WO2013051730A1 - Dispositif de génération de plasma - Google Patents

Dispositif de génération de plasma Download PDF

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Publication number
WO2013051730A1
WO2013051730A1 PCT/JP2012/076144 JP2012076144W WO2013051730A1 WO 2013051730 A1 WO2013051730 A1 WO 2013051730A1 JP 2012076144 W JP2012076144 W JP 2012076144W WO 2013051730 A1 WO2013051730 A1 WO 2013051730A1
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WO
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Prior art keywords
plasma
voltage
transformer
humidity
unit
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PCT/JP2012/076144
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English (en)
Japanese (ja)
Inventor
一利 竹之下
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株式会社サムスン横浜研究所
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Publication of WO2013051730A1 publication Critical patent/WO2013051730A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22—Ionisation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2441—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes characterised by the physical-chemical properties of the dielectric, e.g. porous dielectric
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/04—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating air, e.g. by convection
    • F25D17/042—Air treating means within refrigerated spaces
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/20—Method-related aspects
    • A61L2209/21—Use of chemical compounds for treating air or the like
    • A61L2209/212—Use of ozone, e.g. generated by UV radiation or electrical discharge
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/20—Electrodes used for obtaining electrical discharge
    • C01B2201/22—Constructional details of the electrodes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2317/00—Details or arrangements for circulating cooling fluids; Details or arrangements for circulating gas, e.g. air, within refrigerated spaces, not provided for in other groups of this subclass
    • F25D2317/04—Treating air flowing to refrigeration compartments
    • F25D2317/041—Treating air flowing to refrigeration compartments by purification
    • F25D2317/0415—Treating air flowing to refrigeration compartments by purification by deodorizing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators

Definitions

  • the present invention relates to a plasma generator.
  • the conventional technology aiming at air quality control in the living environment is generally physical control represented by a filter.
  • Physical control can capture relatively large dust and dirt floating in the air and bacteria and viruses depending on the size of the filter hole.
  • innumerable adsorption sites such as activated carbon
  • malodorous odor molecules can be captured.
  • a so-called passive plasma generator that reacts bacteria and viruses floating in the atmosphere (hereinafter referred to as floating bacteria) or malodorous substances (hereinafter referred to as odor) with active species within a limited volume in the device For example, Patent Document 1
  • the active species generated in the plasma generator are discharged into a closed space (for example, a living room, a toilet, a passenger car, etc.) with a volume larger than that of (1), and the active species in the atmosphere and floating bacteria and odors
  • So-called active-type plasma generator that reacts by collision with the plasma for example, Patent Document 2
  • the advantage of the passive plasma generator (1) is that high concentration of active species is generated by generating plasma in a small volume, so that a high bactericidal effect and deodorizing effect are expected.
  • the size of the device is increased, and ozone is likely to be generated as a by-product from the generation of plasma, so that ozone does not leak out of the device.
  • the advantage of the active plasma generator of (2) is that the device can be made relatively small.
  • bacteria attached to the surface of clothing and household goods hereinafter referred to as
  • sterilization of adhering bacteria and decomposition of odor adsorbed on the surface can be expected.
  • the disadvantage is that active species are diffused in a very large closed space compared to the volume of the device, so the concentration is low, so that only active species with a long life expectation of sterilization and deodorizing effects can be expected. It is a point that cannot be obtained. As a result, a deodorizing effect can hardly be expected in a space with a high odor concentration (a concentration about 10,000 times higher than the active species concentration).
  • a porous dielectric film is often used at the plasma generation site of the electrode, and therefore, under high humidity, the dielectric film itself absorbs moisture due to its hygroscopic action. The characteristics change, and the generation of plasma is hindered.
  • the dielectric film itself of the electrode tends to condense, the generation of plasma stops, and the sterilization and deodorization performance deteriorates. Therefore, it is difficult to maintain sterilization performance when the inside of the refrigerator remains in a high humidity state. This problem can also occur in a plasma generating part having an electrode that does not have a porous dielectric film.
