WO2014015559A1 - 自动光学检测装置 - Google Patents

自动光学检测装置 Download PDF

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Publication number
WO2014015559A1
WO2014015559A1 PCT/CN2012/081734 CN2012081734W WO2014015559A1 WO 2014015559 A1 WO2014015559 A1 WO 2014015559A1 CN 2012081734 W CN2012081734 W CN 2012081734W WO 2014015559 A1 WO2014015559 A1 WO 2014015559A1
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WIPO (PCT)
Prior art keywords
substrate
backlight
disposed
detected
automatic optical
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Ceased
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PCT/CN2012/081734
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English (en)
French (fr)
Inventor
林勇佑
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to US13/695,763 priority Critical patent/US20140055603A1/en
Publication of WO2014015559A1 publication Critical patent/WO2014015559A1/zh
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Definitions

  • the present invention relates to the field of substrate defect detection, and more particularly to an automatic optical detecting device for detecting substrate defects.
  • Automatic optical inspection is a common detection method for substrate materials and semi-finished products such as glass substrates in the liquid crystal industry.
  • the automatic optical detecting device can be used to detect whether the image on the surface of the substrate meets the requirements, whether there is a dead point caused by the destructive substance, and the exact position of the dead point caused by the determination of the destructive substance.
  • CCD (Charge-coupled) with automatic optical inspection Device, charge coupled device) The image sensor takes a picture of the detected substrate to obtain a grayscale image of the detected substrate, and then analyzes the grayscale image to determine whether the detected substrate has a dead pixel.
  • FIG. 1 is a schematic structural view of a conventional automatic optical detecting device including an image sensor 11, a sensor fixing platform 12, a substrate carrying platform 13, and a substrate transfer module (not shown).
  • the detected substrate 14 such as a glass substrate
  • the image sensor 11 disposed above the detected substrate 14 is opposite to the detected substrate 14
  • the surface is photographed, and the photographed image is converted into a grayscale image, and then compared with the previously input substrate grayscale image, thereby determining whether the detected substrate 14 has a dead pixel and a position of a bad point.
  • the automatic optical detecting device can only detect defects such as dead spots on the surface of the substrate 14 to be inspected, and if defects such as dead spots appear inside the detected substrate 14, it may not be detected, thereby making the unqualified The substrate flows into the next process.
  • An object of the present invention is to provide an automatic optical detecting device capable of detecting internal defects of a substrate, which solves the technical problem that the conventional automatic optical detecting device cannot detect internal defects of the substrate.
  • the invention relates to an automatic optical detecting device comprising:
  • a sensor fixing platform disposed above the detected substrate
  • An image sensor disposed on the sensor fixing platform for taking a picture of the detected substrate
  • a backlight disposed below the detected substrate, corresponding to a position of the image sensor, for illuminating a detected portion of the detected substrate;
  • the substrate carrying platform is provided with a notch portion, the backlight is movably disposed in the notch portion, and the backlight is synchronously moved with the sensor fixing platform;
  • a blowing module for providing a supporting force to the detected substrate is further disposed in the notch portion, the blowing module is configured to set a wind pressure according to a weight of the detected substrate, and the backlight is disposed above the blowing module .
  • the invention also relates to an automatic optical detecting device comprising:
  • a sensor fixing platform disposed above the detected substrate
  • An image sensor disposed on the sensor fixing platform for taking a picture of the detected substrate
  • a backlight disposed below the detected substrate, corresponding to a position of the image sensor, for illuminating a detected portion of the detected substrate;
  • the substrate carrying platform is provided with a notch portion, and the backlight is disposed in the notch portion;
  • a transparent glass holder for carrying the substrate to be tested is further disposed in the notch portion, and the backlight is disposed under the transparent glass tray;
  • the upper surface of the transparent glass tray is flush with the upper surface of the substrate carrying platform
  • a light absorbing patch for preventing light reflection on the upper surface of the transparent glass holder is attached to the upper surface of the transparent glass holder.
  • the backlight is movably disposed in the notch portion, and the backlight moves in synchronization with the sensor fixing platform.
  • the backlight is fixedly disposed in the entire notch portion.
  • the invention also relates to an automatic optical detecting device comprising:
  • a sensor fixing platform disposed above the detected substrate
  • An image sensor disposed on the sensor fixing platform for taking a picture of the detected substrate
  • a backlight is disposed below the substrate to be inspected to correspond to a position of the image sensor for illuminating a detected portion of the substrate to be inspected.
