WO2013121759A1 - 圧電共振子 - Google Patents
圧電共振子 Download PDFInfo
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- WO2013121759A1 WO2013121759A1 PCT/JP2013/000697 JP2013000697W WO2013121759A1 WO 2013121759 A1 WO2013121759 A1 WO 2013121759A1 JP 2013000697 W JP2013000697 W JP 2013000697W WO 2013121759 A1 WO2013121759 A1 WO 2013121759A1
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- magnet
- piezoelectric resonator
- resonance frequency
- adjustment
- piezoelectric
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
- H02N2/188—Vibration harvesters adapted for resonant operation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
- H10N30/306—Cantilevers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H2009/02165—Tuning
Definitions
- the present invention relates to a piezoelectric resonator, and more particularly to a configuration capable of adjusting a resonance frequency.
- a resonator having a piezoelectric body can be reduced in size by using a semiconductor process or the like, its application range such as a power generation element and various actuators has recently been expanded.
- FIG. 24 shows a sensor module installed in the power supply line 110, and shows an example in which the power generating element 101 is used as a driving power source.
- the power generating element 101 includes a beam portion 102 and a piezoelectric body 104 provided on the main surface of the beam portion 102 and sandwiched between an upper electrode 105 and a lower electrode 103.
- a weight portion 106 made of a permanent magnet is attached to one end of the beam portion 102, and the beam portion 102 vibrates due to interaction with a magnetic field change around the power supply line 110 caused by an alternating current flowing through the power supply line 110.
- the beam portion 102, the upper electrode 105, the lower electrode 103, and the piezoelectric body 104 will be defined and described as a beam. Actually, not only the beam portion 102 but also the entire beam including the upper electrode 105, the lower electrode 103, and the piezoelectric body 104 vibrates.
- Patent Document 1 As prior art document information relating to the invention of this application, for example, Patent Document 1 and Non-Patent Document 1 are known.
- the resonance frequency depends on the length and thickness of the beam portion 102, the weight of the weight portion 106 attached to the tip, and the like, there is a problem that the resonance frequency is likely to fluctuate due to variations in the manufacturing process.
- the present invention is provided on a base, a first support fixed to the base, a beam fixed to the first support, a weight fixed to the beam, and the beam A drive unit and an adjustment magnet movable on the main surface of the base are provided.
- the weight portion is formed of a magnet or a magnetic body, and the beam portion extends in a direction along the main surface of the base portion.
- FIG. 1 is a diagram illustrating a configuration of a beam of a piezoelectric resonator according to a first embodiment of the present invention.
- FIG. 2 is a diagram showing a configuration of the piezoelectric resonator according to the first embodiment of the present invention.
- FIG. 3 is a diagram showing measurement results of the vibration frequency applied to the piezoelectric resonator according to the first embodiment of the present invention and the voltage generated in the piezoelectric body.
- FIG. 4 is a diagram showing a configuration of the piezoelectric resonator according to the first embodiment of the present invention.
- FIG. 5 is a diagram showing measurement results of changes in the vibration characteristics of the beam with respect to the arrangement of the adjustment magnets according to the first embodiment of the present invention.
- FIG. 1 is a diagram illustrating a configuration of a beam of a piezoelectric resonator according to a first embodiment of the present invention.
- FIG. 2 is a diagram showing a configuration of the piezoelectric re
- FIG. 6 is a diagram showing the configuration of the piezoelectric resonator according to the second embodiment of the present invention.
- FIG. 7 is a diagram showing measurement results of the vibration frequency applied to the piezoelectric resonator and the voltage generated in the piezoelectric body according to the second embodiment of the present invention.
- FIG. 8 is a diagram showing the configuration of the piezoelectric resonator according to the third embodiment of the present invention.
- FIG. 9 is a diagram showing a measurement result of a change in the resonance frequency of the beam with respect to the arrangement of the adjusting magnet according to the third embodiment of the present invention.
- FIG. 10 is a diagram illustrating a configuration of a piezoelectric resonator according to a first modification of the present embodiment.
- FIG. 10 is a diagram illustrating a configuration of a piezoelectric resonator according to a first modification of the present embodiment.
- FIG. 11 is a diagram illustrating a configuration of a piezoelectric resonator according to a second modification of the present embodiment.
- FIG. 12A is a side view showing the configuration of the beam of the piezoelectric resonator according to the fourth embodiment of the present invention.
- FIG. 12B is a top view showing the configuration of the beam of the piezoelectric resonator according to the fourth embodiment of the present invention.
- FIG. 13 is a diagram showing the configuration of the piezoelectric resonator according to the fourth embodiment of the present invention.
