WO2013076769A1 - Télémètre optique - Google Patents

Télémètre optique Download PDF

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Publication number
WO2013076769A1
WO2013076769A1 PCT/JP2011/006537 JP2011006537W WO2013076769A1 WO 2013076769 A1 WO2013076769 A1 WO 2013076769A1 JP 2011006537 W JP2011006537 W JP 2011006537W WO 2013076769 A1 WO2013076769 A1 WO 2013076769A1
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WO
WIPO (PCT)
Prior art keywords
signal
reference signal
modulation
sensitivity
frequency
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Application number
PCT/JP2011/006537
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English (en)
Japanese (ja)
Inventor
勝治 今城
俊平 亀山
幹夫 高林
平野　嘉仁
石村　栄太郎
Original Assignee
三菱電機株式会社
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Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to PCT/JP2011/006537 priority Critical patent/WO2013076769A1/fr
Publication of WO2013076769A1 publication Critical patent/WO2013076769A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal

Definitions

  • the present invention relates to an optical distance measuring device including a photodetector that receives intensity-modulated light with a single-element photodetector and down-converts the modulation frequency to a low frequency side.
  • devices described in, for example, Patent Document 1 and Patent Document 2 are known as devices for down-converting the modulation frequency of intensity-modulated light to the low frequency side with a photodetector and measuring the distance from the phase difference. ing.
  • intensity-modulated light is down-converted using a pair of adjacent semiconductor elements.
  • the gain of the photodetector is directly modulated, and the output signal is directly down-converted.
  • the photodetector is a photodetector that performs photoelectric conversion by a photovoltaic effect such as an avalanche photodiode (hereinafter referred to as APD (Avalanche Photo Diode))
  • APD avalanche photodiode
  • the light receiving sensitivity characteristic with respect to the bias applied voltage is generally non-linear. For this reason, when the bias application voltage is sinusoidal modulation, the light receiving sensitivity cannot be modulated with the sinusoidal wave, and the efficiency when downconverting to the difference frequency from the frequency of the modulated light becomes very poor. As a result, there has been a problem that the reception signal-to-noise ratio is lowered and the ranging accuracy is low.
  • the present invention has been made to solve such a problem.
  • An optical distance measuring device capable of improving the efficiency when down-converting to a difference frequency from the frequency of modulated light and performing distance measurement with high accuracy is provided.
  • the purpose is to provide.
  • An optical distance measuring device shapes and irradiates a first oscillator that generates a modulation reference signal, a light source that outputs intensity-modulated light based on the modulation reference signal, and light output from the light source.
  • a waveform shaping circuit that shapes the modulation waveform to linearly modulate the sensitivity of the photodetector based on the sensitivity modulation reference signal, and a photodetector that outputs the difference frequency of the received modulated signal as a received signal;
  • a reference signal output unit that outputs a difference signal between the modulation reference signal and the sensitivity modulation reference signal as a reference signal, a phase detector that obtains a phase difference from the received signal and the reference signal, and a phase difference signal output from
  • the optical distance measuring device is provided with a waveform shaping circuit for shaping a modulation waveform signal for linearly modulating the sensitivity of the photodetector based on the sensitivity modulation reference signal output from the second oscillator,
  • the photodetector modulates sensitivity based on the waveform-shaped modulated waveform signal.
  • FIG. 1 is a configuration diagram of the optical distance measuring device according to the first embodiment.
  • the optical distance measuring device according to the present embodiment includes a first oscillator 1, a second oscillator 2, a light source 3, a transmission optical system 4, a waveform shaping circuit 5, a reception optical system 6, and a photodetector 7.
  • An amplifier 8 a mixer 9, a band pass filter (hereinafter referred to as BPF (Band Pass Filter)) 10, a phase detector 11, and a signal processing unit 12.
  • BPF Band Pass Filter
  • the first oscillator 1 and the second oscillator 2 are oscillators that output two different frequencies, respectively, and the first oscillator 1 has a function of generating a modulation reference signal of the light source 3, and the second oscillator 2 Has a function of generating a bias modulation reference signal for modulating the sensitivity of the photodetector 7.
  • the light source 3 is a light source that oscillates laser light that has been intensity-modulated at a frequency based on the modulation reference signal of the first oscillator 1.
  • the transmission optical system 4 is a transmission optical system for shaping the light generated from the light source 3.