  • a notch portion is disposed on the substrate carrying platform, and the backlight is disposed in the notch portion.
  • a blowing module for providing a supporting force to the detected substrate is further disposed in the notch portion, and the backlight is disposed above the blowing module.
  • the air blowing module sets the wind pressure in accordance with the weight of the substrate to be detected.
  • the backlight is movably disposed in the notch portion, and the backlight moves in synchronization with the sensor fixing platform.
  • a transparent glass holder for carrying the substrate to be inspected is further disposed in the notch portion, and the backlight is disposed below the transparent glass holder.
  • the upper surface of the transparent glass holder is flush with the upper surface of the substrate carrying platform.
  • the backlight is movably disposed in the notch portion, and the backlight moves in synchronization with the sensor fixing platform.
  • the backlight is fixedly disposed in the entire notch portion.
  • the upper surface of the transparent glass holder is attached with a light-absorbing patch for preventing light reflection on the upper surface of the transparent glass holder.
  • the automatic optical detecting device of the present invention can detect internal defects of the substrate, and solves the technical problem that the conventional automatic optical detecting device cannot detect the internal defects of the substrate.
  • FIG. 1 is a schematic structural view of a conventional automatic optical detecting device
  • Figure 2 is a side elevational view showing the first preferred embodiment of the automatic optical detecting device of the present invention
  • Figure 3 is a cross-sectional view taken along the line A-A' of Figure 2;
  • Figure 4 is a side elevational view showing the second preferred embodiment of the automatic optical detecting device of the present invention.
  • Figure 5 is a cross-sectional view taken along the line B-B' of Figure 4.
  • FIG. 2 is a side structural view showing a first preferred embodiment of the automatic optical detecting device of the present invention
  • FIG. 3 is a cross-sectional view taken along the line A-A' of FIG.
  • the automatic optical detecting device includes a substrate carrying platform 23, a sensor fixing platform 22, an image sensor 21, and a backlight 25.
  • the substrate carrying platform 23 is configured to carry the detected substrate 24; the sensor fixing platform 22 is disposed above the detected substrate 24; and the image sensor 21 is disposed on the sensor fixing platform 22 for taking a picture of the detected substrate 24 to be detected.
  • a grayscale image of the substrate 24; the backlight 25 is disposed under the substrate to be detected 24, corresponding to the position of the image sensor 21, by irradiating the detected portion of the substrate 24 to be detected, so that the image sensor 21 can more accurately determine the detected Whether the substrate 24 has internal defects (such as dead spots, etc.).
  • the substrate carrying platform 23 is provided with a notch portion 231.
  • the backlight 25 is movably disposed in the notch portion 231, and the backlight 25 moves synchronously with the sensor fixing platform 22 to ensure the position of the backlight 25 and the image sensor 21;
  • a blowing module 232 for providing a supporting force to the substrate 24 to be inspected is also provided in the 231 (such as an air ejector, Air)
  • the backlight 25 is disposed above the blowing module 232 and movable above the blowing module 232.
  • the blowing module 232 can set the wind pressure of the blowing according to the weight of the substrate 24 to be tested, so that the detected substrate 24 can be stabilized.
  • the detected substrate 24 does not collide with the edge of the substrate carrying platform 23 because the wind pressure is too small, and the movement of the detected substrate 24 is not unstable due to too large a wind pressure. If the substrate to be tested 24 is heavy, the wind pressure of the blowing module 232 is set large; if the substrate 24 to be tested is light, the wind pressure of the blowing module 232 is set small.
  • the blowing air pressure of the blowing module 232 is set according to the weight of the substrate 24 to be inspected, and then the substrate 24 to be inspected is placed on the substrate carrying platform 23, and the substrate is transferred by the module.
  • the drive substrate 24 is driven to move in the X direction in FIG.
  • the detected substrate 24 passes through the notch portion 231 of the substrate carrying platform 23, the detected substrate 24 is located above the notch portion 231 under the action of the blowing module 232, and the backlight 25 and the sensor fixing platform 22 move synchronously (as shown in FIG. 3).
  • the image sensor 21 on the sensor fixing platform 22 performs defect detection on the detected substrate 24 located above the notch portion 231.