- FIG. 14 is a diagram illustrating measurement results of the vibration frequency applied to the piezoelectric resonator and the voltage generated in the piezoelectric body according to the fourth embodiment of the present invention.
- FIG. 12A is a side view showing the configuration of the beam of the piezoelectric resonator according to the fourth embodiment of the present invention.
- FIG. 12B is a top view showing the configuration of the beam of the piezoelectric resonator according
- FIG. 15 is a diagram showing a configuration of a piezoelectric resonator according to the fourth embodiment of the present invention.
- FIG. 16 is a top view showing the configuration of the piezoelectric resonator according to the fifth embodiment of the present invention.
- FIG. 17 is a diagram illustrating a measurement result of a change in the resonance frequency of the beam with respect to the arrangement of the adjusting magnet according to the fifth embodiment of the present invention.
- FIG. 18 is a top view showing the configuration of the piezoelectric resonator according to the fifth embodiment of the present invention.
- FIG. 19 is a diagram showing a measurement result of a change in the resonance frequency of the beam with respect to the arrangement of the adjusting magnet according to the fifth embodiment of the present invention.
- FIG. 19 is a diagram showing a measurement result of a change in the resonance frequency of the beam with respect to the arrangement of the adjusting magnet according to the fifth embodiment of the present invention.
- FIG. 20 is a diagram showing the configuration of the piezoelectric resonator according to the sixth embodiment of the present invention.
- FIG. 21 is a diagram showing a measurement result of a change in the resonance frequency of the beam with respect to the arrangement of the adjusting magnet according to the sixth embodiment of the present invention.
- FIG. 22 is a diagram illustrating a configuration of a piezoelectric resonator according to a third modification of the present embodiment.
- FIG. 23 is a diagram illustrating a configuration of a piezoelectric resonator according to a fourth modification of the present embodiment.
- FIG. 24 is a diagram illustrating the structure of a conventional power generation element.
- FIG. 1 is a schematic configuration diagram of a beam (vibrating portion) of a piezoelectric resonator according to the first embodiment.
- a lower electrode 3, a piezoelectric body 4, and an upper electrode 5 are laminated in order on the main surface of the beam portion 2 made of a metal substrate.
- a weight portion 6 is fixed to at least one end of the beam portion 2.
- the weight part 6 is comprised with the permanent magnet or the magnetic body.
- the lower electrode 3, the piezoelectric body 4, and the upper electrode 5 form a drive unit. Also in other embodiments, the drive unit is formed by the lower electrode 3, the piezoelectric body 4, and the upper electrode 5.
- the beam part 2 the upper electrode 5, the lower electrode 3, and the piezoelectric body 4 will be defined and explained as in the background art.
- the beam part 2 is a stainless steel plate (SUS430) having a thickness of 0.15 mm.
- the dimension of the stainless steel plate is 3 ⁇ 20 mm.
- the lower electrode 3 is formed by screen-printing an Ag—Pd alloy paste on the stainless steel plate.
- the piezoelectric body 4 is formed by printing the piezoelectric body paste on the lower electrode 3 with a metal mask.
- the upper electrode 5 is formed by screen-printing an Ag—Pd alloy paste on the piezoelectric body 4. These are baked by holding at 875 ° C. for 2 hours in the air.
- the thickness of the piezoelectric body 4 after firing was 20 ⁇ m, and the thicknesses of the lower electrode 3 and the upper electrode 5 were all 3 ⁇ m.
- a neodymium permanent magnet (weight portion 6) having a weight of 0.38 g and a size of 5 ⁇ 5 ⁇ 2 mm is fixed to the distal end portion of the beam portion 2 with an adhesive.
- the piezoelectric material used for the piezoelectric body 4 has a composition that is densely sintered at a low temperature and has excellent piezoelectric characteristics.
- the material composition is represented by (Formula 1).
- the piezoelectric material composition powder having the molar ratio shown in (Formula 1) was synthesized by the method. Incidentally order to densely sintered at a temperature below 900 ° C., an average particle diameter (D 50) was crushed to less than 0.5 [mu] m.
- the piezoelectric properties of the obtained piezoelectric material were measured.
- the mechanical coupling coefficient k p was 0.60 and the piezoelectric constant d 31 was -125 pm / V. The characteristics are shown.
- An organic vehicle is prepared by adjusting the blending ratio of the organic binder and the solvent to, for example, 2: 8.
- ethyl cellulose resin, acrylic resin, butyral resin or the like can be used as the organic binder, and ⁇ -terpineol, butyl carbitol, or the like can be used as the solvent.