  • the waveform shaping circuit 5 is a circuit that generates a bias modulation signal for linearly modulating the bias of the photodetector 7 based on the bias modulation reference signal of the second oscillator 2.
  • the receiving optical system 6 is a receiving optical system for condensing the light received from the transmitting optical system 4 reflected by an object (not shown) on the photodetector 7.
  • the photodetector 7 is a light receiver that modulates sensitivity based on the bias modulation signal shaped by the waveform shaping circuit 5 and outputs an electric signal having a difference frequency from the modulation frequency of the received reflected light.
  • the amplifier 8 is an amplifier such as a transimpedance amplifier that amplifies the difference frequency electrical signal output from the photodetector 7.
  • the mixer 9 is a mixer that mixes the modulation reference signal output from the first oscillator 1 and the bias modulation reference signal output from the second oscillator 2.
  • the BPF 10 is a filter that transmits only the difference frequency among the signals generated by the mixer 9.
  • the mixer 9 and the BPF 10 form a reference signal output unit 13 that outputs a reference signal.
  • the phase detector 11 has a function of detecting a phase difference between the reference signal obtained by the reference signal output unit 13 and the reception signal obtained by the photodetector 7, and generating a phase signal indicating the phase difference.
  • the signal processing unit 12 has a function of calculating a distance value based on the phase signal from the phase detector 11.
  • FIG. 2 shows modulation waveforms output from the first first oscillator 1 and the second oscillator 2.
  • the first oscillator 1 generates a modulation reference signal A having a frequency f m1 as shown in FIG. 2A
  • the second oscillator 2 receives a bias modulation reference signal B having a frequency f m2 as shown in FIG. 2B.
  • the frequency f m1 of the modulation reference signal and the frequency f m2 of the bias modulation reference signal are different frequencies.
  • the modulation reference signal having the frequency f m1 output from the first oscillator 1 is input to the light source 3, and the light source 3 generates intensity-modulated light based on the modulation reference signal having the frequency f m1 .
  • the transmission optical system 4 shapes the intensity-modulated light generated by the light source 3 and irradiates the object.
  • the bias modulation reference signal having the frequency fm2 output from the second oscillator 2 is input to the waveform shaping circuit 5, and the waveform shaping circuit 5 outputs a bias modulation waveform C as shown in FIG.
  • the photodetector 7 is an APD
  • the bias voltage-sensitivity characteristic is generally a non-linear characteristic D as shown in FIG. Therefore, the sensitivity modulation characteristic E shown in FIG. 2D is obtained by giving a certain offset to the bias voltage as shown in FIG. 2C and adding a non-linear modulation waveform.
  • the reflected light from the object is collected by the receiving optical system 6 and received by the photodetector 7.
  • the difference frequency f m1 ⁇ f m2 from the received modulation frequency f m1 is obtained as shown in the output waveform F of FIG.
  • An electric signal is output, and the electric signal is amplified by the amplifier 8 to obtain a received signal.
  • FIG. 3 shows the characteristics of the input conversion noise level with respect to the frequency when a transimpedance amplifier is used as the amplifier 8.
  • the frequency characteristics of the amplifier and the transimpedance gain are inversely proportional, so that the transimpedance gain can be increased if the amplifier has a low frequency characteristic. Accordingly, the noise level is limited by the 1 / f noise determined by the transimpedance amplifier used and the thermal noise determined by the transimpedance gain (see the input conversion noise level characteristic G in the figure), and there is a minimum value of the input conversion noise level.
  • the frequencies f m1 and f m2 are set so that the difference frequency f m1 ⁇ f m2 becomes the minimum value.
  • the mixer 9 mixes the modulated reference signal and a bias modulation reference signal, for generating a difference frequency f m1 -f m @ 2 of frequency f m1 and frequency f m @ 2.
  • the reference signal is generated through the BPF 10 that transmits only the frequency band near the difference frequency f m1 -f m2 .
  • the obtained reference signal and received signal are input to the phase detector 11 and a signal corresponding to the phase difference between the two signals is output. Further, the signal processing unit 12 calculates the distance to the object from the phase difference signal.
  • the waveform shaping circuit 5 can linearly modulate the sensitivity of the photodetector 7.
  • the light is converted into a difference frequency f m1 ⁇ f m2 between the intensity modulation frequency f m1 of the transmission light and the sensitivity modulation frequency f m2 of the photodetector.