  • the defect of the surface of the 24 affects the grayscale image obtained by the image sensor 21, and the internal defect of the detected substrate 24 also affects the grayscale image obtained by the image sensor 21, and thus the grayscale image obtained by aligning the image sensor 21 and
  • the substrate grayscale image input in advance is used to determine whether or not there is a defect on the surface or inside of the substrate to be inspected 24.
  • the substrate to be inspected 24 herein may be a pure glass substrate or a substrate having a function of depositing an opaque material such as a metal layer.
  • FIG. 4 is a side elevational view showing a second preferred embodiment of the automatic optical detecting device of the present invention
  • FIG. 5 is a cross-sectional view taken along the line B-B' of FIG.
  • the air blowing module is not disposed in the notch portion 231 of the substrate carrying platform 23, but a transparent glass tray 333 for carrying the detected substrate 24 is provided, and the backlight 25 is provided. It is disposed below the transparent glass holder 333; the upper surface of the transparent glass holder 333 is flush with the upper surface of the substrate carrying platform 23.
  • the backlight 25 is movably disposed in the notch portion 231, and the backlight 25 is moved in synchronization with the sensor fixing platform 22 to ensure defect detection of the detected portion of the substrate 24 to be inspected above the notch portion 231.
  • the backlight 25 can also be fixedly disposed on the entire notch portion 231, so that the backlight 25 does not need to be moved, and only the sensor fixing platform 22 is required to move over the notch portion 231 with the image sensor 21 to perform the detected portion of the detected substrate 24. Defect detection is sufficient.
  • the upper surface of the transparent glass holder 333 is attached with a light-absorbing patch 334 for anti-reflection (the thickness ratio of the light-absorbing patch 334 and the transparent glass tray 333 is only more Good display, not the actual thickness ratio).
  • the light absorbing patch 334 can prevent the light reflection of the upper surface of the transparent glass tray 333 from affecting the grayscale image acquired by the image sensor 21 to cause defect misjudgment.
  • the light absorbing patch 334 has only one-way light absorbing effect, and the light emitted by the backlight 25 can be directly transmitted without being absorbed by it.
  • the substrate transmitting module drives the detected substrate 24 in the Y direction in FIG. motion.
  • the substrate to be tested 24 passes through the transparent glass holder 333 (ie, the notch portion 231 of the substrate carrying platform 23), the backlight 25 and the sensor fixing platform 22 move synchronously (as shown in FIG. 5, of course, the backlight 25 can also be used.
  • the image sensor 21 on the sensor fixing platform 22 performs defect detection on the detected substrate 24 above the transparent glass holder 333.
  • the defect of the surface of the 24 affects the grayscale image obtained by the image sensor 21, and the internal defect of the detected substrate 24 also affects the grayscale image obtained by the image sensor 21, and thus the grayscale image obtained by aligning the image sensor 21 and
  • the substrate grayscale image input in advance is used to determine whether or not there is a defect on the surface or inside of the substrate to be inspected 24.
  • the substrate to be inspected 24 herein may be a pure glass substrate or a substrate having a function of depositing an opaque material such as a metal layer.
  • the transparent substrate 30 is used instead of the blowing module to support the substrate 24 to be detected located at the notch portion 231, and the upper surface of the transparent glass plate 333 is flush with the upper surface of the substrate carrying platform 23, the weight of the substrate 24 to be inspected is not The influence of the movement of the substrate to be inspected 24 ensures that the substrate to be inspected 24 does not collide with the edge of the substrate carrying platform 23, which greatly increases the compatibility of the automatic optical detecting device of the present invention with the tested substrate 24 of different specifications.
  • the automatic optical detecting device of the present invention can detect defects inside the substrate, and solves the technical problem that the conventional automatic optical detecting device cannot detect the internal defects of the substrate.