- This organic vehicle and the piezoelectric material pulverized powder were weighed at a weight ratio of, for example, 20:80, mixed with an appropriate amount of a dispersant, and then kneaded with a three-ball mill to prepare a piezoelectric printing paste.
- one end of the beam portion 2 is fixed by the support portion 8, and the support portion 8 is fixed to the base portion 7.
- the beam portion 2 is fixed by a support portion 8 so that at least one main surface of the beam portion 2 is substantially parallel to the main surface of the base portion 7.
- the beam portion 2, the support portion 8, and the base portion 7 are separated from each other, but the same effect can be obtained even if the beam portion 2, the support portion 8, and the base portion 7 are integrally formed.
- the support portion 8 is fixed to the base portion 7 with a bolt or the like. Then, the end of the beam portion 2 on the side where the weight portion 6 is not fixed and the support portion 8 are fixed.
- FIG. 3 shows the results of measuring the relationship between the vibration frequency applied to the piezoelectric resonator 1 by the above method and the voltage generated in the piezoelectric body 4.
- the vibration acceleration is controlled by a vibration generator so as to be constant at 0.1 G.
- the generated voltage was maximum at the vibration frequency of 64.5 Hz, and the voltage (effective value) at that time was about 8V.
- M is the weight of the beam
- L is the length
- E is the Young's modulus
- I is the moment of inertia of the cross section.
- the thickness of the beam portion 2 is set to 0.17 mm, which is obtained by adding the thickness of the metal substrate 0.15 mm and the thickness of the piezoelectric body 4 to 0.02 mm.
- the resonance frequency fr when W was 0.38 g was calculated from (Equation 2), it was 65.0 Hz, and it was confirmed that it coincided with the measurement result shown in FIG.
- the thicknesses of the lower electrode 3 and the upper electrode 5 are very thin with respect to the piezoelectric body 4. 3.
- the thickness of the upper electrode 5 is not taken into consideration.
- the adjusting magnet 10 is a neodymium permanent magnet having dimensions of 3 ⁇ 3 ⁇ 3 mm and is 15 mm away from the weight portion 6.
- the arrangement of the adjusting magnet 10 at this time is, for example, arranged so that each magnetic pole of the adjusting magnet 10 is perpendicular to the main surface of the base portion 7, and the magnetic pole on the upper surface side of the adjusting magnet 10 and the weight portion 6. Are arranged so that the magnetic poles on the lower surface side are different from each other.
- the arrangement of the adjusting magnet 10 at this time is, for example, arranged so that each magnetic pole of the adjusting magnet 10 is perpendicular to the main surface of the base portion 7, and the magnetic pole on the upper surface side of the adjusting magnet 10 and the weight portion 6. Are arranged so that the magnetic poles on the lower surface side thereof are of the same polarity.
- the resonance frequency (graph (a)) when the adjustment magnet 10 is arranged in the direction in which the repulsive force is generated between the weight 6 and the weight portion 6 is 65.4 Hz, and the resonance frequency when the adjustment magnet 10 is not arranged. It is 0.9 Hz higher than 64.4 Hz in (graph (c)).
- the resonance frequency (graph (b)) when the adjusting magnet 10 is arranged in the direction in which the attractive force is generated between the weight 6 and the weight portion 6 is 63.7 Hz, and when the adjusting magnet 10 is not arranged.
- the resonance frequency (graph (c)) is 0.8 Hz lower than 64.4 Hz.
- the generated voltage was about 8V and hardly changed.
- the resonance frequency when a tensile stress is applied to the beam portion 2, the resonance frequency is increased, and when a compressive stress is applied, the resonance frequency is decreased.
- the configuration of the piezoelectric resonator of the second embodiment is substantially the same as that of the first embodiment described with reference to FIG. The only difference is that the position of the adjusting magnet 10 is changed.
- the position immediately below the weight portion 6 made of a permanent magnet is defined as position 0.
- the direction toward the support portion 8 along the central axis of the beam portion 2 is minus, and the opposite direction is plus, and the adjusting magnet 10 is positioned at +2, +4, +6 mm, and at ⁇ 2, ⁇ 4, ⁇ 6 mm.
- the resonance frequency of each of the piezoelectric resonators 1 was measured.
- the adjustment magnet 10 is moved, the adjustment magnet is arranged so that the center axis of the beam portion 2 in the width direction and the center of the adjustment magnet 10 overlap.
- the adjusting magnet 10 is a neodymium magnet having a size of 3 ⁇ 3 ⁇ 3 mm, and is separated from the weight portion 6 at an interval of 15 mm when arranged at position 0.
