WO2013149467A1 - Array substrate, and manufacturing method thereof and display device - Google Patents

Array substrate, and manufacturing method thereof and display device Download PDF

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Publication number
WO2013149467A1
WO2013149467A1 PCT/CN2012/084162 CN2012084162W WO2013149467A1 WO 2013149467 A1 WO2013149467 A1 WO 2013149467A1 CN 2012084162 W CN2012084162 W CN 2012084162W WO 2013149467 A1 WO2013149467 A1 WO 2013149467A1
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WO
WIPO (PCT)
Prior art keywords
thin film
film transistor
common electrode
array substrate
pixel
Prior art date
Application number
PCT/CN2012/084162
Other languages
French (fr)
Chinese (zh)
Inventor
姜文博
董学
陈东
李成
徐宇博
陈小川
薛海林
陈希
张弥
李小和
Original Assignee
北京京东方光电科技有限公司
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Publication of WO2013149467A1 publication Critical patent/WO2013149467A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line

Definitions

  • Embodiments of the present invention relate to an array substrate, a method of fabricating the same, and a display device. Background technique
  • the ADVanced Super Dimension Switch is a planar electric field wide viewing angle technology, which is characterized by: an electric field generated by the edge of the slit electrode in the same plane, and a slit electrode layer and a plate electrode layer.
  • the electric field generated between the two forms a multi-dimensional electric field, so that all liquid crystal molecules between the slit electrodes in the liquid crystal cell and directly above the electrodes can be rotated, thereby improving the liquid crystal working efficiency and increasing the light transmission efficiency.
  • Advanced Super Dimensional Field Conversion Technology improves the picture quality of TFT-LCDs with high resolution, high transmittance, low power consumption, wide viewing angle, high aperture ratio, low chromatic aberration, and no squeeze water ripple (push Mura) )Etc.
  • Retina display - advanced super-dimensional field conversion technology Retina display-ADvanced Super
  • R-ADS Dimension Switch
  • ADS technology applies ADS technology to Retina Display. It features: Apply ADS technology to retina display to make ADS display devices (such as array substrates or LCD panels). ) With ultra-high pixel density, the pixel density is above 300PPI.
  • the display screen using R-ADS technology can make it impossible for the human eye to distinguish individual pixels, so that the image is no longer grainy and the display is more realistic, which allows the viewer to have the feeling of viewing the paper products. Therefore, this display has broad application prospects.
  • the pixel electrode 200 uses the pixel electrode on the upper side, the common electrode on the lower side, and the pixel electrode as a strip, and the common electrode is integrated into one body, so that the offset of the pixel electrode does not cause fluctuation of the storage capacitor. Thereby effectively reducing the occurrence of flicker.
  • the pixel electrode 200 has a strip shape
  • 200' is a strip-shaped hole
  • the common electrode 100 has a block shape.
  • the common electrode of the above ADS product is formed as a whole, but due to the influence of large resistance, the coupling effect of the source/drain (SD) signal line on the common electrode cannot be eliminated in time, resulting in a voltage change of the common electrode and a driving voltage in the pixel. Differences will cause differences, causing crosstalk on the display and affecting the display.
  • the R-ADS technology using the above technical solution also has the problem of crosstalk. Summary of the invention
  • An embodiment of the present invention provides an array substrate including a plurality of gate lines formed on a substrate, a plurality of data lines, and a plurality of thin film transistor pixel structures formed between the gate lines and the data lines,
  • the thin film transistor pixel structure includes a thin film transistor and a display region, and a common electrode is disposed in the display region, wherein the array substrate further includes at least one common electrode line connected to the common electrode.
  • Another embodiment of the present invention further provides a method of fabricating an array substrate, including the following steps:
  • S1 forming at least one common electrode line pattern on the substrate while forming a gate line pattern and a gate pattern of the thin film transistor on the substrate;
  • Still another embodiment of the present invention also provides a display device comprising the array substrate as described above.
  • a common electrode line connected to the common electrode is disposed in the pixel transistor pixel structure, thereby greatly reducing the resistance of the common electrode, thereby eliminating source-drain (SD) signal line pairs in time.
  • the coupling effect of the common electrode does not cause a voltage change of the common electrode, and the voltage difference of the driving in the pixel does not cause a difference, thereby avoiding the display screen Crosstalk occurs in the middle.
  • FIG. 1 is a schematic view showing the arrangement of a pixel electrode and a common electrode in an array substrate in the prior art
  • FIG. 2 is a plan view showing the structure of the array substrate according to the first embodiment of the present invention
  • FIG. 3 is a schematic cross-sectional view of the array substrate structure shown in FIG. 2 taken along line A'-A;
  • FIG. 4 is a schematic view showing the structure of the array substrate according to the second embodiment of the present invention.
  • Fig. 5 is a schematic view showing the principle of increasing the aperture ratio of the array substrate according to the second embodiment
  • Fig. 6 is a view showing another principle of increasing the aperture ratio of the array substrate according to the second embodiment.
  • the array substrate of the embodiment of the present invention includes a plurality of gate lines and a plurality of data lines, the gate lines and the data lines crossing each other thereby defining pixel units arranged in a matrix, each of the pixel units including a thin film transistor as a switching element and The pixel electrode and the common electrode that control the arrangement of the liquid crystals.
  • the gate of the thin film transistor of each pixel is electrically connected or integrally formed with the corresponding gate line
  • the source is electrically connected or integrally formed with the corresponding data line
  • the drain is electrically connected or integrally formed with the corresponding pixel electrode.
  • the ADS type array substrate may include a gate line 1, a data line 2, and a plurality of thin film transistor pixel structures 3 between the gate line 1 and the data line 2 (each thin film transistor pixel structure) Corresponds to one pixel unit).
  • Each of the thin film transistor pixel structures 3 may include a thin film transistor and a display region.
  • the thin film transistor may include a gate electrode, a gate insulating layer, an active layer, a source electrode, and a drain electrode (not shown in Fig. 2).
  • the display area refers to a region for display other than the thin film transistor (corresponding to a region where the pixel electrode is located), and includes a pixel electrode 39 and a common electrode (not shown in Fig.
  • the common electrode may be a unitary block-shaped common electrode on the entire array substrate.
  • the array substrate may further include at least one common electrode line 4 connected to the common electrode of the thin film transistor pixel structure 3.
  • the common electrode line 4 can penetrate a plurality of pixel units.
  • the common electrode line 4 may be located at any position in the pixel structure of the thin film transistor.
  • the common electrode line 4 may be located in a display area of a row or column of pixel units (ie, a thin film transistor pixel structure) (refer to a display area of the pixel unit, but Not at the intersection of two or two adjacent pixel units), or at the intersection of two rows (or two columns) of adjacent pixel units (this can further include the following three cases: (1) only located a display area of one of the two rows of pixel units at the junction; (2) a display area of two rows of pixel units at the same time; (3) at the junction, but not falling into any one of the adjacent two rows of pixel units The display area) can also be located at other suitable locations without being limited to the position shown in FIG. 2.
  • the common electrode line 4 can be shown in Figure 2 as being located at the junction of two adjacent thin film transistor pixel structures 3.
  • the array substrate structure may include, in order from bottom to top, a gate 31, a gate insulating layer 32, an active layer 33, source and drain electrodes 34 (including source and drain electrodes), a first passivation layer 35, a barrier layer 36, and a common The electrode 37, the second passivation layer 38, and the pixel electrode 39.
  • the common electrode line 4 can be It is located in the same layer as the gate 31 of the thin film transistor TFT (that is, in the same layer as the gate line 1), and is parallel to the gate line 1.
  • the pixel electrode 39 may be a strip electrode and may be connected to a drain electrode in the source/drain electrode 34 through a through hole penetrating through the second passivation layer 38, the barrier layer 36, and the first passivation layer 35.
  • the strip-shaped pixel electrode 39 may have a strip-shaped hole 39'.
  • the via may include a via hole 5 through the second passivation layer 38 and a via 6 (also referred to as a second via) through the barrier layer 36 and the first passivation layer 35.
  • the common electrode 37 may be a monolithic electrode covering the substrate.
  • the common electrode 37 may be formed with an isolation hole 7 having a diameter larger than the sleeve hole 5 around the sleeve hole 5, that is, at a position of the through hole connecting the pixel electrode and the drain electrode, the common electrode is in the through hole
  • An isolation hole having a diameter larger than a through hole (specifically, a hole portion of the through hole) is formed around the hole.
  • the common electrode line 4 may be connected to the common electrode 37 through a via 8 (which may also be referred to as a first via) passing through the barrier layer 36, the first passivation layer 35, and the gate insulating layer 32.
  • the common electrode line 4 may be connected to the common electrode 37 through at least two via holes 8 to achieve the effect of the parallel connection (the common electrode line 4) Unlike the existing common electrode lines that provide signals to the common electrodes).
  • the structure of the array substrate is merely for the sake of example, and the array substrate structure of the embodiment of the present invention is not limited.
  • the barrier layer 36 may not be included, or the common electrode 37 may be located between the barrier layer 36 and the first passivation layer 35 (in this case, the barrier layer 36 and the second passivation layer 38 may be a unitary structure).
  • the common electrode 37 may not be integrated into a bulk common electrode, but may be independently formed into blocks in each pixel unit; for example, the common electrode may also be located above the pixel electrode; for example, the common electrode
  • the lines may also be disposed and fabricated in the same layer as the gate lines, but may be fabricated from other layers (eg, data line metal layers) or newly added metal layers.
  • the barrier layer 36 is exemplarily disposed and the common electrode 37 is positioned above the barrier layer 36, so that the array substrate can have a higher aperture ratio.
  • the layer for example, the barrier layer, etc.
  • the via hole 6, the via 8 and the like can be adjusted accordingly (ie, more or less can be passed according to actual needs).
  • a method of fabricating the above array substrate will be described below. It is only necessary to make at least one common electrode line 4 connected to the common electrode 37 when fabricating the above array substrate. In order to make the manufacturing process simple, the common electrode line 4 can be formed on the same layer of the gate line.
  • the array substrate fabricated according to the method may have at least one common electrode line connected to the common electrode.
  • the following is an example of manufacturing an ADS type array substrate having the structure shown in FIG. 3, and the manufacturing method specifically includes the following steps:
  • the common electrode line 4 is also formed on the glass substrate by patterning the gate 31 and the gate line 1 by a series of patterning processes such as exposure, development, etching, and peeling.
  • the common electrode line 4 can be parallel to the gate line 1.
  • the common electrode line 4 may be located in a display area of one row of pixel units or at a boundary of two adjacent pixel units. In order to influence the aperture ratio less, the common electrode line 4 may be disposed at the boundary of two adjacent pixel units.
  • the TFT is formed by a patterning process (the gate insulating layer 32 except the gate electrode 31, the active layer 33, the source/drain electrode 34, the first blunt a layer 35) and a barrier layer 36 on the TFT, and etched down through the barrier layer 36 in a region of the barrier layer 36 corresponding to the drain electrode in the source and drain electrode 34 and the pattern of the common electrode line 4,
  • at least two vias 8 can be etched.
  • a through hole 5 is formed through the second passivation layer 38 by a patterning process at the region.
  • the diameter of the sleeve hole 5 may be greater than or equal to the diameter of the via hole 6 and smaller than the diameter of the isolation hole 7.
  • the common electrode line 4 is added to the array substrate, and is connected to the common electrode 37 through at least two via holes 8, so that the upper and lower two resistors, that is, the common electrode 37 and the common electrode line 4 are connected in parallel, thereby greatly
  • the electric resistance of the common electrode 37 is reduced, and occurrence of a defect such as crosstalk due to an increase in the resistance of the common electrode 37 is prevented.
  • the above is only a manufacturing method of the embodiment of the present invention.
  • the manufacturing method can be adjusted according to actual conditions.
  • the barrier layer 36 is not formed, or the common electrode 37 may be located between the barrier layer 36 and the first passivation layer 35 (in this case, the barrier layer 36 and the second passivation layer 38 may be a unitary structure); for example, a common electrode 37 may also be a block-shaped common electrode that is not integrated into a whole, but is independently formed into blocks in each pixel unit; for example, the common electrode may also be located above the pixel electrode; for example, the common electrode line may not be connected to the gate line.
