WO2013046602A1 - Pompe pour gaz à haute température - Google Patents

Pompe pour gaz à haute température Download PDF

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Publication number
WO2013046602A1
WO2013046602A1 PCT/JP2012/005967 JP2012005967W WO2013046602A1 WO 2013046602 A1 WO2013046602 A1 WO 2013046602A1 JP 2012005967 W JP2012005967 W JP 2012005967W WO 2013046602 A1 WO2013046602 A1 WO 2013046602A1
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WO
WIPO (PCT)
Prior art keywords
electrode
temperature gas
cylindrical member
pump according
gas pump
Prior art date
Application number
PCT/JP2012/005967
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English (en)
Japanese (ja)
Inventor
義晴 中島
木村　憲明
一輝 星島
Original Assignee
三井造船株式会社
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Filing date
Publication date
Application filed by 三井造船株式会社 filed Critical 三井造船株式会社
Publication of WO2013046602A1 publication Critical patent/WO2013046602A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric

Definitions

  • the present invention relates to a hot gas pump for sucking and discharging hot gas.
  • a high-temperature gas pump that sucks a high-temperature gas, for example, a gas of 400 ° C. or higher and discharges it at a constant speed is used in a heat treatment furnace, a firing furnace, or the like.
  • the high-temperature gas is circulated in the furnace with the high-temperature gas pump, and the high-temperature gas accelerated by the high-temperature gas pump is used for stirring in the furnace, so the temperature inside the furnace is made uniform and the processing efficiency is improved.
  • Such a high-temperature gas pump generally uses a blower fan in which an impeller is provided on a rotary shaft connected to a rotary shaft of a rotary drive mechanism such as a motor.
  • a lubricant such as oil used for bearings of the rotating shaft volatilizes at a high temperature, so that the decomposed components of the oil may be mixed as impurities into the high-temperature gas blown.
  • a mechanism for cooling the rotating shaft and the bearing is provided, but the structure around the rotating shaft is complicated.
  • a magnet pump that includes a magnet that functions as a magnetic bearing in the bearing and is completely sealed inside the casing and a magnet pump that includes a rotating shaft is also used, but the structure is complicated. Moreover, since the magnetic force of the magnet used for the magnetic bearing is also reduced by the high temperature, it is difficult to use the magnetic bearing for a high-temperature gas pump for a long time. Although a cooling mechanism may be provided in order to suppress the high temperature of the magnet, the structure around the rotation axis becomes complicated.
  • Patent Documents 1 and 2 below disclose high-temperature gas blowing fans.
  • This gas blowing fan is used as a high-temperature gas pump in a solid oxide fuel cell (SOFC). Since the operating temperature of the solid oxide fuel cell is 800 to 1000 ° C., the hydrogen gas and natural gas used are also 800 to 1000 ° C. For this reason, also in the high-temperature gas blowing fan, a cooling mechanism is provided in order to solve the problem of volatilization of the lubricant such as oil in the bearing described above, and a magnetic bearing is used.
  • SOFC solid oxide fuel cell
  • the object of the present invention is to provide a high-temperature gas pump that can efficiently discharge a high-temperature gas with a simpler structure than the conventional one using a method different from the conventional one.
  • the hot gas pump is A pump container having an annular inner space and having a circulation path for flowing the introduced high-temperature gas along the circumferential direction of the annular inner space; A discharge nozzle for discharging hot gas circulating from a part of the annular internal space; An actuator having a plurality of electrode pairs provided at different positions on the circumference of a wall made of a dielectric in the annular internal space, each of the electrode pairs comprising a first electrode and a second electrode, Each of the first electrodes is exposed from the wall, the second electrode is embedded in the dielectric, and a voltage is applied between the first electrode and the second electrode so that the first electrode and the second electrode are applied.
  • An actuator that creates a flow of hot gas by generating plasma between the electrodes;
  • a power source for applying a voltage to the electrode pair.
  • the second electrodes of each of the electrode pairs are all provided on the same side in the circumferential direction of the circulation path with respect to the first electrode.
