WO2013080238A1 - 複合センサおよびその製造方法 - Google Patents
複合センサおよびその製造方法 Download PDFInfo
- Publication number
- WO2013080238A1 WO2013080238A1 PCT/JP2011/006591 JP2011006591W WO2013080238A1 WO 2013080238 A1 WO2013080238 A1 WO 2013080238A1 JP 2011006591 W JP2011006591 W JP 2011006591W WO 2013080238 A1 WO2013080238 A1 WO 2013080238A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor
- angular velocity
- composite sensor
- wafer
- sealing
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
- B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/088—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing wafer-level encapsulation
Definitions
- the present invention relates to a physical quantity sensor used for measurement of a physical quantity and a method for manufacturing the physical quantity detection sensor.
- the physical quantity sensor has movable mechanism parts such as vibrating bodies and movable bodies by micromachining on silicon substrates and glass substrates, and a drive gap is provided on the cap substrate at locations corresponding to the movable mechanism parts such as vibrating bodies and movable bodies. Provided, these substrates are sealed by bonding, bonding or the like.
- the size of these movable mechanism parts is on the order of microns [ ⁇ m], and there is a problem of deterioration in characteristics due to the influence of air resistance, etc., and the pressure atmosphere corresponding to each movable mechanism part such as a vibrating body and movable body It is necessary to seal the sensing part.
- each of the acceleration sensor and the angular velocity sensor is sealed in a pressure atmosphere in which the characteristics do not deteriorate.
- a composite sensor is provided in which the sensing part of the acceleration sensor is sealed at atmospheric pressure, and the sensing part of the angular velocity sensor is sealed in vacuum, so that the characteristics do not deteriorate.
- the angular velocity sensor when the movable mechanism component is a vibrating body, and this vibrating body is driven to vibrate at a certain frequency, if an angular velocity is applied, a Coriolis force is generated. The vibrator is displaced by this Coriolis force. The angular velocity is detected by detecting the amount of displacement of the vibrating body due to this Coriolis force.
- the Coriolis force increases as the driving speed of the vibrating body increases, it is necessary to vibrate the vibrating body with a high frequency and a large amplitude of several ⁇ m in order to improve the detection sensitivity of the angular velocity sensor.
- the vibrating body manufactured by micromachining is formed with a small gap, when the driving atmosphere is atmospheric pressure, the influence of the damping effect of air (sealing gas) becomes large. This damping effect affects the vibration of the angular velocity sensor at a high frequency and a large amplitude, and decreases the detection sensitivity of the angular velocity sensor.
- an angular velocity sensor capable of high frequency and large amplitude can be obtained.
- the acceleration sensor is a movable body in which the movable mechanism parts are composed of weights, beams, etc., and when the acceleration is applied, the movable body is displaced. The acceleration is detected by detecting the displacement amount of the movable body. If the acceleration sensor is sealed in the same vacuum atmosphere as the angular velocity sensor, the movable body of the acceleration sensor has a less damping effect, so that a phenomenon that continues to vibrate occurs and the acceleration cannot be detected with high sensitivity.
- the acceleration sensor has a great damping effect, that is, is sealed in an air atmosphere.
- Patent Documents 1 to 3 As a known example of a composite sensor in which an acceleration sensor and an angular velocity sensor are combined, for example, there are technologies disclosed in Patent Documents 1 to 3.
- a through-hole air passage
- a damping agent is supplied from the air passage.
- the through hole is filled with solder, resin, etc., and the acceleration sensor is sealed in an air atmosphere and the angular velocity sensor is sealed in a vacuum atmosphere.
- an acceleration sensor and an angular velocity sensor are sealed in an atmospheric pressure atmosphere, and then a through hole is formed in the cap substrate or sensor substrate on the angular velocity sensor.
- the angular velocity sensor is sealed under the pressure of the CVD method, that is, in a vacuum atmosphere. With this method, the acceleration sensor is sealed in an atmospheric pressure atmosphere and the angular velocity sensor is sealed in a vacuum atmosphere.