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Description

自动光学检测装置 技术领域
本发明涉及基板缺陷检测领域，特别是涉及一种用于检测基板缺陷的自动光学检测装置。
 背景技术
自动光学检测是液晶行业对玻璃基板等基板类原料及半成品的常用的检测手段。其中自动光学检测装置可用于检测基板表面的图像是否符合规定、是否存在由破坏性物质造成的坏点以及判定破坏性物质等造成的坏点的准确位置。一般采用自动光学检测装置的CCD（Charge-coupled Device，电荷耦合元件）图像传感器对被检测基板拍照得到被检测基板的灰度图像，然后通过对该灰度图像进行分析，判定被检测基板是否存在坏点。
图1是一种现有的自动光学检测装置的结构示意图，该自动光学检测装置包括图像传感器11、传感器固定平台12、基板承载平台13以及基板传送模块（图中未示出）。该自动光学检测装置使用时，被检测基板14（如玻璃基板）在基板传送模块的驱动下，在基板承载平台13上移动；同时设置在被检测基板14上方的图像传感器11对被检测基板14的表面进行拍照，并将拍照的图像转换为灰度图像后，与事先输入的基板灰度图像进行对比，依此判定被检测基板14是否存在坏点以及坏点的位置。
但是该自动光学检测装置只能对被检测基板14的表面的坏点等缺陷进行很好的检测，如被检测基板14的内部出现坏点等缺陷，则可能无法检测出来，从而使得不合格的基板流入到下一工序中。
故，有必要提供一种自动光学检测装置，以解决现有技术所存在的问题。
 技术问题
本发明的目的在于提供一种可以检测到基板内部缺陷的自动光学检测装置，解决了现有的自动光学检测装置无法检测到基板内部缺陷的技术问题。
 技术解决方案
本发明提供的技术方案如下：
本发明涉及一种自动光学检测装置，其包括：
基板承载平台，用于承载被检测基板；
传感器固定平台，设置在所述被检测基板的上方；
图像传感器，设置在所述传感器固定平台上，用于对所述被检测基板进行拍照；以及
背光源，设置在所述被检测基板的下方，与所述图像传感器的位置相对应，用于照射所述被检测基板的被检测部分；
所述基板承载平台上设置有一缺口部，所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动；
所述缺口部内还设置有用于提供托力给所述被检测基板的吹风模块，所述吹风模块根据所述被检测基板的重量设定风压，所述背光源设置在所述吹风模块的上方。
本发明还涉及一种自动光学检测装置，其包括：
基板承载平台，用于承载被检测基板；
传感器固定平台，设置在所述被检测基板的上方；
图像传感器，设置在所述传感器固定平台上，用于对所述被检测基板进行拍照；以及
背光源，设置在所述被检测基板的下方，与所述图像传感器的位置相对应，用于照射所述被检测基板的被检测部分；
所述基板承载平台上设置有一缺口部，所述背光源设置在所述缺口部内；
所述缺口部内还设置有用于承载所述被检测基板的透明玻璃托板，所述背光源设置在所述透明玻璃托板的下方；
所述透明玻璃托板的上表面与所述基板承载平台的上表面平齐；
所述透明玻璃托板的上表面贴附有用于防止所述透明玻璃托板的上表面的光反射的吸光贴片。
在本发明所述的自动光学检测装置中，所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动。
在本发明所述的自动光学检测装置中，所述背光源固定设置在整个所述缺口部内。
本发明还涉及一种自动光学检测装置，其包括：
基板承载平台，用于承载被检测基板；
传感器固定平台，设置在所述被检测基板的上方；
图像传感器，设置在所述传感器固定平台上，用于对所述被检测基板进行拍照；以及
背光源，设置在所述被检测基板的下方，与所述图像传感器的位置相对应，用于照射所述被检测基板的被检测部分。
在本发明所述的自动光学检测装置中，所述基板承载平台上设置有一缺口部，所述背光源设置在所述缺口部内。
在本发明所述的自动光学检测装置中，所述缺口部内还设置有用于提供托力给所述被检测基板的吹风模块，所述背光源设置在所述吹风模块的上方。
在本发明所述的自动光学检测装置中，所述吹风模块根据所述被检测基板的重量设定风压。
在本发明所述的自动光学检测装置中，所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动。
在本发明所述的自动光学检测装置中，所述缺口部内还设置有用于承载所述被检测基板的透明玻璃托板，所述背光源设置在所述透明玻璃托板的下方。
在本发明所述的自动光学检测装置中，所述透明玻璃托板的上表面与所述基板承载平台的上表面平齐。
在本发明所述的自动光学检测装置中，所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动。
在本发明所述的自动光学检测装置中，所述背光源固定设置在整个所述缺口部内。