  • the annular inner space is formed on the outer surface of the first cylindrical member and the inner surface of the second cylindrical member whose central axis coincides with the central axis of the outer surface and has a diameter larger than the diameter of the first cylindrical member.
  • the electrode pair is provided on the inner side surface, the discharge nozzle path is branched radially outward from the circulation path, and one of the wall surfaces of the discharge nozzle is formed.
  • the part preferably extends smoothly from the outer surface of the circulation path.
  • first electrode and the second electrode are elongated electrodes that extend in the central axis direction of the first cylindrical member and are arranged in parallel to each other.
  • the annular inner space has a central axis that coincides with the outer surface of the first cylindrical member and the central axis of the first cylindrical member and has a diameter larger than the diameter of the first cylindrical member. It is preferable that a slit-like gas inlet for introducing high-temperature gas is provided in the outer surface of the wall surface of the annular inner space, which is surrounded by an inner surface and two flat surfaces.
  • the gas introduction port introduces the high temperature gas with an inclination in the circumferential direction of the annular internal space with respect to the wall surface of the annular internal space, and the inclination direction of the introduced high temperature gas is the circumferential direction of the above More preferably, the direction is toward the second electrode with respect to the first electrode.
  • the pump container is made of, for example, quartz or synthetic quartz.
  • An AC voltage is applied between the first electrode and the second electrode.
  • a pulse voltage is intermittently applied between the first electrode and the second electrode.
  • the high temperature gas pump has a controller that controls application timing of a pulse voltage applied to each of the plurality of electrode pairs.
  • FIG. 2 is an exploded perspective view of the hot gas pump shown in FIG. 1. It is a figure explaining the actuator used for the hot gas pump of this embodiment.
  • FIG. 4 is an enlarged view of a rectangular area of the actuator shown in FIG. 3. It is a schematic diagram explaining the principle of the actuator used for the hot gas pump of this embodiment.
  • Drawing 1 is an appearance perspective view of an example of the hot gas pump of an embodiment.
  • FIG. 2 is an exploded perspective view of the hot gas pump shown in FIG.
  • a high-temperature gas pump (hereinafter simply referred to as a pump) 10 shown in FIG. 1 is a pump that introduces a high-temperature gas having a temperature of 400 ° C. or higher and injects (discharges) it at a speed.
  • the pump 10 includes a pump container 12, a discharge nozzle 14, an actuator 16 (see FIG. 2), a power source 18, and a controller 20.
  • the pump container 12 includes an inner cylindrical member 12a, an outer cylindrical member 12b, and flat plate members 12c and 12d.
  • the central axis of the inner cylindrical member 12a coincides with the central axis of the outer cylindrical member 12b
  • the wall surface of the inner cylindrical member 12a and the wall surface of the outer cylindrical member 12b are side surfaces
  • the wall surface of the flat plate member 12c is a ceiling surface
  • An annular internal space 12e formed with a 12d wall surface as a floor surface is provided.
  • the annular inner space 12e has an outer cylindrical member 12b whose central axis coincides with the outer surface of the inner cylindrical member 12a and the central axis of the inner cylindrical member 12a and has a diameter larger than the diameter of the outer surface of the inner cylindrical member 12a. And is surrounded by the surfaces of the two flat plate members 12c and 12d.
  • a part of the inner cylindrical member 12a is provided with a gas introduction hole 12g in which the member is notched, and the outlet of the gas introduction hole 12g on the annular inner space 12e side is a slit shape for introducing high temperature gas into the annular inner space 12e.
  • the gas inlet 12f see FIG. 3
  • a gas supply pipe 22 (shown by a dotted line in FIG. 1) is joined to the inner side surface of the inner cylindrical member 12a, and a gas supply port (not shown) is provided in the gas supply pipe 22 at a position corresponding to the gas introduction hole 12g. Is provided. Therefore, the high temperature gas that has flowed through the gas supply pipe 22 from above shown in FIG.
  • the inner cylindrical member 12a, the outer cylindrical member 12b, and the flat plate members 12c and 12d are made of a dielectric material, and for example, quartz or synthetic quartz is used.