- Patent Document 3 discloses a method of forming an air passage connected to the outer periphery of the wafer in order to seal the device with a prescribed pressure, and adjusting the internal pressure of the device through the air passage. Yes.
- Patent Document 3 can cope with sealing with one kind of pressure, but cannot cope with a device such as a composite sensor having different driving environments. Further, the distribution of the pressure in the device becomes large due to the difference in flow path resistance of the air passage connected to the outer periphery of the wafer.
- An object of the present invention is to provide a composite sensor with improved reliability and a method for manufacturing the same.
- the composite sensor wafer of the present invention includes an acceleration sensor and an angular velocity sensor arranged adjacent to each other, and a plurality of sensor wafers installed on the same substrate and a cap wafer for sealing the sensors.
- the composite sensor includes (1) a process of bonding a sensor wafer and a cap wafer to seal a sensing portion to form a composite sensor wafer, (2) a process of separating the composite sensor wafer into a composite sensor chip, and (3) composite A sensor chip, a wiring board having external input / output terminals, a step of mounting together with a circuit board for detection and correction, (4) a step of connecting the composite sensor chip, wiring board, and electrodes of the circuit board with wires, and (5) a resin package. In the process of sealing with a ceramic package or the like.
- FIG. 1 is an outline of bonding of a composite sensor wafer according to an embodiment of the present invention.
- FIG. 3 is an enlarged view of a composite sensor chip according to the first to third embodiments of the present invention.
- FIG. 4 is an enlarged view of through holes and bumps according to the first to third embodiments of the present invention.
- Sectional drawing of the acceleration sensor which concerns on 1st Embodiment of this invention.
- Sectional drawing of the angular velocity sensor which concerns on 2nd Embodiment of this invention.
- 10 is a mounting configuration of a composite sensor according to a fifth embodiment of the present invention. The mounting structure of the composite sensor which concerns on 6th Embodiment of this invention.
- a sensor wafer 1 in which a plurality of sensor chips 10 each including an acceleration sensor 11 and an angular velocity sensor 12 are arranged, and a cap wafer 2 in which a plurality of cap chips 20 in which an acceleration sensor gap 21 and an angular velocity sensor gap 22 are formed are arranged.
- a sensor wafer 1 in which a plurality of sensor chips 10 each including an acceleration sensor 11 and an angular velocity sensor 12 are arranged
- a cap wafer 2 in which a plurality of cap chips 20 in which an acceleration sensor gap 21 and an angular velocity sensor gap 22 are formed are arranged.
- FIG. 2 is a first embodiment according to the present invention, and is an enlarged view of a part of the sensor wafer 1 and the cap wafer 2 of FIG.
- the sensor chip 10 includes an acceleration sensor 11, an angular velocity sensor 12, a through hole 13 connected to the back surface of the wafer, and a bonding portion 14 bonded to the cap chip 20 on an SOI (Silicon ion insulator) substrate.
- An SOI substrate is a substrate in which a silicon oxide layer is formed between silicon and silicon.
- the movable body 111 of the acceleration sensor 11, the detection element 112, the vibration body 121 of the angular velocity sensor 12, and the detection element 122 are formed on the active layer side of the SOI substrate by Si DRIE (deep Reactive Ion Etching). Thereafter, the silicon oxide layer is removed to release the movable body 111, the vibrating body 121, and the detection elements 112 and 122.
- the movable body 111, the vibrating body 121, and the detection elements 112 and 122 are arranged with a wall 16 therebetween.
- the detection element 112 of the acceleration sensor 11, the vibrating body 121 of the angular velocity sensor, and the detection element 122 are connected to the electrode pad 17 on the back surface of the SOI substrate via a through electrode, and signals are input / output from the electrode pad 17. Thus, the drive and displacement amount are detected.
