temperature just above the phase transition from the rotating phase to the liquid phase is shown enlarged. It can be seen that the noise magnitude is 1 nW or less.
- thermoelectric module can be divided into a plurality of parts.
- the logarithm n may be the sum of the logarithms of a plurality of divided thermoelectric modules.
- thermoelectric module pressure reducing means 200 for the thermoelectric module to depressurize the ambient atmosphere to occupy (see Fig. 2) provided in the calorimeter, and reduce the influence of the thermal conductance K A by thermal conduction and convection of the gas, the heat flow resolution more effectively Can be increased.
- thermoelectric module constituting the calorimeter, but in order to bring about other effects such as increasing mechanical strength and facilitating manufacturing, the heat flow resolution is reduced. Although the effect of improving is reduced, it can be adapted to a part of the thermoelectric module.
- thermoelectric element other than the thermoelectric module
- specific configuration of each part such as configuring a thermopile using a thermoelectric element other than the thermoelectric module, is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. Is possible.
- thermoelectric material a telluride-based Bi—Te based semiconductor (Bi 2 Te 3 based) is employed as the thermoelectric material, but the thermoelectric material is not limited to this.
- thermoelectric material there are a Pb—Te system, a Si—Ge system, and the like.
- 17 to 18 are graphs showing the dependence of the calorimeter sensitivity on the L / A ratio and the logarithm n when these thermoelectric materials are used in the vicinity of a temperature of 300K. From these graphs, although the calorimeter sensitivity is different for each material, the range of the L / A ratio and the logarithmic n value with good sensitivity is almost the same, and the L / A ratio and logarithm that are just right for each material. It can be seen that there is a value of n, and that this can be selected easily and appropriately, and the optimal logarithmic n and L / A ratio can be obtained for the calorimeter.
- thermoelectric materials include telluride systems such as AgSbTe 2 , AgSbTe 2 —GeTe, silicide systems such as CrSi 2 , MnSi, Mg 2 Si 0.7 Sn 0.3 , and CoSi.
- Sukuterudite system such as (Ti 0.3 Zr 0.7 ) NiSn and other half-Heusler metal systems, boron compound systems such as CaB 6 and SrB 6 , layered cobalt oxide systems such as Na x CoO 2 , Sr 3 Titanium oxide such as Ti 2 O 7 , zinc antimony, cluster solid, zinc oxide, natural superlattice, amorphous, artificial superlattice, and the like, and chromel, alumel, constantan, etc. can be considered.
- Amplifier equivalent noise resistance R A 20 ⁇
- Temperature T 273K Regions that are 10 nW or less using such values are shown in FIGS. In that case, for convenience, a plurality of parameters are not changed at the same time, and the search is performed by changing only one from the standard condition.
- thermoelectric module it is possible to appropriately handle heat conduction, convection, thermal conductance caused by heat radiation and thermal noise of the thermoelectric module that cannot be ignored when trying to make the calorimeter ultra-sensitive.
- the heat flow resolution of the calorimeter can be dramatically increased to 10 nW or less, preferably 5 nW, more preferably 1 nW or less as compared with the conventional case.
- a sufficient thermoelectromotive force can be obtained from the thermoelectric module even if the temperature scanning speed is slowed down, and minute thermal abnormalities such as heat denaturation of proteins are prevented. It can be measured with high accuracy and is useful when applied to various measurement objects including biological samples, skin stratum corneum, and liquid crystals.