  • the same layer is set and fabricated, but is made by other layers (such as the data line metal layer) or the newly added metal layer. There are no restrictions here.
  • a plurality of via holes 8 for connecting the common electrode line 4 and the common electrode 37 may be disposed on the array substrate.
  • each of the common electrode lines 4 may be connected to the common electrode 37 through N via holes 8 on the array substrate, where 2 ⁇ N ⁇ A, and A is the total number of columns of the multi-column thin film transistor pixel structure divided by the data lines. .
  • the common electrode line 4 passing through 3 pixels per line is connected to the common electrode 37 through the two via holes 8.
  • the N via holes 8 may be periodically arranged with the same number of pixel columns (or the same number of pixel rows, when the common electrode lines are vertically disposed on the array substrate and parallel to the data lines), and the common electrode may be made at this time. 37
  • the resistance of each pixel unit tends to be uniform, and the uniformity of the display picture is ensured to some extent.
  • a plurality of common electrode lines 4 connected to the common electrode 37 may be disposed on the array substrate, and each of the common electrode lines 4 corresponds to a row of thin film transistor pixel structures. Since the common electrode line 4 affects the pixel aperture ratio of the entire substrate (the aperture ratio of the pixel provided with the common electrode line 4 and the pixel not provided with the common electrode line 4 is different), in order to ensure the aperture ratio of the entire array substrate Uniformity, in the multi-line thin film transistor pixel structure 3 divided by the gate line 1, the common electrode line 4 may be arranged periodically with M-line thin film transistor pixel structures, wherein M represents multiple lines divided by the gate lines 1. The number of rows of the thin film transistor pixel structure 3, M is greater than 0 and less than the total number of rows.
  • each of the thin film transistor pixel structures in the multi-row thin film transistor pixel structure 3 divided by the gate line 1 may be provided with a common electrode line 4 (the common electrode line 4 may be located in the display area of the row of pixel units, also It may be located at the intersection of the row of pixel cells and the adjacent row of pixel cells, such that the uniformity of the pixel aperture ratio of the entire substrate is better, and the resistance of the common electrode 37 is lower.
  • the common electrode line 4 may be located in the display area of the row of pixel units, also It may be located at the intersection of the row of pixel cells and the adjacent row of pixel cells, such that the uniformity of the pixel aperture ratio of the entire substrate is better, and the resistance of the common electrode 37 is lower.
  • the ADS type array substrate according to the present embodiment can be applied to an R-ADS type array substrate, thereby realizing retinal display, resulting in a better user experience.
  • the common electrode line 4 Since a plurality of common electrode lines 4 are added to the array substrate structure according to the first embodiment, if the conventional ADS method is used, the common electrode line 4 needs to be spaced apart from the gate line 1 by a certain distance. The illuminating area that causes it to block normal has a great influence on the aperture ratio.
  • the array substrate of the present embodiment is disposed in a manner opposite to the TFT. As shown in FIG. 4 (the cross-sectional view of each of the thin film transistor pixel structures is similar to FIG.
  • the array substrate may include at least one common electrode line, and the common electrode line 4 may be located at the intersection of the adjacent adjacent display regions, that is, at the boundary of two adjacent thin film transistor pixel structures, the two adjacent films.
  • the display areas of the transistor pixel structure are disposed adjacent to each other. Moreover, as shown in FIG.
  • the common electrode line of the embodiment of the present invention is simultaneously located at the display area of the two rows of pixel units at the boundary.
  • the common electrode line 4 is connected to the common electrode 37 through at least two via holes 8 to achieve the effect of parallel connection (the common electrode line 4 is different) In the existing common electrode line that provides a signal for the common electrode).
  • each common electrode line 4 can be connected to the common electrode 37 through N via holes 8 on the array substrate, where 2 ⁇ N ⁇ A, A is the total number of columns of the multi-column thin film transistor pixel structure divided by the data lines. .
  • the common electrode line 4 passing through 3 pixels per line can be connected to the common electrode 37 through the two via holes 8.
  • the N via holes 8 can be periodically arranged at intervals of the same number of pixel columns, so that the resistance of the common electrode 37 in each pixel unit tends to be uniform, and the uniformity of the display screen is ensured to some extent.
  • a plurality of common electrode lines 4 connected to the common electrode 37 may be disposed on the array substrate, since the common electrode line 4 affects the pixel aperture ratio of the entire substrate (pixels provided with the common electrode line 4 and not provided with a common The aperture ratio of the pixels of the electrode line 4 is different).
  • the common electrode lines 4 may be periodically arranged with M rows of pixel units, wherein M represents a gate. The number of rows of the multi-line thin film transistor pixel structure 3 divided by line 1, M is greater than 0 and less than the total number of rows.
  • a common electrode line 4 may be disposed at the boundary of each of the adjacent adjacent display regions, such that the pixel aperture ratio of the entire substrate is The uniformity is good, and the electric resistance of the common electrode 37 is smaller.
  • the two display areas of the two rows of thin film transistor pixel structures 3 adjacent to each other in the display area may have only one public
  • the common electrode line 4, that is, the two rows of thin film transistor pixel structures 3 arranged adjacent to each other in the display area can share a common electrode line 4, so that the aperture ratio of the pixels is less affected.
  • the two regions "adjacently arranged" in the embodiments of the present invention mean that the other regions are not spaced apart from each other except for the gate lines or except for the gate lines and the common electrode lines.
  • the thin film transistor regions of two adjacent rows of pixel cells are adjacently arranged, meaning that only the gate lines are spaced apart in the middle of the thin film transistor regions of the adjacent two rows of pixel cells, or only the gate lines and the common electrode lines are spaced apart, and other components such as pixel electrodes are not spaced.
  • the display areas of the adjacent thin film transistor pixel structures are adjacent to each other, which means that the display areas of the adjacent thin film transistor pixel structures are only spaced apart from the gate lines, or only the gate lines and the common electrode lines are spaced apart, and the thin film transistors are not spaced. And other components.
  • the thin film transistor pixel structure 3 in this embodiment is similar to the thin film transistor pixel structure 3 in the first embodiment, and the description thereof will not be repeated here.
  • the method for fabricating the array substrate of the present embodiment is substantially the same as the method for fabricating the array substrate of the first embodiment. The difference is: forming a gate electrode 31 on a glass substrate by a series of patterning processes such as exposure, development, etching, and stripping.
  • the display regions of the two rows of thin film transistor pixel structures arranged adjacent to the gate region are respectively adjacent to the upper and lower adjacent rows (that is, a row above the pixel structure of the two rows of thin film transistors arranged adjacent to the gate region)
  • the display areas of the thin film transistor pixel structures in the next row are adjacently arranged.
  • a common electrode line 4 can be formed between two rows of thin film transistor pixel structures arranged adjacent to each other in the display area.
  • the aperture ratio of a pixel is affected by several factors: the width of the common electrode line 4 indicated by a; the black matrix indicated by b for preventing light leakage above the gate line (Black Matrix) The width of BM ); the width of the gate line indicated by c; and the width of BM indicated by d for preventing light leakage under the gate line.
  • the width of the common electrode line 4 indicated by a the black matrix indicated by b for preventing light leakage above the gate line (Black Matrix)
  • the width of BM the width of the gate line indicated by c
  • the width of BM indicated by d for preventing light leakage under the gate line.
  • the width is increased by about 3% with respect to the pixel aperture ratio of the array substrate of the first embodiment.
  • the width 2a of the common electrode line 4 can also be further reduced.
  • the present invention takes the opposite part of the TFT between the upper and lower pixels, effectively utilizes the excess space, and the spacer is disposed at this position, without adding an extra BM area to prevent the spacer from being offset. The formation is poor, thereby increasing the aperture ratio.
  • current ADS products have a narrow width of a single pixel BM due to the limitation of the aperture ratio, so that after the spacer is placed, it is easy to form an orientation dead zone in the non-BM region due to possible positional displacement of the spacer. This is the root cause of the contrast reduction and various afterimages, which seriously affects the yield.
  • the BM of the two pixels is combined in one place, and the spacer has a large space, so that the ⁇ mouth ⁇ is ensured without lowering the aperture ratio.
  • a barrier layer generally a resin material
  • the via holes are deep, a large amount of liquid crystal is accommodated in the via holes.
  • These liquid crystals differ greatly in liquid crystal thickness from the normal display area.
  • the distance h2 from the via hole to the top of the liquid crystal layer 9 may be larger than the thickness hi of the liquid crystal cell, which causes a difference in liquid crystal alignment, resulting in severe light leakage.
  • the via is covered with an electrode, and the electrode here is not parallel to the substrate, but is disposed on the sidewall of the via to form a large angle of inclination ⁇ with the substrate, which affects the orientation of the surrounding liquid crystal.
  • the via area has a strong interference with the electric field in the normal display area, which seriously affects the normal display. If additional ⁇ is used, the opening ratio is lowered, and the quality is still hidden. If the TFT opposite design is used, the via areas of the upper and lower pixels can be placed together and spaced apart from the normal display area by the width of the gate lines and the width of the turns, thereby avoiding the normal display of the via areas. The impact of the area can increase the aperture ratio and reduce the risk of bad.
  • the ADS type array substrate according to the present embodiment can be applied to an R-ADS type array substrate, thereby realizing retinal display to bring about a better user experience.
  • the embodiment provides a display device including the array substrate according to the first or second embodiment, and the display device can be any product or component having a display function, such as a liquid crystal panel, an electronic paper, an OLED panel, a liquid crystal television, LCD monitors, digital photo frames, mobile phones, tablets, etc.
  • a display function such as a liquid crystal panel, an electronic paper, an OLED panel, a liquid crystal television, LCD monitors, digital photo frames, mobile phones, tablets, etc.
  • An array substrate comprising a plurality of gate lines formed on a substrate, a plurality of data lines, and a plurality of thin film transistor pixel structures formed between the gate lines and the data lines, the thin film transistor
  • the pixel structure includes a thin film transistor and a display region, and a common electrode is disposed in the display region, wherein the array substrate further includes at least one common electrode line connected to the common electrode.
  • the array substrate according to (1), wherein the at least one common electrode line is located in a display region of the thin film transistor pixel structure
  • the at least one common electrode line is connected to the common electrode through N via holes on the array substrate, wherein
  • A is the total number of columns of the plurality of thin film transistor pixel structures divided by the data lines.
  • the display areas of the adjacent two rows of thin film transistor pixel structures are respectively arranged adjacent to the display areas of the thin film transistor pixel structures of adjacent rows.
  • each of the thin film transistor pixel structures in the multi-line thin film transistor pixel structure is provided with one of the common electrode lines.
  • the pixel electrode in the pixel transistor pixel structure is a strip electrode
  • the common electrode is a block electrode
  • the pixel A passivation layer is disposed between the electrode and the common electrode.
  • the common electrode is a bulk electrode covering the entire array substrate.
  • a method for fabricating an array substrate comprising the steps of: SI: forming at least one common electrode line pattern on the substrate while forming a gate line pattern and a gate pattern of the thin film transistor on the substrate;
  • step S2 comprises: forming a thin film transistor on the substrate after the step S1 is completed;
  • a second conductive film is deposited and the second conductive film is patterned to form a strip-shaped pixel electrode, and the pixel electrode is connected to the drain electrode through the via.
  • a display device comprising the array substrate according to any one of (1) to (13).

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Abstract

Provided are an array substrate, and a manufacturing method thereof and a display device. The array substrate comprises multiple gate lines (1) formed on the substrate, multiple data lines (2), and multiple thin film transistor pixel structures (3) formed between the gate lines (1) and the data lines (2), each thin film transistor pixel structure (3) comprising a thin film transistor and a display area, and the display area being provided with a common electrode; the array substrate further comprises at least one common electrode line (4) connected with the common electrode. The array substrate can prevent the crosstalk interference phenomenon generated in display frames.