  • the frequencies f m1 and f m2 are set so that the difference frequency f m1 -f m2 becomes the minimum value of the input conversion noise level of the transimpedance amplifier.
  • the received signal level since the received signal level is maintained, the signal can be received under the condition that the signal-to-noise ratio of the received signal is optimal, and the ranging accuracy can be improved.
  • a laser is used as an example of the light source 3.
  • a direct modulation method in which a modulation signal is directly input to the light source 3 may be used, or an external modulation method configuration in which an intensity modulator is provided outside to obtain modulated light may be used.
  • the other light source 3 a light emitting diode (LED: Light Emitting Diode) or a super luminescent diode (SLD: Super Luminescent Diode) may be used.
  • LED Light Emitting Diode
  • SLD Super Luminescent Diode
  • an example in which an APD is used for the photodetector 7 has been shown.
  • a photodiode (PD) or a photomultiplier tube (PMT) is used.
  • the BPF 10 may be a low pass filter (LPF) because the difference frequency f m1 ⁇ f m2 may be selected.
  • LPF low pass filter
  • the difference frequency f m1 -f m2 is configured to be the minimum value of the input equivalent noise level of the transimpedance gain, but from the input equivalent noise level of the modulation frequency f m1 of the light source 3. Any frequency region that can be lowered may be used.
  • phase difference signal is output as a function of the phase detector 11, but it may have a function of outputting a signal corresponding to the amplitude.
  • the reflected light is received by irradiating the light.
  • the scanning optical system is used in the subsequent stage of the transmission optical system 4 to scan both the transmission beam and the reception visual field. It may be configured to. Further, for example, as shown in Japanese Patent Application Laid-Open No. 2010-271275, the reception field of view may be fixed and only the transmission beam may be scanned by the scanning optical system.
  • the modulation frequency of the intensity-modulated light is down-converted by the bias-modulated photodetector 7 to the low frequency side where the input equivalent noise level of the amplifier 8 is lowered. Therefore, it is possible to reduce the degradation of distance measurement accuracy due to the target distance difference and reflectance difference in each field of view of the adjacent light receiving element, which has been a problem in the prior art.
  • the sensitivity of the photodetector 7 can be linearly modulated even when an APD is used for the photodetector 7, and the received modulation signal is shifted to the low frequency side. Can be down-converted. Furthermore, by down-converting to the low frequency side, the received signal can be amplified in a frequency band where the amplifier noise (input converted noise current density) is low, and the signal band noise ratio can be improved. This makes it possible to convert the modulated light into an electrical signal and improve the accuracy of the distance measurement, increase the distance that can be measured, compared to a phase difference optical distance measuring device that detects the phase in the same frequency band, Cost reduction can be achieved by suppressing the output of the light source.
  • the first oscillator that generates the modulation reference signal, the light source that outputs the intensity-modulated light based on the modulation reference signal, and the light source A transmitting optical system for shaping and irradiating the output light, a receiving optical system for collecting reflected light from an object based on the irradiated light, and a second oscillator for generating a sensitivity modulation reference signal, and To modulate the sensitivity based on the modulated waveform signal and output the difference frequency with the received modulated signal as the received signal, and to linearly modulate the sensitivity of the photodetector based on the sensitivity modulation reference signal
  • the amplifier includes an amplifier that amplifies the difference frequency signal from the photodetector, and the difference frequency signal is lower than the input conversion noise level of the frequency of the modulation reference signal in the amplifier.
  • the modulation reference signal and sensitivity modulation reference signal are determined so that the frequency range is equivalent to the input-converted noise level, so the accuracy of distance measurement is increased, the measurable distance is increased, and the light source output is suppressed. The cost can be reduced.
  • FIG. The second embodiment is an example in which the light down-converting photodetector described in the first embodiment is formed in an array.
  • FIG. 4 is a block diagram showing the optical distance measuring device according to the second embodiment, and shows a case where two photodetectors 7a and 7b are used as an example.
  • the optical distance measuring device according to the second embodiment includes a first oscillator 1, a second oscillator 2, a light source 3, a transmission optical system 4, a waveform shaping circuit 5, a reception optical system 6, photodetectors 7a and 7b, and an amplifier 8a. 8b, mixer 9, BPF 10, phase detectors 11a and 11b, signal processing unit 12, multiplexer (hereinafter referred to as MUX circuit) 14, photodetectors 7a and 7b, amplifiers 8a and 8b, phase detector 11a. 11b is a photodetector array 15 having an array configuration. Further, the reference signal output unit 13 is configured by the mixer 9 and the BPF 10 as in the first embodiment.
