WO2013125412A1 - 超音波発生装置 - Google Patents
超音波発生装置 Download PDFInfo
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- WO2013125412A1 WO2013125412A1 PCT/JP2013/053407 JP2013053407W WO2013125412A1 WO 2013125412 A1 WO2013125412 A1 WO 2013125412A1 JP 2013053407 W JP2013053407 W JP 2013053407W WO 2013125412 A1 WO2013125412 A1 WO 2013125412A1
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- Prior art keywords
- ultrasonic
- ultrasonic wave
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- case material
- generating element
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- 239000000463 material Substances 0.000 claims abstract description 41
- 125000006850 spacer group Chemical group 0.000 claims description 18
- 230000005284 excitation Effects 0.000 description 16
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
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- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
- G10K9/125—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means with a plurality of active elements
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/18—Details, e.g. bulbs, pumps, pistons, switches or casings
- G10K9/22—Mountings; Casings
Definitions
- the present invention relates to an ultrasonic generator having an ultrasonic generating element using a piezoelectric vibrator. More specifically, the present invention relates to an ultrasonic generator in which an ultrasonic wave generating element is accommodated in a case, and an acoustic path from the ultrasonic wave generating element to a sound wave emitting hole provided in the case is configured.
- ultrasonic waves are emitted from an ultrasonic generator and applied to an object to be measured.
- the ultrasonic wave reflected from the object to be measured is detected by the ultrasonic microphone device. This is a method of calculating the distance to the object to be measured from the time required from release to detection.
- Patent Document 1 discloses an ultrasonic generator in which a piezoelectric vibrator is attached to a housing. Note that the device of Patent Document 1 is configured as an ultrasonic sensor device in which an ultrasonic generator and an ultrasonic microphone device are combined into one device.
- FIG. 9 shows an ultrasonic generator 500 disclosed in Patent Document 1.
- the ultrasonic generator 500 has a case 101.
- a first piezoelectric vibrator 102 and a second piezoelectric vibrator 103 that vibrates in the opposite phase to the first piezoelectric vibrator 102 are provided. Further, the space in the case 101 is filled with the flexible filler 105.
- the conventional ultrasonic generator 500 has a limit in increasing the output sound pressure.
- it is necessary to increase the polarization of the piezoelectric vibrator or increase the electric power supplied to the piezoelectric vibrator.
- the piezoelectric vibrator exceeds the destruction limit. Therefore, there is a limit to increasing the output sound pressure.
- An object of the present invention is to provide an ultrasonic generator capable of further increasing the output sound pressure.
- An ultrasonic generator includes a first case member, a second case member fixed to the first case member, and a storage space formed by the first and second case members. And an ultrasonic wave generating element housed in the container.
- the ultrasonic generator according to the present invention is provided on the first case material, and an ultrasonic generator is formed so as to form a space between the lower surface of the ultrasonic generator and the upper surface of the first case material.
- a first support member supporting the sound wave generating element is further provided.
- a sound wave emitting hole for emitting an ultrasonic wave is provided in one of the first case material and the second case material.
- the sound wave generated by the ultrasonic wave generating element reaches the sound wave emitting hole through the space between the lower surface of the ultrasonic wave generating element and the upper surface of the first case material.
- the first support member is provided so that the cross section of the acoustic path has a portion that is smaller than the other portions.
- the ultrasonic generator is disposed on a spacer formed with one of a recess and a through hole in the center, and on one main surface of the spacer, and It has a flat plate-like first piezoelectric vibrator and a flat plate-like second piezoelectric vibrator arranged on the other main surface of the spacer.
- the first piezoelectric vibrator and the second piezoelectric vibrator vibrate in opposite phases.
- the ultrasonic generator is provided between the ultrasonic generator and the second case material, and the upper surface of the ultrasonic generator and the lower surface of the second case material are provided.
- a second support member that supports the ultrasonic wave generating element so as to form a space therebetween.
- a second acoustic path that includes a space between the upper surface of the ultrasonic wave generating element and the lower surface of the second case member and extends from the sound pressure generation center point of the ultrasonic wave generating element to the sound wave emitting hole, the crossing of the acoustic path
- the second support member is provided so that the surface has a portion that is smaller than the other portions. In this case, the sound pressure can be effectively increased in both the first and second acoustic paths.