Description

阵列基板及其制作方法和显示装置 技术领域  Array substrate, manufacturing method thereof and display device
本发明实施例涉及一种阵列基板及其制作方法和显示装置。 背景技术  Embodiments of the present invention relate to an array substrate, a method of fabricating the same, and a display device. Background technique
高级超维场转换技术( ADvanced Super Dimension Switch, 简称 ADS ) 是一种平面电场宽视角技术, 其特点是: 通过同一平面内狭缝电极边缘所产 生的电场以及狭缝电极层与板状电极层之间产生的电场形成多维电场, 使液 晶盒内狭缝电极之间、 电极正上方的所有液晶分子都能够产生旋转, 从而提 高了液晶工作效率并增大了透光效率。 高级超维场转换技术(ADS )可以提 高 TFT-LCD的画面品质, 具有高分辨率、 高透过率、 低功耗、 宽视角、 高 开口率、 低色差、 无挤压水波紋(push Mura )等优点。  The ADVanced Super Dimension Switch (ADS) is a planar electric field wide viewing angle technology, which is characterized by: an electric field generated by the edge of the slit electrode in the same plane, and a slit electrode layer and a plate electrode layer. The electric field generated between the two forms a multi-dimensional electric field, so that all liquid crystal molecules between the slit electrodes in the liquid crystal cell and directly above the electrodes can be rotated, thereby improving the liquid crystal working efficiency and increasing the light transmission efficiency. Advanced Super Dimensional Field Conversion Technology (ADS) improves the picture quality of TFT-LCDs with high resolution, high transmittance, low power consumption, wide viewing angle, high aperture ratio, low chromatic aberration, and no squeeze water ripple (push Mura) )Etc.
视网膜显示-高级超维场转换技术 (Retina display-ADvanced Super Retina display - advanced super-dimensional field conversion technology (Retina display-ADvanced Super
Dimension Switch, 简称为 R-ADS )是将 ADS技术应用到视网膜显示( Retina Display )中的新技术,其特点是: 将 ADS技术应用到视网膜显示中,使 ADS 显示器件(如阵列基板或液晶面板)具备超高像素密度, 即实现像素密度达 到 300PPI以上。除了具备 ADS的上述优点之外,利用 R-ADS技术的显示屏 能够使人眼无法分辨出单独像素, 使图像不再有颗粒感, 显示更逼真, 可以 让观看者有观看纸制品的感觉, 因此这种显示屏具有广阔的应用前景。 Dimension Switch (referred to as R-ADS) is a new technology that applies ADS technology to Retina Display. It features: Apply ADS technology to retina display to make ADS display devices (such as array substrates or LCD panels). ) With ultra-high pixel density, the pixel density is above 300PPI. In addition to the above advantages of ADS, the display screen using R-ADS technology can make it impossible for the human eye to distinguish individual pixels, so that the image is no longer grainy and the display is more realistic, which allows the viewer to have the feeling of viewing the paper products. Therefore, this display has broad application prospects.
随着 ADS技术尤其是 R-ADS技术的应用, 对显示效果的要求也越来越 高。 但是, 生产当中的不良, 尤其是闪烁 (flicker ) 、 串扰(crosstalk ) 以及 暗影等, 成为影响产品品质的重要因素。 4艮多产品在生产过程中都会遇到这 些不良, 但是一直没有有效的手段来控制这些不良的发生, 这成为工艺设计 上的一大难题。  With the application of ADS technology, especially R-ADS technology, the requirements for display effects are getting higher and higher. However, defects in production, especially flicker, crosstalk, and shadow, are important factors influencing product quality. Many products encounter these defects in the production process, but there is no effective means to control these defects, which has become a major problem in process design.
ADS产品的存储电容的波动一直是产生闪烁的重要原因之一。 因为现有 的一些 ADS 产品的像素电极为每个像素相互独立的块状, 公共电极做成条 ( slit )状, 由于不同层之间的布局工艺偏差,导致两个电极重叠面积的波动。 图 1中的(a )和(b )示出了层之间的布局工艺偏差, (b )中的块状的像素 电极 200相对于内有条状孔洞 100' 的公共电极 100向左偏移, 从而导致了 存储电容的波动而引起闪烁。 而图 1 ( c )所示的设计釆用像素电极在上, 公 共电极在下, 像素电极做成条状, 而公共电极连成一个整体, 所以像素电极 的偏移不会造成存储电容的波动, 从而有效降低了闪烁的发生。 如图 1 ( c ) 所示, 像素电极 200为条状, 200'为条状孔洞, 公共电极 100为块状。 The fluctuation of the storage capacitor of ADS products has always been one of the important reasons for the flicker. Because the pixel electrodes of some existing ADS products are blocks in which each pixel is independent of each other, the common electrode is formed into a strip shape, and the overlapping area of the two electrodes fluctuates due to the layout process deviation between the different layers. (a) and (b) in Fig. 1 show layout process variations between layers, and block pixels in (b) The electrode 200 is shifted to the left with respect to the common electrode 100 having the strip hole 100' therein, thereby causing fluctuations in the storage capacitance to cause flicker. The design shown in FIG. 1(c) uses the pixel electrode on the upper side, the common electrode on the lower side, and the pixel electrode as a strip, and the common electrode is integrated into one body, so that the offset of the pixel electrode does not cause fluctuation of the storage capacitor. Thereby effectively reducing the occurrence of flicker. As shown in FIG. 1(c), the pixel electrode 200 has a strip shape, 200' is a strip-shaped hole, and the common electrode 100 has a block shape.
上述 ADS产品的公共电极形成整体, 但是由于电阻较大的影响, 会导 致源漏( SD )信号线对公共电极的耦合效应无法及时被消除, 导致公共电极 的电压变化,像素中的驱动的压差就会产生差异,使显示画面产生串扰现象, 影响了显示效果。 而应用上述技术方案的 R-ADS技术, 同样存在串扰的问 题。 发明内容  The common electrode of the above ADS product is formed as a whole, but due to the influence of large resistance, the coupling effect of the source/drain (SD) signal line on the common electrode cannot be eliminated in time, resulting in a voltage change of the common electrode and a driving voltage in the pixel. Differences will cause differences, causing crosstalk on the display and affecting the display. The R-ADS technology using the above technical solution also has the problem of crosstalk. Summary of the invention
本发明的一个实施例提供了一种阵列基板, 包括形成在基板上的多条栅 线、 多条数据线以及在所述栅线和所述数据线之间形成的多个薄膜晶体管像 素结构, 所述薄膜晶体管像素结构包括薄膜晶体管和显示区域, 所述显示区 域中设置有公共电极, 其中所述阵列基板还包括与所述公共电极连接的至少 一条公共电极线。  An embodiment of the present invention provides an array substrate including a plurality of gate lines formed on a substrate, a plurality of data lines, and a plurality of thin film transistor pixel structures formed between the gate lines and the data lines, The thin film transistor pixel structure includes a thin film transistor and a display region, and a common electrode is disposed in the display region, wherein the array substrate further includes at least one common electrode line connected to the common electrode.
本发明的另一个实施例还提供了一种阵列基板的制作方法, 包括以下步 骤:  Another embodiment of the present invention further provides a method of fabricating an array substrate, including the following steps:
S1 : 在基板上形成栅线图形和薄膜晶体管的栅极图形的同时, 在所述基 板上形成至少一条公共电极线图形;  S1: forming at least one common electrode line pattern on the substrate while forming a gate line pattern and a gate pattern of the thin film transistor on the substrate;
S2: 在形成所述栅线图形、 所述栅极图形和所述公共电极线图形之后, 形成包括薄膜晶体管和位于所述薄膜晶体管之上的公共电极图形、 像素电极 图形以及连接所述公共电极线图形和所述公共电极图形的第一过孔。  S2: after forming the gate line pattern, the gate pattern, and the common electrode line pattern, forming a common electrode pattern including a thin film transistor and over the thin film transistor, a pixel electrode pattern, and connecting the common electrode a line pattern and a first via of the common electrode pattern.
本发明的再一个实施例还提供了一种显示装置, 包括如上所述的阵列基 板。  Still another embodiment of the present invention also provides a display device comprising the array substrate as described above.
在根据本发明实施例的阵列基板中, 薄膜晶体管像素结构中设置有与公 共电极连接的公共电极线, 从而极大地减小了公共电极的电阻, 从而能够及 时消除源漏(SD )信号线对公共电极的耦合效应, 因此不会导致公共电极的 电压变化, 且像素中的驱动的电压差不会产生差异, 从而避免了在显示画面 中产生串扰现象。 附图说明 In the array substrate according to the embodiment of the present invention, a common electrode line connected to the common electrode is disposed in the pixel transistor pixel structure, thereby greatly reducing the resistance of the common electrode, thereby eliminating source-drain (SD) signal line pairs in time. The coupling effect of the common electrode does not cause a voltage change of the common electrode, and the voltage difference of the driving in the pixel does not cause a difference, thereby avoiding the display screen Crosstalk occurs in the middle. DRAWINGS
为了更清楚地说明本发明实施例的技术方案, 下面将对实施例的附图作 简单地介绍,显而易见地,下面描述中的附图仅仅涉及本发明的一些实施例, 而非对本发明的限制。  In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly described below. It is obvious that the drawings in the following description relate only to some embodiments of the present invention, and are not intended to limit the present invention. .
图 1是现有技术中的阵列基板中像素电极和公共电极的布置示意图; 图 2是根据本发明第一实施例的阵列基板结构的平面示意图;  1 is a schematic view showing the arrangement of a pixel electrode and a common electrode in an array substrate in the prior art; FIG. 2 is a plan view showing the structure of the array substrate according to the first embodiment of the present invention;
图 3是图 2所示的阵列基板结构沿线 A'-A剖取的截面示意图; 图 4是根据本发明第二实施例的阵列基板结构的示意图;  3 is a schematic cross-sectional view of the array substrate structure shown in FIG. 2 taken along line A'-A; FIG. 4 is a schematic view showing the structure of the array substrate according to the second embodiment of the present invention;
图 5是才艮据第二实施例的阵列基板增大开口率的原理的示意图; 图 6是才艮据第二实施例的阵列基板增大开口率的另一个原理的示意图。 具体实施方式  Fig. 5 is a schematic view showing the principle of increasing the aperture ratio of the array substrate according to the second embodiment; Fig. 6 is a view showing another principle of increasing the aperture ratio of the array substrate according to the second embodiment. detailed description
为使本发明实施例的目的、 技术方案和优点更加清楚, 下面将结合本发 明实施例的附图,对本发明实施例的技术方案进行清楚、 完整地描述。显然, 所描述的实施例是本发明的一部分实施例, 而不是全部的实施例。 基于所描 述的本发明的实施例, 本领域普通技术人员在无需创造性劳动的前提下所获 得的所有其他实施例, 都属于本发明保护的范围。  The technical solutions of the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings of the embodiments of the present invention. It is apparent that the described embodiments are part of the embodiments of the invention, rather than all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the described embodiments of the present invention without departing from the scope of the invention are within the scope of the invention.
