WO2013171917A1 - Actuateur piézoélectrique, dispositif de vibration piézoélectrique et terminal mobile - Google Patents

Actuateur piézoélectrique, dispositif de vibration piézoélectrique et terminal mobile Download PDF

Info

Publication number
WO2013171917A1
WO2013171917A1 PCT/JP2012/072263 JP2012072263W WO2013171917A1 WO 2013171917 A1 WO2013171917 A1 WO 2013171917A1 JP 2012072263 W JP2012072263 W JP 2012072263W WO 2013171917 A1 WO2013171917 A1 WO 2013171917A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric actuator
piezoelectric
electrode
main surface
internal electrode
Prior art date
Application number
PCT/JP2012/072263
Other languages
English (en)
Japanese (ja)
Inventor
健 岡村
中村　成信
Original Assignee
京セラ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京セラ株式会社 filed Critical 京セラ株式会社
Priority to KR1020127025689A priority Critical patent/KR101579121B1/ko
Priority to JP2013526227A priority patent/JP5680202B2/ja
Publication of WO2013171917A1 publication Critical patent/WO2013171917A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/045—Plane diaphragms using the distributed mode principle, i.e. whereby the acoustic radiation is emanated from uniformly distributed free bending wave vibration induced in a stiff panel and not from pistonic motion
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10—General applications
    • H04R2499/11—Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's