- a plurality of at least one of the first and second support members are provided. Adjacent support members constitute part of the first or second acoustic path. A portion where the cross section of the acoustic path is smaller than the other portions is formed between the adjacent support members.
- the sound pressure generation center point of the ultrasonic generation element is directed to the adjacent portion of the support members.
- the gap between adjacent support members becomes narrower.
- the opposing sides of adjacent support members extend in a direction that intersects obliquely with respect to an acoustic path passing between adjacent support members. Yes.
- the sides of one adjacent support member are arranged symmetrically with respect to the acoustic path between the adjacent support members with respect to the side of the other adjacent support member.
- the support member has a substantially triangular shape in a plan view, and opposing sides of adjacent support members are configured by one side of a substantially triangular shape. ing.
- the first includes a space between the lower surface of the ultrasonic generator and the upper surface of the first case material, and reaches the sound wave emission hole from the sound pressure generation center point of the ultrasonic generator.
- the first support member is provided so that the cross section of the acoustic path has a smaller cross section than the other parts, the output sound pressure can be effectively increased.
- FIG. 1A is an exploded perspective view of the ultrasonic generator according to the first embodiment of the present invention
- FIG. 1B shows a plurality of first support members on the first case material
- FIG. 1C is a schematic plan view for explaining a structure provided and a first acoustic path
- FIG. 1C schematically illustrates a portion where the cross section of the acoustic path in the first acoustic path becomes relatively small.
- FIG. FIG. 2 is a perspective view showing the appearance of the ultrasonic generator according to the first embodiment of the present invention.
- FIG. 3 is a front sectional view of the ultrasonic generator according to the first embodiment of the present invention.
- FIG. 4 is an exploded perspective view of an ultrasonic wave generating element used in the ultrasonic wave generating apparatus according to the first embodiment of the present invention.
- FIG. 5 is a diagram showing the relationship between the dimensions of the first support member and the output sound pressure characteristics in the ultrasonic generator according to the first embodiment of the present invention.
- FIG. 6 is a schematic plan view for explaining an ultrasonic generator according to a first modification of the first embodiment of the present invention.
- FIG. 7 is a schematic plan view for explaining an ultrasonic generator according to a second modification of the first embodiment of the present invention.
- FIG. 8 is a front cross-sectional view of an ultrasonic generator according to the second embodiment of the present invention.
- FIG. 9 is a front sectional view showing a conventional ultrasonic generator.
- FIG. 1A is an exploded perspective view of the ultrasonic generator 1 according to the first embodiment of the present invention
- FIG. 2 is a perspective view showing an appearance thereof
- FIG. 3 is a front sectional view thereof.
- the ultrasonic generator 1 has an ultrasonic generator 2 that generates ultrasonic waves and a case 3.
- the ultrasonic wave generating element 2 is accommodated in the case 3.
- Case 3 has a flat first case member 11 and a cap-like second case member 12. That is, the second case member 12 having an opening opened downward is fixed on the flat first case member 11. Thereby, the case 3 having a storage space is formed. The ultrasonic wave generating element 2 is stored in this storage space.
- the top plate portion of the second case member 12 is provided with a plurality of sound wave emission holes 12a to 12d.
- FIG. 4 is an exploded perspective view of the ultrasonic wave generating element 2.
- the ultrasonic wave generating element 2 has a spacer 15.
- the spacer 15 is made of an appropriate rigid material such as resin or ceramics.
- An opening 15 a that is a through hole is formed in the central region of the spacer 15.
- a concave portion may be formed on the front surface and the back surface in the central region of the spacer 15.
- a first bimorph piezoelectric vibrator 17 is disposed on the upper surface of the spacer 15 with an adhesive 16 interposed therebetween.
- the adhesive 16 has an opening 16a.
- the adhesive 16 is applied to the upper surface of the spacer 15 in a region excluding the opening 15 a of the spacer 15.
- a second bimorph type piezoelectric vibrator 19 is disposed on the lower surface of the spacer 15 via an adhesive 18.