除非另作定义, 此处使用的技术术语或者科学术语应当为本发明所属领 域内具有一般技能的人士所理解的通常意义。 本发明专利申请说明书以及权 利要求书中使用的 "第一" 、 "第二" 以及类似的词语并不表示任何顺序、 数量或者重要性,而只是用来区分不同的组成部分。同样, "一个 "或者 "一" 等类似词语也不表示数量限制, 而是表示存在至少一个。 "包括" 或者 "包 含" 等类似的词语意指出现在 "包括" 或者 "包含" 前面的元件或者物件涵 盖出现在 "包括" 或者 "包含" 后面列举的元件或者物件及其等同, 并不排 除其他元件或者物件。 "连接" 或者 "相连" 等类似的词语并非限定于物理 的或者机械的连接, 而是可以包括电性的连接, 不管是直接的还是间接的。 "上" 、 "下" 、 "左" 、 "右" 等仅用于表示相对位置关系, 当被描述对 象的绝对位置改变后, 则该相对位置关系也可能相应地改变。 本发明实施例的阵列基板包括多条栅线和多条数据线, 这些栅线和数据 线彼此交叉由此限定了排列为矩阵的像素单元, 每个像素单元包括作为开关 元件的薄膜晶体管和用于控制液晶的排列的像素电极和公共电极。 例如, 每 个像素的薄膜晶体管的栅极与相应的栅线电连接或一体形成, 源极与相应的 数据线电连接或一体形成, 漏极与相应的像素电极电连接或一体形成。 下面 的描述主要针对单个或多个像素单元进行, 但是其他像素单元可以相同地形 成。 Unless otherwise defined, technical terms or scientific terms used herein shall be of ordinary meaning as understood by those of ordinary skill in the art to which the invention pertains. The words "first", "second" and similar terms used in the specification and claims of the invention are not intended to indicate any order, quantity or importance, but are merely used to distinguish different components. Similarly, the words "a" or "an" do not denote a quantity limitation, but rather mean that there is at least one. The words "including" or "comprising", etc., are intended to mean that the elements or objects preceding "including" or "comprising" are intended to encompass the elements or Component or object. "Connected" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Upper", "Bottom", "Left", "Right", etc. are only used to indicate the relative positional relationship. When the absolute position of the object to be described is changed, the relative positional relationship may also change accordingly. The array substrate of the embodiment of the present invention includes a plurality of gate lines and a plurality of data lines, the gate lines and the data lines crossing each other thereby defining pixel units arranged in a matrix, each of the pixel units including a thin film transistor as a switching element and The pixel electrode and the common electrode that control the arrangement of the liquid crystals. For example, the gate of the thin film transistor of each pixel is electrically connected or integrally formed with the corresponding gate line, the source is electrically connected or integrally formed with the corresponding data line, and the drain is electrically connected or integrally formed with the corresponding pixel electrode. The following description is mainly made for a single or a plurality of pixel units, but other pixel units may be formed identically.
第一实施例  First embodiment
如图 2所示, 根据本实施例的 ADS型阵列基板可以包括栅线 1、 数据线 2以及位于栅线 1和数据线 2之间的多个薄膜晶体管像素结构 3(每个薄膜晶 体管像素结构对应于一个像素单元) 。 每个薄膜晶体管像素结构 3可以包括 薄膜晶体管和显示区域。 薄膜晶体管可以包括栅极、 栅绝缘层、 有源层、 源 电极和漏电极 (未在图 2中示出 ) 。 显示区域是指薄膜晶体管之外的用于显 示的区域(对应于像素电极所在的区域), 包括像素电极 39和位于像素电极 39下方的公共电极(没有在图 2中示出)。 公共电极可以在整个阵列基板上 为连成整体的块状公共电极。 该阵列基板还可以包括至少一条与薄膜晶体管 像素结构 3的公共电极连接的公共电极线 4。 公共电极线 4可以贯穿多个像 素单元。公共电极线 4可以位于薄膜晶体管像素结构中的任意位置,具体地, 公共电极线 4可以位于一行或一列的像素单元(即薄膜晶体管像素结构) 的 显示区域(指位于像素单元的显示区域, 但不位于两行或两列相邻的像素单 元的交界处) , 也可以位于两行(或两列)相邻的像素单元的交界处(这可 以进一步包括以下三种情况: ( 1 )仅位于交界处的两行像素单元之一的显示 区域; (2 )同时位于交界处的两行像素单元的显示区域; (3 )位于交界处, 但不落入相邻两行像素单元的任何一行的显示区域) , 还可以位于其他合适 的位置, 而不被限制到图 2所示的位置。 为了举例说明的目的, 公共电极线 4可以在图 2中被示出为位于两行相邻的薄膜晶体管像素结构 3的交界处。  As shown in FIG. 2, the ADS type array substrate according to the present embodiment may include a gate line 1, a data line 2, and a plurality of thin film transistor pixel structures 3 between the gate line 1 and the data line 2 (each thin film transistor pixel structure) Corresponds to one pixel unit). Each of the thin film transistor pixel structures 3 may include a thin film transistor and a display region. The thin film transistor may include a gate electrode, a gate insulating layer, an active layer, a source electrode, and a drain electrode (not shown in Fig. 2). The display area refers to a region for display other than the thin film transistor (corresponding to a region where the pixel electrode is located), and includes a pixel electrode 39 and a common electrode (not shown in Fig. 2) located under the pixel electrode 39. The common electrode may be a unitary block-shaped common electrode on the entire array substrate. The array substrate may further include at least one common electrode line 4 connected to the common electrode of the thin film transistor pixel structure 3. The common electrode line 4 can penetrate a plurality of pixel units. The common electrode line 4 may be located at any position in the pixel structure of the thin film transistor. Specifically, the common electrode line 4 may be located in a display area of a row or column of pixel units (ie, a thin film transistor pixel structure) (refer to a display area of the pixel unit, but Not at the intersection of two or two adjacent pixel units), or at the intersection of two rows (or two columns) of adjacent pixel units (this can further include the following three cases: (1) only located a display area of one of the two rows of pixel units at the junction; (2) a display area of two rows of pixel units at the same time; (3) at the junction, but not falling into any one of the adjacent two rows of pixel units The display area) can also be located at other suitable locations without being limited to the position shown in FIG. 2. For purposes of illustration, the common electrode line 4 can be shown in Figure 2 as being located at the junction of two adjacent thin film transistor pixel structures 3.
图 3为根据本实施例的阵列基板结构沿图 2中的 A'-A线剖取的截面示意 图。 阵列基板结构可以从下到上依次包括: 栅极 31、 栅绝缘层 32、 有源层 33、 源漏电极 34 (包括源电极和漏电极) 、 第一钝化层 35、 阻挡层 36、 公 共电极 37、 第二钝化层 38和像素电极 39。 在本实施例中, 公共电极线 4可 以与薄膜晶体管 TFT的栅极 31位于同一层(即与栅线 1位于同一层) , 且 与栅线 1平行。 像素电极 39可以为条状电极, 并可以通过穿过第二钝化层 38、 阻挡层 36和第一钝化层 35的通孔与源漏电极 34中的漏电极连接。条状 的像素电极 39可以具有条状孔洞 39' 。 该通孔可以包括穿过第二钝化层 38 的套孔 5以及穿过阻挡层 36和第一钝化层 35的过孔 6 (也可以称为第二过 孔) 。 公共电极 37可以是覆盖基板的整块电极。 为了避免与像素电极 39接 触, 公共电极 37可以在套孔 5的周围形成有直径大于套孔 5的隔离孔 7 , 即 在连接像素电极与漏电极的通孔的位置, 公共电极在该通孔周围形成有直径 大于通孔(具体为通孔的套孔部分) 的隔离孔。 公共电极线 4可以通过穿过 阻挡层 36、 第一钝化层 35和栅绝缘层 32的过孔 8 (也可以称为第一过孔) 与公共电极 37连接。 为了使公共电极线 4与公共电极 37并联连接以减小公 共电极 37的电阻, 公共电极线 4可以通过至少两个过孔 8与公共电极 37连 接, 以到达并联连接的效果(公共电极线 4不同于现有的为公共电极提供信 号的公共电极线) 。 3 is a schematic cross-sectional view of the array substrate structure taken along line A'-A of FIG. 2 according to the present embodiment. The array substrate structure may include, in order from bottom to top, a gate 31, a gate insulating layer 32, an active layer 33, source and drain electrodes 34 (including source and drain electrodes), a first passivation layer 35, a barrier layer 36, and a common The electrode 37, the second passivation layer 38, and the pixel electrode 39. In this embodiment, the common electrode line 4 can be It is located in the same layer as the gate 31 of the thin film transistor TFT (that is, in the same layer as the gate line 1), and is parallel to the gate line 1. The pixel electrode 39 may be a strip electrode and may be connected to a drain electrode in the source/drain electrode 34 through a through hole penetrating through the second passivation layer 38, the barrier layer 36, and the first passivation layer 35. The strip-shaped pixel electrode 39 may have a strip-shaped hole 39'. The via may include a via hole 5 through the second passivation layer 38 and a via 6 (also referred to as a second via) through the barrier layer 36 and the first passivation layer 35. The common electrode 37 may be a monolithic electrode covering the substrate. In order to avoid contact with the pixel electrode 39, the common electrode 37 may be formed with an isolation hole 7 having a diameter larger than the sleeve hole 5 around the sleeve hole 5, that is, at a position of the through hole connecting the pixel electrode and the drain electrode, the common electrode is in the through hole An isolation hole having a diameter larger than a through hole (specifically, a hole portion of the through hole) is formed around the hole. The common electrode line 4 may be connected to the common electrode 37 through a via 8 (which may also be referred to as a first via) passing through the barrier layer 36, the first passivation layer 35, and the gate insulating layer 32. In order to connect the common electrode line 4 and the common electrode 37 in parallel to reduce the resistance of the common electrode 37, the common electrode line 4 may be connected to the common electrode 37 through at least two via holes 8 to achieve the effect of the parallel connection (the common electrode line 4) Unlike the existing common electrode lines that provide signals to the common electrodes).
本实施例中, 阵列基板的结构只是为了进行示例, 并非对本发明实施例 的阵列基板结构进行限制。 例如, 在实际应用时, 可以不包括阻挡层 36 , 或 者公共电极 37可以位于阻挡层 36与第一钝化层 35之间 (此时, 阻挡层 36 与第二钝化层 38可以为一体结构) ; 再比如, 公共电极 37也可以并非连成 整体的块状公共电极, 而是在每个像素单元中独立成块; 再比如, 公共电极 也可以位于像素电极的上方; 再比如, 公共电极线也可以不与栅线同层设置 和制作, 而是通过其它层(例如, 数据线金属层)或新增加的金属层制作。 因此, 阵列基板的实际结构可以根据实际需要进行变化。 当然, 本实施例中 示例性的设置阻挡层 36并使公共电极 37位于阻挡层 36的上方,可以使阵列 基板具有更高的开口率。 当阵列基板结构变化时, 本发明实施例中的过孔 6、 过孔 8等所穿过的层(例如, 阻挡层等)可以进行相应调整(即可以根据实 际需要穿过更多或更少的层) 。  In this embodiment, the structure of the array substrate is merely for the sake of example, and the array substrate structure of the embodiment of the present invention is not limited. For example, in practical applications, the barrier layer 36 may not be included, or the common electrode 37 may be located between the barrier layer 36 and the first passivation layer 35 (in this case, the barrier layer 36 and the second passivation layer 38 may be a unitary structure). For example, the common electrode 37 may not be integrated into a bulk common electrode, but may be independently formed into blocks in each pixel unit; for example, the common electrode may also be located above the pixel electrode; for example, the common electrode The lines may also be disposed and fabricated in the same layer as the gate lines, but may be fabricated from other layers (eg, data line metal layers) or newly added metal layers. Therefore, the actual structure of the array substrate can be changed according to actual needs. Of course, in the present embodiment, the barrier layer 36 is exemplarily disposed and the common electrode 37 is positioned above the barrier layer 36, so that the array substrate can have a higher aperture ratio. When the structure of the array substrate is changed, the layer (for example, the barrier layer, etc.) through which the via hole 6, the via 8 and the like are passed in the embodiment of the present invention can be adjusted accordingly (ie, more or less can be passed according to actual needs). Layer).
下面将描述上述阵列基板的制作方法。 在制作上述阵列基板时只需要制 作至少一条与公共电极 37连接的公共电极线 4即可。 为了制作工序的简单, 可以在栅线的同一层制作公共电极线 4。  A method of fabricating the above array substrate will be described below. It is only necessary to make at least one common electrode line 4 connected to the common electrode 37 when fabricating the above array substrate. In order to make the manufacturing process simple, the common electrode line 4 can be formed on the same layer of the gate line.