Definitions

  • the present invention relates to a piezoelectric vibration device, a piezoelectric actuator suitable for a portable terminal, a piezoelectric vibration device using the piezoelectric actuator, and a portable terminal.
  • a bimorph type piezoelectric element 10 in which a surface electrode 104 is formed on the surface of a laminate 103 in which a plurality of internal electrodes 101 and a plurality of piezoelectric layers 102 are laminated, (Refer to Patent Document 1), a flexible substrate 105 is joined to the main surface of the piezoelectric element 10 with a conductive joining member 106, and the surface electrode 104 of the piezoelectric element 10 and the wiring conductor 107 of the flexible substrate 105 are electrically connected. It is known (see Patent Document 2).
  • the piezoelectric actuator as shown in FIG. 11 can generate a bending vibration in which the main surface is bent. Moreover, by applying to a piezoelectric vibration device, a portable terminal, etc., it can be set as the vibration source of these devices.
  • the present invention has been devised in view of the above circumstances, and an object of the present invention is to provide a piezoelectric actuator, a piezoelectric vibration device, and a portable terminal that can obtain larger bending vibration.
  • the piezoelectric actuator of the present invention includes a laminate in which an internal electrode and a piezoelectric layer are laminated, and a surface electrode electrically connected to the internal electrode on one main surface of the laminate, An active part in which the first pole and the second pole of the internal electrode overlap in the stacking direction, and an inactive part other than the active part.
  • the active portion is thicker than the inactive portion, and the other main surface of the laminate is flat.
  • the piezoelectric vibration device includes the piezoelectric actuator and a vibration plate bonded to the other main surface of the piezoelectric element.
  • the portable terminal of the present invention includes the piezoelectric actuator, an electronic circuit, a display, and a housing, and the other main surface of the piezoelectric actuator is bonded to the display or the housing. This is a featured mobile terminal.
  • the thickness of the inactive portion is thinner than that of the active portion, while the shape of the main surface makes it easier to draw a force in the bending direction.
  • An actuator can be realized.
  • FIG. 3 is a schematic cross-sectional view taken along line BB shown in a). It is a schematic sectional drawing which shows the other example of FIG.1 (c). It is a schematic sectional drawing which shows the other example of FIG.1 (c). It is a schematic sectional drawing which shows the other example of FIG.1 (c). It is a schematic sectional drawing which shows the other example of FIG.1 (c). It is a schematic sectional drawing which shows the other example of FIG.1 (c). It is a schematic sectional drawing which shows the other example of FIG.1 (c).
  • FIG. 1 is a schematic perspective view schematically showing a piezoelectric vibration device according to an embodiment of the present invention. It is a schematic perspective view which shows typically the portable terminal of embodiment of this invention. It is a schematic sectional drawing cut
  • FIG. 6 is a schematic cross-sectional view taken along line -B.
  • FIG. 1A is a schematic perspective view showing an example of an embodiment of the piezoelectric actuator of the present invention
  • FIG. 1B is a schematic cross-sectional view taken along the line AA shown in FIG.
  • FIG. 1C is a schematic cross-sectional view taken along line BB shown in FIG.
  • a piezoelectric actuator 1 of the present invention shown in FIG. 1 includes a laminate 4 in which an internal electrode 2 and a piezoelectric layer 3 are laminated, and a surface electrode 5 electrically connected to the internal electrode 2 on one main surface of the laminate 4.
  • the internal electrode 2 includes a first electrode 21 and a second electrode 22, and an active part 41 in which the first electrode 21 and the second electrode 22 of the internal electrode 2 overlap in the stacking direction, and an active part Inactive portions 42 other than 41 are included, the thickness of the active portion 41 is greater than the thickness of the inactive portion 42, and the other main surface of the laminate 4 is flat.
  • the laminated body 4 constituting the piezoelectric actuator 1 is formed by laminating an internal electrode 2 and a piezoelectric layer 3, and includes an active portion 41 in which a plurality of internal electrodes 2 overlap in the laminating direction and other inactive portions 42. For example, it is formed in a long shape.
  • the length of the laminate 4 is preferably, for example, 18 mm to 28 mm, and more preferably 22 mm to 25 mm.
  • the width of the laminate 4 is preferably 1 mm to 6 mm, and more preferably 3 mm to 4 mm.
  • the thickness of the laminate 4 is preferably 0.2 mm to 1.0 mm, and more preferably 0.4 mm to 0.8 mm.
  • the internal electrode 2 constituting the laminated body 4 is formed by simultaneous firing with ceramics forming the piezoelectric layer 3 and includes a first electrode 21 and a second electrode 22.
  • the first electrode 21 is a ground electrode
  • the second electrode 22 is a positive electrode or a negative electrode.
  • the region where the first electrode 21 and the second electrode 22 of the internal electrode 2 overlap in the stacking direction is the active portion 41, and other regions (for example, the region without the internal electrode 2 when viewed from the stacking direction, the first The region where only the first electrode 21 or only the second electrode 22 overlaps) is the inactive portion 42.
  • Piezoelectric layers 3 are alternately stacked to sandwich the piezoelectric layers 3 from above and below, and the first pole 21 and the second pole 22 are arranged in the stacking order, so that the piezoelectric body sandwiched between them.
  • a driving voltage is applied to the layer 3.
  • this forming material for example, a conductor mainly composed of silver or a silver-palladium alloy having a low reactivity with piezoelectric ceramics, or a conductor containing copper, platinum, or the like can be used. You may make it contain.