  • each of the two photodetectors 7a and 7b is the same as that of the photodetector 7 of the first embodiment, and modulates the sensitivity of the photodetector based on the modulation waveform shaped by the waveform shaping circuit 5, and receives the signal.
  • An electric signal having a difference frequency from the modulation frequency of the reflected light is output.
  • the amplifiers 8a and 8b are connected to amplify the outputs of the photodetectors 7a and 7b, respectively.
  • the phase detectors 11a and 11b are configured to obtain phase information from the reference signal from the reference signal output unit 13 and the received signals a and b from the amplifiers 8a and 8b and output the phase information as phase signals a and b, respectively. Yes.
  • the MUX circuit 14 is a multiplexer that switches the phase signals a and b from the phase detectors 11 a and 11 b and outputs them to the signal processing unit 12. Since the configuration other than this is the same as that of the first embodiment, the same reference numerals are given to corresponding portions, and the description thereof is omitted.
  • the operation of the optical distance measuring device will be described. Since the basic operation as the optical distance measuring apparatus is the same as that of the first embodiment, only the characteristic operation of the second embodiment will be described. Reflected light from an object (not shown) is collected by the receiving optical system 6 and received by the photodetector 7a and the photodetector 7b. At this time, since the sensitivities of the photodetectors 7a and 7b are modulated at the frequency f m2 , the electric signal of the difference frequency f m1 ⁇ f m2 from the received modulation frequency f m1 as shown in FIG. Then, the electric signals are amplified by the amplifiers 8a and 8b to obtain a reception signal.
  • the frequencies f m1 and f m2 are set so that the difference frequency f m1 -f m2 becomes the minimum value of the input conversion noise level as in the first embodiment. It is the same.
  • the reference signal obtained by the reference signal output unit 13 and the received signals a and b which are the outputs of the amplifiers 8a and 8b are input to the phase detectors 11a and 11b, respectively, and the phase signal a corresponding to the phase difference between the two signals. And the phase signal b are output. Thereafter, the phase signal is switched by the MUX circuit 14, and the signal processing unit 12 calculates the distance to the object from the phase difference signal of the received signal measured by each of the photodetectors 7a and 7b.
  • the photodetector array 15 by using the photodetector array 15 using the plurality of photodetectors 7a and 7b, distance measurement in the light irradiation region can be performed without the need for a scanning optical system. At this time, a three-dimensional image of the object can be obtained by imaging the distance measurement value of each light receiving element.
  • a laser is used as an example of the light source 3.
  • a direct modulation method in which a modulation signal is directly input to the light source may be used, or an external modulation method configuration in which an intensity modulator is provided outside to obtain modulated light may be used.
  • a light emitting diode (LED) or a super luminescent diode (SLD) may be used as another light source.
  • the APD is used for the photodetectors 7a and 7b .
  • a photodiode (PD) or a photomultiplier tube (PMT) may be used.
  • the BPF 10 may be a low-pass filter (LPF) because the difference frequency f m1 -f m2 may be selected.
  • LPF low-pass filter
  • the amplifier 8a, 8b showed the example using the transimpedance amplifier, you may use a voltage amplifier.
  • the difference frequency f m1 ⁇ f m2 is configured to be the minimum value of the input equivalent noise level of the transimpedance gain, but is lower than the input equivalent noise level at the modulation frequency f m1 of the light source 3. Any frequency range may be used.
  • the phase difference signal is output as the function of the phase detectors 11a and 11b, but it may have a function of outputting a signal corresponding to the amplitude.
  • the waveform shaping circuit 5 is common to the photodetectors 7a and 7b of the photodetector array 15, the waveform shaping circuit 5 is also included in the photodetector array 15 and is associated with each of the photodetectors 7a and 7b. The structure to install may be sufficient. As a result, even if the sensitivity characteristics of the photodetectors 7a and 7b are different from each other, the waveform shaping circuit 5 can calibrate the nonlinear characteristics, and the difference between the minimum values of the input conversion noise levels of the amplifiers 8a and 8b.
  • the frequency f m1 -f m2 can be set.