- the line graph shown in FIG. 7 (a) shows the change in the resonance frequency when the adjusting magnet 10 is arranged at a position of ⁇ 6 to +6 mm so that the surface repelling the weight portion 6 made of a permanent magnet is upward. It is the result of having measured.
- the arrangement of the adjustment magnet 1 at this time is such that, for example, when the lower surface side of the weight portion 6 is an N pole, the S pole and the N pole of the adjustment magnet 10 are perpendicular to the main surface of the base portion 7. While being arranged, the upper surface side of the adjusting magnet 10 is an N pole. That is, the adjustment magnet 1 and the weight 6 are arranged so that the same poles face each other.
- the line graph shown in FIG. 7 (b) shows the resonance frequency when the adjusting magnet 10 is placed at a position of ⁇ 6 to +6 mm so that the weight portion 6 made of a permanent magnet and the surface to be attracted are upward. It is the result of measuring the change.
- the arrangement of the adjustment magnet 1 at this time is such that, for example, when the lower surface side of the weight portion 6 is an N pole, the S pole and the N pole of the adjustment magnet 10 are perpendicular to the main surface of the base portion 7.
- the upper surface side of the adjusting magnet 10 is an S pole. That is, the adjusting magnet 1 and the weight 6 are arranged so that the different poles face each other.
- the adjusting magnet 10 is arranged so that the surface that adsorbs the weight portion 6 made of a permanent magnet is on the support portion 8 side, and the repelling surface is on the opposite side to the support portion 8. This is a result of measuring a change in resonance frequency when it is arranged at a position of 6 to +6 mm.
- the adjustment magnet 1 is arranged so that the south pole and the north pole of the adjustment magnet 10 are parallel to the main surface of the base portion 7, and the position immediately below the weight portion 6 is set to 0.
- the weight part 6 and the opposite pole are arranged on the 8 side, and the weight part 6 and the same pole are arranged on the opposite side.
- the resonance frequency of the piezoelectric resonator 1 can be made higher or lower than when the adjusting magnet 10 is not arranged. It was found that it can be adjusted.
- the resonance frequency changes almost linearly.
- the resonance frequency when arranged at a position of ⁇ 4 mm is substantially equal to the resonance frequency when the adjusting magnet 10 is not arranged, and when arranged on the support unit 8 side, the resonance frequency is reduced to the low frequency side.
- the resonance frequency changes to the high frequency side.
- the adjusting magnet 10 is disposed at an arbitrary position on the main surface of the base portion 7 with respect to the weight portion 6 made of a permanent magnet, whereby the piezoelectric resonator 1 It can be used as a fine adjustment mechanism of resonance frequency.
- the adjustment magnet 10 is moved along the direction in which the beam portion 2 extends.
- the beam portion 2 is not twisted when the resonance frequency is adjusted, and the reliability of the piezoelectric resonator 1 can be improved.
- a magnet fixing member 11 having a height of 2 mm and 4 mm is fixed on the main surface of the base portion 7 immediately below the weight portion 6 made of a permanent magnet, and further the adjusting magnet 10 is fixed on the base portion 7. I let you. In this state, the resonance frequency of the piezoelectric resonator 1 was measured.
- the adjusting magnet 10 is even formed of a neodymium magnet having dimensions of 3 ⁇ 3 ⁇ 3 mm.
- the distance between the adjusting magnet 10 and the weight portion 6 is 15 mm when the magnet fixing member 11 is not provided, 13 mm when the magnet fixing member 11 is 2 mm high, and 11 mm when the magnet fixing member 11 is 4 mm high. .
- the line graph shown by (a) in FIG. 9 shows the resonance frequency when the adjusting magnet 10 is arranged on the magnet fixing member 11 in the direction in which the repulsive force is generated between the weight portion 6 made of a permanent magnet. It is the result of measuring the change.
- the magnetic pole of the adjustment magnet 10 is perpendicular to the main surface of the base portion 7 and is arranged so that the magnetic pole on the upper surface side of the adjustment magnet 10 and the magnetic pole on the lower surface side of the weight portion 6 have the same polarity. Has been.
- the line graph shown by (b) in FIG. 9 shows the resonance frequency when the adjusting magnet 10 is arranged on the magnet fixing member 11 in the direction in which the attractive force is generated between the weight portion 6 made of a permanent magnet. It is the result of measuring the change. At this time, the magnetic pole of the adjusting magnet 10 is perpendicular to the main surface of the base portion 7, and the magnetic pole on the upper surface side of the adjusting magnet 10 and the magnetic pole on the lower surface side of the weight portion 6 are arranged differently. Has been.