  • a power supply circuit unit for applying a high voltage to the electrode of the plasma generating unit a circuit having a high voltage power source and a switching element provided between the high voltage power source and the plasma generating unit can be considered.
  • a high voltage is generated by a high voltage power source regardless of the on / off state of the element, which is not desirable from the viewpoint of safety.
  • it is a configuration that should be avoided when used in a home appliance such as a refrigerator.
  • the present invention is a technology that realizes both sterilization and deodorization of attached bacteria at the same time, and generates a plasma to generate a passive type function that deodorizes with active species and releases the active species to the outside of the device.
  • the main objective is not only to increase the amount of active species to be produced, but also to improve the safety and make it less susceptible to changes in humidity in order to have two active functions for sterilizing bacteria at the same time. Is.
  • a plasma generating apparatus comprising: a plasma electrode unit configured to: a power circuit unit that applies a voltage between the pair of electrodes; and a circuit control unit that controls the power circuit unit, wherein the power circuit unit includes: A transformer that boosts and outputs an input voltage; and a switching element that is provided in a primary winding of the transformer and uses a voltage waveform of the primary winding as a pulse waveform, and the circuit control unit includes the switching element
  • the peak value and pulse width of the output voltage of the secondary winding of the transformer are adjusted by inputting an on / off signal.
  • the power supply circuit unit is provided with a switching element in the transformer and the primary winding of the transformer, and the switching element is turned on and off, the output voltage of the secondary winding of the transformer is output.
  • the safety of the plasma generator can be improved.
  • the capacitance of the pair of electrodes increases due to an increase in humidity, and the applied voltage between the electrodes decreases, resulting in a decrease in the amount of active species generated.
  • the circuit control unit performs the secondary winding of the transformer. By adjusting the peak value and the pulse width of the output voltage, the applied voltage of the pair of electrodes that fluctuates with respect to the change in humidity can be kept constant.
  • the generation amount of active species can be maintained at a certain level, and the deodorization and sterilization performance can be maintained or improved under high humidity conditions.
  • the present invention is not easily affected by humidity under high humidity, it is preferably used for the purpose of generating active species by generating plasma and deodorizing or sterilizing the refrigerator while being placed in the refrigerator. be able to.
  • the fluid circulation holes are provided at the corresponding locations of the electrodes and these are configured to penetrate, the amount of plasma generated in the corresponding fluid through holes can be increased as much as possible. The contact area between the plasma and the fluid can be increased as much as possible.
  • each fluid flow hole formed in both electrodes is substantially at the same position when viewed from the direction of the face plate of the electrode.
  • the coordinate positions are substantially the same (x, y) in both electrodes.
  • a humidity detection unit that detects the humidity in the plasma electrode unit is included, and the circuit control unit responds to the detected humidity obtained by the humidity detection unit. It is desirable that the peak value and the pulse width of the output voltage of the secondary winding of the transformer are adjusted by inputting an on / off signal to the switching element.
  • the circuit control unit inputs an on / off signal to the switching element according to the detected humidity when the detected humidity obtained by the humidity detecting unit is in the range of 70% RH to 100% RH.
  • the circuit control unit When the detected humidity is in the range of 70% RH to 100% RH, the circuit control unit inputs an on / off signal to the switching element, thereby setting the pulse width of the output voltage of the secondary winding of the transformer to 1 ⁇ sec. It is desirable to adjust within a range of 100 ⁇ sec or less. In this range, it is particularly desirable to adjust the pulse width of the input voltage within a range of 50 ⁇ sec to 100 ⁇ sec. Thus, by adjusting the pulse width of the input voltage within the range of 1 ⁇ sec to 100 ⁇ sec, the generation amount of active species can be increased as much as possible while suppressing the generation of ozone.