- the through-hole 13 in the wafer thickness direction is formed by forming an active layer and a handle layer by dry etching of silicon or the like. After forming an insulating film on the side wall of the through-hole 13 with a silicon oxide film or the like, the through-hole 13 is made of polysilicon. Then, the electrode is formed on the handle layer side. The handle layer side through hole 13 is formed larger than the active layer side through hole 13, and the handle layer side through hole is filled with polysilicon. At this time, since the through hole 13 on the handle layer side is larger than the through hole 13 on the active layer side, it is not completely embedded.
- the through hole 13 on the active layer side and the through hole 13 on the handle layer side can be opened to form a through hole in the wafer thickness direction. .
- the through hole 13 is configured to be installed in the joint portion 14.
- a through hole 13 having a thickness of about 20 ⁇ m or more on the handle layer side and about 10 ⁇ m on the active layer side is formed.
- an insulating film such as an oxide film is formed on the side wall of the through hole 13
- polysilicon is stacked by 5 ⁇ m or more by CDV to fill the through hole 13.
- polysilicon is also laminated on the side wall of the through hole on the handle layer side, but is not completely buried.
- the vibrating body 121 and the detection element 122 of the angular velocity sensor 12 are manufactured, the polysilicon embedded in the through hole 13 is penetrated by dry etching to form the through hole 13 in the wafer thickness direction.
- the through hole 13 is provided in the joint portion 14 on the angular velocity sensor 12 side, but the through hole 13 may be provided in the joint portion 14 on the acceleration sensor 11 side.
- the sensor chip 10 has a through hole 13
- the cap chip 20 has a plurality of bumps 23 formed around the through hole 13.
- the bump is formed with a size of ⁇ 10 ⁇ m or more and a height of 0.5 ⁇ m or more.
- FIGS. 4 is a cross-sectional view taken along the line AA ′ of the angular velocity sensor shown in FIG. 2
- FIG. 5 is a cross-sectional view taken along the line BB ′ of the acceleration sensor shown in FIG.
- the cap wafer 2 is made of glass, and includes a gap 21 of an acceleration sensor, a gap 22 of an angular velocity sensor, and a bump 23 installed in the joint portion 14 of the angular velocity sensor.
- An adsorbent 24 is formed in the gap 22 of the angular velocity sensor.
- the pressure adjusting adsorbent 24 is arranged in the gap 22 of the angular velocity sensor in this way, even if the active gas adsorbed on the cap chip 20 and the sensor chip 10 is desorbed, it adheres to the adsorbent 24. Therefore, the configuration does not affect the driving environment of the angular velocity sensor, and the pressure reliability in the angular velocity sensor can be improved.
- the bumps 23 formed on the cap chip 20 were formed by isotropic etching with buffered hydrofluoric acid to have a diameter of 10 ⁇ m or more and a height of 0.5 ⁇ m or more.
- the metal film may be formed by patterning by milling, lift-off, etching, or the like. When a metal film is used, it may be installed in the vicinity of a through hole formed on the side (active layer side) to which the SOI substrate is bonded.
- the gap 21 of the acceleration sensor and the gap 22 of the angular velocity sensor were formed by isotropic etching with hydrofluoric acid.
- the acceleration sensor gap 21 and the angular velocity sensor gap 22 may be formed by dry etching or the like. Thereafter, an adsorbent 24 (getter) was formed in the gap 22 of the angular velocity sensor.
- the sensor wafer 1 and the cap wafer 2 are aligned (FIGS. 4A and 5A), adjusted to an atmospheric pressure atmosphere with argon gas, and the sensor wafer 1 and the cap wafer 2 are aligned. A voltage was applied between them to perform anodic bonding at a bonding temperature of 250 ° C. (FIGS. 4B and 5B).
- the acceleration sensor 11 is bonded and sealed in an atmospheric pressure atmosphere.
- the bumps 23 inhibit the bonding and the gap 15 is formed. Note that the internal pressure of the angular velocity sensor can be adjusted via the air passage formed by the bumps 23 and the through holes 13.
- the flow path resistance can be in the thickness direction of the wafer (several tens to several hundreds ⁇ m).