- the x mark shown in FIG. 9 is the resonance frequency when the adjusting magnet 10 is not arranged.
- FIG. 9 shows that the change in the resonance frequency of the present embodiment shown in FIG. 9 is very large as compared with the result shown in the second embodiment shown in FIG. 7 and is greatly influenced by the adjusting magnet 10.
- the configuration in which the adjusting magnet 10 can be disposed at an arbitrary position in the direction perpendicular to the main surface of the base 7 with respect to the weight portion 6 made of a permanent magnet is an adjustment mechanism for the resonance frequency of the piezoelectric resonator 1. Useful.
- the adjustment magnet 10 is arranged at an arbitrary position in the vertical direction and the horizontal direction with respect to the main surface of the base portion 7 with respect to the weight portion 6 made of a permanent magnet, whereby the resonance of the piezoelectric resonator 1 is achieved.
- the frequency can be accurately adjusted in a larger frequency range.
- FIG. 12 is a schematic configuration diagram of a beam (vibrating portion) of a piezoelectric resonator according to the fourth embodiment.
- Lower electrodes 3a and 3b, piezoelectric layers 4a and 4b, and upper electrodes 5a and 5b are stacked in this order on the main surface of the beam portion 2 made of a metal substrate.
- a weight portion 6 is fixed near the center (center portion) of the beam portion 2.
- the weight part 6 is comprised with the permanent magnet or the magnetic body.
- the beam portion 2 the upper electrodes 5a and 5b, the lower electrodes 3a and 3b, and the piezoelectric bodies 4a and 4b are defined and described as a beam.
- the manufacturing method of the vibration part (beam) of the piezoelectric resonator of the present invention is the same as that of the first embodiment, and thus the description thereof is omitted.
- the method for producing the piezoelectric layer printing paste is also the same as that in the first embodiment, and thus the description thereof is omitted.
- both ends of the beam portion 2 are fixed by the support portions 8 a and 8 b, respectively, and the support portions 8 a and 8 b are fixed to the base portion 7. .
- Both end portions of the beam portion 2 are fixed to the support portions 8 a and 8 b so that at least one main surface of the beam portion 2 is substantially parallel to the main surface of the base portion 7. In other words, the beam portion 2 extends in a direction along the main surface of the base portion 7.
- the beam portion 2, the support portions 8a and 8b, and the base portion 7 are separated from each other.
- the beam portion 2, the support portions 8a and 8b, and the base portion 7 are integrally formed, they are equivalent. Get the effect.
- FIG. 14 shows the result of measuring the relationship between the vibration frequency applied to the piezoelectric resonator 1 and the voltage generated in the piezoelectric layers 4a and 4b. As shown in FIG. 14, the generated voltage was maximum at the vibration frequency of 321.8 Hz, and the voltage (effective value) at that time was about 1.4V.
- the adjusting magnet 10 is a neodymium permanent magnet having a size of 5 ⁇ 5 ⁇ 1 mm, and is 5 mm away from the lower surface of the weight portion 6.
- the vibration frequency is 320.6 Hz, which is 1.2 Hz lower than when the adjusting magnet 10 is not disposed.
- the resonance frequency was 322.9 Hz, which was found to be 1.1 Hz higher than when the adjustment magnet 10 was not arranged. At this time, the generated voltage was about 1.4V and hardly changed.
- the resonance frequency changes when stress is applied to the beam portion 2, in the configuration of the present embodiment, a permanent magnet fixed as the weight portion 6 to the tip end portion of the beam portion 2 and an adjustment magnet disposed immediately below the permanent magnet.
- the adjustment magnet 10 is arranged in a plane direction with respect to the main surface of the base portion 7 and in a direction orthogonal to the longitudinal direction of the beam portion 2. The results of examining the change in the resonance frequency of the piezoelectric resonator 1 at this time will be described.
- the resonance frequency of the piezoelectric resonator 1 was measured when the adjusting magnet 10 was placed at a position of ⁇ 5 mm.
- the adjusting magnet 10 is a neodymium magnet having a size of 5 ⁇ 5 ⁇ 1 mm, and when arranged at the position 0, it is separated from the weight portion 6 at an interval of 5 mm, and is used for adjustment so that the surface repelling the weight portion 6 faces upward. Magnet 10 was arranged.
- FIG. 17 shows the result of measuring the change in resonance frequency when the adjusting magnet 10 is arranged at a position of ⁇ 5 to +5 mm.