  • a voltage detection unit configured to detect a voltage applied between the pair of electrodes, wherein the circuit control unit outputs an output voltage of the secondary winding of the transformer according to a detection voltage obtained by the voltage detection unit; It is desirable to adjust the peak value and the pulse width. If it is this, the applied voltage applied to a pair of electrodes can be adjusted according to factors other than humidity, such as odor intensity
  • An ozone amount detection unit for detecting an ozone amount in the plasma electrode unit, wherein the circuit control unit outputs an output voltage of the secondary winding of the transformer according to the detected ozone amount obtained by the ozone amount detection unit; It is desirable to adjust the peak value and the pulse width. In this case, the applied voltage applied to the pair of electrodes can be adjusted so that excessive ozone is not generated, and a low ozone operation can be enabled.
  • An ion amount detection unit that detects an ion amount in the plasma electrode unit, and the circuit control unit outputs an output voltage of the secondary winding of the transformer in accordance with the detected ion amount obtained by the ion amount detection unit; It is desirable to adjust the peak value and the pulse width. In this case, the applied voltage applied to the pair of electrodes can be adjusted so as to release a sufficient amount of ions.
  • a dielectric film is provided on at least one of the pair of electrodes.
  • a dielectric film is provided on at least one of the pair of electrodes.
  • the dielectric film When the dielectric film is porous, the electrical characteristics change due to the hygroscopic action of the dielectric film itself under high humidity, thereby inhibiting the generation of plasma.
  • the dielectric film itself of the electrode tends to condense, the generation of plasma stops, and the sterilization and deodorization performance deteriorates.
  • such a problem can be suitably solved by adjusting the peak value and pulse width of the output voltage of the secondary winding of the transformer.
  • the surface roughness of the dielectric film is preferably 0.1 ⁇ m or more and 100 ⁇ m or less. In this case, even when the pair of electrodes are stacked without using a spacer, a space in which plasma is generated can be formed depending on the surface roughness.
  • the flow velocity of the wind passing through the fluid circulation hole by the air blowing mechanism is in the range of 0.1 m / s to 30 m / s.
  • the voltage applied to each of the electrodes has a pulse shape, and its peak value Is preferably in the range of 100 V to 5000 V, and the pulse width is preferably in the range of 0.1 ⁇ s to 300 ⁇ s.
  • the present invention configured as described above, not only the amount of active species generated can be increased, but also safety can be improved, and it can be made less susceptible to changes in humidity.
  • the perspective view which shows one Embodiment of the plasma generator of this invention.
  • the schematic diagram which shows the effect
  • the top view which shows an electrode part.
  • Sectional drawing which shows an electrode part and an explosion-proof mechanism.
  • the expanded sectional view which shows the structure of the opposing surface of an electrode part.
  • the partial enlarged plan view and sectional view which show a fluid circulation hole and a penetration hole typically.
  • the schematic diagram which shows the specific structure of the constant voltage drive of a plasma generator.
  • the figure which shows the deodorizing performance of the plasma generator of the past and this embodiment The figure which shows the disinfection performance of the plasma generator of the past and this embodiment.
  • DESCRIPTION OF SYMBOLS 100 Plasma generator 2 ... Plasma electrode part 21 ... One electrode 22 ... The other electrode 21a, 22a ... Dielectric film
  • the plasma generator 100 is used for home appliances such as a refrigerator, a washing machine, a clothes dryer, a vacuum cleaner, an air conditioner, or an air cleaner, and the inside or outside of the home appliance. It is intended to sterilize airborne odors and adhering bacteria inside or outside of these products.
  • the plasma electrode unit 2 generates active species such as ions and radicals by using a micro-gap plasma (Micro-Gap-Plasma), and the outside of the plasma electrode unit 2
  • a blower mechanism 3 that is provided and forcibly sends wind (air flow) to the plasma electrode unit 2 and a flame that is provided outside the plasma electrode unit 2 and that is generated in the plasma electrode unit 2 does not propagate to the outside.