- the air flow path (several to several tens of centimeters) connected to the outer periphery of the wafer can be 10 ⁇ 4 or less, and the flow resistance distribution can be reduced in the wafer surface. It is possible to make the pressure distribution very small.
- the bonding region becomes small, degas generated during bonding can be reduced, and the pressure distribution in the wafer surface can be reduced.
- the inside of the angular velocity sensor 12 is adjusted to a vacuum atmosphere through the through hole 13 and the gap 15.
- a voltage is applied between the sensor wafer 1 and the cap wafer 2 in a state where the bonding temperature is 500 ° C. or higher and a load is applied to the sensor wafer 1 and the cap wafer 2 in the second-stage sealing process.
- Anodically bonded (FIGS. 4C and 5C).
- the bump 23 is plastically deformed, the gap 15 around the through hole 13 of the angular velocity sensor 12 is crushed, and the joining proceeds, so that the angular velocity sensor 12 can be sealed in a vacuum atmosphere.
- the composite sensor wafer 3 in which the acceleration sensor 11 is sealed in an atmospheric pressure atmosphere and the angular velocity sensor 12 is sealed in a vacuum atmosphere is formed.
- the sensor wafer 1 and the cap wafer 2 are aligned, and then adjusted to atmospheric pressure with a rare gas or an inert gas such as argon in the first-stage sealing process.
- a voltage is applied to the sensor wafer 1 and the cap wafer 2 at ⁇ 400 ° C. to seal the acceleration sensor.
- the bonding is inhibited by the bumps 23 and the angular velocity sensor is not sealed.
- the sensor wafer 1 is adjusted in a state where the driving pressure (vacuum atmosphere) of the angular velocity sensor is adjusted with a rare gas such as argon or an inert gas and a load is applied at 500 ° C. or higher.
- a voltage is applied to the cap wafer 2 to seal the angular velocity sensor.
- the bumps 23 are deformed, the wafers are brought into contact with each other, and the angular velocity sensor is sealed in a vacuum atmosphere.
- a composite sensor that matches the driving environment of the first sensor and the second sensor can be formed by changing the pressure in the chamber in the first and second sealing steps.
- a material that is easily plastically deformed is selected according to temperature, load, and the like, and a plurality of bumps 23 are arranged around the through hole of the sensor wafer.
- it can seal by a series of joining processes, and can aim at highly reliable sealing and reduction of manufacturing cost.
- the through-hole 13 when the through-hole 13 is formed in the acceleration sensor 11, it seals in the vacuum atmosphere which is the drive pressure of the angular velocity sensor 12 in the 1st step
- FIGS. 6 is a cross-sectional view taken along the line AA ′ of the angular velocity sensor shown in FIG. 2
- FIG. 7 is a cross-sectional view taken along the line BB ′ of the acceleration sensor shown in FIG.
- the material of the cap wafer 2 was silicon, and the gap 21 of the acceleration sensor and the gap 22 of the angular velocity sensor were formed by anisotropic etching using a potassium hydroxide aqueous solution.
- the gap may be formed by isotropic etching using a mixed solution of hydrofluoric acid, nitric acid, and acetic acid, dry etching, or the like.
- films were formed in the order of Cr: 0.05 ⁇ m and Au: 0.5 ⁇ m by sputtering using a metal mask beside the gap 22 of the angular velocity sensor.
- an adsorbent 24 (getter) is formed as in the first embodiment.
- the first sealing step after the sensor wafer 1 and the cap wafer 2 are aligned (FIGS. 6A and 7A), the surfaces of the sensor wafer 1 and the cap wafer 2 are activated with argon plasma. Then, the atmosphere was adjusted to an atmospheric pressure with argon gas, the sensor wafer 1 and the cap wafer 2 were brought into contact with each other, and surface activated bonding was performed (FIGS. 6B and 7B). At this time, the acceleration sensor 11 is bonded and sealed in an atmospheric pressure atmosphere. However, in the angular velocity sensor 12, the bumps 23 inhibit the bonding and the gap 15 is formed.