  • the end portions of the first pole 21 and the second pole 22 are alternately led to a pair of side surfaces facing each other of the stacked body 4.
  • the length of the internal electrode 2 is preferably 17 mm to 25 mm, for example, and more preferably 21 mm to 24 mm.
  • the width of the internal electrode 2 is preferably 1 mm to 5 mm, and more preferably 2 mm to 4 mm.
  • the thickness of the internal electrode 2 is preferably 0.1 to 5 ⁇ m, for example.
  • the piezoelectric layer 3 constituting the multilayer body 4 is formed of ceramics having piezoelectric characteristics.
  • ceramics for example, a perovskite oxide made of lead zirconate titanate (PbZrO 3 -PbTiO 3 ), Lithium niobate (LiNbO 3 ), lithium tantalate (LiTaO 3 ), or the like can be used.
  • the thickness of one layer of the piezoelectric layer 3 is preferably set to about 0.01 to 0.1 mm, for example, so as to be driven at a low voltage. In order to obtain a large bending vibration, it is preferable to have a piezoelectric d31 constant of 200 pm / V or more.
  • a surface electrode 5 electrically connected to the internal electrode 2 is provided on at least one main surface of the laminate 4.
  • the surface electrode 5 in the form shown in FIG. 1 includes a first surface electrode 51 having a large area, a second surface electrode 52 having a small area, and a third surface electrode 53.
  • the first surface electrode 51 is electrically connected to the internal electrode 2 to be the first electrode 21, and the second surface electrode 52 is a second electrode disposed on one main surface side.
  • the internal electrode 2 serving as the first electrode 22 and the third surface electrode 53 are electrically connected to the internal electrode 2 serving as the second electrode 22 disposed on the other main surface side.
  • the length of the first surface electrode 51 is preferably, for example, 17 mm to 23 mm, and more preferably 19 mm to 21 mm.
  • the width of the first surface electrode 51 is preferably 1 mm to 5 mm, for example, and more preferably 2 mm to 4 mm.
  • the lengths of the second surface electrode 52 and the third surface electrode 53 are preferably 1 mm to 3 mm, for example.
  • the widths of the second surface electrode 52 and the third surface electrode 53 are preferably 0.5 mm to 1.5 mm, for example.
  • the multilayer body 4 includes an active portion 41 in which the first electrode 21 and the second electrode 22 of the internal electrode 2 overlap each other in the stacking direction, Inactive portions 42 other than 41 are included, the thickness of the active portion 41 is thicker than the thickness of the inactive portion 42, and the other main surface of the laminate 4 is flat.
  • the piezoelectric actuator 1 of the present invention is used by sticking the other main surface of the laminate 4 to an object (such as a vibration plate to be described later) that mainly applies vibration, but the other main surface of the laminate 4 is flat. Therefore, it becomes easy to cause bending vibration integrally with the object to which vibration is applied, and the efficiency of bending vibration can be improved as a whole. Furthermore, the thickness of the active portion 41 where the first electrode 21 and the second electrode 22 of the internal electrode 2 overlap in the stacking direction is greater than the thickness of the inactive portion 42, that is, one main surface of the stacked body 4.
  • the inactive portion 42 is thinner than the active portion 41 and the bending rigidity of the vibration device integrated with the object to be vibrated is lowered, the force in the bending direction during bending vibration can be easily extracted. ing. Thereby, the piezoelectric actuator 1 and the piezoelectric vibration device can perform larger bending vibration with a small electric power. Further, as a result of the effective use of energy by bending, it occurs at the boundary between the active part 41 and the inactive part 42 of the internal electrode close to one main surface (the boundary between the internal electrode 2 and the piezoelectric layer 3). The generation of microcracks can be reduced by reducing unnecessary stress, and deterioration of the piezoelectric actuator 1 due to deterioration can be suppressed.
  • the thickness of the active part 41 is preferably 2 to 10% thicker than that of the inactive part 42.
  • one main surface is inclined from the active portion 41 to the inactive portion 42, so that the active portion 41 continuously passes through the inactive portion 42. Therefore, the stress in the bending direction can be easily extracted without bending stress on the surface of the laminate 4.
  • all the internal electrodes 2 may have a planar shape (straight section), but are arranged on one main surface side of the laminate 4 as shown in FIG. 1 (c).
  • the formed internal electrode 2 may have an end located near the boundary between the active part 41 and the inactive part 42 curved toward the other main surface. According to this configuration, the curved shape of the end portion of the internal electrode 2 facilitates drawing out the force in the bending direction when bending. Thereby, the piezoelectric actuator 1 can perform larger bending vibration with small electric power.
  • the bending is such that the tangent at the end of the internal electrode 2 is inclined by 5 ° or more, particularly 10 ° or more with respect to the tangent drawn along the plane portion of the internal electrode 2. It is effective in that it is easy to draw out the force in the direction of.
  • the end portions of the internal electrode 2 located near the boundary between the active portion 41 and the inactive portion 42 may all be curved toward the other main surface side.
  • the force in the bending direction when bending can be more easily pulled out.
  • unnecessary stress generated at the boundary between the active part 41 and the inactive part 42 of the internal electrode is reduced to reduce the occurrence of microcracks, and the piezoelectric actuator 1 is deteriorated and the amount of displacement is reduced. Can be suppressed.