- the adhesive 18 has an opening 18a.
- the adhesive 18 is applied to the lower surface of the spacer 15 in a region excluding the opening 15 a of the spacer 15. In FIG. 3, illustration of the adhesives 16 and 18 is omitted.
- the central region is a portion that vibrates due to the piezoelectric effect. Therefore, the opening 15a is formed in the central region of the spacer 15 so as not to prevent this vibration.
- the first bimorph piezoelectric vibrator 17 has a piezoelectric plate 17a made of a piezoelectric ceramic such as lead zirconate titanate (PZT).
- a first excitation electrode 17b is provided at the center of the upper surface of the piezoelectric plate 17a.
- the piezoelectric plate 17a has a plurality of piezoelectric layers.
- An internal excitation electrode 17c is provided so as to overlap with the first excitation electrode 17b via the piezoelectric layer.
- a second excitation electrode 17d is provided at the center of the lower surface of the piezoelectric plate 17a so as to overlap the internal excitation electrode 17c via the piezoelectric layer.
- the first excitation electrode 17b is connected to extraction electrodes 17b1 and 17b2 extending toward two adjacent corner portions.
- the piezoelectric layer between the first excitation electrode 17b and the internal excitation electrode 17c and the piezoelectric layer between the internal excitation electrode 17c and the second excitation electrode 17d are polarized in the same direction in the thickness direction.
- the first excitation electrode 17b and the second excitation electrode 17d are electrically connected to the first terminal electrode 21 shown in FIG.
- the terminal electrode 21 is provided on one end face of the ultrasonic wave generating element 2.
- a terminal electrode 22 is provided on the other end face of the ultrasonic wave generating element 2.
- the internal excitation electrode 17 c is electrically connected to the second terminal electrode 22. Accordingly, when an AC electric field is applied between the first and second terminal electrodes 21 and 22, the first bimorph piezoelectric vibrator 17 vibrates.
- the second bimorph type piezoelectric vibrator 19 is configured in the same manner as the first bimorph type piezoelectric vibrator 17. However, the second bimorph type piezoelectric vibrator 19 is configured to vibrate in the opposite phase with respect to the first bimorph type piezoelectric vibrator 17.
- the second bimorph piezoelectric vibrator 19 is also electrically connected to the first and second terminal electrodes 21 and 22. Accordingly, when an alternating electric field is applied between the first and second terminal electrodes 21 and 22, the second bimorph piezoelectric vibrator 19 vibrates.
- the ultrasonic wave generating element 2 operates as a buckling tuning fork vibrator and generates ultrasonic waves.
- the ultrasonic waves are from the lower surface of the ultrasonic wave generating element 2 to the space between the lower surface of the ultrasonic wave generating element 2 and the upper surface of the first case material 11, the side surface of the ultrasonic wave generating element 2 and the second case. Through the space between the side surfaces of the material 12, the sound wave emission holes 12a to 12d are reached.
- the ultrasonic waves reach the sound wave emission holes 12a to 12d from the upper surface of the ultrasonic wave generation element 2 through the space between the upper surface of the ultrasonic wave generation element 2 and the lower surface of the second case material 12. Thereby, ultrasonic waves are emitted from the sound wave emission holes 12a to 12d.
- the ultrasonic wave propagation path including the space between the lower surface of the ultrasonic wave generating element 2 and the upper surface of the first case material 11 is defined as a first acoustic path A.
- an ultrasonic wave propagation path including a space between the upper surface of the ultrasonic wave generating element 2 and the lower surface of the second case member 12 is defined as a second acoustic path B.
- the ultrasonic wave generated by the ultrasonic wave generating element 2 propagates through the first and second acoustic paths A and B indicated by broken lines in FIG. 3, and reaches the sound wave emission holes 12a to 12d. Then, ultrasonic waves are emitted from the sound wave emission holes 12a to 12d.
- the ultrasonic wave generating element 2 is fixed on the first case material 11 via a plurality of first support members 23.
- the first support member 23 supports the ultrasonic generator 2 so that a space is formed between the lower surface of the ultrasonic generator 2 and the upper surface of the first case member 11.