- thermoelectric module 21 thermal conductance K A ... heat conduction between the substrates 18, 19 of the log K ... thermoelectric module of the thermoelectric element constituting the heat bath 1,1' ... thermoelectric module n ... thermoelectric module, convection, thermal conductance due to thermal radiation
Abstract
Description
x:熱電モジュールの数
AP:P型熱電素子の断面積
LP:P型熱電素子の長さ
AN:N型熱電素子の断面積
LN:N型熱電素子の長さ
ρP:P型半導体の電気抵抗率
ρN:N型半導体の電気抵抗率
n: 熱電モジュールを構成する熱電素子の対数
RM:熱電モジュール1個の電気抵抗
TM:熱電モジュールの絶対温度
RW:熱電モジュールから増幅器までの導線の抵抗
TW:導線の絶対温度
RA:増幅器の等価雑音抵抗
TA:標準雑音温度
k:ボルツマン定数
Δf:測定する周波数帯域幅
κP:P型半導体の熱伝導率
κN:N型半導体の熱伝導率
S(V/K):熱電材料のゼーベック係数
KM(W/K):n対の熱電素子を介した熱伝導による、熱電モジュールの基板間の熱コンダクタンス
KA(W/K):気体などの熱伝導と対流および熱放射による熱コンダクタンス
とした場合に、
に基づいて、L/A比と対数nを選択することを特徴とする方法が挙げられる。
で表される。ここで、図5に示すようにP型熱電素子の断面積をAP、長さをLP、N型熱電素子の断面積をAN、長さをLNとする。ここでは熱電素子を四角柱としているが、他の角柱、円柱、楕円柱などでもよい。P型半導体の熱伝導率をκP、N型半導体の熱伝導率をκNとすると、1対の熱電素子(単素子対)13による熱電モジュールの基板18、19間の熱コンダクタンスK0(W/K)は、
となる。したがって、図4に示すn個の単素子対131、132、…、13nによる熱電モジュール1(1´)の基板18、19間の熱コンダクタンスKM(W/K)は、半田などによる接合部の熱抵抗は無視できるとすると、
で表される。従来の熱電モジュールでは、上記熱コンダクタンスKMが、周囲気体または熱電素子間に充填された材料などの補強材を介した熱伝導、対流、熱放射などによる熱コンダクタンスKAに較べて非常に大きかったので、熱コンダクタンスKAは無視できたが、感度を極限まで高くするためにKMを小さくすると、KAの値を無視できなくなり、考慮しなければならなくなる。
と表される。よって、熱量計感度は(1)式に(4)式を代入して
で表される。ところが、熱電モジュールの性能を極限まで追求するために、nWオーダーの微小な熱流の測定を試みると、熱雑音が無視できなくなることがわかった。つまり、熱電モジュール1(1´)の熱雑音を含めて最適化することが重要であることがわかった。熱雑音は、抵抗の大きさをR、抵抗の絶対温度をT、ボルツマン定数をk、測定する周波数帯域幅をΔfとすると、
で表される。そこで、図5に示すようにP型半導体の電気抵抗率をρP、N型半導体の電気抵抗率をρNとすると、n対の熱電素子16,17から成る熱電モジュール1(1´)の電気抵抗RMは、
と表される。ここで、半田などによる接合部の電気抵抗は熱電素子16、17の電気抵抗に比べ無視できるものとしている。熱電モジュール1(1´)の絶対温度をTM、熱電モジュール1(1´)から増幅器6までの導線60(図2参照)の抵抗をRW、導線60の絶対温度をTW、増幅器6の等価雑音抵抗をRA、標準雑音温度をTAとすると、2個の熱電モジュール1、1´を用いる図7(a)の形式の場合、これらによる雑音(V)は、
となる。また、1個の熱電モジュール1を用いる図7(b)の形式の場合は、
と表される。よって、熱流分解能F(測定できる最小の熱流)は、
と表される。
x とすると、
熱流分解能(W)=F(L/A、n)
と表すことができる。ここで、熱流分解能が小さいほど性能は良い。
ゼーベック係数S=0.40mVK-1
熱伝導率κp=κN=1.35Wm-1K-1
電気抵抗率ρP=ρN=10.2μΩm
増幅器の等価雑音抵抗RA=20Ω
導線の抵抗Rw=0.15Ω
熱コンダクタンスKA=5×10-4WK-1
温度T=273K
熱電素子のサイズ(L/A≒50):L=1.3mm、A=(0.16mm)2
モジュールサイズ(n=32):3mm×3mm×2mm
ゼーベック係数S=0.01~1mVK-1
熱伝導率κp=κN=1~400Wm-1K-1
電気抵抗率ρP=ρN=1×10-8~4×10-2Ωm
増幅器の等価雑音抵抗RA=1×10-2~4×106Ω
増幅器の周波数帯域幅Δf=1×10-2~4×103Hz
導線の抵抗Rw=1×10-2~4×106Ω
熱コンダクタンスKA=1×10-8~0.7WK-1
温度T=30~1300K
ゼーベック係数S=0.40mVK-1
熱伝導率κp=κN=1.35Wm-1K-1
電気抵抗率ρP=ρN=10.2μΩm
増幅器の等価雑音抵抗RA=20Ω
導線の抵抗Rw=0.15Ω
熱コンダクタンスKA=5×10-4WK-1
温度T=273K
等の値を用いて、10nW以下になる領域を図22~図37に示している。その場合、便宜的に複数のパラメータを同時に変えることはやめて、標準の条件から1個だけ変えて探索している。
1、1´…熱電モジュール
n…熱電モジュールを構成する熱電素子の対数
K…熱電モジュールの基板18、19間の熱コンダクタンス
KA…熱伝導、対流、熱放射による熱コンダクタンス
Claims (12)
- 温度制御された熱浴に熱電モジュールを介して熱の出入りが行われるように試料を設け、前記熱電モジュールの所定位置で該試料に吸発熱時に流れる熱流に応じた電圧を取り出す熱量計であって、
前記熱電モジュールを、一対のP型熱電素子とN型熱電素子を基板間で交互にπ型となるように構成した熱電素子をn対接続して構成し、