- the x mark in a figure is a resonance frequency when the magnet 10 for adjustment is not arrange
- the resonance frequency changes within a range of 315 to 330 Hz. Since the resonance frequency when the adjustment magnet 10 is not arranged is 321.8 Hz, this result indicates that the resonance frequency of the piezoelectric resonator 1 is changed to either the high frequency side or the low frequency side depending on the arrangement position of the adjustment magnet 10. Also means that it can be adjusted.
- the position immediately below the weight part 6 made of a permanent magnet is defined as a reference position 0.
- the adjusting magnet 10 was arranged at the positions of ⁇ 2.5 and ⁇ 5 mm, and the resonance frequency of the piezoelectric resonator 1 was measured at each position.
- the adjusting magnet 10 is a neodymium magnet having a size of 5 ⁇ 5 ⁇ 1 mm, and when arranged at the position 0, it is separated from the weight portion 6 at an interval of 5 mm, and is used for adjustment so that the surface repelling the weight portion 6 faces upward. A magnet was placed.
- FIG. 19 shows the result of measuring the change in resonance frequency when the adjusting magnet 10 is arranged at a position of ⁇ 5 to +5 mm.
- the x mark in a figure is a resonance frequency when the magnet 10 for adjustment is not arrange
- the resonance frequency changes linearly in the range of 319 to 322.5 Hz by arranging the adjusting magnet 10 at a position of ⁇ 5 to +5 mm.
- the structure in which the adjusting magnet 10 is arranged at an arbitrary position in the plane direction with respect to the main surface of the base portion 7 with respect to the weight portion 6 made of a permanent magnet is the structure of the piezoelectric resonator 1. This is useful as a resonance frequency adjustment mechanism.
- a magnet fixing member 11 having a height of 1 mm and 2 mm is fixed to the main surface of the base portion 7 immediately below the weight portion 6 made of a permanent magnet.
- the resonance frequency of the beam portion 2 when the adjustment magnet 10 was fixed on the magnet fixing member 11 was measured.
- the adjusting magnet 10 is a neodymium magnet having a size of 5 ⁇ 5 ⁇ 1 mm, and the distance to the weight portion 6 (the distance between the top surface of the adjusting magnet 10 and the lower surface of the weight portion 6) is 5 mm when the magnet fixing member 11 is not provided.
- the magnet fixing member 11 having a height of 1 mm it is 4 mm
- in the case of the magnet fixing member 11 having a height of 2 mm it is 3 mm.
- FIG. 21 shows a result of measuring a change in resonance frequency when the adjusting magnet 10 is arranged on the magnet fixing member 11 in a direction in which a repulsive force is generated between the weight portion 6 made of a permanent magnet.
- the adjusting magnet 10 when the adjusting magnet 10 is arranged on the magnet fixing member 11 in a direction in which a repulsive force is generated between the weight portion 6 made of a permanent magnet, the height of the magnet fixing member 11 is increased.
- the resonance frequency changes to the lower frequency side as the distance between the weight 6 and the adjustment magnet 10 becomes smaller.
- the structure in which the adjusting magnet 10 can be arranged at an arbitrary position in the direction perpendicular to the main surface of the base 7 with respect to the weight portion 6 made of a permanent magnet is a fine adjustment mechanism for the resonance frequency of the piezoelectric resonator 1. Useful as.
- the adjustment magnet 10 is arranged at an arbitrary position in the vertical direction and in the horizontal direction with respect to the main surface of the base portion 7, so that the resonance of the piezoelectric resonator 1 is achieved.
- the frequency can be accurately adjusted in a larger frequency range.
- the base 7 and the adjusting magnet 10 are provided only on one side with respect to the beam 2, but on both sides with the beam 2 sandwiched as shown in FIGS. 10 and 22.
- Bases 7a and 7b and adjusting magnets 10a and 10b may be provided.
- 10 or 22 makes it possible to install a power supply line between the main surface of the base portion 7b and the beam portion 2, and the adjustment magnet 10 interferes with the power supply line. And the piezoelectric resonator 1 can be easily installed.
- an adjustment magnet 10b similar to the adjustment magnet 10a provided on the main surface of the base portion 7a is provided on the main surface of the base portion 7b, whereby the resonance frequency is set. It becomes possible to increase the adjustment range with higher accuracy.
- the weight portion 6 is formed of a permanent magnet.
- a part or all of the weight portion 6 is formed of a permanent magnet, or a part or all of the weight portion 6 is made of a magnetic material (preferably iron. , Cobalt, nickel, or a ferromagnetic material thereof.
- either the weight 6 or the adjustment magnet 10 may be formed of a magnetic material.