  • An explosion-proof mechanism 4 and a power source 5 for applying a high voltage to the electrode unit 2 are provided.
  • the plasma electrode unit 2 has a pair of electrodes 21 and 22 having dielectric films 21 a and 22 a provided on opposite surfaces, and a predetermined voltage is applied between the electrodes 21 and 22. Plasma discharge.
  • each of the electrodes 21 and 22 has a substantially rectangular shape in a plan view (when viewed from the face plate direction of the electrodes 21 and 22), and is made of stainless steel such as SUS304. Yes.
  • the application terminal 2T to which the voltage from the power supply 5 is applied is formed in the edge part of the electrodes 21 and 22 of the electrode part 2 (refer FIG. 3).
  • the voltage application method to the plasma electrode unit 2 by the power source 5 is such that the voltage applied to each of the electrodes 21 and 22 has a pulse shape, the peak value is in the range of 100 V to 5000 V, and the pulse width is 0.1 ⁇ m. It is within the range of not less than seconds and not more than 300 ⁇ sec. As shown in FIG. 7, when the pulse width is 300 ⁇ sec or less, the ion number density is measured, and the ozone concentration is decreased. As the pulse width is decreased, the ion number is increased and the ozone concentration is decreased. As a result, the amount of ozone generated is suppressed, and the active species generated in the plasma can be efficiently released without losing it with a filter or the like that is often found in the prior art. Can be realized in a short time.
  • dielectric films 21a and 22a are formed on the opposing surfaces of the electrodes 21 and 22 by applying a dielectric such as barium titanate.
  • the surface roughness (calculated average roughness Ra in the present embodiment) of the dielectric films 21a and 22a is not less than 0.1 ⁇ m and not more than 100 ⁇ m.
  • Other surface roughness may be defined using the maximum height Ry and the ten-point average roughness Rz. Note that the surface roughness of the dielectric films 21a and 22a can be controlled by a thermal spraying method.
  • Dielectrics applied to the electrodes include aluminum oxide, titanium oxide, magnesium oxide, strontium titanate, silicon oxide, silver phosphate, lead zirconate titanate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, and zinc oxide. Iron oxide, carbon nanotubes, etc. may be used.
  • fluid flow holes 21 b and 22 b are provided in corresponding portions of the electrodes 21 and 22, respectively, and are configured to communicate with and penetrate the electrodes 21 and 22.
  • at least a part of the contour of each corresponding fluid through-hole 21b, 22b is configured to be different from each other. That is, the plan view shape of the fluid circulation hole 21 b formed in one electrode 21 and the plan view shape of the fluid circulation hole 22 b formed in the other electrode 22 are different from each other.
  • the fluid circulation holes 21b and 22b respectively formed in the corresponding portions of the electrodes 21 and 22 have a substantially circular shape in plan view (see FIGS. 3 and 6).
  • the opening size (opening diameter) of the fluid circulation hole 21b formed in the first electrode 21 is smaller than the opening size (opening diameter) of the fluid circulation hole 22b formed in the other electrode 22 (for example, the opening diameter is 10 ⁇ m or more smaller).
  • the opening diameter is 10 ⁇ m or more smaller.
  • the fluid circulation hole 21 b formed in one electrode 21 and the fluid circulation hole 22 b formed in the other electrode 22 are formed concentrically.
  • the plurality of fluid circulation holes 21b formed in one electrode 21 all have the same shape
  • the plurality of fluid circulation holes 22b formed in the other electrode 22 all have the same shape. All of the fluid circulation holes 21 b formed in one electrode 21 are formed smaller than the fluid circulation holes 22 b formed in the other electrode 22.
  • the effect is shown as a substantially circular shape, but the opening is not limited to a circle, and may have any shape, and at least a part of the contour of each corresponding fluid through-hole is different from each other in plan view. It suffices to be configured.