当該熱電モジュールが占有する周囲雰囲気または熱電モジュールを構成する熱電素子間に充填された材料などの補強材を介した熱伝導、周辺雰囲気の対流、周辺雰囲気を通じた熱放射の少なくとも何れかによる熱コンダクタンスと当該熱電モジュールの基板間の熱コンダクタンスとに応じた熱電モジュールの熱量計感度と、熱電モジュールの電気抵抗に基づく雑音とが、当該熱電モジュールを構成する当該熱電素子のL/A比(L:長さ、A:断面積)および当該熱電素子の対数nに依存する構造とし、
このうちのL/A比を6mm-1以上に設定し、対数nを4以上に設定したことを特徴とする熱量計。 - L/A比をさらに50mm-1以上に設定し、対数nを32以上に設定したことを特徴とする請求項1に記載の熱量計。
- L/A比をさらに6~1000mm-1に設定し、対数nを4~256以下に設定したことを特徴とする請求項1に記載の熱量計。
- L/A比をさらに50~1000mm-1に設定し、対数nを32~256以下に設定したことを特徴とする請求項1に記載の熱量計。
- 熱電モジュールを構成する基板間の熱コンダクタンスKMがL/A比と対数nに依存し、伝導、対流、熱放射による熱コンダクタンスKAが熱浴と熱電モジュールの相関に依存するように構成して、KM≧KAとなるようにL/A比および対数nを設定している請求項1に記載の熱量計。
- 熱電モジュール1個の電気抵抗RMがL/A比と対数nに依存するように構成して、電圧増幅用の増幅器が接続された場合に、熱電モジュールの数x、増幅器の等価雑音抵抗RAとの間に、
xRM≧RA-RW
の関係が成立するように、L/A比および対数nを設定している請求項1に記載の熱量計。 - 熱流分解能が、所定の対数nの下でL/A比を変化させていったときの飽和値の50倍~10倍以内となるように、当該L/A比と対数nを選択していることを特徴とする請求項1に記載の熱量計。
- 前記熱電モジュールが占有する周辺雰囲気を減圧する減圧手段を備える請求項1に記載の熱量計。
- 熱流分解能(雑音/熱量計感度)を10nW以下となるようにL/A比と対数nを選択していることを特徴とする請求項1~8の何れかに記載の熱量計。
- 温度制御された熱浴に熱電モジュールを介して試料を設け、熱電モジュールの所定位置で該試料の温度を検知する熱量計を構成するにあたり、
当該熱電モジュールが占有する周囲雰囲気または熱電モジュールを構成する熱電素子間に充填された材料などの補強材を介した熱伝導、周辺雰囲気の対流、周辺雰囲気を通じた熱放射の少なくとも何れかによる熱コンダクタンス、当該熱電モジュールの基板間の熱コンダクタンス、雑音のパラメータとなる熱電モジュールの電気抵抗の各値を含み、かつ当該熱電モジュールを構成する熱電素子のL/A比(L:長さ、A:断面積)および対数nを変数として熱流分解能(=雑音/熱量計感度)の関数を定義し、この関数に基づいてL/A比と対数nを選択することを特徴とする熱量計の設計方法。 - 温度制御された熱浴に熱電モジュールを介して試料を設け、該熱電モジュールの所定位置で該試料の温度を検知する熱量計を構成するにあたり、
x:熱電モジュールの数
AP:P型熱電素子の断面積
LP:P型熱電素子の長さ
AN:N型熱電素子の断面積
LN:N型熱電素子の長さ
ρP:P型熱電素子の電気抵抗率
ρN:N型熱電素子の電気抵抗率
n: 熱電モジュールを構成する熱電素子の対数
RM:熱電モジュール1個の電気抵抗
TM:熱電モジュールの絶対温度
RW:熱電モジュールから増幅器までの導線の抵抗
TW:導線の絶対温度
RA:増幅器の等価雑音抵抗
TA:標準雑音温度
k:ボルツマン定数
Δf:測定する周波数帯域幅
κP:P型熱電素子の熱伝導率
κN:N型熱電素子の熱伝導率
S(V/K):熱電材料のゼーベック係数
KM(W/K):(n対の熱電素子で構成された)熱電モジュールの基板間の熱コンダクタンス
KA(W/K):伝導、対流、熱放射による熱コンダクタンス
とした場合に、
に基づいて、L/A比と対数nを選択することを特徴とする請求項10に記載の熱量計の設計方法。 - 熱流分解能(雑音/熱量計感度)を10nW以下となるようにL/A比と対数nを選択する請求項10又は11の何れかに記載の熱量計の設計方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/420,094 US9846089B2 (en) | 2012-08-07 | 2013-08-07 | Calorimeter and method for designing calorimeter |
JP2014529544A JP6131406B2 (ja) | 2012-08-07 | 2013-08-07 | 熱量計および熱量計の設計方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-174754 | 2012-08-07 | ||
JP2012174754 | 2012-08-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014024945A1 true WO2014024945A1 (ja) | 2014-02-13 |
Family
ID=50068166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/071437 WO2014024945A1 (ja) | 2012-08-07 | 2013-08-07 | 熱量計および熱量計の設計方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9846089B2 (ja) |
JP (1) | JP6131406B2 (ja) |
WO (1) | WO2014024945A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2970778B1 (fr) * | 2011-01-21 | 2015-08-07 | Commissariat Energie Atomique | Dispositif de mesure ou de determination d'une caracteristique d'un flux thermique echange entre un premier milieu et un deuxieme milieu |