  • the annular inner space 12e of the pump container 12 serves as a circulation path for flowing the introduced high-temperature gas along the circumferential direction.
  • the discharge nozzle 14 discharges a part of high-temperature gas that is accelerated and circulated by an actuator 16 described later in the annular inner space 12e.
  • the discharge nozzle 14 is connected to a gas supply pipe (not shown) connected to a high-temperature gas with a heat treatment furnace, a baking furnace, or the like, and supplies the high-temperature gas to the heat treatment furnace, the baking furnace, or the like.
  • the path of the discharge nozzle 14 is a path branched radially outward from the high-temperature gas circulation path in the annular inner space 12e.
  • a part of the wall surface (the radially outer wall surface) smoothly extends from the outer surface of the circulation path, which is the inner surface of the outer cylindrical member 12b.
  • the term “smoothly extended” means that the tangential direction is the same at the connection position of the surface to be compared. The higher the velocity of the hot gas, the greater the velocity of the gas flows along the circumferential direction by centrifugal force.
  • the discharge nozzle 14 provided on the radially outer side in the annular inner space 12e can discharge a sufficiently accelerated high temperature gas.
  • the radially outer wall surface that is a part of the wall surface of the discharge nozzle 14 extends smoothly from the outer surface of the circulation path that is the inner surface of the outer cylindrical member 12b. (The radially outer wall surface) does not necessarily extend smoothly. However, in order to smoothly discharge the high temperature gas without reducing the speed of the high temperature gas, the wall surface (the radially outer wall surface) of the discharge nozzle 14 extends smoothly from the inner surface of the outer cylindrical member 12b. Is preferred.
  • the gas inlet 12f provided on the outer side surface of the inner cylindrical member 12a has a circumferential direction (from the radial direction (R direction) of the annular inner space 12e to the wall surface of the annular inner space 12e (
  • a gas introduction hole 12g is provided in the inner cylindrical member 12a so as to introduce a high-temperature gas inclined in the (C direction).
  • the gas introduction port 12f introduces the high-temperature gas with an inclination in the circumferential direction of the annular internal space 12e with respect to the wall surface of the annular internal space 12e.
  • the flow of the introduced high-temperature gas is a direction toward the second electrode with respect to the first electrode of the actuator 16 described later in the circumferential direction.
  • the inclination direction of the hot gas to be introduced is determined in the direction toward the second electrode with respect to the first electrode of the actuator 16, but the inclination direction of the hot gas is in the above direction. It is not limited.
  • the high temperature gas is introduced so that the high temperature gas flows in the direction in which the actuator 16 accelerates the high temperature gas.
  • the inclination direction of the introduced high temperature gas is based on the first electrode in the annular inner space 12e. A direction toward the second electrode is preferable.
  • the actuator 16 has a plurality of electrode pairs provided at different positions on the outer surface of the inner cylindrical member 12a, which is the inner wall surface of the annular inner space 12e, and accelerates the speed of the high-temperature gas.
  • six actuators 16 are provided on the outer surface of the inner cylindrical member 12a at substantially equal intervals. In this embodiment, six actuators 16 are used, but the number of actuators is not limited to six, and at least two or more may be used.
  • FIG. 3 is a diagram illustrating the actuator 16.
  • FIG. 4 is an enlarged view of the rectangular area shown in FIG.
  • Each of the electrode pairs of the actuator 16 includes a first electrode 16a and a second electrode 16b.
  • the first electrode 16a in each electrode pair is exposed from the outer surface of the inner cylindrical member 12a, which is a dielectric, and the second electrode 16b is embedded in the inner cylindrical member 12a.
  • the reason why the first electrode 16a is exposed from the wall surface and the second electrode 16b is embedded in the inner cylindrical member 12a is that the attractive force generated by the plasma generated between the first electrode 16a and the second electrode 16b, as will be described later. This is to accelerate the speed of the introduced hot gas.
  • the embedding depth that is, the distance from the wall surface to the uppermost surface of the second electrode 16b is, for example, 0.03 to 1.0 mm. This is preferable in terms of efficient generation.