- the plurality of first support members 23 are made of an appropriate rigid material. Examples of such a rigid material include ceramics, metal, and resin.
- the plurality of first support members 23 are provided on the first case member 11, and the ultrasonic wave generating element 2 is joined to the plurality of first support members 23 with an adhesive (not shown). .
- route A mentioned above is formed with the thickness of the said 1st supporting member 23. As shown in FIG.
- FIG. 1B is a schematic plan view showing a structure in which a plurality of first support members 23 are provided on the first case material 11.
- FIG. 1C is a diagram schematically illustrating a portion where the cross section of the acoustic path in the first acoustic path A becomes relatively small. In FIG. 1, a broken line C indicates a portion where the second case member 12 is joined.
- the direction of the first acoustic path A is indicated by an arrow D. That is, the center on the lower surface side of the ultrasonic wave generation element 2 located on the first case material 11 is the ultrasonic wave generation center point P. From this ultrasonic generation center point P, the ultrasonic wave advances in the first acoustic path A as indicated by the arrow D.
- the first support member 23 has a right triangle shape in plan view.
- the distance between the adjacent first support members 23 and 23 becomes narrower from the ultrasonic generation center point P toward the portion where the first support members 23 and 23 are adjacent to each other. It has become.
- the hypotenuses of the right triangle shape of the adjacent first support members 23, 23 face each other via the first acoustic path A whose direction is indicated by the arrow D. Further, the hypotenuse is extended so as to approach the first acoustic path A side as the first acoustic path A moves away from the ultrasonic generation center point P. For this reason, the distance between the adjacent first support members 23 and 23 decreases from the ultrasonic generation center point P toward the front in the traveling direction of the first acoustic path A.
- the first acoustic path A spreads. That is, as shown in the schematic plan view of FIG. 1C, the first acoustic path A is provided with a portion X in which the cross section of the acoustic path is relatively smaller than the other portions. Thereby, the output sound pressure can be effectively increased.
- first support members 23 and 23 there are four portions where the first support members 23 and 23 are adjacent to each other. Therefore, the output sound pressure is increased in the four first acoustic paths A.
- the number of adjacent first support members 23, 23 is not particularly limited.
- FIG. 5 is a diagram showing the relationship between the dimensions of the first support member 23 and the output sound pressure characteristics in the ultrasonic generator 1 according to this embodiment.
- the dimension E in FIG. 1 (c) was 3.3 mm. That is, the distance between the outer ends of the adjacent first support members 23 and 23 is defined as a dimension E, and this dimension E is supported.
- the dimensions of two sides of the right triangle that are perpendicular to each other were changed to 0.5 mm, 1.0 mm, 1.2 mm, and 1.5 mm. Accordingly, the dimensions of the narrowest portion between the adjacent first support members 23 and 23 are 2.3 mm, 1.3 mm, 0.9 mm, and 0.3 mm, respectively.
- the solid line indicates the result when the dimension of two orthogonal right sides of the first support member 23 is 0.5 mm
- the broken line indicates the result when 1.0 mm
- the one-dot chain line indicates 1.
- the two-dot chain line shows the result in the case of 1.5 mm.
- the thickness of the first support member 23 was 0.10 mm.
- the output sound pressure increases as the size of the narrowest portion between the adjacent first support members 23, 23 decreases. Further, in FIG. 5, instead of the first support member 23, a comparison using a support member that does not have a portion in which the cross section of the acoustic path is relatively smaller than other portions in the first acoustic path.
- An example output sound pressure characteristic is indicated by a broken line F.
- the first support members 23 and 23 having a right triangle shape in plan view are opposed to each other, and the cross section of the acoustic path is It can be seen that the output sound pressure can be effectively increased because the portion X that is relatively smaller than the other portions is provided.
- FIG. 6 is a schematic plan view for explaining the ultrasonic generator according to the first modification of the first embodiment.
- FIG. 6 is a diagram schematically showing a portion where the cross section of the acoustic path in the first acoustic path A becomes relatively small, as in FIG.