- the adjustment magnet 10 is formed of a permanent magnet, but may be formed of an electromagnet or the like. Although electric power is consumed by using the electromagnet, the resonance frequency of the piezoelectric resonator 1 can be easily and precisely adjusted by freely changing the magnetic field direction and strength of the adjusting magnet 10.
- the adjusting magnet 10 is arranged at a position where the torsional stress is generated in the beam part 2, the beam part 2 easily breaks due to fatigue when vibrated for a long time. It is preferable to arrange the magnet 10. That is, it is desirable to adjust the resonance frequency by arranging and moving the adjusting magnet 10 along the central axis of the beam portion 2.
- the resonance frequency can be adjusted by utilizing the twist of the beam part 2.
- the beam portion 2 can be twisted.
- the weight portion 6 and the beam portion 2 are separated, but the same effect can be obtained even when they are formed integrally.
- This also applies to the beam portion 2, the support portion 8 (8a, 8b), and the base portion 7 (7a, 7b), and these may be integrally formed.
- the adjusting magnet 10 is arranged in the plane direction or the vertical direction with respect to the main surface of the beam portion 2 with the main surface of the base portion 7 as a reference.
- the adjusting magnet 10 is disposed on the main surface of the base portion 7, it may be provided at a position where a repulsive force or an attracting force is generated with respect to the weight portion 6, and the position is limited only to the main surface of the base portion 7. Is not to be done.
- a frame or the like may be inserted between the base portion 7 and the beam portion 2 and a magnet or the like may be provided on the frame.
- stoppers 12, 12a for limiting the vibration amount of the beam part 2 as shown in FIGS. 12b may be provided.
- the stoppers 12, 12 a, and 12 b are desirably elastic bodies so that they are not destroyed even when the beam portion 2 collides, and the top surfaces thereof are arranged to be at least higher than the top surface of the adjusting magnet 10.
- the present invention is useful to use the present invention as a piezoelectric device using the resonance characteristics of a cantilever such as a vibration power generation element or an oscillator.
Abstract
Description
実施の形態1の圧電共振子の梁(振動部)の構成について、図1を参照しながら説明する。
図1は実施の形態1による圧電共振子の梁(振動部)の構成概略図である。金属基板からなる梁部2の主面上に順に、下部電極3、圧電体4、上部電極5が積層されている。梁部2の少なくとも一方の端部には、錘部6が固定されている。錘部6は永久磁石または磁性体で構成されている。なお、下部電極3、圧電体4、上部電極5で駆動部が形成れている。他の実施の形態についても、駆動部は下部電極3、圧電体4、上部電極5で形成されている。
この組成は、本出願人が提案した特許第4403967号公報に開示されている組成範囲で、優れた圧電特性を示すことで知られており、PZTのBサイトをPb(Zn1/3Nb2/3)O3で10モル%置換し、またPbサイト比を1.015とストイキオメトリーよりも過剰にしていることを特徴としている。
次に実施の形態1の圧電共振子の構成について図2を参照しながら説明する。
次に本発明の実施の形態1の圧電共振子1の振動特性の評価方法について図2及び図3を参照しながら説明する。
実施の形態2では、調整用磁石10を基部7の主面上で配置位置を変えたときの、圧電共振子1の共振周波数の変化を調べた結果について説明する。