在本发明所述的自动光学检测装置中，所述透明玻璃托板的上表面贴附有用于防止所述透明玻璃托板的上表面的光反射的吸光贴片。
 有益效果
相较于现有的自动光学检测装置，本发明的自动光学检测装置可检测到基板内部缺陷，解决了现有的自动光学检测装置无法检测到基板内部缺陷的技术问题。
 附图说明
图1是一种现有的自动光学检测装置的结构示意图；
图2为本发明的自动光学检测装置的第一优选实施例的侧视结构图；
图3为按图2的截面线A-A’方向所示的截面图；
图4为本发明的自动光学检测装置的第二优选实施例的侧视结构图；
图5为按图4的截面线B-B’方向所示的截面图；
其中，附图标记说明如下：
21、图像传感器；
22、传感器固定平台；
23、基板承载平台；
231、缺口部；
232、吹风模块；
333、透明玻璃托板；
334、吸光贴片；
24、被检测基板；
25、背光源。
 本发明的最佳实施方式
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
在图中，结构相似的单元是以相同标号表示。
请参照图2和图3，图2为本发明的自动光学检测装置的第一优选实施例的侧视结构图，图3为按图2的截面线A-A’方向所示的截面图。该自动光学检测装置包括基板承载平台23、传感器固定平台22、图像传感器21以及背光源25。该基板承载平台23用于承载被检测基板24；传感器固定平台22设置在被检测基板24的上方；图像传感器21设置在传感器固定平台22上，用于对被检测基板24进行拍照，得到被检测基板24的灰度图像；背光源25设置在被检测基板24的下方，与图像传感器21的位置相对应，通过照射被检测基板24的被检测部分，使得图像传感器21可以更准确地判断被检测基板24是否具有内部缺陷（如坏点等）。
该基板承载平台23上设置有一缺口部231，背光源25活动设置在缺口部231内，背光源25与传感器固定平台22同步运动，以保证背光源25与图像传感器21的位置相对应；缺口部231内还设置有用于提供托力给被检测基板24的吹风模块232（如空气喷射器，Air Jet），该背光源25设置在吹风模块232的上方并可在吹风模块232的上方运动，吹风模块232可根据被检测基板24的重量设定吹风的风压，使得被检测基板24可稳定的从缺口部231的上方通过；而不会因为风压太小造成被检测基板24与基板承载平台23的边缘相撞，也不会因为风压太大造成被检测基板24移动的不稳定。如被检测基板24较重，则将吹风模块232的风压设置的较大；如被检测基板24较轻，则将吹风模块232的风压设置的较小。
本实施例中的自动光学检测装置使用时，根据被检测基板24的重量设定好吹风模块232的吹风风压，然后将被检测基板24放置在基板承载平台23上，由基板传送模块（图中未示出）驱动被检测基板24按图2中的X方向运动。当被检测基板24经过基板承载平台23的缺口部231的时候，被检测基板24在吹风模块232的作用下位于缺口部231的上方，背光源25和传感器固定平台22同步运动（如图3所示的方向），传感器固定平台22上的图像传感器21对位于缺口部231上方的被检测基板24进行缺陷检测。由于背光源25设置在被检测基板24的下方，而图像传感器21设置在被检测基板24的上方，背光源25出射的光线可以透过被检测基板24的整个被检测部分，这样不仅被检测基板24的表面的缺陷会影响图像传感器21获得的灰度图像，而且被检测基板24的内部缺陷也会影响图像传感器21获得的灰度图像，因此可通过比对图像传感器21获得的灰度图像和事先输入的基板灰度图像，来判断被检测基板24的表面或内部是否存在缺陷。这里的被检测基板24可以是纯玻璃基板，也可以是沉积有金属层等不透明材料的具有一定功能的基板。
请参照图4和图5，图4为本发明的自动光学检测装置的第二优选实施例的侧视结构图，图5为按图4的截面线B-B’方向所示的截面图。本实施例与本发明的第一优选实施例的区别在于，基板承载平台23的缺口部231内未设置吹风模块，而是设置有用于承载被检测基板24的透明玻璃托板333，背光源25设置在透明玻璃托板333的下方；透明玻璃托板333的上表面与基板承载平台23的上表面平齐。
背光源25活动设置在缺口部231内，这时背光源25与传感器固定平台22同步运动，以保证对缺口部231上方的被检测基板24的被检测部分进行缺陷检测。
当然背光源25也可固定设置在整个缺口部231，这样背光源25不需要运动，只需要传感器固定平台22带着图像传感器21在缺口部231上方运动，对被检测基板24的被检测部分进行缺陷检测即可。
为了使得图像传感器21具有更好的检测效果，该透明玻璃托板333的上表面贴附有用于防反射的吸光贴片334（该吸光贴片334与透明玻璃托板333的厚度比例仅为了更好的显示，并非实际厚度比例）。该吸光贴片334可以避免透明玻璃托板333的上表面的光反射影响图像传感器21获取的灰度图像而产生缺陷误判。该吸光贴片334只有单向吸光作用，背光源25发出的光可以不被其吸收而直接透过。