以下将具体描述由本实施例提供的一种 ADS 型阵列基板的制作方法。 根据该方法制作的阵列基板可以具有至少一条与公共电极连接的公共电极 线。 为了描述的方便, 下面以制造具有图 3所示结构的 ADS型阵列基板为 例进行说明, 所述制作方法具体包括如下步骤: A method of fabricating an ADS type array substrate provided by the present embodiment will be specifically described below. The array substrate fabricated according to the method may have at least one common electrode line connected to the common electrode. For the convenience of description, the following is an example of manufacturing an ADS type array substrate having the structure shown in FIG. 3, and the manufacturing method specifically includes the following steps:
51. 在玻璃基板上通过曝光、 显影、 刻蚀、 剥离等一系列构图工艺形成 栅极 31、 栅线 1的图形的同时也形成公共电极线 4。 公共电极线 4可以平行 于栅线 1。 公共电极线 4可以位于一行像素单元的显示区域, 也可以位于两 行相邻的像素单元的交界处。 为了较少地影响开口率, 公共电极线 4可以设 置在两行相邻的像素单元的交界处。  51. The common electrode line 4 is also formed on the glass substrate by patterning the gate 31 and the gate line 1 by a series of patterning processes such as exposure, development, etching, and peeling. The common electrode line 4 can be parallel to the gate line 1. The common electrode line 4 may be located in a display area of one row of pixel units or at a boundary of two adjacent pixel units. In order to influence the aperture ratio less, the common electrode line 4 may be disposed at the boundary of two adjacent pixel units.
52. 在形成栅极 31、 栅线 1和公共电极线 4的图形之后, 通过构图工艺 形成 TFT (除栅极 31外的栅绝缘层 32、 有源层 33、 源漏电极 34、 第一钝化 层 35 ) 以及位于 TFT上的阻挡层 36, 并在阻挡层 36对应于源漏电极 34中 的漏电极的区域和公共电极线 4的图形的区域向下刻蚀形成穿过阻挡层 36、 第一钝化层 35的过孔 6以及穿过阻挡层 36、 第一钝化层 35和栅绝缘层 32 的过孔 8。 优选地, 可以至少刻蚀两个过孔 8。  52. After forming the pattern of the gate electrode 31, the gate line 1 and the common electrode line 4, the TFT is formed by a patterning process (the gate insulating layer 32 except the gate electrode 31, the active layer 33, the source/drain electrode 34, the first blunt a layer 35) and a barrier layer 36 on the TFT, and etched down through the barrier layer 36 in a region of the barrier layer 36 corresponding to the drain electrode in the source and drain electrode 34 and the pattern of the common electrode line 4, The via 6 of the first passivation layer 35 and the via 8 passing through the barrier layer 36, the first passivation layer 35, and the gate insulating layer 32. Preferably, at least two vias 8 can be etched.
S3. 沉积第一导电薄膜并在该第一导电薄膜对应于像素电极 39 和源漏 电极 34中的漏电极连接的区域处通过构图工艺形成隔离孔 7 , 以形成公共电 极 37的图形。  S3. Depositing a first conductive film and forming an isolation hole 7 by a patterning process at a region where the first conductive film corresponds to the drain electrode connection of the pixel electrode 39 and the source/drain electrode 34 to form a pattern of the common electrode 37.
54. 在形成有公共电极 37 的图形的基板上沉积绝缘薄膜以形成第二钝 化层 38 , 并在第二钝化层 38上对应于像素电极 39和源漏电极 34中的漏电 极连接的区域处通过构图工艺形成穿过第二钝化层 38的套孔 5。套孔 5的直 径可以大于或等于过孔 6的直径, 且小于隔离孔 7的直径。  54. depositing an insulating film on the substrate on which the pattern of the common electrode 37 is formed to form a second passivation layer 38, and corresponding to the drain electrode in the pixel electrode 39 and the source/drain electrode 34 on the second passivation layer 38 A through hole 5 is formed through the second passivation layer 38 by a patterning process at the region. The diameter of the sleeve hole 5 may be greater than or equal to the diameter of the via hole 6 and smaller than the diameter of the isolation hole 7.
55. 沉积第二导电薄膜, 并对该第二导电薄膜进行构图工艺以形成条状 像素电极 39,像素电极 39通过套孔 5和过孔 6连接到源漏电极 34中的漏电 极。  55. Depositing a second conductive film, and patterning the second conductive film to form a stripe pixel electrode 39, and the pixel electrode 39 is connected to the drain electrode in the source/drain electrode 34 through the via hole 5 and the via hole 6.
本实施例在阵列基板上增加了公共电极线 4, 并且通过至少两个过孔 8 与公共电极 37连接, 使得上下两个电阻, 即公共电极 37和公共电极线 4并 联, 从而极大程度上减小了公共电极 37的电阻, 防止了由于公共电极 37的 电阻增大导致的串扰等不良的发生。  In this embodiment, the common electrode line 4 is added to the array substrate, and is connected to the common electrode 37 through at least two via holes 8, so that the upper and lower two resistors, that is, the common electrode 37 and the common electrode line 4 are connected in parallel, thereby greatly The electric resistance of the common electrode 37 is reduced, and occurrence of a defect such as crosstalk due to an increase in the resistance of the common electrode 37 is prevented.
以上仅是本发明实施例的一种制作方法, 当阵列基板的具体结构发生变 化时, 该制作方法可以根据实际情况进行调整。 例如, 在实际应用时, 可以 不制作阻挡层 36, 或者, 公共电极 37可以位于阻挡层 36与第一钝化层 35 之间 (此时, 阻挡层 36与第二钝化层 38可以为一体结构) ; 再例如, 公共 电极 37也可以并非连成整体的块状公共电极,而是在每个像素单元中独立成 块; 再例如, 公共电极也可以位于像素电极的上方; 再例如, 公共电极线也 可以不与栅线同层设置和制作, 而是通过其它层(比如数据线金属层)或新 增加的金属层制作。 在此不作限制。 The above is only a manufacturing method of the embodiment of the present invention. When the specific structure of the array substrate changes, the manufacturing method can be adjusted according to actual conditions. For example, in practical applications, The barrier layer 36 is not formed, or the common electrode 37 may be located between the barrier layer 36 and the first passivation layer 35 (in this case, the barrier layer 36 and the second passivation layer 38 may be a unitary structure); for example, a common electrode 37 may also be a block-shaped common electrode that is not integrated into a whole, but is independently formed into blocks in each pixel unit; for example, the common electrode may also be located above the pixel electrode; for example, the common electrode line may not be connected to the gate line. The same layer is set and fabricated, but is made by other layers (such as the data line metal layer) or the newly added metal layer. There are no restrictions here.
为了进一步减小公共电极 37的电阻,可以在阵列基板上设置多个用于公 共电极线 4与公共电极 37连接的过孔 8。 例如, 每条公共电极线 4可以通过 N个位于阵列基板上的过孔 8与公共电极 37连接,其中 2≤N≤A, A为由数 据线划分的多列薄膜晶体管像素结构的总列数。 如图 2所示, 穿过每行 3个 像素的公共电极线 4通过两个过孔 8与公共电极 37连接。优选地, N个过孔 8 可以间隔相同像素列数(或间隔相同像素行数, 当公共电极线在阵列基板 上纵向设置与数据线平行时)呈周期性地排列,此时可以使公共电极 37在各 个像素单元的电阻趋于一致, 在一定程度上保证显示画面的均匀性。  In order to further reduce the resistance of the common electrode 37, a plurality of via holes 8 for connecting the common electrode line 4 and the common electrode 37 may be disposed on the array substrate. For example, each of the common electrode lines 4 may be connected to the common electrode 37 through N via holes 8 on the array substrate, where 2≤N≤A, and A is the total number of columns of the multi-column thin film transistor pixel structure divided by the data lines. . As shown in Fig. 2, the common electrode line 4 passing through 3 pixels per line is connected to the common electrode 37 through the two via holes 8. Preferably, the N via holes 8 may be periodically arranged with the same number of pixel columns (or the same number of pixel rows, when the common electrode lines are vertically disposed on the array substrate and parallel to the data lines), and the common electrode may be made at this time. 37 The resistance of each pixel unit tends to be uniform, and the uniformity of the display picture is ensured to some extent.
此外, 可以在阵列基板上设置多条与公共电极 37连接的公共电极线 4, 每一条公共电极线 4对应于一行薄膜晶体管像素结构。 由于公共电极线 4会 对整个基板的像素开口率产生影响 (设置有公共电极线 4的像素和未设有公 共电极线 4的像素的开口率不一样) , 所以为了保证整个阵列基板的开口率 的均一性, 在由栅线 1划分的多行薄膜晶体管像素结构 3中, 可以使公共电 极线 4间隔 M行薄膜晶体管像素结构呈周期性地排列, 其中 M表示由栅线 1划分的多行薄膜晶体管像素结构 3的行数, M大于 0且小于总行数。 可选 地, 在由栅线 1划分的多行薄膜晶体管像素结构 3中的每行薄膜晶体管像素 结构可以均设置一条公共电极线 4 (公共电极线 4可以位于该行像素单元的 显示区域, 也可以位于该行像素单元与相邻行像素单元的交界处) , 这样使 得整个基板的像素开口率的均一性较好, 而且公共电极 37的电阻更低。  Further, a plurality of common electrode lines 4 connected to the common electrode 37 may be disposed on the array substrate, and each of the common electrode lines 4 corresponds to a row of thin film transistor pixel structures. Since the common electrode line 4 affects the pixel aperture ratio of the entire substrate (the aperture ratio of the pixel provided with the common electrode line 4 and the pixel not provided with the common electrode line 4 is different), in order to ensure the aperture ratio of the entire array substrate Uniformity, in the multi-line thin film transistor pixel structure 3 divided by the gate line 1, the common electrode line 4 may be arranged periodically with M-line thin film transistor pixel structures, wherein M represents multiple lines divided by the gate lines 1. The number of rows of the thin film transistor pixel structure 3, M is greater than 0 and less than the total number of rows. Optionally, each of the thin film transistor pixel structures in the multi-row thin film transistor pixel structure 3 divided by the gate line 1 may be provided with a common electrode line 4 (the common electrode line 4 may be located in the display area of the row of pixel units, also It may be located at the intersection of the row of pixel cells and the adjacent row of pixel cells, such that the uniformity of the pixel aperture ratio of the entire substrate is better, and the resistance of the common electrode 37 is lower.
根据本实施例的 ADS型阵列基板可以应用于 R-ADS型阵列基板, 从而 实现视网膜显示, 带来更好的用户体验。  The ADS type array substrate according to the present embodiment can be applied to an R-ADS type array substrate, thereby realizing retinal display, resulting in a better user experience.
第二实施例  Second embodiment
由于根据第一实施例的阵列基板结构中增加了多个公共电极线 4, 如果 使用传统的 ADS方式, 公共电极线 4需要与栅线 1 间隔一定距离, 这样会 导致其遮挡正常的发光区域, 对开口率的影响较大。 为了提高开口率, 本实 施例的阵列基板釆用 TFT对置的方式设置。 如图 4所示(其每个薄膜晶体管 像素结构的截面图和图 3类似) , 被栅线 1划分的多个薄膜晶体管像素结构 3中相邻两行薄膜晶体管像素结构 3 (即相邻两行像素单元 )的薄膜晶体管区 域相邻排列, 相邻两行薄膜晶体管像素结构 3各自的显示区域分别与与其相 邻行薄膜晶体管像素结构 3的显示区域相邻排列。 该阵列基板可以包括至少 一条公共电极线,公共电极线 4可以位于上述相邻排列的显示区域的交界处, 即位于两行相邻的薄膜晶体管像素结构的交界处, 该两行相邻的薄膜晶体管 像素结构的显示区域相邻设置。 并且, 如图 4所示, 本发明实施例的公共电 极线同时位于交界处的两行像素单元的显示区域。 为了使公共电极线 4与公 共电极 37并联连接以减小公共电极 37的电阻, 公共电极线 4至少通过 2个 过孔 8与公共电极 37连接,以到达并联连接的效果(公共电极线 4不同于现 有的为公共电极提供信号的公共电极线) 。 Since a plurality of common electrode lines 4 are added to the array substrate structure according to the first embodiment, if the conventional ADS method is used, the common electrode line 4 needs to be spaced apart from the gate line 1 by a certain distance. The illuminating area that causes it to block normal has a great influence on the aperture ratio. In order to increase the aperture ratio, the array substrate of the present embodiment is disposed in a manner opposite to the TFT. As shown in FIG. 4 (the cross-sectional view of each of the thin film transistor pixel structures is similar to FIG. 3), adjacent two rows of thin film transistor pixel structures 3 of the plurality of thin film transistor pixel structures 3 divided by the gate lines 1 (ie, adjacent two The thin film transistor regions of the row pixel units are adjacently arranged, and the respective display regions of the adjacent two rows of thin film transistor pixel structures 3 are respectively arranged adjacent to the display regions of the adjacent thin film transistor pixel structures 3. The array substrate may include at least one common electrode line, and the common electrode line 4 may be located at the intersection of the adjacent adjacent display regions, that is, at the boundary of two adjacent thin film transistor pixel structures, the two adjacent films. The display areas of the transistor pixel structure are disposed adjacent to each other. Moreover, as shown in FIG. 4, the common electrode line of the embodiment of the present invention is simultaneously located at the display area of the two rows of pixel units at the boundary. In order to connect the common electrode line 4 and the common electrode 37 in parallel to reduce the resistance of the common electrode 37, the common electrode line 4 is connected to the common electrode 37 through at least two via holes 8 to achieve the effect of parallel connection (the common electrode line 4 is different) In the existing common electrode line that provides a signal for the common electrode).