  • the end portions of the internal electrode 2 arranged on both main surfaces of the laminate 4 that are located in the vicinity of the boundary between the active portion 41 and the inactive portion 42 are curved toward the inside. This makes it easy to draw out the force in the direction of bending when the object to be vibrated is thin and has low rigidity, when bending to both main surfaces.
  • the generation of microcracks can be reduced by reducing unnecessary stress, and deterioration of the piezoelectric actuator 1 due to deterioration can be suppressed.
  • the degree of curvature of the end portion of the internal electrode 2 increases as it approaches the one main surface.
  • the internal electrode 2 closest to the other main surface of the multilayer body 4 may be flat, and the other main surface is attached to an object (such as a diaphragm described later) to which vibration is applied.
  • an object such as a diaphragm described later
  • the surface electrode 5 is provided from the active part 41 to the inactive part 42. Since the surface electrode 5 (first surface electrode 51) is provided so as to extend in the width direction from the active portion 41 to the inactive portion 42, it is possible to further draw out the force in the bending direction when bending. it can.
  • the surface electrode 5 and the internal electrode 2 so as to apply a voltage to the piezoelectric layer 3 positioned between the surface electrode 5 and the internal electrode 2 closest to the surface electrode 5, a region to which a voltage is applied can be obtained. Since the piezoelectric layer 3 sandwiched between the other internal electrodes 2 can be widened in the width direction in addition to the longitudinal direction, a voltage is applied to the region of the inactive portion 42 to effectively bend it.
  • the thickness of the inactive portion 42 in the stacking direction is equal to or less than the thickness from the upper surface of the uppermost internal electrode 2 to the lower surface of the lowermost internal electrode 2 in the active portion 41.
  • the surface electrode 5 (first surface electrode 51) is preferably provided up to this region.
  • the piezoelectric actuator 1 of the present invention includes a flexible substrate 6 having a wiring conductor 61, and the surface electrode 5 and the wiring conductor 61 are electrically connected via a conductive bonding member 7. As described above, a part of the flexible substrate 6 may be bonded to one main surface of the laminate 4.
  • the flexible substrate 6 is, for example, a flexible printed wiring substrate in which two wiring conductors 61 are embedded in a resin film, and a connector (not shown) for connecting to an external circuit is connected to one end. .
  • a conductive adhesive As the conductive bonding member 7, a conductive adhesive, solder, or the like is used, but a conductive adhesive is preferable.
  • a conductive adhesive is used in which conductive particles 72 made of resin balls such as gold, copper, nickel, or gold plating are dispersed in a resin 71 such as an acrylic resin, an epoxy resin, a silicone resin, a polyurethane resin, or a synthetic rubber. This is because the stress caused by vibration can be reduced compared to solder.
  • the conductive adhesive is preferably an anisotropic conductive material.
  • the anisotropic conductive material is composed of conductive particles responsible for electrical bonding and a resin adhesive responsible for adhesion.
  • connection part with 6 can be made compact.
  • the piezoelectric actuator 1 shown in FIG. 1 is a so-called bimorph type piezoelectric actuator that receives an electric signal from the surface electrode 5 and vibrates and vibrates so that one main surface and the other main surface are bent surfaces.
  • the piezoelectric actuator of the present invention is not limited to the bimorph type, and may be a unimorph type. For example, by joining (bonding) the other principal surface of the piezoelectric actuator to a diaphragm described later, It can be bent and vibrated.
  • a ceramic green sheet to be the piezoelectric layer 3 is produced. Specifically, a ceramic slurry is prepared by mixing a calcined powder of piezoelectric ceramic, a binder made of an organic polymer such as acrylic or butyral, and a plasticizer. And a ceramic green sheet is produced using this ceramic slurry by using tape molding methods, such as a doctor blade method and a calender roll method.
  • the piezoelectric ceramic any material having piezoelectric characteristics may be used.
  • a perovskite oxide made of lead zirconate titanate (PbZrO 3 -PbTiO 3 ) can be used.
  • the plasticizer dibutyl phthalate (DBP), dioctyl phthalate (DOP), or the like can be used.
  • a conductive paste to be the internal electrode 2 is produced.
  • a conductive paste is prepared by adding and mixing a binder and a plasticizer to a silver-palladium alloy metal powder. This conductive paste is applied on the ceramic green sheet in the pattern of the internal electrode 2 using a screen printing method. Further, a plurality of ceramic green sheets printed with this conductive paste are laminated, subjected to a binder removal treatment at a predetermined temperature, fired at a temperature of 900 to 1200 ° C., and then subjected to a predetermined grinding using a surface grinder or the like. By performing a grinding process so as to obtain a shape, a laminated body 4 including the internal electrodes 2 and the piezoelectric body layers 3 that are alternately laminated is manufactured.
  • a mold or a resin mold having a dent is used as an upper mold (one main surface side) of the press device.
  • the thickness of the active part 41 is thicker than the thickness of the other inactive part 42, The piezoelectric actuator 1 in which the other main surface of the laminate 4 is flat can be produced.
  • the laminated body 4 is not limited to what is produced by said manufacturing method, You may give a grinding process so that it may become a predetermined shape.
  • a silver glass-containing conductive paste prepared by adding a binder, a plasticizer, and a solvent to a mixture of conductive particles mainly composed of silver and glass is used as a main electrode of the laminate 4 in the pattern of the surface electrode 5.
  • a baking process is performed at a temperature of 650 to 750 ° C. to form the surface electrode 5.