  • the total opening area of the fluid circulation holes 21b and 22b formed in the electrodes 21 and 22 is in the range of 2% to 90% with respect to the total area of the electrodes 21 and 22, respectively.
  • the total opening area of the fluid circulation holes 22 b formed in the other electrode 22 is in the range of 2% to 90% with respect to the total area of the electrode 22.
  • the total opening area of the fluid circulation holes 21b formed in one electrode 21 may be in the range of 2% to 90%.
  • the plasma electrode portion 2 of the present embodiment is provided with a through hole 21c in one electrode 21 separately from the fluid circulation holes 21b and 22b, and this through hole 21c is the other electrode.
  • the opening on the opposite surface side is closed by 22.
  • what consists of the fluid circulation holes 21b and 22b formed in each said electrodes 21 and 22 may be hereafter called a complete opening, but what is formed by the through-hole 21c in comparison with this is a half opening. That's it.
  • the opening size of the through hole 21c is 10 ⁇ m or more smaller than the opening size of the fluid circulation hole 21b.
  • the through hole 21c is formed by replacing a part of the regularly provided fluid circulation hole 21b, and the through hole 21c is provided around the fluid circulation hole 21b (see FIG. 3).
  • the blower mechanism 3 is disposed on the other electrode 22 side of the plasma electrode unit 2 and forcibly sends air toward the fluid circulation holes 21b and 22b (completely open portions) formed in the plasma electrode unit 2. It has a blower fan. Specifically, in this blower mechanism 3, the flow velocity of the wind passing through the fluid circulation holes 21b and 22b is set in the range of 0.1 m / s to 30 m / s.
  • the explosion-proof mechanism 4 has a protective cover 41 disposed outside the pair of electrodes 21, 22, and a flame generated by plasma when combustible gas flows into the fluid circulation holes 21 b, 22 b. However, it is configured not to propagate outside the protective cover 41.
  • the explosion-proof mechanism 4 has a protective cover 41 having a metal mesh 411 disposed outside the pair of electrodes 21 and 22, and the wire diameter of the metal mesh 411 is within a range of 1.5 mm or less. And the aperture ratio of the metal mesh 411 is 30% or more.
  • the power supply 5 of this embodiment includes a power supply circuit unit 51 that applies a voltage between the pair of electrodes 21 and 22, and a circuit control unit 52 that controls the power supply circuit unit 51. Yes.
  • the power supply circuit unit 51 is provided in a step-up transformer (step-up transformer) 511 that steps up and outputs an input voltage (power supply voltage (for example, 12V)), and a primary winding 511a of the step-up transformer 511, and the primary winding 511a.
  • Switching element 512 having a pulse waveform as a voltage waveform. Specifically, a 12V power source is connected to one end of the primary winding 511a, and the other end of the primary winding 511a is connected to the ground.
  • the switching element 512 is a semiconductor switch such as a transistor such as an FET, and is provided between the winding portion of the primary winding 511a and the ground on the other end side of the primary winding 511a.
  • the circuit control unit 52 inputs an on / off signal to the switching element 512 in accordance with a detection voltage from the voltage detection unit 6 that detects an applied voltage applied between the pair of electrodes 21 and 22 of the plasma electrode unit 2.
  • the peak value and pulse width of the output voltage of the secondary winding 511b of the step-up transformer 511 are adjusted.
  • the circuit control unit 52 generates an on / off signal for the switching element 512 based on the deviation between the detected voltage from the voltage detection unit 6 and the target value (predetermined set value), and makes the switching element 512 a pulse width modulation method. (PWM) feedback control is performed.
  • PWM pulse width modulation method
  • the circuit control unit 52 is a dedicated or general-purpose computer having an input / output interface such as a CPU, a memory, and an ADC, and the CPU and peripheral devices operate in cooperation according to a control program stored in the memory.