为了进一步减小公共电极 37的电阻,可以在阵列基板上设置多个用于公 共电极线 4与公共电极 37连接的过孔 8。 例如, 每条公共电极线 4可以通过 N个位于阵列基板上的过孔 8与公共电极 37连接,其中 2≤N≤A, A是由数 据线划分的多列薄膜晶体管像素结构的总列数。 如图 4所示, 穿过每行 3个 像素的公共电极线 4可以通过两个过孔 8与公共电极 37连接。优选地, N个 过孔 8可以间隔相同像素列数成周期性地排列,从而可以使公共电极 37在各 个像素单元的电阻趋于一致, 在一定程度上保证显示画面的均匀性。  In order to further reduce the resistance of the common electrode 37, a plurality of via holes 8 for connecting the common electrode line 4 and the common electrode 37 may be disposed on the array substrate. For example, each common electrode line 4 can be connected to the common electrode 37 through N via holes 8 on the array substrate, where 2≤N≤A, A is the total number of columns of the multi-column thin film transistor pixel structure divided by the data lines. . As shown in Fig. 4, the common electrode line 4 passing through 3 pixels per line can be connected to the common electrode 37 through the two via holes 8. Preferably, the N via holes 8 can be periodically arranged at intervals of the same number of pixel columns, so that the resistance of the common electrode 37 in each pixel unit tends to be uniform, and the uniformity of the display screen is ensured to some extent.
同时, 可以在阵列基板上设置多条与公共电极 37连接的公共电极线 4, 由于公共电极线 4会对整个基板的像素开口率产生影响 (设置有公共电极线 4的像素和未设有公共电极线 4的像素的开口率不一样) 。 为保证整个阵列 基板的开口率的均一性, 在由栅线 1划分的多行薄膜晶体管像素结构 3中, 可以使公共电极线 4间隔 M行像素单元呈周期性地排列, 其中 M表示由栅 线 1划分的多行薄膜晶体管像素结构 3的行数, M大于 0且小于总行数。 优 选地, 在由栅线 1划分的多行薄膜晶体管像素结构 3中, 在每一个上述相邻 排列的显示区域的交界处可以均设置一条公共电极线 4, 这样使得整个基板 的像素开口率的均一性较好, 而且公共电极 37的电阻更小。可选地,显示区 域相邻排列的两行薄膜晶体管像素结构 3的两个显示区域可以仅设有一条公 共电极线 4, 即显示区域相邻排列的两行薄膜晶体管像素结构 3可以共用一 条公共电极线 4, 这样对像素的开口率影响较小。 Meanwhile, a plurality of common electrode lines 4 connected to the common electrode 37 may be disposed on the array substrate, since the common electrode line 4 affects the pixel aperture ratio of the entire substrate (pixels provided with the common electrode line 4 and not provided with a common The aperture ratio of the pixels of the electrode line 4 is different). In order to ensure the uniformity of the aperture ratio of the entire array substrate, in the multi-line thin film transistor pixel structure 3 divided by the gate line 1, the common electrode lines 4 may be periodically arranged with M rows of pixel units, wherein M represents a gate. The number of rows of the multi-line thin film transistor pixel structure 3 divided by line 1, M is greater than 0 and less than the total number of rows. Preferably, in the multi-line thin film transistor pixel structure 3 divided by the gate line 1, a common electrode line 4 may be disposed at the boundary of each of the adjacent adjacent display regions, such that the pixel aperture ratio of the entire substrate is The uniformity is good, and the electric resistance of the common electrode 37 is smaller. Optionally, the two display areas of the two rows of thin film transistor pixel structures 3 adjacent to each other in the display area may have only one public The common electrode line 4, that is, the two rows of thin film transistor pixel structures 3 arranged adjacent to each other in the display area can share a common electrode line 4, so that the aperture ratio of the pixels is less affected.
本发明各实施例中的两个区域 "相邻排列" 是指这两个区域中间除了栅 线之外或者除了栅线和公共电极线之外不再间隔其他部件。 例如, 相邻两行 像素单元的薄膜晶体管区域相邻排列, 指相邻两行像素单元的薄膜晶体管区 域中间仅仅间隔栅线, 或者仅仅间隔栅线和公共电极线, 不间隔像素电极等 其他部件; 两行相邻的薄膜晶体管像素结构的显示区域相邻设置, 是指两行 相邻的薄膜晶体管像素结构的显示区域仅仅间隔栅线, 或者仅仅间隔栅线和 公共电极线, 不间隔薄膜晶体管等其他部件。  The two regions "adjacently arranged" in the embodiments of the present invention mean that the other regions are not spaced apart from each other except for the gate lines or except for the gate lines and the common electrode lines. For example, the thin film transistor regions of two adjacent rows of pixel cells are adjacently arranged, meaning that only the gate lines are spaced apart in the middle of the thin film transistor regions of the adjacent two rows of pixel cells, or only the gate lines and the common electrode lines are spaced apart, and other components such as pixel electrodes are not spaced. The display areas of the adjacent thin film transistor pixel structures are adjacent to each other, which means that the display areas of the adjacent thin film transistor pixel structures are only spaced apart from the gate lines, or only the gate lines and the common electrode lines are spaced apart, and the thin film transistors are not spaced. And other components.
本实施例中的薄膜晶体管像素结构 3与第一实施例中的薄膜晶体管像素 结构 3类似, 这里不再重复描述。  The thin film transistor pixel structure 3 in this embodiment is similar to the thin film transistor pixel structure 3 in the first embodiment, and the description thereof will not be repeated here.
本实施例的阵列基板的制作方法与第一实施例的阵列基板的制作方法基 本相同, 不同的是: 在玻璃基板上通过曝光、 显影、 刻蚀、 剥离等一系列构 图工艺形成栅极 31、 栅线 1的图形和公共电极线 4的图形时, 使由栅线 1划 分的多行薄膜晶体管像素结构 (即像素单元) 中相邻两行薄膜晶体管像素结 构的薄膜晶体管的栅极区域相邻排列, 该栅极区域相邻排列的两行薄膜晶体 管像素结构中各自的显示区域分别与上下相邻行(也就是, 栅极区域相邻排 列的两行薄膜晶体管像素结构之上的一行和之下的一行 ) 中的薄膜晶体管像 素结构的显示区域相邻排列。 可以在显示区域相邻排列的两行薄膜晶体管像 素结构之间制作一条公共电极线 4。 在栅极 31、 栅线 1的图形和公共电极线 4之上的各个层的制作步骤可以与第一实施例类似, 这里不再重复描述。  The method for fabricating the array substrate of the present embodiment is substantially the same as the method for fabricating the array substrate of the first embodiment. The difference is: forming a gate electrode 31 on a glass substrate by a series of patterning processes such as exposure, development, etching, and stripping. When the pattern of the gate line 1 and the pattern of the common electrode line 4 are such that the gate regions of the thin film transistors of the adjacent two rows of thin film transistor pixel structures in the multi-line thin film transistor pixel structure (ie, pixel unit) divided by the gate line 1 are adjacent Arranging, the display regions of the two rows of thin film transistor pixel structures arranged adjacent to the gate region are respectively adjacent to the upper and lower adjacent rows (that is, a row above the pixel structure of the two rows of thin film transistors arranged adjacent to the gate region) The display areas of the thin film transistor pixel structures in the next row) are adjacently arranged. A common electrode line 4 can be formed between two rows of thin film transistor pixel structures arranged adjacent to each other in the display area. The steps of fabricating the gate 31, the pattern of the gate line 1 and the respective layers above the common electrode line 4 may be similar to those of the first embodiment, and the description thereof will not be repeated here.
如图 5 ( a )所示, 像素的开口率会受以下几个因素影响: 由 a表示的公 共电极线 4的宽度; 由 b表示的用于防止栅极线上方漏光的黑矩阵(Black Matrix, BM )的宽度; 由 c表示的栅线宽度; 以及由 d表示的用于防止栅线 下方漏光的 BM的宽度。 如图 5 ( b )所示, 由于两个像素釆用 TFT对置的 方式排列, 所以两个像素只需要一个 d的宽度来防止栅线下方漏光, 因此每 个像素可以节省 d/2的 BM宽度, 相对于第一实施例的阵列基板的像素开口 率提高约 3%。 另外, 公共电极线 4的 2a宽度也可以被进一步减小。 同时本 发明将上下两个像素之间的 TFT部分釆取对置的方式, 有效利用了多余空 间, 而且隔垫物设置在此位置, 无需增加额外 BM面积来防止隔垫物偏移造 成的不良, 从而增大了开口率。 而且, 目前的 ADS产品由于开口率的限制, 所以单个像素 BM宽度较窄, 这样在放置隔垫物之后, 由于隔垫物可能的位 置偏移, 容易在非 BM区域形成取向盲区。 这正是造成对比度下降以及各种 残影的根本原因, 严重影响良率。 而釆取 TFT对置的方式, 两个像素的 BM 合在一处, 隔垫物放置有了较大的空间, 因此, 在不降低开口率的情况下, 保证了产口 σ口 σ 贝 As shown in Fig. 5(a), the aperture ratio of a pixel is affected by several factors: the width of the common electrode line 4 indicated by a; the black matrix indicated by b for preventing light leakage above the gate line (Black Matrix) The width of BM ); the width of the gate line indicated by c; and the width of BM indicated by d for preventing light leakage under the gate line. As shown in Fig. 5(b), since two pixels are arranged in opposite ways by TFTs, two pixels only need a width of d to prevent light leakage under the gate lines, so each pixel can save d/2 BM. The width is increased by about 3% with respect to the pixel aperture ratio of the array substrate of the first embodiment. In addition, the width 2a of the common electrode line 4 can also be further reduced. At the same time, the present invention takes the opposite part of the TFT between the upper and lower pixels, effectively utilizes the excess space, and the spacer is disposed at this position, without adding an extra BM area to prevent the spacer from being offset. The formation is poor, thereby increasing the aperture ratio. Moreover, current ADS products have a narrow width of a single pixel BM due to the limitation of the aperture ratio, so that after the spacer is placed, it is easy to form an orientation dead zone in the non-BM region due to possible positional displacement of the spacer. This is the root cause of the contrast reduction and various afterimages, which seriously affects the yield. In the way of taking the TFT opposite, the BM of the two pixels is combined in one place, and the spacer has a large space, so that the σ mouth σ is ensured without lowering the aperture ratio.