実施の形態3では、調整用磁石10を基部7の主面に対して垂直方向に配置位置を変えたときの、圧電共振子1の共振周波数の変化を調べた結果について説明する。
実施の形態4の圧電共振子の梁(振動部)の構成について、図12A、図12Bを参照しながら説明する。
図12は実施の形態4による圧電共振子の梁(振動部)の構成概略図である。金属基板からなる梁部2の主面上に順に、下部電極3a,3b、圧電体層4a,4b、上部電極5a,5bが積層されている。梁部2の中央付近(中央部)に、錘部6が固定されている。錘部6は永久磁石または磁性体で構成されている。
次に実施の形態4の圧電共振子の構成について図13を参照しながら説明する。
次に本発明の実施の形態4の圧電共振子1の振動特性の評価方法について図13及び図14を参照しながら説明する。
実施の形態5では、図16、図18の調整用磁石10を、基部7の主面に対して平面方向にその配置位置を変えたときの、圧電共振子1の共振周波数の変化を調べた結果について説明する。
実施の形態6では、調整用磁石10を基部7の主面に対して垂直方向に配置位置を変えたときの、圧電共振子1の共振周波数の変化を調べた結果について説明する。
2,102 梁部
3,3a,3b,103 下部電極
4,4a,4b,104 圧電体
5,5a,5b,105 上部電極
6,106 錘部
7,7a,7b,107 基部
8,8a,8b,108 支持部
9 オシロスコープ
10,10a,10b 調整用磁石
11 磁石固定部材
12,12a,12b ストッパー
101 発電素子
109 制御装置
110 電源供給ライン
Claims (9)
- 基部と、
前記基部に固定された第1の支持部と、
前記第1の支持部に固定された梁部と、
前記梁部に固定された錘部と、
前記梁部の上に設けられた駆動部と、
前記基部の主面上を移動可能な調整用磁石と
を備え、
前記錘部は、磁石または磁性体で形成され、
前記梁部は、前記基部の主面に沿う方向に延在している
ことを特徴とする圧電共振子。 - 前記第1の支持部が、前記梁部の一方の端部に固定され、
前記錘部が、前記梁部の他方の端部に固定されている
ことを特徴とする請求項1に記載の圧電共振子。 - 前記調整用磁石は、前記梁部の中心軸に沿って移動可能とする
ことを特徴とする請求項2に記載の圧電共振子。 - 更に、第2の支持部を備えた請求項1記載の圧電共振子であって、
前記第1の支持部が、前記梁部の一端に固定され、
前記第2の支持部が、前記梁部の他端に固定され、
前記錘部が、前記梁部の中央部に固定されている
ことを特徴とする請求項1に記載の圧電共振子。 - 前記調整用磁石は、前記錘部の下方の位置から梁部の中心軸と直交する方向に沿って移動可能とする
ことを特徴とする請求項4に記載の圧電共振子。 - 前記駆動部は、下部電極と、圧電体と、上部電極とで構成され、
前記梁部の上に、前記下部電極、前記圧電体、前記上部電極が順に積層されている
ことを特徴とする請求項1に記載の圧電共振子。 - 前記調整用磁石は、電磁石で形成されている
ことを特徴とする請求項1に記載の圧電共振子。 - 前記調整用磁石と前記錘部との間隔が調整可能である
ことを特徴とする請求項1に記載の圧電共振子。 - 更に、ストッパーを備えた請求項1記載の圧電共振子であって、
前記ストッパーは、前記基部の主面上に配置され、
前記ストッパーの高さは、前記調整用磁石より高い
ことを特徴とする請求項1記載の圧電共振子。
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CN107395055B (zh) * | 2017-08-17 | 2018-11-16 | 浙江师范大学 | 一种新型车载定位跟踪系统用振动俘能器 |
CN107395055A (zh) * | 2017-08-17 | 2017-11-24 | 浙江师范大学 | 一种新型车载定位跟踪系统用振动俘能器 |
CN107565848A (zh) * | 2017-08-17 | 2018-01-09 | 浙江师范大学 | 一种低频车载间接激励式俘能器 |
JPWO2019073766A1 (ja) * | 2017-10-12 | 2020-11-05 | 富士フイルム株式会社 | 発電素子の製造方法、発電素子及び発電装置 |
WO2019073766A1 (ja) * | 2017-10-12 | 2019-04-18 | 富士フイルム株式会社 | 発電素子の製造方法、発電素子及び発電装置 |
JP7017578B2 (ja) | 2017-10-12 | 2022-02-08 | 富士フイルム株式会社 | 発電素子の製造方法、発電素子及び発電装置 |
US11751478B2 (en) | 2017-10-12 | 2023-09-05 | Fujifilm Corporation | Method of manufacturing power generation element, power generation element, and power generation apparatus |
KR102088245B1 (ko) * | 2018-11-01 | 2020-03-13 | 인하대학교 산학협력단 | 에너지 하베스팅 장치 |
JP2020156285A (ja) * | 2019-03-22 | 2020-09-24 | 株式会社ダイヘン | 発電装置及び送信装置 |
JP7244830B2 (ja) | 2019-03-22 | 2023-03-23 | 株式会社ダイヘン | 発電装置及び送信装置 |
JP7448207B2 (ja) | 2020-03-23 | 2024-03-12 | 国立大学法人金沢大学 | 振動発電デバイス及び振動発電デバイスの周波数調整方法 |
JP7356399B2 (ja) | 2020-04-20 | 2023-10-04 | 一般財団法人電力中央研究所 | 固有振動数を調整できる振動発電装置、及び、固有振動数を調整できる振動発電方法 |
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JPWO2013121759A1 (ja) | 2015-05-11 |
US9431994B2 (en) | 2016-08-30 |
JP6186597B2 (ja) | 2017-08-30 |
US20140327339A1 (en) | 2014-11-06 |
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