  • the first electrode 16a and the second electrode 16b are elongated strip-like electrodes that extend in the central axis direction of the inner cylindrical member 12a and are arranged in parallel to each other, thereby effectively accelerating the speed of the hot gas. This is preferable.
  • Each of the second electrodes 16b of the actuator 16 is provided on the same side in the circumferential direction with respect to the first electrode 16a.
  • the direction from the first electrode 16a to the second electrode 16b is the clockwise rotation direction of the circumference of the annular internal space 12e, but may be the counterclockwise rotation direction.
  • the discharge nozzle 14 is provided so that the direction in which the discharge nozzle 14 extends is opposite to the direction shown in FIG.
  • the first electrode 16a and the second electrode 16b are spaced apart from each other by 0 to 3 mm in the circumferential direction, for example.
  • the first electrode 16a and the second electrode 16b are made of a conductor having a thickness of 0.3 to 1.0 mm, for example.
  • As a material of the first electrode 16a and the second electrode 16b for example, silver, copper, tungsten or the like is used.
  • the power source 18 applies a voltage between the first electrode 16 a and the second electrode 16 b of the actuator 16. For example, an alternating voltage of several hundred Hz to several tens kHz is applied between the first electrode 16a and the second electrode 16b. Alternatively, a pulse voltage of several hundred Hz to several tens kHz is applied between the first electrode 16a and the second electrode 16b.
  • the applied voltage is, for example, several kV to several tens kV in the case of an alternating voltage, and is several volts to several tens of kV in the case of a pulse voltage, for example.
  • the first electrode 16a and the second electrode 16b of each actuator 16 are connected to the power line 24, and the power line 24 is connected to the power source 18 across the flat plate member 12c.
  • the controller 20 controls the application of voltage so that the power source 18 applies a voltage between the first electrode 16a and the second electrode 16b.
  • the controller 20 can delay the application timing of the pulse voltage applied to each actuator 16 by using an arbitrary delay time.
  • the controller 20 can control the power supply 18 so as to delay the timing of applying the pulse voltage, with the time obtained by dividing the separation distance between the adjacent actuators 16 by the average speed of the hot gas as a delay time. .
  • the high temperature gas introduced through the gas inlet 12f creates a flow in the clockwise direction in the annular inner space 12e.
  • the pump 10 applies a voltage to the actuator 16 to generate plasma between the first electrode 16a and the second electrode 16b.
  • the velocity of the hot gas is accelerated by the force pulling the hot gas generated by the plasma.
  • the high temperature gas is sequentially accelerated by the actuator 16 provided in the annular inner space 12e, and the velocity is increased.
  • FIG. 5 is a schematic diagram illustrating the principle of the actuator 16.
  • the illustrated actuator 16 is provided not on a cylindrical curved surface but on a flat plate.
  • a case where a voltage is applied to the first electrode 16a and the second electrode 16b, which are a pair of electrodes provided on the dielectric plates 40 and 42, using the AC power supply 44 as the actuator 16 is shown.
  • the first electrode 16a is exposed to a high temperature gas.
  • the second electrode 16b is covered with the dielectric 42 and is not exposed to the high temperature gas.
  • plasma P is locally generated between the first electrode 16a and the second electrode 16b, and an induced flow is generated.
  • an induced flow can be generated by the mechanism described below.
  • formula (2) is expressed by the following formula (3).
  • the pressure p E is represented by the following formula (5).
  • Equation (5) means that pressure in the ⁇ z direction is generated in the vicinity of the first electrode 16a and the second electrode 16b.
  • the characteristic that the introduced high-temperature gas is pulled in the ⁇ z direction by the force caused by the plasma P using the pressure in the ⁇ z direction is used.
  • the pump 10 by adjusting the arrangement of the first electrode 16a and the second electrode 16b so that the region where the plasma is generated is directed in the direction in which the high temperature gas flows, the force generated due to the plasma P is increased to the high temperature gas.
  • the components in the flow direction can be included. Therefore, the pump 10 can efficiently accelerate the high-temperature gas using this force.