  • a via that penetrates the piezoelectric layer 3 may be formed or connected, or a side electrode may be formed on the side surface of the multilayer body 4. It may be produced by any manufacturing method.
  • the flexible substrate 6 is connected and fixed (bonded) to the piezoelectric element 10 using the conductive bonding member 7.
  • a conductive bonding member paste is applied and formed at a predetermined position of the piezoelectric element 10 using a technique such as screen printing. Then, the flexible substrate 6 is connected and fixed to the piezoelectric element 10 by curing the conductive bonding member paste in a state where the flexible substrate 6 is brought into contact therewith.
  • the conductive bonding member paste may be applied and formed on the flexible substrate 6 side.
  • the conductive bonding member 7 is a conductive adhesive
  • the resin constituting the conductive adhesive is made of a thermoplastic resin
  • the conductive adhesive is placed at a predetermined position on the piezoelectric element 10 or the flexible substrate 6.
  • the thermoplastic resin softens and flows by heating and pressurizing the piezoelectric element 10 and the flexible substrate 6 in contact with a conductive adhesive.
  • the plastic resin is cured, and the flexible substrate 6 is connected and fixed to the piezoelectric element 10.
  • the piezoelectric vibration device of the present invention has a piezoelectric actuator 1 and a vibration plate 81 attached to the other main surface of the piezoelectric actuator 1 as shown in FIG.
  • the diaphragm 81 has a rectangular thin plate shape.
  • the vibration plate 81 can be preferably formed using a material having high rigidity and elasticity such as acrylic resin or glass. Further, the thickness of the diaphragm 81 is set to 0.4 mm to 1.5 mm, for example.
  • the diaphragm 81 is attached to the other main surface of the piezoelectric actuator 1 via a joining member 82.
  • the entire surface of the other main surface may be bonded to the diaphragm 81 via the bonding member 82, or substantially the entire surface may be bonded.
  • the joining member 82 has a film shape. Further, the joining member 82 is formed of a material that is softer and more easily deformed than the diaphragm 81, and has a smaller elastic modulus and rigidity such as Young's modulus, rigidity, and bulk modulus than the diaphragm 81. That is, the joining member 82 is deformable and deforms more greatly than the diaphragm 81 when the same force is applied. Then, the other main surface (main surface on the ⁇ z direction side in the drawing) of the piezoelectric actuator 1 is fixed to the one main surface (main surface on the + z direction side in the drawing) of the bonding member 82 as a whole. A part of one main surface (main surface on the + z direction side in the drawing) of the diaphragm 81 is fixed to the other main surface (main surface on the ⁇ z direction side in the drawing).
  • the joining member 82 may be a single member or a composite composed of several members.
  • a joining member 82 for example, a double-sided tape in which a pressure-sensitive adhesive is attached to both surfaces of a substrate made of a nonwoven fabric or the like, various elastic adhesives which are adhesives having elasticity, and the like can be suitably used.
  • the thickness of the joining member 82 is desirably larger than the amplitude of the flexural vibration of the piezoelectric actuator 1, but if it is too thick, the vibration is attenuated, so it is set to 0.1 mm to 0.6 mm, for example.
  • the material of the bonding member 82 is not limited, and the bonding member 82 may be formed of a material that is harder and less deformable than the vibration plate 81. In some cases, a configuration without the joining member 82 may be used.
  • the piezoelectric vibration device of this example having such a configuration functions as a piezoelectric vibration device that causes the piezoelectric actuator 1 to bend and vibrate by applying an electric signal, thereby vibrating the vibration plate 81.
  • the other end in the length direction of the diaphragm 81 (the end in the ⁇ y direction in the figure, the peripheral edge of the diaphragm 81, etc.) may be supported by a support member (not shown).
  • the vibration plate 81 is joined to the other flat main surface of the piezoelectric actuator 1. Thereby, a piezoelectric vibration device in which the piezoelectric actuator 1 and the vibration plate 81 are firmly bonded can be obtained.
  • the portable terminal of the present invention includes the piezoelectric actuator 1, an electronic circuit (not shown), a display 91, and a housing 92.
  • the main surface is joined to the housing 92.
  • 8 is a schematic perspective view schematically showing the portable terminal of the present invention
  • FIG. 9 is a schematic cross-sectional view taken along line AA shown in FIG. 8
  • FIG. 10 is a cross-sectional view taken along line BB shown in FIG. It is the schematic sectional drawing cut
  • the piezoelectric actuator 1 and the housing 92 are joined using a deformable joining member. That is, in FIG. 9 and FIG. 10, the joining member 82 is a deformable joining member.
  • the deformable joining member 82 By joining the piezoelectric actuator 1 and the housing 92 with the deformable joining member 82, when the vibration is transmitted from the piezoelectric actuator 1, the deformable joining member 82 is deformed more greatly than the housing 92.
  • the piezoelectric actuator 1 transmits strong vibration to the casing 92 without being influenced by the surrounding vibration. Can be made.
  • the joining member 82 since at least a part of the joining member 82 is formed of a viscoelastic body, strong vibration from the piezoelectric actuator 1 is transmitted to the housing 92, while weak vibration reflected from the housing 92 is transmitted to the joining member 82. It is preferable in that it can be absorbed.
  • a double-sided tape in which a pressure-sensitive adhesive is attached to both surfaces of a base material made of a nonwoven fabric or the like, or a joining member including an adhesive having elasticity can be used, and the thickness thereof is, for example, 10 ⁇ m to 2000 ⁇ m Can be used.