- the first support member 23 has a substantially L shape in plan view. Also in this case, when going forward from the ultrasonic generation center point P in the traveling direction of the first acoustic path A, the interval between the adjacent first support members 23 is narrowed. Thereby, in the 1st acoustic path
- FIG. 7 is a schematic plan view for explaining an ultrasonic generator according to a second modification of the first embodiment.
- FIG. 7 is a diagram schematically showing a portion where the cross section of the acoustic path in the first acoustic path A becomes relatively small, as in FIG.
- both end portions of the oblique side of the first support member 23 having a right triangle shape in plan view in the first embodiment are cut off.
- the interval between the adjacent first support members 23 is narrowed.
- route A the part in which the cross section of an acoustic path becomes relatively smaller than another part is provided. Therefore, similarly to the first embodiment, the output sound pressure can be effectively increased.
- FIG. 8 is a front sectional view for explaining an ultrasonic generator 1A according to the second embodiment of the present invention.
- a plurality of first support members 23 are provided on the lower surface side of the ultrasonic wave generating element 2, thereby increasing the output sound pressure.
- a second support member 31 is provided on the upper surface of the ultrasonic wave generating element 2.
- the second support member 31 supports the ultrasonic wave generating element 2 so that a space is formed between the upper surface of the ultrasonic wave generating element 2 and the lower surface of the second case material 12.
- the second support member 31 is configured in the same manner as the first support member 23 when viewed in plan.
- the second acoustic path B is provided with a portion where the cross section of the acoustic path is relatively smaller than the other portions. Therefore, the output sound pressure can be effectively increased also in the second acoustic path B.
- a plurality of support members may be provided in both the first acoustic path A and the second acoustic path B to increase the output sound pressure.
- the ultrasonic wave generating element 2 composed of the buckled tuning fork type vibrator is used.
- the first case material 11 is provided on the first case material 11.
- the structure of the ultrasonic wave generation element supported by the plurality of first support members 23 is not limited to this. That is, as long as the ultrasonic generator has a structure that reaches the sound wave emission hole through the first acoustic path, an ultrasonic generator having another structure may be used. Even in that case, the output sound pressure can be effectively increased as in the above embodiment.
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Abstract
Description
2…超音波発生素子
3…ケース
11,12…第1,第2のケース材
12a~12d…音波放出孔
15…スペーサ
15a…開口
16…接着剤
16a…開口
17…第1のバイモルフ型圧電振動子
17a…圧電板
17b…第1の励振電極
17b1,17b2…引き出し電極
17c…内部励振電極
17d…第2の励振電極
18…接着剤
18a…開口
19…第2のバイモルフ型圧電振動子
21,22…第1,第2の端子電極
23,31…第1,第2の支持部材
Claims (7)
- 第1のケース材と、
前記第1のケース材に固定されている第2のケース材と、
前記第1及び第2のケース材で形成されている収納空間内に収納されている超音波発生素子と、