- the inside of the angular velocity sensor 12 is adjusted to be in a vacuum atmosphere through the through hole 13 and the gap 15 connected to the back surface of the wafer.
- the driving pressure (vacuum atmosphere) of the angular velocity sensor is adjusted with a rare gas or inert gas such as argon.
- a rare gas or inert gas such as argon.
- the sensor wafer 1 and the cap wafer 2 are brought into contact with each other while the surface is activated again with argon plasma and a load is applied to the sensor wafer 1 and the cap wafer 2 in the second sealing step.
- surface activated bonding was performed (FIGS. 6C and 7C).
- the bump 23 is plastically deformed, the gap 15 of the through-hole 13 portion is crushed, and the joining proceeds, so that the angular velocity sensor 12 can be sealed in a vacuum atmosphere.
- a voltage is applied to the sensor wafer 1 and the cap wafer 2 in a second sealing process at 200 to 400 ° C. with a load that deforms the metal bumps applied. Then, the angular velocity sensor may be sealed.
- a groove having a diameter larger than the bump 23 and smaller than the height of the bump 23 may be formed in the sensor wafer 1 or the cap wafer 2 in accordance with the deformation of the bump 23.
- FIG. 8 is a cross-sectional view taken along the line AA ′ of the angular velocity sensor of FIG.
- the acceleration sensor is the same as in the second embodiment.
- the material of the cap wafer 2 was silicon, and the gap 21 of the acceleration sensor and the gap 22 of the angular velocity sensor were formed by anisotropic etching using a tetramethylammonium aqueous solution.
- the cap chip 20 has a configuration in which through holes 13 are formed by Si DRIE, and a plurality of bumps 23 are formed around the through holes 13.
- the bump is formed with a size of ⁇ 10 ⁇ m or more and a height of 0.5 ⁇ m or more.
- the surfaces of the sensor wafer 1 and the cap wafer 2 are activated with argon plasma and adjusted to an atmospheric pressure atmosphere with argon gas.
- the wafer 2 was brought into contact and surface activated bonding was performed (FIG. 8B).
- the acceleration sensor 11 is bonded and sealed in an atmospheric pressure atmosphere.
- the bumps 23 inhibit the bonding and the gap 15 is formed.
- the inside of the angular velocity sensor 12 is in a vacuum atmosphere through the through hole 13 connected to the back surface of the cap wafer and the gap 15.
- the surface is activated again with argon plasma, and in a state where a load is applied to the sensor wafer 1 and the cap wafer 2, the sensor wafer 1 and the cap wafer 2 are brought into contact with each other to perform surface activation bonding (FIG. 8C). )).
- the bump 23 is plastically deformed, the gap 15 of the through-hole 13 portion is crushed, and the joining proceeds, so that the angular velocity sensor 12 can be sealed in a vacuum atmosphere.
- FIG. 9 shows a fourth embodiment of the present invention, and is a cross-sectional view of a process of cutting and mounting the composite sensor wafer 3 described in Examples 1 to 3 to form a composite sensor.
- FIG. 9A is a CC ′ cross section of FIG.
- FIG. 9B the composite sensor wafer 3 is cut with a CO 2 laser and divided into composite sensor chips 30.
- the composite sensor chip 30 is disposed on the circuit board 40 by using a die attach film, a Si adhesive, or the like (FIG. 9D).
- the electrode pads 17 of the composite sensor chip 30, the electrodes 41 of the circuit board 40, and the external input / output electrodes 51 of the wiring board 50 are connected by wires 60.
- the composite sensor chip 30, the circuit board 40, the wiring board 50, the wire 60 made of Au or the like is resin-sealed by injection molding, potting, or the like (FIG. 9F).
- the resin material an epoxy resin in which particles such as silica are mixed is used.
- FIG. 10 shows a fifth embodiment of the present invention, and is a cross-sectional view of a process of cutting and mounting the composite sensor wafer 3 described in Examples 1 to 4 to form a composite sensor.