本实施例中的自动光学检测装置使用时，只需将被检测基板24放置在基板承载平台23上，由基板传送模块（图中未示出）驱动被检测基板24按图4中的Y方向运动。当被检测基板24经过透明玻璃托板333（即基板承载平台23的缺口部231）的时候，背光源25和传感器固定平台22同步运动（如图5所示的方向，当然背光源25也可固定设置），传感器固定平台22上的图像传感器21对透明玻璃托板333上方的被检测基板24进行缺陷检测。由于背光源25设置在被检测基板24的下方，而图像传感器21设置在被检测基板24的上方，背光源25出射的光线可以透过被检测基板24的整个被检测部分，这样不仅被检测基板24的表面的缺陷会影响图像传感器21获得的灰度图像，而且被检测基板24的内部缺陷也会影响图像传感器21获得的灰度图像，因此可通过比对图像传感器21获得的灰度图像和事先输入的基板灰度图像，来判断被检测基板24的表面或内部是否存在缺陷。这里的被检测基板24可以是纯玻璃基板，也可以是沉积有金属层等不透明材料的具有一定功能的基板。
由于使用透明玻璃托板333代替吹风模块支撑位于缺口部231的被检测基板24，且透明玻璃托板333的上表面与基板承载平台23的上表面平齐，使得被检测基板24的重量不会对被检测基板24移动的产生影响，保证了被检测基板24不会与基板承载平台23的边缘相撞，大大增加了本发明的自动光学检测装置对不同规格的被检测基板24的兼容性。
本发明的自动光学检测装置可检测到基板内部的缺陷，解决了现有的自动光学检测装置无法检测到基板内部缺陷的技术问题。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。
 本发明的实施方式
工业实用性
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Claims (14)

  1. 一种自动光学检测装置，其包括：
    基板承载平台，用于承载被检测基板；
    传感器固定平台，设置在所述被检测基板的上方；
    图像传感器，设置在所述传感器固定平台上，用于对所述被检测基板进行拍照；以及
    背光源，设置在所述被检测基板的下方，与所述图像传感器的位置相对应，用于照射所述被检测基板的被检测部分；
    所述基板承载平台上设置有一缺口部，所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动；
    所述缺口部内还设置有用于提供托力给所述被检测基板的吹风模块，所述吹风模块根据所述被检测基板的重量设定风压，所述背光源设置在所述吹风模块的上方。
  2. 一种自动光学检测装置，其包括：
    基板承载平台，用于承载被检测基板；
    传感器固定平台，设置在所述被检测基板的上方；
    图像传感器，设置在所述传感器固定平台上，用于对所述被检测基板进行拍照；以及
    背光源，设置在所述被检测基板的下方，与所述图像传感器的位置相对应，用于照射所述被检测基板的被检测部分；
    所述基板承载平台上设置有一缺口部，所述背光源设置在所述缺口部内；
    所述缺口部内还设置有用于承载所述被检测基板的透明玻璃托板，所述背光源设置在所述透明玻璃托板的下方；
    所述透明玻璃托板的上表面与所述基板承载平台的上表面平齐；
    所述透明玻璃托板的上表面贴附有用于防止所述透明玻璃托板的上表面的光反射的吸光贴片。
  3. 根据权利要求2所述的自动光学检测装置，其中所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动。
  4. 根据权利要求2所述的自动光学检测装置，其中所述背光源固定设置在整个所述缺口部内。
  5. 一种自动光学检测装置，其包括：
    基板承载平台，用于承载被检测基板；
    传感器固定平台，设置在所述被检测基板的上方；
    图像传感器，设置在所述传感器固定平台上，用于对所述被检测基板进行拍照；以及
    背光源，设置在所述被检测基板的下方，与所述图像传感器的位置相对应，用于照射所述被检测基板的被检测部分。
  6. 根据权利要求5所述的自动光学检测装置，其中所述基板承载平台上设置有一缺口部，所述背光源设置在所述缺口部内。
  7. 根据权利要求6所述的自动光学检测装置，其中所述缺口部内还设置有用于提供托力给所述被检测基板的吹风模块，所述背光源设置在所述吹风模块的上方。
  8. 根据权利要求7所述的自动光学检测装置，其中所述吹风模块根据所述被检测基板的重量设定风压。
  9. 根据权利要求7所述的自动光学检测装置，其中所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动。