前記第1のケース材上に設けられており、前記超音波発生素子の下面と前記第1のケース材の上面との間に空間を形成するように、前記超音波発生素子を支持している第1の支持部材とを備え、
前記第1のケース材及び前記第2のケース材の一方に超音波を放出する音波放出孔が設けられており、前記超音波発生素子により発生した音波が前記超音波発生素子の下面と前記第1のケース材の上面との間の空間を経て前記音波放出孔に至る超音波発生装置であって、
前記超音波発生素子の下面と前記第1のケース材の上面との間の空間を含み、前記超音波発生素子の音圧発生中心点から前記音波放出孔に至る第1の音響経路において、該音響経路の横断面が他の部分よりも小さくなる部分を有するように前記第1の支持部材が設けられている、超音波発生装置。 - 前記超音波発生素子が、中央に凹部及び貫通孔のうち一方が形成されているスペーサと、前記スペーサの一方主面に配置されており、かつ平板状の第1の圧電振動子と、前記スペーサの他方主面に配置されており、かつ平板状の第2の圧電振動子とを有し、前記第1の圧電振動子と前記第2の圧電振動子とが互いに逆位相で振動する、請求項1に記載の超音波発生装置。
- 前記超音波発生素子と前記第2のケース材との間に設けられており、前記超音波発生素子の上面と前記第2のケース材の下面との間に空間を形成するように、前記超音波発生素子を支持している第2の支持部材をさらに備え、
前記超音波発生素子の上面と前記第2のケース材の下面との間の空間を含み、前記超音波発生素子の音圧発生中心点から前記音波放出孔に至る第2の音響経路において、該音響経路の横断面が他の部分よりも小さくなる部分を有するように前記第2の支持部材が設けられている、請求項1または2に記載の超音波発生装置。 - 前記第1及び第2の支持部材の少なくとも一方が複数設けられており、隣り合う支持部材間が第1又は第2の音響経路の一部を構成しており、該隣り合う支持部材間において音響経路の横断面が他の部分よりも小さくなる部分が構成されている、請求項3に記載の超音波発生装置。
- 前記隣り合う支持部材が、平面視した際に、前記超音波発生素子の音圧発生中心点から支持部材が隣り合っている部分に向かうにつれて、隣り合う支持部材間の間隔が狭くなる形状を有する、請求項4に記載の超音波発生装置。
- 前記隣り合う支持部材の対向し合っている辺が前記隣り合う支持部材間を通る音響経路に対して斜め方向に交差する方向に延びており、隣り合う一方の支持部材の前記辺が、隣り合う他方の支持部材の前記辺と前記隣り合う支持部材間の音響経路に対して線対称に配置されている、請求項5に記載の超音波発生装置。
- 前記支持部材が平面視で略三角形の形状を有し、隣り合う支持部材の対向し合っている辺が略三角形の一辺により構成されている、請求項6に記載の超音波発生装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020147023079A KR101597560B1 (ko) | 2012-02-23 | 2013-02-13 | 초음파 발생 장치 |
EP13751502.9A EP2819434B1 (en) | 2012-02-23 | 2013-02-13 | Ultrasonic wave-generating device |
CN201380010706.XA CN104137569B (zh) | 2012-02-23 | 2013-02-13 | 超声波产生装置 |
JP2014500672A JP5790864B2 (ja) | 2012-02-23 | 2013-02-13 | 超音波発生装置 |
US14/445,593 US9853578B2 (en) | 2012-02-23 | 2014-07-29 | Ultrasonic generator |
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EP (1) | EP2819434B1 (ja) |
JP (1) | JP5790864B2 (ja) |
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WO2013051400A1 (ja) * | 2011-10-03 | 2013-04-11 | 株式会社村田製作所 | 超音波発生装置 |
CN108075033A (zh) * | 2017-12-26 | 2018-05-25 | 广东奥迪威传感科技股份有限公司 | 压电振子及其制备方法 |
CN108206236A (zh) * | 2017-12-26 | 2018-06-26 | 广东奥迪威传感科技股份有限公司 | 压电振子及其制备方法 |
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- 2013-02-13 KR KR1020147023079A patent/KR101597560B1/ko active IP Right Grant
- 2013-02-13 EP EP13751502.9A patent/EP2819434B1/en active Active
- 2013-02-13 WO PCT/JP2013/053407 patent/WO2013125412A1/ja active Application Filing
- 2013-02-13 CN CN201380010706.XA patent/CN104137569B/zh active Active
- 2013-02-13 JP JP2014500672A patent/JP5790864B2/ja active Active
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JPH05344582A (ja) * | 1992-06-08 | 1993-12-24 | Nec Corp | 低周波水中送波器 |
JP2004297219A (ja) | 2003-03-25 | 2004-10-21 | Nippon Soken Inc | 超音波センサ及びその被取付部品 |
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See also references of EP2819434A4 |
Also Published As
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EP2819434B1 (en) | 2021-01-20 |
EP2819434A4 (en) | 2015-12-02 |
KR101597560B1 (ko) | 2016-02-25 |
US9853578B2 (en) | 2017-12-26 |
JP5790864B2 (ja) | 2015-10-07 |
CN104137569B (zh) | 2017-05-24 |
US20140333182A1 (en) | 2014-11-13 |
CN104137569A (zh) | 2014-11-05 |
JPWO2013125412A1 (ja) | 2015-07-30 |
KR20140114441A (ko) | 2014-09-26 |
EP2819434A1 (en) | 2014-12-31 |
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