  • the distance measurement is performed in the irradiation area without using the scanning optical system.
  • the reception field of view is fixed, and only the transmission beam is detected by the scanning optical system. It may be configured to scan.
  • the scanning optical system 16 and the synchronization circuit 17 are installed, and the MUX circuit 14 is synchronized. . That is, the synchronization circuit 17 synchronously controls the MUX circuit 14 so as to select the scanning direction of the scanning optical system 16 and the received signals from the photodetectors 7a and 7b that receive the reflected light from the object in the scanning direction.
  • the other configuration is the same as the configuration shown in FIG.
  • the photodetector array 15 includes the plurality of photodetectors 7a and 7b, the intensity and phase can be measured with one light receiving element. As a result, the number of effective pixels in the acquired image is not reduced.
  • the first oscillator that generates the modulation reference signal, the light source that outputs the intensity-modulated light based on the modulation reference signal, and the light source A transmitting optical system for shaping and irradiating the output light, a receiving optical system for collecting reflected light from an object based on the irradiated light, and a second oscillator for generating a sensitivity modulation reference signal, A plurality of photodetectors that modulate the sensitivity based on a signal of a given modulation waveform and output a difference frequency from the received modulation signal as a respective reception signal, and a plurality of light detections based on the sensitivity modulation reference signal A waveform shaping circuit that shapes the modulation waveform to linearly modulate the sensitivity of the detector, a reference signal output unit that outputs a difference signal between the modulation reference signal and the sensitivity modulation reference signal as a reference signal, and a plurality of received signals and reference signals Each phase difference A plurality
  • the invention of the present application can be freely combined with each embodiment, modified with any component in each embodiment, or omitted with any component in each embodiment. .
  • the optical distance measuring device includes the light receiver that down-converts the modulation frequency to the low frequency side, and is suitable for use in a laser radar device or the like.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

Selon la présente invention, un premier oscillateur (1) génère un signal de référence de modulation, et un second oscillateur (2) génère un signal de référence de modulation de sensibilité. Un circuit de mise en forme d'onde (3) met en forme un signal de forme d'onde de modulation pour moduler linéairement la sensibilité d'un photodétecteur (7) sur la base d'un signal de référence de modulation de sensibilité. Le photodétecteur (7) module la sensibilité sur la base du signal de forme d'onde de modulation à ondes mises en forme. Le signal obtenu par le photodétecteur (7) est amplifié par un amplificateur (8) et entré en tant que signal de réception dans un détecteur de phase (11). Le détecteur de phase (11) déterminer la différence de phase à partir du signal de réception et d'un signal adressé, et un processeur de signaux (12) mesure la distance jusqu'au sujet depuis le signal de différence de phase.
PCT/JP2011/006537 2011-11-24 2011-11-24 Télémètre optique WO2013076769A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106646502A (zh) * 2016-11-10 2017-05-10 深圳市摩天射频技术有限公司 一种新型激光测距设备及方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6437133A (en) * 1987-08-01 1989-02-07 Nec Corp Optical reception circuit
JPH02108907A (ja) * 1988-10-19 1990-04-20 Canon Inc 距離形状測定装置
JP2001507168A (ja) * 1997-06-06 2001-05-29 アルカテル アバランシフォトダイオード装置
JP2001289951A (ja) * 2000-04-11 2001-10-19 Yokogawa Electric Corp 距離測定装置
JP2005534940A (ja) * 2002-08-03 2005-11-17 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 光学式距離測定方法および光学式距離測定装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6437133A (en) * 1987-08-01 1989-02-07 Nec Corp Optical reception circuit
JPH02108907A (ja) * 1988-10-19 1990-04-20 Canon Inc 距離形状測定装置
JP2001507168A (ja) * 1997-06-06 2001-05-29 アルカテル アバランシフォトダイオード装置
JP2001289951A (ja) * 2000-04-11 2001-10-19 Yokogawa Electric Corp 距離測定装置
JP2005534940A (ja) * 2002-08-03 2005-11-17 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 光学式距離測定方法および光学式距離測定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106646502A (zh) * 2016-11-10 2017-05-10 深圳市摩天射频技术有限公司 一种新型激光测距设备及方法
CN106646502B (zh) * 2016-11-10 2023-12-08 深圳市摩天射频技术有限公司 一种激光测距设备及方法

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