并且, 在阻挡层(一般为树脂材料)具有过孔的像素结构中, 由于过孔 较深,过孔中会容纳较多液晶。这些液晶和正常显示区的液晶厚度相差很大。 如图 6所示, 过孔到液晶层 9的顶部的距离 h2可以大于液晶盒的厚度 hi , 这造成液晶取向的差异, 形成严重漏光。 而且, 过孔上覆盖有电极, 这里的 电极并不平行于基板, 而是设置在过孔的侧壁上从而与基板形成大角度的坡 度角 α , 这会影响周边液晶的取向。 另外, 过孔区域对正常显示区的电场有 很强的干扰, 严重影响正常显示, 而如果使用额外 ΒΜ遮挡, 一是降低了开 口率, 二是仍会造成品质的隐患。 如果釆用 TFT对置的设计, 则上下两个像 素的过孔区域可以放置在一起, 并与正常显示区域间隔开由栅线和 ΒΜ的宽 度产生的距离, 从而可以避免过孔区域对正常显示区域的影响, 并可以提高 开口率且降低产生不良的风险。  Further, in a pixel structure in which a barrier layer (generally a resin material) has via holes, since the via holes are deep, a large amount of liquid crystal is accommodated in the via holes. These liquid crystals differ greatly in liquid crystal thickness from the normal display area. As shown in Fig. 6, the distance h2 from the via hole to the top of the liquid crystal layer 9 may be larger than the thickness hi of the liquid crystal cell, which causes a difference in liquid crystal alignment, resulting in severe light leakage. Moreover, the via is covered with an electrode, and the electrode here is not parallel to the substrate, but is disposed on the sidewall of the via to form a large angle of inclination α with the substrate, which affects the orientation of the surrounding liquid crystal. In addition, the via area has a strong interference with the electric field in the normal display area, which seriously affects the normal display. If additional ΒΜ is used, the opening ratio is lowered, and the quality is still hidden. If the TFT opposite design is used, the via areas of the upper and lower pixels can be placed together and spaced apart from the normal display area by the width of the gate lines and the width of the turns, thereby avoiding the normal display of the via areas. The impact of the area can increase the aperture ratio and reduce the risk of bad.
根据本实施例的 ADS型阵列基板可以应用于 R-ADS型阵列基板, 从而 实现视网膜显示, 以带来更好的用户体验。  The ADS type array substrate according to the present embodiment can be applied to an R-ADS type array substrate, thereby realizing retinal display to bring about a better user experience.
第三实施例  Third embodiment
本实施例提供了一种包括根据第一或第二实施例的阵列基板的显示装 置, 该显示装置可以为任何具有显示功能的产品或部件, 诸如液晶面板、 电 子纸、 OLED面板、 液晶电视、 液晶显示器、 数码相框、 手机、 平板电脑等。 ( 1 )、 一种阵列基板, 包括形成在基板上的多条栅线、 多条数据线以及 在所述栅线和所述数据线之间形成的多个薄膜晶体管像素结构, 所述薄膜晶 体管像素结构包括薄膜晶体管和显示区域,所述显示区域中设置有公共电极, 其中所述阵列基板还包括与所述公共电极连接的至少一条公共电极线。 ( 2 ) 、 根据 ( 1 )所述的阵列基板, 其中所述至少一条公共电极线位于 所述薄膜晶体管像素结构的显示区域, 或者位于两行相邻的所述薄膜晶体管 像素结构的交界处。 The embodiment provides a display device including the array substrate according to the first or second embodiment, and the display device can be any product or component having a display function, such as a liquid crystal panel, an electronic paper, an OLED panel, a liquid crystal television, LCD monitors, digital photo frames, mobile phones, tablets, etc. (1) An array substrate comprising a plurality of gate lines formed on a substrate, a plurality of data lines, and a plurality of thin film transistor pixel structures formed between the gate lines and the data lines, the thin film transistor The pixel structure includes a thin film transistor and a display region, and a common electrode is disposed in the display region, wherein the array substrate further includes at least one common electrode line connected to the common electrode. The array substrate according to (1), wherein the at least one common electrode line is located in a display region of the thin film transistor pixel structure, or the thin film transistor is adjacent to two rows The junction of the pixel structure.
(3) 、 根据(1)所述的阵列基板, 其中每行所述薄膜晶体管像素结构 都对应地设置有一条所述公共电极线。  (3) The array substrate according to (1), wherein each of the thin film transistor pixel structures of each row is correspondingly provided with one of the common electrode lines.
(4) 、 根据(1 ) - (3) 中任一项所述的阵列基板, 其中所述至少一条 公共电极线通过 N个位于所述阵列基板上的过孔与所述公共电极连接,其中 The array substrate according to any one of (1), wherein the at least one common electrode line is connected to the common electrode through N via holes on the array substrate, wherein
2<N<A, A为由所述数据线划分的多列所述薄膜晶体管像素结构的总列数。 2 < N < A, A is the total number of columns of the plurality of thin film transistor pixel structures divided by the data lines.
(5) 、 根据(4)所述的阵列基板, 其中所述 N个过孔间隔相同的像素 列数或间隔相同的像素行数呈周期性排列。  (5) The array substrate according to (4), wherein the number of pixel rows having the same interval of the N via holes or the number of pixel rows having the same interval are periodically arranged.
(6) 、 根据 (1 ) - (5) 中任一项所述的阵列基板, 其中由所述栅线划 分的多行薄膜晶体管像素结构中相邻两行薄膜晶体管像素结构的薄膜晶体管 区域相邻排列, 所述相邻两行薄膜晶体管像素结构各自的显示区域分别与相 邻行的薄膜晶体管像素结构的显示区域相邻排列。  The array substrate according to any one of (1) to (5), wherein a thin film transistor region of a pixel structure of two adjacent thin film transistors in a multi-line thin film transistor pixel structure divided by the gate line In the adjacent arrangement, the display areas of the adjacent two rows of thin film transistor pixel structures are respectively arranged adjacent to the display areas of the thin film transistor pixel structures of adjacent rows.
(7) 、 根据(6)所述的阵列基板, 其中所述多行薄膜晶体管像素结构 中的每行薄膜晶体管像素结构都设置有一条所述公共电极线。  (7) The array substrate according to (6), wherein each of the thin film transistor pixel structures in the multi-line thin film transistor pixel structure is provided with one of the common electrode lines.
(8) 、 根据 (6)所述的阵列基板, 其中显示区域相邻排列的两行薄膜 晶体管像素结构仅设有一条所述公共电极线, 所述公共电极线位于所述显示 区域相邻排列的两行薄膜晶体管像素结构的交界处。  (8) The array substrate according to (6), wherein the two rows of thin film transistor pixel structures arranged adjacent to each other are provided with only one of the common electrode lines, and the common electrode lines are adjacent to the display area. The junction of the two-line thin film transistor pixel structure.
(9) 、 根据(1 ) - (8) 中任一项所述的阵列基板, 其中所述薄膜晶体 管像素结构中的像素电极为条状电极, 所述公共电极为块状电极, 所述像素 电极和所述公共电极之间设置有钝化层。  The array substrate according to any one of (1), wherein the pixel electrode in the pixel transistor pixel structure is a strip electrode, the common electrode is a block electrode, and the pixel A passivation layer is disposed between the electrode and the common electrode.
(10) , 根据 (1 ) - (9)中任一项所述的阵列基板, 其中所述公共电极 为覆盖整个所述阵列基板的块状电极。  The array substrate according to any one of (1), wherein the common electrode is a bulk electrode covering the entire array substrate.
(11 ) , 根据 (1) - (10) 中任一项所述的阵列基板, 其中所述像素电 极通过通孔与所述薄膜晶体管的漏电极连接, 所述公共电极在所述通孔的周 围形成有直径大于所述通孔的隔离孔。  The array substrate according to any one of (1), wherein the pixel electrode is connected to a drain electrode of the thin film transistor through a via hole, and the common electrode is in the via hole An isolation hole having a diameter larger than the through hole is formed around.
(12) , 根据 (1) - (11 ) 中任一项所述的阵列基板, 其中所述公共电 极线与所述栅线位于同一层, 且与所述栅线平行。  The array substrate according to any one of (1), wherein the common electrode line is in the same layer as the gate line and is parallel to the gate line.
(13) 、 根据(1) - (12) 中任一项所述的阵列基板, 其中所述阵列基 板是釆用视网膜显示技术的阵列基板。  The array substrate according to any one of (1) to (12) wherein the array substrate is an array substrate using retinal display technology.
(14) 、 一种阵列基板的制作方法, 包括以下步骤: SI : 在基板上形成栅线图形和薄膜晶体管的栅极图形的同时, 在所述基 板上形成至少一条公共电极线图形; (14) A method for fabricating an array substrate, comprising the steps of: SI: forming at least one common electrode line pattern on the substrate while forming a gate line pattern and a gate pattern of the thin film transistor on the substrate;
S2: 在形成所述栅线图形、 所述栅极图形和所述公共电极线图形之后, 形成薄膜晶体管、 位于所述薄膜晶体管之上的公共电极图形、 像素电极图形 以及用于连接所述公共电极线图形和所述公共电极图形的第一过孔。  S2: after forming the gate line pattern, the gate pattern, and the common electrode line pattern, forming a thin film transistor, a common electrode pattern over the thin film transistor, a pixel electrode pattern, and a connection for the common An electrode line pattern and a first via of the common electrode pattern.
( 15 ) 、 根据 ( 14 )所述的制作方法, 其中所述步骤 S2包括: 在完成步骤 S1之后的所述基板上形成薄膜晶体管;  The manufacturing method according to (14), wherein the step S2 comprises: forming a thin film transistor on the substrate after the step S1 is completed;
在形成所述薄膜晶体管之后的所述基板上形成阻挡层, 并在所述阻挡层 上对应所述公共电极线图形的区域和所述薄膜晶体管的漏电极与所述像素电 极的连接区域分别向下刻蚀形成所述第一过孔和用于连接漏电极与所述像素 电极的第二过孔;  Forming a barrier layer on the substrate after forming the thin film transistor, and respectively connecting a region corresponding to the common electrode line pattern on the barrier layer and a connection region of a drain electrode and the pixel electrode of the thin film transistor Forming the first via hole and the second via hole for connecting the drain electrode and the pixel electrode;
沉积第一导电薄膜并在所述第一导电薄膜上在所述第二过孔的周围通过 构图工艺形成隔离孔, 以形成公共电极图形;  Depositing a first conductive film and forming an isolation hole on the first conductive film around the second via hole by a patterning process to form a common electrode pattern;
在形成所述公共电极图形的基板上形成绝缘薄膜以形成钝化层, 并在所 述钝化层上对应于所述第二过孔的区域通过构图工艺形成穿过所述钝化层的 套孔, 所述套孔的直径小于所述隔离孔的直径, 所述套孔和所述第二过孔构 成连接所述像素电极与所述漏电极的通孔;  Forming an insulating film on the substrate on which the common electrode pattern is formed to form a passivation layer, and forming a pass through the passivation layer by a patterning process on a region of the passivation layer corresponding to the second via hole a hole having a diameter smaller than a diameter of the isolation hole, the sleeve hole and the second via forming a through hole connecting the pixel electrode and the drain electrode;
沉积第二导电薄膜并对所述第二导电薄膜进行构图工艺以形成条状像素 电极, 所述像素电极通过所述通孔连接到所述漏电极。  A second conductive film is deposited and the second conductive film is patterned to form a strip-shaped pixel electrode, and the pixel electrode is connected to the drain electrode through the via.
( 16 ) 、 根据(14 )或(15 )所述的制作方法, 其中所述至少一条公共 电极线图形位于薄膜晶体管像素结构的显示区域, 或者位于两行相邻的薄膜 晶体管像素结构的交界处。  The manufacturing method according to (14) or (15), wherein the at least one common electrode line pattern is located in a display area of the thin film transistor pixel structure, or at a boundary of two adjacent thin film transistor pixel structures .
( 17 ) 、 根据(14 )或(15 )所述的制作方法, 其中每行薄膜晶体管像 素结构都对应地设置有一条所述公共电极线图形。  (17) The manufacturing method according to (14) or (15), wherein each of the thin film transistor pixel structures is correspondingly provided with one of the common electrode line patterns.
( 18 ) 、 根据(14 )或(15 )所述的制作方法, 其中所述步骤 S1 中在 形成栅线图形和薄膜晶体管的栅极图形时, 使由栅线划分的多行薄膜晶体管 像素结构中相邻两行薄膜晶体管像素结构的栅极区域相邻排列, 所述栅极区 域相邻排列的两行薄膜晶体管像素结构中各自的显示区域分别与上下相邻行 中的薄膜晶体管像素结构的显示区域相邻排列。  (18) The manufacturing method according to (14) or (15), wherein in the step S1, when forming the gate line pattern and the gate pattern of the thin film transistor, the pixel structure of the plurality of lines of thin film transistors divided by the gate lines is formed The gate regions of the adjacent two rows of thin film transistor pixel structures are adjacently arranged, and the respective display regions of the two rows of thin film transistor pixel structures adjacent to the gate region are respectively connected to the thin film transistor pixel structures in the upper and lower adjacent rows The display areas are arranged adjacent to each other.