  • an AC voltage having a frequency of 13 kHz is applied to the actuator 16 including the first electrode 16a and the second electrode 16b at a voltage of 12 kV, and the first electrode 16a is viewed in the direction opposite to the direction in which the first electrode 16a is viewed.
  • the gas velocity was measured at a position 50 mm away from the two electrodes 16b, it was confirmed that the gas excitation velocity (velocity increase) was about 0.7 (m / sec).
  • the pump 10 uses the actuator 16 instead of the conventional blower fan having the bearing, thereby accelerating the flow of the introduced high-temperature gas by suction with plasma and circulating the high-temperature gas. After that, the high temperature gas can be discharged. Therefore, it is possible to provide a high-temperature pump that efficiently discharges high-temperature gas with a simpler structure than conventional ones.
  • the pump 10 does not have a mechanical driving part such as a blower fan, and the member used is quartz or synthetic quartz, and the metal used for the first electrode 16a and the second electrode 16b. Among them, it can be used as a pump.
  • the actuator 16 is provided on the outer side surface of the inner cylindrical member 12a, but may be provided on the inner side surface of the outer cylindrical member 12b. Furthermore, the actuator 16 can also be provided on the ceiling surface or floor surface of the annular internal space 12e. However, it is preferable to provide the actuator 16 on the outer surface of the inner cylindrical member 12a in that it can accelerate a high-speed gas having a low velocity that exists in the radial inner side of the annular inner space 12e.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma Technology (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

La présente invention porte sur une pompe pour gaz à haute température qui comprend les éléments suivants : un récipient de pompe ayant un espace intérieur annulaire ; une buse de refoulement destinée à refouler un gaz à haute température qui arrive d'une partie de l'espace intérieur annulaire ; un actionneur ayant une pluralité de paires d'électrodes disposées en différents emplacements sur la circonférence des surfaces de paroi de l'espace intérieur annulaire ; et une alimentation électrique servant à appliquer une tension aux paires d'électrodes. Chacune des paires d'électrodes de l'actionneur comprend une première électrode et une seconde électrode ; la première électrode de chaque paire d'électrodes fait saillie sur une paroi et la seconde électrode est noyée dans un corps diélectrique. Le flux de gaz à haute température est formé par application d'une tension à l'espace situé entre la première électrode et la seconde électrode afin de générer un plasma entre la première électrode et la seconde électrode. Toutes les secondes électrodes sont disposées du même côté des premières électrodes dans la direction circonférentielle.
PCT/JP2012/005967 2011-09-29 2012-09-20 Pompe pour gaz à haute température WO2013046602A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011214460A JP5453365B2 (ja) 2011-09-29 2011-09-29 高温ガス用ポンプ
JP2011-214460 2011-09-29

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WO2013046602A1 true WO2013046602A1 (fr) 2013-04-04

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016175402A (ja) * 2015-03-19 2016-10-06 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2020106024A (ja) 2018-12-27 2020-07-09 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． 送風装置、熱交換ユニット及び空気清浄ユニット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007317656A (ja) * 2006-04-28 2007-12-06 Toshiba Corp 気流発生装置、気流発生ユニット、翼、熱交換装置、マイクロマシーン、ガス処理装置、気流発生方法および気流制御方法
JP2008095685A (ja) * 2006-10-13 2008-04-24 General Electric Co <Ge> プラズマ強化急拡大型ガスタービンエンジン移行ダクト
JP2008229432A (ja) * 2007-03-19 2008-10-02 Yamaguchi Univ 機械的稼働部を持たない旋回流発生装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007317656A (ja) * 2006-04-28 2007-12-06 Toshiba Corp 気流発生装置、気流発生ユニット、翼、熱交換装置、マイクロマシーン、ガス処理装置、気流発生方法および気流制御方法
JP2008095685A (ja) * 2006-10-13 2008-04-24 General Electric Co <Ge> プラズマ強化急拡大型ガスタービンエンジン移行ダクト
JP2008229432A (ja) * 2007-03-19 2008-10-02 Yamaguchi Univ 機械的稼働部を持たない旋回流発生装置

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