- FIG. 10A is a CC ′ cross section of FIG.
- the composite sensor wafer 3 is cut with a diamond grindstone and divided into composite sensor chips 30.
- the composite sensor chip 30 is disposed on the circuit board 40 using a die attach film, a Si adhesive material, or the like.
- the electrode pad 17 of the composite sensor chip 30, the electrode 41 of the circuit board 40, and the electrode 81 of the ceramic package 80 are connected by a wire 60 made of Au or the like.
- the lid 82 is soldered to the opening of the ceramic package 80 in an inert gas (FIG. 10F).
- the acceleration sensor and the angular velocity sensor on the same substrate can be sealed in their respective driving atmospheres, and a composite sensor that can be manufactured at a low cost and a manufacturing method thereof can be obtained.
Abstract
Description
2 キャップウエハ
3 複合センサウエハ
10 センサチップ
11 加速度センサ
12 角速度センサ
13 貫通孔
14 接合部
17 電極パッド
15 ギャップ
16 壁
20 キャップチップ
21 加速度センサ用ギャップ
22 角速度センサ用ギャップ
23 バンプ
24 吸着材(ゲッタ)
30 複合センサチップ
40 回路基板
41、81 電極
50 配線基板
51 外部入出力電極
60 ワイヤ
70 樹脂
80 セラミックスパッケージ
82 蓋
111 可動体
112、122 検出素子
121 振動体
Claims (6)
- 振動体を用いて角速度を検出する角速度検出部と可動体を用いて加速度を検出する加速度検出部とを壁で隔てた空間に設置し、角速度検出部の領域もしくは接合部に貫通孔を形成したセンサウエハと、それぞれのセンサに対応した箇所にギャップを形成し、角速度検出部に形成した貫通孔の近傍にバンプを形成したキャップウエハとから構成される複合センサであって、
第1の封止工程である大気圧雰囲気での加速度検出部の封止工程と、
第2の封止工程である真空雰囲気下で高温、高荷重における角速度検出部の封止工程と、切断により複合センサチップへの個片化を行う工程と、
外部入出力端子を有する配線基板上に、検出補正を行う回路基板を設置する工程と、
前記回路基板上に複合センサチップを設置する工程と、
前記複合センサチップ、前記回路基板、前記配線基板をワイヤで接続する工程と、
前記配線基板の一部を除いて、前記複合センサチップ、前記回路基板を樹脂封止する工程とからなることを特徴とする複合センサ。 - 振動体を用いて角速度を検出する角速度検出部と可動体を用いて加速度を検出する加速度検出部とを壁で隔てた空間に設置し、加速度検出部の領域もしくは接合部に貫通孔を形成したセンサウエハと、それぞれのセンサに対応した箇所にギャップを形成し加速度検出部に形成した貫通孔の近傍にバンプを形成したキャップウエハと、から構成される複合センサであって、
第1の封止工程である低真空雰囲気での角速度検出部の封止工程と、
第2の封止工程である大気圧雰囲気下で高温、高荷重における加速度検出部の封止工程と、
切断により複合センサチップへの個片化を行う工程と、
外部入出力端子を有する配線基板上に、検出補正を行う回路基板を設置する工程と、
前記回路基板上に前記複合センサチップを設置する工程と、
前記複合センサチップ、前記回路基板、前記配線基板をワイヤで接続する工程と、
前記配線基板の一部を除いて、前記複合センサチップ、前記回路基板を樹脂封止する工程とからなることを特徴とする複合センサ。 - 請求項1または2に記載の複合センサにおいて、
前記センサウエハは、シリコン基板、もしくは、シリコンとシリコンとの間にシリコン酸化層が形成された基板からなり、
前記キャップウエハは、ガラス基板もしくはシリコン基板からなることを特徴とする複合センサ。 - 請求項1または2に記載の複合センサにおいて、
前記バンプは、直径10μm以上であり高さ0.5μm以上であることを特徴とする複合センサ。 - 請求項4に記載の複合センサにおいて、
前記バンプは、ガラスもしくは金属からなることを特徴とする複合センサ。 - 請求項1または2に記載の複合センサにおいて、
同一平面上に1軸角速度検出部、2軸加速度検出部を設置し、角速度検出部と加速度検出部との検出軸が直行していることを特徴とする複合センサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2011/006591 WO2013080238A1 (ja) | 2011-11-28 | 2011-11-28 | 複合センサおよびその製造方法 |
US14/353,635 US20140260612A1 (en) | 2011-11-28 | 2011-11-28 | Composite Sensor and Method for Manufacturing The Same |