CN108886086B (zh) * | 2016-03-23 | 2022-03-04 | 国立研究开发法人产业技术综合研究所 | 热电模块发电评价装置 |
US11906454B2 (en) * | 2016-11-11 | 2024-02-20 | President And Fellows Of Harvard College | Highly sensitive microcalorimeters for cellular bioenergetics |
US11639877B2 (en) * | 2017-06-02 | 2023-05-02 | Calbact Ag | Calorimeter with multiple heat sinks and an amplifier |
JP7314927B2 (ja) * | 2018-02-27 | 2023-07-26 | 住友化学株式会社 | 熱電変換モジュール用部材、熱電変換モジュール及び熱電変換モジュール用部材の製造方法 |
WO2022093595A1 (en) * | 2020-10-30 | 2022-05-05 | The Regents Of The University Of Michigan | Calorimeter |
CN112432758B (zh) * | 2020-10-30 | 2022-05-24 | 北京航天长征飞行器研究所 | 一种塞块式量热计长时间变工况热流测量方法及应用 |
CN112710414B (zh) * | 2020-12-15 | 2021-12-10 | 上海交通大学 | 用于生化反应探测的立体微流控芯片量热计及制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6410135A (en) * | 1987-07-02 | 1989-01-13 | Nippon Inter Electronics Corp | Heat flow sensor |
JPH05223764A (ja) * | 1992-02-07 | 1993-08-31 | Rigaku Corp | 示差走査熱量計の炉体ユニット |
JPH0897472A (ja) * | 1994-05-23 | 1996-04-12 | Seiko Instr Inc | 熱電変換素子とその製造方法 |
JPH10125963A (ja) * | 1996-10-16 | 1998-05-15 | Chichibu Onoda Cement Corp | 熱電変換装置 |
JP2004020509A (ja) * | 2002-06-20 | 2004-01-22 | Kenichi Touzaki | 熱量計 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5066282A (ja) | 1973-10-11 | 1975-06-04 | ||
US5824561A (en) | 1994-05-23 | 1998-10-20 | Seiko Instruments Inc. | Thermoelectric device and a method of manufacturing thereof |
JP3196823B2 (ja) * | 1997-06-11 | 2001-08-06 | 日本電気株式会社 | 半導体装置 |
TW468360B (en) * | 1999-11-04 | 2001-12-11 | Jeng-San Jou | Thermopile infrared device, thermalpile infrared array device and the manufacturing method thereof |
US6597051B2 (en) * | 2001-05-22 | 2003-07-22 | Yeda Research And Development Co. Ltd. | Thermoelectric infrared detector |
US20090007952A1 (en) | 2004-10-18 | 2009-01-08 | Yoshiomi Kondoh | Structure of Peltier Element or Seebeck Element and Its Manufacturing Method |
JP4852740B2 (ja) * | 2005-04-26 | 2012-01-11 | 国立大学法人 千葉大学 | 高圧測定可能な示差走査型熱量計及びそれを用いた示差走査型熱流計装置 |
JP5598152B2 (ja) * | 2010-08-09 | 2014-10-01 | 富士通株式会社 | 熱電変換モジュールおよびその製造方法 |
-
2013
- 2013-08-07 JP JP2014529544A patent/JP6131406B2/ja active Active
- 2013-08-07 US US14/420,094 patent/US9846089B2/en active Active
- 2013-08-07 WO PCT/JP2013/071437 patent/WO2014024945A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6410135A (en) * | 1987-07-02 | 1989-01-13 | Nippon Inter Electronics Corp | Heat flow sensor |
JPH05223764A (ja) * | 1992-02-07 | 1993-08-31 | Rigaku Corp | 示差走査熱量計の炉体ユニット |
JPH0897472A (ja) * | 1994-05-23 | 1996-04-12 | Seiko Instr Inc | 熱電変換素子とその製造方法 |
JPH10125963A (ja) * | 1996-10-16 | 1998-05-15 | Chichibu Onoda Cement Corp | 熱電変換装置 |