  • the piezoelectric actuator 1 is attached to a part of the casing 92 that becomes the cover of the display 91, and a part of the casing 92 functions as the diaphragm 922.
  • the piezoelectric actuator 1 is bonded to the housing 92, but the piezoelectric actuator 1 may be bonded to the display 91.
  • the casing 92 includes a box-shaped casing main body 921 having one surface opened, and a diaphragm 922 that closes the opening of the casing main body 921.
  • the casing 92 (the casing main body 921 and the diaphragm 922) can be preferably formed using a material such as a synthetic resin having high rigidity and elastic modulus.
  • the peripheral edge of the diaphragm 922 is attached to the housing main body 921 via a bonding material 93 so as to vibrate.
  • the bonding material 93 is formed of a material that is softer and easier to deform than the diaphragm 922, and has a smaller elastic modulus and rigidity such as Young's modulus, rigidity, and bulk modulus than the diaphragm 922. That is, the bonding material 93 can be deformed, and deforms more greatly than the diaphragm 922 when the same force is applied.
  • the bonding material 93 may be a single material or a composite made up of several members.
  • a bonding material 93 for example, a double-sided tape in which an adhesive is attached to both surfaces of a base material made of a nonwoven fabric or the like can be suitably used.
  • the thickness of the bonding material 93 is set so that the vibration is not attenuated due to being too thick, and is set to, for example, 0.1 mm to 0.6 mm.
  • the material of the bonding material 93 is not limited, and the bonding material 93 may be formed of a material that is harder and more difficult to deform than the diaphragm 922. In some cases, a configuration without the bonding material 93 may be used.
  • Examples of the electronic circuit include a circuit that processes image information displayed on the display 91 and audio information transmitted by the mobile terminal, a communication circuit, and the like. At least one of these circuits may be included, or all the circuits may be included. Further, it may be a circuit having other functions. Furthermore, you may have a some electronic circuit.
  • the electronic circuit and the piezoelectric actuator 1 are connected by a connection wiring (not shown).
  • the display 91 is a display device having a function of displaying image information.
  • a known display such as a liquid crystal display, a plasma display, and an organic EL display can be suitably used.
  • the display 91 may have an input device such as a touch panel.
  • the cover (diaphragm 922) of the display 91 may have an input device such as a touch panel.
  • the entire display 91 or a part of the display 91 may function as a diaphragm.
  • the portable terminal of the present invention is characterized in that the display 91 or the casing 92 generates vibration that transmits sound information to the inner ear through the cartilage or air conduction of the ear.
  • the portable terminal of this example can transmit sound information by transmitting a vibration to the cartilage of the ear by bringing the diaphragm (display 91 or housing 92) into contact with the ear directly or via another object. That is, sound information can be transmitted by bringing a diaphragm (display 91 or housing 92) into direct or indirect contact with the ear and transmitting vibration to the cartilage of the ear.
  • a portable terminal capable of transmitting sound information even when the surroundings are noisy can be obtained.
  • the object interposed between the diaphragm (display 91 or housing 92) and the ear may be, for example, a cover of a mobile terminal, a headphone or an earphone, and any object that can transmit vibration. Anything can be used. Further, it may be a portable terminal that transmits sound information by propagating sound generated from the diaphragm (display 91 or housing 92) in the air. Furthermore, it may be a portable terminal that transmits sound information via a plurality of routes.
  • the mobile terminal of this example transmits sound information using the piezoelectric actuator 1 that can effectively generate vibration, it can transmit high-quality sound information.
  • a piezoelectric vibration device using the piezoelectric actuator shown in FIG. 5 was produced and its characteristics were measured.
  • the piezoelectric actuator had a long shape with a length of 23.5 mm, a width of 3.3 mm, and a thickness of 0.5 mm.
  • the piezoelectric actuator has a structure in which piezoelectric layers having a thickness of 30 ⁇ m and internal electrodes are alternately stacked, and the total number of piezoelectric layers is 16.
  • the piezoelectric layer was formed of lead zirconate titanate in which part of Zr was replaced with Sb.
  • a resin mold having a dent as the mold on the upper side of the press device (the side in contact with the main surface) 5 was used to produce a piezoelectric actuator having a shape shown in FIG. 5 using a flat mold as a lower mold (side contacting the other main surface) of the press apparatus.
  • the surface electrode was printed so as to be longer by 1 mm in the width direction at both ends than the internal electrode.
  • the amount of protrusion in the + z direction in the figure relative to both ends of the central portion of the one main surface of the piezoelectric actuator was 10% (0.05 mm) of the thickness of the piezoelectric actuator.
  • the other main surface of the piezoelectric actuator was almost flat. And while sticking a glass plate to a metal frame with a double-sided tape, the other main surface of the piezoelectric actuator was stuck to the center of one surface of the glass plate with a double-sided tape, and 1 mm away from the other surface of the glass plate A microphone was installed at the position.
  • Piezoelectric actuator 2 Internal electrode 21: First pole 22: Second pole 3: Piezoelectric layer 4: Laminate 41: Active part 42: Inactive part 5: Surface electrode 51: First surface electrode 52: Second surface electrode 53: Third surface electrode 6: Flexible substrate 61: Wiring conductor 7: Conductive bonding member 71: Resin 72: Conductive particles 81: Diaphragm 82: Joining member 91: Display 92: Housing 921: Housing body 922: Diaphragm 93: Bonding material