DE112011105884.5T DE112011105884T5 (de) | 2011-11-28 | 2011-11-28 | Verbundsensor und Verfahren zu seiner Herstellung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2011/006591 WO2013080238A1 (ja) | 2011-11-28 | 2011-11-28 | 複合センサおよびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2013080238A1 true WO2013080238A1 (ja) | 2013-06-06 |
Family
ID=48534774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/006591 WO2013080238A1 (ja) | 2011-11-28 | 2011-11-28 | 複合センサおよびその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20140260612A1 (ja) |
DE (1) | DE112011105884T5 (ja) |
WO (1) | WO2013080238A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015005597A (ja) * | 2013-06-20 | 2015-01-08 | 日立オートモティブシステムズ株式会社 | 樹脂封止型センサ装置 |
JP2016521643A (ja) * | 2013-06-12 | 2016-07-25 | トロニクス・マイクロシズテムズ・エス・ア | ゲッター層を有するmemsデバイス |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3028007A4 (en) | 2013-08-02 | 2017-07-12 | Motion Engine Inc. | Mems motion sensor and method of manufacturing |
US20170030788A1 (en) | 2014-04-10 | 2017-02-02 | Motion Engine Inc. | Mems pressure sensor |
US11674803B2 (en) * | 2014-06-02 | 2023-06-13 | Motion Engine, Inc. | Multi-mass MEMS motion sensor |
JP6409351B2 (ja) * | 2014-06-12 | 2018-10-24 | 株式会社デンソー | 物理量センサ |
WO2016090467A1 (en) | 2014-12-09 | 2016-06-16 | Motion Engine Inc. | 3d mems magnetometer and associated methods |
US10407299B2 (en) | 2015-01-15 | 2019-09-10 | Motion Engine Inc. | 3D MEMS device with hermetic cavity |
JP6372361B2 (ja) * | 2015-01-16 | 2018-08-15 | 株式会社デンソー | 複合センサ |
WO2016145535A1 (en) * | 2015-03-18 | 2016-09-22 | Motion Engine Inc. | Multiple degree of freedom mems sensor chip and method for fabricating the same |
JP6996459B2 (ja) | 2018-09-06 | 2022-01-17 | 三菱電機株式会社 | 物理量検出センサの製造方法、物理量検出センサ |
JP7383978B2 (ja) * | 2019-10-23 | 2023-11-21 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002005950A (ja) * | 2000-06-23 | 2002-01-09 | Murata Mfg Co Ltd | 複合センサ素子およびその製造方法 |
JP2010048688A (ja) * | 2008-08-22 | 2010-03-04 | Epson Toyocom Corp | ジャイロ振動子及びジャイロ振動子の製造方法 |
JP2010263530A (ja) * | 2009-05-11 | 2010-11-18 | Seiko Epson Corp | 電子部品及び圧電振動子 |
WO2011145729A1 (ja) * | 2010-05-21 | 2011-11-24 | 日立オートモティブシステムズ株式会社 | 複合センサおよびその製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6891239B2 (en) * | 2002-03-06 | 2005-05-10 | The Charles Stark Draper Laboratory, Inc. | Integrated sensor and electronics package |
US7138293B2 (en) * | 2002-10-04 | 2006-11-21 | Dalsa Semiconductor Inc. | Wafer level packaging technique for microdevices |
US20050205951A1 (en) * | 2004-03-18 | 2005-09-22 | Honeywell Internatioanl, Inc. | Flip chip bonded micro-electromechanical system (MEMS) device |
DE102004027501A1 (de) * | 2004-06-04 | 2005-12-22 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit mehreren Kavernen und Herstellungsverfahren |