( 19 ) 、 根据 ( 18 ) 中任一项所述的制作方法, 其中在形成所述公共电 极线图形时, 所述显示区域相邻排列的两行薄膜晶体管像素结构仅形成一条 所述公共电极线, 并且所述公共电极线形成在所述显示区域相邻排列的两行 薄膜晶体管像素结构的交界处。 The manufacturing method according to any one of (18), wherein the public electricity is formed In the case of a polar line pattern, two rows of thin film transistor pixel structures arranged adjacent to the display area form only one common electrode line, and the common electrode line forms two rows of thin film transistor pixel structures arranged adjacent to the display area Junction.
(20) 、 一种显示装置, 包括根据 (1) - (13) 中任一项所述的阵列基 板。  (20) A display device comprising the array substrate according to any one of (1) to (13).
以上所述仅是本发明的示范性实施方式, 而非用于限制本发明的保护范 围, 本发明的保护范围由所附的权利要求确定。  The above is only an exemplary embodiment of the present invention, and is not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims.

Claims

权利要求书 Claim
1、一种阵列基板, 包括形成在基板上的多条栅线、 多条数据线以及在所 述栅线和所述数据线之间形成的多个薄膜晶体管像素结构, 所述薄膜晶体管 像素结构包括薄膜晶体管和显示区域, 所述显示区域中设置有公共电极, 其中所述阵列基板还包括与所述公共电极连接的至少一条公共电极线。An array substrate comprising a plurality of gate lines formed on a substrate, a plurality of data lines, and a plurality of thin film transistor pixel structures formed between the gate lines and the data lines, the thin film transistor pixel structure A thin film transistor and a display region are disposed, and a common electrode is disposed in the display region, wherein the array substrate further includes at least one common electrode line connected to the common electrode.
2、如权利要求 1所述的阵列基板,其中所述至少一条公共电极线位于所 述薄膜晶体管像素结构的显示区域, 或者位于两行相邻的所述薄膜晶体管像 素结构的交界处。 The array substrate according to claim 1, wherein said at least one common electrode line is located in a display region of said thin film transistor pixel structure or at a boundary of said thin film transistor pixel structures adjacent to two rows.
3、如权利要求 1所述的阵列基板,其中每行所述薄膜晶体管像素结构都 对应地设置有一条所述公共电极线。  The array substrate according to claim 1, wherein each of said thin film transistor pixel structures is provided with one of said common electrode lines.
4、如权利要求 1-3中任一项所述的阵列基板, 其中所述至少一条公共电 极线通过 N个位于所述阵列基板上的过孔与所述公共电极连接, 其中 2≤ N The array substrate according to any one of claims 1 to 3, wherein the at least one common electrode line is connected to the common electrode through N via holes on the array substrate, wherein 2 ≤ N
<A, A为由所述数据线划分的多列所述薄膜晶体管像素结构的总列数。 <A, A is the total number of columns of the plurality of thin film transistor pixel structures divided by the data lines.
5、 如权利要求 4所述的阵列基板, 其中所述 N个过孔间隔相同的像素 列数或间隔相同的像素行数呈周期性排列。  The array substrate according to claim 4, wherein the number of pixel rows having the same interval of N via holes or the number of pixel rows having the same interval are periodically arranged.
6、如权利要求 1-5中任一项所述的阵列基板, 其中由所述栅线划分的多 行薄膜晶体管像素结构中相邻两行薄膜晶体管像素结构的薄膜晶体管区域相 邻排列, 所述相邻两行薄膜晶体管像素结构各自的显示区域分别与相邻行的 薄膜晶体管像素结构的显示区域相邻排列。  The array substrate according to any one of claims 1 to 5, wherein a thin film transistor region of a pixel structure of two adjacent thin film transistors in a multi-line thin film transistor pixel structure divided by the gate line is adjacently arranged. The display regions of the adjacent two rows of thin film transistor pixel structures are respectively arranged adjacent to the display regions of the thin film transistor pixel structures of adjacent rows.
7、如权利要求 6所述的阵列基板,其中所述多行薄膜晶体管像素结构中 的每行薄膜晶体管像素结构都设置有一条所述公共电极线。  The array substrate according to claim 6, wherein each of the thin film transistor pixel structures in the multi-line thin film transistor pixel structure is provided with one of the common electrode lines.
8、如权利要求 6所述的阵列基板,其中显示区域相邻排列的两行薄膜晶 体管像素结构仅设有一条所述公共电极线, 所述公共电极线位于所述显示区 域相邻排列的两行薄膜晶体管像素结构的交界处。  The array substrate according to claim 6, wherein the two rows of thin film transistor pixel structures arranged adjacent to each other in the display area are provided with only one of the common electrode lines, and the common electrode lines are located adjacent to the display area. The junction of the pixel structure of the thin film transistor.
9、如权利要求 1-8中任一项所述的阵列基板, 其中所述薄膜晶体管像素 结构中的像素电极为条状电极, 所述公共电极为块状电极, 所述像素电极和 所述公共电极之间设置有钝化层。  The array substrate according to any one of claims 1 to 8, wherein the pixel electrode in the thin film transistor pixel structure is a strip electrode, the common electrode is a bulk electrode, the pixel electrode and the A passivation layer is disposed between the common electrodes.
10、 如权利要求 1-9中任一项所述的阵列基板, 其中所述公共电极为覆 盖整个所述阵列基板的块状电极。 The array substrate according to any one of claims 1 to 9, wherein the common electrode is a bulk electrode covering the entire array substrate.
11、如权利要求 1-10中任一项所述的阵列基板, 其中所述像素电极通过 通孔与所述薄膜晶体管的漏电极连接, 所述公共电极在所述通孔的周围形成 有直径大于所述通孔的隔离孔。 The array substrate according to any one of claims 1 to 10, wherein the pixel electrode is connected to a drain electrode of the thin film transistor through a through hole, and the common electrode has a diameter formed around the through hole. An isolation hole larger than the through hole.
12、如权利要求 1-11中任一项所述的阵列基板, 其中所述公共电极线与 所述栅线位于同一层, 且与所述栅线平行。  The array substrate according to any one of claims 1 to 11, wherein the common electrode line and the gate line are in the same layer and are parallel to the gate line.
13、如权利要求 1-12中任一项所述的阵列基板, 其中所述阵列基板是釆 用视网膜显示技术的阵列基板。  The array substrate according to any one of claims 1 to 12, wherein the array substrate is an array substrate using retinal display technology.
14、 一种阵列基板的制作方法, 包括以下步骤:  14. A method of fabricating an array substrate, comprising the steps of:
S1 : 在基板上形成栅线图形和薄膜晶体管的栅极图形的同时, 在所述基 板上形成至少一条公共电极线图形;  S1: forming at least one common electrode line pattern on the substrate while forming a gate line pattern and a gate pattern of the thin film transistor on the substrate;
S2: 在形成所述栅线图形、 所述栅极图形和所述公共电极线图形之后, 形成薄膜晶体管、 位于所述薄膜晶体管之上的公共电极图形、 像素电极图形 以及用于连接所述公共电极线图形和所述公共电极图形的第一过孔。  S2: after forming the gate line pattern, the gate pattern, and the common electrode line pattern, forming a thin film transistor, a common electrode pattern over the thin film transistor, a pixel electrode pattern, and a connection for the common An electrode line pattern and a first via of the common electrode pattern.
15、 如权利要求 14所述的制作方法, 其中所述步骤 S2包括: 在完成步骤 S1之后的所述基板上形成薄膜晶体管;  The manufacturing method of claim 14, wherein the step S2 comprises: forming a thin film transistor on the substrate after the step S1 is completed;
在形成所述薄膜晶体管之后的所述基板上形成阻挡层, 并在所述阻挡层 上对应所述公共电极线图形的区域和所述薄膜晶体管的漏电极与所述像素电 极的连接区域分别向下刻蚀形成所述第一过孔和用于连接漏电极与所述像素 电极的第二过孔;  Forming a barrier layer on the substrate after forming the thin film transistor, and respectively connecting a region corresponding to the common electrode line pattern on the barrier layer and a connection region of a drain electrode and the pixel electrode of the thin film transistor Forming the first via hole and the second via hole for connecting the drain electrode and the pixel electrode;
沉积第一导电薄膜并在所述第一导电薄膜上在所述第二过孔的周围通过 构图工艺形成隔离孔, 以形成公共电极图形;  Depositing a first conductive film and forming an isolation hole on the first conductive film around the second via hole by a patterning process to form a common electrode pattern;
在形成所述公共电极图形的基板上形成绝缘薄膜以形成钝化层, 并在所 述钝化层上对应于所述第二过孔的区域通过构图工艺形成穿过所述钝化层的 套孔, 所述套孔的直径小于所述隔离孔的直径, 所述套孔和所述第二过孔构 成连接所述像素电极与所述漏电极的通孔;  Forming an insulating film on the substrate on which the common electrode pattern is formed to form a passivation layer, and forming a pass through the passivation layer by a patterning process on a region of the passivation layer corresponding to the second via hole a hole having a diameter smaller than a diameter of the isolation hole, the sleeve hole and the second via forming a through hole connecting the pixel electrode and the drain electrode;
沉积第二导电薄膜并对所述第二导电薄膜进行构图工艺以形成条状像素 电极, 所述像素电极通过所述通孔连接到所述漏电极。  A second conductive film is deposited and the second conductive film is patterned to form a strip-shaped pixel electrode, and the pixel electrode is connected to the drain electrode through the via.
16、 如权利要求 14或 15所述的制作方法, 其中所述至少一条公共电极 线图形位于薄膜晶体管像素结构的显示区域, 或者位于两行相邻的薄膜晶体 管像素结构的交界处。 16. The fabrication method according to claim 14 or 15, wherein the at least one common electrode line pattern is located in a display area of the thin film transistor pixel structure or at a boundary of two adjacent thin film transistor pixel structures.
17、 如权利要求 14或 15所述的制作方法, 其中每行薄膜晶体管像素结 构都对应地设置有一条所述公共电极线图形。 The fabrication method according to claim 14 or 15, wherein each of the thin film transistor pixel structures is correspondingly provided with one of the common electrode line patterns.
18、 如权利要求 14或 15所述的制作方法, 其中所述步骤 S1中在形成 栅线图形和薄膜晶体管的栅极图形时, 使由所述栅线划分的多行薄膜晶体管 像素结构中相邻两行薄膜晶体管像素结构的栅极区域相邻排列, 所述栅极区 域相邻排列的两行薄膜晶体管像素结构中各自的显示区域分别与上下相邻行 中的薄膜晶体管像素结构的显示区域相邻排列。  The manufacturing method according to claim 14 or 15, wherein in the step S1, when the gate line pattern and the gate pattern of the thin film transistor are formed, the phase of the multi-line thin film transistor pixel structure divided by the gate line is made The gate regions of the adjacent two rows of thin film transistor pixel structures are adjacently arranged, and the display regions of the two rows of thin film transistor pixel structures adjacent to the gate region and the display regions of the thin film transistor pixel structures in the upper and lower adjacent rows respectively Arranged adjacently.
19、如权利要求 18中任一项所述的制作方法,其中在形成所述公共电极 线图形时, 所述显示区域相邻排列的两行薄膜晶体管像素结构仅形成一条所 述公共电极线, 并且所述公共电极线形成在所述显示区域相邻排列的两行薄 膜晶体管像素结构的交界处。  The manufacturing method according to any one of claims 18 to 28, wherein, when the common electrode line pattern is formed, two rows of thin film transistor pixel structures arranged adjacent to the display area form only one common electrode line. And the common electrode line is formed at a boundary of two rows of thin film transistor pixel structures arranged adjacent to the display region.
20、 一种显示装置, 包括如权利要求 1-13中任一项所述的阵列基板。  A display device comprising the array substrate according to any one of claims 1-13.
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