  10. 根据权利要求6所述的自动光学检测装置，其中所述缺口部内还设置有用于承载所述被检测基板的透明玻璃托板，所述背光源设置在所述透明玻璃托板的下方。
  11. 根据权利要求10所述的自动光学检测装置，其中所述透明玻璃托板的上表面与所述基板承载平台的上表面平齐。
  12. 根据权利要求10所述的自动光学检测装置，其中所述背光源活动设置在所述缺口部内，所述背光源与所述传感器固定平台同步运动。
  13. 根据权利要求10所述的自动光学检测装置，其中所述背光源固定设置在整个所述缺口部内。
  14. 根据权利要求10所述的自动光学检测装置，其中所述透明玻璃托板的上表面贴附有用于防止所述透明玻璃托板的上表面的光反射的吸光贴片。
PCT/CN2012/081734 2012-07-25 2012-09-21 自动光学检测装置 Ceased WO2014015559A1 (zh)

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102914266B (zh) * 2012-11-15 2015-04-22 深圳市华星光电技术有限公司 一种线宽量测装置
CN103076344A (zh) * 2012-12-27 2013-05-01 深圳市华星光电技术有限公司 显示面板的缺陷检测方法及其检测装置
CN103115928A (zh) * 2013-02-05 2013-05-22 深圳市华星光电技术有限公司 玻璃表面异物检查装置、检查机及其检查方法
KR20150019886A (ko) * 2013-08-16 2015-02-25 삼성디스플레이 주식회사 유기 발광 표시 장치 제조 방법
CN103697422A (zh) * 2013-12-11 2014-04-02 江苏大学 一种同轴照明自动光学检测光源装置
CN104019961B (zh) * 2014-05-29 2017-03-08 京东方光科技有限公司 一种背光源检测设备
CN104501721A (zh) * 2014-12-26 2015-04-08 广东威创视讯科技股份有限公司 一种拼接屏中相对位置的检查方法及系统
CN104535580A (zh) * 2014-12-31 2015-04-22 中国电子科技集团公司第四十一研究所 一种基于机器视觉技术的香烟滤棒内置物检测方法
CN107966273A (zh) * 2017-12-18 2018-04-27 昆山精讯电子技术有限公司 一种自动压接机构及自动压接装置
CN112764266A (zh) * 2020-12-31 2021-05-07 惠州视维新技术有限公司 背光模组、显示装置以及显示装置的检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1862319A (zh) * 2005-05-12 2006-11-15 奥林巴斯株式会社 基板检查装置
JP4307872B2 (ja) * 2003-03-18 2009-08-05 オリンパス株式会社 基板検査装置
CN101936916A (zh) * 2009-07-02 2011-01-05 法国圣-戈班玻璃公司 检测分离的低刚度的透明或半透明体的缺陷的设备和方法
CN102565092A (zh) * 2010-09-27 2012-07-11 株式会社日立高新技术 玻璃基板缺陷检查装置以及玻璃基板缺陷检查方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100195096A1 (en) * 2009-02-04 2010-08-05 Applied Materials, Inc. High efficiency multi wavelength line light source
JP2011142297A (ja) * 2009-12-08 2011-07-21 Hitachi Via Mechanics Ltd 薄膜太陽電池製造方法及びレーザスクライブ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4307872B2 (ja) * 2003-03-18 2009-08-05 オリンパス株式会社 基板検査装置
CN1862319A (zh) * 2005-05-12 2006-11-15 奥林巴斯株式会社 基板检查装置
CN101936916A (zh) * 2009-07-02 2011-01-05 法国圣-戈班玻璃公司 检测分离的低刚度的透明或半透明体的缺陷的设备和方法
CN102565092A (zh) * 2010-09-27 2012-07-11 株式会社日立高新技术 玻璃基板缺陷检查装置以及玻璃基板缺陷检查方法

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