US7971483B2 (en) * | 2008-03-28 | 2011-07-05 | Honeywell International Inc. | Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device |
US20100105168A1 (en) * | 2008-10-29 | 2010-04-29 | Freescale Semiconductor, Inc. | Microelecronic assembly and method for forming the same |
-
2011
- 2011-11-28 DE DE112011105884.5T patent/DE112011105884T5/de not_active Withdrawn
- 2011-11-28 WO PCT/JP2011/006591 patent/WO2013080238A1/ja active Application Filing
- 2011-11-28 US US14/353,635 patent/US20140260612A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002005950A (ja) * | 2000-06-23 | 2002-01-09 | Murata Mfg Co Ltd | 複合センサ素子およびその製造方法 |
JP2010048688A (ja) * | 2008-08-22 | 2010-03-04 | Epson Toyocom Corp | ジャイロ振動子及びジャイロ振動子の製造方法 |
JP2010263530A (ja) * | 2009-05-11 | 2010-11-18 | Seiko Epson Corp | 電子部品及び圧電振動子 |
WO2011145729A1 (ja) * | 2010-05-21 | 2011-11-24 | 日立オートモティブシステムズ株式会社 | 複合センサおよびその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016521643A (ja) * | 2013-06-12 | 2016-07-25 | トロニクス・マイクロシズテムズ・エス・ア | ゲッター層を有するmemsデバイス |
JP2015005597A (ja) * | 2013-06-20 | 2015-01-08 | 日立オートモティブシステムズ株式会社 | 樹脂封止型センサ装置 |
Also Published As
Publication number | Publication date |
---|---|
US20140260612A1 (en) | 2014-09-18 |
DE112011105884T5 (de) | 2014-08-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2013080238A1 (ja) | 複合センサおよびその製造方法 | |
JP5732203B2 (ja) | 複合センサの製造方法 | |
JP5298047B2 (ja) | 複合センサの製造方法 | |
US6559487B1 (en) | High-vacuum packaged microgyroscope and method for manufacturing the same | |
JP5092462B2 (ja) | 力学量センサ | |
JP4404143B2 (ja) | 半導体装置およびその製造方法 | |
JP5463173B2 (ja) | 角速度検出装置 | |
JP3985796B2 (ja) | 力学量センサ装置 | |
JP2013217667A (ja) | 物理量検出デバイス、物理量検出器、および電子機器、並びに物理量検出デバイスの製造方法 | |
JP2009241164A (ja) | 半導体センサー装置およびその製造方法 | |
WO2014136358A1 (ja) | 物理量センサの構造 | |
JP6209270B2 (ja) | 加速度センサ | |
JP5052459B2 (ja) | 半導体センサー装置 | |
JP5771921B2 (ja) | 封止型デバイス及びその製造方法 | |
JPWO2013080238A1 (ja) | 複合センサおよびその製造方法 | |
WO2016121453A1 (ja) | 半導体センサ装置 | |
JP5167848B2 (ja) | 支持基板及びそれを用いた静電容量型力学量検出センサの製造方法 | |
CN114249293A (zh) | 一种低应力六轴惯性传感器的封装结构及方法 | |
JPH01245164A (ja) | 加速度センサの製造方法 | |
JP5328479B2 (ja) | 圧力センサモジュール及び圧力センサパッケージ、並びにこれらの製造方法 | |
JP5328493B2 (ja) | 圧力センサモジュール及び圧力センサパッケージ、並びにこれらの製造方法 | |
JP2015210095A (ja) | 加速度センサ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11876678 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2013546825 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14353635 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1120111058845 Country of ref document: DE Ref document number: 112011105884 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 11876678 Country of ref document: EP Kind code of ref document: A1 |