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Telephone Set Structure (AREA)

Abstract

La présente invention a pour objectif de fournir un actuateur piézoélectrique, un dispositif de vibration piézoélectrique et un terminal mobile, avec lesquels une plus grande vibration de flexion peut être atteinte. La solution de l'invention porte sur cet actuateur piézoélectrique (1) qui est caractérisé en ce qu'il comprend : un corps empilé (4) présentant, empilées en son sein, des électrodes internes (2) et des couches piézoélectriques (3) ; et des électrodes de surface (5) sur une surface principale du corps empilé (4), lesdites électrodes de surface (5) étant connectées électriquement aux électrodes internes (2). L'actuateur piézoélectrique (1) est en outre caractérisé en ce que : les électrodes internes (2) comprennent les premiers pôles (21) et les seconds pôles (22) ; une section active (41) dans laquelle les premiers pôles (21) et les seconds pôles (22) des électrodes internes (2) se chevauchent les uns sur les autres dans la direction d'empilement, et des sections inactives (42) en plus de la section active (41) sont comprises ; l'épaisseur de la section active (41) est supérieure à celle des sections inactives (42) ; et une autre surface principale du corps empilé (4) est plate.
PCT/JP2012/072263 2012-05-14 2012-08-31 Actuateur piézoélectrique, dispositif de vibration piézoélectrique et terminal mobile WO2013171917A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020127025689A KR101579121B1 (ko) 2012-05-14 2012-08-31 압전 액추에이터, 압전 진동 장치 및 휴대 단말
JP2013526227A JP5680202B2 (ja) 2012-05-14 2012-08-31 圧電振動装置および携帯端末

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012111025 2012-05-14
JP2012-111025 2012-05-14

Publications (1)

Publication Number Publication Date
WO2013171917A1 true WO2013171917A1 (fr) 2013-11-21

Family

ID=49583355

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2012/072263 WO2013171917A1 (fr) 2012-05-14 2012-08-31 Actuateur piézoélectrique, dispositif de vibration piézoélectrique et terminal mobile

Country Status (3)

Country Link
JP (2) JP5680202B2 (fr)
KR (1) KR101579121B1 (fr)
WO (1) WO2013171917A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015170848A (ja) * 2014-03-10 2015-09-28 サムソン エレクトロ−メカニックス カンパニーリミテッド． 圧電素子及びこれを含む圧電振動子

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6540796B2 (ja) * 2015-03-31 2019-07-10 株式会社村田製作所 圧電素子およびこれを備える超音波センサ
EP4177976A4 (fr) * 2020-07-03 2024-07-03 Kyocera Corp Élément piézoélectrique