  • the switching element 512 and the like are controlled. Note that the circuit configuration of the voltage detection unit 6 shown in FIG. 8 is an example, and can be changed as appropriate.
  • FIG. 9 and FIG. 10 show the humidity change characteristics of the applied voltage and the number of ions of the conventional plasma generator and the plasma generator of the embodiment.
  • the conventional plasma generator has the same basic configuration as the plasma generator of the present embodiment, and the driving method of the plasma electrode unit is different. That is, the plasma generator of this embodiment is a constant voltage drive system, and the conventional plasma generator is a constant power drive system.
  • the applied voltage decreases (740 V ⁇ 660 V) due to an increase in capacitance between the electrodes, and the number of ions decreases accordingly.
  • the applied voltage can be controlled to be substantially constant (740 V) even under high humidity conditions, and the number of ions can be kept at a constant level. is made of.
  • FIG. 11 shows the experimental results of the deodorizing performance of the plasma generator of this embodiment and the conventional plasma generator
  • FIG. 12 shows the experimental results of the sterilizing performance.
  • the deodorization performance evaluation procedure shown in FIG. 11 is performed by injecting methyl mercaptan (MMP) into a 100 L container, operating the plasma generator from an initial concentration of 0.4 ppm for 2 hours, and deodorizing depending on the ratio of the residual concentration to the initial concentration. The rate (%) was determined.
  • MMP methyl mercaptan
  • the deodorization rate of the plasma generator of this embodiment is about 50%
  • the deodorization rate of the conventional plasma generator is about 47%, and there is no significant change.
  • the deodorization rate of the conventional plasma generator decreases, while the deodorization rate of the plasma generator of the present embodiment increases.
  • the deodorization rate of the plasma generator of this embodiment is about 97%, even though the deodorization rate of the conventional plasma generator is about 16%.
  • the plasma generator of the present embodiment can not only maintain the deodorizing performance under the high humidity condition, which has been difficult in the prior art, but also improve the deodorizing performance under the high humidity condition.
  • the sterilization performance evaluation procedure shown in FIG. 12 is that the agar medium coated with E. coli is placed in a 100 L container, the plasma generator is operated for 6 hours, and the number of colonies after culturing is not operated. Compared to the case, the sterilization rate (%) was determined.
  • both the plasma generator of this embodiment and the conventional plasma generator have a sterilization rate of about 99%.
  • the sterilization rate of the conventional plasma generator decreases, while the sterilization rate of the plasma generator of the present embodiment is kept substantially constant.
  • the sterilization rate of the plasma generator of this embodiment is about 99%, even though the sterilization rate of the conventional plasma generator is about 3%.
  • the plasma generator according to the present embodiment can not only maintain the sterilization performance under high humidity conditions, which has been difficult in the past, but also achieve a certain level of sterilization performance from low humidity to high humidity. I understand.
  • the experiment for determining the change in the deodorization time was carried out by injecting methyl mercaptan into a 100 L container to obtain an initial concentration of 0.4 ppm, setting the humidity in the container to 85% RH, operating the plasma generator, and 100% Time was taken until deodorization was done.
  • the voltage applied to the plasma electrode unit 2 was 740 V, the frequency was 500 Hz, and the wind speed by the air blowing mechanism was 1 m / s.
  • the deodorization time was 700 minutes or more, but when the pulse width was 50 ⁇ s or more, the deodorization time was about 120 minutes, and the deodorization time was 1 It turns out that it becomes about / 6.
  • the power supply circuit unit 51 is provided with a switching element 512 in the primary winding 511a of the transformer 511 and the transformer 511, and the switching element 512 is turned on and off to output the output voltage of the secondary winding 511b of the transformer 511. Therefore, the safety of the plasma generator 100 can be improved. Furthermore, the capacitance of the pair of electrodes 21 and 22 increases due to an increase in humidity, and the applied voltage between the electrodes 21 and 22 decreases to reduce the amount of active species generated. At this time, the circuit control unit 52 By adjusting the peak value and pulse width of the output voltage of the secondary winding 511b of the transformer 511, the applied voltage of the pair of electrodes 21 and 22 that fluctuates with respect to the change in humidity can be kept constant. Thereby, the generation amount of active species can be maintained at a certain level, and the deodorization and sterilization performance can be maintained or improved under high humidity conditions.