JP2004020509A (ja) * | 2002-06-20 | 2004-01-22 | Kenichi Touzaki | 熱量計 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2014024945A1 (ja) | 2016-07-25 |
US20150219574A1 (en) | 2015-08-06 |
JP6131406B2 (ja) | 2017-05-31 |
US9846089B2 (en) | 2017-12-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6131406B2 (ja) | 熱量計および熱量計の設計方法 | |
Glosch et al. | A thermoelectric converter for energy supply | |
Iervolino et al. | Temperature calibration and electrical characterization of the differential scanning calorimeter chip UFS1 for the Mettler-Toledo Flash DSC 1 | |
JP4888861B2 (ja) | 電流検出型熱電対等の校正方法および電流検出型熱電対 | |
Muto et al. | Thermoelectric properties and efficiency measurements under large temperature differences | |
Basso et al. | A Peltier cells differential calorimeter with kinetic correction for the measurement of cp (H, T) and Δs (H, T) of magnetocaloric materials | |
JP2013511702A (ja) | 熱分析システムおよび熱分析方法 | |
US20150253206A1 (en) | Quasiadiabatic differential scanning calorimeter | |
JP2016024174A (ja) | 物質の熱拡散率測定方法およびその方法を使った物質の熱電特性評価装置 | |
Kolb et al. | Simultaneous measurement of all thermoelectric properties of bulk materials in the temperature range 300–600 K | |
EP3631393B1 (en) | Calorimeter | |
Inaba | Nano-watt stabilized DSC and ITS applications | |
Han et al. | A built-in temperature sensor in an integrated microheater | |
JP7232513B2 (ja) | ゼーベック係数測定装置及びその測定方法 | |
Goncalves et al. | Thermoelectric microstructures of Bi2Te3/Sb2Te3 for a self-calibrated micro-pyrometer | |
Drebushchak | Thermocouples, their characteristic temperatures, and simple approximation of the emf vs. T | |
Lopez et al. | Characterization of the thermal behavior of PN thermoelectric couples by scanning thermal microscope | |
Wijngaards et al. | Single-chip micro-thermostat applying both active heating and active cooling | |
Sarajlić et al. | Thin-film four-resistor temperature sensor for measurements in air | |
Kobayashi et al. | Thermal conductivity and dimensionless figure of merit of thermoelectric rhodium oxides measured by a modified Harman method | |
Patel et al. | Automated instrumentation for the determination of the high-temperature thermoelectric figure-of-merit | |
Woodbury et al. | Z-meters | |
Venkateshan et al. | Measurements of Temperature | |
KR101578374B1 (ko) | 써모파일 센서 모듈 | |
JP7060378B2 (ja) | 金属皮膜の熱伝導率計測方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13828166 Country of ref document: EP Kind code of ref document: A1 |
|
DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
ENP | Entry into the national phase |
Ref document number: 2014529544 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14420094 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 13828166 Country of ref document: EP Kind code of ref document: A1 |