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129360U (fr) * 1985-01-30 1986-08-13
JPH0614396A (ja) * 1991-11-30 1994-01-21 Nippon Dempa Kogyo Co Ltd 超音波探触子
JP2004187031A (ja) * 2002-12-04 2004-07-02 Temuko Japan:Kk 骨伝導スピーカーを用いた携帯電話機
WO2006114985A1 (fr) * 2005-04-22 2006-11-02 Sharp Kabushiki Kaisha Dispositif a carte et son procede de fabrication
JP2006303443A (ja) * 2005-03-24 2006-11-02 Ngk Spark Plug Co Ltd 積層型圧電素子、これを用いた燃料噴射装置、及び積層型圧電素子の製造方法
JP2007082009A (ja) * 2005-09-15 2007-03-29 Nec Saitama Ltd パネルスピーカ
JP2007287910A (ja) * 2006-04-17 2007-11-01 Nec Tokin Corp 積層型圧電バイモルフ素子
JP2010034269A (ja) * 2008-07-29 2010-02-12 Kyocera Corp 積層型圧電素子および振動体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4658280B2 (ja) * 1999-11-29 2011-03-23 太平洋セメント株式会社 積層型圧電アクチュエータ
JP2002010393A (ja) 2000-04-19 2002-01-11 Murata Mfg Co Ltd 圧電型電気音響変換器
JPWO2005004535A1 (ja) 2003-07-02 2006-11-24 シチズン電子株式会社 パネル型スピーカ
JP2005294761A (ja) * 2004-04-05 2005-10-20 Tdk Corp 積層型圧電素子
JP4830858B2 (ja) * 2004-12-28 2011-12-07 日本電気株式会社 圧電セラミックアクチュエータ及び携帯機器
JP2006238072A (ja) 2005-02-25 2006-09-07 Nec Tokin Corp 音響振動発生用圧電バイモルフ素子
WO2009069693A1 (fr) * 2007-11-27 2009-06-04 Kyocera Corporation Elément piézoélectrique stratifié et son procédé de fabrication, appareil d'injection et système d'injection de combustible
JP2010199271A (ja) * 2009-02-25 2010-09-09 Kyocera Corp 積層型圧電素子およびその製法ならびに振動体
JP2011096763A (ja) * 2009-10-28 2011-05-12 Kyocera Corp 圧電アクチュエータ装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129360U (fr) * 1985-01-30 1986-08-13
JPH0614396A (ja) * 1991-11-30 1994-01-21 Nippon Dempa Kogyo Co Ltd 超音波探触子
JP2004187031A (ja) * 2002-12-04 2004-07-02 Temuko Japan:Kk 骨伝導スピーカーを用いた携帯電話機
JP2006303443A (ja) * 2005-03-24 2006-11-02 Ngk Spark Plug Co Ltd 積層型圧電素子、これを用いた燃料噴射装置、及び積層型圧電素子の製造方法
WO2006114985A1 (fr) * 2005-04-22 2006-11-02 Sharp Kabushiki Kaisha Dispositif a carte et son procede de fabrication
JP2007082009A (ja) * 2005-09-15 2007-03-29 Nec Saitama Ltd パネルスピーカ
JP2007287910A (ja) * 2006-04-17 2007-11-01 Nec Tokin Corp 積層型圧電バイモルフ素子
JP2010034269A (ja) * 2008-07-29 2010-02-12 Kyocera Corp 積層型圧電素子および振動体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015170848A (ja) * 2014-03-10 2015-09-28 サムソン エレクトロ−メカニックス カンパニーリミテッド． 圧電素子及びこれを含む圧電振動子

Also Published As

Publication number Publication date
KR101579121B1 (ko) 2015-12-21
JP2014239238A (ja) 2014-12-18
JP5680202B2 (ja) 2015-03-04
JPWO2013171917A1 (ja) 2016-01-07
JP5865963B2 (ja) 2016-02-17
KR20140087945A (ko) 2014-07-09

Similar Documents

Publication Publication Date Title
JP5537733B2 (ja) 圧電アクチュエータ、圧電振動装置および携帯端末
JP6140731B2 (ja) 圧電アクチュエータ、圧電振動装置および携帯端末
JP5474261B1 (ja) 圧電アクチュエータ、圧電振動装置および携帯端末
JP5902831B2 (ja) 圧電アクチュエータ、圧電振動装置および携帯端末
JP5788110B2 (ja) 圧電素子ならびにこれを備えた圧電振動装置、携帯端末、音響発生器、音響発生装置および電子機器
JP5566533B2 (ja) 圧電アクチュエータ、圧電振動装置および携帯端末
JP5865963B2 (ja) 圧電アクチュエータ、圧電振動装置および携帯端末
JP6741609B2 (ja) 圧電アクチュエータ、圧電振動装置および電子機器
JP5474262B1 (ja) 圧電アクチュエータ、圧電振動装置および携帯端末
JP2015126605A (ja) 圧電アクチュエータおよびこれを備えた圧電振動装置、携帯端末、音響発生器、電子機器
JP2015207740A (ja) 圧電アクチュエータ、圧電振動装置、携帯端末、音響発生器、音響発生装置および電子機器
WO2013171918A1 (fr) Actuateur piézoélectrique, dispositif de vibration piézoélectrique et terminal mobile
WO2014050240A1 (fr) Actionneur piézoélectrique, dispositif d'oscillation piézoélectrique et terminal portatif
JP6193748B2 (ja) 圧電アクチュエータおよびこれを備えた圧電振動装置、携帯端末、音響発生器、電子機器

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 20127025689

Country of ref document: KR

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2013526227

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12876969

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12876969

Country of ref document: EP

Kind code of ref document: A1