  • the switching element 512 is controlled according to the detection voltage of the voltage detection unit 6, but as shown in FIG. 14, the humidity detection unit 7 that detects the humidity around the plasma electrode unit 2 is provided.
  • the switching element 512 may be controlled in accordance with the humidity detected by the humidity detector 7.
  • the circuit control unit 52 inputs an on / off signal to the switching element 512 in accordance with the detected humidity from the humidity detecting unit 7 that detects the humidity in the plasma electrode unit 2, whereby the secondary winding of the step-up transformer 511.
  • the peak value and pulse width of the output voltage of 511b are adjusted.
  • the circuit controller 52 inputs an on / off signal to the switching element 512 according to the detected humidity when the detected humidity obtained by the humidity detector 7 is in the range of 60% RH to 100% RH.
  • the pulse width of the output voltage of the secondary winding 511b of the transformer 511 is adjusted within a range of 1 ⁇ sec to 100 ⁇ sec.
  • the circuit control part 52 may control the switching element 512 using both the detection voltage and detection humidity from them. May be.
  • the step-up transformer 511 is input by inputting an on / off signal to the switching element 512 when the detected humidity is 60% RH or higher. It is desirable to adjust the peak value and pulse width of the output voltage of the secondary winding 511b. Further, as shown in FIGS.
  • FIG. 15 it has an ozone amount detection unit 8 that detects the ozone amount in the plasma electrode unit 2, and the circuit control unit 52 responds to the detected ozone amount obtained by the ozone amount detection unit 8.
  • the peak value and pulse width of the output voltage of the secondary winding 511b of the transformer 511 may be adjusted.
  • the plasma generator has an ion amount detection unit that detects the amount of ions in the plasma electrode unit, and the circuit control unit detects the amount of ions obtained by the ion amount detection unit according to the detected ion amount.
  • the peak value and pulse width of the output voltage of the secondary winding may be adjusted.
  • the amount of active species generated can be increased, but also safety can be improved and the influence of humidity change can be reduced.

Abstract

La présente invention porte sur un dispositif de génération de plasma (100) qui non seulement augmente la quantité de génération d'espèces actives, mais en outre améliore la sécurité et n'est guère sensible à des variations d'humidité. Le dispositif de génération de plasma (100) comprend : une unité d'électrodes de plasma (2) configurée de telle manière que des trous de circulation de fluide (21b, 22b) sont placés à des positions qui se correspondent mutuellement dans une paire d'électrodes (21, 22) et passent à travers ; une unité de circuit d'alimentation électrique (51) pour appliquer une tension entre les deux électrodes (21, 22) ; et une unité de commande de circuit (52) pour commander l'unité de circuit d'alimentation électrique (51). L'unité de circuit d'alimentation électrique (51) comprend un transformateur (511) pour survolter une tension d'entrée et délivrer la tension survoltée et un élément de commutation (512) placé dans un enroulement primaire (511a) du transformateur (511) et mettant en forme une forme d'onde de tension aux bornes de l'enroulement primaire (511a) en une forme d'onde impulsionnelle. L'unité de commande de circuit (52) applique un signal de blocage/déblocage à l'élément de commutation (512) et ajuste ainsi la valeur de crête et la largeur d'impulsion de la tension de sortie aux bornes d'un enroulement secondaire (511b) du transformateur (511).
PCT/JP2012/076144 2011-10-07 2012-10-09 Dispositif de génération de plasma WO2013051730A1 (fr)

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